Tail gas dehumidification device and tail gas dehumidification method

Abstract

The present invention discloses an exhaust gas dehumidification device and an exhaust gas dehumidification method. The device includes an upper cavity, a lower cavity installed under the upper cavity, and a liquid collecting box installed under the lower cavity. The upper cavity is cylindrical; the center of the top surface of the upper cavity has an air outlet, and the axis of the upper cavity has an air outlet pipe extending from the air outlet to the bottom surface of the upper cavity; the bottom surface of the upper cavity and the top surface of the lower cavity are separated by a partition, and the partition has a dripping port for discharging liquid into the lower cavity; the side wall of the upper cavity has a first transverse pipe arranged along the tangential direction, and the position of the interface between the first transverse pipe and the side wall of the upper cavity is higher than the position of the bottom of the air outlet pipe. The exhaust gas is cleaned by spraying with a nozzle; water vapor is reduced through the air inlet and the first transverse pipe arranged along the tangential direction in the upper cavity.

Description

Technical Field

[0001] The present invention relates to tail gas dehumidification, in particular to a tail gas dehumidification device and a tail gas dehumidification method. Background Art

[0002] The manufacturing of integrated circuits, display panels, LEDs, and semiconductors uses a large amount of corrosive, toxic, and flammable gases, such as fluorine, chlorine, silane, phosphine, and ammonia. These gases often remain in the exhaust after the process reaction and must be purified by exhaust gas treatment equipment to ensure production safety and meet environmental emission standards.

[0003] To meet the needs of process diversification and refined production line management, Local Scrubber (local exhaust gas treatment device) has been widely used for exhaust gas treatment of single machines or small areas. Its advantages include fast response time, small footprint, and flexible installation, effectively improving the decentralization and modularization of exhaust gas treatment.

[0004] However, in practical applications, the exhaust gas treated by Local Scrubber often contains significant amounts of water vapor. This water vapor originates as a byproduct of the process reaction. Without effective dehumidification, the highly humid gas can easily react with residual corrosive components to produce a highly acidic liquid, which can corrode metal pipes, fans, valves, and other downstream equipment, potentially compromising the safety and stability of exhaust gas treatment.

[0005] Although there are certain exhaust gas dehumidification methods in the existing technology, most of them are designed for large-scale centralized exhaust gas treatment systems and are difficult to directly adapt to the Local Scrubber system with limited volume and fast response. Summary of the Invention

[0006] In order to solve the above problems, the present invention provides a tail gas dehumidification device and a tail gas dehumidification method.

[0007] The present invention provides the following technical solution: an exhaust gas dehumidification device, comprising an upper cavity, a lower cavity installed under the upper cavity, and a liquid collecting box installed under the lower cavity, wherein the upper cavity is cylindrical; an air outlet is provided at the center of the top surface of the upper cavity, and an air outlet pipe is provided at the axis of the upper cavity, extending from the air outlet to the bottom surface of the upper cavity; the bottom surface of the upper cavity and the top surface of the lower cavity are separated by a partition, and the partition has a dripping port for discharging liquid into the lower cavity; the side wall of the upper cavity has a first transverse tube arranged along the tangential direction, and the first transverse tube is connected to the side wall of the upper cavity The position of the interface is higher than the bottom of the air outlet pipe; the side wall of the lower cavity has a second transverse tube, and the lower cavity also has at least one nozzle for spraying, and the nozzle is connected to the liquid supply port through a connecting tube, and the position of the interface between the second transverse tube and the side wall of the lower cavity is higher than the position of the nozzle; the bottom surface of the lower cavity has at least one exhaust gas inlet, and the bottom surface of the lower cavity is a porous mesh plate; the first transverse tube is connected to the upper tube, the upper tube is connected to the lower tube, the lower tube is connected to the second transverse tube, and the upper tube has an air inlet; the second transverse tube has a compressed air interface.

[0008] In the present application, the lower cavity and the liquid collecting tank are enclosed spaces, so that the air pressure in the lower cavity is greater than the air pressure in the upper cavity when the device is running; the exhaust gas inlet is connected to the external exhaust gas emission equipment through the opening in the side wall of the lower cavity or the liquid collecting tank; the liquid collecting tank can be disassembled to discharge the collected liquid, or a switchable liquid discharge port can be set on the side wall of the liquid collecting tank.

[0009] Furthermore, the upper cavity and the lower cavity are connected by a flange.

[0010] Furthermore, the fitting surfaces of the flanges of the upper cavity and the lower cavity have sealing members.

[0011] Furthermore, the upper cavity and the lower cavity are connected by welding.

[0012] Furthermore, the lower cavity and the liquid collecting tank are connected via a flange.

[0013] Furthermore, the lower cavity and the liquid collecting tank are connected by welding.

[0014] Furthermore, the upper tube and the air inlet, the upper tube and the lower tube, the lower tube and the second transverse tube, and the second transverse tube and the compressed air interface are all connected by clamps.

[0015] A method for exhaust gas dehumidification based on the above-mentioned exhaust gas dehumidification device includes the following steps: exhaust gas is passed into the lower cavity through the exhaust gas inlet, the compressed air interface is connected to the air compressor, and compressed air is passed into the lower cavity through the second transverse pipe, and at the same time, the nozzle sprays water mist to the exhaust gas, thereby cleaning the exhaust gas, and the cleaned gas mixed with compressed air enters the lower tube through the second transverse pipe, and then enters the upper tube, and at the same time, dry air is passed into the upper tube through the air inlet, thereby reducing the air humidity, and the mixed air is sent tangentially into the upper cavity through the first transverse pipe, thereby forming a cyclone around the inner wall of the upper cavity, thereby further separating water vapor; the separated air is discharged from the upper cavity through the outlet pipe through the outlet; the air separated in the upper cavity enters the lower cavity through the partition, and drips into the bottom of the lower cavity through the drip port, and enters the liquid collecting tank through the porous mesh plate.

[0016] In some embodiments, the air outlet may be connected to an air extraction device to accelerate the flow of air and increase the processing speed of the device.

[0017] The beneficial effects of the present invention are as follows:

[0018] (1) A pressure difference is generated between the lower cavity and the upper cavity through the exhaust gas inlet and the compressed air interface, so that the air flows from the lower cavity to the upper cavity;

[0019] (2) Clean the exhaust gas by spraying through the nozzle;

[0020] (3) reducing water vapor through the air inlet and the first transverse tube arranged tangentially to the upper cavity;

[0021] (4) The water vapor is concentrated by setting up partitions, drip ports, porous mesh plates and liquid collecting boxes, so that the device can operate continuously. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a cross-sectional view of an exhaust gas dehumidification device according to embodiment 1 of the present invention;

[0023] Figure 2 for Figure 1 A magnified view of part A in FIG;

[0024] Figure 3 This is a working principle diagram of the tail gas dehumidification method according to Example 2 of the present invention;

[0025] Figure 4 is a cross-sectional view of an exhaust gas dehumidification device according to embodiment 3 of the present invention;

[0026] Among them, the upper cavity 1, the air outlet 1-1, the air outlet pipe 1-2, the first flange 1-3, the lower cavity 2, the nozzle 2-1, the connecting pipe 2-2, the liquid supply port 2-3, the exhaust gas inlet 2-4, the porous mesh plate 2-5, the second flange 2-6, the collecting tank 3, the partition 4, the dripping port 4-1, the first transverse pipe 5, the second transverse pipe 6, the upper pipe 7, the lower pipe 8, the air inlet 9, the compressed air interface 10, the fastener 11, and the seal 12. DETAILED DESCRIPTION

[0027] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0028] The present invention cleans the tail gas by spraying the nozzle; and reduces the water vapor through the air inlet and the first transverse pipe arranged in the upper cavity along the tangential direction.

[0029] The embodiments of the present invention are further described below with reference to a number of embodiments.

[0030] Example 1

[0031] like Figure 1-Figure 2 , an exhaust gas dehumidification device, comprising an upper cavity 1, a lower cavity 2 installed under the upper cavity 1, and a liquid collecting box 3 installed under the lower cavity 2, the upper cavity 1 is cylindrical; the center of the top surface of the upper cavity 1 has an air outlet 1-1, and the axis of the upper cavity 1 has an air outlet pipe 1-2 extending from the air outlet 1-1 to the bottom surface of the upper cavity 1; the bottom surface of the upper cavity 1 and the top surface of the lower cavity 2 are separated by a partition 4, and the partition 4 has a dripping port 4-1 for discharging liquid to the lower cavity 2; the side wall of the upper cavity 1 has a first transverse pipe 5 arranged along the tangential direction, and the interface between the first transverse pipe 5 and the side wall of the upper cavity 1 is The position is higher than the bottom of the air outlet pipe 1-2; the side wall of the lower cavity 2 has a second transverse pipe 6, and the lower cavity 2 also has two nozzles 2-1 for spraying, and the nozzle 2-1 is connected to the liquid supply port 2-3 through the connecting pipe 2-2, and the position of the interface between the second transverse pipe 6 and the side wall of the lower cavity 2 is higher than the position of the nozzle 2-1; the bottom surface of the lower cavity 2 has two exhaust inlets 2-4, and the bottom surface of the lower cavity 2 is a porous mesh plate 2-5; the first transverse pipe 5 is connected to the upper pipe 7, the upper pipe 7 is connected to the lower pipe 8, and the lower pipe 8 is connected to the second transverse pipe 6, and the upper pipe 7 has an air inlet 9; the second transverse pipe 6 has a compressed air interface 10.

[0032] In this embodiment, the upper chamber 1 and the lower chamber 2 are connected by a first flange 1-3 and a second flange 2-6, which are fixed by a fastener 11. Similarly, the lower chamber 2 and the liquid collecting tank 3 are also connected by flanges and fixed by fasteners.

[0033] In this embodiment, the lower tube 8 is a corrugated tube, but an ordinary pipe can also be used.

[0034] In this embodiment, the upper tube 7 and the air inlet 9, the upper tube 7 and the lower tube 8, the lower tube 8 and the second transverse tube 6, and the second transverse tube 6 and the compressed air interface 10 are all connected by clamps. In some embodiments, other connection methods can also be used.

[0035] Example 2, as Figure 3 The exhaust gas dehumidification method of the exhaust gas dehumidification device of Example 1 includes the following steps: exhaust gas is passed into the lower cavity 2 through the exhaust gas inlet 2-4, the compressed air interface 10 is connected to the air compressor, thereby passing compressed air into the lower cavity 2 through the second transverse pipe 6, and at the same time, the nozzle 2-1 sprays water mist to the exhaust gas, thereby cleaning the exhaust gas, and the cleaned gas mixed with compressed air enters the lower tube 8 through the second transverse pipe 6, and then enters the upper tube 7, and at the same time, the air inlet 9 passes dry air into the upper tube 7, thereby reducing the air humidity, and the mixed air is sent tangentially into the upper cavity 1 through the first transverse pipe 5, thereby forming a cyclone around the inner wall of the upper cavity 1, thereby further separating water vapor; the separated air is discharged from the upper cavity 1 through the outlet pipe 1-2 and the outlet 1-1; the air separated in the upper cavity 1 enters the lower cavity 2 through the partition 4, and drips into the bottom of the lower cavity 2 through the drip port 4-1, and enters the collecting tank 3 through the porous mesh plate 2-5.

[0036] Example 3

[0037] like Figure 4 , an exhaust gas dehumidification device, comprising an upper cavity 1, a lower cavity 2 installed under the upper cavity 1, and a liquid collecting box 3 installed under the lower cavity 2, the upper cavity 1 is cylindrical; the center of the top surface of the upper cavity 1 has an air outlet 1-1, and the axis of the upper cavity 1 has an air outlet pipe 1-2 extending from the air outlet 1-1 to the bottom surface of the upper cavity 1; the bottom surface of the upper cavity 1 and the top surface of the lower cavity 2 are separated by a partition 4, and the partition 4 has a dripping port 4-1 for discharging liquid to the lower cavity 2; the side wall of the upper cavity 1 has a first transverse pipe 5 arranged along the tangential direction, and the interface between the first transverse pipe 5 and the side wall of the upper cavity 1 is The position is higher than the bottom of the air outlet pipe 1-2; the side wall of the lower cavity 2 has a second transverse tube 6, and the lower cavity 2 also has four nozzles 2-1 for spraying, and the nozzles 2-1 are connected to the liquid supply port 2-3 through the connecting tube 2-2. The position of the interface between the second transverse tube 6 and the side wall of the lower cavity 2 is higher than the position of the nozzle 2-1; the bottom surface of the lower cavity 2 has an exhaust inlet 2-4, and the bottom surface of the lower cavity 2 is a porous mesh plate 2-5; the first transverse tube 5 is connected to the upper tube 7, the upper tube 7 is connected to the lower tube 8, the lower tube 8 is connected to the second transverse tube 6, and the upper tube 7 has an air inlet 9; the second transverse tube 6 has a compressed air interface 10.

[0038] In this embodiment, the upper chamber 1 and the lower chamber 2 are connected by a first flange 1-3 and a second flange 2-6, which are fixed by a fastener 11. Similarly, the lower chamber 2 and the liquid collecting tank 3 are also connected by flanges and fixed by fasteners.

[0039] In this embodiment, the lower tube 8 is a corrugated tube, but an ordinary pipe can also be used.

[0040] In this embodiment, the upper tube 7 and the air inlet 9, the upper tube 7 and the lower tube 8, the lower tube 8 and the second transverse tube 6, and the second transverse tube 6 and the compressed air interface 10 are all connected by clamps. In some embodiments, other connection methods can also be used.

[0041] In some embodiments, the upper cavity 1 and the lower cavity 2 may be connected by welding, and the lower cavity 2 and the liquid collecting tank 3 may be connected by welding.

[0042] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to equivalent embodiments using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A tail gas dehumidification device, characterized in that: The invention comprises an upper cavity, a lower cavity installed under the upper cavity, and a liquid collecting box installed under the lower cavity, wherein the upper cavity is cylindrical; an air outlet is provided at the center of the top surface of the upper cavity, and an air outlet pipe is provided at the axis center of the upper cavity, extending from the air outlet to the bottom surface of the upper cavity; the bottom surface of the upper cavity and the top surface of the lower cavity are separated by a partition, and the partition has a dripping port for discharging liquid into the lower cavity; the side wall of the upper cavity has a first transverse tube arranged along the tangential direction, and the position of the interface between the first transverse tube and the side wall of the upper cavity is higher than the air outlet pipe The bottom position of the lower cavity; the side wall of the lower cavity has a second transverse tube, and the lower cavity also has at least one nozzle for spraying, and the nozzle is connected to the liquid supply port through a connecting tube, and the position of the interface between the second transverse tube and the side wall of the lower cavity is higher than the position of the nozzle; the bottom surface of the lower cavity has at least one exhaust gas inlet, and the bottom surface of the lower cavity is a porous mesh plate; the first transverse tube is connected to the upper tube, the upper tube is connected to the lower tube, the lower tube is connected to the second transverse tube, and the upper tube has an air inlet; the second transverse tube has a compressed air interface.

2. The exhaust gas dehumidification device according to claim 1, characterized in that: The upper cavity and the lower cavity are connected through a flange.

3. The exhaust gas dehumidification device according to claim 2, characterized in that: The mating surfaces of the flanges of the upper cavity and the lower cavity are provided with sealing elements.

4. The exhaust gas dehumidification device according to claim 1, characterized in that: The upper cavity body and the lower cavity body are connected by welding.

5. The exhaust gas dehumidification device according to claim 1, characterized in that: The lower cavity and the liquid collecting tank are connected through a flange.

6. The exhaust gas dehumidification device according to claim 1, characterized in that: The lower cavity and the liquid collecting tank are connected by welding.

7. The exhaust gas dehumidification device according to claim 1, characterized in that: The upper tube and the air inlet, the upper tube and the lower tube, the lower tube and the second transverse tube, and the second transverse tube and the compressed air interface are all connected through clamps.

8. A tail gas dehumidification method based on the tail gas dehumidification device according to claim 1, characterized in that: The method comprises the following steps: introducing exhaust gas into the lower cavity through the exhaust gas inlet, connecting the compressed air interface to the air compressor, thereby introducing compressed air into the lower cavity through the second transverse pipe, and spraying water mist on the exhaust gas with a nozzle to clean the exhaust gas. The cleaned gas mixed with the compressed air enters the lower tube through the second transverse pipe and then enters the upper tube. At the same time, the air inlet introduces dry air into the upper tube to reduce the air humidity. The mixed air is sent tangentially into the upper cavity through the first transverse pipe, thereby forming a cyclone around the inner wall of the upper cavity, thereby further separating water vapor. The separated air is discharged from the upper cavity through the air outlet pipe and the air outlet; the air separated in the upper cavity enters the lower cavity through the partition, drips into the bottom of the lower cavity through the dripping port, and enters the liquid collecting tank through the porous mesh plate.

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