A phosphorus trifluoride sample analysis sampling system

Abstract

The application discloses a kind of phosphorus trifluoride sample analysis sampling systems, comprising: sample inlet pipe is connected to storage steel bottle, and the discharge end is equipped with feed valve;Nitrogen replacement pipe is connected to the discharge end of feed valve in parallel;Fixed pipe, one end is connected to the discharge end of feed valve, and the other end is connected with sample discharge pipe downward;Filter, including first sealing bearing and second sealing bearing with fixed ring plate, the fixed ring plate on first sealing bearing is sealed with baffle, corresponding filter plate is fixed between fixed ring plate in zigzag shape;Dust removal mechanism, including dust removal gap arranged at the bottom side of the outer ring of first sealing bearing, the bottom of fixed pipe is connected with dust removal pipe downward, and the outer end of filter plate is fixed with spiral dust removal plate;Driving mechanism is used to drive baffle to rotate.The application can safely and conveniently sample phosphorus trifluoride, and send sample to corresponding detection instrument for analysis, and can effectively ensure sampling analysis precision.

Description

Technical Field

[0001] The present invention relates to the field of detection of phosphorus trifluoride samples, and specifically refers to a sampling system for analyzing phosphorus trifluoride samples. Background Art

[0002] Phosphorus trifluoride can be used as a fluorinating agent, capable of ion transfer, and is applied in fields such as the electronics industry, battery manufacturing, polymer materials, and catalysts. In semiconductor manufacturing, phosphorus trifluoride becomes a plasma gas under microwave action and is doped into the semiconductor, which can significantly improve the semiconductor performance. The semiconductor industry is very sensitive to product purity and impurity content, and it is necessary to accurately quantify the impurity concentration. Therefore, it is necessary to accurately analyze the impurity components in phosphorus trifluoride through a gas chromatograph and a Fourier transform infrared spectrometer.

[0003] Since phosphorus trifluoride is a toxic and corrosive gas under normal conditions, there are certain difficulties in sampling and analysis. Existing conventional sampling and analysis methods and instruments cannot be directly applied; moreover, when existing conventional sampling and analysis methods and instruments are used to sample and analyze phosphorus trifluoride samples, not only are different batches of materials prone to cross-contamination, but also the particles in the sample gas and nitrogen cannot be accurately filtered sufficiently, resulting in the sampling and analysis accuracy being difficult to meet the design requirements.

[0004] Therefore, the research objective of the present invention is to design a sampling system for analyzing phosphorus trifluoride samples that can safely and conveniently sample phosphorus trifluoride and send it to the feed end of the corresponding detection instrument for analysis; and can prevent cross-contamination of different batches of materials during the sampling process, and can also effectively and accurately filter the particles in the sample gas and nitrogen, thereby effectively ensuring the sampling and analysis accuracy. Summary of the Invention

[0005] In view of the above technical problems existing in the prior art, the present invention provides a sampling system for analyzing phosphorus trifluoride samples, which can effectively solve the technical problems existing in the above prior art.

[0006] The technical solution of the present invention is as follows: A sampling system for analyzing phosphorus trifluoride samples, comprising: A sampling tube, the feed end of which is connected to a corresponding storage cylinder, and a corresponding feed valve is fixedly installed at the discharge end; A nitrogen replacement tube, the feed end of which is connected to an external nitrogen source, and the discharge end is connected in parallel to the discharge end of the feed valve through a corresponding nitrogen replacement valve; A fixed tube, which is horizontal and has both ends closed. One upper end of the fixed tube is connected to the discharge end of the feed valve, and the other end of the fixed tube is connected downward to a sample discharge tube fixedly installed with a pressure regulating valve and a discharge valve; The filter includes a first sealed bearing fixed in a fixed tube outside the discharge end of the feed valve, and a second sealed bearing fixed in a fixed tube inside the sample discharge tube. The inner rings of the first sealed bearing and the second sealed bearing are respectively fixedly connected with corresponding fixed ring plates. A corresponding baffle is hermetically fixed on the fixed ring plate installed on the first sealed bearing, and corresponding filter plates are fixedly connected in a serrated shape between the fixed ring plates installed on the first sealed bearing and the second sealed bearing; The dust removal mechanism includes a dust removal notch provided on the bottom side of the outer ring of the first sealed bearing. The bottom of the fixed tube outside the dust removal notch is connected downward with a dust removal tube equipped with a dust removal valve, and the outer end of the filter plate is fixedly connected with a corresponding spiral dust removal plate; The driving mechanism is used to drive the baffle to rotate, thereby driving the filter to rotate, so that the spiral dust removal plate rotates to output the filtered particulate matter outwards through the dust removal notch and discharge it through the dust removal tube.

[0007] A pressure gauge is installed on the pressure regulating valve, and a vent pipe equipped with a vent valve and a vacuum extraction pipe equipped with a vacuum extraction valve are connected in parallel on the sample discharge pipe between the pressure regulating valve and the discharge valve. The vent pipe is connected to the external tail gas treatment system, and the vacuum extraction pipe is connected to the external vacuum pump.

[0008] The driving mechanism includes a driving impeller fixedly connected to the center of the baffle, and a high-pressure nitrogen outlet pipe connected to the upper side of the driving impeller. The inlet end of the high-pressure nitrogen outlet pipe is connected to an external nitrogen source through a first booster pump, and the outlet end of the high-pressure nitrogen outlet pipe faces the driving impeller.

[0009] A backflush pipe connected to the nitrogen replacement pipe is hermetically penetrated through the fixed tube. A corresponding backflush valve is fixedly installed on the backflush pipe. The backflush pipe is arranged outside the fixed ring plate not fixedly connected with the baffle, and the part of the backflush pipe located inside the fixed tube is horizontally arranged and is provided with corresponding first backflush air outlets at intervals downward.

[0010] Alternatively, the driving mechanism includes a driving inlet pipe hermetically connected and penetrated outside the fixed ring plate not fixedly connected with the baffle. The driving inlet pipe is connected to an external nitrogen source through a second booster pump. The part of the driving inlet pipe located inside the fixed tube is horizontally arranged at the axis of the fixed tube and is provided with corresponding second backflush air outlets at intervals downward. A corresponding driving tube is hermetically penetrated and fixedly connected to the center of the baffle. One end of the driving tube is rotatably sleeved on the driving inlet pipe through a sealed bearing, and the other end of the driving tube is closed and is vertically connected with a plurality of arc-shaped jet reaction tubes at intervals outward. The outlet ends of the jet reaction tubes are respectively arranged in a constricted shape.

[0011] Corresponding V-shaped metal frameworks are arranged on the fixed ring plate at intervals and staggered, the filter plates are fixedly connected between two adjacent V-shaped metal frameworks in a zigzag arrangement, and the spiral dust removal plate is fixedly connected to the V-shaped metal framework.

[0012] The filter holes of the filter plate do not exceed 0.3 μm.

[0013] A corresponding high-pressure-resistant one-way valve is also fixedly installed on the nitrogen displacement pipe.

[0014] The discharge end of the sample discharge pipe is externally connected in parallel with a group of discharge branch pipes equipped with distribution valves; a group of the discharge branch pipes are respectively connected to the feed ends of a gas chromatograph and a Fourier transform infrared spectrometer.

[0015] An arc-shaped mask cover for covering the dust removal pipe is fixedly connected to the fixed pipe, and a gap is provided between the inner end of the arc-shaped mask cover and the first sealing bearing to form an air flow channel; a corresponding siphon pipe is connected in parallel to the dust removal pipe, and the end of the siphon pipe not connected to the dust removal pipe is connected to the fixed pipe below the dust removal notch.

[0016] Advantages of the present invention: 1) The analysis sampling system of the present invention is additionally provided with a fixed pipe, which is horizontal and closed at both ends. One end of the fixed pipe is connected to the discharge end of the feed valve at the upper part, and the other end is connected downward with a sample discharge pipe at the lower part. Then, a filter is additionally arranged in the fixed pipe, which includes a first sealing bearing fixedly connected to the outside of the discharge end of the feed valve and a second sealing bearing fixedly connected to the inside of the sample discharge pipe. The inner rings of the first sealing bearing and the second sealing bearing are respectively fixedly connected with corresponding fixed ring plates. A corresponding baffle is fixedly connected to the fixed ring plate installed on the first sealing bearing, and corresponding filter plates are fixedly connected in a zigzag shape between the fixed ring plates installed on the first sealing bearing and the second sealing bearing. The sample gas and the nitrogen for displacement in the analysis sampling process are respectively filtered by the filter plates to realize sample output or evacuation, so as to effectively filter the particles in the sample gas and nitrogen accurately, and effectively ensure the sampling analysis accuracy.

[0017] 2) To ensure the overall airtightness of the entire analytical sampling system, it is not advisable to frequently disassemble and assemble the components of the analytical sampling system. However, if the filtered particulate matter is not discharged in a timely manner, it will not only affect the normal analytical sampling operation of the analytical sampling system but also exacerbate the pollution of the sample gas. To balance this issue, the present invention first provides a corresponding dust removal notch at the bottom side of the outer ring of the first sealed bearing, and then fixedly connects a dust removal pipe to the bottom of the fixed pipe outside the dust removal notch. A dust removal valve is installed on the dust removal pipe. Most importantly, it also includes a spiral dust removal plate provided at the outer end of the filter plate. Therefore, after the nitrogen replacement is completed, the baffle can be directly rotated and driven by the driving mechanism, thereby driving the filter to rotate, so that the spiral dust removal plate rotates to convey the filtered dust through the dust removal notch for external discharge. Thus, on the premise of not affecting the overall airtightness of the entire analytical sampling system, the filtered particulate matter can be effectively discharged regularly to ensure that the filter of the present invention can be smoothly used to assist in ensuring the sampling analysis accuracy of the present invention.

[0018] 3) A vent pipe equipped with a vent valve and a vacuum extraction pipe equipped with a vacuum extraction valve are connected in parallel to the sample discharge pipe between the pressure regulating valve and the discharge valve of the present invention. The vent pipe is connected to the external tail gas treatment system, and the vacuum extraction pipe is connected to the external vacuum pump. During the process of sample analysis and sampling, first, open the feed valve, the pressure regulating valve, and the vent valve. When the pressure gauge of the pressure regulating valve is 0, close the vent valve; open the vacuum extraction valve to extract vacuum until -0.1 mpa, then the vacuum extraction ends and the vacuum extraction valve is closed; after closing the vent valve, open the nitrogen replacement valve until the pressure gauge of the pressure regulating valve is 0.1 mpa for nitrogen purging and replacement; repeat the above evacuation and vacuum extraction three times to effectively remove the air and water introduced by the disassembly and assembly of the storage cylinder; then, open the storage cylinder to introduce the sample gas into the analysis system, and after repeating the evacuation and evacuation three times again, open the discharge valve to allow the sample to enter the corresponding detection instrument for analysis. Thus, the sampling of phosphorus trifluoride can be carried out safely and conveniently, and the sample can be sent to the feed end of the corresponding detection instrument for analysis, and cross-contamination of different batches of materials can be prevented during the sampling process, thereby effectively further ensuring the sampling analysis accuracy.

[0019] 4) The drive mechanism of the present invention includes a drive impeller fixedly connected to the center of the baffle plate, and a high-pressure nitrogen outlet pipe connected to the upper side of the drive impeller. The inlet end of the high-pressure nitrogen outlet pipe is connected to an external nitrogen source through a first booster pump. The outlet end of the high-pressure nitrogen outlet pipe faces the drive impeller, and a counterflush pipe connected to the nitrogen displacement pipe through a counterflush valve is hermetically penetrated and connected to the fixed pipe. The counterflush pipe is arranged outside the fixed ring plate without the baffle plate fixedly connected, and the part of the counterflush pipe located inside the fixed pipe is horizontally arranged and is provided with corresponding counterflush air outlets at intervals downward. After the nitrogen purging and replacement are completed, the feed valve and the pressure regulating valve are closed, and the first booster pump is started to introduce high-pressure nitrogen to form an impact on the drive impeller. The drive impeller then rotates and drives the baffle plate to rotate. At the same time, the counterflush valve is opened, and nitrogen is purged downward through the first counterflush air outlet of the counterflush pipe to remove the dust particles attached to the filter plate. During this process, the dust removal valve is opened, and the spiral dust removal plate rotates with the rotation of the baffle plate to convey the filtered dust through the dust removal notch for external discharge. To effectively and fully discharge the filtered particulate matter on the premise of not actually affecting the overall airtightness of the entire analysis and sampling system.

[0020] 5) The drive mechanism of the present invention includes a drive inlet pipe hermetically penetrated and connected to the outside of the fixed ring plate without the baffle plate fixedly connected. The drive inlet pipe is connected to an external nitrogen source through a second booster pump. The part of the drive inlet pipe located inside the fixed pipe is horizontally arranged at the axis of the fixed pipe and is provided with corresponding counterflush holes at intervals downward. A corresponding drive pipe is hermetically fixedly connected to the center of the baffle plate. One end of the drive pipe is rotatably sleeved on the drive inlet pipe through a sealed bearing, and the other end of the drive pipe is closed and is vertically connected with a plurality of arc-shaped jet counterthrust pipes at intervals outward. The outlet ends of the jet counterthrust pipes are respectively arranged in a constricted shape. After the nitrogen purging and replacement are completed, the feed valve and the pressure regulating valve are closed, and the second booster pump is started to introduce high-pressure nitrogen. Part of the high-pressure gas is discharged downward through the second counterflush air outlet to counterflush the filter plate to remove the dust particles attached to the filter plate. Part of the high-pressure gas is longitudinally and obliquely ejected through the arc-shaped jet counterthrust pipes to drive the drive pipe to rotate under the drive of the reaction force formed by the jet, thereby driving the baffle plate and the filter as a whole to rotate. During this process, the dust removal valve is opened, and the spiral dust removal plate rotates with the rotation of the baffle plate to convey the filtered dust through the dust removal notch for external discharge. To effectively and fully discharge the filtered particulate matter on the premise of not actually affecting the overall airtightness of the entire analysis and sampling system.

[0021] 6) Corresponding V-shaped metal skeletons are arranged at intervals and staggered on the fixed ring plate of the present invention. The filter plates are fixedly connected between adjacent two V-shaped metal skeletons in a zigzag arrangement, and the spiral dust removal plates are fixedly connected to the V-shaped metal skeletons. Through the intervention of the V-shaped metal skeletons, sufficient support can be provided for the filter plates, and a fixed connection can be formed with the spiral dust removal plates, thereby ensuring the overall rigidity of the filter and ensuring the structural stability of the filter under the continuous negative pressure pumping state.

[0022] 7) An arc-shaped mask cover for covering the dust removal pipe is fixedly connected to the fixed pipe of the present invention. There is a gap between the inner end of the arc-shaped mask cover and the first sealing bearing to form an air flow channel. A corresponding siphon pipe is connected in parallel to the dust removal pipe, and one end of the siphon pipe that is not connected to the dust removal pipe is connected to the fixed pipe below the dust removal notch.

[0023] The reason is as follows: When the high-pressure nitrogen outlet pipe or the jet reaction propulsion pipe sprays nitrogen, it will cause high-pressure air flow in the fixed pipe outside the baffle, resulting in the particles being prone to tumbling in the fixed pipe outside the baffle and unable to be quickly discharged. Through the setting of the arc-shaped mask cover of the present invention, the nitrogen entering the fixed pipe outside the baffle can flow into the arc-shaped mask cover along the gap between the inner end of the arc-shaped mask cover and the first sealing bearing, and then be discharged outside along the dust removal pipe. During this process, the materials pushed out by the spiral dust removal plates can be carried and discharged with the flowing air flow without entering the fixed pipe outside the baffle, thereby ensuring that the filtered particles can be smoothly discharged; and during the external discharge process of the high-pressure air flow in the dust removal pipe, a siphon can be formed for the siphon pipe, so as to suck and discharge the materials in the part of the fixed pipe below the dust removal notch, further ensuring that the filtered particles can be smoothly discharged, and thus ensuring the practical effect of the present invention. Description of the Drawings

[0024] Figure 1 It is a schematic structural diagram of the first embodiment of the present invention.

[0025] Figure 2 It is a schematic structural diagram of the filter of the first embodiment installed in the fixed pipe.

[0026] Figure 3 It is a cross-sectional view of the filter of the first embodiment installed in the fixed pipe.

[0027] Figure 4 It is a schematic structural diagram of the filter of the first embodiment.

[0028] Figure 5 It is a schematic structural diagram of the other side of the filter of the first embodiment.

[0029] Figure 6 It is a schematic structural diagram of the second embodiment of the present invention.

[0030] Figure 7Cross-sectional view of the filter of Example 2 installed in the fixed tube.

[0031] Figure 8 Schematic structural diagram of the filter of Example 2.

[0032] Figure 9 Schematic structural diagram of Embodiment 3 of the present invention.

[0033] In the drawings: sampling tube 1, feed valve 101, storage cylinder 2, nitrogen replacement tube 3, nitrogen replacement valve 301, high-pressure resistant one-way valve 302, fixed tube 4, sample discharge tube 5, pressure regulating valve 501, discharge valve 502, filter 6, first sealing bearing 601, second sealing bearing 602, fixed ring plate 603, baffle 604, filter plate 605, dust removal mechanism 7, dust removal notch 701, dust removal valve 702, dust removal pipe 703, spiral dust removal plate 704, driving mechanism 8, driving impeller 801, high-pressure nitrogen outlet pipe 802, first booster pump 803, driving inlet pipe 804, second booster pump 805, driving pipe 806, jet reaction tube 807, evacuation pipe 9, evacuation valve 901, vacuum extraction pipe 10, vacuum extraction valve 1001, backflush pipe 11, backflush valve 1101, first backflush outlet 12, second backflush outlet 13, sealing bearing 14, V-shaped metal skeleton 15, discharge branch pipe 16, distribution valve 1601, arc mask cover 17, siphon 18. Detailed implementation manners

[0034] For the convenience of those skilled in the art to understand, the embodiments will now be further described in detail with reference to the accompanying drawings for the structure of the present invention: Embodiment 1: Refer to Figures 1-5 , a phosphorus trifluoride sample analysis and sampling system, comprising: Sampling tube 1, the feed end of which is connected to the corresponding storage cylinder 2, and the discharge end is fixedly installed with the corresponding feed valve 101; Nitrogen replacement tube 3, the feed end of which is connected to an external nitrogen source, and the discharge end is connected in parallel to the discharge end of the feed valve 101 through the corresponding nitrogen replacement valve 301; Fixed tube 4, which is horizontal and has both ends closed, one upper end of the fixed tube 4 is connected to the discharge end of the feed valve 101, and the other end of the fixed tube 4 is connected downward to a sample discharge tube 5 fixedly installed with a pressure regulating valve 501 and a discharge valve 502; The filter 6 includes a first sealed bearing 601 fixed in the fixed tube 4 on the outer side of the discharge end of the feed valve 101, and a second sealed bearing 602 fixed in the fixed tube 4 on the inner side of the sample discharge tube 5. Corresponding fixed ring plates 603 are fixedly connected to the inner rings of the first sealed bearing 601 and the second sealed bearing 602 respectively. A corresponding baffle 604 is hermetically fixed on the fixed ring plate 603 mounted on the first sealed bearing 601, and a corresponding filter plate 605 is fixedly connected in a serrated manner between the fixed ring plates 603 mounted on the first sealed bearing 601 and the second sealed bearing 602; The dust removal mechanism 7 includes a dust removal notch 701 provided on the bottom side of the outer ring of the first sealed bearing 601. A dust removal tube 703 equipped with a dust removal valve 702 is connected downward at the bottom of the fixed tube 4 outside the dust removal notch 701. A corresponding spiral dust removal plate 704 is fixedly connected to the outer end of the filter plate 605; The driving mechanism 8 is used to drive the baffle 604 to rotate, thereby driving the filter 6 to rotate, so that the spiral dust removal plate 704 rotates to output the filtered particulate matter outward through the dust removal notch 701 and discharge it through the dust removal tube 703.

[0035] The analysis sampling system of the present invention is additionally provided with a fixed tube 4, which is horizontal and closed at both ends. One upper end of the fixed tube 4 is connected to the discharge end of the feed valve 101, and the other lower end is connected downward to the sample discharge tube 5. Then, a filter 6 is additionally provided in the fixed tube 4, which includes a first sealed bearing 601 fixed in the fixed tube 4 on the outer side of the discharge end of the feed valve 101 and a second sealed bearing 602 fixed in the fixed tube 4 on the inner side of the sample discharge tube 5. Corresponding fixed ring plates 603 are fixedly connected to the inner rings of the first sealed bearing 601 and the second sealed bearing 602 respectively. A corresponding baffle 604 is hermetically fixed on the fixed ring plate 603 mounted on the first sealed bearing 601, and a corresponding filter plate 605 is fixedly connected in a serrated manner between the fixed ring plates 603 mounted on the first sealed bearing 601 and the second sealed bearing 602. The sample gas and the nitrogen for replacement during the analysis sampling process are filtered through the filter plate 605 respectively to realize sample output or evacuation, thereby effectively filtering the particles in the sample gas and nitrogen accurately to effectively ensure the sampling analysis accuracy.

[0036] In order to ensure the overall airtightness of the entire analysis and sampling system, it is not advisable to frequently disassemble and assemble the components of the analysis and sampling system. However, if the filtered particulate matter is not discharged in a timely manner, it will not only affect the normal analysis and sampling operation of the analysis and sampling system, but also exacerbate the pollution of the sample gas. To balance this problem, the present invention first provides a corresponding dust removal notch 701 at the bottom side of the outer ring of the first sealed bearing 601, and then fixedly connects a dust removal pipe 703 to the bottom of the fixed pipe 4 outside the dust removal notch 701. A dust removal valve 702 is installed on the dust removal pipe 703. Most importantly, it also includes a spiral dust removal plate 704 provided at the outer end of the filter plate 605. Therefore, after the nitrogen replacement is completed, the baffle 604 can be directly driven to rotate by the driving mechanism 8, thereby driving the filter 6 to rotate, so that the spiral dust removal plate 704 rotates to convey the filtered dust through the dust removal notch 701 for external discharge. Thus, on the premise of not affecting the overall airtightness of the entire analysis and sampling system, the filtered particulate matter can be effectively discharged regularly to ensure that the filter 6 of the present invention can be used smoothly, so as to assist in ensuring the sampling and analysis accuracy of the present invention.

[0037] A pressure gauge is installed on the pressure regulating valve 501, and a vent pipe 9 equipped with a vent valve 901 and a vacuum extraction pipe 10 equipped with a vacuum extraction valve 1001 are connected in parallel to the sample discharge pipe 5 between the pressure regulating valve 501 and the discharge valve 502. The vent pipe 9 is connected to the external tail gas treatment system, and the vacuum extraction pipe 10 is connected to the external vacuum pump.

[0038] During the process of sample analysis and sampling, first, open the feed valve 101, the pressure regulating valve 501 and the vent valve 901. When the pressure gauge of the pressure regulating valve 501 is 0, close the vent valve 901; open the vacuum extraction valve 1001 to perform vacuum extraction until -0.1 mpa, then the vacuum extraction ends and the vacuum extraction valve 1001 is closed; after closing the vent valve 901, open the nitrogen replacement valve 301 until the pressure gauge of the pressure regulating valve 501 is 0.1 mpa for nitrogen purging and replacement; repeat the above evacuation and vacuum extraction three times to effectively remove the air and water introduced by the disassembly and assembly of the storage cylinder 2; then, open the storage cylinder 2 to introduce the sample gas into the analysis system, and after repeating the evacuation and evacuation three times again, open the discharge valve 502 to allow the sample to enter the corresponding detection instrument for analysis. Thus, the phosphorus trifluoride can be sampled safely and conveniently and sent to the feed end of the corresponding detection instrument for analysis, and it can prevent cross-contamination of different batches of materials during the sampling process, thereby effectively further ensuring the sampling and analysis accuracy.

[0039] The driving mechanism 8 includes a driving impeller 801 fixedly connected to the center of the baffle 604, and a high-pressure nitrogen outlet pipe 802 connected to the upper side of the driving impeller 801. The inlet end of the high-pressure nitrogen outlet pipe 802 is connected to an external nitrogen source through a first booster pump 803, and the outlet end of the high-pressure nitrogen outlet pipe 802 faces the driving impeller 801.

[0040] A backflush pipe 11 connected to the nitrogen displacement pipe 3 is hermetically penetrated through the fixed pipe 4. A corresponding backflush valve 1101 is fixedly installed on the backflush pipe 11. The backflush pipe 11 is arranged outside the fixed ring plate 603 not fixedly connected with the baffle 604, and the part of the backflush pipe 11 located inside the fixed pipe 4 is horizontally arranged and is provided with corresponding first backflush air outlets 12 at intervals downward.

[0041] After the nitrogen purging and displacement are completed, the feed valve 101 and the pressure regulating valve 501 are closed. The first booster pump 803 is started to introduce high-pressure nitrogen to form an impact on the driving impeller 801. The driving impeller 801 rotates accordingly and drives the baffle 604 to rotate. At the same time, the backflush valve 1101 is opened, and nitrogen is purged downward through the first backflush air outlets 12 of the backflush pipe 11 to remove the dust particles attached to the filter plate 605. During this process, the dust removal valve 702 is opened, and the spiral dust removal plate 704 rotates with the rotation of the baffle 604 to convey the filtered dust through the dust removal notch 701 for external discharge. To effectively and fully discharge the filtered particulate matter on the premise of not affecting the overall airtightness of the entire analysis and sampling system.

[0042] Corresponding V-shaped metal skeletons 15 are arranged at intervals and staggered on the fixed ring plate 603. The filter plate 605 is fixedly connected between adjacent two V-shaped metal skeletons 15 in a zigzag arrangement. The spiral dust removal plate 704 is fixedly connected to the V-shaped metal skeletons 15. The filter holes of the filter plate 605 do not exceed 0.3 μm.

[0043] Through the intervention of the V-shaped metal skeletons 15, sufficient support can be provided for the filter plate 605, and a fixed connection can be formed with the spiral dust removal plate 704, thereby ensuring the overall rigidity of the filter 6 to ensure the structural stability of the filter 6 under the continuous negative pressure state.

[0044] A corresponding high-pressure resistant one-way valve 302 is also fixedly installed on the nitrogen displacement pipe 3. The outlet end of the sample discharge pipe 5 is outwardly connected in parallel with a group of discharge branch pipes 16 equipped with distribution valves 1601. A group of the discharge branch pipes 16 are respectively connected to the inlet ends of a gas chromatograph and a Fourier transform infrared spectrometer.

[0045] Embodiment 2: Reference Figures 6-8, the difference between this embodiment and the first embodiment is that: the driving mechanism 8 includes a driving air inlet pipe 804 hermetically and penetratingly connected to the outside of the fixed ring plate 603 not fixedly connected with the baffle 604. The driving air inlet pipe 804 is connected to an external nitrogen source through a second booster pump 805. The part of the driving air inlet pipe 804 located in the fixed pipe 4 is horizontally arranged at the axis of the fixed pipe 4 and is provided with corresponding second reverse air outlet ports 13 at intervals downward. A corresponding driving pipe 806 is hermetically and penetratingly fixed at the center of the baffle 604. One end of the driving pipe 806 is rotatably sleeved on the driving air inlet pipe 804 through a sealing bearing 14. The other end of the driving pipe 806 is closed and is vertically connected with a plurality of arc-shaped jet reaction pipes 807 at intervals outward. The air outlet ends of the jet reaction pipes 807 are respectively arranged in a constricted shape.

[0046] After the nitrogen purging and replacement are completed, the feed valve 101 and the pressure regulating valve 501 are closed, and the second booster pump 805 is started to introduce high-pressure nitrogen. Part of the high-pressure gas is discharged downward through the second reverse air outlet port 13 to backwash the filter plate 605 to remove the dust particles attached to the filter plate 605; part of the high-pressure gas is longitudinally and obliquely ejected through the arc-shaped jet reaction pipes 807, so as to drive the driving pipe 806 to rotate under the driving of the reaction force formed by the jet, thereby driving the baffle 604 and the filter 6 as a whole to rotate; during this process, the dust removal valve 702 is opened, and the spiral dust removal plate 704 rotates with the rotation of the baffle 604 to convey the filtered dust through the dust removal notch 701 for external discharge. So as to effectively and fully discharge the filtered particulate matter on the premise of not affecting the overall airtightness of the entire analysis and sampling system.

[0047] It should be noted that the implementation principles and technical effects generated by this embodiment are the same as those of the first embodiment. For a brief description, for the parts not mentioned in this embodiment, reference can be made to the corresponding content in the first embodiment.

[0048] Embodiment Three: Reference Figure 9 , the difference between this embodiment and the first and second embodiments is that: an arc-shaped mask cover 17 for covering the dust removal pipe 703 is fixedly connected to the fixed pipe 4. There is a gap between the inner end of the arc-shaped mask cover 17 and the first sealing bearing 601 to form an air flow channel; a corresponding siphon pipe 18 is connected in parallel to the dust removal pipe 703. One end of the siphon pipe 18 not connected to the dust removal pipe 703 is connected to the fixed pipe 4 below the dust removal notch 701.

[0049] Since the high-pressure nitrogen outlet pipe 802 or the jet thrust reverser pipe 807 will cause high-pressure air flow to be generated in the fixed pipe 4 outside the baffle 604 during the process of ejecting nitrogen, it will cause the particulate matter to tumble in the fixed pipe 4 outside the baffle 604 and cannot be quickly discharged. Through the setting of the arc mask cover 17 of the present invention, the nitrogen entering the fixed pipe 4 outside the baffle 604 can flow into the arc mask cover 17 along the interval between the inner end of the arc mask cover 17 and the first sealing bearing 601, and then be discharged outside along the dust removal pipe 703. During this process, the material pushed out by the spiral dust removal plate 704 can be carried and discharged along with the flowing air flow without entering the fixed pipe 4 outside the baffle 604, so as to ensure that the filtered particulate matter can be smoothly discharged; and during the process of the high-pressure air flow being discharged outside the dust removal pipe 703, it can form a siphon on the siphon pipe 18, so as to suck and discharge the material in the part of the fixed pipe 4 below the dust removal notch 701, to further ensure that the filtered particulate matter can be smoothly discharged, and thus ensure the practical effect of the present invention.

[0050] It should be noted that the implementation principles and the technical effects generated by this embodiment are the same as those of Embodiment 1 and Embodiment 2. For the sake of brief description, for the parts not mentioned in this embodiment, reference can be made to the corresponding contents in Embodiment 1 and Embodiment 2.

[0051] The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A sampling system for analyzing phosphorus trifluoride samples, characterized in that, Comprising: An injection tube (1) with its feeding end connected to a corresponding storage cylinder (2), and a corresponding feeding valve (101) fixedly installed at its discharging end; A nitrogen replacement tube (3) with its feeding end connected to an external nitrogen source, and its discharging end connected in parallel to the discharging end of the feeding valve (101) through a corresponding nitrogen replacement valve (301); A fixed tube (4) which is horizontal and has both ends closed. One upper end of the fixed tube (4) is connected to the discharging end of the feeding valve (101), and the other end of the fixed tube (4) is connected downward to a sample discharging tube (5) on which a pressure regulating valve (501) and a discharging valve (502) are fixedly installed; A filter (6) comprising a first sealing bearing (601) fixed inside the fixed tube (4) outside the discharging end of the feeding valve (101), and a second sealing bearing (602) fixed inside the fixed tube (4) inside the sample discharging tube (5). The inner rings of the first sealing bearing (601) and the second sealing bearing (602) are respectively fixedly connected with corresponding fixed ring plates (603). A corresponding baffle (604) is hermetically fixed on the fixed ring plate (603) installed on the first sealing bearing (601), and a corresponding filter plate (605) is fixedly connected in a serrated shape between the fixed ring plates (603) installed on the first sealing bearing (601) and the second sealing bearing (602); A dust removal mechanism (7) comprising a dust removal notch (701) arranged at the bottom side of the outer ring of the first sealing bearing (601). The bottom of the fixed tube (4) outside the dust removal notch (701) is connected downward to a dust removal tube (703) on which a dust removal valve (702) is installed. The outer end of the filter plate (605) is fixedly connected with a corresponding spiral dust removal plate (704); A driving mechanism (8) for driving the baffle (604) to rotate, thereby driving the filter (6) to rotate, so that the spiral dust removal plate (704) rotates to output the filtered particulate matter outward through the dust removal notch (701) and discharge it through the dust removal tube (703).

2. The sampling system for analyzing a phosphorus trifluoride sample according to claim 1, characterized in that, A pressure gauge is installed on the pressure regulating valve (501), and a venting tube (9) on which a venting valve (901) is installed and a vacuum pumping tube (10) on which a vacuum pumping valve (1001) is installed are connected in parallel to the sample discharging tube (5) between the pressure regulating valve (501) and the discharging valve (502). The venting tube (9) is connected to an external tail gas treatment system, and the vacuum pumping tube (10) is connected to an external vacuum pump.

3. The phosphorus trifluoride sample analysis sampling system according to claim 1, wherein The driving mechanism (8) comprises a driving impeller (801) fixedly connected to the center of the baffle (604), and a high-pressure nitrogen outlet pipe (802) connected to the upper side of the driving impeller (801). The inlet end of the high-pressure nitrogen outlet pipe (802) is connected to an external nitrogen source through a first booster pump (803), and the outlet end of the high-pressure nitrogen outlet pipe (802) faces the driving impeller (801).

4. The sampling system for analyzing a phosphorus trifluoride sample according to claim 3, characterized in that, A recoil pipe (11) which is hermetically penetrated and arranged on the fixed pipe (4) and connected to the nitrogen displacement pipe (3) is provided. A corresponding recoil valve (1101) is fixedly installed on the recoil pipe (11). The recoil pipe (11) is arranged outside the fixed ring plate (603) not fixedly connected with the baffle (604). And the part of the recoil pipe (11) located inside the fixed pipe (4) is horizontally arranged and is provided with corresponding first recoil air outlets (12) at intervals downward.

5. A sampling system for the analysis of phosphorus trifluoride samples according to claim 1, characterized in that, The driving mechanism (8) includes a driving air inlet pipe (804) hermetically penetrated and connected to the outside of the fixed ring plate (603) not fixedly connected with the baffle (604). The driving air inlet pipe (804) is connected to an external nitrogen source through a second booster pump (805). The part of the driving air inlet pipe (804) located inside the fixed pipe (4) is horizontally arranged at the axis of the fixed pipe (4) and is provided with corresponding second recoil air outlets (13) at intervals downward. A corresponding driving pipe (806) is hermetically penetrated and fixedly connected to the center of the baffle (604). One end of the driving pipe (806) is rotatably sleeved on the driving air inlet pipe (804) through a sealing bearing (14). The other end of the driving pipe (806) is closed and is vertically connected with a plurality of arc-shaped jet reaction pipes (807) arranged in an arc shape at intervals outward. The air outlet ends of the jet reaction pipes (807) are respectively arranged in a reduced diameter shape.

6. The sampling system for analyzing a phosphorus trifluoride sample according to claim 1, wherein, Corresponding V-shaped metal skeletons (15) are arranged on the fixed ring plate (603) at intervals and staggered. The filter plate (605) is fixedly connected between adjacent two V-shaped metal skeletons (15) in a zigzag arrangement. The spiral dust removal plate (704) is fixedly connected to the V-shaped metal skeletons (15).

7. A sampling system for analyzing a phosphorus trifluoride sample according to claim 1, wherein, The filter holes of the filter plate (605) do not exceed 0.3μm.

8. The sampling system for analyzing phosphorus trifluoride samples according to claim 1, wherein A corresponding high-pressure resistant one-way valve (302) is also fixedly installed on the nitrogen displacement pipe (3).

9. The sampling system for analyzing phosphorus trifluoride samples according to claim 1, characterized in that, The discharge end of the sample discharge pipe (5) is outwardly connected in parallel with a group of discharge branch pipes (16) installed with distribution valves (1601). A group of the discharge branch pipes (16) are respectively connected to the feed ends of a gas chromatograph and a Fourier transform infrared spectrometer.

10. A sampling system for analyzing a phosphorus trifluoride sample according to claim 3 or 5, characterized in that, An arc-shaped mask cover (17) for covering the dust removal pipe (703) is fixedly connected to the fixed pipe (4). An air flow channel is formed by a spaced arrangement between the inner end of the arc-shaped mask cover (17) and the first sealing bearing (601). A corresponding siphon pipe (18) is connected in parallel to the dust removal pipe (703). One end of the siphon pipe (18) not connected to the dust removal pipe (703) is connected to the fixed pipe (4) below the dust removal notch (701).

Images