Brush, system and method for post-chemical mechanical planarization cleaning of surfaces

Abstract

An exemplary brush for cleaning a substrate comprises: a porous polymeric brush body having one or more contact surfaces for cleaning the substrate, the one or more contact surfaces comprising a microscopic texture; and a brush support configured to mechanically couple the brush body to an actuator.

Description

Technical Field

[0001] The present disclosure relates to substrate cleaning brushes, and more particularly, to brushes, systems, and methods for cleaning after surface chemical mechanical planarization (CMP). Background Art

[0002] In the semiconductor manufacturing industry and other industries, brushes are used to remove contaminants from surfaces, such as contaminants on the surface of semiconductor wafers. Depending on the specific application, cleaning of a substrate or surface may also involve delivering one or more substances (e.g., chemicals, ultrapure water (UPW), deionized water (DIW), etc.) to the substrate or surface.

[0003] By comparing these conventional methods with certain aspects of the methods and systems of the present disclosure set forth in the accompanying drawings in the remainder of this disclosure, those skilled in the art will clearly recognize the limitations and disadvantages of conventional brush conditioning methods. Summary of the Invention

[0004] The present disclosure describes brushes, systems, and methods for cleaning after surface CMP, which are substantially as shown and described in at least one of the figures and are more fully set forth in the claims. Brief Description of the Drawings

[0005] These and / or other aspects will become apparent and more readily appreciated by reference to the following description of exemplary embodiments taken in conjunction with the accompanying drawings.

[0006] Figure 1A 、 1B and 1C are front views of an exemplary roller brush and a substrate during an exemplary cleaning process in accordance with aspects of the present disclosure.

[0007] Figure 1D An exemplary cleaning system is shown in which an exemplary brush of Figure 1B is installed to clean a substrate.

[0008] Figure 2A 、 2B and 2C are more detailed views of exemplary nodules that can be used to implement the brushes of Figure 1B and 1C and include micro-textures.

[0009] Figure 3A is a schematic diagram of an exemplary substrate cleaning system for dispensing multiple fluids through a brush during a substrate cleaning process in accordance with aspects of the present disclosure.

[0010] Figure 3B is a top view of another exemplary system for cleaning a substrate during a substrate cleaning process in accordance with aspects of the present disclosure, which includes another exemplary brush.

[0011] Figure 4A and 4B is Figure 3A A top view of the brush and substrate in an exemplary cleaning process where the brush is at different radial and / or angular positions on the surface of the substrate.

[0012] Figure 5 Shows exemplary circular protrusions including micro-textures, which can be used to implement Figure 3B the brush.

[0013] Figure 6A and 6B 6C are more detailed views of exemplary nodules, which can be used to implement Figure 3A and 3B the brush, including micro-textures.

[0014] Figure 7 Is a representative flowchart of an exemplary method for cleaning a substrate using a brush having micro-textures, according to aspects of the present disclosure.

[0015] The figures are not necessarily drawn to scale. Where appropriate, like or identical reference numerals are used to refer to like or identical components. Detailed Description

[0016] Various applications and processes may benefit from physical cleaning of surfaces. For example, in semiconductor manufacturing, semiconductor wafers can be cleaned during one or more stages of fabricating electronic circuits on the wafers to remove potentially damaging contaminants. Cleaning can be provided, for example, by a brush in contact with the surface to be cleaned.

[0017] To effectively clean a substrate, the disclosed exemplary brush contacts the substrate to be cleaned in the presence of a cleaning chemical. The disclosed exemplary brush is either mounted or directly cast onto a rotatable hollow base or mandrel that has holes allowing water, chemicals, or both to flow through the base or mandrel, into and through the brush body, and then to the substrate or wafer to be cleaned.

[0018] Exemplary brushes can be configured in different geometries, including shaped nodules extending from the brush body to contact the surface. Exemplary contact surfaces can include a group of nodules having one or more shapes for contacting the surface, and / or can be a substantially flat contact surface. In some examples, the contact surface is configured with micro-textures to achieve one or more wiping effects.

[0019] As used herein, a chemical or process chemical can refer to any substance that can be applied by the disclosed brush, including water, such as deionized water (DIW) and / or ultrapure water (UPW).

[0020] Exemplary brushes for cleaning a substrate include: a porous polymer brush body having one or more contact surfaces for cleaning the substrate, the one or more contact surfaces including micro-textures; and a brush support configured to mechanically couple the brush body to an actuator.

[0021] In some exemplary brushes, the brush body is substantially cylindrical, and the outer surface of the cylindrical brush body includes the micro-textures. In some exemplary brushes, the brush support includes a mandrel configured to rotate the brush about an axis of the substantially cylindrical brush body.

[0022] In some exemplary brushes, the brush body is substantially cylindrical and includes a plurality of protrusions extending from the cylindrical brush body, the surfaces of the protrusions including the micro-textures. In some such exemplary brushes, the axial dimension of the brush body is greater than the radial dimension.

[0023] In some exemplary brushes, the brush body is plate-shaped, having a radial dimension greater than an axial dimension, and a first end face of the brush body includes the micro-textures. In some exemplary brushes, the brush support includes a plate connected to a second end face opposite the first end face of the brush body. In some exemplary brushes, the brush body includes a plurality of protrusions extending from the first end face of the brush body, wherein the plurality of protrusions include the micro-textures.

[0024] In some exemplary brushes, the micro-textures are configured to provide enhanced lubrication between the one or more contact surfaces and the substrate as compared to a situation where the one or more contact surfaces lack the micro-textures. In some exemplary brushes, the micro-textures are configured to provide increased friction between the one or more contact surfaces and the substrate as compared to a situation where the one or more contact surfaces lack the micro-textures. In some exemplary brushes, the micro-textures are configured to provide better cleaning efficiency as compared to a situation where the one or more contact surfaces lack the micro-textures.

[0025] In some exemplary brushes, the porous polymer brush body includes at least one of a polyvinyl acetal foam, a polyurethane foam, a polyolefin foam, a porous fluoropolymer, a silicone foam, a polyester foam, a nylon foam, or a polyacrylate foam. In some exemplary brushes, the porous polymer brush body is configured to disperse fluid through the micro-textures. In some exemplary brushes, the brush body is overmolded on the brush support, mounted on the brush support after assembly, or assembled into a sponge brush only.

[0026] In some exemplary brushes, the microtexture includes a plurality of features that are aligned transverse to the direction of movement of the brush body during the cleaning process. In some exemplary brushes, the microtexture includes a plurality of features having at least one shape of circular, pointed, square, or linear. In some exemplary brushes, the microtexture includes a plurality of features having a constant orientation on the surface of the brush body. In some exemplary brushes, the microtexture includes a plurality of features having different orientations on the surface of the brush body.

[0027] The disclosed exemplary system for cleaning a substrate includes: a cleaning brush having: a porous polymer brush body having one or more contact surfaces for cleaning the substrate, the one or more contact surfaces including a microtexture; and a brush support configured to mechanically support the brush body; and an actuator configured to be coupled to the brush support and rotate the brush about an axis of the cleaning brush via the brush support.

[0028] Figure 1A is a front view of an exemplary roller brush 100 during the cleaning of an exemplary substrate 102. Figure 1A The exemplary roller brush 100 performs post-chemical mechanical planarization (post-CMP, also known as post-chemical mechanical polishing) cleaning, which may involve applying one or more chemicals to the substrate 102. The exemplary roller brush 100 is cylindrical and has a substantially uniform contact surface 104 that rotates to clean the surface of the substrate 102. As used herein, "substantially uniform" and "substantially flat" refer to the absence of knobs or other protrusions larger than the microtexture disclosed herein.

[0029] Figure 1B is a front view of another exemplary roller brush 110 during the cleaning of an exemplary substrate 102. Compared with Figure 1A the exemplary brush 100, the exemplary roller brush 110 is provided with (e.g., molded with) knobs 112 extending from the surface of the roller brush 110. Figure 1B The exemplary knobs 112 are regularly spaced over the entire surface of the roller brush 110. However, knobs 112 of other shapes, sizes, and / or spacings may also be used. Figure 1C is a front view of yet another exemplary roller brush 120 during the cleaning of an exemplary substrate 102. The exemplary brush 120 includes knobs 112 arranged in a certain spacing or pattern that can provide a desired effect on the surface of the substrate 102 during the cleaning process.

[0030] Figures 1A-1CEach of the brushes 100, 110, 120 can be supported by an internal mandrel 106, which acts as a brush support and supports the bodies 108 of the brushes 100, 110, 120. The mandrel 106 can be rotated to rotate the bodies 108 of the brushes 100, 110, 120 relative to the substrate 102. The substrate 102 can be supported on a platform or other support surface. In some examples, during the cleaning process, the substrate 102 is rotated by the platform in a rotational direction different from the rotational direction of the brushes 100, 110, 120. In other examples, the substrate 102 can be conveyed in a linear direction, and the substrate 102 can be rotated or not rotated.

[0031] The exemplary brush body 108 is a porous polymer foam, which can be formed into a ring by molding, machining, using additive manufacturing techniques, and / or otherwise. For example, the brush body 108 can be formed by directly casting a porous polymer foam onto the mandrel 116. In other examples, the porous polymer foam can be formed into the brush body 108 and then assembled and / or mounted onto the mandrel 116. In some other examples, the brushes 100, 110, 120 are porous polymer brushes and are manufactured as only sponge brushes. Exemplary polymer foams that can be used as the brush body 108 include, but are not limited to, polyvinyl acetal foams, polyurethane foams, polyolefin foams, porous fluoropolymers, silicone foams, polyester foams, nylon foams, and / or polyacrylate foams. In Figures 1A-1C the example, the axial dimension (e.g., length) of the cylindrical brushes 100, 110, 120 is greater than the radial dimension (e.g., diameter).

[0032] Figures 1A-1C Each of the exemplary brushes 100, 110, 120 is configured to have a microtexture on its contact surface. For example, the microtexture can be provided on the uniform surface 104 and / or the nodules 112 of the brushes 100, 110, 120. In this document, the term "microtexture" refers to a texture having corresponding features less than 1 millimeter (mm) on the contact surface. Figure 2A 、 2B and 2C are more detailed views of the exemplary nodules 112, which can be used to implement Figure 1B and 1C the brushes 100, 110, 120, including the microtexture.

[0033] The exemplary surface 104 and / or the nodules 112 are formed with a microtexture, which can be applied to the surface 104 and / or the nodules 112 (e.g., applied to the surface of the nodules 112), to affect the cleaning action of the brushes 100, 110, 120 on the substrate 102. The microtexture of the surface 104 and / or the nodules 112 can be formed during the molding process of the brush body 108, by machining the brush body 108 and / or using any other construction or modification method.

[0034] Figure 1D The cleaning system 130 is shown, in which the exemplary brush 110 is installed to clean the substrate 102. The exemplary cleaning system 130 includes one or more actuators 132, which are controlled by a control circuit 134 based on the required cleaning process. For example, the control circuit 134 can control the movement and / or rotation of the brush 110 and / or the movement and / or rotation of the substrate 102 by controlling the actuator 132 to move the brush 110 into contact with and / or out of contact with the substrate 102, move the substrate 102 and / or rotate the brush 110 along the axis of rotation (e.g., through the mandrel 106). Figure 1B The top view and elevation view of an exemplary surface 202 of one of the nodules 112 are shown. The exemplary surface 202 has a microtexture, including circular surfaces or microstructures repeated in a substantially constant pattern.

[0035] Figure 2A Shown is Figure 1B The top view and elevation view of an exemplary surface 204 of one of the nodules 112 are shown. The exemplary surface 204 has a microtexture, including sharp surfaces or microstructures distributed in a substantially constant pattern. Figure 2B Shown is Figure 1B The top view and elevation view of an exemplary surface 206 of one of the nodules 112 are shown. The exemplary surface 206 has a microtexture, including square (e.g., flat, stepped) surfaces or microstructures distributed in a substantially constant pattern. In some other examples, the microtexture can include linear features (e.g., elongated features with a width less than 1 mm). Each exemplary texture is applied uniformly across the surfaces 202 - 206 of the nodules 112, but can also be applied irregularly, and / or applied to different nodules 112 across the length of the brush 110. Any exemplary texture can have features that have a constant and / or different orientation on the surface 204 of the brush body 104 or the nodules 112. Additionally or alternatively, any exemplary texture can have features that are aligned with and / or transverse to the direction of movement of the brush body 104 and / or the nodules 112 during the cleaning operation. Figure 2C Shown is Figure 1B The top view and elevation view of an exemplary surface 206 of one of the nodules 112 are shown. The exemplary surface 206 has a microtexture, including square (e.g., flat, stepped) surfaces or microstructures distributed in a substantially constant pattern. In some other examples, the microtexture can include linear features (e.g., elongated features with a width less than 1 mm). Each exemplary texture is applied uniformly across the surfaces 202 - 206 of the nodules 112, but can also be applied irregularly, and / or applied to different nodules 112 across the length of the brush 110. Any exemplary texture can have features that have a constant and / or different orientation on the surface 204 of the brush body 104 or the nodules 112. Additionally or alternatively, any exemplary texture can have features that are aligned with and / or transverse to the direction of movement of the brush body 104 and / or the nodules 112 during the cleaning operation.

[0036] Figure 3AFIG. 0 is a schematic diagram of an exemplary system 300 for cleaning a substrate 302, which involves dispensing multiple fluids onto the substrate 302 through a brush 304 during the cleaning process. The exemplary system 300 includes a support arm 306 coupled to the brush 304. The support arm 306 positions the brush 304 relative to the substrate 302 and couples the brush 304 to one or more actuators 308. The actuators 308 move the brush 304 relative to the substrate 302 and / or rotate the brush 304 through the support arm 306.

[0037] The system 300 and the brush 304 are capable of simultaneously delivering multiple fluids to the brush 304 and / or the substrate 302 during the cleaning process. As described in more detail below, a first chemical 310 can be dispensed onto the substrate 302 through a spindle 312 that couples the brush 304 to the support arm 306 (e.g., provides rotational torque to the brush 304 from the actuator 308). A second chemical 314 can be simultaneously dispensed onto the substrate 302 through the body of the brush 304, e.g., by diffusing the second chemical 314 through the brush 304.

[0038] The exemplary system 300 includes a first reservoir 316 that stores the first chemical 310 and is in fluid communication with the spindle 312 for dispensing the first chemical 310. The system 300 also includes a second reservoir 318 that stores the second chemical 314 and is in fluid communication with a dispenser 320 (e.g., a nozzle, a conduit, etc.). The first and second reservoirs 316, 318 can have the same or different capacities. The first and second reservoirs 316, 318 can be located locally or near the system 300, and / or can be facility-based supply sources of pressurized chemicals 310, 316 that are in fluid communication with the support arm 306.

[0039] The system 300 includes a control circuit 322 configured to control valves 324, 326. The valves 324, 326 can be controlled to set the dispensing rates of the chemicals 310, 314 from the reservoirs 316, 318. Exemplary valves 324, 326 are low-power electronically controlled solenoid valves. However, any other type of electronically controlled valve can be employed taking into account the desired flow rate, power consumption, and / or response time.

[0040] The exemplary brush 304 includes an annular plate 328 and an annular brush body 330. The annular plate 328 is connected or bonded to the annular brush body 330 and provides mechanical support and coupling between the brush body 330 and the spindle 312. The brush body 330 is arranged to contact the substrate 302 (e.g., through the contact surface 331 of the brush body 330) to clean and / or polish the substrate 302. The contact surface 331 of the brush body 330 can be non-textured or can include micro-textures and / or patterns as described for the surface 202 in connection with Figures 2A-2C as described above.

[0041] Exemplary plate 328 includes an annular space 332. The spindle 312 extends through the annular space 332 to convey the first chemical 310 to the substrate 302 via the brush 304. The brush body 330 also includes an annular space 334 that is aligned (e.g., overlaps, is concentric, etc.) with the annular space of the plate 328. The annular spaces 332, 334 are large enough to allow the conveyance of the first chemical 310 to the substrate 302. In some examples, the annular space 334 of the brush body 330 is large enough to reduce or eliminate chemical interactions between the chemicals 310 and 314 within the brush body 330 before the first and second chemicals 310, 314 reach the substrate 302. The annular space 334 of the brush body 330 can also be small enough to increase (e.g., maximize) the contact area between the brush body 330 and the substrate 302.

[0042] Exemplary brush body 330 is a porous polymer foam that can be formed into an annulus by molding, machining, using additive manufacturing techniques, and / or otherwise. Exemplary polymer foams that can be used as the brush body 330 include, but are not limited to, polyvinyl alcohol ester foams, polyurethane foams, polyolefin foams, porous fluoropolymers, silicone foams, polyester foams, nylon foams, and / or polyacrylate foams.

[0043] The plate 328 further includes one or more channels 336 that extend from a channel inlet 338 on the top side of the plate 328 to the interface between the plate 328 and the brush body 330. The channels 336 provide fluid conveyance from the nozzle 320 to the brush body 330. The nozzle 320 is aligned with the channels 336 to convey the second chemical 314 to the channels 336. The channels 336 can serve as a secondary reservoir to directly provide the second chemical 314 to the brush body 330.

[0044] Since the exemplary brush body 330 is porous, the second chemical 314 diffuses through the brush body 330 toward the substrate 302 and ultimately reaches the interface between the brush body 330 and the substrate 302 for cleaning. In some examples, the channels 336 are configured to provide a substantially uniform dispersion of the second chemical 314 through the brush body 330 in order to provide different concentrations of the second chemical 314 at different locations within the brush body 330 or at different locations on the surface of the brush body 330, or to concentrate the distribution of the second chemical 314 at one or more locations on the surface of the brush body 330.

[0045] The substrate 302 can be supported on a platform 340 or other support surface. In some examples, during the cleaning process, the platform 340 rotates the substrate 302 in the same or a different rotational direction as the brush 304. In other examples, the substrate 302 can be conveyed in a linear direction, and the substrate 302 can rotate or not rotate.

[0046] Figure 3B is a top view of another exemplary system 350 for cleaning a substrate 102 during a cleaning process, including another exemplary brush 352. The exemplary system 350 includes a support arm 306, an actuator 308, a spindle 312, reservoirs 316, 318, nozzles 320, a control circuit 322, valves 324, 326, and a platform 340 described above in connection with Figure 3A FIG.

[0047] Figure 3B The exemplary brush 352 of FIG. includes a brush body 356, a top plate 358, and a bottom plate 360. The top plate 358 may be similar or identical to Figure 3A the top plate 328 of FIG. In the Figure 3B example of FIG., the top plate 358 and the bottom plate 360 are connected together to provide top and bottom support for the brush body 356. In other examples, the top plate 358 and the bottom plate 360 may be separately connected to the brush body 356 to provide rigidity and / or control the dispensing of chemicals from the brush body 356.

[0048] Figure 5 An exemplary circular protrusion 362 is shown. Different brushes 352 may have protrusions 362 of different shapes, sizes, and / or distributions on the bottom surface of the brush. Although the exemplary brush 352 includes a corresponding bottom plate 360, in other examples, the brush may include protrusions or nodules while omitting the bottom plate 360.

[0049] The top plate 358 includes a channel 364 with an inlet 366. The channel 364 and the inlet 366 may be similar or identical to Figure 3A the exemplary channel 336 and inlet 338 of the brush 304 of FIG. However, as described above, the channel 364 and / or the inlet 366 may have any desired shape, size, and / or number to receive, disperse, and dispense a second chemical 314 to the substrate 302. The annular space 368 of the top plate 358 is concentric with the annular space 370 of the bottom plate 360 and the annular space 372 of the brush body 356 and allows the delivery of a first chemical 310 to the substrate 302 through the spindle 312.

[0050] Although the above examples include one or more plates outside the porous polymer brush body, in some other examples, the brush body is overmolded or printed on an internal plate or other structure. In some such examples, the internal plate or other structure implements channels, inlets, and / or an interface with the brush body to disperse the second chemical 314 from the nozzle 320. The internal plate or other structure may include the spindle 312 and / or be configured to connect to the spindle 312 to drive the brush and dispense the first chemical 310 through the annular space in the porous polymer brush body.

[0051] In Figure 3A and3B In the example, the radial dimension of the brush body is greater than the axial dimension, and the end face is provided with a microtexture.

[0052] Figure 4A and 4B FIG. 3 is a top view of the brush 304 and the substrate 302 at different radial and / or angular positions of the brush 304 on the surface of the substrate 302 during an exemplary cleaning process. The exemplary brush 304 is supported, positioned, and rotated by a support arm 306. The support arm 306 also delivers chemicals 310, 314 to the brush 304 (e.g., to the annular spaces 332, 334 of the brush 304 and the inlet 338 of the channel 336).

[0053] The exemplary substrate 302 can be rotated in either direction or held stationary, while the support arm 306 moves the brush 304 above the surface of the substrate 302 and brings it into contact with the substrate 302. The support arm 306 also controls the rotation of the brush 304 via a spindle 312. The radial position of the brush 304 on the substrate 302 is controlled by moving the support arm 306 relative to the substrate 302, while the angular position of the brush 304 relative to the surface of the substrate 302 is controlled by rotating the substrate 302. However, in other examples, the support arm 306 can be capable of positioning the brush 304 at any angular and / or radial position on the substrate 302. The support arm 306 can also control the distance between the brush 304 and the substrate 302, and / or the pressure exerted by the brush 304 on the substrate 302.

[0054] Figure 6A Shows Figure 3B A top view and a front view of an exemplary surface 602 of a bump 362 of Figure 2A The exemplary surface 602 has a microtexture, including circular surfaces or microstructures that repeat in a substantially constant pattern, which can be similar or identical to the exemplary microtexture of Figure 6B Shows Figure 3B A top view and a front view of an exemplary surface 604 of a bump 362 of Figure 2B The exemplary surface 604 has a microtexture, including sharp surfaces or microstructures distributed in a substantially constant pattern, which can be similar or identical to the exemplary microtexture of Figure 6C Shows Figure 3B A top view and a front view of an exemplary surface 606 of a bump 362 of Figure 2CThe exemplary micro-textures are similar or identical. In some other examples, the micro-texture may include linear features (e.g., elongated features with a width less than 1 mm). Each exemplary texture is applied uniformly across the surface 602-606 of the bump 362, but may also be applied irregularly, and / or applied to different bumps 362 of the brush 354. Any exemplary texture may have features with constant and / or different orientations on the surface 606 of the brush 304 or the bump 362. Additionally or alternatively, any exemplary texture may have features that are aligned with and / or transverse to the direction of movement of the brush 304 and / or the bump 362 during the cleaning operation. In some examples, the micro-textures described in connection with the bump 362 are also applicable to Figure 3A the contact surface 331 of the brush body 330 described in Figures 2A-2C and 6A-6C, which contact surface may be textureless or include micro-textures and / or patterns as described in

[0055] Although Figures 2A-2C exemplary micro-textures and patterns are shown in and 6A-6C, the shape of the microstructure, the concentration or density of the features, the size of the microstructure, the depth of the microstructure, and / or any other geometric aspect of the microstructure may be modified to obtain a desired cleaning effect, a unique wiping function (e.g., enhanced lubrication, increased friction, better cleaning efficiency), and / or a different dispensing effect of one or more chemicals applied to the substrates 102, 302. Different portions of the brush bodies 108, 330 and / or different bumps 112, 362 may have different micro-texture features or characteristics. The same or different micro-textures may be used in conjunction with different shapes of the bumps 112, 362. The features and / or characteristics of the micro-texture may be selected based on the type of chemicals used during the cleaning process, e.g., to facilitate or mitigate Figures 3A-3B the mixing of different chemicals 310, 314 on the surfaces of the substrates 102, 302.

[0056] Figure 7 is a representative flowchart of an exemplary method 700 that uses a brush with a micro-texture to clean a substrate. Method 700 may be performed, for example, using Figures 1A-1C any of the brushes 100, 110, 120 or Figure 3A and 3B the brushes 304, 354.

[0057] Block 702 includes molding a brush body (e.g., Figures 1A-1C the brush body 108) around a support structure (e.g., Figures 1A-1C the mandrel 106) such that the brush body 108 includes a micro-texture on its surface. In some other examples, block 702 may include molding the brush body separately (e.g., Figure 3A 、3B The brush bodies 330, 356) to include micro-textures and attach the brush bodies 330, 356 to a support structure (e.g., Figure 3A the annular plate 328, Figure 3B the top plate 358 and the bottom plate 360). In some other examples, the brush body is a sponge brush made of a porous polymer only. The micro-textures can be designed or selected to provide a desired cleaning effect, wiping function (e.g., enhanced lubrication, increased friction, better cleaning efficiency), and / or dispensing effect of one or more chemicals.

[0058] Block 704 includes mounting the brush in the cleaning system using a support structure. For example, the brushes 100, 110, 120 can be mounted in the corresponding cleaning systems that rotate the brushes 100, 110, 120 via the mandrel 106. In other examples, the brushes 304, 354 can be mounted in the cleaning systems 300, 350 via the support structures 328, 358, 360 to dispense chemicals through the brushes 304, 354.

[0059] Block 706 includes arranging the brush to contact the substrates 102, 302. For example, the substrates 102, 302 can be conveyed to contact the brushes 100, 110, 120, 304, 354, and / or the brushes 100, 110, 120, 304, 354 can be moved to contact the substrates 102, 302.

[0060] Block 708 includes rotating and / or moving the brushes 100, 110, 120, 304, 354 to clean the substrates 102, 302 using the micro-textured surfaces of the brushes 100, 110, 120, 304, 354. For example, the surfaces 104, 331 and / or the bumps 112, 362 include micro-textured surfaces that provide desired effects during the cleaning operation. For example, the control circuits 134, 322 can control the corresponding actuators 132, 308 to rotate and / or move the brushes 100, 110, 120, 304, 354. In some examples, the rotation of the brush can be controlled based on the micro-textures present on the mounted brushes 100, 110, 120, 304, 354. For example, the control circuits 134, 322 can receive an input representing the micro-textures on the mounted brushes 100, 110, 120, 304, 354 and adjust the moving speed, moving direction, rotation speed, and / or rotation direction of the brushes 100, 110, 120, 304, 354 to enhance the effectiveness of the micro-textures during the cleaning process.

[0061] The frame 710 includes disengaging the brushes 100, 110, 120, 304, 354 from contact with the substrates 102, 302 (e.g., at the end of the cleaning process). For example, the substrates 102, 302 can be conveyed so as not to be in contact with the brushes 100, 110, 120, 304, 354, and / or the brushes 100, 110, 120, 304, 354 can be moved so as not to be in contact with the substrates 102, 302.

[0062] Then, the exemplary method 700 ends.

[0063] The exemplary control circuits 134, 322 include at least one controller or processor that controls the operation of the systems 100, 300, 350. The control circuits 134, 322 receive and process a plurality of inputs related to the performance and requirements of the systems 100, 300, 350. The control circuits 134, 322 can include one or more microprocessors, such as one or more “general-purpose” microprocessors, one or more dedicated microprocessors, and / or ASICs, and / or any other type of processing device. For example, the control circuits 134, 322 can include one or more digital signal processors (DSPs). The exemplary control circuits 134, 322 can also include one or more storage devices (e.g., ROM, flash memory, hard disk drive, and / or any other suitable optical, magnetic, and / or solid-state storage medium, and / or a combination thereof) and one or more memory devices (e.g., volatile and / or non-volatile memory).

[0064] The present method and system can be implemented by hardware, software, and / or a combination of hardware and software. For example, the present method and / or system can implement the control circuits 134, 322 in a centralized manner in at least one computing system or in a distributed manner, where different elements are distributed in several interconnected computing systems. Any type of computing system or other device suitable for executing the methods described herein is appropriate. A typical combination of hardware and software can include a general-purpose computing system that has a program or other code that, when loaded and executed, controls the computing system to perform the methods described herein. Another typical implementation can include one or more application-specific integrated circuits or chips. Some implementations can include a non-transitory machine-readable (e.g., computer-readable) medium (e.g., flash memory, optical disc, disk memory, or the like) having stored thereon one or more lines of code executable by a machine to cause the machine to perform the processes described herein. In this document, the term “non-transitory machine-readable medium” is defined to include all types of machine-readable storage media and to exclude propagated signals.

[0065] As used herein, the terms "circuit" and "circuitry" refer to physical electronic components (i.e., hardware) and any software and / or firmware ("code") that may configure the hardware, be executed by the hardware, and / or otherwise be associated with the hardware. For example, as used herein, when a particular processor and memory execute a first one or more lines of code, a first "circuit" may be formed, and when a second one or more lines of code are executed, a second "circuit" may be formed. As used herein, "and / or" refers to any one or more items in a list joined by "and / or". For example, "x and / or y" refers to any element in the three-element set {(x), (y), (x, y)}. In other words, "x and / or y" means "one or both of x and y". As another example, "x, y, and / or z" refers to any element in the seven-element set {(x), (y), (z), (x, y), (x, z), (y, z), (x, y, z)}. In other words, "x, y, and / or z" means "one or more of x, y, and z". As used herein, the term "exemplary" means serving as a non-limiting example, instance, or illustration. As used herein, the terms "for example" and "such as" introduce one or more lists of non-limiting examples, instances, or illustrations. As used herein, whenever circuitry includes the necessary hardware and code (if any) required to perform a function, the circuitry is "operable" to perform that function regardless of whether the performance of the function is disabled or not enabled (e.g., by user-configurable settings, factory tuning, etc.).

[0066] Although the method and / or system have been described with reference to certain implementations, those skilled in the art will understand that various changes can be made and equivalents can be substituted without departing from the scope of the method and / or system. In addition, many modifications can be made to adapt a particular situation or material to the teachings of the disclosure without departing from its scope. Therefore, the method and / or system are not limited to the particular implementations disclosed. Instead, the method and / or system will include all implementations that fall within the scope of the appended claims, whether literally or under the doctrine of equivalents.

Claims

1. A brush for cleaning a substrate, the brush comprising: a porous polymer brush body having one or more contact surfaces for cleaning the substrate, the one or more contact surfaces comprising micro-textures; and a brush support configured to mechanically couple the brush body to an actuator.

2. The brush according to claim 1, wherein the brush body is substantially cylindrical, and an outer surface of the cylindrical brush body comprises the micro-textures.

3. The brush according to claim 2, wherein the brush support comprises a mandrel configured to rotate the brush about an axis of the cylindrical brush body.

4. The brush according to claim 1, wherein the brush body is substantially cylindrical and comprises a plurality of nodules extending from the cylindrical brush body, the plurality of nodules comprising the contact surfaces, and the contact surfaces of the plurality of nodules comprise the micro-textures.

5. The brush according to claim 4, wherein an axial dimension of the brush body is greater than a radial dimension.

6. The brush according to claim 1, wherein the brush body is plate-shaped, a radial dimension thereof is greater than an axial dimension, and a first end face of the brush body comprises the micro-textures.

7. The brush according to claim 6, wherein the brush support comprises a plate attached to a second end face opposite to the first end face of the brush body.

8. The brush according to claim 6, wherein the brush body comprises a plurality of nodules extending from the first end face of the brush body, the plurality of nodules comprising the micro-textures.

9. The brush according to claim 1, wherein the micro-textures are configured to provide enhanced lubrication between the one or more contact surfaces and the substrate as compared to a situation where the one or more contact surfaces lack the micro-textures.

10. The brush according to claim 1, wherein the micro-textures are configured to provide increased friction between the one or more contact surfaces and the substrate as compared to a situation where the one or more contact surfaces lack the micro-textures.

11. The brush according to claim 1, wherein the micro-textures are configured to provide better cleaning efficiency as compared to a situation where the one or more contact surfaces lack the micro-textures.

12. The brush according to claim 1, wherein the porous polymer brush body comprises at least one of polyvinyl acetal foam, polyurethane foam, polyolefin foam, porous fluoropolymer, silicone foam, polyester foam, nylon foam or polyacrylate foam.

13. The brush according to claim 1, wherein the porous polymer brush body is configured to disperse fluid through the micro-textures.

14. The brush according to claim 1, wherein the brush body is overmolded on the brush support, mounted on the brush support after assembly, or assembled into a sponge brush only.

15. The brush according to claim 1, wherein the micro-textures comprise a plurality of features aligned along a direction of movement of the brush body during the cleaning process.

16. The brush according to claim 1, wherein the microtexture comprises a plurality of features that are aligned transversely to the direction of movement of the brush body during the cleaning process.

17. The brush according to claim 1, wherein the microtexture comprises a plurality of features having at least one shape selected from circular, pointed, square, or linear.

18. The brush according to claim 1, wherein the microtexture comprises a plurality of features having a constant orientation on the surface of the brush body.

19. The brush according to claim 1, wherein the microtexture comprises a plurality of features having different orientations on the surface of the brush body.

20. A system for cleaning a substrate, the system comprising: a cleaning brush, comprising: a porous polymer brush body having one or more contact surfaces for cleaning the substrate, the one or more contact surfaces comprising a microtexture; and a brush support configured to mechanically support the brush body; and an actuator configured to be coupled to the brush support and rotate the brush about the axis of the cleaning brush via the brush support.

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