Recipe access control method and device, equipment and storage medium

Abstract

The invention discloses a Recipe access control method and device, equipment and a storage medium, and the method comprises the steps: calculating an identity basic score of a user in response to a request instruction which is initiated by the user and is used for accessing Recipe with access limitation; the confidentiality score of the Recipe is calculated; calculating a user access score of the user for accessing the Recipe in combination with the Recipe, the historical operation data of the user and the identity basic score; judging whether the user access score is greater than the confidentiality score; if yes, opening a Recipe access permission to the user; if not, an access application mechanism is provided for the user, so that the user initiates a corresponding application instruction based on the access application mechanism, and the access permission of the user is determined in response to the application instruction. According to the invention, the control mode considering all-directional influence factors can cover various conditions, fine Recipe access control can be realized, and the confidentiality and security of Recipe are ensured.

Description

Technical Field

[0001] This application relates to the technical field of Recipe access control, and specifically relates to a method, device, equipment and storage medium for accessing and controlling Recipe. Background Art

[0002] Recipe is a precise combination of process parameters. In the semiconductor field, it includes various process parameters in the semiconductor manufacturing process. Precise control of these parameters is crucial for ensuring the performance, reliability and consistency of chips. Even a tiny parameter deviation may lead to chip function failure, performance degradation or yield reduction. At the same time, Recipe also details the sequence of process steps and operation methods, enabling engineers to precisely control the entire manufacturing process and achieve the transformation from silicon wafers to high-performance chips. Unique Recipes are often the crystallization of enterprises / scientific research institutions, etc. in technological research and development, representing their core technical capabilities. If its Recipe is obtained by competitors, it is very likely to result in the loss of its own competitive advantage. Therefore, Recipe is very important and confidential and cannot be easily accessed by others, which requires fine management of Recipe.

[0003] The existing methods for accessing and controlling Recipe are usually relatively single, without comprehensively considering various influencing factors and situations. Therefore, fine Recipe access control cannot be achieved, affecting the confidentiality and security of Recipe. Summary of the Invention

[0004] In view of this, this application provides a method, device, equipment and storage medium for accessing and controlling Recipe, which is used to solve the problem that the existing methods for accessing and controlling Recipe are usually relatively single, without comprehensively considering various influencing factors and situations. Therefore, fine Recipe access control cannot be achieved, affecting the confidentiality and security of Recipe.

[0005] To achieve the above objectives, the following solutions are proposed:

[0006] In the first aspect, a method for accessing and controlling Recipe includes:

[0007] Responding to a request instruction for accessing a Recipe with access restrictions initiated by a user, and calculating the identity base score of the user;

[0008] Determining the experimental project corresponding to the Recipe, and calculating a confidentiality score according to the experimental project and the Recipe;

[0009] Obtain the historical operation data of the user, and calculate the user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the identity base score;

[0010] Determine whether the user access score is greater than the confidentiality score;

[0011] If so, grant the user access permission to the Recipe;

[0012] If not, provide the user with an access application mechanism for the user to initiate a corresponding application instruction based on the access application mechanism, and determine the user's access permission in response to the application instruction.

[0013] In a second aspect, an access control device for a Recipe includes:

[0014] An access request response module, configured to respond to a request instruction for the user to access a Recipe with access restrictions, and calculate the identity base score of the user;

[0015] A confidentiality score calculation module, configured to determine the experimental project corresponding to the Recipe, and calculate the confidentiality score according to the experimental project and the Recipe;

[0016] A user access score calculation module, configured to obtain the historical operation data of the user, and calculate the user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the identity base score;

[0017] A judgment module, configured to determine whether the user access score is greater than the confidentiality score;

[0018] A permission opening module, configured to, if so, grant the user access permission to the Recipe;

[0019] An access restriction module, configured to, if not, provide the user with an access application mechanism for the user to initiate a corresponding application instruction based on the access application mechanism, and determine the user's access permission in response to the application instruction.

[0020] In a third aspect, an access control device for a Recipe includes a memory and a processor;

[0021] The memory is used to store programs;

[0022] The processor is configured to execute the program to implement each step of the access control method for a Recipe as described in any item of the first aspect.

[0023] Fourth aspect, a storage medium, on which a computer program is stored, and when the computer program is executed by a processor, each step of the access control method of the Recipe according to any one of the first aspect is implemented.

[0024] As can be seen from the above technical solution, the present application first responds to a request instruction for accessing a Recipe with access restrictions initiated by a user, calculates the identity base score of the user; determines the experimental project corresponding to the Recipe, and calculates a confidentiality score according to the experimental project and the Recipe; obtains the historical operation data of the user, and calculates the user access score for the user to access the Recipe in combination with the Recipe, historical operation data and identity base score; determines whether the user access score is greater than the confidentiality score; if so, opens the access permission of the Recipe to the user; if not, provides an access application mechanism for the user, so that the user can initiate a corresponding application instruction based on the access application mechanism, and determines the access permission of the user in response to the application instruction.

[0025] On the one hand, the present application takes into account various situations such as personnel and experimental projects, all of which are considered as influencing factors that can affect Recipe access control, so as to implement different permission controls according to different situations. For the experimental project corresponding to the Recipe that the user wants to access, considering that there may be different management requirements for the experimental project and the Recipe itself, a confidentiality score is calculated; different user identities will have different access requirements or access rights, so an identity base score is calculated according to the user identity. At the same time, the historical operation situation of the user will show the user's own capabilities and other situations. Therefore, the historical operation data is obtained, and the user access score for the user to access the Recipe is calculated according to the historical operation data, Recipe and identity base score. This user access score can indicate the user's performance based on the Recipe and is used as an indicator to judge whether the access permission can be opened to the user. Then, by comparing the size of this indicator with the confidentiality score, it is possible to clarify what kind of access permission is set for the user, so as to fully protect the Recipe from being leaked and exposed. If the user access score is greater than the confidentiality score, it is determined that the user does not pose a threat to the security of the Recipe, that is, the access permission is opened to the user; if the user access score is less than the confidentiality score, it is considered that the user may be an insecure user and access restrictions need to be imposed on the user. At the same time, an access application mechanism is provided, which is equivalent to providing an opportunity for the user, abandoning the traditional "one-size-fits-all" control method, and forming a flexible and controllable Recipe access control method on the basis of ensuring security. The control method of the present application that takes into account all-round influencing factors can cover various situations and can achieve fine Recipe access control to ensure the confidentiality and security of the Recipe.

[0026] On the other hand, on the basis of ensuring the safety of the Recipe, the present application can also achieve efficient Recipe sharing, enabling others (such as engineers and scientists in different enterprises or research institutions) to conduct research and development on the basis of each other, which helps to avoid duplicate labor. For example, for a Recipe that has been successfully executed, if the access permission of the user is opened based on the method provided by the present application, then the user can access and learn this Recipe, which can help the user improve work and learning efficiency, and further promote the rapid iteration and innovation of technology, so as to improve the technical level of the entire semiconductor industry.

[0027] On the other hand, the commonly used permission control method in the prior art is usually based on the RBAC (Role-Based Access Control) model, combined with ABE (Attribute-Based Encryption) and MFA (Multi-Factor Authentication). However, this method cannot effectively solve the problems of information sharing and technology confidentiality at the same time, has relatively high requirements for the confidentiality quality of personnel themselves, and will also affect the control efficiency. The present application is based on the semiconductor laboratory operation control system invented by the applicant. When performing equipment operations assisted by robotic process automation (RPA) on its advanced semiconductor equipment, considering the concurrent situations of in-school, industry-university projects, basic teaching, and equipment training work, in order to better manage Recipes, the present application proposes an access control method for Recipes, which can balance different user identities and experimental projects, make better use of system resources in the environment of concurrent industry and teaching, ensure confidentiality management, promote Recipe sharing while balancing project management, so as to improve the usage, execution, and permission control levels of Recipes. Brief Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the provided drawings.

[0029] Figure 1 It is an optional flowchart of an access control method for a Recipe provided by an embodiment of the present application;

[0030] Figure 2 It is a schematic diagram for dividing basic identity types provided by an embodiment of the present application;

[0031] Figure 3 Schematic diagram of a role division provided by an embodiment of the present application;

[0032] Figure 4 Schematic diagram of a voting window for destroying an executed Recipe provided by an embodiment of the present application;

[0033] Figure 5 Another schematic diagram of a voting window for destroying an executed Recipe provided by an embodiment of the present application;

[0034] Figure 6 Schematic diagram of a parameter input interface provided by an embodiment of the present application;

[0035] Figure 7 Schematic diagram of the structure of an access control device for a Recipe provided by an embodiment of the present application;

[0036] Figure 8 Schematic diagram of the structure of an access control device for a Recipe provided by an embodiment of the present application. Detailed implementation manners

[0037] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0038] The present invention can be used in many general or special computing device environments or configurations. For example: personal computers, server computers, handheld devices or portable devices, tablet devices, multi-processor devices, distributed computing environments including any of the above devices or equipment, and so on.

[0039] An embodiment of the present invention provides an access control method for a Recipe. This method can be applied to various computer terminals or intelligent terminals, and its execution subject can be a processor or server of a computer terminal or intelligent terminal. The flowchart of the method is as Figure 1 shown, and specifically includes:

[0040] S1: In response to a request instruction for accessing a Recipe with access restrictions initiated by a user, calculate the identity base score of the user.

[0041] All kinds of process parameters specified in the Recipe include temperature, pressure, gas flow rate, ion implantation energy and dosage, photolithography exposure time and intensity, etc. In semiconductor manufacturing, extremely complex process steps are involved, such as multi-layer photolithography, high aspect ratio etching, high-precision thin film deposition, etc. Therefore, having an advanced Recipe can enable enterprises / scientific research institutions to gain huge advantages in terms of chip performance, power consumption, cost, etc. Then, for such an important Recipe, in terms of security, it is essential to pay attention to the identity of the users who access it.

[0042] Specifically, this application can be applied to any semiconductor public platform. Specifically, it can be a semiconductor laboratory control operating system. For example, users can initiate an access request to a Recipe with access restrictions through the semiconductor laboratory control operating system. Then, this application can respond to the request instruction and calculate the identity base score, which is the score related to the user's identity.

[0043] From large research institutes, enterprises, and universities to small laboratories, experimental projects, research groups, etc., different personnel will correspond to different identities. For the personnel who request access in this application, they can be called users. Therefore, users with different identities have different levels of work or study, different management authorities, and different degrees of knowledge of technical secrets. Then, corresponding permissions will also be formed for the Recipe, and thus the identity base score can be calculated based on the identity, which can clearly indicate the confidentiality level of the user.

[0044] S2: Determine the experimental project corresponding to the Recipe, and calculate the confidentiality score based on the experimental project and the Recipe.

[0045] Each Recipe will correspond to a specific experimental project (or scientific research project). Then, different Recipes may play different roles or involve different confidentiality levels in the same or different experimental projects. Therefore, the confidentiality score is closely related to the specific experimental project. At the same time, the Recipe itself also has certain characteristics and features. Therefore, the confidentiality score can be calculated based on the experimental project and the Recipe itself.

[0046] It can be understood that the larger the confidentiality score, the higher the required confidentiality level, and the smaller the confidentiality score, the lower the required confidentiality level. Therefore, the confidentiality score of the Recipe calculated in this step can clarify the high or low confidentiality level of the Recipe, facilitate the permission judgment and control of the accessing users, and provide a specific basis for the subsequent access permission control.

[0047] S3: Obtain the historical operation data of the user, and calculate the user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the identity base score.

[0048] For the semiconductor manufacturing field, from the user's perspective, the factors that can affect the security of the Recipe, in addition to the user's own identity, also involve the user's personal experimental operation ability, learning ability, etc. These factors of expression ability will be reflected in their historical operation data. Therefore, when calculating the user access score, it is necessary to obtain this data, so as to calculate and obtain by combining this data, the Recipe, and the identity base score.

[0049] This application fully considers the user identity, historical operation data, and the situation of the Recipe itself for comprehensive analysis and calculation, and quantifies the user's confidentiality level in a clear score form, so as to use the user access score as an indicator for subsequent opening or restricting access to the Recipe, and achieve efficient Recipe permission management.

[0050] S4: Determine whether the user access score is greater than the confidentiality score.

[0051] Compare the user access score with the confidentiality score, and quantify the user's confidentiality ability according to the comparison result, breaking through the traditional single management mode based on roles, and no longer "one-size-fits-all" giving the same permissions to a certain type of user. Moreover, both the user access score and the confidentiality score are the results of multi-dimensional quantitative evaluation and calculation, which can meet the refined, personalized, and flexible access control requirements.

[0052] In addition, this method also has dynamic adaptability. For example, when the same user applies for access at different times, their identity may be different, and the Recipe accessed each time may also be different. The attributes of the same or different Recipes in different experimental projects may also be different. Therefore, the access control method provided by this application can achieve precise control according to the actual situation, and comprehensively ensure the confidentiality and security of each Recipe.

[0053] S5: If so, grant the user access permission to the Recipe.

[0054] If the user access score is greater than the confidentiality score, it is determined that the user has the ability to keep the Recipe confidential, so the access permission to the Recipe is granted. For example, the user can view the specific content in the Recipe.

[0055] S6: If not, provide an access application mechanism for the user, so that the user can initiate a corresponding application instruction based on the access application mechanism, and determine the user's access permission in response to the application instruction.

[0056] If the user access score is not greater than the confidentiality score, it is considered that the user has a confidentiality risk and needs to be restricted from accessing. However, in order to achieve flexible control and management, this application provides a user access application mechanism for users, giving users an opportunity to apply for access, abandoning the traditional "one-size-fits-all" form. In this way, it can not only ensure the security of the Recipe, but also improve the user's access experience.

[0057] After receiving the application instruction initiated by the user, partial permission control can be considered for the user according to the specific situation of the user, the specific situation of the Recipe, the specific situation of the experimental project, the specific situation of the laboratory where the experimental project is located, and the specific situation of the unit where the laboratory is located, so as to further achieve more flexible and dynamic control and management.

[0058] From the above technical solutions, on the one hand, this application takes into account various situations such as personnel and experimental projects, all of which are considered as influencing factors that can affect Recipe access control. Thus, different permission controls are implemented according to different situations. For the experimental project corresponding to the Recipe that the user wants to access, a confidentiality score is calculated considering that the experimental project and the Recipe itself may have different management requirements. Different user identities will have different access requirements or access rights, so an identity base score is calculated according to the user identity. At the same time, the user's historical operation situation can show the user's own capabilities and other situations. Therefore, historical operation data is obtained, and the user access score for the user to access the Recipe is calculated based on the historical operation data, the Recipe, and the identity base score. This user access score can indicate the user's expressiveness based on the Recipe and is used as an indicator to judge whether to open the access permission to the user. Then, by comparing the size of this indicator with the confidentiality score, it can be determined what kind of access permission to set for the user, so as to fully protect the Recipe from being leaked or exposed. If the user access score is greater than the confidentiality score, it is determined that the user will not threaten the security of the Recipe, that is, the access permission is opened to the user; if the user access score is less than the confidentiality score, it is considered that the user may be an insecure user and needs to be restricted from accessing. At the same time, an access application mechanism is provided, which is equivalent to providing an opportunity for the user, abandoning the traditional "one-size-fits-all" control method, and forming a flexible and controllable Recipe access control method on the basis of ensuring security. This control method of this application that takes into account all-round influencing factors can cover various situations and can achieve fine Recipe access control to ensure the confidentiality and security of the Recipe.

[0059] On the other hand, while ensuring the safety of the Recipe, this application can also achieve efficient Recipe sharing, enabling others (such as engineers and scientists from different enterprises or research institutions) to conduct research and development based on each other's work, which helps to avoid duplicate labor. For example, for a Recipe that has been successfully executed, if the access rights of users are opened based on the method provided by this application, then users can access and learn this Recipe, which can help users improve work and learning efficiency, and further promote the rapid iteration and innovation of technology, thus enhancing the technical level of the entire semiconductor industry.

[0060] On the other hand, the commonly used permission control methods in the prior art are usually based on the RBAC (Role-Based Access Control) model, combined with ABE (Attribute-Based Encryption) and MFA (Multi-Factor Authentication). However, this method cannot effectively solve the problems of information sharing and technology confidentiality, has relatively high requirements for the confidentiality qualities of personnel themselves, and also affects the control efficiency. This application is based on the semiconductor laboratory operation control system pioneered by the applicant. When performing equipment operations assisted by robotic process automation (RPA) on its advanced semiconductor equipment, considering the concurrent situations of in-school, industry-university projects, basic teaching, and equipment training work, in order to better manage Recipes, this application proposes an access control method for Recipes, which can balance different user identities and experimental projects, make better use of system resources in an environment where industry and teaching are concurrent, and ensure confidentiality management. While balancing project management, it promotes the sharing of Recipes to improve the usage, execution, and permission control levels of Recipes.

[0061] In the method provided by the embodiments of the present invention, the process of calculating the basic identity score of the user is specifically described as follows:

[0062] Obtain the basic identity of the user, and match the first identity score corresponding to the basic identity from a pre-established basic score table;

[0063] Obtain the laboratory where the experimental project is located;

[0064] Calculate the second identity score of the user according to the laboratory and the experimental project;

[0065] Perform a summation calculation on the first identity score and the second identity score to obtain the basic identity score.

[0066] Specifically, in addition to the basic identity, other identities of the user can also be considered. Therefore, this application sets two dimensions for the identity base score. One is the most basic identity of the user himself, that is, the basic identity, and the other is other additional identities of the user.

[0067] For the basic identity of the user, a basic score table has been pre-established, which contains the scores set for each basic identity. In an example where Recipe belongs to the laboratory scenario, the basic score table is shown in Table 1 below:

[0068] Table 1

[0069]

[0070] As Figure 2 shown, laboratory personnel refer to those who are responsible for managing the entire laboratory, that is, academic leaders, including the person in charge, engineers, etc.; laboratory category 1 personnel can include professors, lecturers, assistant researchers, postdoctoral fellows, etc. belonging to the laboratory; laboratory category 2 can include doctoral students, master's students, etc. belonging to the laboratory; laboratory category 3 personnel can include learners, such as those newly joining the laboratory / experimental project / Recipe, and the basic identities of these newly joined personnel may change over time or with the accumulation of experience; personnel outside the laboratory refer to those who do not belong to the laboratory, including those who enter the laboratory temporarily / short-term for learning, technical experts, equipment manufacturers, visitors, etc.

[0071] The basic score table can be dynamically adjusted according to the user's office / learning environment to improve adaptability. The first identity score can be set differently according to the detailed identities at each level in the basic identity type. This embodiment does not limit this.

[0072] Since there are certain relationships between the Recipe involved in this application and its experimental project and the laboratory where it is located, then personnel with different roles will also have different permissions. It can be understood that for Recipe, it will correspond to laboratory equipment. For example, in different laboratories and different experimental projects, different numbers and types of laboratory equipment will be used. Therefore, the other additional identities of the user can be set from the perspectives of laboratory equipment and experimental projects to calculate the second identity score of the user.

[0073] The first identity score and the second identity score are summed up to obtain the comprehensive identity base score.

[0074] Optionally, for the process of calculating the second identity score of the user according to the laboratory and the experimental project, the following steps can be included. Calculate the second identity score with the formula:

[0075] ;

[0076] Among them, represents the user's second identity score, represents the th role to which the user belongs under the said laboratory and / or experimental project, represents the number of types of roles to which the user belongs, represents the th role value of the role to which the user belongs, represents the th role weight of the role to which the user belongs.

[0077] In a specific embodiment, taking a university laboratory as the background, as Figure 3 shown, starting from laboratory equipment and experimental projects, for laboratory equipment, the user will have certain roles, and for experimental projects, the user will also have certain roles. For laboratory equipment, it can include equipment management personnel, equipment users, and equipment manufacturers.

[0078] Equipment management personnel include internal management personnel and third - party management personnel. Among them, third - party management personnel are also managed by internal management personnel; internal management personnel include main responsible personnel and non - main responsible personnel; third - party management personnel also include main responsible personnel and non - main responsible personnel. For example, in an example, a laboratory has 100 pieces of equipment, corresponding to 12 internal management personnel. For each piece of equipment, it corresponds to one or more main responsible personnel and one or more non - main responsible personnel.

[0079] Equipment users include on - campus personnel and off - campus personnel; on - campus personnel include leaders and experimenters; off - campus personnel also include leaders and experimenters. For example, in an example, whether it is on - campus personnel or off - campus personnel, the experimenter can be a student / assistant / associate, and the leader can be the experimenter's tutor.

[0080] Equipment manufacturers refer to enterprises or companies that produce and manufacture equipment such as instruments and equipment required by the laboratory.

[0081] For experimental projects, it can include project responsible personnel, project execution personnel, on - site management personnel, and on - site liaison personnel; project responsible personnel include first - level responsible personnel and second - level responsible personnel; project execution personnel include execution team leaders and ordinary execution personnel.

[0082] Project responsible personnel refer to the core personnel responsible for the planning, execution, and result delivery of experimental projects. Among them, the first - level responsible personnel refer to the highest managers of the project, who are ultimately responsible for the overall success or failure of the project, and the second - level responsible personnel refer to those in charge of specific modules or sub - topics of the experimental project and report to the first - level responsible personnel.

[0083] Project executors refer to the personnel who specifically execute experimental projects; among them, the team leader refers to the person in charge of the execution of the experimental project and team coordination, and ordinary executors refer to the basic executors of the experimental project, who are responsible for completing specific experiments, data analysis or other tasks according to the arrangements of the project responsible personnel or the team leader and do not assume management responsibilities.

[0084] On-site managers refer to the personnel who conduct overall management at the execution site of the experimental project, and on-site liaison personnel refer to the personnel who conduct project liaison at the execution site of the experimental project.

[0085] Therefore, considering both laboratory equipment and experimental projects, the same user may have multiple different roles. For example, if a user's roles include equipment manufacturer and on-site liaison personnel, then it is 2.

[0086] In one embodiment, the calculation formula for the identity base score is:

[0087] ;

[0088] Among them, represents the identity base score, represents the first identity score.

[0089] The process of calculating the confidentiality score according to the experimental project and the Recipe in this application will be described in detail below.

[0090] Obtain the project type of the experimental project, and determine the project base score of the experimental project based on the project type;

[0091] Calculate the sensitivity score and uniqueness score of the Recipe;

[0092] Add the project base score, sensitivity score and uniqueness score to obtain the confidentiality score.

[0093] Specifically, the project type can be explored from two aspects, including the type determined by the nature of the project itself and the type determined by the project status. The type determined by the nature of the project itself can include internal R & D, technical communication, technical cooperation, training and learning, etc., and the type determined by the nature of the project itself can also be determined from the project contract and funds, such as R & D projects supported by enterprise funds, scientific research projects supported by external paid users, etc.; the type determined by the project status can be viewed according to the early or late stage of project progress, such as early stage type, middle stage type, late stage type, etc. The project base score can be set in advance and calculated according to the nature of the project itself and / or the project status. For example, in an optional embodiment, the calculation formula for the project base score is:

[0094] ;

[0095] Among them, represents the basic score of the project, represents the score of the nature of the project itself, represents the score of the project status, and are both weights.

[0096] The specific preset scores can be as shown in Table 2 below:

[0097] Table 2

[0098]

[0099] The above setting method takes into account that the confidentiality levels of internal R & D, technology cooperation, technology exchange, and training and learning are decreasing in turn. Therefore, the scores of the nature of the project itself also show a decreasing trend. At the same time, from the perspective of the project progress time, the longer the project progresses, the more Recipes or other data are involved, and the deeper the confidentiality level required. Therefore, according to the time stages of early, mid-term, late, and the project has been completed, the scores of the project status show an increasing trend. For the types determined by the project status, it can also include project suspension. Specifically, the scores of the project status are set considering the reasons for suspension. For example, if there are problems with the experimental project itself, the score of the project status is 0. In addition, for the types of projects that have been concluded, the conclusion time of the experimental project can be obtained, and the score of the project status can be adjusted according to the time limit. It can be understood that according to different application scenarios and actual needs, the above specific scores can be determined as appropriate, and this embodiment does not limit this.

[0100] The sensitive score refers to the score corresponding to the factors affecting the sensitivity of the Recipe. The higher the sensitive score, the stronger the sensitivity; the unique score refers to the score corresponding to the factors affecting the uniqueness of the Recipe. The higher the unique score, the stronger the uniqueness. Therefore, when calculating the confidentiality score of the Recipe, in addition to considering the basic score of the project, it is also necessary to consider these factors that can affect the privacy of the experimental project, and assign corresponding scores according to the strength and weakness of privacy. By comprehensively considering various factors, strict but flexible control and management can be achieved.

[0101] Optionally, for the sensitive score of the above Recipe, its calculation formula can be:

[0102] ;

[0103] Among them, represents the sensitive score, represents the th sensitive factor of the said Recipe, represents the number of sensitive factors, represents the th sensitive sub - value of the sensitive factor of the said Recipe, represents the th weight of the sensitive factor.

[0104] Specifically, there may be multiple sensitive factors for a Recipe, including Recipe executors, data involved in the Recipe, equipment used in Recipe execution, etc.

[0105] Among them, different Recipe executors have different sensitivities. For example, if the Recipe executor is a user with a higher identity base score, the sensitivity of the Recipe will be stronger. This is because the higher the identity base score, the more valuable the Recipe developed or executed by it; different Recipes involve different parameters and process flows. For example, if a certain Recipe is related to the achievements and development of an entire experimental project or laboratory, including core process parameters and specific technologies, then the sensitivity of this Recipe will be stronger; different Recipes use different numbers of equipment and different degrees of importance of the equipment during execution. Correspondingly, the sensitivity of the Recipe is also different. For example, if a certain Recipe uses a large number of equipment or the importance of the equipment used is relatively high, then the sensitivity of this Recipe will be stronger, or if a certain Recipe uses equipment that is more likely to trigger illegal use or has a greater use risk, then the sensitivity of this Recipe will also be stronger.

[0106] Therefore, for factors with stronger sensitivity, their corresponding sensitive sub - values are larger. The sensitive sub - value can be determined according to specific application scenarios and actual situations, and this embodiment does not limit it.

[0107] Optionally, for the uniqueness score of the above Recipe, its calculation formula is:

[0108] ;

[0109] wherein, represents the uniqueness score, represents the th uniqueness factor of the said Recipe, represents the number of uniqueness factors, represents the th unique sub - value of the uniqueness factor of the said Recipe, represents the th weight of the uniqueness factor.

[0110] Specifically, there may be multiple uniqueness factors for a Recipe, including Recipe process maturity, technical uniqueness, influence degree of index comparison, historical disclosure records and scope, etc. The uniqueness of the Recipe can be judged through databases or tools such as historical Recipes, historical process data, AI, and large models in the semiconductor field.

[0111] Among them, different Recipes have different process maturities. If the process maturity of a Recipe is very sufficient, its uniqueness is relatively low; different Recipes have corresponding laboratory characteristics and project characteristics. For example, if a Recipe is data unique to a laboratory or an experimental project, and other laboratories or experimental projects do not have or are not involved, then its uniqueness is relatively high; different Recipes have different experimental effects after execution. For example, if the experimental effect obtained after a Recipe is executed is relatively good compared to the standard implementation effect stipulated in the semiconductor field, then its uniqueness is relatively high; different Recipes have different historical disclosure situations. For example, if a Recipe is completely existing or only has minor differences compared to existing Recipes and does not produce actual effects or uses, then its uniqueness is relatively low, and this can determine the degree of uniqueness according to the disclosed records and scope.

[0112] Therefore, for factors with stronger uniqueness, their corresponding uniqueness sub - values are larger. The uniqueness sub - values can be determined according to specific application scenarios and actual situations, and this embodiment does not limit this.

[0113] In an embodiment provided by the present application, the calculation formula for the confidentiality score is:

[0114] ;

[0115] Among them, represents the confidentiality score, represents the project base score.

[0116] The following embodiments will explain in detail the steps of calculating the user access score for the user to access the Recipe by combining the Recipe, historical operation data, and identity base score in the present application.

[0117] Calculate the user's historical execution evaluation score and special Recipe contribution score according to the historical operation data;

[0118] Obtain the user's trusted indicators, and calculate the Recipe public score according to the trusted indicators;

[0119] Sum up the identity base score, historical execution evaluation score, special Recipe contribution score, and Recipe disclosure score to obtain the user access score.

[0120] Specifically, the historical execution evaluation score of the user can be calculated from the historical operation data. The historical execution evaluation score refers to the evaluation score of the user in the past execution of historical Recipes, such as success rate, failure rate, independent completion rate, efficiency, etc. These situations can all reflect the user's ability. If the user has a high success rate, good independent completion rate, or high efficiency, then the user's historical execution evaluation score is relatively high. However, from another perspective, if the user always encounters difficulties or finally fails when executing various historical Recipes before, it can be considered that the stronger the user's purpose of learning and accessing Recipes, the weaker the corresponding possibility of leakage, and a relatively high historical execution evaluation score can be set for the user.

[0121] The special Recipe contribution score of the user can also be calculated from the historical operation data. The special Recipe contribution score refers to whether the user has made contributions to one or more special Recipes. Special Recipes can also be regarded as specific Recipes, such as Recipes that are of special significance in the semiconductor field, Recipes that have brought significant progress to the semiconductor field, Recipes that are most / most widely learned or applied. Then it can be considered that these Recipes are special. Therefore, if the user has made contributions to these Recipes, it can be considered that the user's personal ability is relatively strong, and thus the special Recipe contribution score will be relatively high.

[0122] The Recipe disclosure score can be calculated from aspects such as whether the Recipe itself tends to be disclosed or whether the user is a trusted user of the Recipe. For example, if the Recipe itself tends to be disclosed to the public and / or the user is a trusted user of the Recipe, then the Recipe disclosure score is relatively high.

[0123] Finally, sum up the identity base score, historical execution evaluation score, special Recipe contribution score, and Recipe disclosure score to obtain the user access score. Considering various factors and influences in such a multi-dimensional way, a more accurate judgment criterion can be obtained, and the security of the Recipe can be better protected.

[0124] Optionally, the process of calculating the historical execution evaluation score of the user according to the historical operation data may include:

[0125] Extract the total number of historical Recipe executions of the user and the execution result of each historical Recipe execution from the historical operation data;

[0126] Calculate the execution failure probability based on the total number of historical Recipe executions and the execution results;

[0127] Compare the total number of historical Recipe executions with a preset evaluation reference number to determine the first evaluation score;

[0128] Compare the execution failure probability with a preset evaluation reference probability to determine the second evaluation score;

[0129] Set evaluation coefficients corresponding to the first evaluation score and the second evaluation score respectively;

[0130] Perform a weighted sum calculation on the first evaluation score and the second evaluation score according to the evaluation coefficients to obtain the historical execution evaluation score.

[0131] Specifically, the execution failure probability is considered here, and it is calculated based on the higher the execution failure probability, the weaker the possibility of the user's information leakage; at the same time, it is also considered that if the user has a small number of historical executions, but due to good luck, the success rate will be relatively high, then the execution failure probability will be relatively low. Therefore, simply judging based on the execution failure probability is not accurate. Therefore, combining the execution failure probability and the total number of historical Recipe executions to calculate the historical execution evaluation score can greatly improve the accuracy.

[0132] The evaluation scores corresponding to the preset evaluation reference number and the evaluation reference probability can be as shown in Table 3 below:

[0133] Table 3

[0134]

[0135] The comparison reference situation of the above first evaluation score and the second evaluation score can be determined according to the specific scenario and the actual situation, and this embodiment does not limit this.

[0136] In one embodiment, the calculation formula for the historical execution evaluation score is:

[0137] ;

[0138] Wherein, represents the historical execution evaluation score, represents the first evaluation score, represents the second evaluation score, and are the evaluation coefficient of the first evaluation score and the evaluation coefficient of the second evaluation score respectively.

[0139] Optionally, for the above-mentioned special Recipe contribution score, its calculation formula is as follows:

[0140] ;

[0141] Among them, represents the special Recipe contribution score, represents the total number of times the user participates in the execution of the special Recipe, represents the th contribution factor of the user to the special Recipe, represents the number of contribution factors, represents the contribution sub-score of the user to the th contribution factor of the special Recipe, represents the th weight of the contribution factor, , both represent coefficients.

[0142] Specifically, the contribution factors may include whether the user enables the experimental project corresponding to the special Recipe to efficiently reach the preset indicators, whether the special Recipe is optimized to make its execution effect better, whether the user has worked on the technical documents corresponding to the special Recipe, etc. It is learned from the historical operation data whether the user has these contribution factors. If so, the calculation of the contribution sub-score is included in the formula accordingly. If not, the corresponding contribution factor item number can be regarded as 0.

[0143] Optionally, the steps for calculating the Recipe public score according to the trusted indicator are as follows:

[0144] Obtain the username of the user and the laboratory where the experimental project is located, and use the username, laboratory, and experimental project as trusted indicators;

[0145] Determine whether the username, experimental project, or laboratory is included in each trusted entity preset in the Recipe to determine the number of included entities;

[0146] Determine the first trusted score according to the number of included entities;

[0147] Determine whether the Recipe is marked as publicly available data;

[0148] If so, use the first preset value as the second trusted score;

[0149] Add the first trusted score and the second trusted score to obtain the Recipe public score.

[0150] Specifically, considering the public status of the recipe itself and the list of trusted users specified by it, two trust scores can be calculated respectively:

[0151] (1) First trust score: Recipe specifies a list of trusted subjects, which means that by default, each trusted subject in the list is a subject with strong confidentiality. Trusted subjects can be divided into three categories, namely user name, laboratory, and experimental project. Therefore, if any of the user's user name / recipe corresponding experimental project / recipe corresponding experimental project's laboratory belongs to a trusted subject in the list, the user is considered to have a certain degree of confidentiality. At the same time, the more corresponding trusted subjects there are, the stronger the confidentiality is, and the higher the first trust score is.

[0152] (2) Second trust score: If the recipe itself is publicly available data, that is, the recipe can be made available to the public, then its confidentiality is relatively weak. From another perspective, if the person in charge or owner of the recipe does not mind making it public, then everyone can be considered a trusted subject. Therefore, the second trust score is relatively high and can be directly set to 100 points.

[0153] In the above scheme, the setting of user names can be distinguished according to the above basic identity types. For example, for laboratory personnel / laboratory type 1 personnel / laboratory type 2 personnel / laboratory type 3 personnel, the naming rule can be: IN_professional abbreviation_name abbreviation_work number; for personnel outside the laboratory, the naming rule can be EX_company / laboratory abbreviation_name abbreviation_work number, and this embodiment does not impose any restrictions on this.

[0154] In a specific embodiment, the calculation formula of the user access score is:

[0155] ;

[0156] in, Indicates the basic score of identity, Indicates the historical execution evaluation score, Indicates the contribution score of a special recipe. Indicates the public score of the recipe.

[0157] The process of determining the user's access rights in response to the application instruction in the present application is explained in detail below.

[0158] In response to the application instruction, dividing a partial open range of the recipe;

[0159] If the user initiates a new application instruction again, determining whether the user is a paying user;

[0160] If so, open the access to the Recipe for the user, while restricting the copy function, send function, and download function of the Recipe.

[0161] If not, determine the person in charge of the Recipe, generate a request window corresponding to the user, and send the request window to the person in charge.

[0162] Specifically, after the user initiates an application instruction, to ensure the security of the Recipe, partial access rights can be considered to be opened to the user. At this time, based on the user's identity, it is necessary to protect the Recipe from being leaked to a certain extent. Here, the partial opening scope can be set according to the user's basic identity, laboratory role, project role, etc. For example, for technical experts outside the laboratory, the partial opening scope allocated to them is the basic data of the Recipe, and the core data of the Recipe is not within the scope of access for them.

[0163] If the user is not satisfied with the partial opening scope or the actual needs are not solved, the user can be provided with an opportunity to apply for access again, and it is judged whether the user is a paid user. If so, open the access rights to the user, but the security also needs to be considered. Therefore, while opening the access, restrict its copy function, send function, and download function to avoid complete external leakage; if the user is not a paid user, the user can be provided with an opportunity to apply for access to the person in charge of the Recipe, and it is up to the person in charge of the Recipe to decide whether to open the access, which greatly improves the flexibility of controlling the Recipe.

[0164] Furthermore, it can be understood that if the user has a need to access the Recipe, it can be considered that the user has a greater learning tendency. Therefore, during the access process, learning explanations can be provided for the user. The specific implementation process is as follows:

[0165] During the process of the user accessing the Recipe, in response to the request for explanation instruction initiated by the user, calculate the comprehensive evaluation score of the user:

[0166] ;

[0167] Among them, represents the comprehensive evaluation score, represents the personnel score, represents the historical execution score, represents the information correlation score, 、 and all represent weights;

[0168] Generate an explanation reminder for the user according to the comprehensive evaluation score.

[0169] Specifically, consider judging whether the user needs an explanation by means of scoring. At the same time, in order to further ensure the safety of the Recipe, certain permission control is also carried out on the explanation content. Then the user can initiate a request for an explanation instruction, and then respond to the instruction to calculate the comprehensive evaluation score of the user. This involves the personnel score, the historical execution score, and the information association score respectively:

[0170] (1) Personnel score. Considering the relevance between the user's own identity and the safety of the Recipe, the user's identity is added to the calculation process.

[0171] For example, based on the first identity score, the second identity score, or the identity basic score determined by the above process, any one or more of these scores are selected as the benchmark for the personnel score. In a specific embodiment, the identity basic score is used as the personnel score. .

[0172] (2) Historical execution score. Considering that the user's historical execution ability is also related to the safety of the Recipe, the historical execution score is calculated and added to the calculation process of the comprehensive evaluation score.

[0173] For example, according to various evaluation indicators when executing the Recipe in the past, a calculation formula for the historical execution score is formed:

[0174] ;

[0175] Among them, represents the historical execution score, represents the th evaluation indicator, represents the number of evaluation indicators, represents the th execution score of the evaluation indicator, represents the th weight of the execution score of the evaluation indicator.

[0176] The evaluation indicators can include the pass rate of executing the Recipe alone, the pass rate of participating in executing the Recipe, the total number of times of executing the Recipe in history, the basic skill assessment score, etc. The evaluation indicators can be set according to specific application scenarios and actual situations, and this embodiment does not limit this.

[0177] (3) Information association score. Considering that there is also a corresponding association between the item currently operated by the user and the Recipe, it is also added to the calculation process, so as to ensure the safety of the Recipe in the same way.

[0178] For example, if the purpose of the user's access to the Recipe is to complete or execute other pending experimental projects, the relevance between the pending experimental project and the Recipe can be analyzed. The higher the relevance, the stronger the confidentiality of the Recipe for the user. It can also be analyzed whether the pending experimental project is included in each trusted entity preset in the Recipe. If so, the relevance is considered to be strong.

[0179] Optionally, the process of generating an explanation reminder for the user according to the comprehensive evaluation score may specifically include:

[0180] Compare the comprehensive evaluation score with a preset first standard score and / or a second standard score;

[0181] If the comprehensive evaluation score is not less than the first standard score, generate a complete explanation video based on the Recipe for the user to view;

[0182] If the comprehensive evaluation score is not less than the second standard score and less than the first standard score, analyze the historical execution score to obtain an analysis result, and generate a restricted explanation video based on the analysis result and the Recipe for the user to view;

[0183] If the comprehensive evaluation score is less than the second standard score, generate a rejection explanation prompt and send it to the user, and at the same time provide an application explanation channel for the user.

[0184] Specifically, a first standard score and a second standard score are preset as two evaluation criteria. In one example, the first standard score is 80 points and the second standard score is 60 points. This embodiment does not limit this.

[0185] If the comprehensive evaluation score is not less than the first standard score, generate a complete explanation video based on the Recipe for the user to learn and watch; if the comprehensive evaluation score is not less than the second standard score and less than the first standard score, for safety reasons, do not show the user the complete explanation video, but generate a corresponding restricted explanation video. For example, impose certain restrictions on the complete explanation video and hide some core content. On the basis of ensuring safety, it can also meet the user's certain learning needs. When analyzing the historical execution score, each evaluation index can be analyzed separately or in combination, and the hidden part and the open part can be set based on the Recipe; if the comprehensive evaluation score is less than the second standard score, do not open the video explanation for the user, generate a corresponding rejection explanation prompt and send it to the user. In one example, the rejection explanation prompt is: "The current request has exceeded the authorized explanation scope. Please return or apply for an explanation." If the user applies for an explanation, obtain the corresponding authorization permission for the user to achieve flexibility and improve the user's access experience.

[0186] Furthermore, in a specific embodiment, the user can access the Recipe on the corresponding semiconductor operation control system, which will incur certain costs, such as project funds, which will include some equipment usage costs, etc. Then, cost calculation is required to form a payment process, and the implementation process can be as follows.

[0187] Monitor the access status of the user in real time. When the user completes the access to the Recipe, generate a cumulative reminder of project funds for the user. The calculation formula for the project funds is:

[0188] ;

[0189] Wherein, represents the project funds, represents the access fee for the user to access the Recipe, represents the basic usage fee of laboratory equipment generated during the user's access to the Recipe, represents the th other surcharge involved during the user's access to the Recipe, represents the th cost of the other surcharge, is the number of other surcharges involved for the user;

[0190] The other surcharges include excess consumable fees, calibration fees, or offset fees for the destruction of executed Recipes.

[0191] Specifically, in addition to certain costs for equipment usage, the user's access to the Recipe will also incur access fees, and there may be other costs, which are regarded as surcharges. The types of surcharges include various ones, such as:

[0192] (1) Excess consumable fees refer to the fact that in the semiconductor manufacturing scenario, when the user uses semiconductor laboratory equipment, certain consumables will be generated accordingly. However, if the user's equipment usage time is too long or the number of experiments is too large, then compared with the pre-set standard consumable range, semiconductor materials will be used in excess. Therefore, the consumable fees corresponding to the excess semiconductor materials used need to be paid by the user.

[0193] (2)Calibration fees. In the field of semiconductor manufacturing, calibration refers to the process of measuring, adjusting, and validating the performance parameters of equipment or systems to ensure that their output results meet the standards or expected values. This step is crucial for ensuring the accuracy, consistency, and reliability of semiconductor manufacturing, testing, and research and development. It includes the calibration of process equipment. For example, in wafer manufacturing, etching machines, lithography machines, thin-film deposition equipment, etc. need to be calibrated regularly to ensure the accuracy of process parameters (i.e., Recipe). There are also the calibration of inspection and measurement equipment, the calibration of testing equipment, etc. Therefore, calibration fees will be incurred during the calibration process.

[0194] Due to the large number of calibration parameters of lithography machines, their complexity, long time consumption, and expensive timing fees, taking the calibration of lithography machines as an example, some calibration scenarios are listed below:

[0195] ① During the calibration process, no samples are required, and only button clicks or fixed operation steps are performed on the lithography machine. For example, for parameters such as illumination uniformity, the lithography machine itself can shine light and detect parameters by itself. This type of calibration has the lowest time cost and consumable cost, and the calibration frequency is generally once a week.

[0196] ② During the calibration process, super-flat wafers are required for calibration. For example, for the platform flatness parameter, 5 - 10 very flat wafers are needed for calibration, and the frequency is once a month. The 5 - 10 super-flat wafers can be reused, but there is a risk of deformation or contamination if used frequently.

[0197] ③ During the calibration process, the previously prepared golden wafer (golden wafer / standard wafer) is directly used for calibration. For example, the calibration frequency of parameters such as direction accuracy and magnification orthogonality error is once a month. This golden wafer is equivalent to a prepared standard sample, which is completed through a series of processes such as coating, lithography, development, cleaning, etching, wet process, and measurement. Moreover, the best 1 - 2 wafers are selected from dozens of golden wafers and can be reused for a long time.

[0198] ④ During the calibration process, steps such as coating, exposure, and development need to be performed on the already prepared golden wafer for calibration. For example, the overlay accuracy belongs to a parameter with higher requirements, and the frequency is also once a month; it takes the longest time, has the most processes, the golden wafer needs to be cleaned after use, and a mask plate is also required. However, the mask plate is reused but is easily contaminated.

[0199] It can be understood that with the use of lithography machines, changes in time, environment, temperature, and humidity, etc., various calibrated parameters will drift. For example, the standard value of its overlay accuracy is 25nm, but after a few hours, or after several users have used it, it may become 45nm or 75nm.

[0200] Therefore, considering the above calibration types and influencing factors, it is necessary to calculate the corresponding calibration fee for users and specific laboratory equipment, including the following situations:

[0201] 1) Considering that different users may have different requirements for the calibration of the lithography machine, for example, some users have higher requirements for overlay accuracy, then the user is more inclined to recalibrate before accessing the recipe or before executing his own project. At the same time, this also increases the originally specified calibration frequency accordingly.

[0202] In this case, the calibration fee is usually required, but there is an exception, such as the routine calibration time of the laboratory equipment, in which case the user does not need to pay the calibration fee. This is because the laboratory equipment will be calibrated routinely, so the calibration fee will only be incurred when the high-demand user requests additional calibration, such as when the user wants to recalibrate during a visit or before executing their own project / recipe, in which case the user needs to pay the calibration fee.

[0203] 2) When the user completes the execution of his own project / recipe, if he is not satisfied with the results or does not meet the requirements, if he suspects that there is a problem with the laboratory equipment, he will ask for calibration verification, and then the laboratory equipment manager will need to perform additional calibration, which will incur certain calibration fees. If the laboratory equipment manager completes the calibration and finds that there is no problem with the laboratory equipment, the calibration fee will be borne by the user; if there is indeed a problem with the laboratory equipment, the calibration fee will not be borne by the user.

[0204] 3) Considering that after the calibration is completed, the parameters of the laboratory equipment are in a relatively stable state within a specified time, and the parameters will be relatively accurate, then other non-high-demand users who use the laboratory equipment within the specified time (until the next additional calibration or routine calibration by other users) do not need to recalibrate. Therefore, it is not appropriate to let the calibrated user (calibration initiator) bear all the calibration costs. Appropriate reductions can be made, so that the calibration initiator and other non-high-demand users within the specified time share the calibration costs. However, in this case, there are indeed other non-high-demand users who use it within the specified time, but there may not be any other users who use it within the specified time. Therefore, to be on the safe side, let the calibration initiator bear all the costs first, and if there is a subsequent apportionment, then the corresponding refund will be made.

[0205] Therefore, during this period, after each user completes the use, a fixed calibration fee will be directly generated, divided according to time:

[0206] ;

[0207] in, Represents the calibration fee that the user needs to pay. Represents the total calibration cost (calibration expense). Represents the specified time, which can be set to 72 hours or 48 hours. This embodiment does not limit it.

[0208] This calculation method of the calibration fee is to let each user within the specified time pay a fixed calibration fee. After the specified time ends, then calculate the accurate and detailed fee, and make up the difference.

[0209] The calculation method is as follows:

[0210] ;

[0211] Among them, Represents that after the specified time ends, perform an accurate and detailed fee calculation, and calculate the calibration fee that each user needs to share within the specified time based on this. Represents The time interval (in hours) between the time when the current user in [[ ]] uses the laboratory equipment and the time when the additional calibration is completed. Represents The [[ ]]th user within [[ ]]. Represents The total number of users within [[ ]]. Represents the [[ ]]th The time interval between the time when the user uses the laboratory equipment and the time when the additional calibration is completed.

[0212] After the calculation is completed, compare the [[ ]] of each user with [[ ]], and make up the difference according to the comparison result. with That's all.

[0213] (3) Executed Recipe destruction deduction fee. This is considered because during the user's access to the Recipe, and / or after the access to the Recipe is completed, there may be an operation to trigger the execution of a new Recipe. If this new Recipe makes a certain contribution, then it can correspondingly deduct a certain amount from the project funds, providing a preferential mechanism for the project funds for the user. The calculation process of the Recipe destruction deduction fee is as follows:

[0214] Real-time monitor whether the user triggers the execution of a new Recipe during the access to the Recipe, and / or after the access to the Recipe is completed;

[0215] If so, identify the execution record of the user, and determine each executed Recipe from the execution record;

[0216] For each of the executed Recipes, determine the respective associated personnel corresponding to the executed Recipe; the respective associated personnel include the user;

[0217] Generate an executed Recipe destruction voting window and send it to each of the respective associated personnel for each of the respective associated personnel to conduct a first vote in the executed Recipe destruction voting window and determine the first voting result;

[0218] Determine a destruction strategy based on the first voting result.

[0219] Specifically, if the new Recipe is different from the Recipe in the above process, then after the new Recipe is executed, identify the execution record of the user. One or more new Recipes can be determined from the execution record. Each new Recipe is regarded as an executed Recipe, and for each executed Recipe, initiate a destruction voting process, which can ensure the security of the executed Recipe and prevent it from being easily obtained by subsequent users.

[0220] It can be understood that since an executed Recipe corresponds to multiple personnel, then these multiple personnel will all participate in the destruction voting process. Therefore, it is necessary to determine the respective associated personnel corresponding to the executed Recipe. The associated personnel can be the personnel participating in the execution process of the executed Recipe, or the R & D personnel of the specific content in the executed Recipe, or the project personnel participating in the experimental project corresponding to the executed Recipe. At the same time, the user also belongs to the associated personnel.

[0221] Generate a corresponding executed Recipe destruction voting window for each executed Recipe, and then send it to each associated personnel. The associated personnel can vote in the executed Recipe destruction voting window. The voting options include agreeing to destroy and opposing to destroy. As Figure 4 shown. At the same time, the user can also add additional conditions when making a selection, such as requesting a contribution assessment for the executed Recipe, so that each associated personnel can clarify the role and value of the executed Recipe, and then carefully consider their own choices. In this way, the associated personnel can consider the retention or deletion of the executed Recipe from multiple perspectives. For example, from the perspective of confidentiality, it can protect the executed Recipe from being leaked; from the perspective of teaching, it can maximize the value of the executed Recipe. The first voting result is the first voting selection and the attached remarks returned by each associated personnel.

[0222] Optionally, the step of determining a destruction strategy based on the first voting result includes:

[0223] Determine whether at least one of the voting selections in the first voting result is attached with a note requesting contribution assessment;

[0224] If so, conduct a contribution assessment on the executed Recipe to obtain a contribution score;

[0225] Generate a new executed Recipe destruction voting window based on the contribution score and send it to each of the associated persons for the associated persons to conduct a second vote in the new executed Recipe destruction voting window and determine the second voting result;

[0226] Determine the destruction strategy according to the second voting result.

[0227] Specifically, if a note requesting contribution assessment is attached by an associated person in the first voting result, conduct a contribution assessment on the executed Recipe to obtain a contribution score, and then generate a new executed Recipe destruction voting window for the contribution score. As Figure 5 shown, which will mark: The contribution score of this executed Recipe is: xx points. Thus, the associated persons can refer to this contribution score to re-select whether to destroy it, and the second voting result is the second voting selection returned by each associated person.

[0228] Optionally, the step of determining the destruction strategy according to the second voting result includes:

[0229] Obtain the corresponding personnel attributes of each of the associated persons under this executed Recipe;

[0230] Determine the destruction strategy according to the destruction judgment formula. The destruction judgment formula is:

[0231] ;

[0232] Among them, represents the th type of personnel attribute, represents the number of types of personnel attributes corresponding to this executed Recipe, represents the th type of personnel attribute weight, represents the th type of personnel attribute's total number of votes in favor of destruction in the second vote, represents the th type of personnel attribute's total number of votes in the second vote, represents the contribution score, represents the contribution coefficient;

[0233] If the destruction judgment formula holds, the destruction strategy is to confirm destruction;

[0234] If the destruction judgment formula does not hold, the destruction strategy is to confirm retention.

[0235] Specifically, for the convenience of counting and judging the voting situation, first obtain the unique personnel attributes corresponding to each associated person under the executed Recipe. The personnel attributes can be determined only from the experimental project corresponding to the executed Recipe. To determine the identity of the associated person in the experimental project corresponding to the executed Recipe, the role division for the experimental project mentioned above can be followed. For example, for a certain associated person, according to the experimental project, the personnel attribute is divided into ordinary executor.

[0236] Therefore, the types of personnel attributes can be divided into three categories, namely project responsible personnel, project execution personnel, project on-site management personnel, and project on-site liaison personnel. Then, the voting situation under each personnel attribute can be counted, and the above destruction judgment formula can be set.

[0237] In summary, if the final obtained destruction strategy is to confirm destruction, then the executed Recipe is destroyed; if the final obtained destruction strategy is to confirm retention, then the executed Recipe is retained, and it can be included in the calculation process of the destruction deduction fee for the executed Recipe, thereby reducing the project funding burden of users and improving the access experience of users.

[0238] Furthermore, if the destruction strategy is to confirm retention, it can be used for subsequent teaching and research to help cultivate more professional semiconductor talents. Students and researchers can better understand the principles and operations of semiconductor processes by learning the actual executed Recipe, improving their practical abilities and innovative thinking, and reserving talents for the future development of the industry; it can also be used as a medium for cooperation and communication with other laboratories / scientific research institutions, etc. Based on the executed Recipe, joint research and development projects can be carried out to jointly overcome technical problems and achieve complementary resources and technologies. This kind of cooperation and communication helps to integrate the advantageous resources in the industry and accelerate the research and application speed of new technologies.

[0239] Furthermore, before the user triggers the execution operation of a new Recipe, processes such as parameter input need to be performed on the corresponding laboratory equipment or the semiconductor laboratory operating system. Since the parameters and the process are corresponding, in the current situation, the user (the actual operator) needs to remember all the operation steps, specifically where to click the button, the order of clicking the button, other issues to note, etc. All these need to be remembered to execute the operation, which is very easy to make mistakes or omissions. Therefore, the present application provides a parameter input platform. On this platform, the required parameters can be directly input, without the need to remember all the operation steps and without having to click back and forth through dozens of complex steps. The RPA directly operates and executes the parameters input by the user at the backend of this parameter input platform according to the set path and order, replacing the manual operation of the user. The schematic diagram of the parameter input interface can be as Figure 6 shown, greatly improving the efficiency and accuracy and reducing the probability of errors. If an error occurs, it can also be recorded and exposed by the RPA, facilitating subsequent traceability analysis.

[0240] Please refer to Figure 6 , Figure 6 which shows a parameter configuration interface for a single-layer exposure experiment, involving user information, reticle (mask) name, Golden Recipe (golden formula), and reticle parameter settings respectively. Among them, the user information settings include User Type (the current user type, such as internal user or external user user_external), UserID (login account), and Password (login password); the reticle name device includes Create Reticle (whether to create a new reticle) and Reticle Name (reticle name); in the Golden Recipe settings, Golden_1st etc. can be specified; the reticle parameter settings include Reticle Design (whether to modify the reticle parameters), Parameter 1, Parameter 2, Parameter 3, Parameter 4, Parameter 5, Parameter 6, and Parameter 7; after the settings are completed, they can be saved and run, or cancelled.

[0241] In addition, in the field of semiconductor manufacturing, for the process of spin coating, developing, and lithography, there are a large number of parameters involved. Although it seems complex, some parameters are fixed and only change in special cases, while some parameters are set by the user according to their samples. This requires the user to understand and remember whether these parameters change or not, and then adjust and modify them according to their own project situation, which is very cumbersome and error-prone. Therefore, the parameter input platform provided in this application can design additional options, such as providing certain fixed parameter combinations, recommending parameter combinations to users, etc. In this way, users have a reference and can make fine-tuning according to their own situation. It is equivalent to standing on the shoulders of giants and no longer starting from scratch, greatly improving the experimental efficiency.

[0242] In a specific scenario, if two different semiconductor devices are linked, such as a spin coating and developing device and a lithography machine, the sample is spin-coated on the spin coating and developing device, and after completion, it is sent to the lithography machine by a robotic arm for exposure, and then sent back to the spin coating and developing device after completion. Then, it is necessary to confirm the existence of an interconnection signal between these two semiconductor devices. If there is a problem with the interconnection signal, it means that the semiconductor devices are not linked properly and cannot automatically complete the entire manufacturing process. This requires the user to check and confirm the signal status on the home page of the lithography machine, such as whether it is sent, received, or connected, etc. Then, the user not only needs to check before the manufacturing starts, but also during the manufacturing process. If there is a problem with the sample, such as being stuck at a certain link, it is necessary to repeatedly check between the two semiconductor devices, which is very time-consuming and laborious. Therefore, this application also realizes the linkage between semiconductor devices through RPA. RPA can fixedly check the presence or absence of signals, whether communication is successful, etc. It can use the text input method, such as asking: What is the status of the check signal? Then RPA can check and reply by itself; or RPA can periodically patrol and check the signal, and immediately alarm if there is a problem; or if there is a problem with the signal, the user cannot continue to use RPA to implement subsequent operations.

[0243] Furthermore, the information involved in different semiconductor devices is different. For example, spin coating parameters and developing parameters are only available on the spin coating and developing device, and lithography parameters are on the lithography machine. Each time a sample is made, these three types of parameters, namely spin coating, developing, and lithography, are recorded separately and have no relevance in the entire semiconductor laboratory operating system. Only the user knows the matching and relevance, which is not conducive to traceability or process analysis. Over time, the operator may also forget. Therefore, every time the user has to record their experimental data manually or on a computer and match these three types of parameters, which is very inconvenient. Therefore, this application uses RPA to input all parameters on the parameter input platform. Each time these three types of parameters are input, it is equivalent to unifying a Recipe, which is automatically recorded and corresponding, providing great convenience for the user's process record and process exploration.

[0244] During the calibration process, whether it is the calibration of the coating and developing equipment or the calibration of the lithography machine, they are all mutually required and inseparable. Since a single device cannot complete all calibrations on its own, the calibration steps and parameters are set and executed separately, which is not conducive to calibration efficiency. Therefore, in this application, RPA is used for input on the parameter input platform, enabling one-key calibration. That is, after setting the calibration recipe and parameters, clicking a single button can automatically generate all samples, and the data will also be automatically recorded in its entirety, which is very convenient and efficient.

[0245] Furthermore, it is possible to monitor the user's access status, execution status, etc. in real time. If there are problems with the user's experimental project, the log can be traced to view various types of information and infer where the problem lies, thereby correcting the experiment. In the field of semiconductor manufacturing, there are many factors that affect the experimental project process, including hidden factors and obvious factors, which can be specifically divided into the following three categories:

[0246] (1) Factory facilities and environmental conditions: For example, semiconductor equipment requires support from various factory facilities, including hundreds of special gases, nitrogen, compressed air, vacuum, cooling water, etc. If there is a supply interruption or unstable pressure, it will affect the machine tool, and the machine tool itself will alarm for such problems.

[0247] (2) Problems with the sample itself: For example, the sample is uneven and cannot be sucked to create a vacuum, or the back of the sample is dirty and blocks the vacuum hole.

[0248] (3) Process problems: These can occur in various links. For example, if there are imperfections in the previous process of the sample, or if the photoresist is missing or contaminated, it may lead to the inability to capture the mark (chip mark), etc.

[0249] By regularizing and analyzing these factors, a problem analysis standard that can be traced is formed, so that when there are problems in the experimental project, it is possible to quickly and accurately infer where the problem lies, improving the experimental efficiency and at the same time enhancing the accuracy of the completed experiment.

[0250] Corresponding to Figure 1 the method described above, the embodiment of the present invention also provides an access control device for Recipe, which is used to Figure 1 specifically implement the method. The access control device for Recipe provided by the embodiment of the present invention can be in a computer terminal or various mobile devices. Combining Figure 7 , the access control device for Recipe will be introduced. As Figure 7 shown, the device may include:

[0251] An access request response module 10, which is used to respond to a request instruction for the user to access a Recipe with access restrictions, and calculate the user's identity base score;

[0252] The confidentiality score calculation module 20 is used to determine the experimental project corresponding to the Recipe, and calculate the confidentiality score according to the experimental project and the Recipe;

[0253] The user access score calculation module 30 is used to obtain the historical operation data of the user, and calculate the user access score for the user to access the Recipe by combining the Recipe, the historical operation data and the identity basic score;

[0254] The judgment module 40 is used to judge whether the user access score is greater than the confidentiality score;

[0255] The permission opening module 50 is used to, if so, open the access permission of the Recipe to the user;

[0256] The access restriction module 60 is used to, if not, provide an access application mechanism for the user, so that the user can initiate a corresponding application instruction based on the access application mechanism, and determine the access permission of the user in response to the application instruction.

[0257] As can be seen from the above technical solutions, on the one hand, the present application takes into account various situations such as personnel and experimental projects, all of which are regarded as influencing factors that can affect Recipe access control, so as to implement different permission controls according to different situations. For the experimental project corresponding to the Recipe that the user wants to access, a confidentiality score is calculated considering that the experimental project and the Recipe itself may have different management requirements; and different user identities will have different access requirements or access rights, so an identity basic score is calculated according to the user identity. At the same time, the historical operation situation of the user will show the user's own capabilities and other situations. Therefore, the historical operation data is obtained, and the user access score for the user to access the Recipe is calculated according to the historical operation data, the Recipe and the identity basic score. This user access score can indicate the user's performance based on the Recipe and is used as an indicator to judge whether the access permission can be opened to the user. Then, by comparing the size of this indicator with the confidentiality score, it is possible to clarify what kind of access permission is set for the user, so as to fully protect the Recipe from being leaked and exposed. If the user access score is greater than the confidentiality score, it is determined that the user will not threaten the safety of the Recipe, that is, the access permission is opened to the user; if the user access score is less than the confidentiality score, it is considered that the user may be an insecure user and needs to be restricted from accessing, and at the same time, an access application mechanism is provided, which is equivalent to providing an opportunity for the user, abandoning the traditional "one-size-fits-all" control method, and forming a flexible and controllable Recipe access control method on the basis of ensuring safety. This control method of the present application that takes into account all-round influencing factors can cover various situations and can achieve fine Recipe access control to ensure the confidentiality and security of the Recipe.

[0258] On the other hand, while ensuring the safety of the Recipe, the present application can also achieve efficient Recipe sharing, enabling others (such as engineers and scientists from different enterprises or research institutions) to conduct research and development based on each other's work, which helps to avoid duplicate labor. For example, for a Recipe that has been successfully executed, if the access permission of the user is opened based on the method provided by the present application, then the user can access and learn this Recipe, which can help the user improve work and learning efficiency, and further promote the rapid iteration and innovation of technology, thereby enhancing the technical level of the entire semiconductor industry.

[0259] On the other hand, the commonly used permission control methods in the prior art are usually based on the RBAC (Role-Based Access Control) model, combined with ABE (Attribute-Based Encryption) and MFA (Multi-Factor Authentication). However, this method cannot effectively solve the problems of information sharing and technology confidentiality, has relatively high requirements for the confidentiality quality of personnel themselves, and also affects the control efficiency. The present application is based on the semiconductor laboratory operation control system pioneered by the applicant. When performing equipment operations assisted by robotic process automation (RPA) on its advanced semiconductor equipment, considering the concurrent situations of in-school, industry-university projects, basic teaching, and equipment training work, in order to better manage Recipes, the present application proposes an access control method for Recipes, which can balance different user identities and experimental projects, make better use of system resources in an environment where industry and teaching are concurrent, ensure confidentiality management, promote Recipe sharing while balancing project management, so as to improve the usage, execution, and permission control levels of Recipes.

[0260] Furthermore, the embodiments of the present application provide an access control device for Recipes. Optionally, Figure 8 The hardware structure block diagram of the access control device for Recipes is shown. Referring to Figure 8 , the hardware structure of the access control device for Recipes may include: at least one processor 01, at least one communication interface 02, at least one memory 03, and at least one communication bus 04.

[0261] In the embodiments of the present application, the number of the processor 01, the communication interface 02, the memory 03, and the communication bus 04 is at least one, and the processor 01, the communication interface 02, and the memory 03 communicate with each other through the communication bus 04.

[0262] The processor 01 may be a central processing unit (CPU), or a specific application-specific integrated circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present invention, etc.

[0263] The memory 03 may include high-speed RAM memory, and may also include non-volatile memory, such as at least one disk memory.

[0264] Among them, the memory stores a program, and the processor can call the program stored in the memory. The program is used to execute the access control method for the following Recipe, including:

[0265] In response to a request instruction initiated by a user to access a Recipe with access restrictions, calculate the identity base score of the user;

[0266] Determine the experimental project corresponding to the Recipe, and calculate the confidentiality score according to the experimental project and the Recipe;

[0267] Obtain the historical operation data of the user, and calculate the user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the identity base score;

[0268] Judge whether the user access score is greater than the confidentiality score;

[0269] If so, open the access permission of the Recipe to the user;

[0270] If not, provide the user with an access application mechanism for the user to initiate a corresponding application instruction based on the access application mechanism, and determine the access permission of the user in response to the application instruction.

[0271] Optionally, the refined functions and extended functions of the program can refer to the description of the access control method for the Recipe in the method embodiments.

[0272] The embodiment of the present application also provides a storage medium. The storage medium can store a program suitable for a processor to execute. When the program runs, it controls the device where the storage medium is located to execute the following access control method for the Recipe, including:

[0273] In response to a request instruction initiated by a user to access a Recipe with access restrictions, calculate the identity base score of the user;

[0274] Determine the experimental project corresponding to the Recipe, and calculate the confidentiality score according to the experimental project and the Recipe;

[0275] Obtain the historical operation data of the user, and calculate the user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the identity basic score;

[0276] Determine whether the user access score is greater than the confidentiality score;

[0277] If so, grant the user access permission to the Recipe;

[0278] If not, provide the user with an access application mechanism for the user to initiate a corresponding application instruction based on the access application mechanism, and determine the user's access permission in response to the application instruction.

[0279] Specifically, the storage medium may be a computer-readable storage medium, and the computer-readable storage medium may be an electronic memory such as a flash memory, an EEPROM (electrically erasable programmable read-only memory), an EPROM, a hard disk, or a ROM.

[0280] Optionally, the refined functions and extended functions of the program may refer to the description of the access control method of the Recipe in the method embodiments.

[0281] In addition, in each embodiment of the present disclosure, each functional module may be integrated together to form an independent part, or each module may exist alone, or two or more modules may be integrated to form an independent part. If the function is implemented in the form of a software functional module and sold or used as an independent product, it may be stored in a computer-readable storage medium. Based on such an understanding, the technical solution of the present disclosure, in essence, or the part that contributes to the prior art, or a part of the technical solution, may be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a live broadcast device, or a network device, etc.) to execute all or part of the steps of the methods in each embodiment of the present disclosure.

[0282] Finally, it should also be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising said element.

[0283] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same and similar parts among the various embodiments, reference may be made to each other.

[0284] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

Claims

1. An access control method for Recipe, characterized in that, Including: In response to a request instruction for accessing a Recipe with access restrictions initiated by a user, calculating a basic identity score of the user; Determining the experimental project corresponding to the Recipe, and calculating a confidentiality score according to the experimental project and the Recipe; Obtaining the historical operation data of the user, and calculating a user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the basic identity score; Judging whether the user access score is greater than the confidentiality score; If so, opening the access permission of the Recipe to the user; If not, providing an access application mechanism to the user for the user to initiate a corresponding application instruction based on the access application mechanism, and determining the access permission of the user in response to the application instruction.

2. The method according to claim 1, wherein The calculating of the basic identity score of the user includes: Obtaining the basic identity of the user, and matching a first identity score corresponding to the basic identity from a pre-established basic score table; Obtaining the laboratory where the experimental project is located; Calculating a second identity score of the user according to the laboratory and the experimental project; Performing a summation calculation on the first identity score and the second identity score to obtain the basic identity score.

3. The method according to claim 2, wherein The calculating of the second identity score of the user according to the laboratory and the experimental project includes: ； Among them, represents the second identity score of the user, represents the th role to which the user belongs under the laboratory and / or experimental project, represents the number of types of roles to which the user belongs, represents the th role value of the role to which the user belongs, represents the th role weight of the role to which the user belongs.

4. The method according to claim 1, wherein The calculating of the confidentiality score according to the experimental project and the Recipe includes: Obtaining the project type of the experimental project, and determining a project basic score of the experimental project based on the project type; Calculating a sensitivity score and a uniqueness score of the Recipe; Adding the project basic score, the sensitivity score, and the uniqueness score to obtain the confidentiality score.

5. The method according to claim 4, wherein The calculation formula for the sensitivity score of the Recipe is: ； Among them, represents the sensitivity score, represents the th sensitive factor of the Recipe, represents the number of sensitive factors, represents the sensitivity sub - value of the th sensitive factor of the Recipe, represents the weight of the th sensitive factor.

6. The method according to claim 4, wherein The calculation formula for the uniqueness score of the Recipe is: ； wherein, represents the distinctiveness score, represents the th distinctiveness factor of the said Recipe, represents the number of distinctiveness factors, represents the distinctiveness sub - value of the th distinctiveness factor of the said Recipe, represents the th weight of the distinctiveness factor.

7. The method according to claim 1, characterized in that The calculating of the user access score for the user to access the Recipe by combining the Recipe, the historical operation data, and the basic identity score includes: Calculating a historical execution evaluation score and a special Recipe contribution score of the user according to the historical operation data; Obtaining a trusted index of the user, and calculating a Recipe public score according to the trusted index; Performing a summation calculation on the basic identity score, the historical execution evaluation score, the special Recipe contribution score, and the Recipe public score to obtain the user access score.

8. The method according to claim 7, wherein The calculating of the historical execution evaluation score of the user according to the historical operation data includes: Extracting the total number of historical Recipe executions of the user and the execution result of each execution of the historical Recipe from the historical operation data; Calculating a failure probability according to the total number of historical Recipe executions and the execution result; Comparing the total number of historical Recipe executions with a preset evaluation reference number to determine a first evaluation score; Comparing the failure probability with a preset evaluation reference probability to determine a second evaluation score; respectively setting evaluation coefficients corresponding to the first evaluation score and the second evaluation score; The first evaluation score and the second evaluation score are weighted and summed according to the evaluation coefficient to obtain a historical execution evaluation score.

9. The method according to claim 7, characterized in that, The calculation formula for the special recipe contribution score is: ； Among them, represents the special Recipe contribution score, represents the total number of times the user participates in the execution of the special Recipe, represents the th contribution factor of the user to the special Recipe, represents the number of contribution factors, represents the th contribution sub-score of the contribution factor, represents the th weight of the contribution factor, and both represent coefficients.

10. The method according to claim 7, characterized in that, The calculating the recipe public score according to the trust indicator includes: Obtaining the user name of the user and the laboratory where the experimental project is located, and using the user name, laboratory and experimental project as trust indicators; Determine whether the user name, experimental project or laboratory is included in each trusted subject preset in the recipe to determine the number of included subjects; Determine a first trust score according to the number of inclusions; Determine whether the recipe is marked as publicly available data; If so, the first preset value is used as the second trusted score; The first trust score and the second trust score are added together to obtain the recipe public score.

11. The method according to claim 1, wherein Determining the access rights of the user in response to the application instruction includes: In response to the application instruction, dividing a partial open range of the recipe; If the user initiates a new application instruction again, determining whether the user is a paying user; If yes, the access right to the recipe is opened to the user, while the copying function, sending function and downloading function of the recipe are restricted; If not, the person in charge of the recipe is determined, and a request window corresponding to the user is generated, and the request window is sent to the person in charge.

12. The method according to any one of claims 1 to 11, characterized in that, Also includes: In the process of the user accessing the recipe, in response to the request explanation instruction initiated by the user, the comprehensive evaluation score of the user is calculated: ； Among them, represents the comprehensive evaluation score, represents the personnel score, represents the historical execution score, represents the information correlation score, 、 and both represent weights; Generate a lecture reminder for the user according to the comprehensive evaluation score.

13. The method according to claim 12, wherein Generating a teaching reminder for the user according to the comprehensive evaluation score includes: Comparing the comprehensive evaluation score with a preset first standard score and / or a second standard score; If the comprehensive evaluation score is not less than the first standard score, generating a complete explanation video based on the recipe for the user to view; If the comprehensive evaluation score is not less than the second standard score and less than the first standard score, the historical execution score is analyzed to obtain an analysis result, and a restricted explanation video is generated according to the analysis result and the recipe for viewing by the user; If the comprehensive evaluation score is less than the second standard score, a rejection prompt is generated and sent to the user, and a channel for applying for a lecture is provided for the user.

14. The method according to any one of claims 1 to 11, characterized in that Also includes: The user's access status is monitored in real time. When the user completes accessing the recipe, a reminder of the accumulated project funds is generated for the user. The calculation formula of the project funds is: ； Among them, represents the project funds, represents the access fee for the user to access the Recipe, represents the basic usage fee of laboratory equipment generated during the user's access to the Recipe, represents the th other surcharge involved in the user's access to the Recipe, represents the th other surcharge, is the number of other surcharges involved for the user; The other additional fees include excess consumables fees, calibration fees, or deduction fees for the destruction of executed recipes.

15. The method according to claim 14, wherein The calculation process of the executed recipe destruction deduction fee includes: During the process of the user accessing the Recipe, and / or after the access to the Recipe is completed, it is monitored in real time whether a new Recipe execution operation is triggered; If so, identify the execution record of the user and determine each executed Recipe from the execution record; For each of the executed Recipes, determine each associated person corresponding to the executed Recipe; the associated persons include the user; Generate a destroyed Recipe voting window and send it to each of the associated persons respectively, so that each of the associated persons can vote for the first time in the destroyed Recipe voting window and determine the first voting result; Determine the destruction strategy based on the first voting result.

16. The method according to claim 15, wherein The determination of the destruction strategy based on the first voting result includes: Judge whether at least one of the voting options in the first voting result is attached with a note requesting contribution evaluation; If so, conduct a contribution evaluation on the executed Recipe to obtain a contribution score; Generate a new destroyed Recipe voting window based on the contribution score and send it to each of the associated persons, so that each of the associated persons can vote for the second time in the new destroyed Recipe voting window and determine the second voting result; Determine the destruction strategy according to the second voting result.

17. The method according to claim 16, characterized in that, The determination of the destruction strategy according to the second voting result includes: Obtain the personnel attributes corresponding to each of the associated persons under the executed Recipe; Determine the destruction strategy according to the destruction judgment formula, and the destruction judgment formula is: ； Among them, represents the type of personnel attribute, represents the number of types of personnel attributes corresponding to the executed Recipe, represents the attribute weight of the type of personnel attribute, represents the total number of votes in favor of destruction in the second vote for the type of personnel attribute, represents the total number of votes for the type of personnel attribute in the second vote, represents the contribution score; If the destruction judgment formula holds, the destruction strategy is to confirm destruction; If the destruction judgment formula does not hold, the destruction strategy is to confirm retention.

18. An access control device for a Recipe, characterized in that, It includes: An access request response module, which is used to respond to a request instruction for the user to access a Recipe with access restrictions, and calculate the user's identity base score; A confidentiality score calculation module, which is used to determine the experimental project corresponding to the Recipe and calculate the confidentiality score according to the experimental project and the Recipe; A user access score calculation module, which is used to obtain the user's historical operation data, and calculate the user access score for the user to access the Recipe by combining the Recipe, historical operation data, and identity base score; A judgment module, which is used to judge whether the user access score is greater than the confidentiality score; An access permission opening module, which is used to open the access permission of the Recipe to the user if so; An access restriction module, which is used to provide an access application mechanism to the user if not, so that the user can initiate a corresponding application instruction based on the access application mechanism, and determine the user's access permission in response to the application instruction.

19. An access control device for a Recipe, characterized in that, It includes a memory and a processor; The memory is used to store programs; The processor is used to execute the program to implement each step of the access control method of the Recipe as described in any one of claims 1-17.

20. A storage medium, on which a computer program is stored, characterized in that, When the computer program is executed by a processor, it implements each step of the access control method of the Recipe according to any one of claims 1-17.

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