Self-adaptive vacuum coating intelligent control system

Abstract

The invention discloses a self-adaptive vacuum coating intelligent control system, and relates to the technical field of vacuum coating, and the main scheme is as follows: a data acquisition module acquires physical characteristic data of a coating material, environmental data in a vacuum chamber, operation data and electromagnetic field intensity data, and a data transmission module sends the data to a control system; the data calculation module calculates a coating quality comprehensive index, a coating environment comprehensive index, a coating equipment operation comprehensive index and a coating electromagnetic field comprehensive index according to different data, and the data judgment and control instruction generation module presets a standard state threshold set and compares the comprehensive indexes with the standard state threshold set to judge the current coating state. The control system generates a corresponding control instruction according to the result.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and specifically to an adaptive intelligent control system for vacuum coating. Background Art

[0002] In the current era of rapid technological development, the dependence of many industries on vacuum coating technology is increasing day by day. From the miniaturization and high performance of electronic devices, the special requirements for coating technology highlight the importance of high-quality vacuum coating.

[0003] In terms of data acquisition in traditional vacuum coating technology, only a small amount of basic data can be obtained, and the data acquisition is not fine enough. It is unable to capture the dynamic changes of environmental parameters in real time, lacks systematic data processing and analysis capabilities. For the collected data, in-depth correlation calculations cannot be performed, it is difficult to comprehensively evaluate the coating state from multiple dimensions, different types of data are isolated from each other, and a comprehensive index that can comprehensively reflect the coating process cannot be formed, making it difficult to adjust in a timely manner according to the changes in the coating state. Summary of the Invention

[0004] (1) Technical Problems to be Solved

[0005] Aiming at the deficiencies of the prior art, the present invention provides an adaptive intelligent control system for vacuum coating. The data acquisition module collects the physical property data of the coating material, the environmental data in the vacuum chamber, the operation data, and the electromagnetic field intensity data. The data transmission module sends these data to the control system. The data calculation module calculates the comprehensive coating quality index, the comprehensive coating environment index, the comprehensive coating equipment operation index, and the comprehensive coating electromagnetic field index respectively according to different data. The data judgment and control instruction generation module presets a set of standard state thresholds, compares each comprehensive index with them to judge the current coating state, and the control system generates corresponding control instructions according to the results, solving the problems that in data acquisition, only a small amount of basic data can be obtained, the data acquisition is not fine enough, the dynamic changes of environmental parameters cannot be captured in real time, there is a lack of systematic data processing and analysis capabilities, in-depth correlation calculations cannot be performed on the collected data, it is difficult to comprehensively evaluate the coating state from multiple dimensions, different types of data are isolated from each other, a comprehensive index that can comprehensively reflect the coating process cannot be formed, and it is difficult to adjust in a timely manner according to the changes in the coating state.

[0006] (2) Technical Solutions

[0007] To achieve the above objectives, the present invention is realized through the following technical solutions: An adaptive intelligent control system for vacuum coating, comprising:

[0008] A data acquisition module for collecting the physical property data of the coating material, the environmental data in the vacuum chamber, the operation data, and the electromagnetic field intensity data;

[0009] A data transmission module, configured to transmit the data collected by the data acquisition module to the control system through the control unit;

[0010] A data calculation module, configured to calculate the coating uniformity index CUI and the coating qualification index MQW according to the physical property data; calculate the coating performance deviation index CPD according to the coating uniformity index CUI and the coating qualification index MQW; calculate the comprehensive coating quality index BEI according to the coating uniformity index CUI, the coating qualification index MQW and the coating performance deviation index CPD;

[0011] Calculate the comprehensive coating environment index HYT according to the environmental data;

[0012] Calculate the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV according to the operation data; calculate the comprehensive coating equipment operation index PBQ according to the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV;

[0013] Calculate the coating electromagnetic field stability index JQZ according to the electromagnetic field intensity data; calculate the comprehensive coating electromagnetic field index ISX according to the coating electromagnetic field stability index JQZ;

[0014] A data judgment and control instruction generation module, configured to preset a set of vacuum coating standard state thresholds, compare the comprehensive coating quality index BEI, the comprehensive coating environment index HYT, the comprehensive coating equipment operation index PBQ and the comprehensive coating electromagnetic field index ISX with the set of vacuum coating standard state thresholds respectively to judge the current coating state; generate corresponding control instructions according to the judgment result.

[0015] In a preferred embodiment of the above-mentioned adaptive vacuum coating intelligent control system: The method for calculating the coating uniformity index CUI and the coating qualification index MQW is as follows:

[0016] The physical property data includes the film layer thickness TYU i and the average value WET of the film layer thickness;

[0017] According to the film layer thickness TYU i and the average value WET of the film layer thickness, calculate the coating uniformity index CUI, and the formula is as follows:

[0018] ;

[0019] wherein, TYU i is the film layer thickness obtained at the i-th measurement position, i is the serial number corresponding to different measurement positions, and the value range is [1, m]; m is the number of measurement positions, and the value is a positive integer;

[0020] The physical property data further includes the reference standard value TRE of the film layer thickness and the film layer density DFGi and the reference standard value NJI of the film layer density;

[0021] According to the film layer thickness TYU i , the reference standard value TRE of the film layer thickness, the film layer density DFG i and the reference standard value NJI of the film layer density to calculate the coating qualification index MQW, and the formula is as follows:

[0022] ;

[0023] Among them, DFG i is the film layer density at the i-th measurement position.

[0024] In the above-mentioned preferred scheme of an adaptive vacuum coating intelligent control system: The method for calculating the coating performance deviation index CPD is:

[0025] Calculate the coating performance deviation index CPD according to the coating uniformity index CUI and the coating qualification index MQW, and the formula is as follows:

[0026] .

[0027] In the above-mentioned preferred scheme of an adaptive vacuum coating intelligent control system: The method for calculating the coating quality comprehensive index BEI is:

[0028] Calculate the coating quality comprehensive index BEI according to the coating uniformity index CUI, the coating qualification index MQW and the coating performance deviation index CPD, and the formula is as follows:

[0029] .

[0030] In the above-mentioned preferred scheme of an adaptive vacuum coating intelligent control system: The method for calculating the coating environment comprehensive index HYT is:

[0031] The environmental data includes the vacuum degree PLM measured in real time in the vacuum chamber, the reference vacuum degree PKN, the temperature POI measured in real time, the reference temperature PIU, the gas flow rate IUJ measured in real time and the reference gas flow rate IUH;

[0032] Calculate the coating environment comprehensive index HYT according to the environmental data, and the formula is as follows:

[0033] .

[0034] In the above-mentioned preferred scheme of an adaptive vacuum coating intelligent control system: The method for calculating the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV is:

[0035] The operating data includes the actual operating time JIL, total time QMG, number of failures NZX, actual power consumption SPN and rated power HGV of the coating equipment during the coating process;

[0036] The energy efficiency index EGJ of the coating equipment is calculated based on the actual operating time JIL, total time QMG, number of failures NZX, actual power consumption SPN and rated power HGV of the coating equipment during the coating process. The formula is as follows:

[0037] ;

[0038] The operating data also includes the actual power XSA and rated power VBC of the coating equipment during the coating process;

[0039] The stability index RTV of the coating equipment is calculated based on the actual operating time JIL, total time QMG, number of failures NZX, actual power XSA and rated power VBC of the coating equipment during the coating process. The formula is as follows:

[0040] 。

[0041] In the preferred solution of the above-mentioned adaptive vacuum coating intelligent control system: The method for calculating the comprehensive operation index PBQ of the coating equipment is:

[0042] The comprehensive operation index PBQ of the coating equipment is calculated based on the energy efficiency index EGJ and stability index RTV of the coating equipment. The formula is as follows:

[0043] 。

[0044] In the preferred solution of the above-mentioned adaptive vacuum coating intelligent control system: The method for calculating the coating electromagnetic field stability index JQZ is:

[0045] The electromagnetic field intensity data includes the electric field intensity amplitude DVB, electric field intensity reference amplitude DSG, magnetic field intensity amplitude UYY and magnetic field intensity reference amplitude EGF;

[0046] The coating electromagnetic field stability index JQZ is calculated based on the electric field intensity amplitude DVB, electric field intensity reference amplitude DSG, magnetic field intensity amplitude UYY and magnetic field intensity reference amplitude EGF. The formula is as follows:

[0047] 。

[0048] In the preferred solution of the above-mentioned adaptive vacuum coating intelligent control system: The method for calculating the coating electromagnetic field comprehensive index ISX is:

[0049] Calculate the comprehensive index ISX of the coating electromagnetic field according to the stability index JQZ of the coating electromagnetic field. The formula is as follows:

[0050] 。

[0051] In the preferred scheme of the above-mentioned adaptive vacuum coating intelligent control system: The criteria for judging the current coating state are as follows:

[0052] The set of standard state thresholds for vacuum coating includes a low-standard quality threshold TG and a high-standard quality threshold TH; among them, the high-standard quality threshold TH > the low-standard quality threshold TG;

[0053] Compare the comprehensive coating quality index BEI with the low-standard quality threshold TG and the high-standard quality threshold TH. The criteria for judging the current coating state are as follows:

[0054] ;

[0055] When in the low-standard quality state, generate quality control instruction one; when in the standard quality state, generate quality control instruction two; when in the high-standard quality state, generate quality control instruction three;

[0056] The set of standard state thresholds for vacuum coating also includes a low-standard environment threshold EX and a high-standard environment threshold XC; among them, the high-standard environment threshold XC > the low-standard environment threshold EX;

[0057] Compare the comprehensive coating environment index HYT with the low-standard environment threshold EX and the high-standard environment threshold XC. The criteria for judging the current coating state are as follows:

[0058] ;

[0059] When in the low-standard environment state, generate environment control instruction one; when in the standard environment state, generate environment control instruction two; when in the high-standard environment state, generate environment control instruction three;

[0060] The set of standard state thresholds for vacuum coating also includes a low-standard equipment operation threshold DV and a high-standard equipment operation threshold DX; among them, the high-standard equipment operation threshold DX > the low-standard equipment operation threshold DV;

[0061] Compare the comprehensive coating equipment operation index PBQ with the low-standard equipment operation threshold DV and the high-standard equipment operation threshold DX. The criteria for judging the current coating state are as follows:

[0062] ;

[0063] When in the low-standard equipment operation state, generate equipment operation control instruction 1; when in the standard equipment operation state, generate equipment operation control instruction 2; when in the high-standard equipment operation state, generate equipment operation control instruction 3;

[0064] The vacuum coating standard state threshold set also includes the low-standard electromagnetic field threshold FB and the high-standard electromagnetic field threshold FR; among them, the high-standard electromagnetic field threshold FR > the low-standard electromagnetic field threshold FB;

[0065] Compare the coating electromagnetic field comprehensive index ISX with the low-standard electromagnetic field threshold FB and the high-standard electromagnetic field threshold FR, and the criteria for judging the current coating state are as follows:

[0066] ;

[0067] When in the low-standard electromagnetic field state, generate electromagnetic field control instruction 1; when in the standard electromagnetic field state, generate electromagnetic field control instruction 2; when in the high-standard electromagnetic field state, generate electromagnetic field control instruction 3.

[0068] (III) Beneficial effects

[0069] The present invention provides an adaptive vacuum coating intelligent control system, which has the following beneficial effects:

[0070] (1) By collecting the physical property data of the coating material, the environmental data, the operation data and the electromagnetic field intensity data in the vacuum chamber, capturing data in multiple dimensions, it provides a rich information basis for subsequent precise analysis and control, and avoids analysis deviation and control mistakes caused by data loss.

[0071] (2) By using the control unit to transmit data quickly and accurately, it ensures the timeliness and integrity of the data, avoids data loss or delay, enables the control system to obtain the latest information in a timely manner, make accurate decisions, and stable data transmission ensures the coherence and coordination of the entire system, provides reliable data support for subsequent data calculation and judgment, and reduces the risk of system failure caused by data transmission problems.

[0072] (3) By calculating the corresponding coating quality comprehensive index, coating environment comprehensive index, coating equipment operation comprehensive index and coating electromagnetic field comprehensive index, it converts the original data into intuitive and in-depth judgment basis, calculates by integrating multiple indexes, avoids the limitation of a single index, comprehensively evaluates all aspects of the coating process, provides a comprehensive and scientific basis for the intelligent control of the system, and helps to achieve better coating effects and production efficiency.

[0073] (4) By presetting a set of standard state thresholds and comparing the calculated indices with them, intelligent judgment of the coating state is realized, eliminating the need for frequent manual intervention. This improves the accuracy and efficiency of judgment, reduces the subjectivity and error of manual judgment, automatically generates control instructions according to the judgment results, realizes the adaptive control of the system, can timely adjust various parameters in the coating process, ensures that the coating process is always carried out in the best state, improves product quality and production efficiency, and reduces production costs and rejection rates. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] Figure 1 It is a schematic diagram of the working steps of an adaptive vacuum coating intelligent control system of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0075] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0076] Please refer to Figure 1 , the present invention provides an adaptive vacuum coating intelligent control system, including:

[0077] A data acquisition module for acquiring physical property data of the coating material, environmental data in the vacuum chamber, operation data, and electromagnetic field intensity data.

[0078] In the above solution, by acquiring physical property data of the coating material, environmental data in the vacuum chamber, operation data, and electromagnetic field intensity data, data is captured from multiple dimensions, providing a rich information basis for subsequent precise analysis and control, and avoiding analysis deviation and control errors caused by data loss.

[0079] A data transmission module for transmitting the data acquired by the data acquisition module to the control system using a control unit.

[0080] In the above solution, by using the control unit to quickly and accurately transmit data, the timeliness and integrity of the data are ensured, data loss or delay is avoided, the control system can timely obtain the latest information and make accurate decisions. Stable data transmission ensures the coherence and coordination of the entire system, provides reliable data support for subsequent data calculation and judgment, and reduces the risk of system failures caused by data transmission problems.

[0081] A data calculation module is used to calculate the coating uniformity index CUI and the coating qualification index MQW according to physical property data; calculate the coating performance deviation index CPD according to the coating uniformity index CUI and the coating qualification index MQW; calculate the comprehensive coating quality index BEI according to the coating uniformity index CUI, the coating qualification index MQW and the coating performance deviation index CPD.

[0082] Calculate the comprehensive coating environment index HYT according to environmental data.

[0083] Calculate the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV according to operation data; calculate the comprehensive coating equipment operation index PBQ according to the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV.

[0084] Calculate the coating electromagnetic field stability index JQZ according to electromagnetic field intensity data; calculate the comprehensive coating electromagnetic field index ISX according to the coating electromagnetic field stability index JQZ.

[0085] Specifically, the methods for calculating the coating uniformity index CUI and the coating qualification index MQW are as follows:

[0086] The physical property data includes the film layer thickness TYU i and the average value WET of the film layer thickness.

[0087] It should be noted that the film layer thickness TYU i represents the film layer thickness obtained at the i-th measurement position, which is measured by an optical interferometer. For example, the center position of each area on the sample surface is measured, and the number of measurement positions is represented by m. The value range of i is [1, m], that is, from the 1st measurement position to the m-th measurement position; the average value WET of the film layer thickness represents the average film layer thickness of the coating area, which is obtained by adding the film layer thickness values obtained at all m measurement positions and then dividing by the number of measurement positions m.

[0088] According to the film layer thickness TYU i and the average value WET of the film layer thickness, calculate the coating uniformity index CUI, and the formula is as follows:

[0089] ;

[0090] where TYU i is the film layer thickness obtained at the i-th measurement position, i is the serial number corresponding to different measurement positions, and the value range is [1, m]; m is the number of measurement positions, and the value is a positive integer.

[0091] It should be noted that in this formula: Denote the sum of the squares of the relative deviations at all m measurement positions. What is obtained is the total relative deviation of the film thickness in the entire coating area, which reflects the overall deviation degree of all measurement positions from the average value. Dividing by the number of measurement positions m gives the mean square relative deviation, which represents the average deviation degree of each measurement position, eliminating the influence of the number of measurement positions on the total and making the results comparable under different measurement numbers. Taking the square root is to restore the squared deviation to a magnitude similar to the original deviation for a more intuitive understanding of the deviation size. Adding 1 is to ensure that the value of CUI is always between 0 and 1. The closer the value of CUI is to 1, the better the uniformity of the coating thickness in the entire measurement area; the smaller the value of CUI, the worse the uniformity of the coating thickness.

[0092] The physical property data also includes the reference standard value TRE of the film thickness and the film density DFG i and the reference standard value NJI of the film density.

[0093] It should be noted that the reference standard value TRE of the film thickness represents the film thickness as a reference, which is specified by the design requirements of the coating product; the film density DFG i represents the film density at the i-th measurement position. By the geometric dimension measurement method, first measure the mass and size changes of the sample before and after coating, calculate the film volume, and then obtain the density; the reference standard value NJI of the film density represents the film density as a reference, which is determined by the product performance requirements.

[0094] According to the film thickness TYU i the reference standard value TRE of the film thickness, the film density DFG i and the reference standard value NJI of the film density, calculate the coating qualification index MQW. The formula is as follows:

[0095] ;

[0096] where DFG i is the film density at the i-th measurement position.

[0097] It should be noted that in this formula: is used to measure the influence of the deviation degree of the film thickness at each measurement position from the reference standard value on the qualification index, is used to measure the influence of the deviation degree of the film density at each measurement position from the reference standard value on the qualification index. The numerator The deviation effects of the film thickness and film density at each measurement position from their respective reference standard values are combined. By multiplying the above two parts and then summing them up, the comprehensive deviation effect for all measurement positions is obtained. Considering the impacts of film thickness and film density on the coating quality, the qualification degree of the coating is comprehensively evaluated. Dividing the numerator by the number of measurement positions \(m\), the comprehensive deviation effect degree for each measurement position on average is obtained, and the coating qualification index MQW is obtained. It is an index that comprehensively considers the deviations of film thickness and film density from their respective reference standard values to evaluate whether the coating quality is qualified. The closer the value of MQW is to 1, the more compliant the coating is with the standards in terms of film thickness and film density, and the better the coating quality; the smaller the value of MQW, the greater the deviation of the coating quality from the standards and the lower the qualification degree.

[0098] Specifically, the method for calculating the coating performance deviation index CPD is as follows:

[0099] The coating performance deviation index CPD is calculated based on the coating uniformity index CUI and the coating qualification index MQW, and the formula is as follows:

[0100] 。

[0101] It should be noted that in this formula: the numerator represents the absolute value of the difference between the coating uniformity index CUI and the coating qualification index MQW, and the denominator comprehensively considers the impacts of the magnitudes of CUI and MQW on the deviation index. Dividing the numerator by the denominator gives the coating performance deviation index CPD. The smaller the value of CPD, the closer the comprehensive performance of the coating in terms of uniformity and qualification is to the ideal state; the larger the value of CPD, the greater the deviation of the coating performance from the ideal state.

[0102] Specifically, the method for calculating the coating quality comprehensive index BEI is as follows:

[0103] The coating quality comprehensive index BEI is calculated based on the coating uniformity index CUI, the coating qualification index MQW, and the coating performance deviation index CPD, and the formula is as follows:

[0104] 。

[0105] It should be noted that in this formula: represents comprehensively considering the performances of the coating in terms of uniformity and qualification. The larger the sum of the two, the better the overall performance in these two dimensions. is the absolute value of the difference between CUI and MQW, which reflects the degree of difference between CUI and MQW. represents according to the overall performance ( )To adjust the influence caused by the deviation, subtract the three parts to obtain the numerator, and the denominator is 2, which plays a role of normalization, adjusting the result calculated from the numerator to a suitable range to better represent the comprehensive index of coating quality. By combining the coating uniformity index CUI, the coating qualification index MQW, and the coating performance deviation index CPD, it comprehensively considers the influences of coating on coating quality in multiple aspects such as uniformity, qualification, and deviation from the ideal state.

[0106] Specifically, the method for calculating the comprehensive index of coating environment HYT is as follows:

[0107] The environmental data includes the vacuum degree PLM measured in real time in the vacuum chamber, the reference vacuum degree PKN, the temperature POI measured in real time, the reference temperature PIU, the gas flow rate IUJ measured in real time, and the reference gas flow rate IUH.

[0108] It should be noted that the vacuum degree PLM measured in real time in the vacuum chamber represents the current actual vacuum value, and the vacuum degree value in the vacuum chamber is monitored and obtained in real time through a thermocouple gauge; the reference vacuum degree PKN is used as the benchmark for measuring the actual vacuum degree. Different coating materials and processes have different requirements for the vacuum degree. Based on a large number of experiments and production practices, a vacuum degree range that can ensure good coating quality is summarized, and a representative value is selected from it as the reference vacuum degree. For example, for the metal evaporation coating process, a relatively high vacuum degree may be required, such as below 10 - ³ Pa, while for the sputtering coating process, the vacuum degree requirement may be relatively low, such as around 10 - ² Pa; the temperature POI measured in real time represents the actual temperature value in the vacuum chamber during the coating process, which is measured in real time through a temperature sensor; the reference temperature PIU is used as the standard for measuring the actual temperature, and a suitable value is selected from it as the reference temperature according to the specific coating materials and process requirements. For example, for some oxide coatings, a relatively high substrate temperature is required, such as 200 - 300 ° °C; to promote the crystallization and adhesion of oxides; the gas flow rate IUJ measured in real time represents the actual measured value of the gas flow rate entering the vacuum chamber during the coating process, which is measured in real time through a gas flow meter; the reference gas flow rate IUH is used as the standard for measuring the actual gas flow rate, which is determined according to the specific coating materials and process requirements.

[0109] The formula for calculating the comprehensive index of coating environment HYT based on the environmental data is as follows:

[0110] .

[0111] It should be noted that in this formula: is used to measure the influence of the deviation between the real-time vacuum degree and the reference vacuum degree on the comprehensive environmental index. To measure the impact of the deviation between the real-time temperature and the reference temperature on the comprehensive environmental index, To measure the impact of the deviation between the real-time gas flow rate and the reference gas flow rate on the comprehensive environmental index, adding the above three parts regarding the impact of vacuum degree, temperature, and gas flow rate deviation and then multiplying by one-third is to comprehensively consider the impact of these three environmental factors on the comprehensive coating environment index and perform an average, avoiding excessive influence of a certain factor's deviation on the overall environmental comprehensive index, and more comprehensively reflecting the overall situation of the coating environment. Taking the square root of the comprehensive result is mainly to adjust the result to a more appropriate numerical range for easy comparison and analysis. The closer the value of HYT is to 1, the closer the current coating environment is to the preset ideal reference environment, and the better the coating environment quality; the smaller the value of HYT, the greater the deviation between the current coating environment and the ideal reference environment, and it may be necessary to adjust the environmental parameters to optimize the coating process.

[0112] Specifically, the methods for calculating the energy efficiency index EGJ and the stability index RTV of the coating equipment are as follows:

[0113] The operating data includes the actual operating time JIL, total time QMG, number of breakdowns NZX, actual power consumption SPN in the standby state, and rated power HGV of the coating equipment during the coating process.

[0114] It should be noted that the actual operating time JIL represents the actual operating time of the coating equipment during the coating process and is obtained through the equipment's operating record system; the total time QMG represents the total duration of the equipment being turned on in a day and is obtained through the equipment's operating record system; the number of breakdowns NZX represents the number of breakdowns of the coating equipment within the total time and is obtained through the equipment's fault alarm system and maintenance records; the actual power SPN represents the actual power consumption of the coating equipment in the standby state. The power is measured by connecting a power meter to the power input terminal of the equipment when the equipment is in the standby state to obtain the actual power; the rated power HGV represents the maximum power consumption value of the equipment when it is in the on and standby state without performing coating operations and is obtained through the equipment's technical specification manual.

[0115] Calculate the energy efficiency index EGJ of the coating equipment based on the actual operating time JIL, total time QMG, number of breakdowns NZX, actual power consumption SPN in the standby state, and rated power HGV of the coating equipment during the coating process. The formula is as follows:

[0116] .

[0117] It should be noted that in this formula: represents the proportion of the actual operating time of the coating equipment in the total time, Indicates the proportion of time that the equipment runs without faults. Taking into account the impact of the standby power of the equipment on energy efficiency, multiplying the above three parts gives the energy efficiency index of the coating equipment. This index comprehensively considers the running time, fault conditions, and standby power of the equipment, and comprehensively evaluates the energy efficiency of the equipment. The larger the value of EGJ, the higher the energy efficiency of the coating equipment; the smaller the value of EGJ, the lower the energy efficiency of the equipment.

[0118] The operation data also includes the actual power XSA and the rated power VBC during the coating process of the coating equipment.

[0119] It should be noted that the actual power XSA represents the actual power during the coating process of the coating equipment. By connecting a power meter to the power input terminal of the equipment and measuring its power consumption in real time during the operation of the equipment, the actual power is obtained; the rated power VBC represents the maximum power value designed under normal operating conditions of the equipment, which is obtained from the technical specification manual of the equipment.

[0120] Calculate the stability index RTV of the coating equipment based on the actual running time JIL, total time QMG, number of faults NZX, actual power XSA, and rated power VBC during the coating process of the coating equipment. The formula is as follows:

[0121] .

[0122] It should be noted that in this formula: Represents the proportion of the actual running time of the coating equipment to the total time. Is an exponential function that adjusts the weight of the following formula according to the actual running time JIL and the number of faults NZX. Is used to measure the impact of the running time and number of faults of the coating equipment on the stability index of the coating equipment. Is used to measure the impact of the deviation degree between the actual power and the rated power on the stability. Squaring is to amplify the impact of the deviation. Overall, considering the adjustment of the weight by the running time and number of faults of the equipment, the comprehensive impact of the deviation between the actual power and the rated power on the equipment stability. When the equipment has a long running time, few faults, and a small power deviation, the value in the brackets is close to 1 and the contribution to the stability index is large; conversely, when the running time is short, the number of faults is large, or the power deviation is large, the value in the brackets decreases and the contribution to the stability index decreases.

[0123] Specifically, the method for calculating the comprehensive operation index PBQ of the coating equipment is as follows:

[0124] Calculate the comprehensive operation index PBQ of the coating equipment based on the energy efficiency index EGJ and the stability index RTV of the coating equipment. The formula is as follows:

[0125] 。

[0126] It should be noted that in this formula: the numerator represents the basic impact of comprehensively considering the energy efficiency and stability of the equipment on the operation comprehensive index, reflects the relative difference degree between EGJ and RTV. After multiplying the above ratio by π / 2 as the input of the cosine function, it plays important roles such as non-linear adjustment, ensuring the value range and continuity, comprehensively considering and balancing weights, etc., so that the calculated operation comprehensive index of the coating equipment can more scientifically and accurately evaluate the operation status of the equipment. Adding 1 to the value of the cosine function is to ensure that this part of the value is always greater than or equal to 0. The denominator is 2, which plays a role of normalization, adjusting the result calculated by the numerator to a suitable range to better represent the operation comprehensive index of the coating equipment. When both EGJ and RTV are relatively high and close, the value of PBQ is large, indicating that the equipment has good and balanced operation performance; when one of EGJ and RTV is relatively low, the value of PBQ will decrease accordingly, suggesting that the equipment needs to be adjusted or optimized to improve the overall operation performance.

[0127] Specifically, the method for calculating the coating electromagnetic field stability index JQZ is as follows:

[0128] The electromagnetic field intensity data includes the electric field intensity amplitude DVB, the electric field intensity reference amplitude DSG, the magnetic field intensity amplitude UYY, and the magnetic field intensity reference amplitude EGF.

[0129] It should be noted that the electric field intensity amplitude DVB represents the actually measured electric field intensity amplitude during the coating process. The electric field intensity signal is converted into an electrical signal through the sensor of the electric field probe, and then the electric field intensity amplitude is obtained through the data acquisition and processing system; the electric field intensity reference amplitude DSG represents the reference standard for measuring the actual electric field intensity, which is determined by factors such as coating process and material properties; the magnetic field intensity amplitude UYY represents the actually measured magnetic field intensity amplitude during the coating process, which is obtained through a magnetic field intensity measuring instrument; the magnetic field intensity reference amplitude EGF represents the reference standard for measuring the actual magnetic field intensity, which is determined by factors such as coating process and material properties.

[0130] The coating electromagnetic field stability index JQZ is calculated based on the electric field intensity amplitude DVB, the electric field intensity reference amplitude DSG, the magnetic field intensity amplitude UYY, and the magnetic field intensity reference amplitude EGF. The formula is as follows:

[0131] 。

[0132] It should be noted that in this formula: represents the square of the relative deviation between the electric field intensity amplitude and the electric field intensity reference amplitude, It represents the square of the relative deviation of the magnetic field strength amplitude from the reference magnetic field strength amplitude. By combining the relative deviations of the electric field strength and the magnetic field strength and taking the square root, it is transformed into a magnitude that matches the numerator 1 for subsequent calculations. It takes into account the influence of the relationships between the reference amplitudes of the electric field strength and the magnetic field strength and the actual amplitudes of the electric field strength and the magnetic field strength on the stability index. Overall, it comprehensively considers the deviations of the electric field strength and the magnetic field strength from their respective reference amplitudes and a certain intensity relationship between them, and comprehensively evaluates the stability of the electromagnetic field during the coating process. The closer the value of JQZ is to 1, the more stable the electromagnetic field is; the smaller the value of JQZ, the worse the stability of the electromagnetic field.

[0133] Specifically, the method for calculating the comprehensive index ISX of the coating electromagnetic field is as follows:

[0134] The comprehensive index ISX of the coating electromagnetic field is calculated based on the stability index JQZ of the coating electromagnetic field, and the formula is as follows:

[0135] 。

[0136] It should be noted that in this formula: is an exponential function. Adding 1 ensures that the entire fraction is meaningful in any case, ensuring the stability and reliability of the calculation. Overall, a further non-linear transformation of JQZ is performed so that ISX can more sensitively reflect the changes in the comprehensive performance of the electromagnetic field within the entire value range of JQZ. The closer the value of ISX is to 1, the better the comprehensive performance of the coating electromagnetic field; the smaller the value of ISX, the worse the comprehensive performance of the coating electromagnetic field.

[0137] In the above solution, by calculating the corresponding comprehensive index of the coating quality, the comprehensive index of the coating environment, the comprehensive index of the operation of the coating equipment, and the comprehensive index of the coating electromagnetic field, the original data is transformed into an intuitive and in-depth judgment basis. By calculating multiple indexes comprehensively, the limitations of a single index are avoided, and all aspects of the coating process are comprehensively evaluated, providing a comprehensive and scientific basis for the intelligent control of the system, which helps to achieve better coating effects and production efficiency.

[0138] The data judgment and control instruction generation module is used to preset the set of vacuum coating standard state thresholds, compare the comprehensive index BEI of the coating quality, the comprehensive index HYT of the coating environment, the comprehensive index PBQ of the operation of the coating equipment, and the comprehensive index ISX of the coating electromagnetic field with the set of vacuum coating standard state thresholds respectively to judge the current coating state; according to the judgment result, the control system generates corresponding control instructions.

[0139] Specifically, the criteria for presetting the set of vacuum coating standard state thresholds are as follows:

[0140] The set of standard state thresholds for vacuum coating includes the low-standard quality threshold TG, the high-standard quality threshold TH, the low-standard environment threshold EX, the high-standard environment threshold XC, the low-standard equipment operation threshold DV, the high-standard equipment operation threshold DX, the low-standard electromagnetic field threshold FB, and the high-standard electromagnetic field threshold FR.

[0141] The low-standard quality threshold TG is obtained by collecting a large amount of historical coating minimum quality data, calculating the comprehensive coating quality index at multiple time points, and calculating its average value as the low-standard quality threshold TG; the high-standard quality threshold TH is obtained by collecting a large amount of historical coating high-quality data, calculating the comprehensive coating quality index at multiple time points, and calculating its average value as the high-standard quality threshold TH.

[0142] The low-standard environment threshold EX is obtained by collecting a large amount of historical coating environment minimum data, calculating the comprehensive coating environment index at multiple time points, and calculating its average value as the low-standard environment threshold EX; the high-standard environment threshold XC is obtained by collecting a large amount of historical coating environment optimal data, calculating the comprehensive coating environment index at multiple time points, and calculating its average value as the high-standard environment threshold XC.

[0143] The low-standard equipment operation threshold DV is obtained by collecting a large amount of historical coating equipment minimum requirement data, calculating the comprehensive coating equipment operation index at multiple time points, and calculating its average value as the low-standard equipment operation threshold DV; the high-standard equipment operation threshold DX is obtained by collecting a large amount of historical coating equipment stable operation data, calculating the comprehensive coating equipment operation index at multiple time points, and calculating its average value as the high-standard equipment operation threshold DX.

[0144] The low-standard electromagnetic field threshold FB is obtained by collecting a large amount of historical coating process minimum requirement data for the electromagnetic field, calculating the comprehensive coating electromagnetic field index at multiple time points, and calculating its average value as the low-standard electromagnetic field threshold FB; the high-standard electromagnetic field threshold FR is obtained by collecting a large amount of historical coating process optimal electromagnetic field data, calculating the comprehensive coating electromagnetic field index at multiple time points, and calculating its average value as the high-standard electromagnetic field threshold FR.

[0145] Specifically, the criteria for judging the current coating state are as follows:

[0146] The set of standard state thresholds for vacuum coating includes the low-standard quality threshold TG and the high-standard quality threshold TH; among them, the high-standard quality threshold TH > the low-standard quality threshold TG.

[0147] Compare the comprehensive coating quality index BEI with the low-standard quality threshold TG and the high-standard quality threshold TH, and the criteria for judging the current coating state are as follows:

[0148] ;

[0149] When in the low-standard quality state, generate Quality Control Instruction 1; when in the standard quality state, generate Quality Control Instruction 2; when in the high-standard quality state, generate Quality Control Instruction 3.

[0150] It should be noted that when in the low-standard quality state, the generated Quality Control Instruction 1 is: start the self-check program of the vacuum system, check whether components such as vacuum pumps, valves, and pipelines are working properly, adjust the vacuum degree setting value, gradually increase the vacuum degree according to process requirements, and wait for a period of time after each adjustment to stabilize the vacuum degree; when in the standard quality state, the generated Quality Control Instruction 2 is: continuously monitor and record parameters and quality data, finely adjust process parameters and verify them, establish a quality traceability system and upstream and downstream information feedback; when in the high-standard quality state, the generated Quality Control Instruction 3 is: calibrate the measurement system, call back and analyze process parameters and evaluate their impact on production efficiency and cost, comprehensively check the equipment status and operating environment, ensure the equipment operates well and the environment is suitable, so as to ensure that the coating quality is stable within a reasonable range and improve production efficiency and product quality.

[0151] The set of standard state thresholds for vacuum coating also includes the low-standard environment threshold EX and the high-standard environment threshold XC; among them, the high-standard environment threshold XC > the low-standard environment threshold EX.

[0152] Compare the comprehensive coating environment index HYT with the low-standard environment threshold EX and the high-standard environment threshold XC, and the criteria for judging the current coating state are as follows:

[0153] ;

[0154] When in the low-standard environment state, generate Environment Control Instruction 1; when in the standard environment state, generate Environment Control Instruction 2; when in the high-standard environment state, generate Environment Control Instruction 3.

[0155] It should be noted that when in the low-standard environment state, the generated Environment Control Instruction 1 is: check the environmental monitoring equipment to ensure accurate data, calibrate it in time if there are deviations, check and repair leakage points, and adjust the vacuum pump parameters to increase the vacuum degree; when in the standard environment state, the generated Environment Control Instruction 2 is: continuously and real-time monitor environmental parameters, record data and analyze trends, set up abnormal alarms, finely adjust environmental parameters, and regularly maintain the environmental control system; when in the high-standard environment state, the generated Environment Control Instruction 3 is: check the accuracy of environmental parameter measuring instruments, calibrate or replace faulty instruments, check the operating status of the environmental control system, such as whether the ventilation system is overworking, and adjust it to a reasonable state, while ensuring that other factors such as the temperature and humidity of the environment are also within the appropriate range.

[0156] The set of standard state thresholds for vacuum coating also includes a low-standard equipment operation threshold DV and a high-standard equipment operation threshold DX; among them, the high-standard equipment operation threshold DX > the low-standard equipment operation threshold DV.

[0157] Compare the comprehensive coating equipment operation index PBQ with the low-standard equipment operation threshold DV and the high-standard equipment operation threshold DX, and the criteria for judging the current coating state are as follows:

[0158] ;

[0159] When in the low-standard equipment operation state, generate equipment operation control instruction 1; when in the standard equipment operation state, generate equipment operation control instruction 2; when in the high-standard equipment operation state, generate equipment operation control instruction 3.

[0160] It should be noted that when in the low-standard equipment operation state, the generated equipment operation control instruction 1 is: comprehensively check the mechanical components of the equipment to see if there is wear or looseness, repair or replace them in a timely manner, detect the electrical system to ensure stable voltage and current, and no faults such as short circuits and overloads, and calibrate the equipment operation parameter measuring instruments to ensure accurate data; when in the standard equipment operation state, the generated equipment operation control instruction 2 is: regularly maintain the equipment, finely adjust the equipment operation parameters, and train the operators to ensure standardized operation; when in the high-standard equipment operation state, the generated equipment operation control instruction 3 is: check whether the equipment is operating overloaded, such as whether the power is too high or the operation time is too long, appropriately reduce the operation intensity, check the equipment cooling system to ensure good heat dissipation, and prevent the equipment performance and life from being affected by overheating.

[0161] The set of standard state thresholds for vacuum coating also includes a low-standard electromagnetic field threshold FB and a high-standard electromagnetic field threshold FR; among them, the high-standard electromagnetic field threshold FR > the low-standard electromagnetic field threshold FB.

[0162] Compare the comprehensive coating electromagnetic field index ISX with the low-standard electromagnetic field threshold FB and the high-standard electromagnetic field threshold FR, and the criteria for judging the current coating state are as follows:

[0163] ;

[0164] When in the low-standard electromagnetic field state, generate electromagnetic field control instruction 1; when in the standard electromagnetic field state, generate electromagnetic field control instruction 2; when in the high-standard electromagnetic field state, generate electromagnetic field control instruction 3.

[0165] It should be noted that when in a low-standard electromagnetic field state, the electromagnetic field control instruction one is: check the electromagnetic field generator, view whether the power supply voltage and current are stable and whether the frequency is accurate, and adjust or repair in time if there are any abnormalities; check the electromagnetic field shielding device to see if there is any damage or poor shielding effect, and repair or replace the shielding components. When in a standard electromagnetic field state, the electromagnetic field control instruction two is: regularly maintain the electromagnetic field generator, such as cleaning and tightening components, etc., to ensure its stable performance, finely adjust the electromagnetic field-related parameters, such as slightly changing the electromagnetic field frequency, phase, etc., observe the impact on the coating quality, and find a better combination of operating parameters while ensuring the stability and reliability of the equipment operation. When in a high-standard electromagnetic field state, the electromagnetic field control instruction three is: check the parameter settings of the electromagnetic field generator to see if there are problems such as too high power or too high frequency, and check whether the electromagnetic field is affected by external interference, such as whether there are new electromagnetic devices nearby, and take shielding or isolation measures.

[0166] In the above solution, by presetting a set of standard state thresholds and comparing the calculated various indices with them, the intelligent judgment of the coating state is realized, without frequent manual intervention, improving the accuracy and efficiency of judgment, reducing the subjectivity and error of manual judgment, automatically generating control instructions according to the judgment results, realizing the adaptive control of the system, being able to timely adjust various parameters in the coating process, ensuring that the coating process is always carried out in the best state, improving product quality and production efficiency, and reducing production costs and scrap rates.

[0167] The above embodiments can be implemented in whole or in part by software, hardware, firmware or any other combination. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware or a combination of computer software and electronic hardware. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution.

[0168] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0169] The above is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed in this application, and all should be covered by the protection scope of this application.

Claims

1. An adaptive intelligent control system for vacuum coating, characterized in that: Including: A data acquisition module, which is used to acquire the physical property data of the coating material, the environmental data in the vacuum chamber, the operation data, and the electromagnetic field intensity data; A data transmission module, which is used to transmit the data collected by the data acquisition module to the control system through the control unit; A data calculation module, which is used to calculate the coating uniformity index CUI and the coating qualification index MQW according to the physical property data; calculate the coating performance deviation index CPD according to the coating uniformity index CUI and the coating qualification index MQW; calculate the comprehensive coating quality index BEI according to the coating uniformity index CUI, the coating qualification index MQW, and the coating performance deviation index CPD; Calculate the comprehensive coating environment index HYT according to the environmental data; Calculate the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV according to the operation data; Calculate the comprehensive coating equipment operation index PBQ according to the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV; Calculate the coating electromagnetic field stability index JQZ according to the electromagnetic field intensity data; calculate the comprehensive coating electromagnetic field index ISX according to the coating electromagnetic field stability index JQZ; A data judgment and control instruction generation module, which is used to preset a set of vacuum coating standard state thresholds, compare the comprehensive coating quality index BEI, the comprehensive coating environment index HYT, the comprehensive coating equipment operation index PBQ, and the comprehensive coating electromagnetic field index ISX with the set of vacuum coating standard state thresholds respectively to judge the current coating state; according to the judgment result, the control system generates corresponding control instructions.

2. The adaptive vacuum coating intelligent control system according to claim 1, wherein: The methods for calculating the coating uniformity index CUI and the coating qualification index MQW are as follows: The physical property data includes the film layer thickness TYU i and the average value WET of the film layer thickness; According to the film layer thickness TYU i The coating uniformity index CUI is calculated based on the average value WET of the film layer thickness, and the formula is as follows: ； Among them, TYU i is the film thickness obtained at the i-th measurement position, where i is the serial number corresponding to different measurement positions, with a value range of [1, m]; m is the number of measurement positions, and its value is a positive integer; The physical property data further includes a reference standard value TRE of the film thickness and a DFG of the film density i and a reference standard value NJI of the film density; According to the film layer thickness TYU i , the reference standard value TRE of the film layer thickness, and the film layer density DFG i and the reference standard value NJI of the film layer density to calculate the coating qualification index MQW. The formula is as follows: ； Among them, DFG i is the film layer density at the i-th measurement position.

3. An adaptive vacuum coating intelligent control system according to claim 2, characterized in that: The method for calculating the coating performance deviation index CPD is as follows: The formula for calculating the coating performance deviation index CPD according to the coating uniformity index CUI and the coating qualification index MQW is as follows: 。 4. An adaptive vacuum coating intelligent control system according to claim 3, characterized in that: The method for calculating the comprehensive coating quality index BEI is as follows: The formula for calculating the comprehensive coating quality index BEI according to the coating uniformity index CUI, the coating qualification index MQW, and the coating performance deviation index CPD is as follows: 。 5. An adaptive vacuum coating intelligent control system according to claim 4, characterized in that: The method for calculating the comprehensive coating environment index HYT is as follows: The environmental data includes the vacuum degree PLM measured in real time in the vacuum chamber, the reference vacuum degree PKN, the temperature POI measured in real time, the reference temperature PIU, the gas flow rate IUJ measured in real time, and the reference gas flow rate IUH; The formula for calculating the comprehensive coating environment index HYT according to the environmental data is as follows: 。 6. The adaptive vacuum coating intelligent control system according to claim 5, wherein: The methods for calculating the coating equipment energy efficiency index EGJ and the coating equipment stability index RTV are as follows: The operation data includes the actual operation time JIL of the coating equipment during the coating process, the total time QMG, the number of failures NZX, the actual power SPN consumed in the standby state, and the rated power HGV; The formula for calculating the coating equipment energy efficiency index EGJ according to the actual operation time JIL, the total time QMG, the number of failures NZX, the actual power SPN consumed in the standby state, and the rated power HGV of the coating equipment during the coating process is as follows: ； The operation data also includes the actual power XSA and the rated power VBC of the coating equipment during the coating process; The stability index RTV of the coating equipment is calculated based on the actual operation time JIL, the total time QMG, the number of failures NZX, the actual power XSA, and the rated power VBC during the coating process. The formula is as follows: 。 7. An adaptive vacuum coating intelligent control system according to claim 6, characterized in that: The method for calculating the comprehensive operation index PBQ of the coating equipment is: The comprehensive operation index PBQ of the coating equipment is calculated based on the energy efficiency index EGJ and the stability index RTV of the coating equipment. The formula is as follows: 。 8. An adaptive vacuum coating intelligent control system according to claim 7, characterized in that: The method for calculating the stability index JQZ of the coating electromagnetic field is: The electromagnetic field intensity data includes the electric field intensity amplitude DVB, the electric field intensity reference amplitude DSG, the magnetic field intensity amplitude UYY, and the magnetic field intensity reference amplitude EGF; The stability index JQZ of the coating electromagnetic field is calculated based on the electric field intensity amplitude DVB, the electric field intensity reference amplitude DSG, the magnetic field intensity amplitude UYY, and the magnetic field intensity reference amplitude EGF. The formula is as follows: 。 9. An adaptive vacuum coating intelligent control system according to claim 8, characterized in that: The method for calculating the comprehensive index ISX of the coating electromagnetic field is: The comprehensive index ISX of the coating electromagnetic field is calculated based on the stability index JQZ of the coating electromagnetic field. The formula is as follows: 。 10. An adaptive vacuum coating intelligent control system according to claim 9, characterized in that: The criteria for judging the current coating state are as follows: The set of standard state thresholds for vacuum coating includes the low-standard quality threshold TG and the high-standard quality threshold TH; among them, the high-standard quality threshold TH > the low-standard quality threshold TG; The coating quality comprehensive index BEI is compared with the low-standard quality threshold TG and the high-standard quality threshold TH. The criteria for judging the current coating state are as follows: ； When in the low-standard quality state, generate quality control instruction one; when in the standard quality state, generate quality control instruction two; when in the high-standard quality state, generate quality control instruction three; The set of standard state thresholds for vacuum coating also includes the low-standard environment threshold EX and the high-standard environment threshold XC; among them, the high-standard environment threshold XC > the low-standard environment threshold EX; The coating environment comprehensive index HYT is compared with the low-standard environment threshold EX and the high-standard environment threshold XC. The criteria for judging the current coating state are as follows: ； When in the low-standard environment state, generate environment control instruction one; when in the standard environment state, generate environment control instruction two; when in the high-standard environment state, generate environment control instruction three; The set of standard state thresholds for vacuum coating also includes the low-standard equipment operation threshold DV and the high-standard equipment operation threshold DX; among them, the high-standard equipment operation threshold DX > the low-standard equipment operation threshold DV; The coating equipment comprehensive operation index PBQ is compared with the low-standard equipment operation threshold DV and the high-standard equipment operation threshold DX. The criteria for judging the current coating state are as follows: ； When in the low-standard equipment operation state, generate equipment operation control instruction one; when in the standard equipment operation state, generate equipment operation control instruction two; when in the high-standard equipment operation state, generate equipment operation control instruction three; The set of standard state thresholds for vacuum coating also includes the low-standard electromagnetic field threshold FB and the high-standard electromagnetic field threshold FR; among them, the high-standard electromagnetic field threshold FR > the low-standard electromagnetic field threshold FB; Compare the comprehensive index ISX of the coating electromagnetic field with the low-standard electromagnetic field threshold FB and the high-standard electromagnetic field threshold FR. The criteria for judging the current coating state are as follows: ； When in the low-standard electromagnetic field state, generate the first electromagnetic field control instruction; when in the standard electromagnetic field state, generate the second electromagnetic field control instruction; when in the high-standard electromagnetic field state, generate the third electromagnetic field control instruction.

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