Tank cleaning solution as well as preparation method and application thereof

Abstract

The invention relates to a tank cleaning agent, which is prepared from the following raw materials in parts by weight: 1 to 2.5 parts by weight of citric acid, 0.3 to 0.8 part by weight of sulfamic acid, 0.4 to 1 part by weight of ethylenediamine tetraacetic acid sodium salt, 0.1 to 0.15 part by weight of sodium alginate, 0.1 to 0.18 part by weight of colloid, 75 to 85 parts by weight of water and 1 to 2 parts by weight of additives, and the additive is prepared from oleamide propyl dimethylamine, cocamidopropyl dimethyl tertiary amine and octylphenol polyoxyethylene ether. The tank cleaning agent can clean the developing tank, the running roller and the spraying nozzle of the developing tank within 1.5 h or even 1 h, the cleaning efficiency is high, the developing tank, the running roller and the spraying nozzle of the developing tank can be cleaned at the normal temperature, and the running roller and the spraying nozzle of the developing tank do not need to be detached for cleaning. The invention further provides a preparation method of the tank cleaning agent, and the preparation method is simple and easy to industrialize.

Description

Technical Field

[0001] This application relates to the technical field of cleaning agents, and particularly to a tank cleaning solution, its preparation method and application. Background Art

[0002] During the development process, photoresist materials (such as negative photoresist and positive photoresist) react with the developer, and the unexposed or exposed parts of the photoresist dissolve. If these dissolved substances accumulate in the chamber or pipeline for a long time, they will agglomerate to form dirt. In addition, there may be chemical residues in the development tank during use, such as materials like acrylic resin, acrylate monomer, hydrochloric acid, and ethyl-4-dimethylaminobenzoate. These residues will also form dirt. At the same time, there may be some dry film residues.

[0003] These dirt or residues adhere to the tank wall or the roller of the running roller, block the nozzle, and seriously affect the development effect. These residues may interfere with the normal contact between the developer and the board surface, resulting in uneven development. A large amount of uncleaned dry film will block the pipeline, reduce the service life of the development tank, and affect the development efficiency. The residues and precipitates in the development tank may adhere back to the board surface and cause contamination, which has an adverse effect on subsequent processes such as gold plating and tin plating, increasing the defective rate. Nozzle blockage will reduce the spraying amount of the developer, affect the uniform distribution of the developer, and thus affect the development quality. The residues adhering to the roller of the running roller are easy to scratch the dry film or ink, thereby affecting the quality of the development process and resulting in a decrease in the good product rate of development.

[0004] In the prior art, there is a method of soaking and cleaning with dilute sulfuric acid. However, the cleaning effect is poor, the time consumption is long, and the nozzle and the roller of the running roller must be removed and cleaned separately to be cleaned thoroughly. The cleaning process is complex and the efficiency is low.

[0005] Therefore, it is necessary to provide a tank cleaning solution with high cleaning efficiency and good cleaning effect. Summary of the Invention

[0006] In order to solve at least one of the above technical problems, this application provides a tank cleaning solution, its preparation method and application. This tank cleaning agent can clean the development tank, the roller of the running roller, and the spray nozzle of the development tank within 1.5 hours or even 1 hour, with high cleaning efficiency. At normal temperature, it can clean the development tank, the roller of the running roller, and the spray nozzle of the development tank, and the roller of the running roller and the spray nozzle of the development tank do not need to be removed for cleaning.

[0007] On the one hand, the present application provides a tank cleaning agent, which is characterized by comprising the following raw materials in parts by weight: 1-2.5 parts by weight of citric acid, 0.3-0.8 parts by weight of sulfamic acid, 0.4-1 part by weight of sodium ethylenediaminetetraacetate, 0.1-0.15 parts by weight of sodium alginate, 0.1-0.18 parts by weight of colloid, 75-85 parts by weight of water, and 1-2 parts by weight of an additive, wherein the additive comprises oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether.

[0008] By adopting the above technical solution, octylphenol polyoxyethylene ether has excellent wetting and penetration properties, which enables it to help the cleaning agent better contact and penetrate into the dirt, thereby improving the cleaning efficiency. In addition, octylphenol polyoxyethylene ether also has good emulsifying properties, which can decompose the dirt into very fine particles, thereby expelling them from the surface of the object to be cleaned. At the same time, octylphenol polyoxyethylene ether also has a dispersing effect, which can help disperse the dirt particles and prevent them from redepositing on the surface of the object to be cleaned, improving the cleaning effect. Oleamide propyl dimethylamine can improve the stability of the cleaning agent in different environments, enabling it to remain efficient in various environments. Secondly, it can increase the solubility of the cleaning agent in difficult-to-dissolve dirt, thereby improving the cleaning efficiency. Oleamide propyl dimethylamine also helps to reduce the surface tension of water, enabling the cleaning agent to better penetrate between the dirt and the surface to be cleaned, improving the cleaning effect. Coconut oil amide propyl dimethyl tertiary amine, as a non-ionic surfactant, can reduce the surface tension of water, improve the wetting and penetration ability of the cleaning agent, enable the cleaning agent to better contact and remove dirt, and has antistatic properties, which can reduce the static electricity problem during the cleaning process and improve the cleaning efficiency.

[0009] Optionally, in the additive, the mass ratio of oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether is 1:(1.5-3):(0.5-1.5).

[0010] By adopting the above technical solution, oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether are mixed in a certain proportion, which can give full play to their respective advantages, improve the solubility of the cleaning agent in grease and some difficult-to-dissolve substances, thereby improving the cleaning efficiency, enabling the cleaning agent to better penetrate between the dirt and the surface to be cleaned, and improving the cleaning effect. Under this system, the developing tank can be cleaned quickly and efficiently.

[0011] Optionally, the colloid comprises at least one of xanthan gum and konjac gum.

[0012] By adopting the above technical solution, adding xanthan gum and konjac gum can form a stable colloidal solution, which helps the active ingredients in the cleaning agent to be evenly distributed and improves the cleaning efficiency.

[0013] Optionally, the mass ratio of the colloid to the sodium alginate is (0.66 - 1.8):1.

[0014] By adopting the above technical solution, on the one hand, the role of sodium alginate in the cleaning process is that its anionic groups combine with the groups in the pollutants through hydrogen bonds to form stable aggregates, thereby helping to remove the pollutants. On the other hand, sodium alginate can form a gel, and this property can be used to form a protective layer during the cleaning process to reduce the reattachment of pollutants to the surface of the cleaned object. By controlling the mass ratio of the colloid to the sodium alginate, the fluidity and viscosity of the cleaning agent can be further controlled at a reasonable level, the microscopic retention speed of the cleaning agent can be controlled, and the cleaning efficiency can be improved.

[0015] Optionally, the sodium salt of ethylenediaminetetraacetic acid is selected from at least one of disodium ethylenediaminetetraacetate and tetrasodium ethylenediaminetetraacetate.

[0016] In a second aspect, the present application provides a method for preparing the above-mentioned tank cleaner, including: mixing the raw materials and stirring to obtain the cleaning agent.

[0017] Optionally, the stirring includes first stirring at a speed of 400 - 600 r / min for 10 - 20 min, and then stirring at a speed of 1800 - 2200 r / min for 15 - 25 min.

[0018] By adopting the above technical solution, through high-speed stirring, the rheological properties of the mixed system can be changed, it is easier to form a film on the surface of the cleaned part, avoid the attachment of pollutants, and improve the cleaning efficiency.

[0019] Optionally, the method for preparing the above-mentioned tank cleaner includes: Step 1): Add sodium alginate and xanthan gum to water, stir at a speed of 400 - 600 r / min for 10 - 20 min, and then stir at a speed of 1800 - 2200 r / min for 15 - 25 min; Step 2): Add the remaining raw materials and stir evenly to obtain the cleaning agent.

[0020] In a third aspect, the present application provides the application of the above-mentioned tank cleaner in cleaning a developing tank, a roller, and a spray nozzle of a developing tank.

[0021] In a fourth aspect, the present application provides a method for cleaning a developing tank, a roller, and a spray nozzle of a developing tank with the above-mentioned tank cleaner, including: discharging the developing tank liquid, circulating water for 8 - 15 min, adding the above-mentioned tank cleaner, starting the spray pump, circulating and spraying for cleaning, after completion, discharging the tank cleaning liquid, circulating water for cleaning, draining the cleaning water, and then injecting the developing solution for recycling.

[0022] By adopting the above technical solution, at room temperature, the developing tank, the running roller, and the spray nozzles of the developing tank can be cleaned, and the running roller and the spray nozzles of the developing tank do not need to be disassembled for cleaning. In addition, by cleaning with the above-mentioned tank cleaning agent, the developing tank, the running roller, and the spray nozzles of the developing tank can be cleaned within 1.5 hours or even 1 hour, and the cleaning efficiency is high.

[0023] In summary, the present invention includes at least one of the following beneficial technical effects: 1. The present application provides a tank cleaning agent. In the tank cleaning agent, oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether are mixed in a certain proportion, which can give full play to their respective advantages, improve the dissolution ability of the cleaning agent for grease and some insoluble substances, thereby improving the cleaning efficiency, enabling the cleaning agent to better penetrate between the dirt and the surface to be cleaned, and improving the cleaning effect. In addition, by adding colloid and sodium alginate, the fluidity and viscosity of the cleaning agent are controlled at a reasonable level, the microscopic retention speed of the cleaning agent is controlled, and the cleaning efficiency is improved. The tank cleaning agent can clean the developing tank, the running roller, and the spray nozzles of the developing tank within 1.5 hours or even 1 hour, and the cleaning efficiency is high.

[0024] 2. The present application also provides a preparation method of the above-mentioned tank cleaning agent, and its preparation method is simple and easy to industrialize.

[0025] 3. The present application also provides an application of the above-mentioned tank cleaning agent in cleaning the developing tank, the running roller, and the spray nozzles of the developing tank.

[0026] 4. The present application also provides a method for cleaning the developing tank, the running roller, and the spray nozzles of the developing tank with the above-mentioned tank cleaning agent. At room temperature, the developing tank, the running roller, and the spray nozzles of the developing tank can be cleaned, and the running roller and the spray nozzles of the developing tank do not need to be disassembled for cleaning. Detailed Embodiments

[0027] The present invention will be further described below in conjunction with specific embodiments. However, the following embodiments are only used to illustrate the present invention and should not be construed as limiting the scope of the present invention. For those conditions not specified in the following embodiments, they are carried out according to conventional conditions or the conditions recommended by the manufacturer. The methods used, unless otherwise specified, are all conventional methods well-known in the art. The consumables and reagents used, unless otherwise specified, are all commercially available. Unless otherwise stated, the professional and scientific terms used herein have the same meaning as those familiar to skilled personnel in the art. In addition, any method or material similar or equivalent to the described content can also be applied to the present invention. Cocamidopropyl dimethyl tertiary amine: CAS: 68140-01-2, purchased from Wuhan Jiyesheng Chemical Co., Ltd. Xanthan gum was purchased from Jiangsu Weizhirun Biotechnology Co., Ltd. Konjac gum was purchased from Shandong Fengtai Biotechnology Co., Ltd. Oleamide propyl dimethylamine: CAS: 109-28-4, purchased from Zouping Mingxing Chemical Co., Ltd. Octylphenol polyoxyethylene ether was purchased from Octylphenol polyoxyethylene ether OP-10 of Zibo Haijie Chemical Co., Ltd. Specific Embodiments

[0028] Example 1 Example 1 provides a tank cleaning agent, and the component composition is as follows: 1.5 kg of citric acid, 0.5 kg of aminosulfonic acid, 0.5 kg of disodium ethylenediaminetetraacetate, 0.1 kg of sodium alginate, 0.1 kg of xanthan gum, 80 kg of water, and 1.5 kg of additive.

[0029] Among them, the additive is composed of oleamide propyl dimethylamine, cocamidopropyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether in a mass ratio of 1:2:1.

[0030] The preparation method of the tank cleaning agent includes the following steps: Step 1): Add sodium alginate and xanthan gum to water, first stir at a low speed of 500 r / min for 15 min, and then stir at a high speed of 2000 r / min for 20 min.

[0031] Step 2): Add the remaining raw materials and stir evenly to obtain the tank cleaning agent.

[0032] Example 2 The difference between Example 2 and Example 1 is that in the additive, oleamide propyl dimethylamine, cocamidopropyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether are in a mass ratio of 1:3:0.5.

[0033] Example 3 The difference between Example 3 and Example 1 is that in the additive, oleamide propyl dimethylamine, cocamidopropyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether are in a mass ratio of 1:1.5:1.5.

[0034] Example 4 Example 4 is different from Example 1 in that the amount of the additive is 1 kg.

[0035] Example 5 Example 5 is different from Example 1 in that the amount of the additive is 2 kg.

[0036] Example 6 Example 6 is different from Example 1 in that xanthan gum is replaced by konjac gum.

[0037] Example 7 Example 7 is different from Example 1 in that the dosages of the raw materials are different. In Example 7, the component composition of the tank cleaning agent is as follows: 2.5 kg of citric acid, 0.3 kg of aminosulfonic acid, 1 kg of disodium ethylenediaminetetraacetate, 0.1 kg of sodium alginate, 0.1 kg of xanthan gum, 75 kg of water, and 1.5 kg of additive.

[0038] Example 8 Example 8 is different from Example 1 in that the dosages of the raw materials are different. In Example 8, the component composition of the tank cleaning agent is as follows: 1 kg of citric acid, 0.8 kg of aminosulfonic acid, 0.4 kg of disodium ethylenediaminetetraacetate, 0.1 kg of sodium alginate, 0.1 kg of xanthan gum, 85 kg of water, and 1.5 kg of additive.

[0039] Example 9 Example 9 is different from Example 1 in that the dosage of sodium alginate is different. In Example 9, the amount of sodium alginate is 0.15 kg.

[0040] Example 10 Example 10 is different from Example 1 in that the dosage of xanthan gum is different. In Example 10, the amount of xanthan gum is 0.18 kg.

[0041] Example 11 Example 11 is different from Example 1 in that in the preparation method of the tank cleaning agent, step 1) only includes low-speed stirring, that is, step 1): Add sodium alginate and xanthan gum to water and stir at a low speed of 500 r / min for 35 min.

[0042] Example 12 Example 12 is different from Example 1 in that the preparation method of the tank cleaning agent is different. In Example 12, the preparation method of the tank cleaning agent includes mixing all the raw materials, first stirring at a low speed of 500 r / min for 15 min, and then stirring at a high speed of 2000 r / min for 20 min, and stirring evenly to obtain the tank cleaning agent.

[0043] Comparative Example 1 Comparative Example 1 is different from Example 1 in that sodium alginate is not added.

[0044] Comparative Example 2 The difference between Comparative Example 2 and Example 1 is that xanthan gum is not added.

[0045] Comparative Example 3 The difference between Comparative Example 3 and Example 1 is that the additive is oleamide propyl dimethylamine.

[0046] Comparative Example 4 The difference between Comparative Example 4 and Example 1 is that the additive is coconut oil amide propyl dimethyl tertiary amine.

[0047] Comparative Example 5 The difference between Comparative Example 5 and Example 1 is that the additive is octylphenol polyoxyethylene ether.

[0048] Effect detection: The cleaning agents prepared in Examples 10 - 12 and Comparative Examples 1 - 5 were respectively used to clean a developing tank with the same cleanliness.

[0049] Drain the developing tank liquid, and circulate with tap water for 10 min. Add the cleaning agents prepared in Examples 10 - 12 and Comparative Examples 1 - 5 respectively. Start the spray pump, and the spray pressure is 1 kg / cm 2 , and record the time when the developing tank and the roller are clean and free of dirt. The results are shown in Table 1.

[0050] Table 1 The cleaning agents prepared in Examples 10 - 12 and Comparative Examples 1 - 5 were respectively used to clean a developing tank with the same cleanliness.

[0051] Drain the developing tank liquid, and circulate with tap water for 10 min. Add the cleaning agents prepared in Examples 10 - 12 and Comparative Examples 1 - 5 respectively. Start the spray pump, and the spray pressure is 1 kg / cm 2 , and perform cyclic spray cleaning for 1.5 hours. After the cyclic spray cleaning is completed, drain the cleaning liquid. Circulate and clean with tap water for 1.5 hours, and then drain the cleaning water. Then inject the developing solution for continuous recycling. After cleaning, the quality performance of the spray nozzles in the developing tank is shown in Table 2.

[0052] Table 2 Combined with the data and results of Example 1, Comparative Example 1, Table 1, and Table 2, it can be seen that when sodium alginate is not added to the cleaning agent, the time required to clean the developing tank and the roller until they are clean and free of dirt is prolonged. After performing cyclic spray cleaning with the cleaning agent for 1.5 hours, the nozzles are not unobstructed.

[0053] Combined with Example 1, Comparative Example 2, and the data and results in Table 1 and Table 2, it can be seen that when xanthan gum is not added to the cleaning agent, the time required to clean the developing tank and the roller of the row roller until they are clean and free of dirt is prolonged. When the cleaning agent is used for circulating spray cleaning for 1.5 hours, the nozzle is not unobstructed.

[0054] Combined with Example 1, Comparative Examples 3-5, and the data and results in Table 1 and Table 2, it can be seen that when oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether are used separately as additives in the cleaning agent, the time required to clean the developing tank and the roller of the row roller until they are clean and free of dirt is prolonged. When the cleaning agent is used for circulating spray cleaning for 1.5 hours, the nozzle is not unobstructed.

[0055] Combined with Examples 1-3 and the data in Table 1, it can be seen that the mass ratio of oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether in the additives of the cleaning agent affects the cleaning efficiency of the developing tank and the roller of the row roller.

[0056] Combined with Example 1, Examples 4 and 5, and the data in Table 1, it can be seen that the dosage of the additives in the cleaning agent affects the cleaning efficiency of the developing tank and the roller of the row roller.

[0057] Combined with Example 1, Example 6, and the data in Table 1, it can be seen that the type of colloid in the cleaning agent affects the cleaning efficiency of the developing tank and the roller of the row roller.

[0058] Combined with Example 1, Examples 7 and 8, and the data in Table 1, it can be seen that when the amount of raw materials is within a certain range, the type of colloid in the cleaning agent has little effect on the change in the cleaning efficiency of the developing tank and the roller of the row roller.

[0059] Combined with Example 1, Examples 9 and 10, and the data in Table 1, it can be seen that the dosage of sodium alginate and the mass ratio of the colloid to sodium alginate affect the cleaning efficiency of the developing tank and the roller of the row roller.

[0060] Combined with Example 1, Example 11, and the data in Table 1, it can be seen that when the stirring process does not include high-speed stirring, the cleaning efficiency of the developing tank and the roller of the row roller is reduced.

[0061] Combined with Example 1, Example 12, and the data in Table 1, it can be seen that when sodium alginate and xanthan gum are added first and then stirred, and then other raw materials are added, it is beneficial to improve the cleaning efficiency of the developing tank and the roller of the row roller.

[0062] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A groove cleaning agent, characterized in that, It comprises the following raw materials in parts by weight: 1 - 2.5 parts by weight of citric acid, 0.3 - 0.8 parts by weight of sulfamic acid, 0.4 - 1 part by weight of sodium ethylenediaminetetraacetate, 0.1 - 0.15 parts by weight of sodium alginate, 0.1 - 0.18 parts by weight of colloid, 75 - 85 parts by weight of water, and 1 - 2 parts by weight of additive, wherein the additive comprises oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether.

2. The groove cleaning agent according to claim 1, wherein In the additive, the mass ratio of oleamide propyl dimethylamine, coconut oil amide propyl dimethyl tertiary amine, and octylphenol polyoxyethylene ether is 1:(1.5 - 3):(0.5 - 1.5).

3. The groove cleaning agent according to claim 1, characterized in that, The colloid comprises at least one of xanthan gum and konjac gum.

4. The slot cleaning agent according to claim 1, characterized in that The mass ratio of the colloid to the sodium alginate is (0.66 - 1.8):

1.

5. The groove cleaning agent according to claim 1, characterized in that The sodium ethylenediaminetetraacetate is selected from at least one of disodium ethylenediaminetetraacetate and tetrasodium ethylenediaminetetraacetate.

6. A method for preparing the slot cleaning agent according to any one of claims 1 to 5, characterized in that: It comprises: Mix the raw materials and stir to obtain the cleaning agent.

7. The preparation method of the groove cleaning agent according to claim 6, wherein, The stirring includes first stirring at a speed of 400 - 600 r / min for 10 - 20 min, and then stirring at a speed of 1800 - 2200 r / min for 15 - 25 min.

8. The method for preparing the slot cleaning agent according to claim 6, wherein: The preparation method of the described tank cleaning agent comprises: Step 1): Add sodium alginate and xanthan gum into water, stir at a speed of 400 - 600 r / min for 10 - 20 min, and then stir at a speed of 1800 - 2200 r / min for 15 - 25 min; Step 2): Add the remaining raw materials and stir evenly to obtain the cleaning agent.

9. The application of the tank cleaning agent according to any one of claims 1 - 5 in cleaning a developing tank, a running roller, and a spray nozzle of a developing tank.

10. A method for cleaning a developing tank, a roller, and a spray nozzle of a developing tank with the cleaning agent according to any one of claims 1-5, characterized in that, It comprises: Discharge the developing tank liquid, circulate water for 8 - 15 min, add the tank cleaning agent according to any one of claims 1 - 5, start the spray pump, perform circulating spray cleaning, after completion, discharge the tank cleaning liquid, circulate water for cleaning, drain the cleaning water, and then inject the developing solution for recycling.

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