Macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform

Abstract

The invention discloses a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform, and relates to the technical field of precision motion platforms, the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform mainly comprises a driven platform, a base platform, a plurality of telescopic devices and a plurality of piezoelectric actuators, the telescopic devices and the piezoelectric actuators are arranged on the base platform, and the telescopic devices are distributed in the circumferential direction; the output end of each telescopic device is connected with a piezoelectric actuator, the multiple telescopic devices comprise the multiple first telescopic devices and the multiple second telescopic devices, the first telescopic devices are vertically arranged, the second telescopic devices are horizontally arranged, and the output ends of the piezoelectric actuators are connected to the driven platform through flexible branch chain structures. According to the invention, the driven platform can move in a large range, and the precision of motion adjustment is high.

Description

Technical Field

[0001] The present invention relates to the technical field of precision motion platforms, and in particular to a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform. Background Art

[0002] Six-degree-of-freedom precision motion mechanisms are widely used in chip manufacturing, precision optics, biomedicine and other fields. For example, when a scanning confocal microscope needs to perform high-resolution imaging of subcellular structures within cells or tiny biological samples, the motion platform can move the objective lens with micro-nanometer precision in the X and Y axis directions to improve the contrast and resolution of the imaging. In the extreme ultraviolet lithography (EUV) technology in the chip manufacturing field, the motion platform can move the mask and wafer with nanometer-level precision in the X and Y axis directions to ensure that every detail of the photolithography pattern can be accurately transferred from the mask to the wafer. At the same time, the distance between the two can be precisely controlled in the Z-axis direction to ensure that the focal depth of the lithography is in the optimal state. In the three angular directions of pitch, roll and yaw, the platform can control the alignment error of the mask and wafer to a very small range.

[0003] Piezoelectric ceramic actuators use the inverse piezoelectric effect to generate displacement, which can achieve high-precision displacement output at the nanometer level. They have a fast response speed and can reach the set displacement or force output in a short time. They can quickly adjust the platform posture and position to improve positioning efficiency. There is no mechanical friction and wear during the actuation process, which avoids problems such as energy loss, component wear, and decreased accuracy caused by friction. However, piezoelectric ceramic actuators also have some problems: the displacement stroke is limited. The displacement stroke of a single piezoelectric ceramic actuator is usually small, generally in the micron to millimeter level. For six-degree-of-freedom motion platforms that require a larger stroke. The output force is relatively small; the output force it generates is limited, and under heavy loads, it may not meet the driving force requirements of the motion platform. Therefore, there is an urgent need for a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform to solve the above technical problems. Summary of the Invention

[0004] The purpose of the present invention is to provide a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform to solve the problems existing in the above-mentioned prior art, which can realize the movement of the driven platform in a larger range and the accuracy of motion regulation is higher.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform, comprising a driven platform, a base platform, a plurality of telescopic devices and a plurality of piezoelectric actuators arranged on the base platform, wherein the plurality of telescopic devices are circumferentially distributed, and the output end of each of the telescopic devices is connected to a piezoelectric actuator, and the plurality of telescopic devices include a plurality of first telescopic devices and a plurality of second telescopic devices, wherein the first telescopic devices are arranged vertically and the second telescopic devices are arranged horizontally, and the output ends of the piezoelectric actuators are connected to the driven platform through a flexible branch chain structure.

[0007] In some embodiments, the device further comprises a bracket and a stabilizing platform disposed on the base platform, wherein the bracket comprises a fixedly connected vertical plate and a first flexible horizontal plate, the vertical plate is disposed parallel to the first telescopic device, an output end of the first telescopic device is fixedly connected to an end of the first flexible horizontal plate away from the vertical plate, the piezoelectric actuator is further disposed at an end of the first flexible horizontal plate away from the vertical plate, and the piezoelectric actuator is connected to the flexible branch chain structure;

[0008] The stabilizing platform is vertically and fixedly connected to the base platform, and the second telescopic device is fixedly arranged on the stabilizing platform.

[0009] In some embodiments, the flexible branch chain structure includes a first flexible component and a second flexible component, the first flexible component is used to connect to the first telescopic device, and the second flexible component is used to connect to the second telescopic device, wherein the first flexible component includes a flexible vertical plate, and the end of the flexible vertical plate away from the first flexible horizontal plate is connected to the driven platform; the second flexible component includes a horizontal blade and a vertical blade, the horizontal blade is parallel to the base platform and connected to the output end of the second telescopic device, the vertical blade is perpendicular and fixedly connected to the horizontal blade, and the end of the vertical blade away from the horizontal blade is connected to the driven platform, and the length direction of the vertical blade is consistent with the movement direction of the output end of the second telescopic device.

[0010] In some embodiments, the first flexible component further includes a flexible frame having side panels connected to the flexible vertical panels and the driven platform, and a height direction of the side panels is consistent with a height direction of the vertical panels.

[0011] In some embodiments, the bracket also includes a second flexible transverse plate, which is arranged parallel to the first flexible transverse plate, the piezoelectric actuator is arranged between the first flexible transverse plate and the second flexible transverse plate, and the second flexible transverse plate is used to connect to the flexible branch structure.

[0012] In some embodiments, a first clamping block is fixedly provided at one end of the first flexible transverse plate away from the vertical plate, and a second clamping block is fixedly provided at one end of the second flexible transverse plate away from the vertical plate. The first clamping block and the second clamping block are arranged opposite to each other, and both the first clamping block and the second clamping block are provided with grooves, and the piezoelectric actuator is clamped in the grooves.

[0013] In some embodiments, the telescopic device is a voice coil motor.

[0014] In some embodiments, three of the first telescopic devices and three of the second telescopic devices are provided, and the angle between any two adjacent first telescopic devices and the angle between any two adjacent second telescopic devices are both 120°.

[0015] In some embodiments, the driven platform is fan-blade-shaped and includes three fan-blade-shaped surfaces and three notches, each of the fan-blade-shaped surfaces is opposite to a notch, the side panels are connected to the notches, and the end of the vertical blade away from the horizontal blade is connected to the center of the fan-blade-shaped surface.

[0016] In some embodiments, the flexible frame is a square frame, and the length, width and height of the side panels on each side are the same.

[0017] Compared with the prior art, the present invention has achieved the following technical effects:

[0018] The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform provided by the present invention has a structure in which, when the position of the driven platform needs to be adjusted, the telescopic device first performs a large-scale rough adjustment, and then performs a precise adjustment via a piezoelectric actuator, thereby enabling a large range of movement of the driven platform with high adjustment accuracy. Furthermore, the first telescopic device is arranged vertically, the second telescopic device is arranged horizontally, and the piezoelectric actuator is connected to the driven platform via a flexible branch chain structure, thereby enabling a flexible connection between the first and second telescopic devices and the driven platform. The first telescopic device can drive the vertical movement of the driven platform, while the second telescopic device can drive the horizontal movement of the driven platform. Furthermore, since multiple first and second telescopic devices are provided, the driven platform can be tilted by setting different degrees of movement of the first telescopic device. The different degrees of movement of the first device can achieve different displacements of the driven platform in the horizontal plane. By combining the first and second telescopic devices, the driven platform can be deflected in three dimensions, enabling six-degree-of-freedom adjustment. Through the combined control of the vertically arranged first telescopic device and the horizontally arranged second telescopic device, the driven platform can achieve translation along the X / Y / Z axes (three-dimensional position adjustment) and rotation around the X / Y / Z axes (pitch, roll, yaw), meeting the needs of complex spatial posture debugging without relying on the complex mechanical structure of the traditional parallel mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 A three-dimensional structural diagram of a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0021] Figure 2 A top view of a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0022] Figure 3 A side view of a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0023] Figure 4 Schematic diagram of the horizontal composite motion of the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0024] Figure 5 Schematic diagram of a single horizontal actuation of a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0025] Figure 6 Schematic diagram of a single vertical actuation of a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0026] Figure 7 Schematic diagram of the structure of the second flexible component of the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0027] Figure 8 Schematic diagram of the structure of the first flexible component of the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0028] Figure 9 Schematic diagram of the overall composite actuator arrangement of the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform in some embodiments of the present invention;

[0029] Figure 10 Schematic diagram of the principle of Z-axis precision motion in some embodiments of the present invention.

[0030] In the figure: 1-driven platform; 2-base platform; 21-base square platform; 22-stabilizing platform; 3-first telescopic device; 4-second telescopic device; 41-stator; 42-mover; 5-piezoelectric actuator; 6-second flexible horizontal plate; 7-second flexible component; 71-horizontal blade; 72-vertical blade; 8-bracket; 9-first flexible component; 91-flexible vertical plate; 92-flexible frame; 9201-side panel; 10-first flexible horizontal plate; 11-first clamping block; 12-second clamping block; 911-voice coil piezoelectric composite actuator one; 912-voice coil piezoelectric composite actuator two; 913-voice coil piezoelectric composite actuator three; 921-voice coil piezoelectric composite actuator four; 922-voice coil piezoelectric composite actuator five; 923-voice coil piezoelectric composite actuator six. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] The purpose of the present invention is to provide a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform to solve the problems existing in the prior art, which can realize the movement of the driven platform in a larger range and the accuracy of motion regulation is higher.

[0033] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0034] like Figures 1-10 As shown, the present invention provides a macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform, comprising a driven platform 1, a base platform 2, a plurality of telescopic devices and a plurality of piezoelectric actuators 5 arranged on the base platform 2. The plurality of telescopic devices are circumferentially distributed, and the output end of each telescopic device is connected to a piezoelectric actuator 5. The plurality of telescopic devices include a plurality of first telescopic devices 3 and a plurality of second telescopic devices 4. The first telescopic devices 3 are arranged vertically, and the second telescopic devices 4 are arranged horizontally. The output ends of the piezoelectric actuators 5 are all connected to the driven platform 1 through a flexible branch chain structure. When the driven platform 1 needs to be adjusted in position, the telescopic device first performs a large-scale rough adjustment, and then performs precise adjustment through the piezoelectric actuator 5, which can achieve a large range of movement of the driven platform 1 with high adjustment accuracy. Furthermore, the first telescopic device 3 is arranged vertically, the second telescopic device 4 is arranged horizontally, and the piezoelectric actuator 5 is connected to the driven platform 1 via a flexible branched chain structure, thus achieving a flexible connection between the first and second telescopic devices 3, 4 and the driven platform 1. The first telescopic device 3 can drive the vertical movement of the driven platform 1, while the second telescopic device 4 can drive the horizontal movement of the driven platform 1. Furthermore, since multiple first and second telescopic devices 3, 4 are provided, the driven platform 1 can be tilted by setting different degrees of motion of the first telescopic device 3. The different degrees of motion of the first device can achieve different displacements of the driven platform 1 in the horizontal plane. By combining the first and second telescopic devices 3, 4, the driven platform 1 can be deflected in three dimensions, enabling six degrees of freedom debugging. Through the combined control of the vertically arranged first telescopic device 3 and the horizontally arranged second telescopic device 4, the driven platform 1 can achieve translation along the X, Y, and Z axes (three-dimensional position adjustment) and rotation around the X, Y, and Z axes (pitch, roll, and yaw), meeting the requirements of complex spatial posture debugging without relying on the complex mechanical structure of traditional parallel mechanisms.

[0035] In some embodiments, the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform further includes a bracket 8 and a stabilizing platform 22 provided on the base platform 2, the bracket 8 includes a fixedly connected vertical plate and a first flexible horizontal plate 10, the vertical plate is arranged parallel to the first telescopic device 3, the output end of the first telescopic device 3 is fixedly connected to the end of the first flexible horizontal plate 10 away from the vertical plate, the end of the first flexible horizontal plate 10 away from the vertical plate is further provided with a piezoelectric actuator 5, and the piezoelectric actuator 5 is connected to the flexible branch chain structure;

[0036] The stabilizing platform 22 is vertically and fixedly connected to the base platform 2, and the second telescopic device 4 is fixedly arranged on the stabilizing platform 22. The vertical plate and the first telescopic device 3 (vertically arranged) are fixed in parallel to the base platform 2 to form a "double support column" structure, which can effectively share the vertical load of the driven platform 1 and reduce the risk of bending deformation of a single telescopic device. It is especially suitable for carrying heavier driven platforms 1 or loads. The horizontal plate adopts a flexible material or structure (such as an elastic hinge), which can buffer the impact vibration of the first telescopic device 3 during movement while transmitting the driving force, avoiding stress concentration caused by rigid connection, and is especially suitable for high-frequency start-stop or speed-changing movement scenarios. The stabilizing platform 22 serves as the installation base of the second telescopic device 4 (horizontally arranged). It provides an independent and stable support foundation for horizontal movement through a rigid connection perpendicular to the base platform 2. Compared to directly mounting the horizontal device on the surface of the base, the stabilization platform 22 can reduce vibration coupling in the base plane: the reaction force of the horizontal device's movement is transmitted to the base through the stabilization platform 22, avoiding interference with the movement of adjacent devices (such as the vertical telescopic device) due to local deformation of the base. It can also improve the linearity of the horizontal movement: the vertical support structure of the stabilization platform 22 can limit the vertical shaking of the second telescopic device 4, ensuring that its output displacement is strictly along the horizontal direction (such as the X / Y axis), avoiding the error of "horizontal movement accompanied by ups and downs". The combination of the bracket 8 (rigid vertical plate + flexible horizontal plate) and the stabilization platform 22 (rigid frame) physically isolates the movement paths of the vertical direction (first telescopic device 3) and the horizontal direction (second telescopic device 4), reducing mutual interference between the two directions of movement (such as pulling on the vertical device during horizontal movement), and facilitating the independent control of six degrees of freedom.

[0037] In some embodiments, the flexible branched chain structure includes a first flexible component 9 and a second flexible component 7. The first flexible component 9 is configured to connect to the first telescopic device 3, and the second flexible component 7 is configured to connect to the second telescopic device 4. The first flexible component 9 includes a flexible vertical plate 91, the end of which, remote from the first flexible horizontal plate 10, is connected to the driven platform 1. The second flexible component 7 includes a horizontal blade 71 and a vertical blade 72. The horizontal blade 71 is parallel to the base platform 2 and connected to the output end of the second telescopic device 4. The vertical blade 72 is perpendicular to and fixedly connected to the horizontal blade 71. The end of the vertical blade 72, remote from the horizontal blade 71, is connected to the driven platform 1, and the length of the vertical blade 72 is aligned with the direction of motion of the output end of the second telescopic device 4. The flexible vertical plate 91 maintains relative rigidity in the vertical direction (the direction of motion of the first telescopic device 3), suppressing undesirable lateral deviation and ensuring linearity of vertical motion. It can achieve vertical displacement of the driven platform 1 in response to the lifting and lowering motion of the first telescopic device 3. It also has elastic deformation capability in the horizontal direction (X / Y axis), which can reduce the impact on the operation of the corresponding actuator of the bending member. The elastic properties of the flexible vertical plate 91 can absorb the inertial impact of the second telescopic device 4 when it starts and stops (such as vibration caused by rapid lifting), and avoid the impact force being directly transmitted to the driven platform 1. It is particularly suitable for load-sensitive scenarios (such as leveling precision optical components). When the lifting heights of multiple first telescopic devices 3 are inconsistent (such as platform tilt), the flexible vertical plate 91 can adapt to the posture changes of the driven platform 1 through varying degrees of bending deformation, avoiding the movement jamming caused by excessive angle deviation of traditional rigid hinges, and improving the fault tolerance of the system. The horizontal blade 71 is used to transmit the force of the second telescopic device 4 and the piezoelectric actuator 5 to the vertical blade 72, and the length direction of the vertical blade 72 is consistent with the movement direction of the output end of the second telescopic device 4, that is, the length direction of the vertical blade 72 is along the direction of force, rather than the thickness direction. This allows the force to be effectively transmitted to the driven platform 1 through the vertical blade 72, rather than the vertical blade 72 directly bending and causing force loss. The first flexible component 9 (flexible vertical plate 91) focuses on the control of Z-axis translation and rotation around the X / Y axis, and is used in conjunction with the first flexible horizontal plate 10. The second flexible component 7 (horizontal blade 71 + vertical blade 72) focuses on the control of X / Y-axis translation and rotation around the Z axis. The two achieve decoupling of six-degree-of-freedom motion through physical structural design, reducing the complexity of the control system (no complex algorithm is required to compensate for coupling errors). The elastic deformation of the flexible vertical plate 91 and the horizontal blade 71 can absorb vibration energy in different directions: vertical vibration (such as environmental vibration) is attenuated by the elastic buffer of the horizontal blade 71; horizontal vibration (such as the start-stop impact of the second telescopic device 4) is absorbed by the flexible deformation of the flexible vertical plate 91, preventing vibration from being transmitted to the driven platform 1, and improving the accuracy and stability of the system in a dynamic environment.

[0038] In some embodiments, the first flexible assembly 9 further includes a flexible frame 92 having side panels 9201 connected to the flexible risers 91 and the driven platform 1, with the height of the side panels 9201 aligned with that of the risers. The side panels 9201 are aligned with the height of the risers (i.e., vertically), forming a rigid constraint in the horizontal plane (X / Y axis direction) to limit excessive lateral bending or twisting of the flexible risers 91. While ensuring that the first telescopic device 3 can transmit a large output force in the vertical direction, the flexible risers 91 can also deform laterally when the second telescopic device 4 is activated, minimizing the impact of the driven platform 1's movement on the corresponding actuators (first telescopic device, second telescopic device, etc.) of the bending member. When the first telescopic device 3 drives the driven platform 1 up or down, the flexible frame 92 effectively suppresses horizontal "swing" or "drift," ensuring that displacement is transmitted strictly along the Z axis. A single vertical plate is prone to bending when subjected to lateral forces (such as torque caused by load eccentricity), while the flexible frame 92 disperses the lateral forces to multiple side plates 9201 through a closed structure, greatly improving the lateral stiffness (theoretically, the lateral stiffness of the closed frame structure is 2-3 times higher than that of a single vertical plate). The closed structure of the flexible frame 92 changes the vibration mode of the system, increases the natural frequency in the horizontal direction, keeps it away from the operating frequency of the equipment (such as the start and stop frequency of the first telescopic device 3), and reduces the risk of resonance. Especially during rapid lifting, the "nodding" phenomenon caused by lateral resonance can be avoided, thereby improving dynamic stability. The side plates 9201 of the flexible frame 92 are connected to the flexible vertical plates 91 and the driven platform 1 at multiple points to disperse the concentrated load to a larger stress area. For example, when the driven platform 1 generates local stress due to uneven load, the side plates 9201 can transfer the stress to the entire flexible frame 92 structure, avoiding stress concentration at the root or connection point of the flexible vertical plate 91, thereby extending the fatigue life of the structure. The height direction of the side panel 9201 is consistent with that of the vertical panel, further ensuring that the output capacity of the flexible frame 92 in the Z-axis direction will not be restricted, thereby realizing the decoupling characteristics of "horizontal flexibility + vertical rigidity".

[0039] As a preferred embodiment, the driven platform 1 is in the shape of a fan blade and includes three fan blade-shaped tables and three notches. Each fan blade-shaped table is provided with a notch, the side plate 9201 is connected to the notch, and the end of the vertical blade 72 away from the horizontal blade 71 is connected to the center of the fan blade-shaped table. The height direction of the side plate 9201 is consistent with the thickness direction of the driven platform 1. Specifically, the height of the side plate 9201 can be set to be greater than the thickness of the driven platform 1. The overall thickness of the driven platform 1 is thinner, the total weight is lighter, and it is more convenient to move. The symmetry axis of the fan blade-shaped table is aligned with the axis of the corresponding telescopic device (such as the center line of the fan blade is facing the vertical device), so that the lifting force of the vertical device is transmitted along the symmetry axis of the fan blade, which is directly converted into the vertical displacement of the platform or tilting around the axis, reducing coupled motion. For example, when a single vertical device is lifted or lowered, the platform only tilts around the axis perpendicular to the symmetry axis of the fan blade, and does not produce rotation in other directions, simplifying the control algorithm. When the platform tilts, the flexible branch connection point at the notch can move along the tangential direction, and the geometric shape of the notch is used to provide a larger deformation space for the flexible vertical plate 91, avoiding excessive stretching or compression of the flexible structure caused by the fixed edge curvature of the traditional circular platform.

[0040] In some embodiments, the flexible frame 92 is a square frame, with the side panels 9201 on each side having the same length, width, and height. The flexible frame 92 is integrally formed with the flexible risers 91. The four side panels 9201 of the square frame have the same length, width, and height, ensuring consistent bending stiffness in the horizontal plane (X / Y axis directions). When the driven platform 1 is subjected to eccentric loads or tilts, the square frame evenly distributes stress, preventing platform deviation caused by differences in the stiffness of the side panels 9201.

[0041] In some embodiments, the bracket 8 also includes a second flexible transverse plate 6, which is arranged parallel to the first flexible transverse plate 10. The piezoelectric actuator 5 is arranged between the first flexible transverse plate 10 and the second flexible transverse plate 6, and the second flexible transverse plate 6 is used to connect to the flexible branch chain structure. The piezoelectric actuator 5 is fixed between the first flexible transverse plate 10 and the second flexible transverse plate 6 to form a flexible clamping structure in the vertical direction. The parallel arrangement of the two plates can limit the displacement or tilt of the actuator in the horizontal direction (X / Y axis), avoid axis deviation caused by installation errors or external interference, and ensure that its output displacement is strictly transmitted to the flexible branch chain in the vertical direction. The double-plate structure can absorb the vibration energy transmitted by the base platform 2 or the first telescopic device 3: when the first telescopic device 3 is rapidly raised and lowered to generate vibration, the first flexible transverse plate 10 and the second flexible transverse plate 6 buffer the vibration through elastic deformation, reducing the impact of the vibration on the piezoelectric ceramics inside the actuator and extending its service life (piezoelectric ceramics are sensitive to mechanical vibrations and are prone to cracking due to resonance).

[0042] For external environmental vibrations (such as ground vibrations during equipment operation), the flexible connection of the dual plates blocks the transmission of vibrations to the actuator, ensuring the stability of micro-displacement control. Flexible cross plates are connected to each end of the actuator, forming a "two-end elastic support" model. Compared to a cantilever beam structure with a single end fixed, its bending stiffness is significantly improved. For example, under the same load, the deflection of a dual-support actuator is only 1 / 4 of that of a single-support actuator, which can more accurately convert micro-displacements into actual motion of the driven platform 1 and reduce "lost travel" errors.

[0043] It should be noted that the output end of the horizontally arranged second telescopic device 4 is also connected to the first flexible horizontal plate 10 and the second flexible horizontal plate 6. The first flexible horizontal plate 10 is fixedly connected to the output end of the second telescopic device 4. The second flexible horizontal plate 6 and the end of the first flexible horizontal plate 10 away from the second telescopic device 4 are fixedly connected through the base square platform 21. The base square platform 21 is fixedly connected to the base platform 2. The piezoelectric actuator 5 is arranged between the first flexible horizontal plate 10 and the second flexible horizontal plate 6, and is arranged close to the output end of the second telescopic device 4.

[0044] In some embodiments, a first clamping block 11 is fixedly mounted on the end of the first flexible transverse plate 10 away from the vertical plate, and a second clamping block 12 is fixedly mounted on the end of the second flexible transverse plate 6 away from the vertical plate. The first and second clamping blocks 11 and 12 are positioned opposite each other and each includes a groove into which the piezoelectric actuator 5 is retained. The grooves of the first and second clamping blocks 11 and 12 form a high-precision positioning interface, which allows the piezoelectric actuator 5 to be constrained both axially and radially through the engagement of the grooves. The dimensional accuracy of the grooves can be controlled to within ±0.01 mm, ensuring strict alignment of the actuator axis with the direction of motion of the driven platform 1 (e.g., vertically), preventing lateral forces or bending moments caused by installation deviations and improving displacement transmission efficiency. The restraining structure of the grooves effectively suppresses lateral shaking or twisting of the actuator during operation. For example, when the piezoelectric actuator 5 outputs high-frequency micro-displacement, the clamping effect of the grooves can concentrate the actuator's deformation energy in the axial direction, reducing energy dissipation in undesired directions.

[0045] In some embodiments, the telescopic device is a voice coil motor. Specifically, the stator 41 of the voice coil motor is fixedly mounted on the base platform 2, and the mover 42 is fixedly connected to the flexible branch chain structure. The voice coil motor is directly driven based on the Lorentz force principle, without mechanical transmission components (such as screws and gears). The mover 42 has extremely low inertia (usually <100g), and can achieve millisecond acceleration response (typical value 0.1-1ms). Compared with the traditional servo motor + transmission mechanism (response time 5-10ms), the voice coil motor is more suitable for high-frequency reciprocating motion or fast start-stop scenarios. The direct drive characteristics of the voice coil motor eliminate the gap (such as the screw) and elastic deformation of the traditional transmission mechanism, and can achieve sub-micron positioning accuracy (typical value ±0.1-1μm) in conjunction with high-precision displacement sensors (such as grating scales and laser interferometers). This feature makes it particularly suitable for applications that require nanometer-level resolution, such as semiconductor wafer inspection and biological microscope focusing. Piezoelectric actuator 5 can achieve nanometer-level precision adjustment.

[0046] In some embodiments, three first telescopic devices 3 and three second telescopic devices 4 are provided, and the angle between any two adjacent first telescopic devices 3 and the angle between any two adjacent second telescopic devices 4 is 120°. The three vertical devices (first telescopic devices 3) are evenly spaced at 120°, forming an equilateral triangle support structure. This structure evenly distributes the gravity and load of the driven platform 1 to three support points, avoiding single-point overload or localized stress concentration. For example, when the driven platform 1 carries an eccentric load, the three-device structure can maintain platform balance through force compensation between the devices. The circumferentially evenly spaced three-device structure mathematically satisfies static redundancy, and linear algebra methods can be used to decouple the six degrees of freedom (X / Y / Z translation + rotation around three axes) into independent device extensions. For example, vertical lifting and lowering are controlled by the synchronous extension and retraction of the three devices; tilting around the X / Y axes is achieved by differential control of two devices raising and one device lowering; and horizontal translation and rotation around the Z axis are achieved through the coordinated motion of the three horizontal devices.

[0047] like Figure 9 As shown, the structures of the three horizontally placed voice coil motors and the piezoelectric actuator 5 are marked as voice coil piezoelectric composite actuator one 911, voice coil piezoelectric composite actuator two 912, and voice coil piezoelectric composite actuator three 913; the structures of the three vertically placed voice coil motors and the piezoelectric actuator 5 are marked as voice coil piezoelectric composite actuator four 921, voice coil piezoelectric composite actuator five 922, and voice coil piezoelectric composite actuator six 923.

[0048] When voice coil piezoelectric composite actuator 1 911 generates an output displacement along its axis, the other five actuators remain fixed, driving horizontal blade 71 to deform along the aforementioned axis and causing vertical blade 72 to move. Vertical blade 72 is screwed to a corresponding threaded hole on the bottom of driven platform 1. Furthermore, driven platform 1 responds to the rotation angle θ by freely rotating around the axis of voice coil piezoelectric composite actuator 5 922, which is directly opposite voice coil piezoelectric composite actuator 1 911. All other degrees of freedom are rigidly constrained by the system's bending topology. Furthermore, the vertical blade 72 corresponding to each fixed voice coil piezoelectric composite actuator and the flexible riser 91 deform appropriately to accommodate the motion of the worktable, thereby transmitting minimal lateral force to the composite actuator. Because the six-degree-of-freedom (DOF) composite compliant positioning system utilizes a modular and symmetrical design, similarly, if a driving force is applied along the axis of voice coil piezoelectric composite actuator 4 921 while the other five actuators remain fixed, driven platform 1 will respond to the rotation angle θ by freely rotating around the axis of voice coil piezoelectric composite actuator 3 913. The output platform motion corresponding to each of the six groups of voice coil piezoelectric composite actuators is distinct and independent. By driving the composite actuators with proportional driving forces, the macro-micro dual-drive six-degree-of-freedom (DOF) decoupled compliant motion platform can achieve six degrees of freedom: translation and rotation along the X, Y, and Z axes.

[0049] like Figure 10 As shown, taking Z-direction motion as an example, in the initial stage of the macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform, when the Z-direction displacement begins, the voice coil motor of the macro drive (coarse adjustment) waits for the control current signal to drive the motor driver to perform high-speed and large-stroke motion toward the target position. When reaching the target position, due to the high acceleration of the motion, the platform will generate inertial vibration around the positioning target, resulting in the system being unable to accurately achieve the target position. Therefore, the micro precision drive (piezoelectric actuator 5) is further activated. The piezoelectric actuator 5 uses the inverse piezoelectric effect to achieve piezoelectric ceramic displacement to push the driven platform 1 to move and position, and the positioning error of the macro motion is required to be less than the maximum travel range of the micro motion stage to achieve high-precision positioning. In addition, according to the control algorithm, when the platform macro motion positioning vibration position exceeds the target position, the displacement distance of the piezoelectric actuator 5 can be reduced to achieve dynamic compensation for the platform position error and achieve high-precision position maintenance. Similarly, other degrees of freedom can also be decoupled and controlled in a similar manner.

[0050] The vertical blades 72 and the flexible vertical plates 91 are arranged in an axially symmetrical manner to ensure that the thermal drift of the system platform's composite actuator during expansion and contraction is minimized when the ambient temperature fluctuates; the angle between the two relative to the horizontal plane of the base platform 2 is 120°, and they are formed by integrated electric spark wire cutting.

[0051] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. A macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform, characterized by: It includes a driven platform, a base platform, a plurality of telescopic devices and a plurality of piezoelectric actuators arranged on the base platform. The plurality of telescopic devices are distributed circumferentially, and the output end of each telescopic device is connected to a piezoelectric actuator. The plurality of telescopic devices include a plurality of first telescopic devices and a plurality of second telescopic devices. The first telescopic devices are arranged vertically, and the second telescopic devices are arranged horizontally. The output ends of the piezoelectric actuators are connected to the driven platform through a flexible branch chain structure.

2. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 1 is characterized by: It also includes a bracket and a stabilizing platform provided on the base platform, the bracket including a vertical plate and a first flexible horizontal plate that are fixedly connected, the vertical plate being provided in parallel with the first telescopic device, the output end of the first telescopic device being fixedly connected to an end of the first flexible horizontal plate away from the vertical plate, the piezoelectric actuator being further provided at an end of the first flexible horizontal plate away from the vertical plate, and the piezoelectric actuator being connected to the flexible branch chain structure; The stabilizing platform is vertically and fixedly connected to the base platform, and the second telescopic device is fixedly arranged on the stabilizing platform.

3. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 2 is characterized by: The flexible branch chain structure includes a first flexible component and a second flexible component, the first flexible component is used to connect to the first telescopic device, and the second flexible component is used to connect to the second telescopic device, wherein the first flexible component includes a flexible vertical plate, and the end of the flexible vertical plate away from the first flexible horizontal plate is connected to the driven platform; the second flexible component includes horizontal blades and vertical blades, the horizontal blades are parallel to the base platform and connected to the output end of the second telescopic device, the vertical blades are perpendicular and fixedly connected to the horizontal blades, and the end of the vertical blades away from the horizontal blades is connected to the driven platform, and the length direction of the vertical blades is consistent with the movement direction of the output end of the second telescopic device.

4. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 3, characterized in that: The first flexible component further includes a flexible frame having side panels connected to the flexible vertical panels and the driven platform, and a height direction of the side panels is consistent with a height direction of the vertical panels.

5. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 2, characterized in that: The bracket also includes a second flexible transverse plate, which is arranged parallel to the first flexible transverse plate. The piezoelectric actuator is arranged between the first flexible transverse plate and the second flexible transverse plate, and the second flexible transverse plate is used to connect with the flexible branch chain structure.

6. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 5, characterized in that: A first clamping block is fixedly provided at one end of the first flexible horizontal plate away from the vertical plate, and a second clamping block is fixedly provided at one end of the second flexible horizontal plate away from the vertical plate. The first clamping block and the second clamping block are arranged opposite to each other, and both the first clamping block and the second clamping block are provided with grooves, and the piezoelectric actuator is clamped in the groove.

7. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 1, characterized in that: The telescopic device is a voice coil motor.

8. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 1, characterized in that: There are three of each of the first telescopic devices and the second telescopic devices, and the angle between any two adjacent first telescopic devices and the angle between any two adjacent second telescopic devices are both 120°.

9. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 4, characterized in that: The driven platform is in the shape of a fan blade and includes three fan blade-shaped surfaces and three notches. Each fan blade-shaped surface is provided opposite a notch, the side panels are connected to the notches, and the end of the vertical blade away from the horizontal blade is connected to the center of the fan blade-shaped surface.

10. The macro-micro dual-drive six-degree-of-freedom flexible decoupling motion platform according to claim 4, characterized in that: The flexible frame is a square frame, and the length, width and height of the side panels on each side are the same.

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