Optical element driving device and camera module

Abstract

An optical element drive device (101) is provided with: a first piezoelectric drive unit (PD1) that moves a first movable body (4) relative to a base member (3); a second piezoelectric drive unit (PD2) that moves the second movable body (5) relative to the first movable body (4); a first guide mechanism (GM1) that guides the movement of the first movable body (4) in the X-axis direction; and a second guide mechanism (GM2) that guides the movement of the second movable body (5) in the Y-axis direction. The plate surface of each of a pair of first flat-plate-shaped spring parts (FS1) constituting the first guide mechanism (GM1) is perpendicular to the X-axis direction, one end part (FS1F) is fixed to the base member (3), and the other end part (FS1S) is fixed to the first movable body (4). Furthermore, the plate surface of each of a pair of second flat-plate-shaped spring parts (FS2) constituting the second guide mechanism (GM2) is perpendicular to the Y-axis direction, one end part (FS2F) is fixed to the first movable body (4), and the other end part (FS2S) is fixed to the second movable body (5).

Description

Technical Field

[0001] The present disclosure relates to a camera module that is mounted on, for example, an optical element driving device or a portable device equipped with a camera. Background Art

[0002] Conventionally, a lens driving device is known that includes: an X-axis actuator that moves an auxiliary body (first movable body) relative to a base member (fixed-side member) along the X-axis, which is perpendicular to the optical axis; and a Y-axis actuator that moves a movable body (second movable body) relative to the auxiliary body (first movable body) along the Y-axis, which is perpendicular to both the optical axis and the X-axis (see Patent Document 1). In this device, the X-axis actuator is provided on the base member, and the Y-axis actuator is provided on the auxiliary body (first movable body).

[0003] In the lens drive device described above, a roughly V-shaped metal plate is installed in a roughly V-shaped groove formed in the auxiliary body (first movable body) and extending in the X-axis direction. Moreover, the roughly V-shaped groove is configured to abut against the cylindrical X-axis drive shaft through the roughly V-shaped metal plate. In other words, the roughly V-shaped metal plate abutting against the X-axis drive shaft guides the movement of the auxiliary body (first movable body) in the X-axis direction. The same is true for guiding the movable body (second movable body) when it moves in the Y-axis direction.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-015849 Summary of the Invention

[0007] Technical problem to be solved by the invention

[0008] However, in the above configuration, since a force that rotates the movable body (optical element) in a plan view is generated to tilt the movable body (optical element), the movement of the movable body (optical element) may not be appropriately guided.

[0009] Therefore, it is desirable to provide an optical element driving device that can appropriately guide the movement of an optical element.

[0010] Means for solving technical problems

[0011] 18. The optical element driving device according to claim 17, wherein the optical element holding member comprises: a fixed-side member including a base member; an optical element holding member having a through portion penetrating in the vertical direction and capable of holding the optical element; a first movable body arranged on one side of the base member and capable of moving relative to the fixed-side member in a first moving direction intersecting the vertical direction; a second movable body arranged on one side of the base member and capable of moving relative to the first movable body in a second moving direction intersecting the vertical direction and perpendicular to the first moving direction, and supporting the optical element holding member; a first driving portion for moving the first movable body in the first moving direction; a second driving portion for moving the second movable body in the second moving direction; a first guiding mechanism for guiding the movement of the first movable body in the first moving direction; and a second guiding mechanism for guiding the movement of the second movable body in the second moving direction, wherein the first guiding mechanism The mechanism includes a pair of first flat-plate spring portions separated from each other in the first moving direction and opposed in a parallel state and extending along the second moving direction, the plate surface of each of the pair of first flat-plate spring portions being perpendicular to the first moving direction, one end portion of each of the pair of first flat-plate spring portions in the second moving direction being fixed to the fixed-side component, and the other end portion of each of the pair of first flat-plate spring portions in the second moving direction being fixed to the first movable body, and the second guiding mechanism includes a pair of second flat-plate spring portions separated from each other in the second moving direction and opposed in a parallel state and extending along the first moving direction, the plate surface of each of the pair of second flat-plate spring portions being perpendicular to the second moving direction, one end portion of each of the pair of second flat-plate spring portions in the first moving direction being fixed to the first movable body, and the other end portion of each of the pair of second flat-plate spring portions in the first moving direction being fixed to the second movable body.

[0012] Effects of the Invention

[0013] The above-mentioned optical element driving device can appropriately guide the movement of the optical element. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is an exploded perspective view of a camera module including an optical element driving device.

[0015] Figure 2 This is an exploded perspective view of the optical element drive device.

[0016] Figure 3 This is an exploded perspective view of the optical element drive device.

[0017] Figure 4 This is an exploded perspective view of the optical element drive device.

[0018] Figure 5 This is an exploded perspective view of the piezoelectric drive unit.

[0019] Figure 6 It is a diagram showing the operation of the piezoelectric drive unit.

[0020] Figure 7 This is a front view of the optical element driving device with the cover member removed.

[0021] Figure 8 This is a right side view of the optical element driving device with the cover member removed.

[0022] Figure 9 This is a left side view of the optical element driving device with the cover member removed.

[0023] Figure 10 This is a rear view of the optical element driving device with the cover removed.

[0024] Figure 11 This is a top view of the optical element driving device with the cover member removed.

[0025] Figure 12 It is a diagram showing the operation of the optical element holding member.

[0026] Figure 13 This is an exploded perspective view of another structural example of the optical element driving device.

[0027] Figure 14 It is composed Figure 13 An exploded perspective view of the components of the optical element driving device is shown. DETAILED DESCRIPTION

[0028] Below, reference Figures 1 to 4 , an optical element driving device 101 according to an embodiment of the present disclosure is described. Figure 1 It is an exploded perspective view of a camera module CM including the optical element driving device 101 . Figures 2 to 4 It is an exploded perspective view of the optical element driving device 101 .

[0029] Figure 1 In the equation, X1 represents one direction of the X axis of the three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X axis. Y1 represents one direction of the Y axis of the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y axis. Z1 represents one direction of the Z axis of the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z axis. Figure 1In the figure, the X1 side of the optical element driving device 101 corresponds to the front side (front side) of the optical element driving device 101, and the X2 side of the optical element driving device 101 corresponds to the rear side (back side) of the optical element driving device 101. The Y1 side of the optical element driving device 101 corresponds to the left side of the optical element driving device 101, and the Y2 side of the optical element driving device 101 corresponds to the right side of the optical element driving device 101. The Z1 side of the optical element driving device 101 corresponds to the top side (subject side) of the optical element driving device 101, and the Z2 side of the optical element driving device 101 corresponds to the bottom side (imaging element side) of the optical element driving device 101. The same applies to the other figures.

[0030] The camera module CM is composed of an optical element driving device 101, a lens body LS as an example of an optical element OE, and an imaging element IS mounted on a substrate (not shown) in a manner opposite to the lens body LS. The optical element driving device 101 has a generally rectangular shape and is mounted on the substrate on which the imaging element IS is mounted. In addition, the optical element OE can also be a reflector, a prism, a diffraction grating, a light-emitting element, a light-receiving element, an imaging element, or an optical filter. In addition, the optical element OE can also be a combination of multiple elements. In addition, when the optical element OE is an element other than the lens body LS, the imaging element IS can also be omitted.

[0031] In the example shown in the figure, Figure 2 As shown, the optical element driving device 101 includes a fixed side part FB and a movable side part MB. In the example shown in the figure, the fixed side part FB includes a cover part 1 and a base part 3, and the movable side part MB includes an optical element holding part 2, a first movable body 4 and a second movable body 5. The fixed side part FB and the movable side part MB are connected by a guide mechanism GM. Moreover, the movable side part MB is supported so as to be guided in a predetermined moving direction by the guide mechanism GM. In the example shown in the figure, the predetermined moving direction includes a first moving direction (X-axis direction) perpendicular to the optical axis direction, a second moving direction (Y-axis direction) perpendicular to the optical axis direction and the first moving direction, and a third moving direction (Z-axis direction) parallel to the optical axis direction. The optical axis direction includes the direction of the optical axis OA relative to the lens body LS held by the optical element holding part 2, and a direction parallel to the optical axis OA. The lens body LS is, for example, a cylindrical lens barrel having at least one lens. In addition, the movable side part MB is configured to move in a predetermined moving direction by a force generated by a piezoelectric driving unit PD, which is an example of a driving unit.

[0032] The cover member 1 is a member constituting a part of the housing HS and is configured to cover the upper portion and the side portion of the movable side member MB. Figure 2As shown, the cover part 1 has a roughly rectangular cylindrical outer wall portion 1A that defines the accommodating portion 1S, and a flat and rectangular ring-shaped top plate portion 1B. Specifically, the outer wall portion 1A includes a first side plate portion 1A1 to a fourth side plate portion 1A4. The first side plate portion 1A1 and the third side plate portion 1A3 are opposite to each other, and the second side plate portion 1A2 and the fourth side plate portion 1A4 are opposite to each other. In addition, the second side plate portion 1A2 and the fourth side plate portion 1A4 extend perpendicularly relative to the first side plate portion 1A1 and the third side plate portion 1A3. That is, the first side plate portion 1A1 and the third side plate portion 1A3 extend perpendicularly relative to the second side plate portion 1A2 and the fourth side plate portion 1A4. A circular opening 1K is formed in the central portion of the top plate portion 1B. In addition, the cover part 1 is made by performing punching and drawing processes on a metal plate. However, the cover part 1 can also be formed from other materials such as synthetic resin.

[0033] The base member 3 is a member that constitutes a part of the housing HS. In the example shown in the figure, the base member 3 is formed of a synthetic resin. However, the base member 3 may also be formed of a metal. Specifically, Figure 2 As shown, the base member 3 has a flat plate-shaped and rectangular ring-shaped base 3B. Two of the four corners of the base 3B are formed with protrusions 3P that protrude upward. In addition, a circular opening 3K is formed in the central portion of the base 3B. Specifically, the protrusion 3P includes a left rear protrusion 3PBL and a left front protrusion 3PFL. In addition, as shown in FIG. Figure 4 As shown, a recess 3Q is formed on the upper surface of the base 3B to accommodate the force-applying member 6. Specifically, a first recess 3Q1 is formed on the base 3B to accommodate the first force-applying member 6A, and a second recess 3Q2 is formed on the base 3B to accommodate the second force-applying member 6B. Furthermore, the base member 3 is bonded to the cover member 1 using an adhesive or the like, thereby forming the housing HS together with the cover member 1.

[0034] The optical element holding component 2 is configured to be able to hold the optical element OE. In the illustrated example, the optical element holding component 2 is made by injection molding a synthetic resin such as a liquid crystal polymer (LCP). Moreover, the optical element holding component 2 is configured to be able to hold the lens body LS by fixing the lens body LS to the inner side of the cylindrical through-portion 2C using an adhesive. In addition, the optical element holding component 2 has a protrusion 2T that protrudes radially (rearward) from the outer peripheral surface of the cylindrical portion in which the through-portion 2C is formed. The protrusion 2T constitutes a fourth extension portion EL4 to which the guide mechanism GM (leaf spring component PS) is fixed.

[0035] The first movable body 4 is a component configured to be movable in a first movement direction (X-axis direction) by being driven by a piezoelectric drive unit PD (first piezoelectric drive unit PD1) and guided by a guide mechanism GM (first guide mechanism GM1). In the illustrated example, the first movable body 4 is formed into a substantially L-shaped component when viewed from above and below, and has a first extension portion EL1 extending in the first movement direction (X-axis direction) and a second extension portion EL2 extending in the second movement direction (Y-axis direction). The first movable body 4 is formed of a synthetic resin.

[0036] The second movable body 5 is a component that is driven by the piezoelectric drive unit PD (second piezoelectric drive unit PD2) and guided by the guide mechanism GM (second guide mechanism GM2) and is movable along the second moving direction (Y-axis direction). In the illustrated example, the second movable body 5 is a component formed in a roughly rectangular parallelepiped shape, having a third extension portion EL3 extending along the second moving direction (Y-axis direction). In addition, the second movable body 5 is formed of a synthetic resin. The third extension portion EL3 is configured to be opposite to the second extension portion EL2 of the first movable body 4 across the optical element holding component 2 in the first moving direction (X-axis direction). In addition, the front end surface (end surface on the X1 side) of the central portion CT in the second moving direction (Y-axis direction) of the third extension portion EL3 is located further rearward (X2 side) than the front end surface of the portion on the left side (Y1 side) and the front end surface of the portion on the right side (Y2 side) of the central portion CT. Furthermore, a through-hole 5C, which extends through the central portion CT in the X-axis direction and has a rectangular shape when viewed from the front, is formed so that the piezoelectric driver PD (third piezoelectric driver PD3) for driving the optical element holding member 2 can be positioned. Furthermore, recessed mounting portions 5T are provided on the left side (Y1 side) and right side (Y2 side) of the through-hole 5C in the central portion CT. The mounting portions 5T are used to secure the third biasing member 6C.

[0037] The passive component RC is a component that receives the driving force generated by the piezoelectric driving unit PD. In the example shown in the figure, the passive component RC is a cylindrical component formed of metal such as titanium copper or stainless steel and extending along the moving direction. In addition, the passive component RC can also be formed of other metals. Moreover, the other metal can be either a magnetic metal or a non-magnetic metal. In the example shown in the figure, Figure 4 As shown, the passive component RC includes a first passive component RC1, a second passive component RC2, and a third passive component RC3. The first passive component RC1 is configured to be embedded in a U-shaped groove 4U formed at the front end of the first movable body 4 and fixed by an adhesive, and can move along the X-axis direction together with the first movable body 4. The second passive component RC2 is configured to be embedded in a U-shaped groove 5U formed at the left end of the second movable body 5 (refer to FIG. Figure 9The third movable member RC3 is provided so as to be fitted into a U-shaped groove 2U formed on the front side of the outer peripheral surface of the cylindrical portion of the optical element holding member 2 where the through portion 2C is formed, and is fixed with an adhesive so as to be movable in the Z-axis direction together with the optical element holding member 2.

[0038] The leaf spring member PS is configured to support the optical element holding member 2 so as to be movable in the vertical direction. Figure 4 As shown, the leaf spring member PS includes an upper leaf spring member PSU and a lower leaf spring member PSD having the same structure. Furthermore, each of the upper leaf spring member PSU and the lower leaf spring member PSD has a generally rectangular ring-shaped outer shape when viewed from above. One end portion (front connecting portion FE) extending in the Y-axis direction is fixed to the second movable body 5 (third extension portion EL3) by adhesive, while the other end portion (rear connecting portion BE) also extending in the Y-axis direction is fixed to the protrusion 2T (fourth extension portion EL4) of the optical element holding member 2 by adhesive.

[0039] The force applying member 6 is configured to apply force to the piezoelectric drive unit PD toward the driven member RC. In the example shown in the figure, the force applying member 6 is formed by a leaf spring member formed by stamping a metal plate made of titanium copper. The metal plate can also be formed of other metals such as stainless steel. Specifically, the force applying member 6 includes a first force applying member 6A, a second force applying member 6B, and a third force applying member 6C. In the example shown in the figure, Figure 3 and Figure 4 As shown, both ends of the first force applying member 6A are fixed to the upper surface of the base portion 3B of the base member 3 by adhesive, and the remaining portion is accommodated in the first recess 3Q1 in a manner that does not contact the bottom of the first recess 3Q1. In this way, the first force applying member 6A is configured to push the first piezoelectric driver PD1 toward the first passive member RC1 fixed to the first movable body 4. In addition, as shown in FIG. Figure 3 and Figure 4 As shown, one end of the second force-applying member 6B is fixed to the upper surface of the base portion 3B of the base member 3 by adhesive, and the other end is fixed to the upper end surface of the left front protrusion 3PFL of the base member 3 by adhesive, and the remaining portion is accommodated in the second recess 3Q2 in a manner that does not contact the bottom of the second recess 3Q2. In this way, the second force-applying member 6B is configured to push the second piezoelectric driver PD2 toward the second passive member RC2 fixed to the second movable body 5. In addition, as shown in FIG. Figure 3 and Figure 4As shown, the two ends of the third force-applying member 6C are fixed to the mounting portion 5T of the second movable body 5 by an adhesive. Moreover, the front surfaces (surfaces on the X1 side) of the two ends of the third force-applying member 6C are covered by the front connecting portion FE of the leaf spring member PS fixed to the central portion CT of the third extension portion EL3. In other words, the two ends of the third force-applying member 6C are clamped by the mounting portion 5T of the second movable body 5 and the front connecting portion FE of the leaf spring member PS. The remaining portion of the third force-applying member 6C is accommodated in the space between the upper leaf spring member PSU and the lower leaf spring member PSD in a manner that does not contact the leaf spring member PS. In this way, the third force-applying member 6C is configured to be able to push the third piezoelectric drive unit PD3 toward the third passive member RC3 fixed to the optical element holding member 2.

[0040] Next, refer to Figure 5 The piezoelectric driving unit PD will be described in detail. Figure 5 It is an exploded perspective view of the piezoelectric drive unit PD supported by the urging member 6 .

[0041] The piezoelectric drive unit PD is configured to move the movable side member MB along a predetermined moving direction. In the illustrated example, the piezoelectric drive unit PD is an example of a friction drive unit using the drive system disclosed in U.S. Patent No. 7,786,648, and includes a piezoelectric element 8, a contact member 9, and a flexible wiring substrate 10. The piezoelectric drive unit PD is configured to be pressed against the passive member RC (see FIG. 1 ) by the force applying member 6. Figure 4 ) That is, the contact member 9 of the piezoelectric drive unit PD and the driven member RC are in contact with each other in a manner of being pressed by the urging member 6 .

[0042] Specifically, the piezoelectric drive unit PD includes a first piezoelectric drive unit PD1 that moves the first movable body 4 in a first moving direction (X-axis direction), a second piezoelectric drive unit PD2 that moves the second movable body 5 in a second moving direction (Y-axis direction), and a third piezoelectric drive unit PD3 that moves the optical element holding part 2 in a third moving direction (Z-axis direction).

[0043] The first piezoelectric drive unit PD1 is configured to include a first piezoelectric element 8A, a first contact member 9A, and a first flexible wiring substrate 10A. It is biased by a first biasing member 6A and pressed against a first passive member RC1 fixed to the first movable body 4 (see FIG. Figure 4 ).

[0044] The second piezoelectric drive unit PD2 is configured to include a second piezoelectric element 8B, a second contact member 9B, and a second flexible wiring substrate 10B. It is biased by a second biasing member 6B and is pressed against a second passive member RC2 fixed to the second movable body 5 (see FIG. Figure 4 ).

[0045] The third piezoelectric drive unit PD3 includes a third piezoelectric element 8C, a third contact member 9C, and a third flexible wiring substrate 10C, and is configured to be biased by a third biasing member 6C and pushed against a third passive member RC3 fixed to the optical element holding member 2 (see FIG. Figure 4 ).

[0046] Specifically, the first piezoelectric element 8A, the second piezoelectric element 8B, and the third piezoelectric element 8C are each configured to be able to achieve bending vibration according to the applied voltage. In the example shown in the figure, the first piezoelectric element 8A extends in the Y-axis direction along the first rotation axis 8AX, the second piezoelectric element 8B extends in the X-axis direction along the second rotation axis 8BX, and the third piezoelectric element 8C extends in the Y-axis direction along the third rotation axis 8CX. In addition, the first piezoelectric element 8A, the second piezoelectric element 8B, and the third piezoelectric element 8C are each configured to be able to achieve bending vibration with two nodes (nodes ND). When bending vibration occurs, the parts of the two nodes ND hardly vibrate. Figure 5 For clarity, the positions of the nodes ND in each of the first piezoelectric element 8A, the second piezoelectric element 8B, and the third piezoelectric element 8C are marked with a cross pattern. Furthermore, the positions of the nodes ND in the piezoelectric element 8 include the positions of the first node ND1 and the second node ND2. The positions of the nodes ND correspond to positions at a predetermined distance from the end of the piezoelectric element 8. The predetermined distance is, for example, approximately one-quarter of the total length of the piezoelectric element 8.

[0047] The first flexible wiring substrate 10A is a flexible wiring substrate including a conductive pattern and is configured to electrically connect an external voltage source (control circuit) to the first piezoelectric element 8A. In the illustrated example, the first flexible wiring substrate 10A is configured to apply a voltage to the first piezoelectric element 8A. Specifically, the first flexible wiring substrate 10A includes a joint 10AJ that joins with the first piezoelectric element 8A and an extension 10AE that extends from the joint 10AJ in the Y1 direction. Furthermore, the first piezoelectric element 8A extends along the first rotation axis 8AX and is bonded to the upper (Z1-side) surface of the first flexible wiring substrate 10A via an adhesive AD. In the illustrated example, the first piezoelectric element 8A has electrodes ED at each of the four corners of its lower (Z2-side) surface. Furthermore, the four electrodes ED of the first piezoelectric element 8A are bonded to four connection portions PT formed on the upper surface of the first flexible wiring substrate 10A via an adhesive AD.

[0048] The second flexible wiring substrate 10B is a flexible wiring substrate including a conductive pattern and is configured to electrically connect an external voltage source (control circuit) to the second piezoelectric element 8B. In the illustrated example, the second flexible wiring substrate 10B is configured to apply a voltage to the second piezoelectric element 8B. Specifically, the second flexible wiring substrate 10B includes a joint 10BJ that is bonded to the second piezoelectric element 8B and an extension 10BE that extends from the joint 10BJ in the Y2 direction. Furthermore, the second piezoelectric element 8B extends along the second rotation axis 8BX and is bonded to the upper (Z1-side) surface of the second flexible wiring substrate 10B via an adhesive AD. In the illustrated example, the second piezoelectric element 8B has electrodes ED at each of the four corners of its lower (Z2-side) surface. Furthermore, the four electrodes ED of the second piezoelectric element 8B are bonded to four connection portions PT formed on the upper surface of the second flexible wiring substrate 10B via an adhesive AD.

[0049] Similarly, the third flexible wiring substrate 10C is a flexible wiring substrate including a conductive pattern and is configured to electrically connect an external voltage source (control circuit) to the third piezoelectric element 8C. In the illustrated example, the third flexible wiring substrate 10C is configured to apply a voltage to the third piezoelectric element 8C. Specifically, the third flexible wiring substrate 10C includes a joint 10CJ that is joined to the third piezoelectric element 8C and an extension 10CE that extends from the joint 10CJ in the Z2 direction. Furthermore, the third piezoelectric element 8C extends along the third rotation axis 8CX and is bonded to the rear (X2) surface of the third flexible wiring substrate 10C via adhesive AD. In the illustrated example, the third piezoelectric element 8C has electrodes ED at each of the four corners of its front (X1) surface. Furthermore, the four electrodes ED of the third piezoelectric element 8C are bonded to four connection portions PT formed on the rear surface of the third flexible wiring substrate 10C via adhesive AD.

[0050] In the illustrated example, the adhesive AD is an anisotropic conductive film, which is heated and pressurized while positioned between the piezoelectric element 8 and the flexible wiring substrate 10, thereby securing the piezoelectric element 8 and the flexible wiring substrate 10, respectively. This independently electrically connects the four electrodes ED of the piezoelectric element 8 to the four connection portions PT, which are part of the conductive pattern of the flexible wiring substrate 10. However, the adhesive AD may also be a conductive adhesive or solder. Furthermore, in the illustrated example, the anisotropic conductive film serving as the adhesive AD is divided into two portions, but it may also be combined into a single portion of approximately the same size as the piezoelectric element 8.

[0051] In the illustrated example, conductive patterns are formed on both surfaces of the flexible wiring substrate 10. Insulating films covering the conductive patterns are provided on both surfaces, except for the connection portion PT and the connection portion with the common flexible wiring substrate 11. Furthermore, for more reliable insulation, insulating protective films are provided on the portions in contact with the piezoelectric element 8 and the portion in contact with the biasing member 6.

[0052] The common flexible wiring substrate 11 is a flexible wiring substrate including a conductive pattern, and is configured to electrically connect an external voltage supply source (control circuit) to the flexible wiring substrate 10. In the illustrated example, the common flexible wiring substrate 11 is configured such that the connection portions of the first flexible wiring substrate 10A, the second flexible wiring substrate 10B, and the third flexible wiring substrate 10C are connected to a predetermined connection area using a conductive adhesive or solder. Figure 5 In the figure, for the sake of clarity, a dot pattern is marked on the connection area ZN which is a predetermined connection area to which the second flexible wiring substrate 10B is connected. Figure 5 In the example, the first flexible wiring substrate 10A and the third flexible wiring substrate 10C are already connected to a common flexible wiring substrate 11. Furthermore, the common flexible wiring substrate 11 has 13 terminal portions TM. These 13 terminal portions TM include four terminal portions TM corresponding to the four connection portions PT formed on the first flexible wiring substrate 10A, four terminal portions TM corresponding to the four connection portions PT formed on the second flexible wiring substrate 10B, four terminal portions TM corresponding to the four connection portions PT formed on the third flexible wiring substrate 10C, and one terminal portion TM corresponding to the ground potential. Alternatively, the common flexible wiring substrate 11 may be a rigid wiring substrate.

[0053] The first piezoelectric driver PD1 is configured to be pressed against the first passive component RC1 by an upward force applied by a first force applying member 6A fixed to the base member 3. In the illustrated example, the first force applying member 6A is configured to contact the lower surface (Z2 side) of the first flexible wiring substrate 10A at positions corresponding to two nodes ND formed during the bending vibration of the first piezoelectric element 8A (the positions of the first protrusion SP1 and the second protrusion SP2). The first force applying member 6A and the first flexible wiring substrate 10A are bonded together using, for example, an adhesive.

[0054] The second piezoelectric driver PD2 is configured to be pressed against the second passive component RC2 by an upward force applied by a second force applying member 6B fixed to the base member 3. In the illustrated example, the second force applying member 6B is configured to contact the lower surface (Z2 side) of the second flexible wiring substrate 10B at positions corresponding to two nodes ND formed during the bending vibration of the second piezoelectric element 8B (the positions of the first protrusion SP1 and the second protrusion SP2). The second force applying member 6B and the second flexible wiring substrate 10B are bonded together using, for example, an adhesive.

[0055] The third piezoelectric driver PD3 is configured to press the third passive component RC3 backwards via a third biasing member 6C fixed to the second movable body 5. In the illustrated example, the third biasing member 6C is configured to contact the front (X1-side) surface of the third flexible wiring board 10C at positions corresponding to two nodes ND formed during the bending vibration of the third piezoelectric element 8C (the positions of the first protrusion SP1 and the second protrusion SP2). The third biasing member 6C and the third flexible wiring board 10C are bonded together using, for example, an adhesive.

[0056] The force-applying member 6 is composed of a leaf spring member formed from a single metal plate. In the illustrated example, the first force-applying member 6A includes a fixed portion 6AF fixed to the base member 3, a support portion 6AS supporting the first piezoelectric driver PD1, and an elastically deformable portion 6AE disposed between the fixed portion 6AF and the support portion 6AS. Furthermore, the second force-applying member 6B includes a fixed portion 6BF fixed to the base member 3, a support portion 6BS supporting the second piezoelectric driver PD2, and an elastically deformable portion 6BE disposed between the fixed portion 6BF and the support portion 6BS. Similarly, the third force-applying member 6C includes a fixed portion 6CF fixed to the second movable body 5, a support portion 6CS supporting the third piezoelectric driver PD3, and an elastically deformable portion 6CE disposed between the fixed portion 6CF and the support portion 6CS.

[0057] Specifically, the fixing portion 6AF includes a first fixing portion 6AF1 and a second fixing portion 6AF2. The elastically deformable portion 6AE includes a first elastically deformable portion 6AE1 positioned between the first fixing portion 6AF1 and the support portion 6AS, and a second elastically deformable portion 6AE2 positioned between the second fixing portion 6AF2 and the support portion 6AS. Furthermore, the fixing portion 6BF includes a first fixing portion 6BF1 and a second fixing portion 6BF2. The elastically deformable portion 6BE includes a first elastically deformable portion 6BE1 positioned between the first fixing portion 6BF1 and the support portion 6BS, and a second elastically deformable portion 6BE2 positioned between the second fixing portion 6BF2 and the support portion 6BS. Similarly, the fixing portion 6CF includes a first fixing portion 6CF1 and a second fixing portion 6CF2. The elastically deformable portion 6CE includes a first elastically deformable portion 6CE1 positioned between the first fixing portion 6CF1 and the support portion 6CS, and a second elastically deformable portion 6CE2 positioned between the second fixing portion 6CF2 and the support portion 6CS.

[0058] The support portions 6AS and 6BS, respectively, include a first protrusion SP1 and a second protrusion SP2 that protrude upward (in the Z1 direction), while the support portion 6CS includes a first protrusion SP1 and a second protrusion SP2 that protrude rearward (in the X2 direction). In the illustrated example, the first protrusion SP1 and the second protrusion SP2 are draw beads formed by deep drawing. Alternatively, the first protrusion SP1 and the second protrusion SP2 can be formed by dovetailing or half-blanking. Therefore, recesses corresponding to the first protrusion SP1 and the second protrusion SP2 are formed on the lower surface (Z2-side surface) of the support portion 6AS, the lower surface (Z2-side surface) of the support portion 6BS, and the front surface (X1-side surface) of the support portion 6CS. Specifically, the first protrusion SP1 and the second protrusion SP2 are each formed to extend perpendicularly to the direction in which the piezoelectric element 8 extends. Furthermore, the first protrusion SP1 and the second protrusion SP2 are preferably arranged at positions corresponding to the node ND of the piezoelectric element 8, specifically, separated from each other in the direction in which the piezoelectric element 8 extends.

[0059] The first piezoelectric driver PD1 is attached to the first force applying member 6A by adhesively securing the lower surface (Z2-side surface) of the joint portion 10AJ of the first flexible printed circuit board 10A to the support portion 6AS. Specifically, the first piezoelectric driver PD1 is attached to the first force applying member 6A by adhesively securing the positions of the joint portion 10AJ corresponding to the first and second segments ND2 of the first piezoelectric element 8A to the first and second protrusions SP1 and SP2 of the support portion 6AS. In other words, the first piezoelectric driver PD1 is attached to the first force applying member 6A by adhesively securing the positions of the joint portion 10AJ corresponding to the first and second segments ND1 and ND2 of the first piezoelectric element 8A to the first and second protrusions SP1 and SP2 of the support portion 6AS. In other words, the first piezoelectric driver PD1 is attached to the first force applying member 6A by adhesively securing the portions of the lower surface (Z2-side surface) of the joint portion 10AJ that do not correspond to the first and second segments ND1 and ND2 of the first piezoelectric element 8A to the support portion 6AS of the first force applying member 6A.

[0060] Furthermore, the second piezoelectric driver PD2 is attached to the second force applying member 6B such that the lower surface (Z2-side surface) of the joint portion 10BJ of the second flexible wiring board 10B is fixed to the support portion 6BS via adhesive. Specifically, the second piezoelectric driver PD2 is attached to the second force applying member 6B such that the positions corresponding to the first and second segments ND1 and ND2 of the second piezoelectric element 8B in the joint portion 10BJ are fixed to the first and second segments SP1 and SP2 of the support portion 6BS via adhesive. In other words, the second piezoelectric driver PD2 is attached to the second force applying member 6B such that the portions of the lower surface (Z2-side surface) of the joint portion 10BJ that do not correspond to the first and second segments ND1 and ND2 of the second piezoelectric element 8B do not contact the support portion 6BS of the second force applying member 6B.

[0061] Similarly, the third piezoelectric driver PD3 is attached to the third force applying member 6C such that the front surface (X1-side surface) of the joint portion 10CJ of the third flexible printed circuit board 10C is fixed to the support portion 6CS via adhesive. Specifically, the third piezoelectric driver PD3 is attached to the third force applying member 6C such that the positions corresponding to the first and second segments ND1 and ND2 of the third piezoelectric element 8C in the joint portion 10CJ are fixed to the first and second segments SP1 and SP2 of the support portion 6CS via adhesive, respectively. In other words, the third piezoelectric driver PD3 is attached to the third force applying member 6C such that the portions of the front surface (X1-side surface) of the joint portion 10CJ that do not correspond to the first and second segments ND1 and ND2 of the third piezoelectric element 8C do not contact the support portion 6CS of the third force applying member 6C.

[0062] Next, refer to Figure 6 The operation of the first piezoelectric driver PD1 will be described. Figure 6 1 is a diagram showing the first piezoelectric element 8A and the first contact member 9A constituting the first piezoelectric drive unit PD1. Figure 6 In the figure, for the sake of clarity, the first flexible wiring substrate 10A is omitted. Specifically, Figure 6 The top figure in FIG is a perspective view of the first piezoelectric element 8A and the first contact member 9A. Figure 6 The second, third, and fourth figures from the top are front views of the first piezoelectric element 8A and the first contact member 9A. Figure 6 The fifth, sixth, and seventh figures from the top are bottom views of the first piezoelectric element 8A and the first contact member 9A. Figure 6 In order to facilitate understanding, the deflection shape of the first piezoelectric drive unit PD1 is exaggerated. Figure 6 The following description relates to the operation of the first piezoelectric driver PD1, but is also applicable to the operation of the second piezoelectric driver PD2 and the third piezoelectric driver PD3. This is because the first piezoelectric driver PD1, the second piezoelectric driver PD2, and the third piezoelectric driver PD3 have the same structure.

[0063] In the example shown, the first piezoelectric element 8A has two parts (a first part 8A1 and a second part 8A2) arranged side by side in the first movement direction (X-axis direction), and two electrodes ED to which voltage can be applied independently are formed on each of these two parts. Specifically, the first electrode ED1 and the second electrode ED2 are formed on the first part 8A1, and the first electrode ED11 and the second electrode ED12 are formed on the second part 8A2. Figure 6 In the figure, for the sake of clarity, the first portion 8A1 is marked with a dot pattern, and the second portion 8A2 is marked with a slash pattern.

[0064] When the first piezoelectric drive unit PD1 applies a voltage to the first part 8A1 and a voltage to the second part 8A2 at appropriate times, for example, the first piezoelectric element 8A (first piezoelectric drive unit PD1) can be bent and vibrated (circular motion) in such a way that the trajectory described by the predetermined point, i.e., the center point CP, becomes a circular orbit centered on the first rotation axis 8AX. That is, the first piezoelectric element 8A can achieve an action (circular motion) such as the center point CP describing a circle. In addition, in the illustrated example, the center point CP of the first piezoelectric element 8A is the center of gravity of the first piezoelectric element 8A, and the first rotation axis 8AX is parallel to the Y-axis. However, the center point CP of the circular motion can also be located in the first contact member 9A fixed to the first piezoelectric element 8A. This is because the first contact member 9A also performs circular motion together with the first piezoelectric element 8A. Furthermore, the first piezoelectric driver PD1 can switch the direction of movement (rotation) of the center point CP along the circular track between clockwise and counterclockwise when viewed from the Y1 side by applying voltage to the first and second parts 8A1 and 8A2 at appropriate times. This rotational direction switching allows the first piezoelectric driver PD1 to switch the direction of movement of the first passive member RC1 (and the first movable body 4 (movable-side member MB) to which the first passive member RC1 is fixed) along the first movement direction (X-axis direction). The circle (circular track) described by the center point CP does not need to be a perfect circle (a true circle); a generally circular shape is sufficient.

[0065] exist Figure 6 In the top figure, the dotted arrows drawn around the first piezoelectric element 8A represent an example of bending vibration of the first piezoelectric element 8A (circular motion in which the first piezoelectric element 8A rotates in the clockwise direction when viewed from the Y1 side while flexing) around the first rotation axis 8AX. In this case, the movable side part MB, including the first passive part RC1 in contact with the first contact part 9A of the first piezoelectric drive unit PD1, moves forward (in the X1 direction). In addition, although not indicated by the arrows, the first piezoelectric element 8A can also rotate in the counterclockwise direction when viewed from the Y1 side while flexing around the first rotation axis 8AX. In this case, the movable side part MB, including the first passive part RC1 in contact with the first contact part 9A of the first piezoelectric drive unit PD1, moves backward (in the X2 direction).

[0066] That is, when the rotation direction of the center point CP of the first piezoelectric element 8A is clockwise when viewed from the left side, the first movable body 4 on which the first movable component RC1 is installed moves forward (X1 direction); when the rotation direction of the center point CP of the first piezoelectric element 8A is counterclockwise, it moves backward (X2 direction).

[0067] The first contact member 9A is attached to the first piezoelectric element 8A and is configured to contact the first passive member RC1. In the illustrated example, the first contact member 9A is bonded to the upper surface of the first piezoelectric element 8A with an adhesive, covering the entire surface of the upper side (Z1 side) of the first piezoelectric element 8A. The first contact member 9A is formed of a metal such as titanium copper or stainless steel and has an appropriate thickness to enable bending vibration (circular motion) along with the bending vibration (circular motion) of the first piezoelectric element 8A. In the illustrated example, the first contact member 9A is a stainless steel friction plate. The first contact member 9A extends in the same direction (Y-axis direction) as the first piezoelectric element 8A. Furthermore, the first contact member 9A is configured to contact the first passive member RC1 at its center along its extension direction. Specifically, the first contact member 9A is configured to contact the first passive member RC1 at the portion where the amplitude of the bending vibration (circular motion) is maximum (the portion corresponding to the antinode of the bending vibration). In the illustrated example, the surface 9AS of the first contact member 9A on the side (Z1 side) in contact with the first passive member RC1 is a convex surface convex toward the Z1 side.

[0068] The purpose of bringing the first metal-made passive member RC1 into contact with the first metal-made contact member 9A is to prevent wear of the movable side member MB (first movable body 4) caused by the contact between the movable side member MB (first movable body 4) made of synthetic resin and the first metal-made contact member 9A. Furthermore, as long as the first passive member RC1 and the first contact member 9A can be in contact, the length dimension of the first contact member 9A in the Y-axis direction may be different from the length dimension of the first piezoelectric element 8A in the Y-axis direction. For example, the length dimension of the first contact member 9A in the Y-axis direction may be smaller than the length dimension of the first piezoelectric element 8A in the Y-axis direction. However, the length of the first contact member 9A in the extension direction (Y-axis direction) is preferably greater than the length of the first piezoelectric element 8A.

[0069] When the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential, causing the first portion 8A1 to contract, and when the first electrode ED11 is connected to a high potential and the second electrode ED12 is connected to a low potential, causing the second portion 8A2 to contract, the first piezoelectric element 8A and the first contact member 9A each flex so as to bulge upward (toward the Z1 side), as shown in the second figure from the top. Hereinafter, the state of the first piezoelectric drive portion PD1 in which the first piezoelectric element 8A and the first contact member 9A each bulge upward is also referred to as the "upward bulging state."

[0070] Furthermore, when the first and second electrodes ED1 and ED2 are connected to the same potential so that the first portion 8A1 does not expand or contract, or when voltage application to the first and second electrodes ED1 and ED2 is stopped, and the first and second electrodes ED11 and ED12 are connected to the same potential so that the second portion 8A2 does not expand or contract, or when voltage application to the first and second electrodes ED11 and ED12 is stopped, the first piezoelectric element 8A and the first contact member 9A extend linearly, as shown in the third and sixth figures from the top. Hereinafter, the state of the first piezoelectric drive portion PD1 when the first piezoelectric element 8A and the first contact member 9A extend linearly is also referred to as the "neutral state." Furthermore, the state when voltage application is stopped is also referred to as the "initial state."

[0071] Furthermore, when the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential, causing the first portion 8A1 to extend, and when the first electrode ED11 is connected to a low potential and the second electrode ED12 is connected to a high potential, causing the second portion 8A2 to extend, the first piezoelectric element 8A and the first contact member 9A each flex so as to bulge downward (toward the Z2 side), as shown in the fourth figure from the top. Hereinafter, the state of the first piezoelectric drive portion PD1 in which the first piezoelectric element 8A and the first contact member 9A each bulge downward is also referred to as the "downward bulging state."

[0072] Furthermore, when the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential, causing the first portion 8A1 to expand, and the first electrode ED11 is connected to a high potential and the second electrode ED12 is connected to a low potential, causing the second portion 8A2 to contract, the first piezoelectric element 8A and the first contact member 9A each flex so as to bulge forward (toward the X1 side), as shown in the fifth figure from the top. Hereinafter, the state of the first piezoelectric drive portion PD1 in which the first piezoelectric element 8A and the first contact member 9A each bulge forward will also be referred to as the "front-side bulging state."

[0073] Furthermore, when the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential, causing the first portion 8A1 to contract, and the first electrode ED11 is connected to a low potential and the second electrode ED12 is connected to a high potential, causing the second portion 8A2 to expand, the first piezoelectric element 8A and the first contact member 9A each flex so as to bulge toward the rear side (X2 side), as shown in the seventh figure from the top. Hereinafter, the state of the first piezoelectric drive portion PD1 in which the first piezoelectric element 8A and the first contact member 9A each bulge toward the rear side is also referred to as the "rear-side bulging state."

[0074] Furthermore, when a voltage is applied between the first electrode ED1 (first electrode ED11) and the second electrode ED2 (second electrode ED12) to cause the first portion 8A1 (second portion 8A2) to expand or contract in its extension direction, the first contact member 9A, which is fixed to one surface of the first piezoelectric element 8A, does not change its dimension in the extension direction. Consequently, the first piezoelectric driver PD1 deforms into the state described above. Furthermore, the first flexible printed circuit board 10A, which is fixed to the other surface of the first piezoelectric element 8A, deforms to follow the shape changes of the first piezoelectric element 8A.

[0075] Furthermore, the first piezoelectric drive unit PD1 can achieve a clockwise circular motion as viewed from the Y1 side by repeatedly changing its state in the order of upper convex state, front convex state, lower convex state, rear convex state, upper convex state, ... . Furthermore, the first piezoelectric drive unit PD1 can achieve a counterclockwise circular motion as viewed from the Y1 side by repeatedly changing its state in the order of upper convex state, rear convex state, lower convex state, front convex state, upper convex state, ... . Furthermore, the first piezoelectric drive unit PD1 can achieve up-and-down motion by repeatedly changing its state in the order of upper convex state, lower convex state, upper convex state, ... , and can achieve forward-and-back motion by repeatedly changing its state in the order of front convex state, rear convex state, front convex state, ... .

[0076] In the illustrated example, the first piezoelectric driver PD1 is configured such that the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential, thereby causing the first portion 8A1 to contract, and the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential, thereby causing the first portion 8A1 to expand. However, the first piezoelectric driver PD1 may be configured such that the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential, thereby causing the first portion 8A1 to contract, and the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential, thereby causing the first portion 8A1 to expand. The same applies to the second portion 8A2.

[0077] Furthermore, in the illustrated example, the second piezoelectric element 8B of the second piezoelectric drive unit PD2 is configured to extend along the X-axis. Therefore, with respect to the second piezoelectric drive unit PD2, the "front protruding state" of the first piezoelectric drive unit PD1 described above corresponds to the state of the second piezoelectric drive unit PD2 when the second piezoelectric element 8B and the second contact member 9B are each protruding to the left, i.e., the "left protruding state." The "rear protruding state" of the first piezoelectric drive unit PD1 described above corresponds to the state of the second piezoelectric drive unit PD2 when the second piezoelectric element 8B and the second contact member 9B are each protruding to the right, i.e., the "right protruding state." Therefore, the second piezoelectric drive unit PD2 can achieve vertical motion by repeatedly changing its state in the order of upper protruding state, lower protruding state, upper protruding state, etc., and can achieve left and right motion by repeatedly changing its state in the order of left protruding state, right protruding state, left protruding state, etc.

[0078] The guide mechanism GM is configured to guide the movable member MB that moves relative to the fixed member FB in a predetermined moving direction. In the illustrated example, the guide mechanism GM includes a first guide mechanism GM1, a second guide mechanism GM2, and a third guide mechanism GM3.

[0079] The first guide mechanism GM1 is configured to guide the movement of the first movable body 4 in the first movement direction (X-axis direction). The second guide mechanism GM2 is configured to guide the movement of the second movable body 5 in the second movement direction (Y-axis direction). The third guide mechanism GM3 is configured to guide the movement of the optical element holding member 2 in the third movement direction (Z-axis direction).

[0080] Next, refer to Figure 7-12 , the connection relationship between the movable side member MB and the guide mechanism GM will be described. Figure 7 It is a front view of the optical element driving device 101 with the cover member 1 removed. Figure 8 It is a right side view of the optical element driving device 101 with the cover member 1 removed. Figure 9 It is a left side view of the optical element driving device 101 with the cover member 1 removed. Figure 10 It is a rear view of the optical element driving device 101 with the cover member 1 removed. Figure 11 It is a plan view of the optical element driving device 101 with the cover member 1 removed. Figure 12 : is a diagram of the optical element holding member 2, the third urging member 6C, the third piezoelectric drive unit PD3 and the third guide mechanism GM3. Figures 7 to 11 In the figure, for the sake of clarity, the optical element holding member 2, the third urging member 6C, the third piezoelectric drive unit PD3 and the third guide mechanism GM3 are omitted. Figures 7 to 10In FIG. 1 , a cross pattern is indicated on the base member 3 , a thin dot pattern is indicated on the first movable body 4 , a thick dot pattern is indicated on the second movable body 5 , and an even thicker dot pattern is indicated on the guide mechanism GM.

[0081] Specifically, Figures 7 to 11 The upper figure of each is a figure of the optical element driving device 101 in a state where the cover member 1 is removed. Figures 7 to 10 The lower figure of each is a figure of the optical element driving device 101 in a state where the first guide mechanism GM1 and the second guide mechanism GM2 are further removed. Figure 11 The following figure shows the Figures 7 to 10 Each of the above figures is a cross-sectional view of the optical element driving device 101 when the XY plane is parallel to the imaginary plane including the cutting line L1 shown by the dot-dash line. Figure 12 The upper figure is a right side view of the optical element holding member 2, the third urging member 6C, the third piezoelectric drive unit PD3 and the third guide mechanism GM3. Figure 12 The figure below is a bottom view of the optical element holding component 2, the third urging component 6C, the third piezoelectric drive unit PD3 and the third guide mechanism GM3. Figure 12 In the lower figure, for the sake of clarity, a thin dot pattern is marked on the optical element holding member 2, a thick dot pattern is marked on the second movable body 5, and an even thicker dot pattern is marked on the guide mechanism GM.

[0082] like Figure 11As shown in the figure below, the first guide mechanism GM1, serving as the first guide spring member GS1, is formed from a metal plate and includes a first connecting portion CN1 and a pair of first flat spring members FS1. Specifically, the first guide mechanism GM1 includes a pair of first flat spring members FS1 that are spaced apart and opposed in parallel in the first movement direction (X-axis direction) and extend in the second movement direction (Y-axis direction). The plate surfaces of the pair of first flat spring members FS1 are perpendicular to the first movement direction (X-axis direction). One end FS1F of each of the pair of first flat spring members FS1 in the second movement direction (Y-axis direction) is secured to the fixed-side member FB (the protrusion 3P of the base member 3) with an adhesive, while the other end FS1S of each of the pair of first flat spring members FS1 in the second movement direction (Y-axis direction) is secured to the first movable body 4 with an adhesive. Furthermore, the first connecting portion CN1 is configured to connect the other end FS1S of the pair of first flat spring members FS1. Specifically, the first connecting portion CN1 includes a first flat portion FP1 extending in the first movement direction (X-axis direction) with its surface perpendicular to the second movement direction (Y-axis direction), and a first bent portion FD1 that bends inward approximately perpendicularly from the lower end of the first flat portion FP1. The term "inner side" refers to the side closer to the optical element OE, i.e., the opposite side from the side farther from the optical element OE, i.e., the outer side. The first movable body 4 includes a first extending portion EL1, which is generally rectangular, extending in the first movement direction (X-axis direction), and a second extending portion EL2, which is generally rectangular, extending in the second movement direction (Y-axis direction). The inner side surface (rear side) of the other end FS1S of the front first flat spring portion FS1, the inner side surface (front side) of the other end FS1S of the rear first flat spring portion FS1, the inner side surface (left side) of the first flat portion FP1 of the first connecting portion CN1, and the upper side surface of the first bent portion FD1 of the first connecting portion CN1 are respectively fixed to the front, rear, right, and lower sides of the first extending portion EL1 using adhesive.

[0083] The first piezoelectric driving part PD1 can realize a circular motion of clockwise rotation when viewed from the Y1 side by repeatedly changing its state in the order of upper side convex state, front side convex state, lower side convex state, rear side convex state, upper side convex state, etc. Figure 11 As shown in the dot-dash line graph in the lower figure, the first movable body 4 can be moved forward (in the X1 direction). Figure 11The dashed line in the figure below shows the positions of the first extension portion EL1 of the first movable body 4, the second movable body 5, and the first guide mechanism GM1 when the first movable body 4 moves a predetermined distance forward (in the X1 direction). The first guide mechanism GM1 bends the first flat spring portion FS1 so that the other end portion FS1S moves forward (in the X1 direction), thereby enabling parallel movement of the first movable body 4 forward (in the X1 direction). The second movable body 5 moves a predetermined distance forward (in the X1 direction) together with the first movable body 4.

[0084] In addition, the first piezoelectric driving part PD1 can realize the counterclockwise circular motion observed from the Y1 side by repeatedly changing its state in the order of upper side convex state, rear side convex state, lower side convex state, front side convex state, upper side convex state, ..., as shown in FIG. Figure 11 As shown by the dotted line in the lower figure, the first movable body 4 can be moved backward (in the X2 direction). Figure 11 The dashed line in the figure below shows the positions of the first extension portion EL1 of the first movable body 4, the second movable body 5, and the first guide mechanism GM1 when the first movable body 4 has moved a predetermined distance rearward (in the X2 direction). The first guide mechanism GM1 bends the first flat spring portion FS1 so that the other end portion FS1S moves rearward (in the X2 direction), thereby enabling parallel movement of the first movable body 4 rearward (in the X2 direction). The second movable body 5 moves the predetermined distance rearward (in the X2 direction) along with the first movable body 4.

[0085] Furthermore, when the piezoelectric drive unit PD moves the movable-side member MB along the first movement direction (X-axis direction), the second piezoelectric drive unit PD2 repeatedly changes its state in synchronization with the change in the state of the first piezoelectric drive unit PD1, in the order of a lower convex state, a neutral state, an upper convex state (or a neutral state), a neutral state, a lower convex state, ... In the illustrated example, the second piezoelectric drive unit PD2 repeatedly changes its state in such a manner that it becomes a lower convex state when the first piezoelectric drive unit PD1 becomes an upper convex state, becomes a neutral state when the first piezoelectric drive unit PD1 becomes a front convex state, becomes an upper convex state (or a neutral state) when the first piezoelectric drive unit PD1 becomes a lower convex state, and becomes a neutral state when the first piezoelectric drive unit PD1 becomes a rear convex state. This is because while the driving force (first friction force) generated by the contact between the first driven component RC1 and the first contact member 9A acts on the first driven component RC1, the friction force (second friction force) associated with the contact between the second driven component RC2 and the second contact member 9B does not act on the second driven component RC2. In other words, this is because the second friction force is suppressed from acting as a force that counteracts the driving force (first friction force). Furthermore, when the first driven component RC1 and the first contact member 9A are not in contact, the second driven component RC2 is in contact with the second contact member 9B, supporting the movable member MB (second movable body 5).

[0086] Furthermore, after moving the first movable body 4 in the first movement direction (X-axis direction), the piezoelectric drive unit PD can utilize the restoring force of the bent first flat spring portion FS1 to return the first movable body 4 to its neutral position. Furthermore, the neutral position of the first movable body 4 is the position of the first movable body 4 when the first flat spring portion FS1 is undeflected. For example, the piezoelectric drive unit PD can return the first movable body 4 to its neutral position by changing the state of the first piezoelectric drive unit PD1 to a downwardly convex state and the state of the second piezoelectric drive unit PD2 to a downwardly convex state. This is because the first passive component RC1 is not in contact with the first contact member 9A, and the second passive component RC2 is not in contact with the second contact member 9B. In other words, the force holding the first movable body 4 in place (the first friction force) and the force holding the second movable body 5 in place (the second friction force) can be simultaneously eliminated.

[0087] like Figure 11As shown in the figure above, the second guide mechanism GM2, serving as the second guide spring component GS2, is formed from a metal plate and includes a second connecting portion CN2 and a pair of second flat-plate spring portions FS2. Specifically, the second guide mechanism GM2 includes a pair of second flat-plate spring portions FS2 that are spaced apart and opposed in parallel in the second movement direction (Y-axis direction) and extend in the first movement direction (X-axis direction). The plate surfaces of the pair of second flat-plate spring portions FS2 are perpendicular to the second movement direction (Y-axis direction). One end FS2F of each of the pair of second flat-plate spring portions FS2 in the first movement direction (X-axis direction) is secured to the second extension portion EL2 of the first movable body 4 via adhesive, while the other end FS2S of each of the pair of second flat-plate spring portions FS2 in the first movement direction (X-axis direction) is secured to the second movable body 5 via adhesive. Furthermore, the second connecting portion CN2 is configured to connect the one end FS2F of each of the pair of second flat-plate spring portions FS2. Specifically, the second connecting portion CN2 includes a second flat portion FP2 extending in the second movement direction (Y-axis direction) and having a plate surface perpendicular to the first movement direction (X-axis direction), and a second bent portion FD2 that bends inward approximately perpendicularly from the upper end of the second flat portion FP2. The inner side surface (right side surface) of one end FS2F of the left second flat spring portion FS2, the inner side surface (left side surface) of one end FS2F of the right second flat spring portion FS2, the inner side surface (front side surface) of the second flat portion FP2 of the second connecting portion CN2, and the lower side surface of the second bent portion FD2 of the second connecting portion CN2 are respectively fixed to the left side, right side, rear side, and upper side surface of the second extension portion EL2 using adhesive.

[0088] The second piezoelectric driving part PD2 changes its state repeatedly in the order of upper convex state, right convex state, lower convex state, left convex state, upper convex state, ..., to achieve a circular motion of clockwise rotation when viewed from the X1 side, as shown in FIG. Figure 11 As shown in the dot-dash line graph in the upper figure, the second movable body 5 can be moved to the right (Y2 direction). Figure 11 The dot-dash line in the figure above shows the positions of the second movable body 5 and the second guide mechanism GM2 when the second movable body 5 has moved a predetermined distance to the right (Y2 direction). The second guide mechanism GM2 can move the second movable body 5 parallel to the right (Y2 direction) by bending the second flat spring portion FS2 so that the other end portion FS2S moves to the right (Y2 direction).

[0089] In addition, the second piezoelectric driving unit PD2 repeatedly changes its state in the order of upper convex state, left convex state, lower convex state, right convex state, upper convex state, ..., to achieve counterclockwise circular motion when viewed from the X1 side, as shown in FIG. Figure 11As shown by the dotted line in the upper figure, the second movable body 5 can be moved to the left (Y1 direction). Figure 11 The dotted line in the upper figure shows the positions of the second movable body 5 and the second guide mechanism GM2 when the second movable body 5 has moved a predetermined distance to the left (Y1 direction). The second guide mechanism GM2 bends the second flat spring portion FS2 so that the other end portion FS2S moves to the left (Y1 direction), thereby enabling the second movable body 5 to move parallel to the left (Y1 direction).

[0090] Furthermore, when the piezoelectric drive unit PD moves the movable member MB (second movable body 5) in the second movement direction (Y-axis direction), the first piezoelectric drive unit PD1 does not need to change its state, as it does when moving the movable member MB (first movable body 4) in the first movement direction (X-axis direction). Specifically, the first piezoelectric drive unit PD1 can simply be in a neutral state. This is because, when the piezoelectric drive unit PD moves the movable member MB (first movable body 4) in the first movement direction (X-axis direction), the second movable body 5 must be moved along with the first movable body 4. In contrast, when the piezoelectric drive unit PD moves the movable member MB (second movable body 5) in the second movement direction (Y-axis direction), the first movable body 4 does not need to be moved along with the second movable body 5. In other words, this is because the piezoelectric drive unit PD (second piezoelectric drive unit PD2) can move only the second movable body 5 in the second movement direction (Y-axis direction), independent of the first movable body 4.

[0091] Furthermore, after moving the second movable body 5 in the second movement direction (Y-axis direction), the piezoelectric drive unit PD can utilize the restoring force of the bent second flat spring portion FS2 to restore the second movable body 5 to its neutral position. Furthermore, the neutral position of the second movable body 5 is the position of the second movable body 5 when the second flat spring portion FS2 is not bent. For example, the piezoelectric drive unit PD can restore the second movable body 5 to its neutral position by changing the state of the second piezoelectric drive unit PD2 to a downwardly convex state. This is because the second passive component RC2 can be made to be non-contact with the second contact component 9B. In other words, this is because the force (second frictional force) that holds the second movable body 5 in place can be eliminated.

[0092] like Figure 12As shown in the figure above, the third guide mechanism GM3, as the third guide spring component GS3, is formed of a metal plate and includes an upper leaf spring component PSU and a lower leaf spring component PSD. Specifically, the upper leaf spring component PSU and the lower leaf spring component PSD each include a pair of third flat spring portions FS3 that are separated from each other and opposed in parallel in the third movement direction (Z-axis direction) and extend along the first movement direction (X-axis direction). The plate surfaces of the pair of third flat spring portions FS3 are perpendicular to the third movement direction (Z-axis direction). The front connecting portion FE connecting the front ends of the pair of third flat spring portions FS3 is fixed to the third extension portion EL3 of the second movable body 5 by adhesive, and the rear connecting portion BE connecting the rear ends of the pair of third flat spring portions FS3 is fixed to the protrusion 2T (fourth extension portion EL4) of the optical element retaining component 2 by adhesive.

[0093] The third piezoelectric driving part PD3 can realize a clockwise circular motion when viewed from the Y2 side by repeatedly changing its state in the order of upper side convex state, rear side convex state, lower side convex state, front side convex state, upper side convex state, etc. Figure 12 As shown by the dotted line in the above figure, the optical element holding component 2 can be moved downward (Z2 direction). Figure 12 The dotted line in the figure above shows the positions of the optical element holding member 2 and the third guide mechanism GM3 when the optical element holding member 2 moves downward (in the Z2 direction) by a predetermined distance. The third guide mechanism GM3 bends the third flat spring portion FS3 so that the rear connecting portion BE moves downward (in the Z2 direction), thereby enabling the optical element holding member 2 to move parallel to the downward direction (in the Z2 direction).

[0094] In addition, the third piezoelectric driving unit PD3 can realize a counterclockwise circular motion when viewed from the Y2 side by repeatedly changing its state in the order of upper side convex state, front side convex state, lower side convex state, rear side convex state, upper side convex state, ..., as shown in FIG. Figure 12 As shown by the dotted line in the upper figure, the optical element holding component 2 can be moved upward (Z1 direction). Figure 12 The dotted line in the figure above shows the positions of the optical element holding member 2 and the third guide mechanism GM3 when the optical element holding member 2 moves upward (in the Z1 direction) by a predetermined distance. The third guide mechanism GM3 bends the third flat spring portion FS3 so that the rear connecting portion BE moves upward (in the Z1 direction), thereby enabling the optical element holding member 2 to move parallel to the upper direction (in the Z1 direction).

[0095] In addition, when the piezoelectric drive unit PD moves the movable side part MB (optical element holding part 2) along the third moving direction (Z-axis direction), the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 do not need to change their states. Specifically, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 can be changed to a neutral state. This is because, when the piezoelectric drive unit PD moves the movable side part MB (optical element holding part 2) along the third moving direction (Z-axis direction), there is no need to move the first movable body 4 and the second movable body 5 together with the optical element holding part 2. In other words, this is because the piezoelectric drive unit PD (third piezoelectric drive unit PD3) can move only the optical element holding part 2 along the third moving direction (Z-axis direction) independently of the first movable body 4 and the second movable body 5.

[0096] Furthermore, after the piezoelectric drive unit PD has moved the optical element retaining component 2 along the third movement direction (Z-axis direction), it can utilize the restoring force of the third flat spring portion FS3 in a bent state to restore the optical element retaining component 2 to its neutral position. Furthermore, the neutral position of the optical element retaining component 2 is the position of the optical element retaining component 2 when the third flat spring portion FS3 is not bent. For example, the piezoelectric drive unit PD can restore the optical element retaining component 2 to its neutral position by changing the state of the third piezoelectric drive unit PD3 to a forward convex state. This is because a state in which the third driven component RC3 and the third contact component 9C are not in contact can be achieved. In other words, this is because the force (third friction force) used to hold the optical element retaining component 2 in place can be eliminated.

[0097] In the optical element driving device 101 described above, the piezoelectric element 8 is connected to an external voltage supply source (control circuit) via a flexible wiring substrate 10 and a common flexible wiring substrate 11. Furthermore, when voltage is applied to the piezoelectric element 8, the piezoelectric element 8 (piezoelectric driving unit PD) undergoes bending vibration, generating a force that moves the movable member MB in a predetermined direction. This force is caused by the frictional force associated with the contact between the driven member RC attached to the movable member MB and the contact member 9 engaged with the piezoelectric element 8. The optical element driving device 101 utilizes this force to move the movable member MB in the Z-axis direction on the Z1 side (the subject side) of the imaging element IS, thereby enabling an automatic focus adjustment function. Specifically, the optical element driving device 101 can move the optical element holding member 2 (lens body LS) away from the imaging element IS for macro photography, and can move the optical element holding member 2 (lens body LS) toward the imaging element IS for infinity photography. Furthermore, the optical element driving device 101 can move the optical element holding member 2 (lens body LS) parallel to the XY plane to achieve a shake correction function.

[0098] As mentioned above, Figure 3 As shown, an optical element driving device 101 according to an embodiment of the present disclosure includes: a fixed-side member FB including a base member 3; an optical element holding member 2 having a through portion 2C extending vertically therethrough and capable of holding an optical element OE; a first movable body 4 disposed on one surface (top surface) of the base member 3 and movable relative to the fixed-side member FB (base member 3) in a first movement direction (X-axis direction) intersecting the vertical direction; a second movable body 5 disposed on one surface of the base member 3 and movable relative to the first movable body 4 in a second movement direction (Y-axis direction) intersecting the vertical direction and perpendicular to the first movement direction (X-axis direction), thereby supporting the optical element holding member 2; a first piezoelectric driver PD1 that moves the first movable body 4 in the first movement direction; and a second piezoelectric driver PD2 that moves the second movable body 5 in the second movement direction. Both the first and second piezoelectric drivers PD1 and PD2 are disposed on the base member 3.

[0099] In this structure, the first piezoelectric driver PD1 and the second piezoelectric driver PD2 are both provided in the same component (base component 3). Therefore, compared to a structure in which the first piezoelectric driver PD1 and the second piezoelectric driver PD2 are provided in separate components, this structure can improve the productivity of the optical element driving device 101. Furthermore, in this structure, it is easy to arrange at least a portion of the first piezoelectric driver PD1 and the second piezoelectric driver PD2 at the same height in the vertical direction. Therefore, this structure can achieve at least one of miniaturization and thinning of the optical element driving device 101.

[0100] like Figure 4 As shown, the first piezoelectric drive unit PD1 may include a first piezoelectric element 8A extending in the second movement direction (Y-axis direction) and a first contact member 9A fixed to one side (upper surface) of the first piezoelectric element 8A. The first movable body 4 may also include a first passive member RC1 capable of contacting the first contact member 9A. Furthermore, the second piezoelectric drive unit PD2 may include a second piezoelectric element 8B extending in the first movement direction (X-axis direction) and a second contact member 9B fixed to one side (upper surface) of the second piezoelectric element 8B. The second movable body 5 may also include a second passive member RC2 capable of contacting the second contact member 9B. Furthermore, the optical element driving device 101 may include a first force applying member 6A for bringing the first contact member 9A into contact with the first passive member RC1, and a second force applying member 6B for bringing the second contact member 9B into contact with the second passive member RC2. In this case, both the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 may be configured such that the contact portions of the first contact member 9A and the second contact member 9B face upward.

[0101] This structure has the effect of improving the productivity of the optical element driving device 101. This is because the first piezoelectric driving portion PD1 and the second piezoelectric driving portion PD2 both have the contact portions of the first contact member 9A and the second contact member 9B facing upward, thereby allowing the first piezoelectric driving portion PD1 and the second piezoelectric driving portion PD2 to be assembled to the base member 3 from the same side (for example, the upper side or the lower side).

[0102] like Figure 4 As shown, the optical element driving device 101 may also include a first force applying member 6A, which is partially fixed to the base member 3 and causes the first contact member 9A of the first piezoelectric driving portion PD1 and the first passive member RC1 to contact each other in a manner that pushes against each other. Furthermore, the optical element driving device 101 may also include a second force applying member 6B, which is partially fixed to the base member 3 and causes the second contact member 9B of the second piezoelectric driving portion PD2 and the second passive member RC2 to contact each other in a manner that pushes against each other. In this case, the first piezoelectric driving portion PD1 may be supported on the base member 3 via the first force applying member 6A. Alternatively, the second piezoelectric driving portion PD2 may be supported on the base member 3 via the second force applying member 6B.

[0103] This structure has the effect of further improving the productivity of the optical element driving device 101. This is because the unit to which the first piezoelectric driving unit PD1 and the first force member 6A are fixed can be assembled to the base member 3 (base 3B), and the unit to which the second piezoelectric driving unit PD2 and the second force member 6B are fixed can be assembled to the base member 3 (base 3B). In other words, the first piezoelectric driving unit PD1 and the first force member 6A can be unitized (integrated), and the second piezoelectric driving unit PD2 and the second force member 6B can be unitized (integrated). Moreover, in this case, the unit to which the first piezoelectric driving unit PD1 and the first force member 6A are fixed, and the unit to which the second piezoelectric driving unit PD2 and the second force member 6B are fixed are assembled to the base member 3 (base 3B) from the same side (for example, the upper side or the lower side).

[0104] like Figure 5As shown, the first piezoelectric driver PD1 may include a first flexible wiring substrate 10A having a connection portion PT connected to the electrode ED of the first piezoelectric element 8A and fixed to the other surface of the first piezoelectric element 8A. Furthermore, the first biasing member 6A may be formed of a metal plate such as a leaf spring and support the first piezoelectric driver PD1 at two locations separated along the second movement direction (Y-axis direction) (the location of the first protrusion SP1 and the location of the second protrusion SP2). Furthermore, the second piezoelectric driver PD2 may include a second flexible wiring substrate 10B having a connection portion PT connected to the electrode ED of the second piezoelectric element 8B and fixed to the other surface of the second piezoelectric element 8B. Furthermore, the second biasing member 6B may be formed of a metal plate such as a leaf spring and support the second piezoelectric driver PD2 at two locations separated along the first movement direction (X-axis direction) (the location of the first protrusion SP1 and the location of the second protrusion SP2).

[0105] This structure utilizes the flexible wiring substrate 10, making it easier to apply voltage to the piezoelectric element 8. This is because the conductive path is simplified compared to a case where the flexible wiring substrate 10 is not used. Furthermore, this structure provides the following advantages: the flexible wiring substrate 10 follows the shape change of the piezoelectric element 8 as it flexes (deforms) due to the application of voltage to the piezoelectric element 8, thus preventing components constituting the conductive path from interfering with the deformation of the piezoelectric element 8.

[0106] like Figure 6 As shown, the first piezoelectric element 8A may also have two portions (a first portion 8A1 and a second portion 8A2) arranged side by side in the first direction of movement (the X-axis direction), with two electrodes ED formed thereon so that a voltage can be applied independently to each of these portions. In the illustrated example, the first portion 8A1 has a first electrode ED1 and a second electrode ED2, while the second portion 8A2 has a first electrode ED11 and a second electrode ED12. Similarly, the second piezoelectric element 8B may also have two portions arranged side by side in the second direction of movement, with two electrodes ED formed thereon so that a voltage can be applied independently to each of these portions. The same applies to the third piezoelectric element 8C.

[0107] According to this structure, the first piezoelectric element 8A, the second piezoelectric element 8B and the third piezoelectric element 8C can respectively realize bending vibrations in two directions perpendicular to the extension direction (up and down movement, left and right movement or front and back movement) and circular motion as a combination of their bending vibrations.

[0108] like Figure 3As shown, the base member 3 may also have an opening 3K. Furthermore, the extension direction (Y-axis direction) of the first piezoelectric drive unit PD1 and the extension direction (X-axis direction) of the second piezoelectric drive unit PD2 may also be perpendicular. In this case, when viewed in the vertical direction, one of the first and second piezoelectric drive units PD1 and PD2 (in the illustrated example, the second piezoelectric drive unit PD2) may be arranged on an imaginary straight line VL extending along the extension direction of the other of the first and second piezoelectric drive units PD1 and PD2 (in the illustrated example, the first piezoelectric drive unit PD1).

[0109] This structure improves the space utilization within the housing HS because, compared to a case where one of the first piezoelectric driver PD1 and the second piezoelectric driver PD2 is not located on the imaginary straight line VL, the first piezoelectric driver PD1 and the second piezoelectric driver PD2 can be disposed in a relatively small area on the upper surface of the base portion 3B of the base member 3.

[0110] like Figure 3 As shown, the optical element driving device 101 may also include a first guide mechanism GM1 that guides the first movable body 4 in the first movement direction (X-axis direction) and a second guide mechanism GM2 that guides the second movable body 5 in the second movement direction (Y-axis direction). Furthermore, the first guide mechanism GM1 may include a pair of first flat spring portions FS1 (first parallel springs) that are spaced apart from each other and face each other in parallel in the first movement direction and extend in the second movement direction. In this case, each plate surface of the pair of first flat spring portions FS1 may be perpendicular to the first movement direction, one end portion FS1F of each pair of first flat spring portions FS1 in the second movement direction may be fixed to the fixed-side member FB, and the other end portion FS1S of each pair of first flat spring portions FS1 in the second movement direction may be fixed to the first movable body 4. Furthermore, the second guide mechanism GM2 may include a pair of second flat spring portions FS2 (second parallel springs) that are spaced apart from each other and face each other in parallel in the second movement direction and extend in the first movement direction. In this case, it may also be that the plate surface of each pair of second flat-plate-shaped spring parts FS2 is perpendicular to the second moving direction, one end FS2F of each pair of second flat-plate-shaped spring parts FS2 in the first moving direction is fixed to the first movable body 4, and the other end FS2S of each pair of second flat-plate-shaped spring parts FS2 in the first moving direction is fixed to the second movable body 5.

[0111] This structure provides the following effects: the first guide mechanism GM1 including the first parallel springs can appropriately and stably guide the movement of the first movable body 4 in the first movement direction. Furthermore, this structure provides the following effects: the second guide mechanism GM2 including the second parallel springs can appropriately and stably guide the movement of the second movable body 5 in the second movement direction.

[0112] At least one of the pair of first flat spring portions FS1 and the pair of second flat spring portions FS2 may be integrally formed. In addition, the pair of first flat spring portions FS1 may be formed as separate components, and the pair of second flat spring portions FS2 may be formed as separate components.

[0113] The structure in which the pair of first flat-plate-shaped spring portions FS1 are integrally formed achieves the effect of reducing the number of components compared to a structure in which the pair of first flat-plate-shaped spring portions FS1 are formed as separate components. Furthermore, the structure in which the pair of first flat-plate-shaped spring portions FS1 are integrally formed reduces mounting errors relative to at least one of the base member 3 and the first movable body 4, compared to a structure in which the pair of first flat-plate-shaped spring portions FS1 are formed as separate components. This improves the positional accuracy of the optical element driving device 101 (the positional accuracy of the optical element OE driven by the optical element driving device 101).

[0114] Furthermore, the configuration in which the pair of second flat-plate-shaped spring portions FS2 are integrally formed can reduce the number of components compared to a configuration in which the pair of second flat-plate-shaped spring portions FS2 are formed as separate components. Furthermore, the configuration in which the pair of second flat-plate-shaped spring portions FS2 are integrally formed can suppress mounting errors relative to at least one of the first movable body 4 and the second movable body 5, thereby improving the positional accuracy of the optical element driving device 101.

[0115] Alternatively, the pair of first flat spring portions FS1 and the pair of second flat spring portions FS2 may be integrally formed. Alternatively, the pair of first flat spring portions FS1 and the pair of second flat spring portions FS2 may be formed as separate components.

[0116] The structure in which the pair of first flat spring portions FS1 and the pair of second flat spring portions FS2 are integrally formed can reduce the number of components compared to a structure in which the pair of first flat spring portions FS1 and the pair of second flat spring portions FS2 are formed as separate components. Furthermore, the structure in which the pair of first flat spring portions FS1 and the pair of second flat spring portions FS2 are integrally formed can suppress mounting errors relative to at least one of the base member 3, the first movable body 4, and the second movable body 5, thereby improving the positional accuracy of the optical element driving device 101.

[0117] like Figure 3 As shown in FIG. 1 , the first movable body 4 may also include a first extension portion EL1 extending along the first moving direction (X-axis direction) and a second extension portion EL2 extending along the second moving direction. In addition, the second movable body 5 may also include a third extension portion EL3 extending along the second moving direction (Y-axis direction). In this case, as shown in FIG. Figure 9 As shown, the second extension portion EL2 and the third extension portion EL3 may be at least partially located at the same height in the vertical direction and may be separated in the first moving direction (X-axis direction) via the optical element holding member 2. Figure 3 As shown, one end FS2F of each of the pair of second flat spring portions FS2 in the first moving direction may be fixed to the second extension portion EL2, and the other end FS2S of each of the pair of second flat spring portions FS2 in the first moving direction may be fixed to the third extension portion EL3. Figure 9 As shown in FIG. 1 , the second extension portion EL2 extends at a position higher than the first extension portion EL1 in the vertical direction. Figure 8 As shown, one end portion of the third extension portion EL3 of the second movable body 5, namely the right end portion RE, is arranged on the first extension portion EL1 of the first movable body 4. Figure 9 As shown in the figure below, the upper end surface of the second extension portion EL2 and the upper end surface of the third extension portion EL3 are located at the same height H1 relative to the level of the lower surface of the base portion 3B of the base member 3, and the lower end surface of the second extension portion EL2 and the lower end surface of the third extension portion EL3 are located at the same height H2 relative to the level of the lower surface of the base portion 3B of the base member 3. In addition, the height dimension HT1 of the first extension portion EL1, the height dimension HT2 of the second extension portion EL2, and the height dimension HT3 of the third extension portion EL3 are all the same.

[0118] This structure has an effect of preventing the length of the optical element driving device 101 in the vertical direction (Z-axis direction) from increasing, compared to a structure in which the second extension portion EL2 and the third extension portion EL3 are not located at the same height in the vertical direction.

[0119] like Figure 11 As shown in the following figure, the base member 3 may also include a base portion 3B having an opening 3K and a protrusion 3P protruding upward (toward the side where the first movable body 4 is located) from the base portion 3B. In this case, one end portion FS1F of each of the pair of first flat spring portions FS1 in the second movement direction (Y-axis direction) may be fixed to the protrusion 3P. In the illustrated example, the left end portion, or one end portion FS1F, of the first flat spring portion FS1 on the front side (X1 side) is fixed to the left front protrusion 3PFL with an adhesive, while the left end portion, or one end portion FS1F, of the first flat spring portion FS1 on the rear side (X2 side) is fixed to the left rear protrusion 3PBL with an adhesive.

[0120] This structure has an effect of facilitating assembly compared to a structure without the protrusion 3P, that is, facilitating attachment of the one end portions FS1F of the pair of first flat-plate-shaped spring portions FS1 to the base member 3 .

[0121] In addition, if Figure 3 and Figure 11 As shown in the figure below, each of the one end portions FS1F of the pair of first flat spring portions FS1 may also have a third bent portion FD3 that bends inward approximately perpendicularly from its left end portion. Furthermore, the third bent portion FD3 may have a fourth bent portion FD4 that bends to the right from its upper end portion. Furthermore, the third bent portion FD3 and the fourth bent portion FD4 may each be fixed to the protrusion 3P using an adhesive. In the illustrated example, the left end portion, i.e., the one end portion FS1F, of the first flat spring portion FS1 on the front side (X1 side) has the third bent portion FD3 and the fourth bent portion FD4, while the left end portion, i.e., the one end portion FS1F, of the first flat spring portion FS1 on the rear side (X2 side) has the third bent portion FD3 but does not have the fourth bent portion FD4.

[0122] This structure has an effect of improving the bonding strength between the one end portions FS1F of each of the pair of first flat spring portions FS1 and the protrusion 3P, compared to a structure without the third bent portion FD3 and the fourth bent portion FD4 .

[0123] In addition, if Figure 3 and Figure 11As shown in the above figure, each of the pair of second flat spring portions FS2 may have a fifth bent portion FD5 at its other end portion FS2S, bent inwardly and approximately perpendicularly from its front end portion. Furthermore, the fifth bent portion FD5 may have a sixth bent portion FD6 bent rearward from its upper end portion. Furthermore, each of the fifth and sixth bent portions FD5 and FD6 may be secured to the third extension portion EL3 of the second movable body 5 using an adhesive.

[0124] This structure has an effect of improving the bonding strength between the other end portions FS2S of the pair of second flat spring portions FS2 and the third extension portion EL3 , compared to a structure without the fifth bent portion FD5 and the sixth bent portion FD6 .

[0125] like Figures 7 to 10 As shown, the base portion 3B of the base member 3 and the first movable body 4 can be separated from each other in the vertical direction. Furthermore, the first movable body 4 and the second movable body 5 can be separated from each other in the vertical direction. In other words, the first movable body 4 can be supported by the first guide mechanism GM1 without contacting the base portion 3B of the base member 3. Furthermore, the second movable body 5 can be supported by the second guide mechanism GM2 without contacting either the base portion 3B of the base member 3 or the first movable body 4.

[0126] This structure can reduce the influence of friction caused by contact between components. In addition, this structure can reduce the thrust of the drive unit (piezoelectric drive unit PD) required to move the movable side member MB by at least the amount of friction.

[0127] like Figure 12 As shown, the second movable body 5 may also support the optical element holding member 2 via an upper leaf spring member PSU and a lower leaf spring member PSD. These upper leaf spring member PSU and lower leaf spring member PSD support the optical element holding member 2 so that it can move in the third movement direction (Z-axis direction). In this case, the second movable body 5 may also be provided with a third piezoelectric drive unit PD3 that moves the optical element holding member 2 in the third movement direction (Z-axis direction). In the illustrated example, the third piezoelectric drive unit PD3 is mounted on a third force-applying member 6C fixed to the second movable body 5.

[0128] This structure enables, for example, an autofocus function in a camera module CM in which the optical element OE is a lens LS. Furthermore, this structure enables all three-axis movement of the lens LS to be achieved using piezoelectric technology, thereby preventing magnetic influences from affecting adjacent devices (e.g., devices including magnets and coils).

[0129] In addition, the central portion of the second piezoelectric drive unit PD2 in the extension direction (X-axis direction) can also be configured to be able to achieve vertical motion and circular motion. Figure 6 The first piezoelectric element 8A (first piezoelectric driving unit PD1) described above is configured to achieve vertical motion and circular motion. Specifically, the second piezoelectric element 8B may be configured to achieve vertical motion when the first movable body 4 is moved along the first moving direction (X-axis direction), and to achieve circular motion when the second movable body 5 is moved along the second moving direction (Y-axis direction).

[0130] With this structure, the piezoelectric drive unit PD can move the second piezoelectric element 8B vertically while the first movable body 4 is moving in the first movement direction (X-axis direction) through the circular motion of the first piezoelectric element 8A, even without moving the second movable body 5 in the second movement direction (Y-axis direction) through the circular motion of the second piezoelectric element 8B. Therefore, by causing the second piezoelectric element 8B to move vertically in sync with the circular motion of the first piezoelectric element 8A, the piezoelectric drive unit PD can prevent the movement of the second movable body 5, which moves along with the first movable body 4 in the first movement direction (X-axis direction), from being obstructed by the second piezoelectric drive unit PD2. This is because the second contact member 9B of the second piezoelectric drive unit PD2 can be moved away from the second passive member RC2 at the timing when the circular motion of the first piezoelectric element 8A causes the second movable body 5 to move along with the first movable body 4 in the first movement direction (X-axis direction). In other words, a non-contact state between the second contact member 9B and the second passive member RC2 can be achieved.

[0131] like Figure 3 As shown, the first guide mechanism GM1 may also include a first guide spring component GS1 formed from a metal plate. In this case, the first guide spring component GS1 may also include a first connecting portion CN1 and a pair of first flat-plate spring portions FS1. Furthermore, the first connecting portion CN1 may be configured to connect at least one of the first end portions FS1F of the pair of first flat-plate spring portions FS1 or the other end portions FS1S of the pair of first flat-plate spring portions FS1. Alternatively, the pair of first flat-plate spring portions FS1 and the first connecting portion CN1 may be integrally formed. In the illustrated example, the first connecting portion CN1 is configured to connect the other end portions FS1S of the pair of first flat-plate spring portions FS1. Alternatively, the pair of first flat-plate spring portions FS1 and the first connecting portion CN1 are integrally formed.

[0132] The structure in which the pair of first flat-plate spring portions FS1 and the first connecting portion CN1 are integrally formed can reduce the number of components compared to a structure in which the pair of first flat-plate spring portions FS1 and the first connecting portion CN1 are formed as separate components. Furthermore, the structure in which the pair of first flat-plate spring portions FS1 and the first connecting portion CN1 are integrally formed can suppress mounting errors relative to at least one of the base member 3 and the first movable body 4, thereby improving the positional accuracy of the optical element driving device 101.

[0133] like Figure 3 As shown, the first connecting portion CN1 may include a first flat plate portion FP1 extending in the first movement direction (X-axis direction) and having a plate surface perpendicular to the second movement direction (Y-axis direction). In this case, the first movable body 4 may include a first extension portion EL1 extending in the first movement direction, and the first connecting portion CN1 may be fixed to the first extension portion EL1.

[0134] The first guide mechanism GM1 including the first connection portion CN1 can be easily manufactured because the first guide mechanism GM1 including the first connection portion CN1 can be easily formed by bending a metal plate.

[0135] like Figure 3 As shown, the first connecting portion CN1 may also include a first bent portion FD1 that bends approximately perpendicularly from the vertical end of the first flat-plate portion FP1. Furthermore, the first bent portion FD1 may be fixed to the first extension portion EL1. In the illustrated example, the first connecting portion CN1 includes a first bent portion FD1 that bends approximately perpendicularly inward from the lower end of the first flat-plate portion FP1. The first bent portion FD1 is fixed to the first extension portion EL1 while being positioned by the first extension portion EL1.

[0136] This structure improves the rigidity of the first connecting portion CN1. Furthermore, the first bent portion FD1 can be used to position the first guide mechanism GM1 and the first movable body 4. Furthermore, the structure of bending the lower end rather than the upper end prevents interference between the second flat spring portion FS2 and the first connecting portion CN1. However, the first connecting portion CN1 may also include a bent portion that bends approximately perpendicularly inward from the upper end of the first flat-plate-shaped portion FP1 and a bent portion that bends approximately perpendicularly inward from the lower end of the first flat-plate-shaped portion FP1. This further improves the rigidity of the first connecting portion CN1.

[0137] like Figure 3As shown, the second guide mechanism GM2 may also include a second guide spring component GS2 formed from a metal plate. In this case, the second guide spring component GS2 may also include a second connecting portion CN2 and a pair of second flat-plate spring portions FS2. Furthermore, the second connecting portion CN2 may be configured to connect at least one of the respective one ends FS2F of the pair of second flat-plate spring portions FS2 or the respective other ends FS2S of the pair of second flat-plate spring portions FS2. Alternatively, the pair of second flat-plate spring portions FS2 and the second connecting portion CN2 may be integrally formed. In the illustrated example, the second connecting portion CN2 is configured to connect the respective one ends FS2F of the pair of second flat-plate spring portions FS2. Alternatively, the pair of second flat-plate spring portions FS2 and the second connecting portion CN2 are integrally formed.

[0138] The structure in which the pair of second flat-plate spring portions FS2 and the second connecting portion CN2 are integrally formed can reduce the number of components compared to a structure in which the pair of second flat-plate spring portions FS2 and the second connecting portion CN2 are formed as separate components. Furthermore, the structure in which the pair of second flat-plate spring portions FS2 and the second connecting portion CN2 are integrally formed can suppress mounting errors relative to at least one of the first movable body 4 and the second movable body 5, thereby improving the positional accuracy of the optical element driving device 101.

[0139] like Figure 3 As shown, the second connecting portion CN2 may also include a second flat plate-shaped portion FP2 extending in the second movement direction (Y-axis direction) and having a plate surface perpendicular to the first movement direction (X-axis direction). In this case, the first movable body 4 may also include a second extension portion EL2 extending in the second movement direction, and the second connecting portion CN2 may be fixed to the second extension portion EL2 or the second movable body 5. In the illustrated example, the second connecting portion CN2 is fixed to the second extension portion EL2.

[0140] The second guide mechanism GM2 including the second connection portion CN2 can be easily manufactured because the second guide mechanism GM2 including the second connection portion CN2 can be easily formed by bending a metal plate.

[0141] like Figure 3As shown, the second connecting portion CN2 may also include a second bent portion FD2 that bends approximately perpendicularly from the vertical end of the second flat-plate-shaped portion FP2. Furthermore, the second bent portion FD2 may be fixed to the second extension portion EL2 or the second movable body 5. In the illustrated example, the second connecting portion CN2 includes a second bent portion FD2 that bends approximately perpendicularly inward from the upper end of the second flat-plate-shaped portion FP2. The second bent portion FD2 is fixed to the second extension portion EL2 while being positioned by the second extension portion EL2 of the first movable body 4.

[0142] This structure has the effect of increasing the rigidity of the second connecting portion CN2. Furthermore, this structure allows the second bent portion FD2 to be used for positioning between the second guide mechanism GM2 and the movable side member MB (first movable body 4). Furthermore, the structure of bending the upper end portion rather than the lower end portion prevents interference between the first flat spring portion FS1 and the second connecting portion CN2. However, the second connecting portion CN2 may also include a bent portion that bends approximately perpendicularly inward from the upper end portion of the second flat-plate-shaped portion FP2, and a bent portion that bends approximately perpendicularly inward from the lower end portion of the second flat-plate-shaped portion FP2. This is because the rigidity of the second connecting portion CN2 is further increased.

[0143] like Figure 3 and Figure 11 As shown, the first guide spring component GS1 and the second guide spring component GS2 can also be connected to each other through the third connecting portion CN3 and formed integrally. In the example shown in the figure, the other end FS1S of the first flat spring portion FS1 located at the rear end (end on the X2 side) and rear side (X2 side) of the first connecting portion CN1 (first flat portion FP1) and the right end (end on the Y2 side) and one end FS2F of the second flat spring portion FS2 located at the right end (end on the Y2 side) and right side (Y2 side) of the second connecting portion CN2 (second flat portion FP2) are connected to each other through the third connecting portion CN3 having a roughly L-shaped cross-section when viewed from above, and the first guide mechanism GM1 (first guide spring component GS1) and the second guide mechanism GM2 (second guide spring component GS2) are formed integrally to constitute one component. In addition, in Figure 3 In FIG. 1 , for the sake of clarity, the third connection portion CN3 is marked with a dot pattern.

[0144] The structure in which the first guide spring member GS1 and the second guide spring member GS2 are integrally formed can reduce the number of components compared to a structure in which the first guide spring member GS1 and the second guide spring member GS2 are formed as separate components. Furthermore, the structure in which the first guide spring member GS1 and the second guide spring member GS2 are integrally formed can suppress mounting errors relative to at least one of the base member 3, the first movable body 4, and the second movable body 5, compared to a structure in which the first guide spring member GS1 and the second guide spring member GS2 are formed as separate components. This can improve the positional accuracy of the optical element driving device 101.

[0145] In addition, if Figure 11 As shown, the flat spring portion FS having a pair of first flat spring portions FS1 and a pair of second flat spring portions FS2 may also be formed so that its outer shape becomes a substantially rectangular shape when viewed from above in the vertical direction. In this case, it may also be as shown in FIG. Figure 11 As shown in the figure below, the first connecting portion CN1 connects the other end portions FS1S of the pair of first flat spring portions FS1. Figure 11 As shown in the figure above, the second connecting portion CN2 connects one end portion FS2F of each of a pair of second flat spring portions FS2, as shown in FIG. Figure 11 As shown in the following figure, the third connecting portion CN3 is provided at a position corresponding to one of the four corners of the generally rectangular shape where one end of the first connecting portion CN1 and one end of the second connecting portion CN2 are arranged. In the illustrated example, the flat spring portion FS has a generally rectangular outer shape with four corners CR (first corner CR1 to fourth corner CR4), and the third connecting portion CN3 is provided at a position corresponding to the fourth corner CR4.

[0146] This structure brings about the following effect: compared with the structure in which the third connecting portion CN3 is arranged at a position corresponding to the first corner portion CR1, the second corner portion CR2 or the third corner portion CR3, it is possible to suppress the elastic deformation of a flat spring portion FS (for example, the first flat spring portion FS1) from being affected by the elastic deformation of other flat spring portions FS (for example, the second flat spring portion FS2).

[0147] The preferred embodiments of the present disclosure have been described in detail above. However, the present invention is not limited to the above-described embodiments. Various modifications or substitutions can be applied to the above-described embodiments without departing from the scope of the present invention. In addition, the various features described with reference to the above-described embodiments may be appropriately combined as long as they are not technically contradictory.

[0148] For example, in the above-described embodiment, the first biasing member 6A, which causes the first contact member 9A of the first piezoelectric driver PD1 and the first passive member RC1 to contact each other in a manner of pushing and pressing each other, is composed of a single member formed of a metal plate. However, this may also be composed of a combination of multiple metal plates. The same applies to the second biasing member 6B and the third biasing member 6C.

[0149] In addition, in the above-mentioned embodiment, the first force member 6A and the second force member 6B are assembled to the base member 3 (base 3B) from the upper side of the base member 3, but it is also possible to provide a through portion in the base member 3 (base 3B) so that the first force member 6A and the second force member 6B can be assembled to the base member 3 (base 3B) from the lower side of the base member 3.

[0150] In addition, in the above-described embodiment, the pair of first flat-plate spring portions FS1 constituting the first guide mechanism GM1 are connected by the first connecting portion CN1 (first flat-plate portion FP1) to form an integral unit. However, the pair of first flat-plate spring portions FS1 can also be formed as separate components. In this case, the pair of first flat-plate spring portions FS1 are preferably formed from metal plates having the same shape and size. This is because it is possible to suppress an increase in the number of component types. The same applies to the pair of second flat-plate spring portions FS2 constituting the second guide mechanism GM2; they can also be formed from different components (metal plates) having the same shape and size. Furthermore, when the pair of first flat-plate spring portions FS1 and the pair of second flat-plate spring portions FS2 are formed from separate components, they are preferably formed from strips of metal plates. This is because it is unnecessary to perform bending processing on the components, which can suppress manufacturing costs.

[0151] Here, reference Figure 13 and Figure 14 , an optical element driving device 101A as another structural example of the optical element driving device 101 will be described. Figure 13 is an exploded perspective view of the optical element driving device 101A, and Figure 2 In addition, Figure 14 This is an exploded perspective view of the optical element holding member 2, the base member 3, the first movable body 4, the second movable body 5, and the guide mechanism GM that constitute the optical element driving device 101A. Figure 3 correspond.

[0152] The optical element driving device 101A is different from the optical element driving device 101 in that the through portion 3R (see FIG. Figure 14 ), the first force applying member 6A and the second force applying member 6B are assembled to the base member 3 (base 3B) from the lower side of the base member 3. Specifically, in the optical element driving device 101A, as shown in FIG. Figure 13As shown, the first force applying member 6A and the second force applying member 6B are respectively accommodated in the first through portion 3R1 and the second through portion 3R2 provided on the base 3B. Figure 4 As shown, the first urging member 6A and the second urging member 6B are respectively accommodated in the first recess 3Q1 and the second recess 3Q2 provided on the base 3B.

[0153] The difference between the optical element driving device 101A and the optical element driving device 101 is that the first guide mechanism GM1 includes a pair of strip-shaped metal plates, namely, first flat spring portions FS1 as the first guide spring member GS1. This is because, in the optical element driving device 101, Figure 3 As shown, a pair of first flat spring portions FS1 are connected by a first connecting portion CN1. Furthermore, the optical element driving device 101A differs from the optical element driving device 101 in that the second guide mechanism GM2 includes a pair of strip-shaped metal plates, namely, second flat spring portions FS2, as the second guide spring member GS2. This is because, in the optical element driving device 101, Figure 3 As shown, the pair of second flat plate-shaped spring portions FS2 are connected by a second connection portion CN2.

[0154] Specifically, in the optical element driving device 101A, the pair of strip-shaped metal plates, namely the first flat spring portions FS1, are constructed from metal plates having the same shape and size. The pair of strip-shaped metal plates, namely the second flat spring portions FS2, are also constructed from metal plates having the same shape and size. Furthermore, the metal plates constituting the first flat spring portions FS1 and the metal plates constituting the second flat spring portions FS2 are constructed to have the same shape and size. In other words, the four strip-shaped metal plates are constructed to have the same shape and size.

[0155] Furthermore, one end FS1F of each of the pair of first flat-plate-shaped spring portions FS1 in the second moving direction (Y-axis direction) is adhesively fixed to the fixed-side member FB (protrusion 3P of the base member 3), and the other end FS1S of each of the pair of first flat-plate-shaped spring portions FS1 in the second moving direction (Y-axis direction) is adhesively fixed to the first extension portion EL1 of the first movable body 4. Similarly, one end FS2F of each of the pair of second flat-plate-shaped spring portions FS2 in the first moving direction (X-axis direction) is adhesively fixed to the second extension portion EL2 of the first movable body 4, and the other end FS2S of each of the pair of second flat-plate-shaped spring portions FS2 in the first moving direction (X-axis direction) is adhesively fixed to the third extension portion EL3 of the second movable body 5.

[0156] Furthermore, in the above-described embodiment, the piezoelectric driver PD is used as the driver, but the guide mechanism GM can also be applied to an optical element driving device using a voice coil motor or a shape memory alloy wire as the driver.

[0157] This application claims priority based on Japanese Patent Application No. 2023-007476, filed on January 20, 2023, the entire contents of which are incorporated herein by reference.

[0158] Description of Reference Numerals

[0159] 1…cover component; 1A…outer wall portion; 1A1…first side plate portion; 1A2…second side plate portion; 1A3…third side plate portion; 1A4…fourth side plate portion; 1B…top plate portion; 1K…opening; 1S…accommodation portion; 2…optical element holding component; 2C…through portion; 2T…protrusion; 2U…U-shaped groove; 3…base component; 3B…base; 3K…opening; 3P…protrusion; 3PBL…left rear protrusion; 3PFL…left front protrusion; 3Q…recess; 3Q1…first recess; 3Q2…second recess; 3R…through portion; 3R1…first through portion; 3R2…second through portion; 4…first movable body; 4U…U-shaped groove; 5…second movable body; 5C…through hole; 5T…mounting portion; 5U…U Slot; 6…Force-applying member; 6A…First force-applying member; 6AE…Elastic deformation portion; 6AE1…First elastic deformation portion; 6AE2…Second elastic deformation portion; 6AF…Fixed portion; 6AF1…First elastic deformation portion; 6AF2…Second elastic deformation portion; 6AS…Supporting portion; 6B…Second force-applying member; 6BE…Elastic deformation portion; 6BE1…First elastic deformation portion; 6BE2…Second elastic deformation portion; 6BF…Fixed portion; 6BF1…First elastic deformation portion; 6BF2…Second elastic deformation portion; 6BS…Supporting portion; 6C…Third force-applying member; 6CE…Elastic deformation portion; 6CE1…First elastic deformation portion; 6CE2…Second elastic deformation portion; 6CF…Fixed portion; 6CF1…First elastic deformation portion; 6CF2… Second fixing portion; 6CS…support portion; 8…piezoelectric element; 8A…first piezoelectric element; 8A1…first portion; 8A2…second portion; 8AX…first rotation axis; 8B…second piezoelectric element; 8BX…second rotation axis; 8C…third piezoelectric element; 8CX…third rotation axis; 9…contact member; 9A…first contact member; 9AS…surface; 9B…second contact member; 9C…third contact member; 10…flexible wiring substrate; 10A…first flexible wiring substrate; 10AE…extension; 10AJ…joining portion; 10B…second flexible wiring substrate; 10BE…extension; 10BJ…joining portion; 10C…third flexible wiring substrate; 10CE…extension; 10CJ…joining portion; 11…common flexible wiring substrate Wiring substrate; 101, 101A…optical element driving device; AD…adhesive; BE…rear connecting portion; CM…camera module; CN1…first connecting portion; CN2…second connecting portion; CN3…third connecting portion; CP…center point; CR…corner; CR1…first corner; CR2…second corner; CR3…third corner; CR4…fourth corner; CT…center portion; ED…electrode; ED1, ED11…first electrode; ED2, ED12…second electrode; EL1…first extension; EL2…second extension; EL3…third extension; EL4…fourth extension; FB…fixed-side member; FD1…first bent portion; FD2…second bent portion; FD3…third bent portion;FD4…fourth bent portion; FD5…fifth bent portion; FD6…sixth bent portion; FE…front connecting portion; FP1…first flat plate portion; FP2…second flat plate portion; FS…flat spring portion; FS1…first flat plate spring portion; FS1F…one end portion; FS1S…other end portion; FS2…second flat plate spring portion; FS2F…one end portion; FS2S…other end portion; GM…guide mechanism; GM1…first guide mechanism; GM2…second guide mechanism; GM3…third guide mechanism; GS1…first guide spring member; GS2…second guide spring member; GS3…third guide spring member; HS…housing; IS… Image pickup element; LS…lens body; MB…movable side member; ND…node; ND1…first node; ND2…second node; OA…optical axis; OE…optical element; PD…piezoelectric drive unit; PD1…first piezoelectric drive unit; PD2…second piezoelectric drive unit; PD3…third piezoelectric drive unit; PS…leaf spring member; PSD…lower leaf spring member; PSU…upper leaf spring member; PT…connecting portion; RC…actuated member; RC1…first actuated member; RC2…second actuated member; RC3…third actuated member; RE…right end portion; SP1…first protrusion; SP2…second protrusion; TM…terminal portion; VL…virtual straight line; ZN…connecting region;

Claims

1. An optical element driving device comprising: a fixed side member including a base member; An optical element holding component having a through portion extending vertically and capable of holding the optical element; a first movable body, disposed on one surface of the base member and movable relative to the fixed-side member in a first moving direction intersecting the vertical direction; a second movable body disposed on one surface side of the base member, movable relative to the first movable body in a second moving direction intersecting the up-down direction and perpendicular to the first moving direction, and supporting the optical element holding member; a first driving unit for moving the first movable body in the first moving direction; a second driving unit for moving the second movable body in the second moving direction; a first guiding mechanism, guiding the first movable body to move in the first moving direction; as well as a second guiding mechanism for guiding the second movable body to move in the second moving direction; It is characterized in that The first guide mechanism includes a pair of first flat spring portions that are spaced apart from each other and face each other in parallel in the first moving direction and extend in the second moving direction. The plate surfaces of the pair of first flat spring parts are perpendicular to the first moving direction. One end portion of each of the pair of first flat spring portions in the second moving direction is fixed to the fixed-side member. The other end portion of each of the pair of first flat spring portions in the second moving direction is fixed to the first movable body. The second guide mechanism includes a pair of second flat spring portions that are spaced apart from each other and face each other in parallel in the second moving direction and extend in the first moving direction. The plate surfaces of the pair of second flat spring parts are perpendicular to the second moving direction. One end portion of each of the pair of second flat spring portions in the first moving direction is fixed to the first movable body. The other end portion of each of the pair of second flat-plate spring portions in the first moving direction is fixed to the second movable body.

2. The optical element driving device according to claim 1, wherein: At least one of the pair of first flat-plate-shaped spring portions and the pair of second flat-plate-shaped spring portions is integrally formed.

3. The optical element driving device according to claim 2, wherein: The pair of the first flat plate-shaped spring portions and the pair of the second flat plate-shaped spring portions are integrally formed.

4. The optical element driving device according to claim 1, wherein: The pair of first flat spring portions are independently formed, The pair of second flat plate-shaped spring portions are independently formed.

5. The optical element driving device according to claim 2, wherein: The first guide mechanism includes a first guide spring member formed of a metal plate. The first guide spring member includes a first connecting portion and a pair of the first flat spring portions. The first connecting portion realizes at least one of connecting the one end portions of the pair of first flat-plate-shaped spring portions and connecting the other end portions of the pair of first flat-plate-shaped spring portions.

6. The optical element driving device according to claim 5, wherein: The first connecting portion has a first flat plate portion extending along the first moving direction and having a plate surface perpendicular to the second moving direction. The first movable body has a first extending portion extending along the first moving direction, The first connecting portion is fixed to the first extending portion.

7. The optical element driving device according to claim 6, wherein: The first connecting portion includes a first bent portion bent substantially perpendicularly from an end portion in the vertical direction of the first flat plate-shaped portion. The first bending portion is fixed to the first extending portion.

8. The optical element driving device according to any one of claims 5 to 7, wherein: The second guide mechanism includes a second guide spring member formed of a metal plate. The second guide spring member includes a second connecting portion and a pair of second flat spring portions. The second connection portion realizes at least one of connection between the one end portions of the pair of second flat-plate-shaped spring portions and connection between the other end portions of the pair of second flat-plate-shaped spring portions.

9. The optical element driving device according to claim 8, wherein: The second connecting portion has a second flat plate portion extending along the second moving direction and having a plate surface perpendicular to the first moving direction. The first movable body has a second extending portion extending along the second moving direction, The second connecting portion is fixed to the second extending portion or the second movable body.

10. The optical element driving device according to claim 9, wherein: The second connecting portion includes a second bent portion bent substantially perpendicularly from an end portion in the vertical direction of the second flat plate-shaped portion. The second bent portion is fixed to the second extending portion or the second movable body.

11. The optical element driving device according to claim 8, wherein: The first guide spring member and the second guide spring member are connected to each other by a third connection portion and are integrally formed.

12. The optical element driving device according to claim 11, wherein: When viewed from above in the vertical direction, the outer shape of the flat plate spring portion including the pair of the first flat plate spring portions and the pair of the second flat plate spring portions is substantially rectangular. The first connecting portion connects the other ends of the pair of first flat spring portions. The second connecting portion connects the one end portions of the pair of second flat spring portions. The third connection portion is provided at a position corresponding to one of four corners of the substantially rectangular shape where one end portion of the first connection portion and one end portion of the second connection portion are arranged.

13. The optical element driving device according to any one of claims 1 to 4, wherein: The first movable body has a first extending portion extending along the first moving direction and a second extending portion extending along the second moving direction. The second movable body has a third extending portion extending along the second moving direction, At least a portion of the second extension portion and the third extension portion are located at the same height in the vertical direction and are spaced apart in the first moving direction via the optical element holding member. The one end portion of each of the pair of second flat spring portions in the first moving direction is fixed to the second extending portion. The other end portion of each of the pair of second flat-plate spring portions in the first moving direction is fixed to the third extending portion.

14. The optical element driving device according to any one of claims 1 to 4, wherein: The base member includes a base portion having an opening and a protrusion protruding upward from the base portion. The one end portion of each of the pair of first flat-plate spring portions in the second moving direction is fixed to the protruding portion.

15. The optical element driving device according to claim 14, wherein: The base portion of the base member and the first movable body are separated from each other in the vertical direction. The first movable body and the second movable body are separated from each other in a vertical direction.

16. The optical element driving device according to any one of claims 1 to 4, wherein: The second movable body supports the optical element holding member via an upper leaf spring member and a lower leaf spring member, and the upper leaf spring member and the lower leaf spring member support the optical element holding member so as to be movable in the vertical direction. The second movable body is provided with a third driving portion that moves the optical element holding member in the vertical direction.

17. A camera module comprising: The optical element driving device according to any one of claims 1 to 7; a lens body held by the optical element holding member; and The imaging element is arranged to face the lens body.

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