Air filtering device, filtering method of laminar flow hood and environment management system

Abstract

The invention relates to the technical field of air filtering, and discloses an air filtering device, a filtering method of a laminar flow hood and an environment management system. The telescopic rod extends out of the telescopic rod to be clamped into the liquid tank high-efficiency filter, the telescopic rod pushes the liquid tank high-efficiency filter to move, the electric control clamping claw moves downwards and clamps and fixes the liquid tank high-efficiency filter, the telescopic rod retracts to release clamping of the telescopic rod, the electric control clamping claw resets to drive the liquid tank high-efficiency filter to be lifted, and therefore the liquid tank high-efficiency filter is hung in the inner box body. The other to-be-replaced liquid tank high-efficiency filter is put down from the suspension of the electric control clamping jaw and falls beside the telescopic rod, the telescopic rod stretches out of the extension rod to be clamped to the to-be-replaced liquid tank high-efficiency filter, the telescopic rod drives the to-be-replaced liquid tank high-efficiency filter to reset again, and therefore a filtering layer of a laminar flow cover is automatically replaced in the device. The laminar flow cover does not need to be disassembled, maintenance of the laminar flow cover is facilitated, the situation that the laminar flow cover is improperly maintained, and consequently the dust-free room is affected is avoided, and the stability of the dust-free room is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of air filtration, in particular to an air filtration device, a laminar flow hood filtration method and an environmental management system. Background Art

[0002] Laminar flow hoods create a uniform flow layer by passing air through a high-efficiency filter at a constant velocity, creating a vertical, unidirectional flow of clean air. This ensures high cleanliness within the workplace. Compared to cleanrooms, laminar flow hoods offer advantages such as lower investment, faster results, and lower construction requirements.

[0003] In existing laminar flow hoods, such as Chinese patent application CN118009515A, the housing is composed of two thick plates and two thin plates, which ensures both structural stability and good airtightness. The snap-fit design of the frame and the ceiling ensures the seal between the laminar flow hood and the factory ceiling, preventing the ingress of external contaminated air. The multi-layer filter assembly adopts a hook structure for detachable installation. This design makes the replacement and maintenance of the filter assembly convenient and quick, and also helps to maintain the overall performance of the laminar flow hood. At the same time, compared with the use of a single high-efficiency filter in the existing technology, the multi-layer filter assembly has a better filtering effect, greatly alleviates the problem of clogging, and reduces the frequency of maintenance. At the same time, the air guide and air outlet flange are set according to actual conditions to meet the combination needs in various situations.

[0004] However, there are still the following problems: Laminar flow hoods are mostly used above clean rooms, and multiple laminar flow hoods are combined and laid out as a whole. When replacing the filter layer of the laminar flow hood, the laminar flow hood needs to be disassembled before processing, which has a certain impact on the clean room. At the same time, there are cases where improper operation causes dust to enter the clean room. The maintenance of the laminar flow hood poses some hidden dangers to the use of the clean room. Summary of the Invention

[0005] In response to the deficiencies in the prior art, the present invention provides an air filtering device, a filtering method for a laminar flow hood, and an environmental management system, which are capable of automatically replacing the filter layer of the laminar flow hood inside the device, so that workers only need to replace the filter layer to be replaced in the inner box, without having to disassemble the laminar flow hood, which facilitates the maintenance of the laminar flow hood and avoids the impact of improper maintenance of the laminar flow hood on the clean room, thereby improving the stability of the clean room. It solves the problem that laminar flow hoods are mostly used above the clean room, and multiple laminar flow hoods are combined and laid out as a whole. When replacing the filter layer of the laminar flow hood, the laminar flow hood needs to be disassembled before processing, which has a certain impact on the clean room. At the same time, there is a situation where improper operation causes dust to enter the clean room. The maintenance of the laminar flow hood poses some hidden dangers to the use of the clean room.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: an air filtering device, comprising a body, a filtering mechanism arranged in the body, and an auxiliary mechanism arranged in the body, the filtering mechanism comprising an inner box, a liquid tank high-efficiency filter, and a fan, the inner box being fixedly installed in the body, the top end of the inner box being communicated with the interior of the body, a plurality of the liquid tank high-efficiency filters being arranged in the inner box, the liquid tank high-efficiency filters filtering the air, the fan being fixedly installed at the top end of the inner box, the fan drawing the air in the body into the inner box, one of the liquid tank high-efficiency filters being located directly below the fan for use, and the remaining liquid tank high-efficiency filters being located in the inner box to be used;

[0007] The auxiliary mechanism includes a telescopic rod and an electrically controlled clamping claw. The telescopic rod is arranged in the inner box and is located at the same height as the liquid tank high-efficiency filter in use. The telescopic rod is used to push the liquid tank high-efficiency filter. A plurality of electrically controlled clamping claws are arranged in the inner box, and the number of the electrically controlled clamping claws is the same as the number of the liquid tank high-efficiency filters. The electrically controlled clamping claws are used to clamp and fix the liquid tank high-efficiency filter and drive the liquid tank high-efficiency filter to move.

[0008] Preferably, the inner box has two inner cavities, the fan is located in a cavity on one side of the inner box, the liquid tank high-efficiency filter in use is located in a cavity on one side of the inner box, and the remaining liquid tank high-efficiency filters are located in a cavity on the other side of the inner box. The lower parts of the two cavities of the inner box are connected, and the bottom ends of the two cavities of the inner box are open ends. The size of the liquid tank high-efficiency filter in use is larger than the open end size of the bottom end of the cavity on one side of the inner box.

[0009] Preferably, the filtering mechanism also includes a return air orifice plate, which is provided on both sides of the body. The return air orifice plate connects the inside of the body with the outside. An air outlet is provided at the bottom end of one side of the body. The air outlet is located directly below the cavity on one side of the inner box body, and the size of the air outlet is adapted to the size of the open end at the bottom end of the cavity on one side of the inner box body.

[0010] Preferably, a water tank is fixedly installed on the side wall of the cavity on one side of the inner box body, the size of the water tank is adapted to the size of the liquid tank high-efficiency filter, the water tank is a "C"-shaped structure, water is injected into the water tank, the liquid tank high-efficiency filter is placed in the water tank, and plate-type primary filters are fixedly installed on the inner walls on both sides of the body, and the size of the plate-type primary filter is larger than the size of the return air orifice plate.

[0011] Preferably, a sealed door is provided at the bottom end of the body, and an opening is opened at the bottom end of the body. The sealed door is located in the opening at the bottom end of the body, and the size of the sealed door is adapted to the size of the opening at the bottom end of the body. The sealed door is located directly below the cavity on the other side of the inner box body, and the size of the open end of the bottom end of the cavity on the other side of the inner box body is the same as the size of the opening at the bottom end of the body. A hinge is provided between the sealed door and the body, one side of the hinge is fixedly connected to the sealed door, and the other side of the hinge is fixedly connected to the body. A plurality of mounting parts are fixedly installed on the top end of the side wall of the body, and the mounting parts are all located at the top corner of the body. The mounting parts are used to install the air filter device on the roof of the dust-free room.

[0012] Preferably, the auxiliary mechanism also includes a first rail frame, which is fixedly mounted on the side wall of the inner box, the first rail frame is located at the lower part of the inner box, one end of the first rail frame is located in a cavity on one side of the inner box, and the other end of the first rail frame is located in a cavity on the other side of the inner box, a first movable frame is slidably fitted on the first rail frame, a first rack is fixedly mounted on the first rail frame, a first servo motor is fixedly mounted on the first movable frame, a first gear is fixedly mounted on the shaft of the first servo motor, and the first gear is meshed with the first rack.

[0013] Preferably, the telescopic rod is provided on the first movable frame, the fixed rod of the telescopic rod passes through the first movable frame, the extending rod of the telescopic rod is located at the same height as the liquid tank high efficiency filter in use, and the extending rod of the telescopic rod is stuck on the liquid tank high efficiency filter in use after being extended. A hydraulic oil push rod is fixedly installed on the first movable frame, and the hydraulic oil push rod is connected to the telescopic rod, and the hydraulic oil push rod controls the flow of hydraulic oil into the telescopic rod. A guide rail is fixedly installed on the side wall of the inner box body, one end of the guide rail is located in the water tank, and the other end of the guide rail is located in the cavity on the other side of the inner box body.

[0014] Preferably, a plurality of second rails are fixedly installed in the cavity on the other side of the inner box, the second rails are evenly distributed in a straight line, the second rails are slidably fitted with a second movable rack, the moving trajectories of the second movable racks are vertical moving trajectories, the second rails are fixedly installed with a second rack, the second movable racks are fixedly installed with a second servo motor, the shafts of the second servo motors are fixedly installed with a second gear, and the second gears are meshed with the second rack.

[0015] Preferably, an auxiliary arm is fixedly installed on the second movable frame, and the electric-controlled clamping claw is rotatably cooperated on the auxiliary arm. A stepper motor is fixedly installed on the auxiliary arm, and the stepper motor is used to control the rotation of the electric-controlled clamping claw on the auxiliary arm. An electric telescopic door is fixedly installed in the cavity on the other side of the inner box body, and the electric telescopic door is used to separate the connection between the cavities on both sides of the inner box body.

[0016] A laminar flow hood filtering method uses the above-mentioned air filtering device.

[0017] An environmental management system uses the above-mentioned air filtering device.

[0018] Compared with the prior art, the present invention provides an air filter device with the following beneficial effects:

[0019] 1. The air filter device is installed on the ceiling of a clean room, and the air supply duct of the room is connected to the top of the device body. The fan is started, and the fan draws air from the air supply duct into the inner box. The air is filtered by the liquid tank high-efficiency filter in the inner box and discharged into the clean room. When the liquid tank high-efficiency filter needs to be replaced, the telescopic rod is first started, the telescopic rod is extended and engaged with the liquid tank high-efficiency filter, and the telescopic rod then pushes the liquid tank high-efficiency filter to move it under the electric-controlled clamping claw. The electric-controlled clamping claw is then started, and the electric-controlled clamping claw moves downward and clamps the liquid tank high-efficiency filter. The telescopic rod is retracted to release the engagement, and the electric-controlled clamping claw is reset to lift the liquid tank high-efficiency filter, thereby hanging the liquid tank high-efficiency filter in the inner box. Then, another liquid tank high-efficiency filter to be replaced is lowered from the suspension of the electric-controlled clamping claw and drops it next to the telescopic rod. The telescopic rod is extended and engaged with the liquid tank high-efficiency filter to be replaced, so that the telescopic rod drives the liquid tank high-efficiency filter to be replaced to reset, thereby completing the replacement of the liquid tank high-efficiency filter, thereby automatically replacing the filter layer of the laminar flow hood inside the device, so that workers only need to replace the filter layer to be replaced in the inner box, without having to disassemble the laminar flow hood, which facilitates the maintenance of the laminar flow hood and avoids the impact of improper maintenance of the laminar flow hood on the clean room, thereby improving the stability of the clean room.

[0020] 2. The air filtration device is provided with a sealed door. When it is necessary to remove the replaced liquid tank high-efficiency filter, the sealed door can be opened to directly take out the replaced liquid tank high-efficiency filter hanging in the cavity on the other side of the inner box, which is more convenient for personnel to operate and avoids the need to disassemble the device for maintenance, thereby improving the applicability of the device.

[0021] 3. The air filtration device is equipped with an electric telescopic door. When the liquid tank high-efficiency filter is not being replaced, the electric telescopic door is used to separate the cavities on both sides of the inner box to ensure that the drawn air can completely enter the liquid tank high-efficiency filter for filtration, thereby improving the stability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the internal structure distribution of the body of the present invention;

[0023] Figure 2 This is a schematic diagram of the filter mechanism structure of the present invention;

[0024] Figure 3 This is a schematic diagram of the bottom structure distribution of the machine body of the present invention;

[0025] Figure 4 This is a schematic diagram of the internal structure distribution of the inner box of the present invention;

[0026] Figure 5 This is a schematic diagram of the auxiliary mechanism structure of the present invention;

[0027] Figure 6 This is a schematic diagram of the structural distribution of the first rail frame of the present invention;

[0028] Figure 7 This is a schematic diagram of the structural distribution of the second rail frame of the present invention;

[0029] Figure 8 It is a schematic diagram of the overall structure of the air filter device of the present invention.

[0030] In the figure: 1. Machine body; 2. Filter mechanism; 21. Inner box; 22. Return air orifice plate; 23. Air outlet; 24. Water tank; 25. Liquid tank high-efficiency filter; 26. Fan; 27. Plate-type primary filter; 28. Sealing door; 29. Hinge; 210. Mounting parts; 3. Auxiliary mechanism; 31. First rail frame; 32. First movable frame; 33. First rack; 34. First servo motor; 35. First gear; 36. Telescopic rod; 37. Hydraulic oil push rod; 38. Guide rail; 39. Second rail frame; 310. Second movable frame; 311. Second rack; 312. Second servo motor; 313. Second gear; 314. Auxiliary arm; 315. Electric clamping claw; 316. Stepper motor; 317. Electric telescopic door. DETAILED DESCRIPTION

[0031] The following will provide a clear and complete description of the technical solutions in the embodiments of the present invention, with reference to the accompanying drawings. It should be understood that the described embodiments are merely a portion of the embodiments of the present invention, and not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are intended to fall within the scope of protection of the present invention.

[0032] As introduced in the background art, there are deficiencies in the prior art. In order to solve the above technical problems, the present application proposes an air filtering device, a laminar flow hood filtering method and an environmental management system.

[0033] Example 1

[0034] In a typical embodiment of the present application, Figure 1 As shown, an air filtration device includes a body 1, a filtering mechanism 2 disposed in the body 1, and an auxiliary mechanism 3 disposed in the body 1. The filtering mechanism 2 includes an inner box 21, a liquid tank high-efficiency filter 25, and a fan 26. The inner box 21 is fixedly installed in the body 1, and the top of the inner box 21 is connected to the interior of the body 1. A plurality of liquid tank high-efficiency filters 25 are disposed in the inner box 21, and the liquid tank high-efficiency filters 25 filter the air. A fan 26 is fixedly installed in the top of the inner box 21, and the fan 26 draws air from the body 1 into the inner box 21. One liquid tank high-efficiency filter 25 is located directly below the fan 26 for use, and the remaining liquid tank high-efficiency filters 25 are located in the inner box 21 to be used.

[0035] The auxiliary mechanism 3 includes a telescopic rod 36 and an electrically controlled clamping claw 315. The telescopic rod 36 is provided in the inner box 21. The telescopic rod 36 is located at the same height as the liquid tank high-efficiency filter 25 in use. The telescopic rod 36 is used to push the liquid tank high-efficiency filter 25. A plurality of electrically controlled clamping claws 315 are provided in the inner box 21. The number of electrically controlled clamping claws 315 is the same as the number of liquid tank high-efficiency filters 25. The electrically controlled clamping claws 315 are used to clamp and fix the liquid tank high-efficiency filter 25 and drive the liquid tank high-efficiency filter 25 to move.

[0036] When using the present invention:

[0037] After the air filter device is installed on the roof of the dust-free room, the air supply pipe of the room is connected to the top of the body 1, and the fan 26 is started. The fan 26 draws air from the air supply pipe and sends it into the inner box 21. The air is filtered by the liquid tank high-efficiency filter 25 in the inner box 21 and discharged into the dust-free room. When the liquid tank high-efficiency filter 25 needs to be replaced, the telescopic rod 36 is first started. The telescopic rod 36 extends the rod and clamps the liquid tank high-efficiency filter 25. The telescopic rod 36 then pushes the liquid tank high-efficiency filter 25 to move, so that the liquid tank high-efficiency filter 25 moves to the bottom of the electric-controlled clamping claw 315. The electric-controlled clamping claw 315 is then started. The electric-controlled clamping claw 315 moves down and clamps the liquid tank high-efficiency filter 25. The telescopic rod 36 retracts the rod to release the clamping. The electric-controlled clamping claw 315 resets and drives the liquid tank high-efficiency filter 25 to lift. The liquid tank high efficiency filter 25 is hung in the inner box body 21, and then another liquid tank high efficiency filter 25 to be replaced is lowered from the suspension of the electric control clamping claw 315 and falls next to the telescopic rod 36. The telescopic rod 36 extends the extension rod and engages with the liquid tank high efficiency filter 25 to be replaced, so that the telescopic rod 36 drives the liquid tank high efficiency filter 25 to be replaced to be reset, so as to complete the replacement of the liquid tank high efficiency filter 25, thereby automatically replacing the filter layer of the laminar flow hood inside the device, so that workers only need to replace the filter layer to be replaced in the inner box body, and there is no need to disassemble the laminar flow hood, which is convenient for the maintenance of the laminar flow hood, and avoids the impact of improper maintenance of the laminar flow hood on the clean room, thereby improving the stability of the clean room.

[0038] Example 2

[0039] like Figure 2-Figure 4 As shown, the difference from the above embodiment is that the inner box 21 is divided into two cavities, the fan 26 is located in the cavity on one side of the inner box 21, the liquid tank high-efficiency filter 25 in use is located in the cavity on one side of the inner box 21, and the remaining liquid tank high-efficiency filters 25 are located in the cavity on the other side of the inner box 21. The lower parts of the two cavities of the inner box 21 are connected, and the bottom ends of the two cavities of the inner box 21 are both open ends. The size of the liquid tank high-efficiency filter 25 in use is larger than the open end size of the bottom end of the cavity on one side of the inner box 21.

[0040] Furthermore, the filtering mechanism 2 also includes a return air orifice plate 22. Return air orifice plates 22 are provided on both sides of the body 1. The return air orifice plates 22 connect the inside and outside of the body 1. An air outlet 23 is provided at the bottom end of one side of the body 1. The air outlet 23 is located directly below the cavity on one side of the inner box body 21. The size of the air outlet 23 is adapted to the size of the open end at the bottom end of the cavity on one side of the inner box body 21.

[0041] Furthermore, a water tank 24 is fixedly installed on the side wall of the cavity on one side of the inner box body 21. The size of the water tank 24 is adapted to the size of the liquid tank high-efficiency filter 25. The water tank 24 is a "C"-shaped structure. Water is injected into the water tank 24. The liquid tank high-efficiency filter 25 is placed in the water tank 24. Plate-type primary filters 27 are fixedly installed on the inner walls on both sides of the body 1. The size of the plate-type primary filter 27 is larger than the size of the return air orifice plate 22.

[0042] Furthermore, a sealed door 28 is provided at the bottom end of the body 1, and an opening is opened at the bottom end of the body 1. The sealed door 28 is located in the opening at the bottom end of the body 1, and the size of the sealed door 28 is adapted to the size of the opening at the bottom end of the body 1. The sealed door 28 is located directly below the cavity on the other side of the inner box 21, and the size of the open end of the bottom end of the cavity on the other side of the inner box 21 is the same as the size of the opening at the bottom end of the body 1. A hinge 29 is provided between the sealed door 28 and the body 1, and one side of the hinge 29 is fixedly connected to the sealed door 28, and the other side of the hinge 29 is fixedly connected to the body 1. A plurality of mounting parts 210 are fixedly installed on the top end of the side wall of the body 1. The mounting parts 210 are all located at the top corner of the body 1, and the mounting parts 210 are used to install the air filter device on the roof of the dust-free room.

[0043] When filtering the air, the fan 26 is used to draw air from the air supply pipe into the body 1, and then from the body 1 into the inner box 21. At the same time, the air in the dust-free room is drawn through the return air hole plate 27, so that the air in the dust-free room passes through the plate-type primary filter 27 and enters the body 1, and then is drawn from the body 1 into the inner box 21. In the inner box 21, the air passes through the liquid tank high-efficiency filter 25 and is discharged into the dust-free room from the air outlet 23.

[0044] Example 3

[0045] like Figure 5-Figure 8 As shown, the difference from the above embodiment is that the auxiliary mechanism 3 also includes a first rail 31, which is fixedly mounted on the side wall of the inner box 21, the first rail 31 is located at the lower part of the inner box 21, one end of the first rail 31 is located in a cavity on one side of the inner box 21, and the other end of the first rail 31 is located in a cavity on the other side of the inner box 21, a first movable frame 32 is slidably fitted on the first rail 31, a first rack 33 is fixedly mounted on the first rail 31, a first servo motor 34 is fixedly mounted on the first movable frame 32, a first gear 35 is fixedly mounted on the shaft of the first servo motor 34, and the first gear 35 is meshed with the first rack 33.

[0046] Furthermore, a telescopic rod 36 is provided on the first mobile frame 32, and the fixed rod of the telescopic rod 36 passes through the first mobile frame 32. The extending rod of the telescopic rod 36 is at the same height as the liquid tank high-efficiency filter 25 in use. After being extended, the extending rod of the telescopic rod 36 is stuck on the liquid tank high-efficiency filter 25 in use. A hydraulic oil push rod 37 is fixedly installed on the first mobile frame 32, and the hydraulic oil push rod 37 is connected to the telescopic rod 36. The hydraulic oil push rod 37 controls the flow of hydraulic oil into the telescopic rod 36. A guide rail 38 is fixedly installed on the side wall of the inner box body 21, one end of the guide rail 38 is located in the water tank 24, and the other end of the guide rail 38 is located in the cavity on the other side of the inner box body 21.

[0047] Furthermore, a plurality of second rail frames 39 are fixedly installed in the cavity on the other side of the inner box body 21. The second rail frames 39 are evenly distributed in a straight line. The second rail frames 39 are all slidably fitted with second movable frames 310. The moving trajectories of the second movable frames 310 are all vertical moving trajectories. A second rack 311 is fixedly installed on the second rail frames 39. A second servo motor 312 is fixedly installed on the second movable frame 310. A second gear 313 is fixedly installed on the shaft of the second servo motor 312. The second gear 313 is meshed with the second rack 311.

[0048] Furthermore, an auxiliary arm 314 is fixedly installed on the second movable frame 310, and an electric-controlled clamping claw 315 is rotatably mounted on the auxiliary arm 314. A stepper motor 316 is fixedly installed on the auxiliary arm 314, and the stepper motor 316 is used to control the rotation of the electric-controlled clamping claw 315 on the auxiliary arm 314. An electric telescopic door 317 is fixedly installed in the cavity on the other side of the inner box body 21, and the electric telescopic door 317 is used to separate the connection between the cavities on both sides of the inner box body 21.

[0049] When replacing the active liquid tank high efficiency filter 25, the electric telescopic door 317 is first activated. The electric telescopic door 317 retracts to release the separation between the two sides of the inner box 21. The hydraulic oil push rod 37 is activated, and the hydraulic oil push rod 37 pushes hydraulic oil into the telescopic rod 36, causing the telescopic rod 36 to extend and engage with the active liquid tank high efficiency filter 25. The first servo motor 34 is then activated. The first servo motor 34 drives the first gear 35 to rotate, causing the first gear 35 to move on the first rack 33, thereby driving the first movable frame 32 to move on the first rail frame 31, so that the telescopic rod 36 pushes the active liquid tank high efficiency filter 25 to move. After the active liquid tank high efficiency filter 25 moves onto the guide rail 38, the guide rail 38 guides the active liquid tank high efficiency filter 25 into the cavity on the other side of the inner box 21. The second servo motor 312 is then activated, and the second servo motor 312 drives the second gear 313 to rotate, causing the second gear 313 to move on the second rack 311. The second movable frame 310 is driven to move on the second rail frame 39, so that the second movable frame 310 drives the auxiliary arm 314 to move, and the auxiliary arm 314 drives the electric-controlled clamping claw 315 to move to the side of the liquid tank high-efficiency filter 25 in use, and the stepping motor 316 is started. The stepping motor 316 controls the electric-controlled clamping claw 315 to rotate toward the liquid tank high-efficiency filter 25 in use, and then the electric-controlled clamping claw 315 clamps and fixes the liquid tank high-efficiency filter 25 in use, and the electric-controlled clamping claw 315 suspends the liquid tank high-efficiency filter 25 in use and puts down the liquid tank high-efficiency filter 25 to be replaced on the other electric-controlled clamping claw 315. After the telescopic rod 36 drives the liquid tank high-efficiency filter 25 to be replaced to reset, the replacement of the liquid tank high-efficiency filter 25 is completed. When taking the replaced liquid tank high-efficiency filter 25, the electric telescopic door 317 is closed, the sealing door 28 is opened, and the replaced liquid tank high-efficiency filter 25 is directly taken out from the sealing door 28.

[0050] The overall working principle of the air filter device:

[0051] After the air filter device is installed on the roof of the dust-free room, the air supply pipe of the room is connected to the top of the body 1, and the fan 26 is started. The fan 26 draws air from the air supply pipe and sends it into the inner box 21. The air is filtered by the liquid tank high-efficiency filter 25 in the inner box 21 and discharged into the dust-free room. When the liquid tank high-efficiency filter 25 needs to be replaced, the telescopic rod 36 is first started. The telescopic rod 36 extends the rod and clamps the liquid tank high-efficiency filter 25. The telescopic rod 36 then pushes the liquid tank high-efficiency filter 25 to move, so that the liquid tank high-efficiency filter 25 moves to the bottom of the electric-controlled clamping claw 315. The electric-controlled clamping claw 315 is then started. The electric-controlled clamping claw 315 moves down and clamps the liquid tank high-efficiency filter 25. The telescopic rod 36 retracts the rod to release the clamping. The electric-controlled clamping claw 315 resets and drives the liquid tank high-efficiency filter 25 to lift. The liquid tank high efficiency filter 25 is hung in the inner box 21, and then another liquid tank high efficiency filter 25 to be replaced is lowered from the suspension of the electric control clamping claw 315 and falls next to the telescopic rod 36. The telescopic rod 36 extends the extension rod and engages with the liquid tank high efficiency filter 25 to be replaced, so that the telescopic rod 36 drives the liquid tank high efficiency filter 25 to be replaced to reset, thereby completing the replacement of the liquid tank high efficiency filter 25, thereby automatically replacing the filter layer of the laminar flow hood inside the device, so that workers only need to replace the filter layer to be replaced in the inner box, without having to disassemble the laminar flow hood, which facilitates the maintenance of the laminar flow hood and avoids the impact of improper maintenance of the laminar flow hood on the clean room, thereby improving the stability of the clean room;

[0052] During air filtration, the fan 26 draws air from the air supply duct into the machine body 1, and then from the machine body 1 into the inner box 21. At the same time, the fan also draws air from the clean room through the return air plate 27, allowing the air in the clean room to pass through the plate-type primary filter 27 and enter the machine body 1. The air is then drawn from the machine body 1 into the inner box 21. In the inner box 21, the air passes through the liquid tank high-efficiency filter 25 and is discharged from the air outlet 23 into the clean room.

[0053] When replacing the active liquid tank high efficiency filter 25, the electric telescopic door 317 is first activated. The electric telescopic door 317 retracts to release the separation between the two sides of the inner box 21. The hydraulic oil push rod 37 is activated, and the hydraulic oil push rod 37 pushes the hydraulic oil into the telescopic rod 36, causing the telescopic rod 36 to extend and engage with the active liquid tank high efficiency filter 25. The first servo motor 34 is then activated. The first servo motor 34 drives the first gear 35 to rotate, causing the first gear 35 to move on the first rack 33, thereby driving the first movable frame 32 to move on the first rail frame 31, so that the telescopic rod 36 pushes the active liquid tank high efficiency filter 25 to move. After the active liquid tank high efficiency filter 25 moves onto the guide rail 38, the guide rail 38 guides the active liquid tank high efficiency filter 25 into the cavity on the other side of the inner box 21. The second servo motor 312 is then activated, and the second servo motor 312 drives the second gear 313 to rotate, causing the second gear 313 to move on the second rack 311. The second movable frame 310 is driven to move on the second rail frame 39, so that the second movable frame 310 drives the auxiliary arm 314 to move, and the auxiliary arm 314 drives the electric-controlled clamping claw 315 to move to the side of the liquid tank high-efficiency filter 25 in use, and the stepping motor 316 is started. The stepping motor 316 controls the electric-controlled clamping claw 315 to rotate toward the liquid tank high-efficiency filter 25 in use, and then the electric-controlled clamping claw 315 clamps and fixes the liquid tank high-efficiency filter 25 in use, and the electric-controlled clamping claw 315 suspends the liquid tank high-efficiency filter 25 in use and puts down the liquid tank high-efficiency filter 25 to be replaced on the other electric-controlled clamping claw 315. After the telescopic rod 36 drives the liquid tank high-efficiency filter 25 to be replaced to reset, the replacement of the liquid tank high-efficiency filter 25 is completed. When taking the replaced liquid tank high-efficiency filter 25, the electric telescopic door 317 is closed, the sealing door 28 is opened, and the replaced liquid tank high-efficiency filter 25 is directly taken out from the sealing door 28.

[0054] A filtering method for a laminar flow hood uses the above-mentioned air filtering device.

[0055] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An air filter device comprising a body, a filtering mechanism disposed within the body, and an auxiliary mechanism disposed within the body, characterized in that: The filtering mechanism includes an inner box, a liquid tank high-efficiency filter, and a fan. The inner box is fixedly installed in the body, and the top of the inner box is connected to the interior of the body. A plurality of liquid tank high-efficiency filters are provided in the inner box, and the liquid tank high-efficiency filters filter the air. The fan is fixedly installed at the top of the inner box, and the fan draws the air in the body into the inner box. One of the liquid tank high-efficiency filters is located directly below the fan for use, and the remaining liquid tank high-efficiency filters are located in the inner box to be used. The auxiliary mechanism includes a telescopic rod and an electrically controlled clamping claw. The telescopic rod is arranged in the inner box body. The telescopic rod is located at the same height as the liquid tank high-efficiency filter in use. The telescopic rod is used to push the liquid tank high-efficiency filter. A plurality of electrically controlled clamping claws are arranged in the inner box body. The number of the electrically controlled clamping claws is the same as the number of the liquid tank high-efficiency filters. The electrically controlled clamping claws are used to clamp and fix the liquid tank high-efficiency filter and drive the liquid tank high-efficiency filter to move.

2. An air filter device according to claim 1, characterized in that: The inner box body has two inner cavities, the fan is located in the cavity on one side of the inner box body, the liquid tank high-efficiency filter in use is located in the cavity on one side of the inner box body, and the remaining liquid tank high-efficiency filters are located in the cavity on the other side of the inner box body. The lower parts of the two cavities of the inner box body are connected, and the bottom ends of the two cavities of the inner box body are both open ends. The size of the liquid tank high-efficiency filter in use is larger than the open end size of the bottom end of the cavity on one side of the inner box body.

3. An air filter device according to claim 2, characterized in that: The filtering mechanism also includes a return air orifice plate, which is provided on both sides of the body. The return air orifice plate connects the inside of the body with the outside. An air outlet is provided at the bottom end of one side of the body. The air outlet is located directly below the cavity on one side of the inner box body, and the size of the air outlet is adapted to the size of the open end at the bottom end of the cavity on one side of the inner box body.

4. An air filter device according to claim 3, characterized in that: A water tank is fixedly installed on the side wall of the cavity on one side of the inner box body. The size of the water tank is adapted to the size of the liquid tank high-efficiency filter. The water tank is a "C"-shaped structure. Water is injected into the water tank. The liquid tank high-efficiency filter is placed in the water tank. Plate-type primary filters are fixedly installed on the inner walls on both sides of the body. The size of the plate-type primary filter is larger than the size of the return air orifice plate.

5. An air filter device according to claim 4, characterized in that: A sealing door is provided at the bottom end of the body, and an opening is opened at the bottom end of the body. The sealing door is located in the opening at the bottom end of the body, and the size of the sealing door is adapted to the size of the opening at the bottom end of the body. The sealing door is located directly below the cavity on the other side of the inner box body, and the size of the open end of the bottom end of the cavity on the other side of the inner box body is the same as the size of the opening at the bottom end of the body. A hinge is provided between the sealing door and the body, one side of the hinge is fixedly connected to the sealing door, and the other side of the hinge is fixedly connected to the body. A plurality of mounting parts are fixedly installed on the top end of the side wall of the body, and the mounting parts are all located at the top corner of the body. The mounting parts are used to install the air filtering device on the roof of the dust-free room.

6. An air filter device according to claim 5, characterized in that: The auxiliary mechanism also includes a first rail frame, which is fixedly mounted on the side wall of the inner box, the first rail frame is located at the lower part of the inner box, one end of the first rail frame is located in a cavity on one side of the inner box, and the other end of the first rail frame is located in a cavity on the other side of the inner box, a first movable frame is slidably fitted on the first rail frame, a first rack is fixedly mounted on the first rail frame, a first servo motor is fixedly mounted on the first movable frame, a first gear is fixedly mounted on the shaft of the first servo motor, and the first gear is meshed with the first rack.

7. An air filter device according to claim 6, characterized in that: The telescopic rod is provided on the first mobile frame, and the fixed rod of the telescopic rod passes through the first mobile frame. The extending rod of the telescopic rod is located at the same height as the liquid tank high-efficiency filter in use. The extending rod of the telescopic rod is stuck on the liquid tank high-efficiency filter in use after being extended. A hydraulic oil push rod is fixedly installed on the first mobile frame, and the hydraulic oil push rod is connected to the telescopic rod. The hydraulic oil push rod controls the flow of hydraulic oil into the telescopic rod. A guide rail is fixedly installed on the side wall of the inner box body, one end of the guide rail is located in the water tank, and the other end of the guide rail is located in the cavity on the other side of the inner box body.

8. An air filter device according to claim 7, characterized in that: A plurality of second rails are fixedly installed in the cavity on the other side of the inner box, the second rails are evenly distributed in a straight line, the second rails are slidably fitted with second movable racks, the movement trajectories of the second movable racks are all vertical movement trajectories, the second rails are fixedly installed with second racks, the second movable racks are fixedly installed with second servo motors, the shafts of the second servo motors are fixedly installed with second gears, and the second gears are meshed with the second racks; An auxiliary arm is fixedly installed on the second movable frame, and the electric-controlled clamping claw is rotatably engaged on the auxiliary arm. A stepper motor is fixedly installed on the auxiliary arm, and the stepper motor is used to control the rotation of the electric-controlled clamping claw on the auxiliary arm. An electric telescopic door is fixedly installed in the cavity on the other side of the inner box body, and the electric telescopic door is used to separate the connection between the cavities on both sides of the inner box body.

9. A laminar flow hood filtering method, characterized in that: The air filter device according to any one of claims 1 to 8 is used.

10. An environmental management system, characterized in that: The air filter device according to any one of claims 1 to 8 is used.

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