Ocean anti-ionization three-dimensional force array sensor
By designing the marine anti-ionization three-dimensional force array sensor, using a bionic structure and a self-calibration mechanism, the problem of traditional sensors' sensitivity decrease in deep-sea environment is solved, and refined monitoring of flow field information and flow velocity and flow direction feedback are achieved.
Patent Information
- Application Number
- CN202510499240.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-21
- Publication Date
- 2025-08-19
AI Technical Summary
The traditional three-dimensional force perception basic unit failed to establish a three-dimensional force perception array structure, resulting in a lack of information grasp in complex flow field. The sensitivity of traditional sensors in deep-sea environments is reduced, making it difficult to meet the requirements of simple structure, wide application depth range and no interference from marine environments.
A marine anti-ionization three-dimensional force array sensor was designed, using a bionic structure flexible elastomer and a double-sided interplate electrode, combined with a seawater conductivity test unit for self-calibration, filling the liquid through siphon action, realizing the refined acquisition of the three-dimensional force sensing array.
It realizes refined monitoring of flow field information in complex deep-sea environments, can feedback the flow rate and direction, has high sensitivity and high resolution sensing functions, and offsets signal interference from changes in the underwater electrolyte environment.
Smart Images
Figure CN120507075A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of flexible sensing technology, and in particular to a marine anti-ionization three-dimensional force array sensor. Background Art
[0002] Three-dimensional force perception in the ocean environment is crucial for flow field information and tactile feedback in underwater robots. With the continued development of new underwater vehicle research and the increasing demand for multi-dimensional information perception of complex ocean environments, miniaturization of ocean sensors is crucial. Miniaturized sensing systems offer advantages such as low cost, low power consumption, and high flexibility, making them well-suited for the future development of underwater environment monitoring robots.
[0003] Ocean flow data plays a vital role in marine science and engineering, and is widely used in a wide range of fields, including marine disaster prevention and mitigation, ocean exploration, and ocean current analysis. Underwater flows are complex, and traditional planar sensors are impeded by the boundary layer effect at the solid-liquid interface, making them unsuitable for accurately sensing the external flow field. Marine organisms possess excellent flow field sensing capabilities, enabling them to survive in complex underwater environments. For example, the lateral line system of fish can sense minute currents and pressure gradients; the wavy structure of seal whiskers can detect eddies and perceive comprehensive information about objects; and the dome-shaped structure of crocodile skin allows for simultaneous sensing of oscillatory and steady-state stimuli.
[0004] Traditional 3D force sensing units rely on a four-point detection approach, employing four distributed normal force units to form a 3D force measurement unit. This unit, coupled with a specific structure that undergoes uneven deformation under tangential force, determines the direction and magnitude of the shear force. This approach allows 3D force sensors to decouple normal and tangential forces, enabling applications in robotic tactile feedback. However, it lacks a 3D force sensing array structure and lacks the ability to capture complex flow field information. Summary of the Invention
[0005] The embodiment of the present application provides a marine anti-ionization three-dimensional force array sensor, which is based on an environmentally integrated anti-ionization sensing mechanism. A three-dimensional force sensing array is established through the bionic structure design of the sensing deformable material and the design and processing of high-resolution sensing array electrodes. A seawater conductivity test unit is integrated for sensor self-calibration, and is used to monitor underwater flow field information and provide feedback on flow velocity and direction.
[0006] To solve the above technical problems, an embodiment of the present application provides a marine anti-ionization three-dimensional force array sensor, comprising: a sensing array electrode, a flexible elastomer, and an adhesive layer for connecting the sensing array electrode and the flexible elastomer; there is a gap between the sensing array electrode and the flexible elastomer, and liquid is filled in the gap between the sensing array electrode and the flexible elastomer through siphon action; the sensing array electrode is a double-sided interdigitated electrode; the flexible elastomer is made of a biomimetic sensing deformation material; the flexible elastomer is a dome structure elastomer, the side of the flexible elastomer away from the sensing array electrode is a dome structure, and the side of the flexible elastomer close to the sensing array electrode is a microscopic rough structure.
[0007] In some exemplary embodiments, a flexible elastomer is used to convert shear force into normal force at different sensing points; when a vertical normal force is applied to the center of the dome of the dome structure, the normal force exerted on the bottom of the flexible elastomer is symmetrical in all directions; when a force at a certain angle is applied to the dome of the dome structure, the force distribution of the elastomer changes due to the shear force. By comparing, analyzing and calculating the pressure distribution of the sensing array electrodes, the direction and magnitude of the applied force can be obtained, thereby realizing three-dimensional force detection.
[0008] In some exemplary embodiments, the microscopic rough structure is an irregular rough surface structure; the irregular rough surface structure includes an irregular rough surface structure having a pyramidal, hemispherical, or columnar array.
[0009] In some exemplary embodiments, the bottom surface of the flexible elastomer is circular, and the sensing array electrodes are square or rectangular; the flexible elastomer covers part of the surface of the sensing array electrodes, and the four corners of the sensing array electrodes are exposed from the flexible elastomer, and the exposed electrodes serve as environmental self-calibration units.
[0010] In some exemplary embodiments, one electrode is exposed at each of the four corners of the sensing array electrode; and the environmental self-calibration unit is a single-point interdigital electrode.
[0011] In some exemplary embodiments, the biomimetic sensing deformation material is a thermosetting cross-linked network; the thermosetting cross-linked network includes one of an acrylic elastomer, a polyurethane elastomer, and a silicone rubber elastomer; the silicone rubber elastomer includes polydimethylsiloxane, methylvinylsiloxane or fluorosilicone rubber.
[0012] In some exemplary embodiments, the sensing array electrodes are obtained by preparing a flexible circuit board using printed conductive materials; the flexible circuit board adopts a double-sided electrode routing design, each sensing unit is designed with a forked electrode, and the row electrodes and column electrodes are designed on both sides of the flexible circuit board through a through-hole design; the base material of the flexible circuit board is one of polyimide and polyethylene terephthalate; the material of the forked electrode is one of the inert metals selected from gold, platinum, copper and silver.
[0013] In some exemplary embodiments, the thickness of the substrate of the flexible circuit board is 1 to 1000 microns; the line width of the interdigitated electrodes is 0.1 to 1000 microns; the spacing between two adjacent electrodes of the interdigitated strip electrodes is 0.1 to 1000 microns; the spacing between two adjacent units of the sensing array electrode is 1 to 10000 microns; the overall size of the electrode sensing array electrode is 1 to 500 cm 2 , spatial resolution ranges from 1 to 500 dots / cm 2 .
[0014] In some exemplary embodiments, the flexible elastomer is made using a double template; the double template includes a first mold adapted to the dome structure and a second mold adapted to the micro-rough structure; the first mold and the second mold are respectively made by mechanical processing, and the first mold and the second mold are combined to obtain the double template; the double template is one or more of a PDMS mold, a polytetrafluoroethylene mold or a stainless steel mold.
[0015] In some exemplary embodiments, the adhesive layer is made of acrylic adhesive or polyurethane adhesive, and the thickness of the adhesive layer is 10 to 200 micrometers.
[0016] The technical solution provided by the embodiments of the present application has at least the following advantages:
[0017] The embodiment of the present application provides a marine anti-ionization three-dimensional force array sensor, comprising: a sensing array electrode, a flexible elastomer, and an adhesive layer for connecting the sensing array electrode and the flexible elastomer; a gap is provided between the sensing array electrode and the flexible elastomer, and liquid is filled in the gap between the sensing array electrode and the flexible elastomer by siphon action; the sensing array electrode is a double-sided interdigitated electrode; the flexible elastomer is made of a bionic design sensing deformation material; the flexible elastomer is a dome structure elastomer, the side of the flexible elastomer away from the sensing array electrode is a dome structure, and the side of the flexible elastomer close to the sensing array electrode is a microscopic rough structure. The present application innovatively proposes a marine anti-ionization three-dimensional force array sensing structure, which is based on the anti-ionization sensing mechanism of environmental integration, establishes a three-dimensional force sensing array through the bionic structure design of the sensing deformation material, and the design and processing of the high-resolution sensing array electrode, and integrates a seawater conductivity test unit for sensor self-calibration, which is used to monitor underwater flow field information and feedback flow velocity and direction. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] One or more embodiments are exemplarily described by the pictures in the corresponding drawings. These exemplifications do not constitute limitations on the embodiments. Unless otherwise stated, the pictures in the drawings do not constitute proportional limitations.
[0019] Figure 1 A three-dimensional structural diagram of a marine anti-ionization three-dimensional force array sensor provided in one embodiment of the present application.
[0020] Figure 2 This is a structural diagram of the marine anti-ionization three-dimensional force array sensor provided in one embodiment of the present application.
[0021] Figure 3 A schematic diagram of a sensor array electrode provided in one embodiment of the present application.
[0022] Figure 4 Schematic diagram of the location of the environmental self-calibration unit of the marine anti-ionization three-dimensional force array sensor provided in one embodiment of the present application.
[0023] Figure 5 This is a schematic diagram of the structure of an environmental self-calibration unit provided in one embodiment of the present application.
[0024] Figure 6 A schematic diagram of a dual-template structure provided in one embodiment of the present application.
[0025] Figure 7 A schematic diagram of injecting a pre-curing system into a double template according to an embodiment of the present application.
[0026] Figure 8 A schematic diagram of a flexible elastic body provided in one embodiment of the present application.
[0027] Figure 9 This is a pressure distribution diagram presented by pressure in different water flow directions provided by an embodiment of the present application. DETAILED DESCRIPTION
[0028] As can be seen from the background technology, at present, three-dimensional force sensors constructed using traditional three-dimensional force sensing basic units can be applied to the field of robot tactile feedback, but a three-dimensional force sensing array structure has not been established, and there is a lack of grasp of complex flow field information.
[0029] Currently, the ocean's complex ionic environment and high water pressure affect pressure sensor design. Additional waterproof packaging can lead to redundant device dimensions, reduced flexibility, and the risk of leakage and failure. High hydrostatic pressure directly increases the sensor's absolute pressure, affecting the accuracy and range of pressure testing. This is particularly true in deep-sea environments, where high water pressure can reduce sensor sensitivity. For underwater flow field sensing, the sensor must be simple in structure, applicable to a wide range of water depths, and immune to interference from the marine environment.
[0030] The researchers behind this application discovered that crocodile skin contains numerous dome-shaped pressure receptors, which are dome-shaped structures without holes or protruding hairs. Their primary function is to detect surface waves generated by prey moving through the water. By combining a biomimetic structural design with a high-spatial-resolution sensor array architecture, they were able to obtain refined flow field information.
[0031] In order to solve the above technical difficulties, the present application provides a marine anti-ionization three-dimensional force array sensor, including: a sensing array electrode, a flexible elastomer and an adhesive layer for connecting the sensing array electrode and the flexible elastomer; there is a gap between the sensing array electrode and the flexible elastomer, and the liquid is filled in the gap between the sensing array electrode and the flexible elastomer by siphon action; the sensing array electrode is a double-sided interdigitated electrode; the flexible elastomer is made of a bionic design sensing deformation material; the flexible elastomer is a dome structure elastomer, the side of the flexible elastomer away from the sensing array electrode is a dome structure, and the side of the flexible elastomer close to the sensing array electrode is a microscopic rough structure. The present application innovatively proposes a marine anti-ionization three-dimensional force array sensing structure, which is based on the anti-ionization sensing mechanism of environmental integration, establishes a three-dimensional force sensing array through the bionic structure design of the sensing deformation material, and the design and processing of high-resolution sensing array electrodes, and integrates a seawater conductivity test unit for sensor self-calibration, which is used to monitor underwater flow field information and feedback flow velocity and direction.
[0032] The following detailed description of the various embodiments of the present application is provided in conjunction with the accompanying drawings. However, those skilled in the art will appreciate that many technical details are provided in the various embodiments of the present application to facilitate a better understanding of the present application. However, even without these technical details and the various variations and modifications based on the following embodiments, the technical solutions claimed in the present application can still be implemented.
[0033] See Figure 1 The embodiment of the present application provides a marine anti-ionization three-dimensional force array sensor, comprising: a sensing array electrode 1, a flexible elastic body 2, and an adhesive layer ( Figure 1 There is a gap between the sensing array electrode 1 and the flexible elastic body 2, and the liquid 4 (seawater) is filled in the gap between the sensing array electrode 1 and the flexible elastic body 2 by siphoning; the sensing array electrode 1 is a double-sided interdigitated electrode; the flexible elastic body 2 is made of a biomimetic sensing deformation material; the flexible elastic body 2 is a dome structure elastic body, such as Figure 2 As shown, the side of the flexible elastic body 2 away from the sensing array electrode 1 is a dome structure, and the side of the flexible elastic body 2 close to the sensing array electrode 1 is a microscopic rough structure 3.
[0034] See Figure 2 The marine anti-ionization 3D force sensor array structure consists of three components: a high-resolution array electrode, a biomimetic sensing deformable material, and the liquid (seawater) between them. The high-resolution array electrode is a double-sided interdigitated electrode, and the biomimetic sensing deformable material is a dome structure. The two are connected by an adhesive layer, allowing seawater to enter through the siphon effect.
[0035] In some embodiments, the flexible elastomer 2 is used to convert shear force into normal force at different sensing points; when a vertical normal force is applied to the center of the dome of the dome structure, the normal force exerted on the bottom of the flexible elastomer 2 is symmetrical in all directions; when a force at a certain angle is applied to the dome of the dome structure, the force distribution of the elastomer changes due to the shear force. By comparing, analyzing and calculating the pressure distribution of the sensing array electrode 1, the direction and magnitude of the applied force can be obtained, thereby realizing three-dimensional force detection.
[0036] This application combines a biomimetic structural design with a high spatial resolution sensor array architecture to achieve refined acquisition of flow field information. Ionization sensing relies on the double-layer structure formed at the contact interface between ions and electrodes, which has a high surface area and high energy density, and can achieve high-sensitivity and high-resolution sensing functions. Considering that seawater itself is an ionic material with high ionic conductivity, using seawater as the functional material of the ionization tactile sensor will make the sensor structure design simpler and thinner. Seawater fills the space between the electrode and the elastic material through the siphon effect, forming a double-layer structure with the electrode interface. Under external pressure stimulation, the elastic material deforms, expelling water, causing the double-layer capacitance to decrease. When the pressure is removed, the water refills the space between the electrode and the elastic material, achieving reversible mechanical perception. This process is the opposite of classic ionization sensing, and is therefore called "reverse ionization sensing." This sensing structure only contains electrodes, water, and an elastic deformation layer. Through the design of the electrodes, it can be processed into a high-resolution array structure and further assembled with the biomimetic elastic deformation layer. The force feedback at different positions of the elastic deformation layer under the action of three-dimensional force is different, so that the direction and magnitude of the force can be distinguished in the array acquisition data.
[0037] In some embodiments, as Figure 2 As shown, the microscopic rough structure 3 is an irregular rough surface structure; the irregular rough surface structure includes an irregular rough surface structure having a pyramidal, hemispherical or columnar array.
[0038] like Figure 3 As shown, this application designs a sensor array taking 8×8 as an example, and the array density and the number of sensor points are not limited to this.
[0039] In some embodiments, as Figure 4 As shown, the bottom surface of the flexible elastic body 2 is circular, and the sensing array electrode 1 is square or rectangular; the flexible elastic body 2 covers part of the surface of the sensing array electrode 1, and the four corners of the sensing array electrode 1 are exposed from the flexible elastic body 2. The exposed electrodes serve as the environmental self-calibration unit 5. Figure 4 It can be seen from the figure that the edge of the sensing array electrode 1 is not covered by the sensing material of the flexible elastic body 2, and the electrode underneath is exposed to serve as the environmental self-calibration unit 5 of the sensing array.
[0040] The sensor structure of this application integrates an environmental self-calibration unit 5 for self-calibration. Based on the unique sensing principle of the anti-ionization mechanism, it offsets the signal interference caused by changes in the underwater electrolyte environment. This has outstanding advantages for flow field monitoring in complex deep-sea environments.
[0041] In some embodiments, the four corners of the sensor array electrode 1 each expose an electrode; the environmental self-calibration unit 5 is a single-point interdigital electrode. Figure 5 ,The environmental self-calibration unit 5 is a single-point sensor and its structure only includes two parts: the lower electrode and the seawater.
[0042] In some embodiments, the biomimetic sensing deformation material is a thermosetting cross-linked network; the thermosetting cross-linked network includes one of an acrylic elastomer, a polyurethane elastomer, and a silicone rubber elastomer; the silicone rubber elastomer includes polydimethylsiloxane, methylvinylsiloxane or fluorosilicone rubber.
[0043] In some embodiments, the sensing array electrode 1 is obtained by preparing a flexible circuit board using conventional printed conductive materials; the flexible circuit board adopts a double-sided electrode routing design, each sensing unit is designed with a forked electrode, and the row electrodes and column electrodes are designed on both sides of the flexible circuit board through a through-hole design; the base material of the flexible circuit board is one of polyimide and polyethylene terephthalate; the material of the forked electrode is one of the inert metals gold, platinum, copper and silver.
[0044] In some embodiments, the thickness of the substrate of the flexible circuit board is 1 to 1000 microns, further 10 to 500 microns; the line width of the interdigitated electrode is 0.1 to 1000 microns, further 10 to 300 microns; the spacing between two adjacent electrodes of the interdigitated strip electrode is 0.1 to 1000 microns, further 10 to 300 microns; the spacing between two adjacent units of the sensor array electrode is 1 to 10,000 microns, further 50 to 5,000 microns; the overall size of the electrode sensor array electrode is 1 to 500 cm 2 , spatial resolution ranges from 1 to 500 dots / cm 2 .
[0045] In some embodiments, the flexible elastomer 2 is made using a double template; Figure 6 As shown, the double template includes a first mold 6 adapted to the dome structure and a second mold 7 adapted to the micro-rough structure 3; the first mold 6 and the second mold 7 are respectively made by mechanical processing, and the first mold 6 and the second mold 7 are combined to obtain a double template; the double template is one or more of a PDMS mold, a polytetrafluoroethylene mold or a stainless steel mold.
[0046] It should be noted that the microscopic rough structure 3 includes but is not limited to: pyramidal, hemispherical, columnar arrays, and other objects with irregular rough surface structures. The ionic material precursor is solidified in the template to obtain a specific surface topology. Figure 7 As shown, a pre-cured system 8 is poured into a first mold 6 (a reverse dome structure template), and a second mold 7 (a micro-rough structure template) is placed over the first mold 6. After heat-crosslinking and curing, the mold is removed to produce a flexible elastomer with a dome structure on one side and a micro-rough structure on the other. The heat curing temperature is controlled between 20 and 80°C, and the curing time is 1 to 24 hours.
[0047] In some embodiments, the adhesive layer is made of acrylic or polyurethane adhesive, and has a thickness of 10 to 200 microns. Specifically, the flexible electrode and the elastomer are secured using double-sided tape. The double-sided tape only secures the area, leaving a liquid channel. When the entire device is immersed in seawater, the surrounding liquid fills the gap between the electrode and the elastomer.
[0048] The marine anti-ionization three-dimensional force array sensor provided by the present application is introduced in detail below through specific embodiments.
[0049] In terms of sensor array electrode selection, a flexible printed circuit board is used with a polyimide substrate, and an 8×8 double-sided circuit board is printed. The line width and line spacing of the interdigitated electrodes are both 300 microns, and the overall size of the array electrode area is a 78mm×78mm square.
[0050] To prepare the elastic material for the flexible elastomer, Sylgard 184PDMS organosilicone elastomer precursor and curing agent were added in a 10:1 mass ratio and mechanically stirred at 500 rpm for one hour to pre-mix the resulting silicone rubber precursor. A polytetrafluoroethylene mold was machined to create a hemispherical depression with a diameter of 85 mm. The silicone rubber precursor was poured into the mold and covered with roughened sandpaper. The mixture was cured at 80°C for 2 hours and then demolded, resulting in a flexible elastomer with a hemispherical protrusion on one side and a microscopic roughness on the other.
[0051] The electrodes and silicone rubber were attached using 25µm thick double-sided tape and placed in a 3.5% NaCl solution (simulating seawater), allowing the liquid to fill the gaps between the electrodes and the silicone rubber membrane. This resulted in a three-dimensional force array sensor structure. A single interdigital electrode was exposed at each of the four corners of the array electrode and immersed in the saltwater, forming an environmental self-calibration unit.
[0052] The marine anti-ionization three-dimensional force array sensor provided by the present application has a three-dimensional force sensing mechanism as follows: the elastic body of the dome structure can convert the shear force into the normal force of different sensing points. Specifically, when a vertical normal force is applied to the center of the dome, the normal force on the bottom of the elastic body is symmetrical in all directions; and when a force at a certain angle is applied to the dome, the shear force causes the force distribution of the elastic body to change. By comparing, analyzing and calculating the pressure distribution of the sensor array, the specific direction and magnitude of the applied force can be obtained, thereby realizing the detection of three-dimensional force. The flow direction can be judged by the difference in the pressure distribution of the sensor array; when the flow direction is fixed, the high and low flow rates are fed back to the sensor array and reflected in the difference in the average output value. The pressure distribution diagram presented by the pressure in different water flow directions is as follows: Figure 9 shown.
[0053] In terms of data acquisition, the sensor array is scanned in rows and columns through the array module acquisition system, which can collect array image information under different temperature and pressure changes. Data processing can obtain the pressure and temperature distribution.
[0054] Based on the above technical solution, the embodiment of the present application provides a marine anti-ionization three-dimensional force array sensor, comprising: a sensing array electrode 1, a flexible elastomer 2, and an adhesive layer for connecting the sensing array electrode 1 and the flexible elastomer 2; there is a gap between the sensing array electrode 1 and the flexible elastomer 2, and the liquid 4 (seawater) is filled in the gap between the sensing array electrode 1 and the flexible elastomer 2 by siphoning; the sensing array electrode 1 is a double-sided interdigitated electrode; the flexible elastomer 2 is made of a bionic design sensing deformation material; the flexible elastomer 2 is a dome structure elastomer, the side of the flexible elastomer 2 away from the sensing array electrode 1 is a dome structure, and the side of the flexible elastomer 2 close to the sensing array electrode 1 is a microscopic rough structure 3. The present application innovatively proposes a marine anti-ionization three-dimensional force array sensing structure, based on the anti-ionization sensing mechanism of environmental integration, through the bionic structure design of the sensing deformation material, and the design and processing of the high-resolution sensing array electrode to establish a three-dimensional force sensing array, and integrates a seawater conductivity test unit for sensor self-calibration, for monitoring underwater flow field information and feedback of flow velocity and direction.
[0055] Those skilled in the art will appreciate that the above-described embodiments are specific examples for implementing the present application, and that in actual applications, various changes in form and detail may be made thereto without departing from the spirit and scope of the present application. Any person skilled in the art may make changes and modifications without departing from the spirit and scope of the present application. Therefore, the scope of protection of the present application shall be subject to the scope defined in the claims.
Claims
1. A marine anti-ionization three-dimensional force array sensor, characterized in that: include: A sensing array electrode, a flexible elastic body, and an adhesive layer for connecting the sensing array electrode and the flexible elastic body; There is a gap between the sensing array electrode and the flexible elastic body, and liquid is filled in the gap between the sensing array electrode and the flexible elastic body by siphon action; The sensing array electrodes are double-sided interdigitated electrodes; The flexible elastomer is made of a biomimetic design of a sensing deformable material; the flexible elastomer is a dome structure elastomer, the side of the flexible elastomer away from the sensing array electrode is a dome structure, and the side of the flexible elastomer close to the sensing array electrode is a microscopic rough structure.
2. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The flexible elastic body is used to convert the shear force into a normal force at different sensing points; When a vertical normal force is applied to the center of the dome structure, the normal force on the bottom of the flexible elastic body is symmetrical in all directions; When a force at a certain angle is applied to the dome of the dome structure, the shear force causes the force distribution of the elastic body to change. By comparing, analyzing and calculating the pressure distribution of the sensing array electrodes, the direction and magnitude of the applied force can be obtained, realizing three-dimensional force detection.
3. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The microscopic rough structure is an irregular rough surface structure; The irregular rough surface structure includes an irregular rough surface structure having a pyramidal, hemispherical or columnar array.
4. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The bottom surface of the flexible elastic body is circular, and the sensing array electrodes are square or rectangular; The flexible elastic body covers a portion of the surface of the sensor array electrode, and the four corners of the sensor array electrode are exposed from the flexible elastic body, and the exposed electrodes serve as environmental self-calibration units.
5. The marine anti-ionization three-dimensional force array sensor according to claim 4, characterized in that: The four corners of the sensor array electrode each expose an electrode; and the environmental self-calibration unit is a single-point interdigital electrode.
6. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The biomimetic-designed sensing deformation material is a heat-cured cross-linked network; The heat-curing cross-linking network includes one of an acrylic elastomer, a polyurethane elastomer, and a silicone rubber elastomer; the silicone rubber elastomer includes polydimethylsiloxane, methylvinylsiloxane or fluorosilicone rubber.
7. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The sensing array electrodes are obtained by preparing a flexible circuit board using printed conductive materials; The flexible circuit board adopts a double-sided electrode routing design, each sensing unit is designed with an interdigitated electrode, and the row electrodes and column electrodes are designed on both sides of the flexible circuit board through a through-hole design; The material of the base of the flexible circuit board is one of polyimide and polyethylene terephthalate; The material of the interdigital electrodes is one of inert metals selected from the group consisting of gold, platinum, copper and silver.
8. The marine anti-ionization three-dimensional force array sensor according to claim 7, characterized in that: The thickness of the substrate of the flexible circuit board is 1 to 1000 microns; The line width of the interdigital electrodes is 0.1 to 1000 microns; The spacing between two adjacent electrodes of the interdigitated electrodes is 0.1 to 1000 microns; The spacing between two adjacent units of the sensor array electrode is 1 to 10,000 microns; The overall size of the electrode sensing array electrodes is 1 to 500 cm 2 , spatial resolution ranges from 1 to 500 dots / cm 2 .
9. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The flexible elastomer is made by using a double template; The double mold plate includes a first mold adapted to the dome structure and a second mold adapted to the microscopic rough structure; A first mold and a second mold are respectively manufactured by mechanical processing, and the first mold and the second mold are combined to obtain a double mold plate; The double template is one or more of a PDMS mold, a polytetrafluoroethylene mold or a stainless steel mold.
10. The marine anti-ionization three-dimensional force array sensor according to claim 1, characterized in that: The material of the bonding layer is acrylic glue or polyurethane glue, and the thickness of the bonding layer is 10 to 200 microns.