Large-size mask plate carrying walking robot

Abstract

The invention relates to the technical field of mask plate transportation, and discloses a large-size mask plate carrying walking robot which comprises a mechanical arm and a mask plate clamping jaw arranged at the movable end of the mechanical arm, a Y-axis sliding assembly is fixedly arranged on a base plate, and an X-axis driving assembly is arranged on the base plate. The X-axis driving assembly is in transmission connection with the X-axis guide rail assembly and is used for driving the base plate to directionally slide along the X-axis guide rail assembly; the mask clamping jaw comprises a visual recognition system and a servo clamp, the visual recognition system is used for recognizing the clamping position, the servo clamping jaw is used for being compatible with grabbing of masks with different thicknesses, and a control cabinet is arranged on the base plate. According to the invention, the six-axis mechanical arm is used for high-precision posture adjustment and mask grabbing; the X-axis moving platform and the Y-axis moving platform are used for supporting large-range planar movement; the intelligent clamping system supports grabbing of masks of different sizes and is compatible with masks of different thicknesses / sizes.

Description

Technical Field

[0001] The present invention relates to the technical field of mask transportation, in particular to a large-size mask transporting walking robot. Background Art

[0002] A photomask, also known as a mask or MASK, is a crucial tool used in the production of fine patterns in semiconductor-related fields. Using a photomask allows for rapid replication of the target pattern, enabling the mass production of semiconductor and display devices. As a master pattern, the mask's production process demands higher precision and quality. It requires chrome plating, gluing, photolithography, development, etching, stripping, inspection, and repair on a quartz or other material surface that meets transmittance and flatness requirements. The photomask requires constant transportation between each process. In mask manufacturing, the handling of large-scale masks requires extremely high levels of precision, cleanliness, safety, stability, and efficiency. However, traditional handling equipment and manual handling have the following problems: 1. Insufficient handling accuracy, which can easily cause damage to the mask; 2. Poor product size compatibility, making it difficult to accommodate multiple sizes; 3. High cleanliness requirements, making it difficult for traditional equipment to meet dust-free workshop standards; 4. Poor dynamic stability, which can easily cause vibration during handling; It is difficult to meet the requirements for accuracy, cleanliness, safety, stability, and handling efficiency during mask transportation, so a new type of handling robot is needed to solve this problem. Summary of the Invention

[0003] (1) Technical problems solved

[0004] In response to the shortcomings of the existing technology, the present invention provides a large-size mask transport walking robot, which solves the problem that the existing mask transport equipment is difficult to take into account the requirements of accuracy, cleanliness, safety and stability as well as transport efficiency during mask transportation.

[0005] (2) Technical solution

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] A large-size mask handling walking robot includes a robotic arm and a mask clamp arranged on the movable end of the robotic arm, the lower end of the robotic arm is fixedly connected to a mounting base, the lower end surface of the mounting base is fixedly connected to a sliding seat, and the sliding seat realizes directional sliding on the Y-axis through a Y-axis sliding assembly, the Y-axis sliding assembly is fixedly set on a base plate, an X-axis drive assembly is arranged on the base plate, an X-axis guide rail assembly is arranged below the base plate, the X-axis drive assembly and the X-axis guide rail assembly are transmission-connected and used to drive the base plate to slide directionally along the X-axis guide rail assembly; the mask clamp includes a visual recognition system and a servo clamp, the visual recognition system is used to identify the clamping position, and the servo clamp is used to be compatible with the grasping of masks of different thicknesses, and a control cabinet is provided on the base plate.

[0008] Preferably, the Y-axis sliding assembly includes a Y-axis mounting seat, the Y-axis mounting seat is fixedly arranged on the base plate through a vertical support base, the Y-axis driving assembly is fixedly arranged on the sliding seat through a connecting plate, the Y-axis guide rails are symmetrically arranged on the Y-axis mounting seat, the sliding seat and the Y-axis guide rails are slidingly connected, and the Y-axis driving assembly cooperates with the Y-axis rack arranged on the Y-axis mounting seat to drive the sliding seat to slide along the Y-axis guide rails.

[0009] Preferably, the Y-axis mounting seat is fixedly connected to a first drag chain assembly that cooperates with the sliding seat, and the Y-axis mounting seat is supported by a support frame and covered with a protective shell.

[0010] Preferably, the X-axis guide rail assembly includes an X-axis mounting shell, the X-axis guide rails are symmetrically arranged in the inner cavity of the X-axis mounting shell, an X-axis rack is fixedly connected to the side of the X-axis mounting shell close to the X-axis guide rail, the lower end surface of the base plate is slidably connected to the X-axis guide rail through a fixed slider assembly, and the X-axis drive assembly cooperates with the X-axis rack to drive the base plate to slide along the X-axis guide rail.

[0011] Preferably, a drag chain groove is arranged on one side of the X-axis mounting shell, and a second drag chain assembly is movably arranged in the drag chain groove. The vertical support base is fixedly connected to the movable end of the second drag chain assembly through a drag chain connecting frame.

[0012] Preferably, the side walls at both ends of the Y-axis mounting seat and the X-axis mounting shell are provided with buffer components for buffering and limiting, and the Y-axis mounting seat and the X-axis mounting shell are provided with limit switch components for limiting the maximum stroke.

[0013] Preferably, a mounting bracket is fixedly connected to the base plate, and the control cabinet is fixedly arranged on the mounting bracket.

[0014] Preferably, the effective stroke of the sliding seat is 2.2m, and the effective stroke of the base plate is 30m.

[0015] (3) Beneficial effects

[0016] The present invention has the following beneficial effects:

[0017] This large-size mask handling walking robot, through the set mechanical arm, X-axis and Y-axis drive components, when equipped with a 6-axis mechanical arm combined with a 2-axis mobile platform, makes the entire device have 8 degrees of freedom of movement, which can be used for high-precision posture adjustment and mask grasping; the set X-axis drive component can make the entire mechanism capable of large-scale plane movement; through the visual recognition system and intelligent clamping system configured on the mask clamp, it supports the grasping of different sizes of masks and is compatible with masks of different thicknesses / sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the main overall structure of the present invention;

[0019] Figure 2 This is a side view schematic diagram of the overall structure of the present invention;

[0020] Figure 3 This is a schematic diagram of the layout structure of the sliding seat of the present invention;

[0021] Figure 4 This is a schematic diagram of the overall structure of the X-axis guide rail assembly of the present invention;

[0022] Figure 5 This is a schematic diagram of the layout structure of the drag chain connecting frame of the present invention;

[0023] Figure 6 It is a schematic diagram of the overall structure of the Y-axis sliding assembly of the present invention.

[0024] In the figure: 1. Robotic arm; 2. Mask clamp; 3. Mounting base; 4. Sliding seat; 5. Y-axis sliding assembly; 50. Connecting plate; 51. Y-axis drive assembly; 52. Y-axis guide rail; 53. First drag chain assembly; 54. Y-axis mounting seat; 55. Y-axis rack; 56. Support frame; 57. Protective shell; 6. Vertical support base; 7. Base plate; 8. X-axis guide rail assembly; 80. X-axis mounting shell; 81. X-axis rack; 82. X-axis guide rail; 83. Drag chain slot; 84. Second drag chain assembly; 85. Slider assembly; 9. X-axis drive assembly; 10. Buffer assembly; 11. Mounting frame; 12. Control cabinet; 13. Drag chain connecting frame. DETAILED DESCRIPTION

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] See also Figure 1 The present invention provides a technical solution: a large-size mask handling walking robot, comprising a robotic arm 1 and a mask clamp 2 arranged on the movable end of the robotic arm 1, the lower end of the robotic arm 1 is fixedly connected to a mounting base 3, the lower end surface of the mounting base 3 is fixedly connected to a sliding seat 4, the sliding seat 4 realizes directional sliding on the Y-axis through a Y-axis sliding assembly 5, the Y-axis sliding assembly 5 is fixedly arranged on a base plate 7, an X-axis driving assembly 9 is arranged on the base plate 7, an X-axis guide rail assembly 8 is arranged below the base plate 7, the X-axis driving assembly 9 is transmission-connected to the X-axis guide rail assembly 8 and is used to drive the base plate 7 to slide in a directional manner along the X-axis guide rail assembly 8; the mask clamp 2 includes a visual recognition system and a servo clamp, the visual recognition system is used to identify the clamping position, and the servo clamp is used to be compatible with the grasping of masks of different thicknesses, and a control cabinet 12 is provided on the base plate 7.

[0027] The present invention utilizes a robotic arm 1, X-axis and Y-axis sliding assemblies 5, and a two-axis mobile platform in addition to a six-axis robotic arm 1. This allows the entire device to achieve eight degrees of freedom, enabling high-precision posture adjustment and reticle gripping. The X-axis drive assembly 9 enables wide-range planar movement. The visual recognition system and intelligent gripping system configured on the reticle gripper 2 support gripping of reticles of varying sizes and thicknesses. The entire handling robot utilizes a host computer, Siemens PLC, and KUKA integrated control system for precise control.

[0028] In this embodiment, the Y-axis sliding assembly 5 includes a Y-axis mounting seat 54, which is fixed on the base plate 7 through a vertical support base 6. A Y-axis driving assembly 51 is fixed on the sliding seat 4 through a connecting plate 50. Y-axis guide rails 52 are symmetrically arranged on the Y-axis mounting seat 54. The sliding seat 4 and the Y-axis guide rails 52 are slidingly connected. The Y-axis driving assembly 51 cooperates with the Y-axis rack 55 arranged on the Y-axis mounting seat 54 to drive the sliding seat 4 to slide along the Y-axis guide rails 52.

[0029] Reference Figure 2 、 3As shown in Figure 6 , in this embodiment, a first drag chain assembly 53 that cooperates with the sliding seat is fixedly connected to the Y-axis mounting seat 54. A protective shell 57 is arranged on the Y-axis mounting seat 54 via a support frame 56. When the sliding seat 4 slides along the Y-axis guide rail 52, the first drag chain assembly 53 can cooperate with the Y-axis guide rail 52 to ensure the precise movement of the entire sliding seat 4 and improve the smoothness of movement. The protective shell 57 provided above the Y-axis mounting seat 54 can improve the protection level of the entire Y-axis sliding assembly 5, preventing the external environment from affecting the accuracy of the Y-axis guide rail 52, the Y-axis drive assembly 51, and the Y-axis rack 55.

[0030] Reference Figure 4 and 6 As shown, in this embodiment, the X-axis guide rail assembly 8 includes an X-axis mounting shell 80, with X-axis guide rails 82 symmetrically arranged in the inner cavity of the X-axis mounting shell 80. An X-axis rack 81 is fixedly connected to the side of the X-axis mounting shell 80 near the X-axis guide rail 82. The lower end surface of the base plate 7 is slidably connected to the X-axis guide rail 82 via a fixed slider assembly 85. The X-axis drive assembly 9 cooperates with the X-axis rack 81 to drive the base plate 7 to slide along the X-axis guide rail 82. The X-axis drive assembly 9 and the Y-axis drive assembly 51 can be configured to drive the base plate 7 and the sliding seat 4 to slide in a directional manner through the drive mode of a motor with a reducer and a gear rack. The high-precision gear rack and precision reducer transmission strictly guarantee the motion accuracy and ensure smooth movement.

[0031] Reference Figure 4 and 5 As shown, in this embodiment, a drag chain slot 83 is disposed on one side of the X-axis mounting housing 80. A second drag chain assembly 84 is movably disposed within the drag chain slot 83. The vertical support base is fixedly connected to the movable end of the second drag chain assembly 84 via a drag chain connector 13. Due to the long travel range in the X-axis direction, the provision of the drag chain slot 83 and the second drag chain assembly 84 ensures smooth movement when the base plate 7 is driven by the X-axis drive assembly 9 in conjunction with the X-axis rack 81, thereby ensuring accurate handling during each transport.

[0032] Reference Figure 4 and 6 As shown, in this embodiment, the sidewalls of both ends of the Y-axis mounting base 54 and the X-axis mounting housing 80 are provided with buffer assemblies 10 for buffering and limiting. Both the Y-axis mounting base 54 and the X-axis mounting housing 80 are also provided with limit switch assemblies for limiting the maximum travel. The buffer assemblies 10 provide a buffering and limiting function when the sliding base 4 or the base plate 7 slides to its maximum travel, effectively preventing the sliding base 4 or the base plate 7 from directly colliding with the housing and affecting the overall installation accuracy.

[0033] In this embodiment, a mounting frame 11 is fixedly connected to the base plate, and a control cabinet 12 is fixedly disposed on the mounting frame 11 .

[0034] In this embodiment, the effective stroke of the sliding seat 4 is 2.2 m, and the effective stroke of the base plate 7 is 30 m.

[0035] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations. The phrase "includes an element defined by..." does not exclude the presence of other identical elements in the process, method, article, or device that includes the element.

[0036] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A large-size mask handling robot, comprising a robotic arm and a mask gripper disposed on the movable end of the robotic arm, characterized in that: The lower end of the robotic arm is fixedly connected to a mounting base, the lower end surface of the mounting base is fixedly connected to a sliding seat, the sliding seat realizes directional sliding on the Y-axis through a Y-axis sliding assembly, the Y-axis sliding assembly is fixedly arranged on the base plate, an X-axis drive assembly is arranged on the base plate, an X-axis guide rail assembly is arranged under the base plate, the X-axis drive assembly and the X-axis guide rail assembly are transmission-connected and used to drive the base plate to slide directionally along the X-axis guide rail assembly; the mask clamp includes a visual recognition system and a servo clamp, the visual recognition system is used to identify the clamping position, the servo clamp is used to be compatible with the grasping of masks of different thicknesses, and a control cabinet is provided on the base plate.

2. The large-size mask transport walking robot according to claim 1, characterized in that: The Y-axis sliding assembly includes a Y-axis mounting seat, which is fixedly arranged on the base plate through a vertical support base. A Y-axis driving assembly is fixedly arranged on the sliding seat through a connecting plate. Y-axis guide rails are symmetrically arranged on the Y-axis mounting seat. The sliding seat and the Y-axis guide rails are slidingly connected. The Y-axis driving assembly cooperates with the Y-axis rack arranged on the Y-axis mounting seat to drive the sliding seat to slide along the Y-axis guide rail.

3. The large-size mask transport walking robot according to claim 2, characterized in that: The Y-axis mounting seat is fixedly connected to a first drag chain assembly that cooperates with the sliding seat. The Y-axis mounting seat is supported by a support frame and is covered with a protective shell.

4. The large-size mask transport walking robot according to claim 2, characterized in that: The X-axis guide rail assembly includes an X-axis mounting shell, the X-axis guide rails are symmetrically arranged in the inner cavity of the X-axis mounting shell, an X-axis rack is fixedly connected to the side of the X-axis mounting shell close to the X-axis guide rail, the lower end surface of the base plate is slidably connected to the X-axis guide rail through a fixed slider assembly, and the X-axis drive assembly cooperates with the X-axis rack to drive the base plate to slide along the X-axis guide rail.

5. The large-size mask transport walking robot according to claim 4, characterized in that: A drag chain groove is arranged on one side of the X-axis mounting shell, and a second drag chain assembly is movably arranged in the drag chain groove. The vertical support base is fixedly connected to the movable end of the second drag chain assembly through a drag chain connecting frame.

6. The large-size mask transport walking robot according to claim 5, characterized in that: The side walls at both ends of the Y-axis mounting seat and the X-axis mounting shell are provided with buffer components for buffering and limiting, and the Y-axis mounting seat and the X-axis mounting shell are provided with limit switch components for limiting the maximum stroke.

7. The large-size mask transport walking robot according to claim 6, characterized in that: A mounting frame is fixedly connected to the base plate, and the control cabinet is fixedly arranged on the mounting frame.

8. The large-size mask transport walking robot according to claim 7, characterized in that: The effective stroke of the sliding seat is 2.2m, and the effective stroke of the base plate is 30m.

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