Visual inspection equipment for high-purity noble metal evaporation material and inspection method thereof

Abstract

The application discloses a kind of high-purity noble metal evaporation material visual inspection equipment and its detection method, the visual inspection equipment includes: material turntable, is rotatably installed on corresponding workbench;Feed guide, for high-purity noble metal evaporation material is fed to the outside of material turntable;End face detection mechanism, contains a group of first industrial camera;Side detection mechanism, contains mobile support, the bottom side of mobile support is fixedly connected with reflective ceramic sheet upwards, the position of reflective ceramic sheet is taken as center point, and 4N second industrial cameras are movably arranged in annular array on upper side;Camera driving device, including mobile driving mechanism for mobile support driving, and driving assembly is arranged in cross shape, the driving assembly is rotatably driven by servo motor fixedly installed on the upper end of reflective ceramic sheet.The application can effectively improve the visual inspection accuracy of high-purity noble metal evaporation material, and can effectively prevent high-purity noble metal evaporation material from appearing obvious surface scratch due to detection.

Description

Technical Field

[0001] The present invention relates to the technical field of detection of high-purity precious metal evaporation materials, and in particular to a visual detection device and a detection method for high-purity precious metal evaporation materials. Background Art

[0002] With the rapid development of the semiconductor industry, the feature sizes of semiconductor devices (such as integrated circuit chips) continue to shrink, while device integration is increasing. This in turn places increasing demands on the evaporation materials used for coating. The impurity content in high-purity gold evaporation materials, particularly carbon and oxygen, can affect evaporation efficiency. When impurity levels exceed the set value, surface defects such as color shift or tiny specks may appear. Therefore, visual inspection of high-purity gold evaporation materials can effectively assist in determining their impurity content.

[0003] Existing visual inspection equipment for high-purity precious metal evaporation materials typically consists of a material conveyor (turntable), a set of first industrial cameras for capturing images of the material's upper and lower end surfaces, and four evenly spaced second industrial cameras for capturing side image data. The high-purity precious metal evaporation material, conveyed by a corresponding loading mechanism, enters the feed end of the material conveyor. As the material conveyor moves, it sequentially passes through the positions of the first industrial cameras for capturing images of its upper and lower end surfaces, and through the positions of four second industrial cameras for capturing images of its entire side surfaces. The captured images of the upper and lower end surfaces and the entire side surfaces are then compared with images of unqualified materials in a database to determine if the high-purity precious metal evaporation material is acceptable.

[0004] Such visual inspection equipment for high-purity precious metal evaporation materials has the following defects during actual use: 1) During the process of loading the material into the material transmission mechanism, there will be certain differences in its position and direction. When acquiring the image data of the upper and lower end faces of the material, the impact is relatively small, but when acquiring the side image data, the impact will be greater, because the images acquired by the four industrial cameras each time are likely to contain corners, and the positions of the corners are mostly not fixed, which will cause great trouble for subsequent image comparison and affect the accuracy of automatic detection; 2) It is difficult to classify and collect the high-purity precious metal evaporation materials after completion of the inspection. During the automatic collection process, the materials are prone to scratches on their surface due to collisions between materials and their own friction, which is very troublesome.

[0005] Therefore, the purpose of the present invention is to design a visual inspection device and a detection method for high-purity precious metal evaporation materials that can effectively and automatically adjust the side image acquisition angle according to the feeding position and direction of the high-purity precious metal evaporation materials, thereby effectively assisting in improving the visual inspection accuracy of the high-purity precious metal evaporation materials; and can effectively reduce the mechanical damage of the high-purity precious metal evaporation materials during automatic collection, thereby preventing the high-purity precious metal evaporation materials from having obvious surface scratches due to detection. Summary of the Invention

[0006] In response to the technical problems existing in the above-mentioned prior art, the present invention provides a visual inspection device and a detection method for high-purity precious metal evaporation materials. The visual inspection device and the detection method for high-purity precious metal evaporation materials can effectively solve the technical problems existing in the above-mentioned prior art.

[0007] The technical solution of the present invention is:

[0008] A visual inspection device for high-purity precious metal evaporation materials, comprising:

[0009] The material turntable is rotatably mounted on the corresponding workbench and driven by the corresponding rotary drive motor. The periphery of the material turntable is bonded with a corresponding dark-colored welt. The workbench is sequentially provided with a loading station, an end face inspection station, a side inspection station, and an unloading station.

[0010] A feed guide trough is provided at the loading station of the workbench and is used to load high-purity precious metal evaporation material to the outside of the material turntable, wherein the high-purity precious metal evaporation material is arranged in a rectangular shape;

[0011] an end face detection mechanism, comprising a set of first industrial cameras arranged at different heights at end face detection stations on the workbench, with cameras of the first industrial cameras respectively facing the material turntable, for acquiring image data of the upper and lower end faces of the high-purity precious metal evaporation material rotating through the end face detection stations, and obtaining, based on the image of the upper end face of the high-purity precious metal evaporation material, the positions of its two center lines and the closest distance L1 between the connection point of the two center lines and the dark edge;

[0012] A side detection mechanism comprising a movable support member movably disposed at a side detection station of the workbench, wherein a corresponding reflective ceramic plate is fixedly connected upward to the bottom side of the movable support member, and a second industrial camera having 4N cameras tilted inwardly and movably disposed in a circular array centered on the position of the reflective ceramic plate on the upper side of the movable support member, wherein N is a positive integer;

[0013] The camera driving device includes a movable driving mechanism for driving a movable support and a driving assembly arranged in a cross shape, wherein the driving assembly is driven to rotate by a servo motor fixedly installed at the upper end of the reflective ceramic plate; the movable driving mechanism drives the movable support to move inward to the center of the reflective ceramic plate facing the connection point of the two midlines of the upper end surface image of the high-purity precious metal evaporation material; the servo motor drives the driving assembly to rotate to an angle corresponding to the two midlines of the upper end surface image of the high-purity precious metal evaporation material, and starts to drive the four second industrial cameras close to the driving assembly inward, and the second industrial cameras that move inward acquire image data of the four sides of the high-purity precious metal evaporation material that rotates through the end surface detection station.

[0014] A corresponding annular member is fixed inwardly on the upper side of the movable support member, and a mounting plate located at the upper end of the reflective ceramic piece is fixed upwardly fixedly installed through a number of upwardly inclined connecting rods equal to the number of the second industrial cameras. A first light source facing the reflective ceramic piece is installed on the bottom side of the mounting plate. The servo motor is fixedly installed on the upper side of the mounting plate. The driving assembly includes four fixed pipes fixed to the output shaft ends of the servo motor in a cross shape, and the outer ends of the fixed pipes are respectively installed with corresponding first electromagnets; corresponding slides are respectively movably installed on the connecting rods, and the second industrial cameras are respectively fixedly installed on the corresponding slides. The inner sides of the slides are respectively fixed with corresponding iron plates, and two adjacent iron plates are respectively set with gaps.

[0015] The outer sides of the fixed pipes are movably connected to corresponding iron rods through coil springs. The first electromagnet is fixedly installed on the outer ends of the iron rods. The middle part of the fixed pipe is fixedly connected to a second electromagnet for adsorbing and driving the iron rods.

[0016] The middle parts of the connecting rods are respectively provided with corresponding clearance grooves, and the cameras of the second industrial cameras respectively pass through the clearance grooves and are arranged to be tilted inwards.

[0017] The feed end of the feed guide trough is connected to the discharge end of the external feeding vibration disk, and the discharge end of the feed guide trough is located at the upper outer side of the material turntable.

[0018] A [-shaped support is fixedly installed on the end face detection station of the workbench, and a group of the first industrial cameras are respectively fixedly connected to the [-shaped support. Corresponding second light sources are respectively fixedly installed on the positions of the [-shaped support where the first industrial cameras are not installed.

[0019] The first light source and the second light source are LED lamps respectively.

[0020] A corresponding material collection box is fixedly connected to the unloading station of the workbench, the opening of the material collection box is located on the lower side of the material turntable, and the material collection box is divided into a qualified product collection chamber and an unqualified product collection chamber. A material baffle plate is fixedly connected upward to the middle of the material collection box, and a group of corresponding air nozzle mounting plates are fixedly installed inward on the upper end of the material baffle plate, and air nozzles for blowing high-purity precious metal evaporation materials into the qualified product collection chamber or the unqualified product collection chamber are respectively fixedly installed on the air nozzle mounting plates.

[0021] Corresponding collecting conveyor belts are respectively installed in the qualified product collection chamber and the unqualified product collection chamber on the bottom side of the baffle plate, and the bottom sides of the outer ends of the qualified product collection chamber and the unqualified product collection chamber are respectively recessed with grooves for collecting the high-purity precious metal evaporation materials output by the collecting conveyor belts.

[0022] A detection method based on the above-mentioned visual detection equipment of high-purity precious metal evaporation material includes the following specific detection steps:

[0023] S1, high-purity precious metal evaporation material enters the outer side of the material turntable through the feed guide groove. As the material turntable rotates, the high-purity precious metal evaporation material passes through the end surface inspection station, the side inspection station, and the unloading station in sequence;

[0024] S2, a group of the first industrial cameras acquires image data of the upper and lower end surfaces of the high-purity precious metal evaporation material rotating through the end surface inspection station, and obtains the positions of the two center lines of the high-purity precious metal evaporation material and the closest distance L1 between the connection point of the two center lines and the dark edge based on the upper end surface image;

[0025] S3, the high-purity precious metal evaporation material passes through the side inspection station as the material turntable rotates, and the mobile drive mechanism of the camera drive device drives the mobile support to move inward to the center of the reflective ceramic sheet at a distance L1 from the dark edge;

[0026] S4, the servo motor drives the drive assembly to rotate to an angle corresponding to two midline angles of the upper end surface image of the high-purity precious metal evaporation material, and starts to drive four second industrial cameras close to the drive assembly inward to obtain image data of four sides of the high-purity precious metal evaporation material rotating through the end surface inspection station;

[0027] S5, comparing the obtained image data of the upper and lower end surfaces and the image data of the four side surfaces of the high-purity precious metal evaporation material with the unqualified images in the database, and determining the product as unqualified if there is a similarity, and determining the product as qualified if there is no similarity;

[0028] S6, classifying and collecting the high-purity precious metal evaporation materials delivered to the unloading station into qualified products and unqualified products.

[0029] Advantages of the present invention:

[0030] 1) The present invention first adheres a corresponding dark edging to the periphery of the material turntable. After the first industrial camera acquires the upper and lower end surface image data of the high-purity precious metal evaporation material, it can simultaneously acquire the two center line positions of the upper end surface image of the high-purity precious metal evaporation material and the closest distance L1 between the connection point of the two center lines and the dark edging; then, the side detection mechanism is improved and designed. First, a reflective ceramic sheet is fixedly connected upward on the bottom side of the movable support, and 4N reflective ceramic sheets are movably arranged in a circular array on the upper side of the movable support with the position of the reflective ceramic sheet as the center point. The second industrial camera with the camera tilted inward drives the mobile support to move inward through the mobile driving mechanism to the center of the reflective ceramic plate facing the connection point of the two midlines of the upper end surface image of the high-purity precious metal evaporation material. Then, the servo motor drives the driving component to rotate to the angle corresponding to the two midlines of the upper end surface image of the high-purity precious metal evaporation material, and starts to drive the four second industrial cameras close to the driving component inward. After moving inward, the second industrial camera acquires image data of the four sides of the high-purity precious metal evaporation material that rotates through the end surface detection station.

[0031] In this way, the second industrial camera can be effectively adjusted to the position accurately, and the four second industrial cameras closest to the four sides of the high-purity precious metal evaporation material can be effectively driven to the image recognition area, so as to accurately obtain image data of the four sides of the high-purity precious metal evaporation material, thereby being able to effectively and automatically adjust the side image acquisition angle according to the feeding position and direction of the high-purity precious metal evaporation material, so as to reduce the influence of the corner part on the contrast of the side image data, thereby effectively assisting in improving the visual inspection accuracy of the high-purity precious metal evaporation material.

[0032] 2) The movable support member of the present invention has an annular member fixed inwardly on its upper side. A mounting plate, positioned directly above the reflective ceramic plate, is fixedly mounted upwardly via an equal number of upwardly angled connecting rods to the number of second industrial cameras. A first light source, facing the reflective ceramic plate, is mounted on the underside of the mounting plate. The first light source effectively illuminates the area downward and irradiates the reflective ceramic plate, reflecting light upward from the plate. This creates a transparent appearance on the entire side of the high-purity precious metal evaporation material. Furthermore, with the exception of the four inwardly positioned second industrial cameras, the other second industrial cameras do not block or reflect light, further effectively improving the accuracy of side image data acquisition.

[0033] 3) The servo motor of the present invention is fixedly installed on the upper side of the mounting plate, and the driving assembly includes four fixed pipes fixedly connected to the output shaft end of the servo motor in a cross shape, and the outer ends of the fixed pipes are respectively installed with corresponding first electromagnets, and the connecting rods arranged at an upward angle are respectively movably installed with corresponding slides, and the second industrial cameras are respectively fixedly installed on the corresponding slides, and the inner sides of the slides are respectively fixed with corresponding iron plates, and the two adjacent iron plates are respectively arranged with gaps; and the outer sides of the fixed pipes are respectively movably connected to the corresponding iron rods through coil springs, and the first electromagnet is fixedly installed on the outer ends of the iron rods, and a second electromagnet for adsorbing and driving the iron rods is fixedly connected to the middle of the fixed pipes.

[0034] In this way, after the drive assembly is rotated and driven into position, the first electromagnet is pre-energized to form an adsorption drive for the corresponding iron plate, and then the second electromagnet is energized to form an adsorption drive for the iron rod, thereby effectively forming a sufficient travel drive for the slide, that is, the second industrial camera, to ensure that the second industrial camera can smoothly reach its position to acquire side image data. After the side image data acquisition is completed, the first electromagnet is de-energized, causing the slide mounted with the second industrial camera to slowly move outward and reset under its own weight, thereby preventing the second industrial camera from generating excessive vibration due to rapid reset, thereby maintaining the performance of the second industrial camera; and the drive assembly is rotated to the corresponding position under the drive of the servo motor, and then the second electromagnet is de-energized, and the iron rod is quickly reset under the drive of the coil spring to prepare for the next side image data acquisition, thereby effectively ensuring the practical effect of the present invention.

[0035] 4) A baffle plate is fixedly connected upwardly to the middle of the collection box of the present invention, and corresponding collection conveyor belts are rotatably installed in the qualified product collection chamber and the unqualified product collection chamber on the bottom side of the baffle plate, and the bottom sides of the outer ends of the qualified product collection chamber and the unqualified product collection chamber are respectively recessed with grooves for collecting the high-purity precious metal evaporation material output by the collection conveyor belt.

[0036] The collection conveyor belt is used to buffer and receive the high-purity precious metal evaporation materials blown into the qualified product collection cavity or the unqualified product collection cavity of the collection box, and then convey them one by one to the corresponding grooves for collection, so as to prevent the high-purity precious metal evaporation materials from excessive friction and collision during material discharge, thereby effectively reducing the mechanical damage of the high-purity precious metal evaporation materials during automatic collection, and preventing the high-purity precious metal evaporation materials from having obvious surface scratches due to testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of the present invention.

[0038] Figure 2 It is a cross-sectional view of the present invention.

[0039] Figure 3 This is a schematic diagram of the structure of high-purity precious metal evaporation material located on the material turntable.

[0040] Figure 4 It is a distribution diagram of the feed guide trough, end face detection mechanism, side detection mechanism and collection box.

[0041] Figure 5 It is a structural schematic diagram of the side detection mechanism and camera driving device.

[0042] Figure 6 This is a schematic diagram of the other side structure of the side detection mechanism and the camera driving device.

[0043] Figure 7 It is a cross-sectional view of the side detection mechanism and camera driving device.

[0044] Figure 8 It is a structural diagram of the aggregate box.

[0045] In the accompanying drawings: material turntable 1, workbench 2, drive motor 3, dark welt 101, feed guide trough 4, high-purity precious metal evaporation material 5, end face detection mechanism 6, first industrial camera 601, [shaped support 602, second light source 603, side detection mechanism 7, mobile support 701, reflective ceramic sheet 702, second industrial camera 703, camera drive device 8, drive mechanism 801, drive assembly 802, fixed pipe 8021, the first An electromagnet 8022, a coil spring 8023, an iron rod 8024, a second electromagnet 8025, a servo motor 803, a ring part 9, a connecting rod 10, a clearance groove 1001, a mounting plate 11, a first light source 12, a slide 13, an iron plate 14, a collection box 15, a qualified product collection chamber 1501, a unqualified product collection chamber 1502, a material baffle 16, an air nozzle mounting plate 17, an air nozzle 18, a collection conveyor belt 19, and a groove 20. DETAILED DESCRIPTION

[0046] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the embodiments and the accompanying drawings:

[0047] Example 1

[0048] refer to Figure 1-8 , a visual inspection device for high-purity precious metal evaporation materials, comprising:

[0049] The material turntable 1 is rotatably mounted on the corresponding workbench 2 and driven by the corresponding rotary drive motor 3. The periphery of the material turntable 1 is bonded with a corresponding dark welt 101. The workbench 2 is sequentially provided with a loading station, an end face inspection station, a side inspection station, and an unloading station;

[0050] The feed guide 4 is provided at the loading station of the workbench 2 and is used to load the high-purity precious metal evaporation material 5 onto the outside of the material turntable 1. The high-purity precious metal evaporation material 5 is arranged in a rectangular shape;

[0051] The end face detection mechanism 6 includes a set of first industrial cameras 601 arranged at different heights at the end face detection stations of the workbench 2. The cameras of the first industrial cameras 601 are respectively directed toward the material turntable 1, and are used to obtain image data of the upper and lower end faces of the high-purity precious metal evaporation material 5 rotating through the end face detection stations, and obtain the positions of the two center lines of the high-purity precious metal evaporation material 5 and the closest distance L1 between the connection point of the two center lines and the dark edge 101 based on the image of the upper end face of the high-purity precious metal evaporation material 5;

[0052] The side detection mechanism 7 includes a movable support 701 movably disposed at the side detection station of the workbench 2. A corresponding reflective ceramic plate 702 is fixedly connected upward to the bottom side of the movable support 701. The upper side of the movable support 701 is movably provided with a second industrial camera 703 with 12 cameras tilted inward in a circular array centered on the position of the reflective ceramic plate 702.

[0053] The camera driving device 8 includes a mobile driving mechanism 801 for driving the mobile support 701. The mobile driving mechanism 801 in this embodiment adopts a screw driving mechanism and a driving component 802 arranged in a cross shape. The driving component 802 is rotated by a servo motor 803 fixedly installed at the upper end of the reflective ceramic plate 702; the mobile driving mechanism 801 drives the mobile support 701 to move inward to the center of the reflective ceramic plate 702, which is directly opposite to the connection point of the two midlines of the upper end surface image of the high-purity precious metal evaporation material 5; the servo motor 803 drives the driving component 802 to rotate to an angle corresponding to the two midlines of the upper end surface image of the high-purity precious metal evaporation material 5, and starts to drive the four second industrial cameras 703 close to the driving component inward. After moving inward, the second industrial cameras 703 obtain image data of the four sides of the high-purity precious metal evaporation material 5 that rotates through the end surface detection station.

[0054] The present invention first bonds a corresponding dark border 101 to the periphery of the material turntable 1. After the first industrial camera 601 acquires the upper and lower end surface image data of the high-purity precious metal evaporation material 5, it can simultaneously acquire the two center line positions of the upper end surface image of the high-purity precious metal evaporation material 5 and the closest distance L1 between the connection point of the two center lines and the dark border 101. Then, the side detection mechanism 7 is improved and designed. First, a reflective ceramic sheet 702 is fixedly connected upward to the bottom side of the movable support 701, and 12 cameras are movably arranged in a circular array on the upper side of the movable support 701 with the position of the reflective ceramic sheet 702 as the center point. The inward-tilted second industrial camera 703 drives the mobile support 701 to move inward to the center of the reflective ceramic plate 702, which is opposite to the connection point of the two midlines of the upper end surface image of the high-purity precious metal evaporation material 5, through the mobile driving mechanism 801. Then, the servo motor 803 drives the driving component 802 to rotate to the angle corresponding to the two midlines of the upper end surface image of the high-purity precious metal evaporation material 5, and starts to drive the four second industrial cameras 703 close to the driving component 802 inward. After moving inward, the second industrial camera 703 obtains image data of the four sides of the high-purity precious metal evaporation material 5 that rotates through the end surface detection station. In this way, the second industrial camera 703 can be effectively adjusted to the position accurately, and the four second industrial cameras 703 closest to the four sides of the high-purity precious metal evaporation material 5 can be effectively driven to the image recognition area to accurately acquire image data of the four sides of the high-purity precious metal evaporation material 5, thereby being able to effectively and automatically adjust the side image acquisition angle according to the feeding position and direction of the high-purity precious metal evaporation material 5, so as to reduce the influence of the corner part on the contrast of the side image data, thereby effectively assisting in improving the visual inspection accuracy of the high-purity precious metal evaporation material 5.

[0055] A corresponding annular member 9 is fixedly connected inwardly to the upper side of the movable support member 701, and a mounting plate 11 located at the upper end of the reflective ceramic plate 702 is fixedly installed upward through an upwardly inclined connecting rod 10 equal in number to the second industrial camera 703. A first light source 12 facing the reflective ceramic plate 702 is installed on the bottom side of the mounting plate 11. The servo motor 803 is fixedly installed on the upper side of the mounting plate 11. The driving assembly 802 includes four fixed pipes 8021 fixedly connected to the output shaft end of the servo motor 803 in a cross shape, and the outer ends of the fixed pipes 8021 are respectively installed with corresponding first electromagnets 8022; corresponding slides 13 are respectively movably installed on the connecting rods 10, and the second industrial cameras 703 are respectively fixedly installed on the corresponding slides 13. The inner sides of the slides 13 are respectively fixed with corresponding iron plates 14, and two adjacent iron plates 14 are respectively set with gaps.

[0056] The outer side of the fixed pipe 8021 is movably connected to the corresponding iron rod 8024 through a coil spring 8023, the first electromagnet 8022 is fixedly installed on the outer end of the iron rod 8024, and the middle part of the fixed pipe 8021 is fixedly connected to the second electromagnet 8025 for adsorbing and driving the iron rod 8024.

[0057] The movable support member 701 of the present invention has a ring member 9 fixedly attached inwardly on its upper side. A mounting plate 11, located directly above the reflective ceramic plate 702, is fixedly mounted upwardly via an upwardly angled connecting rod 10, the number of which is equal to the number of second industrial cameras 703. A first light source 12, facing the reflective ceramic plate 702, is mounted on the bottom side of the mounting plate 11. Under the action of the first light source 12, regional illumination is effectively generated downward, and light is irradiated onto the reflective ceramic plate 702, causing it to reflect upwards to a certain extent, rendering the entire side of the high-purity precious metal evaporation material 5 transparent. Furthermore, except for the four inwardly displaced second industrial cameras 703, the other second industrial cameras 703 do not block or reflect light, thereby further effectively improving the accuracy of the side image data acquisition.

[0058] The servo motor 803 of the present invention is fixedly installed on the upper side of the mounting plate 11, and the driving assembly 802 includes four fixed pipes 8021 fixedly connected to the output shaft end of the servo motor 803 in a cross shape. The outer ends of the fixed pipes 8021 are respectively installed with corresponding first electromagnets 8022, and the corresponding slides 13 are movably installed on the connecting rods 10 arranged upward. The second industrial cameras 703 are respectively fixedly installed on the corresponding slides 13, and the inner sides of the slides 13 are respectively fixedly connected with corresponding iron plates 14, and the two adjacent iron plates 14 are respectively set with gaps; and the outer sides of the fixed pipes 8021 are respectively movably connected to the corresponding iron rods 8024 through coil springs 8023, and the first electromagnet 8022 is fixedly installed on the outer ends of the iron rods 8024, and the second electromagnet 8025 for adsorbing and driving the iron rods 8024 is fixedly connected to the middle part of the fixed pipes 8021. In this way, after the driving component 802 is rotated and driven into position, the first electromagnet 8022 can be energized in advance to form an adsorption drive for the corresponding iron plate 14, and then the second electromagnet 8025 is energized to form an adsorption drive for the iron rod 8024, thereby effectively forming a sufficient travel drive for the slide 13, that is, the second industrial camera 703, to ensure that the second industrial camera 703 can be smoothly in position to obtain side image data. After the side image data acquisition is completed, the first electromagnet 8022 is powered off, so that the slide 13 on which the second industrial camera 703 is installed slowly moves outward and resets under the action of its own weight to prevent the second industrial camera 703 from generating excessive vibration due to rapid reset, thereby maintaining the performance of the second industrial camera 703; and the driving component 802 is rotated to the corresponding position under the drive of the servo motor 803, and then the second electromagnet 8025 is powered off, and the iron rod 8024 is quickly reset under the drive of the coil spring 8023 to prepare for the next side image data acquisition work, thereby effectively ensuring the practical effect of the present invention.

[0059] The middle of the connecting rod 10 is respectively provided with a corresponding clearance groove 1001, and the camera head of the second industrial camera 703 passes through the clearance groove 1001 and is arranged inwardly.

[0060] The feed end of the feed guide chute 4 is connected to the discharge end of the external feeding vibration plate, and the discharge end of the feed guide chute 4 is located at the upper outer side of the material turntable 1 .

[0061] A [-shaped support 602 is fixedly installed on the end face detection station of the workbench 2, and a group of the first industrial cameras 601 are respectively fixedly connected to the [-shaped support 602. Corresponding second light sources 603 are respectively fixedly installed on the positions of the [-shaped support 602 where the first industrial cameras 601 are not installed.

[0062] The first light source 12 and the second light source 603 are LED lamps respectively.

[0063] A corresponding material collection box 15 is fixedly connected to the unloading station of the workbench 2, the opening of the material collection box 15 is located on the lower side of the material turntable 1, and the material collection box 15 is divided into a qualified product collection chamber 1501 and an unqualified product collection chamber 1502. A material baffle plate 16 is fixedly connected upward to the middle of the material collection box 15, and a group of corresponding air nozzle mounting plates 17 are fixedly installed inwardly on the upper end of the material baffle plate 16. Air nozzles 18 for blowing high-purity precious metal evaporation material 5 into the qualified product collection chamber 1501 or the unqualified product collection chamber 1502 are respectively fixedly installed on the air nozzle mounting plates 17.

[0064] Corresponding collecting conveyor belts 19 are respectively rotatably installed in the qualified product collection chamber 1501 and the unqualified product collection chamber 1502 on the bottom side of the baffle plate 16, and grooves 20 for collecting the high-purity precious metal evaporation material 5 output by the collecting conveyor belt 19 are respectively recessed on the bottom sides of the outer ends of the qualified product collection chamber 1501 and the unqualified product collection chamber 1502.

[0065] The high-purity precious metal evaporation material 5 blown into the qualified product collection chamber 1501 or the unqualified product collection chamber 1502 of the collection box 15 is buffered and received through the collection conveyor belt 19, and then conveyed one by one to the corresponding groove 20 for collection, so as to prevent the high-purity precious metal evaporation material 5 from excessive friction and collision during material discharge, thereby effectively reducing the mechanical damage of the high-purity precious metal evaporation material 5 during automatic collection, and preventing the high-purity precious metal evaporation material from having obvious surface scratches due to detection.

[0066] Example 2:

[0067] A detection method for the visual detection equipment of the high-purity precious metal evaporation material based on the above-mentioned embodiment 1 includes the following specific detection steps:

[0068] S1, high-purity precious metal evaporation material 5 enters the outer side of the material turntable 1 through the feed guide 4. As the material turntable 1 rotates, the high-purity precious metal evaporation material 5 passes through the end surface inspection station, the side inspection station, and the unloading station in sequence;

[0069] S2, a group of the first industrial cameras 601 capture image data of the upper and lower end surfaces of the high-purity precious metal evaporation material 5 rotating through the end surface inspection station, and obtain the positions of the two center lines of the high-purity precious metal evaporation material 5 and the closest distance L1 between the connecting point of the two center lines and the dark edge 101 based on the upper end surface image;

[0070] S3, the high-purity precious metal evaporation material 5 rotates along with the material turntable 1 and passes through the side inspection station, and the mobile drive mechanism 801 of the camera drive device 8 drives the mobile support 701 to move inward to the center of the reflective ceramic plate 702 at a distance of L1 from the dark edge 101;

[0071] S4, the servo motor 803 drives the drive assembly 802 to rotate to an angle corresponding to the two midline angles of the upper end surface image of the high-purity precious metal evaporation material 5, and starts to drive the four second industrial cameras 703 near the drive assembly 802 inward to obtain image data of the four sides of the high-purity precious metal evaporation material 5 rotating through the end surface inspection station;

[0072] S5, comparing the obtained image data of the upper and lower end surfaces and the image data of the four side surfaces of the high-purity precious metal evaporation material 5 with the unqualified images in the database, and determining it as an unqualified product if there is a similarity, and determining it as a qualified product if there is no similarity;

[0073] S6, classifying and collecting the high-purity precious metal evaporation material 5 delivered to the unloading station into qualified products and unqualified products.

[0074] The detection method of the present invention can not only detect the high-purity precious metal evaporation material 5 efficiently and quickly, but also effectively and significantly improve the detection accuracy of the high-purity precious metal evaporation material 5 and effectively reduce the secondary damage caused by the detection to the high-purity precious metal evaporation material 5.

[0075] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A visual inspection device for high-purity precious metal evaporation materials, characterized in that: include: The material turntable is rotatably mounted on the corresponding workbench and driven by the corresponding rotary drive motor. The periphery of the material turntable is bonded with a corresponding dark-colored welt. The workbench is sequentially provided with a loading station, an end face inspection station, a side inspection station, and an unloading station. A feed guide trough is provided at the loading station of the workbench and is used to load high-purity precious metal evaporation material to the outside of the material turntable, wherein the high-purity precious metal evaporation material is arranged in a rectangular shape; an end face detection mechanism, comprising a set of first industrial cameras arranged at different heights at end face detection stations on the workbench, with cameras of the first industrial cameras respectively facing the material turntable, for acquiring image data of the upper and lower end faces of the high-purity precious metal evaporation material rotating through the end face detection stations, and obtaining, based on the image of the upper end face of the high-purity precious metal evaporation material, the positions of its two center lines and the closest distance L1 between the connection point of the two center lines and the dark edge; A side detection mechanism comprising a movable support member movably disposed at a side detection station of the workbench, wherein a corresponding reflective ceramic plate is fixedly connected upward to the bottom side of the movable support member, and a second industrial camera having 4N cameras tilted inwardly and movably disposed in a circular array centered on the position of the reflective ceramic plate on the upper side of the movable support member, wherein N is a positive integer; The camera driving device includes a movable driving mechanism for driving a movable support and a driving assembly arranged in a cross shape, wherein the driving assembly is rotationally driven by a servo motor fixedly mounted on the upper end of the reflective ceramic plate; the movable driving mechanism drives the movable support to move inward to the center of the reflective ceramic plate facing the connection point of the two midlines of the upper end surface image of the high-purity precious metal evaporation material; the servo motor drives the driving assembly to rotate to an angle corresponding to the two midlines of the upper end surface image of the high-purity precious metal evaporation material, and starts to drive four second industrial cameras close to the driving assembly inward, and the second industrial cameras that move inward acquire image data of the four sides of the high-purity precious metal evaporation material that rotates through the end surface detection station; A corresponding annular member is fixed inwardly on the upper side of the movable support member, and a mounting plate located at the upper end of the reflective ceramic piece is fixed upwardly fixedly installed through a number of upwardly inclined connecting rods equal to the number of the second industrial cameras. The servo motor is fixedly installed on the upper side of the mounting plate, and the driving assembly includes four fixed pipes fixed to the output shaft ends of the servo motor in a cross shape, and the outer ends of the fixed pipes are respectively installed with corresponding first electromagnets; corresponding slides are respectively movably installed on the connecting rods, and the second industrial cameras are respectively fixedly installed on the corresponding slides, and the inner sides of the slides are respectively fixed with corresponding iron plates, and two adjacent iron plates are respectively set with gaps.

2. The visual inspection equipment for high-purity precious metal evaporation materials according to claim 1, characterized in that: A first light source facing the reflective ceramic plate is mounted on the bottom side of the mounting plate.

3. The visual inspection device for high-purity precious metal evaporation material according to claim 2, characterized in that: The outer sides of the fixed pipes are movably connected to corresponding iron rods through coil springs. The first electromagnet is fixedly installed on the outer ends of the iron rods. The middle part of the fixed pipe is fixedly connected to a second electromagnet for adsorbing and driving the iron rods.

4. The visual inspection equipment for high-purity precious metal evaporation materials according to claim 2, characterized in that: The middle parts of the connecting rods are respectively provided with corresponding clearance grooves, and the cameras of the second industrial cameras respectively pass through the clearance grooves and are arranged to be tilted inwards.

5. The visual inspection equipment for high-purity precious metal evaporation materials according to claim 1, characterized in that: The feed end of the feed guide trough is connected to the discharge end of the external feeding vibration disk, and the discharge end of the feed guide trough is located at the upper outer side of the material turntable.

6. The visual inspection device for high-purity precious metal evaporation material according to claim 2, characterized in that: A [-shaped support is fixedly installed on the end face detection station of the workbench, and a group of the first industrial cameras are respectively fixedly connected to the [-shaped support. Corresponding second light sources are respectively fixedly installed on the positions of the [-shaped support where the first industrial cameras are not installed.

7. The visual inspection device for high-purity precious metal evaporation material according to claim 6, characterized in that: The first light source and the second light source are LED lamps respectively.

8. The visual inspection device for high-purity precious metal evaporation material according to claim 1, characterized in that: A corresponding material collection box is fixedly connected to the unloading station of the workbench, the opening of the material collection box is located on the lower side of the material turntable, and the material collection box is divided into a qualified product collection chamber and an unqualified product collection chamber. A material baffle plate is fixedly connected upward to the middle of the material collection box, and a group of corresponding air nozzle mounting plates are fixedly installed inward on the upper end of the material baffle plate, and air nozzles for blowing high-purity precious metal evaporation materials into the qualified product collection chamber or the unqualified product collection chamber are respectively fixedly installed on the air nozzle mounting plates.

9. The visual inspection device for high-purity precious metal evaporation material according to claim 8, characterized in that: Corresponding collecting conveyor belts are respectively installed in the qualified product collection chamber and the unqualified product collection chamber on the bottom side of the baffle plate, and the bottom sides of the outer ends of the qualified product collection chamber and the unqualified product collection chamber are respectively recessed with grooves for collecting the high-purity precious metal evaporation materials output by the collecting conveyor belts.

10. A detection method based on the visual detection equipment of high-purity precious metal evaporation material according to any one of claims 1 to 9, characterized in that: The following specific detection steps are included: S1, high-purity precious metal evaporation material enters the outer side of the material turntable through the feed guide groove. As the material turntable rotates, the high-purity precious metal evaporation material passes through the end surface inspection station, the side inspection station, and the unloading station in sequence; S2, a group of the first industrial cameras acquires image data of the upper and lower end surfaces of the high-purity precious metal evaporation material rotating through the end surface inspection station, and obtains the positions of the two center lines of the high-purity precious metal evaporation material and the closest distance L1 between the connection point of the two center lines and the dark edge based on the upper end surface image; S3, the high-purity precious metal evaporation material passes through the side inspection station as the material turntable rotates, and the mobile drive mechanism of the camera drive device drives the mobile support to move inward to the center of the reflective ceramic sheet at a distance L1 from the dark edge; S4, the servo motor drives the drive assembly to rotate to an angle corresponding to two midline angles of the upper end surface image of the high-purity precious metal evaporation material, and starts to drive four second industrial cameras close to the drive assembly inward to obtain image data of four sides of the high-purity precious metal evaporation material rotating through the end surface inspection station; S5, comparing the obtained image data of the upper and lower end surfaces and the image data of the four side surfaces of the high-purity precious metal evaporation material with the unqualified images in the database, and determining the product as unqualified if there is a similarity, and determining the product as qualified if there is no similarity; S6, classifying and collecting the high-purity precious metal evaporation materials delivered to the unloading station into qualified products and unqualified products.

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