X-ray imaging device

Abstract

The invention relates to an X-ray imaging device which is characterized in that visible light emitted by a scintillator is captured by a camera after being amplified by a microscope, and a clear image is formed on an imaging plane of the camera; the focusing adjustment layer is positioned below the imaging layer and is used for adjusting the distance between the scintillator and the microscope so as to ensure that visible light emitted by the scintillator forms a clear image on an imaging plane of the camera; and the position adjusting layer is positioned below the focusing adjusting layer and is used for adjusting the positions of the imaging layer and the focusing adjusting layer in a plane vertical to a light path so as to ensure that the X-ray just acts on the view center of the camera. According to the X-ray imaging device provided by the invention, the technical effects of improving the imaging quality, adapting to different imaging requirements and realizing rapid and accurate imaging are achieved through the cooperation of the imaging layer, the focusing adjustment layer and the position adjustment layer.

Description

Technical Field

[0001] The present invention relates to synchrotron radiation, and more particularly to an X-ray imaging device. Background Art

[0002] As an important supporting platform for advanced X-ray imaging technology, synchrotron radiation sources usually produce characteristic radiation concentrated in the hard X-ray band (0.1-100 keV) with high brightness (up to 10 20 The CMOS sensor offers advantages such as high resolution (100 phs / s / mm² / mrad² / 0.1% BW), high collimation (divergence angle <0.1 mrad), continuous tunability over a wide frequency spectrum (0.1-40 keV), and controllable polarization properties. These features make it particularly suitable for third-generation X-ray computed tomography (CT) technology, enabling advanced imaging requirements with submicron spatial resolution and millisecond temporal resolution.

[0003] In the composition of X-ray CT system, the detector is the core component of signal conversion, and its performance directly determines the key indicators of the entire CT system, such as spatial resolution, dynamic range and imaging speed. At present, mainstream detectors are mainly divided into two categories: indirect conversion type and direct conversion type: indirect detectors (such as thallium-doped cesium iodide scintillator + CCD / CMOS system) convert X-ray photons into visible light for collection through fluorescent materials; direct detectors (such as silicon-based semiconductor pixel detectors) directly generate electrical signals through the photoelectric effect. Although these detectors have made significant progress in synchrotron radiation applications, they still face several technical bottlenecks: first, the high-purity silicon wafer manufacturing process leads to high cost per pixel of the detector; second, due to the limitations of existing micromachining technology, the minimum thickness of the scintillator is mostly limited to the order of 50-100μm, which limits the further improvement of spatial resolution; third, the limited dynamic range of traditional detectors (usually <16bit) is difficult to meet the wide flux range of synchrotron radiation (10 3 -10 12 phs / s / mm²) measurement requirements. Summary of the Invention

[0004] In order to solve the problems of high cost and the like in the above-mentioned prior art, the present invention provides an X-ray imaging device.

[0005] According to the X-ray imaging device of the present invention, it includes an imaging layer, including a scintillator part and a microscope part, the scintillator part includes a scintillator, which is used to convert the X-rays generated by a synchrotron radiation light source into visible light; the microscope part includes a fixedly connected microscope and a camera, the visible light emitted by the scintillator is amplified by the microscope and captured by the camera, and forms a clear image on the imaging plane of the camera; a focus adjustment layer, located below the imaging layer, is used to adjust the distance between the scintillator and the microscope to ensure that the visible light emitted by the scintillator forms a clear image on the imaging plane of the camera; and a position adjustment layer, located below the focus adjustment layer, is used to adjust the positions of the imaging layer and the focus adjustment layer in a plane perpendicular to the light path to ensure that the X-rays act exactly on the center of the field of view of the camera.

[0006] In a preferred embodiment, the scintillator part also includes a first scintillator mask and a second scintillator mask, the second scintillator mask extends into the interior of the first scintillator mask and is fixedly mounted on the first scintillator mask; the microscope includes a microscope mask, the microscope mask extends into and between the first scintillator mask and the second scintillator mask; the scintillator is located inside the second scintillator mask.

[0007] In a preferred embodiment, the scintillator part also includes a first scintillator adapter ring, which is fixedly mounted on the second scintillator cover. A first through hole is provided at the center of the first scintillator adapter ring, and the scintillator covers the first through hole and is mounted on the inner surface of the first scintillator adapter ring.

[0008] In a preferred embodiment, the scintillator portion further includes carbon paper fixedly disposed in front of the scintillator to isolate visible light.

[0009] In a preferred embodiment, the scintillator part also includes a second scintillator adapter ring and a third scintillator adapter ring, the second scintillator adapter ring is fixedly mounted on the first scintillator cover, the third scintillator adapter ring is fixedly mounted on the second scintillator adapter ring, a second through hole is provided in the center of the third scintillator adapter ring, the carbon paper covers the second through hole and is mounted on the inner surface of the third scintillator adapter ring.

[0010] In a preferred embodiment, the first scintillator mask is fixedly mounted on the focus adjustment layer, and the microscope further includes a microscope clamp, a lens barrel and a microscope adapter ring, the microscope clamp is fixedly mounted on the focus adjustment layer, the lens barrel is fixedly mounted on the microscope clamp, the microscope adapter ring is fixedly mounted on the lens barrel, and the microscope mask is fixedly mounted on the microscope adapter ring.

[0011] In a preferred embodiment, the microscope further comprises an objective lens, which is fixedly mounted on the microscope adapter ring and extends into the interior of the second scintillator cover.

[0012] In a preferred embodiment, the overlapping portion of the first scintillator mask, the second scintillator mask, and the microscope mask is no less than 40 mm.

[0013] In a preferred embodiment, the focus adjustment layer includes a supporting platform, a horizontal manual stage and a horizontal electric stage, wherein the horizontal manual stage and the horizontal electric stage are both mounted on the supporting platform so as to be horizontally movably along the optical path, the scintillator part is fixedly mounted on the horizontal manual stage, and the microscope part is fixedly mounted on the horizontal electric stage, the distance between the scintillator and the microscope is coarsely adjusted by the horizontal manual stage, and the distance between the scintillator and the microscope is finely adjusted by the horizontal electric stage.

[0014] In a preferred embodiment, the position adjustment layer includes a first moving platform and a second moving platform, wherein the supporting platform is fixedly mounted on the second moving platform, and the second moving platform is fixedly mounted on the first moving platform, and the focus adjustment layer and the imaging layer supported thereon are driven to move in a plane perpendicular to the optical path by the first moving platform and the second moving platform to ensure that the X-ray acts exactly on the center of the field of view of the camera.

[0015] According to the X-ray imaging device of the present invention, through the coordinated cooperation of the imaging layer, the focus adjustment layer and the position adjustment layer, the technical effects of improving imaging quality, adapting to different imaging requirements and realizing fast and accurate imaging are achieved, thereby providing an efficient, flexible and reliable solution for X-ray imaging under synchrotron radiation light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 FIG. 1 is a schematic assembly diagram of an X-ray imaging device according to a preferred embodiment of the present invention.

[0017] Figure 2 yes Figure 1 Exploded view of the imaging layer.

[0018] Figure 3 yes Figure 2 Exploded view of the scintillator part.

[0019] Figure 4 yes Figure 2 Exploded view of the microscope section.

[0020] Figure 5 yes Figure 3 Schematic diagram of the structure of the first scintillator mask.

[0021] Figure 6 yes Figure 3 Schematic diagram of the structure of the second scintillator mask.

[0022] Figure 7 yes Figure 3 Schematic diagram of the structure of the first scintillator adapter ring.

[0023] Figure 8 yes Figure 3 Schematic diagram of the structure of the second scintillator adapter ring.

[0024] Figure 9 yes Figure 3 Schematic diagram of the structure of the third scintillator adapter ring.

[0025] Figure 10 yes Figure 4 Schematic diagram of the structure of the microscope adapter ring.

[0026] Figure 11 yes Figure 2 Cross-sectional view of the imaging layer.

[0027] Figure 12 yes Figure 1 Exploded image of the Focus adjustment layer.

[0028] Figure 13 yes Figure 1 Exploded view of the Position adjustment layer. DETAILED DESCRIPTION

[0029] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0030] like Figure 1 As shown in FIG. 1 , an X-ray imaging device according to a preferred embodiment of the present invention includes an imaging layer 1, a focus adjustment layer 2, and a position adjustment layer 3. Figure 2 As shown, the imaging layer 1 is composed of a scintillator portion 11 and a microscope portion 12. Figure 3 As shown, the scintillator unit 11 includes a scintillator 111, and the X-rays generated by the synchrotron radiation source are received by the scintillator 111 and converted into visible light. Figure 4As shown, the microscope section 12 includes a microscope 121 and a camera 122 that are fixedly connected. The visible light emitted by the scintillator 111 is amplified by the microscope 121. The amplified visible light is captured by the camera 122 and forms a clear image on the imaging plane of the camera 122. The image is then output to a computer for user viewing and analysis. The focus adjustment layer 2 is located below the imaging layer 1, supporting the scintillator section 11 and the microscope section 12 respectively, and is used to adjust the distance between the scintillator 111 and the microscope 121 to ensure that the visible light on the scintillator 111 forms a clear image on the imaging plane of the camera 122. The position adjustment layer 3 is located below the focus adjustment layer 2, and is used to support and move the focus adjustment layer 2 to ensure that the X-ray acts exactly on the center of the field of view of the camera 122.

[0031] In this way, microscope 121 is integrated into the beamline of a synchrotron radiation source. The present invention provides a modular X-ray imaging device based on a synchrotron radiation inline microscope. Its layered mechanical design (imaging layer - focusing layer - adjustment layer) offers high flexibility and scalability, allowing for flexible adjustment of the imaging system configuration and improving the system's dynamic range. Fine-tuning of the focus adjustment layer 2 and position adjustment layer 3 ensures that the imaging signal falls clearly on the focal plane of camera 122, enhancing the imaging quality. Specifically, compared to direct-conversion detectors, the present invention employs an indirect-conversion detector architecture, using a scintillator 111 to convert X-rays into visible light, which is then imaged via microscope 121 and camera 122. This avoids the high cost of manufacturing high-purity silicon wafers required for direct-conversion detectors.

[0032] like Figure 3 As shown, the scintillator portion 11 further includes a first scintillator mask 112 and a second scintillator mask 113. Figure 5 As shown, a bracket 1121 is provided at the lower portion of the first scintillator shield 112 for assembly on the focus adjustment layer 2. The first scintillator shield 112 serves as the main body, and other scintillator components are assembled thereon. The second scintillator shield 113 extends into the interior of the first scintillator shield 112 and is fixedly mounted on the first scintillator shield 112 by means of a threaded connection. Specifically, as shown in FIG. Figure 5 As shown, the first scintillator cover 112 has a first internal thread 1122. Figure 6 As shown, the second scintillator cover 113 has a first external thread 1131, and the first internal thread 1122 is threadedly connected to the first external thread 1131. In this embodiment, the first internal thread 1122 and the first external thread 1131 are both M30x1 fine threads.

[0033] like Figure 3 As shown, the scintillator portion 11 further includes a first scintillator adapter ring 114, which is fixedly mounted on the second scintillator cover 113. Figure 7As shown, the first scintillator adapter ring 114 has a second external thread 1141. Figure 6 As shown, the second scintillator cover 113 has a second internal thread 1132, and the second external thread 1141 is threadedly connected to the second internal thread 1132. In this embodiment, the second external thread 1141 and the second internal thread 1132 are both C threads. Figure 7 As shown, the first scintillator adapter ring 114 has a first through-hole 1142 at its center. The scintillator 111 covers the first through-hole 1142 and is mounted on the inner surface of the first scintillator adapter ring 114, near the side of the microscope 121. In a preferred embodiment, the diameter of the first through-hole 1142 is 10 mm, and the scintillator 111 is a LuAG:Ce crystal with a thickness of 5-100 microns. It should be understood that the thickness of the scintillator 111 can be selected based on the experimental environment. Thinner scintillators (e.g., 5 to 100 microns) provide clearer imaging but have lower X-ray conversion efficiency, making them suitable for high-throughput X-ray environments. Thicker scintillators (e.g., 100 to 500 microns) have higher X-ray conversion efficiency but relatively poor imaging quality and may exhibit blooming, making them suitable for low-throughput X-ray environments.

[0034] like Figure 3 As shown, the scintillator portion 11 further includes a second scintillator adapter ring 115, which is fixedly mounted on a side of the first scintillator cover 112 away from the microscope 121. Figure 5 As shown, the first scintillator cover 112 has a third external thread 1123, as shown in FIG. Figure 8 As shown, the second scintillator adapter ring 115 has a third internal thread 1151, and the third external thread 1123 is threadedly connected to the third internal thread 1151. In this embodiment, the third external thread 1123 and the third internal thread 1151 are both M36x0.75 fine threads.

[0035] like Figure 3 As shown, the scintillator portion 11 further includes a third scintillator adapter ring 116, which is fixedly mounted on the second scintillator adapter ring 115. Figure 9 As shown, the third scintillator adapter ring 116 has a fourth external thread 1161, as shown in FIG. Figure 8 As shown, the second scintillator adapter ring 115 has a fourth internal thread 1152, and the fourth external thread 1161 is threadedly connected to the fourth internal thread 1152. In this embodiment, the fourth external thread 1161 and the fourth internal thread 1152 are both C threads. Figure 9 As shown, the center of the third scintillator adapter ring 116 is provided with a second through hole 1162, which is Figure 3The scintillator portion 11 further includes a carbon paper 117, which covers the second through hole 1162 and is attached to the inner surface of the third scintillator adapter ring 116, near the side of the microscope 121. In a preferred embodiment, the diameter of the second through hole 1162 is 15 mm, and the carbon paper 117 is a 50 micron thick carbon paper for blocking visible light. In addition, as Figure 8 As shown, the second scintillator adapter ring 115 further has a fifth external thread 1153, which is threadedly connected to other structures, such as an aperture (not shown) to optimize imaging quality. In this embodiment, the fifth external thread 1153 is a M36x0.75 fine thread.

[0036] like Figure 4 As shown, the microscope 121 includes a microscope clamp 1211 and a lens barrel 1212. The microscope clamp 1211 is fixed to the lens barrel 1212. A bracket is provided at the lower portion of the microscope clamp 1211 for assembly on the focus adjustment layer 2. The camera 122 is fixedly mounted on the end of the lens barrel 1212 away from the scintillator portion 11.

[0037] like Figure 4 As shown, the microscope 121 also includes a microscope adapter ring 1213. Figure 10 As shown, the microscope adapter ring 1213 has a sixth external thread 12131, and the lens barrel 1212 has a sixth internal thread, and the sixth external thread 12131 and the sixth internal thread are threadedly connected. In this embodiment, the sixth external thread 12131 and the sixth internal thread are both standard C threads.

[0038] like Figure 4 As shown, the microscope 121 further includes a microscope cover 1214 and an objective lens 1215, wherein the middle section of the objective lens 1215 is accommodated inside the microscope cover 1214, and both are fixedly mounted on the microscope adapter ring 1213. Figure 10 As shown, the microscope adapter ring 1213 has a seventh external thread 12132, and the microscope cover 1214 has a seventh internal thread, and the seventh external thread 12132 and the seventh internal thread are threadedly connected. In this embodiment, the seventh external thread 12132 and the seventh internal thread are both M36x0.75 fine pitch threads. Figure 10 As shown, the microscope adapter ring 1213 has an eighth internal thread 12133, and the objective lens 1215 has an eighth external thread, and the eighth internal thread 12133 and the eighth external thread are threadedly connected. In this embodiment, the eighth internal thread 12133 and the eighth external thread are both standard C threads.

[0039] Thus, by replacing different objective lenses 1215, the microscope 121 of the present invention is formed into a multi-modal switchable optical component, which can select the appropriate optical mode according to different flux conditions, thereby maintaining good imaging effects within a wide flux range. In particular, by optimizing the coupling method between the scintillator 111 and the microscope 121, the present application can use the high-magnification objective lens 1215 to amplify the visible light emitted by the scintillator 111, thereby improving the spatial resolution of the imaging device without changing the thickness of the scintillator 111. In other words, even if the thickness of the scintillator is still on the order of 50-100 μm, the spatial resolution of the imaging device can be significantly improved through optical amplification.

[0040] The following combination Figure 11 The function of the imaging layer 1 is briefly introduced. The scintillator 111 can react to X-rays and convert them into visible light. After being amplified by the microscope 121, the visible light is captured by the camera 122, and the resulting image is the X-ray imaging. During operation, in order to ensure imaging quality and improve the signal-to-noise ratio, the present invention places special emphasis on shielding the visible light interference from the surrounding environment of the scintillator 111, and the scintillator 111 is placed in a dark room. Because the scintillator 111 needs to move relative to the microscope 121, a multi-layer mask method is adopted. The first layer outside the objective lens 1215 of the microscope 121 is the second scintillator mask 113, followed by the microscope mask 1214, and the outermost layer is the first scintillator mask 112. The gaps between these three layers of masks are less than 100 microns, and the overlapping parts are not less than 40 mm, so as to effectively block the visible light of the environment. At the front end of the scintillator 111, the carbon paper 117 further isolates the visible light but passes the X-rays. In this way, it is possible to ensure that there is no interference from ambient visible light around the scintillator 111, thereby improving the imaging quality, and to ensure that the scintillator 111 and the microscope 121 can move relative to each other.

[0041] like Figure 12 As shown, the focus adjustment layer 2 includes a carrier 21, a horizontal manual stage 22, and a horizontal electric stage 23. The horizontal manual stage 22 and the horizontal electric stage 23 are both mounted on the carrier 21 so as to be horizontally movable along the transmission path (i.e., the optical path) of the X-ray. By moving the carrier 21, the overall movement of the focus adjustment layer 2 can be achieved. Figure 1 and Figure 2The scintillator portion 11 is fixedly mounted on a horizontal manual stage 22, and the microscope portion 12 is fixedly mounted on a horizontal electric stage 23. The horizontal manual stage 22 can provide a wide range of movement for coarsely adjusting the distance between the scintillator 111 and the microscope 121, and is mainly used to compensate for the difference in object distance when the microscope 121 is equipped with different objective lenses 1215. The horizontal electric stage 23 can finely adjust the distance between the scintillator 111 and the microscope 121, so as to clearly present the image of the scintillator 111 on the camera 122. It should be understood that since it is usually difficult to accurately place the scintillator 111 on the focal plane of the microscope 121, the present invention uses the horizontal electric stage 23 for fine adjustment to ensure the clarity of the imaging.

[0042] like Figure 12 As shown, the focus adjustment layer 2 further includes a spacer 24 , which is fixedly installed below the horizontal electric stage 23 to compensate for the height difference between the horizontal manual stage 22 and the horizontal electric stage 23 .

[0043] like Figure 13 As shown, the position adjustment layer 3 includes a first movable stage 31 and a second movable stage 32, wherein the carrier stage 21 of the focus adjustment layer 2 is fixedly mounted on the second movable stage 32, and the second movable stage 32 is fixedly mounted on the first movable stage 31. The first movable stage 31 and the second movable stage 32 can be used to drive the focus adjustment layer 2 and the imaging layer 1 supported thereon to move in a plane perpendicular to the optical path, so as to move the X-ray to the center of the field of view of the camera 122.

[0044] Thus, the present invention utilizes a non-destructive system upgrade strategy to quickly, conveniently, and cost-effectively convert existing microscopes into X-ray imaging devices while maintaining the original microscope structure. New components (such as the scintillator unit 11 and microscope unit 12) are directly integrated into the existing microscope structure using standardized mechanical interfaces (such as threads and slots) and optical interfaces (such as C-mounts and M36x0.75 threads), ensuring compatibility with the mechanical, optical, and electrical interfaces of existing microscopes. The focus adjustment layer 2 (comprising a horizontal manual stage 22 and a horizontal motorized stage 23) and the position adjustment layer 3 (comprising a first movable stage 31 and a second movable stage 32) allow for rapid adjustment of the imaging device's position and focus, ensuring that the imaging signal is centered on the camera's focal plane. By retaining existing equipment and reducing machining, the overall cost of the conversion is reduced. This design not only reduces the complexity and time of the conversion, but also is particularly well-suited for rapid deployment within the limited conversion window (typically less than two weeks) of synchrotron radiation sources.

[0045] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Various modifications are possible. In other words, any simple, equivalent changes and modifications made in accordance with the claims and description of the present invention are within the scope of protection of the patent claims. Anything not fully described in this invention constitutes conventional technology.

Claims

1. An X-ray imaging device, characterized in that: The X-ray imaging device comprises: An imaging layer (1) comprises a scintillator portion (11) and a microscope portion (12), wherein the scintillator portion (11) comprises a scintillator (111) for converting X-rays generated by a synchrotron radiation source into visible light; the microscope portion (12) comprises a microscope (121) and a camera (122) that are fixedly connected, wherein the visible light emitted by the scintillator (111) is magnified by the microscope (121) and captured by the camera (122), and forms a clear image on an imaging plane of the camera (122); a focus adjustment layer (2), located below the imaging layer (1), for adjusting the distance between the scintillator (111) and the microscope (121) to ensure that the visible light emitted by the scintillator (111) forms a clear image on the imaging plane of the camera (122); and A position adjustment layer (3) is located below the focus adjustment layer (2) and is used to adjust the positions of the imaging layer (1) and the focus adjustment layer (2) in a plane perpendicular to the light path to ensure that the X-ray acts exactly on the center of the field of view of the camera (122).

2. The X-ray imaging device according to claim 1, wherein: The scintillator portion (11) further includes a first scintillator mask (112) and a second scintillator mask (113), wherein the second scintillator mask (113) extends into the interior of the first scintillator mask (112) and is fixedly mounted on the first scintillator mask (112); the microscope (121) includes a microscope mask (1214), wherein the microscope mask (1214) extends between the first scintillator mask (112) and the second scintillator mask (113); and the scintillator (111) is located inside the second scintillator mask (113).

3. The X-ray imaging device according to claim 2, characterized in that The scintillator portion (11) further comprises a first scintillator adapter ring (114), the first scintillator adapter ring (114) being fixedly mounted on the second scintillator cover (113), a first through hole (1142) being provided at the center of the first scintillator adapter ring (114), and the scintillator (111) covering the first through hole (1142) and being mounted on the inner surface of the first scintillator adapter ring (114).

4. The X-ray imaging device according to claim 2, wherein: The scintillator portion (11) further includes carbon paper (117) fixedly arranged in front of the scintillator (111) to isolate visible light.

5. The X-ray imaging device according to claim 4, characterized in that The scintillator portion (11) further includes a second scintillator adapter ring (115) and a third scintillator adapter ring (116), wherein the second scintillator adapter ring (115) is fixedly mounted on the first scintillator cover (112), and the third scintillator adapter ring (116) is fixedly mounted on the second scintillator adapter ring (115), a second through hole (1162) is provided at the center of the third scintillator adapter ring (116), and the carbon paper (117) covers the second through hole (1162) and is attached to the inner surface of the third scintillator adapter ring (116).

6. The X-ray imaging device according to claim 2, wherein: The first scintillator mask (112) is fixedly mounted on the focus adjustment layer (2); the microscope (121) further comprises a microscope clamp (1211), a lens barrel (1212), and a microscope adapter ring (1213); the microscope clamp (1211) is fixedly mounted on the focus adjustment layer (2); the lens barrel (1212) is fixedly mounted on the microscope clamp (1211); the microscope adapter ring (1213) is fixedly mounted on the lens barrel (1212); and the microscope mask (1214) is fixedly mounted on the microscope adapter ring (1213).

7. The X-ray imaging device according to claim 6, characterized in that The microscope (121) further comprises an objective lens (1215), wherein the objective lens (1215) is fixedly mounted on the microscope adapter ring (1213) and extends into the interior of the second scintillator cover (113).

8. The X-ray imaging device according to claim 2, wherein: The overlapping portion of the first scintillator mask (112), the second scintillator mask (113) and the microscope mask (1214) is not less than 40 mm.

9. The X-ray imaging device according to claim 1, wherein: The focus adjustment layer (2) includes a carrier platform (21), a horizontal manual platform (22) and a horizontal electric platform (23), wherein the horizontal manual platform (22) and the horizontal electric platform (23) are both mounted on the carrier platform (21) so as to be horizontally movably along the optical path, the scintillator portion (11) is fixedly mounted on the horizontal manual platform (22), and the microscope portion (12) is fixedly mounted on the horizontal electric platform (23), and the distance between the scintillator (111) and the microscope (121) is coarsely adjusted by the horizontal manual platform (22), and the distance between the scintillator (111) and the microscope (121) is finely adjusted by the horizontal electric platform (23).

10. The X-ray imaging device according to claim 1, wherein: The position adjustment layer (3) includes a first movable table (31) and a second movable table (32), wherein the carrier table (21) is fixedly mounted on the second movable table (32), and the second movable table (32) is fixedly mounted on the first movable table (31), and the focus adjustment layer (2) and the imaging layer (1) supported thereon are driven to move in a plane perpendicular to the optical path by the first movable table (31) and the second movable table (32) to ensure that the X-ray acts exactly on the center of the field of view of the camera (122).

Images