Furnace body device for crystal growth of third-generation semiconductors using isostatic graphite crucibles.

Abstract

This invention relates to the field of graphite crucible technology, and more particularly to a furnace device for preparing isostatic graphite crucibles for third-generation semiconductor crystal growth. The device includes a heating furnace, a graphite crucible, and a crucible cover. A preparation platform is fixedly connected to the side wall of the heating furnace. A support frame is fixedly connected between the preparation platform and the top of the heating furnace. A sliding groove is provided at the top of the support frame. A crucible seat is fixedly connected to the inside of the heating furnace via four brackets. A U-shaped slider is slidably connected within the sliding groove. An adjustment frame is provided below the slider. A vertical groove is provided through the bottom of the adjustment frame. A pair of vertical rods are slidably connected laterally inside the vertical groove. Through the design of the vertical rods, right-angle blocks, and moving mechanism, this invention can automatically remove the graphite crucible from the heating furnace and place it on the preparation platform. Subsequently, the graphite crucible to be heated on the preparation platform can be transferred into the heating furnace, thereby achieving automatic removal and placement of graphite crucibles on the furnace body, avoiding the risk of workers being burned by contact, and greatly improving the convenience of the device.

Description

Technical Field

[0001] This invention relates to the field of graphite crucible technology, and more particularly to a furnace body device for preparing isostatic graphite crucibles for third-generation semiconductor crystal growth. Background Technology

[0002] Third-generation semiconductors are represented by semiconductor materials such as gallium nitride, silicon carbide, zinc oxide, and diamond. Among them, silicon carbide is the most technologically mature and widely used. It is a material whose conductivity at room temperature is between that of a conductor and an insulator. Silicon carbide is a type of single-crystal silicon with a basically complete lattice structure. The isostatic pressing effect of graphite powder is largely determined by the isostatic pressing mold. A good mold can lead to good molding and a long service life, thereby improving product quality and reducing production costs. Isostatic pressing graphite crucibles have good thermal conductivity and high temperature resistance and are widely used in the melting of the aforementioned single-crystal silicon.

[0003] With the rapid development of the third-generation semiconductor industry, the demand for graphite crucibles is constantly increasing, and the requirements for the continuity and efficiency of production and processing are becoming increasingly stringent. In the frequent continuous processing, manual handling of graphite crucibles is not only inefficient but also prone to errors, leading to delays in processing and making it difficult to meet the ever-growing production requirements.

[0004] On the other hand, graphite crucibles are processed at extremely high temperatures, with both their surface temperature and the surrounding environment being in dangerously high-temperature ranges. When workers manually add materials, they are highly likely to suffer burns due to the high temperature, posing a serious safety hazard. This not only threatens the physical and mental health of workers but also puts enormous pressure on the company's safety production management and increases the risk costs of the company's operations.

[0005] Therefore, a furnace device for preparing isostatic graphite crucibles for third-generation semiconductor crystal growth was proposed to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to address the shortcomings of the prior art by proposing a furnace body device for preparing third-generation semiconductor crystals using isostatic graphite crucibles.

[0007] To achieve the above objectives, the technical solution adopted in this invention is as follows: a furnace body device for preparing isostatic graphite crucibles for third-generation semiconductor crystal growth, comprising a heating furnace, a graphite crucible, and a crucible cover. A preparation platform is fixedly connected to the side wall of the heating furnace, and a support frame is fixedly connected between the preparation platform and the top of the heating furnace. A sliding groove is provided at the top of the support frame. A crucible seat is fixedly connected to the furnace through four brackets. A U-shaped slider is slidably connected in the sliding groove. An adjustment frame is provided below the slider. A vertical groove is provided through the bottom of the adjustment frame. A pair of vertical rods are slidably connected laterally inside the vertical groove. A groove is provided on one side of the bottom of each vertical rod. A right-angled block with an inclined surface is slidably connected inside each groove. An upper spring is fixedly connected between the inner side of the groove and the side wall of the right-angled block. U-shaped blocks are provided on both sides of the outer wall of the graphite crucible. Upper slots are provided on both sides of the outer wall of the crucible cover. A moving mechanism for driving the slider and the adjustment frame to move is provided on the support frame. An extrusion plate is slidably connected inside the vertical groove.

[0008] In the above technical solution, the moving mechanism further includes a drive motor, which is fixedly connected to the side wall of the support frame. A threaded rod is rotatably connected to the inner side of the slide groove, and the threaded rod is threaded through and connected to the inner side wall of the slider. A pair of upper electric telescopic cylinders are fixedly connected to the top of the slider, and the output ends of the upper electric telescopic cylinders are fixedly connected to the top of the adjustment frame through the bottom end of the slider.

[0009] In the above technical solution, the extrusion plate is further provided with both sides inclined, the top of the vertical rod is inclined, the inclined surface of the top of the vertical rod is in contact with the inclined surface of the extrusion plate, and the top of the adjustment frame is fixedly connected to a lower electric telescopic cylinder, the output end of the lower electric telescopic cylinder is fixedly connected to the top of the extrusion plate.

[0010] In the above technical solution, two pairs of placement blocks are fixedly connected to the top of the preparation stage. Each placement block has an upper circular hole at its top. A cross is fixedly connected to the top of the preparation stage relative to the position between the two pairs of placement blocks. A circular groove adapted to the crucible lid is opened at the top of the cross. A pair of top plates are fixedly connected to the outer wall of the graphite crucible. An upper insertion rod is fixedly connected to the bottom of each top plate. An upper positioning groove adapted to the upper insertion rod is opened at the top of each crucible seat.

[0011] In the above technical solution, further, a pair of lower insertion rods are fixedly connected to the bottom end of each crucible lid, a lower positioning groove is opened at the top of each graphite crucible relative to the position below the lower insertion rods, a pair of lower slots adapted to the lower insertion rods are opened at the top of the cross, and a second touch sensor is fixedly connected through the top of the cross.

[0012] In the above technical solution, a lower spring is fixedly connected between the inner side of the vertical groove and the side wall of the vertical rod. A guide groove is opened through the side wall of the vertical groove. A guide rod is fixedly connected to the side wall of the vertical rod, and the guide rod is slidably connected to the inner side of the guide groove.

[0013] In the above technical solution, further, an upper touch sensor is fixedly connected through the top of the crucible base to the position below one of the vertical rods, a touch rod is fixedly connected to the top of the preparation stage, and a lower touch sensor is fixedly connected through the top of the touch rod. The upper touch sensors are all electrically connected to the lower electric telescopic cylinder through the controller. A first touch sensor is fixedly connected to the bottom of the vertical groove. The first touch sensor is electrically connected to the moving mechanism and the lower electric telescopic cylinder through the controller.

[0014] In the above technical solution, three limit switches are fixedly connected to the top of the support frame, a straight rod for touching the limit switches is rotatably connected to the top of the slider, an inclined rod is fixedly connected to the side wall of the straight rod, a stop block is fixedly connected to the top of the slider, the side wall of the inclined rod contacts the side wall of the stop block, a hinge groove is opened at the top of the rotating end of the straight rod, a spiral spring is provided in the hinge groove, one end of the spiral spring is fixedly connected to the inside of the hinge groove, and the other end of the spiral spring is fixedly connected to the top of the slider, an upper position sensor is fixedly connected through the straight rod, and a lower position sensor is fixedly connected to the top of the support frame relative to the position directly above the heating furnace. The upper position sensor and the limit switches are all electrically connected to the moving mechanism through the controller.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. This invention, through the design of vertical rods, right-angle blocks, and moving mechanisms, can automatically remove graphite crucibles from the heating furnace and place them on the preparation platform. Subsequently, the graphite crucibles to be heated on the preparation platform can be transferred into the heating furnace, thereby realizing the automatic removal and placement of graphite crucibles on the furnace body, avoiding the phenomenon of workers being burned by touching them, and greatly improving the convenience of the device.

[0017] 2. By using the extrusion plate and the lower electric telescopic cylinder, this invention can automatically remove the crucible lid and place it on the cross after the graphite crucible is placed on the preparation table, thereby achieving automatic opening of the crucible lid and further improving the convenience of the device. Furthermore, by using the upper touch sensor, the lower touch sensor and the limit switch, the device can be automatically controlled, eliminating the need for manual operation and greatly improving the convenience of the device. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the furnace body device of the present invention from the front.

[0019] Figure 2 This is a three-dimensional view of the front of the furnace body device of the present invention when it is opened;

[0020] Figure 3 Appendix of the present invention Figure 2 A magnified view of the structure at point A in the middle;

[0021] Figure 4 Appendix of the present invention Figure 2 A magnified schematic diagram of the structure at point B in the middle;

[0022] Figure 5 This is a frontal three-dimensional structural diagram of the heating furnace cover, graphite crucible, and crucible cover of the present invention separated.

[0023] Figure 6 Appendix of the present invention Figure 5 A magnified schematic diagram of the structure at point C in the middle;

[0024] Figure 7 This is a partial top view of the three-dimensional structure of the preparation stage of the present invention;

[0025] Figure 8 This is a schematic diagram of the overall appearance structure of the drive motor, slider, and adjustment frame of the present invention when they are opened.

[0026] Figure 9 This is a schematic diagram of the overall appearance structure of the extrusion plate and the vertical plate of the present invention;

[0027] Figure 10 This is a schematic diagram of the control system of the present invention.

[0028] In the diagram: 1. Heating furnace; 2. Graphite crucible; 3. Crucible lid; 4. Preparation table; 5. Support frame; 6. Crucible seat; 7. Slider; 8. Adjustment frame; 9. Vertical rod; 10. Right-angle block; 11. Upper spring; 12. U-shaped block; 13. Vertical groove; 14. Extrusion plate; 15. Drive motor; 16. Threaded rod; 17. Lower electric telescopic cylinder; 18. Placement block; 19. Cross; 20. Circular groove; 21. Top plate; 22. Upper insertion rod; 23. Upper positioning groove; 24. Lower insertion rod; 25. Lower positioning groove; 26. Lower slot; 27. Lower spring; 28. Guide groove; 29. ​​Guide rod; 30. Upper touch sensor; 31. Lower touch sensor; 32. First touch sensor; 33. Second touch sensor; 34. Limit switch; 35. Straight rod; 36. Diagonal rod; 37. Stop block; 38. Spiral spring; 39. Upper position sensor; 40. Lower position sensor; 41. Upper round hole; 42. Touch rod; 43. Upper electric telescopic cylinder; 44. Upper slot. Detailed Implementation

[0029] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the invention is not limited to the specific embodiments disclosed below.

[0031] In practical use, it was found that in the frequent continuous processing, the manual handling of the graphite crucible 2 was not only inefficient but also prone to errors, resulting in processing delays and making it difficult to meet the ever-increasing production requirements. To solve the above problems, the following structure was invented.

[0032] like Figures 1-10 The furnace apparatus shown isostatic pressing graphite crucible for third-generation semiconductor crystal growth includes a heating furnace 1, a graphite crucible 2, and a crucible cover 3. A preparation stage 4 is fixedly connected to the side wall of the heating furnace 1, and a support frame 5 is fixedly connected between the preparation stage 4 and the top of the heating furnace 1. It should be noted that the furnace cover of the heating furnace 1 opens by rotating upwards, and the support frame 5 does not affect the normal opening of the furnace cover. A sliding groove is provided at the top of the support frame 5. A crucible seat 6 is fixedly connected to the inside of the heating furnace 1 by four brackets. A U-shaped slider 7 is slidably connected in the sliding groove, and a [missing information - likely a design feature] is provided below the slider 7. The adjustment frame 8 has a vertical groove 13 extending through its bottom end. A pair of vertical rods 9 are slidably connected to the inside of the vertical groove 13. The bottom of each vertical rod 9 has a groove on one side close to the other. A right-angled block 10 with an inclined surface is slidably connected to the inside of each groove. An upper spring 11 is fixedly connected between the inside of the groove and the side wall of the right-angled block 10. U-shaped blocks 12 are provided on both sides of the outer wall of the graphite crucible 2. Upper slots 44 are provided on both sides of the outer wall of the crucible cover 3. A moving mechanism for driving the slider 7 and the adjustment frame 8 is provided on the support frame 5. An extrusion plate 14 is slidably connected to the inside of the vertical groove 13.

[0033] The moving mechanism includes a drive motor 15, which is fixedly connected to the side wall of the support frame 5. A threaded rod 16 is rotatably connected to the inner side of the slide groove, and the threaded rod 16 is threadedly connected to the inner side wall of the slider 7. A pair of upper electric telescopic cylinders 43 are fixedly connected to the top of the slider 7. The output ends of the upper electric telescopic cylinders 43 pass through the bottom of the slider 7 and are fixedly connected to the top of the adjusting frame 8.

[0034] The extrusion plate 14 is inclined on both sides, the top of the vertical rod 9 is inclined, the inclined surface of the top of the vertical rod 9 is in contact with the inclined surface of the extrusion plate 14, and the top of the adjustment frame 8 is fixedly connected to the lower electric telescopic cylinder 17, the output end of the lower electric telescopic cylinder 17 is fixedly connected to the top of the extrusion plate 14.

[0035] Two pairs of placement blocks 18 are fixedly connected to the top of the preparation platform 4. Each placement block 18 has an upper round hole 41 at its top. A cross 19 is fixedly connected to the top of the preparation platform 4 at a position between the two pairs of placement blocks 18. The top of the cross 19 has a round groove 20 that matches the crucible cover 3. A pair of top plates 21 are fixedly connected to the outer wall of the graphite crucible 2. Each top plate 21 has an upper insertion rod 22 fixedly connected to its bottom end. Each crucible seat 6 has an upper positioning groove 23 that matches the upper insertion rod 22 at its top. The upper insertion rod 22, the upper positioning groove 23 and the upper round hole 41 can be used to position the graphite crucible 2, thereby ensuring that the right-angle block 10 is accurately inserted into the U-shaped block 12, thus ensuring the normal operation of the device and improving the stability of the device during operation.

[0036] A pair of lower insertion rods 24 are fixedly connected to the bottom of the crucible lid 3. The top of the graphite crucible 2 is provided with a lower positioning groove 25 below the lower insertion rods 24. The top of the cross 19 is provided with a pair of lower slots 26 that are adapted to the lower insertion rods 24. The lower insertion rods 24, lower positioning grooves 25 and lower slots 26 can be used to position the crucible lid 3, ensuring that the right angle block 10 can be accurately inserted into the upper slot 44, thereby improving the stability of the device during operation.

[0037] A lower spring 27 is fixedly connected between the inner side of the vertical groove 13 and the side wall of the vertical rod 9. A guide groove 28 is opened through the side wall of the vertical groove 13. A guide rod 29 is fixedly connected to the side wall of the vertical rod 9, and the guide rod 29 is slidably connected to the inner side of the guide groove 28. Through the setting of the guide rod 29 and the guide groove 28, the sliding of the vertical rod 9 can be guided, ensuring that the vertical rod 9 will not move downward under the extrusion of the extrusion plate 14, thereby improving the stability of the device during operation.

[0038] During the preparation of the graphite crucible 2, the graphite crucible 2, which needs to be placed in the heating furnace 1, is first placed between the placement blocks 18 on the side away from the heating furnace 1, and the upper insertion rod 22 is inserted into the corresponding upper round hole 41. Then, the equipment can be started. The controller controls the upper electric telescopic cylinder 43 to start and drive the adjusting frame 8 to move down, so that the vertical rod 9 moves to both sides of the graphite crucible 2. During this process, when the right-angle block 10 moves above the graphite crucible 2, the outer wall of the graphite crucible 2 presses against the inclined surface of the right-angle block 10. As the vertical rod 9 gradually moves down, it will press the right-angle block 10 into the groove and compress the upper spring 11. Then, when the right-angle block 10 moves into the U-shaped block 12, the compression of the right-angle block 10 will be released. Then, under the elastic force of the upper spring 11, the right-angle block 10 will be pushed into the U-shaped block 12. At this time, the upper electric telescopic cylinder 43 is fully extended, and the controller will control the upper electric telescopic cylinder 43 to retract. As the right-angle block 10 is inserted into the U-shaped block 12, it will drive the graphite crucible 2 to rise together.

[0039] After the upper electric telescopic cylinder 43 is fully retracted, the controller will start the drive motor 15 to rotate the threaded rod 16, which in turn moves the threaded slider 7, and simultaneously moves the adjusting frame 8 and the graphite crucible 2. Then, the graphite crucible 2 moves above the heating furnace 1, and the upper electric telescopic cylinder 43 can be started to place the graphite crucible 2 into the crucible seat 6. Then, the lower electric telescopic cylinder 17 is started to move the extrusion plate 14 downwards, pressing the inclined surface of the vertical rod 9 through the inclined surface of the extrusion plate 14. Since the vertical rod 9 can only slide laterally... Under the pressure of the extrusion plate 14, the vertical rod 9 will slide to both sides, thereby causing the right-angle block 10 to slide out from the U-shaped block 12 and compress the lower spring 27. Then, the upper electric telescopic cylinder 43 can be controlled to retract, and the lower electric telescopic cylinder 17 can be controlled to drive the extrusion plate 14 to reset and close the furnace cover of the heating furnace 1. Then, the heating furnace 1 is controlled to start processing the material of the graphite crucible 2. During this process, the operator can put another set of materials into the new graphite crucible 2 and place the graphite crucible 2 between the placement blocks 18 away from the heating furnace 1.

[0040] Then, after the semiconductor material processing is completed, the furnace lid of the heating furnace 1 is opened, and the upper electric telescopic cylinder 43 is started to repeat the above operation. The graphite crucible 2 is hooked up by the right-angle block 10. Then, the drive motor 15 is reversed to drive the adjustment frame 8 to move the graphite crucible 2 to another set of placement blocks 18. Then, the lower electric telescopic cylinder 17 is started to perform the same operation to remove the right-angle block 10 from the U-shaped block 12. At this time, the upper electric telescopic cylinder 43 is controlled to move upward a certain distance to move the right-angle block 10 next to the upper slot 44. Then, the lower electric telescopic cylinder 17 can be started to retract, thereby releasing the pressure on the vertical rod 9. Then, under the elastic force of the lower spring 27, the vertical rod 9 is pushed back to its original position, and the right-angle block 10 is inserted into the upper slot 44. Then, the upper electric telescopic cylinder 43 is started to hook up the crucible cover 3, and the drive motor 15 is started to move the crucible cover 3 above the cross 19. Then, the upper electric telescopic cylinder 43 is started to move downward and place the crucible cover 3 into the circular groove 20. Then, the lower electric telescopic cylinder 17 is started to drive the extrusion plate 14 to move downward, and then the vertical rod 9 is extruded to both sides to pull the right-angle block 10 out of the upper slot 44. Finally, the above operation is repeated in reverse, and the prepared graphite crucible 2 is placed into the heating furnace 1 to complete the preparation process.

[0041] In summary, through the design of the above structure, the graphite crucible 2 can be automatically removed from the heating furnace 1 and placed on the preparation platform 4. Subsequently, the graphite crucible 2 to be heated on the preparation platform 4 can be transferred into the heating furnace 1, thereby realizing the automatic removal and placement of the graphite crucible 2 on the furnace body, avoiding the phenomenon of workers being burned by touching it. Furthermore, after the graphite crucible 2 is placed on the preparation platform 4, the crucible lid 3 can be automatically removed and placed on the cross 19, thereby realizing the automatic opening of the crucible lid 3, further improving the convenience of the device.

[0042] Based on the above embodiments, it was found during use that although automatic loading and unloading of the graphite crucible 2 can be achieved, the operation process is cumbersome and requires manual operation to ensure that the right-angle block 10 is accurately inserted into the U-shaped block 12 and the upper slot 44. The whole process is quite cumbersome. To solve the above problems, the above structure has been further improved.

[0043] A second touch sensor 33 is fixedly connected through the top of the cross 19. The second touch sensor 33 is electrically connected to the lower electric telescopic cylinder 17 via a controller. An upper touch sensor 30 is fixedly connected through the top of the crucible base 6, relative to the lower part of one of the vertical rods 9. It should be noted that the upper touch sensor 30 is a double-sided contact capacitive pressure sensor. When the pressure-bearing diaphragm of the sensor is very close to the substrate, the diaphragm contacts the substrate after being pressed. When the pressure changes, the capacitance changes by changing the size of the contact area. In the design of the control algorithm, a capacitance change threshold for two presses is set. During the first press, when the capacitance change reaches a certain value, the sensor records but does not send a signal. During the second press, the capacitance changes further. When it exceeds the preset second press threshold, the sensor sends a signal to the controller to ensure that the graphite crucible 2 is removed. At the same time, the vertical rod 9 will not be controlled to move to both sides to ensure the normal removal of the graphite crucible 2. The top of the preparation table 4 is fixedly connected to the touch rod 42, and the top of the touch rod 42 is fixedly connected to the lower touch sensor 31. The lower touch sensor 31 mainly adopts a resistive button sensor, which is usually composed of two conductive layers and an insulating layer. When the button is not pressed, the two conductive layers maintain a certain distance and are in an open state, and no current flows in the circuit. When the button is pressed by an external force, the two conductive layers come into contact with each other under the pressure, forming an electrical circuit, and the current can flow. For micro switches, pressing the button will overcome the spring force and connect the two conductive contacts. This change in current or level (from high level to low level or vice versa) is detected by the controller, thereby determining that the button has been pressed. The controller will process this signal and execute the corresponding operation.

[0044] The upper touch sensors 30 are all electrically connected to the lower electric telescopic cylinder 17 through the controller. The first touch sensor 32 is fixedly connected to the bottom of the vertical groove 13. The first touch sensor 32 is electrically connected to the moving mechanism and the lower electric telescopic cylinder 17 through the controller.

[0045] Three limit switches 34 are fixedly connected to the top of the support frame 5. It should be noted that the limit switches 34 employ strong resistance to prevent the unlimited straight rod 35 from pushing them. The limit switches 34 are positioned directly above the cross 19 and the two pairs of placement blocks 18. A straight rod 35 for contacting the limit switches 34 is rotatably connected to the top of the slider 7. An inclined rod 36 is fixedly connected to the side wall of the straight rod 35. A stop block 37 is fixedly connected to the top of the slider 7. The side wall of the inclined rod 36 contacts the side wall of the stop block 37. A hinge groove is formed at the top of the rotating end of the straight rod 35, and a spiral spring 38 is installed within the hinge groove. One end of the spiral spring 38 is fixedly connected to the inside of the hinge groove, and the other end is fixedly connected to the top of the slider 7. An upper position... Sensor 39 and support frame 5 are fixedly connected to the lower position sensor 40 at the top of the support frame 5 directly above the heating furnace 1. The upper position sensor 39 and limit switch 34 are electrically connected to the moving mechanism through the controller. The upper position sensor 39 and lower position sensor 40 mainly adopt photoelectric position sensors to detect the position by using the blocking or reflection of light. The signal docking method is usually to directly connect the high and low level signals output by the photoelectric sensor to the digital input terminal of the controller. In the furnace device, the photoelectric position sensor can be used to detect the position of the graphite crucible 2 on the preparation table 4. When the graphite crucible 2 moves to a specific position, the photoelectric sensor detects the change in light signal and outputs a high or low level signal to the controller, thereby realizing the precise positioning and automated operation of the crucible.

[0046] During equipment operation, as the vertical rod 9 removes the graphite crucible 2 from the preparation table 4 and transfers it to the heating furnace 1, the straight rod 35 on the slider 7 passes by the limit switch 34. Since the other side of the straight rod 35 is unrestricted, the thrust from the contact end of the limit switch 34 pushes the straight rod 35 to rotate around the hinge, simultaneously causing the inclined rod 36 to rotate. Furthermore, because one end of the spiral spring 38 is fixed inside the hinge groove and the other end is fixed to the top of the slider 7, the spiral spring 38 is gradually compressed as the straight rod 35 rotates. When the straight rod 35 is moved away from the limit switch 34, the pressure on the straight rod 35 is released. Then, under the elastic force of the spiral spring 38, the straight rod 35 and the inclined rod 36 are reset, thus preventing the limit switch 34 from being triggered and controlling the drive motor 15 to stop running. Subsequently, when the graphite crucible 2 is moved above the heating furnace 1, the upper position sensor 39 moves to the side of the lower position sensor 40. The photoelectric sensor detects the change in the light signal and outputs a high or low level signal to the controller. The controller controls the drive motor 15 to stop running, thereby realizing the automatic start and stop of the device.

[0047] After the equipment stops, the controller continues to control the upper electric telescopic cylinder 43 of the moving mechanism to start, thereby automatically placing the graphite crucible 2 into the crucible seat 6. When the graphite crucible 2 is fully placed, the vertical rod 9 will touch the upper touch sensor 30, which will then transmit a signal to the controller. The controller will control the upper electric telescopic cylinder 43 to stop running and control the lower electric telescopic cylinder 17 to move down. Then the extrusion plate 14 will touch the first touch sensor 32, which will then transmit a signal to the controller. The controller will control the upper electric telescopic cylinder 43 to retract, and then control the lower electric telescopic cylinder 17 to start fixed-distance movement (it should be noted that the movement distance of the lower electric telescopic cylinder 17 can be set each time, so that the extrusion vertical rod 9 is in three positions, namely the minimum spacing, the medium spacing and the maximum spacing, and the vertical rod 9 is located above the outer side of the crucible cover 3, above the outer side of the graphite crucible 2 and above the outer side of the crucible seat 6, respectively. At this time, the fixed-distance movement of the lower electric telescopic cylinder 17 will move the vertical rod 9 to the middle position of the three positions).

[0048] Finally, during the removal of graphite crucible 2, since the upper touch sensor 30 is set with a capacitance change threshold for two presses, the vertical rod 9 will not transmit a signal when it touches the upper touch sensor 30 during the removal of graphite crucible 2. Furthermore, through program settings, the upper electric telescopic cylinder 43 will automatically reset when it is fully extended, thereby automatically removing graphite crucible 2. After the upper electric telescopic cylinder 43 resets, the controller will control the drive motor 15 to reverse and move graphite crucible 2 to the placement block 18. During this process, when graphite crucible 2 is moved above the placement block 18, the straight rod 35 is restricted from rotating because the other side of the straight rod 35 abuts against the block 37 through the inclined rod 36. Therefore, the straight rod 35 will touch the corresponding limit switch 34, which will then transmit a signal to the controller. The controller will control the drive motor 15 to stop running and then control the upper electric telescopic cylinder 43 to move down, automatically placing graphite crucible 2 onto the placement block 18.

[0049] After placement, the vertical rod 9 will touch the lower touch sensor 31 on the touch rod 42, which will then transmit a signal to the controller. The controller will control the lower electric telescopic cylinder 17 to move downward, releasing the clamp on the graphite crucible 2. Then, it will control the upper electric telescopic cylinder 43 to move upward at a fixed distance. The controller will then control the lower electric telescopic cylinder 17 to start and reset, inserting the right-angle block 10 directly into the upper slot 44. The controller will then control the upper electric telescopic cylinder 43 to rise, and the controller will control the drive motor 15 to continue moving, moving the crucible cover 3 onto the cross 19. The vertical rod 35 will touch the corresponding limit switch 34, controlling the equipment to start and stop precisely and automatically. The controller will then control the upper electric telescopic cylinder 43 to place the crucible cover 3 on the cross 19, and the vertical rod 9 will touch the second touch sensor 33. The controller will then control the lower electric telescopic cylinder 17 to move downward, pressing the vertical rod 9 to the middle position of the three positions. The controller will then control the reset, completing the automated operation of the device.

[0050] In summary, the above structural design enables automatic control of the device, eliminating the need for manual operation and greatly improving its convenience.

[0051] The foregoing has shown and described the basic principles, main features, and advantages of the present invention.

[0052] Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely the principles of the present invention. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A furnace apparatus for preparing third-generation semiconductor crystals using isostatic pressing graphite crucibles, comprising a heating furnace (1), a graphite crucible (2), and a crucible lid (3), characterized in that: A preparation platform (4) is fixedly connected to the side wall of the heating furnace (1). A support frame (5) is fixedly connected between the preparation platform (4) and the top of the heating furnace (1). A sliding groove is provided at the top of the support frame (5). A crucible seat (6) is fixedly connected to the inside of the heating furnace (1) by four brackets. A U-shaped slider (7) is slidably connected in the sliding groove. An adjustment frame (8) is provided below the slider (7). A vertical groove (13) is provided through the bottom of the adjustment frame (8). A pair of vertical rods (9) are slidably connected laterally inside the vertical groove (13). The bottom of the vertical rod (9) is provided with grooves on one side close to each other. A right-angle block (10) with an inclined surface is slidably connected to the inside of the groove. An upper spring (11) is fixedly connected between the inside of the groove and the side wall of the right-angle block (10). U-shaped blocks (12) are provided on both sides of the outer wall of the graphite crucible (2). Upper slots (44) are provided on both sides of the outer wall of the crucible cover (3). A moving mechanism for driving the slider (7) and the adjusting frame (8) is provided on the support frame (5). An extrusion plate (14) is slidably connected to the inside of the vertical groove (13). The moving mechanism includes a drive motor (15), which is fixedly connected to the side wall of the support frame (5). A threaded rod (16) is rotatably connected to the inner side of the slide groove, and the threaded rod (16) is threadedly connected to the inner side wall of the slider (7). A pair of upper electric telescopic cylinders (43) are fixedly connected to the top of the slider (7). The output ends of the upper electric telescopic cylinders (43) are all fixedly connected to the top of the adjustment frame (8) through the bottom of the slider (7). The extrusion plate (14) is inclined on both sides, the top of the vertical rod (9) is inclined, the inclined surface of the top of the vertical rod (9) is in contact with the inclined surface of the extrusion plate (14), and the top of the adjustment frame (8) is fixedly connected to the lower electric telescopic cylinder (17), and the output end of the lower electric telescopic cylinder (17) is fixedly connected to the top of the extrusion plate (14).

2. The furnace body apparatus for preparing isostatically pressed graphite crucibles for third-generation semiconductor crystal growth according to claim 1, characterized in that: The top of the preparation platform (4) is fixedly connected to two pairs of placement blocks (18), each of which has an upper round hole (41) at its top. The top of the preparation platform (4) is fixedly connected to a cross (19) between the two pairs of placement blocks (18), and the top of the cross (19) has a round groove (20) that matches the crucible lid (3). The outer wall of the graphite crucible (2) is fixedly connected to a pair of top plates (21), each of which has an upper insertion rod (22) fixedly connected to its bottom. The top of the crucible seat (6) has an upper positioning groove (23) that matches the upper insertion rod (22).

3. The furnace body device for preparing isostatically pressed graphite crucibles for third-generation semiconductor crystal growth according to claim 2, characterized in that: The bottom of each crucible lid (3) is fixedly connected to a pair of lower insert rods (24). The top of each graphite crucible (2) is provided with a lower positioning groove (25) below the lower insert rods (24). The top of each cross (19) is provided with a pair of lower slots (26) that are compatible with the lower insert rods (24). The top of each cross (19) is fixedly connected to a second touch sensor (33).

4. The furnace body apparatus for preparing isostatically pressed graphite crucibles for third-generation semiconductor crystal growth according to claim 1, characterized in that: A lower spring (27) is fixedly connected between the inner side of the vertical groove (13) and the side wall of the vertical rod (9). A guide groove (28) is opened through the side wall of the vertical groove (13). A guide rod (29) is fixedly connected to the side wall of the vertical rod (9), and the guide rod (29) is slidably connected to the inner side of the guide groove (28).

5. The furnace body apparatus for preparing isostatically pressed graphite crucibles for third-generation semiconductor crystal growth according to claim 1, characterized in that: An upper touch sensor (30) is fixedly connected through the top of the crucible base (6) to a position below one of the vertical rods (9). A touch rod (42) is fixedly connected to the top of the preparation table (4). A lower touch sensor (31) is fixedly connected through the top of the touch rod (42). The upper touch sensors (30) are all electrically connected to the lower electric telescopic cylinder (17) through the controller. A first touch sensor (32) is fixedly connected to the bottom of the vertical groove (13). The first touch sensor (32) is electrically connected to the moving mechanism and the lower electric telescopic cylinder (17) through the controller.

6. The furnace body apparatus for preparing isostatically pressed graphite crucibles for third-generation semiconductor crystal growth according to claim 1, characterized in that: Three limit switches (34) are fixedly connected to the top of the support frame (5). A straight rod (35) for touching the limit switches (34) is rotatably connected to the top of the slider (7). An inclined rod (36) is fixedly connected to the side wall of the straight rod (35). A stop block (37) is fixedly connected to the top of the slider (7). The side wall of the inclined rod (36) contacts the side wall of the stop block (37). A hinge groove is opened at the top of the rotating end of the straight rod (35). A spiral spring (38) is provided in the hinge groove. One end of the spiral spring (38) is fixedly connected to the inside of the hinge groove. The other end of the spiral spring (38) is fixedly connected to the top of the slider (7). An upper position sensor (39) is fixedly connected through the straight rod (35). A lower position sensor (40) is fixedly connected to the top of the support frame (5) at a position directly above the heating furnace (1). The upper position sensor (39) and the limit switches (34) are electrically connected to the moving mechanism through the controller.

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