Optical sensor and manufacturing method

Abstract

An optical sensor is provided with: a projection light source module (22) having a projection positioning surface (222) and projecting a projection beam (Bp) from a light emitting surface (226); a projection lens module (26) that has a projection adhesive surface (264) that adheres to the projection light source module (22) and that guides a projection beam (Bp) from the projection light source module (22) to the outside along a projection optical axis (Op); and a sensor base (14) having a projection base surface (142) for positioning the projection positioning surface (222) along the Y-axis, and in a case where a projection adjustment direction (Dp) orthogonal to the X-axis is along the projection adhesive surface (264), an optical center (Cp) passing through a light emitting surface (226) in the projection light source module (22) is shifted in the projection adjustment direction (Dp) with respect to a principal point (Pp) of the projection lens module (26). As a result, the projection optical axis (Op) is adjusted on an XZ plane orthogonal to the projection base surface (142).

Description

[0001] Cross-references between related applications

[0002] This application is based on patent application No. 2023-21054 filed in Japan on February 14, 2023, and patent application No. 2023-151638 filed in Japan on September 19, 2023, and the contents of the basic applications are cited by reference in their entirety. Technical Field

[0003] The present disclosure relates to optical sensors and methods of manufacturing the same. Background Art

[0004] Conventionally, optical sensors are widely known that detect the outside world by projecting a projected light beam toward the outside world and receiving a reflected beam that reflects the projected light beam from the outside world. In the technology disclosed in Patent Document 1, the optical axis of a lens module that directs the projected light beam from the light source module toward the outside world is adjusted relative to the light source module that generates the projected light beam.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2017-3938 Summary of the Invention

[0008] However, in the technology disclosed in Patent Document 1, the lens module is aligned relative to the light source module in three axes. This alignment technology is difficult to accommodate manufacturing tolerances such as tilt within each module and between modules, thus limiting the accuracy of optical axis adjustment.

[0009] In view of the above, an object of the present disclosure is to provide an optical sensor and a method for manufacturing the same, in which the adjustment accuracy of the optical axis is ensured.

[0010] Hereinafter, technical means of the present disclosure for solving the problems will be described.

[0011] An optical sensor according to a first aspect of the present disclosure projects a light beam toward the outside world and receives a reflected beam reflected from the outside world in response to the light beam, thereby detecting the outside world. A three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis. The optical sensor comprises:

[0012] The light source module has a light positioning surface and projects a light beam from the light emitting surface;

[0013] The light projection lens module has a light projection bonding surface bonded to the light projection light source module, and guides the light projection beam from the light projection light source module toward the outside along the light projection optical axis; and

[0014] The sensor base has a light projection base surface for positioning the light projection positioning surface along the Y axis,

[0015] Assuming that the light projection adjustment direction perpendicular to the X axis is along the light projection bonding surface,

[0016] By shifting the optical center of the light-emitting surface of the projection light source module relative to the principal point of the projection lens module in the projection adjustment direction, the projection optical axis is adjusted on the XZ plane orthogonal to the projection base surface in the three-dimensional coordinate system.

[0017] A second manufacturing method of the present disclosure is a method for manufacturing the optical sensor of the first embodiment, comprising:

[0018] Measuring the angular deviation of the projection positioning surface relative to the projection bonding surface about the X-axis in a focused state of the projection beam;

[0019] Adhering the light projection bonding surface of the light projection lens module to the light projection light source module in a state where the optical center of the light emitting surface is offset from the principal point of the light projection lens module in the light projection adjustment direction by an offset amount related to the measured value of the attitude angle deviation; and

[0020] In the light projection light source module to which the light projection lens module is bonded, the light projection base surface is positioned on the light projection positioning surface and fixed to the sensor base.

[0021] Thus, in the first and second embodiments, in the projector light source module bonded to the projector light bonding surface of the projector lens module, the projection positioning surface is positioned along the Y-axis via the projector base surface of the sensor base. Therefore, according to the first and second embodiments, the optical center of the light-emitting surface in the projector light source module is offset relative to the principal point of the projector lens module along the projector bonding surface in a projection adjustment direction orthogonal to the X-axis, thereby adjusting the projection optical axis to the XZ plane orthogonal to the projector base surface. This offset structure can absorb manufacturing tolerances, including tilt within each module and between modules, and adjust the projection optical axis to match the XZ plane. Therefore, the adjustment accuracy of the projection optical axis can be ensured.

[0022] Furthermore, in a second embodiment, in a projection light source module to which the projection lens module's projection bonding surface is bonded, the projection positioning surface is positioned by the projection base surface and fixed to the sensor base. Therefore, according to the second embodiment, the modules are bonded to each other before being fixed to the sensor base, with the optical center of the light-emitting surface offset relative to the principal point of the projection lens module in the projection adjustment direction by an offset related to a measured value obtained by measuring the posture angle deviation of the projection positioning surface relative to the projection bonding surface around the X-axis. In other words, this means that the posture angle deviation of the projection positioning surface relative to the projection bonding surface can be an appropriate angle corresponding to the offset required to form a projection optical axis that matches the XZ plane. Therefore, the projection optical axis can be adjusted with high precision.

[0023] Regarding a third aspect of the present disclosure, in the optical sensor of the first aspect,

[0024] have:

[0025] A light-receiving detection module has a light-receiving positioning surface, and detects the outside world by receiving a reflected beam on the detection surface; and

[0026] The light receiving lens module has a light receiving bonding surface bonded to the light receiving detection module, and guides the reflected beam from the outside to the light receiving detection module along the light receiving optical axis.

[0027] The sensor base has a light receiving base surface for positioning the light receiving positioning surface along the Y axis.

[0028] Assuming that the light receiving adjustment direction perpendicular to the X axis is along the light receiving adhesive surface,

[0029] By shifting the optical center of the detection surface in the light receiving detection module relative to the principal point of the light receiving lens module in the light receiving adjustment direction, the light receiving optical axis is adjusted to the XZ plane orthogonal to the light receiving base surface in the three-dimensional coordinate system.

[0030] A fourth embodiment of the present disclosure is an optical sensor that projects a light beam toward the outside world and receives a reflected beam reflected from the outside world in response to the light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0031] The optical sensor comprises:

[0032] The light-receiving detection module has a light-receiving positioning surface, and detects the outside world by receiving the reflected beam on the detection surface;

[0033] The light receiving lens module has a light receiving bonding surface bonded to the light receiving detection module, and guides the reflected beam from the outside to the light receiving detection module along the light receiving optical axis; and

[0034] The sensor base has a light receiving base surface for positioning the light receiving positioning surface along the Y axis.

[0035] Assuming that the light receiving adjustment direction perpendicular to the X axis is along the light receiving adhesive surface,

[0036] By shifting the optical center of the detection surface in the light receiving detection module relative to the principal point of the light receiving lens module in the light receiving adjustment direction, the light receiving optical axis is adjusted to the XZ plane orthogonal to the light receiving base surface in the three-dimensional coordinate system.

[0037] A fifth aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the third aspect or the fourth aspect.

[0038] The manufacturing method comprises:

[0039] measuring the attitude angle deviation of the light-receiving positioning surface relative to the light-receiving bonding surface around the X-axis in the focused state of the reflected beam;

[0040] Adhering the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module in a state where the optical center of the detection surface is offset in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an offset amount related to the measured value of the posture angle deviation; and

[0041] In the light-receiving detection module to which the light-receiving lens module is bonded, the light-receiving base surface is positioned relative to the light-receiving positioning surface and fixed to the sensor base.

[0042] In these third through fifth aspects, in the light-receiving detection module bonded to the light-receiving adhesive surface of the light-receiving lens module, the light-receiving positioning surface is positioned along the Y-axis by the light-receiving base surface of the sensor base. Therefore, according to the third through fifth aspects, the optical center of the detection surface in the light-receiving detection module is offset relative to the principal point of the light-receiving lens module along the light-receiving adhesive surface in a light-receiving adjustment direction orthogonal to the X-axis, thereby adjusting the light-receiving optical axis to lie on the XZ plane orthogonal to the light-receiving base surface. This offset structure can absorb manufacturing tolerances, including tilt within each module and between modules, and allows the light-receiving optical axis to be adjusted to match the XZ plane. Consequently, the adjustment accuracy of the light-receiving optical axis can be ensured.

[0043] Furthermore, in the fifth embodiment, the light-receiving detection module, to which the light-receiving adhesive surface of the light-receiving lens module is bonded, is positioned relative to the light-receiving positioning surface via the light-receiving base surface and secured to the sensor base. Therefore, according to the fifth embodiment, the modules are bonded together before being secured to the sensor base, with the optical center of the detection surface offset relative to the principal point of the light-receiving lens module in the light-receiving adjustment direction by an offset value corresponding to the measured angular deviation of the light-receiving positioning surface relative to the light-receiving adhesive surface about the X-axis. In other words, this means that the angular deviation of the light-receiving positioning surface relative to the light-receiving adhesive surface can be adjusted to an appropriate angle corresponding to the offset required to form a light-receiving optical axis aligned with the XZ plane. Consequently, the light-receiving optical axis can be adjusted with high precision.

[0044] A sixth aspect of the present disclosure is an optical sensor that projects a light beam toward the outside world and receives a reflected beam reflected from the outside world in response to the light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0045] The optical sensor comprises:

[0046] The light source module has a light positioning surface and projects a light beam from the light emitting surface;

[0047] The light projection lens module has a light projection bonding surface bonded to the light projection light source module, and guides the light projection beam from the light projection light source module toward the outside along the light projection optical axis; and

[0048] The sensor base has a light projection base surface for positioning the light projection positioning surface along the Y axis.

[0049] Assuming that the light projection adjustment direction perpendicular to the X axis is along the light projection bonding surface,

[0050] By shifting the optical center of the light-emitting surface in the projection light source module relative to the principal point of the projection lens module in the projection adjustment direction, the projection optical axis is adjusted on a projection reference plane orthogonal to the YZ plane in the three-dimensional coordinate system.

[0051] In this sixth embodiment, in the projector light source module bonded to the projector light bonding surface of the projector lens module, the projector light positioning surface is positioned by the projector light base surface of the sensor base along the Y-axis. Therefore, according to the sixth embodiment, the optical center of the light-emitting surface in the projector light source module is offset along the projector light bonding surface relative to the principal point of the projector lens module in a projection adjustment direction orthogonal to the X-axis, thereby adjusting the projection light axis to a projection reference plane orthogonal to the YZ plane. This offset structure can absorb manufacturing tolerances, including tilt within each module and between modules, and the projection light axis can be adjusted to match the projection reference plane. Therefore, the adjustment accuracy of the projection light axis can be ensured.

[0052] Regarding a seventh aspect of the present disclosure, in the optical sensor of the sixth aspect,

[0053] have:

[0054] A light-receiving detection module has a light-receiving positioning surface, and detects the outside world by receiving a reflected beam on the detection surface; and

[0055] The light receiving lens module has a light receiving bonding surface bonded to the light receiving detection module, and guides the reflected beam from the outside to the light receiving detection module along the light receiving optical axis.

[0056] The sensor base has a light receiving base surface along the Y axis for positioning the light receiving positioning surface.

[0057] Assuming that the light receiving adjustment direction perpendicular to the X axis is along the light receiving adhesive surface,

[0058] By shifting the optical center of the detection surface in the light receiving detection module relative to the principal point of the light receiving lens module in the light receiving adjustment direction, the light receiving optical axis is adjusted on the light receiving reference plane orthogonal to the YZ plane in the three-dimensional coordinate system.

[0059] An eighth aspect of the present disclosure is an optical sensor that projects a light beam toward the outside world and receives a reflected beam reflected from the outside world in response to the light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0060] The light-receiving detection module has a light-receiving positioning surface, and detects the outside world by receiving the reflected beam on the detection surface;

[0061] The light receiving lens module has a light receiving bonding surface bonded to the light receiving detection module, and guides the reflected beam from the outside to the light receiving detection module along the light receiving optical axis; and

[0062] The sensor base has a light receiving base surface for positioning the light receiving positioning surface along the Y axis.

[0063] Assuming that the light receiving adjustment direction perpendicular to the X axis is along the light receiving adhesive surface,

[0064] By shifting the optical center of the detection surface in the light receiving detection module relative to the principal point of the light receiving lens module in the light receiving adjustment direction, the light receiving optical axis is adjusted on the light receiving reference plane orthogonal to the YZ plane in the three-dimensional coordinate system.

[0065] In the seventh and eighth aspects, the light-receiving detection module, bonded to the light-receiving adhesive surface of the light-receiving lens module, has its light-receiving positioning surface positioned by the light-receiving base surface of the sensor base along the Y-axis. Therefore, according to the seventh and eighth aspects, the optical center of the detection surface in the light-receiving detection module is offset relative to the principal point of the light-receiving lens module along the light-receiving adhesive surface in a light-receiving adjustment direction orthogonal to the X-axis, thereby aligning the light-receiving optical axis with the light-receiving reference plane orthogonal to the YZ plane. This offset structure can accommodate manufacturing tolerances, including tilt within each module and between modules, and allows the light-receiving optical axis to be adjusted to align with the light-receiving reference plane. Consequently, the adjustment accuracy of the light-receiving optical axis can be ensured.

[0066] Regarding a ninth aspect of the present disclosure, in the optical sensor according to the seventh aspect,

[0067] have:

[0068] The positioning gasket is clamped between at least one of the light projection positioning portion between the light projection positioning surface and the light projection base surface, and the light receiving positioning portion between the light receiving positioning surface and the light receiving base surface in a manner that the light projection optical axis and the light receiving optical axis are along each other in the three-dimensional coordinate system.

[0069] Thus, in the ninth embodiment, a positioning spacer is interposed between at least one of the light-projection positioning portion between the light-projection positioning surface and the light-projection base surface, and the light-receiving positioning portion between the light-receiving positioning surface and the light-receiving base surface. This allows for an angular error in the light-projection and / or light-receiving axes due to manufacturing tolerances of the offset structure caused by curing shrinkage during bonding, thereby aligning the directions of these axes and accommodating the manufacturing tolerances. Consequently, the adjustment accuracy of the light-projection and light-receiving axes can be maintained.

[0070] A tenth aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the ninth aspect.

[0071] The manufacturing method comprises:

[0072] Measuring the angular deviation of the projection posture of the projection positioning surface relative to the projection bonding surface around the X-axis in the focused state of the projection beam;

[0073] Adhere the light projection adhesive surface of the light projection lens module to the light projection light source module via a light projection adhesive so that the optical center of the light emitting surface is offset in the light projection adjustment direction relative to the principal point of the light projection lens module by an offset amount related to the measured value of the light projection posture angular deviation;

[0074] measuring a projection error angle generated in a three-dimensional coordinate system on a projection optical axis of a projection lens module bonded to a projection light source module by curing a projection adhesive;

[0075] Measure the light receiving posture angular deviation around the X axis of the light receiving positioning surface relative to the light receiving bonding surface in the focused state of the reflected beam;

[0076] Adhering the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module via a light-receiving adhesive material in a state where the optical center of the detection surface is offset in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an offset amount related to the measured value of the light-receiving posture angle deviation;

[0077] measuring a light receiving error angle generated in a three-dimensional coordinate system on a light receiving optical axis of a light receiving lens module bonded to a light receiving detection module by curing a light receiving adhesive;

[0078] Adjusting the wedge angle of the light-receiving positioning gasket according to the correlation between the light-projection error angle and the light-receiving error angle, wherein the light-receiving positioning gasket is a positioning gasket clamped at the light-receiving positioning portion in such a manner that the light-projection optical axis and the light-receiving optical axis are aligned with each other;

[0079] In the light projection light source module bonded with the light projection lens module, the light projection base is directly positioned on the light projection positioning surface and fixed to the sensor base; and

[0080] In the light-receiving detection module to which the light-receiving lens module is bonded, the light-receiving positioning surface is positioned by the light-receiving base surface via the light-receiving positioning spacer and fixed to the sensor base.

[0081] In the tenth aspect, the modules are bonded together in a state in which the optical center of the light-emitting surface is offset relative to the principal point of the light-emitting lens module in the light-projection adjustment direction by an offset amount corresponding to the value obtained by measuring the light-projection posture angle deviation according to the second aspect. Simultaneously, in the tenth aspect, the modules are bonded together in a state in which the optical center of the detection surface is offset relative to the principal point of the light-receiving lens module in the light-receiving adjustment direction by an offset amount corresponding to the value obtained by measuring the light-receiving posture angle deviation according to the fifth aspect.

[0082] However, in the tenth embodiment, even if the projection optical axis of the projecting lens module, which is bonded to the projecting light source module by curing of the projecting adhesive, exhibits a projection error angle corresponding to manufacturing tolerances caused by the curing shrinkage of the projecting adhesive, measurement is performed. Simultaneously, even if the receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by curing of the light-receiving adhesive, exhibits a reception error angle corresponding to manufacturing tolerances caused by the curing shrinkage of the light-receiving adhesive, measurement is performed. Thus, since the directions of the projection optical axis and the receiving optical axis are aligned, the wedge angle of the light-receiving positioning spacer can be accurately adjusted based on the correlation between the projection error angle and the reception error angle.

[0083] Therefore, according to the tenth embodiment, the light-emitting positioning surface is directly positioned and fixed by the light-emitting base surface, while the light-receiving positioning surface is positioned and fixed by the light-receiving base surface via the light-receiving positioning spacer. Therefore, the adjustment accuracy of the light-emitting and light-receiving optical axes can be ensured by aligning the directions of these optical axes.

[0084] An eleventh aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the ninth aspect.

[0085] The manufacturing method comprises:

[0086] Measuring the angular deviation of the projection posture of the projection positioning surface relative to the projection bonding surface around the X-axis in the focused state of the projection beam;

[0087] Adhere the light projection adhesive surface of the light projection lens module to the light projection light source module via a light projection adhesive so that the optical center of the light emitting surface is offset in the light projection adjustment direction relative to the principal point of the light projection lens module by an offset amount related to the measured value of the light projection posture angular deviation;

[0088] measuring a projection error angle generated in a three-dimensional coordinate system on a projection optical axis of a projection lens module bonded to a projection light source module by curing a projection adhesive;

[0089] Measure the light receiving posture angular deviation around the X axis of the light receiving positioning surface relative to the light receiving bonding surface in the focused state of the reflected beam;

[0090] Adhering the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module via a light-receiving adhesive material in a state where the optical center of the detection surface is offset in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an offset amount related to the measured value of the light-receiving posture angle deviation;

[0091] measuring a light receiving error angle generated in a three-dimensional coordinate system on a light receiving optical axis of a light receiving lens module bonded to a light receiving detection module by curing a light receiving adhesive;

[0092] The wedge angle of the light projection positioning gasket is adjusted according to the correlation between the light projection error angle and the light receiving error angle, wherein the light projection positioning gasket is a positioning gasket clamped at the light projection positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other;

[0093] In the light projection light source module bonded with the light projection lens module, the light projection positioning surface is positioned and fixed to the sensor base via the light projection positioning gasket through the light projection base surface; and

[0094] In the light-receiving detection module to which the light-receiving lens module is bonded, the light-receiving positioning surface is directly positioned by the light-receiving base surface and fixed to the sensor base.

[0095] In the eleventh aspect, the modules are bonded together in an offset configuration such that the optical center of the light-emitting surface is offset in the light projection adjustment direction relative to the principal point of the light-emitting lens module by an offset amount related to the measured value of the attitude angle deviation obtained by measuring the attitude angle deviation according to the second aspect. Simultaneously, in the eleventh aspect, the modules are bonded together in an offset configuration such that the optical center of the detection surface is offset in the light reception adjustment direction relative to the principal point of the light-receiving lens module by an offset amount related to the measured value of the attitude angle deviation obtained by measuring the attitude angle deviation according to the fifth aspect.

[0096] However, in the eleventh embodiment, even if the projection optical axis of the projecting lens module, which is bonded to the projecting light source module by curing of the projecting adhesive, exhibits a projection error angle corresponding to manufacturing tolerances caused by the curing shrinkage of the projecting adhesive, the measurement is still performed. Simultaneously, even if the receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by curing of the light-receiving adhesive, exhibits a reception error angle corresponding to manufacturing tolerances caused by the curing shrinkage of the light-receiving adhesive, the measurement is still performed. Thus, since the directions of the projection optical axis and the receiving optical axis are aligned, the wedge angle of the projecting positioning spacer can be accurately adjusted based on the correlation between the projection error angle and the reception error angle.

[0097] Therefore, according to the eleventh embodiment, the light receiving positioning surface is directly positioned and fixed by the light receiving base surface, while the light projecting positioning surface is positioned and fixed by the light projecting base surface via the light projecting positioning spacer. Therefore, the adjustment accuracy of the light projecting and light receiving optical axes can be ensured by aligning the directions of these optical axes.

[0098] A twelfth aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the ninth aspect.

[0099] The manufacturing method comprises:

[0100] Measuring the angular deviation of the projection posture of the projection positioning surface relative to the projection bonding surface around the X-axis in the focused state of the projection beam;

[0101] Adhere the light projection adhesive surface of the light projection lens module to the light projection light source module via a light projection adhesive so that the optical center of the light emitting surface is offset in the light projection adjustment direction relative to the principal point of the light projection lens module by an offset amount related to the measured value of the light projection posture angular deviation;

[0102] measuring a projection error angle generated in a three-dimensional coordinate system on a projection optical axis of a projection lens module bonded to a projection light source module by curing a projection adhesive;

[0103] Measure the light receiving posture angular deviation around the X axis of the light receiving positioning surface relative to the light receiving bonding surface in the focused state of the reflected beam;

[0104] Adhering the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module via a light-receiving adhesive material in a state where the optical center of the detection surface is offset in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an offset amount related to the measured value of the light-receiving posture angle deviation;

[0105] measuring a light receiving error angle generated in a three-dimensional coordinate system on a light receiving optical axis of a light receiving lens module bonded to a light receiving detection module by curing a light receiving adhesive;

[0106] Adjusting the wedge angle of the light projection positioning gasket according to the light projection error angle, wherein the light projection positioning gasket is a positioning gasket clamped at the light projection positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other;

[0107] Adjusting the wedge angle of the light-receiving positioning gasket according to the light-receiving error angle, wherein the light-receiving positioning gasket is a positioning gasket clamped at the light-receiving positioning portion in such a manner that the light-projecting optical axis and the light-receiving optical axis are aligned with each other;

[0108] In the light projection light source module bonded with the light projection lens module, the light projection positioning surface is positioned and fixed to the sensor base via the light projection positioning gasket through the light projection base surface; and

[0109] In the light-receiving detection module to which the light-receiving lens module is bonded, the light-receiving positioning surface is positioned by the light-receiving base surface via the light-receiving positioning spacer and fixed to the sensor base.

[0110] In the twelfth aspect, the modules are bonded together in a state in which the optical center of the light-emitting surface is offset relative to the principal point of the light-emitting lens module in the light-projection adjustment direction by an offset amount related to the measured value of the attitude angle deviation obtained by measuring the attitude angle deviation according to the second aspect. Simultaneously, in the twelfth aspect, the modules are bonded together in a state in which the optical center of the detection surface is offset relative to the principal point of the light-receiving lens module in the light-receiving adjustment direction by an offset amount related to the measured value of the attitude angle deviation obtained by measuring the attitude angle deviation according to the fifth aspect.

[0111] However, in the twelfth embodiment, even if the projection optical axis of the projecting lens module, which is bonded to the projecting light source module by curing of the projecting adhesive, exhibits a projection error angle corresponding to manufacturing tolerances caused by the curing shrinkage of the projecting adhesive, the measurement is still performed. Simultaneously, even if the receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by curing of the light-receiving adhesive, exhibits a reception error angle corresponding to manufacturing tolerances caused by the curing shrinkage of the light-receiving adhesive, the measurement is still performed. Thus, to align the directions of the projection optical axis and the receiving optical axis, the wedge angles of the projection positioning spacer and the light-receiving positioning spacer can be accurately adjusted based on the projection error angle and the reception error angle, respectively.

[0112] Therefore, according to the twelfth embodiment, the light-projecting positioning surface is positioned and fixed by the light-projecting base surface via the light-projecting positioning pad, and the light-receiving positioning surface is positioned and fixed by the light-receiving base surface via the light-receiving positioning pad. Therefore, the adjustment accuracy of the light-projecting optical axis and the light-receiving optical axis can be ensured by the mutual alignment of these optical axis directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0113] Figure 1 It is a schematic diagram showing the overall structure of the optical sensor according to the first embodiment in partial cross-section.

[0114] Figure 2 It is a perspective view showing the light projection unit according to the first embodiment.

[0115] Figure 3 It is an XY plane view schematically showing the light projection unit according to the first embodiment.

[0116] Figure 4 It is a perspective view showing the light receiving unit according to the first embodiment.

[0117] Figure 5 It is an XY plane view schematically showing the light receiving unit according to the first embodiment.

[0118] Figure 6 It is a YZ plane view showing the detailed structure of the optical sensor according to the first embodiment in partial cross section.

[0119] Figure 7 It is a YZ plane view schematically showing the structure of the light projection unit according to the first embodiment.

[0120] Figure 8 This is a flowchart showing a method for manufacturing the light projection unit according to the first embodiment.

[0121] Figure 9 It is a schematic diagram for explaining the manufacturing method of the light projection unit of the first embodiment.

[0122] Figure 10 It is a schematic diagram for explaining the manufacturing method of the light projection unit of the first embodiment.

[0123] Figure 11 It is a schematic diagram for explaining the manufacturing method of the light projection unit of the first embodiment.

[0124] Figure 12 It is a YZ plane view schematically showing the structure of the light receiving unit according to the first embodiment.

[0125] Figure 13 This is a flowchart showing a method for manufacturing the light receiving unit according to the first embodiment.

[0126] Figure 14 It is a schematic diagram for explaining the manufacturing method of the light receiving unit of the first embodiment.

[0127] Figure 15 It is a schematic diagram for explaining the manufacturing method of the light receiving unit of the first embodiment.

[0128] Figure 16 It is a schematic diagram for explaining the manufacturing method of the light receiving unit of the first embodiment.

[0129] Figure 17 It is a YZ plane view showing the detailed structure of the optical sensor according to the second embodiment in partial cross section.

[0130] Figure 18 It is a YZ plane view showing a detailed structure of the optical sensor according to the third embodiment in partial cross-section.

[0131] Figure 19 It is a YZ plane view schematically showing the structure of the light projection unit according to the third embodiment.

[0132] Figure 20 It is a YZ plane view schematically showing the structure of the light receiving unit according to the third embodiment.

[0133] Figure 21 This is a flowchart showing a method for manufacturing an optical sensor according to a third embodiment.

[0134] Figure 22 It is a schematic diagram for explaining a light projection sequence in the method for manufacturing the optical sensor according to the third embodiment.

[0135] Figure 23 It is a schematic diagram for explaining the light projection sequence in the method for manufacturing the optical sensor according to the third embodiment.

[0136] Figure 24 It is a schematic diagram for explaining a light receiving sequence in the method for manufacturing the optical sensor according to the third embodiment.

[0137] Figure 25 It is a schematic diagram for explaining the light receiving sequence in the method for manufacturing the optical sensor according to the third embodiment.

[0138] Figure 26 It is a YZ plane view showing a detailed structure of the optical sensor according to the fourth embodiment in partial cross-section.

[0139] Figure 27 It is a YZ plane view schematically showing the structure of the light projection unit according to the fourth embodiment.

[0140] Figure 28It is a YZ plane view schematically showing the structure of the light receiving unit according to the fourth embodiment.

[0141] Figure 29 This is a flowchart showing a method for manufacturing an optical sensor according to a fourth embodiment.

[0142] Figure 30 It is a YZ plane view showing the detailed structure of the optical sensor of the fifth embodiment in partial cross section.

[0143] Figure 31 It is a YZ plane view schematically showing the structure of the light projection unit according to the fifth embodiment.

[0144] Figure 32 It is a YZ plane view schematically showing the structure of the light receiving unit according to the fifth embodiment.

[0145] Figure 33 This is a flowchart showing a method for manufacturing an optical sensor according to a fifth embodiment. DETAILED DESCRIPTION

[0146] (First embodiment)

[0147] like Figure 1 As shown, the optical sensor 10 of the first embodiment of the present disclosure is a LiDAR (Light Detection and Ranging / Laser Imaging Detection and Ranging) configured on a mobile object to optically detect the outside world. The mobile object to which the optical sensor 10 is configured is a vehicle such as a car that can be driven by at least one of manual driving, automatic driving, and remote driving. In addition, in the following description, unless otherwise specified, the directions shown as front, rear, up, down, left, and right are defined with respect to the vehicle on a horizontal plane. In addition, in the following description, the horizontal direction and the vertical direction refer to the parallel direction and the perpendicular direction relative to the horizontal plane in the vehicle on the horizontal plane, respectively.

[0148] The optical sensor 10 is placed, for example, at at least one location on the vehicle, such as the front, left and right sides, rear, or roof. The optical sensor 10 projects a projection beam Bp toward a detection area Ad in the vehicle corresponding to the location in the vehicle. The optical sensor 10 detects the return light reflected from the projection beam Bp by an object in the detection area Ad as a reflected beam Br. The reflected beam Br selects light in the near-infrared region, which is difficult for humans to visually perceive, from the projection beam Bp.

[0149] The optical sensor 10 detects external targets within the detection area Ad by receiving the reflected beam Br, which is reflected from the projected light beam Bp. Such external target detection involves, for example, detecting one or more of the following: the distance from the optical sensor 10 to the target, the target's direction, and the intensity of the reflected beam Br from the target, including at least the distance. Representative targets for detection in a vehicle-based optical sensor 10 include, for example, at least one of moving objects such as pedestrians, cyclists, non-human animals, and other vehicles. Representative targets for detection in a vehicle-based optical sensor 10 include, for example, at least one of stationary objects such as guardrails, road signs, roadside structures, and fallen objects on the road.

[0150] In the optical sensor 10, a three-dimensional coordinate system is defined by the three axes X, Y, and Z, which are orthogonal to each other. In particular, in the three-dimensional coordinate system of the optical sensor 10, the Y-axis direction is defined as the vertical direction along the vehicle, and the X-axis direction and the Z-axis direction are defined as different horizontal directions along the vehicle. Therefore, in a vehicle on a horizontal plane, the XY plane and the YZ plane of the three-dimensional coordinate system are along the vertical plane perpendicular to the horizontal plane, and the XZ plane is along the horizontal plane. In addition, in Figure 1 The figure shows a cross section perpendicular to the left side portion (optical window 13 side described later) of the one-dot chain line along the Y-axis direction relative to the right side portion (unit 21, 41 side described later) of the one-dot chain line.

[0151] The optical sensor 10 includes a housing 11, a light-emitting unit 21, a scanning unit 31, a light-receiving unit 41, and a control unit 51. The housing 11, which separates the outside from the inside, is configured to include an outer shell 12 and an optical window 13. The light-shielding outer shell 12 is formed into a box shape from, for example, metal or resin. The outer shell 12 accommodates the light-emitting unit 21, the scanning unit 31, the light-receiving unit 41, and the control unit 51. The housing 11 has an opening that is closed by the optical window 13. The light-transmitting optical window 13 is formed into a plate shape from, for example, resin or glass.

[0152] like Figure 1 、 2 As shown, the light projection unit 21 includes a light projection light source module 22 and a light projection lens module 26. Figure 3As shown, the light source module 22 is constructed by mounting a plurality of light sources 24 in an array on a substrate 220. In particular, each light source 24 of this embodiment is a laser diode arranged in a single row along the Y-axis direction. Each light source 24 generates a laser beam that becomes part of the light beam Bp in a pulsed manner according to a control signal from the control unit 51. Each light source 24 can be an edge emitter laser or a vertical cavity surface emitting laser (VCSEL).

[0153] like Figure 1 、 3 As shown, the projector light source module 22 has a light-emitting surface 226 formed on one side of a substrate 220, which projects a projector light beam Bp from the light emitted by each projector light source 24. The light-emitting surface 226 is roughly defined by the collection of laser oscillators in each projector light source 24 into a rectangular outline with its long side in the Y-axis direction and its short side in the X-axis direction. Laser light projected from the laser oscillators of each projector light source 24 is shaped into a vertically elongated linear projector light beam Bp and projected from the light-emitting surface 226 into the detection area Ad.

[0154] like Figure 1 、 2 As shown, the projection lens module 26 is constructed with at least one projection lens 260 held by a projection lens barrel 261. The translucent projection lens 260 is primarily formed from a substrate such as resin or glass, and has a lens shape corresponding to the optical function it performs. The projection lens 260 performs at least one optical function, such as focusing, collimating, and shaping, on the projection beam Bp from the projection light source module 22. The projection lens 260 is positioned within a light-shielding projection lens barrel 261, which is formed into a cylindrical shape, such as from metal or resin.

[0155] The light projection lens module 26 thus configured is aligned with the light projection light source module 22 so as to form a light projection optical axis Op. Therefore, the light projection beam Bp projected from the light projection light source module 22 is guided toward the outside of the vehicle along the light projection optical axis Op on the XZ plane by the optical action of the light projection lens module 26.

[0156] like Figure 1As shown, the scanning unit 31 is constructed to include a scanning mirror 32 and a scanning motor 35. The scanning mirror 32 is formed in the shape of a plate with a reflective film deposited on a single-sided reflective surface 33 as a base. The scanning mirror 32 is supported by the housing 11 in a manner that allows it to be rotationally driven around the rotation center line in the Y-axis direction. The scanning mirror 32 performs a swinging motion within a limited driving range by mechanical or electrical stoppers. The scanning motor 35 is, for example, a voice coil motor, a brushed DC motor, or a stepping motor. The output shaft of the scanning motor 35 is directly coupled to the scanning mirror 32, or indirectly coupled via a driving mechanism such as a reducer. The scanning motor 35 is held by the housing 11 in a manner that allows it to rotationally drive the scanning mirror 32 together with the output shaft. The scanning motor 35 rotationally drives (i.e., swing drives) the scanning mirror 32 within a limited driving range based on a control signal from the control unit 51.

[0157] The scanning mirror 32 causes the projected light beam Bp incident from the light projecting unit 21 to be reflected by the reflecting surface 33 and irradiated toward the detection area Ad through the optical window 13, thereby scanning the detection area Ad according to the rotation angle of the scanning motor 35. At this time, in this embodiment, the scanning of the projected light beam Bp on the detection area Ad according to the rotational drive of the scanning mirror 32 is essentially limited to scanning in the horizontal direction.

[0158] Scanning mirror 32 reflects reflected beam Br, incident from an object in detection area Ad through optical window 13, toward light receiving unit 41 via reflective surface 33 in accordance with the rotational angle of scan motor 35. At this time, the speeds of projected light beam Bp and reflected beam Br are sufficiently greater than the rotational speed of scanning mirror 32. Consequently, reflected beam Br is reflected from scanning mirror 32, which can simulate the angle of projected light beam Bp at substantially the same rotational angle, and is guided toward light receiving unit 41 in the opposite direction of projected light beam Bp.

[0159] like Figure 1 、 4 As shown, the light receiving unit 41 is configured to include a light receiving lens module 42 and a light receiving detection module 45. The light receiving lens module 42 is constructed such that at least one light receiving lens 420 is held by a light receiving lens barrel 421. The light transmitting light receiving lens 420 is primarily formed from a base material such as resin or glass, and has a lens shape corresponding to the optical function it performs. The light receiving lens 420 performs an optical function to form an image of the reflected beam Br from the scanning mirror 32 toward the light receiving detection module 45. The light receiving lens 420 is positioned within a light shielding light receiving lens barrel 421, which is formed into a cylindrical shape, for example, from metal or resin.

[0160] The light-receiving lens module 42 thus configured is aligned with the light-receiving detection module 45 so as to form a light-receiving optical axis Or. Here, the light-receiving optical axis Or of the light-receiving lens module 42 is offset in the Y-axis direction relative to the light-projecting optical axis Op of the light-projecting lens module 26. As a result, the reflected beam Br, which is offset in the Y-axis direction and reflected from the reflective surface 33 of the scanning mirror 32, is guided toward the light-receiving detection module 45 along the light-receiving optical axis Or on the XZ plane by the optical action of the light-receiving lens module 42.

[0161] like Figure 5 As shown, the light detection module 45 is constructed by mounting a plurality of light-receiving pixels 46 in an array on a substrate 450. The light-receiving pixels 46 are arranged at least in the Y-axis direction. Each light-receiving pixel 46 is further formed by a plurality of light-receiving elements 460, such as single photon avalanche diodes.

[0162] like Figure 1 、 5 As shown, the light-receiving detection module 45 forms a detection surface 456 on one side of the substrate 450. The detection surface 456 is formed by the collection of incident surfaces of each light-receiving pixel 46 into a rectangular outline with its long side in the Y-axis direction and its short side in the X-axis direction. Each light-receiving pixel 46 receives the linear reflected beam Br incident on the detection surface 456 from the light-receiving lens module 42 along the light-receiving optical axis Or.

[0163] like Figure 1 As shown, the light-receiving detection module 45 includes an output circuit 47. The output circuit 47 performs sampling processing for each control cycle of the control signal from the control unit 51, synchronized with the projection cycle of the light beam Bp from the light-projecting light source module 22 and corresponding to the rotation angle of the scanning mirror 32, within the detection frame of each scanning line. At this time, the output circuit 47 synthesizes the response outputs from the light-receiving elements 460 of each light-receiving pixel 46 for each control cycle to generate a detection signal. The detection signal generated in this way is output from the output circuit 47 to the control unit 51 for each scanning line.

[0164] The control unit 51 controls the detection of target objects in the detection area Ad of the outside world. The control unit 51 is mainly constructed with at least one of a processor and a computer including a memory. The control unit 51 is connected to the light projection light source module 22, the scanning motor 35, and the light receiving detection module 45. The control unit 51 controls the light projection light source module 22 in such a way as to generate a light projection beam Bp in each light projection cycle. At the same time, the control unit 51 controls the scanning motor 35 to control the scanning and reflection of the scanning mirror 32 in synchronization with the light projection cycle of the light projection light source module 22. Furthermore, the control unit 51 processes the detection signal output from the light receiving detection module 45 in accordance with the light projection cycle of the light projection light source module 22 and the scanning and reflection of the scanning mirror 32, thereby generating detection data of the target objects in the detection area Ad.

[0165] (Detailed structure)

[0166] Next, the detailed structure of the housing 11 will be described. The housing 11 is further configured to include Figure 6 The sensor base 14 is shown.

[0167] The light-shielding sensor base 14, primarily made of a resin or metal substrate, is formed into a partition wall that divides the interior of the outer body 12 into two halves. The sensor base 14 is surrounded and held by the outer body 12 from the periphery, positioned so that one surface faces the inner surface of the optical window 13. In this positioned state, the sensor base 14 assumes the three-dimensional coordinate system defined above.

[0168] The sensor base 14 has a light-emitting base surface 142 for positioning the light-emitting unit 21. This surface is formed on the side of a protrusion that protrudes block-like in the X-axis direction from a single surface of the sensor base 14 facing the optical window 13. This surface is defined as a flat surface extending along the XY plane. Specifically, this surface extends along both the X-axis and the Y-axis.

[0169] The sensor base 14 has a light receiving base surface 144 for positioning the light receiving unit 41. The light receiving base surface 144 is formed on the side of a convex portion that protrudes in a block shape in the X-axis direction from a single surface facing the optical window 13 in the sensor base 14. The light receiving base surface 144 is defined as a plane extending along the XY plane. That is, the light receiving base surface 144 extends along the X-axis and the Y-axis. The light receiving base surface 144 can be constructed as a separated surface separated from the light projecting base surface 142. The light receiving base surface 144 can be constructed as a continuous surface shape continuous with the light projecting base surface 142. In addition, Figure 6 An example of base surfaces 142 and 144 constructed as separate surfaces is shown.

[0170] Next, the detailed structure of the light projection unit 21 will be described. Figure 6 、 7As shown, in the light projection unit 21 , the light projection lens module 26 is bonded to the light projection light source module 22 in the Z-axis direction.

[0171] Specifically, the projection lens barrel 261 in the projection lens module 26 forms a projection bonding surface 264 by the end surface facing the projection light source module 22 in the Z-axis direction. Figure 2 The light-shielding light-projecting bracket 221, which holds the substrate 220, forms a light-projecting bonding surface 224 with its end surface facing the light-projecting lens module 26 in the Z-axis direction. The light-shielding light-projecting bracket 221 is formed into a cylindrical shape with a base such as resin or metal as its main body, and holds the substrate 220.

[0172] A projection adhesive 210 is interposed continuously around the entire circumference of the projection optical axis Op between the projection lens barrel 261's projection adhesive surface 264 and the projection bracket 221's projection adhesive surface 224. The projection adhesive 210 is a UV- and heat-curable adhesive such as epoxy resin, which cures by either UV irradiation or heat. The modules 26 and 22 are bonded to each other at their respective projection adhesive surfaces 264 and 224 via the cured projection adhesive 210.

[0173] The projector bracket 221 includes a projector positioning surface 222 as a structure for positioning relative to the sensor base 14. The projector positioning surface 222 is positioned along the Y-axis and the X-axis by the projector base surface 142. Therefore, the projector positioning surface 222 is directly positioned and supported on the sensor base 14 through surface contact with the projector base surface 142, and is thus defined as a planar shape extending along the Y-axis and the X-axis (i.e., extending in the XY plane).

[0174] The light projection bracket 221 is screwed to multiple locations on the sensor base 14 so that the light projection optical axis Op can be adjusted in an XZ plane perpendicular to the light projection base surface 142. Thus, the housing 11 including the sensor base 14 directly holds the light projection light source module 22 and indirectly holds the light projection lens module 26 via the light projection light source module 22.

[0175] In the light projection lens barrel 261 in the light projection unit 21, as shown in FIG. Figure 7As shown, a light adjustment direction Dp that is geometrically assumed to be orthogonal to the X-axis is assumed along the light-projecting bonding surface 264. Therefore, in the light-projecting unit 21, the optical center Cp of the light-emitting surface 226 in the light-projecting light source module 22 is offset in the light-projecting adjustment direction Dp relative to the principal point Pp of the light-projecting lens 260 in the light-projecting lens module 26. By such an offset structure, the light-projecting light source module 22 and the light-projecting lens module 26 jointly form a light-projecting optical axis Op on the XZ plane that is orthogonal to the light-projecting base surface 142 and the light-projecting positioning surface 222 along the Y-axis direction. That is, it can be said that the offset structure constructed in the light-projecting unit 21 adjusts the light-projecting optical axis Op to the light-projecting reference plane Lp (refer to Figure 6 ) on the XZ plane in the first embodiment.

[0176] The offset Δp of the optical center Cp of the light-emitting surface 226 relative to the principal point Pp of the light projection lens module 26 in the light projection adjustment direction Dp can satisfy the following equations 1 to 3, where the focal length of the light projection lens module 26 is defined as the coefficient value fp. Here, the principal point Pp is defined for a single light projection lens 260 or for at least one representative light projection lens 260 among a plurality of light projection lenses. Furthermore, the coefficient value fp representing the focal length can be defined as a single value associated with a single light projection lens 260 or as a composite value associated with a plurality of light projection lenses 260 (i.e., a composite focal length).

[0177] [Formula 1]

[0178] Δp=fp·tanθp

[0179] [Formula 2]

[0180] Δp=fp·tanψp

[0181] [Formula 3]

[0182] Δp=-fp·tanωp

[0183] Specifically, Equation 1 represents the offset Δp around the X-axis related to the tilt angle θp of the light projector adhesive surface 264 relative to the light projector base surface 142. Equation 2, on the other hand, represents the offset Δp around the X-axis related to the angle ψp formed by the normal direction Np on the light projector adhesive surface 264 relative to the light projector optical axis Op. Furthermore, Equation 3 represents the offset Δp around the X-axis related to the attitude angle deviation ωp of the light projector positioning surface 222 relative to the light projector adhesive surface 264.

[0184] Here, the tilt angle θp, the formation angle ψp and the posture angle deviation ωp are defined as Figure 7In the YZ plane view, the signed angles are positive in the clockwise direction and negative in the counterclockwise direction, thus satisfying the correlation relationship of the following equation 4. Therefore, with respect to positive θp, ψp and negative ωp, the offset Δp takes a positive value, indicating that Figure 7 The optical center Cp is offset to the right from the principal point Pp in the projection adjustment direction Dp in the YZ plane view. On the other hand, when the offset Δp takes a negative value relative to negative θp and ψp and positive ωp, it indicates that the optical center Cp is offset to the left from the principal point Pp in the projection adjustment direction Dp in the YZ plane view. Furthermore, for at least one of these definitions, the signs of positive and negative may be defined opposite to those described above.

[0185] [Formula 4]

[0186] θp=ψp=-ωp

[0187] Below, according to Figure 8 The manufacturing flow shown in FIG. 1 illustrates a method for manufacturing the light projection unit 21 in the method for manufacturing the optical sensor 10 according to the first embodiment. Figure 8 In the manufacturing process, “S” represents the “manufacturing process” for manufacturing the light projection unit 21.

[0188] In the light-emitting assembly process of S101, Figure 9 The fixing fixture 2 of the manufacturing device 1 shown in the figure fixes the position of the projection lens barrel 261 holding the projection lens 260 in the projection lens module 26. At the same time, the projection assembly process installs the projection positioning surface 222 of the projection bracket 221 holding the substrate 220 in the projection light source module 22 in a manner that can be driven integrally. Figure 9 The movable base surface 3a of the movable table 3 of the manufacturing apparatus 1 is shown. Furthermore, in the light projection assembly step, the light projection adhesive material 210 in an uncured state, such as a gel, is sandwiched between the light projection adhesive surfaces 264 and 224 of the modules 26 and 22.

[0189] At this time, while the light-projecting adhesive 210 is being clamped, the optical center Cp of the light-emitting surface 226 in the light-projecting light source module 22 is aligned with the principal point Pp of the light-projecting lens module 26 in the light-projecting adjustment direction Dp perpendicular to the X-axis along the light-projecting adhesive surface 264 by driving the movable table 3. Figure 9 As shown, the optical center Cp in the initial state of the light projector assembly process is set to an initial center Cp0 aligned with the principal point Pp in the normal direction Np of the light projector bonding surface 264 .

[0190] Then, in Figure 8 In the light projection measurement process of S102 shown in FIG. Figure 10In the focused state of the projected light beam Bp shown, the posture angle deviation ωp of the projection positioning surface 222 of the projection light source module 22 relative to the projection bonding surface 264 of the projection lens module 26 is measured around the X-axis. Therefore, during the projection measurement process, the focus state at the position of the screen is detected based on the defocus, which evaluates the degree of convergence of the projected light beam Bp, such as the image size, on the screen at a predetermined distance from the principal point Pp of the projection lens module 26. Here, the focused state can mean that the linear projection light beam Bp is focused within the allowable circle of confusion along its entire length.

[0191] During the light projection measurement process, the relative posture of the light projection light source module 22 relative to the light projection lens module 26 is finely adjusted by the movable table 3 around the X-axis, assumed along the light projection adhesive surface 264 at the initial center Cp0, thereby enabling the search for a focused state that achieves the optimal posture. Therefore, during the light projection measurement process, the posture angular deviation ωp of the light projection positioning surface 222 relative to the light projection adhesive surface 264 is measured as a physical quantity representing the relative posture of each module 26, 22 around the X-axis when the focus state is detected. In this case, the measured posture angular deviation ωp can also be corrected based on the posture angular error of the movable base surface 3a of the movable table 3 around the X-axis.

[0192] Then, in Figure 8 In the light-casting bonding process of S103 shown in FIG. Figure 11 As shown, the optical center Cp of the light-emitting surface 226 of the projector lens module 26 is offset from the initial center Cp0 in the projection adjustment direction Dp relative to the principal point Pp of the projector lens module 26 by an offset Δp corresponding to the measured value of the posture angle deviation ωp measured in S102. Furthermore, in the projector bonding step, the projector adhesive 210 sandwiched between the projector adhesive surfaces 264 and 224 is cured, thereby bonding the projector adhesive surface 264 of the projector lens module 26 to the projector light source module 22 in this offset state via the projector adhesive 210. At this time, the projector adhesive 210 is cured by ultraviolet radiation at least from the outer periphery around the projection optical axis Op. In addition to such ultraviolet curing, the projector adhesive 210 can also be cured by heat.

[0193] Then, in Figure 8 In the light projection positioning process of S104 shown in FIG. Figure 7As shown, the projection positioning surface 222 of the projection light source module 22, to which the projection lens module 26 is bonded in step S103, is positioned and fixed to the sensor base 14 using the projection base surface 142. At this point, the modules 26 and 22, integrated into the projection unit 21 by the previous bonding, can jointly form a projection optical axis Op on the XZ plane orthogonal to the projection base surface 142. This projection optical axis Op is adjusted about the X-axis by the offset structure in step S103 according to the offset amount Δp corresponding to the posture angle deviation ωp measured in step S102.

[0194] Next, the detailed structure of the light receiving unit 41 will be described. Figure 6 、 12 As shown, in the light receiving unit 41 , the light receiving lens module 42 is bonded to the light receiving detection module 45 in the Z-axis direction.

[0195] Specifically, the light receiving lens barrel 421 in the light receiving lens module 42 forms a light receiving adhesive surface 424 at the end surface facing the light receiving detection module 45 in the Z axis direction. Figure 5 The light receiving holder 451 holding the substrate 450 has a light receiving adhesive surface 454 formed along the end surface facing the light receiving lens module 42 in the Z-axis direction. Here, the light shielding light receiving holder 451 is formed in a cylindrical shape with a base such as resin or metal as its main body, and holds the substrate 450.

[0196] A light-receiving adhesive 410 is continuously interposed between the light-receiving adhesive surface 424 of the light-receiving lens barrel 421 and the light-receiving adhesive surface 454 of the light-receiving bracket 451, extending around the entire circumference of the light-receiving optical axis Or. The light-receiving adhesive 410 is also a UV- and heat-curable adhesive such as epoxy resin, which can be cured by at least the former of UV irradiation and heat. The modules 42 and 45 are bonded to each other at their respective adhesive surfaces 424 and 454 via the cured light-receiving adhesive 410.

[0197] The light receiving bracket 451 has a light receiving positioning surface 452 as a structure for positioning relative to the sensor base 14. The light receiving positioning surface 452 is positioned according to the light receiving base surface 144 along at least the Y axis of the Y axis and the X axis. Therefore, the light receiving positioning surface 452 is positioned and supported on the sensor base 14 with a plurality of gaskets (spacers) 411 between it and the light receiving base surface 144, and is defined as a plane extending along at least the Y axis of the Y axis and the X axis. Here, each gasket 411 is formed of, for example, metal or resin, and is in the form of a flat plate of a single thickness arranged in the X-axis direction. In addition, Figure 6 、 12 Only the spacer 411 located closest to the front when viewed in the YZ plane (ie, viewed in the X-axis direction) is representatively shown.

[0198] The light receiving brackets 451 are screwed onto multiple locations of the sensor base 14 so that the light receiving optical axis Or is adjusted in an XZ plane perpendicular to the light receiving base surface 144. Thus, the housing 11 including the sensor base 14 directly holds the light receiving detection module 45 and indirectly holds the light receiving lens module 42 via the light receiving detection module 45.

[0199] In the light receiving lens barrel 421 in the light receiving unit 41, as shown in FIG. Figure 12 As shown, a light receiving adjustment direction Dr that is geometrically assumed to be orthogonal to the X-axis is assumed along the light receiving adhesive surface 424. Therefore, in the light receiving unit 41, the optical center Cr of the detection surface 456 in the light receiving detection module 45 is offset in the light receiving adjustment direction Dr relative to the principal point Pr of the light receiving lens 420 in the light receiving lens module 42. Through such an offset structure, the light receiving detection module 45 and the light receiving lens module 42 jointly form a light receiving optical axis Or on the XZ plane that is orthogonal to the light receiving base surface 144 and the light receiving positioning surface 452 along the Y-axis direction. That is, it can be said that the offset structure constructed in the light receiving unit 41 adjusts the light receiving optical axis Or to the light receiving reference plane Lr (refer to Figure 6 ) on the XZ plane in the first embodiment.

[0200] The offset Δr of the optical center Cr of the detection surface 456 relative to the principal point Pr of the light-receiving lens module 42 in the light-receiving adjustment direction Dr can satisfy the following equations 5 to 7, where the focal length of the light-receiving lens module 42 is defined as the coefficient value fr. Here, the principal point Pr is defined for a single light-receiving lens 420 or for at least one representative lens among a plurality of light-receiving lenses 420. Furthermore, the coefficient value fr representing the focal length can be defined as a single value associated with a single light-receiving lens 420 or as a composite value associated with a plurality of light-receiving lenses 420 (i.e., a composite focal length).

[0201] [Formula 5]

[0202] Δr=fr·tanθr

[0203] [Formula 6]

[0204] Δr=fr·tanψr

[0205] [Formula 7]

[0206] Δr=-fr·tanωr

[0207] Specifically, Equation 5 represents the offset Δr around the X-axis associated with the tilt angle θr of the light-receiving adhesive surface 424 relative to the light-receiving base surface 144. On the other hand, Equation 6 represents the offset Δr around the X-axis associated with the angle ψr formed by the normal direction Nr on the light-receiving adhesive surface 424 relative to the light-receiving optical axis Or. Furthermore, Equation 7 represents the offset Δr around the X-axis associated with the posture angle deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424.

[0208] Here, the tilt angle θr, the formation angle ψr, and the posture angle deviation ωr are defined as Figure 12 In the YZ plane view, the signed angles are positive in the clockwise direction and negative in the counterclockwise direction, thus satisfying the correlation relationship of the following formula 8. Therefore, with respect to negative θr, ψr and positive ωr, the offset Δr takes a negative value, indicating that Figure 12 The optical center Cr is offset to the left from the principal point Pr in the light reception adjustment direction Dr in the YZ plane view. On the other hand, a positive offset Δr relative to positive θr and ψr and negative ωr indicates that the optical center Cr is offset to the right from the principal point Pr in the light reception adjustment direction Dr in the YZ plane view. Furthermore, the signs of positive and negative may be defined opposite to those described above for at least one of these definitions.

[0209] [Formula 8]

[0210] θr=ψr=-ωr

[0211] Below, according to Figure 13 The manufacturing flow shown in FIG. 1 illustrates a method for manufacturing the light receiving unit 41 in the method for manufacturing the optical sensor 10 according to the first embodiment. Figure 13 In the manufacturing process, “S” represents a “manufacturing process” for manufacturing the light receiving unit 41.

[0212] S201 light receiving assembly process uses Figure 14 The fixing fixture 2 of the manufacturing device 1 shown in the figure fixes the position of the light receiving lens barrel 421 holding the light receiving lens 420 in the light receiving lens module 42. At the same time, the light receiving assembly process installs the light receiving positioning surface 452 of the light receiving bracket 451 holding the substrate 450 in the light receiving detection module 45 in a manner that can be driven integrally. Figure 14 The movable base surface 3a of the movable table 3 of the manufacturing apparatus 1 is shown. Furthermore, in the light receiving assembly step, a light receiving adhesive material 410 in an uncured state such as a gel is sandwiched between the light receiving adhesive surfaces 424 and 454 of the modules 42 and 45.

[0213] At this time, when the light-receiving adhesive 410 is clamped, the optical center Cr of the detection surface 456 in the light-receiving detection module 45 is aligned with the principal point Pr of the light-receiving lens module 42 in the light-receiving adjustment direction Dr perpendicular to the X-axis along the light-receiving adhesive surface 424 by driving the movable table 3. Figure 14 As shown, the optical center Cr in the initial state of the light receiving assembly process is set to the initial center Cr0 aligned with the principal point Pr in the normal direction Nr of the light receiving bonding surface 424 .

[0214] Then, in Figure 13 In the light receiving and measuring process of S202 shown in FIG. Figure 15 In the illustrated focused state of the reflected beam Br, the attitude angle deviation ωr of the light-receiving positioning surface 452 of the light-receiving detection module 45 relative to the light-receiving adhesive surface 424 of the light-receiving lens module 42 is measured about the X-axis. Therefore, during the light reception measurement step, the focused state at the position of the detection surface 456 of the light-receiving detection module 45 is detected based on the defocus, which evaluates the degree of light convergence, such as the image size or energy, of the reflected beam Br on the detection surface 456 of the light-receiving detection module 45. Here, the focused state can mean that the linear reflected beam Br is focused within the allowable circle of confusion along its entire length.

[0215] During the light reception measurement process, the relative posture of the light-receiving detection module 45 relative to the light-receiving lens module 42 is finely adjusted by the movable stage 3 around the X-axis, assumed along the light-receiving adhesive surface 424 at the initial center Cr0. This allows the search for a focused state that achieves the optimal posture. Therefore, during the light reception measurement process, the posture angle deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424 is measured as a physical quantity representing the relative posture around the X-axis of each module 45, 42 in the focused state. In this case, the measured value of the posture angle deviation ωr can also be corrected based on the posture angle error around the X-axis of the movable base surface 3a of the movable stage 3.

[0216] Then, in Figure 13 In the light-receiving bonding process of S203 shown in FIG. Figure 16As shown, the optical center Cr of the detection surface 456 in the light-receiving detection module 45 is offset from the initial center Cr0 relative to the principal point Pr of the light-receiving lens module 42 in the light-receiving adjustment direction Dr along the light-receiving adhesive surface 424 by an offset Δr corresponding to the measured value of the posture angle deviation ωr measured in S202. Therefore, in the light-receiving bonding step, the light-receiving adhesive 410 sandwiched between the light-receiving adhesive surfaces 424 and 454 is cured, thereby bonding the light-receiving adhesive surface 424 of the light-receiving lens module 42 to the light-receiving detection module 45 in this offset state via the light-receiving adhesive 410. At this time, the light-receiving adhesive 410 is cured by ultraviolet radiation at least from the outer periphery around the light-receiving optical axis Or. In addition to such ultraviolet curing, the light-receiving adhesive 410 may also be cured by heat.

[0217] Then, in Figure 13 In the light receiving positioning process of S204 shown in FIG. Figure 12 As shown, the light receiving positioning surface 452 of the light receiving detection module 45, to which the light receiving lens module 42 is bonded in step S203, is positioned and fixed to the sensor base 14 using the light receiving base surface 144. At this time, the modules 42 and 45, integrated into the light receiving unit 41 by the previous bonding, can jointly form a light receiving optical axis Or on the XZ plane orthogonal to the light receiving base surface 144. This light receiving optical axis Or is adjusted about the X-axis by the offset structure in step S203 according to the offset amount Δr corresponding to the posture angle deviation ωr measured in step S202.

[0218] Here, in the light receiving positioning step, the postures of the light receiving optical axis Or of the light receiving unit 41 around the Y axis and around the Z axis are made consistent with the postures of the light projection optical axis Op of the previously manufactured light projection unit 21 around the Y axis and around the Z axis. Figure 12 As shown, a plurality of spacers 411 having a single thickness corresponding to the posture of the light receiving optical axis Or around the Y axis are sandwiched between the light receiving positioning surface 452 of the light receiving detection module 45 and the light receiving base surface 144 .

[0219] (Effect)

[0220] The following describes the effects of the first embodiment described so far.

[0221] In the first embodiment, in the projector light source module 22 bonded to the projector light bonding surface 264 of the projector light lens module 26, the projector light positioning surface 222 is positioned along the Y-axis by the projector light base surface 142 of the sensor base 14. Therefore, the optical center Cp of the light-emitting surface 226 of the projector light source module 22 is offset relative to the principal point Pp of the projector lens module 26 along the projector light bonding surface 264 in a projection adjustment direction Dp perpendicular to the X-axis. This allows the projector light axis Op to be adjusted in the XZ plane perpendicular to the projector light base surface 142. This offset structure can accommodate manufacturing tolerances, including tilt within each module 26, 22 and between modules 26, 22, and allows the projector light axis Op to be adjusted consistently with the XZ plane. Consequently, the adjustment accuracy of the projector light axis Op can be ensured.

[0222] According to the first embodiment, the offset Δp of the optical center Cp of the light-emitting surface 226 relative to the principal point Pp of the light projection lens module 26 in the light projection adjustment direction Dp is correlated with the tilt angle θp of the light projection adhesive surface 264 relative to the light projection base surface 142 about the X-axis. In other words, this means that the tilt angle θp of the light projection adhesive surface 264 relative to the light projection base surface 142 can be set to an appropriate angle corresponding to the offset Δp required to form the light projection optical axis Op aligned with the XZ plane. Therefore, the light projection optical axis Op can be adjusted with high precision.

[0223] According to the first embodiment, the offset Δp of the optical center Cp of the light-emitting surface 226 relative to the principal point Pp of the light projection lens module 26 in the projection adjustment direction Dp is correlated with the angle ψp formed about the X-axis by the normal direction Np of the light projection adhesive surface 264 relative to the projection optical axis Op. In other words, this means that the angle ψp formed by the normal direction Np of the light projection adhesive surface 264 relative to the projection optical axis Op can be set to an appropriate angle corresponding to the offset Δp required to form the projection optical axis Op aligned with the XZ plane. Consequently, the projection optical axis Op can be adjusted with high precision.

[0224] According to the first embodiment, the offset Δp of the optical center Cp of the light-emitting surface 226 relative to the principal point Pp of the light projection lens module 26 in the projection adjustment direction Dp is correlated with the angular deviation ωp of the projection positioning surface 222 relative to the projection bonding surface 264 about the X-axis. In other words, the angular deviation ωp of the projection positioning surface 222 relative to the projection bonding surface 264 can be adjusted to an appropriate angle corresponding to the offset Δp required to form the projection optical axis Op aligned with the XZ plane. Consequently, the projection optical axis Op can be adjusted with high precision.

[0225] In the manufacturing method of the first embodiment, the light projection light source module 22, to which the light projection adhesive surface 264 of the light projection lens module 26 is bonded, is positioned by the light projection base surface 142 and fixed to the sensor base 14. Therefore, before being fixed to the sensor base 14, the modules 26 and 22 are bonded to each other with the optical center Cp of the light-emitting surface 226 offset from the principal point Pp of the light projection lens module 26 in the light projection adjustment direction Dp by an offset Δp. This offset Δp is correlated with the measured value of the attitude angle deviation ωp of the light projection positioning surface 222 relative to the light projection adhesive surface 264 about the X-axis. In other words, this means that the attitude angle deviation ωp of the light projection positioning surface 222 relative to the light projection adhesive surface 264 can be adjusted to an appropriate angle corresponding to the offset Δp required to form the light projection optical axis Op aligned with the XZ plane. Consequently, the light projection optical axis Op can be adjusted with high precision.

[0226] Next, in the first embodiment, in the light-receiving detection module 45 bonded to the light-receiving adhesive surface 424 of the light-receiving lens module 42, the light-receiving positioning surface 452 is positioned along the Y-axis by the light-receiving base surface 144 of the sensor base 14. Consequently, the optical center Cr of the detection surface 456 in the light-receiving detection module 45 is offset relative to the principal point Pr of the light-receiving lens module 42 along the light-receiving adhesive surface 424 in a light-receiving adjustment direction Dr, which is orthogonal to the X-axis. This allows the light-receiving optical axis Or to be adjusted in the XZ plane, which is orthogonal to the light-receiving base surface 144. This offset structure can accommodate manufacturing tolerances, including tilt within each module 42, 45 and between the modules 42, 45, and allows the light-receiving optical axis Or to be adjusted consistently with the XZ plane. Consequently, the adjustment accuracy of the light-receiving optical axis Or can be ensured.

[0227] According to the first embodiment, the offset Δr of the optical center Cr of the detection surface 456 relative to the principal point Pr of the light-receiving lens module 42 in the light-receiving adjustment direction Dr is correlated with the tilt angle θr of the light-receiving adhesive surface 424 relative to the light-receiving base surface 144 about the X-axis. In other words, the tilt angle θr of the light-receiving adhesive surface 424 relative to the light-receiving base surface 144 can be set to an appropriate angle corresponding to the offset Δr required to form the light-receiving optical axis Or aligned with the XZ plane. Consequently, the light-receiving optical axis Or can be adjusted with high precision.

[0228] According to the first embodiment, the offset Δr of the optical center Cr of the detection surface 456 relative to the principal point Pr of the light-receiving lens module 42 in the light-receiving adjustment direction Dr is correlated with the angle ψr formed about the X-axis by the normal direction Nr of the light-receiving adhesive surface 424 relative to the light-receiving optical axis Or. In other words, the angle ψr formed by the normal direction Nr of the light-receiving adhesive surface 424 relative to the light-receiving optical axis Or can be set to an appropriate angle corresponding to the offset Δr required to form the light-receiving optical axis Or aligned with the XZ plane. Consequently, the light-receiving optical axis Or can be adjusted with high precision.

[0229] According to the first embodiment, the offset Δr of the optical center Cr of the detection surface 456 relative to the principal point Pr of the light-receiving lens module 42 in the light-receiving adjustment direction Dr is correlated with the angular deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424 about the X-axis. In other words, the angular deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424 can be set to an appropriate angle corresponding to the offset Δr required to form the light-receiving optical axis Or aligned with the XZ plane. Consequently, the light-receiving optical axis Or can be adjusted with high precision.

[0230] Furthermore, in the manufacturing method of the first embodiment, in the light-receiving detection module 45, to which the light-receiving adhesive surface 424 of the light-receiving lens module 42 is bonded, the light-receiving positioning surface 452 is positioned by the light-receiving base surface 144 and fixed to the sensor base 14. Therefore, before being fixed to the sensor base 14, the modules 42 and 45 are bonded to each other with the optical center Cr of the detection surface 456 offset in the light-receiving adjustment direction Dr from the principal point Pr of the light-receiving lens module 42 by an amount corresponding to the offset Δr. This offset Δr is correlated with the measured value of the attitude angle deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424 about the X-axis. In other words, this means that the attitude angle deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424 can be set to an appropriate angle corresponding to the offset Δr required to form the light-receiving optical axis Or aligned with the XZ plane. Consequently, the light-receiving optical axis Or can be adjusted with high precision.

[0231] (Second embodiment)

[0232] The second embodiment is a modification of the first embodiment.

[0233] like Figure 17 As shown, the housing 2011 of the second embodiment has a heat dissipation portion 2016 for radiating heat conducted from the internal sensor base 14 to the outside. The heat dissipation portion 2016 is composed of a plurality of heat dissipation fins protruding toward the outside in a flat plate shape from the outer body 12 of the housing 2011.

[0234] According to this second embodiment, the heat dissipation portion 2016 of the housing 2011, which includes the sensor base 14, radiates heat conducted from the sensor base 14 to the outside. The sensor base 14 holds the projection lens module 26 via the projection light source module 22. This effectively radiates the heat from the projection light source module 22, suppressing the deviation of the projection optical axis Op caused by thermal deformation of the projection lens module 26. Furthermore, by holding the relatively light projection lens module 26 via the relatively heavy projection light source module 22, it is also possible to suppress the deviation of the projection optical axis Op caused by changes in the relative posture corresponding to the load balance between these modules 22 and 26. Therefore, the adjustment accuracy of the projection optical axis Op can be consistently ensured.

[0235] Similarly, according to the second embodiment, the heat dissipation portion 2016 of the housing 2011 radiates heat conducted from the sensor base 14, which holds the light-receiving lens module 42 via the light-receiving detection module 45, to the outside. This effectively dissipates heat from the light-receiving detection module 45, suppressing deviation of the light-receiving optical axis Or due to thermal deformation of the light-receiving lens module 42. Furthermore, by holding the relatively light-receiving lens module 42 via the relatively heavy light-receiving detection module 45, deviation of the light-receiving optical axis Or due to changes in the relative posture of these modules 45 and 42, corresponding to load balance, can be suppressed. Consequently, the adjustment accuracy of the light-receiving optical axis Or can be consistently maintained.

[0236] (Third embodiment)

[0237] The third embodiment is a modification of the first embodiment.

[0238] like Figure 18 、 19 As shown, the projection axis Op in the third embodiment is adjusted to a projection reference plane Lp tilted relative to the XZ plane, corresponding to the projection error angle δψp generated in the projection unit 21 in the three-dimensional coordinate system. This projection error angle δψp is assumed to account for manufacturing tolerances due to the curing shrinkage of the projection adhesive 210. Therefore, the offset structure of the light receiving unit 41 in the third embodiment, which generates the projection error angle δψp in the projection axis Op, can satisfy the following equations 9 to 12, instead of equations 1 to 4 of the first embodiment.

[0239] [Formula 9]

[0240] Δpa=fp·tan(θp-δψp)

[0241] [Formula 10]

[0242] Δpa=fp·tanψpa=fp·tan(ψp-δψp)

[0243] [Formula 11]

[0244] Δpa=-fp·tan(ωp+δψp)

[0245] [Formula 12]

[0246] θp=ψp=ψpa+δψp=-ωp

[0247] Here, Δpa in equations 9 to 11 means the offset Δp (see below) before the curing shrinkage according to the first embodiment, taking into account the curing shrinkage of the projector adhesive 210. Figure 22 ) represents the offset Δpa after curing shrinkage. Furthermore, Δψpa in equations 9 to 11 represents the angle ψpa formed after curing shrinkage relative to the normal direction Np before curing shrinkage based on the first embodiment, taking into account curing shrinkage of the light projection adhesive 210. In the following description, the posture angle deviation ωp in equation 12 is specifically referred to as the projection posture angle deviation ωp.

[0248] like Figure 18 、 20 As shown, the light receiving axis Or of the third embodiment is adjusted to the light receiving reference plane Lr, which is tilted relative to the XZ plane, based on the correlation between the light receiving error angle δψr generated in the light receiving unit 41 in the three-dimensional coordinate system and the aforementioned light projection error angle δψp. This light receiving error angle δψr is assumed to account for manufacturing tolerances caused by the curing shrinkage of the light receiving adhesive 410. Therefore, the offset structure of the light receiving unit 41 of the third embodiment, which generates the light receiving error angle δψr about the light receiving axis Or, can satisfy the following equations 13 to 16, instead of equations 5 to 8 of the first embodiment.

[0249] [Formula 13]

[0250] Δra=fr·tan(θr-δψr)

[0251] [Formula 14]

[0252] Δra=fr·tanψra=fr·tan(ψr-δψr)

[0253] [Formula 15]

[0254] Δra=-fr·tan(ωr+δψr)

[0255] [Formula 16]

[0256] θr=ψr=ψra+δψr=-ωr

[0257] Here, Δra in equations 13 to 15 means the offset Δr (see below) before the curing shrinkage according to the first embodiment, taking into account the curing shrinkage of the light-receiving adhesive 410. Figure 24 ) represents the offset Δra after curing shrinkage. Furthermore, Δψra in equations 13 to 15 represents the angle ψra formed after curing shrinkage relative to the angle ψr formed by the normal direction Nr before curing shrinkage with respect to the light-receiving optical axis Or according to the first embodiment, taking into account curing shrinkage of the light-receiving adhesive 410. In the following description, the posture angle deviation ωr in equation 15 is specifically referred to as the light-receiving posture angle deviation ωr.

[0258] like Figures 18-20 As shown, in the third embodiment, adjustment of the projection optical axis Op is achieved through a direct positioning structure constructed at the projection positioning portion between the projection positioning surface 222 and the projection base surface 142, while satisfying the offset structure of equations 9 to 12. On the other hand, in the third embodiment, adjustment of the receiving optical axis Or is achieved through an indirect positioning structure, in which a light receiving positioning spacer 3411 is interposed at the light receiving positioning portion between the light receiving positioning surface 452 and the light receiving base surface 144, while satisfying the offset structure of equations 13 to 16. The light receiving positioning spacer 3411, providing this indirect positioning structure, forms a wedge angle ρr between the light receiving positioning surface 452 and the light receiving base surface 144, corresponding to the correlation between the projection error angle δψp and the reception error angle δψr in the three-dimensional coordinate system. Through this combined positioning structure, the projection optical axis Op and the reception optical axis Or are adjusted to lie in substantially the same direction on the substantially parallel projection reference plane Lp and the reception reference plane Lr, respectively.

[0259] like Figure 21 As shown, the manufacturing method of the optical sensor 10 of the third embodiment performs the light-emitting sequence of manufacturing the light-emitting unit 21 and the light-receiving sequence of manufacturing the light-receiving unit 41 in association with each other. Figure 21 In the manufacturing process, "S" represents the "manufacturing process" of the light-emitting sequence and the "manufacturing process" of the light-receiving sequence.

[0260] In the light projection sequence, S101 to S103 are performed in the same manner as in the first embodiment. Then, in the light projection measurement step S3104 added to the light projection sequence, the light projection optical axis Op of the light projection lens module 26 bonded to the light projection light source module 22 by curing the light projection adhesive 210 is measured according to the light projection optical axis Op. Figure 22 The measurement state in S102 shown is as follows: Figure 23Therefore, in the additional light projection measurement step, the focus state of the projection beam Bp is three-dimensionally explored according to S102 of the first embodiment on a screen at a set distance from the principal point Pp of the projection lens module 26, and the light projection error angle δψp of the projection optical axis Op corresponding to the deviation of the focus state is three-dimensionally measured.

[0261] At this time, the measured value of the projection error angle δψp can also be corrected based on the three-dimensional posture angle error of the movable base surface 3a of the movable table 3. However, when the posture of the movable base surface 3a in S102 is reproduced in S3104 using a movable table 3 different from that in S102, correction can be performed based on the posture angle errors of the movable base surface 3a in both S102 and S3104.

[0262] Then, in Figure 21 In the light projection sequence shown in FIG. 3 , the light projection positioning process of S3105 is based on S104 of the first embodiment. Figure 19 As shown, the projection positioning surface 222 of the projection light source module 22, to which the projection lens module 26 is bonded in step S103, is directly positioned and fixed to the sensor base 14 using the projection base surface 142. However, in this case, the integrated modules 26 and 22 can form a common projection optical axis Op on the projection reference plane Lp, provided that the offset amount Δpa corresponds to the projection posture angular deviation ωp measured in step S102 and the projection error angle δψp measured in step S3104, thereby satisfying the offset structure of equations 9 to 12.

[0263] On the other hand, S201 to S203 in the light receiving sequence are performed in the same manner as in the first embodiment. Next, in the light receiving measurement step S3204 added to the light receiving sequence, the light receiving optical axis Or of the light receiving lens module 42 bonded to the light receiving detection module 45 by curing the light receiving adhesive 410 is adjusted according to the light receiving optical axis Or. Figure 24 The measurement state in S202 shown is as follows: Figure 25 Therefore, in the additional light reception measurement step, the focus state of the reflected beam Br is three-dimensionally explored on the detection surface 456 of the light reception detection module 45 according to S202 of the first embodiment, and the light reception error angle δψr of the light reception optical axis Or corresponding to the deviation in the focus state is three-dimensionally measured.

[0264] At this time, the measured value of the light reception error angle δψr may also be corrected based on the three-dimensional posture angle error of the movable base surface 3a of the movable table 3. However, if the posture of the movable base surface 3a in S202 is reproduced in S3204 using a movable table 3 different from that in S202, correction may be performed based on the posture angle errors of the movable base surface 3a in both S202 and S3204.

[0265] Then, in Figure 21 In the light receiving sequence shown, the light receiving gasket adjustment process S3205 adjusts the wedge angle ρr of the light receiving positioning gasket 3411, and the light receiving positioning gasket 3411 is clamped in the light receiving positioning part between the light receiving positioning surface 452 and the light receiving base surface 144 in a way that the projection optical axis Op and the receiving optical axis Or are along each other.

[0266] At this time, the light projection error angle δψp measured in S3104 of the light projection sequence and the light reception error angle δψr measured in S3204 of the light reception sequence are provided from the respective steps S3104 and S3204. Therefore, the light reception spacer adjustment step is performed by adjusting the wedge angle ρr (refer to Figure 20 ) is adjusted to a relative error angle which is the difference between the projection error angle δψp and the receiving error angle δψr, as the correlation between the projection error angle δψp and the receiving error angle δψr.

[0267] [Formula 17]

[0268] ρr=δψp-δψr

[0269] Then, in Figure 21 In the light receiving sequence shown in FIG. 3 , the light receiving positioning step S3206 is different from S204 of the first embodiment. Figure 20 As shown, the light-receiving positioning surface 452 of the light-receiving detection module 45, to which the light-receiving lens module 42 is bonded in step S203, is positioned and fixed to the sensor base 14 via the light-receiving base surface 144 via the light-receiving positioning spacer 3411. At this time, the integrated modules 42 and 45 can form a common light-receiving optical axis Or on the light-receiving reference plane Lr, provided that the offset amount Δra corresponds to the light-receiving posture angular deviation ωr measured in step S202 and the light-receiving error angle δψr measured in step S3204, thereby satisfying the offset structure of equations 13 to 16.

[0270] Thus, in the third embodiment, a light-receiving positioning spacer 3411 is interposed at the light-receiving positioning portion between the light-receiving positioning surface 452 and the light-receiving base surface 144. Thus, even if a projection error angle δψp and / or a reception error angle δψr occur in the projection optical axis Op and / or the reception optical axis Or due to manufacturing tolerances of the offset structure caused by curing shrinkage during bonding, the directions of these optical axes Op and Or can be aligned to accommodate these manufacturing tolerances. Consequently, the adjustment accuracy of the projection optical axis Op and the reception optical axis Or can be maintained.

[0271] Furthermore, in the manufacturing method of the third embodiment, the modules 26 and 22 are bonded together with the optical center Cp of the light-emitting surface 226 offset in the light-projection adjustment direction Dp from the principal point Pp of the light-projecting lens module 26 by an offset amount Δp related to the measured value obtained by measuring the light-projection posture angular deviation ωp. Simultaneously, in the manufacturing method of the third embodiment, the modules 42 and 45 are bonded together with the optical center Cr of the detection surface 456 offset in the light-receiving adjustment direction Dr from the principal point Pr of the light-receiving lens module 42 by an offset amount Δr related to the measured value obtained by measuring the light-receiving posture angular deviation ωr.

[0272] However, in the manufacturing method of the third embodiment, even if the projection optical axis Op of the light projecting lens module 26, which is bonded to the light projecting light source module 22 by curing the light projecting adhesive 210, has a projection error angle δψp corresponding to manufacturing tolerances caused by the curing shrinkage of the light projecting adhesive 210, this angle is still measured. Simultaneously, even if the reception optical axis Or of the light receiving lens module 42, which is bonded to the light receiving detection module 45 by curing the light receiving adhesive 410, has a reception error angle δψr corresponding to manufacturing tolerances caused by the curing shrinkage of the light receiving adhesive 410, this angle is still measured. Thus, by aligning the directions of the projection optical axis Op and the reception optical axis Or, the wedge angle ρr of the light receiving positioning spacer 3411 can be accurately adjusted based on the correlation between the projection error angle δψp and the reception error angle δψr.

[0273] Therefore, according to the manufacturing method of the third embodiment, the light-emitting positioning surface 222 is directly positioned and fixed by the light-emitting base surface 142, while the light-receiving positioning surface 452 is positioned and fixed by the light-receiving base surface 144 via the light-receiving positioning spacer 3411. Therefore, by aligning the directions of these optical axes Op and Or, the adjustment accuracy of the light-emitting optical axis Op and the light-receiving optical axis Or can be ensured.

[0274] (Fourth embodiment)

[0275] The fourth embodiment is a modification of the first embodiment.

[0276] like Figures 26-28 As shown, in the fourth embodiment, adjustment of the light receiving optical axis Or is achieved by a direct positioning structure constructed at the light receiving positioning portion between the light receiving positioning surface 452 and the light receiving base surface 144, while satisfying the offset structure of equations 13 to 16 according to the third embodiment. On the other hand, in the fourth embodiment, adjustment of the light projection optical axis Op is achieved by an indirect positioning structure in which a light projection positioning spacer 4211 is interposed at the light projection positioning portion between the light projection positioning surface 222 and the light projection base surface 142, while satisfying the offset structure of equations 9 to 12 according to the third embodiment. The light projection positioning spacer 4211 providing this indirect positioning structure forms a wedge angle ρp between the light projection positioning surface 222 and the light projection base surface 142, corresponding to the correlation between the light projection error angle δψp and the light receiving error angle δψr in the three-dimensional coordinate system. By these complex positioning structures, the light projection optical axis Op and the light reception optical axis Or are adjusted to be along substantially the same direction on the light projection reference plane Lp and the light reception reference plane Lr which are substantially parallel to each other.

[0277] like Figure 29 As shown, in the manufacturing method of the optical sensor 10 of the fourth embodiment, in the light receiving sequence, S3205 is omitted from the third embodiment, and S3206 is changed to the light receiving positioning step of S4205. Specifically, in the light receiving positioning step of S4205, as shown in FIG. Figure 28 As shown, the light-receiving positioning surface 452 of the light-receiving detection module 45, which is bonded to the light-receiving lens module 42 in step S203, is directly positioned and fixed to the sensor base 14 via the light-receiving base surface 144. In this case, the integrated modules 42 and 45 can form a common light-receiving optical axis Or on the light-receiving reference plane Lr, provided that the offset amount Δra corresponds to the light-receiving posture angular deviation ωr measured in step S202 and the light-receiving error angle δψr measured in step S3204, thereby satisfying the offset structure of equations 13 to 16.

[0278] like Figure 29 As shown, in the manufacturing method of the optical sensor 10 of the fourth embodiment, in the light projection sequence, S3105 of the third embodiment is replaced by a light projection positioning step of S4106, and a light projection spacer adjustment step of S4105 is added between S3104 and S4106. Specifically, the light projection spacer adjustment step of S4105 adjusts the wedge angle ρp of the light projection positioning spacer 4211, which is sandwiched between the light projection positioning surface 222 and the light projection base surface 142 so that the light projection optical axis Op and the light receiving optical axis Or are aligned with each other.

[0279] At this time, the light projection error angle δψp measured in S3104 of the light projection sequence and the light receiving error angle δψr measured in S3204 of the light receiving sequence are provided from the respective steps S3104 and S3204. Therefore, the light projection spacer adjustment step is performed by adjusting the wedge angle ρp (refer to Figure 27 ) is adjusted to a relative error angle which is the difference between the light receiving error angle δψr and the light projection error angle δψp, as the correlation between the light projection error angle δψp and the light receiving error angle δψr.

[0280] [Formula 18]

[0281] ρp=δψr-δψp

[0282] Furthermore, in the light projection positioning process of S4106, as Figure 27 As shown, the projection positioning surface 222 of the projection light source module 22, which is bonded to the projection lens module 26 in step S103, is positioned and fixed to the sensor base 14 via the projection base surface 142 via the projection positioning spacer 4211. At this time, the integrated modules 26 and 22 can jointly form a projection optical axis Op on the projection reference plane Lp, provided that the offset Δpa corresponds to the projection posture angular deviation ωp measured in step S102 and the projection error angle δψp measured in step S3104, thereby satisfying the offset structure of equations 9 to 12.

[0283] Thus, in the fourth embodiment, a projection positioning spacer 4211 is interposed between the projection positioning surface 222 and the projection base surface 142 at the projection positioning portion. This allows for even if a projection error angle δψp and / or a reception error angle δψr occur in the projection optical axis Op and / or the reception optical axis Or due to manufacturing tolerances caused by the offset structure due to curing shrinkage during bonding, the directions of these optical axes Op and Or can be aligned to accommodate these manufacturing tolerances. Consequently, the adjustment accuracy of the projection optical axis Op and the reception optical axis Or can be maintained.

[0284] Furthermore, in the manufacturing method of the fourth embodiment, the modules 26 and 22 are bonded together with the optical center Cp of the light-emitting surface 226 offset in the light-projection adjustment direction Dp from the principal point Pp of the light-projecting lens module 26 by an offset amount Δp related to the value obtained by measuring the light-projection posture angular deviation ωp. Simultaneously, in the manufacturing method of the fourth embodiment, the modules 42 and 45 are bonded together with the optical center Cr of the detection surface 456 offset in the light-receiving adjustment direction Dr from the principal point Pr of the light-receiving lens module 42 by an offset amount Δr related to the value obtained by measuring the light-receiving posture angular deviation ωr.

[0285] However, in the manufacturing method of the fourth embodiment, even if the projection optical axis Op of the light projecting lens module 26, which is bonded to the light projecting light source module 22 by curing the light projecting adhesive 210, has a projection error angle δψp corresponding to manufacturing tolerances caused by the curing shrinkage of the light projecting adhesive 210, this angle is still measured. Simultaneously, even if the reception optical axis Or of the light receiving lens module 42, which is bonded to the light receiving detection module 45 by curing the light receiving adhesive 410, has a reception error angle δψr corresponding to manufacturing tolerances caused by the curing shrinkage of the light receiving adhesive 410, this angle is still measured. Thus, by aligning the directions of the projection optical axis Op and the reception optical axis Or, the wedge angle ρp of the light projecting positioning spacer 4211 can be accurately adjusted based on the correlation between the projection error angle δψp and the reception error angle δψr.

[0286] Therefore, according to the manufacturing method of the fourth embodiment, the light-receiving positioning surface 452 is directly positioned and fixed by the light-receiving base surface 144, while the light-projecting positioning surface 222 is positioned and fixed by the light-projecting base surface 142 via the light-projecting positioning spacer 4211. Therefore, by aligning the directions of these optical axes Op and Or, the adjustment accuracy of the light-projecting optical axis Op and the light-receiving optical axis Or can be ensured.

[0287] (Fifth embodiment)

[0288] The fifth embodiment is a modified example obtained by combining the third embodiment and the fourth embodiment and further modifying them.

[0289] like Figures 30-32 As shown, in the fifth embodiment, adjustment of the projection optical axis Op is achieved by an indirect positioning structure, in which a projection positioning spacer 4211 is interposed between the projection positioning surface 222 and the projection base surface 142, while satisfying the offset structure of equations 9 to 12 according to the third embodiment. However, the projection positioning spacer 4211 providing this indirect positioning structure forms a wedge angle ρp between the projection positioning surface 222 and the projection base surface 142, corresponding only to the projection error angle δψp in the three-dimensional coordinate system.

[0290] On the other hand, in the fifth embodiment, adjustment of the light receiving optical axis Or is achieved by an indirect positioning structure in which a light receiving positioning spacer 3411 is interposed between the light receiving positioning surface 452 and the light receiving base surface 144, while satisfying the offset structure of equations 13 to 16 according to the third embodiment. However, the light receiving positioning spacer 3411 providing this indirect positioning structure forms a wedge angle ρr between the light receiving positioning surface 452 and the light receiving base surface 144, corresponding only to the light receiving error angle δψr in the three-dimensional coordinate system.

[0291] Even with the combined positioning structure of the fifth embodiment, the projection optical axis Op and the reception optical axis Or are aligned in substantially the same direction on the substantially parallel projection reference plane Lp and reception reference plane Lr. Here, both the projection reference plane Lp and reception reference plane Lr are defined along the XZ plane. Thus, the projection optical axis Op and reception optical axis Or are aligned along the XZ plane, offset from each other in the Y-axis direction.

[0292] like Figure 33 As shown, in the manufacturing method of the optical sensor 10 of the fifth embodiment, in the light projection sequence, S4105 of the fourth embodiment is changed to a light projection pad adjustment step of S5105. Specifically, in the light projection pad adjustment step of S5105, the light projection error angle δψp measured in S3104 of the light projection sequence is provided. Therefore, the light projection pad adjustment step is performed by adjusting the wedge angle ρp (refer to Figure 31 ) is adjusted to an angle related only to the light projection error angle δψp. In addition, the light projection positioning process of S4106 after this adjustment refers to the fourth embodiment.

[0293] [Formula 19]

[0294] ρp=-δψp

[0295] In addition, if Figure 33 As shown, in the manufacturing method of the optical sensor 10 of the fifth embodiment, in the light receiving sequence, S3205 of the third embodiment is changed to a light receiving pad adjustment step of S5205. Specifically, in the light receiving pad adjustment step of S5205, the light receiving error angle δψr measured in S3204 of the light receiving sequence is provided. Therefore, the light receiving pad adjustment step adjusts the wedge angle ρr (refer to Figure 32 ) is adjusted to an angle related only to the light receiving error angle δψr. In addition, the light receiving positioning step S3206 after this adjustment refers to the third embodiment.

[0296] [Formula 20]

[0297] ρr=-δψr

[0298] Thus, in the fifth embodiment, the light-projecting positioning portion between the light-projecting positioning surface 222 and the light-projecting base surface 142, and the light-receiving positioning portion between the light-receiving positioning surface 452 and the light-receiving base surface 144, are respectively interposed with a light-projecting positioning spacer 4211 and a light-receiving positioning spacer 3411. Thus, even if a projection error angle δψp and / or a light-receiving error angle δψr occur in the light-projecting optical axis Op and / or the light-receiving optical axis Or due to manufacturing tolerances of the offset structure caused by curing shrinkage during bonding, the directions of these optical axes Op and Or can be aligned, accommodating these manufacturing tolerances. Consequently, the adjustment accuracy of the light-projecting optical axis Op and the light-receiving optical axis Or can be maintained.

[0299] Furthermore, in the manufacturing method of the fifth embodiment, the modules 26 and 22 are bonded together with the optical center Cp of the light-emitting surface 226 offset in the light-projection adjustment direction Dp from the principal point Pp of the light-projecting lens module 26 by an offset amount Δp related to the value obtained by measuring the light-projection posture angular deviation ωp. Simultaneously, in the manufacturing method of the fourth embodiment, the modules 42 and 45 are bonded together with the optical center Cr of the detection surface 456 offset in the light-receiving adjustment direction Dr from the principal point Pr of the light-receiving lens module 42 by an offset amount Δr related to the value obtained by measuring the light-receiving posture angular deviation ωr.

[0300] However, in the manufacturing method of the fifth embodiment, even if the projection optical axis Op of the light projecting lens module 26, which is bonded to the light projecting light source module 22 by curing the light projecting adhesive 210, has a projection error angle δψp corresponding to manufacturing tolerances caused by the curing shrinkage of the light projecting adhesive 210, this angle is still measured. Simultaneously, even if the reception optical axis Or of the light receiving lens module 42, which is bonded to the light receiving detection module 45 by curing the light receiving adhesive 410, has a reception error angle δψr corresponding to manufacturing tolerances caused by the curing shrinkage of the light receiving adhesive 410, this angle is still measured. Thus, by aligning the directions of the projection optical axis Op and the reception optical axis Or, the wedge angle ρp of the light projecting positioning spacer 4211 and the wedge angle ρr of the light receiving positioning spacer 3411 can be accurately adjusted based on the projection error angle δψp and the reception error angle δψr, respectively.

[0301] Therefore, according to the manufacturing method of the fifth embodiment, the light-emitting positioning surface 222 is positioned and fixed by the light-emitting base surface 142 via the light-emitting positioning spacer 4211, and the light-receiving positioning surface 452 is positioned and fixed by the light-receiving base surface 144 via the light-receiving positioning spacer 3411. Therefore, the adjustment accuracy of the light-emitting optical axis Op and the light-receiving optical axis Or can be ensured by aligning the directions of these optical axes Op and Or.

[0302] (Other embodiments)

[0303] Although a plurality of embodiments have been described above, the present disclosure is not limited to these embodiments and can be applied to various embodiments and combinations without departing from the gist of the present disclosure.

[0304] In variations of the first and second embodiments, any one of Formulas 1 to 3 may be invalidated due to the invalidation of Formula 4. In variations of the first and second embodiments, any one of Formulas 5 to 7 may be invalidated due to the invalidation of Formula 8. In variations of the first and second embodiments, either unit 21 or unit 41 may not have the aforementioned offset structure.

[0305] In variations related to the third to fifth embodiments, any of Formulas 9 to 11 may be invalidated due to Formula 12 described in the first embodiment not being true. In variations related to the third to fifth embodiments, any of Formulas 13 to 15 may be invalidated due to Formula 16 described in the first embodiment not being true. The second embodiment may also be applied to variations related to the third to fifth embodiments.

[0306] In variations of the first to fifth embodiments, the Y-axis direction along the horizontal direction and the X-axis direction along the vertical direction may also be specified. In variations of the first to fifth embodiments, the mobile object to which the optical sensor 10 is applied may be, for example, a remotely controlled traveling robot. In these variations, the optical sensor 10 may be applied to objects other than mobile objects, such as stationary structures.

[0307] (Supplementary explanation)

[0308] This specification discloses the following technical concepts and their combinations.

[0309] (Technical Thought 1)

[0310] An optical sensor projects a projected light beam (Bp) toward the outside world and receives a reflected beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0311] The optical sensor comprises:

[0312] A light projection light source module (22) has a light projection positioning surface (222) and projects the light projection beam from a light emitting surface (226);

[0313] A light projection lens module (26) has a light projection bonding surface (264) bonded to the light projection light source module, and guides the light projection beam from the light projection light source module toward the outside along a light projection optical axis (Op); and

[0314] The sensor base (14) has a light projection base surface (142), and the light projection base surface (142) positions the light projection positioning surface along the Y axis.

[0315] Assuming that the light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection bonding surface,

[0316] The optical center (Cp) of the light-emitting surface in the projection light source module is offset in the projection adjustment direction relative to the principal point (Pp) of the projection lens module, thereby adjusting the projection optical axis in the three-dimensional coordinate system to an XZ plane orthogonal to the projection base surface.

[0317] (Technical Thought 2)

[0318] An optical sensor projects a projected light beam (Bp) toward the outside world and receives a reflected beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0319] The optical sensor comprises:

[0320] A light projection light source module (22) has a light projection positioning surface (222) and projects the light projection beam from a light emitting surface (226);

[0321] A light projection lens module (26) has a light projection bonding surface (264) bonded to the light projection light source module, and guides the light projection beam from the light projection light source module toward the outside along a light projection optical axis (Op); and

[0322] The sensor base (14) has a light projection base surface (142) along the Y axis for positioning the light projection positioning surface.

[0323] Assuming that the light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection bonding surface,

[0324] The optical center (Cp) of the light-emitting surface in the projection light source module is offset in the projection adjustment direction relative to the principal point (Pp) of the projection lens module, so that the projection optical axis is adjusted to a projection reference plane (Lp) orthogonal to the YZ plane in the three-dimensional coordinate system.

[0325] (Technical Thought 3)

[0326] The optical sensor according to technical idea 1 or 2, wherein:

[0327] The offset (Δp, Δpa) of the optical center (Cp) of the light-emitting surface relative to the principal point (Pp) of the projection lens module in the projection adjustment direction is related to the inclination angle (θp) of the projection bonding surface around the X-axis relative to the projection base surface.

[0328] (Technical Thought 4)

[0329] The optical sensor according to any one of technical concepts 1 to 3, wherein:

[0330] The offset (Δp, Δpa) of the optical center (Cp) of the light-emitting surface relative to the principal point (Pp) of the projection lens module in the projection adjustment direction is related to the angle (ψp, ψpa) formed by the normal direction (Np) on the projection bonding surface around the X-axis relative to the projection optical axis.

[0331] (Technical Thought 5)

[0332] The optical sensor according to any one of technical concepts 1 to 4, wherein:

[0333] The offset (Δp, Δpa) of the optical center (Cp) of the light-emitting surface relative to the principal point (Pp) of the light-projecting lens module in the light-projection adjustment direction is related to the posture angle deviation (ωp) of the light-projection positioning surface relative to the light-projection bonding surface around the X-axis.

[0334] (Technical Thought 6)

[0335] The optical sensor according to any one of technical concepts 1 to 5, wherein:

[0336] A housing (2011) is provided, the housing being configured to contain the sensor base.

[0337] The housing has a heat dissipation portion (2016) that radiates heat conducted from the sensor base to the outside, and the sensor base holds the light projection lens module via the light projection light source module.

[0338] (Technical Thought 7)

[0339] The optical sensor according to technical idea 1 and any one of technical ideas 3 to 6 subordinate to technical idea 1, wherein:

[0340] The optical sensor comprises:

[0341] A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456); and

[0342] The light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the external side toward the light receiving detection module along the light receiving optical axis (Or).

[0343] The sensor base has a light receiving base surface (144) which positions the light receiving positioning surface along the Y axis.

[0344] Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface,

[0345] The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to the XZ plane orthogonal to the light-receiving base surface.

[0346] (Technical Thought 8)

[0347] An optical sensor projects a projected light beam (Bp) toward the outside world and receives a reflected beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0348] The optical sensor comprises:

[0349] A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456);

[0350] A light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the outside side toward the light receiving detection module along a light receiving optical axis (Or); and

[0351] The sensor base (14) has a light receiving base surface (144) which positions the light receiving positioning surface along the Y axis.

[0352] Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface,

[0353] The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to the XZ plane orthogonal to the light-receiving base surface.

[0354] (Technical Thought 9)

[0355] The optical sensor according to technical idea 2 and any one of technical ideas 3 to 6 subordinate to technical idea 2, wherein:

[0356] The optical sensor comprises:

[0357] A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456); and

[0358] The light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the external side toward the light receiving detection module along the light receiving optical axis (Or).

[0359] The sensor base has a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface.

[0360] Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface,

[0361] The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to a light-receiving reference plane (Lr) orthogonal to the YZ plane.

[0362] (Technical Thought 10)

[0363] The optical sensor according to technical idea 9, wherein:

[0364] A positioning gasket (3411, 4211) is provided, which is clamped on at least one of the light projection positioning portion between the light projection positioning surface and the light projection base surface, and the light receiving positioning portion between the light receiving positioning surface and the light receiving base surface in a manner that the light projection optical axis and the light receiving optical axis are along each other in the three-dimensional coordinate system.

[0365] (Technical Thought 11)

[0366] An optical sensor projects a projected light beam (Bp) toward the outside world and receives a reflected beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis.

[0367] The optical sensor comprises:

[0368] A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456);

[0369] A light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the outside side toward the light receiving detection module along a light receiving optical axis (Or); and

[0370] The sensor base (14) has a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface.

[0371] Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface,

[0372] The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to a light-receiving reference plane (Lr) orthogonal to the YZ plane.

[0373] (Technical Thought 12)

[0374] The optical sensor according to any one of technical concepts 7 to 11, wherein:

[0375] The offset (Δr, Δra) of the optical center (Cr) of the detection surface relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction is related to the inclination angle (θr) of the light-receiving adhesive surface relative to the light-receiving base surface around the X-axis.

[0376] (Technical Thought 13)

[0377] The optical sensor according to any one of technical concepts 7 to 12, wherein:

[0378] The offset (Δr, Δra) of the optical center (Cr) of the detection surface relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction is related to the angle (ψr, ψra) formed around the X-axis by the normal direction (Nr) on the light-receiving bonding surface relative to the light-receiving optical axis.

[0379] (Technical Thought 14)

[0380] The optical sensor according to any one of technical concepts 7 to 13, wherein:

[0381] The amount of displacement (Δr, Δra) of the optical center (Cr) of the detection surface relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction is correlated with the posture angle deviation (ωr) of the light-receiving positioning surface relative to the light-receiving bonding surface around the X-axis.

[0382] (Technical Thought 15)

[0383] The optical sensor according to any one of technical concepts 7 to 14, wherein:

[0384] A housing (2011) is provided, the housing being configured to contain the sensor base.

[0385] The housing has a heat dissipation portion (2016) that radiates heat conducted from the sensor base to the outside, and the sensor base holds the light receiving lens module via the light receiving detection module.

[0386] (Technical Thought 16)

[0387] A manufacturing method for manufacturing an optical sensor according to any one of technical concepts 1 to 7,

[0388] The manufacturing method comprises:

[0389] measuring an attitude angular deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface about the X-axis in a focused state of the light projection beam;

[0390] Adhering the light projection bonding surface of the light projection lens module to the light projection light source module in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the posture angle deviation; and

[0391] In the light projection light source module to which the light projection lens module is bonded, the light projection base surface is positioned relative to the light projection positioning surface and fixed to the sensor base.

[0392] (Technical Thought 17)

[0393] A manufacturing method for manufacturing an optical sensor as described in any one of technical concepts 7 to 15,

[0394] The manufacturing method comprises:

[0395] measuring an attitude angle deviation (ωr) of the light-receiving positioning surface relative to the light-receiving adhesive surface around the X-axis in a focused state of the reflected beam;

[0396] bonding the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module in a state where the optical center (Cr) of the detection surface is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module by an offset (Δr) associated with the measured value of the posture angle deviation; and

[0397] In the light receiving detection module to which the light receiving lens module is bonded, the light receiving base surface is positioned relative to the light receiving positioning surface and fixed to the sensor base.

[0398] (Technical Thought 18)

[0399] A manufacturing method for manufacturing an optical sensor according to technical idea 10 and any one of technical ideas 12 to 15 subordinate to technical idea 10,

[0400] The manufacturing method comprises:

[0401] measuring a projection posture angular deviation (ωp) of the projection positioning surface relative to the projection bonding surface around the X-axis in a focused state of the projection beam;

[0402] The light projection bonding surface of the light projection lens module is bonded to the light projection light source module via a light projection adhesive (210) in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the light projection posture angular deviation;

[0403] measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by curing the projection adhesive;

[0404] measuring a light receiving posture angular deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam;

[0405] The light-receiving bonding surface of the light-receiving lens module is bonded to the light-receiving detection module via a light-receiving adhesive (410) in a state where the optical center (Cr) of the detection surface is offset relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction by an offset (Δr) associated with a measured value of the light-receiving posture angle deviation;

[0406] measuring a light receiving error angle (δψr) generated in the three-dimensional coordinate system on the light receiving optical axis of the light receiving lens module bonded to the light receiving detection module by curing the light receiving adhesive;

[0407] The wedge angle (ρr) of the light receiving positioning gasket (3411) is adjusted according to the correlation between the light projection error angle and the light receiving error angle, wherein the light receiving positioning gasket (3411) is the positioning gasket clamped at the light receiving positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other;

[0408] In the projection light source module bonded with the projection lens module, the projection base is directly positioned on the projection positioning surface and fixed to the sensor base; and

[0409] In the light receiving detection module to which the light receiving lens module is bonded, the light receiving positioning surface is positioned by the light receiving base surface via the light receiving positioning spacer and fixed to the sensor base.

[0410] (Technical Thought 19)

[0411] A manufacturing method for manufacturing an optical sensor according to technical idea 10 and any one of technical ideas 12 to 15 subordinate to technical idea 10,

[0412] The manufacturing method comprises:

[0413] measuring a projection posture angular deviation (ωp) of the projection positioning surface relative to the projection bonding surface about the X-axis in a focused state of the projection beam;

[0414] The light projection bonding surface of the light projection lens module is bonded to the light projection light source module via a light projection adhesive (210) in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the light projection posture angular deviation;

[0415] measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by curing the projection adhesive;

[0416] measuring a light receiving posture angular deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam;

[0417] The light-receiving bonding surface of the light-receiving lens module is bonded to the light-receiving detection module via a light-receiving adhesive (410) in a state where the optical center (Cr) of the detection surface is offset relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction by an offset (Δr) associated with a measured value of the light-receiving posture angle deviation;

[0418] measuring a light receiving error angle (δψr) generated in the three-dimensional coordinate system on the light receiving optical axis of the light receiving lens module bonded to the light receiving detection module by curing the light receiving adhesive;

[0419] The wedge angle (ρp) of the light projection positioning gasket (4211) is adjusted according to the correlation between the light projection error angle and the light receiving error angle, wherein the light projection positioning gasket (4211) is the positioning gasket clamped at the light projection positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other;

[0420] In the light projection light source module to which the light projection lens module is bonded, the light projection positioning surface is positioned by the light projection base surface via the light projection positioning gasket and fixed to the sensor base; and

[0421] In the light receiving detection module to which the light receiving lens module is bonded, the light receiving positioning surface is directly positioned by the light receiving base surface and fixed to the sensor base.

[0422] (Technical Thought 20)

[0423] A manufacturing method for manufacturing an optical sensor according to technical idea 10 and any one of technical ideas 12 to 15 subordinate to technical idea 10,

[0424] The manufacturing method comprises:

[0425] measuring a projection posture angular deviation (ωp) of the projection positioning surface relative to the projection bonding surface about the X-axis in a focused state of the projection beam;

[0426] The light projection bonding surface of the light projection lens module is bonded to the light projection light source module via a light projection adhesive (210) in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the light projection posture angular deviation;

[0427] measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by curing the projection adhesive;

[0428] measuring a light receiving posture angular deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam;

[0429] The light-receiving bonding surface of the light-receiving lens module is bonded to the light-receiving detection module via a light-receiving adhesive (410) in a state where the optical center (Cr) of the detection surface is offset relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction by an offset (Δr) associated with a measured value of the light-receiving posture angle deviation;

[0430] measuring a light receiving error angle (δψr) generated in the three-dimensional coordinate system on the light receiving optical axis of the light receiving lens module bonded to the light receiving detection module by curing the light receiving adhesive;

[0431] Adjusting the wedge angle (ρp) of the light projection positioning gasket (4211) according to the light projection error angle, wherein the light projection positioning gasket is clamped at the light projection positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other;

[0432] Adjusting the wedge angle (ρr) of a light-receiving positioning gasket (3411) according to the light-receiving error angle, wherein the light-receiving positioning gasket is clamped on the light-receiving positioning portion in such a manner that the light-projecting optical axis and the light-receiving optical axis are aligned with each other;

[0433] In the light projection light source module to which the light projection lens module is bonded, the light projection positioning surface is positioned by the light projection base surface via the light projection positioning gasket and fixed to the sensor base; and

[0434] In the light receiving detection module to which the light receiving lens module is bonded, the light receiving positioning surface is positioned by the light receiving base surface via the light receiving positioning spacer and fixed to the sensor base.

Claims

1. An optical sensor that projects a projected light beam (Bp) toward the outside world and receives a reflected light beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis. The optical sensor comprises: A light projection light source module (22) has a light projection positioning surface (222) and projects the light projection beam from a light emitting surface (226); A light projection lens module (26) has a light projection bonding surface (264) bonded to the light projection light source module, and guides the light projection beam from the light projection light source module toward the outside along a light projection optical axis (Op); as well as The sensor base (14) has a light projection base surface (142) for positioning the light projection positioning surface along the Y axis. Assuming that the light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection bonding surface, The optical center (Cp) of the light-emitting surface in the projection light source module is offset in the projection adjustment direction relative to the principal point (Pp) of the projection lens module, thereby adjusting the projection optical axis in the three-dimensional coordinate system to an XZ plane orthogonal to the projection base surface.

2. An optical sensor that projects a projected light beam (Bp) toward the outside world and receives a reflected light beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis. The optical sensor comprises: A light projection light source module (22) has a light projection positioning surface (222) and projects the light projection beam from a light emitting surface (226); A light projection lens module (26) has a light projection bonding surface (264) bonded to the light projection light source module, and guides the light projection beam from the light projection light source module toward the outside along a light projection optical axis (Op); as well as The sensor base (14) has a light projection base surface (142) along the Y axis for positioning the light projection positioning surface. Assuming that the light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection bonding surface, The optical center (Cp) of the light-emitting surface in the projection light source module is offset in the projection adjustment direction relative to the principal point (Pp) of the projection lens module, so that the projection optical axis is adjusted to a projection reference plane (Lp) orthogonal to the YZ plane in the three-dimensional coordinate system.

3. The optical sensor according to claim 1 or 2, The offset (Δp, Δpa) of the optical center (Cp) of the light-emitting surface relative to the principal point (Pp) of the projection lens module in the projection adjustment direction is related to the inclination angle (θp) of the projection bonding surface around the X-axis relative to the projection base surface.

4. The optical sensor according to claim 1 or 2, The offset (Δp, Δpa) of the optical center (Cp) of the light-emitting surface relative to the principal point (Pp) of the projection lens module in the projection adjustment direction is related to the angle (ψp, ψpa) formed around the X-axis by the normal direction (Np) of the projection bonding surface relative to the projection optical axis.

5. The optical sensor according to claim 1 or 2, The offset (Δp, Δpa) of the optical center (Cp) of the light-emitting surface relative to the principal point (Pp) of the light-projecting lens module in the light-projection adjustment direction is related to the posture angle deviation (ωp) of the light-projection positioning surface relative to the light-projection bonding surface around the X-axis.

6. The optical sensor according to claim 1 or 2, A housing (2011) is provided, the housing being configured to contain the sensor base. The housing has a heat dissipation portion (2016) that radiates heat conducted from the sensor base to the outside, and the sensor base holds the light projection lens module via the light projection light source module.

7. The optical sensor according to claim 1, have: A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456); and The light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the external side toward the light receiving detection module along the light receiving optical axis (Or). The sensor base has a light receiving base surface (144) for positioning the light receiving positioning surface along the Y axis. Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface, The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to the XZ plane orthogonal to the light-receiving base surface.

8. An optical sensor that projects a projected light beam (Bp) toward the outside world and receives a reflected light beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis. The optical sensor comprises: A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456); A light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the external side toward the light receiving detection module along a light receiving optical axis (Or); as well as The sensor base (14) has a light receiving base surface (144) for positioning the light receiving positioning surface along the Y axis. Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface, The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to the XZ plane orthogonal to the light-receiving base surface.

9. The optical sensor according to claim 2, have: A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456); and The light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the external side toward the light receiving detection module along the light receiving optical axis (Or). The sensor base has a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface. Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface, The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to a light-receiving reference plane (Lr) orthogonal to the YZ plane.

10. The optical sensor according to claim 9, A positioning gasket (3411, 4211) is provided, which is clamped on at least one of the light projection positioning portion between the light projection positioning surface and the light projection base surface, and the light receiving positioning portion between the light receiving positioning surface and the light receiving base surface in a manner that the light projection optical axis and the light receiving optical axis are along each other in the three-dimensional coordinate system.

11. An optical sensor that projects a projected light beam (Bp) toward the outside world and receives a reflected light beam (Br) reflected from the outside world with respect to the projected light beam, thereby detecting the outside world, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis. The optical sensor comprises: A light receiving detection module (45) has a light receiving positioning surface (452) and detects the outside world by receiving the reflected beam on a detection surface (456); A light receiving lens module (42) has a light receiving bonding surface (424) bonded to the light receiving detection module, and guides the reflected beam from the external side toward the light receiving detection module along a light receiving optical axis (Or); as well as The sensor base (14) has a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface. Assuming that the light receiving adjustment direction (Dr) perpendicular to the X axis is along the light receiving adhesive surface, The optical center (Cr) of the detection surface in the light-receiving detection module is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis in the three-dimensional coordinate system to a light-receiving reference plane (Lr) orthogonal to the YZ plane.

12. The optical sensor according to any one of claims 7 to 11, The offset (Δr, Δra) of the optical center (Cr) of the detection surface relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction is related to the inclination angle (θr) of the light-receiving adhesive surface relative to the light-receiving base surface around the X-axis.

13. The optical sensor according to any one of claims 7 to 11, The offset (Δr, Δra) of the optical center (Cr) of the detection surface relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction is related to the angle (ψr, ψra) formed around the X-axis by the normal direction (Nr) of the light-receiving bonding surface relative to the light-receiving optical axis.

14. The optical sensor according to any one of claims 7 to 11, The amount of displacement (Δr, Δra) of the optical center (Cr) of the detection surface relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction is correlated with the posture angle deviation (ωr) of the light-receiving positioning surface relative to the light-receiving bonding surface around the X-axis.

15. The optical sensor according to any one of claims 7 to 11, A housing (2011) is provided, the housing being configured to contain the sensor base. The housing has a heat dissipation portion (2016) that radiates heat conducted from the sensor base to the outside, and the sensor base holds the light receiving lens module via the light receiving detection module.

16. A method for manufacturing the optical sensor according to claim 1, The manufacturing method comprises: measuring an attitude angular deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface about the X-axis in a focused state of the light projection beam; bonding the light projection bonding surface of the light projection lens module to the light projection light source module in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the posture angle deviation; as well as In the light projection light source module to which the light projection lens module is bonded, the light projection base surface is positioned relative to the light projection positioning surface and fixed to the sensor base.

17. A method for manufacturing the optical sensor according to claim 7 or 8, The manufacturing method comprises: measuring an attitude angle deviation (ωr) of the light-receiving positioning surface relative to the light-receiving adhesive surface around the X-axis in a focused state of the reflected beam; bonding the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module in a state where the optical center (Cr) of the detection surface is offset in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module by an offset (Δr) associated with the measured value of the posture angle deviation; and In the light receiving detection module to which the light receiving lens module is bonded, the light receiving base surface is positioned relative to the light receiving positioning surface and fixed to the sensor base.

18. A method for manufacturing the optical sensor according to claim 10, The manufacturing method comprises: measuring a projection posture angular deviation (ωp) of the projection positioning surface relative to the projection bonding surface about the X-axis in a focused state of the projection beam; The light projection bonding surface of the light projection lens module is bonded to the light projection light source module via a light projection adhesive (210) in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the light projection posture angular deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by curing the projection adhesive; measuring a light receiving posture angular deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam; The light-receiving bonding surface of the light-receiving lens module is bonded to the light-receiving detection module via a light-receiving adhesive (410) in a state where the optical center (Cr) of the detection surface is offset relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction by an offset (Δr) associated with a measured value of the light-receiving posture angle deviation; measuring a light receiving error angle (δψr) generated in the three-dimensional coordinate system on the light receiving optical axis of the light receiving lens module bonded to the light receiving detection module by curing the light receiving adhesive; Adjusting the wedge angle (ρr) of a light receiving positioning gasket (3411) according to the correlation between the light projection error angle and the light receiving error angle, wherein the light receiving positioning gasket is clamped at the light receiving positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other; In the light projection light source module bonded with the light projection lens module, the light projection base is directly positioned on the light projection positioning surface and fixed to the sensor base; as well as In the light receiving detection module to which the light receiving lens module is bonded, the light receiving positioning surface is positioned by the light receiving base surface via the light receiving positioning spacer and fixed to the sensor base.

19. A method for manufacturing the optical sensor according to claim 10, The manufacturing method comprises: measuring a projection posture angular deviation (ωp) of the projection positioning surface relative to the projection bonding surface about the X-axis in a focused state of the projection beam; The light projection bonding surface of the light projection lens module is bonded to the light projection light source module via a light projection adhesive (210) in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the light projection posture angular deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by curing the projection adhesive; measuring a light receiving posture angular deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam; The light-receiving bonding surface of the light-receiving lens module is bonded to the light-receiving detection module via a light-receiving adhesive (410) in a state where the optical center (Cr) of the detection surface is offset relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction by an offset (Δr) associated with a measured value of the light-receiving posture angle deviation; measuring a light receiving error angle (δψr) generated in the three-dimensional coordinate system on the light receiving optical axis of the light receiving lens module bonded to the light receiving detection module by curing the light receiving adhesive; According to the correlation between the light projection error angle and the light receiving error angle, the wedge angle (ρp) of the light projection positioning gasket (4211) is adjusted, wherein the light projection positioning gasket is clamped at the light projection positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other; In the light projection light source module bonded with the light projection lens module, the light projection positioning surface is positioned and fixed to the sensor base via the light projection positioning gasket through the light projection base surface; as well as In the light-receiving detection module to which the light-receiving lens module is bonded, the light-receiving base surface is directly positioned with respect to the light-receiving positioning surface and fixed to the sensor base.

20. A method of manufacturing the optical sensor according to claim 10, The manufacturing method comprises: measuring a projection posture angular deviation (ωp) of the projection positioning surface relative to the projection bonding surface about the X-axis in a focused state of the projection beam; The light projection bonding surface of the light projection lens module is bonded to the light projection light source module via a light projection adhesive (210) in a state where the optical center (Cp) of the light emitting surface is offset relative to the principal point (Pp) of the light projection lens module in the light projection adjustment direction by an offset (Δp) related to the measured value of the light projection posture angular deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by curing the projection adhesive; measuring a light receiving posture angular deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam; The light-receiving bonding surface of the light-receiving lens module is bonded to the light-receiving detection module via a light-receiving adhesive (410) in a state where the optical center (Cr) of the detection surface is offset relative to the principal point (Pr) of the light-receiving lens module in the light-receiving adjustment direction by an offset (Δr) associated with a measured value of the light-receiving posture angle deviation; measuring a light receiving error angle (δψr) generated in the three-dimensional coordinate system on the light receiving optical axis of the light receiving lens module bonded to the light receiving detection module by curing the light receiving adhesive; Adjusting the wedge angle (ρp) of a light projection positioning gasket (4211) according to the light projection error angle, wherein the light projection positioning gasket is clamped at the light projection positioning portion in such a manner that the light projection optical axis and the light receiving optical axis are aligned with each other; Adjusting the wedge angle (ρr) of a light-receiving positioning gasket (3411) according to the light-receiving error angle, wherein the light-receiving positioning gasket is clamped on the light-receiving positioning portion in such a manner that the light-projecting optical axis and the light-receiving optical axis are aligned with each other; In the light projection light source module bonded with the light projection lens module, the light projection positioning surface is positioned and fixed to the sensor base via the light projection positioning gasket through the light projection base surface; as well as In the light receiving detection module to which the light receiving lens module is bonded, the light receiving positioning surface is positioned by the light receiving base surface via the light receiving positioning spacer and fixed to the sensor base.

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