Thin film pressure sensor array calibration device

Abstract

The invention discloses a film pressure sensor array calibration device, and aims to solve the problems of insufficient precision, complex operation, low efficiency and the like in the existing calibration technology, and the device comprises a device main body, a measuring frame, an annular platform, a positioning slide rod, a weight fixing rod, a magnet assembly and a weight group. A measuring space is arranged in the device body, the measuring frame is used for accurately positioning a to-be-calibrated sensor, and the annular platform adjusts the angle of the positioning sliding rod through the rotating mechanism. And the weight group comprises a plurality of weights with different masses, so that the calibration requirements of sensors with different measuring ranges are met. The calibration control system integrates a pressure monitoring module, a position adjusting module, a weight management module and a calibration calculation module and is combined with an image processing unit to achieve full-automatic calibration. Through a high-precision mechanical structure and an automatic control and image recognition technology, the calibration precision and efficiency are remarkably improved, and the calibration device is suitable for calibration requirements of various thin film pressure sensor arrays from micro pressure to high pressure.

Description

Technical Field

[0001] The present invention relates to the technical field of calibration devices, and in particular to a thin film pressure sensor array calibration device. Background Art

[0002] Thin film pressure sensor arrays are widely used in industry, medical care, consumer electronics and other fields to accurately measure pressure changes.

[0003] With the increasing precision requirements, traditional calibration methods have problems such as low efficiency, poor precision, and complex operation, making it difficult to meet the calibration needs of modern high-precision sensors. Existing calibration devices mostly use fixed structures, which cannot flexibly adjust the position and angle of the weights, resulting in uneven force on the sensors. In addition, they lack automation functions and rely on manual intervention, which easily introduces errors. In recent years, the development of image processing and automation technology has provided new solutions for calibration devices, but existing devices still have shortcomings in weight positioning, sensor fixation, and force monitoring, making it difficult to achieve fully automatic and high-precision calibration. Therefore, there is an urgent need for a calibration device that integrates image recognition, automated control, and precision mechanical structures to improve calibration efficiency and accuracy and meet the calibration needs of modern sensors. Summary of the Invention

[0004] In order to solve the problems raised in the above background technology, an object of the present invention is to provide a thin film pressure sensor array calibration device, which has the advantages of high calibration efficiency and high calibration accuracy.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a thin film pressure sensor array calibration device, a device body defining a measurement space for calibrating the thin film pressure sensor array; A measuring frame, which is disposed in the device body and is suitable for positioning the thin film pressure sensor array to be tested; An annular platform, the annular platform is rotatably connected to the measuring frame and is used to adjust the moving angle of the positioning slide rod; Positioning slide bars, which are connected to the measuring frame via an annular platform and are used to fix the four corners of the thin film pressure sensor array under inspection; A weight fixing rod, connected to the measuring frame, for positioning and fixing the weight; A magnet assembly connected to the measuring frame and used for taking and placing weights; The weight set includes a plurality of weights of different masses and is used to apply a standard pressure to the thin film pressure sensor array under inspection.

[0006] As a preferred feature of the present invention, the measuring frame is equipped with an axial movement mechanism that allows axial movement within a range defined by the device body, thereby accurately locating the axial coordinates of the thin film pressure sensor array under test. A high-precision camera equipped with an LED ring fill light is mounted on the top of the measuring frame's central connecting rod to locate and observe the position of the thin film pressure sensor array under test.

[0007] As a preferred embodiment of the present invention, the annular platform is provided with a precision rotating mechanism for angle adjustment; the platform has a built-in annular slide rail connected to four positioning slide bars and is provided with a position locking mechanism to achieve full-angle positioning and fixation of the four corners of the thin film pressure sensor array being tested.

[0008] As a preferred embodiment of the present invention, the positioning slide rod adopts a retractable sleeve structure and can freely adjust the length; the positioning slide rod base is made of flexible material and has a built-in pressure sensor for real-time monitoring of the force conditions at the four corners of the thin film pressure sensor array being tested to ensure uniform force at the four corners.

[0009] As a preferred embodiment of the present invention, a standard conical locating pin is provided on the top of the weight fixing rod, which cooperates with the standard conical hole locating groove on the top of the weight to achieve accurate positioning and fixation of the weight; a through hole is provided in the center of the weight fixing rod for accommodating the center connecting rod of the measuring frame and the high-precision camera.

[0010] As a preferred embodiment of the present invention, the magnet assembly includes a retractable magnet rod and an electromagnetic control unit. A through hole is provided in the center of the magnet rod for accommodating a weight fixing rod. The electromagnetic control unit can accurately control the attraction and release of the magnet.

[0011] As a preferred embodiment of the present invention, the weight set includes multiple weights of different masses and sizes, and each weight is provided with a standard conical hole positioning groove on the top; the weight size design can completely cover the effective detection area of ​​the thin film pressure sensor array to be tested, and the mass gradient design can meet the calibration requirements of sensors of different ranges.

[0012] As a preferred embodiment of the present invention, a calibration control system is included, wherein the calibration control system includes: Pressure monitoring module, used to collect real-time data from the pressure sensor at the base of the positioning slide; Position adjustment module, used to control the axial movement of the measuring frame and the rotation of the annular platform; Weight management module, used to record and manage the quality parameters of weights of different specifications; The calibration calculation module is used to automatically calculate the calibration parameters based on the collected data and generate a calibration report.

[0013] As a preferred embodiment of the present invention, the camera is connected to an image processing unit, which has a built-in image recognition algorithm for identifying the edge contour and four corner positions of the thin film pressure sensor array and calculating its size information; the image processing unit controls the positioning slide bar to automatically move to the four corner positions of the thin film pressure sensor array according to the recognition results, and controls the weight fixing rod and magnet assembly to accurately place the weight at the center position of the thin film pressure sensor array.

[0014] As a preferred embodiment of the present invention, the image processing unit further includes a weight recognition algorithm for automatically identifying the mass specification and placement position of the weight according to the size, shape and identification information of the weight, and communicating with the calibration control system.

[0015] As a preferred embodiment of the present invention, the image processing unit has a built-in error compensation algorithm for calculating and compensating measurement errors caused by sensor deformation or positioning deviation based on image recognition results and data of the positioning slide base pressure sensor.

[0016] As a preferred embodiment of the present invention, the image acquisition module is integrated with the calibration control system, and can display the positioning status of the thin film pressure sensor array, the weight placement status and key parameters of the calibration process in real time.

[0017] As a preferred embodiment of the present invention, the image acquisition module supports data storage and tracing functions, and is used to save image data, recognition results and calibration parameters during each calibration process.

[0018] As a preferred embodiment of the present invention, the calibration control system further comprises an adaptive calibration algorithm for dynamically adjusting the selection and placement of weights according to real-time data from the image acquisition module and the pressure monitoring module.

[0019] Compared with the prior art, the present invention has the following beneficial effects: High-precision calibration: By integrating a high-precision camera, precision mechanical structure, and error compensation algorithm, the present invention can achieve high-precision calibration of thin-film pressure sensor arrays, significantly improving the measurement accuracy and consistency of the sensors; Fully automated operation: The coordinated work of the calibration control system and the image processing unit makes the calibration process fully automated, reducing manual intervention, improving calibration efficiency and reliability, and reducing operational difficulty; Versatility and wide applicability: The design of the weight set and the use of the weight management module enable the present invention to meet the calibration requirements of sensors with different ranges from micro-pressure to high pressure, and has a wide range of applications; Real-time monitoring and dynamic adjustment: Through the pressure monitoring module and adaptive calibration algorithm, the present invention can monitor the key parameters of the calibration process in real time and dynamically adjust the calibration strategy according to the actual situation to ensure the accuracy and reliability of the calibration results; Data traceability and quality management: The image acquisition module supports the storage and traceability of high-resolution images and videos, and can save complete data from each calibration process to facilitate subsequent analysis and quality traceability, meeting high-standard quality management requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the steps of a thin film pressure sensor array calibration method according to an embodiment of the present invention; Figure 2 Schematic diagram of the structure of a thin film pressure sensor array calibration device according to an embodiment of the present invention; Figure 3 is a schematic structural diagram of a fixing frame according to an embodiment of the present invention; Figure 4 Schematic diagram of the front cross-sectional structure of the device body according to an embodiment of the present invention; Figure 5 Schematic diagram of the structure of the weight kit according to an embodiment of the present invention.

[0021] In the figure: S1, placement and positioning of the thin film pressure sensor array; S2, angle adjustment of the annular platform; S3, selection and placement of weights; S4, automatic control of the calibration process; S5, calibration completion and subsequent processing; 100, thin film pressure sensor array calibration device; 10, structural diagram of the thin film pressure sensor array calibration fixture; 11, fixture body; 111, slots for the measuring frame slide; 12, measuring frame slide; 20, front cross-sectional structural diagram of the thin film pressure sensor array calibration device body; 21, measuring frame body; 211. Measuring frame connecting rod; 22. Annular platform; 221. Annular slide rail; 23. Camera; 24. Weight fixing rod main sleeve; 241. Weight fixing rod; 242. Standard tapered positioning pin; 25. Magnet assembly main sleeve; 251. Magnet assembly; 26. Positioning slide rod main sleeve; 261. Positioning slide rod main sleeve and connecting sleeve with Annular slide rail; 262. Positioning slide rod; 263. Positioning slide rod base pressure sensor; 30. Weight kit; 31. Weight box; 32. Weight group; 33. Standard tapered hole positioning groove. DETAILED DESCRIPTION

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] like Figures 1 to 5 As shown, a thin film pressure sensor array calibration device 100, a device body defining a measurement space for calibrating the thin film pressure sensor array; A measuring frame, which is arranged in the main body of the device and is suitable for positioning the thin film pressure sensor array to be tested; An annular platform 22 is rotatably connected to the measuring frame and is used to adjust the moving angle of the positioning slide bar 262; Positioning slide bars 262, which are connected to the measuring frame via the annular platform 22 and are used to fix the four corners of the thin film pressure sensor array under inspection; The weight fixing rod 241 is connected to the measuring frame and is used to position and fix the weight; The magnet assembly 251 is connected to the measuring frame and is used for taking and placing weights; The weight set 32 ​​includes a plurality of weights of different masses, and is used to apply a standard pressure to the thin film pressure sensor array under test.

[0024] refer to Figure 2 The measuring frame is equipped with an axial movement mechanism that allows axial movement within the range defined by the main body of the device, used to accurately locate the axial coordinates of the thin film pressure sensor array under test. A high-precision camera 23 is installed at the top of the measuring frame's central connecting rod. Camera 23 is equipped with an LED ring fill light for locating and observing the position of the thin film pressure sensor array under test.

[0025] As a technical optimization solution of the present invention, the measuring frame slide rod is connected to the fixed frame body 11 through the slot 111 of the measuring frame slide rod, and the measuring frame slide rod 12 can perform high-precision axial movement within the range limited by the device body, which is used to accurately locate the axial coordinates of the thin film pressure sensor array to be calibrated. A high-resolution camera 23 is installed on the top of the central connecting rod of the measuring frame. The camera 23 is equipped with an LED ring fill light with adjustable brightness, which is used to clearly capture the position and shape of the thin film pressure sensor array to be calibrated under low light conditions.

[0026] refer to Figure 2 The annular platform 22 is equipped with a precision rotation mechanism for angle adjustment; the platform has a built-in annular slide rail 221 connected to four positioning slide rods 262 and is provided with a position locking mechanism to achieve full-angle positioning and fixation of the four corners of the thin film pressure sensor array being tested.

[0027] As a technical optimization solution of this invention, a precision rotation mechanism enables ±180° angular adjustment, meeting multi-angle calibration requirements. The platform incorporates a built-in high-precision circumferential slide rail 221, connected to four positioning slide bars 262 and equipped with a position locking mechanism. This ensures full angular positioning and fixation of the four corners of the thin-film pressure sensor array to be calibrated, preventing positional shifting during calibration.

[0028] refer to Figure 2 The positioning slide rod 262 adopts a retractable sleeve structure and can freely adjust the length; the positioning slide rod base is made of flexible material and has a built-in pressure sensor 263, which is used to monitor the force conditions of the four corners of the thin film pressure sensor array under inspection in real time to ensure that the force is evenly distributed on the four corners.

[0029] As a technical optimization solution of the present invention, positioning slide bar 262 utilizes a retractable sleeve structure, allowing its length to be freely adjusted according to the size of the sensor being calibrated. The base of positioning slide bar 262 is made of a highly elastic, flexible material and contains a built-in, highly sensitive pressure sensor. This sensor monitors the force applied to the four corners of the thin-film pressure sensor array in real time, ensuring uniform force distribution and avoiding calibration errors caused by uneven force.

[0030] refer to Figure 2 The weight fixing rod 241 adopts a retractable sleeve structure with adjustable length; a conical positioning pin 242 is provided on the top of the weight fixing rod 241, which cooperates with the standard conical hole positioning groove 33 on the top of the weight to achieve accurate positioning and fixation of the weight; a through hole is provided in the center of the weight fixing rod 241 to accommodate the central connecting rod of the measuring frame and the high-precision camera 23.

[0031] As a technical optimization solution of this invention, the weight fixing rod 241 adopts a retractable sleeve structure, allowing its length to be adjusted according to calibration requirements. A high-precision tapered locating pin 242 is located at the top of the weight fixing rod 241, which precisely mates with the standard tapered hole locating slot 33 at the top of the weight, ensuring the stability and accuracy of the weight during calibration. A through hole is located in the center of the weight fixing rod 241 to accommodate the central connecting rod of the measuring frame and the high-precision camera 23.

[0032] refer to Figure 2 The magnet assembly 251 includes a retractable magnet rod and an electromagnetic control unit. A through hole is provided in the center of the magnet rod for accommodating the weight fixing rod 241; the electromagnetic control unit can accurately control the attraction and release of the magnet.

[0033] As a technical optimization solution of the present invention, the magnet assembly 251 includes a retractable magnet rod and an electromagnetic control unit. A through hole is provided in the center of the magnet rod to accommodate the weight fixing rod 241. The electromagnetic control unit can precisely control the magnet's engagement and release, enabling automatic weight placement and removal, further improving calibration efficiency.

[0034] refer to Figure 2 The weight set 32 ​​includes multiple weights of different masses and sizes, and each weight is provided with a standard conical hole positioning groove 33 on the top; the weight size design can completely cover the effective detection area of ​​the thin film pressure sensor array to be tested, and the mass gradient design can meet the calibration requirements of sensors of different ranges.

[0035] As a technical optimization solution of the present invention, the weight set 32 ​​includes multiple weights of different masses and sizes, each with a standard tapered hole positioning slot 33 on the top. The weight dimensions are designed to completely cover the effective detection area of ​​the thin-film pressure sensor array to be calibrated. The mass gradient design can meet the calibration requirements of sensors with different ranges, from micro-pressure to high pressure, ensuring comprehensive and accurate calibration.

[0036] refer to Figure 4 , including a calibration control system, the calibration control system includes: The pressure monitoring module is used to collect real-time data from the positioning slide base pressure sensor 263 and monitor the force conditions at the four corners of the thin film pressure sensor array; A position adjustment module, used to control the axial movement of the measuring frame and the rotation of the annular platform 22 to ensure the precise positioning of the thin film pressure sensor array; The weight management module is used to record and manage the quality parameters of weights of different specifications and supports automatic selection and placement of weights; The calibration calculation module is used to automatically calculate calibration parameters based on the collected data and generate a calibration report to ensure the accuracy and traceability of the calibration results.

[0037] As a technical optimization solution of the present invention, the calibration control system realizes automatic calibration through the following functional modules: the pressure monitoring module collects the data of the positioning slide base pressure sensor 263 in real time to ensure that the four corners of the thin film pressure sensor array are evenly stressed; the position adjustment module accurately controls the axial movement of the measuring frame and the rotation of the annular platform 22 to realize multi-angle positioning of the thin film pressure sensor array; the weight management module records and manages the quality parameters of weights of different specifications, and supports the automatic selection and placement of weights during the calibration process; the calibration calculation module automatically calculates the calibration parameters based on the collected data and generates a calibration report to ensure the efficiency and accuracy of the calibration process.

[0038] refer to Figure 2 Camera 23 is connected to an image processing unit, which has a built-in image recognition algorithm for identifying the edge contours and four corner positions of the thin-film pressure sensor array and calculating its dimensions. Based on the recognition results, the image processing unit controls positioning sliders 262 to automatically move to the four corners of the thin-film pressure sensor array and controls weight fixing rods 241 and magnet assembly 251 to precisely position the weight at the center of the thin-film pressure sensor array.

[0039] As a technical optimization solution of the present invention, the camera 23 works in conjunction with the image processing unit to achieve precise positioning and weight placement of the thin film pressure sensor array through the following method: the image processing unit has a built-in advanced image recognition algorithm, which can automatically identify the edge contour and four corner positions of the thin film pressure sensor array and calculate its size information; based on the recognition results, the image processing unit controls the positioning slide bar 262 to automatically move to the four corner positions of the thin film pressure sensor array to ensure the fixation of the sensor array; the image processing unit controls the weight fixing rod 241 and the magnet assembly 251 to accurately place the weight at the center position of the thin film pressure sensor array to ensure the accuracy of the calibration process.

[0040] refer to Figure 1 ,The image processing unit also includes a weight recognition algorithm, which is used to automatically identify the mass specifications and placement position of the weight based on the size, shape and identification information of the weight, and communicate with the calibration control system.

[0041] As a technical optimization solution of the present invention, the image processing unit realizes automatic recognition and communication of weights through the following method: the weight recognition algorithm automatically identifies the mass specifications and placement position of the weights based on the size, shape and identification information of the weights; the image processing unit communicates with the calibration control system in real time to ensure that the selection and placement of the weights meet the calibration requirements, thereby improving the accuracy and consistency of the calibration process.

[0042] refer to Figure 1 The image processing unit has a built-in error compensation algorithm for calculating and compensating the measurement error caused by sensor deformation or positioning deviation based on the image recognition result and the data of the positioning slide base pressure sensor 263.

[0043] As a technical optimization solution of the present invention, the image processing unit realizes error compensation through the following method: based on the image recognition results and the data of the positioning slide base pressure sensor 263, the error compensation algorithm calculates the measurement error caused by sensor deformation or positioning deviation; through the preset error distribution model, the compensation coefficient is generated and applied to the real-time pressure measurement data to ensure the accuracy of the calibration results.

[0044] refer to Figure 1 ,The image acquisition module is integrated with the calibration control system, which can display the positioning of the thin film pressure sensor array, the weight placement status and the key parameters of the calibration process in real time.

[0045] As a technical optimization solution of the present invention, the image acquisition module realizes real-time display and monitoring through the following method: the image of the thin film pressure sensor array is captured in real time by a high-precision camera 23, and the image data is transmitted to the calibration control system; the calibration control system displays the positioning status of the thin film pressure sensor array, the weight placement status and the key parameters of the calibration process (such as weight mass, pressure value, error compensation coefficient, etc.) in real time; the operator can monitor the calibration process in real time through the host computer interface to ensure the accuracy and consistency of the calibration.

[0046] refer to Figure 1 ,The image acquisition module supports data storage and ,traceability functions, which are used to save image data, recognition ,results and calibration parameters during each calibration ,process.

[0047] As a technical optimization solution of the present invention, the image acquisition module realizes data storage and traceability through the following methods: the image data, recognition results (including the deformation area of ​​the sensor array and the position of the weight) and calibration parameters (such as weight mass, pressure value, compensation coefficient, etc.) of each calibration process are stored in a local or cloud database; the data is indexed by timestamp and calibration batch number, supporting users to trace historical calibration data according to time or batch; and a calibration report is generated, which contains calibration parameters, error compensation data and image data to facilitate subsequent analysis and quality traceability.

[0048] refer to Figure 1 ,The calibration control system also includes an adaptive calibration algorithm for ,dynamically adjusting the selection and placement of the weights based on the real-time ,data from the image acquisition module and the pressure monitoring module.

[0049] As a technical optimization solution of the present invention, the adaptive calibration algorithm achieves dynamic adjustment through the following methods: based on the data of the image acquisition module, the current state of the thin film pressure sensor array, including the degree of sensor deformation and the placement position of the weight, is identified in real time; combined with the data of the pressure monitoring module, the current calibration error is calculated, and the source of the error is determined through the error distribution model; according to the error distribution, the selection of weights (such as weight) and placement position are dynamically adjusted to make the pressure distribution uniform and control the calibration error within the preset threshold range.

[0050] The working principle and usage process of the present invention: The pressure sensor calibration device of the present application can calibrate thin film pressure sensors of various sizes, thereby ensuring the accuracy and reliability of thin film pressure sensor arrays in applications. The calibration steps of the thin film pressure sensor array calibration device 100 are: placement and positioning of the thin film pressure sensor array S1, angle adjustment of the annular platform 22 S2, selection and placement of weights S3, automatic control of the calibration process S4, and calibration completion and subsequent processing S5; Among them, the placement and positioning S1 of the thin film pressure sensor array includes: placing the sensor: placing the thin film pressure sensor array to be calibrated at the center position of the measuring frame to ensure that the center of the sensor is aligned with the center connecting rod of the measuring frame. The operator can ensure the alignment accuracy by visual inspection or using auxiliary tools such as a laser alignment instrument. Automatic identification and positioning: starting the camera 23 and the image processing unit, the system will automatically identify the edge contour and four corner positions of the thin film pressure sensor array. The camera 23 will capture the image of the sensor and extract the contour and four corner coordinates of the sensor through the image processing algorithm. Automatic movement of the positioning slider 262: based on the recognition result of the image processing unit, the system will control the positioning slider 262 to automatically move to the four corner positions of the thin film pressure sensor array. The movement of the positioning slider 262 is driven by a servo motor to ensure the accuracy and stability of the movement. Adjusting the length of the positioning slider 262: the operator can manually or automatically adjust the length of the positioning slider 262 based on the feedback from the image processing unit. During the adjustment process, the pressure sensor 263 built into the base will monitor the force conditions at the four corners in real time to ensure that the base of each positioning slide bar 262 is in close contact with the four corners of the thin film pressure sensor array and the force is evenly distributed.

[0051] Angle adjustment S2 of the annular platform 22 includes the following: Angle adjustment: Based on calibration requirements, the operator can adjust the angle of the annular platform 22 via the control panel or calibration control system. The precision rotation mechanism built into the annular platform 22 enables ±180° angle adjustment, meeting multi-angle calibration requirements. Locking position: After adjustment, the position locking mechanism built into the annular platform 22 automatically locks, ensuring that the thin film pressure sensor array does not shift during calibration. The annular slide rail 221 is connected to four positioning slides 262 to ensure full-angle positioning and fixation of the sensor's four corners.

[0052] Selection and placement of weights S3, including: selection of weights: the operator selects weights of appropriate mass from the weight set 32 ​​according to the calibration requirements. The mass of the weights should be selected according to the range and calibration requirements of the thin film pressure sensor array. Automatic placement of weights: through the magnet assembly 251, the system will automatically place the weights on the top of the weight fixing rod 241. The magnet assembly 251 includes a retractable magnet rod and an electromagnetic control unit. A through hole is provided in the center of the magnet rod for accommodating the weight fixing rod 241. The electromagnetic control unit can accurately control the attraction and release of the magnet to ensure that the standard conical hole positioning groove 33 of the weight is precisely matched with the conical positioning pin 242 of the weight fixing rod 241. Adjusting the length of the weight fixing rod 241: The weight fixing rod 241 adopts a retractable sleeve structure. The operator can manually or automatically adjust its length according to the calibration requirements to ensure that the weight is placed accurately.

[0053] Automatic control S4 of the calibration process includes: real-time monitoring and adjustment: the calibration control system will automatically adjust the axial position of the measuring frame and the rotation angle of the annular platform 22 according to the real-time data of the pressure monitoring module and the image processing unit to ensure that the thin film pressure sensor array is in the optimal calibration position. The system will monitor the force conditions of the sensor and the placement status of the weights in real time to ensure the accuracy of the calibration process. Automatic calculation of calibration parameters: the calibration control system will automatically calculate the calibration parameters based on the mass of the weights and the response of the thin film pressure sensor array, and generate a calibration report. The calibration parameters include key indicators such as sensor sensitivity, linearity, and repeatability. Real-time monitoring and display: the image acquisition module is deeply integrated with the calibration control system, and can display the positioning status of the thin film pressure sensor array, the placement status of the weights, and key parameters in the calibration process in real time. The operator can monitor the calibration process in real time through the host computer to ensure the accuracy of each step of the operation.

[0054] Calibration completion and subsequent processing S5, including: generating a calibration report: after the calibration is completed, the calibration control system will automatically generate a detailed calibration report, including calibration parameters, error compensation data and image data. The operator can save the calibration report and image data for subsequent analysis and quality traceability. Remove the weights and sensors: after the calibration is completed, the operator should first remove the weights, and then remove the thin film pressure sensor array. When removing the weights, the magnet assembly 251 will automatically release the weights to ensure safe operation. Cleaning and maintenance: Finally, the operator should clean the device body and each component to ensure that there is no residue. Regularly check the working status of each component and perform necessary maintenance and care to ensure long-term stable operation of the equipment.

[0055] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0056] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A thin film pressure sensor array calibration device, characterized in that: a device body defining a measurement space for calibrating the thin film pressure sensor array; A measuring frame, which is disposed in the device body and is suitable for positioning the thin film pressure sensor array to be tested; An annular platform (22), the annular platform (22) being rotatably connected to the measuring frame and used for adjusting the moving angle of the positioning slide bar (262); Positioning slide bars (262), the positioning slide bars (262) being connected to the measuring frame via the annular platform (22) and being used to fix the four corner positions of the thin film pressure sensor array to be tested; A weight fixing rod (241), the weight fixing rod (241) is connected to the measuring frame and is used to position and fix the weight; A magnet assembly (251), the magnet assembly (251) being connected to the measuring frame and used for taking and placing weights; A weight set (32) includes a plurality of weights of different masses and is used to apply a standard pressure to the thin film pressure sensor array to be tested.

2. The thin film pressure sensor array calibration device according to claim 1, characterized in that: The measuring frame is provided with an axial movement mechanism, which can move axially within a range limited by the device body, and is used to accurately locate the axial coordinates of the thin film pressure sensor array to be inspected. A high-precision camera (23) is provided on the top of the central connecting rod of the measuring frame. The camera (23) is equipped with an LED ring fill light, which is used to locate and observe the position of the thin film pressure sensor array to be inspected.

3. The thin film pressure sensor array calibration device according to claim 1, characterized in that: The annular platform (22) is provided with a precision rotating mechanism for angle adjustment; the platform has a built-in annular slide rail (221) connected to four positioning slide bars (262) and provided with a position locking mechanism, thereby achieving full-angle positioning and fixing of the four corners of the thin film pressure sensor array to be inspected.

4. The thin film pressure sensor array calibration device according to claim 3, characterized in that: The positioning slide bar (262) adopts a retractable sleeve structure and can freely adjust the length; the positioning slide bar base adopts a flexible material and has a built-in pressure sensor (263) for real-time monitoring of the stress conditions at the four corners of the thin film pressure sensor array to be tested, ensuring that the stress at the four corners is uniform.

5. The thin film pressure sensor array calibration device according to claim 1, characterized in that: The weight fixing rod (241) adopts a retractable sleeve structure and is adjustable in length; a standard tapered positioning pin (242) is provided on the top of the weight fixing rod (241) to cooperate with a standard tapered hole positioning groove (33) on the top of the weight to achieve accurate positioning and fixing of the weight; a through hole is provided in the center of the weight fixing rod (241) for accommodating a central connecting rod of the measuring frame and a high-precision camera (23).

6. The thin film pressure sensor array calibration device according to claim 5, characterized in that: The magnet assembly (251) comprises a retractable magnet rod and an electromagnetic control unit. A through hole is provided at the center of the magnet rod for accommodating the weight fixing rod (241). The electromagnetic control unit can accurately control the attraction and release of the magnet.

7. The thin film pressure sensor array calibration device according to claim 5, characterized in that: The weight set (32) includes a plurality of weights of different masses and sizes, and a standard tapered hole positioning groove (33) is provided on the top of each weight, which can cooperate with the tapered positioning pin (242) on the top of the weight fixing rod (241), thereby achieving accurate alignment of the weights, effectively preventing the weights from sliding or tilting during the calibration process, ensuring the fixed stability of the weights, and automatically eliminating weight offset errors; The weight size design can completely cover the effective detection area of ​​the thin film pressure sensor array being tested, and the mass gradient design can meet the calibration requirements of sensors with different ranges.

8. The thin film pressure sensor array calibration device according to claim 1, characterized in that: A calibration control system is included, the calibration control system comprising: A pressure monitoring module for collecting real-time data from a positioning slide base pressure sensor (263); A position adjustment module for controlling the axial movement of the measuring frame and the rotation of the annular platform (22); Weight management module, used to record and manage the quality parameters of weights of different specifications; The calibration calculation module is used to automatically calculate the calibration parameters based on the collected data and generate a calibration report.

9. The thin film pressure sensor array calibration device according to claim 8, characterized in that: The camera (23) is connected to an image processing unit, which has a built-in image recognition algorithm for identifying the edge contour and four corner positions of the thin film pressure sensor array and calculating its size information; the image processing unit controls the positioning slide bar (262) to automatically move to the four corner positions of the thin film pressure sensor array based on the recognition result, and controls the weight fixing rod (241) and the magnet assembly (251) to accurately place the weight at the center position of the thin film pressure sensor array.

10. The thin film pressure sensor array calibration device according to claim 9, characterized in that: The image processing unit also includes a weight recognition algorithm for automatically identifying the mass specifications and placement position of the weight based on the size, shape and identification information of the weight, and communicating with the calibration control system.

11. The thin film pressure sensor array calibration device according to claim 10, characterized in that: The image processing unit has a built-in error compensation algorithm for calculating and compensating measurement errors caused by sensor deformation or positioning deviation based on image recognition results and data of the positioning slide base pressure sensor (263). The error compensation algorithm is implemented by the following method: extracting the deformation area of ​​the thin film pressure sensor array through image recognition technology, combining the pressure distribution data of the positioning slide base pressure sensor (263), and establishing a mapping relationship between deformation and pressure error; The preset error distribution model is used to calculate the deformation compensation coefficient of each sensor node, and the coefficient is applied to the real-time pressure measurement data to eliminate the influence of deformation or positioning deviation on the measurement results.

12. The thin film pressure sensor array calibration device according to claim 8, characterized in that: The image acquisition module is integrated with the calibration control system and can display the positioning status of the thin film pressure sensor array, the weight placement status, and key parameters in the calibration process in real time. The image acquisition module realizes real-time display by the following method: using a high-precision camera (23) to capture the image of the thin film pressure sensor array in real time and transmit the image data to the calibration control system; the calibration control system displays the positioning status of the thin film pressure sensor array, the weight placement status, and key parameters in the calibration process (such as weight mass, pressure value, error compensation coefficient, etc.) in real time based on the image data; Operators can monitor the calibration process in real time through the host computer interface to ensure the accuracy and consistency of the calibration.

13. The thin film pressure sensor array calibration device according to claim 12, characterized in that: The image acquisition module supports data storage and tracing functions, which are used to save image data, recognition results and calibration parameters during each calibration process. The data storage and tracing functions are achieved by the following methods: Store image data, recognition results (including sensor array deformation area and weight position), and calibration parameters (such as pressure value, compensation coefficient, etc.) during each calibration process in a local or cloud database; Data is indexed by timestamp and calibration batch number, allowing users to trace historical calibration data by time or batch and generate calibration reports.

14. The thin film pressure sensor array calibration device according to claim 12, wherein: The calibration control system also includes an adaptive calibration algorithm for dynamically adjusting the selection and placement of weights based on real-time data from the image acquisition module and the pressure monitoring module. This adaptive calibration algorithm is implemented by: using data from the image acquisition module, it identifies the current state of the thin-film pressure sensor array in real time, including the degree of sensor deformation and the placement of weights; combining this with data from the pressure monitoring module, it calculates the current calibration error and identifies the source of the error using an error distribution model; and based on the error distribution, it dynamically adjusts the selection (e.g., weight) and placement of weights to even out the pressure distribution and keep the calibration error within a preset threshold.

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