Method and device for preparing perovskite thin film

Abstract

The invention provides a preparation method and device of a perovskite thin film. The preparation method is as follows. According to the method, the crystallization quality of the perovskite thin film is optimized, the defect density is reduced, the interface contact is improved, the FF, Voc and overall efficiency are remarkably improved, and the efficiency of the perovskite photovoltaic cell can be improved in a manner of wet auxiliary drying, back preheating, front infrared lamp tube heating annealing and rapid cooling.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic cells, and in particular to a method and device for preparing a perovskite thin film. Background Art

[0002] In the preparation of perovskite photovoltaic cells, the active layer of perovskite materials (such as MAPbI3 and FAPbI3) is usually spin-coated or blade-coated by solution method, and then combined with annealing to obtain higher quality perovskite films. The current common perovskite photovoltaic cell annealing process usually uses a hot plate heating under air conditions, transferring heat to the perovskite layer through heat conduction to promote the nucleation and crystallization of the perovskite film.

[0003] When preparing large-sized perovskite cells, the existing traditional hot plate increases in size to meet the larger heating area, but the heating efficiency slows down, the heating temperature is uneven, and the oxygen and water molecules exposed to the atmosphere will be adsorbed on the perovskite surface, forming uncoordinated Pb 2+ or I - Deep energy level defects such as vacancies result in poor cleanliness of perovskite films, which in turn affects the photoelectric performance of perovskite cells. Summary of the Invention

[0004] (1) Technical problems solved

[0005] In response to the shortcomings of the existing technology, the present invention provides a method and device for preparing perovskite thin films, which adopts wet-assisted drying + back preheating + front infrared lamp heating annealing + rapid cooling to solve the problems raised in the above background technology.

[0006] (2) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0008] According to a first aspect of the present invention, a method for preparing a perovskite thin film is provided, comprising the following steps:

[0009] Under a nitrogen atmosphere, an organic salt solution is first coated on the inorganic salt film of the substrate and assisted in drying to obtain an organic salt film layer; then the substrate is subjected to back-side preheating and front-side infrared light heating annealing treatment in sequence, and after annealing is completed, it is quickly cooled to room temperature to obtain a perovskite film.

[0010] Preferably, the specific operation of coating the organic salt solution on the inorganic salt film of the substrate and auxiliary drying is: continuously blowing nitrogen at 40-100°C in the direction of spraying the organic salt solution, and when the organic salt solution reaches the horizontal end position, continuing to blow for 1-10 seconds at the back.

[0011] The present invention uses auxiliary drying during the organic salt solution coating process, rapidly removing the solvent with high-temperature gas, thereby rapidly fixing the active ingredients in the precursor, reducing solvent residue and unevenness during volatilization, and inhibiting the formation of microcracks and holes in the perovskite film. Furthermore, by rapidly drying the organic salt solution, contamination of the backside of the perovskite photovoltaic substrate caused by tensional flow of the organic salt solution is reduced.

[0012] Preferably, the back surface preheating temperature is 80-150°C.

[0013] Preferably, the front infrared light heating annealing treatment is performed at a temperature of 80 to 150° C. and for a time of 10 seconds to 12 minutes.

[0014] The cooling rate is 10-50°C / s.

[0015] The wavelength of the infrared light in this application is between 0.75 and 2.5 μm. The infrared light can instantly penetrate the film and directly heat the perovskite active layer. The infrared light heating annealing treatment can control the substrate temperature non-uniformity of the perovskite film within 2%. At the same time, combined with rapid cooling to room temperature, it can avoid the grain coarsening or disordered arrangement caused by long-term cooling, reduce the defect density at the boundary, and rapid cooling can reduce the impact of thermal stress on the interface layer, reduce the perovskite film and C 60 The risk of peeling between transport layers.

[0016] According to a second aspect of the present invention, there is provided a device for preparing a perovskite thin film, comprising:

[0017] a wet-assisted drying unit configured to spray an organic salt solution onto the inorganic salt film on the substrate and assist in nitrogen drying;

[0018] a pre-annealing unit configured to preheat the back side of the substrate;

[0019] an annealing unit configured to heat the organic salt surface of the substrate with infrared light;

[0020] a rapid cooling unit configured to rapidly cool the substrate to room temperature;

[0021] The annealing conveying unit is configured to move the substrate on the working tables of the pre-annealing unit, the annealing unit and the rapid cooling unit.

[0022] Preferably, the wet-assisted drying unit includes a liquid supply module, an organic solution liquid outlet nozzle, a vacuum adsorption platform, an inkjet platform, a transmission paper roll, a unwinding roller, an unwinding motor, a winding motor and a winding roller. The liquid supply module is connected to the organic solution liquid outlet nozzle / die head, and the front and rear ends of the liquid supply module are respectively fixed with a front-end adjustable angle temperature-controlled air knife and a rear-end adjustable angle temperature-controlled air knife through a universal shaft. The vacuum adsorption platform is located above the inkjet platform, and the conveying surface of the transmission paper roll is located above the vacuum adsorption platform and its two ends are respectively fixed on the unwinding roller and the winding roller. The unwinding roller and the winding roller are respectively fixed on the unwinding motor and the winding motor, and the movement of the transmission paper roll is driven by the winding cooperation of the unwinding motor and the winding motor.

[0023] Preferably, the pre-annealing unit includes a preheating zone platform, a preheating zone temperature sensor, a preheating zone vacuum adsorption vent and a preheating zone heater, the preheating zone platform is located above the preheating zone heater, and the preheating zone temperature sensor and the preheating zone vacuum adsorption vent are both located below the preheating zone platform.

[0024] Preferably, the annealing unit includes an annealing zone platform, an annealing zone heater located below the annealing zone platform, and an annealing light box located above the annealing zone platform. The interior of the annealing light box is provided with a light box gas guide column, a nitrogen source, a light source, a substrate temperature detection sensor, and an annealing area humidity monitoring sensor. The nitrogen source and the light source are arranged in sequence in the horizontal direction, and an exhaust fan and a fresh air inlet are provided on the top of the annealing light box.

[0025] Preferably, the rapid cooling unit includes a cooling zone platform, a cooling zone temperature sensor, and a cooling zone vacuum adsorption vent.

[0026] Preferably, the annealing conveying unit includes a base conveyor belt, a base conveyor belt auxiliary positioning roller, a base conveyor belt drive roller and a base conveyor belt drive roller motor. The base conveyor belt is wound around the base conveyor belt auxiliary positioning roller and the base conveyor belt drive roller. The base conveyor belt drive roller motor is fixed inside the base conveyor belt drive roller to drive the base conveyor belt drive roller to rotate.

[0027] Beneficial effects

[0028] The present invention provides a method and device for preparing a perovskite thin film, which has the following beneficial effects:

[0029] (1) This solution provides a method for preparing a perovskite film. By using wet-assisted drying + back preheating + front infrared lamp heating annealing + rapid cooling, the crystallization quality of the perovskite film is optimized, the defect density is reduced, and the interface contact is improved. This significantly improves FF, Voc, and overall efficiency, thereby improving the efficiency of perovskite photovoltaic cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic structural diagram of a wet-assisted drying unit in a perovskite film preparation device provided by the present invention;

[0031] Figure 2 A schematic structural diagram of a perovskite film preparation device provided by the present invention;

[0032] Figure 3 This is a schematic diagram of the structure of the exhaust fan and fresh air inlet on the top of the annealing light box provided by the present invention;

[0033] Figure 4 A schematic diagram of the structure of the front-end adjustable angle temperature-controlled air knife and the rear-end adjustable angle temperature-controlled air knife provided by the present invention;

[0034] Figure 5 A schematic diagram of the structure of the light source provided by the present invention;

[0035] Figure 6 A schematic structural diagram of the gas guide column for the light box provided by the present invention;

[0036] In the figure, 101, liquid supply module; 102, organic solution outlet nozzle / die; 103, organic salt solution; 104, perovskite photovoltaic substrate; 105, vacuum adsorption platform; 106, inkjet / coating platform; 107, paper roll transmission; 108, unwinding roller; 109, unwinding motor; 110, rewinding motor; 111, rewinding roller; 112, vacuum adsorption vent; 113, paper roll auxiliary roller; 114, Front-end adjustable angle temperature-controlled air knife; 115, rear-end adjustable angle temperature-controlled air knife; 116, annealing light box; 117, light box gas guide column; 118, nitrogen source; 119, light source; 120, exhaust fan; 121, fresh air inlet; 122, substrate temperature detection sensor; 123, annealing area humidity monitoring sensor; 124, substrate conveyor belt auxiliary roller; 125, substrate conveyor belt; 126, substrate conveyor belt auxiliary positioning roller; 127, substrate conveyor belt drive roller; 128, substrate conveyor belt drive roller motor; 129, preheating zone platform; 130, preheating zone temperature sensor; 131, preheating zone vacuum adsorption vent; 132, preheating zone heater; 133, annealing zone platform; 134, annealing zone vacuum adsorption vent; 135, annealing zone temperature sensor; 136, annealing zone heater; 137, cooling zone platform; 138, Cooling zone temperature sensor; 139, cooling zone vacuum adsorption vent; 140, shell; 141, nitrogen outlet nozzle; 142, nitrogen delivery pipe; 143, heating element; 144, temperature sensing element; 145, gas flow regulating valve; 146, quartz tube; 147, carbon fiber heating wire; 148, terminal; 149, ceramic insulating sleeve; 150, exhaust port; 151, gas guide tube; 152, nitrogen outlet. DETAILED DESCRIPTION

[0037] In order to better illustrate the content of the present invention, a detailed description is given below in conjunction with specific embodiments.

[0038] The present invention provides a device for preparing a perovskite thin film, comprising:

[0039] a wet-assisted drying unit configured to spray an organic salt solution onto the inorganic salt film on the substrate and assist in nitrogen drying;

[0040] a pre-annealing unit configured to preheat the back side of the substrate;

[0041] an annealing unit configured to heat the organic salt surface of the substrate with infrared light;

[0042] a rapid cooling unit configured to rapidly cool the substrate to room temperature;

[0043] The annealing conveying unit is configured to move the substrate on the working tables of the pre-annealing unit, the annealing unit and the rapid cooling unit.

[0044] Specifically, the structural diagram of the wet auxiliary drying unit is as follows: Figure 1 As shown, it includes a liquid supply module 101, an organic solution liquid outlet nozzle / die head 102, a vacuum adsorption platform 105, an inkjet / coating platform 106, a transmission roll 107, a reeling roller 108, a reeling motor 109, a reeling motor 110 and a reeling roller 111. The liquid supply module 101 is connected to the organic solution liquid outlet nozzle / die head 102, and an organic salt solution 103 is sprayed below the organic solution liquid outlet nozzle / die head 102. The front and rear ends of the liquid supply module 105 are respectively fixed with a front-end adjustable angle temperature-controlled air knife 114 and a rear-end adjustable angle temperature-controlled air knife 115 through a universal shaft. The structural schematic diagram of the front-end adjustable angle temperature-controlled air knife 114 and the rear-end adjustable angle temperature-controlled air knife 115 is shown as follows. Figure 4 As shown, it includes a housing 140 and a nitrogen outlet nozzle 141 and a nitrogen delivery pipe 142 connected to the front and rear ends of the housing 140 respectively. In the direction of nitrogen delivery, a heating element 143 is provided in the housing 140, and a temperature sensing element 144 is also provided inside the housing 140. A gas flow regulating valve 145 is provided on the nitrogen delivery pipe 142;

[0045] The vacuum adsorption platform 105 is located above the inkjet / coating platform 106. The conveying surface of the transmission paper roll 107 is located above the vacuum adsorption platform 105 and its two ends are respectively fixed on the unwinding roller 108 and the winding roller 111. The unwinding roller 108 and the winding roller 111 are respectively fixed on the unwinding motor 109 and the winding motor 110. The movement of the transmission paper roll 107 is driven by the winding of the unwinding motor 109 and the winding motor 110. Vacuum adsorption vents 112 are provided on the side of the vacuum adsorption platform 105. A paper roll auxiliary roller 113 is provided at the contact edge of the transmission paper roll 107 with the vacuum adsorption platform 112 and the inkjet platform 106 to increase the smoothness of the transportation of the transmission paper roll 107.

[0046] according to Figure 2 As shown, the pre-annealing unit includes a preheating zone platform 129, a preheating zone temperature sensor 130, a preheating zone vacuum adsorption vent 131 and a preheating zone heater 132. The preheating zone platform 129 is located above the preheating zone heater 132, and the preheating zone temperature sensor 130 and the preheating zone vacuum adsorption vent 131 are both located below the preheating zone platform 129. The preheating zone heater 132 is used to preheat and anneal the perovskite photovoltaic substrate 104 placed on the preheating zone platform 129.

[0047] The annealing unit includes an annealing zone platform 133, an annealing zone heater 136 located below the annealing zone platform 133, and an annealing light box 116 located above the annealing zone platform 133. The interior of the annealing light box 116 is provided with a light box gas guide column 117, a nitrogen source 118, a light source 119, a substrate temperature detection sensor 122, and an annealing zone humidity monitoring sensor 123. The nitrogen source 118 and the light source 119 are arranged in sequence in the horizontal direction. An exhaust fan 120 and a fresh air inlet 121 are provided on the top of the annealing light box 116. The structural schematic diagram of the exhaust fan 120 and the fresh air inlet 121 is shown in FIG. Figure 3 As shown, four fresh air inlets 121 are arranged around the exhaust fan 120. The exhaust fan 120 and the fresh air inlet 121 are used to control the perovskite photovoltaic substrate 104 in the annealing light box 116 to avoid excessive temperature and to promptly discharge the organic solvent evaporated during the annealing process;

[0048] The structural diagram of the light source 119 is as follows Figure 5 As shown, it includes a quartz tube 146 and a carbon fiber heating wire 147 located inside the quartz tube 146. Both ends of the carbon fiber heating wire 147 pass through the quartz tube 146 and are connected to the terminal 148. The connection between the terminal 148 and the carbon fiber heating wire 147 is fixed by a ceramic insulating sleeve 149. An exhaust port 150 is also provided in the middle of the quartz tube 146.

[0049] The structural diagram of the light box gas guide column 117 is as follows Figure 6 As shown, it includes a gas guide tube 151 and nitrogen outlets 152 arranged in sequence on the gas guide tube 151. The gas guide tube 151 is fixed in a direction parallel to the travel direction of the perovskite photovoltaic substrate 104. The nitrogen outlets 152 form a nitrogen source 118, so that the annealing process is in a slightly positive pressure nitrogen environment, which can prevent a large amount of oxygen and water vapor in the external air from entering the annealing area.

[0050] The rapid cooling unit includes a cooling zone platform 137, a cooling zone temperature sensor 138, and a cooling zone vacuum adsorption vent 139. A nitrogen source 118 is also provided above the cooling zone platform 137 to achieve rapid cooling by blowing nitrogen.

[0051] The annealing conveying unit includes a base conveyor belt 125, a base conveyor belt auxiliary positioning roller 126, a base conveyor belt drive roller 127 and a base conveyor belt drive roller motor 128. The base conveyor belt 125 is wound around the base conveyor belt auxiliary positioning roller 126 and the base conveyor belt drive roller 127. The base conveyor belt drive roller motor 128 is fixed inside the base conveyor belt drive roller 127 to drive the base conveyor belt drive roller 127 to rotate. The annealing conveying unit is used to convey the perovskite photovoltaic substrate 104 through the pre-annealing unit, annealing unit and rapid cooling unit in sequence.

[0052] A method for preparing perovskite thin film

[0053] The perovskite film preparation device mentioned above is used to prepare the perovskite film. The preparation method is as follows: in a nitrogen atmosphere, an organic salt solution is first coated on the inorganic salt film of the substrate and assisted in drying to obtain an organic salt film layer; then the substrate is subjected to back preheating and front infrared light heating annealing treatment in sequence, and after annealing is completed, it is quickly cooled to room temperature to obtain a perovskite film.

[0054] The specific steps are as follows:

[0055] (1) After the perovskite photovoltaic substrate 104 reaches the vacuum adsorption platform 105, the vacuum system of the vacuum adsorption vent 112 works, and the perovskite photovoltaic substrate 104 is firmly adsorbed on the vacuum adsorption platform 105 through the transfer roll 107 with tiny pores;

[0056] (2) On the inkjet / coating platform 106, the unwinding roller 108, the unwinding motor 109, the rewinding motor 110, the rewinding roller 111 and the paper auxiliary roller 113 cooperate to synchronously drive the transmission paper roll 107 and the perovskite photovoltaic substrate 104 to move;

[0057] (3) The liquid supply module 101 injects the organic salt solution 103 into the organic solution outlet nozzle / die 102 through the pump group, and evenly sprays it on the perovskite photovoltaic substrate 104. The front-end adjustable angle temperature-controlled air knife 114 continuously sprays 40-100°C (adjustable) high-temperature nitrogen purge along the movement direction of the organic solution outlet nozzle 102 to assist the organic salt solution to crystallize and appropriately increase the temperature of the perovskite photovoltaic substrate 104. The rear-end adjustable angle temperature-controlled air knife 115 performs a rapid purge for 1-10 seconds to quickly dry the organic salt solution sprayed from the organic solution outlet nozzle / die 102, while reducing the contamination of the back of the perovskite photovoltaic substrate 104 caused by the tension flow of the organic salt solution;

[0058] (4) The unwinding roller 108, the unwinding motor 109, the rewinding motor 110, the rewinding roller 111, and the paper roll auxiliary roller 113 drive the transmission paper roll 107 to synchronize with the substrate conveyor belt auxiliary roller 124, the substrate conveyor belt 125, the substrate conveyor belt auxiliary positioning roller 126, the substrate conveyor belt drive roller 127, and the substrate conveyor belt drive roller motor 128 to transfer the perovskite photovoltaic substrate 104 sprayed with the complete organic salt solution to the preheating zone platform 129;

[0059] (5) The preheating zone platform 129 controls the back surface temperature of the perovskite photovoltaic substrate 104 to 80-150°C through the preheating zone temperature sensor 130, the preheating zone vacuum adsorption vent 131 and the preheating zone heater 132. The preheating zone vacuum adsorption vent 131 introduces a vacuum environment, and the perovskite photovoltaic substrate 104 is adsorbed by the substrate conveyor belt 125 for preheating for 10 seconds to 1 minute.

[0060] (6) The fully preheated perovskite photovoltaic substrate 104 is transferred to the annealing zone platform 133. The annealing zone platform 133 controls the back surface temperature of the perovskite photovoltaic substrate 104 to be continuously maintained at 80-150°C through the annealing zone vacuum adsorption vent 134, the annealing zone temperature sensor 135, and the annealing zone heater 136;

[0061] (7) The annealing light box 116 provides real-time feedback on the surface temperature of the perovskite photovoltaic substrate 104 through the substrate temperature detection sensor 122. By adjusting the output power of the light source 119 and the annealing zone heater 136, the nitrogen source 118 is used for gas purge, and the exhaust fan 120 and the fresh air inlet 121 extract the organic volatile gas generated by heating, and the annealing light box 116 is assisted in temperature control to maintain the temperature of the front of the perovskite photovoltaic substrate 104 at 80-150°C. The annealing is performed for 10S-12min to form a perovskite film. The gas guide tube 151 of the light box gas guide column 117 is along the direction of travel of the perovskite substrate 104. The nitrogen gas ejected forms a slightly positive pressure nitrogen gas curtain inside the annealing light box 116 to prevent oxygen and water vapor in the external air from entering the annealing light box 116.

[0062] (8) After complete annealing, the perovskite photovoltaic substrate 104 is transferred to the cooling zone platform 137. The cooling zone platform 137 detects the temperature through the annealing temperature sensor 135 and increases the flow rate of the nitrogen source 118 to achieve rapid cooling, inhibit the excessive growth of grains, reduce component volatilization, reduce thermal stress, and improve the efficiency and life of the perovskite film.

[0063] Example 1

[0064] First, an organic salt solution is coated on the inorganic salt film of the substrate and assisted by nitrogen drying at 60°C. When the organic salt solution is sprayed, the auxiliary drying liquid cutoff is purged for 1 second to complete the auxiliary drying of the organic salt solution;

[0065] After reaching the preheating zone platform, the heating temperature is set to 100°C and heated for 10 seconds to rapidly heat the back side of the perovskite photovoltaic substrate to complete the pre-annealing treatment;

[0066] Transfer to the annealing zone platform and set the heating temperature to 120°C. The infrared lamp wavelength is 1000nm. Under the conditions of humidity less than 20% and oxygen content less than 3%, the organic salt and inorganic salt of the complete perovskite photovoltaic substrate are annealed and crystallized.

[0067] The film was transferred to the cooling zone platform and rapidly cooled at a cooling rate of 30°C / s to obtain a perovskite film.

[0068] Compared with the perovskite film prepared by the preparation method of the present application through direct spray annealing treatment in the prior art, the perovskite film has better crystallization quality. The FF of the prepared perovskite battery is increased by 5%, the Voc is increased by 0.1V, and the overall efficiency is increased by 5%.

[0069] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A method for preparing a perovskite thin film, characterized in that: The following steps are involved: Under a nitrogen atmosphere, an organic salt solution is first coated on the inorganic salt film of the substrate and assisted in drying to obtain an organic salt film layer; then the substrate is subjected to back-side preheating and front-side infrared light heating annealing treatment in sequence, and after annealing is completed, it is quickly cooled to room temperature to obtain a perovskite film.

2. The method for preparing a perovskite thin film according to claim 1, wherein: The specific operation of coating the organic salt solution on the inorganic salt film of the substrate and assisting in drying is: continuously blowing nitrogen at 40-100° C. in the direction of spraying the organic salt solution, and when the organic salt solution reaches the horizontal end position, continuously blowing for 1-10 seconds at the rear.

3. The method for preparing a perovskite thin film according to claim 1, wherein: The back surface preheating temperature is 80-150°C.

4. The method for preparing a perovskite thin film according to claim 1, wherein: The front infrared light heating annealing treatment is performed at a temperature of 80 to 150° C. and for a time of 10 seconds to 12 minutes. The cooling rate is 10-50°C / s.

5. A device for preparing a perovskite thin film, characterized in that: The preparation device comprises: a wet-assisted drying unit configured to spray-coat an organic salt solution on the inorganic salt film on the substrate and assist in nitrogen drying; a pre-annealing unit configured to preheat the back side of the substrate; an annealing unit configured to heat the organic salt surface of the substrate with infrared light; a rapid cooling unit configured to rapidly cool the substrate to room temperature; The annealing conveying unit is configured to move the substrate on the working tables of the pre-annealing unit, the annealing unit and the rapid cooling unit.

6. The device for preparing a perovskite thin film according to claim 5, characterized in that: The wet auxiliary drying unit comprises a liquid supply module (101), an organic solution liquid outlet nozzle (102), a vacuum adsorption platform (105), an inkjet platform (106), a transmission roll (107), an unwinding roller (108), an unwinding motor (109), a rewinding motor (110) and a rewinding roller (111), wherein the liquid supply module (101) is connected to the organic solution liquid outlet nozzle (102), and the front and rear ends of the liquid supply module (105) are respectively fixed with a front-end adjustable angle temperature control air knife (114) and a rear-end adjustable angle temperature control air knife (116) by a universal shaft. 15), the vacuum adsorption platform (105) is located above the inkjet platform (106), the transmission surface of the transmission roll paper (107) is located above the vacuum adsorption platform (105) and the two ends are respectively fixed on the unwinding roller (108) and the winding roller (111), the unwinding roller (108) and the winding roller (111) are respectively fixed on the unwinding motor (109) and the winding motor (110), and the movement of the transmission roll paper (107) is driven by the winding cooperation of the unwinding motor (109) and the winding motor (110).

7. The device for preparing a perovskite thin film according to claim 5, characterized in that: The pre-annealing unit comprises a preheating zone platform (129), a preheating zone temperature sensor (130), a preheating zone vacuum adsorption vent (131) and a preheating zone heater (132); the preheating zone platform (129) is located above the preheating zone heater (132); and the preheating zone temperature sensor (130) and the preheating zone vacuum adsorption vent (131) are both located below the preheating zone platform (129).

8. The device for preparing a perovskite thin film according to claim 5, characterized in that: The annealing unit comprises an annealing zone platform (133), an annealing zone heater (136) located below the annealing zone platform (133), and an annealing light box (116) located above the annealing zone platform (133). A light box gas guide column (117), a nitrogen source (118), a light source (119), a substrate temperature detection sensor (122), and an annealing zone humidity monitoring sensor (123) are arranged inside the annealing light box (116). The nitrogen source (118) and the light source (119) are arranged in sequence in a horizontal direction. An exhaust fan (120) and a fresh air inlet (121) are provided on the top of the annealing light box (116).

9. The device for preparing a perovskite thin film according to claim 5, characterized in that: The rapid cooling unit comprises a cooling zone platform (137), a cooling zone temperature sensor (138), and a cooling zone vacuum adsorption vent (139).

10. The device for preparing a perovskite thin film according to claim 5, characterized in that: The annealing conveying unit comprises a base conveyor belt (125), a base conveyor belt auxiliary positioning roller (126), a base conveyor belt drive roller (127) and a base conveyor belt drive roller motor (128); the base conveyor belt (125) is wound around the base conveyor belt auxiliary positioning roller (126) and the base conveyor belt drive roller (127); and the base conveyor belt drive roller motor (128) is fixed inside the base conveyor belt drive roller (127) to drive the base conveyor belt drive roller (127) to rotate.

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