Actuator and high-speed driving optical device

Abstract

An actuator has a fixed member and a driven member that is movable relative to the fixed member. Opposite magnetic members are disposed on a pair of opposing surfaces of the driven member and the fixed member facing each other, and form a predetermined gap along the Z-axis by repulsive force of each of the opposite magnetic members. A first magnetic field generation unit that applies a magnetic force to a magnetic member provided to a driven member is provided to a fixed member.

Description

Technical Field

[0001] The present invention relates to an actuator suitable for driving a MEMS device, for example, and a high-speed driving optical device having the actuator. Background Art

[0002] As an actuator for driving a MEMS device, for example, the following Patent Document 1 is known. In conventional actuators, including Patent Document 1, current is passed through a coil via a hinge supporting a driven component, such as a mirror, to which is mounted. This rotates the hinge, drives the driven component, and thus moves the mirror at high speed.

[0003] However, in conventional actuators, including that disclosed in Patent Document 1, the driven component is equipped with a driving coil, requiring a hinge or the like to connect the driven component to a fixed component. Furthermore, the hinge or the like is wired, and the hinge's rigidity must be maintained to improve its durability. However, increasing the rigidity of the hinge supporting the driven component makes it difficult to twist, potentially making high-speed driving of the driven component difficult.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: WO2019 / 065746 Summary of the Invention

[0007] Technical problem to be solved by the invention

[0008] The present invention has been made in view of such actual circumstances, and an object of the present invention is to provide an actuator capable of high-speed driving of a driven member and having excellent durability, and a high-speed driven optical device using the actuator.

[0009] Technical solutions to technical problems

[0010] In order to achieve the above-mentioned object, one aspect of the present invention provides an actuator, wherein:

[0011] A fixed component and a driven component capable of relative movement with respect to the fixed component.

[0012] Opposing magnetic members are disposed on a pair of opposing surfaces of the driven member and the fixed member, and the opposing magnetic members repel each other by their respective magnetic forces to form a predetermined gap along the first axis.

[0013] The first magnetic field generating unit that applies a magnetic force to the opposing magnetic member provided on the driven member to change the length of the predetermined gap between the opposing magnetic members is provided on the fixing member.

[0014] In an actuator according to one aspect of the present invention, a pair of relative magnetic components are arranged on a pair of opposite surfaces of a driven component and a fixed component facing each other, and the pair of relative magnetic components form a predetermined gap along a first axis (e.g., the Z axis) by their respective magnetic repulsion. There is no need to supply current to the relative magnetic components provided on the driven component, and there is no need to connect the fixed component and the driven component using a high-rigidity hinge or the like. Therefore, the driven component can be magnetically suspended relative to the fixed component without any connection to the fixed component. Alternatively, the driven component can be connected to the fixed component using an elastic component on the basis of being magnetically suspended relative to the fixed component.

[0015] In short, because the driven component is magnetically levitated relative to the fixed component, the magnetic field from the first magnetic field generating unit generates magnetic resonance between the opposing magnetic component provided on the driven component and the first magnetic field generating unit, making it easier to drive the driven component at high speed relative to the fixed component. Furthermore, since the driven component is magnetically levitated relative to the fixed component without any connection, the durability of the hinge is not a concern, thus improving the durability of the actuator.

[0016] Furthermore, in a structure where the driven component is magnetically levitated relative to the stationary component and then connected to the stationary component by an elastic component, the stress acting on the elastic component is reduced compared to a structure where the driven component's load is supported solely by the elastic component, resulting in improved actuator durability. Furthermore, the mechanical resonance of the elastic component can be exploited to drive the driven component at high speed.

[0017] Preferably, the driven component has a first surface and a second surface located on opposite sides of each other. In addition, the relative magnetic component provided on the driven component may include a first movable magnetic component provided on the first surface, and a second movable magnetic component provided on the second surface. In addition, the relative magnetic component provided on the fixed component may include a first fixed magnetic component facing the first movable magnetic component, and a second fixed magnetic component facing the second movable magnetic component. In addition, the first magnetic field generating unit may be fixed to the fixed component at a position where it appropriately applies a magnetic force to at least one of the first movable magnetic component and the second movable magnetic component.

[0018] With this configuration, the driven member can be easily magnetically levitated relative to the fixed member, and magnetic resonance can be easily generated between the opposing magnetic member provided on the driven member and the first magnetic field generating unit.

[0019] Preferably, the first movable magnetic component has at least one pair of first end side magnetic components, the at least one pair of first end side magnetic components are located on opposite sides of each other along a second axis (for example, the X axis) perpendicular to the first axis, and are provided near the end of the driven component.

[0020] The second movable magnetic member includes a pair of second end-side magnetic members located on opposite sides of the first end-side magnetic member along the first axis of the driven member.

[0021] This structure facilitates magnetic levitation of the driven component relative to the fixed component, and facilitates rapid change of the inclination angles of the first and second surfaces of the driven component using the center of the driven component as a fulcrum. Consequently, the actuator can be used for high-speed driving of optical devices such as mirror devices.

[0022] The fixed component may include a first axis position sensor that detects the relative position of the driven component relative to the fixed component along the first axis, and a first axis control unit that controls the magnetic force acting on the first magnetic field generating unit based on a detection signal from the first axis position sensor. This configuration facilitates magnetic levitation of the driven component relative to the fixed component and facilitates the generation of magnetic resonance between the opposing magnetic component provided on the driven component and the first magnetic field generating unit.

[0023] Preferably, a second-axis movable magnetic component is mounted between the pair of first end-side magnetic components located on the first surface of the driven component, and the second-axis movable magnetic component controls the movement of the driven component along the second axis.

[0024] A second magnetic field generating portion is disposed on the fixed member facing the second-axis movable magnetic member with a predetermined gap therebetween. The second magnetic field generating portion is disposed so as to be able to exert a magnetic force on the second-axis movable magnetic member.

[0025] With this configuration, when the driven member may be displaced relative to the fixed member along the second axis due to gravity or the like, the second magnetic field generating unit can apply force to the second-axis movable magnetic member to correct the dislocation of the driven member.

[0026] Preferably, the fixing member includes a second shaft position sensor, the second shaft position sensor detecting a relative position of the driven member relative to the fixing member along the second axis.

[0027] The device further includes a second axis control unit that controls the magnetic force acting on the second magnetic field generating unit based on a detection signal of the second axis position sensor.

[0028] With such a configuration, for example, when the driven component may be misaligned relative to the fixed component along the second axis due to the influence of gravity, the second axis control unit can control the second magnetic field generating unit so that the second axis position sensor detects the misalignment and corrects the misalignment of the driven component.

[0029] A reflective mirror for reflecting light may be provided between the pair of second end-side magnetic members located on the second surface of the driven member. With this configuration, the actuator according to one aspect of the present invention can be applied to a high-speed driving mirror device or the like.

[0030] The first movable magnetic component may include at least one pair of third-end-side magnetic components, the at least one pair of third-end-side magnetic components being located on opposite sides of each other along a third axis (e.g., the Y-axis) perpendicular to the first and second axes, and being disposed near an end of the driven component. Furthermore, the second movable magnetic component may include a pair of fourth-end-side magnetic components, the pair of fourth-end-side magnetic components being located on opposite sides of the third-end-side magnetic components along the first axis of the driven component.

[0031] This configuration allows the driven member to be rotationally driven about a center imaginary line parallel to the third axis of the driven member, and also allows the driven member to be rotationally driven about a center imaginary line parallel to the second axis of the driven member. As a result, the first and second surfaces of the driven member can be tilted in all directions about the second and third axes, with the centers of these surfaces serving as fulcrums.

[0032] The fixed component may include a first axis position sensor that detects the relative position of the third end-side magnetic component relative to the fixed component along the first axis, and a first axis control unit that controls the magnetic force acting on the first magnetic field generating unit based on a signal from the first axis sensor. This configuration facilitates magnetic levitation of the driven component relative to the fixed component and facilitates the generation of magnetic resonance between the opposing magnetic component provided on the driven component and the first magnetic field generating unit.

[0033] A third-axis movable magnetic component may be mounted between the pair of third-end-side magnetic components located on the first surface of the driven component, the third-axis movable magnetic component controlling movement of the driven component along the third axis. Furthermore, a third magnetic field generating portion may be disposed on the fixed component facing the third-axis movable magnetic component with a predetermined gap therebetween, the third magnetic field generating portion being configured to exert a magnetic force on the third-axis movable magnetic component.

[0034] With this configuration, when the driven member may be displaced relative to the fixed member along the third axis due to gravity or the like, the third magnetic field generating unit can apply force to the third-axis movable magnetic member to correct the dislocation of the driven member.

[0035] The fixed component may include a third-axis position sensor that detects the relative position of the driven component relative to the fixed component along the third axis. Furthermore, a third-axis control unit may be provided that controls the magnetic force acting on the third magnetic field generating unit based on a detection signal from the third-axis position sensor.

[0036] Through such a configuration, for example, when the driven component may be misaligned relative to the fixed component along the third axis due to the influence of gravity, etc., the third axis control unit can control the third magnetic field generating unit so that the third axis position sensor detects the misalignment and corrects the misalignment of the driven component.

[0037] The third-axis control unit may be a separate control unit from the second-axis control unit, but is preferably a control unit that cooperates with the second-axis control unit. Alternatively, the third-axis control unit may be a common and identical control unit. By cooperating (or serving as a combination of) the second-axis control unit and the third-axis control unit, these control units can control to suppress deviation in the second-axis direction or the third-axis direction, and can also control to suppress rotational motion of the driven component centered about the first axis.

[0038] For the same reason, the second axis position sensor and the third axis position sensor can be different sensors or the same universal sensor. In addition, the second axis control unit and / or the third axis control unit preferably cooperate with the first axis control unit, or a single control unit can also serve as the first axis control unit.

[0039] Preferably, the counter magnetic member provided on the driven member has a magnetic film having a thickness of 300 μm or less and integrated with the surface of the driven member.

[0040] Preferably, the magnetic film is a film comprising SmCo5 and Sm2Co 17 A magnetic film having such a structure has excellent magnetic properties and can be easily manufactured by, for example, a molten salt impregnation method.

[0041] Preferably, the magnetic film has a multilayer structure, wherein the multilayer structure sequentially comprises a Co layer, a Sm2Co 17 film, and SmCo5 film.

[0042] Preferably, the Co layer and the Sm2Co 17 Between the films, and the Sm2Co 17 There is no intervening layer between the film and the SmCo5 film.

[0043] Preferably, the easy magnetization axis of the SmCo5 film is oriented perpendicularly to the surface of the Co layer, and the degree of orientation of the easy magnetization axis relative to the perpendicular direction is greater than 90%. Such a structured magnetic film has excellent magnetic properties and can be easily manufactured, for example, by molten salt impregnation.

[0044] The driven member is preferably magnetically suspended with respect to the fixed member without any contact therewith, but may be connected via an elastic member that controls movement of the driven member along the second axis.

[0045] One aspect of the present invention provides a high-speed drive optical device including any one of the actuators described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1A This is a schematic cross-sectional view of a high-speed driven mirror device including an actuator according to one embodiment of the present invention.

[0047] Figure 1B This is a schematic cross-sectional view of a high-speed driven optical device including an actuator according to another embodiment of the present invention.

[0048] Figure 2A1 Is to indicate that it is assembled along Figure 1A FIG. 1 is a plan view showing the arrangement of the magnetic member and the like of the first fixing member of the IIAI-IIAI line.

[0049] Figure 2A2 Is to indicate that it is assembled along Figure 1A FIG. 1 is a plan view showing the arrangement of magnetic components of driven components along line IIAII-IIAII.

[0050] Figure 2A3 Is to indicate that it is assembled along Figure 1A FIG. 1 is a plan view showing the arrangement of the magnetic member and the like of the second fixing member along the line IIAIII-IIAIII shown.

[0051] Figure 2B1 yes Figure 1B The high-speed drive mirror device shown is Figure 2A1 Corresponding top view.

[0052] Figure 2B2 yes Figure 1B The high-speed drive mirror device shown is Figure 2A2 Corresponding top view.

[0053] Figure 2B3 yes Figure 1B The high-speed drive mirror device shown is Figure 2A3 Corresponding top view.

[0054] Figure 3 yes Figure 1A An exploded perspective view of the high-speed driven mirror device shown.

[0055] Figure 4A Is set at Figure 1A A cross-sectional view of the main parts of the magnetic component of the driven component is shown.

[0056] Figure 4B1 Yes Figure 4A A cross-sectional view of the main parts of the manufacturing process of the magnetic component is shown.

[0057] Figure 4B2 It means next Figure 4B1 Cross-sectional view of the main parts of the manufacturing process.

[0058] Figure 4B3 It means next Figure 4B2 Cross-sectional view of the main parts of the manufacturing process.

[0059] Figure 5 Yes Figure 3 FIG. 4 is a graph showing simulation results of the floating performance of a high-speed driven mirror device. DETAILED DESCRIPTION

[0060] Hereinafter, the present invention will be described based on the embodiments shown in the drawings.

[0061] Hereinafter, embodiments shown in the drawings will be described.

[0062] First embodiment

[0063] like Figure 1A As shown, a high-speed driven mirror device 100, which is an example of a high-speed driven optical device according to one embodiment of the present invention, includes an actuator 102. The actuator 102 includes a first fixed component 10, a second fixed component 20, and a driven component 30. In this embodiment, the driven component 30 is located between the first fixed component 10 and the second fixed component 20 along the Z axis (first axis). The driven component 30 is magnetically levitated by a unit described later, so that it does not contact the first fixed component 10, the second fixed component 20, or any other components.

[0064] The driven component 30 is capable of relative movement along the Z-axis, the X-axis (second axis), and the Y-axis (third axis) relative to the first fixed component 10 and the second fixed component 20. While the first fixed component 10 and the second fixed component 20 are components that cannot move relative to the driven component 30, these components 10 and 20 may sometimes move along with the driven component 30. For example, if the fixed components 10 and 20 are mounted on a vehicle such as a car, the fixed components 10 and 20 move along with the driven component 30 as the vehicle moves.

[0065] In addition, in this embodiment, the X-axis, Y-axis, and Z-axis are perpendicular to each other. In the figure, the Z-axis coincides with the up-down direction (vertical direction). However, in the actual device 100, the Z-axis does not necessarily need to be parallel to the vertical direction.

[0066] The driven member 30 has a first surface 34a and a second surface 34b located on opposite sides of each other along the Z axis. Figure 1A In the figure, the driven component 30 includes a substrate 34. The lower surface of the substrate 34 along the Z axis is defined as a first surface 34a, and the upper surface of the substrate 34 along the Z axis is defined as a second surface. A reflector is provided on the second surface 34b, which reflects incident laser light L1 at a predetermined angle. Laser light L1 passes through the opening 21 formed in the center of the plate-shaped second fixing portion 20 and is incident on the second surface 34b of the substrate 34. Laser light L1 is then reflected by the reflector formed on the second surface 34b and emitted to the outside through the opening 21 of the second fixing portion 20.

[0067] A first movable magnetic component 321 is provided on the first surface 34a of the substrate 34, serving as the driven component 30, and a second movable magnetic component 322 is provided on the second surface 34b. The first movable magnetic component 321 includes at least one pair of first end-side magnetic components 32a1 and 32b1, which are located on opposite sides of the rectangular substrate 34 along the X-axis and are disposed near each end of the substrate 34. The second movable magnetic component 322 includes a pair of second end-side magnetic components 32a2 and 32b2, which are located on opposite sides of the first end-side magnetic components 32a1 and 32b1, respectively, along the Z-axis of the substrate 34.

[0068] like Figure 2A2 As shown, when viewed from the Z-axis direction, a pair of first end-side magnetic components 32a1 and 32b1 and a pair of second end-side magnetic components 32a2 and 32b2 are formed slenderly along sides parallel to the Y-axis at the ends along the X-axis of the rectangular substrate 34.

[0069] In this embodiment, if Figure 2A2 As shown, the first movable magnetic component 321 has at least one pair of third end-side magnetic components 32c1 and 32d1, and the at least one pair of third end-side magnetic components 32c1 and 32d1 are located on opposite sides of each other along the Y-axis of the rectangular substrate 34 and are provided near each end of the substrate 34. The second movable magnetic component 322 has a pair of fourth end-side magnetic components 32c2 and 32c2, and the pair of fourth end-side magnetic components 32c2 and 32c2 are located on opposite sides of the third end-side magnetic components 32c1 and 32d1 along the Z-axis of the substrate 34.

[0070] When viewed in the Z-axis direction, a pair of third end-side magnetic components 32c1 and 32d1, and a pair of fourth end-side magnetic components 32c2 and 32d2 are formed elongated along sides parallel to the X-axis at the ends of the rectangular substrate 34 along the Y-axis. On the first surface 34a of the substrate 34, end-side magnetic components 32a1, 32b1, 32c1, and 32d1 are formed along the four sides of the rectangular substrate 34, respectively. These four end-side magnetic components 32a1, 32b1, 32c1, and 32d1 are formed on the first surface 34a in an independent and non-contact manner.

[0071] In addition, on the second surface 34b of the substrate 34, end side magnetic components 32a2, 32b2, 32c2, and 32d2 are respectively formed along the four sides of the rectangular substrate 34. These four end side magnetic components 32a2, 32b2, 32c2, and 32d2 are formed on the second surface 34b in a manner that is independent of each other and does not contact each other.

[0072] On the second surface 34b of the substrate 34, end-side magnetic components 32a2, 32b2, 32c2, and 32d2 are separately arranged along the four sides of the rectangular substrate 34. A reflector (not shown) of, for example, a rectangular or other shape is provided in the center of the second surface of the substrate 34. Furthermore, on the first surface 34a of the substrate 34, end-side magnetic components 32a1, 32b1, 32c1, and 32d1 are separately arranged along the four sides of the rectangular substrate 34. In the center of the first surface of the substrate 34, an X-axis movable magnetic component 36a and a Y-axis movable magnetic component 36b are provided in a predetermined pattern.

[0073] The X-axis movable magnetic component 36a and the Y-axis movable magnetic component 36b are formed in a predetermined pattern on the surface of the first surface 34a of the substrate 34 by the same method (described later) as these components so as to be surrounded by the four end side magnetic components 32a1, 32b1, 32c1, and 32d1.

[0074] like Figure 1A and Figure 2A1 As shown, first fixed magnetic members 12a and 12b are provided on the surface of the first fixed member 10 at positions facing the first surface 34a of the substrate 34, facing the first end-side magnetic members 32a1 and 32b1, respectively. The first fixed magnetic members 12a and 12b facing the first end-side magnetic members 32a1 and 32b1, respectively, are magnetized so as to generate a magnetic repulsion force against each other.

[0075] like Figure 2A1 and Figure 2A2As shown, first fixed magnetic members 14a and 14b are provided on the surface of the first fixed member 10 at positions facing the first surface 34a of the substrate 34, facing the third end-side magnetic members 32c1 and 32d1, respectively. The first fixed magnetic members 14a and 14b facing the third end-side magnetic members 32c1 and 32d1, respectively, are magnetized so as to generate a magnetic repulsion force against each other.

[0076] like Figure 1A and Figure 2A3 As shown, on the surface (lower surface along the Z axis) of the second fixed member 20, second fixed magnetic members 22a and 22b are provided so as to face the second end-side magnetic members 32a2 and 32b2, respectively, at positions opposing the second surface 34b of the substrate 34. The second fixed magnetic members 22a and 22b, facing the second end-side magnetic members 32a2 and 32b2, respectively, are magnetized so as to generate a magnetic repulsion force against each other.

[0077] like Figure 2A2 and Figure 2A3 As shown, second fixed magnetic members 24a and 24b are provided on the surface of the second fixed member 20 at positions opposing the second surface 34b of the substrate 34, facing the fourth end-side magnetic members 32c2 and 32d2, respectively. The second fixed magnetic members 24a and 24b facing the fourth end-side magnetic members 32c2 and 32d2, respectively, are magnetized so as to generate a magnetic repulsion force against each other.

[0078] That is, the four end-side magnetic components 32a1, 32b1, 32c1, and 32d1 formed on the first surface 34a of the substrate 34 face each other with the four first fixed magnetic components 12a, 12b, 12c, and 12d formed on the first fixed component 10, respectively, with a predetermined gap therebetween, forming mutually repelling opposing magnetic components. Furthermore, the four end-side magnetic components 32a2, 32b2, 32c2, and 32d2 formed on the second surface 34b of the substrate 34 face each other with the four second fixed magnetic components 22a, 22b, 22c, and 22d formed on the second fixed component 20, respectively, with a predetermined gap therebetween, forming mutually repelling opposing magnetic components.

[0079] In this embodiment, first magnetic field generating units 40 are provided on the surface of the first fixed member 10, around or near each of the first fixed magnetic members 12a through 12d. Each first magnetic field generating unit 40 comprises an energizable coil device and is controlled by the X-axis control unit (first-axis control unit) of the control unit 50. The first magnetic field generating units 40 are capable of applying a magnetic field to each of the end-side magnetic members 32a1 through 32d1 of the nearest first movable magnetic member 321, thereby causing the end of the substrate 34 to slightly move along the Z-axis.

[0080] like Figure 2A2As shown, an X-axis movable magnetic component 36a for controlling the movement of the substrate 34 along the X-axis and a Y-axis movable magnetic component 36b for controlling the movement of the substrate 34 along the Y-axis are provided between a pair of first end side magnetic components 32a1, 32b1 located on the first surface 34a of the substrate 34 and between a pair of third end side magnetic components 32c1, 32d1.

[0081] These movable magnetic members 36a and 36b are made of, for example, a permanent magnet film described later, and are integrally formed on the surface of the substrate similarly to the magnetic members 32a1 to 32d1 and 32a2 to 32d2 described above.

[0082] A second magnetic field generating unit 60a and a third magnetic field generating unit 60b are disposed on the first fixed member 10, which faces the X-axis movable magnetic member 36a and the Y-axis movable magnetic member 36b with a predetermined gap therebetween. The second magnetic field generating unit 60a and the third magnetic field generating unit 60b are capable of applying magnetic forces to the X-axis and Y-axis movable magnetic members 36a and 36b, respectively. The second magnetic field generating unit 60a and the third magnetic field generating unit 60b are each composed of a coil device that generates a magnetic field and are controlled by the X-axis control unit (second axis control unit) and the Y-axis control unit (third axis control unit) of the control unit 50.

[0083] The magnetic field generated by the second magnetic field generating unit 60a acts on Figure 2A2 The X-axis movable magnetic component 36a shown in FIG. 1 controls the substrate 34 equipped with the X-axis movable magnetic component 36a to move along the X-axis, and controls the X-axis direction relative position of the driven component 30 relative to the fixed components 10 and 20 to be kept constant. In addition, the magnetic field generated by the third magnetic field generating unit 60b acts on Figure 2A2 The Y-axis movable magnetic member 36 b controls the base plate 34 mounted thereon to move along the Y-axis, and controls the driven member 30 to maintain a constant relative position in the Y-axis direction with respect to the fixed members 10 and 20 .

[0084] Furthermore, it is preferred that the first fixing member 10, the second fixing member 20, or other fixing members be equipped with a position sensor 70 that detects the relative position of the driven member 30 relative to these fixing members in at least the X-axis and Z-axis directions. In this embodiment, a magnetic sensor such as a Hall element is used as the position sensor 70, but the present invention is not limited to this and an optical sensor or the like may also be used.

[0085] In this embodiment, the position sensor 70 detects the relative position of the driven component 30 in at least the X-axis and Z-axis directions. However, the sensor 70 may also detect the relative position of the driven component 30 or the substrate 34a along the Z-axis. Alternatively, the sensors that detect the relative position of the driven component 30 in the X-axis, Y-axis, and Z-axis directions may be different sensors. Similarly, in this embodiment, the control unit 50 includes an X-axis control unit, a Y-axis control unit, and a Z-axis control unit, but these control units may be different control units. However, it is preferred that the X-axis control unit, the Y-axis control unit, and the Z-axis control unit cooperate with each other.

[0086] Figure 2A1 The coil pattern of the magnetic field generating unit 60a shown in FIG. Figure 2A2 The arrangement pattern of the movable magnetic member 36a shown is not particularly limited as long as the magnetic field generated by the magnetic field generating unit 60a is applied to the movable magnetic member 36a and an electromagnetic force along the X axis is applied to the movable magnetic member 36a. Figure 2A1 The coil pattern of the magnetic field generating unit 60b shown in FIG. Figure 2A2 The arrangement pattern of the movable magnetic member 36b shown is not particularly limited as long as the magnetic field generated by the magnetic field generating unit 60b is applied to the movable magnetic member 36b and an electromagnetic force along the Y axis acts on the movable magnetic member 36b.

[0087] The sensor 70 detects, for example, the relative position of the substrate 34 in the X-axis direction and the Y-axis direction relative to the fixed members 10 and 20, and transmits the detection signals to the control unit 50. The X-axis control unit and the Y-axis control unit of the control unit 50 control the magnetic fields generated by the magnetic field generating units 60a and 60b based on the detection signals, and apply the magnetic fields to the movable magnetic members 36a and 36b to change the intensity and polarity of the magnetic fields, thereby controlling the relative position of the substrate 34 relative to the fixed members 10 and 20 along the X-axis and the Y-axis.

[0088] Next, the structures of the magnetic members 32a1 to 32d1, 32a2 to 32d2, and 36a and 36b provided on the first surface 34a and the second surface 34b of the substrate 34 will be described in detail.

[0089] like Figure 4A As shown, these magnetic components 32a1 to 32d1, 32a2 to 32d2 and 36a, 36b are formed on the surface of the substrate 34 (on the Figure 1A The permanent magnet film 35 is formed integrally on the first surface 34a and the second surface 34b. The magnetic film 35 includes, for example, a first film 35a formed directly on the surface of the substrate 34 and a second film 35b formed directly on the first film 35a. In this embodiment, the first film 35a is made of Sm2Co 17The second film 35b is composed of a SmCo5 film. Preferably, there is no intervening layer between the surface of the substrate 34 and the first film 35a, or between the first film 35a and the second film 35b (between layers in the multilayer structure). The intervening layer is composed of a non-magnetic material such as an oxide layer, a resin layer, or an adhesive layer thicker than a resolution of 0.5 to 4 nm that can be observed using a scanning electron microscope (SEM). However, an intervening layer thinner than the resolution of 0.5 to 4 nm may exist.

[0090] In this embodiment, the Sm2Co forming the first film 35a 17 The film contains Sm2Co 17 As the main phase. Sm2Co 17 Using Th2Zn 17 Type of crystal structure, an alloy of Sm and Co. Sm2Co 17 The ratio of Sm atoms to Co atoms in the stoichiometric ratio can deviate from the stoichiometric ratio. For example, when various elements are added to improve magnetic properties, Sm2Co 17 The ratio of Sm atoms to Co atoms in Sm2Co is not necessarily a stoichiometric ratio. 17 If Th2Zn 17 If the crystal structure of the type is too large, the ratio of Sm atoms to Co atoms can deviate from the stoichiometric ratio.

[0091] In this specification, "as the main phase" means the largest mass proportion in the film. 17 The film can have 17 Different phases, such as other crystalline phases and grain boundary phases. 17 Sm2Co in the film 17 The ratio of can be, for example, 70% by mass or more, 80% by mass or more, 90% by mass or more, or 95% by mass or more.

[0092] The thickness of the first film 35a is not particularly limited and can be appropriately selected depending on the intended use. For example, it can be set to 1 to 100 μm. The thickness of the first film 35a can be measured by embedding the magnetic film 35 in a resin, grinding the resulting sample to expose a cross section of the magnetic film 35 from the resin, and observing the exposed cross section of the magnetic film 35 using a scanning electron microscope (SEM).

[0093] The SmCo5 film serving as the second film 35b contains SmCo5 as a main phase. SmCo5 has a CaCu5-type crystal structure and is an alloy of Sm and Co. The ratio of Sm atoms to Co atoms in SmCo5 may deviate from the stoichiometric ratio. For example, when various elements are added to improve magnetic properties, the ratio of Sm atoms to Co atoms in SmCo5 may not necessarily be the stoichiometric ratio. Therefore, if SmCo5 has a CaCu5-type crystal structure, the ratio of Sm atoms to Co atoms may deviate from the stoichiometric ratio.

[0094] The SmCo5 film may have a phase different from SmCo5, such as another crystalline phase and a grain boundary phase. The proportion of SmCo5 in the SmCo5 film may be, for example, 70% by mass or more, 80% by mass or more, 90% by mass or more, or 95% by mass or more. As a different phase, an Sm-rich phase having a higher Sm content than SmCo5 can be cited.

[0095] The crystal orientation [00L] of the SmCo5 film is oriented in the thickness direction of the SmCo5 film, that is, in the direction perpendicular to the film surface. L is an arbitrary natural number. Even when L is an arbitrary number, it refers to the same direction. L is 2, for example. The crystal orientation [00L] of the SmCo5 film is oriented in the thickness direction of the SmCo5 film, which means that the orientation degree is 50% or more. This orientation degree is based on the Lotgering method after vector correction, and represents the ratio of the sum of the diffraction peaks based on the crystal orientation [00L] component to the sum of the diffraction peaks based on the crystal plane (hkl) of the SmCo5 film. From the perspective of further improving the surface magnetic flux density of the magnetic film 100, the orientation degree is preferably 90% or more, and more preferably 95% or more.

[0096] To further increase the surface magnetic flux density of the magnetic film 35, the thickness of the SmCo5 film is preferably 10 μm or greater. The upper limit of the thickness of the SmCo5 film is not particularly limited, but may be, for example, 300 μm or less. The thickness of the second film 35b composed of the SmCo5 film can be measured in the same manner as the thickness of the first film 35a.

[0097] The film surface of the second film 35b opposite to the surface in contact with the first film 35a may be partially or entirely covered with another film, such as a Sm2O3 film, or may not be covered. The total thickness of the magnetic film 35 including the first film 35a and the second film 35b is not particularly limited and can be appropriately varied depending on the application, for example, 0.01 to 2 mm.

[0098] The planar shape of the magnetic film 35 is not particularly limited, and may be, for example, Figure 2A2As shown, along the four sides of the rectangular substrate 34, the four end-side magnetic components 32a1, 32b1, 32c1, and 32d1 are formed in a planar shape, or the four end-side magnetic components 32a2, 32b2, 32c2, and 32d2 are formed in a planar shape. Alternatively, the planar shape of the magnetic film 35 may be a striped shape as shown in the X-axis movable magnetic component 36a and the Y-axis movable magnetic component 36b.

[0099] In this embodiment, the rectangular substrate 34 preferably has a size of about 1 to 10 mm in length and about 1 to 10 mm in width. The planar shape of the magnetic film 35 is about 1 / 10 to 4 / 5 of the length or width of the substrate 34 .

[0100] The surface magnetic flux density of the magnetic film 35 is preferably 5 mT or greater, more preferably 7 mT or greater, and even more preferably 10 mT or greater. The surface magnetic flux density of the magnetic film 35 can be measured by bringing a probe of a Hall element into contact with the film surface of the SmCo5 film of the magnetic film 35 so that the probe follows the film surface and converting the output voltage into magnetic flux density.

[0101] In this embodiment, the first film 35a is considered to function as a yoke and the second film 35b is considered to function as a magnet. That is, the magnetic film 35 includes the first film 35a, which is made of Sm2Co5 having a higher saturation magnetization than the SmCo5 of the second film 35b and a soft magnetic property. 17 Film composition. Thus, Sm2Co 17 The film functions as a back yoke, collecting magnetic flux. Furthermore, the crystal orientation [00L] of the SmCo5 film is oriented in the thickness direction of the SmCo5 film. Specifically, by aligning the SmCo5's easy magnetization axis, or crystal orientation [00L], with the film's thickness direction (the direction perpendicular to the film surface (Z-axis)), the surface magnetic flux density of the magnetic film 35 is increased. Furthermore, SmCo5 has a high Curie point of over 700°C, resulting in excellent thermal stability.

[0102] In this embodiment, the first film 35a is preferably a directly formed substrate as the substrate 34, for example, a Co substrate. When a Co substrate is used as the substrate 34, it is preferably a metal Co plate. The purity of the Co in the Co substrate can be 99% by mass or greater, or 99.998% by mass or greater. Another substrate may be provided beneath the Co substrate. The thickness of the Co substrate is not particularly limited and can be appropriately selected depending on the intended use. For example, it can be 0.01 to 2 mm.

[0103] Next, the method for manufacturing the SmCo-based magnetic film 35 will be described in detail. As an example, a Co substrate will be used as the substrate 34. First, as shown in B1, a substrate 34 composed of a Co substrate is prepared. Then, as shown in Figure 4B2As shown, a stacked film is obtained in which the SmCo 2 film 35α is formed on the surface of the substrate 34 .

[0104] The multilayered magnetic film 35 is preferably manufactured by a molten salt impregnation method or a method applying the molten salt impregnation method. First, a Co substrate and a reaction solution containing an Sm source and a molten salt are prepared. When manufacturing the magnetic film 35, for example, a plate-shaped Co substrate can be prepared.

[0105] When preparing the reaction solution, first, a predetermined inorganic salt is dried to dehydrate it. Examples of the inorganic salt include KCl (potassium chloride), LiCl (lithium chloride), and NaCl (sodium chloride). One inorganic salt may be used, or two or more inorganic salts may be used in combination. The dehydrated inorganic salt is heated to a predetermined temperature to melt the inorganic salt (molten salt). The temperature for melting the inorganic salt can be appropriately determined according to the type of inorganic salt used, and is, for example, preferably 400° C. or higher, more preferably 500° C. or higher, and even more preferably 600° C. or higher.

[0106] A Sm source is added to the above-mentioned molten salt (molten inorganic salt) to obtain a reaction solution. As the Sm source, for example, metal Sm and Sm alloys can be cited. One Sm source can be used, or two or more Sm sources can be used. When the total number of moles of the Sm source and the number of moles of the inorganic salt in the reaction solution is set to 100 mol%, the proportion of the Sm source in the reaction solution is preferably, for example, 0.2 mol% or more and 6 mol% or less. In addition, when adding Sm2Co 17 When adding an additive element to the SmCo layer and / or the SmCo5 layer, it is sufficient to add a raw material containing the desired additive element together with an Sm source to the molten salt.

[0107] Next, the reaction solution is brought into contact with the surface of the Co substrate, causing the Sm source in the molten salt to react and diffuse toward the surface of the Co substrate, thereby forming a magnetic film containing Sm on the inner peripheral surface of the Co substrate. This step is called a reaction and diffusion step.

[0108] During the reaction diffusion process for manufacturing the magnetic film 35, a plate-shaped Co substrate is immersed in a reaction solution at a specified temperature for a specified time to form a magnetic coating containing Sm on both surfaces of the Co substrate. However, if the magnetic film 35 is immersed directly in the reaction solution, a magnetic coating containing Sm will also form in areas where the magnetic coating is not required, reducing the yield. Therefore, it is necessary to study the use of an inert film to cover areas where the magnetic coating is not required to suppress the reaction diffusion.

[0109] For example, it is preferable to form a mask of a high-melting-point material in unnecessary areas. Examples of high-melting-point materials include W, Ta, Nb, Mo, or alloys containing at least one of these elements. The mask of the high-melting-point material can be formed, for example, by vapor deposition. After forming a mask of the high-melting-point material on the outer surface and end faces, the Co substrate is immersed in a reaction solution. The Sm source reacts and diffuses only in the necessary areas of the Co substrate, thereby forming a magnetic film containing Sm.

[0110] During the reaction-diffusion step, the temperature of the reaction solution is maintained at a temperature at which the inorganic salt remains molten. To effectively form a magnetic coating, the reaction solution temperature is preferably between 500°C and 900°C, and more preferably between 650°C and 800°C. The reaction time can be appropriately set based on the reaction temperature and the proportion of the Sm source in the reaction solution to form a magnetic coating of the desired thickness. For example, the reaction time can be set between 1 hour and 48 hours.

[0111] The magnetic film formed on the surface of the Co matrix during the reaction diffusion process is Sm2Co 17 The precursor of the SmCo layer and the SmCo5 layer. Specifically, the magnetic film after the reaction diffusion process preferably contains SmCo2 as the main phase. SmCo2 is an alloy of Sm and Co having a MgCu2-type crystal structure. If the main phase SmCo2 has a MgCu2-type crystal structure, the ratio of Sm atoms to Co atoms in SmCo2 may deviate slightly from the stoichiometric ratio. For example, when an additive element is added to improve magnetic properties, the ratio of Sm atoms to Co atoms may deviate slightly from the stoichiometric ratio.

[0112] In addition to the main phase, the magnetic coating may also contain a different phase such as an Sm-rich phase having a higher Sm ratio than SmCo2, and a grain boundary phase. The SmCo2 content in the magnetic coating may be set to 50 wt% or more, preferably 70 wt% or more, and more preferably 90 wt% or more.

[0113] Furthermore, after the reaction diffusion step, the Co substrate on which the magnetic film is formed may be washed with an organic solvent such as ethanol or pure water.

[0114] Next, the Co substrate on which the magnetic film containing SmCo2 is formed is heated at a predetermined temperature for a predetermined time (heating step). In this heating step, the reaction between SmCo2 and the Co of the substrate further proceeds, and Sm2Co is generated from the surface of the Co substrate and the magnetic film. 17 layer and SmCo5 layer.

[0115] The heating rate in the heating process is not particularly limited, but is preferably 1°C / min. or more and 20°C / min. or less. The holding temperature (reaching temperature) is preferably 800°C or more and 1200°C or less, more preferably 850°C or more and 1150°C or less, and even more preferably 900°C or more and 1100°C or less. The holding time at the above holding temperature is, for example, preferably 2 hours or more and 48 hours or less. In addition, the cooling rate during cooling after heating is preferably 5°C / min. or more, more preferably 10°C / min. or more, and even more preferably 20°C / min. or more.

[0116] The atmosphere of the heating step is not particularly limited, but an inert gas atmosphere is preferred from the viewpoint of suppressing oxidation of the SmCo 5 layer. As the inert gas, for example, Ar gas and N 2 gas may be used.

[0117] The multilayered magnetic film 35 can be manufactured through the above-mentioned steps (reaction diffusion step and heating step). In the magnetic film 35, Sm2Co is formed on the surface of the Co matrix in the order described above. 17 When a mask of a high melting point material is formed on the surface of the Co substrate, the mask of the high melting point material may be removed after the heating step, or the mask of the high melting point material may remain.

[0118] In this embodiment, the magnetic members 12a, 12b, 14a, 14b, 22a, 22b, 24a, and 24b provided on the fixed members 10 and 20 can also be composed of the magnetic member provided on the substrate 34 of the driven member 30 and the magnetic film 35 having the same structure as described above, but can also be composed of a sintered magnet such as a common rare earth magnet, or a bonded magnet. Unlike the magnetic members 32a1 to 32d1, 32a2 to 32d2, and 36a and 36b provided on the substrate 34 of the magnetic levitation, the magnetic members 12a, 12b, 14a, 14b, 22a, 22b, 24a, and 24b provided on the fixed members 10 and 20 are not required to be thinner or lighter.

[0119] According to the actuator 102 of this embodiment having the substrate 34 having the magnetic members 32a1 to 32d1, 32a2 to 32d2, and 36a and 36b formed of the magnetic film 35 as the driven member 30, the following effects can be expected.

[0120] For example, magnetic forces repel each other between the first fixed magnetic components 12a, 12b, 14a, and 14b and the end-side magnetic components 32a1 to 32d1 facing each other, and magnetic forces repel each other between the second fixed magnetic components 22a, 22b, 24a, and 24b and the end-side magnetic components 32a2 to 32d2 facing each other. As a result, the substrate 34, which is the driven component 30, is magnetically suspended between the first fixed component 10 and the second fixed component 20.

[0121] In this state, for example, a signal is sent from the first axis control unit of the control unit 50 to a pair of first magnetic field generating units 40 located on opposite sides of each other along the X-axis, thereby applying a magnetic field at a predetermined frequency to the pair of first end-side magnetic components 32a1 and 32b1 located on opposite sides of each other along the X-axis. The magnetic fields applied to the pair of first end-side magnetic components 32a1 and 32b1 are preferably opposite in phase, for example. For example, while a magnetic field is applied to one end-side magnetic component 32a1 in a direction causing it to move away from the first fixed magnetic component 12a, a magnetic field is applied to the other end-side magnetic component 32b1 in a direction causing it to move toward the first fixed magnetic component 12b.

[0122] By performing this control, the two ends of the magnetically suspended substrate 34 along the X-axis can be caused to pivot (rotate) at a predetermined, small angle at high speed, about the substrate's central axis along the Y-axis. It is believed that magnetic resonance is generated by appropriately selecting the frequency of the magnetic field applied to the pair of first end-side magnetic members 32a1 and 32b1.

[0123] Similarly, for example, a signal is sent from the first axis control unit of the control unit 50 to a pair of first magnetic field generating units 40 located on opposite sides of each other along the Y-axis, thereby applying a magnetic field at a predetermined frequency to the pair of first end-side magnetic components 32c1 and 32d1 located on opposite sides of each other along the Y-axis. The magnetic fields applied to the pair of first end-side magnetic components 32c1 and 32d1 are preferably opposite in phase, for example. For example, while a magnetic field is applied to one end-side magnetic component 32c1 in a direction causing it to move away from the first fixed magnetic component 14a, a magnetic field is applied to the other end-side magnetic component 32d1 in a direction causing it to move toward the first fixed magnetic component 14b.

[0124] By performing this control, the two ends of the magnetically suspended substrate 34 along the Y-axis can be pivoted at high speed at a predetermined, minute angle about the substrate's central axis along the X-axis. It is believed that magnetic resonance occurs by appropriately selecting the frequency of the magnetic field applied to the pair of first end-side magnetic members 32c1 and 32d1.

[0125] Furthermore, the first fixed component 10, the second fixed component 20, or another fixed component is equipped with a Z-axis sensor (not shown) that can measure the relative position of the end-side magnetic components 32a1-32d1 and / or the end-side magnetic components 32a2-32d2 along the Z-axis relative to the fixed component. The detection signal from the Z-axis sensor is input to the first-axis control unit of the control unit 50. The first-axis control unit sends a signal to the first magnetic field generating unit 40, and the magnetic field output from each first magnetic field generating unit 40 is controlled based on the detection signal from the Z-axis sensor, etc. As a result, the micro-angle of the pivot rotation of the magnetically levitated substrate 34, the frequency, the switching of the rotation axis, the sweep width, and other factors can be controlled.

[0126] Thus, in the actuator 102 of this embodiment, opposing magnetic members are arranged on a pair of opposing surfaces of the driven member 30 and the fixed members 10 and 20, and the opposing magnetic members repel each other by their respective magnetic forces, thereby forming a predetermined gap (e.g., Figure 1A , a pair of magnetic components 12a and 32a1). It is not necessary to supply current to the opposing magnetic components 32a1 to 32d1 and 32a2 to 32d2 provided on the driven component 30, and it is not necessary to connect the fixed component 10 or 20 and the driven component 30 using a high-rigidity hinge or the like. Therefore, the driven component 30 can be magnetically suspended relative to the fixed components 10 or 20 without any connection to the fixed components 10 or 20.

[0127] The driven component 30 is magnetically levitated relative to the fixed components 10 and 20. Therefore, the magnetic field from the first magnetic field generating unit 40 generates magnetic resonance between the end-side magnetic components 32a1 to 32d1 provided on the driven component 30 and the first magnetic field generating unit 40, making it easier to pivot the driven component 30 at high speed relative to the fixed components 10 and 20. Furthermore, since the driven component 30 is magnetically levitated relative to the fixed components 10 and 20 without any connection, the durability of the hinge and the like are not a concern, thereby improving the durability of the actuator.

[0128] In addition, in this embodiment, by arranging the substrate 34 serving as the driven component 30 between the fixed components 10 and 20, the driven component 30 is magnetically suspended by the repulsive force of the magnetic force of the magnetic component arranged therebetween, thereby making it easy to magnetically levitate the driven component 30 relative to the fixed components 10 and 20, and to easily generate magnetic resonance between the magnetic components 32a1~32d1 (or 32a2~32d2) provided in the driven component 30 and the first magnetic field generating unit 40.

[0129] Furthermore, in this embodiment, there are at least one pair of first end-side magnetic components 32a1 and 32b1, which are disposed near the ends of the driven component 30 on opposite sides along the X-axis, and a pair of second end-side magnetic components 32a2 and 32b2, which are located on opposite sides of the first end-side magnetic components 32a1 and 32b1 along the Z-axis of the substrate 34. This configuration facilitates magnetic levitation of the driven component 30 relative to the fixed components 10 and 20, and facilitates rapid change of the inclination angles of the first surface 34a and the second surface 34b of the driven component 30 with the center axis of the driven component 30 along the Y-axis serving as a fulcrum.

[0130] Similarly, there are at least one pair of first end-side magnetic components 32c1 and 32d1, which are arranged near the ends of the driven component 30 on opposite sides along the Y-axis, and a pair of second end-side magnetic components 32a2 and 32b2, which are located on opposite sides of the first end-side magnetic components 32c1 and 32d1 along the Z-axis of the substrate 34. With this configuration, it is easy to magnetically levitate the driven component 30 relative to the fixed components 10 and 20, and it is easy to quickly change the inclination angle of the first surface 34a and the second surface 34b of the driven component 30 with the center axis of the driven component 30 along the X-axis as a fulcrum.

[0131] As a result, the substrate 34 can be pivoted about the center axes of both the X-axis and the Y-axis, and the second surface 34b of the driven component 30 can be tilted at high speed in all directions around the X-axis or the Y-axis about the center of the surface. Therefore, the direction of light reflected from the reflector mounted on the second surface 34b can be changed at high speed, enabling two-dimensional scanning of the light. This allows the actuator 102 to be used for high-speed driving of optical devices such as the reflector device 100.

[0132] Furthermore, the stationary member 10 or 20 is provided with a first-axis position sensor (not shown) that detects the relative position of the driven member 30 relative to the stationary member 10 or 20 along the Z-axis. The actuator 102 is provided with a control unit 50 having a first-axis control unit that controls the magnetic force acting on the first magnetic field generating unit 40 based on a signal from the first-axis position sensor. This configuration facilitates magnetic levitation of the driven member 30 relative to the stationary member 10 or 20, and facilitates the generation of magnetic resonance between the magnetic members 32a1 to 32d1 (32a2 to 32d2) provided on the driven member 30 and the first magnetic field generating unit 40.

[0133] Furthermore, in this embodiment, an X-axis movable magnetic component 36a and a Y-axis magnetic component 36b are mounted on the first surface 34a of the substrate 34. Magnetic field generating units 60a and 60b are disposed on the fixed component 10, facing these magnetic components 36a and 36b with a predetermined gap therebetween. The magnetic field generating units 60a and 60b are configured to exert a magnetic force on the magnetic components 36a and 36b. With this configuration, if the driven component 30 is misaligned relative to the fixed component 10 or 20 along the X-axis or Y-axis due to gravity or other factors, the second magnetic field generating units 60a and 60b can exert a force on the movable magnetic component 36a and 36b to correct the misalignment of the driven component 30.

[0134] The fixed member 10 (or 20, and the same applies hereinafter) includes a position sensor 70 that detects the relative position of the driven member 30 relative to the fixed member 10 along the X-axis or Y-axis. The actuator 102 includes a control unit 50 that includes an X-axis control unit and a Y-axis control unit that control the magnetic forces acting on the magnetic field generating units 60a and 60b based on the detection signals from the position sensor 70. With this configuration, if the driven member 30 is likely to be misaligned relative to the fixed member 10 along the X-axis or Y-axis due to the influence of gravity, for example, the control unit 50 can control the magnetic field generating units 60a and 60b so that the position sensor 70 detects the misalignment and corrects the misalignment of the driven member 30.

[0135] In this embodiment, the control unit 50 utilizes the X-axis control unit and the Y-axis control unit in cooperation (or in combination) to suppress deviation in the X-axis or Y-axis directions, and also to suppress rotational motion of the driven component 30 centered about the Z-axis. Furthermore, in this embodiment, the X-axis and Y-axis sensors are composed of a common sensor 70, but they may be separate sensors. Furthermore, in this embodiment, the X-axis and Y-axis control units serve as both the control unit 50 and the Z-axis control unit, but they may be separate control units. However, it is preferred that they cooperate.

[0136] In this embodiment, the magnetic members 32a1 to 32d1, 32a2 to 32d2, and 36a and 36b provided on the substrate 34 are composed of a magnetic film having a thickness of 300 μm or less, and the magnetic film is composed of a SmCo5 film and a Sm2Co 17 The magnetic film of this structure has excellent magnetic properties and can be easily manufactured by, for example, a dissolved salt method. In addition, this structure can achieve a lightweight drive component 30.

[0137] In this embodiment, the magnetic members 32a1 to 32d1, 32a2 to 32d2, and 36a and 36b provided on the substrate 34 have a Co layer, a Sm2Co layer, and a 17The multilayer structure of the film and SmCo5 film. Although the mechanism is not clear, it is believed that by adding Sm2Co 17 The film provides an anisotropic magnet with an easy magnetization axis oriented perpendicularly to the Co layer surface at a degree of orientation of 90% or more. Magnetic films of this structure have excellent magnetic properties and can be easily produced by, for example, a dissolved salt method.

[0138] In this embodiment, the Co layer and the Sm2Co 17 Between the films, and the Sm2Co 17 There is no intervening layer between the film and the SmCo 5 film. A magnetic film having such a structure has excellent magnetic properties and can be easily manufactured by, for example, a dissolved salt method.

[0139] The high-speed drive mirror device 100 of this embodiment can be used, for example, in LiDAR (Light Detection and Ranging). LiDAR, short for Light Detection and Ranging, refers to a remote sensing method (using a sensor to sense from a distant location) that uses near-infrared, visible, or ultraviolet light to illuminate an object and uses a light sensor to capture the reflected light to measure the distance. Alternatively, LiDAR, also known as Laser Imaging Detection and Ranging, typically uses pulsed near-infrared laser light to measure the time it takes for the light to hit the object and bounce back.

[0140] LiDAR's unique ability to accurately detect not only the distance to an object but also its position and shape is expected to be used in highly automated driving systems in automobiles. Furthermore, LiDAR is used in consumer applications such as robotic vacuum cleaners and golf rangefinders, and in industrial equipment for high-precision detection of people and objects in automated guided vehicles (AGVs) and service robots.

[0141] Second embodiment

[0142] like Figure 1B As shown, the high-speed driven mirror device 100A according to another embodiment of the present invention has the following features in addition to the following features: Figure 1A The actuator 102 shown has the same structure as the mirror device 100 of the first embodiment, except for the different actuator 102A, and achieves the same operation and effect.

[0143] In this embodiment, as in the first embodiment, on the substrate 34 of the driven component 30A, the driven component 30A is magnetically levitated relative to the fixed components 10 and 20 by utilizing the magnetic repulsion between the movable magnetic component 321 and the fixed magnetic components 12a, 12b, 14a, and 14b, and the magnetic repulsion between the movable magnetic component 322 and the fixed magnetic components 22a, 22b, 24a, and 24b. Furthermore, in this embodiment, the substrate 34 is connected to the fixed component 10 or 20 by an elastic member 80.

[0144] The elastic member 80 is not particularly limited and may be composed of, for example, a leaf spring or a coil spring, to restrict movement of the driven component 30A along at least the X-axis and / or the Y-axis. For example, the spring force of the elastic member 80 acts between the fixed components 10 and 20 and the driven component 30A to maintain the relative position of the movable magnetic components 321 and 322 and the fixed magnetic components 12a, 12b, 14a, 14b, 22a, 22b, 24a, and 24b. Furthermore, the spring force of the elastic member 80 may also act between the fixed components 10 and 20 to control the position of the substrate 34 along the Z-axis.

[0145] The installation position of the elastic component 80 on the substrate 34 is not particularly limited, as long as it is between the fixing component 10 or 20 and the substrate 34. Examples include a peripheral position of the substrate 34, or any position on the first surface of the substrate 34 on the opposite side of the second surface 34b where the reflector is installed.

[0146] In this embodiment, the driven component 30 is magnetically levitated relative to the stationary components 10 and 20, and is then connected to the stationary components 10 and 20 using an elastic component. This reduces the stress acting on the elastic component compared to a structure in which the load of the driven component 30A is supported solely by the elastic component, resulting in improved actuator durability. Furthermore, the mechanical resonance of the elastic component 80 can be exploited to drive the driven component at high speed.

[0147] Third embodiment

[0148] like Figure 2B1 to Figure 2B3 As shown, the high-speed driving mirror device of another embodiment of the present invention has the following features in addition to Figure 1A The actuator 102 shown or Figure 1B Except for the actuator 102B which is different from the actuator 102A shown, the mirror device 100 or 100A has the same structure and achieves the same operation and effect.

[0149] The actuator 102B of this embodiment has at least a pair of first end side magnetic components 32a1 and 32b1 arranged near the ends of the driven component 30B located on opposite sides along the X-axis, and has a pair of second end side magnetic components 32a2 and 32b2 located on opposite sides along the Z-axis of the substrate 34 relative to the first end side magnetic components 32a1 and 32b1.

[0150] Furthermore, unlike the first embodiment, the present embodiment does not include the first end-side magnetic members 32c1 and 32d1 near the ends of the driven member 30 located on opposite sides along the Y-axis. Furthermore, unlike the first embodiment, the present embodiment does not include the second end-side magnetic members 32a2 and 32b2 near the ends of the driven member 30 located on opposite sides along the Y-axis.

[0151] In accordance with this situation, in this embodiment, Figure 2B1 The fixing member 10 shown does not have Figure 2A1 The fixed magnetic components 14a, 14b and the magnetic field generating parts 40 corresponding to these fixed magnetic components are shown in FIG. Figure 2B3 The fixing member 20 shown does not have Figure 2A3 Fixed magnetic components 24a, 24b are shown.

[0152] As a result, in this embodiment, the substrate 34 can be pivoted about a central axis parallel to the Y-axis, and the second surface 34b of the driven member 30 can be tilted at high speed about a central axis parallel to the Y-axis. Therefore, the direction of light reflected from the reflector mounted on the second surface 34b can be changed at high speed, enabling a single scanning motion of the light. This allows the actuator 102 to be used for high-speed driving of optical devices such as the reflector device 100.

[0153] In addition, the present invention is not limited to the above-mentioned embodiment, and various changes can be made within the scope of the present invention.

[0154] For example, the first magnetic field generating unit 40 only needs to be fixed to the fixed component 10 or 20 at a position where it can appropriately apply a magnetic force to at least one of the first movable magnetic component 321 and the second movable magnetic component 322. For example, the first magnetic field generating unit 40 can be fixed to the second fixed component 20 to apply a magnetic field to the second movable magnetic component 322 mounted on the second surface of the substrate 34, thereby causing the end of the substrate 34 to move slightly along the Z-axis. Alternatively, the first magnetic field generating unit 40 can be fixed to a fixed component other than the first fixed component 10 and the second fixed component 20, for example, in addition to applying a magnetic field to the first movable magnetic component 321 and / or the second movable magnetic component 322 mounted on the substrate 34, it can also cause the end of the substrate 34 to move slightly along the Z-axis.

[0155] In the above-described embodiment, the magnetic members 12a, 12b, 14a, 14b, 22a, 22b, 24a, and 24b attached to the fixed member 10 or 20 are formed of permanent magnets. However, they may be formed of electromagnets. In this case, the magnetic field generating unit 40 may be integrated with the magnetic members 12a, 12b, 14a, 14b or 22a, 22b, 24a, and 24b formed of electromagnets.

[0156] In addition, by mounting optical components such as lenses, prisms, beam splitters, optical filters, polarizers, light modulators, and diffractive optical elements on the substrate 34 of the driven components 30, 30A, and 30B in place of reflectors, the actuator according to the embodiment of the present invention can be used as other high-speed drive optical devices in addition to being used as a high-speed drive reflector device. In addition, by mounting electronic components other than optical components or other components on the driven components, the actuator according to the embodiment of the present invention can also be used as other drive devices. Examples of other drive devices include solenoids, cylinders, pumps, and VCMs. In addition, the driven components may also have shapes other than the substrate.

[0157] Example

[0158] Hereinafter, the present invention will be further described based on detailed examples, but the present invention is not limited to these examples.

[0159] In this embodiment, CAD is used to Figure 1A 、 Figures 2A1 to 2A3 and Figure 3 The actuator 102 of the high-speed drive mirror device 100 is modeled. The outer dimensions of the actuator 102 are 8 mm along the X-axis, 8 mm along the Y-axis, and 2 mm along the Z-axis. In addition, the magnetic components 32a1 to 32d2 as magnets have outer dimensions of 1 mm in width, 4 mm in length, and 0.2 mm in thickness. For the model of the actuator 102, it is assumed that the material of the magnet is SmCo5 (density 8.4 g / cm 3 ), the substrate is made of Co (density 8.9g / cm 3 ), the masses were calculated to be approximately 54 mg and 60 mg, respectively. This suggests that the mass of the driven component 30 (including the reflector) is significantly less than 1 g. If the buoyancy force acting on the driven component 30 is greater than the gravity acting on a 1 g mass, the driven component 30 can be maintained in a buoyant state.

[0160] The change in the buoyancy of the driven component 30 in the actuator 102 was obtained by simulation (JMAG), and the Figure 5 The results shown. Figure 5In the figure, the displacement of the actuator 102 relative to the center position of the driven component 30 in the Z-axis direction under gravity is set as the horizontal axis, and the buoyancy force acting on the driven component 30 in the Z-axis direction is set as the vertical axis. Figure 5 The horizontal axis of the graph is 0) assumes that Figure 1A The driven component 30 shown is arranged at a central position along the Z-axis between the fixed magnetic components 12a (12b) and 22a (22b).

[0161] like Figure 5 As shown, when the driven component 30 drops 0.02 mm relative to its center position in the Z-axis direction, the repulsive force against the fixed magnetic component 12a (12b) increases, exerting a 15.8 mN buoyancy force on the driven component 30. The greater the drop, the greater the buoyancy force. Specifically, when the drop is 0.02 mm or greater, the buoyancy force acting on the driven component 30 becomes greater than gravity, confirming that the driven component 30 can maintain its floating state.

[0162] Description of Reference Numerals

[0163] 10...first fixing member

[0164] 12a, 12b, 14a, 14b ... first fixed magnetic component

[0165] 20...Second fixing member

[0166] 21…Opening

[0167] 22a, 22b, 24a, 24b ... second fixed magnetic component

[0168] 30, 30A, 30B…driven components

[0169] 32a1, 32b1...first end-side magnetic member

[0170] 32a2, 32b2...Second end side magnetic member

[0171] 32c1, 32d1...third end-side magnetic component

[0172] 32c2, 32d2...fourth end-side magnetic component

[0173] 321 ...first movable magnetic component

[0174] 322…Second movable magnetic component

[0175] 34...Substrate

[0176] 34a…Side 1

[0177] 34b…side 2

[0178] 35…Magnetic film

[0179] 35a…First membrane

[0180] 35b…Second membrane

[0181] 36a…X-axis movable magnetic component

[0182] 36b…Y-axis movable magnetic component

[0183] 40…first magnetic field generating unit

[0184] 50…Control Department

[0185] 60a...Second magnetic field generating unit

[0186] 60b…third magnetic field generating unit

[0187] 70…Sensor

[0188] 80…elastic parts

[0189] 100, 100A...High-speed drive mirror device (high-speed drive optical device)

[0190] 102, 102A, 102B…actuator.

Claims

1. An actuator, wherein: A fixed component and a driven component capable of relative movement with respect to the fixed component. A pair of opposing magnetic members are arranged on a pair of opposing surfaces of the driven member and the fixed member facing each other, and the pair of opposing magnetic members form a predetermined gap along the first axis due to repulsion by their respective magnetic forces. The first magnetic field generating unit that applies a magnetic force to the opposing magnetic member provided on the driven member to change the length of the predetermined gap between the opposing magnetic members is provided on the fixing member.

2. The actuator according to claim 1, wherein The driven member has a first surface and a second surface located on opposite sides of each other. The opposing magnetic member provided on the driven member includes a first movable magnetic member provided on the first surface and a second movable magnetic member provided on the second surface. The opposing magnetic member provided on the fixed member includes a first fixed magnetic member facing the first movable magnetic member and a second fixed magnetic member facing the second movable magnetic member. The first magnetic field generating unit is fixed to the fixing member at a position where a magnetic force is appropriately applied to at least one of the first movable magnetic member and the second movable magnetic member.

3. The actuator according to claim 2, wherein: The first movable magnetic component has at least one pair of first end side magnetic components, and the at least one pair of first end side magnetic components are located on opposite sides of each other along a second axis perpendicular to the first axis, and are arranged near the end of the driven component. The second movable magnetic component has a pair of second end side magnetic components, and the pair of second end side magnetic components are located on opposite sides of the first end side magnetic component along the first axis of the driven component.

4. The actuator according to claim 1, wherein The fixed component is provided with a first shaft position sensor, which detects the relative position of the driven component relative to the fixed component along the first axis, and also has a first shaft control unit, which controls the magnetic force acting on the first magnetic field generating unit based on the signal of the first shaft position sensor.

5. The actuator according to claim 3, wherein: A second-axis movable magnetic member is mounted between the pair of first end-side magnetic members located on the first surface of the driven member, and the second-axis movable magnetic member controls movement of the driven member along the second axis. A second magnetic field generating portion is disposed on the fixed member facing the second-axis movable magnetic member with a predetermined gap therebetween. The second magnetic field generating portion is disposed so as to be able to exert a magnetic force on the second-axis movable magnetic member.

6. The actuator according to claim 4, wherein: The fixed member is provided with a second shaft position sensor, the second shaft position sensor detecting a relative position of the driven member relative to the fixed member along the second axis. The device further includes a second axis control unit that controls the magnetic force acting on the second magnetic field generating unit based on a detection signal of the second axis position sensor.

7. The actuator according to claim 4, wherein: A reflective mirror for reflecting light is provided between the pair of second end-side magnetic members located on the second surface of the driven member.

8. The actuator according to claim 3, wherein: The first movable magnetic component has at least one pair of third end side magnetic components, the at least one pair of third end side magnetic components are located on opposite sides of each other along a third axis perpendicular to the first axis and the second axis, and are provided near an end of the driven component. The second movable magnetic member includes a pair of fourth end-side magnetic members located on opposite sides of the third end-side magnetic member along the first axis of the driven member.

9. The actuator according to claim 8, wherein The fixing member includes a first shaft position sensor configured to detect a relative position of the third end-side magnetic member relative to the fixing member along the first axis. The device further includes a first axis control unit configured to control a magnetic force acting on the first magnetic field generating unit based on a signal from the first axis sensor.

10. The actuator according to claim 8, wherein A third-axis movable magnetic member is mounted between the pair of third-end-side magnetic members located on the first surface of the driven member, and the third-axis movable magnetic member controls movement of the driven member along the third axis. A third magnetic field generating portion is disposed on the fixed member facing the third-axis movable magnetic member with a predetermined gap therebetween. The third magnetic field generating portion is disposed so as to be able to exert a magnetic force on the third-axis movable magnetic member.

11. The actuator according to claim 10, wherein: The fixed member is provided with a third axis position sensor, the third axis position sensor detecting a relative position of the driven member relative to the fixed member along the third axis. The device further includes a third-axis control unit that controls the magnetic force acting on the third magnetic field generating unit based on a detection signal of the third-axis position sensor.

12. The actuator according to any one of claims 1 to 11, wherein: The counter magnetic member provided on the driven member has a magnetic film having a thickness of 300 μm or less and integrated with a surface of the driven member.

13. The actuator according to claim 12, wherein: The magnetic film is composed of SmCo5 film and Sm2Co 17 Multilayer film.

14. The actuator according to claim 3, wherein The fixed member and the driven member are coupled to each other by an elastic member that restricts at least movement of the driven member along the second axis.

15. A high-speed driving optical device, wherein: An actuator according to any one of claims 1 to 11 is provided.

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