Magnetic suspension displacement device in vacuum interconnection system

Abstract

The invention discloses a magnetic suspension displacement device in a vacuum interconnection system. The magnetic suspension displacement device comprises a bearing table; the magnetic driving unit comprises a plurality of electromagnets which are arranged in an annular array, the plurality of electromagnets are divided into a plurality of groups, each group comprises two electromagnets which are collinear in the radial direction, the magnetic pole directions of the electromagnets are parallel to the radial direction, and the magnetic pole directions of the electromagnets in the same group are the same; the current switching mechanism is used for controlling the electromagnets to be sequentially switched on and off in the first direction, and the electromagnets in the same group are synchronously switched on and off to simulate rotation of the magnets to generate a balanced magnetic field; the sample table and the bearing surface are oppositely arranged at intervals; the stator is arranged in the sample table to generate a magnetic field repulsive to the balance magnetic field so as to suspend the sample table; the displacement driving unit is used for driving the bearing table to move. According to the invention, the sample table can be stably suspended and fixed at a position opposite to the bearing table, no mechanical vibration is generated, the switching frequency and the magnetic force are adjustable, the stability and controllability of the sample table in the start-stop state are improved, and the application is suitable for vacuum interconnection systems of wafer production lines with different sizes.

Description

Technical Field

[0001] This application belongs to the field of vacuum interconnection technology, and specifically relates to a magnetic levitation displacement device in a vacuum interconnection system. Background Technology

[0002] In semiconductor and advanced material growth processes, to avoid surface contamination caused by atmospheric exposure, samples need to be stored in an ultra-high vacuum environment with a vacuum level better than 10⁻¹⁰ Torr throughout the entire process. This enables atomically clean in-situ growth and intrinsic property characterization. To meet this requirement, a large number of ultra-high vacuum instruments need to be interconnected, and samples need to be transferred via magnetic carts, robotic arms, and other components. Therefore, sample movement components are crucial and used in large quantities in vacuum interconnected systems.

[0003] Currently, the mainstream sample displacement stage for vacuum interconnect systems consists of a built-in bellows-multidimensional sample holder and an external multidimensional displacement platform. This approach is expensive, structurally complex, and prone to damage, and is gradually failing to meet the requirements of wafer production lines larger than 4 inches. As the integration and scale of vacuum interconnect systems increase, there is an urgent need for a stable and inexpensive solution for sample movement within a vacuum.

[0004] Magnetic levitation technology is a type of technology that uses non-contact magnetic force to levitate objects. Magnetic levitation platforms have characteristics such as low friction, controllable levitation height, simple structure, and strong penetration ability, and can be applied to vacuum interconnection systems. However, traditional electromagnetic levitation platforms rely on the repulsion between the magnetic field generated by energized electromagnetic coils and the platform's iron plate to balance gravity and achieve levitation. This has the disadvantage that electromagnets are difficult to provide balancing magnetic force in the horizontal direction, making the start-stop process of magnetic levitation unstable and resulting in poor positioning accuracy. Summary of the Invention

[0005] The purpose of this application is to provide a magnetic levitation displacement device in a vacuum interconnect system to solve the problems of high cost, complex structure and easy damage of the sample displacement stage in the existing vacuum interconnect system, which cannot meet the requirements of wafer production lines of 4 inches and above, and the unstable start-up and shutdown process and poor positioning accuracy of the traditional magnetic levitation platform.

[0006] To achieve the above objectives, one technical solution adopted in this application is:

[0007] A magnetic levitation displacement device in a vacuum interconnection system is provided, comprising:

[0008] The support platform, including the support surface;

[0009] A magnetic drive unit is disposed on the bearing surface, the magnetic drive unit comprising:

[0010] a plurality of electromagnets arranged in a ring array on the bearing surface, the plurality of electromagnets being divided into a plurality of groups, each group comprising two electromagnets arranged radially in line, the magnetic poles of the electromagnets being parallel to the radial direction when the electromagnets are in operation, and the magnetic poles of the two electromagnets in the same group being the same when the electromagnets are in operation;

[0011] a current switching mechanism for controlling the plurality of electromagnets to be sequentially switched in a first direction, and the two electromagnets in the same group being switched synchronously, so as to simulate the balanced magnetic field generated by the rotation of the magnetic body in the first direction, the first direction being the clockwise direction or the counterclockwise direction;

[0012] a sample table arranged in a spaced-apart manner opposite to the bearing surface;

[0013] a stator arranged in the sample table, the stator generating a magnetic field repelling the balanced magnetic field, so as to levitate the sample table;

[0014] a displacement driving unit for driving the bearing table to move.

[0015] In one or more embodiments, the magnetic driving unit further comprises a magnetic core arranged in a space formed by the plurality of electromagnets, and a mounting hole corresponding to each of the plurality of electromagnets is arranged on the surface of the magnetic core, and each of the electromagnets is at least partially embedded in the corresponding mounting hole for installation.

[0016] In one or more embodiments, the magnetic core is a high-frequency soft magnetic ferrite.

[0017] In one or more embodiments, the magnetic driving unit further comprises a mounting table arranged on the bearing surface, the current switching mechanism is arranged inside the mounting table, and the plurality of electromagnets are arranged on the side of the mounting table away from the bearing surface.

[0018] In one or more embodiments, a mounting cavity is arranged at the center of the sample table, the stator is arranged in a sealed manner in the mounting cavity, the polishing number of the inner wall of the mounting cavity and the surface of the stator is greater than 5000, and a lubricating layer is arranged thereon.

[0019] In one or more embodiments, the stator is a permanent magnet, and the stator is arranged in an extending manner along the sample table in the direction of the bearing table, so as to generate a magnetic field repelling the balanced magnetic field.

[0020] In one or more embodiments, the current switching mechanism is used to control a group of electromagnets to be in an on state at each moment, and another group of electromagnets adjacent in the first direction is switched to an on state at the next moment.

[0021] In one or more embodiments, the current switching mechanism is used to control a plurality of groups of the electromagnets in the working field to be in an open state at each moment, and rotate the working field in the first direction by a preset step at the next moment, the working field covering a plurality of groups of the electromagnets adjacent to each other or at least partially spaced from each other.

[0022] In one or more embodiments, the plurality of electromagnets are arranged in a uniform annular arrangement with at least 8 electromagnets.

[0023] In one or more embodiments, the current switching mechanism comprises a plurality of control switches corresponding to the plurality of groups of electromagnets, each control switch being used to control the on-off of the current of the corresponding group of electromagnets, and the frequency of the current switching mechanism in controlling the on-off of the current of the electromagnets is greater than 200 Hz.

[0024] In one or more embodiments, the sample table is a low eddy current metal material sample table.

[0025] In one or more embodiments, the displacement driving unit comprises:

[0026] an X-axis guide rail;

[0027] a Y-axis guide rail slidably mounted on the X-axis guide rail, and the carrier table is slidably mounted on the Y-axis guide rail;

[0028] an X-axis driving mechanism for driving the Y-axis guide rail to slide along the X-axis guide rail;

[0029] a Y-axis driving mechanism for driving the carrier table to slide along the Y-axis guide rail.

[0030] Compared with the prior art, the application has the following beneficial effects:

[0031] The application controls a plurality of electromagnets in an annular array to be sequentially switched in a clockwise or counterclockwise direction by a current switching mechanism, simulates the rotation of the electromagnet to generate a balanced magnetic field, and based on the non-polar magnetic repulsion between the balanced magnetic field and the stator, the sample table can be stably suspended and fixed at a position opposite to the carrier table without mechanical vibration. At the same time, the energization switching frequency of the electromagnet and the magnetic force can be adjusted, which effectively improves the stability and controllability of the sample table in the start-stop state, and is suitable for vacuum interlocking systems of different size wafer production lines. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without any creative effort.

[0033] Figure 1 is a structural schematic diagram of an embodiment of a magnetic suspension displacement device in the vacuum interconnection system of the present application;

[0034] Figure 2 is a structural schematic diagram of an embodiment of a magnetic driving unit of the present application;

[0035] Figure 3 is a schematic diagram of an embodiment of the working process of the magnetic driving unit of the present application;

[0036] Figure 4 is a schematic diagram of another embodiment of the working process of the magnetic driving unit of the present application;

[0037] Figure 5 is a schematic diagram of still another embodiment of the working process of the magnetic driving unit of the present application;

[0038] Figure 6 is a structural schematic diagram of an embodiment of a sample stage of the present application.

[0039] Main figure mark explanation:

[0040] Carrying table 10; carrying surface 101;

[0041] Displacement driving unit 20; X-axis guide rail 201; Y-axis guide rail 202; X-axis motor 203; X-axis screw rod 204; Y-axis motor 205; Y-axis screw rod 206;

[0042] Magnetic driving unit 30; mounting table 301; electromagnet 302; magnetic core 303; mounting hole 3031;

[0043] Sample stage 40; mounting cavity 401;

[0044] Stator 50. DETAILED DESCRIPTION

[0045] In order for those skilled in the art to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor should fall within the scope of protection of the present application.

[0046] In order to solve the problem that the sample displacement table in the current vacuum interlocking system is high in cost, complex in structure and easy to be damaged, and gradually cannot meet the use requirements of the production line of wafers of 4 inches or more, the applicant develops a new type of magnetic suspension displacement table. The magnetic suspension displacement table uses the non-polarity magnetic repulsion effect, effectively solves the shortcomings of unstable start-stop process and poor positioning accuracy of the traditional magnetic suspension displacement table, can stably and high-precision transport samples in the vacuum interlocking system, and can be compatible with the requirements of the production line of wafers of 4 inches or more.

[0047] Specifically, refer to Figure 1 , Figure 1 is a structural schematic diagram of an embodiment of the magnetic suspension displacement device in the vacuum interlocking system of the present application.

[0048] As shown in Figure 1 , the magnetic suspension displacement device includes a bearing table 10 and a displacement driving unit 20 for driving the bearing table 10 to move.

[0049] The bearing table 10 includes a bearing surface 101, and a magnetic driving unit 30 is arranged on the bearing surface 101; a sample table 40 is also arranged on the bearing table 10 in a suspended manner.

[0050] The sample table 40 is internally arranged with a stator 50, which can cooperate with the magnetic driving unit 30 to suspend and fix the sample table 40 at a relative position with the bearing table 10.

[0051] In the embodiment, the displacement driving unit 20 includes X-axis guide rails 201 and Y-axis guide rails 202 perpendicular to each other, wherein the Y-axis guide rails 202 are slidably installed on the X-axis guide rails 201, and the bearing table 10 is slidably installed on the Y-axis guide rails 202.

[0052] The displacement driving unit 20 further includes an X-axis driving mechanism and a Y-axis driving mechanism.

[0053] The X-axis driving mechanism is used to drive the Y-axis guide rails 202 to slide along the X-axis guide rails 201. In the embodiment, the X-axis driving mechanism includes an X-axis motor 203 and an X-axis screw 204 connected with the X-axis motor 203 and the Y-axis guide rails 202.

[0054] The Y-axis driving mechanism is used to drive the carrier table 10 to slide along the Y-axis guide rail 202. In this embodiment, the Y-axis driving mechanism comprises a Y-axis motor 205 and a Y-axis screw 206 connected with the Y-axis motor 205 and the carrier table 10.

[0055] In order to improve the displacement precision, in this embodiment, the X-axis guide rail 201 and the Y-axis guide rail 202 can be high-precision linear guide rails, and the X-axis motor 203 and the Y-axis motor 205 can be high-precision servo motors, so as to realize sub-micron level program control precision.

[0056] It can be understood that the two-dimensional displacement of the carrier table 10 can be realized by the X-axis guide rail 201, the Y-axis guide rail 202, the X-axis motor 203 and the Y-axis motor 205, and the carrier table 10 is transported to the specified position, so as to drive the sample table 40 to move to the specified position.

[0057] It should be pointed out that this embodiment only exemplarily introduces the structure of a displacement driving unit 20 applicable to the present application, and in other embodiments, any displacement driving mechanism commonly used in the art can also be applied to the present application, for example, a mechanical hand, a linear motor, etc., which can all realize the effects of the present embodiment.

[0058] In addition, in this embodiment, the sliding driving structures of the X-axis motor 203, the X-axis screw 204, the Y-axis motor 205 and the Y-axis screw 206 can also be replaced by other commonly used driving structures in the art, such as telescopic rod driving, chain driving, etc., which can all realize the effects of the present embodiment, and will not be described here.

[0059] The magnetic driving unit 30 and the sample table 40 of the present embodiment will be described in detail below. First, please refer to Figure 2 , Figure 2 which is a structural schematic view of an embodiment of the magnetic driving unit 30 of the present application.

[0060] As shown in Figure 2 , the magnetic driving unit 30 comprises a mounting table 301, eight electromagnets 302 arranged in a ring array on the mounting table 301, and a magnetic core 303 arranged in a space surrounded by the eight electromagnets 302.

[0061] The circumferential surface of the magnetic core 303 is provided with mounting holes 3031 corresponding to the plurality of electromagnets 302, and each electromagnet 302 is partially embedded in the corresponding mounting hole 3031 for installation.

[0062] The inside of the mounting table 301 is also provided with a current switching mechanism (not shown in the figure), which is used to control the plurality of electromagnets 302 to be sequentially switched in the first direction a, and the two electromagnets 302 in the same group are synchronously switched to simulate the balance magnetic field generated by the rotation of the magnet in the first direction a.

[0063] Specifically, the current switching mechanism can control the energization or de-energization of each group of electromagnets 302 in the first direction a in turn, while the pole directions of the two electromagnets 302 of each group are the same, so that at each moment the electromagnets 302 of the same group can magnetize the magnetic core 303 to generate a magnetic field, and at the next moment the magnetic core 303 can be magnetized by another group of electromagnets 302 adjacent in the first direction to generate a magnetic field rotating by a certain angle, thereby generating a constantly rotating magnetic field, simulating the rotating motion of a permanent magnet, generating a balance magnetic field and angular momentum inertia, based on the non-polarity magnetic repulsion, the stator 50 in the sample table 40 is locked in the magnetic field. Suspended, effectively improving the stability and controllability of magnetic suspension.

[0064] In order to ensure the stability of the balance magnetic field, in an embodiment, the magnetic core 303 can be a high-frequency soft magnetic ferrite. It should be understood that the function of the magnetic core 303 is to improve the strength and stability of the balance magnetic field, and in some embodiments, if the strength and stability of the balance magnetic field are not considered, the magnetic core 303 can also be cancelled, and the effect of the embodiment can also be achieved.

[0065] In an embodiment, the current switching mechanism can control one group of electromagnets 302 to be in an open state at each moment, and switch another group of electromagnets 302 adjacent in the first direction to the open state at the next moment. Please refer to Figure 3 , Figure 3 is a schematic diagram of an embodiment of the working state of the magnetic drive unit 30 of the present application, and the electromagnets marked in black are electromagnets in the working state, as shown in Figure 3 , at t1, the current switching mechanism can control the first group of electromagnets 302 to work, at t2, the current switching mechanism can control the second group of electromagnets 302 to work, at t3, the current switching mechanism can control the third group of electromagnets 302 to work, and so on. Circulation, thereby simulating the rotating motion of a permanent magnet.

[0066] In other embodiments, the current switching mechanism can also control multiple groups of electromagnets 302 to be in an open state at each moment, please refer to Figure 4 , Figure 4 is a schematic diagram of another embodiment of the working process of the magnetic drive unit 30 of the present application, and the electromagnets marked in black are electromagnets in the working state, as shown in Figure 4As shown, at t1, the current switching mechanism can control the 1st, 2nd and 3rd groups of electromagnets 302 in the working area b to work, at t2, the current switching mechanism can rotate the working area b in the first direction a by one electromagnet 302 step, thereby controlling the 2nd, 3rd and 4th groups of electromagnets 302 in the working area b to work, at t3, the current switching mechanism can rotate the working area b in the first direction a by one electromagnet 302 step, thereby controlling the 3rd, 4th and 1st groups of electromagnets 302 in the working area b to work, and so on, thereby simulating the rotating movement of the permanent magnet.

[0067] In the above embodiments, the working area b covers 3 adjacent groups of electromagnets 302, in other embodiments, the working area b can also cover other number of adjacent groups of electromagnets 302, for example, 4 groups, 2 groups, etc.; or, the working area b can also cover multiple groups of electromagnets 302 which are spaced apart from each other, please refer to Figure 5 , Figure 5 is a schematic diagram of another embodiment of the working process of the magnetic driving unit 30 of the present application, and the electromagnets in black are the electromagnets in working state. As shown, Figure 5 The magnetic driving mechanism includes 12 electromagnets 302, at t1, the current switching mechanism can control the 1st and 3rd groups of electromagnets 302 in the working area b to work, at t2, the current switching mechanism can rotate the working area b in the first direction a by one electromagnet 302 step, thereby controlling the 2nd and 4th groups of electromagnets 302 in the working area b to work, at t3, the current switching mechanism can rotate the working area b in the first direction a by one electromagnet 302 step, thereby controlling the 3rd and 5th groups of electromagnets 302 in the working area b to work, and so on, thereby simulating the rotating movement of the permanent magnet, which can all achieve the effect of the present embodiment.

[0068] In order to ensure the stability of the non-polarity magnetic repulsion, the frequency of the current switching mechanism controlling the current on-off in the above embodiments can be greater than 200HZ. For example, in an embodiment, the current switching mechanism can include a plurality of control switches corresponding to each group of electromagnets 302, each control switch can be used to control the current on-off of the corresponding group of electromagnets 302, thereby realizing the on-off control of the electromagnets 302; in other embodiments, the current switching mechanism can also use the current control mode commonly used in the art, for example, integrated circuit, etc., which will not be described here.

[0069] It should be noted that the above embodiments only introduce the magnetic driving unit 30 of the application by taking the example of including 8, 12 electromagnets 302 and controlling the switches of the electromagnets 302 in the clockwise first direction a. In other embodiments, the magnetic driving unit 30 can also include other even number of electromagnets 302, such as 10, 20, etc., which can be adjusted based on actual needs. In order to ensure the stability of the balance magnetic field, it is preferred that the magnetic driving unit 30 includes at least 8 electromagnets 302. In other embodiments, the switches of the electromagnets 302 can also be controlled in the counterclockwise direction, and the effects of the embodiments can also be achieved.

[0070] Please refer to Figure 6 , Figure 6 is a structural schematic diagram of an embodiment of the sample table 40 of the application.

[0071] As shown in Figure 6 , the sample table 40 is provided with a mounting cavity 401, and the stator 50 is embedded and arranged in sealing in the mounting cavity 401.

[0072] In one embodiment, the stator 50 can be a permanent magnet, and the stator 50 can be a cylindrical magnet which can be arranged to extend in the direction of the carrier table 10 along the sample table 40 to generate a magnetic field repelling the balance magnetic field.

[0073] In other embodiments, the stator 50 can also be a magnet of other shapes, such as a prism, etc., which can be selected based on actual needs.

[0074] In order to avoid the friction between the stator 50 and the inner wall of the mounting cavity 401 affecting the stability of the magnetic field, the polishing number of the inner wall of the mounting cavity 401 and the surface of the stator 50 is greater than 5000 meshes, and is covered with a lubricating layer. In one embodiment, the lubricating layer can be graphite or other materials.

[0075] In order to reduce the electromagnetic induction of the sample table 40, the sample table 40 can be made of low eddy current material, such as Cu-Al alloy, so as to effectively avoid the generation of eddy current and reduce energy consumption.

[0076] It can be understood that based on the non-polar magnetic repulsion between the magnetic field of the permanent magnet stator 50 and the balance magnetic field simulated by the plurality of electromagnets 302, the sample table 40 can be stably suspended and fixed at the position opposite to the carrier table 10 without mechanical vibration. At the same time, the energization switching frequency and the magnetic force of the electromagnets 302 can be adjusted, effectively improving the stability and controllability of the sample table 40 in the start-stop state, and being suitable for vacuum interlocking systems of different size wafer production lines.

[0077] It will be obvious to a person skilled in the art that the application is not limited to the details of the foregoing exemplary embodiments and can be implemented in other concrete forms without departing from the spirit or essential characteristics of the application. The embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. No reference signs in the claims should be considered as limiting the scope of the claims to the identity of the reference signs therein.

[0078] Furthermore, it should be understood that although the description is made on the basis of the embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A magnetic levitation displacement device in a vacuum interconnection system, characterized in that, include: The support platform, including the support surface; A magnetic drive unit is disposed on the bearing surface, the magnetic drive unit comprising: Multiple electromagnets are arranged in a ring array on the bearing surface. The multiple electromagnets are divided into several groups. Each group includes two electromagnets arranged radially collinearly. When the electromagnets are working, their magnetic poles are parallel to the radial direction, and the magnetic poles of the two electromagnets in the same group are in the same direction when they are working. A current switching mechanism is used to control the multiple electromagnets to switch sequentially along a first direction, and two electromagnets in the same group to switch synchronously, so as to simulate the magnet rotating along the first direction to generate a balanced magnetic field, wherein the first direction is clockwise or counterclockwise. The sample stage is spaced apart from the bearing surface. A stator is arranged inside the sample stage, and the stator generates a magnetic field that repels the balanced magnetic field, thereby suspending the sample stage. A displacement driving unit is used to drive the movement of the support platform.

2. The magnetic levitation displacement device according to claim 1, characterized in that, The magnetic drive unit further includes a magnetic core, which is arranged within the space formed by the plurality of electromagnets. The magnetic core has mounting holes on its circumferential surface that correspond one-to-one with the plurality of electromagnets. Each electromagnet is at least partially embedded in the corresponding mounting hole.

3. The magnetic levitation displacement device according to claim 2, characterized in that, The magnetic core is a high-frequency soft magnetic ferrite.

4. The magnetic levitation displacement device according to claim 1, characterized in that, The magnetic drive unit also includes a mounting platform, which is arranged on the bearing surface. The current switching mechanism is arranged inside the mounting platform, and the plurality of electromagnets are arranged on the side of the mounting platform opposite to the bearing surface.

5. The magnetic levitation displacement device according to claim 1, characterized in that, The sample stage has a central mounting cavity, and the stator is embedded and sealed within the mounting cavity. The inner wall of the mounting cavity and the surface of the stator are polished to a grit greater than 5000 and are covered with a lubricating layer.

6. The magnetic levitation displacement device according to claim 1, characterized in that, The stator is a permanent magnet, and the stator extends along the direction from the sample stage to the support stage to generate a magnetic field that repels the balanced magnetic field.

7. The magnetic levitation displacement device according to claim 1, characterized in that, The current switching mechanism is used to control one group of electromagnets to be in the on state at each moment, and to switch another group of electromagnets adjacent in the first direction to be in the on state at the next moment.

8. The magnetic levitation displacement device according to claim 1, characterized in that, The current switching mechanism is used to control multiple sets of electromagnets in the working domain to be in the open state at each moment, and to rotate the working domain along the first direction by a preset step size at the next moment. The working domain covers multiple sets of adjacent electromagnets or at least partially spaced-apart sets of electromagnets.

9. The magnetic levitation displacement device according to claim 1, characterized in that, The electromagnets include at least eight evenly spaced, circularly arranged electromagnets.

10. The magnetic levitation displacement device according to claim 1, characterized in that, The current switching mechanism includes several control switches that correspond one-to-one with the several groups of electromagnets. Each control switch is used to control the current switching of the corresponding group of electromagnets, and the frequency at which the current switching mechanism controls the current switching of the electromagnets is greater than 200 Hz.

11. The magnetic levitation displacement device according to claim 1, characterized in that, The sample stage is a low-eddy current metal material sample stage.

12. The magnetic levitation displacement device according to claim 1, characterized in that, The displacement driving unit includes: X-axis guide rail; The Y-axis guide rail is slidably mounted on the X-axis guide rail, and the support platform is slidably mounted on the Y-axis guide rail; X-axis drive mechanism, used to drive the Y-axis guide rail to slide along the X-axis guide rail; The Y-axis drive mechanism is used to drive the support platform to slide along the Y-axis guide rail.

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