A purification device and purification method for producing a copper stripping solution

Abstract

The application discloses a kind of production copper stripping liquid purification device and purification method, it is related to copper stripping liquid purification technical field, the production copper stripping liquid purification device includes mixing tank and cabinet, two filter tanks are installed in the cabinet, and discharge pump is installed on the cabinet, the input end of the discharge pump is connected with control valve by suction pipe, and the output end of the discharge pump is connected with the input end of one filter tank by feed pipe, the bottom output end of filter tank connected with feed pipe is connected with the top input end of another filter tank by conveying piece, and the bottom output end of another filter tank is equipped with detector, by opening control valve and starting discharge pump, copper stripping liquid can be sequentially filtered through two filter tanks, and the filtered liquid can be detected by detector, when liquid filtration effect is not ideal, can be returned to mixing tank by switching backflow pipe, and re-filtering treatment is carried out.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of copper stripping liquid purification, and particularly relates to a purification device for producing copper stripping liquid and a purification method. BACKGROUND

[0002] The copper stripping liquid is a chemical preparation for removing copper surface attachments (such as photoresist, residues, etc.), and realizes substrate protection through dissolution or decomposition, for example: the copper stripping liquid separates copper from the substrate through chemical reaction, is suitable for removing photoresist residues, copper plating layer removal and the like; and can also quickly dissolve copper circuits on a circuit board in electronic manufacturing to realize precise stripping. The core components include organic solvents, alkaline substances, copper corrosion inhibitors and surfactants, and the protection of copper and stripping efficiency need to be considered, and the copper stripping liquid is mainly used in microelectronic manufacturing, copper foil production and the like, removes copper surface pollutants through wet processing, avoids damage to the substrate and guarantees subsequent process precision.

[0003] The existing purification device for copper stripping liquid has poor filtering effect when purifying the copper stripping liquid, because precipitates are easily formed in the reaction process, thereby affecting the subsequent use effect of the copper stripping liquid, and the filtered liquid cannot be detected, which easily leads to the use effect of the finished copper stripping liquid. SUMMARY

[0004] The present application aims to provide a purification device for producing copper stripping liquid and a purification method to solve the problems in the prior art.

[0005] To achieve the above object, the application provides the following technical scheme: the production copper stripping liquid purifying device includes a mixing tank and a cabinet, a plurality of feeding pipes are installed on the top of the mixing tank, a control valve is installed on the bottom of the mixing tank, a circulating part is arranged on the mixing tank, two filter tanks are installed in the cabinet, a discharge pump is installed on the cabinet, the input end of the discharge pump is connected with the control valve through a suction pipe, the output end of the discharge pump is connected with the input end of one of the filter tanks through a feeding pipe, the bottom output end of the filter tank connected with the feeding pipe is connected with the top input end of the other filter tank through a conveying part, the bottom output end of the other filter tank is installed with a detector, a conveying pump is installed on the cabinet, the input end of the conveying pump is connected with the detector through a feeding pipe, a reversing valve is installed on the output end of the conveying pump, a discharge pipe is installed on one output end of the reversing valve, one output end of the reversing valve is connected with the top of the mixing tank through a return pipe, the detector is electrically connected with the reversing valve, when the copper stripping liquid is produced, a plurality of raw liquids are added into the mixing tank through the plurality of feeding pipes according to the mass, after the mixing is completed, the copper stripping liquid in the mixing tank can be sequentially filtered through the two filter tanks by opening the control valve and starting the discharge pump, and the filtered liquid can be detected by the detector, when the liquid filtering effect is not ideal, the reversing valve can be used to open the return pipe to send the unqualified liquid back to the mixing tank for re-filtering, so that multi-stage filtering of the liquid is realized, and the production quality of the copper stripping liquid can be ensured.

[0006] As a preferred technical scheme, the circulating part includes a lower connecting pipe, an upper connecting pipe, a circulating pump and a conveying pipe.

[0007] A lower connecting pipe is installed on the lower part of the mixing tank, an upper connecting pipe is installed on the upper part of the mixing tank, a circulating pump is installed on the lower connecting pipe, the input end of the circulating pump is connected with the lower connecting pipe, a conveying pipe is installed on the output end of the circulating pump, the conveying pipe is connected with the upper connecting pipe, when the reaction in the mixing tank is carried out, the liquid at the bottom of the mixing tank can be conveyed to the upper part of the mixing tank through the conveying pipe and the upper connecting pipe by starting the circulating pump, so that the liquid in the mixing tank is circulated and stirred.

[0008] As a preferred technical scheme, the conveying part includes a transfer pump, a first feeding pipe and a second feeding pipe.

[0009] A transfer pump is installed in the cabinet, the input end of the transfer pump is connected with the bottom output end of the filter tank connected with the feeding pipe through the first feeding pipe, the output end of the transfer pump is connected with the top input end of the other filter tank through the second feeding pipe, when the filter tank is working, the liquid in one filter tank after primary filtering can be sent into the other filter tank for re-filtering by starting the transfer pump through the first feeding pipe and the second feeding pipe, so that the filtering effect of the liquid can be improved.

[0010] As a preferred technical scheme, the fixed rod is arranged on the upper side of the mixing tank, the liquid collecting tank is arranged on the fixed rod, the gas tank is arranged on the liquid collecting tank, the gas outlet is arranged on the upper portion of the mixing tank, the gas inlet is arranged on the side of the gas tank close to the gas outlet, the gas outlet and the gas inlet are connected through the gas conveying pipe, the opening is arranged on the top of the gas tank, the gas cover is arranged on the upper end of the opening, the purifier is arranged on the gas tank, the input end of the purifier is connected with the upper portion of the gas cover through the exhaust pipe, the driving motor is arranged on the top of the gas cover, the lower output shaft of the driving motor penetrates the gas cover, the rotating shaft is arranged on the lower output shaft of the driving motor, the rotating disc is arranged on the rotating shaft, and the plurality of fan blades are arranged on the circumferential side wall of the rotating disc, when the purification is carried out in the mixing tank, the driving motor is started, the driving motor drives the rotating shaft and the rotating disc to drive the fan blades to rotate, so that the gas cover and the gas tank can absorb the waste gas formed in the mixing tank through the gas conveying pipe, and the waste gas can be sent into the purifier through the exhaust pipe for purification treatment, and the environmental pollution can be avoided.

[0011] As a preferred technical scheme, the fixed rod is arranged on the upper side of the mixing tank, the liquid collecting tank is arranged on the fixed rod, the gas tank is arranged on the liquid collecting tank, the gas outlet is arranged on the upper side of the mixing tank, the gas inlet is arranged on the side of the gas tank close to the gas outlet, the gas outlet and the gas inlet are connected through the gas conveying pipe, the opening is arranged on the top of the gas tank, the gas cover is arranged on the upper end of the opening, the purifier is arranged on the gas tank, the input end of the purifier is connected with the upper portion of the gas cover through the exhaust pipe, the driving motor is arranged on the top of the gas cover, the lower output shaft of the driving motor penetrates the gas cover, the rotating shaft is arranged on the lower output shaft of the driving motor, the rotating disc is arranged on the rotating shaft, and the plurality of fan blades are arranged on the circumferential side wall of the rotating disc, when the purification is carried out in the mixing tank, the driving motor is started, the driving motor drives the rotating shaft and the rotating disc to drive the fan blades to rotate, so that the gas cover and the gas tank can absorb the waste gas formed in the mixing tank through the gas conveying pipe, and the waste gas can be sent into the purifier through the exhaust pipe for purification treatment, and the environmental pollution can be avoided.

[0012] As a preferred technical scheme, the top of the mixing tank is provided with a cylinder, the inner top of the cylinder is provided with a pressure sensor, and the cylinder is slidably provided with a pressing plate; the top of the mixing tank is provided with a sliding hole, the sliding hole is slidably provided with a sliding rod, the upper end of the sliding rod is connected with the bottom of the pressing plate, and the lower end of the sliding rod is provided with a floating plate; the floating plate is connected with the inner top of the mixing tank through a connecting spring; the pressure sensor is electrically connected with the driving motor; when the amount of waste gas formed in the mixing tank changes, the pressure sensor can be automatically controlled to drive the driving motor to increase the rotating speed of the rotating shaft according to the gradual increase of the amount of waste gas, which is beneficial to automatically improving the absorption efficiency of waste gas according to the increase of the amount of waste gas.

[0013] As a preferred technical scheme, the top of the mixing tank is provided with a cylinder, the inner top of the cylinder is provided with a pressure sensor, and the cylinder is slidably provided with a pressing plate; the top of the mixing tank is provided with a sliding hole, the sliding hole is slidably provided with a sliding rod, the upper end of the sliding rod is connected with the bottom of the pressing plate, and the lower end of the sliding rod is provided with a floating plate; the floating plate is connected with the inner top of the mixing tank through a connecting spring; the pressure sensor is electrically connected with the driving motor; when the amount of waste gas formed in the mixing tank changes, the pressure sensor can be automatically controlled to drive the driving motor to increase the rotating speed of the rotating shaft according to the gradual increase of the amount of waste gas, which is beneficial to automatically improving the absorption efficiency of waste gas according to the increase of the amount of waste gas.

[0014] As a preferred technical scheme, the air tank is provided with an electric telescopic rod on the side far from the air inlet hole, the electric telescopic rod is electrically connected with a current sensor, a transmission sleeve is arranged on the electric telescopic rod, a driving shaft is arranged on the transmission sleeve, a fixed plate is arranged on the air inlet hole, a plurality of fixed air holes are arranged in the circumferential array on the fixed plate, a baffle plate is rotatably arranged on the side of the fixed plate far from the air inlet hole, a plurality of moving air holes are arranged in the circumferential array on the baffle plate, the plurality of fixed air holes and the plurality of moving air holes correspond to each other and are of the same size, a rotating rod is arranged at the circumcenter of the side of the baffle plate far from the fixed plate, a curved channel is arranged on the rotating rod, the driving shaft is slidably inserted into the curved channel, an angle sensor is arranged on the end of the rotating rod far from the baffle plate, and the angle sensor is electrically connected with the electric telescopic rod. The current sensor can control the electric telescopic rod to drive the transmission sleeve to move according to the strength of the induced current, so that the transmission sleeve drives the driving shaft to synchronously displace, the extrusion of the driving shaft on the curved channel of the rotating rod can drive the rotating rod to rotate, the angle sensor can detect that the rotating rod rotates to a specific angle, the electric telescopic rod is controlled to stop operating, the coincidence degree of the moving air holes and the fixed air holes is realized, the coincidence degree of the moving air holes and the fixed air holes can be automatically controlled according to the change of the exhaust gas amount, and the change of the exhaust gas amount can be automatically controlled according to the change of the exhaust gas amount.

[0015] The application provides a purification method of a purification device for producing copper stripping liquid.

[0016] Step one: add the raw liquid to the mixing tank through multiple feeding pipes according to the mass, and start the circulating part;

[0017] Step two: after the mixing is completed, open the control valve and start the discharge pump;

[0018] Step three: sequentially send the liquid in the mixing tank to the two filter tanks in the cabinet body for filtration treatment;

[0019] Step four: detect the filtered liquid by using the detector, and send the unqualified liquid back to the mixing tank for re-filtration treatment.

[0020] Compared with the prior art, the application has the following beneficial effects:

[0021] When producing the copper stripping liquid, multiple raw liquids are added to the mixing tank through multiple feeding pipes according to the mass, after the mixing is completed, the copper stripping liquid in the mixing tank is sequentially filtered through the two filter tanks by opening the control valve and starting the discharge pump, and the filtered liquid is detected by using the detector, when the liquid filtration effect is not ideal, the unqualified liquid is sent back to the mixing tank through the reversing valve to re-filtration treatment, multi-stage filtration of the liquid is realized, and the production quality of the copper stripping liquid can be guaranteed.

[0022] When purifying in the mixing tank, the driving motor can be started to drive the fan blades to rotate through the rotating shaft and the rotating disc, so that the gas cover and the gas tank can absorb the waste gas formed in the mixing tank through the gas inlet pipe, and the waste gas can be sent into the purifier through the exhaust pipe for purification treatment, so that environmental pollution can be avoided.

[0023] The application can automatically control the driving motor to drive the rotating shaft to increase the rotating speed according to the gradual increase of the waste gas amount based on the pressure change of the waste gas amount formed in the purification reaction, which is beneficial to automatically improve the waste gas absorption efficiency according to the increase of the waste gas amount.

[0024] The application can control the strength of the induced current formed according to the change of the waste gas amount, and can control the coincidence degree of the movable air hole and the fixed air hole according to the strength change of the induced current, so as to automatically control the change of the exhaust amount according to the change of the waste gas amount. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the application;

[0026] Figure 2 It is a schematic diagram of the overall part of the application;

[0027] Figure 3 It is a schematic diagram of the mixing tank structure of the application;

[0028] Figure 4 It is a schematic diagram of the mixing tank structure of the application;

[0029] Figure 5 It is a schematic diagram of the air baffle of the application;

[0030] Figure 6 It is Figure 3 the enlarged structure schematic diagram of A in the figure;

[0031] Figure 7 It is Figure 4 the enlarged structure schematic diagram of B in the figure;

[0032] Figure 8 It is Figure 7 the enlarged structure schematic diagram of C in the figure.

[0033] In the figure: 1, mixing tank; 2, feeding pipe; 3, control valve; 4, cabinet; 5, discharging pump; 6, suction pipe; 7, filter tank; 8, feeding pipe; 9, detector; 10, conveying pump; 11, feeding pipe; 12, reversing valve; 13, discharging pipe; 14, return pipe; 15, lower connecting pipe; 16, upper connecting pipe; 17, circulating pump; 18, conveying pipe; 19, intermediate pump; 20, first liquid conveying pipe; 21, second liquid conveying pipe;

[0034] 2201, fixed rod; 2202, liquid collecting tank; 2203, air tank; 2204, air inlet hole; 2205, air outlet hole; 2206, air conveying pipe; 2207, opening; 2208, air cover; 2209, exhaust pipe; 2210, purifier; 2211, driving motor; 2212, rotating shaft; 2213, rotating disc; 2214, fan blade; 2215, rotating ring; 2216, connecting rod; 2217, air permeable water filter film; 2218, backflow pump; 2219, liquid outlet pipe; 2220, liquid return pipe;

[0035] 2301, cylinder; 2302, pressure sensitive sensor; 2303, sliding hole; 2304, sliding rod; 2305, floating plate; 2306, connecting spring; 2307, extrusion plate;

[0036] 2401, cover; 2402, magnetic plate; 2403, rotating column; 2404, cutting plate; 2405, pole column; 2406, rotary joint; 2407, current sensor; 2408, electric telescopic rod; 2409, transmission sleeve; 2410, driving shaft; 2411, fixed plate; 2412, fixed air hole; 2413, air baffle; 2414, movable air hole; 2415, rotating rod; 2416, curved channel; 2417, angle sensor; 2418, wire. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0038] Embodiment: as Figures 1-8As shown, the application provides a technical scheme of a purification device and purification method for producing copper stripping solution, which comprises a mixing tank 1 and a cabinet 4, a plurality of feeding pipes 2 are installed on the top of the mixing tank 1, and a control valve 3 is installed at the bottom of the mixing tank 1, a circulating part is arranged on the mixing tank 1, two filter tanks 7 are installed in the cabinet 4, and a discharge pump 5 is installed on the cabinet 4, the input end of the discharge pump 5 is connected with the control valve 3 through a suction pipe 6, the output end of the discharge pump 5 is connected with the input end of one of the filter tanks 7 through a feeding pipe 8, the bottom output end of the filter tank 7 connected with the feeding pipe 8 is connected with the top input end of the other filter tank 7 through a conveying part, and the bottom output end of the other filter tank 7 is installed with a detector 9, a conveying pump 10 is installed on the cabinet 4, the input end of the conveying pump 10 is connected with the detector 9 through a feeding pipe 11, and the output end of the conveying pump 10 is installed with a reversing valve 12, one output end of the reversing valve 12 is installed with a discharge pipe 13, one output end of the reversing valve 12 is connected with the top of the mixing tank 1 through a return pipe 14, and the detector 9 is electrically connected with the reversing valve 12, when producing the copper stripping solution, a plurality of raw solutions are added into the mixing tank 1 through the plurality of feeding pipes 2 according to the quality, after the mixing is completed, the copper stripping solution in the mixing tank 1 can be sequentially filtered through the two filter tanks 7 by opening the control valve 3 and starting the discharge pump 5, and the filtered liquid can be detected by the detector 9, when the liquid filtering effect is not ideal, the reversing valve 12 can be opened to open the return pipe 14 to send the unqualified liquid back to the mixing tank 1 for re-filtering treatment, realizing multi-stage filtration of the liquid, and ensuring the production quality of the copper stripping solution.

[0039] As shown in the Figures 1-3 The circulating part comprises a lower connecting pipe 15, an upper connecting pipe 16, a circulating pump 17 and a conveying pipe 18.

[0040] The lower connecting pipe 15 is installed at the lower part of the mixing tank 1, and the upper connecting pipe 16 is installed at the upper part of the mixing tank 1, the circulating pump 17 is installed on the lower connecting pipe 15, the input end of the circulating pump 17 is connected with the lower connecting pipe 15, the output end of the circulating pump 17 is installed with the conveying pipe 18, and the conveying pipe 18 is connected with the upper connecting pipe 16, when the reaction is carried out in the mixing tank 1, the liquid at the bottom of the mixing tank 1 can be conveyed to the upper part of the mixing tank 1 through the conveying pipe 18 and the upper connecting pipe 16 by starting the circulating pump 17, realizing the circulating stirring of the liquid in the mixing tank 1.

[0041] As shown in the Figure 2 The conveying part comprises a transfer pump 19, a first feeding pipe 20 and a second feeding pipe 21.

[0042] The cabinet 4 is installed with a transfer pump 19, the input end of the transfer pump 19 is connected with the output end of the bottom of the filter tank 7 connected with the feed pipe 8 through a first liquid conveying pipe 20, and the output end of the transfer pump 19 is connected with the top input end of another filter tank 7 through a second liquid conveying pipe 21, when the filter tank 7 works, the transfer pump 19 can be started to send the liquid filtered in one filter tank 7 into another filter tank 7 through the first liquid conveying pipe 20 and the second liquid conveying pipe 21 to be filtered again, which can improve the filtering effect of the liquid.

[0043] As shown in the figure, a fixed rod 2201 is installed on the upper side of the mixing tank 1, a liquid collecting tank 2202 is installed on the fixed rod 2201, an air tank 2203 is installed on the liquid collecting tank 2202, an air outlet hole 2205 is formed on the upper part of the mixing tank 1, an air inlet hole 2204 is formed on the side of the air tank 2203 close to the air outlet hole 2205, the air outlet hole 2205 and the air inlet hole 2204 are connected through an air conveying pipe 2206, an opening 2207 is formed on the top of the air tank 2203, a gas cover 2208 is installed on the upper end of the opening 2207, a purifier 2210 is installed on the air tank 2203, the input end of the purifier 2210 is connected with the upper part of the gas cover 2208 through an exhaust pipe 2209, a driving motor 2211 is installed on the top of the gas cover 2208, the lower output shaft of the driving motor 2211 penetrates the gas cover 2208, a rotating shaft 2212 is installed on the lower output shaft of the driving motor 2211, a rotating disc 2213 is installed on the rotating shaft 2212, a plurality of fan blades 2214 are installed on the circumferential side wall of the rotating disc 2213, when the mixing tank 1 is purified, the driving motor 2211 can be started to drive the fan blades 2214 to rotate through the rotating shaft 2212 and the rotating disc 2213, so that the gas cover 2208 and the air tank 2203 can absorb the waste gas formed in the mixing tank 1 through the air conveying pipe 2206, and the waste gas can be sent into the purifier 2210 through the exhaust pipe 2209 to be purified, which can avoid environmental pollution.

[0044] The inner lower part of the gas cover 2208 is rotatably installed with a rotating ring 2215, the rotating ring 2215 is connected with the rotating shaft 2212 through a connecting rod 2216, the upper part of the rotating ring 2215 is connected with the lower part of the rotating disc 2213 through a gas-permeable water filtering membrane 2217, the gas-permeable water filtering membrane 2217 is in the shape of a cone cylinder, the bottom of the gas tank 2203 is provided with a plurality of liquid permeation holes, the mixing tank 1 is installed with a reflux pump 2218, the input end of the reflux pump 2218 is connected with the bottom of the liquid collecting tank 2202 through a liquid outlet pipe 2219, and the output end of the reflux pump 2218 is connected with the top of the mixing tank 1 through a liquid return pipe 2220, when the driving motor 2211 operates, the rotating disc 2213 and the rotating ring 2215 can be driven to rotate synchronously through the rotating shaft 2212 and the connecting rod 2216, so that the gas-permeable water filtering membrane 2217 can be rotated synchronously, the liquid in the waste gas can be separated to the bottom of the gas tank 2203 by the centrifugal force in the rotating process of the gas-permeable water filtering membrane 2217, and then flows into the liquid collecting tank 2202 through the liquid permeation holes, and the liquid in the liquid collecting tank 2202 can be sent back to the mixing tank 1 through the liquid outlet pipe 2219 and the liquid return pipe 2220 after the purification is completed.

[0045] The top of the mixing tank 1 is installed with a cylinder body 2301, the inner top of the cylinder body 2301 is installed with a pressure sensitive sensor 2302, and the cylinder body 2301 is slidably installed with an extrusion plate 2307, the top of the mixing tank 1 is provided with a sliding hole 2303, the sliding hole 2303 is slidably installed with a sliding rod 2304, the upper end of the sliding rod 2304 is connected with the bottom of the extrusion plate 2307, and the lower end of the sliding rod 2304 is installed with a floating plate 2305, the floating plate 2305 is connected with the inner top of the mixing tank 1 through a connecting spring 2306, and the pressure sensitive sensor 2302 is electrically connected with the driving motor 2211, when the gas pressure changes with the formation of waste gas in the mixing tank 1, the extrusion force of the gas pressure on the floating plate 2305 can be transmitted to the pressure sensitive sensor 2302 through the sliding rod 2304 and the extrusion plate 2307, so that the pressure sensitive sensor 2302 can automatically control the driving motor 2211 to improve the rotating speed of the rotating shaft 2212 according to the gradual increase of the waste gas, which is beneficial to automatically improve the absorption efficiency of the waste gas according to the increase of the waste gas.

[0046] The top of the gas cover 2208 is provided with a cover 2401, the inner top of the cover 2401 is symmetrically provided with two magnetic plates 2402, the two magnetic plates 2402 are positive and negative magnetic poles respectively, the upper output shaft of the driving motor 2211 is provided with a rotating column 2403, the rotating column 2403 is provided with a plurality of cutting plates 2404, the top of the cover 2401 is rotatably provided with a pole column 2405, the lower end of the pole column 2405 is connected with the upper end of the rotating column 2403 in a concentric mode, the upper end of the pole column 2405 is provided with a rotary joint 2406, the gas tank 2203 is provided with a current sensor 2407, the current sensor 2407 is connected with the rotary joint 2406 through a wire 2418, when the driving motor 2211 operates, the driving motor 2211 can drive the plurality of cutting plates 2404 to cut the magnetic induction lines between the two magnetic plates 2402 to form an induced current, when the rotating speed of the driving motor 2211 is controlled according to the waste gas amount, the intensity of the induced current formed can be controlled according to the waste gas amount, so that the current sensor 2407 can be controlled according to the intensity of the induced current.

[0047] The electric telescopic rod 2408 is installed on one side of the air tank 2203 away from the air inlet hole 2204, the electric telescopic rod 2408 is electrically connected with the current sensor 2407, a transmission sleeve 2409 is installed on the electric telescopic rod 2408, a drive shaft 2410 is installed on the transmission sleeve 2409, a fixed plate 2411 is installed on the air inlet hole 2204, a plurality of fixed air holes 2412 are arranged in the circumferential array on the fixed plate 2411, a baffle plate 2413 is rotatably installed on the side of the fixed plate 2411 away from the air inlet hole 2204, a plurality of moving air holes 2414 are arranged in the circumferential array on the baffle plate 2413, the plurality of fixed air holes 2412 and the plurality of moving air holes 2414 correspond one-to-one and are the same size, a rotating rod 2415 is installed at the circumcenter of the side of the baffle plate 2413 away from the fixed plate 2411, a curved channel 2416 is arranged on the rotating rod 2415, the drive shaft 2410 is slidably inserted into the curved channel 2416, an angle sensor 2417 is installed at the end of the rotating rod 2415 away from the baffle plate 2413, the angle sensor 2417 is electrically connected with the electric telescopic rod 2408, the current sensor 2407 can control the electric telescopic rod 2408 to drive the transmission sleeve 2409 to move according to the strength of the induced current, so that the transmission sleeve 2409 drives the drive shaft 2410 to synchronously displace, the extrusion of the drive shaft 2410 on the curved channel 2416 on the rotating rod 2415 can drive the rotating rod 2415 to rotate, and the angle sensor 2417 can detect that the rotating rod 2415 rotates to a specific angle, then control the electric telescopic rod 2408 to stop operating, the coincidence degree of the moving air hole 2414 and the fixed air hole 2412 is realized, the exhaust capacity of the exhaust gas is improved, the coincidence degree of the moving air hole 2414 and the fixed air hole 2412 is automatically controlled according to the change of the exhaust gas, and the change of the exhaust capacity is automatically controlled according to the change of the exhaust gas.

[0048] The application provides a purification method for producing a copper stripping liquid.

[0049] Step one: add the raw liquid into the mixing tank 1 through multiple feeding pipes 2 according to the mass, and start the circulating part;

[0050] Step two: after the mixing is completed, open the control valve 3 and start the discharge pump 5;

[0051] Step three: sequentially send the liquid in the mixing tank 1 into the two filter tanks 7 in the cabinet 4 for filtration treatment;

[0052] Step four: detect the filtered liquid through the detector 9, and send the unqualified liquid back to the mixing tank 1 for re-filtration treatment.

[0053] The working principle of the application is as follows:

[0054] When the copper stripping solution production is carried out, multiple raw solutions are added into the mixing tank 1 through multiple feeding pipes 2 according to mass, after the mixing is completed, the copper stripping solution in the mixing tank 1 can be sequentially filtered through two filter tanks 7 by opening the control valve 3 and starting the discharge pump 5, and the filtered liquid can be detected by the detector 9, when the liquid filtering effect is not ideal, the unqualified liquid can be sent back to the mixing tank 1 through the reverse flow pipe 14 by opening the reversing valve 12, and re-filtering treatment is carried out, realizing multi-stage filtration of the liquid, which can guarantee the production quality of the copper stripping solution.

[0055] When the mixing tank 1 is purified, the driving motor 2211 can be started to drive the fan blade 2214 to rotate through the shaft 2212 and the turntable 2213, so that the gas cover 2208 and the gas tank 2203 can absorb the waste gas formed in the mixing tank 1 through the gas pipe 2206, and the waste gas can be sent into the purifier 2210 through the exhaust pipe 2209 for purification treatment, which can avoid environmental pollution, when the driving motor 2211 is running, the turntable 2213 and the rotating ring 2215 can be driven to rotate synchronously through the shaft 2212 and the connecting rod 2216, so that the synchronous rotation of the air-permeable water filter membrane 2217 can be realized, the liquid in the waste gas can be separated to the bottom of the gas tank 2203 by the centrifugal force during the rotation of the air-permeable water filter membrane 2217, and the liquid can flow into the liquid collection tank 2202 through the liquid seepage hole, after the purification is completed, the backflow pump 2218 can be started, and the liquid in the liquid collection tank 2202 can be sent back to the mixing tank 1 through the liquid outlet pipe 2219 and the liquid return pipe 2220.

[0056] When the gas pressure changes with the amount of waste gas formed by the purification reaction in the mixing tank 1, the extrusion force of the gas pressure on the floating plate 2305 can form force conduction on the pressure-sensitive sensor 2302 under the transmission action of the slide rod 2304 and the extrusion plate 2307, so that the pressure-sensitive sensor 2302 can automatically control the driving motor 2211 to drive the rotating speed of the shaft 2212 to increase according to the gradual increase of the amount of waste gas, which is beneficial to automatically improve the absorption efficiency of the waste gas according to the increase of the amount of waste gas.

[0057] When the driving motor 2211 is running, the driving motor 2211 can drive the plurality of cutting plates 2404 to cut the magnetic induction lines between the two magnetic plates 2402 to form an induced current, when the rotation rate of the driving motor 2211 is controlled according to the exhaust amount, the strength of the induced current formed can be controlled according to the change of the exhaust amount, the current sensor 2407 can control the electric telescopic rod 2408 to drive the transmission sleeve 2409 to move according to the strength of the induced current, so that the transmission sleeve 2409 drives the driving shaft 2410 to move synchronously, by the extrusion of the driving shaft 2410 on the curve 2416 on the rotating rod 2415, the rotating rod 2415 can drive the air baffle 2413 to rotate, and the angle sensor 2417 can detect that the rotating rod 2415 rotates to a specific angle, then the electric telescopic rod 2408 is controlled to stop running, the coincidence degree of the movable air hole 2414 and the fixed air hole 2412 is realized, the exhaust amount of the exhaust gas is improved, the coincidence degree of the movable air hole 2414 and the fixed air hole 2412 is automatically controlled according to the change of the exhaust amount, and the change of the exhaust amount is automatically controlled according to the change of the exhaust amount.

[0058] It will be obvious to a person skilled in the art that, without departing from the spirit or essential characteristics of the application, the present application can be implemented in other specific forms. The present examples are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the description given above, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the scope of the claims.

Claims

1. A purification device for producing a copper stripping solution, characterized by: The production copper stripping liquid purifying device includes a mixing tank (1) and a cabinet (4), a plurality of feeding pipes (2) are installed on the top of the mixing tank (1), a control valve (3) is installed on the bottom of the mixing tank (1), a circulating part is arranged on the mixing tank (1), two filter tanks (7) are installed in the cabinet (4), a discharge pump (5) is installed on the cabinet (4), the input end of the discharge pump (5) is connected with the control valve (3) through a suction pipe (6), the output end of the discharge pump (5) is connected with the input end of one of the filter tanks (7) through a feeding pipe (8), the bottom output end of the filter tank (7) connected with the feeding pipe (8) is connected with the top input end of the other filter tank (7) through a conveying part, the bottom output end of the other filter tank (7) is installed with a detector (9), a conveying pump (10) is installed on the cabinet (4), the input end of the conveying pump (10) is connected with the detector (9) through a feeding pipe (11), a reversing valve (12) is installed on the output end of the conveying pump (10), a discharge pipe (13) is installed on one output end of the reversing valve (12), one output end of the reversing valve (12) is connected with the top of the mixing tank (1) through a return pipe (14), the detector (9) is electrically connected with the reversing valve (12); A fixed rod (2201) is installed on the upper side of the mixing tank (1), a liquid collecting tank (2202) is installed on the fixed rod (2201), an air tank (2203) is installed on the liquid collecting tank (2202), an air outlet hole (2205) is formed in the upper part of the mixing tank (1), an air inlet hole (2204) is formed in the side of the air tank (2203) close to the air outlet hole (2205), the air outlet hole (2205) and the air inlet hole (2204) are connected through an air conveying pipe (2206), an opening (2207) is formed in the top of the air tank (2203), a gas cover (2208) is installed at the upper end of the opening (2207), a purifier (2210) is installed on the air tank (2203), the input end of the purifier (2210) is connected with the upper part of the gas cover (2208) through an exhaust pipe (2209), a driving motor (2211) is installed on the top of the gas cover (2208), the lower output shaft of the driving motor (2211) penetrates the gas cover (2208), a rotating shaft (2212) is installed on the lower output shaft of the driving motor (2211), a rotating disc (2213) is installed on the rotating shaft (2212), a plurality of fan blades (2214) are installed on the circumferential side wall of the rotating disc (2213). The inner lower part of the gas cover (2208) is rotatably installed with a rotating ring (2215), the rotating ring (2215) is connected with the rotating shaft (2212) through a connecting rod (2216), the upper part of the rotating ring (2215) is connected with the lower part of the rotating disc (2213) through a gas-permeable water filtering membrane (2217), the gas-permeable water filtering membrane (2217) is in the shape of a cone cylinder, the bottom of the gas tank (2203) is provided with a plurality of liquid permeation holes, the mixing tank (1) is installed with a reflux pump (2218), the input end of the reflux pump (2218) is connected with the bottom of the liquid collecting tank (2202) through a liquid outlet pipe (2219), and the output end of the reflux pump (2218) is connected with the top of the mixing tank (1) through a liquid return pipe (2220); The top of the mixing tank (1) is installed with a cylinder body (2301), the inner top of the cylinder body (2301) is installed with a pressure-sensitive sensor (2302), and the cylinder body (2301) is slidably installed with an extrusion plate (2307), the top of the mixing tank (1) is provided with a sliding hole (2303), the sliding hole (2303) is slidably installed with a sliding rod (2304), the upper end of the sliding rod (2304) is connected with the bottom of the extrusion plate (2307), and the lower end of the sliding rod (2304) is installed with a floating plate (2305), the floating plate (2305) is connected with the inner top of the mixing tank (1) through a connecting spring (2306), and the pressure-sensitive sensor (2302) is electrically connected with the driving motor (2211); The top of the gas cover (2208) is installed with a cover shell (2401), the inner top of the cover shell (2401) is symmetrically installed with two magnetic plates (2402), the two magnetic plates (2402) are respectively positive and negative magnetic poles, the upper output shaft of the driving motor (2211) is installed with a rotating column (2403), the rotating column (2403) is installed with a plurality of cutting plates (2404), the top of the cover shell (2401) is rotatably installed with a pole column (2405), the lower end of the pole column (2405) is connected with the upper end of the rotating column (2403) in a concentric manner, the upper end of the pole column (2405) is installed with a rotary joint (2406), the gas tank (2203) is installed with a current sensor (2407), and the current sensor (2407) is connected with the rotary joint (2406) through a wire (2418). The air tank (2203) is provided with an electric telescopic rod (2408) on the side away from the air inlet hole (2204), the electric telescopic rod (2408) is electrically connected with a current sensor (2407), a transmission sleeve (2409) is installed on the electric telescopic rod (2408), a drive shaft (2410) is installed on the transmission sleeve (2409), a fixed plate (2411) is installed on the air inlet hole (2204), a plurality of fixed air holes (2412) are arranged in the circumferential direction on the fixed plate (2411), a baffle plate (2413) is rotatably installed on the side of the fixed plate (2411) away from the air inlet hole (2204), a plurality of movable air holes (2414) are arranged in the circumferential direction on the baffle plate (2413), the plurality of fixed air holes (2412) and the plurality of movable air holes (2414) are one-to-one corresponding and have the same size, a rotating rod (2415) is installed at the center of the side of the baffle plate (2413) away from the fixed plate (2411), a curved channel (2416) is arranged on the rotating rod (2415), the drive shaft (2410) is slidably inserted into the curved channel (2416), and an angle sensor (2417) is installed at the end of the rotating rod (2415) away from the baffle plate (2413).

2. The purification device for producing copper stripping solution according to claim 1, characterized by: The circulating member comprises a lower connecting pipe (15), an upper connecting pipe (16), a circulating pump (17) and a conveying pipe (18); The lower connecting pipe (15) is installed at the lower part of the mixing tank (1), and the upper connecting pipe (16) is installed at the upper part of the mixing tank (1), the circulating pump (17) is installed on the lower connecting pipe (15), the input end of the circulating pump (17) is connected with the lower connecting pipe (15), and the output end of the circulating pump (17) is provided with the conveying pipe (18), and the conveying pipe (18) is connected with the upper connecting pipe (16).

3. The purification device for producing copper stripping solution according to claim 1, characterized by: The conveying member comprises a transfer pump (19), a first liquid conveying pipe (20) and a second liquid conveying pipe (21); The transfer pump (19) is installed in the cabinet (4), the input end of the transfer pump (19) is connected with the output end at the bottom of the filter tank (7) connected with the conveying pipe (8) through the first liquid conveying pipe (20), and the output end of the transfer pump (19) is connected with the input end at the top of the other filter tank (7) through the second liquid conveying pipe (21).

4. The purification method of the purification device for producing copper stripping solution according to any one of claims 1-3, comprising the following steps: Step 1: adding the raw solution into the mixing tank (1) through the plurality of feeding pipes (2) according to the mass, and starting the circulating member; Step 2: after the mixing is completed, opening the control valve (3) and starting the discharge pump (5); Step 3: sequentially sending the liquid in the mixing tank (1) into the two filter tanks (7) in the cabinet (4) for filtration treatment; Step 4: detecting the filtered liquid through the detector (9), and sending the unqualified liquid back to the mixing tank (1) for re-filtration treatment.

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