Atomic force microscope and detection system thereof

Abstract

The invention discloses an atomic force microscope and a detection system thereof, and relates to the technical field of scanning atomic force probes, the atomic force microscope detection system comprises a scanner, the atomic force microscope detection system further comprises an optical fiber device and a probe assembly, the optical fiber device is located on the outer side of the scanner and comprises a transmitting port, and the probe assembly is located on the outer side of the scanner. The transmitting port is used for transmitting laser; the probe assembly is connected to the outer side of the scanner, and the probe assembly and the optical fiber device are located on the same side of the scanner. According to the atomic force microscope detection system, the optical fiber device and the probe assembly are integrated on the outer side of the scanner, so that use of complex optical elements in traditional coaxial optical design is avoided, simplification and light weight of the system structure are achieved, and the problem that the system is heavy due to the fact that the optical elements are large in size and heavy in weight in the prior art is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of scanning atomic force probes, and in particular to an atomic force microscope and a detection system thereof. Background Art

[0002] In the atomic force microscope detection system, photothermal drive technology uses laser to irradiate the atomic force probe, causing it to vibrate, thereby achieving high-precision detection of the surface morphology of the object.

[0003] However, most existing photothermal-driven atomic force microscope detection systems use a coaxial light design. The laser needs to be converged by complex optical elements (such as an objective lens) before being irradiated onto the atomic force probe cantilever. This design results in the optical elements being larger and heavier, limiting the lightweight and compactness of the system. Summary of the Invention

[0004] The present application discloses an atomic force microscope and a detection system thereof, which are used to solve the problem of bulky system caused by large volume and heavy weight of optical elements in the prior art.

[0005] In a first aspect, the present application provides an atomic force microscope detection system, including a scanner, and the atomic force microscope detection system further includes:

[0006] an optical fiber device, located outside the scanner, comprising an emission port, wherein the emission port is used to emit laser light;

[0007] The probe assembly is connected to the outside of the scanner and is located on the same side of the scanner as the optical fiber device.

[0008] By integrating the fiber optic device and probe assembly on the outside of the scanner, the use of complex optical components in traditional coaxial optical designs is avoided, which significantly simplifies the system structure, reduces the weight of the system, reduces the adverse effects of inertia during movement, and improves the overall compactness, making it better able to adapt to the needs of high-speed scanning and large-scale detection.

[0009] In a possible implementation manner, the optical fiber device further includes:

[0010] Optical fiber interface, used to access laser;

[0011] The light guide structure is in optical communication with the optical fiber interface and is used for transmitting laser light. The emission port is provided on the light guide structure.

[0012] The design of the optical fiber interface and light-guide structure enables stable access and efficient transmission of the laser, ensuring low loss and high stability of laser energy during transmission, and providing reliable light source support for subsequent photothermal drive or other functions.

[0013] In a possible implementation, the light guide structure includes:

[0014] A collimator lens is spaced apart from the optical fiber interface and is used to convert the incoming laser light into parallel laser light;

[0015] a reflecting mirror, arranged toward the collimating mirror so that the reflecting mirror is located on a path of the laser light converted by the collimating mirror, and is used to change a reflection direction of the laser light;

[0016] A focusing mirror is disposed toward the reflecting mirror and is used to converge the laser light reflected from the reflecting mirror.

[0017] The synergistic effect of the collimating mirror, reflector and focusing mirror realizes efficient conversion, direction adjustment and precise focusing of the laser, enabling the system to flexibly adjust the focusing position of the laser according to different detection requirements.

[0018] In a possible implementation, the emission port is arranged toward a side of the optical fiber device away from the scanner, and the probe assembly is located on a side of the emission port away from the scanner.

[0019] The layout of the emission port and probe assembly optimizes the optical path design, avoiding potential interference between the laser emission path and the scanner, while ensuring that the laser can act directly on the probe assembly or the surface of the object to be measured, improving the efficiency of photothermal drive and optical excitation.

[0020] In a possible implementation, the atomic force microscope detection system further includes:

[0021] A connector connects the scanner and the probe assembly, and the optical fiber device is arranged on the connector.

[0022] The introduction of connectors enhances the mechanical stability of the system, optimizes the installation and coordination of the optical fiber device and probe assembly, makes the coordination between the components closer, and further improves the overall performance of the system.

[0023] In a possible embodiment, one end of the connector is connected to the scanner, and the other end extends to the outside of the scanner and is connected to the first end of the cantilever of the probe assembly, and the probe of the probe assembly is provided at the second end of the cantilever.

[0024] The structural design of the connector enables the probe assembly to achieve precise scanning motion under the drive of the scanner while maintaining close cooperation with the optical fiber device, thereby improving stability and reliability during the scanning process.

[0025] In a possible implementation manner, the optical fiber interface of the optical fiber device is provided on the connecting piece.

[0026] The fiber optic interface is located on the connector, which further optimizes the overall layout of the system, simplifies the assembly and debugging process, and facilitates subsequent functional expansion and system upgrades.

[0027] In a possible implementation, the emission port is arranged toward the cantilever of the probe assembly, so that the cantilever is located on a path of the laser emitted by the emission port, and the laser emitted by the emission port is used to irradiate the cantilever.

[0028] The cantilever of the probe assembly is located on the laser path. The laser emitted from the emission port directly irradiates the cantilever, driving the probe to vibrate through the photothermal effect. It is suitable for high-precision surface morphology detection and improves detection efficiency and accuracy.

[0029] In a possible implementation, the cantilever of the probe assembly is located outside a path of the laser emitted by the emission port, and the laser emitted by the emission port is used to irradiate the surface of the object to be measured.

[0030] The cantilever of the probe assembly is located outside the laser path, and the laser emitted from the emission port directly irradiates the surface of the object to be measured. Through light excitation, the physical properties of the surface of the object to be measured are induced to change, thereby realizing the detection of the surface morphology and related physical properties of the object.

[0031] In a possible implementation, the atomic force microscope detection system further includes:

[0032] A light field collection device is located outside the scanner, is set toward the object to be measured, and is located outside the path of the laser emitted by the emission port. The light field collection device is also located on the return path after the laser is irradiated on the surface of the object to be measured. The light field collection device is used to collect light returned from the surface of the object to be measured.

[0033] The introduction of the light field collection device further expands the functionality of the system, realizing the dual functions of light excitation and light collection, enabling the system to more comprehensively detect and analyze the characteristics of the surface of the object to be tested, providing richer information for a variety of applications.

[0034] In a possible implementation manner, the light field collection device is located on a side of the optical fiber device facing away from the scanner, and is located on a side of the probe assembly facing the optical fiber device.

[0035] The layout of the light field collection device optimizes the space utilization of the system, avoids optical path interference with other components, and improves the efficiency and accuracy of optical signal collection.

[0036] In one possible implementation, the light field collection device includes:

[0037] A collection port is used to collect light returned from the surface of the object to be measured;

[0038] a light guide, in optical communication with the collection port, for transmitting the light collected by the collection port;

[0039] The optical output port is optically connected to the light guide.

[0040] The light field collection device achieves efficient collection, stable transmission and reliable output of optical signals through the synergistic effect of the collection port, light guide and optical path output port, providing strong support for subsequent signal processing and analysis.

[0041] In a possible implementation manner, the optical path output port is provided on a connector that connects the scanner and the probe assembly.

[0042] The optical output port is located on the connector, which further optimizes the overall integration of the system, simplifies the transmission path of the optical signal, reduces signal loss and interference, and improves the stability and reliability of the system.

[0043] In a possible implementation manner, the collection port is closer to the connecting member than the emission port.

[0044] The collection port is closer to the connector than the transmission port. This layout optimizes the collection path of the optical signal, improves the efficiency of optical signal collection, and further enhances the overall performance of the system.

[0045] In a second aspect, the present application provides an atomic force microscope, including the above-mentioned atomic force microscope detection system.

[0046] The atomic force microscope provided in this application integrates the above-mentioned detection system and has multiple functions such as photothermal drive, photoexcitation and light collection, which can meet the high-precision detection needs in different application scenarios.

[0047] The atomic force microscope detection system provided in this application includes a scanner, a fiber optic device, and a probe assembly. The fiber optic device is located outside the scanner and includes an emission port for emitting laser light. The probe assembly is connected to the outside of the scanner and located on the same side of the scanner as the fiber optic device. The core of this design lies in integrating the fiber optic device and probe assembly directly outside the scanner, thus avoiding the use of complex optical components (such as an objective lens) in traditional coaxial optical designs. Through this integrated design, laser light can be emitted directly through the emission port of the fiber optic device and act on the probe assembly, without having to pass through the bulky and heavy optical components in traditional designs for convergence. This change significantly simplifies the overall structure of the system, reducing the number and size of optical components used, thereby achieving a lightweight and compact system structure. At the same time, by avoiding the weight burden of optical components in traditional designs, the system can better meet the needs of high-speed scanning and large-scale detection, effectively solving the problem of bulky systems caused by large and heavy optical components in existing technologies. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] In order to more clearly illustrate the implementation methods of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the implementation methods or the description of the prior art.

[0049] Figure 1 A first schematic diagram of an atomic force microscope detection system provided in this application;

[0050] Figure 2 A second schematic diagram of the atomic force microscope detection system provided in this application;

[0051] Figure 3 A third schematic diagram of the atomic force microscope detection system provided in this application;

[0052] Figure 4 This is the fourth schematic diagram of the atomic force microscope detection system provided in this application.

[0053] Description of reference numerals:

[0054] 100-Atomic force microscope detection system;

[0055] 1- Scanner; 2- Fiber optic device; 3- Probe assembly; 4- Connector; 5- Light field collection device;

[0056] 11-horizontal mechanism; 12-vertical mechanism; 21-transmitting port; 22-fiber interface; 23-light guide structure; 31-cantilever; 32-probe; 51-collection port; 52-light guide; 53-optical output port;

[0057] 231-collimating mirror; 232-reflecting mirror; 233-focusing mirror. DETAILED DESCRIPTION

[0058] As a high-precision surface morphology and physical property detection tool, the atomic force microscope detection system 100 is widely used in fields such as materials science, nanotechnology, biology, and medicine. Through the coordinated work of the scanner 1 and the probe assembly 3, the system can achieve high-resolution imaging of the sample surface and analysis of various physical properties. The system can be connected to external laser sources, light detectors, signal processing units and other equipment to provide support for various detection modes of the atomic force microscope, including photothermal drive, light excitation and light collection functions. By optimizing the system structure and optical path design, the detection system not only improves the detection efficiency and accuracy, but also achieves lightweight and compactness, making it better able to meet the needs of high-speed scanning and large-scale detection.

[0059] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0060] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0061] Please refer to Figure 1 , Figure 1 This is a first schematic diagram of the atomic force microscope detection system provided in this application.

[0062] In a first specific embodiment, the atomic force microscope detection system 100 provided in the embodiment of the present application mainly includes a scanner 1, and the atomic force microscope detection system 100 also includes an optical fiber device 2 and a probe assembly 3. The optical fiber device 2 is located on the outside of the scanner 1 and includes an emission port 21, which is used to emit laser light; the probe assembly 3 is connected to the outside of the scanner 1 and is located on the same side of the scanner 1 as the optical fiber device 2.

[0063] In traditional photothermal-driven atomic force microscopes, laser light typically needs to be focused by complex optical components (such as an objective lens) before it can be irradiated onto the probe cantilever. While this design can achieve photothermal actuation, the bulky and heavy optical components make the entire system bulky, making it difficult to achieve a lightweight and compact design, limiting its application in high-speed scanning and large-scale detection scenarios.

[0064] The relationship between lightweight and high-speed scanning is explained as follows.

[0065] The natural frequency of an atomic force microscope (AFM) detection system is inversely proportional to its mass. At the natural frequency, the subsystem resonates. Above this frequency, the amplitude rapidly decays to below the 3dB bandwidth. The lower the natural frequency, the lower the subsystem bandwidth and the longer the response time. Simply put, the greater the mass and inertia of the scanned object, the longer the response time to changes in position and velocity after external stimulation, and the slower the scanning speed.

[0066] The relationship between lightweight and wide-range detection is explained as follows.

[0067] The scenarios described in this application are explained as follows:

[0068] (1) When a coaxial optical path is used and the optical path is spatially scanned along with the probe, the mass of the scanned object is very large (usually greater than 2 kg). The scanning speed during large-scale scanning will be reduced to less than 0.05 times that of existing atomic force microscopes, greatly limiting the scope of application. In addition, the engineering cost of driving a large-mass scanned object for microscopic scanning is very high because a large-scale Wiener scanner is required to generate a sufficiently large driving force and a corresponding high-power high-voltage amplifier. The low scanning speed of a large-scale piezoelectric scanner will further reduce the scanning speed of the system.

[0069] (2) When a coaxial optical path is used and the optical path is not spatially scanned along with the probe, when the cantilever (e.g., width of about 40 μm) moves out of the range of the light spot (e.g., the light spot diameter is 20 μm), the laser will no longer be able to drive the probe, that is, the scanning range is limited by the light spot and cantilever size.

[0070] In summary, when the scanning subsystem is heavy, the scanning speed of large-scale scanning is greatly reduced, or even impossible. In the engineering design of this scenario, scanning speed is a key indicator, and lightweighting is an important condition for achieving large-scale scanning.

[0071] To address the above issues, the present application provides an atomic force microscope detection system 100. The system primarily includes a scanner 1, with an optical fiber device 2 and a probe assembly 3 integrated outside the scanner 1. The optical fiber device 2 includes an emission port 21 for emitting laser light, while the probe assembly 3 is connected to the outside of the scanner 1, on the same side of the scanner 1 as the optical fiber device 2. The core of this design lies in integrating the optical fiber device 2 and the probe assembly 3 directly outside the scanner 1, thereby avoiding the use of complex optical components (such as an objective lens) in traditional coaxial optical designs.

[0072] Through this integrated design, laser light can be emitted directly from the emission port 21 of the optical fiber device 2 and applied to the probe assembly 3, without having to be focused by the bulky and heavy optical components of traditional designs. This change significantly simplifies the overall structure of the system, reducing the number and size of optical components used, thereby achieving a lightweight and compact system structure. Furthermore, by avoiding the weight burden of optical components in traditional designs, the system effectively solves the problem of bulky systems caused by the large size and weight of optical components in existing technologies. This system can better meet the needs of high-speed scanning and large-scale detection.

[0073] In combination with the above structure and process description, it can be seen that the atomic force microscope detection system 100 has at least the following beneficial effects: the atomic force microscope detection system 100 avoids the use of complex optical elements in traditional coaxial light design by integrating the optical fiber device 2 and the probe assembly 3 on the outside of the scanner 1, thereby achieving simplification and lightweighting of the system structure, effectively solving the problem of bulky system caused by large volume and heavy weight of optical elements in the prior art, and has the same reliability and equipment performance as the coaxial light design.

[0074] Please continue to refer to Figure 1 In some embodiments, the optical fiber device 2 further comprises:

[0075] Optical fiber interface 22, used for accessing laser;

[0076] The light guide structure 23 is optically connected to the optical fiber interface 22 for transmitting laser light. The emission port 21 is provided on the light guide structure 23 .

[0077] In this embodiment, the design of the fiber optic device 2 is further optimized to achieve efficient laser access and transmission. Specifically, the fiber optic device 2 includes not only a launch port 21 but also an integrated fiber optic interface 22 and a light guide structure 23. As a key component for laser access, the fiber optic interface 22 is capable of introducing laser light from an external laser source into the entire system. This interface design ensures stable laser input, providing a foundation for subsequent optical transmission and applications.

[0078] The light-guiding structure 23 is optically connected to the optical fiber interface 22, and its main function is to efficiently transmit the connected laser to the emission port 21. The design of this light-guiding structure 23 not only reduces the energy loss of the laser during transmission, but also realizes the directional transmission of the laser through precise optical path design. The emission port 21 is located at the end of the light-guiding structure 23, ensuring that the laser can be emitted in the appropriate direction and intensity, thereby providing the required photothermal drive or other functions for the probe assembly 3. Through this structural design, the optical fiber device 2 not only realizes laser access and transmission, but also provides important support for the efficient operation of the entire atomic force microscope detection system 100.

[0079] Please continue to refer to Figure 1 In some cases, the optical fiber device 2 may adopt an optical fiber structure; specifically, the optical fiber device 2 has an optical fiber as its light-guiding structure 23, an optical fiber as its receiving end, and an emitting port 21 as its emitting end.

[0080] Specifically, fiber optic interface 22, serving as the receiving end of the optical fiber, is responsible for directing laser light from an external laser source into the optical fiber, ensuring that the laser light stably and efficiently enters the light-guiding structure 23. The transmission characteristics of optical fiber ensure minimal energy loss during laser transmission while maintaining beam quality.

[0081] The emission port 21 serves as the emission end of the optical fiber, emitting the laser after being transmitted through the optical fiber in a precise direction and intensity. This design not only simplifies the optical path structure, but also enables the optical fiber device 2 to better adapt to the overall layout requirements of the atomic force microscope detection system 100 through the high integration and flexibility of the optical fiber. The use of optical fiber also has the effects of strong anti-electromagnetic interference ability and good system compatibility, further improving the stability and reliability of the entire system. Through the synergistic effect of the optical fiber interface 22 and the emission port 21, the optical fiber device 2 can efficiently complete the access, transmission and emission tasks of the laser, and provide stable photothermal drive or other functional support for the probe assembly 3.

[0082] Optionally, the optical fiber structure used in the optical fiber device 2 is a standard optical fiber, such as a G.655 single-mode optical fiber, which has a specified diameter and refractive index distribution; the spatial light emitted from the optical fiber end face is approximately a Gaussian beam, and the wavefront phase distribution is relatively clear and easy to calculate.

[0083] Please refer to Figure 2 , Figure 2 This is a second schematic diagram of the atomic force microscope detection system provided in this application.

[0084] In some embodiments, the light guide structure 23 includes:

[0085] The collimator 231 is spaced apart from the optical fiber interface 22 and is used to convert the incoming laser light into parallel laser light.

[0086] A reflector 232 is disposed toward the collimator 231 so that the reflector 232 is located on the path of the laser light converted by the collimator 231 . The reflector 232 is used to change the reflection direction of the laser light.

[0087] The focusing mirror 233 is disposed toward the reflecting mirror 232 and is used to converge the laser light reflected from the reflecting mirror 232 .

[0088] In this embodiment, the light guide structure 23 is designed as an optical lens assembly to effectively process and transmit laser light. The light guide structure 23 comprises a collimating lens 231, a reflector 232, and a focusing lens 233. These optical components work together to ensure that the laser light is directed to the target location along a predetermined path and manner, thereby meeting the various functional requirements of the atomic force microscope detection system 100.

[0089] Specifically, collimator 231 is spaced apart from fiber interface 22 and is used to convert the laser light entering from fiber interface 22 into a parallel beam. This conversion is crucial for subsequent optical path adjustments, as the parallel beam maintains stable beam quality and energy distribution during transmission, providing an excellent foundation for subsequent beam reflection and focusing operations. Thanks to collimator 231, the laser light can enter the subsequent optical path system more efficiently and stably.

[0090] Reflector 232 is located in the path of the laser beam after it is converted by collimator 231. Its function is to change the direction of the laser beam. This directional adjustment allows the laser beam to propagate along a predetermined path, thereby achieving precise control of the beam direction. The design and positioning of reflector 232 ensure that the laser beam can be efficiently transmitted from collimator 231 to focusing lens 233 while maintaining beam integrity and energy efficiency. Through the reflection effect of reflector 232, the laser beam is guided to focusing lens 233, preparing for the subsequent focusing operation.

[0091] The focusing mirror 233 is one of the key components in the light guide structure 23, and its main function is to converge the laser reflected from the reflector 232. The design of the focusing mirror 233 is not limited to being set toward the probe assembly 3, but can converge the laser to different target positions according to different functional requirements. For example, when realizing the photothermal drive function, the focusing mirror 233 can converge the laser onto the probe assembly 3 to provide the probe with the required photothermal energy. However, the setting method of the focusing mirror 233 is not limited to this function. It can also converge the laser to the surface of the object to be measured or other specific positions according to the requirements of other application scenarios to achieve light excitation, light collection or other related functions. This flexible setting method enables the light guide structure 23 to adapt to a variety of different functional requirements, thereby improving the versatility and applicability of the atomic force microscope detection system 100.

[0092] Through the coordinated action of collimating mirror 231, reflector 232, and focusing mirror 233, light guide structure 23 achieves efficient conversion, direction adjustment, and precise focusing of the laser light input from fiber optic interface 22. This design not only improves the optical performance of the system but also provides the atomic force microscope detection system 100 with flexible optical path adjustment capabilities, enabling it to better adapt to different detection requirements and application scenarios.

[0093] Optionally, the high-speed light beam emitted from the optical fiber interface 22 is generally collimated using a plano-convex or biconvex lens. The specific optical design, such as the collimation distance - the distance from the end face to the lens principal point, the focal length, the setting of the lens parameters, etc., is not particularly limited.

[0094] Please continue to refer to Figure 1 In some embodiments, the emission port 21 is disposed toward a side of the optical fiber device 2 facing away from the scanner 1 , and the probe assembly 3 is located on a side of the emission port 21 facing away from the scanner 1 .

[0095] In this embodiment, the configuration of the emission port 21 and the relative positional relationship between the fiber optic device 2 and the scanner 1 are specifically designed to optimize the overall layout and functional implementation of the atomic force microscope detection system. Specifically, the emission port 21 is positioned toward the side of the fiber optic device 2 facing away from the scanner 1. This layout maintains a certain spatial distance between the emission port 21 and the scanner 1, thereby avoiding potential interference between the laser emission path and the scanner 1. Simultaneously, the probe assembly 3 is positioned on the side of the emission port 21 facing away from the scanner 1. This relative positional relationship ensures that the laser can directly act on the probe assembly 3 without the need for complex optical path adjustments or additional optical components for guidance.

[0096] This design not only simplifies the optical path structure and reduces the number and complexity of optical components in the system, but also improves the overall stability and reliability of the system. By placing the emission port 21 and the probe assembly 3 on the same side of the optical fiber device 2 and away from the scanner 1, the system can more efficiently utilize space and achieve a compact layout, while ensuring that the laser can act on the probe assembly 3 in the most direct way, thereby improving the efficiency and accuracy of photothermal drive or other functions. In addition, this layout also facilitates further expansion and multifunctionalization of the system. For example, in subsequent implementations, other functional modules can be added more flexibly without making major adjustments to the existing optical path.

[0097] In some embodiments, the atomic force microscope detection system 100 further includes:

[0098] The connector 4 connects the scanner 1 and the probe assembly 3 , and the optical fiber device 2 is provided on the connector 4 .

[0099] In this embodiment, the atomic force microscope detection system 100 further introduces a connector 4 to achieve the structural connection between the scanner 1 and the probe assembly 3, while also providing a mounting location for the optical fiber device 2. The design of the connector 4 not only enhances the overall mechanical stability of the system but also optimizes the spatial layout and collaborative working relationship between the various components.

[0100] Specifically, connector 4, a key structural component of the system, connects scanner 1 and probe assembly 3, ensuring their fixed and stable relative spatial positions. This connection enables probe assembly 3 to achieve precise scanning motion driven by scanner 1 while maintaining a close fit with fiber optic device 2. The fiber optic device 2 is mounted on connector 4, further optimizing the design of the laser transmission path, enabling stable laser transmission from fiber optic device 2 to probe assembly 3, providing reliable light source support for the system's photothermal drive and other functions.

[0101] By introducing connector 4, the AFM detection system 100 achieves greater flexibility and scalability in its structural design. Connector 4 not only provides a stable mounting base for the fiber optic device 2, but also optimizes the system's internal spatial layout through its structural design, enabling more efficient coordination between components. This design approach strongly supports the system's multifunctionality and high performance, while also facilitating potential future functional expansion and component upgrades.

[0102] In some embodiments, one end of the connector 4 is connected to the scanner 1, and the other end extends to the outside of the scanner 1 and is connected to the first end of the cantilever 31 of the probe assembly 3, and the probe 32 of the probe assembly 3 is provided at the second end of the cantilever 31.

[0103] In this embodiment, the design and layout of connector 4 further optimize the structure and function of atomic force microscopy detection system 100. One end of connector 4 is connected to scanner 1, while the other end extends outside of scanner 1 and connects to the first end of cantilever 31 of probe assembly 3. This structural design not only ensures the mechanical stability of the connection between scanner 1 and probe assembly 3, but also provides precise spatial positioning for probe assembly 3, enabling it to achieve precise scanning motion when driven by scanner 1.

[0104] Exemplarily, the probe assembly 3 includes a cantilever 31, the first end of which is connected to the scanner 1 via a connector 4, and a probe 32 disposed at the second end of the cantilever 31. This arrangement enables the probe 32 to perform precise scanning motion driven by the scanner 1 while maintaining appropriate contact or proximity with the surface of the object being measured, thereby achieving high-precision surface topography detection. The design and layout of the cantilever 31 provide the probe 32 with the necessary mechanical support and flexibility, enabling it to maintain stable detection performance during the scanning process.

[0105] Through the coordinated design of the connector 4 and the cantilever 31, the atomic force microscope detection system 100 achieves efficient connection and precise control between the scanner 1 and the probe assembly 3. This structural layout not only improves the overall stability and reliability of the system, but also optimizes the motion performance of the probe assembly 3 during the scanning process, enabling it to more efficiently complete surface topography detection tasks. In addition, this design provides a foundation for the system's adaptability and scalability in different application scenarios, ensuring the efficient operation of the atomic force microscope detection system 100 under various detection requirements.

[0106] In some embodiments, the fiber optic interface 22 of the fiber optic device 2 is located on the connector 4. This design further optimizes the structural layout and functional integration of the atomic force microscope detection system 100. By integrating the fiber optic interface 22 on the connector 4, the system not only achieves a tight connection between the fiber optic device 2, the scanner 1, and the probe assembly 3, but also ensures the stability and reliability of the laser transmission path.

[0107] Specifically, the fiber optic interface 22 is responsible for introducing the external laser source into the system. Its placement on the connector 4 allows the fiber optic interface 22 to maintain a relatively fixed position relative to the scanner 1 and probe assembly 3, thereby reducing vibration and interference during laser transmission. This layout not only improves the overall stability of the system but also ensures efficient laser transmission. Furthermore, the integrated design of the fiber optic interface 22 and connector 4 simplifies system assembly and commissioning, reducing system complexity.

[0108] Furthermore, placing the fiber optic interface 22 on the connector 4 facilitates system expansion and upgrades. For example, if additional functional modules need to be added or the laser transmission path needs to be optimized in the future, the position of the fiber optic interface 22 can be easily adjusted in coordination with the positions of other components. This design not only enhances system flexibility but also lays the foundation for subsequent functional expansion and performance improvements.

[0109] Please continue to refer to Figure 1 In some embodiments, the emission port 21 is arranged toward the cantilever 31 of the probe assembly 3 so that the cantilever 31 is located on the path of the laser emitted by the emission port 21 , and the laser emitted by the emission port 21 is used to irradiate the cantilever 31 .

[0110] In this embodiment, the atomic force microscope detection system 100 is based on photothermal actuation. The cantilever 31 of the probe assembly 3 is positioned in the path of the laser emitted from the emission port 21, allowing the laser to directly illuminate the cantilever 31. This design is designed to achieve photothermal actuation, ensuring that the probe assembly 3 can be driven to vibrate in a specific mode.

[0111] Specifically, since the emission port 21 is arranged toward the cantilever 31 of the probe assembly 3, the laser emitted by the emission port 21 is precisely guided to the position of the cantilever 31. This layout enables the laser to act efficiently on the cantilever 31, causing it to vibrate through the photothermal effect. The principle of photothermal drive is to utilize the energy of the laser to be absorbed by the cantilever 31 and converted into thermal energy, which in turn causes thermal expansion of the cantilever material, thereby generating vibration. This vibration is necessary for certain detection modes of the atomic force microscope. For example, in the tapping mode, the probe needs to vibrate to interact with the sample surface in a non-contact manner, thereby achieving high-precision surface morphology detection.

[0112] The laser path is placed behind the cantilever 31, rather than directly irradiating the probe 32, to avoid direct interference of the laser light on the interaction between the probe 32 and the sample surface. This design also ensures that the laser energy is fully absorbed by the cantilever 31, thereby achieving efficient photothermal actuation. Furthermore, by precisely controlling the laser intensity and irradiation position, the vibration amplitude and frequency of the cantilever 31 can be adjusted to suit different detection requirements.

[0113] Please refer to Figure 3 , Figure 3 This is a third schematic diagram of the atomic force microscope detection system provided in this application.

[0114] In some embodiments, the cantilever 31 of the probe assembly 3 is located outside the path of the laser emitted by the emission port 21 , and the laser emitted by the emission port 21 is used to irradiate the surface of the object to be measured.

[0115] In this embodiment, the principle of the atomic force microscope detection system 100 is light excitation. The design and function of the optical fiber device 2 are different from the photothermal drive mode, but focus on the light excitation function. Specifically, the cantilever 31 of the probe assembly 3 is arranged outside the path of the laser emitted by the emission port 21, which means that the laser does not directly act on the cantilever 31 or the probe 32, but directly irradiates the surface of the object to be measured. This design enables the optical fiber device 2 to stimulate changes in the physical properties of the surface of the object to be measured through principles such as photothermal and photochemical principles, thereby realizing the detection of the surface morphology and related physical properties of the object.

[0116] Specifically, laser light emitted from emission port 21 directly impacts the surface of the object under test, inducing changes in its physical properties through optical excitation. These changes may include an increase in surface temperature (photothermal effect), activation or breaking of chemical bonds (photochemical effect), and other physical phenomena related to light interactions. These changes can be detected by probe assembly 3, enabling high-precision detection of the object's surface morphology, surface photophysical properties, surface thermophysical properties, and surface thermochemical properties.

[0117] The advantage of this design is that it allows the fiber optic device 2 to detect various physical properties of the sample surface through optical excitation without direct contact with the probe assembly 3. This not only expands the application range of atomic force microscopy but also provides richer information for studying the surface properties of materials. By placing the laser path outside the cantilever 31, the system can avoid the potential impact of probe vibration caused by photothermal actuation on measurement accuracy, thereby achieving more stable and accurate detection.

[0118] Please refer to Figure 4 , Figure 4 This is the fourth schematic diagram of the atomic force microscope detection system provided in this application.

[0119] In some embodiments, the atomic force microscope detection system 100 further includes:

[0120] Light field collection device 5 is located outside of scanner 1 and faces the object under test. It is located outside the path of the laser emitted from emission port 21 and also on the return path of the laser after it strikes the surface of the object under test. It is used to collect light that returns from the surface of the object under test.

[0121] In this embodiment, the atomic force microscope detection system 100 is based on light collection. This system further expands its functionality by incorporating a light field collection device 5, thereby achieving the dual functions of light excitation and light collection. The light field collection device 5 is positioned outside the scanner 1 and outside the path of the laser emitted from the emission port 21. This layout ensures that the light field collection device 5 does not interfere with the initial laser emission path and avoids direct optical path conflict with the emission port 21.

[0122] The key location of the light field collection device 5 is its placement on the return path after the laser irradiates the surface of the object under test. This means that when the laser emitted from the emission port 21 irradiates and interacts with the surface of the object under test, the resulting return light (including scattered and reflected light) can be efficiently collected by the light field collection device 5. This return light carries important information about the surface of the object under test, such as surface morphology, photophysical properties, thermophysical properties, and thermochemical properties.

[0123] By introducing the light field collection device 5, the atomic force microscope detection system 100 can not only induce changes in the physical properties of the surface of the object under test through optical excitation, but also further collect the optical signals generated by these changes. This dual-function design enables the system to more comprehensively detect and analyze the characteristics of the surface of the object under test. For example, the light field collection device 5 can collect scattered or refracted light caused by optical excitation, thereby providing high-resolution information about the surface morphology. At the same time, by analyzing the spectral characteristics of the returned light, the photophysical and thermophysical properties of the surface of the object under test can also be obtained.

[0124] This design, combining both the probe assembly 3 and the light field collection device 5, provides a highly efficient detection solution for the atomic force microscope detection system 100. The probe assembly 3 is used to achieve high-precision surface topography detection, while the light field collection device 5 is used to collect the return light signal generated by optical excitation, thereby enabling the detection of surface photophysical, thermophysical, and thermochemical properties. This integrated detection solution not only enhances the system's versatility but also provides richer information and more comprehensive analytical tools for studying the complex properties of material surfaces.

[0125] In some embodiments, the light field collection device 5 is located on a side of the optical fiber device 2 facing away from the scanner 1 , and is located on a side of the probe assembly 3 facing the optical fiber device 2 .

[0126] In this embodiment, the layout of the light field collection device 5 is further optimized to achieve coordinated operation with the fiber optic device 2 and the probe assembly 3. Specifically, the light field collection device 5 is positioned on the side of the fiber optic device 2 facing away from the scanner 1, and on the side of the probe assembly 3 facing the fiber optic device 2. This layout design enables the light field collection device 5 to efficiently collect optical signals returned from the surface of the object under test while avoiding optical path interference with other components.

[0127] By placing the light field collection device 5 on the opposite side of the fiber assembly 2, the system fully utilizes the spatial layout and ensures the independence of the laser emission path and the return light collection path. Furthermore, the light field collection device 5 is located on the side of the probe assembly 3 facing the fiber assembly 2, allowing it to directly align with the optical signal reflected or scattered by the surface of the object under test, thereby achieving efficient and accurate optical signal collection.

[0128] This layout further enhances the functionality of atomic force microscope detection system 100, enabling it to, in optical excitation mode, emit laser light through optical fiber device 2 to stimulate changes in the physical properties of the object's surface, while simultaneously collecting the return light signals generated by these changes using optical field collection device 5. This dual functionality provides a more comprehensive and efficient technical means for detecting surface morphology, surface photophysical properties, surface thermophysical properties, and surface thermochemical properties.

[0129] In some embodiments, the light field collection device 5 includes:

[0130] The collection port 51 is used to collect the light returned from the surface of the object to be measured;

[0131] The light guide 52 is in optical communication with the collection port 51 and is used to transmit the laser light collected by the collection port 51;

[0132] The optical output port 53 is optically connected to the light guide 52 .

[0133] In this embodiment, the specific structure of the light field collection device 5 is further refined to achieve efficient and stable light signal collection and transmission. The light field collection device 5 includes three key components: a collection port 51 , a light guide 52 , and an optical output port 53 .

[0134] The collection port 51 is the front end of the light field collection device 5, facing the surface of the object under test. It is used to collect light reflected from the surface. This returned light may include scattered light, reflected light, or other optical signals. It carries information about the physical properties of the surface under test, such as surface morphology, photophysical properties, and thermophysical properties. The collection port 51 must be designed with high sensitivity and efficiency to ensure that it can collect as much returned light as possible.

[0135] Light guide 52 is in optical communication with collection port 51. Its primary function is to efficiently transmit the laser light collected by collection port 51 to the subsequent optical path. Light guide 52 can be made of optical fiber or other optically conductive materials, offering low loss and high transmission efficiency. Through light guide 52, the return optical signal is stably transmitted to optical output port 53, supporting subsequent signal processing and analysis.

[0136] Optical output port 53, in optical communication with light guide 52, forms the terminal structure of light field collection device 5. It is responsible for outputting the laser light transmitted through light guide 52 to other components of the system, such as a light detector or spectrum analyzer. The design of optical output port 53 must ensure the quality and stability of the output optical signal, enabling subsequent equipment to accurately analyze and process the signal.

[0137] Through the coordinated operation of the collection port 51, light guide 52, and optical output port 53, the light field collection device 5 achieves efficient collection, stable transmission, and reliable output of light returning from the surface of the object under test. This structural design not only improves the efficiency of optical signal collection but also provides important technical support for the multifunctional detection of the atomic force microscope detection system 100 in the optical excitation mode.

[0138] In some embodiments, the optical output port 53 is provided on the connector 4 connecting the scanner 1 and the probe assembly 3 .

[0139] In this embodiment, the layout of the optical output port 53 is further optimized to achieve efficient integration of the light field collection device 5 with the overall structure of the atomic force microscope detection system 100. Specifically, the optical output port 53 is provided on the connector 4, which is used to connect the scanner 1 and the probe assembly 3. This design not only simplifies the overall layout of the system but also improves the stability and reliability of optical signal transmission.

[0140] Positioning optical output port 53 on connector 4 enables close coordination between light field collection device 5, scanner 1, and probe assembly 3. As a key structural component of the system, connector 4 not only provides mechanical connection but also a stable mounting location for optical output port 53. This layout allows optical signals to be transmitted directly from light field collection device 5 to other components of the system, such as light detectors or signal processing units, without the need for additional connectors or complex optical path design.

[0141] Furthermore, by integrating the optical output port 53 on the connector 4, the system can better utilize space and reduce optical signal loss and interference during transmission. This design also facilitates the system's multifunctionality and scalability. For example, in subsequent implementations, additional functional modules can be added more flexibly without requiring major adjustments to the existing optical path.

[0142] In some embodiments, the collection port 51 is closer to the connector 4 than the emission port 21 .

[0143] In this embodiment, the collection port 51 of the light field collection device 5 is designed to be closer to the connector 4 than the emission port 21. This layout optimizes the spatial relationship between the light field collection device 5 and other key components of the atomic force microscope detection system 100, further improving the overall performance and functional synergy of the system.

[0144] Specifically, collection port 51, the front end of light field collection device 5, is responsible for collecting optical signals returning from the surface of the object under test. Positioning it closer to connector 4 means that collection port 51 has a shorter transmission distance to connector 4 than transmission port 21. This layout enables light field collection device 5 to more efficiently collect optical signals returning from the surface of the object under test, particularly those generated during the interaction between probe assembly 3 and the surface of the object under test.

[0145] Furthermore, the placement of the collection port 51 closer to the connector 4 relative to the emission port 21 provides greater flexibility in the system's optical path design. Since the emission port 21 is typically used to emit excitation light, while the collection port 51 collects return light, this relative positioning allows for more efficient separation and management of the excitation and return light paths. This separation not only reduces interference between the optical paths but also improves the efficiency and quality of optical signal collection.

[0146] In some cases, the light field collection device 5 may adopt an optical fiber structure, wherein the light guide 52 is an optical fiber, the collection port 51 serves as the receiving end of the optical fiber, and the light path output port 53 serves as the emitting end of the optical fiber.

[0147] In this embodiment, this design leverages the high efficiency and low loss characteristics of optical fiber in optical transmission, ensuring the stability and integrity of optical signals during transmission. Collection port 51, serving as the receiving end, directly faces the surface of the object under test and is responsible for collecting optical signals returned from the surface. These optical signals may include scattered light, reflected light, or other forms of light, and carry important information about the surface, such as surface morphology, photophysical properties, and thermophysical properties. By designing collection port 51 as the receiving end of an optical fiber, these returned optical signals can be efficiently coupled into the fiber, thereby achieving stable transmission of the optical signal.

[0148] The optical path output port 53 serves as the transmitting end of the optical fiber and is responsible for outputting the optical signal transmitted through the optical fiber to the subsequent parts of the system, such as an optical detector or a spectrum analyzer. This design not only ensures that the energy loss of the optical signal during transmission is minimized, but also enables the light field collection device 5 to better adapt to the overall layout requirements of the atomic force microscope detection system 100 through the high integration and flexibility of the optical fiber. The adoption of the optical fiber structure brings many advantages to the light field collection device 5, such as strong anti-electromagnetic interference ability, suitable for use in complex experimental environments; good system compatibility, easy to integrate with other optical systems or electronic equipment, and improved overall compatibility of the system; flexible spatial layout, the flexibility of the optical fiber allows the light field collection device 5 to be flexibly arranged as needed without affecting the transmission quality of the optical signal.

[0149] This fiber-optic structure design not only enables the efficient collection and transmission of optical signals by the light field collection device 5, but also further enhances the stability and reliability of the atomic force microscope detection system 100, providing strong support for high-precision surface topography detection and physical property analysis. This design enables the system to achieve efficient optical signal transmission while also possessing greater adaptability and scalability, laying the foundation for subsequent functional expansion and performance improvements.

[0150] In some cases, the scanner 1 includes a horizontal mechanism 11 and a vertical mechanism 12 . After the horizontal mechanism 11 and the vertical mechanism 12 are connected, they are connected to the probe assembly 3 or are connected to the probe assembly 3 through a connector 4 .

[0151] Optionally, the vertical mechanism 12 is connected to the lower side of the horizontal mechanism 11 , and the optical fiber device 2 and the probe assembly 3 are located on the lower side of the vertical mechanism 12 .

[0152] Optionally, the light field collecting device 5 is located at the lower side of the vertical structure 12 .

[0153] In this embodiment, the scanner 1 is designed to include two main components: a horizontal mechanism 11 and a vertical mechanism 12. This layered design enables the scanner 1 to achieve precise motion control in both the horizontal and vertical directions, thereby providing the atomic force microscope detection system 100 with efficient and flexible scanning capabilities.

[0154] Specifically, in a three-dimensional coordinate system, the three mutually perpendicular coordinate axes are defined as X, Y, and Z. The horizontal mechanism 11 is an XY scanner capable of movement within the XY plane. Through a precise drive mechanism, it enables rapid and stable movement in the X and Y directions, thereby driving the entire scanning system to scan a wide range of samples horizontally. This horizontal motion capability is crucial for achieving rapid scanning of large samples and significantly improves the system's scanning efficiency.

[0155] The vertical mechanism 12 is connected to the underside of the horizontal mechanism 11. It is a Z-scanner capable of moving in the Z direction, perpendicular to the XY plane, and primarily responsible for vertical movement. Through precise control, it can fine-tune the Z direction, thereby adjusting the distance between the probe assembly 3 and the surface of the object being measured. This vertical adjustment capability is crucial for achieving high-precision surface topography detection, especially in scenarios requiring precise control of the contact force between the probe and the sample.

[0156] During use, the Z-scanner (vertical mechanism 12) first adjusts the vertical position of the probe assembly 3 to ensure proper contact or proximity with the surface of the object being measured. Subsequently, the XY-scanner (horizontal mechanism 11) drives the Z-scanner and probe assembly 3 to perform XY scanning on a horizontal plane. This collaborative operation enables the atomic force microscope probing system 100 to achieve high-speed, high-precision scanning over a wide area while maintaining system stability and reliability.

[0157] The present application also provides an atomic force microscope, including the above-mentioned atomic force microscope detection system 100.

[0158] In this embodiment, by designing an innovative atomic force microscope detection system 100, the performance and application range of the atomic force microscope in various detection modes are significantly improved. The core characteristics of the system lie in the position design of the laser emission point and the optimization of the overall structure. Specifically, the laser emission point is located at the front end of the probe assembly 3. This design not only enables the system to efficiently perform large-scale scanning in three spatial dimensions, but also provides flexible scanning capabilities for achieving high-precision detection. In addition, the structure of the entire detection system is highly compact and lightweight. This design optimizes the overall layout of the system, enabling it to adapt to the needs of high-speed scanning and significantly improves detection efficiency.

[0159] By placing the laser emission point at the front end of the probe assembly 3 and combining it with a compact and lightweight design, the atomic force microscope of this application can be applied to various scenarios, including photothermal drive mode, light excitation and light collection mode. This design enables the system to achieve efficient and high-precision surface morphology and physical property analysis in various detection modes.

[0160] Specifically, the AFM detection system 100 has three core functions: photothermal drive, photoexcitation, and light collection. Based on these functions, the AFM can be configured as a photothermal drive AFM, a photoexcitation AFM, or a light collection AFM, thereby meeting the high-precision detection requirements in different application scenarios.

[0161] When configured as a photothermally driven atomic force microscope, the system uses laser light emitted by the fiber optic device 2 to directly illuminate the cantilever 31 of the probe assembly 3, driving the probe to vibrate through the photothermal effect. This mode is suitable for scenarios requiring high-precision surface topography detection. For example, in tapping mode, the vibration of the probe enables non-contact surface scanning, thereby obtaining high-resolution surface topography information.

[0162] When configured with a light-excitation atomic force microscope, the system uses laser light emitted by the optical fiber device 2 to directly illuminate the surface of the object under test, using photothermal or photochemical effects to stimulate changes in the physical properties of the surface under test. This mode is suitable for detecting the photophysical, thermophysical, and thermochemical properties of an object's surface, providing rich information for research in fields such as materials science, nanotechnology, and biomedicine.

[0163] When configured as a light-collecting atomic force microscope, the light field collection device 5 is used to collect optical signals returned from the surface of the object under test. These returned optical signals may include scattered light, reflected light, or refracted light, and they carry important information about the surface of the object under test. By analyzing these optical signals, the system can detect and analyze the surface topography and various physical properties of the object.

[0164] It should be noted that many of the components mentioned in this application are universal standard parts or components known to those skilled in the art, and their structures and principles can be learned by those skilled in the art through technical manuals or conventional experimental methods.

[0165] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0166] The above is a detailed introduction to the atomic force microscope and detection system provided by the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only intended to help understand the method and core ideas of the present application. It should be pointed out that, for those skilled in the art, without departing from the principles of the present application, several improvements and modifications may be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. An atomic force microscope detection system, characterized in that: Including scanner, fiber optic device and probe assembly, The optical fiber device is located outside the scanner, and includes an emission port, which is used to emit laser light. The probe assembly is connected to the outside of the scanner and is located on the same side of the scanner as the optical fiber device.

2. The atomic force microscope detection system according to claim 1, characterized in that: The optical fiber device further comprises: Optical fiber interface, used to access laser; The light guide structure is in optical communication with the optical fiber interface and is used for transmitting laser light. The emission port is provided on the light guide structure.

3. The atomic force microscope detection system according to claim 2, characterized in that: The light guide structure comprises: A collimator lens is spaced apart from the optical fiber interface and is used to convert the incoming laser light into parallel laser light; a reflector, disposed toward the collimating mirror, for changing the reflection direction of the laser; A focusing mirror is disposed toward the reflecting mirror and is used to converge the laser light reflected from the reflecting mirror.

4. The atomic force microscope detection system according to any one of claims 1 to 3, characterized in that: The emission port is arranged toward a side of the optical fiber device away from the scanner, and the probe assembly is located at a side of the emission port away from the scanner.

5. The atomic force microscope detection system according to any one of claims 1 to 4, characterized in that: The atomic force microscope detection system also includes: A connector connects the scanner and the probe assembly, and the optical fiber device is arranged on the connector.

6. The atomic force microscope detection system according to any one of claims 1 to 5, characterized in that: One end of the connector is connected to the scanner, and the other end extends to the outside of the scanner and is connected to the first end of the cantilever of the probe assembly. The probe of the probe assembly is arranged at the second end of the cantilever.

7. The atomic force microscope detection system according to any one of claims 1 to 6, characterized in that: The optical fiber interface of the optical fiber device is arranged on the connecting piece.

8. The atomic force microscope detection system according to any one of claims 1 to 7, characterized in that: The emission port is arranged toward the cantilever of the probe assembly, and the laser emitted by the emission port is used to irradiate the cantilever.

9. The atomic force microscope detection system according to any one of claims 1 to 7, characterized in that: The cantilever of the probe assembly is located outside the path of the laser emitted by the emission port, and the laser emitted by the emission port is used to irradiate the surface of the object to be measured.

10. The atomic force microscope detection system according to claim 9, characterized in that: The atomic force microscope detection system also includes: A light field collection device is located outside the scanner and is arranged toward the object to be measured. The light field collection device is located outside the path of the laser emitted by the emission port. The light field collection device is also located on the return path of the laser after it is irradiated on the surface of the object to be measured. The light field collection device is used to collect light returned from the surface of the object to be measured.

11. The atomic force microscope detection system according to claim 10, characterized in that: The light field collection device is located on a side of the optical fiber device facing away from the scanner, and is located on a side of the probe assembly facing the optical fiber device.

12. The atomic force microscope detection system according to claim 10 or 11, characterized in that: The light field collection device comprises: A collection port is used to collect light returned from the surface of the object to be measured; a light guide, in optical communication with the collection port, for transmitting the light collected by the collection port; The optical output port is optically connected to the light guide.

13. The atomic force microscope detection system according to claim 12, characterized in that: The optical path output port is provided on a connector connecting the scanner and the probe assembly.

14. The atomic force microscope detection system according to claim 13, characterized in that: The collection port is closer to the connecting piece than the emission port.

15. An atomic force microscope, characterized in that: The method comprises the atomic force microscope detection system according to any one of claims 1 to 14.

Images