Nano-silver paste presintering equipment and using method thereof

Abstract

The invention discloses nano-silver paste pre-sintering equipment and a using method thereof. The nano-silver paste pre-sintering equipment comprises a sintering box, a plurality of supporting plates, a vacuum pump, a gas purification mechanism and a micro-vibration mechanism. Compared with the prior art, the sintering device has the advantages that through the gas purification mechanism, air in the sintering box can be pumped out and efficiently filtered and purified in the presintering process, emission of harmful gas is reduced, the working environment is greatly improved, and the body health of workers is protected; through the arrangement of the micro-vibration mechanism, the substrate can slightly vibrate, so that the uniformity and compactness of the nano-silver paste and the performance of the nano-silver paste after final sintering can be improved; and through the mounting mechanism, the replacement operation of the activated carbon filter plate and the HEPA efficient filter plate can be conveniently completed, the maintenance time and the downtime are shortened, and the use efficiency of the equipment and the production continuity are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device manufacturing, and in particular to a nano silver paste pre-sintering device and a use method thereof. Background Art

[0002] Nanosilver paste is a conductive material composed of nanoscale silver particles, an organic carrier, and additives. It is widely used in the semiconductor industry for packaging, interconnection, and thermal management. By using a nanosilver sintering process to connect the chip and substrate, it achieves efficient heat dissipation and low thermal resistance.

[0003] Nanosilver paste is a paste-like liquid composed of silver particles and organic carriers. It is evenly coated between the chip and the substrate by printing. Pre-sintering is to remove the organic carrier and make the silver particles initially contact.

[0004] In the existing nano-silver paste sintering technology, during the sintering process, the organic solvents and organic binders in the nano-silver paste will volatilize at high temperatures, producing harmful gases such as formaldehyde and toluene. Traditional sintering equipment usually lacks an effective gas treatment mechanism, resulting in the direct discharge of harmful gases into the working environment, exacerbating health and safety risks. In addition, in the traditional nano-silver paste pre-sintering process, a static sintering method is usually adopted, that is, the substrate is fixed in the sintering equipment and heated to reach the pre-sintering temperature. However, this method has obvious shortcomings. Since the substrate remains stationary during the sintering process, the fluidity and diffusivity of the nano-silver paste at high temperatures are limited, resulting in uneven distribution of the paste on the substrate. The sintered silver layer is prone to pores and discontinuities, which in turn affect its density and conductivity. Summary of the Invention

[0005] The main purpose of the present invention is to provide a nano silver paste pre-sintering device and a method of using the same, which can effectively solve the problems in the background technology.

[0006] To achieve the above object, the technical solution adopted by the present invention is: a nano silver paste pre-sintering device, comprising: A sintering box, wherein a sealing door is provided on the front side wall of the sintering box, a partition is fixedly connected to the interior of the sintering box, a vibration frame is slidably provided between the inner walls on both sides of the sintering box, and multiple infrared heating tubes are installed on the inner walls on both sides of the vibration frame; A plurality of support plates, each of which is fixedly disposed in the vibration frame, wherein a plurality of placement grooves are evenly formed on the upper side wall of the support plate, wherein suction cups are installed in the placement grooves, and an air cavity is formed inside the plate body of the support plate and is connected to the plurality of suction cups; A vacuum pump, the vacuum pump being mounted on the upper outer wall of the vibration frame, wherein the air inlet of the vacuum pump is connected to the air cavities in the plurality of support plates via a shunt pipe; A gas purification mechanism, which is arranged on the upper outer wall of the sintering box and is used to purify harmful gases generated during the sintering process; The micro-vibration mechanism is arranged below the partition in the sintering box, and the micro-vibration mechanism can make the vibration frame drive the support plate to vibrate slightly.

[0007] As a further description of the above technical solution, the gas purification mechanism includes a purification box, an exhaust box, an air inlet pipe, an air outlet pipe, an activated carbon filter plate, a HEPA high-efficiency filter plate, a motor, a drive shaft and fan blades. The purification box and the exhaust box are fixedly connected to the upper outer wall of the sintering box. The front side wall of the purification box is connected to the interior of the sintering box through an air inlet pipe, and the rear side wall of the purification box is connected to the exhaust box through an air outlet pipe. The activated carbon filter plate and the HEPA high-efficiency filter plate are detachably connected in the purification box through an installation mechanism. The exhaust box is fixedly connected with a motor, and the output shaft end of the motor is fixedly connected to a drive shaft, and fan blades are fixedly sleeved on the drive shaft.

[0008] As a further description of the above technical solution, the micro-seismic mechanism includes a rotating rod, an eccentric wheel, a transfer rod, a connecting seat and a first spring. The rotating rods are rotatably connected on the front and rear inner walls of the sintering box and located below the partition. The other end of the rotating rod is fixedly connected to the eccentric wheel. A transfer rod is slidably inserted at the center of the partition. A connecting seat is rotatably provided between the two eccentric wheels. The other end of the connecting seat is rotatably connected to the lower end of the transfer rod. The upper end of the transfer rod is fixedly connected to the bottom wall of the vibration frame. First springs are provided at the four corners of the bottom wall of the vibration frame. The other end of the first spring is fixedly connected to the partition.

[0009] As a further description of the above technical solution, the mounting mechanism includes a groove, a slide, a wedge-shaped pressure block, a pull rod, a second spring, a circular groove, a push rod and a clamping spring. Two grooves are provided on the lower inner wall of the purification box, and a slide groove is provided on both side walls of the groove. A wedge-shaped pressure block is slidingly provided in the slide groove, and a pull rod is fixedly connected to a side wall of the wedge-shaped pressure block away from the groove. The other end of the pull rod extends to the outside of the purification box. A second spring is also provided between the wedge-shaped pressure block and the slide groove. A circular groove is provided at the center of the lower side wall of the groove, and a push rod is slidingly provided in the circular groove. A clamping spring is provided between the bottom wall of the push rod and the circular groove.

[0010] As a further description of the above technical solution, the rear end of the transmission shaft extends to the rear of the exhaust box and is fixedly connected to a driving wheel, the rear end of one of the rotating rods extends to the rear of the sintering box and is fixedly connected to a driven wheel, and a transmission toothed belt is wound between the driving wheel and the driven wheel.

[0011] As a further description of the above technical solution, plug-in blocks that are compatible with the grooves are fixedly connected to the bottom walls of the activated carbon filter plate and the HEPA high-efficiency filter plate.

[0012] As a further description of the above technical solution, positioning grooves for inserting wedge-shaped pressure blocks are provided on both side walls of the inserting block.

[0013] As a further description of the above technical solution, slideways adapted to the side walls of the activated carbon filter plate and the HEPA high-efficiency filter plate are provided on both inner walls of the purification box.

[0014] As a further description of the above technical solution, an electric gas valve is installed on the diversion pipe.

[0015] A method for using a nano silver slurry pre-sintering device, comprising the following steps: S1. First, open the sealing door, place the substrate coated with nano silver paste in the placement groove on the support plate and close the sealing door; S2. Then start the vacuum pump, which uses the diverter pipe to evacuate the air cavity in each support plate, so that the suction cup can simultaneously suck the substrate to fix it; S3. After fixing the substrate, start the infrared heating tube to preheat and bake the nano silver paste on the substrate.

[0016] S4. Start the gas purification mechanism, which can extract the air in the sintering box and filter and purify the toxic and harmful gases generated during heating.

[0017] S5. While the gas purification mechanism is running, the micro-vibration mechanism can be driven to operate, so that the vibration frame continuously vibrates slightly to improve the uniformity, density and final performance of the nano silver paste after sintering.

[0018] S6. After the pre-sintering is completed, open the electric air valve to allow air to enter the diversion pipe, that is, release the vacuum state of the suction cup, and then open the sealing door to take out the substrate.

[0019] Compared with the prior art, the present invention has the following beneficial effects: 1. During the pre-sintering process, the present invention utilizes a gas purification mechanism to extract and efficiently filter the air inside the sintering box, effectively preventing the leakage of harmful gases. This design significantly reduces harmful gas emissions, greatly improving the working environment and protecting workers' health.

[0020] 2. During the pre-sintering process, the present invention provides a micro-vibration mechanism to slightly vibrate the substrate. The vibration can make the nano-silver paste more evenly distributed on the substrate, reduce bubbles or agglomeration in the paste, and improve uniformity. It can also rearrange the nano-silver particles during the pre-sintering process, increase the contact area between the particles, and thus enhance the density and conductivity of the subsequent sintering. In addition, the slight vibration can promote the volatilization of organic solvents and shorten the pre-sintering time.

[0021] 3. The present invention can conveniently complete the replacement operation of the activated carbon filter plate and the HEPA high-efficiency filter plate through the installation mechanism, shortening the maintenance time and downtime, and improving the utilization efficiency of the equipment and the continuity of production. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of a nano-silver paste pre-sintering device and its use method proposed in the present invention; Figure 2 This is a schematic diagram of the support plate structure of a nano-silver paste pre-sintering device and its use method proposed in the present invention; Figure 3 A cross-sectional view of a support plate of a nano-silver paste pre-sintering device and a method of using the same proposed by the present invention; Figure 4 A schematic diagram of the vacuum pump structure of a nano-silver paste pre-sintering device and its use method proposed in the present invention; Figure 5 This is a schematic diagram of the gas purification mechanism structure of a nano-silver paste pre-sintering device and its use method proposed in the present invention; Figure 6 This is a schematic diagram of the purification box structure of a nano-silver slurry pre-sintering device and its use method proposed in the present invention; Figure 7 This is a schematic diagram of the exhaust box structure of a nano-silver paste pre-sintering device and its use method proposed in the present invention; Figure 8 A cross-sectional view of a sintering box for a nano-silver paste pre-sintering device and a method of using the same proposed by the present invention; Figure 9 This is a schematic diagram of the installation structure of a nano-silver paste pre-sintering device and its use method proposed in the present invention; In the figure: 1. Sintering box; 11. Sealing door; 2. Partition; 3. Vibration frame; 31. Infrared heating tube; 4. Support plate; 41. Placement slot; 42. Suction cup; 43. Air cavity; 32. Vacuum pump; 33. Diverter pipe; 5. Gas purification mechanism; 6. Micro-vibration mechanism; 51. Purification box; 52. Exhaust box; 53. Inlet pipe; 54. Outlet pipe; 55. Activated carbon filter plate; 56. HEPA high-efficiency filter plate; 57. Motor; 58. Drive shaft; 59. Fan blades; 7. Mounting mechanism; 61. Rotating rod; 62. Eccentric wheel; 63. Transfer rod; 64. Connecting seat; 65. First spring; 71. Groove; 72. Slide; 73. Wedge-shaped pressure block; 74. Pull rod; 75. Second spring; 76. Circular groove; 77. Push rod; 78. Clamping spring; 581. Driving wheel; 611. Driven wheel; 582. Transmission toothed belt; 551. Insert block; 552. Positioning groove; 511. Slide; 331. Electric air valve. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, and purpose effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0024] In the description of the present invention, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," "the other end," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc., should be understood in a broad sense. For example, "connected" may refer to a fixed connection, a detachable connection, or an integral connection; it may refer to a mechanical connection or an electrical connection; it may refer to a direct connection or an indirect connection through an intermediate medium; it may refer to internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0026] See also Figure 1-9 The present invention provides a nano silver paste pre-sintering device, comprising: A sintering box 1 is provided with a sealed door 11 on the front side wall of the sintering box 1. A partition 2 is fixedly connected to the interior of the sintering box 1. A vibration frame 3 is slidably provided between the inner walls on both sides of the sintering box 1. Multiple infrared heating tubes 31 are installed on the inner walls on both sides of the vibration frame 3. Multiple support plates 4, the support plates 4 are fixedly arranged in the vibration frame 3, and a plurality of placement grooves 41 are evenly opened on the upper side wall of the support plates 4, and suction cups 42 are installed in the placement grooves 41. The plate body of the support plates 4 is provided with an air cavity 43 connected to the plurality of suction cups 42; A vacuum pump 32 is mounted on the upper outer wall of the vibration frame 3 , and an air inlet of the vacuum pump 32 is connected to the air cavities 43 in the plurality of support plates 4 via a shunt pipe 33 ; The gas purification mechanism 5 is arranged on the upper outer wall of the sintering box 1 and is used to purify harmful gases generated during the sintering process; The micro-vibration mechanism 6 is arranged below the partition plate 2 in the sintering box 1. The micro-vibration mechanism 6 can make the vibration frame 3 drive the support plate 4 to vibrate slightly.

[0027] Through the setting of the above structure, the function of filtering and purifying the toxic and harmful gases generated during the pre-sintering process of the nano-silver paste is achieved, and the nano-silver paste during the pre-sintering process can be slightly vibrated, thereby improving the uniformity, density and final performance of the nano-silver paste after sintering.

[0028] Among them, the gas purification mechanism 5 includes a purification box 51, an exhaust box 52, an air inlet pipe 53, an air outlet pipe 54, an activated carbon filter plate 55, a HEPA high-efficiency filter plate 56, a motor 57, a transmission shaft 58 and a fan blade 59. The purification box 51 and the exhaust box 52 are fixedly connected to the upper outer wall of the sintering box 1. The front side wall of the purification box 51 is connected to the interior of the sintering box 1 through an air inlet pipe 53, and the rear side wall of the purification box 51 is connected to the exhaust box 52 through an air outlet pipe 54. The activated carbon filter plate 55 and the HEPA high-efficiency filter plate 56 are detachably connected to the purification box 51 through the mounting mechanism 7. The exhaust box 52 is fixedly connected to the motor 57, and the output shaft end of the motor 57 is fixedly connected to the transmission shaft 58. The fan blade 59 is fixedly sleeved on the transmission shaft 58.

[0029] Through the setting of the above structure, harmful gases such as formaldehyde and toluene generated by the nano silver paste due to heating during the pre-sintering process can be efficiently filtered and purified, reducing the emission of harmful gases, greatly improving the working environment and protecting the health of workers.

[0030] Among them, the micro-seismic mechanism 6 includes a rotating rod 61, an eccentric wheel 62, a transfer rod 63, a connecting seat 64 and a first spring 65. The rotating rod 61 is rotatably connected on the front and rear inner walls of the sintering box 1 and located below the partition 2. The other end of the rotating rod 61 is fixedly connected to the eccentric wheel 62. A transfer rod 63 is slidably inserted at the center of the partition 2. A connecting seat 64 is rotatably provided between the two eccentric wheels 62. The other end of the connecting seat 64 is rotatably connected to the lower end of the transfer rod 63. The upper end of the transfer rod 63 is fixedly connected to the bottom wall of the vibration frame 3. First springs 65 are provided at the four corners of the bottom wall of the vibration frame 3. The other end of the first spring 65 is fixedly connected to the partition 2.

[0031] By setting up the above structure, the substrate can be slightly vibrated during the pre-sintering process, thereby causing the nano-silver paste to slightly vibrate, which can make the nano-silver paste more evenly distributed on the substrate, reduce bubbles or agglomeration in the paste, and improve uniformity. It can also cause the nano-silver particles to rearrange during the pre-sintering process, increase the contact area between the particles, and thus enhance the density and conductivity of subsequent sintering. In addition, the slight vibration can promote the volatilization of organic solvents and shorten the pre-sintering time.

[0032] Among them, the mounting mechanism 7 includes a groove 71, a slide 72, a wedge-shaped pressure block 73, a pull rod 74, a second spring 75, a circular groove 76, a push rod 77 and a clamping spring 78. Two grooves 71 are provided on the lower inner wall of the purification box 51, and a slide 72 is provided on both side walls of the groove 71. A wedge-shaped pressure block 73 is slidably provided in the slide 72. A pull rod 74 is fixedly connected to the side wall of the wedge-shaped pressure block 73 away from the groove 71. The other end of the pull rod 74 extends to the outside of the purification box 51. A second spring 75 is also provided between the wedge-shaped pressure block 73 and the slide 72. A circular groove 76 is provided at the center of the lower side wall of the groove 71. A push rod 77 is slidably provided in the circular groove 76. A clamping spring 78 is provided between the bottom wall of the push rod 77 and the circular groove 76.

[0033] By setting the above structure, the activated carbon filter plate 55 and the HEPA high-efficiency filter plate 56 can be easily disassembled and assembled, which shortens the maintenance time and downtime, and improves the use efficiency of the equipment and the continuity of production.

[0034] Among them, the rear end of the transmission shaft 58 extends to the rear of the exhaust box 52 and is fixedly connected to the driving wheel 581. The rear end of one of the rotating rods 61 extends to the rear of the sintering box 1 and is fixedly connected to the driven wheel 611. A transmission toothed belt 582 is arranged between the driving wheel 581 and the driven wheel 611. The motor 57 drives the transmission shaft 58 to rotate and can also drive the driving wheel 581 to rotate. Driven by the transmission toothed belt 582, the driven wheel 611 can drive the rotating rod 61 connected to it to rotate, thereby making the micro-vibration mechanism 6 operate. The gas purification mechanism 5 and the micro-vibration mechanism 6 can operate simultaneously without additional driving force, which effectively reduces the cost and is more practical.

[0035] The bottom walls of the activated carbon filter plate 55 and the HEPA high-efficiency filter plate 56 are both fixedly connected with an inserting block 551 that matches the groove 71 .

[0036] Particularly, positioning grooves 552 for inserting the wedge-shaped pressure block 73 are provided on both side walls of the inserting block 551 . After the wedge-shaped pressure block 73 is inserted into the positioning grooves 552 , the inserting block 551 can be fixed in the groove 71 .

[0037] The inner walls on both sides of the purification box 51 are provided with slideways 511 adapted to the side walls of the activated carbon filter plate 55 and the HEPA high-efficiency filter plate 56 .

[0038] The shunt pipe 33 is provided with an electric valve 331 , which can control the on / off of the shunt pipe. When vacuuming, the electric valve 331 is closed, and when vacuuming, the electric valve 331 is opened.

[0039] A method for using a nano silver slurry pre-sintering device, comprising the following steps: S1: First, open the sealing door 11, place the substrate coated with nano silver paste in the placement groove 41 on the support plate 4 and close the sealing door 11; S2: Then the vacuum pump 32 is started. The vacuum pump 32 uses the diverter pipe 33 to evacuate the air cavity 43 in each support plate 4, so that the suction cup 42 can simultaneously suck the substrate to fix it; S3: After fixing the substrate, start the infrared heating tube 31 to preheat and bake the nano silver paste on the substrate; S4: Start the gas purification mechanism 5, which can extract the air in the sintering box 1 and filter and purify the toxic and harmful gases generated during heating; S5: While the gas purification mechanism 5 is running, the micro-vibration mechanism 6 can be driven to operate, so that the vibration frame 3 is continuously and slightly vibrated to improve the uniformity and density of the nano silver paste and the final performance after sintering; S6: After the pre-sintering is completed, the electric air valve 331 is opened to allow air to enter the diversion pipe 33, that is, the vacuum state of the suction cup 42 is released, and then the sealing door 11 is opened to take out the substrate.

[0040] When the present invention is in use, the sealing door 11 is opened, the substrate is placed in the placement groove 41 on the support plate 4, and then the sealing door 11 is closed, and the vacuum pump 32 is started. The vacuum pump 32 uses the diverter pipe 33 to evacuate the air cavities 43 in the multiple support plates 4 into a vacuum state, so that the suction cup 42 sucks the substrate, and then the infrared heating tube 31 is started for heating and sintering. During the sintering process, the output shaft of the motor 57 drives the transmission shaft 58 to rotate, and the rotation of the transmission shaft 58 can drive the fan blade 59 to rotate. When the fan blade 59 rotates, the air in the sintering box 1 can be sucked into the purification box 51 through the air inlet pipe 53. The activated carbon filter plate 55 and the HEPA high-efficiency filter plate 56 in the purification box 51 filter and purify the toxic and harmful gases in the air. The purified air enters through the outlet pipe 54 The air in the exhaust box 52 is discharged to the outside. When the transmission shaft 58 rotates, it can drive the driving wheel 581 to rotate. Driven by the transmission toothed belt 582, the driven wheel 611 will drive the rotating rod 61 connected to it to rotate, and driven by the eccentric wheel 62 and the connecting seat 64, the other rotating rod 61 rotates together. When the eccentric wheel 62 rotates, under the drive of the connecting seat 64, the first spring 65 can make the transfer rod 63 drive the vibration frame 3 to move up and down continuously, generating slight vibration, thereby vibrating the substrate on the support plate 4, making the nano silver paste more evenly distributed on the substrate, reducing bubbles or agglomeration in the paste, improving uniformity, and also allowing the nano silver particles to rearrange during the pre-sintering process, increasing the contact area between the particles, thereby enhancing the density of subsequent sintering. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. The sintering time is short and the pre-sintering time is short. When the filter plate 56 is removed, the activated carbon filter plate 55 or the HEPA high-efficiency filter plate 56 is inserted into the purification box 51 along the slide 511, so that the plug 551 at the bottom of the activated carbon filter plate 55 or the HEPA high-efficiency filter plate 56 is inserted into the groove 71. When the plug 551 enters the groove 71, it squeezes the wedge-shaped pressure block 73, and the wedge-shaped pressure block 73 is forced to retract into the slide groove 72 and squeeze the second spring 75. When the positioning groove 552 on the plug 551 is aligned with the slide groove 72, the wedge-shaped pressure block 73 is pushed by the second spring 75 to be inserted into the positioning groove 552 on the plug 551, and the plug 551 is fixed in the groove 71 to complete the installation. When the plug 551 is inserted into the groove 71, it will also press the push rod 77 downward, so that the pressing spring 78 is compressed. When disassembling next time,The activated carbon filter plate 55 or the HEPA high efficiency filter plate 56 can be ejected.

[0041] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A nano silver paste pre-sintering device, characterized in that: include: A sintering box (1), wherein a sealing door (11) is provided on the front side wall of the sintering box (1), a partition (2) is fixedly connected to the interior of the sintering box (1), a vibration frame (3) is slidably provided between the inner walls on both sides of the sintering box (1), and a plurality of infrared heating tubes (31) are installed on the inner walls on both sides of the vibration frame (3); A plurality of support plates (4), wherein the support plates (4) are fixedly arranged in the vibration frame (3), a plurality of placement grooves (41) are evenly formed on the upper side wall of the support plates (4), a suction cup (42) is installed in the placement groove (41), and an air cavity (43) connected to the plurality of suction cups (42) is formed inside the plate body of the support plates (4); A vacuum pump (32), the vacuum pump (32) being mounted on the upper outer wall of the vibration frame (3), the air inlet of the vacuum pump (32) being connected to the air cavities (43) in the plurality of support plates (4) via a shunt pipe (33); A gas purification mechanism (5), the gas purification mechanism (5) being arranged on the upper outer wall of the sintering box (1), and the gas purification mechanism (5) being used to purify harmful gases generated during the sintering process; A micro-vibration mechanism (6) is provided below the partition (2) in the sintering box (1). The micro-vibration mechanism (6) can cause the vibration frame (3) to drive the support plate (4) to vibrate slightly.

2. The nano silver paste pre-sintering device according to claim 1, characterized in that: The gas purification mechanism (5) includes a purification box (51), an exhaust box (52), an air inlet pipe (53), an air outlet pipe (54), an activated carbon filter plate (55), a HEPA high-efficiency filter plate (56), a motor (57), a transmission shaft (58) and a fan blade (59). The purification box (51) and the exhaust box (52) are fixedly connected to the upper outer wall of the sintering box (1). The front side wall of the purification box (51) and the interior of the sintering box (1) are connected by an air inlet pipe (53). ) are connected, the rear side wall of the purification box (51) is connected to the exhaust box (52) through an air outlet pipe (54), an activated carbon filter plate (55) and a HEPA high-efficiency filter plate (56) are detachably connected in the purification box (51) through a mounting mechanism (7), a motor (57) is fixedly connected in the exhaust box (52), an output shaft end of the motor (57) is fixedly connected to a transmission shaft (58), and a fan blade (59) is fixedly sleeved on the transmission shaft (58).

3. The nano silver paste pre-sintering device according to claim 2, characterized in that: The micro-vibration mechanism (6) includes a rotating rod (61), an eccentric wheel (62), a transfer rod (63), a connecting seat (64) and a first spring (65). The rotating rod (61) is rotatably connected on the inner walls of the front and rear sides of the sintering box (1) and located below the partition (2). The other end of the rotating rod (61) is fixedly connected to the eccentric wheel (62). A transfer rod (63) is slidably inserted at the center of the partition (2). A connecting seat (64) is rotatably provided between the two eccentric wheels (62). The other end of the connecting seat (64) is rotatably connected to the lower end of the transfer rod (63). The upper end of the transfer rod (63) is fixedly connected to the bottom wall of the vibration frame (3). First springs (65) are provided at the four corners of the bottom wall of the vibration frame (3). The other end of the first spring (65) is fixedly connected to the partition (2).

4. The nano silver paste pre-sintering device according to claim 2, characterized in that: The mounting mechanism (7) includes a groove (71), a slide (72), a wedge-shaped pressure block (73), a pull rod (74), a second spring (75), a circular groove (76), a push rod (77) and a pressing spring (78). Two grooves (71) are provided on the lower inner wall of the purification box (51). Slides (72) are provided on both side walls of the groove (71). A wedge-shaped pressure block (73) is slidably provided in the slide (72). The wedge-shaped pressure block (73) A pull rod (74) is fixedly connected to one side wall away from the groove (71), and the other end of the pull rod (74) extends to the outside of the purification box (51). A second spring (75) is provided between the wedge-shaped pressure block (73) and the slide groove (72). A circular groove (76) is provided at the center of the lower side wall of the groove (71), and a push rod (77) is provided to slide in the circular groove (76). A pressing spring (78) is provided between the bottom wall of the push rod (77) and the circular groove (76).

5. The nano silver paste pre-sintering device according to claim 3, characterized in that: The rear end of the transmission shaft (58) extends to the rear of the exhaust box (52) and is fixedly connected to a driving wheel (581); the rear end of one of the rotating rods (61) extends to the rear of the sintering box (1) and is fixedly connected to a driven wheel (611); a transmission toothed belt (582) is wound between the driving wheel (581) and the driven wheel (611).

6. The nano silver paste pre-sintering device according to claim 4, characterized in that: The bottom walls of the activated carbon filter plate (55) and the HEPA high-efficiency filter plate (56) are both fixedly connected with an insert (551) that is compatible with the groove (71).

7. The nano silver paste pre-sintering device according to claim 6, characterized in that: Both side walls of the insert block (551) are provided with positioning grooves (552) for inserting the wedge-shaped pressure block (73).

8. The nano silver paste pre-sintering device according to claim 4, characterized in that: Slideways (511) adapted to the side walls of the activated carbon filter plate (55) and the HEPA high-efficiency filter plate (56) are provided on both inner walls of the purification box (51).

9. The nano silver paste pre-sintering device according to claim 1, characterized in that: An electric air valve (331) is installed on the diversion pipe (33).

10. A method for using a nano silver paste pre-sintering device, characterized in that: The steps are as follows: S1, first open the sealing door (11), place the substrate coated with the nano silver paste in the placement groove (41) on the support plate (4) and close the sealing door (11); S2, then starting the vacuum pump (32), the vacuum pump (32) uses the diverter pipe (33) to evacuate the air cavity (43) in each support plate (4), so that the suction cup (42) can simultaneously suck the substrate to fix it; S3, after fixing the substrate, start the infrared heating tube (31) to preheat and bake the nano silver paste on the substrate; S4, starting the gas purification mechanism (5), which can extract the air in the sintering box (1) and filter and purify the toxic and harmful gases generated during heating; S5. While the gas purification mechanism (5) is running, the micro-vibration mechanism (6) can be driven to operate, so that the vibration frame (3) continuously and slightly vibrates to improve the uniformity and density of the nano silver paste and the final performance after sintering; S6. After the pre-sintering is completed, the electric air valve (331) is opened to allow air to enter the diversion pipe (33), thereby releasing the vacuum state of the suction cup (42), and then the sealing door (11) is opened to remove the substrate.

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