Beam characteristic integrated distribution measurement system for ultrasonic molecular beam

Abstract

The invention provides a beam characteristic integrated distribution measurement system for an ultrasonic molecular beam, relates to the technical field of ultrasonic molecular beam injection, and solves the limitation problem that vacuum environment compatibility and multi-parameter synchronous measurement requirements are difficult to meet in the prior art. In the system, a glow discharge module generates and maintains glow discharge in a vacuum chamber, so that existing gas is ionized to form plasma; the SMBI module maintains the preset vacuum degree of the vacuum chamber, configures SMBI neutral particle beams and injects the SMBI neutral particle beams into the area where the plasma is located in the vacuum chamber; the probe measurement module measures the saturation flow of the ultrasonic molecular beam particles and obtains the distribution measurement result of the beam velocity of the ultrasonic molecular beam particles; and the high-speed image acquisition module shoots the whole process of beam morphology change after ionization to obtain an optical morphology evolution measurement result. Through the synergistic effect of the functional modules, the measurement of parameters such as beam morphology, divergence angle, effective injection distance and the like of the ultrasonic molecular beam can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic molecular beam injection, and in particular to an integrated distribution measurement system for beam characteristics of ultrasonic molecular beams. Background Art

[0002] In the engineering process of magnetic confinement fusion experimental devices and future fusion reactors, plasma density control and fuel replenishment technologies have always been core links to ensure the stable operation of the devices. Supersonic molecular beam injection (SMBI) technology, as the mainstream fueling method in the current controlled nuclear fusion field, has been adopted by many large tokamaks worldwide due to its significant beam penetration depth, regionalized directional transport characteristics, and high fuel particle deposition efficiency. This technology directly injects fuel into the plasma confinement region via a high-speed neutral particle beam, effectively avoiding the edge localized mode abnormal perturbations caused by traditional gas delivery methods while improving fueling efficiency. Its physical properties and engineering applicability are of great significance to the steady-state operation of fusion devices.

[0003] As fusion research advances towards engineering applications, higher requirements are placed on the performance optimization of ultrasonic molecular beam injection technology. Among them, the control of the beam's lateral divergence angle, the expansion of the axial effective injection distance, and the spatial evolution characteristics of the velocity distribution have become key parameters affecting the charging efficiency and plasma confinement quality. In order to achieve precise control of technical parameters, it is necessary to systematically characterize the density distribution, velocity gradient, and spatial morphology of the molecular beam field. However, there are still significant technical challenges in the non-interference measurement of ultrasonic molecular beams in a low background pressure environment. This is mainly due to the inherent contradiction between the transient characteristics of the molecular beam field and the compatibility requirements of the vacuum environment.

[0004] The current mainstream flow field diagnostic technology has certain limitations in practical applications. Although the schlieren observation system based on the principle of optical refraction can obtain the spatial distribution information of the beam density, its measurement dimension is limited to two-dimensional projection data, and it is difficult to reconstruct the velocity gradient distribution of the three-dimensional flow field. Although particle image velocimetry technology has the ability to measure velocity fields, its imaging mechanism that relies on tracer particles is incompatible with the clean vacuum environment required by the ultrasonic molecular beam device. At the same time, it is limited by the camera frame rate and particle response characteristics, and its upper limit of velocity measurement is difficult to cover the core velocity range of the molecular beam. In addition, although molecular labeling technologies such as laser-induced fluorescence can realize the velocity distribution measurement of specific components, they are limited by the problems of signal intensity and background noise suppression, and the measurement accuracy in low-density areas still needs to be improved.

[0005] The limitations of existing diagnostic technologies make it difficult to fully capture the dynamic evolution of ultrasonic molecular beams, which restricts the understanding of beam focusing mechanisms and the optimization of nozzle structures. Especially in fusion reactor-level engineering applications, key scientific issues such as the interaction between molecular beams and confining magnetic fields and the dynamic changes in beam attenuation length still require the support of more precise experimental measurement data. Therefore, the development of a new diagnostic system that is compatible with vacuum environment requirements and capable of simultaneous multi-parameter measurement has become an urgent need to improve the understanding of ultrasonic molecular beam injection technology. Summary of the Invention

[0006] The present invention aims to address the limitations of existing ultrasonic molecular beam characteristics measurement methods, which struggle to meet vacuum compatibility and the requirements for simultaneous multi-parameter measurement. Therefore, a system for integrated distribution measurement of ultrasonic molecular beam characteristics is proposed. The system's core modules include a glow discharge module, a SMBI module, a probe measurement module, and a high-speed image acquisition module. Through the synergistic effect of these functional modules, the present invention can measure parameters such as ultrasonic molecular beam profile, divergence angle, effective injection distance, and velocity distribution.

[0007] The present invention adopts the following technical solutions to achieve the purpose: A beam characteristic integrated distribution measurement system for ultrasonic molecular beams, the system comprising the following functional modules: A glow discharge module is used to generate and maintain a glow discharge in a vacuum chamber to ionize the existing gas to form plasma, wherein the vacuum chamber has a preset vacuum degree that satisfies the discharge conditions; The SMBI module is used to maintain the preset vacuum level of the vacuum chamber and configure the SMBI neutral particle beam and inject it into the plasma area in the vacuum chamber. After injection, the SMBI neutral particle beam is instantly ionized, causing the electric field distribution and brightness of the plasma area to change; The probe measurement module is used to measure the ultrasonic molecular beam particle saturation flow formed after the SMBI neutral particle beam is ionized, and obtain the distribution measurement results of its beam velocity; The high-speed image acquisition module is used to capture the entire process of the SMBI neutral particle beam's beam morphology changes after ionization, and obtain the measurement results of its optical morphology evolution.

[0008] Specifically, the optical morphology evolution measurement results obtained by the high-speed image acquisition module include the beam morphology, beam divergence angle and effective injection distance of the ultrasonic molecular beam.

[0009] Specifically, the system also includes a control cabinet, which is connected to the glow discharge module, the SMBI module, the probe measurement module and the high-speed image acquisition module respectively; The control cabinet is used to remotely control and adjust various control parameters, including: the power supply parameters and the distance between the discharge electrodes of the glow discharge module; the preset vacuum maintained by the SMBI module, the gas pressure for configuring the SMBI neutral particle beam, the injection time, pulse width and frequency of the SMBI neutral particle beam; the probe position of the probe measurement module; and the sampling frequency and sampling resolution of the high-speed image acquisition module. The control cabinet realizes the integrated distribution measurement of the beam characteristics of the corresponding ultrasonic molecular beam in various scenarios through remote control and adjustment of multiple types of control parameters.

[0010] Furthermore, the glow discharge module includes a high voltage power supply control box, a high voltage power supply and positive and negative electrode plates connected in sequence; The high-voltage power supply control box is placed in the control cabinet of the system and is used to adjust the output parameters of the high-voltage power supply and the distance between the positive and negative electrode plates according to the preset vacuum degree of the vacuum chamber, thereby controlling and maintaining the uniformity of the glow discharge; The high voltage power supply is used to provide electrical energy support for the application of the electric field between the positive and negative electrode plates; The positive and negative electrode plates are placed in parallel in the vacuum chamber, and are used to generate an electric field of preset strength between the plates under the action of a high-voltage power supply, so that the existing gas in the vacuum chamber is ionized to form plasma; the area between the positive and negative electrode plates is the area where the plasma is located.

[0011] Preferably, a distance adjustment component is integrated at the positive plate of the positive and negative electrode plates, and the distance adjustment component is used to accept the control of the high-voltage power supply control box to adjust the distance between the positive plate and the negative plate; The electrical connection point lead of the positive plate in the positive and negative electrode plates passes through the vacuum chamber and is connected to the anode of the high-voltage power supply; the negative plate in the positive and negative electrode plates is fixed in the vacuum chamber, and its electrical connection point lead passes through the vacuum chamber and is connected to the cathode of the high-voltage power supply.

[0012] Furthermore, the SMBI module includes an air extraction system, an air distribution system, a pulse controller, and an SMBI injector; The exhaust system is used to start the exhaust unit to perform exhaust operations on the vacuum chamber to maintain the vacuum degree of the vacuum chamber at a preset level, and feed the preset vacuum degree back to the glow discharge module; The gas distribution system is used to configure the SMBI neutral particle beam and adjust the pressure of the corresponding gas source during injection; The pulse controller is used to adjust the injection time, pulse width and frequency parameters of the SMBI neutral particle beam through timing control. The SMBI injector is used to inject the configured SMBI neutral particle beam into the plasma area in the vacuum chamber after the vacuum degree, gas source pressure and injection parameters of the above-mentioned vacuum chamber reach the preset values.

[0013] Preferably, the air extraction system is connected to an air extraction system control box, the air distribution system is connected to an air distribution system control box, and the pulse controller is connected to a pulse controller control box; the air extraction system control box, the air distribution system control box, and the pulse controller control box are all placed in a control cabinet of the system; wherein the air extraction system control box maintains the vacuum degree of the vacuum chamber at a preset level by means of a fine-tuning valve while starting the air extraction unit; The SMBI injector adopts a flange assembly structure and is installed on the side wall of the vacuum chamber. The outer side of the flange is connected to the gas distribution system through a pipeline, and the inner side of the flange is connected to the integrated Laval nozzle; the nozzle injection angle is adjustable, and the nozzle position corresponds to the position of the plasma area in the vacuum chamber.

[0014] Furthermore, the probe measurement module includes a scanning probe module control box, a probe signal acquisition module and a scanning probe module connected in sequence; The scanning probe module control box is placed in the control cabinet of the system and is used to obtain the measurement signal from the probe signal acquisition module and control the displacement of the scanning probe module in a preset three-dimensional space distribution; The probe signal acquisition module is used to obtain the current signal of the ultrasonic molecular beam particle saturation flow through the scanning probe module, and transmit it to the scanning probe module control box after forming a measurement signal; The scanning probe module is placed in the vacuum chamber, and the detection end is located between the positive and negative electrode plates of the glow discharge module. It is used to measure the saturation flow of ultrasonic molecular beam particles formed after ionization and transmit the corresponding current signal to the probe signal acquisition module.

[0015] Preferably, the scanning probe module is further configured with a displacement module composed of two stepper motors, and the displacement module is connected to the scanning probe module control box through the probe signal acquisition module, so that the scanning probe module performs horizontal and vertical displacement under control.

[0016] Furthermore, the high-speed image acquisition module is arranged outside the vacuum chamber and is connected to a high-speed image acquisition module control box; the control box is placed in the control cabinet of the system and is connected to the SMBI module; the high-speed image acquisition module control box is used to control the high-speed image acquisition module through an observation window arranged on the side wall of the vacuum chamber corresponding to the area where the plasma is located, according to external triggering or internal triggering instructions, to synchronously perform high-speed shooting and acquisition of images during the injection of the SMBI neutral particle beam, and to obtain and store the acquired data.

[0017] In summary, due to the adoption of this technical solution, the beneficial effects of the present invention are as follows: The present invention effectively solves the technical bottleneck of characterizing the beam characteristics of ultrasonic molecular beams by constructing a multi-dimensional integrated measurement system. The present invention adopts a combination of glow discharge and plasma diagnosis to achieve instant ionization conversion of neutral particle beams in a vacuum environment, and converts velocity gradient information that is difficult to capture with traditional optical diagnosis into measurable electrical parameters. This measurement mechanism based on plasma discharge response breaks through the limitation that the schlieren system can only obtain density distribution, while avoiding the dependence of particle image velocimetry technology on tracer particles, freeing velocity field measurement from the compatibility constraints of the vacuum environment. By synchronously collecting the optical morphology evolution and electrical parameter distribution of the ionization region, the present invention has for the first time achieved the joint characterization of geometric parameters such as beam divergence angle and effective injection distance with velocity distribution, providing a new technical path for analyzing the three-dimensional flow field structure of ultrasonic molecular beams.

[0018] The system of the present invention constructs a complete beam characteristic analysis framework through the collaborative work of multiple modules. The high-speed image acquisition module can fully record the dynamic evolution of the ionization region and provide time series data support for the accurate reconstruction of the beam spatial morphology. The probe measurement module can establish a quantitative mapping relationship of the velocity distribution through saturation current analysis. Its measurement accuracy is not limited by the particle response time and can cover a wider range of velocity gradients. This comprehensive measurement solution that integrates optical diagnosis and electrical measurement not only improves the parameter completeness of ultrasonic molecular beam diagnosis, but also provides traceable experimental data for nozzle structure optimization and beam focusing mechanism research. The system's adaptability to vacuum environments enables it to be directly applied to the engineering verification link of fusion devices, providing key support for the engineering application of ultrasonic molecular beam injection technology to the fusion reactor level. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention further illustrates its implementation and technical solutions in detail through the following drawings, which specifically include 5 drawings as follows: Figure 1 Schematic diagram of the structure of the integrated distribution measurement system for beam characteristics of the present invention; Figure 2 This is an example diagram of the hardware layout of the beam characteristic integrated distribution measurement system of the present invention; Figure 3 A side view of the external structure of the actuator in the system of the present invention; Figure 4 A cross-sectional view of the internal structure of the actuator in the system of the present invention; Figure 5 This is a working logic diagram of the beam characteristic integrated distribution measurement system of the present invention.

[0020] The meanings of the symbols in the accompanying drawings are as follows: 100-control cabinet, 110-scanning probe module control box, 120-high-voltage power supply control box, 130-gas distribution system control box, 140-pulse controller control box, 150-exhaust system control box, 160-high-speed image acquisition module control box; 200-glow discharge module, 210-high voltage power supply, 220-positive and negative electrode plates; 300-probe measurement module, 310-scanning probe module, 320-probe signal acquisition module; 400-SMBI module, 410-exhaust system, 420-gas distribution system, 430-pulse controller, 440-SMBI injector; 500-High-speed image acquisition module. DETAILED DESCRIPTION

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0023] Example 1 like Figure 1 As shown, a beam characteristic integrated distribution measurement system for ultrasonic molecular beams includes the following functional modules: The glow discharge module 200 is used to generate and maintain a glow discharge in a vacuum chamber to ionize the existing gas to form a plasma, wherein the vacuum chamber has a preset vacuum degree that satisfies the discharge conditions; SMBI module 400 is used to maintain a preset vacuum level in the vacuum chamber and configure and inject an SMBI neutral particle beam into the plasma region of the vacuum chamber. The SMBI neutral particle beam is instantaneously ionized upon injection, and changes in the flow field before and after the shock wave alter the electric field distribution in the discharge region, thereby causing macroscopic changes in the electric field distribution and brightness of the plasma region. The probe measurement module 300 is used to measure the ultrasonic molecular beam particle saturation flow formed after the SMBI neutral particle beam is ionized, and obtain the distribution measurement result of its beam velocity; The high-speed image acquisition module 500 is used to capture the entire process of the beam morphology change after the SMBI neutral particle beam is ionized, and obtain the measurement results of its optical morphology evolution.

[0024] In this embodiment, the optical morphology evolution measurement results acquired by the high-speed image acquisition module 500 include the beam morphology, beam divergence angle, and effective injection distance of the ultrasonic molecular beam.

[0025] As a preferred embodiment of this invention, Figure 1 and Figure 2 As shown, the system further includes a control cabinet 100, which is connected to the glow discharge module 200, the SMBI module 400, the probe measurement module 300 and the high-speed image acquisition module 500 respectively; The control cabinet 100 is used to remotely control and adjust various control parameters, including: the power supply parameters and the discharge plate spacing of the glow discharge module 200; the preset vacuum maintained by the SMBI module 400, the gas pressure for configuring the SMBI neutral particle beam, the injection time, pulse width, and frequency of the SMBI neutral particle beam; the probe position of the probe measurement module 300; and the sampling frequency and sampling resolution of the high-speed image acquisition module 500. The control cabinet 100 realizes the integrated distribution measurement of the beam characteristics of the corresponding ultrasonic molecular beam in various scenarios through remote control and adjustment of various control parameters.

[0026] The probe measurement module 300 and the high-speed image acquisition module 500 are key components for acquiring measurement data in this embodiment. They are both controlled by corresponding control boxes in the control cabinet 100 and store the measurement data acquired by each of them accordingly.

[0027] like Figure 2 As shown, the control boxes placed in the control cabinet 100 include: a scanning probe module control box 110, a high-voltage power supply control box 120, a gas distribution system control box 130, a pulse controller control box 140, an exhaust system control box 150 and a high-speed image acquisition module control box 160.

[0028] The scanning probe module control box 110 can adjust the relative position of the probe to the injector according to the test requirements, including horizontal displacement and vertical displacement, so as to achieve the distribution measurement of the beam velocity.

[0029] The high-voltage power supply control box 120 can modify the power supply output parameters, including voltage, current and discharge mode, according to the discharge requirements, so as to achieve the control of glow discharge uniformity under different test conditions.

[0030] The gas distribution system control box 130 can operate the gas distribution system 420 according to set values ​​based on different test conditions to achieve and maintain the set gas pressure, so that the SMBI module 400 can achieve neutral particle beam injection.

[0031] The pulse controller control box 140 can adjust the injection time, injection pulse width and injection frequency of the neutral particle beam according to set values ​​according to different test conditions.

[0032] The exhaust system control box 150 can exhaust the vacuum chamber according to the set value according to different test conditions to achieve and maintain the set vacuum level.

[0033] The high-speed image acquisition module control box 160 can operate the high-speed image shooting system according to different sampling frequencies, image resolutions, etc. according to set values ​​to collect beam flow to form a full picture.

[0034] Example 2 Based on the first embodiment, this embodiment provides a detailed and preferred introduction to the glow discharge module 200 in the beam characteristic integrated distribution measurement system.

[0035] Can be combined Figure 2 、 Figure 3 and Figure 4 As shown in FIG, the glow discharge module 200 includes a high-voltage power supply control box 120, a high-voltage power supply 210, and positive and negative electrode plates 220, which are connected in sequence. The glow discharge module 200 is a discharge module used to form plasma in a vacuum chamber. The high-voltage power supply control box 120 is placed in the system's control cabinet 100 and is used to adjust the output parameters of the high-voltage power supply 210 and the distance between the positive and negative electrode plates 220 according to the preset vacuum level of the vacuum chamber, thereby controlling and maintaining the uniformity of the glow discharge.

[0036] The high voltage power supply 210 is used to provide electrical energy support for applying the electric field between the positive and negative electrode plates 220. Its output parameters include adjustable voltage and current, thereby controlling discharge uniformity.

[0037] The positive and negative electrode plates 220 are placed in parallel in the vacuum chamber, and are used to generate an electric field of preset strength between the plates under the action of the high-voltage power supply 210, so that the existing gas in the vacuum chamber is ionized to form plasma; the area between the positive and negative electrode plates 220 is the area where the plasma is located.

[0038] As a preferred embodiment of this invention, Figure 3 and Figure 4As shown, the positive plate of the positive and negative electrode plates 220 is integrated with a distance adjustment assembly, which can be positioned above the vacuum chamber. This distance adjustment assembly is controlled by the high-voltage power supply control box 120 and adjusts the distance between the positive plate and the negative plate. Due to the structure of the distance adjustment assembly, the electrical connection point leads of the positive plate can pass through the vacuum chamber and connect to the anode of the high-voltage power supply 210 via the distance adjustment assembly. The negative plate is fixedly mounted within the vacuum chamber, below the positive plate, and can be fixed with the hardware support of a through-wall flange. The electrical connection point leads of the negative plate pass through the vacuum chamber and connect to the cathode of the high-voltage power supply 210.

[0039] Also in this embodiment, to improve the uniformity of the electric field between the plates, the plates are designed to have square chamfered corners. The plate spacing is adjustable using a distance adjustment assembly, and is equipped with a precision measuring tool to display the plate gap size in real time. The positive plate and the distance adjustment assembly can be combined on the top wall of the vacuum chamber to form an integrated module using a flange structure, and a modular interface is used to facilitate the replacement of the plates. The hardware structure support at the bottom of the negative plate, based on the through-wall flange, can be additionally designed with a slide rail to enhance adjustability and adaptability.

[0040] The entire glow discharge module 200 must be designed with an insulation level to ensure safety, and the positive and negative electrode plates 220 are located just in front of the injector in the SMBI module 400. To ensure system safety, the high-voltage power supply 210 must also have overload and short-circuit protection functions.

[0041] Example 3 Based on the embodiment 1 or 2, this embodiment provides a detailed and preferred introduction to the SMBI module 400 in the beam characteristics integrated distribution measurement system. This module is the module that provides the ultrasonic molecular beam in the system.

[0042] like Figure 1 or Figure 2 As shown, the SMBI module 400 includes a gas extraction system 410 , a gas distribution system 420 , a pulse controller 430 , and an SMBI injector 440 .

[0043] The exhaust system 410 is used to start the exhaust unit to exhaust the vacuum chamber, so that the vacuum degree of the vacuum chamber is maintained at a preset level, and the preset vacuum degree is fed back to the glow discharge module 200. The exhaust system 410 is connected to the exhaust system control box 150. When the exhaust unit is started, the exhaust system control box 150 maintains the vacuum degree of the vacuum chamber at a preset level by using a fine-tuning valve. In this embodiment, the preset vacuum degree range can be 10 -4 Pa-500Pa.

[0044] The gas distribution system 420 mainly provides the mechanism for the ultrasonic molecular beam injection system to inject gas, that is, to configure the SMBI neutral particle beam, and can adjust the pressure of the corresponding gas source during injection according to the instructions sent by the control cabinet 100, through the automatic pressure controller and other valves inside the system, according to the set value.

[0045] The pulse controller 430 is mainly for the electromagnetic valve control system in the ultrasonic molecular beam injector, and can adjust the injection time, pulse width and injection frequency according to the instructions sent by the control cabinet 100, through the timing controller inside the system, according to the set value.

[0046] The SMBI injector 440 is the main unit for forming a molecular beam, which injects the configured SMBI neutral particle beam into the region where the plasma is located in the vacuum chamber after the vacuum degree, gas source pressure and injection parameters of the vacuum chamber reach the preset values. The injector is arranged through the flange structure on the side wall of the vacuum chamber, the outer side of the flange is connected with the gas distribution system 420 through the stainless steel pipeline, and the inner side of the flange is connected with the integrated Laval nozzle. The nozzle jet angle can be adjusted, and the nozzle position corresponds to the position of the plasma in the vacuum chamber. For different experimental requirements, the type of gas source of the gas distribution system 420 in the SMBI module 400 and the type of SMBI injector 440 can be changed, and different parameters of the pulse controller 430 can be set, so that the experimental requirements can be changed flexibly.

[0047] Embodiment 4 On the basis of any of the above embodiments, the probe measurement module 300 and the high-speed image acquisition module 500 in the beam characteristic integrated distribution measurement system are introduced in detail in this embodiment, which are the main means for the system to realize the measurement function and can obtain the corresponding measurement data respectively.

[0048] As shown in Figure 1 or Figure 2 The probe measurement module 300 includes the scanning probe module control box 110, the probe signal acquisition module 320 and the scanning probe module 310 connected in sequence. In this embodiment, the needle tip material in the scanning probe module 310 is selected to be high-melting-point tungsten, the module is placed in the vacuum chamber, and the detection end is located between the positive and negative electrode plates 220 of the glow discharge module 200, for measuring the saturated flow of the ultrasonic molecular beam particles formed after ionization, and transmitting the corresponding current signal to the probe signal acquisition module 320 through the low-noise coaxial cable.

[0049] The probe signal acquisition module 320 is used to acquire the current signal of the saturated flow of the ultrasonic molecular beam particles through the scanning probe module 310, and transmit the measurement signal to the scanning probe module control box 110.

[0050] The scanning probe module control box 110 is placed in the control cabinet 100 of the system, and is used to obtain the measurement signal from the probe signal acquisition module 320 and control the displacement of the scanning probe module 310 in a preset three-dimensional space distribution, thereby achieving accurate parameter scanning and calculating the velocity distribution.

[0051] As a preferred embodiment of this invention, the scanning probe module 310 is further equipped with a displacement module composed of two stepper motors. The displacement module is connected to the scanning probe module control box 110 via the probe signal acquisition module 320, so that the scanning probe module 310 can perform horizontal and vertical displacement under control. The accuracy of the probe displacement scanning is controlled at 0.05 mm, and the sampling interval is 1.6×10 -8 Whether it is the three-dimensional movement of the scanning probe module 310 in this embodiment or the movement of the electrode plate in the glow discharge module 200, an error correction function should be designed. That is, before the initial movement, the corresponding system parameter value is reset to the zero position before the operation is performed, and an error processing is performed when the displacement setting value exceeds the system limit.

[0052] like Figure 1 or Figure 2 As shown, the high-speed image acquisition module 500 is arranged outside the vacuum chamber and is connected to the high-speed image acquisition module control box 160; the control box is placed in the control cabinet 100 of the system and is connected to the SMBI module 400; the high-speed image acquisition module control box 160 is used to control the high-speed image acquisition module 500 to synchronously capture and acquire the image of the SMBI neutral particle beam during injection through the observation window corresponding to the plasma area set on the side wall of the vacuum chamber according to external triggering or internal triggering instructions, and store the acquired data after obtaining it.

[0053] In this embodiment, the external trigger instructions based on the high-speed image acquisition module control box 160 can be sent and controlled by the user in real time during the experiment, so as to obtain the corresponding captured images; and the internal trigger instructions can come from the injection instructions received by the SMBI injector 440 in the SMBI module 400, and the relevant injection parameters of the pulse controller 430 in the module can be synchronously obtained to achieve synchronization of image acquisition.

[0054] Example 5 Based on any of the above embodiments, this embodiment introduces the use and example parameters of the beam characteristic integrated distribution measurement system. Figure 5As shown in the figure, when the experiment is carried out, the corresponding control box in the control cabinet 100 sends instructions to the high-voltage power supply 210, the scanning probe module 310, the gas distribution system 420 and the exhaust system 410 as the first-level control; after the above-mentioned first-level control operation is completed, the pulse controller 430 sends instructions, which is the second-level control; when the pulse controller 430 receives the timing signal, it synchronously sends a trigger instruction to the SMBI injector 440 and the high-speed image acquisition module 500, which is the third-level control; after the probe measurement module 300 and the high-speed image acquisition module 500 have completed the acquisition, the corresponding measurement data is sent back to the corresponding control box in the control cabinet 100 for storage.

[0055] Furthermore, during the experiment, the probe measurement module 300 and the high-speed image acquisition module 500 can be used simultaneously, or only one of them can be used to obtain the corresponding measurement data. The probe measurement module 300 can obtain the beam velocity distribution of the ultrasonic molecular beam, while the high-speed image acquisition module 500 can obtain the beam morphology, beam divergence angle, and effective injection distance of the ultrasonic molecular beam.

[0056] This embodiment uses two parameter examples to introduce the experimental operation process of the system in two different situations. The two situations correspond to the use of the high-speed image acquisition module 500 and the use of the probe measurement module 300. The first example is Example 1, which is as follows: The beam profile, beam divergence angle and effective injection distance of the ultrasonic molecular beam were measured. The experimental conditions were: vacuum degree of the vacuum chamber 500Pa, gas source pressure 40×10 5 Pa, power supply voltage 1000V, power supply current 500mA, discharge mode is constant voltage, beam pulse width 100ms, sampling rate of high-speed image acquisition module 500 is 5000Fps, and resolution is 1024×780.

[0057] The experimental parameters were set in the control cabinet 100 in the following order: 1-vacuum degree, 2-gas source pressure, 3-high voltage power supply 210 parameters, 4-injection beam parameters, 5-image sampling parameters. After receiving the command, the exhaust system 410 started the exhaust unit to exhaust the vacuum chamber. After the vacuum degree reached 500 Pa, the micro-control valve was opened to control the vacuum degree. After receiving the command, the gas distribution system 420 adjusted the pressure to 40×10 5Pa; after receiving the instruction, the high-voltage power supply 210 outputs a voltage of 1000V and a current of 500mA to the positive and negative electrode plates 220, and starts glow discharge; after the glow discharge is stable, an instruction is sent to the pulse controller 430 and the high-speed image acquisition module 500. After receiving the instruction, the pulse controller 430 sets the pulse width to 500ms. After receiving the instruction, the high-speed image acquisition module 500 sets the high-speed camera sampling rate to 500fps and the resolution to 1024×780; the pulse controller 430 then outputs parameters to the SMBI injector 440 to inject the beam and simultaneously triggers the high-speed image acquisition module 500 to start sampling; after the high-speed image acquisition module 500 stores the collected data in the control cabinet 100, the experimental test is completed.

[0058] Example 2 is to measure the beam velocity at a distance of 5 cm from the center of the nozzle. The experimental conditions are: vacuum degree of the vacuum chamber is 100 Pa, gas source pressure is 20×10 5 Pa, power supply voltage 1000 V, power supply current 500 mA, discharge mode constant voltage, beam pulse width 100 ms, probe sampling rate of probe measurement module 300 is 1.6×10 -8 s.

[0059] The experimental parameters were set in the control cabinet 100 in the following order: 1-vacuum degree, 2-gas source pressure, 3-high voltage power supply 210 parameters, 4-probe displacement parameters, 5-injection beam parameters, and 6-probe sampling parameters. After receiving the command, the exhaust system 410 started the exhaust unit to exhaust the vacuum chamber. After the vacuum degree reached 100 Pa, the micro-control valve was opened to control the vacuum degree. After receiving the command, the gas distribution system 420 adjusted the pressure to 20×10 5 After receiving the instruction, the high-voltage power supply 210 outputs a voltage of 1000V and a current of 500mA to the positive and negative electrode plates 220, starting glow discharge. After receiving the instruction, the scanning probe module 310 moves the probe to a position 5cm away from the center of the nozzle according to the set value. After the glow discharge stabilizes, the instruction is sent to the pulse controller 430 and the probe signal acquisition module 320. After receiving the instruction, the pulse controller 430 sets the pulse width to 100ms. After receiving the instruction, the probe signal acquisition module 320 sets the sampling rate to 1.6×10 -8 s; the pulse controller 430 then outputs parameters to the SMBI injector 440 to inject the beam and simultaneously triggers the probe signal acquisition module 320 to start sampling; the probe signal acquisition module 320 stores the collected data to the control cabinet 100, and the experimental test is completed.

Claims

1. A beam characteristic integrated distribution measurement system for ultrasonic molecular beams, characterized in that: The system includes the following functional modules: A glow discharge module is used to generate and maintain a glow discharge in a vacuum chamber to ionize the existing gas to form plasma, wherein the vacuum chamber has a preset vacuum degree that satisfies the discharge conditions; The SMBI module is used to maintain a preset vacuum level in the vacuum chamber and configure the SMBI neutral particle beam and inject it into the plasma region in the vacuum chamber; The SMBI neutral particle beam is instantly ionized after injection, causing changes in the electric field distribution and brightness of the plasma region; The probe measurement module is used to measure the ultrasonic molecular beam particle saturation flow formed after the SMBI neutral particle beam is ionized, and obtain the distribution measurement results of its beam velocity; The high-speed image acquisition module is used to capture the entire process of the SMBI neutral particle beam's beam morphology changes after ionization, and obtain the measurement results of its optical morphology evolution.

2. The beam characteristics integrated distribution measurement system according to claim 1, characterized in that: The optical morphology evolution measurement results obtained by the high-speed image acquisition module include the beam morphology, beam divergence angle and effective injection distance of the ultrasonic molecular beam.

3. The beam characteristics integrated distribution measurement system according to claim 1, characterized in that: The system also includes a control cabinet, which is respectively connected to the glow discharge module, the SMBI module, the probe measurement module and the high-speed image acquisition module; The control cabinet is used to remotely control and adjust various control parameters, including: the power supply parameters and the distance between the discharge electrodes of the glow discharge module; the preset vacuum maintained by the SMBI module, the gas pressure for configuring the SMBI neutral particle beam, the injection time, pulse width and frequency of the SMBI neutral particle beam; the probe position of the probe measurement module; and the sampling frequency and sampling resolution of the high-speed image acquisition module. The control cabinet realizes the integrated distribution measurement of the beam characteristics of the corresponding ultrasonic molecular beam in various scenarios through remote control and adjustment of multiple types of control parameters.

4. The beam characteristics integrated distribution measurement system according to claim 1, characterized in that: The glow discharge module includes a high-voltage power supply control box, a high-voltage power supply, and positive and negative electrode plates connected in sequence; The high-voltage power supply control box is placed in the control cabinet of the system and is used to adjust the output parameters of the high-voltage power supply and the distance between the positive and negative electrode plates according to the preset vacuum degree of the vacuum chamber, thereby controlling and maintaining the uniformity of the glow discharge; The high voltage power supply is used to provide electrical energy support for the application of the electric field between the positive and negative electrode plates; The positive and negative electrode plates are placed in parallel in the vacuum chamber, and are used to generate an electric field of preset strength between the plates under the action of a high-voltage power supply, so that the existing gas in the vacuum chamber is ionized to form plasma; the area between the positive and negative electrode plates is the area where the plasma is located.

5. The beam characteristics integrated distribution measurement system according to claim 4, characterized in that: A distance adjustment component is integrated at the positive plate of the positive and negative electrode plates. The distance adjustment component is used to accept the control of the high-voltage power supply control box to adjust the distance between the positive plate and the negative plate; The electrical connection point lead of the positive plate in the positive and negative electrode plates passes through the vacuum chamber and is connected to the anode of the high-voltage power supply; the negative plate in the positive and negative electrode plates is fixed in the vacuum chamber, and its electrical connection point lead passes through the vacuum chamber and is connected to the cathode of the high-voltage power supply.

6. The beam characteristics integrated distribution measurement system according to claim 1, characterized in that: The SMBI module includes an air extraction system, an air distribution system, a pulse controller, and an SMBI injector; The exhaust system is used to start the exhaust unit to perform exhaust operations on the vacuum chamber to maintain the vacuum degree of the vacuum chamber at a preset level, and feed the preset vacuum degree back to the glow discharge module; The gas distribution system is used to configure the SMBI neutral particle beam and adjust the pressure of the corresponding gas source during injection; The pulse controller is used to adjust the injection time, pulse width and frequency parameters of the SMBI neutral particle beam through timing control. The SMBI injector is used to inject the configured SMBI neutral particle beam into the plasma area in the vacuum chamber after the vacuum degree, gas source pressure and injection parameters of the above-mentioned vacuum chamber reach the preset values.

7. The beam characteristics integrated distribution measurement system according to claim 6, characterized in that: The exhaust system is connected to an exhaust system control box, the gas distribution system is connected to an exhaust system control box, and the pulse controller is connected to a pulse controller control box. The exhaust system control box, the gas distribution system control box, and the pulse controller control box are all placed in the system's control cabinet. The exhaust system control box, when starting the exhaust unit, maintains the vacuum degree of the vacuum chamber at a preset level by means of a fine-tuning valve. The SMBI injector adopts a flange assembly structure and is installed on the side wall of the vacuum chamber. The outer side of the flange is connected to the gas distribution system through a pipeline, and the inner side of the flange is connected to the integrated Laval nozzle; the nozzle injection angle is adjustable, and the nozzle position corresponds to the position of the plasma area in the vacuum chamber.

8. The beam characteristics integrated distribution measurement system according to claim 1, characterized in that: The probe measurement module includes a scanning probe module control box, a probe signal acquisition module and a scanning probe module which are connected in sequence; The scanning probe module control box is placed in the control cabinet of the system and is used to obtain the measurement signal from the probe signal acquisition module and control the displacement of the scanning probe module in a preset three-dimensional space distribution; The probe signal acquisition module is used to obtain the current signal of the ultrasonic molecular beam particle saturation flow through the scanning probe module, and transmit it to the scanning probe module control box after forming a measurement signal; The scanning probe module is placed in the vacuum chamber, and the detection end is located between the positive and negative electrode plates of the glow discharge module. It is used to measure the saturation flow of ultrasonic molecular beam particles formed after ionization and transmit the corresponding current signal to the probe signal acquisition module.

9. The beam characteristics integrated distribution measurement system according to claim 8, characterized in that: The tip material of the scanning probe module is tungsten; the scanning probe module is also equipped with a displacement module consisting of two stepper motors. The displacement module is connected to the scanning probe module control box through the probe signal acquisition module, so that the scanning probe module can perform horizontal and vertical displacement under control.

10. The beam characteristics integrated distribution measurement system according to claim 1, characterized in that: The high-speed image acquisition module is arranged outside the vacuum chamber and is connected to a high-speed image acquisition module control box; the control box is placed in the control cabinet of the system and is connected to the SMBI module; the high-speed image acquisition module control box is used to control the high-speed image acquisition module through the observation window arranged on the side wall of the vacuum chamber corresponding to the area where the plasma is located according to external triggering or internal triggering instructions, to synchronously perform high-speed shooting and acquisition of images during the injection of the SMBI neutral particle beam, and to obtain and store the acquired data.

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