Quartz tube coaxiality measuring device

Abstract

The invention discloses a quartz tube coaxiality measuring device, and relates to the technical field of laser measuring instruments, and the quartz tube coaxiality measuring device comprises a fixing assembly which comprises a rack and a chuck rotatably connected to the top of the rack; the laser laying assembly comprises a rotating shaft rotationally connected to the side face of the rack, two swing arms fixedly connected to the upper end and the lower end of the rotating shaft, and a transmitter and a receiver which are fixedly installed at one ends of the two swing arms respectively; and the pipe wall adaptation assembly comprises a linear module fixedly installed on the side face of the rack and a hollow pipe rotationally connected to a sliding block of the linear module. A'dynamic optical shutter 'is formed by the laser beam and the diameter-variable light through hole, an optical signal is converted into an electric signal by the receiver, whether the coaxiality is qualified or not is judged in real time, the quartz tube is not directly irradiated by laser through the design, the influence of projection, reflection and refraction of light on detection is thoroughly avoided, and the detection accuracy is improved. The structure is simple, the cost is low, and the detection is rapid.

Description

Technical Field

[0001] The present invention relates to the technical field of laser measuring instruments, in particular to a quartz tube coaxiality measuring device. Background Art

[0002] Quartz tubes are widely used in various fields due to their high light transmittance, strong chemical stability, and excellent insulation properties. For example, in the semiconductor industry, quartz tubes can be used as core components such as diffusion tubes and oxidation tubes. Their coaxiality directly affects the stability of high-temperature processes. Transparent quartz glass tubes for semiconductors must meet strict ellipticity and wall deviation requirements. If the coaxiality deviation is too large, it will cause uneven distribution of high-temperature gases in the tube, affecting the uniformity of chip doping or oxidation layer, and ultimately reducing chip performance. For example, in side-pumped high-power laser equipment, the quartz tube must be coaxially mounted with the laser crystal rod. The coaxiality of the two determines the uniformity of the cooling water channel. The high-reflective coating on the outer surface of the quartz tube can reflect the remaining pump light back to the laser crystal. If the coaxiality is insufficient, it will lead to increased light loss or reduced laser beam quality.

[0003] Laser measurement of quartz tube coaxiality (i.e., the degree of alignment between the inner and outer circular axes) has become a mainstream technology for precision inspection of quartz tubes due to its non-contact, high-precision (reaching the micron or even nanometer level), and fast response. Laser collimators are used to generate a high-precision reference line (simulating an ideal axis). Laser displacement sensors (such as laser triangulation sensors) are placed at both ends or at multiple cross-sections of the quartz tube to simultaneously measure the radial deviation of the inner and outer walls from the reference axis. Specifically, the quartz tube is placed on a rotating platform. During rotation, the sensors collect real-time distance data from the inner and outer walls at different angles. By fitting the center coordinates of the inner and outer circles, the deviation between the axis and the reference laser axis is calculated, ultimately yielding the coaxiality error. This coaxiality error is then used to determine whether the measured quartz tube meets coaxiality requirements. However, this technology has certain drawbacks: the transparent quartz tube material, whose reflection, projection, and refraction properties of the laser can interfere with the stable transmission and reception of the laser, resulting in poor measurement accuracy. This often requires costly or complex equipment to counteract this effect.

[0004] In order to solve the above problems, a quartz tube coaxiality measuring device is proposed. Summary of the Invention

[0005] In order to solve the above technical problems, a quartz tube coaxiality measuring device is provided. This technical solution solves the problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention can be implemented by adopting the following technical solutions: The present invention provides a quartz tube coaxiality measuring device, comprising: A fixed assembly including a frame and a chuck rotatably connected to the top of the frame; The laser layout assembly includes a rotating shaft rotatably connected to the side of the frame, two swing arms fixedly connected to the upper and lower ends of the rotating shaft, and a transmitter and a receiver fixedly mounted on one end of the two swing arms respectively; The pipe wall adapter assembly includes a linear module fixedly mounted on the side of the frame, a support block fixedly mounted on the slider of the linear module, a hollow tube rotatably connected to the support block and fixedly sleeved on the outside of the rotating shaft, a follower arm fixedly connected to the hollow tube, a short arm 1 fixedly connected to one side of the hollow tube, and a spring 1 fixedly connected to the side of the short arm 1 facing the slider, the other end of the spring 1 being fixedly connected to the slider of the linear module; The calibration and measurement assembly includes a second motor fixedly mounted at one end of the follower arm, a turntable fixedly mounted on the drive shaft of the second motor, and a plurality of light holes evenly arranged on the turntable along the circumferential direction. The diameter of each light hole gradually increases and the diameter of the smallest light hole is consistent with the diameter of the laser beam. The centers of the light holes are all on a concentric circle on the turntable.

[0007] Furthermore, the axis of the chuck is in the vertical direction, the rotating shaft is arranged vertically, and the laser beam emitted by the emitter is in a vertical state.

[0008] Furthermore, the fixing assembly also includes a motor 1 fixedly mounted on the top of the frame, and a drive shaft of the motor 1 is fixedly connected to the chuck.

[0009] Furthermore, the laser layout assembly also includes a servo fixedly mounted on the frame, and a drive shaft of the servo is fixedly connected to the bottom end of the rotating shaft.

[0010] Furthermore, the pipe wall adapter assembly also includes a support arm 1 fixedly connected to the side of the slider of the linear module, and an electromagnetic push rod 1 for pushing the short arm 1 is fixedly installed at one end of the support arm 1.

[0011] Furthermore, the quartz tube coaxiality measuring device also includes an offset assembly, which includes a short shaft rotatably connected to the slider of the linear module, a support arm fixedly connected to the middle of the short shaft, a second short arm fixedly connected to one side of the short shaft, and a second spring fixedly connected to the side of the second short arm facing the slider. The other end of the second spring is fixedly connected to the slider of the linear module. The support arm and the follower arm have the same structure and are symmetrically arranged about the axis of the chuck.

[0012] Furthermore, the offset assembly also includes a support arm 2 fixedly connected to the side of the slider of the linear module, and an electromagnetic push rod 2 for pushing the short arm 2 is fixedly installed at one end of the support arm 2.

[0013] As described above, the beneficial effects of the quartz tube coaxiality measuring device of the present invention are as follows: A fixed-diameter laser beam and a variable-diameter aperture form a "dynamic light gate." When the displacement of the follower arm, which slides against the surface of the quartz tube, exceeds ΔR, meaning the measured coaxiality of the tube exceeds a specified threshold, the edge of the aperture blocks the laser beam. Finally, a receiver converts the optical signal into an electrical signal, sounding an alarm and enabling real-time determination of coaxiality. This design prevents the laser from directly irradiating the tube, completely avoiding the effects of light projection, reflection, and refraction on detection. It also offers a simple structure and low cost, avoiding the shortcomings of existing technologies. The support arm and the follower arm are arranged symmetrically, and the net lateral force approaches zero, eliminating lateral contact force deformation and preventing the quartz tube from deforming due to contact force, ensuring that the detection deviation is the coaxiality error of the tube body itself. The vertical suspension eliminates the radial deformation caused by gravity. The two work together to further reduce the detection error. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 for Figure 1 Schematic diagram of another perspective of the structure; Figure 3 A schematic diagram of the laser layout assembly and other components shown in the present invention; Figure 4 A schematic diagram of a pipe wall adapter assembly and a calibration measurement assembly shown in the present invention; Figure 5 for Figure 4 Schematic diagram of another perspective of the structure; Figure 6 A schematic diagram of the offset assembly and other components shown in the present invention; Figure 7 for Figure 1 A schematic diagram of the structure at center A; Figure 8 It is a schematic diagram of the structure of the present invention from an upward viewing angle.

[0015] Wherein, the accompanying drawings in the present invention are: Fixed components: 11, frame; 12, chuck; 13, motor 1; Laser layout components: 21, rotating shaft; 22, swing arm; 23, transmitter; 24, receiver; 25, servo; Tube wall adapter assembly: 31. Linear module; 32. Hollow tube; 33. Follower arm; 34. Short arm (1); 35. Spring (1); 36. Electromagnetic push rod (1); 37. Support arm (1); Calibration measurement components: 41, motor 2; 42, turntable; 43, light hole; Offsetting components: 51, short shaft; 52, support arm; 53, short arm 2; 54, spring 2; 55, electromagnetic push rod 2; 56, support arm 2. DETAILED DESCRIPTION

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0017] See Figures 1-8 FIG. 1 is an embodiment of the present invention, and a quartz tube coaxiality measuring device is provided, which will be described in detail below.

[0018] A quartz tube coaxiality measuring device, comprising: Fixed components, see Figure 1-Figure 3 As shown, it includes a frame 11 and a chuck 12 rotatably connected to the top of the frame 11. The rotation direction of the chuck 12 is around the Z-axis (that is, around the plumb line). Furthermore, the fixed component also includes a motor 13 fixedly installed on the top of the frame 11. The drive shaft of the motor 13 is fixedly connected to the chuck 12, and the motor 13 can drive the chuck 12 to rotate.

[0019] It should be noted that the chuck 12 adopts the existing technology and is a common lathe device. Specifically in this embodiment, in order to adapt to the clamping and fixing of the quartz tube, the clamping claw part of the chuck 12 is required not to cause scratches or other damage to the quartz tube. Therefore, in this embodiment, the clamping claw material or the material used for the contact part of the inner side of the clamping claw with the quartz tube is preferably one of polytetrafluoroethylene (PTFE, commonly known as "Teflon"), ultra-high molecular weight polyethylene (UHMWPE) or pure copper (red copper, T2 state), or other similar materials.

[0020] In addition, in this embodiment, the arrangement state of the chuck 12 is deliberately set to be rotated around the plumb line. The purpose is to avoid gravity interference when the quartz tube is vertically suspended, that is, the top of the quartz tube is clamped by the chuck 12 to form a single-point vertical suspension state. At this time, the direction of gravity is parallel to the axis of the tube body, there is no radial deflection, and the axis of the quartz tube completely coincides with the direction of gravity. Gravity will only cause it to produce tensile stress in the axial direction, rather than generating radial force to cause it to bend. It also avoids the situation in the prior art where the uneven clamping force of multiple supports causes local bending of the quartz tube and affects the state of the quartz tube itself, making the internal stress of the quartz tube simple and uniform.

[0021] The quartz tube coaxiality measuring device also includes a laser layout component, see Figures 1-4As shown, the laser deployment assembly includes a shaft 21 rotatably connected to the side of the frame 11, two swing arms 22 fixedly connected to the upper and lower ends of the shaft 21, and a transmitter 23 and a receiver 24 fixedly mounted on one end of each swing arm 22. The shaft 21 is vertically arranged, and the laser beam emitted by the transmitter 23 is vertical. Furthermore, the laser deployment assembly includes a steering gear 25 fixedly mounted below the frame 11, with its drive shaft fixedly connected to the bottom end of the shaft 21.

[0022] It should be noted that the transmitter 23 and receiver 24 are conventional laser emitting and receiving devices, respectively. The transmitter 23 emits a colored laser, such as red. In this embodiment, since the quartz tube is suspended vertically on the chuck 12, its standard axial direction should be consistent with the axial direction of the rotational center axis of the chuck 12. To this end, the rotating shaft 21 is intentionally set to a vertical position in this embodiment, that is, the directions of the rotational centers of the rotating shaft 21 and the chuck 12 are consistent. This ensures that the laser beam path, which serves as the reference line for determining the coaxiality of the quartz tube, is also consistent with the standard axial direction of the quartz tube. That is, the laser beam path is parallel to the axial directions of the rotational centers of the rotating shaft 21 and the chuck 12, that is, the laser beam path is vertical. By measuring the parallelism of the quartz tube's axial direction with respect to the laser beam path, the quality of the quartz tube's coaxiality can be determined. The higher the parallelism, the higher the coaxiality.

[0023] The quartz tube coaxiality measuring device also includes a tube wall adapter component, see Figure 4-Figure 5 As shown, the pipe wall adapter assembly includes a linear module 31 fixedly mounted on the side of the frame 11, a support block fixedly mounted on the slider of the linear module 31, a hollow tube 32 rotatably connected to the support block and fixedly sleeved on the outside of the rotating shaft 21, a follower arm 33 fixedly connected to the hollow tube 32, a short arm 34 fixedly connected to one side of the hollow tube 32, and a spring 35 fixedly connected to the side of the short arm 34 facing the slider, the other end of the spring 35 fixedly connected to the slider of the linear module 31. Furthermore, the pipe wall adapter assembly includes a support arm 37 fixedly connected to the slider of the linear module 31 and located below the spring 35. An electromagnetic push rod 36 is fixedly mounted on one end of the support arm 37 for pushing the short arm 34.

[0024] It should be noted that in the prior art, due to the transparency of the quartz tube material, its reflection, refraction, and transmission properties for lasers can affect the laser's ability to measure coaxiality. Therefore, this solution uses the fluctuation (displacement) of the follower arm 33 attached to the quartz tube wall as it slides on the tube wall surface to express the curvature of the tube wall. Laser measurement of the displacement of the follower arm 33 is then used to verify the curvature of the quartz tube, thereby proving whether the coaxiality of the quartz tube is acceptable. If the coaxiality of the quartz tube is good, that is, if the quartz tube is not bent, the follower arm 33 should slide smoothly on the tube wall, without any lateral fluctuation. The above conversion design achieves the goal of not directly irradiating the quartz tube with laser light, completely avoiding the effects of laser transmission, reflection, and refraction on detection.

[0025] The quartz tube coaxiality measuring device also includes a calibration measuring component, see Figure 4-Figure 7 As shown, the calibration and measurement assembly includes a second motor 41 fixedly mounted at one end of the follower arm 33, a turntable 42 fixedly mounted on the drive shaft of the second motor 41, and multiple light holes 43 uniformly distributed along the circumference of the turntable 42. The diameter of each light hole 43 gradually increases, and the diameter of the smallest light hole 43 is consistent with the diameter of the laser beam. The centers of all light holes 43 are located on a concentric circle on the turntable 42, which is concentric with the center of the turntable 42. The distance between the centers of each light hole 43 is equal. In this embodiment, there are eight light holes 43 on the turntable 42, and the spacing between adjacent light holes 43 is 45 degrees.

[0026] It should be noted how the lateral fluctuation of the follower arm 33 is detected by the laser. This embodiment detects whether the follower arm 33 blocks the path of the laser beam. If the path of the laser beam is not blocked by the follower arm 33, it indicates that the follower arm 33 has not experienced lateral fluctuation. Otherwise, it indicates that the follower arm 33 has experienced lateral fluctuation. Specifically, a light hole 43 is provided at one end of the follower arm 33, allowing the laser beam to pass through the light hole 43 and be normally received. However, if the follower arm 33 experiences lateral fluctuation due to the bending of the quartz tube (i.e., the follower arm 33 deflects), causing the light hole 43 to shift, the laser beam will be unable to pass through the light hole 43 and will be blocked by other parts of the follower arm 33. The receiver 24 will then issue an alarm indicating that the coaxiality of the contact portion of the quartz tube with the follower arm 33 does not meet the required level.

[0027] The implementation process of this embodiment will be described in detail below: First, the internal push rod of the electromagnetic push rod 36 is extended, and one end of the push rod acts on the short arm 34, continuously pushing the short arm 34 toward the slider and compressing the spring 35, and then the short arm 34 and the hollow tube 32 rotate, and drive the follower arm 33 to rotate, and then the linear module 31 moves, and its slider drives the entire tube wall adapter assembly to rise until it reaches the top of the linear module 31, and then fixes the quartz tube in the clamping claw of the chuck 12, and the electromagnetic push rod 36 is reset, and its internal push rod retracts, and then the short arm 34 is released by the elasticity of the spring 35, and drives the follower arm 33 to rotate in the opposite direction through the hollow tube 32 until the inner side of the follower arm 33 fits against the tube wall of the quartz tube.

[0028] The servo 25 is then controlled to operate, and the transmitter 23 is turned on. The drive shaft of the servo 25 drives the rotating shaft 21 to rotate, which in turn drives the transmitter 23 and the receiver 24 to rotate synchronously through the upper and lower swing arms 22. The rotation direction is the direction close to the quartz tube. When the laser beam path intersects the concentric circle of the center of the light hole 43, the rotation is suspended. At the same time, the light hole 43 with the smallest diameter is completely aligned with the laser beam path. After alignment, the laser beam remains stationary, that is, the servo 25 stops rotating. The received power of the receiver 24 is used to determine whether the laser light has completely passed through the light hole 43. When the laser light completely passes through the light hole 43, the received power of the receiver 24 is maximum. When the laser beam is blocked, the received power of the receiver 24 decreases. The received power of the receiver 24 is displayed on the touch screen of the device. The data on the screen can be used to determine whether the laser beam has completely passed through the light hole 43. This completes the laser beam layout and calibration.

[0029] Note: For ease of understanding, this implementation process discloses the following laser beam layout and calibration method: 1. Initially, the shaft 21 is adjusted to rotate quickly so that the laser beam falls on the turntable 42 as quickly as possible, shortening the adjustment time; 2. When the laser beam approaches the turntable 42, adjust the rotating shaft 21 to rotate slowly so that the laser beam roughly falls on the concentric circle where the center of the light hole 43 is located, and achieve coarse adjustment, such as Figure 4-Figure 7 As shown, the concentric circles should be marked on the turntable 42 in the form of obvious circles for easy observation; 3. The turntable 42 rotates so that the smallest diameter aperture 43 is aligned with the laser beam: The rotation angle of the turntable 42 and the rotation angle of the shaft 21 are continuously adjusted until the laser beam is completely aligned and passes through the light hole 43 with the smallest diameter, thereby achieving fine-tuning. The laser power received by the receiver 24 is used as a judgment mark. When the received power is the maximum, it can be determined that the laser beam is completely aligned and passes through the light hole 43 with the smallest diameter.

[0030] After fine-tuning is completed, the laser beam remains in place during subsequent measurements and serves as a reference line for coaxiality determination, achieving the effect of locating the laser beam position. It should be noted that the reason for aligning the laser beam with the smallest diameter aperture 43 is that different diameter apertures 43 correspond to different thresholds allowed for coaxiality. The position of the selected aperture 43 needs to be adjusted according to the coaxiality threshold requirements. Because the smallest diameter of aperture 43 is consistent with the laser beam diameter, only when the center of the aperture completely coincides with the laser axis can the laser pass through unobstructed, thus proving that the laser beam axis exactly passes through the concentric circles on the turntable 42. If the laser beam is aligned with apertures 43 of other diameters, which are larger than the laser beam diameter, the laser passing through unobstructed cannot prove that the laser beam axis passes through the concentric circles on the turntable 42. Using the smallest aperture 43 as the zero point reference, after the turntable 42 is rotated a certain angle, the centers of the other apertures 43 will always be aligned with the laser beam axis. For example, if the turntable 42 is rotated 45°, the second smallest diameter aperture 43 will be aligned with the axis of the laser beam; if the turntable 42 is rotated 90°, the third smallest diameter aperture 43 will be aligned with the axis of the laser beam. The device's touch screen has an adjustment bar for adjusting the rotation angle of the second motor 41. For example, if 45° is entered in this adjustment bar, the second motor 41 will drive the turntable 42 to rotate 45° clockwise.

[0031] During the final measurement, a light hole 43 of a certain diameter is selected as the standard for coaxiality measurement. The motor 13 drives the quartz tube on the chuck 12 to rotate slowly, and then the slider drives the follower arm 33 on the hollow tube 32 to slowly reciprocate up and down. When the coaxiality of the quartz tube is poor, the curved tube wall will force the follower arm 33 to undergo lateral fluctuation displacement, and the displacement will drive the position of the turntable 42 to shift, causing the laser beam to escape from the light hole 43 and be blocked by other parts of the turntable 42. The receiver 24 will receive a reduced power and issue an alarm, indicating that the coaxiality of the contact part of the quartz tube and the follower arm 33 does not meet the requirements.

[0032] In this solution, the diameter of the light hole 43 is used as the threshold for measuring the coaxiality of the quartz tube, as follows: The core of hole diameter design lies in establishing a mathematical correspondence between geometric parameters and tolerance thresholds. When the laser beam diameter is fixed, the diameter of the light hole 43 on the turntable 42 directly determines the maximum radial displacement allowed by the laser beam, that is, the coaxiality threshold. Assuming the laser beam diameter is d (usually 0.3mm-1mm) and the diameter of the light hole 43 is D, the maximum radial displacement allowed can be expressed as: ΔR=(Dd) / 2; This formula reveals the linear mapping relationship between the diameter of the light hole 43 and the coaxiality threshold: when D is greater than d, ΔR is a positive value and increases linearly with the increase of D. For example, if a laser beam with a diameter of 0.5 mm is used, when the diameter of the light hole 43 is 1.0 mm, the maximum allowable radial displacement is 0.25 mm; when the diameter of the light hole 43 increases to 1.5 mm, the allowable displacement is expanded to 0.5 mm, and the coaxiality threshold is relaxed by half.

[0033] During dynamic detection, this design achieves threshold control through several key steps: First, a fixed-diameter laser beam and a variable-diameter aperture 43 form a "dynamic shutter." When the laser beam's displacement exceeds ΔR, the edge of aperture 43 obscures the laser beam. Finally, receiver 24 converts the optical signal into an electrical signal, reducing its received power and sounding an alarm, enabling real-time identification of defective products.

[0034] The engineering design of the hole diameter must follow the principle of matching laser optical properties with mechanical precision. The selection of the laser beam diameter is fundamental. The 1 / e² diameter definition of a Gaussian beam (energy proportion 86.5%) is recommended. A diameter of 0.3mm-1mm is generally appropriate. Small-diameter lasers (0.3mm-0.5mm) are suitable for high-precision detection (coaxiality threshold ≤ 0.1mm), while large-diameter lasers (0.8mm-1mm) are suitable for loose threshold detection (threshold ≥ 0.2mm). The hole diameter should be 0.2mm-2mm larger than the laser beam diameter. The specific difference is determined by the target threshold, but the minimum difference should not be less than 0.2mm. Otherwise, misjudgment due to assembly errors is likely to occur.

[0035] The processing accuracy of the hole directly affects the accuracy of the threshold. The key parameters include: diameter tolerance is controlled within ±0.005mm, roundness error ≤0.003mm, surface roughness Ra ≤0.8μm. When there are burrs larger than 0.01mm on the edge of the hole, it will cause laser scattering, causing the receiver 24 to mistakenly judge it as a blocked state. Therefore, the edge of the hole needs to be rounded (radius 0.05mm-0.1mm) and fine boring with a diamond tool to ensure a smooth edge.

[0036] This solution can realize multiple threshold detections on the same device by replacing the position of the light-through holes 43 with different apertures, and the time for switching the thresholds is short.

[0037] Furthermore, with respect to the transmitter 23 of this solution, it should be noted that, in this embodiment, the transmitter 23 is the core component that provides a "precise aiming signal" for the coaxiality detection of the quartz tube, and needs to be fully adapted to the detection scheme of physical follow-up and multi-aperture thresholds. A red light transmitter 23 with a wavelength of 650nm is preferably used. The light beam visible to the naked eye can be quickly aligned with the minimum light hole 43 of the multi-aperture turntable 42, which is convenient for benchmark calibration; a collimating lens is used to control the light beam divergence angle within 0.1mrad to ensure that the light beam passes through the light hole 43 in a concentrated manner to avoid misjudgment due to divergence; a low-power continuous light of 5mW-10mW is selected as the power, which not only meets the recognition requirements of the receiver 24, but also will not damage the quartz tube due to high temperature.

[0038] Regarding the receiver 24 of this solution, it should be noted that, in this embodiment, the receiver 24 is the key to judging "whether the laser passes through the light hole 43 normally", and it is necessary to take into account sensitivity, anti-interference and response speed: a photodiode (PD) receiver 24 is selected, whose high sensitivity can capture the light intensity changes caused by micron-level light blocking (even if the light intensity is only reduced by 10%), and accurately matches the judgment logic of "hole diameter threshold"; a 650nm narrow-band filter is installed to only allow the red light of the transmitter 23 to enter, isolating the interference of stray light such as workshop lights; the response time is controlled within 1 microsecond to avoid missed judgment due to reaction delay, and ensure that once the coaxiality deviation of the quartz tube occurs, the alarm can be quickly triggered by the interruption of the optical signal.

[0039] The quartz tube coaxiality measuring device also includes a compensation component, see Figure 6-Figure 8 As shown, it includes a short shaft 51 rotatably connected to the slider of the linear module 31, a support arm 52 fixedly connected to the short shaft 51, a second short arm 53 fixedly connected to one side of the short shaft 51, and a second spring 54 fixedly connected to the side of the second short arm 53 facing the slider. The other end of the second spring 54 is fixedly connected to the slider of the linear module 31. The support arm 52 and the follower arm 33 have the same structure and are arranged symmetrically about the axis of the chuck 12. Furthermore, the compensation assembly also includes a second support arm 56 fixedly connected to the side of the slider of the linear module 31 and located below the second spring 54. One end of the second support arm 56 is fixedly mounted with a second electromagnetic push rod 55 for pushing the second short arm 53.

[0040] Because follower arm 33 inevitably exerts a lateral force on the quartz tube when pressed against the tube wall, the coaxiality of the quartz tube itself may be affected. This means that the follower arm 33 may cause the quartz tube to bend. Therefore, the above design offsets this effect to improve measurement accuracy. Specifically, electromagnetic push rod 2 55 resets its internal push rod (for convenience when clamping the quartz tube, electromagnetic push rod 2 55 extends to push support arm 52 away from the quartz tube). Under the elastic release of spring 2 54, short arm 2 53 drives support arm 52 to reverse via short shaft 51 until the inner side of support arm 52 contacts the tube wall, achieving the purpose of symmetrically applying force to offset the lateral force of follower arm 33. The symmetrical arrangement of support arm 52 and follower arm 33 allows the elastic preload forces to counteract each other, resulting in a net lateral force close to zero. This prevents deformation of the quartz tube due to contact forces and ensures that the detection deviation is the coaxiality error of the tube itself. The symmetrical arm eliminates the deformation caused by lateral contact force, and the vertical suspension of the quartz tube eliminates the radial deformation caused by gravity. The two work together to greatly reduce the detection error.

[0041] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0042] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A quartz tube coaxiality measuring device, characterized in that: include: A fixed assembly comprising a frame (11) and a chuck (12) rotatably connected to the top of the frame (11); A laser layout assembly comprising a rotating shaft (21) rotatably connected to a side of a frame (11), two swing arms (22) fixedly connected to upper and lower ends of the rotating shaft (21), and a transmitter (23) and a receiver (24) respectively fixedly mounted on one end of the two swing arms (22); A pipe wall adapter assembly, comprising a linear module (31) fixedly mounted on a side of a frame (11), a support block fixedly mounted on a slider of the linear module (31), a hollow tube (32) rotatably connected to the support block and fixedly sleeved on the outside of a rotating shaft (21), a follower arm (33) fixedly connected to the hollow tube (32), a short arm (34) fixedly connected to one side of the hollow tube (32), and a spring (35) fixedly connected to the side of the short arm (34) facing the slider, wherein the other end of the spring (35) is fixedly connected to the slider of the linear module (31); A calibration measurement assembly comprises a second motor (41) fixedly mounted on one end of a follower arm (33), a turntable (42) fixedly mounted on a drive shaft of the second motor (41), and a plurality of light holes (43) uniformly arranged on the turntable (42) along a circumferential direction, wherein the diameter of each light hole (43) gradually increases and the diameter of the smallest light hole (43) is consistent with the diameter of the laser beam, and the centers of the light holes (43) are all located on a concentric circle on the turntable (42).

2. A quartz tube coaxiality measuring device according to claim 1, characterized in that: The axis of the chuck (12) is in a vertical direction, the rotating shaft (21) is arranged vertically, and the laser beam emitted by the emitter (23) is in a vertical state.

3. The quartz tube coaxiality measuring device according to claim 1, characterized in that: The fixing assembly further includes a motor 1 (13) fixedly mounted on the top of the frame (11), and a drive shaft of the motor 1 (13) is fixedly connected to the chuck (12).

4. The quartz tube coaxiality measuring device according to claim 1, characterized in that: The laser layout assembly further includes a steering gear (25) fixedly mounted on the frame (11), wherein a drive shaft of the steering gear (25) is fixedly connected to the bottom end of the rotating shaft (21).

5. The quartz tube coaxiality measuring device according to claim 1, characterized in that: The pipe wall adapter assembly also includes a support arm (37) fixedly connected to the side of the slider of the linear module (31), and an electromagnetic push rod (36) for pushing the short arm (34) is fixedly installed at one end of the support arm (37).

6. The quartz tube coaxiality measuring device according to claim 1, characterized in that: The invention also includes a compensation component, which includes a short shaft (51) rotatably connected to the slider of the linear module (31), a support arm (52) fixedly connected to the short shaft (51), a second short arm (53) fixedly connected to one side of the short shaft (51), and a second spring (54) fixedly connected to the side of the second short arm (53) facing the slider, the other end of the second spring (54) is fixedly connected to the slider of the linear module (31), the support arm (52) and the follower arm (33) have the same structure and are symmetrically arranged about the axis of the chuck (12).

7. A quartz tube coaxiality measuring device according to claim 6, characterized in that: The offset assembly also includes a second support arm (56) fixedly connected to the side of the slider of the linear module (31), and one end of the second support arm (56) is fixedly installed with an electromagnetic push rod (55) for pushing the second short arm (53).

Images