Test system and compensation method for stability of light path power supply of electron beam equipment

Abstract

The invention discloses a light path power supply stability test system of electron beam equipment. The light path power supply stability test system comprises an upper computer, a constant current source, a light path coil, a resistor, a universal meter and an acquisition system, two ends of a whole formed by connecting the light path coil and the resistor in series are connected with corresponding constant current source output ports; the universal meter is connected in parallel to two ends of the resistor to test voltage; the upper computer is in communication connection with the constant-current source and is used for controlling the output value of the constant-current source; the acquisition system starts a universal meter and records output data of the constant current source according to set conditions. The invention also discloses a test method which comprises the following steps: S1, detecting the light path power supply time sequence data to obtain an abnormal value and rejecting the abnormal value; s2, performing polynomial regression fitting on the data set in the S1 to generate an optical path power supply output fitting curve; and S3, dynamic compensation is executed based on the light path power supply output fitting curve. The optical path power supply output current can be monitored in real time, and the output dynamic compensation of the constant current source is ensured.

Description

Technical Field

[0001] This invention relates to the field of electron beam technology, specifically to an optical path power supply stability testing system and compensation method for electron beam equipment. Background Technology

[0002] A highly stable, low-ripple optical power supply is crucial for electron beam equipment to achieve nanometer-level precision. Stable electron beam current and focusing performance are fundamental to high-precision pattern exposure, enabling scanning of the sample surface with precise beam spot size and current intensity. Unstable optical power supplies can lead to offsets and jitter during electron beam scanning, resulting in image distortion and defects. Therefore, electron beam equipment demands extremely high stability from its optical power supply, typically requiring a stability index of at least 10 ppm / 12h. Consequently, there is an urgent need to establish a high-precision, automated stability testing platform capable of real-time monitoring of the long-term trend of the optical power supply output current and dynamic compensation for output errors and stability.

[0003] The ripple and stability of the power supply are important indicators for measuring power supply quality and key indicators for the optical path power supply of electron beam equipment. They directly affect the electron beam focusing accuracy, exposure pattern linewidth, splicing accuracy, etc., and thus affect the stability, processing accuracy and efficiency of the equipment.

[0004] Existing high-precision power supply stability testing equipment mainly includes high-precision oscilloscopes and high-precision multimeters. High-precision oscilloscopes are used to test the power supply's ripple, noise, and short-time stability. First, the oscilloscope bandwidth limit is enabled to eliminate high-frequency noise; second, passive probes, differential probes, or coaxial cables are used, and the grounding wire should be as short as possible to avoid introducing other interference; finally, the test point should be close to the load, and the time base should be adjusted to capture the signal peak-to-peak value. High-precision multimeters are used to test the power supply's linearity and long-term stability. First, the multimeter is adjusted to an appropriate range and setting, with a higher resolution and number of sampling points; second, the multimeter is connected in series or parallel with the load under test; finally, the test circuit should be short and stable, and the multimeter data is read in real-time.

[0005] To monitor the stability of the electron beam optical path power supply, long-term and high-precision equipment is required to complete the test. The 3458A multimeter has been used in electron microscopy for coil power supply testing. For the 3548A multimeter, its highest resolution is 8.5 bits and its sensitivity can reach 10nV, which can meet the requirements of electron beam optical path power supply testing. However, the existing testing methods cannot flexibly design the sampling interval and cannot achieve power supply output compensation. Summary of the Invention

[0006] To address the technical problems existing in the prior art, this invention provides an optical path power supply stability testing system for electron beam equipment that enables real-time monitoring of the output current of the optical path power supply, saves manpower, and ensures reliable data quality. It also provides a compensation method for dynamic compensation of the constant current source output.

[0007] To solve the above-mentioned technical problems, the technical solution proposed by this invention is as follows: An optical path power supply stability testing system for an electron beam device includes a host computer, a constant current source, an optical path coil, a resistor, a multimeter, and a LabVIEW acquisition system. The two ends of the optical path coil and the resistor connected in series are connected to the corresponding output ports of the constant current source. The multimeter is connected in parallel across the resistor to test the voltage, or connected in series between the resistor and the optical path coil to test the current. The host computer is communicatively connected to the constant current source to control the output value of the constant current source. The LabVIEW acquisition system turns on the multimeter and records the output data of the constant current source according to the set conditions.

[0008] As a further improvement to the above technical solution: The LabVIEW data acquisition system powers on the multimeter via a USB-GPIB interface.

[0009] This invention also discloses a test method for an optical path power supply stability test system based on the electron beam device described above. The method employs a cyclic architecture to achieve continuous data acquisition with adjustable sampling intervals. Specifically: The first step is to initialize the multimeter and obtain the GPIB address using VISA functions; The second step is to preset the multimeter status, trigger the automatic event mode, and set the sampling interval and the number of sampling points; The third step is to set up the multimeter functions, selecting DC voltage and 8.5-digit resolution; The fourth step is to read the multimeter data, continuously collect data through a loop architecture, and then parse the data.

[0010] This invention further discloses a compensation method for an optical path power supply stability testing system based on the electron beam device described above, comprising the following steps: S1. Outlier detection: The sliding window dynamic threshold (MAD) detection method is used to detect outliers in the optical path power supply timing data, and then removes them. S2, Data Fitting: The least squares method is used to perform polynomial regression fitting on the dataset processed by S1 to generate the optical path power supply output fitting curve. S3, Dynamic Compensation: Dynamic compensation is performed based on the optical path power supply output fitting curve obtained in S2.

[0011] Preferably, the specific steps of S1 are as follows: S101. Divide the data into sliding windows of equal length according to preset points, and calculate the median of the data in the window by sliding the window point by point. S102. Calculate the absolute deviation of each point within the window from the median, and find the median of the absolute deviations. In the formula, MAD The median of the absolute deviation; y i The first in the optical path power supply dataset i Number; y m This represents the median in the optical path power supply dataset; S103. Construct a dynamic threshold based on the median of the absolute deviation; S104. Mark points with absolute deviations greater than the dynamic threshold as outliers and remove them.

[0012] Preferably, in step S102, the expression for the median of the absolute deviation is:

[0013] In the formula, MAD The median of the absolute deviation; y i The first in the optical path power supply dataset i Number; y m This represents the median in the optical path power supply dataset; In step S103, the corresponding dynamic threshold TH The expression is:

[0014] In the formula, k This is the tolerance coefficient.

[0015] Preferably, the specific steps of S2 are as follows: S201. Establish a polynomial model In the formula, y The result is the least squares polynomial fitting curve. x For input independent variables, a 0、 a 1. a 2… a n These are the fitting parameters; S202. Solve for the fitting parameters with the objective of minimizing the sum of squared errors; S203 uses a third-order polynomial to generate the optical path power supply output fitting curve.

[0016] Preferably, in S203, the optical path power supply output fitting curve is as follows:

[0017] In the formula, The result is the fitted curve. x The input variable is time.

[0018] Preferably, the specific steps of S2 are as follows: S301. Calculate the mean offset of valid data; S302. Obtain the dynamically compensated optical power supply data based on the optical power supply output fitting curve and the mean value of effective data offset.

[0019] Preferably, the expression for the optical path power supply data after dynamic compensation is:

[0020] In the formula, z The power supply data for the optical path after dynamic compensation; y ( x () represents the fitted optical path power supply data; y set Set the power supply value for the optical path; y i This is valid data for the optical path power supply; corresponding to... This represents the mean offset of the valid data.

[0021] Compared with the prior art, the advantages of the present invention are as follows: The electron beam optical path power supply stability testing and compensation system constructed in this invention can meet the high-precision testing requirements of the optical path power supply, provide a standard for judging the power supply quality, and realize real-time monitoring of the output current of the optical path power supply, saving manpower and ensuring reliable data quality. At the same time, the proposed optical path power supply compensation method greatly eliminates the deviation between the theoretical and actual values ​​of the power supply, and improves the output stability index, thereby ensuring that the optical path power supply provides a highly stable and accurate working current for each coil of the electron beam equipment, and effectively guarantees the accurate focusing and stable operation of the electron beam during the exposure process.

[0022] This invention establishes an electron beam optical path power supply stability testing platform, designs a 3458A LabVIEW acquisition program, and enables adjustable sampling intervals and sampling points to achieve high-precision, real-time constant current source output data acquisition. The dynamic threshold MAD anomaly detection method of this invention adapts to the characteristics of optical path power supply data fluctuation, temporal sequence, and diversity, realizing the detection of constant current source output data anomalies and ensuring reliable data quality. The optical path power supply output current compensation method of this invention integrates least squares polynomial fitting curves and long-term deviation data, accurately tracking the trend of optical path power supply stability changes and achieving dynamic compensation of constant current source output.

[0023] The optical path power supply stability testing platform and compensation method of the electron beam equipment of the present invention can monitor the change trend of the output current of the optical path power supply in real time, which is highly efficient, reliable, and accurate in measurement. It can also realize the compensation of optical path power supply output error and stability, ensuring accurate electron beam focusing and stable operation during exposure. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the optical column structure of the electron beam device in this invention.

[0025] Figure 2 This is a structural block diagram of the optical path power supply stability testing system in an embodiment of the present invention.

[0026] Figure 3 This is a flowchart of the optical path power data acquisition method in this invention.

[0027] Figure 4 This is a flowchart of an embodiment of the optical path power supply stability compensation method of the present invention.

[0028] Figure 5 The results of abnormal value detection of MAD optical path power data using the dynamic threshold of the present invention are shown in the figure; (a) shows the presence of abnormal values; (b) shows the removal of abnormal values.

[0029] Figure 6 This is a curve showing the optical path power supply fitting of the present invention.

[0030] Figure 7 This is a diagram showing the deviation distribution between the overall effective data and the set value in this invention.

[0031] Figure 8 This is a structural diagram illustrating how the present invention combines the superposition of the fitted curve and the offset mean to compensate for effective data.

[0032] Legend: 1. Centering module; 2. C2 lens module; 3. Main field deflection module; 4. Sub-field deflection module; 5. Fine-tuning focus module; 6. C3 lens module; 7. Astigmatism correction module; 8. Host computer; 9. Constant current source; 10. Optical path coil; 11. Resistor; 12. Multimeter; 13. LabVIEW acquisition system. Detailed Implementation

[0033] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0034] like Figure 1 As shown, the optical column structure of the electron beam device includes a centering module 1, a C2 lens module 2, a main field deflection module 3, a subfield deflection module 4, a fine-tuning focus module 5, a C3 lens module 6, and an astigmatism correction module 7. Centering module 1 is used to adjust the deviation between the electron beam and the central axis; C2 lens module 2 is used to adjust the electron beam to be focused at the center of the beam gate; The main field deflection module 3 and the subfield deflection module 4 are used to control the electron beam to achieve deflection scanning; The fine-tuning module 5 is used to compensate for focus shift and ensure that the electron beam is focused on the target surface; C3 lens module 6 is used to adjust the electron beam focusing onto the substrate; The astigmatism correction module 7 is used to correct beam spot distortion and eliminate fixed astigmatism.

[0035] like Figure 2 As shown, the optical path power stability testing system for an electron beam device provided in this embodiment of the invention includes a host computer 8, a constant current source 9, an optical path coil 10, a high-precision resistor 11, a 3458A multimeter 12, and a LabVIEW acquisition system 13. The two ends of the optical path coil 10 and the resistor 11 connected in series are connected to the corresponding output ports of the constant current source 9. The 3458A multimeter 12 is connected in parallel across the high-precision resistor 11 to test the voltage, or connected in series between the high-precision resistor 11 and the optical path coil 10 to test the current. The host computer is communicatively connected to the constant current source and is used to control the output value of the constant current source 9. The LabVIEW acquisition system 13 turns on the 3458A multimeter 12 through the USB-GPIB interface and records the output data of the constant current source 9 according to the set conditions.

[0036] Specific working process: The test environment is under constant temperature and humidity conditions, and the constant current source 9 is provided with air cooling or water cooling. First, the electron beam optical path coil 10 ( Figure 1 The coils in each module are connected in series with the low-temperature drift and high-precision resistor 11, and the two ends are respectively connected to the corresponding output ports of the constant current source 9. Then, the 3458A multimeter 12 is connected in parallel across the high-precision resistor 11 to test the voltage (and connected in series between the high-precision resistor 11 and the optical path coil 10 to test the current). The host computer 8 controls the output value of the constant current source 9 through the LAN interface. At the same time, the LabVIEW acquisition system 13 turns on the 3458A multimeter 12 through the USB-GPIB interface and records the output data of the constant current source 9 according to the set conditions, so as to monitor the stability trend of the optical path power supply in real time.

[0037] Figure 3 This is a flowchart of the optical path power supply data acquisition method. Based on the LabVIEW platform, this invention uses a loop architecture to achieve continuous 3458A data acquisition with adjustable sampling intervals. Specifically: The first step is to initialize the 3458A multimeter and obtain the GPIB address using a VISA function. The second step is to preset the 3458A multimeter status, trigger the automatic event mode, and set the sampling interval and the number of sampling points. The third step is to set up the functions of the 3458A multimeter, selecting DC voltage and 8.5-digit resolution; The fourth step is to read data from the 3458A multimeter, continuously collect data using a loop architecture, and then parse the data.

[0038] Taking the centering power supply as an example, the constant current source output range is ±500mA, and the required output current stability is 5ppm / 12h. An 8.5-digit resolution multimeter can be used to measure the voltage across a high-precision resistor. The 3458A multimeter has a maximum sensitivity of 10nV and a stability of 0.6ppm / 24h, meeting the requirements for high-precision testing of the optical path coil current. Alternatively, the aperture time and sampling interval of the 3458A multimeter can be changed to reduce the multimeter resolution to 10nV. 5 The fastest rate of testing optical power supply ripple and short-term stability is 1 reading / second.

[0039] This invention establishes an optical power supply stability testing platform that can adjust the sampling interval of a 3458A multimeter to monitor the power output change trend in real time. It is highly efficient, reliable, and has high measurement accuracy.

[0040] like Figure 4 As shown in the figure, this embodiment of the invention further proposes a method combining anomaly detection, data fitting, and dynamic compensation. Based on the Matlab platform, a high-precision optical path power supply stability analysis system is built. The optical path power supply stability compensation method includes the following steps: S1. Outlier Detection: For fluctuating, time-series, and diverse optical power supply data, a sliding window MAD (Median Absolute Deviation) detection method is used. First, the data is divided into 400 equal-length sections, and the sections are slid across each section to calculate the median of the data within each window. Then, the absolute deviation of each point within the window from the median is calculated. The expression for the median absolute deviation is:

[0041] In the formula, MAD The median of the absolute deviation; y i The first in the optical path power supply dataset i Number; y m This represents the median of the optical path power supply dataset.

[0042] Under a normal distribution, the standard deviation σ ≈1.4826× MAD Referring to the commonly used method of removing outliers by three standard deviations, this invention proposes a dynamic threshold-based MAD outlier detection method. Considering the large data fluctuations during the initial warm-up of constant current source data, a tolerance coefficient is added. k Therefore, the dynamic threshold is set. TH The expression is:

[0043] In the formula, the tolerance coefficient k The result, verified by experiments, is 0.098. If the absolute difference between a data point and the median is greater than the dynamic threshold TH It is then marked as an outlier.

[0044] S2. Data Fitting: Based on least squares polynomial regression, the cleaned optical path power supply dataset (data removed for outlier detection and preheating time) is fitted using least squares. The least squares polynomial fitting expression is as follows:

[0045] In the formula, y The result is the least squares polynomial fitting curve. x The input variable is time, and the sampling interval of the 3458A multimeter is set to 1.05s. a 0、 a 1. a 2… a n These are the fitting parameters.

[0046] Solving based on the least squares criterion, with the objective function being the minimization of the sum of squared errors, its expression is:

[0047] In the formula, m This refers to the sample data volume of the optical path power supply. n To fit the order of the polynomial.

[0048] Under constant temperature and humidity conditions, and with air cooling provided for the centering power supply, taking a setting of -16.9mA for a certain output of the centering power supply as an example, a 3458A multimeter read the output value of the centering power supply at a sampling interval of 1.05s and a resolution of 8.5 bits, totaling 13101 data points. (Refer to...) Figure 5 (a) After detecting outliers in the MAD optical path power supply data with dynamic threshold, it was determined that there were 53 outliers in the original data. The cause was touching the transmission path, the acquisition platform, or interference from other devices during the test. The discarded outlier data is as follows: Figure 5 As shown in (b), the data retention rate is 99.6%, ensuring the quality of the data collected by LabVIEW software.

[0049] This invention employs third-order polynomial fitting, and the optical path power supply fitting curve is as follows: Figure 6As shown, after removing the constant current source preheating time, the effective data points changed from 13048 to 8848. The gray background represents the visualization of the effective data, and the red curve is the least squares polynomial fitting curve of the centered power supply output. The resulting formula for the centered power supply output is:

[0050] S3, Dynamic Compensation: Based on the distribution of deviations between the overall effective data and the set value, such as... Figure 7 As shown, the blue curve represents the current deviation result, and the pink background represents the peak-to-peak value of the deviation. The maximum output current during alignment is -0.0168314A, and the minimum is -0.01683257A. Therefore, the peak-to-peak value = maximum value - minimum value = 1.17μA, and the average absolute deviation is 68.11μA. From a stability perspective, the alignment power supply basically meets the optical path power supply specifications, but the actual output deviation reaches 68.11μA, requiring software compensation correction.

[0051] Therefore, this invention proposes a dynamic compensation method for optical path power supply. It uses high-precision, long-term power supply data acquired by a 3458A amplifier as the analysis source, and uses the peak-to-peak deviation after power supply preheating as the criterion for judging stability. The final compensation correction curve is then derived, expressed as:

[0052] In the formula, z The power supply data for the optical path after dynamic compensation; y ( x () represents the fitted optical path power supply data; y set Set the power supply value for the optical path; y i This is valid data for the optical path power supply.

[0053] Considering the characteristics of the constant current source driving coil, the stability trend of the optical path power supply needs to be taken into account. The effective data is compensated by combining the fitted curve with the offset mean. The results are as follows: Figure 8 As shown.

[0054] To better compare the data, the effective data were overlaid with the average offset, and the visualization results are as follows: Figure 8 As shown in the black circle in the middle, the result after compensation by the method proposed in this invention is as follows: Figure 8 As shown by the red curve, the results are fed back to the host computer for compensation, thereby improving the stability of the optical power supply from 1.17μA to 0.239μA. At the same time, the deviation of the power supply is eliminated. The compensated curves are all stable within the set value range, effectively improving the output accuracy and stability of the optical power supply.

[0055] The electron beam optical path power supply stability testing and compensation system constructed in this invention can meet the high-precision testing requirements of the optical path power supply, provide a standard for judging the power supply quality, and realize real-time monitoring of the output current of the optical path power supply, saving manpower and ensuring reliable data quality. At the same time, the proposed optical path power supply compensation method greatly eliminates the deviation between the theoretical and actual values ​​of the power supply, and improves the output stability index, thereby ensuring that the optical path power supply provides a highly stable and accurate working current for each coil of the electron beam equipment, and effectively guarantees the accurate focusing and stable operation of the electron beam during the exposure process.

[0056] This invention establishes an electron beam optical path power supply stability testing platform, designs a 3458A LabVIEW acquisition program, and enables adjustable sampling intervals and sampling points to achieve high-precision, real-time constant current source output data acquisition. The dynamic threshold MAD anomaly detection method of this invention adapts to the characteristics of optical path power supply data fluctuation, temporal sequence, and diversity, realizing the detection of constant current source output data anomalies and ensuring reliable data quality. The optical path power supply output current compensation method of this invention integrates least squares polynomial fitting curves and long-term deviation data, accurately tracking the trend of optical path power supply stability changes and achieving dynamic compensation of constant current source output.

[0057] The optical path power supply stability testing platform and compensation method of the electron beam equipment of the present invention can monitor the change trend of the output current of the optical path power supply in real time, which is highly efficient, reliable, and accurate in measurement. It can also realize the compensation of optical path power supply output error and stability, ensuring accurate electron beam focusing and stable operation during exposure.

[0058] Definitions: Ripple: The periodic alternating current component superimposed on the power supply output.

[0059] Noise: Non-periodic, random, or high-frequency interference superimposed on the power supply output.

[0060] Stability: The ability of a power supply to maintain a stable output voltage or current over a long period of time under constant conditions.

[0061] Beam gate: Used to precisely control the on / off state of the electron beam.

[0062] VISA: Virtual Instrument Software Architecture, widely used in instrument control and data acquisition.

[0063] Aperture time: The integration time of the multimeter's internal A / D conversion.

[0064] MAD: Absolute Median Difference, used for detecting abnormal values ​​in optical power supplies.

[0065] Deviation: The difference between the optical path power supply setting and the actual measured value.

[0066] The above are merely preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should be considered within the scope of protection of the present invention.

Claims

1. A system for testing the stability of the optical path power supply of an electron beam device, characterized in that, The system includes a host computer (8), a constant current source (9), an optical coil (10), a resistor (11), a multimeter (12), and a LabVIEW acquisition system (13). The two ends of the optical coil (10) and the resistor (11) connected in series are connected to the corresponding output ports of the constant current source (9). The multimeter (12) is connected in parallel across the resistor (11) to test the voltage, or connected in series between the resistor (11) and the optical coil (10) to test the current. The host computer (8) is connected to the constant current source (9) for communication and is used to control the output value of the constant current source (9). The LabVIEW acquisition system (13) turns on the multimeter (12) and records the output data of the constant current source (9) according to the set conditions.

2. The optical path power supply stability testing system for electron beam equipment according to claim 1, characterized in that, The LabVIEW acquisition system (13) turns on the multimeter (12) via the USB-GPIB interface.

3. A test method for a test system based on the optical path power supply stability test system of the electron beam device according to claim 1 or 2, characterized in that, A cyclic architecture is used to achieve continuous data acquisition with adjustable sampling intervals, specifically: The first step is to initialize the multimeter and obtain the GPIB address using VISA functions; The second step is to preset the multimeter status, trigger the automatic event mode, and set the sampling interval and the number of sampling points; The third step is to set up the multimeter functions, selecting DC voltage and 8.5-digit resolution; The fourth step is to read the multimeter data, continuously collect data through a loop architecture, and then parse the data.

4. A compensation method for an optical path power supply stability testing system based on the electron beam device according to claim 1 or 2, characterized in that, Including the following steps: S1. Outlier detection: The sliding window dynamic threshold (MAD) detection method is used to detect outliers in the optical path power supply timing data, and then removes them. S2, Data Fitting: The least squares method is used to perform polynomial regression fitting on the dataset processed by S1 to generate the optical path power supply output fitting curve. S3, Dynamic Compensation: Dynamic compensation is performed based on the optical path power supply output fitting curve obtained in S2.

5. The compensation method according to claim 4, characterized in that, The specific steps of S1 are as follows: S101. Divide the data into sliding windows of equal length according to preset points, and calculate the median of the data in the window by sliding the window point by point. S102. Calculate the absolute deviation of each point within the window from the median, and find the median of the absolute deviations. In the formula, MAD The median of the absolute deviation; y i The first in the optical path power supply dataset i Number; y m This represents the median in the optical path power supply dataset; S103. Construct a dynamic threshold based on the median of the absolute deviation; S104. Mark points with absolute deviations greater than the dynamic threshold as outliers and remove them.

6. The compensation method according to claim 5, characterized in that, In step S102, the expression for the median of the absolute deviation is: In the formula, MAD The median of the absolute deviation; y i The first in the optical path power supply dataset i Number; y m This represents the median in the optical path power supply dataset; In step S103, the corresponding dynamic threshold TH The expression is: In the formula, k This is the tolerance coefficient.

7. The compensation method according to claim 4, 5, or 6, characterized in that, The specific steps of S2 are as follows: S201. Establish a polynomial model In the formula, y The result is the least squares polynomial fitting curve. x For input independent variables, a 0、 a 1. a 2… a n These are the fitting parameters; S202. Solve for the fitting parameters with the objective of minimizing the sum of squared errors; S203 uses a third-order polynomial to generate the optical path power supply output fitting curve.

8. The compensation method according to claim 7, characterized in that, In S203, the optical path power supply output fitting curve is as follows: In the formula, The result is the fitted curve. x The input variable is time.

9. The compensation method according to claim 4, 5, or 6, characterized in that, The specific steps of S2 are as follows: S301. Calculate the mean offset of valid data; S302. Obtain the dynamically compensated optical power supply data based on the optical power supply output fitting curve and the mean value of effective data offset.

10. The compensation method according to claim 9, characterized in that, The expression for the optical path power supply data after dynamic compensation is: In the formula, z The power supply data for the optical path after dynamic compensation; y ( x () represents the fitted optical path power supply data; y set Set the power supply value for the optical path; y i This is valid data for the optical path power supply; corresponding to... This represents the mean offset of the valid data.

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