Dual-arm vacuum robot

Abstract

The application discloses a double-arm vacuum manipulator and relates to the field of semiconductor wafer transfer equipment, which comprises a power output part, a power transmission part for transmitting the torque of the power output part, a first annular gap formed between the power transmission part and the power output part, a second annular gap formed between the power output part and an arm shell, a fastening assembly comprising expansion parts and a driving part, and two expansion parts arranged in the first annular gap and the second annular gap respectively. When the expansion parts are axially extruded, radial expansion of the expansion parts in the first annular gap and the second annular gap can radially compress the power output part and the power transmission part and the power output part and the arm shell. The above scheme realizes stable installation of a power shaft and reliable torque output in a limited axial space of the manipulator.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor wafer transfer equipment, in particular to a double-arm vacuum manipulator. BACKGROUND

[0002] In the semiconductor manufacturing process, the vacuum manipulator is a key component in the wafer transfer system, and its main task is to complete the pickup, handling and precise positioning of the wafer in the vacuum chamber. With the continuous evolution of process nodes and the improvement of chip integration, the size of the wafer gradually increases, and the vacuum manipulator needs to have higher transmission accuracy and stronger adaptability to meet the production needs of advanced processes. At the same time, the equipment layout inside the vacuum chamber tends to be complex and compact, and the structural design of the manipulator faces more stringent space constraints.

[0003] In the structural design of the vacuum manipulator, the thickness of the vacuum manipulator is directly related to its movement space in the vacuum chamber, and a smaller thickness can effectively avoid interference between the manipulator and the chamber wall, other transmission mechanisms or process modules, thereby improving the transmission efficiency and running stability of the wafer. At the same time, the reduction of the thickness of the manipulator also helps to improve its compatibility with different models of vacuum equipment and enhance the flexible configuration capability of the overall system. However, the shoulder transmission mechanism of the traditional vacuum manipulator generally adopts an axial stacking arrangement, that is, the components are stacked and arranged along the axis of the manipulator. Although this structure is more intuitive in processing and assembly, it inevitably leads to an excessive axial size of the shoulder, resulting in an increase in the overall thickness of the manipulator. Especially in multi-joint manipulators, such as SCARA-type vacuum manipulators, the stacking of multiple transmission parts further magnifies the thickness problem, making it difficult to meet the demand for compact space in modern semiconductor equipment and limiting the fastening and reliable installation of the power shaft in the limited axial space, which has become a bottleneck restricting the development of thin manipulators.

[0004] Therefore, how to design a double-arm vacuum manipulator that can significantly reduce the thickness of the arm and achieve stable installation and reliable torque output of the power shaft in the limited axial space has become a key technical problem that needs to be broken through. SUMMARY

[0005] The purpose of the present application is to provide a double-arm vacuum manipulator to solve the problem that the thickness of the arm is difficult to reduce and stable installation and reliable torque output of the power shaft are difficult to achieve in the limited axial space in the prior art.

[0006] To achieve the above-mentioned purpose, the technical solutions of the present application are as follows:

[0007] The double-arm vacuum manipulator comprises a body and an arm pivotally connected to the body, and further comprises:

[0008] a power output part located in the body, having a plurality of power shafts arranged coaxially and distributed radially in sequence, and a power output part of each power shaft located at different axial heights;

[0009] a power transmission part for transmitting the torque of the power output part, and a first annular gap formed between the power transmission part and the power output part;

[0010] an arm shell extending in a first direction and having a first space for accommodating the power output part, and a second space in the form of a ring for accommodating the power transmission part, the second space being distributed radially around the outer periphery of the first space, and a second annular gap formed between the power output part and the arm shell;

[0011] a fastening assembly including an expansion part and a driving part, two expansion parts being arranged in the first annular gap and the second annular gap respectively, and the driving part being configured to apply axial extrusion force to the expansion part;

[0012] wherein the expansion part can generate radial expansion in the first annular gap and the second annular gap when subjected to axial extrusion by the driving part, so as to radially compress the power output part and the power transmission part, and the power output part and the arm shell.

[0013] Further, the expansion part includes an inner expansion sleeve and an outer expansion sleeve, the inner surface of the outer expansion sleeve is a tapered surface and is sleeved on the outer periphery of the power output part, and the inner expansion sleeve is sleeved between the outer expansion sleeve and the power transmission part and / or between the outer expansion sleeve and the arm shell, and the outer surface of the inner expansion sleeve is a tapered surface matched with the inner surface of the outer expansion sleeve.

[0014] wherein the driving part is configured to apply axial extrusion force to the inner expansion sleeve and / or the outer expansion sleeve, so that the inner expansion sleeve moves along the tapered surface and generates radial deformation, so as to radially compress the power output part, the power transmission part and the arm shell.

[0015] Further, the inner expansion sleeve is provided with at least one slot extending in the axial direction, and the slot penetrates one end or both ends of the inner expansion sleeve, so as to provide elastic space for radial deformation of the inner expansion sleeve.

[0016] Further, the inner surface of the outer expansion sleeve is tapered in the axial direction, and the inner diameter of the end of the outer expansion sleeve close to the driving part is greater than the inner diameter of the end away from the driving part, and the inner diameter of the end of the inner expansion sleeve close to the driving part is smaller than the inner diameter of the end away from the driving part.

[0017] Further, the arm shell comprises a first upper arm shell, a second upper arm shell and a first adapter shaft, the first upper arm shell is pivotally connected with the second upper arm shell, and the first adapter shaft is fixedly connected with the power output part through the fastening assembly; the first adapter shaft comprises a circular ring part and an adapter part extending inward along the inner peripheral edge of the circular ring part and fixedly connected; and the outer peripheral wall of the circular ring part is fixedly connected with the first upper arm shell.

[0018] Further, the power output part comprises a first power shaft, a second power shaft and a third power shaft distributed outward in sequence along the radial direction, and the power transmission part comprises coaxial and fixedly connected first and second shoulder pulleys; the first power shaft is fixedly connected with the first adapter shaft; the second power shaft is fixedly connected with a second adapter shaft, and the second adapter shaft is fixedly connected with the second shoulder pulley; and the third power shaft is connected with a third adapter plate, and the third adapter plate is fixedly connected with the second upper arm shell.

[0019] Further, the driving part comprises a pull-and-press plate, the pull-and-press plate is connected with the first adapter shaft and / or the second shoulder pulley through a screw, and the pull-and-press plate abuts against one end of the inner expansion sleeve.

[0020] Further, the first upper arm shell is provided with a shoulder opening and an elbow opening, one end of the first upper arm shell close to the shoulder opening is provided with a first adapter block, the first adapter block comprises a first cylinder, a first ring body and a second cylinder, the first cylinder is formed by protruding downward along the edge of the shoulder opening, the first ring body is formed by extending radially inward along the inner side of the first cylinder, and the second cylinder is formed by protruding downward along the inner side edge of the first ring body; the first adapter block and the upper wall surface of the first upper arm shell form a T-shaped accommodation space, and a first annular space is formed between the first adapter block and the inner side wall surface of the first upper arm shell; a second annular space is formed at the connection between the first cylinder and the first ring body, and a first upper arm support shaft protruding upward is arranged at one end of the first upper arm shell close to the elbow opening, and a third annular space is formed between the first upper arm support shaft and the inner wall of the first upper arm shell.

[0021] Further, one end of the second upper arm shell close to the elbow opening is provided with a second adapter block, the second adapter block and the second upper arm shell form a T-shaped accommodation space, and a fourth annular space is formed between the second adapter block and the inner side wall surface of the second upper arm shell; a second upper arm support shaft protruding upward is arranged at one end of the second upper arm shell close to the shoulder opening, and a fifth annular space is formed between the second upper arm support shaft and the inner wall of the second upper arm shell.

[0022] The first annular space and the fourth annular space jointly enclose the second space.

[0023] Further, a first bearing is arranged between the arm shell and the power transmission member, and a first inner pressure cover is arranged between the first bearing and the first adapter shaft.

[0024] When the driving member applies axial extrusion force, the first inner pressure cover tightly presses the first bearing.

[0025] Further, the first shoulder pulley has an integrated first shoulder pulley body and a first shoulder support portion, the first shoulder support portion has a first cylindrical space in the radial direction; the second shoulder pulley has an integrated second shoulder pulley body and a second shoulder support portion, the second shoulder support portion has a second cylindrical space in the radial direction; the third cylindrical space is formed between the first shoulder support portion and the second shoulder support portion, and the tension plate includes a first tension plate and a second tension plate, and the third cylindrical space is used for accommodating the second tension plate.

[0026] Further, the arm includes a first arm body and a second arm body pivotally connected to the first arm body; the first arm body includes a first upper arm body, a first forearm body and a first end effector; the second arm body includes a second upper arm body, a second forearm body and a second end effector.

[0027] The mechanical arm provided by the application has the beneficial effects that: a plurality of coaxial power shafts are arranged in the body in sequence along the radial direction, and the power output portions of the power shafts are located at different axial heights, thereby avoiding the problem of excessive thickness caused by the simple axial stacking arrangement of the transmission structure of the shoulder of the traditional vacuum mechanical arm. In addition, the arm shell is extended along the first direction and forms a first space for accommodating the power output portion, and a second space for accommodating the power transmission member is opened in the form of a ring on the outer circumferential side of the same cross section, the traditional axially stacked transmission unit is converted into a radial planar layout of "radial surrounding and axial giving way", thereby transferring the transmission volume originally occupying the axial thickness to the radial cross section, significantly reducing the axial size of the shoulder and achieving thinning of the arm. On this basis, a first annular gap and a second annular gap are respectively arranged between the power output portion and the power transmission member, and between the power output portion and the arm shell, and an expansion member is arranged in the two gaps, the expansion member is radially expanded by the driving member applying axial extrusion force, thereby tightly pressing the power output portion and the power transmission member, and the power output portion and the arm shell, and further realizing reliable and stable power transmission in the limited axial space. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is an overall schematic view of the dual-arm vacuum mechanical arm of the embodiment of the application.

[0029] Figure 2 A schematic diagram of an arm structure for an embodiment of the application;

[0030] Figure 3 A partial cross-sectional view of a dual-arm vacuum manipulator for an embodiment of the application;

[0031] Figure 4 A schematic diagram of Figure 3 an enlarged view of A;

[0032] Figure 5 A schematic diagram of a first upper arm housing for an embodiment of the application;

[0033] Figure 6 A cross-sectional view of a first upper arm housing for an embodiment of the application;

[0034] Figure 7 A schematic diagram of a second upper arm housing for an embodiment of the application;

[0035] Figure 8 A cross-sectional view of a second upper arm housing for an embodiment of the application;

[0036] Figure 9 A schematic diagram of a power transmission member for an embodiment of the application;

[0037] Figure 10 A cross-sectional view of a power transmission member for an embodiment of the application;

[0038] Figure 11 An exploded schematic diagram of a fastening assembly for an embodiment of the application;

[0039] Figure 12 A schematic diagram of a second shoulder pulley for an embodiment of the application.

[0040] Reference signs: 1, main body; 2, first arm body; 21, first upper arm body; 22, first forearm body; 23, first end effector; 3, second arm body; 31, second upper arm body; 32, second forearm body; 33, second end effector; 4, power output; 41, first power shaft; 42, second power shaft; 43, third power shaft; 431, third adapter plate; 5, power transmission; 51, first shoulder pulley; 511, first shoulder support; 512, first cylindrical space; 513, second cylindrical space; 514, third cylindrical space; 52, second shoulder pulley; 521, second shoulder support; 6, arm shell; 61, first upper arm shell; 611, first adapter block; 612, T-shaped accommodating space; 613, first annular space; 614, second annular space; 615, first upper arm support shaft; 616, third annular space; 62, second upper arm shell; 621, second adapter block; 622, fourth annular space; 623, second upper arm support shaft; 624, fifth annular space; 625, sixth annular space; 626, seventh annular space; 63, first adapter shaft; 631, circular ring part; 632, adapter part; 7, driving part; 71, first pull-press plate; 72, second pull-press plate; 8, expansion part; 81, inner expansion sleeve; 811, slot; 82, outer expansion sleeve; 9, first bearing; 91, first inner pressure cover; 92, first outer pressure cover; 93, second outer pressure cover; 94, second inner pressure cover; 95, bellows. DETAILED DESCRIPTION

[0041] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are only some, but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the common meanings to those of ordinary skill in the art. The words “comprise” and the like used herein mean that the elements or objects before the word encompass the elements or objects listed after the word and equivalents thereof, and do not exclude other elements or objects.

[0042] The above description will be further illustrated below with reference to the accompanying drawings. Figure 1 The above description will be further illustrated below with reference to the accompanying drawings. Figure 12 The above description will be further illustrated below with reference to the accompanying drawings.

[0043] The above description will be further illustrated below with reference to the accompanying drawings. Figures 1-3In some embodiments of the present application, a dual-arm vacuum manipulator comprises a body 1 and an arm pivotally connected to the body 1. The arm comprises a first arm body 2 and a second arm body 3, wherein the first arm body 2 is pivotally connected to the second arm body 3. The first arm body 2 comprises a first upper arm body 21, a first forearm body 22 pivotally connected to the first upper arm body 21, and a first end effector 23 arranged at an end of the first forearm body 22; the second arm body 3 comprises a second upper arm body 31, a second forearm body 32 pivotally connected to the second upper arm body 31, and a second end effector 33 arranged at an end of the second forearm body 32. Integrating two independent motion chains in the same shoulder makes the dual-arm vacuum manipulator of the present application only need a set of vacuum rotary feedthrough to drive the dual arms, reduces the number of vacuum cavity openings, and is suitable for semiconductor equipment scenarios with higher isolation requirements.

[0044] Referring to Figure 4 In some embodiments of the present application, the body 1 is internally provided with a power output 4, which has a plurality of power shafts coaxially arranged and radially distributed from inside to outside in sequence, including a first power shaft 41, a second power shaft 42, and a third power shaft 43. The power output portions of the first power shaft 41, the second power shaft 42, and the third power shaft 43 are located at different axial heights to avoid axial stacking. The first power shaft 41, the second power shaft 42, and the third power shaft 43 are rotationally connected, and the rotationally connection is realized by bearings. The stepped shaft shoulder makes the power output portions axially offset, and the offset amount facilitates power output. Specifically, in some other embodiments, a bellows 95 is arranged around the power shaft.

[0045] Referring to Figures 5-8 In some embodiments of the present application, the arm shell 6 comprises a first upper arm shell 61, a second upper arm shell 62, and a first adapter shaft 63. The first upper arm shell 61 is pivotally connected to the second upper arm shell 62, and the first adapter shaft 63 is fixedly connected to the power output portion through a fastening assembly. The first adapter shaft 63 comprises a circular ring portion 631 and an adapter portion 632 extending inwardly along the inner peripheral edge of the circular ring portion 631 and fixedly connected. The outer peripheral wall of the circular ring portion 631 is fixedly connected to the first upper arm shell 61.

[0046] Referring to Figure 9 and Figure 10In some embodiments of the present application, the power transmission member 5 is used to transmit the torque of the power output part, and specifically, the power transmission member 5 includes a first shoulder pulley 51 and a second shoulder pulley 52 coaxially and fixedly connected by bolts, and is used to transmit the torque of the power output part. The first shoulder pulley 51 has a first shoulder pulley body and a first shoulder support part 511, and the first shoulder support part 511 has a first cylindrical space 512 in the radial direction; the second shoulder pulley 52 has a second shoulder pulley body and a second shoulder support part 521, and the second shoulder pulley body and the second shoulder support part 521 form a sixth annular space, and the second shoulder support part 521 has a second cylindrical space 513 in the radial direction; and the first shoulder support part 511 and the second shoulder support part 521 form a third cylindrical space 514. With the above scheme, multiple accommodation spaces exist coaxially, which facilitates assembly and nesting and minimizes the axial dimension.

[0047] In some embodiments of the present application, a first annular gap is formed between the power transmission member 5 and the power output part. A second annular gap is formed between the power output part and the arm housing 6. The arm housing 6 extends in the first direction (i.e., the axial direction) and has a first space for accommodating the power output part, and has a second space in the form of a ring for accommodating the power transmission member 5 inside, and the second space is distributed in the radial direction around the outer periphery of the first space. The partitioned space layout of the arm housing 6 extends the arm housing 6 in the first direction and forms the first space for accommodating the power output part, and has the second space in the form of a ring on the outer periphery for accommodating the power transmission member 5, which converts the traditional axially stacked transmission unit into a "radially around, axially let go" radial planar layout, thereby transferring the transmission volume originally occupying the axial thickness to the radial cross section, significantly reducing the shoulder axial dimension and achieving arm thinning.

[0048] Referring to Figure 11 and Figure 12 In some embodiments of the present application, the fastening assembly includes expansion members 8 and a driving member 7, two expansion members 8 are respectively arranged in the first annular gap and the second annular gap, and the driving member 7 is configured to apply an axial extrusion force to the expansion members 8; wherein when the expansion members 8 are subjected to the axial extrusion of the driving member 7, the expansion members 8 can be radially expanded in the first annular gap and the second annular gap to radially compress the power output part and the power transmission member 5, and the power output part and the arm housing 6.

[0049] In some embodiments of the present application, the expansion member 8 comprises an inner expansion sleeve 81 and an outer expansion sleeve 82, the inner surface of the outer expansion sleeve 82 is a tapered surface and is sleeved on the outer periphery of the power output part, the inner expansion sleeve 81 is sleeved between the outer expansion sleeve 82 and the power transmission member 5, and in some other embodiments, the inner expansion sleeve 81 is sleeved between the outer expansion sleeve 82 and the arm shell 6, the outer surface of the inner expansion sleeve 81 is a tapered surface matched with the inner surface of the outer expansion sleeve 82, and the driving member 7 is configured to apply an axial extrusion force to the inner expansion sleeve 81 and / or the outer expansion sleeve 82, so that the inner expansion sleeve 81 moves along the tapered surface and generates radial deformation, so as to press the power output part, the power transmission member 5 and the arm shell 6 in the radial direction. By using the above scheme, the multi-interface tightness is achieved, and the torque transmission is enhanced. Specifically, when the inner expansion sleeve 81 shrinks, it simultaneously forms an interference contact with the inner wall of the first adapter shaft 63 and the outer wall of the outer expansion sleeve 82, so that the contact area and the friction force are increased, and the torque transmission capacity is significantly improved. In addition, the inner and outer expansion sleeves 82 are completely integrated in the axial overlapping area of the first adapter shaft 63 and the first power shaft 41, without additional axial or radial size, which is highly consistent with the thinning design target.

[0050] In some other embodiments of the present application, the expansion member 8 can be any one of a single-piece tapered expansion sleeve, a split elastic sleeve or a hydraulic expansion sleeve. Specifically, in the single-piece tapered expansion sleeve embodiment, the expansion member 8 adopts a whole tapered sleeve structure, the outer surface of which is in contact with the power transmission member 5 or the arm shell 6, and the inner surface of which is in contact with the power output part, an axial force is applied by the driving member 7 to make the tapered sleeve generate radial elastic deformation, so as to simultaneously press multiple contact interfaces. In the split elastic sleeve embodiment, the expansion member 8 is composed of a plurality of circumferentially distributed arc-shaped petals, and a deformation gap is left between each petal, when subjected to axial extrusion, the petals expand outward along the tapered surface to achieve radial expansion. In the hydraulic expansion sleeve embodiment, the expansion member 8 is internally provided with a sealed liquid cavity, and the hydraulic driving member 7 applies hydraulic pressure to the liquid cavity to make the outer wall of the expansion member 8 uniformly expand radially, so as to press each connection interface.

[0051] In some embodiments of the present application, the inner expansion sleeve 81 is provided with at least one slot 811 extending in the axial direction of the inner expansion sleeve 81, and the slot 811 penetrates one end or both ends of the inner expansion sleeve 81, which is used to provide elastic space for the radial deformation of the inner expansion sleeve 81. The elastic contraction characteristics of the split inner expansion sleeve 81 can automatically compensate for the coaxiality deviation or machining tolerance of the first power shaft 41 and the first adapter shaft 63, so as to avoid connection failure caused by local stress concentration.

[0052] In some embodiments of the present application, the inner circumferential surface of the outer expansion sleeve 82 is tapered in the axial direction, and the inner diameter of the outer expansion sleeve 82 near one end of the driving member 7 is larger than the inner diameter of the outer expansion sleeve 82 away from one end of the driving member 7, and the inner diameter of the inner expansion sleeve 81 near one end of the driving member 7 is smaller than the inner diameter of the inner expansion sleeve 81 away from one end of the driving member 7. Specifically, the inner circumferential surface of the outer expansion sleeve 82 is designed as a tapered slope surface that is "wide at the top and narrow at the bottom", which gradually decreases from the upper end to the lower end; the inner expansion sleeve 81 adopts an open loop structure, the outer circumferential surface of which is completely matched with the slope surface of the outer expansion sleeve 82, and the inner circumferential surface of which is tightly fitted with the outer circumferential surface of the first adapter shaft 63.

[0053] Specifically, first, the first adapter shaft 63 is placed in the T-shaped accommodating space 612 of the first upper arm shell 61, and is rigidly fixed with the first upper arm shell 61 through bolts, so as to ensure that the first adapter shaft 63 has no displacement in the radial and circumferential directions; then, the top end of the first power shaft 41 is inserted into the first adapter shaft 63 in the axial direction, so as to form a preliminary coaxial positioning; then, the outer expansion sleeve 82 is sleeved on the overlapping area of the first power shaft 41 and the first adapter shaft 63, and the inner expansion sleeve 81 is embedded in the inner part of the outer expansion sleeve 82, at this time, the slope surfaces of the inner and outer expansion sleeves 81 and 82 are in an initial separated state; then, the first pull-and-press plate 71 is gradually locked through screws, and the pull-and-press plate applies an axial pressure to the inner expansion sleeve 81; after the inner expansion sleeve 81 is subjected to the axial pressure, the outer circumferential slope surface of the inner expansion sleeve 81 is in sliding fit with the inner circumferential slope surface of the outer expansion sleeve 82, so as to force the inner expansion sleeve 81 of the open loop structure to contract in the radial direction, so that the open loop gap is reduced; when the inner expansion sleeve 81 contracts, the inner wall thereof is tightly pressed and fixed to the outer circumferential surface of the first adapter shaft 63, and the outer wall thereof is in interference contact with the inner wall of the outer expansion sleeve 82, so that a "multi-layered tight" rigid connection is finally formed between the first power shaft 41, the outer expansion sleeve 82, the inner expansion sleeve 81 and the first adapter shaft 63.

[0054] In some embodiments of the present application, the first power shaft 41 is fixedly connected with the first adapter shaft 63; the second power shaft 42 is fixedly connected with a second adapter shaft, and the second adapter shaft is fixedly connected with the second shoulder pulley 52; the third power shaft 43 is connected with a third adapter plate 431, and the third adapter plate 431 is fixedly connected with the second upper arm shell 62.

[0055] In some embodiments of the present application, the driving member 7 comprises a pull-and-press plate, the pull-and-press plate is connected with the first adapter shaft 63 and / or the second shoulder pulley 52 through screws, and one end of the pull-and-press plate abuts against the inner expansion sleeve 81.

[0056] In some embodiments of the present application, the first upper arm shell 61 is provided with a shoulder opening and an elbow opening, and an end of the first upper arm shell 61 close to the shoulder opening is provided with a first adapter block 611, which comprises a first cylinder, a first annular body and a second cylinder. The first cylinder is formed by protruding downward along the edge of the shoulder opening, the first annular body is formed by extending radially inward along the inner side of the first cylinder, and the second cylinder is formed by protruding downward along the inner side edge of the first annular body. The first adapter block 611 and the upper wall of the first upper arm shell 61 form a T-shaped accommodating space 612, and a first annular space 613 is formed between the first adapter block 611 and the inner side wall of the first upper arm shell 61. A second annular space 614 is formed at the connection between the first cylinder and the first annular body, and an upwardly protruding first upper arm support shaft 615 is arranged at an end of the first upper arm shell 61 close to the elbow opening, and a third annular space 616 is formed between the first upper arm support shaft 615 and the inner wall of the first upper arm shell 61.

[0057] In some embodiments of the present application, an end of the second upper arm shell 62 close to the elbow opening is provided with a second adapter block 621, which forms a T-shaped accommodating space 612 with the second upper arm shell 62, and a fourth annular space 622 is formed between the second adapter block 621 and the inner side wall of the second upper arm shell 62. An upwardly protruding second upper arm support shaft 623 is arranged at an end of the second upper arm shell 62 close to the shoulder opening, and a fifth annular space 624 is formed between the second upper arm support shaft 623 and the inner wall of the second upper arm shell 62. The first annular space 613 and the fourth annular space 622 jointly form a second space.

[0058] In some embodiments of the present application, a first bearing 9 is arranged between the arm shell 6 and the power transmission member 5, and a first inner pressure cover 91 is arranged between the first bearing 9 and the first adapter shaft 63. When the driving member 7 applies an axial extrusion force, the inner pressure cover tightly presses the first bearing 9. Specifically, a first outer pressure cover 92 is further arranged on the first bearing 9, and the first outer pressure cover 92 and a second inner pressure cover 94 are both located in the second annular space 614. The axial extrusion force of the driving member 7 is not only used to drive the expansion member 8 to expand radially, but also further transmits the pressing force to the bearing pre-tightening structure through the transmission chain. Specifically, when the first pull-and-press plate 71 applies an axial extrusion force, the force is transmitted downward through the first adapter shaft 63, simultaneously extruding the first inner pressure cover 91 arranged between the first adapter shaft 63 and the first bearing 9, so that the first inner pressure cover 91 is axially displaced and tightly presses the first bearing 9. In this way, a single driving action simultaneously achieves three effects: first, driving the expansion member 8 to expand radially to press the power transmission interface; second, pre-tightening the bearing to eliminate the bearing play; and third, enhancing the overall structural rigidity through bearing pre-tightening.

[0059] In some embodiments of the present application, the first shoulder pulley 51 has a first shoulder pulley body and a first shoulder support portion 511, the first shoulder support portion 511 has a first cylindrical space 512 in the radial direction; the second shoulder pulley 52 has a second shoulder pulley body and a second shoulder support portion 521, the second shoulder pulley body and the second shoulder support portion 521 form a sixth annular space, the second shoulder support portion 521 has a second cylindrical space 513 in the radial direction; the first shoulder support portion 511 and the second shoulder support portion 521 form a third cylindrical space 514, the tension plate includes a first tension plate 71 and a second tension plate 72, and the third cylindrical space 514 is used to accommodate the second tension plate 72.

[0060] In some embodiments of the present application, a second bearing is connected between the second upper arm shell 62 and the second adapter block 621, and a bottom wall of the second bearing is provided with a second inner pressure cover 94 and a second outer pressure cover 93.

[0061] Although the embodiments of the present application have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present application. Moreover, the present application described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. Double-arm vacuum robot, comprising a body (1) and arms pivoted to said body (1), characterised in that, Also comprising: a power output member (4) located in the body (1), having a plurality of power shafts arranged coaxially and distributed radially in sequence, and the power output portions of the plurality of power shafts are located at different axial heights; a power transmission member (5) for transmitting the torque of the power output portions, and a first annular gap is formed between the power transmission member (5) and the power output portions; an arm shell (6) extending in a first direction and having a first space for accommodating the power output portions, and an annular second space for accommodating the power transmission member (5) is formed inside, the second space is distributed around the outer periphery of the first space in the radial direction, and a second annular gap is formed between the power output portions and the arm shell (6); a fastening assembly including expansion members (8) and a driving member (7), two expansion members (8) are arranged in the first annular gap and the second annular gap respectively, and the driving member (7) is configured to apply axial extrusion pressure to the expansion members (8); wherein when the expansion members (8) are respectively subjected to axial extrusion by the driving member (7), radial expansion can be generated in the first annular gap and the second annular gap to radially compress the power output portions and the power transmission member (5), and the power output portions and the arm shell (6); the arm shell (6) includes a first upper arm shell (61), a second upper arm shell (62), and a first adapter shaft (63), the first upper arm shell (61) is pivotally connected with the second upper arm shell (62), and the first adapter shaft (63) is fixedly connected with the power output portions through the fastening assembly; the first adapter shaft (63) includes a circular ring portion (631) and an adapter portion (632) extending inwardly along the inner peripheral edge of the circular ring portion (631) and fixedly connected, and the outer peripheral wall of the circular ring portion (631) is fixedly connected with the first upper arm shell (61); the power output member (4) includes a first power shaft (41), a second power shaft (42), and a third power shaft (43) distributed radially outward in sequence; the power transmission member (5) includes a first shoulder pulley (51) and a second shoulder pulley (52) coaxially and fixedly connected, the first power shaft (41) is fixedly connected with the first adapter shaft (63); the second power shaft (42) is fixedly connected with a second adapter shaft, the second adapter shaft is fixedly connected with the second shoulder pulley (52); the third power shaft (43) is connected with a third adapter plate (431), and the third adapter plate (431) is fixedly connected with the second upper arm shell (62).

2. The dual-arm vacuum manipulator of claim 1, wherein, the expansion member (8) includes an inner expansion sleeve (81) and an outer expansion sleeve (82), the inner peripheral surface of the outer expansion sleeve (82) is a tapered surface and is sleeved on the outer periphery of the power output portion; The inner expansion sleeve (81) is sleeved between the outer expansion sleeve (82) and the power transmission member (5), and / or is sleeved between the outer expansion sleeve (82) and the arm shell (6), and an outer peripheral surface of the inner expansion sleeve (81) is a tapered surface matched with an inner peripheral surface of the outer expansion sleeve (82); The driving member (7) is configured to apply an axial extrusion force to the inner expansion sleeve (81) and / or the outer expansion sleeve (82), so that the inner expansion sleeve (81) moves along the tapered surface and is radially deformed to radially compress the power output part, the power transmission member (5) and the arm shell (6).

3. The dual-arm vacuum manipulator of claim 2, wherein, The inner expansion sleeve (81) is provided with at least one slot (811) extending along an axial direction of the inner expansion sleeve (81), and the slot (811) penetrates one end or both ends of the inner expansion sleeve (81) to provide an elastic space for radial deformation of the inner expansion sleeve (81).

4. The dual-arm vacuum manipulator of claim 2, wherein, The inner peripheral surface of the outer expansion sleeve (82) is tapered along the axial direction, and an inner diameter of the outer expansion sleeve (82) near one end close to the driving member (7) is greater than an inner diameter of the outer expansion sleeve (82) far from the one end close to the driving member (7). The inner diameter of the inner expansion sleeve (81) near the one end close to the driving member (7) is smaller than the inner diameter of the inner expansion sleeve (81) far from the one end close to the driving member (7).

5. The dual-arm vacuum manipulator of claim 4, wherein, The driving member (7) comprises a pull-press plate, the pull-press plate is connected to the first adapter shaft (63) and / or the second shoulder pulley (52) through screws, and one end of the pull-press plate abuts against the inner expansion sleeve (81).

6. The dual-arm vacuum manipulator of claim 5, wherein, The first upper arm shell (61) is provided with a shoulder opening and an elbow opening, and one end of the first upper arm shell (61) close to the shoulder opening is provided with a first adapter block (611). The first adapter block (611) comprises a first cylinder, a first ring body and a second cylinder, the first cylinder is formed by protruding downward along an edge of the shoulder opening, the first ring body is formed by extending radially inward along an inner side of the first cylinder, and the second cylinder is formed by protruding downward along an inner side edge of the first ring body, the first adapter block (611) and an upper wall surface of the first upper arm shell (61) form a T-shaped accommodation space (612), and a first annular space (613) is formed between the first adapter block (611) and an inner side wall surface of the first upper arm shell (61). A second annular space (614) is formed at a connection between the first cylinder and the first ring body, one end of the first upper arm shell (61) close to the elbow opening is provided with a first upper arm support shaft (615) protruding upward, and a third annular space (616) is formed between the first upper arm support shaft (615) and an inner wall of the first upper arm shell (61).

7. The dual-arm vacuum manipulator of claim 6, wherein, One end of the second upper arm shell (62) close to the elbow opening is provided with a second adapter block (621), the second adapter block (621) and the second upper arm shell (62) form a T-shaped accommodation space (612), and a fourth annular space (622) is formed between the second adapter block (621) and an inner side wall surface of the second upper arm shell (62). The second upper arm shell (62) is provided with a second upper arm support shaft (623) protruding upward at one end close to the shoulder opening, and a fifth annular space (624) is formed between the second upper arm support shaft (623) and the inner wall of the second upper arm shell (62). The first annular space (613) and the fourth annular space (622) form the second space.

8. The dual-arm vacuum manipulator of claim 1, wherein, A first bearing (9) is arranged between the arm shell (6) and the power transmission member (5), and a first inner pressure cover (91) is arranged between the first bearing (9) and the first adapter shaft (63). When the driving member (7) applies axial extrusion force, the first inner pressure cover (91) tightly presses the first bearing (9).

9. The dual-arm vacuum manipulator of claim 7, wherein, The first shoulder pulley (51) has a first shoulder pulley body and a first shoulder support part (511) formed integrally, and the first shoulder support part (511) has a first cylindrical space (512) in the radial direction. The second shoulder pulley (52) has a second shoulder pulley body and a second shoulder support part (521) formed integrally, and the second shoulder support part (521) has a second cylindrical space (513) in the radial direction. The first shoulder support part (511) and the second shoulder support part (521) form a third cylindrical space (514), and the tensioning plate includes a first tensioning plate (71) and a second tensioning plate (72), and the third cylindrical space (514) is used to accommodate the second tensioning plate (72).

10. The dual-arm vacuum manipulator of claim 1, wherein, The arm includes a first arm body (2) and a second arm body (3) pivotally connected to the first arm body (2); The first arm body (2) includes a first upper arm body (21), a first forearm body (22), and a first end effector (23); The second arm body (3) includes a second upper arm body (31), a second forearm body (32), and a second end effector (33).

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