Photomask box cover opener

Abstract

The embodiment of the invention provides a cover opener for a photomask box, and the cover opener comprises a limiting block which is used for fixing the photomask box; the cover opening cam comprises a first part and a second part which are oppositely arranged, and the second part is distributed along the center of the cover opening cam in the circumferential direction in a high-low fluctuating mode; the first driven assembly comprises a driven plate and an unlocking rod which are oppositely arranged, the driven plate is connected with the first part, and the unlocking rod corresponds to a lock catch at the bottom of the photomask box; the second driven assembly comprises a driven wheel and a sliding plate, the driven wheel moves along the second part, the driven wheel is connected with the sliding plate, and the driven wheel and the second part are matched with each other to enable the sliding plate to move; and the handle is connected with the cover opening cam. According to the cover opener, the risk that the photomask slides out due to manual operation is avoided, the occurrence rate of production accidents is remarkably reduced, and meanwhile the cover opening efficiency and the operation safety are improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor photomask boxes, and more particularly to a photomask box opening device. Background Technology

[0002] A photomask, also known as a lithography mask, is an indispensable core tool in the integrated circuit manufacturing process. Its function is to transfer meticulously designed circuit patterns to the wafer surface with high precision. As a fundamental component of the photolithography process, the quality of the photomask directly determines the precision, performance, and overall manufacturing cost of the final chip. Given the high value of photomasks and their susceptibility to dust contamination or physical damage, ensuring they are kept in a highly clean and safe environment throughout the entire production cycle, including during transfer, storage, and use between different lithography machines, is crucial. Therefore, industry standard practice is to tightly encapsulate photomasks in dedicated photomask cases. This specialized container provides physical protection and maintains a high level of internal cleanliness, serving as the first line of defense in ensuring photomask quality.

[0003] Currently, the automated opening of photomask boxes is primarily accomplished by precision equipment. However, semiconductor manufacturing processes are complex, involving multiple stages. For example, rigorous quality checks are conducted before photomasks are stored or shipped, and in some cases, specific protective gases (such as inert gases) need to be added to the boxes. All of these inevitably require opening the photomask box lid. Common photomask box designs feature multiple latches evenly distributed along their bottom edge. Operators must simultaneously and precisely activate these latches arranged around the bottom of the box. These latches are typically designed to be compact and require a certain amount of force to ensure a reliable seal. However, this very design characteristic inherently introduces risks into the manual unlocking process: the operator may slip, apply uneven force, or deviate at an angle. This can not only lead to unlocking failure but, more seriously, the risk of the photomask box accidentally tipping over or slipping due to unintended force. If a photomask box containing a high-value photomask slips off the worktable, it could cause fatal damage or contamination to the photomask, triggering a major production accident, resulting in significant economic losses and production delays.

[0004] Therefore, there is an urgent need for an optimized photomask box opening device to avoid the above problems. Summary of the Invention

[0005] This application provides a photomask box opener. The opener secures the photomask box body with a limiting block and uses a handle to drive an opening cam to synchronously control a first driven component and a second driven component. The first driven component precisely unlocks the photomask box by actuating a bottom latch, while the second driven component uses a cam profile to drive a sliding plate for positioning and stabilization. This mechanical linkage design completely avoids the risk of the photomask slipping out due to manual operation, ensuring a smooth and reliable opening process, significantly reducing the incidence of production accidents, improving opening efficiency and operational safety, and effectively protecting the cleanliness and integrity of high-value photomasks.

[0006] In a first aspect, a photomask box opener is provided, the opener comprising: a limiting block for fixing the photomask box; an opening cam comprising a first part and a second part disposed opposite to each other, the second part being distributed with varying heights along the circumferential direction of the center of the opening cam; a first driven component comprising a driven plate and an unlocking rod disposed opposite to each other, the driven plate being connected to the first part, and the unlocking rod corresponding to a latch at the bottom of the photomask box; a second driven component comprising a driven wheel and a sliding plate, the driven wheel moving along the second part, the driven wheel being connected to the sliding plate, the driven wheel and the second part cooperating to move the sliding plate; and a handle connected to the opening cam.

[0007] It should be understood that by driving the opening cam in a single operation, its first part drives the driven plate and unlocking lever of the first driven component to precisely unlock the bottom latch of the photomask box. When the latch at the bottom of the photomask box unlocks, the bottom of the photomask box will fall. At the same time, its second part, with its circumferentially undulating distribution, synchronously drives the driven wheel of the second driven component, thereby controlling the sliding plate to lift the bottom of the photomask box upwards, providing real-time auxiliary positioning and stable support for the photomask box. This forced mechanical synchronous linkage ensures precise coordination between the unlocking action and the positioning and support action in time and space, fundamentally eliminating the risk of the photomask slipping out or tipping over due to unstable support at the moment of unlocking, and significantly improving the reliability and safety of the operation.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, a track is provided at the bottom of the driven plate, the first part moves along the track, and the handle and the first part cooperate with each other to cause the driven plate to move relative to each other.

[0009] It should be understood that when the operator turns the handle, it directly drives the opening cam to rotate. At this time, the first part of the cam slides along the track at the bottom of the driven plate. Through the constraint of the track, the entire driven plate is pushed to move relative to each other, and finally the unlocking rod is driven to complete the unlocking action. This design ensures that the driven plate and the unlocking rod move strictly according to the trajectory required for unlocking the lock. It not only eliminates the risk of angular deviation when manually turning the lock, but also provides a stable linear motion path for the unlocking rod, thereby ensuring the reliability and repeatability of the unlocking action.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the first driven component includes a linear slide rail, and the driven plate moves along the linear slide rail.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the driven wheel includes a connecting part and a rotating part, the connecting part being connected to the slide plate, and the rotating part moving along the second part.

[0012] It should be understood that when the opening cam rotates with the handle, the rotating part of the driven wheel always conforms to and rolls along the undulating contour of the second part of the cam. Because the contour of the second part has a preset radial height change, the rotating part is forced to generate a vertical displacement during this process; this displacement is directly transmitted to the slide plate through the connecting part, thereby driving the slide plate to precisely perform up and down movement. This structure, through the forced constraint of the rotating part by the cam contour, reliably and without delay converts the rotational motion of the cam into the vertical lifting action required by the slide plate, ensuring that the slide plate can immediately rise to support the falling light cover box at the moment of unlocking, avoiding the risk of response lag or positional deviation that may exist in traditional drive methods.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the second driven component includes a positioning post connected to a positioning hole at the bottom of the photomask box.

[0014] It should be understood that the photomask is stored inside the photomask box in a preset, precise orientation. Therefore, during the opening process, the positioning post structure on the box body or lid must reliably maintain and control this orientation requirement to ensure that the photomask is accurately positioned relative to the operating equipment.

[0015] In conjunction with the first aspect, in some implementations of the first aspect, the slide plate is provided with a first connecting hole, and the positioning post is installed in the first connecting hole.

[0016] In conjunction with the first aspect, in some implementations of the first aspect, the cover opener includes an upper cover plate, the limiting block is disposed on the upper cover plate, the upper cover plate is provided with a moving hole, and the unlocking rod moves in the moving hole.

[0017] In conjunction with the first aspect, in some implementations of the first aspect, the cover opener includes a base with a movable groove, and the handle moves along the movable groove.

[0018] In conjunction with the first aspect, in some implementations of the first aspect, the base is provided with a connecting post, the cover-opening cam has a hollow structure, and the connecting post passes through the hollow structure.

[0019] In conjunction with the first aspect, in some implementations of the first aspect, the lid opener includes a support column disposed at the bottom of the base, the support column being used to support the lid opener. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a photomask box opener provided in an embodiment of this application.

[0021] Figure 2 This is a schematic diagram of the internal structure of a photomask box opener provided in an embodiment of this application.

[0022] Figure 3 This is a schematic diagram of a cover-opening cam structure provided in an embodiment of this application.

[0023] Figure 4 This is a schematic diagram of the opening cam and the bottom structure of the first driven component of a photomask box opener provided in an embodiment of this application.

[0024] Figure 5 This is a schematic diagram of a skateboard structure provided in an embodiment of this application.

[0025] Figure 6 A side view of a photomask box opener provided in an embodiment of this application. Detailed Implementation

[0026] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” and “this” are intended to also include expressions such as “one or more,” unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of this application, “at least one” and “one or more” refer to one, two, or more than two. The term “and / or” is used to describe the relationship between related objects, indicating that three relationships can exist; for example, A and / or B can indicate: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character “ / ” generally indicates that the preceding and following related objects are in an “or” relationship.

[0027] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0028] A photomask (also known as a wafer mask) is a core tool in integrated circuit manufacturing, responsible for transferring circuit patterns to the wafer surface with high precision. Its quality directly determines the chip's accuracy, performance, and cost. Because photomasks are expensive and highly susceptible to dust contamination or physical damage, they must be kept in a highly clean and safe environment during production, transport, storage, and use. Therefore, the industry standard is to seal photomasks in a dedicated photomask case, which provides physical protection and maintains internal cleanliness.

[0029] Although automated opening of photomask boxes is typically accomplished by equipment, manual opening is still required for essential steps such as quality inspection and replenishment of protective gas. Common photomask boxes have multiple tight latches at the bottom, requiring precise simultaneous manipulation by the operator to unlock them. However, manual operation poses significant risks: slippage, uneven force, or angular deviations during the application of force can not only lead to unlocking failure but also cause the photomask box to accidentally tip over or slip off. If a box containing a high-value photomask falls, it can easily damage or contaminate the photomask, causing a major production accident and economic loss. This application provides a photomask box opener to overcome the aforementioned technical problems.

[0030] The technical solutions provided in the embodiments of this application will be described below with reference to the accompanying drawings.

[0031] Figure 1 This is a schematic diagram of a photomask box opener provided in an embodiment of this application. The photomask box opener can safely and conveniently open the photomask box.

[0032] Figure 2 This is a schematic diagram of the internal structure of a photomask box opener provided in an embodiment of this application. Figure 3 This is a schematic diagram of a cover-opening cam structure provided in an embodiment of this application. (Reference) Figure 1 and Figure 2In some examples, the cover opener includes: a limiting block 1 for fixing the photomask box; a cover opening cam 2, which includes a first part 21 and a second part 22 disposed opposite to each other, the second part 22 being distributed with varying heights along the center circumference of the cover opening cam 2; a first driven component 3, which includes a driven plate 31 and a locking rod 32 disposed opposite to each other, the driven plate 31 being connected to the first part 21, and the locking rod 32 corresponding to a latch at the bottom of the photomask box; a second driven component 4, which includes a driven wheel 41 and a sliding plate 42, the driven wheel 41 moving along the second part 22, the driven wheel 41 being connected to the sliding plate 42, the driven wheel 41 and the second part 22 cooperating to move the sliding plate 42; and a handle 5 connected to the cover opening cam 2.

[0033] Figure 3 This is a schematic diagram of a cover-opening cam structure provided in an embodiment of this application. Figure 4 This is a schematic diagram of the opening cam and the bottom structure of the first driven component of a photomask box opener provided in an embodiment of this application.

[0034] refer to Figure 3 and Figure 4 In some examples, the driven plate 31 is provided with a track 311 at its bottom, the first part 21 moves along the track 311, and the handle 5 and the first part 21 cooperate with each other to make the driven plate move relative to each other.

[0035] refer to Figure 4 The first driven component 3 includes a linear slide rail 33, and the driven plate 31 moves along the linear slide rail 33.

[0036] Figure 5 This is a schematic diagram of a skateboard structure provided in an embodiment of this application. (Reference) Figure 5 In some examples, the driven wheel 41 includes a connecting part 411 and a rotating part 412, the connecting part 411 being connected to the slide plate 42, and the rotating part 412 moving along the second part 22.

[0037] refer to Figure 1 and Figure 5 In some examples, the second driven component 4 includes a positioning post 43 connected to a positioning hole at the bottom of the photomask box.

[0038] Continue to refer to Figure 1 and Figure 5 In some examples, the slide plate 42 is provided with a first connection hole 421, and the positioning post 43 is installed in the first connection hole 421.

[0039] In one possible implementation, as the slide plate 42 continuously rises and falls along the contour of the second part 22, the positioning post 43 always slides within the positioning hole, providing vertical guidance and preventing the box from tilting. This design establishes a stable reference at the moment of unlocking through mechanical hard positioning, ensuring that the photomask box remains in place when suspended, eliminating the risk of collision caused by micron-level displacement.

[0040] refer to Figure 1 In some examples, the cover opener includes an upper cover plate 6, the limiting block 1 is disposed on the upper cover plate 6, the upper cover plate 6 is provided with a moving hole 61, and the unlocking rod 32 moves in the moving hole 61.

[0041] refer to Figure 1 In some examples, the lid opener includes a base 7 with a moving groove 71 along which the handle 5 moves.

[0042] refer to Figure 2 In some examples, the base is characterized by having a connecting post 72, the cover-opening cam 2 having a hollow structure 23, and the connecting post 72 passing through the hollow structure 24.

[0043] Figure 6 A side view of a photomask box opener provided in an embodiment of this application. (Reference) Figure 6 In some examples, the lid opener includes a support post 8 disposed at the bottom of the base 7, the support post 8 being used to support the lid opener.

[0044] In one possible implementation, the limiting block 1 is fixed around the top cover plate 6, corresponding to the limiting holes at the bottom of the photomask box to fix the photomask box; the opening cam 2 is sleeved on the connecting post 72 of the base 7 through the hollow structure 24, and can rotate freely around it. During operation, the operator holds the handle 5 and pushes it along the moving groove 71 of the base 7 to drive the opening cam 2 to rotate. The first part 21 of the cam is embedded in the track 311 at the bottom of the driven plate 31. During rotation, the first part 21 slides horizontally along the track 311, driving the driven plate 31 to move along the linear slide rail 33. The unlocking rod 32 corresponds to the lock inserted at the bottom of the photomask box, and completes the unlocking operation under the drive of the driven plate 31; the undulating contour of the second part 22 of the cam synchronously contacts the rotating part 412 of the driven wheel 41. When the bottom of the photomask box falls at the moment of unlocking, the high contour of the second part 22 pushes the rotating part 412 upward, and forces the sliding plate 42 to move vertically upward through the connecting part 411, so that the sliding plate 42 quickly abuts the bottom of the photomask box.

Claims

1. A photomask box opener, characterized in that, The cover opener includes: a limiting block (1) for fixing the photomask box; a cover opening cam (2) including a first part (21) and a second part (22) arranged opposite to each other, the second part (22) being distributed with varying heights along the center circumference of the cover opening cam (2); and a first driven component (3) including a driven plate (31) and a locking rod (32) arranged opposite to each other, the driven plate (31) being connected to the first part (21). Next, the unlocking rod (32) corresponds to the latch at the bottom of the photomask box; the second driven component (4) includes a driven wheel (41) and a sliding plate (42), the driven wheel (41) moves along the second part (22), the driven wheel (41) is connected to the sliding plate (42), the driven wheel (41) and the second part (22) cooperate with each other to make the sliding plate (42) move; handle (5) is connected to the cover opening cam (2).

2. The lid opener according to claim 1, characterized in that, The driven plate (31) is provided with a track (311) at its bottom. The first part (21) moves along the track (311). The handle (5) and the first part (21) cooperate with each other to make the driven plate move relative to each other.

3. The lid opener according to claim 2, characterized in that, The first driven component (3) includes a linear slide rail (33), along which the driven plate (31) moves.

4. The lid opener according to claim 3, characterized in that, The driven wheel (41) includes a connecting part (411) and a rotating part (412). The connecting part (411) is connected to the sliding plate (42), and the rotating part (412) moves along the second part (22).

5. The lid opener according to claim 4, characterized in that, The second driven component (4) includes a positioning post (43) which is connected to a positioning hole at the bottom of the photomask box.

6. The lid opener according to claim 5, characterized in that, The slide plate (42) is provided with a first connecting hole (421), and the positioning post (43) is installed in the first connecting hole (421).

7. The lid opener according to claim 6, characterized in that, The cover opener includes an upper cover plate (6), the limiting block (1) is disposed on the upper cover plate (6), the upper cover plate (6) is provided with a moving hole (61), and the unlocking rod (32) moves in the moving hole (61).

8. The lid opener according to claim 7, characterized in that, The cover opener includes a base (7) with a moving groove (71) and the handle (5) moves along the moving groove (71).

9. The lid opener according to claim 8, characterized in that, The base is provided with a connecting column (72), the cover cam (2) has a hollow structure (23), and the connecting column (72) passes through the hollow structure (24).

10. The lid opener according to claim 8, characterized in that, The lid opener includes a support column (8) which is disposed at the bottom of the base (7) and is used to support the lid opener.

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