A perovskite solar cell dynamic annealing atmosphere control device and method thereof

Abstract

The application discloses a perovskite solar cell dynamic annealing atmosphere control device and method, relates to the technical field of solar cell preparation, and comprises an annealing assembly, a furnace body, conveying chambers and air cooling chambers fixed on the two sides of the furnace body, an annealing chamber arranged between the conveying chambers and the air cooling chambers, a displacement cavity arranged in the furnace body, a three-axis driving piece arranged in the displacement cavity, and a supporting assembly arranged on the three-axis driving piece and comprising an auxiliary plate fixed to the moving end of the three-axis driving piece. Through the arrangement of the annealing assembly and the supporting assembly, dynamic atmosphere annealing treatment can be performed on the annealing chamber, the uniformity of the annealing treatment is ensured, the pre-light wave preheating process is coordinated, the synchronization of solvent residue and crystal growth is achieved, the cooperation of the two processes achieves the cooperation of the light wave pre-annealing and the electric heating annealing, and the annealing treatment requirements of the perovskite solar cell are met.

Description

Technical Field

[0001] This invention relates to the field of solar cell fabrication technology, and in particular to a device and method for controlling the dynamic annealing atmosphere of perovskite solar cells. Background Technology

[0002] Perovskite solar cells are a core representative of the third generation of new photovoltaic technology. Their core feature is the use of semiconductor materials with a "perovskite crystal structure" as a light-absorbing layer, which absorbs sunlight and converts it into electrical energy.

[0003] Annealing is an essential step in the fabrication of perovskite solar cells. However, uneven evaporation of solvents in the material can lead to defects in the film layer, affecting photoelectric conversion efficiency and equipment stability. Traditional annealing lacks a dynamic atmosphere system, making it difficult to ensure temperature uniformity and heating rate. In particular, it is difficult to effectively and dynamically remove perovskite solvent volatiles. Residual solvents tend to accumulate and adhere to the perovskite film surface, resulting in crystal quality defects, poor film surface performance, and failure to obtain high-efficiency perovskite electronic devices.

[0004] The existing technology generally adopts the "static atmosphere of electric heating furnace" mode, which has the following unavoidable technical defects: low heat conduction efficiency leads to uneven solvent evaporation: electric heating furnaces rely on metal or air heat conduction. For thicker perovskite films, the solvent cannot evaporate synchronously and uniformly during the rapid crystal growth stage, and solvent enrichment areas are easily formed in local areas of the film.

[0005] Static atmosphere cannot meet the dynamic requirements of solvent evaporation: During the annealing process, the solvent (N,N-dimethylformamide, dimethyl sulfoxide) of the perovskite precursor solution (such as formamidinium lead iodine system) evaporates in two stages: "rapid evaporation period" and "slow residual period". The static atmosphere cannot match the solvent diffusion characteristics of the two stages, resulting in "incomplete evaporation in the rapid period and solvent re-adsorption in the residual period".

[0006] Although some studies mention "dry gas-assisted annealing" (such as the patent with publication number CN114552789A), it only involves purging with inert gas at a fixed flow rate, without addressing the dynamic adjustment of oxygen content and humidity, nor does it involve the technology of effectively removing residual solvent to obtain high-efficiency devices. Furthermore, it is not coordinated with the preheating process, and still cannot solve the core contradiction of "solvent residue and crystal growth synchronization", thus the technical effect is limited. Summary of the Invention

[0007] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0008] In view of the problems existing in the above and / or existing dynamic annealing atmosphere control devices for perovskite solar cells, the present invention is proposed.

[0009] Therefore, the problem to be solved by the present invention is how to solve the problem that the existing technology generally adopts the mode of "static atmosphere of electric heating furnace", which generally has poor annealing uniformity and is difficult to meet the requirements of annealing processing.

[0010] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a dynamic annealing atmosphere control device for perovskite solar cells, comprising an annealing assembly including a furnace body, a transfer chamber and an air-cooling chamber respectively fixed on both sides of the furnace body, an annealing chamber disposed between the transfer chamber and the air-cooling chamber, a displacement cavity formed in the furnace body, a three-axis drive component disposed in the displacement cavity, and a support assembly disposed on the three-axis drive component, including an auxiliary plate fixed to the moving end of the three-axis drive component, a first support plate and a second support plate respectively fixed to the top of the auxiliary plate, and the bottom of the first support plate... A side plate is fixed, and a stabilizing component is slidably connected to the side plate, including a displacement rod slidably connected to the side plate. Auxiliary seats are fixed at both ends of the displacement rod, and a slider is slidably connected to the top of the auxiliary seats. A suction cup is fixed to the top of the slider. An air equalization component is provided on one side of the side plate, and a rotating rod is provided inside the side plate. A first positioning assembly is located in the transmission chamber and includes a fixing plate fixed to the inner wall of the transmission chamber. A second positioning assembly is located in the air-cooling chamber and includes a bracket fixed to the inner wall of the air-cooling chamber. A baffle is fixed to one side of the bracket, and a positioning component is provided at the top of the bracket.

[0011] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, wherein: a straight groove is provided on one side of the side plate, a first inclined groove is provided at one end of the inner cavity of the straight groove, and the displacement rod is slidably connected in the straight groove.

[0012] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, the auxiliary seat has a storage groove on its top, the slider is slidably connected to the storage groove, the storage groove has a vent hole at the bottom of its inner cavity, a sealing head is fixed at the center of the bottom of the storage groove, a vertical rod is fixed at the bottom of the storage groove, the top of the vertical rod passes through the slider and is slidably connected to the slider, a first spring is sleeved on the vertical rod, the bottom end of the first spring is fixed in the storage groove, and the top end of the first spring is fixed to the bottom of the slider.

[0013] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, the slider has a positioning groove on one side, an auxiliary cylinder is embedded at the bottom of the slider, a sealing hopper groove is formed in the inner ring of the auxiliary cylinder, a telescopic tube is fixed at the bottom of the auxiliary cylinder, the bottom end of the telescopic tube is fixed in the storage groove, a gas supply pipe is fixed at the bottom of the auxiliary seat, and a three-way pipe is fixed on the gas supply pipe.

[0014] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, wherein: a suspension is fixed on the displacement rod, a guide ball is fitted with the inner ring of the suspension, a movable roller is rotatably connected between the two sliders, and the movable roller is slidably connected in the first inclined groove.

[0015] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, the gas equalization component includes a fixed shell fixed to a side plate, a turntable rotatably connected inside the fixed shell, a squeezing roller rotatably connected to the outer ring of the turntable, a gas supply hose fixed inside the fixed shell, a hollow cylinder fixed to one end of the gas supply hose, a four-way pipe fixed to the bottom end of the hollow cylinder, and a gas replenishment component provided at one end of the four-way pipe.

[0016] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, the gas supply component includes a manual ball valve fixed on a four-way pipe, a ball valve stem rotatably connected to the top of the manual ball valve, a valve handle fixed on the ball valve stem, a torsion spring sleeved on the ball valve stem, the bottom end of the torsion spring fixed to the top of the manual ball valve, and the top end of the torsion spring fixed to the valve handle.

[0017] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, wherein: a crossbar is fixed at the center of one side of the turntable, a worm gear is fixed on the crossbar, a fan blade is fixed at the other end of the crossbar, a first connecting frame is fixed at the bottom of the side plate, the worm gear is rotatably connected to the first connecting frame, one end of the worm gear is fixed to a rotating rod, a spiral groove is provided on the rotating rod, a second connecting frame is fixed at the bottom of the side plate, and the crossbar is rotatably connected to the second connecting frame.

[0018] As a preferred embodiment of the dynamic annealing atmosphere control device for perovskite solar cells of the present invention, wherein: a protrusion is fixed on one side of the fixing plate and slidably connected to the positioning groove; the positioning component includes a slide rod slidably connected to the bracket; a positioning block is fixed at one end of the slide rod; a second inclined groove is opened on one side of the positioning block; a third inclined groove is opened on the other side of the positioning block; a second spring is sleeved on the slide rod; one end of the second spring is fixed on the slide rod; and the other end of the second spring is fixed on the bracket.

[0019] As a preferred embodiment of the method for controlling the dynamic annealing atmosphere of the perovskite solar cell according to the present invention, the method further includes the following steps:

[0020] The substrate containing the perovskite precursor solution was placed in the transfer chamber for transfer.

[0021] The support assembly is displaced by a three-axis drive to complete the lifting, fixing, transfer and unloading of the base, and place the base in the annealing chamber;

[0022] The annealing and crystallization process is carried out in the annealing chamber using electric heating.

[0023] Then, the film is cooled at a constant speed in an air-cooled room until the temperature drops to a preset value, at which point the annealing operation is completed.

[0024] The beneficial effects of this invention are as follows: by setting up the annealing component and the support component, dynamic atmosphere annealing can be carried out by the annealing chamber, ensuring the uniformity of the annealing process. In conjunction with the preheating process, the purpose of synchronizing solvent residue and crystal growth is achieved. The two work together to complete the synergy of "preheating by light wave + annealing by electric heating", which meets the annealing requirements of perovskite solar cells. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0026] Figure 1 A scene diagram of a dynamic annealing atmosphere control device for perovskite solar cells.

[0027] Figure 2 A half-section view of the dynamic annealing atmosphere control device for perovskite solar cells.

[0028] Figure 3 This is a top sectional view of a device for controlling the dynamic annealing atmosphere of perovskite solar cells.

[0029] Figure 4 This is a side sectional view of a device for controlling the dynamic annealing atmosphere of perovskite solar cells.

[0030] Figure 5 This is an installation diagram of the support components and triaxial drive components for a dynamic annealing atmosphere control device for perovskite solar cells.

[0031] Figure 6 This is a structural diagram of the support component for a dynamic annealing atmosphere control device for perovskite solar cells.

[0032] Figure 7 This is an installation diagram of the first support plate and side plate of the dynamic annealing atmosphere control device for perovskite solar cells.

[0033] Figure 8 A side sectional view of the first tray of the dynamic annealing atmosphere control device for perovskite solar cells.

[0034] Figure 9 This is an installation diagram of the stabilizer and gas equalization components for a dynamic annealing atmosphere control device for perovskite solar cells.

[0035] Figure 10 This is a structural diagram of the stabilizer component for a dynamic annealing atmosphere control device for perovskite solar cells.

[0036] Figure 11 A side cross-sectional view of the stabilizer component of a dynamic annealing atmosphere control device for perovskite solar cells.

[0037] Figure 12 Side view of multiple stabilizers in a dynamic annealing atmosphere control device for perovskite solar cells.

[0038] Figure 13 This is a structural diagram of the gas equalization component of a dynamic annealing atmosphere control device for perovskite solar cells.

[0039] Figure 14 This is a diagram showing the gas supply components and four-way pipe installation for a dynamic annealing atmosphere control device for perovskite solar cells.

[0040] Figure 15 Side view of the first positioning component of the dynamic annealing atmosphere control device for perovskite solar cells.

[0041] Figure 16 This is a structural diagram of the second positioning component of the dynamic annealing atmosphere control device for perovskite solar cells.

[0042] Figure 17 Top view of the second positioning component of the dynamic annealing atmosphere control device for perovskite solar cells.

[0043] Figure 18 This is an experimental result of a dynamic annealing atmosphere control device for perovskite solar cells.

[0044] In the diagram: 1. Annealing assembly; 11. Furnace body; 12. Transfer chamber; 13. Air-cooling chamber; 14. Annealing chamber; 15. Displacement cavity; 16. Three-axis drive component; 2. Support assembly; 21. Auxiliary plate; 22. First support plate; 23. Second support plate; 24. Side plate; 24-1. Straight groove; 24-2. First inclined groove; 25. Stabilizer; 25-1. Displacement rod; 25-2. Auxiliary seat; 25-21. Storage slot; 25-22, Vent hole; 25-23, Sealing head; 25-3, Slider; 25-31, Positioning groove; 25-32, Telescopic tube; 25-33, Movable roller; 25-34, Sealing hopper groove; 25-35, Auxiliary cylinder; 25-4, Vertical rod; 25-41, First spring; 25-5, Suction cup; 25-6, Air supply pipe; 25-61, T-connector; 25-7, Suspension; 25-71, Guide ball ; 26. Gas equalization component; 26-1. Fixed housing; 26-2. Turntable; 26-21. Extrusion roller; 26-3. Gas delivery hose; 26-31. Hollow cylinder; 26-4. Four-way pipe; 26-5. Gas replenishment component; 26-51. Manual ball valve; 26-52. Ball valve stem; 26-53. Valve handle; 26-54. Torsion spring; 26-6. Crossbar; 26-61. Worm gear; 26-7. Worm; 26-8 1. Fan blade; 26-9. First connecting frame; 26-10. Second connecting frame; 27. Rotating rod; 27-1. Spiral groove; 3. First positioning assembly; 31. Fixing plate; 32. Protrusion; 4. Second positioning assembly; 41. Bracket; 42. Stop bar; 43. Positioning component; 43-1. Slide rod; 43-11. Second spring; 43-2. ​​Positioning block; 43-21. Second inclined groove; 43-22. Third inclined groove. Detailed Implementation

[0045] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0046] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0047] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0048] Example 1, referring to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 18 This is the first embodiment of the present invention, which provides a dynamic annealing atmosphere control device for perovskite solar cells. The dynamic annealing atmosphere control device for perovskite solar cells includes an annealing component 1, a support component 2, a first positioning component 3, and a second positioning component 4. By setting the annealing component 1 and the support component 2, dynamic atmosphere annealing treatment can be performed by the annealing chamber 14 to ensure the uniformity of annealing treatment. In conjunction with the preheating process, the purpose of synchronizing solvent residue and crystal growth is achieved. The two work together to complete the synergistic effect of "preheating by light wave + annealing by electric heating" to meet the annealing treatment requirements of perovskite solar cells.

[0049] Specifically, the annealing assembly 1 includes a furnace body 11, with a transfer chamber 12 and an air-cooling chamber 13 fixed on both sides of the furnace body 11, and an annealing chamber 14 provided between the transfer chamber 12 and the air-cooling chamber 13. A displacement cavity 15 is provided inside the furnace body 11, and a three-axis drive component 16 is provided inside the displacement cavity 15.

[0050] The displacement cavity 15 is used to meet the motion space requirements of the three-axis drive component 16 and the support component 2. The three-axis drive component 16 is a three-axis drive device in the prior art. It realizes three-dimensional spatial motion through the coordinated control of the X, Y and Z axes and is widely used in industrial manufacturing, intelligent chassis and 3D printing. Its core components include servo / stepper motors, ball screw / synchronous belt drive mechanisms, encoders and IMU sensors. It combines PID control and Kalman filtering algorithm to achieve high-precision positioning (±0.01mm) and dynamic stability. The working principle of this part is all prior art and can be clearly understood by those skilled in the art. It will not be described in detail here.

[0051] In practical applications, in order to further improve the uniformity of annealing and ensure the solvent evaporation rate and crystallization rate of the perovskite precursor solution, this device includes a sealed annealing chamber, a multi-parameter monitoring module, a dynamic adjustment module, and a central control unit (PLC). The connection relationship and function of each component are as follows: Multiple sets of conveying rollers are installed at the bottom of the inner cavity of the transmission chamber 12 and the air-cooling chamber 13 to facilitate the guidance of the base. The base, which has been preheated by light waves, is sent in by the transmission chamber 12, and the base, which has been cooled after annealing, is sent out by the air-cooling chamber 13.

[0052] The top of the air-cooled chamber 13 is equipped with a heat dissipation fan, which is used to increase the airflow speed and accelerate heat dissipation during operation.

[0053] Annealing chamber 14 is an integrated gas transmitter, including an oxygen content regulator. It adopts a mass flow controller with an adjustment range of 0% to 25% vol and a response time of ≤0.5s. The oxygen concentration is adjusted by controlling the mixing ratio of oxygen and inert gas (such as nitrogen).

[0054] It also includes a humidity regulator that uses a dew point control module with an adjustment range of 5% to 60% RH, and achieves humidity control by injecting a fixed amount of deionized water vapor into an inert gas.

[0055] It also includes a variable-rate gas flow guiding module (including a variable frequency fan and a guide plate, with a flow rate adjustment range of 0.8 to 3 m / s and the guide plate angle can be adjusted from 0 to 45° by a motor) to achieve uniform gas distribution within the cavity.

[0056] Both the transmission chamber 12 and the air-cooling chamber 13 have gas inlets in their walls and are equipped with multi-parameter monitoring modules. The multi-parameter monitoring modules include solvent concentration sensors, which are installed inside the transmission chamber 12 and the air-cooling chamber 13. The sensors have a detection accuracy of 0.1 ppm and a monitoring frequency of 1 time / second, and are used to collect the solvent vapor concentration on the membrane surface in real time.

[0057] It also includes an oxygen sensor with a range of 0% to 50% vol and an accuracy of ±0.1%; a humidity sensor with a range of 0% to 90% RH and an accuracy of ±2% RH; and a gas flow rate sensor, installed at the gas outlet, with a range of 0-5 m / s and an accuracy of ±0.05 m / s.

[0058] Annealing chamber 14 is also equipped with a pin for supporting the base, a venting pump with a preheater, an active exhaust pump, and an integrated plate. It should be noted that the gas inlet and outlet are redistributed by a gas distributor to ensure uniform transmission, so that the gas is actively discharged after being uniformly blown onto the upper surface of the base.

[0059] The integrated board has multiple built-in heating tubes to generate heat during operation to meet the requirements of annealing. It should be noted that there are deep vent holes on the integrated board between the heating tubes, which are connected to the gas path of the active exhaust pump. Due to the electrothermal annealing design, the gas expands when heated, and the annealing chamber 14 is in a slightly positive pressure state. This design can easily discharge the gas from the deep vent holes, which not only improves the uniformity of gas flow, but also avoids the annealing chamber 14 being in a slightly positive pressure state at all times, which would affect the proper dynamic annealing of the perovskite solar cells.

[0060] All sensor data is transmitted to the central control unit in real time. The dynamic adjustment module is actually the structure in annealing chamber 14.

[0061] The central control unit has a pre-stored "solvent concentration-atmosphere parameter" correlation algorithm. After receiving data from the monitoring module, it automatically sends instructions to the dynamic adjustment module to achieve closed-loop control of the atmosphere parameters.

[0062] The above settings can achieve the goals of multi-parameter dynamic collaborative adjustment mechanism, dual heat source collaboration, and closed-loop control consistency.

[0063] Multi-parameter dynamic coordinated adjustment mechanism: Breaking through the traditional "single fixed parameter / single heating method annealing" mode, the three parameters of "oxygen content-humidity-gas flow rate" are dynamically adapted according to the solvent evaporation stage through feedback from the solvent concentration sensor, thus solving the problem of "synchronization between rapid evaporation and crystal growth".

[0064] The synergistic effect of "light wave pre-annealing + electric heating annealing" dual heat sources: light wave pre-annealing specifically addresses "rapid evaporation of surface solvents", while electric heating annealing focuses on "deep solvent removal and crystal growth".

[0065] Closed-loop control ensures consistency: Through the algorithm closed loop of the central control unit, the solvent residual rate fluctuation of different batches of film is ≤2% and the crystal particle size deviation is ≤50nm, which significantly improves the stability of mass production.

[0066] Example 2, refer to Figures 2 to 17 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0067] Specifically, the support component 2 is mounted on the three-axis drive component 16 and includes an auxiliary plate 21 fixed to the moving end of the three-axis drive component 16. A first support plate 22 and a second support plate 23 are fixed to the top of the auxiliary plate 21 respectively. A side plate 24 is fixed to the bottom of the first support plate 22. A stabilizing component 25 is slidably connected to the side plate 24, including a displacement rod 25-1 slidably connected to the side plate 24. Auxiliary seats 25-2 are fixed to both ends of the displacement rod 25-1. A slider 25-3 is slidably connected to the top of the auxiliary seat 25-2. A suction cup 25-5 is fixed to the top of the slider 25-3. An air equalization component 26 is provided on one side of the side plate 24. A rotating rod 27 is provided inside the side plate 24.

[0068] With the setting of the stabilizer 25, as the three-axis drive 16 moves, when the first pallet 22 enters the transfer chamber 12, the multiple stabilizers 25 are evenly distributed, which improves the uniformity of negative pressure adsorption on the base and ensures the stability of base transfer; when the first pallet 22 enters the air-cooling chamber 13, the multiple stabilizers 25 unlock the adsorption on the base and re-aggregate.

[0069] With the arrangement of the gas equalization component 26 and the rotating rod 27, the gas equalization component 26 can complete the exhaust operation when the rotating rod 27 rotates in the forward direction to form a negative pressure environment to meet the subsequent adsorption processing requirements of the base. When the rotating rod 27 rotates in the reverse direction, the gas equalization component 26 can complete the gas replenishment operation to ensure gas pressure balance, which is conducive to unlocking the adsorption state.

[0070] Specifically, the first positioning component 3 is disposed inside the transmission chamber 12 and includes a fixing plate 31 fixed to the inner wall of the transmission chamber 12.

[0071] There are two first positioning components 3, which are symmetrically distributed in the transmission chamber 12, and do not obstruct the insertion or movement of the first pallet 22.

[0072] Specifically, the second positioning component 4 is disposed in the air-cooled chamber 13, including a bracket 41 fixed to the inner wall of the air-cooled chamber 13, a baffle 42 fixed on one side of the bracket 41, and a positioning element 43 disposed on the top of the bracket 41.

[0073] There are two second positioning components 4, which are symmetrically distributed in the air-cooled chamber 13, and do not obstruct the insertion or movement of the first pallet 22.

[0074] Example 3, referring to Figures 1-17 This is the third embodiment of the present invention, which is based on the first two embodiments.

[0075] Specifically, a straight groove 24-1 is provided on one side of the side plate 24, and a first inclined groove 24-2 is provided at one end of the inner cavity of the straight groove 24-1. The displacement rod 25-1 is slidably connected in the straight groove 24-1.

[0076] As shown in the attached diagram of the instruction manual. Figure 10 As shown, both ends of the displacement rod 25-1 are rectangular blocks, and the rectangular blocks slide in contact with the straight groove 24-1. This design can prevent the displacement rod 25-1 from rotating and changing the angle of the auxiliary seat 25-2, thereby keeping the auxiliary seat 25-2 always in a vertically upward state.

[0077] Specifically, the auxiliary seat 25-2 has a storage groove 25-21 on its top, and the slider 25-3 is slidably connected to the storage groove 25-21. The bottom of the inner cavity of the storage groove 25-21 has a vent hole 25-22. A sealing head 25-23 is fixed at the center of the bottom of the inner cavity of the storage groove 25-21. A vertical rod 25-4 is fixed at the bottom of the inner cavity of the storage groove 25-21. The top of the vertical rod 25-4 passes through the slider 25-3 and is slidably connected to the slider 25-3. A first spring 25-41 is sleeved on the vertical rod 25-4. The bottom end of the first spring 25-41 is fixed in the storage groove 25-21, and the top end of the first spring 25-41 is fixed to the bottom of the slider 25-3.

[0078] The storage slots 25-21 are used to meet the movement space requirements of the slider 25-3.

[0079] The first spring 25-41 can elastically connect to the slider 25-3, which provides a downward reset force for the slider 25-3, and facilitates the proper reset of the slider 25-3 and the suction cup 25-5.

[0080] The vertical rod 25-4 can guide the up and down movement of the slider 25-3, greatly improving the displacement stability of the slider 25-3.

[0081] Specifically, a positioning groove 25-31 is provided on one side of the slider 25-3, an auxiliary cylinder 25-35 is embedded at the bottom of the slider 25-3, a sealing hopper groove 25-34 is provided on the inner ring of the auxiliary cylinder 25-35, a telescopic tube 25-32 is fixed at the bottom of the auxiliary cylinder 25-35, the bottom end of the telescopic tube 25-32 is fixed in the storage groove 25-21, an air supply pipe 25-6 is fixed at the bottom of the auxiliary seat 25-2, and a three-way pipe 25-61 is fixed on the air supply pipe 25-6.

[0082] Specifically, a suspension 25-7 is fixed on the displacement rod 25-1, and a guide ball 25-71 is fitted to the inner ring of the suspension 25-7 with clearance. A movable roller 25-33 is rotatably connected between the two sliders 25-3, and the movable roller 25-33 is slidably connected in the first inclined groove 24-2.

[0083] When the movable roller 25-33 is placed into the straight groove 24-1, the slider 25-3 will be placed into the receiving groove 25-21, the suction cup 25-5 is in a low position, and the horizontal plane of its top is lower than the horizontal plane of the top of the first support plate 22. The telescopic tube 25-32 is in a compressed state. At this time, the sealing head 25-23 is placed into the auxiliary cylinder 25-35, and the sealing head 25-23 and the sealing hopper groove 25-34 cooperate to complete the sealing protection and prevent the gas from flowing freely. This is recorded as "sealed state".

[0084] Similarly, when the movable roller 25-33 is guided upward by the first inclined groove 24-2, as shown in the attached diagram of the instruction manual... Figure 10 As shown in the attached diagram, the top of the suction cup 25-5 is flush with the top of the first support plate 22. Figure 11 As shown, the sealing head 25-23 and the sealing hopper 25-34 are in a disengaged state. At this time, the vent hole 25-22, the telescopic tube 25-32 and the sealing hopper 25-34 are in a connected state, which is recorded as "ventilation state".

[0085] In the attached diagram of the instruction manual Figure 11 In the middle, suction cup 25-5, slider 25-3, sealing hopper 25-34, telescopic tube 25-32, vent hole 25-22, air supply pipe 25-6 and three-way pipe 25-61 are connected in sequence.

[0086] The rotating rod 27 has a spiral groove 27-1, and the guide ball 25-71 is slidably connected in the spiral groove 27-1. With this design, when the suspension 25-7 moves in a straight line, the rotating rod 27 can rotate continuously with the cooperation of the guide ball 25-71 and the spiral groove 27-1.

[0087] Specifically, the gas equalization component 26 includes a fixed shell 26-1 fixed to the side plate 24, a turntable 26-2 rotatably connected inside the fixed shell 26-1, a squeezing roller 26-21 rotatably connected to the outer ring of the turntable 26-2, a gas delivery hose 26-3 fixed inside the fixed shell 26-1, a hollow cylinder 26-31 fixed to one end of the gas delivery hose 26-3, a four-way pipe 26-4 fixed to the bottom end of the hollow cylinder 26-31, and a gas replenishment component 26-5 provided at one end of the four-way pipe 26-4.

[0088] The bottom end of the tee pipe 25-61 is connected to the four-way pipe 26-4 via a pipe.

[0089] As the turntable 26-2 rotates continuously, it can work with multiple extrusion rollers 26-21 to extrude gas into the gas delivery hose 26-3, thereby completing the forward or reverse gas delivery.

[0090] The gas delivery hose 26-3 is fixed to the fixed housing 26-1 at both ends, and the middle section is deformable.

[0091] Specifically, the air supply component 26-5 includes a manual ball valve 26-51 fixed on the four-way pipe 26-4. The top of the manual ball valve 26-51 is rotatably connected to a ball valve stem 26-52. A valve handle 26-53 is fixed on the ball valve stem 26-52. A torsion spring 26-54 is sleeved on the ball valve stem 26-52. The bottom end of the torsion spring 26-54 is fixed to the top of the manual ball valve 26-51, and the top end of the torsion spring 26-54 is fixed to the valve handle 26-53.

[0092] The manual ball valve 26-51 contains a valve core, which is fixed to the ball valve stem 26-52. When the drive valve handle 26-53 is rotated, the ball valve stem 26-52 will be rotated in conjunction with it, so that the valve core deflects to allow air to pass through. The torsion spring 26-54 is tightened, and the ball valve stem 26-52 can be kept in the initial state without the action of external force, and the valve core is in the closed state to prevent gas from flowing through.

[0093] Specifically, a crossbar 26-6 is fixed at the center of one side of the turntable 26-2, a worm gear 26-61 is fixed on the crossbar 26-6, a fan blade 26-8 is fixed at the other end of the crossbar 26-6, a first connecting frame 26-9 is fixed at the bottom of the side plate 24, a worm gear 26-7 is rotatably connected to the first connecting frame 26-9, one end of the worm gear 26-7 is fixed to the rotating rod 27, a second connecting frame 26-10 is fixed at the bottom of the side plate 24, and the crossbar 26-6 is rotatably connected to the second connecting frame 26-10.

[0094] By setting the first connecting frame 26-9 and the second connecting frame 26-10, the rotation of the worm 26-7 and the crossbar 26-6 can be positioned respectively, effectively improving the rotational stability of the worm 26-7 and the crossbar 26-6.

[0095] A protective shell is fixed to one side of the side plate 24 to protect the fan blade 26-8, and one end of the crossbar 26-6 passes through the protective shell and is rotatably connected to the protective shell to improve the stability of the crossbar 26-6.

[0096] A filter frame is fixed at the end of the gas delivery hose 26-3 away from the hollow cylinder 26-31, which can play an auxiliary filtration role.

[0097] Specifically, three protrusions 32 are fixed on one side of the fixing plate 31 and are slidably connected to the positioning groove 25-31. The positioning component 43 includes a slide rod 43-1 slidably connected to the bracket 41. A positioning block 43-2 is fixed at one end of the slide rod 43-1. A second inclined groove 43-21 is opened on one side of the positioning block 43-2, and a third inclined groove 43-22 is opened on the other side of the positioning block 43-2. ​​A second spring 43-11 is sleeved on the slide rod 43-1. One end of the second spring 43-11 is fixed on the slide rod 43-1, and the other end of the second spring 43-11 is fixed on the bracket 41.

[0098] As shown in the attached diagram of the instruction manual. Figure 12 As shown, there are three auxiliary seats 25-2, which are evenly distributed on the side plate 24. The positioning grooves 25-31 are actually three grooves. In the leftmost positioning groove 25-31, one end of the top groove is blocked. In the center positioning groove 25-31, one end of the center groove is blocked. In the rightmost positioning groove 25-31, one end of the bottom groove is blocked. They are used to cooperate with the three staggered protrusions 32 on the fixing plate 31. When the first support plate 22 is displaced into the transmission chamber 12, the three stabilizers 25 can be evenly distributed with the cooperation of the three protrusions 32.

[0099] The inclination angle of the second inclined groove 43-21 is greater than that of the third inclined groove 43-22. In this design, when the first support plate 22 is displaced, the slider 25-3 is placed into the air-cooling chamber 13 and first contacts the second inclined groove 43-21. Due to the stroke limitation of the first inclined groove 24-2, the slider 25-3 cannot move and will squeeze the positioning block 43-2 to move outward, and the second spring 43-11 will be stretched. Similarly, when the first support plate 22 moves out of the air-cooling chamber 13, the slider 25-3 contacts the third inclined groove 43-22. At this time, since the slider 25-3 can move flexibly, multiple sliders 25-3 will gradually reset and gather. When the stabilizer 25 is restricted by the stroke of the straight groove 24-1, as the slider 25-3 moves out further, it will squeeze the third inclined groove 43-22, causing the positioning block 43-2 to move outward. At this time, the three stabilizers 25 are in a gathered state.

[0100] Example 4 is the fourth embodiment of the present invention, which is based on the first three embodiments.

[0101] A method for controlling the dynamic annealing atmosphere of perovskite solar cells further includes the following steps:

[0102] After the substrate containing the perovskite precursor solution is preheated by light waves, it is first placed in the transmission chamber 12. The three-axis drive component 16, together with the support component 2, stabilizes the substrate by adsorption. Then, the substrate is moved out of the transmission chamber 12 and transferred to the annealing chamber 14 by the displacement cavity 15.

[0103] The perovskite enters the hot plate electric heating module and is heated to 100-120℃ at a rate of 20-30℃ / min, and held at that temperature for 5-20 minutes. The central control unit dynamically adjusts the parameters based on monitoring data: as the crystal grows, the oxygen content gradually decreases from 15%vol to 5%-8%vol (to reduce perovskite oxidation); the humidity is maintained at 25%-35%RH (to promote crystal orientation growth); and the gas flow rate gradually decreases from 2m / s to 0.8-1.2m / s (to avoid disturbing the crystal surface), completing the "electric heating annealing" treatment, which is the period for crystal growth and residual solvent removal.

[0104] When the solvent concentration sensor detects a solvent concentration ≤0.5ppm and remains unchanged for 30s, the electric heating module cools down to room temperature at a rate of 10-15℃ / min, maintaining an oxygen content of 5%vol, humidity of 30%RH, and a gas flow rate of 1m / s until the film temperature drops to 25℃, completing the annealing process and marking the crystal stabilization period.

[0105] Finally, the three-axis drive unit 16, together with the support assembly 2, moves the base out of the annealing chamber 14 and into the air-cooling chamber 13 to complete the auxiliary air-cooling treatment. The base is then sent out through multiple sets of conveying rollers in the air-cooling chamber 13.

[0106] During the transfer of the base, after the three-axis drive 16 drives the first pallet 22 to align with the transfer chamber 12, the three-axis drive 16 drives the auxiliary plate 21 and the first pallet 22 to move forward. With the cooperation of the protrusion 32 and the positioning groove 25-31, the three sliders 25-3 are evenly distributed on the side plate 24.

[0107] During the displacement of displacement rod 25-1, the guide ball 25-71 cooperates with the spiral groove 27-1 to rotate the linkage rod 27, so that the worm 26-7 rotates continuously. With the cooperation of worm wheel 26-61, the crossbar 26-6 rotates continuously in the forward direction. The extrusion roller 26-21 and turntable 26-2 cooperate to complete the positive extrusion of air hose 26-3, so that the hollow cylinder 26-31 is in a negative pressure state. At the same time, the four-way pipe 26-4 and the telescopic pipe 25-32 are also in a negative pressure state.

[0108] Guided by the straight groove 24-1 and the first inclined groove 24-2, when the movable roller 25-33 enters the first inclined groove 24-2, the slider 25-3 and the suction cup 25-5 gradually move upward, and the first spring 25-41 and the telescopic tube 25-32 are stretched to form a "ventilated state". At this time, the outside gas is introduced through the suction cup 25-5 and the slider 25-3. After the suction cup 25-5 moves upward, it can perform negative pressure adsorption on the bottom of the base. Multiple suction cups 25-5 work together to ensure the adsorption stability of the base.

[0109] When the supporting component 2 is transferred and the linkage base is placed into the air-cooled chamber 13, the baffle 42 contacts the valve handle 26-53. As the first support plate 22 continues to move, the valve handle 26-53 is gradually pressed and rotated. The ball valve stem 26-52 is linked to the valve core and rotates to open. The torsion spring 26-54 is compressed. At this time, the gas will be replenished into the four-way pipe 26-4 to achieve air pressure balance and release the negative pressure.

[0110] When the first pallet 22 is removed from the air-cooled chamber 13, the slider 25-3 contacts the positioning block 43-2, the suction cup 25-5 moves down and detaches from the base, and multiple sliders 25-3 gradually gather together and return to the initial state, preparing for the annealing and transfer of the next base. The whole process does not require manual intervention.

[0111] During the above process, regardless of whether the displacement rod 25-1 is moved in the forward or reverse direction, the guide ball 25-71 and the spiral groove 27-1 can make the crossbar 26-6 rotate, which is used to link the fan blade 26-8 to rotate, complete the blowing operation, and further improve the uniformity of gas distribution during the annealing process.

[0112] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A dynamic annealing atmosphere control device for perovskite solar cells, characterized in that: include, The annealing assembly (1) includes a furnace body (11), with a transfer chamber (12) and an air-cooling chamber (13) fixed on both sides of the furnace body (11), and an annealing chamber (14) provided between the transfer chamber (12) and the air-cooling chamber (13). A displacement cavity (15) is provided inside the furnace body (11), and a three-axis drive component (16) is provided inside the displacement cavity (15). The support assembly (2) is mounted on the three-axis drive component (16) and includes an auxiliary plate (21) fixed to the moving end of the three-axis drive component (16). The top of the auxiliary plate (21) is fixed with a first support plate (22) and a second support plate (23). The bottom of the first support plate (22) is fixed with a side plate (24). A stabilizing component (25) is slidably connected to the side plate (24). An air equalization component (26) is provided on one side of the side plate (24). A rotating rod (27) is provided inside the side plate (24). The first positioning component (3) is disposed in the transmission chamber (12) and includes a fixing plate (31) fixed to the inner wall of the transmission chamber (12). The second positioning component (4) is located inside the air-cooled chamber (13) and includes a bracket (41) fixed to the inner wall of the air-cooled chamber (13). A baffle (42) is fixed on one side of the bracket (41), and a positioning element (43) is provided on the top of the bracket (41). A straight groove (24-1) is provided on one side of the side plate (24), and a first inclined groove (24-2) is provided at one end of the inner cavity of the straight groove (24-1). The stabilizer (25) includes a displacement rod (25-1) slidably connected to the side plate (24). Both ends of the displacement rod (25-1) are fixed with auxiliary seats (25-2). A slider (25-3) is slidably connected to the top of the auxiliary seat (25-2). A suction cup (25-5) is fixed to the top of the slider (25-3). A storage groove (25-21) is opened on the top of the auxiliary seat (25-2). The slider (25-3) is slidably connected in the storage groove (25-21). A vent hole (25-22) is opened at the bottom of the inner cavity of the storage groove (25-21). A sealing head (25-23) is fixed at the center of the bottom of the inner cavity of the storage groove (25-21). The displacement rod (25-1) is slidably connected within the straight groove (24-1). The bottom of the slider (25-3) is fitted with an auxiliary cylinder (25-35), and the inner ring of the auxiliary cylinder (25-35) is provided with a sealing groove (25-34). The bottom of the auxiliary cylinder (25-35) is fixed with a telescopic tube (25-32), and the bottom end of the telescopic tube (25-32) is fixed in the storage groove (25-21). The bottom of the auxiliary seat (25-2) is fixed with an air supply pipe (25-6), and a three-way pipe (25-61) is fixed on the air supply pipe (25-6). The suction cup (25-5), slider (25-3), sealing hopper (25-34), telescopic tube (25-32), vent hole (25-22), air supply pipe (25-6), and tee pipe (25-61) are connected in sequence. A suspension (25-7) is fixed on the displacement rod (25-1). A guide ball (25-71) is fitted into the inner ring of the suspension (25-7) with a clearance fit. A movable roller (25-33) is rotatably connected between the two sliders (25-3). The movable roller (25-33) is slidably connected in the first inclined groove (24-2). The rotating rod (27) has a spiral groove (27-1), and the guide ball (25-71) is slidably connected in the spiral groove (27-1). The gas equalization component (26) includes a fixed shell (26-1) fixed on the side plate (24), a turntable (26-2) rotatably connected inside the fixed shell (26-1), a squeezing roller (26-21) rotatably connected to the outer ring of the turntable (26-2), a gas delivery hose (26-3) fixed inside the fixed shell (26-1), a hollow cylinder (26-31) fixed at one end of the gas delivery hose (26-3), a four-way pipe (26-4) fixed at the bottom end of the hollow cylinder (26-31), and a gas replenishment component (26-5) provided at one end of the four-way pipe (26-4). The bottom end of the tee pipe (25-61) is connected to the four-way pipe (26-4) via a conduit. A crossbar (26-6) is fixed at the center of one side of the turntable (26-2). A worm gear (26-61) is fixed on the crossbar (26-6). A fan blade (26-8) is fixed at the other end of the crossbar (26-6). A first connecting frame (26-9) is fixed at the bottom of the side plate (24). A worm (26-7) is rotatably connected to the first connecting frame (26-9). One end of the worm (26-7) is fixed to the rotating rod (27). A second connecting frame (26-10) is fixed at the bottom of the side plate (24). The crossbar (26-6) is rotatably connected to the second connecting frame (26-10).

2. The dynamic annealing atmosphere control device for perovskite solar cells as described in claim 1, characterized in that: A vertical rod (25-4) is fixed at the bottom of the inner cavity of the storage groove (25-21). The top of the vertical rod (25-4) passes through the slider (25-3) and is slidably connected to the slider (25-3). A first spring (25-41) is sleeved on the vertical rod (25-4). The bottom end of the first spring (25-41) is fixed inside the storage groove (25-21), and the top end of the first spring (25-41) is fixed to the bottom of the slider (25-3).

3. The dynamic annealing atmosphere control device for perovskite solar cells as described in claim 2, characterized in that: A positioning groove (25-31) is provided on one side of the slider (25-3).

4. The dynamic annealing atmosphere control device for perovskite solar cells as described in claim 3, characterized in that: The air supply component (26-5) includes a manual ball valve (26-51) fixed on a four-way pipe (26-4). The top of the manual ball valve (26-51) is rotatably connected to a ball valve stem (26-52). A valve handle (26-53) is fixed on the ball valve stem (26-52). A torsion spring (26-54) is sleeved on the ball valve stem (26-52). The bottom end of the torsion spring (26-54) is fixed to the top of the manual ball valve (26-51), and the top end of the torsion spring (26-54) is fixed to the valve handle (26-53).

5. The dynamic annealing atmosphere control device for perovskite solar cells as described in claim 4, characterized in that: A protrusion (32) is fixed on one side of the fixed plate (31). The protrusion (32) is slidably connected to the positioning groove (25-31). The positioning component (43) includes a slide rod (43-1) slidably connected to the bracket (41). A positioning block (43-2) is fixed at one end of the slide rod (43-1). A second inclined groove (43-21) is opened on one side of the positioning block (43-2). A third inclined groove (43-22) is opened on the other side of the positioning block (43-2). A second spring (43-11) is sleeved on the slide rod (43-1). One end of the second spring (43-11) is fixed on the slide rod (43-1), and the other end of the second spring (43-11) is fixed on the bracket (41).

6. A method for controlling the dynamic annealing atmosphere of perovskite solar cells, characterized in that: The device for controlling the dynamic annealing atmosphere of perovskite solar cells as described in any one of claims 1-5 further includes the following steps: The abutment containing the perovskite precursor solution was placed into the transfer chamber (12) for transfer. The support assembly (2) is driven by the three-axis drive (16) to move, completing the lifting-fixing-transfer-unloading of the base, and placing the base in the annealing chamber (14); The annealing crystallization process is carried out by electric heating in the annealing chamber (14); Then, the film is cooled at a constant speed in the air-cooled chamber (13) and the annealing operation is completed after the film temperature drops to the preset value.

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