Armored reinforced yttrium oxide composite ceramic and preparation method thereof

Abstract

The invention discloses armored reinforced yttrium oxide composite ceramic and a preparation method thereof. The high-purity yttrium oxide ceramic is adopted as an inner core, so that the excellent fluorine-based and chlorine-based plasma corrosion resistance is ensured; and the outer layer adopts yttrium oxide-magnesium oxide composite ceramic containing 10-15 at% of Mg to form the armor layer, so that the mechanical property and the crack resistance of the material are remarkably improved. By designing a honeycomb unit structure on the armor layer, a light high-strength composite ceramic component is realized, corrosion resistance and high strength are both considered, and the problems that traditional yttrium oxide ceramic is low in strength and easy to crack are solved. The prepared ceramic component is suitable for extreme corrosion environments such as semiconductor plasma etching and cleaning equipment and has excellent corrosion resistance, mechanical stability and structural reliability, the service life is remarkably prolonged, the manufacturing cost is reduced, and material upgrading of high-end semiconductor manufacturing equipment is promoted.

Description

Technical Field

[0001] This invention relates to the field of composite ceramic preparation technology, specifically to an armored reinforced yttrium oxide composite ceramic and its preparation method. Background Technology

[0002] Yttrium oxide (Y₂O₃) transparent ceramics, with their high theoretical transmittance across a wide spectral range of 0.2-8 μm, are suitable for components requiring real-time monitoring, such as observation windows in etching equipment. Furthermore, Yttrium oxide ceramics exhibit excellent chemical inertness and stability in fluorine- and chlorine-based plasma environments, with corrosion rates 1-2 orders of magnitude lower than traditional alumina ceramics, maintaining structural integrity even under extreme plasma conditions. These characteristics extend the service life of Yttrium oxide components by 3-5 times compared to traditional materials, significantly reducing equipment maintenance frequency and costs. However, despite its excellent corrosion resistance, Yttrium oxide ceramics still have significant limitations in mechanical properties. Transparent Yttrium oxide ceramics are typical brittle ceramic materials with weak impact resistance, making them prone to cracking during processing, installation, or operation, affecting equipment stability and service life. Moreover, high-purity Yttrium oxide ceramics have high sintering density and large molecular weight, resulting in heavier components, especially in large-sized workpieces, which can increase the operating load and thermal stress on the equipment.

[0003] Doping with other additives is an important method for improving Y2O3 ceramics. Currently, there are existing literature examples (Gan L, Park YJ, Kim H, et al. Ceramics International, 2015, 41(8): 9622-9627). . Introducing ZrO2 can effectively suppress the grain growth of Y2O3 and improve the mechanical properties of yttrium oxide ceramics. (Reference 2 (Li C, Lai C, Wu Y, et al. Ceramics International, 2024, 50(8): 13721-13731)) . The toughness of yttrium oxide ceramics was modified by introducing Al₂O₃ as a second phase. Clearly, introducing reinforcing and toughening materials as a second phase into Y₂O₃ ceramics is the main method to improve their toughness and mechanical strength. However, the introduction of a second phase often comes at the cost of sacrificing corrosion resistance or purity, making it difficult to simultaneously achieve both corrosion resistance and mechanical properties of yttrium oxide ceramics. Therefore, how to improve toughness and mechanical strength while ensuring the corrosion resistance of Y₂O₃ ceramics and reducing usage costs has become a key issue in the development of this material technology.

[0004] Against this backdrop, developing a method for preparing yttrium oxide ceramic composite components that combines corrosion resistance, mechanically reinforced structure, weight reduction design, and low-cost manufacturing will not only solve the aforementioned problems but also provide key support for the material upgrade of high-end semiconductor manufacturing equipment. Summary of the Invention

[0005] One of the objectives of this invention is to provide a method for preparing armored reinforced yttrium oxide composite ceramics, which combines corrosion resistance, mechanically strengthened structure, weight reduction design and low cost, making it suitable for industrial applications.

[0006] The second objective of this invention is to provide armored reinforced yttrium oxide composite ceramics prepared by the above method.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0008] In a first aspect, the present invention provides a method for preparing armored reinforced yttrium oxide composite ceramics, comprising the following steps:

[0009] ① Weigh 99.99% high-purity Y2O3 powder, add sintering aid zirconium carbonate, dispersant polyacrylic acid, and ball milling media anhydrous ethanol, and place it in a zirconium oxide ball mill jar for ball milling to obtain slurry 1;

[0010] ② The slurry 1 obtained in step ① is dried, sieved, and calcined in an oxygen environment to obtain highly active yttrium oxide powder;

[0011] ③ Weigh 99.99% high-purity Y2O3 powder and MgO powder, wherein the amount of Mg added is 10at% to 15at%. Mix the two powders, add dispersant polyacrylic acid and ball milling media anhydrous ethanol, and place them in a zirconia ball mill jar for ball milling to obtain slurry 2.

[0012] ④ The slurry 2 obtained in step ③ is dried, sieved, and calcined in an oxygen environment to obtain highly active Y2O3-MgO composite powder;

[0013] ⑤ Pour the composite powder obtained in step ④ into a mold with a honeycomb structure on the upper and lower surfaces, and vibrate to level it; sieve the powder obtained in step ② through a 50-mesh sieve, and then sieve the composite powder obtained in step ④ through a 50-mesh sieve, and cold isostatically press to form a Y2O3-MgO ceramic blank with a honeycomb structure on the upper and lower surfaces.

[0014] ⑥ Place the ceramic blank obtained in step ⑤ into a vacuum with a degree of 1.0 × 10⁻⁶. -4 ~1.0×10 -3 Pre-sintering is carried out in a vacuum furnace of Pa, wherein the sintering temperature is 1700-1850℃ and the holding time is 1-3h;

[0015] ⑦ Place the pre-sintered sample from step ⑥ into a hot isostatic pressing furnace for sintering, wherein the sintering temperature is 1600~1800℃, the pressure is 100~200MPa, and the holding time is 4~6h.

[0016] ⑧ The vacuum-sintered sample was annealed to obtain Y2O3-MgO composite ceramic.

[0017] In the technical solution of the present invention, the amount of zirconium carbonate added as sintering aid in step ① is 5wt% to 10wt% of the mass of Y2O3 powder, and the amount of polyacrylic acid added as dispersant is 0.1wt% to 2wt% of the mass of Y2O3 powder; the amount of polyacrylic acid added as dispersant in step ③ is 0.1wt% to 2wt% of the total mass of Y2O3 powder and MgO powder.

[0018] In the technical solution of the present invention, the ball milling time in steps ① and ③ is 20 to 30 hours, and the rotation speed is 350 rpm to 550 rpm.

[0019] In the technical solution of the present invention, the drying temperature in steps ② and ④ is 60-120℃, the drying time is 4-6h, the size of the sieve is 200 mesh, the calcination temperature is 800-1200℃, and the holding time is 6-10h.

[0020] In the technical solution of the present invention, the thickness of the powder obtained in step 2 sieved in step ⑤ is 6-8 mm, and the thickness of the composite powder obtained in step ④ sieved in step ④ is 3-5 mm.

[0021] In the technical solution of the present invention, the cell shape of the honeycomb structure in step ⑤ is square, rhomboid, regular polygon, circle, etc., and they are arranged periodically. The height of the honeycomb cell is 0.5 to 2.5 mm, the porosity is 50% to 80%, and the pore size ranges from 2 to 8 mm.

[0022] In the technical solution of the present invention, the pressure of cold isostatic pressing in step ⑤ is 150-250 MPa, and the holding time is 5-15 min.

[0023] In the technical solution of the present invention, the annealing conditions in step ⑧ are annealing at 1000-1500°C for 10-10 hours in an air atmosphere.

[0024] Secondly, the present invention also provides an armored reinforced yttrium oxide composite ceramic prepared by the above-described preparation method. The composite ceramic is composed of a middle layer of Y₂O₃ ceramic and upper and lower layers of Y₂O₃-MgO composite ceramic co-fired. The Y₂O₃ ceramic is used for resistance to plasma corrosion, and the Y₂O₃-MgO composite ceramic serves as an armor layer to improve mechanical properties. The surface of the Y₂O₃-MgO composite ceramic has a periodically arranged honeycomb unit structure.

[0025] The composite ceramic provided by this invention uses high-purity yttrium oxide ceramic in the middle layer to ensure excellent resistance to fluorine / chlorine-based plasma corrosion and low-pollution characteristics. The upper and lower surface layers use Y2O3-MgO ceramic with a honeycomb structure to form an armored reinforcement structure. The MgO phase can effectively inhibit the grain growth of the Y2O3 phase through the pinning effect at the grain boundaries, while hindering dislocation movement, thereby effectively improving its mechanical strength. Through structural design, the material is divided into a high-corrosion region (Y2O3 body) and a high-stress region (Y2O3-MgO armor). The armor layer is only located in the external structural region and does not affect the purity and corrosion resistance of the Y2O3 body. It significantly improves strength and crack resistance while ensuring cleanliness. It realizes low-cost manufacturing of lightweight, high-strength, and highly reliable Y2O3 components, significantly improving its mechanical properties and structural stability, and overcoming the technical bottleneck of existing technologies that are difficult to coordinate between corrosion resistance, mechanical properties, and material cost.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] (1) Compared with pure Y2O3 ceramics, this invention forms an armored reinforcement structure by coating the surface of high-purity Y2O3 ceramics with Y2O3-MgO ceramics, combining the excellent corrosion resistance of high-purity Y2O3 transparent ceramics with the high mechanical properties of the Y2O3-MgO composite layer. The high-purity yttrium oxide core performs excellently in highly corrosive environments such as fluorine-based and chlorine-based environments, while the Y2O3-MgO outer layer significantly improves the strength and crack resistance of the material, thereby increasing its service life. This resolves the technical conflict between "low strength of high-purity Y2O3 ceramics" and "the impact of reinforcing materials on corrosion resistance".

[0028] (2) Traditional Y2O3 ceramic components are solid integral structures and are relatively heavy. MgO has a lower density than Y2O3. Compared with pure Y2O3 ceramics, the Y2O3-MgO ceramic composite layer can effectively reduce the overall weight of the ceramic. Furthermore, this invention constructs a periodic honeycomb structure on the ceramic surface without affecting the density of the ceramic body, thereby reducing the overall weight of the material through structural design. Attached Figure Description

[0029] Figure 1 Comparison of etching depth of high-purity yttrium oxide ceramic after 3 hours of plasma etching with that of Examples 1, 2, and 3;

[0030] Figure 2 This is an exploded view of the yttrium oxide composite ceramic structure prepared in an embodiment of the present invention;

[0031] Figure 3 This is a photograph of the yttrium oxide composite ceramic prepared in Example 3 of the present invention.

[0032] Figure 4 This is a schematic diagram of a honeycomb mold structure design. Detailed Implementation

[0033] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0034] Example 1: Preparation of low-porosity (50%) honeycomb-clad yttrium oxide composite ceramics

[0035] ① Weigh 60g of 99.99% high-purity Y2O3 powder, add 8g of zirconium carbonate as a sintering aid, 0.35g of polyacrylic acid as a dispersant, and anhydrous ethanol as the ball milling medium, and place it in a zirconium oxide ball mill jar at a speed of 400rpm for 25h to obtain slurry 1; wherein the diameter of the zirconium oxide balls is 5mm and 2mm, and the mass ratio is 15:25;

[0036] ② The slurry 1 obtained in step ① is dried in an oven at 100℃ for 5 hours and then sieved with a sieve of 200 mesh. The sieved powder is then calcined in an oxygen environment at 800℃ for 10 hours to obtain highly active yttrium oxide powder.

[0037] ③ Weigh 60g of 99.99% high-purity Y2O3 powder and 2.38g of MgO powder, mix them, add 0.31g of polyacrylic acid dispersant, use anhydrous ethanol as the ball milling medium, and place them in a zirconia ball mill jar at a speed of 400rpm for 25h to obtain slurry 2; wherein the diameter of the zirconia balls is 5mm and 2mm, and the mass ratio is 17:23;

[0038] ④ The slurry 2 obtained in step ③ is dried in an oven at 100℃ for 5 hours and then sieved through a 200-mesh sieve. The sieved powder is then calcined in an oxygen environment at 800℃ for 10 hours to obtain highly active Y2O3-MgO composite powder.

[0039] ⑤ Pour the composite powder obtained in step ④ into Figure 4 The circular honeycomb mold shown has orthogonally arranged circles with a diameter of 3mm, a height of 2mm, and a porosity of 50%. Composite powder is evenly spread inside the mold to a thickness of 3mm, and then compacted and leveled. The highly active yttrium oxide powder obtained in step ② is sieved through a 50-mesh sieve to a thickness of 5mm. Then, the composite powder obtained in step ④ is sieved through a 50-mesh sieve to a thickness of 3mm. Cold isostatic pressing (CIP) is used, with a pressure of 150MPa and a holding time of 10 minutes, to obtain the desired result. Figure 2 The Y2O3-MgO composite ceramic preform shown;

[0040] ⑥ Place the honeycomb composite ceramic blank into a vacuum of 1.0×10⁻⁶. -3 The pre-sintering was carried out in a vacuum furnace of Pa at a sintering temperature of 1725℃ and a holding time of 3 hours.

[0041] ⑦ Place the pre-sintered sample from step ⑥ into a hot isostatic pressing furnace. The sintering temperature is 1600℃, the pressure is 100MPa, and the holding time is 4 hours.

[0042] ⑧ The sintered sample was annealed in air at a temperature of 1200℃ for 8 hours to obtain armored reinforced yttrium oxide composite ceramic.

[0043] Mechanical property testing showed a hardness of 9.85 GPa and a flexural strength of 232 MPa, both higher than those of pure yttrium oxide ceramics (7.09 GPa and 99 MPa). After 3 hours of plasma etching, the etching depth was 0.96 μm, superior to the 1.32 μm of pure yttrium oxide ceramics (e.g., ...). Figure 1 (As shown).

[0044] Example 2: Preparation of medium-porosity (65%) honeycomb armored yttrium oxide composite ceramics.

[0045] ① Weigh 60g of 99.99% high-purity Y2O3 powder, add 12.8g of zirconium carbonate as a sintering aid, 1.05g of polyacrylic acid as a dispersant, and anhydrous ethanol as the ball milling medium, and place it in a zirconium oxide ball mill jar at a speed of 450rpm for 25h to obtain slurry 1; wherein the diameter of the zirconium oxide balls is 5mm and 2mm, and the mass ratio is 17:23;

[0046] ② The slurry 1 obtained in step ① is dried in an oven at 100℃ for 5 hours and then sieved through a 200-mesh sieve. The sieved powder is then calcined in an oxygen environment at 1200℃ for 6 hours to obtain highly active yttrium oxide powder.

[0047] ③ Weigh 60g of 99.99% high-purity Y2O3 powder and 3.09g of MgO powder, mix them, add 0.93g of polyacrylic acid dispersant, and place them in a zirconia ball mill jar with anhydrous ethanol as the ball milling medium. The mixture is then ball-milled for 25 hours at a speed of 450 rpm to obtain slurry 2. The diameters of the zirconia balls are 5mm and 2mm, and the mass ratio is 15:25.

[0048] ④ The slurry 2 obtained in step ③ is dried in an oven at 100℃ for 5 hours and then sieved through a 200-mesh sieve. The sieved powder is then calcined in an oxygen environment at 1000℃ for 8 hours to obtain highly active Y2O3-MgO powder.

[0049] ⑤ Pour the composite powder obtained in step ④ into Figure 4The circular honeycomb mold shown has orthogonally arranged hexagonal honeycombs with a pore size of 6 mm, a height of 2.5 mm, and a porosity of 65%. The mixed powder is evenly spread inside the mold to a thickness of 4 mm, and then compacted and leveled. The highly active yttrium oxide powder obtained in step ② is sieved through a 50-mesh sieve to a thickness of 7 mm. Then, the composite powder obtained in step ④ is sieved again to a thickness of 4 mm. Cold isostatic pressing (CIP) is used at a pressure of 200 MPa for a holding time of 5 minutes to obtain the desired result. Figure 2 The Y2O3-MgO composite ceramic preform shown;

[0050] ⑥ Place the honeycomb composite ceramic blank into a vacuum of 1.0×10⁻⁶. -3 The pre-sintering was carried out in a vacuum furnace of Pa at a sintering temperature of 1800℃ and a holding time of 2 hours.

[0051] ⑦ Place the pre-sintered sample from step ⑥ into a hot isostatic pressing furnace. The sintering temperature is 1700℃, the pressure is 150MPa, and the holding time is 5 hours.

[0052] ⑧ The vacuum-sintered sample was annealed in air at 1200℃ for 8 hours to obtain the final product as shown. Figure 3 The image shows armored reinforced yttrium oxide transparent ceramic.

[0053] Mechanical property testing showed a hardness of 10.75 GPa and a flexural strength of 244 MPa, both higher than those of pure yttrium oxide ceramics (7.09 GPa and 99 MPa). After 3 hours of plasma etching, the etching depth was 0.72 μm, superior to the 1.32 μm of pure yttrium oxide ceramics (e.g., ...). Figure 1 (As shown).

[0054] Example 3: Preparation of high-porosity (80%) honeycomb armored yttrium oxide composite ceramics.

[0055] ① Weigh 60g of 99.99% high-purity Y2O3 powder, add 16g of zirconium carbonate as a sintering aid, 1.4g of polyacrylic acid as a dispersant, and anhydrous ethanol as the ball milling medium. Place the mixture in a zirconium oxide ball mill jar at a speed of 500rpm and ball mill for 25h to obtain slurry 1. The diameter of the zirconium oxide balls is 5mm and 2mm, and the mass ratio is 17:23.

[0056] ② The slurry 1 obtained in step ① is dried in an oven at 100℃ for 5 hours and then sieved through a 200-mesh sieve. The sieved powder is then calcined in an oxygen environment at 1200℃ for 6 hours to obtain highly active yttrium oxide powder.

[0057] ③ Weigh 60g of 99.99% high-purity Y2O3 powder and 3.57g of MgO powder, mix them, add 1.24g of polyacrylic acid dispersant, use anhydrous ethanol as the ball milling medium, and place them in a zirconia ball mill jar at a speed of 500rpm for 25h to obtain slurry 2; wherein the diameter of the zirconia balls is 5mm and 2mm, and the mass ratio is 15:25;

[0058] ④ The slurry 2 obtained in step ③ is dried in an oven at 100℃ for 5 hours and then sieved through a 200-mesh sieve. The sieved powder is then calcined in an oxygen environment at 1200℃ for 6 hours to obtain highly active Y2O3-MgO powder.

[0059] ⑤ Pour the composite powder obtained in step ④ into Figure 4 The circular honeycomb mold shown has orthogonally arranged hexagonal honeycombs with a pore size of 6 mm, a height of 2.5 mm, and a porosity of 80%. The mixed powder is evenly spread inside the mold to a thickness of 5 mm, and then compacted and leveled. The highly active yttrium oxide powder obtained in step ② is sieved through a 50-mesh sieve to a thickness of 8 mm. Then, the composite powder obtained in step ④ is sieved again to a thickness of 5 mm. Cold isostatic pressing (CIP) is used at a pressure of 200 MPa for 5 minutes to obtain the desired product. Figure 2 The Y2O3-MgO composite ceramic preform shown;

[0060] ⑥ Place the honeycomb composite ceramic blank into a vacuum of 1.0×10⁻⁶. -3 The pre-sintering was carried out in a vacuum furnace of Pa, with the sintering temperature set at 1850℃ and the holding time at 2 hours.

[0061] ⑦ Place the pre-sintered sample from step ⑥ into a hot isostatic pressing furnace. The sintering temperature is 1800℃, the pressure is 200MPa, and the holding time is 6 hours.

[0062] ⑧ The vacuum-sintered sample was annealed in air at 1200℃ for 8 hours to obtain the final product as shown. Figure 3 The image shows armored reinforced yttrium oxide transparent ceramic.

[0063] Mechanical property testing showed a hardness of 11.25 GPa and a flexural strength of 258 MPa, both higher than those of pure yttrium oxide ceramics (7.09 GPa and 99 MPa). After 3 hours of plasma etching, the etching depth was 0.42 μm, superior to the 1.32 μm of pure yttrium oxide ceramics (e.g., ...). Figure 1 (As shown).

[0064] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications, equivalent substitutions, and improvements made by those skilled in the art within the scope of the technology disclosed in the present invention, and within the spirit and principles of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A method for preparing armored reinforced yttrium oxide composite ceramic, characterized in that, Includes the following steps: ① Weigh 99.99% high-purity Y2O3 powder, add sintering aid zirconium carbonate, dispersant polyacrylic acid, and ball milling media anhydrous ethanol, and place it in a zirconium oxide ball mill jar for ball milling to obtain slurry 1; ② The slurry 1 obtained in step ① is dried, sieved, and calcined in an oxygen environment to obtain highly active yttrium oxide powder; ③ Weigh 99.99% high-purity Y2O3 powder and MgO powder, wherein the amount of Mg added is 10at% to 15at%. Mix the two powders, add dispersant polyacrylic acid and ball milling media anhydrous ethanol, and place them in a zirconia ball mill jar for ball milling to obtain slurry 2. ④ The slurry 2 obtained in step ③ is dried, sieved, and calcined in an oxygen environment to obtain highly active Y2O3-MgO composite powder; ⑤ Pour the composite powder obtained in step ④ into a mold with a honeycomb structure on the upper and lower surfaces, and vibrate to level it; sieve the powder obtained in step ② through a 50-mesh sieve, and then sieve the composite powder obtained in step ④ through a 50-mesh sieve, and cold isostatically press to form a Y2O3-MgO ceramic blank with a honeycomb structure on the upper and lower surfaces. ⑥ Place the ceramic blank obtained in step ⑤ into a vacuum with a degree of 1.0 × 10⁻⁶. -4 ~1.0×10 -3 Pre-sintering is carried out in a vacuum furnace of Pa, wherein the sintering temperature is 1700-1850℃ and the holding time is 1-3h; ⑦ Place the pre-sintered sample from step ⑥ into a hot isostatic pressing furnace for sintering, wherein the sintering temperature is 1600~1800℃, the pressure is 100~200MPa, and the holding time is 4~6h. ⑧ The vacuum-sintered sample was annealed to obtain Y2O3-MgO composite ceramic.

2. The method for preparing an armored reinforced yttrium oxide composite ceramic according to claim 1, characterized in that, In step ①, the amount of zirconium carbonate added as a sintering aid is 5 wt% to 10 wt% of the mass of Y2O3 powder, and the amount of polyacrylic acid added as a dispersant is 0.1 wt% to 2 wt% of the mass of Y2O3 powder; in step ③, the amount of polyacrylic acid added as a dispersant is 0.1 wt% to 2 wt% of the total mass of Y2O3 powder and MgO powder.

3. The method for preparing armored reinforced yttrium oxide composite ceramic according to claim 1, wherein the ball milling time in steps ① and ③ is 20-30 h, and the rotation speed is 350 rpm-550 rpm.

4. The preparation method of armored reinforced yttrium oxide composite ceramic according to claim 1, wherein the drying temperature in steps ② and ④ is 60-120℃ and the drying time is 4-6h; the size of the sieve is 200 mesh; and the calcination temperature is 800-1200℃ and the holding time is 6-10h.

5. In the preparation method of armored reinforced yttrium oxide composite ceramic according to claim 1, the thickness of the powder obtained in step 2 sieved into step 5 is 6-8 mm, and the thickness of the composite powder obtained in step 4 sieved into step 4 is 3-5 mm.

6. The method for preparing armored reinforced yttrium oxide composite ceramic according to claim 1, wherein the cell shape of the honeycomb structure in step ⑤ is one of square, rhombus, regular polygon, or circle, and is arranged periodically, the height of the honeycomb cell is 0.5 to 2.5 mm, the porosity is 50% to 80%, and the pore size ranges from 2 to 8 mm.

7. The preparation method of armored reinforced yttrium oxide composite ceramic according to claim 1, wherein the pressure of cold isostatic pressing in step ⑤ is 150-250 MPa and the holding time is 5-15 min.

8. The preparation method of armored reinforced yttrium oxide composite ceramic according to claim 1, wherein the annealing conditions in step ⑧ are annealing at 1000-1500°C for 10-10 hours in an air atmosphere.

9. An armored reinforced yttrium oxide composite ceramic prepared by the preparation method according to any one of claims 1 to 8, characterized in that, The composite ceramic is composed of a middle layer of Y2O3 ceramic and upper and lower layers of Y2O3-MgO composite ceramic co-fired. The Y2O3 ceramic is used to resist plasma corrosion, and the Y2O3-MgO composite ceramic serves as an armor layer to improve mechanical properties. The surface of the Y2O3-MgO composite ceramic has a periodically arranged honeycomb unit structure.

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