MEMS atmospheric electric field sensor, assembling method and atmospheric electric field instrument

Abstract

The invention provides an MEMS atmospheric electric field sensor, an assembling method and an atmospheric electric field instrument.The MEMS atmospheric electric field sensor comprises a shell, a middle cylinder assembly, an induction electrode, an MEMS electric field measuring module and a connector, and the shell comprises a cavity a with the bottom open and the interior hollow; at least one part of the middle cylinder assembly is fixed in the cavity a; the induction electrode faces the ground after being fixed so as to induce charges generated between the induction electrode and the ground, and the induction electrode is shielded by the shell under the orthographic projection view angle. The MEMS electric field measurement module is fixed on the middle cylinder assembly and connected with the induction electrode, and after induced charges are input into the MEMS electric field measurement module, an atmospheric electric field value is obtained, measurement of an external electric field is achieved, and the size of the external electric field is known; and the joint is connected with the MEMS electric field measurement module and is fixed on the shell or the middle cylinder assembly so as to transmit an electric field value. According to the invention, the sensitivity of the MEMS atmospheric electric field sensor can be prevented from being reduced by electromagnetic interference signals, and the stability and accuracy of an electric field measurement result are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sensors, in particular to a MEMS atmospheric electric field sensor, an assembly method and an atmospheric electric field instrument. BACKGROUND

[0002] Lightning disaster is one of the top ten natural disasters announced by the United Nations, and lightning is also an important weather factor that directly affects the success or failure of space launch. In the spacecraft launch specification, the atmospheric electric field intensity has been listed as one of the main conditions for whether the spacecraft can be launched. Lightning can cause serious damage to the power grid, including line tripping, power transmission equipment failure, line unplanned shutdown, etc., which directly affects the safe and stable operation of the power grid and the safety and reliability of power supply and electricity. In addition to a large number of electrical and electronic equipment and auxiliary facilities that are very sensitive to lightning in the petroleum and chemical industry, a large part of the material and product storage and transportation in the production process have flammable and explosive characteristics, which is one of the sensitive industries prone to lightning disaster accidents. At present, MEMS atmospheric electric field sensors are used to monitor and analyze the changes in atmospheric electric field intensity, polarity, etc., to identify possible lightning hazards and provide early warning before the disaster occurs, which is of great significance for lightning protection and disaster reduction, and is also the development trend of future meteorological departments for lightning and other disaster weather forecasting.

[0003] As shown in Figure 1 A MEMS atmospheric electric field sensor and an assembly method thereof are disclosed in publication (announcement) No. CN118169480A, which includes a conductive shell, a conductive part, an insulating part, a middle tube part, and a MEMS electric field measurement module. A first groove is formed on the bottom end face of the conductive shell towards the top, the conductive part is placed inside the first groove, the insulating part is placed inside the first groove and fixed to the bottom of the conductive part, at least a part of the middle tube part is placed inside the first groove and arranged at the bottom of the insulating part, wherein a first internal cavity is formed inside the middle tube part, the first internal cavity is filled with adhesive, the MEMS electric field measurement module is clamped vertically inside the first internal cavity and wrapped by the adhesive, wherein the MEMS electric field measurement module includes a wire connected thereto, the top end of the wire penetrates the middle tube part and the insulating part in turn and is connected to the conductive part to detect the external electric field through the conductive part and the conductive shell. Since the sensing direction of the conductive shell is mainly towards the side area and the upper area of the MEMS atmospheric electric field sensor, and there are a large number of electromagnetic interference signals in the air, when the conductive shell senses the electric charge, the electromagnetic interference signals will reduce the sensitivity of the MEMS atmospheric electric field sensor and affect the accuracy of electric field measurement.

[0004] Therefore, how to avoid the reduction of the sensitivity of the MEMS atmospheric electric field sensor caused by the electromagnetic interference signals and ensure the accuracy of electric field measurement is a technical problem to be solved at present. SUMMARY

[0005] In order to solve the above problems, the present application provides a MEMS atmospheric electric field sensor, an assembly method and an atmospheric electric field instrument, which can avoid electromagnetic interference signals reducing the sensitivity of the MEMS atmospheric electric field sensor, and ensure the stability and accuracy of the electric field measurement results.

[0006] To achieve the above object, in a first aspect, the present application provides a MEMS atmospheric electric field sensor, comprising a shell, a middle tube assembly, a sensing electrode, a MEMS electric field measurement module and a connector, wherein:

[0007] The shell comprises a cavity a with an open bottom and a hollow interior;

[0008] The middle tube assembly is at least partially fixed in the cavity a;

[0009] The sensing electrode is fixed to face the ground, so as to sense the electric charge generated between the sensing electrode and the ground, and the sensing electrode is shielded by the shell in the orthographic projection visual angle;

[0010] The MEMS electric field measurement module is fixed on the middle tube assembly and connected with the sensing electrode, the sensing electrode inputs the sensed electric charge into the MEMS electric field measurement module, so as to obtain the atmospheric electric field value, realize the measurement of the external electric field, and know the size of the external electric field;

[0011] The connector is connected with the MEMS electric field measurement module and fixed on the shell or the middle tube assembly, so as to transmit the atmospheric electric field value.

[0012] In one embodiment, the middle tube assembly is fixed in the interior of the cavity a, comprising a middle tube, a polytetrafluoroethylene ring a and an outer tube fixing member fixed on the bottom end face of the middle tube in sequence, wherein:

[0013] The interior of the middle tube forms a hollow cavity b, the MEMS electric field measurement module is fixed in the interior of the cavity b, and the interior of the cavity b is filled with an adhesive to fix the MEMS electric field measurement module;

[0014] The polytetrafluoroethylene ring a is fixed on the bottom end face of the middle tube;

[0015] The outer tube fixing member is fixed on the bottom end face of the polytetrafluoroethylene ring a, and one end of the MEMS electric field measurement module is connected with the outer tube fixing member through a communication assembly.

[0016] In one embodiment, the induction electrode is a sheet-shaped electrode sheet fixed on the bottom end surface of the outer cylinder fixing member and oriented towards the ground, wherein the edge of the electrode sheet does not contact the inner wall surface of the outer shell.

[0017] When the electrode sheet induces the electric charge between the MEMS atmospheric electric field sensor and the ground, the electric charge is input into the MEMS electric field measurement module through the communication assembly to obtain an atmospheric electric field value, realize the measurement of the external electric field, and know the size of the external electric field.

[0018] In one embodiment, the communication assembly includes a wire and a conductive component connected thereto, wherein:

[0019] When the MEMS electric field measurement module is vertically arranged inside the cavity b, the end of the wire is connected to the MEMS electric field measurement module, the top end of the wire penetrates the middle cylinder and the polytetrafluoroethylene ring a in turn, and then is connected to the induction electrode through the conductive component, the outer cylinder fixing member and the induction electrode to transmit the induced electric charge.

[0020] In one embodiment, a part of the middle cylinder assembly is fixed inside the cavity a and another part is located outside the cavity a, including a middle cylinder, a support and a polytetrafluoroethylene ring b, wherein:

[0021] The middle cylinder is connected to the outer shell through the polytetrafluoroethylene ring b, and the support is fixed on the top end of the middle cylinder.

[0022] The MEMS electric field measurement module is fixed on the top of the support and connected to the induction electrode through the communication assembly.

[0023] In one embodiment, the induction electrode is a ring-shaped electrode ring fixed on the bottom end surface of the polytetrafluoroethylene ring b and oriented towards the ground, wherein the edge of the electrode ring does not contact the inner wall surface of the outer shell and the outer wall surface of the middle cylinder.

[0024] When the electrode ring induces the electric charge between the MEMS atmospheric electric field sensor and the ground, the electric charge is input into the MEMS electric field measurement module through the communication assembly to obtain an atmospheric electric field value, realize the measurement of the external electric field, and know the size of the external electric field.

[0025] In one embodiment, the communication assembly includes a wire and a conductive component connected thereto, wherein:

[0026] When the MEMS electric field measurement module is fixed horizontally on the support, the end of the wire is connected with the MEMS electric field measurement module, and the top end of the wire is connected with the induction electrode through a conductive part to transmit the induced electric charge.

[0027] In one of the embodiments, the shell comprises a first shell and a second shell, at least a part of the induction electrode is in the second shell, wherein the second shell is a horn structure.

[0028] In the second aspect, the application further provides an assembling method for assembling the MEMS atmospheric electric field sensor, comprising the following steps:

[0029] The MEMS electric field measurement module is fixed inside or on the top of the middle tube assembly and is fixed by an adhesive;

[0030] The induction electrode is fixed to face the ground to induce the electric charge generated between the induction electrode and the ground;

[0031] The MEMS electric field measurement module is connected with the induction electrode, after the induction electrode inputs the induced electric charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained to realize the measurement of the external electric field and to know the size of the external electric field.

[0032] In the third aspect, the application further provides an atmospheric electric field instrument, comprising the MEMS atmospheric electric field sensor, a connecting elbow, a main body, a solar panel and a control box, the control box comprises a control module, wherein:

[0033] The connecting elbow, the solar panel and the control box are fixed on the main body, the MEMS atmospheric electric field sensor is connected with one end of the connecting elbow and faces the ground to induce the electric charge generated between the induction electrode and the ground, and the electric field value obtained according to the electric charge is input into the control module, and a warning is given when the analysis result of the atmospheric electric field value meets the preset condition.

[0034] Compared with the prior art, the application has one of the following advantages:

[0035] Because the ground has a certain shielding effect, the ground can offset a part of the electromagnetic interference from the sky direction, when the induction electrode faces the ground, a stable electric field distribution is formed between the induction electrode and the ground, when the electric charge generated between the induction electrode and the ground is induced, compared with the MEMS atmospheric electric field sensor in the prior art, the electromagnetic interference signal can avoid reducing the sensitivity of the MEMS atmospheric electric field sensor, and the stability and accuracy of the electric field measurement result are ensured;

[0036] In the front projection view angle, the induction electrode is shielded by the shell, so that the induction electrode can avoid collision with objects from the upper position or the side position, and the induction electrode can be prevented from being damaged;

[0037] Since the edge of the electrode sheet does not contact the inner wall of the shell, when the shell is made of a metal material, it can be ensured that the sensed electric charge is only guided into the outer cylinder fixing member. BRIEF DESCRIPTION OF DRAWINGS

[0038] Figure 1 is a sectional view of the existing MEMS atmospheric electric field sensor;

[0039] Figure 2 is a perspective view of the first embodiment of the MEMS atmospheric electric field sensor in the application;

[0040] Figure 3 is a sectional view of Figure 2 ;

[0041] Figure 4 is an exploded view of Figure 2 ;

[0042] Figure 5 is a perspective view of the second embodiment of the MEMS atmospheric electric field sensor in the application;

[0043] Figure 6 is a sectional view of Figure 5 ;

[0044] Figure 7 is a perspective view of the first embodiment of the atmospheric electric field instrument in the application;

[0045] Figure 8 is a perspective view of Figure 7 from another angle;

[0046] Figure 9 is a perspective view of the second embodiment of the atmospheric electric field instrument in the application;

[0047] Figure 10 is a perspective view of Figure 9 from another angle.

[0048] The main figure mark contents are as follows:

[0049] 1 - housing; 101 - first housing; 102 - second housing; 103 - cavity a; 2 - sensing electrode; 3 - outer cylinder fixing member; 4 - polytetrafluoroethylene ring a; 5 - middle cylinder; 501 - cavity b; 6 - MEMS electric field measurement module; 600 - MEMS electric field sensitive chip; 601 - preamplifier circuit board; 602 - driving and demodulation circuit board; 603 - insulating sealed box; 604 - wire; 605 - conductive part; 7 - connector; 8 - connecting elbow; 9 - main body part; 901 - main body support; 902 - solar installation inclined beam; 903 - solar installation horizontal beam; 904 - support base; 10 - control box; 11 - solar panel; 12 - MEMS atmospheric electric field sensor; 13 - polytetrafluoroethylene ring b; 14 - support. DETAILED DESCRIPTION

[0050] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described clearly and completely below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present application.

[0051] In the description of the present application, it should be understood that the terms "upper", "lower", "top surface", "bottom surface", "interior" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there can be a component disposed therebetween. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0052] Embodiment one

[0053] As shown in Figures 2 to 4 The present embodiment provides a MEMS atmospheric electric field sensor 12, which comprises a housing 1, a middle cylinder assembly, a sensing electrode 2, a MEMS electric field measurement module 6 and a connector 7, wherein:

[0054] The housing 1 comprises a cavity a 103 which is open at the bottom and hollow inside;

[0055] The middle cylinder assembly is fixed at least in part in the cavity a 103;

[0056] The induction electrode 2 is fixed to a position facing the ground to induce the electric charge generated between the induction electrode 2 and the ground, and the induction electrode 2 is shielded by the shell 1 in the orthographic perspective view;

[0057] The MEMS electric field measurement module 6 is fixed on the middle cylinder assembly and connected with the induction electrode 2, and the induction electrode 2 inputs the induced electric charge into the MEMS electric field measurement module 6 to obtain the atmospheric electric field value, realize the measurement of the external electric field, and know the size of the external electric field.

[0058] The joint 7 is connected with the MEMS electric field measurement module 6 and fixed on the shell 1 to transmit the electric field value.

[0059] Specifically, the shell 1 includes a first shell 101 and a second shell 102 connected with each other. The first shell 101 is a cylindrical structure with an open bottom and a hollow interior, and a cavity a103 in the interior is used to accommodate the middle cylinder assembly and the MEMS electric field measurement module 6. A joint 7 fixing hole for fixing the joint 7 and a screw hole for connecting with the connecting elbow 8 are formed on the top end face of the first shell 101. The second shell 102 is a horn-shaped structure, and when the induction electrode 2 is fixed on the bottom end face of the middle cylinder assembly, it is placed in the second shell 102, and the edge of the induction electrode 2 does not contact the inner wall surface of the second shell 102.

[0060] Optionally, the shell 1 can be made of metal material or non-metal material. When the shell 1 is made of metal material, the shell 1 is connected with the connecting elbow 8 to realize grounding. When the shell 1 is made of non-metal material, the charge can be prevented from adhering to the surface of the shell 1.

[0061] Specifically, the middle cylinder assembly is fixed in the cavity a103 and includes a middle cylinder 5, a polytetrafluoroethylene ring a4 and an outer cylinder fixing piece 3 arranged coaxially, wherein the polytetrafluoroethylene ring a4 is fixed on the bottom end face of the middle cylinder 5, and the outer cylinder fixing piece 3 is fixed on the bottom end face of the polytetrafluoroethylene ring a4.

[0062] Further, the middle cylinder 5 is a hollow columnar body, and a hollow cavity b501 is formed in the interior of the middle cylinder 5. The top end is an open structure and is connected with the inner side surface of the top end face of the first shell 101, so that part of the top end face of the first shell 101 forms the top end face of the middle cylinder 5. A first through hole is formed on the bottom end face of the middle cylinder 5, and a ring-shaped positioning column a is further formed outside the first through hole.

[0063] Preferably, the top end of the middle cylinder 5 can be connected with the inner side surface of the top end face of the first shell 101 by an adhesive.

[0064] Further, the polytetrafluoro ring a4 is a circular cylindrical structure, and is fixed at the bottom of the middle cylinder 5 by a screw, and the diameter of the polytetrafluoro ring a4 is substantially the same as the diameter of the middle cylinder 5. When the polytetrafluoro ring a4 is fixed on the bottom end face of the middle cylinder 5, the positioning column a is located inside the annular region, facilitating the positioning of the polytetrafluoro ring a4.

[0065] Further, the polytetrafluoro ring a4 is a circular cylindrical structure, and is fixed at the bottom of the middle cylinder 5 by a screw, and the diameter of the polytetrafluoro ring a4 is substantially the same as the diameter of the middle cylinder 5. When the polytetrafluoro ring a4 is fixed on the bottom end face of the middle cylinder 5, the positioning column a is located inside the annular region, facilitating the positioning of the polytetrafluoro ring a4.

[0066] Further, the outer cylinder fixing piece 3 includes a bottom plate and an annular side wall, which can be an integral structure or a split structure. The second through hole is formed on the bottom plate, and a plurality of assembly holes are formed around the outside of the second through hole on the bottom plate, and a conductive fixing position is formed on the bottom plate.

[0067] Optionally, the second through hole can be a coaxial hole coaxially arranged with the bottom plate, or an eccentric hole arranged eccentrically with the bottom plate.

[0068] Preferably, the second through hole is an axial hole formed on the bottom plate, and the annular side wall and the bottom plate are an integral structure, which can ensure the connection performance between the two relative to the split structure. When the outer cylinder fixing piece 3 and the polytetrafluoro ring a4 are assembled, the second through hole is sleeved outside the positioning column b, and the bottom end face of the positioning column b and the inner wall face of the top end face of the bottom plate are located in the same plane.

[0069] In this embodiment, since the outer cylinder fixing piece 3, the polytetrafluoro ring a4 and the middle cylinder 5 are coaxially assembled from bottom to top, the second through hole, the annular region and the first through hole are also coaxially arranged.

[0070] Specifically, the induction electrode 2 is an electrode sheet in a sheet structure, including a sheet body part and an upper edge part connected thereto. The upper edge part is in a columnar structure and is fixed on the top end face of the sheet body part. A thread is formed on the outer wall face of the upper edge part and cooperates with the annular side wall, so that the electrode sheet is assembled on the bottom end face of the outer cylinder fixing piece 3 by the thread and is located towards the ground to induce the charge between the MEMS atmospheric electric field sensor 12 and the ground.

[0071] Optionally, when the electrode sheet is installed on the bottom end face of the outer cylinder fixing piece 3, the bottom end face of the electrode sheet is arranged parallel to the ground, or the bottom end face of the electrode sheet is arranged in an inclined manner and forms an included angle with the ground.

[0072] Preferably, the bottom end face of the electrode sheet is arranged parallel to the ground, which can reduce electromagnetic interference when the electrode sheet induces the charge between the MEMS atmospheric electric field sensor 12 and the ground, and ensure the stability and accuracy of the electric field measurement result.

[0073] Since the outer diameter of the upper edge part is substantially the same as the inner diameter of the annular side wall, when the two are assembled, not only can the contact area between the two be increased to ensure the transmission effect of the electric charge, but also the electrode sheet can be prevented from shaking after installation.

[0074] Since the outer cylinder fixing part 3 is made of metal material, when the electrode sheet induces the electric charge between the MEMS atmospheric electric field sensor 12 and the ground, the electric charge can be transmitted to the outer cylinder fixing part 3 to enhance the electric charge intensity and improve the accuracy of detecting external electric charge.

[0075] Further, when the electrode sheet is assembled with the outer cylinder fixing part 3, it is located in the second shell 102, but the inner diameter of each position of the second shell 102 is greater than the diameter of the electrode sheet, so that the edge of the electrode sheet does not contact the inner wall surface of the second shell 102. When the outer shell 1 is made of metal material, since the edge of the electrode sheet does not contact the inner wall surface of the second shell 102, the induced electric charge will not be guided into the outer shell 1, ensuring that the induced electric charge will only be guided into the outer cylinder fixing part 3.

[0076] In addition, when the electrode sheet is assembled with the outer cylinder fixing part 3, in the orthographic projection visual angle, the electrode sheet is shielded by the second shell 102, which can avoid the electrode sheet from being collided by objects from the upper position or the side position thereof, and avoid the electrode sheet from being damaged.

[0077] In addition, the second shell 102 has a horn-shaped structure, which provides a certain direction for the electric charge between the MEMS atmospheric electric field sensor 12 and the ground, so as to facilitate the electric charge to gather on the electrode sheet and fully contact the electrode sheet, thereby improving the sensitivity of the induced electric charge.

[0078] Specifically, the MEMS electric field measurement module 6 analyzes the input electric charge, thereby obtaining the atmospheric electric field value, realizing the measurement of the external electric field, and knowing the size of the external electric field. The MEMS electric field measurement module 6 is vertically arranged in the inside of the cavity b501 and is surrounded by the adhesive filled in the cavity b501 to fix the MEMS electric field measurement module 6. The MEMS electric field measurement module 6 is connected with the joint 7 and the communication assembly, wherein the communication assembly is connected with the outer cylinder fixing part 3 to input the induced electric charge into the MEMS electric field measurement module 6. The MEMS atmospheric electric field sensor 12 can be connected with the external setting through the joint 7 to output the atmospheric electric field value obtained after analysis.

[0079] Further, the MEMS electric field measurement module 6 comprises a MEMS electric field sensitive chip 600, a pre-amplification circuit board 601 and a driving and demodulation circuit board 602, which can be circular, oval, rectangular, square or polygonal in shape. The shielding electrode in the MEMS electric field sensitive chip 600 periodically vibrates to modulate the detection electrode to generate a detection current. The MEMS electric field sensitive chip 600 is placed in an insulating sealed box 603, which is made of insulating material and has a metal cover plate on the top. The pre-amplification circuit board 601 converts the electric field current signal into a voltage signal. The driving and demodulation circuit board 602 generates a double-channel differential signal required for the normal operation of the MEMS electric field sensitive chip 600 and calculates the electric field information of the voltage signal output by the pre-amplification circuit board 601, thereby obtaining the atmospheric electric field value.

[0080] Specifically, the connecting assembly comprises a wire 604 and a conductive component 605 connected together. The top end of the wire 604 is connected to the MEMS electric field sensitive chip 600 or the metal cover plate on the top of the insulating sealed box 603, and the tail of the wire 604 extends into the outer cylinder fixing part 3 through the first through hole, the annular area and the second through hole in turn. The wire 604 can be a common wire 604, a shielded wire 604, a high-frequency radio frequency wire, a semi-steel semi-flexible radio frequency wire, etc. The conductive component 605 is a screw or is composed of a screw and a connecting sheet connected to the screw. When the conductive component is a screw, the tail of the wire 604 is wound around the outside of the screw. When the screw is fastened inside the conductive fixing part, the wire 604 is connected to the conductive fixing part through the screw, and the electric charge accumulated on the outer cylinder fixing part 3 is input into the wire 604 through the screw. When the conductive component is a screw and a connecting sheet sleeved on the outside of the screw and connected to the screw, the tail of the wire 604 is welded to the connecting sheet. When the screw is fastened inside the conductive fixing part, the wire 604 is connected to the conductive fixing part through the connecting sheet and the screw, and the electric charge accumulated on the outer cylinder fixing part 3 is input into the wire 604 through the screw and the connecting sheet.

[0081] Embodiment Two

[0082] As Figure 5 With Figure 6 shown, the embodiment provides a MEMS atmospheric electric field sensor 12, which comprises a shell 1, a middle cylinder assembly, a sensing electrode 2, a MEMS electric field measurement module 6 and a connector 7. The difference between this embodiment and the above-mentioned embodiment one is that:

[0083] Part of the middle cylinder assembly is fixed inside the cavity a103, and the other part is located outside the cavity a103, including the middle cylinder 5, the bracket 14 and the polytetrafluoro ring b13, the middle cylinder 5 is connected with the shell 1 through the polytetrafluoro ring b13, and the bracket 14 is fixed at the top end of the middle cylinder 5. Among them, the middle cylinder 5 includes a first part located inside the shell 1 and a second part located outside the shell 1, the MEMS electric field measurement module 6 is fixed at the top of the bracket 14 and connected with the sensing electrode 2 through the communication assembly.

[0084] The sensing electrode 2 is an electrode ring with a ring structure, which is fixed on the bottom end face of the polytetrafluoro ring b13 and faces the ground. Among them, the edge of the electrode ring does not contact the inner wall surface of the second shell 102 and the outer wall surface of the middle cylinder 5. When the electrode ring senses the charge between the MEMS atmospheric electric field sensor 12 and the ground, the charge is input into the MEMS electric field measurement module 6 through the communication assembly, the atmospheric electric field value is obtained, the measurement of the external electric field is realized, and the size of the external electric field is known.

[0085] When the MEMS electric field measurement module 6 is fixed horizontally on the bracket 14, the end of the wire 604 is connected with the MEMS electric field measurement module 6, and the top end of the wire 604 is connected with the sensing electrode 2 through the conductive part 605 to transmit the sensed charge. After the charge is input into the MEMS electric field measurement module 6, the atmospheric electric field value is obtained after analysis. In addition, the MEMS electric field measurement module 6 is also connected with the connector 7 fixed on the middle cylinder 5 to output the obtained atmospheric electric field value.

[0086] In the embodiment one and the embodiment two, the working principle of the MEMS atmospheric electric field sensor 12 is as follows:

[0087] The electrode sheet is electrically connected with the MEMS electric field measurement module 6 through the outer cylinder fixing part 3 and the communication assembly. When there is a direct current electric field E in the external environment, the electrode sheet senses the charge generated between the MEMS atmospheric electric field sensor 12 and the ground, which is linearly related to the direct current electric field E. The electrode sheet senses the electric field Eg, which is linearly related to the direct current electric field E. The MEMS electric field sensitive chip 600 measures the electric field Eg to obtain the atmospheric electric field value of the external environment.

[0088] Embodiment three

[0089] The embodiment provides an assembling method for assembling the MEMS atmospheric electric field sensor described in the embodiment one, which comprises the following steps:

[0090] The middle cylinder, the polytetrafluoro ring a and the outer cylinder fixing part are assembled into a middle cylinder assembly;

[0091] The MEMS electric field measurement module is placed in the middle cylinder, and the end of the communication assembly is fixedly connected with the outer cylinder fixing part after penetrating the outer cylinder, the polytetrafluoro ring a and the outer cylinder fixing part in sequence.

[0092] The inside of the middle cylinder is filled with adhesive, so that the adhesive wraps the outside of the MEMS electric field measurement module 6 to fix the MEMS electric field measurement module;

[0093] The induction electrode is fixed on the bottom end face of the outer cylinder fixing piece, so that the position of the induction electrode after being fixed faces the ground to induce the electric charge generated between the induction electrode and the ground;

[0094] The induction electrode is connected with the outer cylinder fixing piece and the MEMS electric field measurement module through the communication assembly. After the induction electrode inputs the induced electric charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained, the measurement of the external electric field is realized, and the size of the external electric field is known.

[0095] Embodiment four

[0096] The embodiment provides an assembly method for assembling the MEMS atmospheric electric field sensor described in the above embodiment two, comprising the following steps:

[0097] After the MEMS electric field measurement module and the support are fixed on the top end face of the middle cylinder in turn, the MEMS electric field measurement module is connected with the joint;

[0098] After the adhesive is injected into the inside of the shell, the middle cylinder is connected with the shell through the polytetrafluoro ring b, so that the MEMS electric field measurement module, the support and the first part of the middle cylinder are located in the inside of the shell, and the adhesive wraps the outside of the MEMS electric field measurement module to fix the MEMS electric field measurement module;

[0099] After the end of the communication assembly is connected with the induction electrode, the induction electrode is fixed on the bottom end face of the polytetrafluoro ring b, so that the position of the induction electrode after being fixed faces the ground to induce the electric charge generated between the induction electrode and the ground;

[0100] After the induction electrode inputs the induced electric charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained, the measurement of the external electric field is realized, and the size of the external electric field is known.

[0101] Embodiment five

[0102] As Figure 7 And Figure 8As shown, this embodiment provides an atmospheric electric field meter, including the MEMS atmospheric electric field sensor 12 described in Embodiment 1 above, a connecting bend 8, a main body 9, a solar panel 11, and a control box 10. The control box 10 includes a control module fixed inside it. The main body 9 includes a main support 901, a solar mounting beam 902, a solar mounting crossbar 903, and a support base 904. The solar panel 11 is fixed to the main support 901 via the solar mounting beam 902 and the solar mounting crossbar 903. The control box 10 is fixed to the main support 901. One end of the connecting bend 8 is connected to the main support 901, and the MEMS atmospheric electric field sensor 12 is connected to the other end of the connecting bend 8. The sensing electrode 2 in the MEMS atmospheric electric field sensor 12 faces the ground to sense the charge generated between the sensing electrode 2 and the ground.

[0103] When the sensing electrode 2 in the MEMS atmospheric electric field sensor 12 senses the charge generated between the MEMS atmospheric electric field sensor 12 and the ground, it obtains the atmospheric electric field value. The atmospheric electric field value is input into the control module via connector 7 and wires for analysis, and an early warning is issued based on the preset conditions satisfied by the analyzed atmospheric electric field value.

[0104] After analysis, a first warning is issued when the atmospheric electric field value meets the first preset condition; a second warning is issued when the atmospheric electric field value meets the second preset condition; and a third warning is issued when the atmospheric electric field value meets the third preset condition.

[0105] Example 6

[0106] like Figure 9 and Figure 10 As shown, this embodiment provides an atmospheric electric field meter, including the MEMS atmospheric electric field sensor 12 described in Embodiment 2 above, a connecting bend 8, a main body 9, a solar panel 11, and a control box 10. The control box 10 includes a control module fixed inside it. The main body 9 includes a main support 901, a solar mounting beam 902, a solar mounting crossbar 903, and a support base 904. The solar panel 11 is fixed to the main support 901 via the solar mounting beam 902 and the solar mounting crossbar 903. The control box 10 is fixed to the main support 901. One end of the connecting bend 8 is connected to the main support 901, and the MEMS atmospheric electric field sensor 12 is connected to the other end of the connecting bend 8. The sensing electrode 2 in the MEMS atmospheric electric field sensor 12 faces the ground to sense the charge generated between the sensing electrode 2 and the ground.

[0107] When the sensing electrode 2 in the MEMS atmospheric electric field sensor 12 senses the electric charge generated between the MEMS atmospheric electric field sensor 12 and the ground, the atmospheric electric field value is obtained. The atmospheric electric field value is input into the control module through the joint 7 and the wire to analyze the atmospheric electric field value, and a warning is given according to the preset conditions met by the analyzed atmospheric electric field value.

[0108] After analysis, when the atmospheric electric field value meets the first preset condition, the first warning is given; when the atmospheric electric field value meets the second preset condition, the second warning is given; and when the atmospheric electric field value meets the third preset condition, the third warning is given.

[0109] In the above-mentioned embodiment five and embodiment six, by way of example, after analysis, the atmospheric electric field value is 3 kV / m, which is the same as the first preset condition (3 kV / m), so the first warning can be given; the atmospheric electric field value is 5 kV / m, which is the same as the second preset condition (5 kV / m), so the second warning can be given; and the atmospheric electric field value is 7 kV / m, which is the same as the third preset condition (7 kV / m), so the third warning can be given.

[0110] The above-mentioned is only the preferred embodiment of the present application, which is only illustrative but not limiting. Those skilled in the art understand that many changes, modifications, and even equivalents can be made to the present application within the spirit and scope defined by the claims of the present application, and all will fall within the protection scope of the present application.

Claims

1. A MEMS atmospheric electric field sensor, characterized by, The shell, the middle tube assembly, the induction electrode, the MEMS electric field measurement module and the connector are included, wherein: The shell includes a cavity a with an open bottom and a hollow interior; The middle tube assembly is at least partially fixed in the cavity a; The induction electrode is fixed to face the ground to induce the electric charge generated between the induction electrode and the ground, and the induction electrode is shielded by the shell in the orthographic perspective view; The MEMS electric field measurement module is fixed on the middle tube assembly and connected with the induction electrode, and the induction electrode inputs the electric charge to the MEMS electric field measurement module to obtain the atmospheric electric field value and measure the external electric field to know the size of the external electric field; The connector is connected with the MEMS electric field measurement module and fixed on the shell or the middle tube assembly to transmit the atmospheric electric field value.

2. The MEMS atmospheric electric field sensor of claim 1, wherein, The middle tube assembly is fixed in the cavity a and includes a middle tube, a polytetrafluoroethylene ring a and an outer tube fixing member fixed on the bottom end surface of the middle tube in sequence, wherein: The middle tube has a hollow cavity b formed in the interior, the MEMS electric field measurement module is fixed in the cavity b, and the cavity b is filled with an adhesive to fix the MEMS electric field measurement module; The polytetrafluoroethylene ring a is fixed on the bottom end surface of the middle tube; The outer tube fixing member is fixed on the bottom end surface of the polytetrafluoroethylene ring a, and one end of the MEMS electric field measurement module is connected with the outer tube fixing member through a communication assembly.

3. The MEMS atmospheric electric field sensor of claim 2, wherein, The induction electrode is a sheet-shaped electrode sheet fixed on the bottom end surface of the outer tube fixing member and facing the ground, wherein the edge of the electrode sheet does not contact the inner wall surface of the shell; When the electrode sheet induces the electric charge between the MEMS atmospheric electric field sensor and the ground, the electric charge is input to the MEMS electric field measurement module through the communication assembly to obtain the atmospheric electric field value, measure the external electric field and know the size of the external electric field.

4. The MEMS atmospheric electric field sensor according to claim 2 or 3, characterized in that, The communication assembly includes connected conductive wires and conductive components, wherein: When the MEMS electric field measurement module is vertically arranged in the cavity b, the end of the conductive wire is connected with the MEMS electric field measurement module, the top end of the conductive wire penetrates the middle tube and the polytetrafluoroethylene ring a in sequence, and then is connected with the induction electrode through the conductive components, the outer tube fixing member and the induction electrode to transmit the induced electric charge.

5. The MEMS atmospheric electric field sensor of claim 1, wherein, The middle tube assembly includes a middle tube, a support and a polytetrafluoroethylene ring b, wherein: The middle tube is connected with the shell through the polytetrafluoroethylene ring b, and the support is fixed on the top end of the middle tube; The MEMS electric field measurement module is fixed on the top of the support and connected with the induction electrode through a communication assembly.

6. The MEMS atmospheric electric field sensor of claim 5, wherein, The induction electrode is a ring-shaped electrode ring fixed on the bottom end surface of the polytetrafluoroethylene ring b and facing the ground, wherein the edge of the electrode ring does not contact the inner wall surface of the shell and the outer wall surface of the middle tube; When the electrode ring senses the charge between the MEMS atmospheric electric field sensor and the ground, the charge is input into the MEMS electric field measurement module through the communication assembly, the atmospheric electric field value is obtained, the measurement of the external electric field is realized, and the size of the external electric field is known.

7. The MEMS atmospheric electric field sensor according to claim 5 or 6, characterized in that, The communication assembly comprises a wire and a conductive component connected to each other, wherein: When the MEMS electric field measurement module is fixed horizontally on the support, the end of the wire is connected to the MEMS electric field measurement module, and the top end of the wire is connected to the sensing electrode through the conductive component to transmit the sensed charge.

8. The MEMS atmospheric electric field sensor of claim 1, wherein, The shell comprises a first shell and a second shell, at least a part of the sensing electrode is in the second shell, wherein the second shell is a horn structure.

9. An assembly method characterized by, The MEMS atmospheric electric field sensor of any one of claims 1 to 8 is assembled, comprising the following steps: The MEMS electric field measurement module is fixed inside or on top of the middle tube assembly and is fixed by an adhesive; The sensing electrode is fixed to a position facing the ground to sense the charge generated between the sensing electrode and the ground; The MEMS electric field measurement module is connected to the sensing electrode, and after the sensing electrode inputs the sensed charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained, the measurement of the external electric field is realized, and the size of the external electric field is known.

10. An atmospheric electric field meter characterized by The MEMS atmospheric electric field sensor of any one of claims 1 to 8, a connecting elbow, a main body, a solar panel and a control box are included, and the control box comprises a control module, wherein: The connecting elbow, the solar panel and the control box are fixed on the main body, one end of the MEMS atmospheric electric field sensor is connected to the connecting elbow, and the position facing the ground is used to sense the charge generated between the sensing electrode and the ground, and the electric field value obtained according to the charge is input into the control module, and when the analysis result of the atmospheric electric field value meets the preset condition, a warning is given.

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