Flow-equalizing developing solution nozzle device with circulating heat preservation water

Abstract

The invention relates to the technical field of semiconductor manufacturing equipment, solves the technical problems that a traditional developing solution nozzle is insufficient in temperature control, poor in flow uniformity and high in maintenance cost, and particularly relates to a flow-equalizing developing solution nozzle device with circulating heat preservation water. The heat-preservation water jacket interlayer assembly is used for isolating heat-preservation water and developing liquid and forming mutually independent flowing runners, and the heat-preservation water jacket interlayer assembly is used for compensating the temperature of the developing liquid in the circulating process of the heat-preservation water and maintaining the temperature within a preset range; the nozzle main body assembly is used for expanding a developing solution from a single-hole circulating flow channel to a horizontal space to form a plurality of flow-equalizing flow channels, and spraying the developing solution through the nozzle under the action of pressure. Real-time control of the circulating heat preservation water sleeve and the temperature controller is adopted, the temperature fluctuation of the developing solution is controlled within + / -0.1 DEG C, the deviation of the liquid outlet amount of each spray hole is smaller than or equal to + / -2%, the coverage rate of the developing solution to large-size wafers is increased, modular design is adopted, and the developing solution can be independently disassembled and cleaned through a quick disassembly structure, so that the maintenance time is shortened.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a developing liquid nozzle device integrated with a circulating heat preservation system and a flow uniformity control structure, which is suitable for precise spraying of developing liquid in a photolithography process. BACKGROUND

[0002] In a semiconductor photolithography process, the temperature stability and flow uniformity of developing liquid directly affect the precision of the photolithography pattern. The traditional developing liquid nozzle has defects of insufficient temperature control, poor flow uniformity, and high maintenance cost. Among them, the developing liquid is easily affected by environmental temperature fluctuations during transportation, resulting in unstable chemical reaction rate and causing pattern edge blur; in addition, the flow channel design of the multi-channel nozzle is unreasonable, and liquid output deviation of each nozzle hole is prone to occur, especially when spraying large-size wafers, the uniformity problem is more significant; and the temperature regulation module has low integration with the nozzle body, which requires additional pipeline connection, increasing the risk of leakage and disassembly complexity. SUMMARY

[0003] In view of the defects of the prior art, the present application provides a flow uniformity developing liquid nozzle device with circulating heat preservation water, which solves the technical problems of insufficient temperature control, poor flow uniformity, and high maintenance cost of the traditional developing liquid nozzle.

[0004] To solve the above technical problems, the present application provides the following technical scheme: a flow uniformity developing liquid nozzle device with circulating heat preservation water, comprising a temperature control system in communication with a liquid inlet module through a circulating pipeline, for automatically adjusting the outlet flow of the circulating water of the temperature controller, changing the flow rate of the heat preservation water to quickly compensate for the temperature of the developing liquid; A heat preservation water jacket sandwich assembly is arranged on one side of the liquid inlet module, the heat preservation water jacket sandwich assembly comprises a heat preservation sleeve in which a developing liquid pipeline is arranged, for isolating the heat preservation water and the developing liquid and forming a flow channel for mutual independent flow, compensating for the temperature of the developing liquid and maintaining it within a preset range during the circulation of the heat preservation water; A nozzle body assembly in communication with the heat preservation water jacket sandwich assembly, for expanding the single-hole flow channel of the developing liquid into a horizontal space to form a multi-flow channel for flow uniformity, and spraying the developing liquid out of the nozzle after being divided under the action of pressure.

[0005] Further, the liquid inlet module comprises a convergence block on which a convergence block is arranged for circulating flow of the heat preservation water from the heat preservation water inlet pipeline to the heat preservation water outlet pipeline, the inside of the convergence block is provided with two independent space channels, respectively for the space channel for the flow of the heat preservation water and the space channel for the passage of the developing liquid pipeline.

[0006] Further, the space channel for the developer solution pipeline is L-shaped, with one end connected to the developer solution inlet pipeline joint, the upper end connected to the heat preservation water inlet pipeline, and the other end connected to the first water inlet pipeline joint. The space channel for the developer solution pipeline is L-shaped, with one end connected to the developer solution inlet pipeline joint, the upper end connected to the heat preservation water inlet pipeline, and the other end connected to the first water inlet pipeline joint.

[0007] Further, the heat preservation water jacket sandwich assembly includes a water inlet heat preservation sleeve set on the developer solution pipeline, and a water return heat preservation sleeve in communication with the heat preservation water conversion block through the second water return pipeline joint. One end of the water inlet heat preservation sleeve is provided with a second water inlet pipeline joint and connected to the heat preservation water conversion block. The heat preservation water conversion block is internally provided with two communicating channels as the heat preservation water inlet and outlet conversion channels, and the bottom is reserved as a space for fixing the end of the developer solution pipeline. The end of the developer solution pipeline is provided with a separation joint and connected to the nozzle main body assembly to form a developer solution passage.

[0008] Further, the nozzle main body assembly includes an adapter mounted on the bottom of the heat preservation water conversion block, and a uniform flow nozzle connected to the adapter by a fastener and combined to form a flow separation groove. The flow separation groove is used to expand the developer solution flow channel of the single hole at the end of the developer solution pipeline into a long strip-shaped horizontal space, and is provided with a uniform flow piece with multiple flow holes opened on the surface, and the hole diameter gradually increases from the center to the edge. The flow separation groove is provided with a developer solution flow channel corresponding to the flow holes and in communication with the nozzle.

[0009] Further, one end of the adapter is provided as a hollow cylindrical end with a diameter slightly larger than the inner diameter of the developer solution pipeline. The cylindrical end of the hollow cylindrical end is chamfered as a conical shape for self-centering the end of the developer solution pipeline. The end of the developer solution pipeline is inserted into the hollow cylindrical end after high temperature baking.

[0010] Further, the lower end of the hollow cylindrical end is provided with threads for connecting the separation joint, tightly fixing the end of the developer solution pipeline on the adapter, forming a flow channel for the developer solution from the inside, and isolating the heat preservation water from the outside. The other end is provided with a sealing member and fixed on the heat preservation water conversion block.

[0011] Further, the number of sealing members is one, including a first sealing ring provided at the connection between the uniform flow piece and the flow separation groove, a second sealing ring provided at the connection between the adapter and the uniform flow nozzle, and a third sealing ring provided at the connection between the adapter and the heat preservation water conversion block.

[0012] Further, the temperature control system includes a temperature sensor installed on the heat preservation water conversion block, which directly contacts the heat preservation water outside the developer solution pipeline and collects real-time temperature.

[0013] By the above technical solution, the application provides a uniform flow developing liquid nozzle device with circulating heat preservation water, which has at least the following beneficial effects: The temperature stability is significantly improved: The real-time control of the circulating heat preservation water jacket and the temperature controller makes the developing liquid temperature fluctuation controlled within ±0.1℃, which is 50% higher than the traditional developing liquid nozzle; and the closed circulation mode can reduce heat loss, and the energy consumption is reduced by 30% compared with the external temperature control pipeline.

[0014] The flow uniformity is optimized: The three-level control of the shunt groove, the flow uniformity sheet and the flow uniformity nozzle makes the liquid amount deviation of each nozzle hole ≤±2%, and the developing liquid coverage rate of the surface of a large-size wafer (such as 12 inches) is improved from 92% to 98%; and the laminar flow design reduces droplet splashing, and the photolithography pattern line width error is reduced from ±5% to ±2%.

[0015] The maintenance convenience is enhanced: The integrated interface reduces the pipeline connection points, and the leakage risk is reduced by 70%; among them, the structure realizing the flow uniformity of the developing liquid is designed in a modular manner, and can be individually disassembled and cleaned through the quick release structure, and the maintenance time is shortened from 2 hours to 40 minutes. BRIEF DESCRIPTION OF DRAWINGS

[0016] The drawings described herein are used to provide further understanding of the present application, and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings: Figure 1 It is a structural schematic view of the flow uniformity developing liquid nozzle device of the present application; Figure 2 It is a structural schematic view of the liquid inlet module of the present application; Figure 3 It is a structural schematic view of the heat preservation water jacket sandwich assembly of the present application; Figure 4 It is a sectional view of the heat preservation water jacket sandwich assembly of the present application; Figure 5 It is a sectional view of the nozzle main body assembly of the present application; Figure 6 It is a partial detail sectional view of the nozzle main body assembly of the present application; Figure 7 It is a structural schematic view of the flow uniformity nozzle of the present application; Figure 8 It is a structural schematic view of the flow uniformity sheet of the present application.

[0017] In the drawings: 1, liquid inlet module; 11, flow block; 12, developer inlet pipeline joint; 13, heat preservation water inlet pipeline; 14, double-layer pipeline joint; 141, first water inlet pipeline joint; 142, first water return pipeline joint; 143, second water inlet pipeline joint; 144, second water return pipeline joint; 15, heat preservation water outlet pipeline; 2, heat preservation water jacket sandwich assembly; 21, developer pipeline; 22, heat preservation sleeve; 221, water inlet heat preservation sleeve; 222, water return heat preservation sleeve; 23, heat preservation water conversion block; 24, separation joint; 3, nozzle main body assembly; 31, adapter; 32, flow distribution groove; 33, flow equalization piece; 34, flow equalization nozzle; 35, fastener; 36, sealing element; 361, first sealing ring; 362, second sealing ring; 363, third sealing ring; 37, developer flow channel; 38, flow distribution hole; 4, temperature control system; 41, temperature sensor. DETAILED DESCRIPTION

[0018] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application will be further described in detail below with reference to the drawings and specific embodiments. The realization process of how to apply technical means to solve technical problems and achieve technical effects can be fully understood and implemented by the present application.

[0019] Please refer to Figures 1-8 The embodiment provides a flow-equalizing developer nozzle device with circulating heat preservation water, which comprises a temperature control system 4 in communication with a liquid inlet module 1 through a circulating pipeline, which is used for automatically adjusting the water flow of the temperature controller circulating water, changing the flow rate of the heat preservation water, and quickly compensating the temperature of the developer.

[0020] The heat preservation water jacket sandwich assembly 2 is arranged on one side of the liquid inlet module 1, and the heat preservation water jacket sandwich assembly 2 comprises a heat preservation sleeve 22 in which a developer pipeline 21 is sleeved, so as to isolate the heat preservation water and the developer and form flow channels independent of each other, compensate the temperature of the developer in the process of circulating the heat preservation water, and maintain the temperature in a preset range. The nozzle main body assembly 3 in communication with the heat preservation water jacket sandwich assembly 2 is used to expand the single-hole flow channel of the developer into a horizontal space to form a multi-flow channel for flow equalization, and is sprayed out through the nozzle after being distributed under the action of pressure.

[0021] In the embodiment, the liquid inlet module 1 comprises a flow block 11 on which a heat preservation water inlet pipeline 13 and a heat preservation water outlet pipeline 15 are arranged to finally circulate the heat preservation water, and the flow block 11 is internally provided with two independent space channels, which are respectively a space channel for the heat preservation water to flow through and a space channel for the developer pipeline 21 to pass through.

[0022] The space channel for the circulating water is in the shape of the Chinese character "L", one end is connected with the developing solution inlet pipe joint 12, the upper end is connected with the circulating water inlet pipe 13, and the other end is connected with the first water inlet pipe joint 141 which is hollow to allow the developing solution pipe 21 to pass through.

[0023] The space channel for the developing solution pipe 21 is in the shape of "L", the upper end is connected with the circulating water outlet pipe 15, and the horizontal end is connected with the first water return pipe joint 142 which is hollow inside and does not pass through the developing solution pipe 21.

[0024] In this embodiment, the inside of the confluence block 1 is actually a space channel for the circulating water and a space channel for the developing solution pipe 21 to pass through, which can be made of corrosion-resistant materials such as stainless steel or PP. Two independent space channels are designed inside, one is in the shape of the Chinese character "L", one end is connected with the developing solution inlet pipe joint 12, the upper end is connected with the circulating water inlet pipe 13, and the other end is connected with the first water inlet pipe joint 141 which is hollow to allow the developing solution pipe 21 to pass through; the other is in the shape of "L", the upper end is connected with the circulating water outlet pipe 15, and the horizontal end is connected with the first water return pipe joint 142 which is hollow inside. The developing solution inlet pipe joint 12 needs to be designed like a sleeve joint, and a PTFE sleeve is locked on the outer diameter of the developing solution pipe 21 to make the developing solution pipe 21 pass through the confluence block 11 as a whole, enter the inside of the heat preservation sleeve 22 and realize sealed isolation with the circulating water. The circulating water inlet pipe 13 and the circulating water outlet pipe 15 can use soft PVC water pipes and stainless steel embedded pipe joints to realize the connection with the water inlet and outlet of the temperature control system 4, forming a closed circulation loop.

[0025] Among them, the number of double-layer pipe joints 14 used in the embodiment of the present application is 4, which are respectively Figure 3 The first water inlet pipe joint 141, the first water return pipe joint 142, the second water inlet pipe joint 143 and the second water return pipe joint 144 in the double-layer pipe joint 14 are used to connect the inlet water heat preservation sleeve 221 and the return water heat preservation sleeve 222 respectively with the confluence block 11 and the circulating water conversion block 23. In addition, a flow sensor or controller can also be arranged on the developing solution pipe 21 to realize accurate display or control of the total flow of the developing solution.

[0026] The heat preservation water jacket sandwich assembly 2 comprises an inlet water heat preservation jacket 221 sleeved on the developing liquid pipeline 21, and a return water heat preservation jacket 222 communicated with the heat preservation water conversion block 23 through the second return water pipeline joint 144. One end of the inlet water heat preservation jacket 221 is provided with the second inlet water pipeline joint 143 and connected to the heat preservation water conversion block 23. The heat preservation water conversion block 23 is internally provided with two communicating channels as the channels for the heat preservation water in and out conversion, and the bottom is reserved as the end fixing of the developing liquid pipeline 21. The end of the developing liquid pipeline 21 is provided with the separation joint 24 and connected to the nozzle body assembly 3 to form the developing liquid passage.

[0027] In the embodiment, due to the physical and chemical property characteristics of the developing liquid, the developing liquid pipeline 21 can use high-purity PFA formed tube, and the size is selected according to the flow requirement. The inlet water heat preservation jacket 221 and the return water heat preservation jacket 222 use the scheme of PFA spiral corrugated pipe, so that the circulating heat preservation water spirally flows at a flow rate of 0.2-0.5 m / s, the heat exchange efficiency is enhanced, and the length is matched according to the developing liquid ejection amount to ensure that the developing liquid in the heat preservation is sufficient for the sum of 1-2 times of ejection amount. The structure of the heat preservation water conversion block 23 is two internally communicating channels as the channels for the heat preservation water in and out conversion, and the bottom is reserved as the end fixing of the developing liquid pipeline 21, which can be processed and formed by using corrosion-resistant materials such as stainless steel or PP. The separation joint 24 separates the developing liquid pipeline 21 from the heat preservation water and realizes the butt joint with the next stage nozzle body assembly 3.

[0028] In the embodiment, the nozzle body assembly 3 comprises the adapter 31 mounted on the bottom of the heat preservation water conversion block 23, and the flow uniformizing nozzle 34 connected with the adapter 31 through the fastener 35 and combined to constitute the flow distribution groove 32. The flow distribution groove 32 is used for expanding the developing liquid flow channel of the single hole at the end of the developing liquid pipeline 21 into a long strip-shaped horizontal space, and the flow uniformizing piece 33 with a plurality of flow distribution holes 38 opened on the surface and gradually increasing in hole diameter from the center to the edge is mounted in the flow distribution groove 32. The developing liquid flow channel 37 corresponding to the flow distribution hole 38 and communicated with the nozzle is arranged in the flow distribution groove 32.

[0029] The adapter 31 is provided with a hollow cylindrical end slightly larger in diameter than the inner diameter of the developing liquid pipeline 21 at one end, and the cylindrical end of the hollow cylindrical end is chamfered into a conical shape for self-centering the end of the developing liquid pipeline 21. The end of the developing liquid pipeline 21 is inserted into the hollow cylindrical end after high-temperature baking. The lower end of the hollow cylindrical end is provided with a thread for connecting the separation joint 24, and the end of the developing liquid pipeline 21 is tightly fixed on the adapter 31 to form the developing liquid flow channel from the inside and isolate the heat preservation water from the outside. The other end is provided with the sealing member 36 and fixed on the heat preservation water conversion block 23.

[0030] In the embodiment, the number of the sealing members 36 is set to three, including a first sealing ring 361 arranged at the connecting position of the flow equalizing sheet 33 and the flow distribution groove 32, a second sealing ring 362 arranged at the connecting position of the adapter 31 and the flow equalizing nozzle 34, and a third sealing ring 363 arranged at the connecting position of the adapter 31 and the heat preservation water conversion block 23.

[0031] In the embodiment, the flow distribution groove 32 expands the single-hole developing solution flow channel into a long strip-shaped horizontal space. The flow equalizing sheet 33 is long strip-shaped, and 6-8 flow distribution holes 38 are arranged on the surface of the flow equalizing sheet 33. The hole diameter gradually increases from the center to the edge, and the increasing range is between 1-2 mm, so that the developing solution is uniformly diffused to the developing solution flow channel 37, and finally sprayed out through the nozzle. The nozzle adopts a multi-hole array design, and each hole ensures that the size of each spray hole is uniform and has a small deviation, the surface roughness of the inner cavity is small, the surface roughness R a is 0.4-0.8, and there is no burr and the flow rate is consistent. All the components through which the developing solution flows are designed and manufactured by using high-purity PFA, and the sealing rings between the components are made of FFKM material.

[0032] In the embodiment, the temperature control system 4 includes a temperature sensor 41 installed on the heat preservation water conversion block 23. The PT100 precision temperature sensor 41 is arranged in a stainless steel shell, directly contacts the heat preservation water outside the developing solution pipeline 21, and requires a temperature accuracy of not less than ±0.1℃. The temperature of the heat preservation water (i.e. the developing solution) is collected in real time, and communicated with the temperature controller. When the deviation exceeds ±0.1℃, the PID controller automatically adjusts the water flow of the temperature controller circulating water to change the flow rate of the heat preservation water to quickly compensate the temperature of the developing solution.

[0033] Each of the embodiments in the specification is described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts of each embodiment can be referred to each other. For each of the above embodiments, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant part can be referred to the part of the method embodiment.

[0034] The above embodiments have been described in detail, and the principles and implementation manners of the present application have been described by using specific examples. The above embodiment is only used to help understand the method and core idea of the present application; meanwhile, for those skilled in the art, the specific implementation manner and application range can be changed according to the idea of the present application. In summary, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A uniform developer spray nozzle device with circulating heat water, characterized by, The utility model relates to a kind of temperature compensation devices for developing solution, including: Temperature control system (4) is communicated with liquid inlet module (1) by circulation pipeline, for automatically adjusting the water flow of temperature controller circulating water, change the temperature of heat preservation water flow to quickly compensate the temperature of developing solution; Heat preservation jacket sandwich component (2) is arranged on the side of liquid inlet module (1), the heat preservation jacket sandwich component (2) includes heat preservation sleeve (22) with developing solution pipeline (21) in it, to isolate heat preservation water and developing solution and form the flow passage of independent flow, compensate the temperature of developing solution in the process of heat preservation water circulation and maintain in preset range; Nozzle main component (3) is communicated with heat preservation jacket sandwich component (2), to expand the flow passage of single-hole flow by developing solution into horizontal space and form the multiple flow passages of uniform flow, and spray after shunting under the action of pressure through nozzle.

2. The equalizer developer nozzle apparatus of claim 1, wherein The liquid inlet module (1) includes the flow block (11) for heat preservation water to be circulated finally from heat preservation water inlet pipeline (13) to heat preservation water outlet pipeline (15), and the inside of the flow block (11) is provided with two independent space channels, respectively for heat preservation water and developing solution pipeline (21) to pass through.

3. The equalizer developer nozzle apparatus of claim 2, wherein, The space channel for heat preservation water is Z-shaped, one end is connected with developing solution inlet pipeline connector (12), the upper end is connected with heat preservation water inlet pipeline (13), and the other end is connected with first water inlet pipeline connector (141), and the first water inlet pipeline connector (141) is hollow to allow developing solution pipeline (21) to pass through; The space channel for developing solution pipeline (21) to pass through is L-shaped, the upper end is connected with heat preservation water outlet pipeline (15), and the horizontal end is connected with first water return pipeline connector (142), and the inside of the first water return pipeline connector (142) is hollow and without developing solution pipeline (21) to pass through.

4. The equalizer developer nozzle apparatus of claim 1, wherein The heat preservation jacket sandwich component (2) includes water inlet heat preservation sleeve (221) sleeved on developing solution pipeline (21), and water return heat preservation sleeve (222) communicated with heat preservation water conversion block (23) through second water return pipeline connector (144), one end of the water inlet heat preservation sleeve (221) is provided with second water inlet pipeline connector (143) and connected to heat preservation water conversion block (23), the inside of the heat preservation water conversion block (23) is provided with two communicating channels as heat preservation water inlet and outlet conversion channels, and the bottom is reserved space as the end of developing solution pipeline (21) is fixed, and the end of the developing solution pipeline (21) is provided with separation connector (24) and connected to nozzle main component (3) to form developing solution passage.

5. The equalizer developer nozzle apparatus of claim 1, wherein, The nozzle body assembly (3) comprises an adapter (31) installed at the bottom of the heat preservation water conversion block (23), and a flow equalizing nozzle (34) connected with the adapter (31) by a fastener (35) and combined to form a flow separation groove (32), the flow separation groove (32) is used to expand the single-hole developing liquid flow channel at the end of the developing liquid pipeline (21) into a long strip-shaped horizontal space, and a flow equalizing sheet (33) with a plurality of flow separation holes (38) opened on the surface and gradually increasing in diameter from the center to the edge is installed in the flow separation groove (32), and a developing liquid flow channel (37) corresponding to the flow separation holes (38) and communicating with the nozzle is arranged in the flow separation groove (32).

6. The equalizer developer nozzle apparatus of claim 5, wherein, The adapter (31) is provided with a hollow cylindrical end slightly larger in diameter than the inner diameter of the developing liquid pipeline (21) at one end, and the cylindrical end of the hollow cylindrical end is chamfered into a conical shape for self-centering the end of the developing liquid pipeline (21), and the end of the developing liquid pipeline (21) is inserted into the hollow cylindrical end after high-temperature baking.

7. The equalizer developer nozzle apparatus of claim 6, wherein The lower end of the hollow cylindrical end is provided with threads for connecting the separation joint (24) and tightly fixing the end of the developing liquid pipeline (21) on the adapter (31), forming a developing liquid flow channel from the inside and isolating the heat preservation water from the outside, and the other end is provided with a sealing member (36) and fixed on the heat preservation water conversion block (23).

8. The equalizer developer nozzle apparatus of claim 1, wherein, The temperature control system (4) comprises a temperature sensor (41) installed on the heat preservation water conversion block (23), and the temperature sensor (41) directly contacts the heat preservation water outside the developing liquid pipeline (21) and collects real-time temperature.

Images