Paraffin fixing jig and fixing method thereof

Abstract

The application provides a paraffin wax fixing jig and a fixing method thereof, and relates to the technical field of semiconductors and photovoltaics. The paraffin wax fixing jig comprises a loading platform, a flow adjusting assembly, a temperature adjusting assembly, a vibration assembly and a control assembly. The loading platform comprises a first recess and a second recess. The first side wall of the first recess is provided with a flow guide channel in communication with the second recess. The part of the first side wall facing the second recess and the second side wall enclose the second recess. The first recess is higher than the second recess in the vertical direction. The control assembly is electrically connected with the flow adjusting assembly, the temperature adjusting assembly and the vibration assembly respectively. Since the flow of the paraffin wax, the solid-liquid conversion and the taking and placing of the workpiece to be processed are dynamically adjusted by the control assembly on the flow adjusting assembly, the temperature adjusting assembly and the vibration assembly respectively, the paraffin wax fixing jig and the fixing method thereof can improve the flatness of the fixing, the processing precision and the processing efficiency.

Description

Technical Field

[0001] This application relates to the fields of semiconductor and photovoltaic technology, and specifically to a paraffin wax fixing fixture and its fixing method. Background Technology

[0002] With the development of semiconductor and photovoltaic technologies, the wafer fabrication process involves steps such as surface polishing, etching, and ion implantation of silicon carbide workpieces. As wafers become larger and thinner, paraffin wax is used for bonding and fixing to prevent damage. However, paraffin wax has a long solid-liquid transition time, and when operated manually, the flatness of the paraffin wax cannot be guaranteed each time the wafer is fixed, easily leading to stress concentration on the wafer support, which in turn affects the wafer processing accuracy and efficiency. Summary of the Invention

[0003] In view of this, this application provides a paraffin wax fixing fixture and its fixing method, which solves the problem of not being able to simultaneously improve the flatness, processing accuracy and processing efficiency of the fixing.

[0004] In a first aspect, one embodiment of this application provides a paraffin wax fixing fixture, comprising: a stage, including a first recess and a second recess arranged adjacent to each other along a first direction, the first recess and the second recess being configured to accommodate paraffin wax, a first sidewall surrounding the first recess having a flow channel communicating with the second recess, the portion of the first sidewall facing the second recess and the second sidewall surrounding the second recess forming the second recess, the first recess being higher than the second recess in the vertical direction; a flow rate regulating component, disposed at the position of the flow channel corresponding to the stage, the flow rate regulating component being able to regulate the flow rate of liquid paraffin wax from the first recess into the second recess, so that the liquid paraffin wax is filled into the second recess; a temperature regulating component, disposed on the stage, the temperature regulating component being able to regulate the temperature in the first recess and the second recess respectively, so that the paraffin wax transforms between a solid and a liquid state; vibration; A vibration component, connected to a stage, is configured to cause the stage to vibrate when liquid paraffin is introduced into the second recess, so that the liquid paraffin is uniformly filled into the second recess. A control component, electrically connected to a flow regulating component, a temperature regulating component, and a vibration component, is configured to control the temperature regulating component to heat the paraffin in at least one of the first and second recesses and maintain it at a first preset temperature or to cool it and maintain it at a second preset temperature, wherein the first preheating temperature is greater than the second preset temperature. The control component is also configured to control the flow regulating component to connect the guide channel and introduce a preset amount of liquid paraffin into the second recess, wherein the preset amount is greater than the volume of the second recess. The control component is further configured to control the vibration component to cause the stage to vibrate, so that the second recess is filled with paraffin, and the workpiece is fixed by the paraffin in the second recess.

[0005] In conjunction with the first aspect of this application, in some embodiments, the bottom wall of the first recess is higher than the bottom wall of the second recess in the vertical direction, and the height of the first sidewall is higher than the height of the second sidewall, the height of the second sidewall being 0.1 mm.

[0006] In conjunction with the first aspect of this application, in some embodiments, the bottom wall of the second recess is provided with a plurality of guide grooves, at least a portion of which extend to the side wall of the second recess. The plurality of guide grooves are arranged intersectingly along a first direction and a second direction to form an interconnected grid structure, wherein the first direction and the second direction intersect.

[0007] In conjunction with the first aspect of this application, in some embodiments, a height detection element is further included, disposed on the second sidewall. The height detection element is electrically connected to the control component. During the process of liquid paraffin being introduced into the second recess through the guide channel, the height detection element generates a warning signal when it detects that the liquid paraffin at any position in the second recess is higher than the upper surface of the second sidewall in the vertical direction. The control component controls the flow regulating component to close the guide channel according to the warning signal.

[0008] In conjunction with the first aspect of this application, in some embodiments, the flow regulating component includes: a flow regulating valve disposed in a flow channel, electrically connected to a control component, the flow regulating valve being configured to regulate the flow rate of liquid paraffin from a first recess to a second recess; a flow detection element disposed in the flow channel, electrically connected to the control component, the flow detection element being configured to detect the flow rate of liquid paraffin passing through the flow channel; and / or, the temperature regulating component includes: a heating component disposed on a stage, the heating component being arranged below the first recess and below the second recess, the heating component being configured to heat the paraffin in at least one of the first recess and the second recess and maintain it at a first preset temperature, the first preset temperature being 2°C-10°C higher than the melting point of the paraffin; a cooling component disposed on the stage, the cooling component being arranged below the first recess and below the second recess, the cooling component being electrically connected to the control component and configured to regulate the flow rate of liquid paraffin from a first recess to a second recess; and / or, a temperature regulating component including: a heating component disposed on a stage, the cooling component being arranged below the first recess and below the second recess, the cooling component being electrically connected to the control component and configured to detect the flow rate of liquid paraffin passing through the flow channel; and / or, a temperature regulating component including: a heating component disposed on a stage, the heating component being arranged below the first recess and below the second recess, the heating component being configured to heat the paraffin in at least one of the first recess and the second recess and maintain it at a first preset temperature, the first preset temperature being 2°C-10°C higher than the melting point of the paraffin; and a cooling component disposed on a stage, the cooling component being arranged below the first recess and below the second recess, the cooling component being electrically connected to the control component and configured to regulate the flow rate of liquid paraffin passing through the flow channel; and / or, a temperature regulating component including: a heating component disposed on a stage, the heating component being arranged below the first recess and below the second recess, the heating component being configured to heat the paraffin in at least one of the first recess and the second recess and maintain it at a first preset temperature, the first preset temperature being 2° The heating component is non-interfering, and the cooling component is configured to cool the paraffin in at least one of the first and second recesses and maintain it at a second preset temperature; a temperature detection component is disposed on the stage and is configured to detect the temperature of the paraffin in the first and / or second recesses; the temperature detection component, heating component, and cooling component are electrically connected to a control component, and the control component is configured to dynamically adjust the heating temperature of the heating component or the cooling temperature of the cooling component according to the temperature detected by the temperature detection component; and / or, the vibration component includes: a vibrating element connected to the stage, the vibrating element being capable of driving the stage to vibrate; an acceleration sensor is disposed on the stage and is configured to detect the amplitude and frequency of the stage; the vibrating element and the acceleration sensor are electrically connected to the control component, and the control component is configured to dynamically adjust the vibration and frequency of the stage according to the temperature of the paraffin in the second recess and the amplitude and frequency detected by the acceleration sensor.

[0009] In conjunction with the first aspect of this application, in some embodiments, the stage further includes a third recess arranged around the outer periphery of the second sidewall, the third recess being lower than the second recess in the vertical direction, the third recess being configured to contain liquid paraffin overflowing from the second recess during the vibration of the vibration assembly during the process of introducing a preset amount of liquid paraffin into the second recess, and the temperature regulating assembly being able to regulate the temperature of the paraffin in the third recess.

[0010] In conjunction with the first aspect of this application, in some embodiments, the stage further includes a recovery tank disposed in a first direction on the side of the second recess away from the first recess, and a portion of the third recess is located between the recovery tank and the second recess. The recovery tank is lower than the third recess in the vertical direction, and a one-way valve is provided between the third recess and the recovery tank to allow liquid paraffin in the third recess to flow into the recovery tank.

[0011] Secondly, one embodiment of this application provides a method for fixing a paraffin wax fixing fixture, configured to fix a workpiece to be processed. The paraffin wax fixing fixture includes a stage, a flow regulating component, a temperature regulating component, a vibration component, and a control component. The stage includes a first recess and a second recess, with a flow channel between the first and second recesses. The first recess is vertically higher than the second recess. The fixing method includes: when solid paraffin wax is contained in the first recess, the control component controls the temperature regulating component to heat the first and second recesses, maintaining the paraffin wax at a first preset temperature to form... Liquid paraffin is formed; the control component controls the flow regulating component to open the guide channel so that the liquid paraffin in the first recess is introduced into the first recess. After reaching a preset amount, the flow regulating component closes the guide channel, wherein the preset amount is greater than the volume of the second recess; the control component controls the vibration component to operate so that the liquid paraffin is evenly filled into the second recess; the workpiece to be processed is placed on the upper surface of the liquid paraffin in the second recess; the control component controls the temperature regulating component to cool down the liquid paraffin in the second recess and maintain it at a second preset temperature. The cooled solid paraffin fixes the workpiece to be processed.

[0012] In conjunction with the second aspect of this application, in some embodiments, the paraffin wax fixing fixture further includes a height detection element. During the process of liquid paraffin wax being introduced into the second recess through the flow channel, the fixing method further includes: the height detection element detecting the height of the liquid paraffin wax in the second recess; generating a warning signal when it is detected that the liquid paraffin wax at any position in the second recess is higher than the upper surface of the second sidewall in the vertical direction; and controlling the flow regulating component to close the flow channel according to the warning signal.

[0013] In conjunction with the second aspect of this application, in some embodiments, the flow regulating component includes a flow regulating valve and a flow detection element; the temperature regulating component includes a heating component, a cooling component, and a temperature detection component; the vibration component includes a vibration element and an acceleration sensor; and the method for fixing the paraffin wax fixture specifically includes: when solid paraffin wax is contained in the first recess, the control component controls the heating component to heat the first and second recesses to a specific temperature; the temperature detection component detects the temperature of the paraffin wax to melt the paraffin wax and maintain it at a first preset temperature, the first preset temperature being 2°C-10°C higher than the melting point of the paraffin wax; the control component controls the heating component to heat the first and second recesses to a specific temperature. The component controls the flow regulating valve to open the guide channel, and the flow detection component detects the flow rate of the opened guide channel. After reaching the preset amount, the control component controls the flow regulating valve to close. The control component controls the vibration component to move, and the acceleration sensor detects the vibration amplitude and frequency of the platform. The control component dynamically adjusts the vibration amplitude and frequency according to the melting point of the paraffin and the degree of opening of the flow regulating valve. The workpiece to be processed is placed on the upper surface of the liquid paraffin in the second recess. The control component controls the cooling component to cool at least the liquid paraffin in the second recess and maintain it at the second preset temperature. The cooled solid paraffin fixes the workpiece to be processed.

[0014] The paraffin wax fixing fixture provided in this application embodiment, through the first and second recesses set on the platform and the guide channel connecting the first and second recesses, enables the control component to dynamically adjust the flow regulating component to control the amount of liquid paraffin introduced into the second recess each time a workpiece needs to be fixed, dynamically adjust the temperature regulating component to control the heating and / or cooling temperature of the first and / or second recesses, so as to adjust the temperature of the corresponding paraffin wax and maintain it at the required preset temperature, and dynamically adjust the vibration component to control the vibration of the platform, so that the paraffin wax can quickly and evenly fill the second recess, thereby improving the flatness of the paraffin wax surface, avoiding stress concentration on the fixed workpiece, and thus improving the processing accuracy and processing efficiency of the workpiece.

[0015] In addition, by integrating flow regulation components, temperature regulation components, vibration components and control components on the paraffin fixing fixture, multiple functions such as control, paraffin solid-liquid conversion, vibration, and directional flow are integrated, which has a high degree of integration, reduces the footprint, and lowers the cost. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1The diagram shown is a schematic diagram of a paraffin fixation fixture provided in an embodiment of this application.

[0018] Figure 2 The image shown is a side cross-sectional view of a paraffin fixation fixture provided in an embodiment of this application.

[0019] Figure 3 The image shown is a top cross-sectional view of a paraffin fixation fixture provided in an embodiment of this application.

[0020] Figure 4 The image shown is a top cross-sectional view of a paraffin fixation fixture provided in another embodiment of this application.

[0021] Figure 5 The diagram shown is a flowchart of a fixing method provided in an embodiment of this application.

[0022] Figure 6 The diagram shown is a flowchart of a fixing method provided in another embodiment of this application. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0024] Figure 1 The diagram shown is a schematic diagram of a paraffin fixation fixture provided in an embodiment of this application. Figure 2 The image shown is a side cross-sectional view of a paraffin fixation fixture provided in an embodiment of this application. Figure 3 The image shown is a top cross-sectional view of a paraffin fixation fixture provided in an embodiment of this application. Figure 4 The image shown is a top cross-sectional view of a paraffin fixation fixture provided in another embodiment of this application. Arrow X points to the first direction, arrow Y points to the second direction, and arrow Z points to the vertical direction. The first direction X, the second direction Y, and the vertical direction Z intersect each other. In this embodiment, the first direction X, the second direction Y, and the vertical direction Z are mutually perpendicular, which will not be emphasized separately thereafter.

[0025] This application provides a paraffin wax fixing fixture for fixing a workpiece to be processed. Figures 1 to 4The paraffin wax fixing fixture includes a platform 1. The platform 1 includes a first recess 11 and a second recess 12 arranged adjacent to each other along a first direction X. The first recess 11 and the second recess 12 are configured to contain paraffin wax. A first sidewall 112 surrounding the first recess 11 is provided with a guide channel 111 communicating with the second recess 12. The portion of the first sidewall 112 facing the second recess 12 and the second sidewall 121 surround the second recess 12. The first recess 11 is higher than the second recess 12 in the vertical direction Z. The first recess 11 is used to hold solid paraffin wax, and the guide channel 111 is used to guide the molten liquid paraffin wax in the first recess 11 into the second recess 12. The second recess 12 is used to hold the paraffin wax introduced through the guide channel 111, so that the workpiece to be processed is fixed or released in the position of the second recess 12.

[0026] Optionally, the workpiece to be processed can be a wafer, and a paraffin wax fixing fixture is used to fix the wafer for grinding, polishing, and other processing of the wafer surface. It is understood that the dimensions of the second recess 12 can be adaptively adjusted according to the dimensions of the wafer to be fixed, and are not specifically limited.

[0027] The paraffin wax fixing fixture also includes a flow rate regulating component 2, a temperature regulating component 3, a vibration component 4, and a control component 5. The flow rate regulating component 2 is located at the corresponding guide channel 111 position on the stage 1. The flow rate regulating component 2 can regulate the flow rate of liquid paraffin from the first recess 11 into the second recess 12, so that the liquid paraffin is filled into the second recess 12. The temperature regulating component 3 is located on the stage 1. The temperature regulating component 3 can adjust the temperature in the first recess 11 and the second recess 12 respectively, so that the paraffin wax changes between solid and liquid states. The vibration component 4 is connected to the stage 1. When liquid paraffin is introduced into the second recess 12, the vibration component 4 can cause the stage 1 to vibrate, so that the liquid paraffin is evenly filled into the second recess 12. The control component 5 is electrically connected to the flow regulating component 2, the temperature regulating component 3, and the vibration component 4 respectively. The control component 5 is configured to control the temperature regulating component 3 to heat the paraffin wax in at least one of the first recess 11 and the second recess 12 and maintain it at a first preset temperature or to cool it down and maintain it at a second preset temperature, wherein the first preheating temperature is greater than the second preset temperature. It is also configured to control the flow regulating component 2 to connect the guide channel 111 and introduce a preset amount of liquid paraffin wax into the second recess 12, wherein the preset amount is greater than the volume of the second recess 12. Furthermore, it is configured to control the vibration component 4 to cause the stage 1 to vibrate so that the second recess 12 is filled with paraffin wax and the workpiece is fixed by the paraffin wax in the second recess 12.

[0028] The paraffin wax fixing fixture provided in this application embodiment, through the first recess 11 and the second recess 12 provided on the stage 1, and the guide channel 111 connecting the first recess 11 and the second recess 12, enables the control component 5 to dynamically adjust the flow regulating component 2 to control the amount of liquid paraffin introduced into the second recess 12 each time a workpiece needs to be fixed, dynamically adjust the temperature regulating component 3 to control the heating and / or cooling temperature of the first recess 11 and / or the second recess 12 to adjust the temperature of the corresponding paraffin wax and maintain it at the required preset temperature, and dynamically adjust the vibration component 4 to control the vibration of the stage 1, so that the paraffin wax can quickly and evenly fill the second recess 12, thereby improving the flatness of the paraffin wax surface, avoiding stress concentration on the fixed workpiece, and thus improving the processing accuracy and processing efficiency of the workpiece.

[0029] In addition, by integrating the flow regulation component 2, temperature regulation component 3, vibration component 4 and control component 5 on the paraffin fixing fixture, multiple functions such as control, paraffin solid-liquid conversion, vibration and directional flow are integrated, which has a high degree of integration, reduces the footprint and lowers the cost.

[0030] Optionally, paraffin wax has a melting point. Depending on the specific type of paraffin wax used, the melting point will vary, including 80℃, 90℃, 100℃, etc. It can be matched according to the specific type selected, without specific limitations.

[0031] Optionally, the first preset temperature is 2℃-10℃ higher than the melting point of paraffin wax. The first preset temperature is the temperature of the paraffin wax after heating. To make the paraffin wax reach the first preset temperature, the temperature at which the temperature regulating component 3 heats the corresponding depression is higher than the first preheating temperature, generally 2℃-5℃ higher, to avoid the paraffin wax not melting completely. The second preset temperature can be set at around 40℃ to avoid the paraffin wax not solidifying completely in some areas; this will not be described in detail.

[0032] It is understood that control component 5 may include controller, processor, display instrument, etc. The calculation module in control component 5 uses fuzzy control algorithm to dynamically adjust the electrically connected components to improve the response rate and control accuracy, which will not be described in detail.

[0033] In some alternative embodiments, along the vertical direction Z, the bottom wall of the first recess 11 is higher than the bottom wall of the second recess 12, and the height of the first sidewall 112 is higher than the height of the second sidewall 121, with the height of the second sidewall 121 being 0.1 mm. This height difference between the first recess 11 and the second recess 12 ensures that sufficient liquid paraffin can flow into the second recess 12 when the flow channel 111 is open. Furthermore, setting the height of the second sidewall 121 to 0.1 mm helps improve the flatness of the paraffin and avoids excessive height affecting the placement of the workpiece, preventing the workpiece from seeping into the liquid paraffin and affecting subsequent processing.

[0034] It is understandable that the height of the second sidewall 121 is allowed to have a certain error and is not specifically limited.

[0035] In some alternative embodiments, the bottom wall of the second recess 12 is provided with a plurality of flow channels 122, at least a portion of which extend to the side wall of the second recess 12. The plurality of flow channels 122 are arranged intersectingly along the first direction X and the second direction Y to form an interconnected grid structure. The flow channels 122 allow the liquid paraffin entering the second recess 12 to quickly disperse and flow to various areas, thereby improving the flow rate.

[0036] Optionally, the flow channel 111 is located at the middle position of the first sidewall 112 in the second direction Y, so that the liquid paraffin introduced into the second recess 12 through the flow channel 111 can be more quickly dispersed and flowed to the first sidewall 112 in all directions. The shape, size, etc. of the flow channel 111 can be adaptively adjusted according to actual needs and are not specifically limited.

[0037] It is understood that the size and depth of the guide channel 122, as well as the shape of the cross arrangement of multiple guide channels 122, can be adaptively adjusted according to actual needs and are not specifically limited. Optionally, the depth of the guide channel 122 extending from the guide channel 111 to each second sidewall 121 can be gradually increased to form a corresponding tilt angle, thereby increasing the flow rate of liquid paraffin.

[0038] In some embodiments, the paraffin wax fixing fixture further includes a height detection element (not shown in the figure). The height detection element is disposed on the second sidewall 121 and is electrically connected to the control component 5. During the process of liquid paraffin being introduced into the second recess 12 through the guide channel 111, the height detection element generates a warning signal when it detects that the liquid paraffin at any position in the second recess 12 is higher than the upper surface of the second sidewall 121 in the vertical direction Z. The control component 5 controls the flow regulating component 2 to close the guide channel 111 according to the warning signal. By setting the height detection element, the local accumulation of liquid paraffin in the second recess 12 (especially near the second sidewall 121) is avoided, which would cause the accumulated liquid paraffin to flow out of the second recess 12 before it is filled, thus preventing the preset amount of liquid paraffin from filling the second recess 12 and affecting the fixing of the workpiece.

[0039] Optionally, the height detection element can be an infrared sensor disposed on the upper surface of the second sidewall 121, with infrared light covering the area of ​​the second recess 12 parallel to the upper surface of the second sidewall 121, so as to detect whether the liquid paraffin in the second recess 12 is higher than the second sidewall 121. In other embodiments, the height detection element can also be a laser liquid level sensor.

[0040] Understandably, after the control component 5 closes the flow channel 111 according to the warning signal, the control component 5 can further determine that if the amount of liquid paraffin entering the second recess 12 from the first recess 11 does not reach the preset amount, after the vibration component 4 eliminates the locally protruding liquid paraffin during the vibration of the stage 1 (corresponding to the warning signal and elimination), the control component 5 controls the flow regulating component 2 to reopen the flow channel 111 until the preset amount is reached.

[0041] In some embodiments, the flow regulating component 2 includes a flow regulating valve and a flow sensing element (not shown). The flow regulating valve is disposed in the flow channel 111 and is electrically connected to the control component 5. The flow regulating valve is configured to regulate the flow rate of liquid paraffin from the first recess 11 to the second recess 12. The flow sensing element is disposed in the flow channel 111 and is electrically connected to the control component 5. The flow sensing element is configured to detect the flow rate of liquid paraffin passing through the flow channel 111.

[0042] Understandably, the control component 5 can control the size and opening time of the flow regulating valve opening guide channel 111, so as to more accurately control the total amount of liquid paraffin introduced into the second recess 12 to the preset amount, thereby improving the control accuracy.

[0043] Optionally, the flow detection element is configured as a flow sensor for detecting the liquid paraffin passing through the flow channel 111. The flow regulating valve is an adjustable solenoid valve or a pneumatic proportional valve, which will not be described in detail.

[0044] In some embodiments, the temperature regulating component 3 includes a heating component 31, a cooling component 32, and a temperature detection component (not shown). The heating component 31 is disposed on the stage 1, below the first recess 11 and below the second recess 12. The heating component 31 is configured to heat the paraffin wax in at least one of the first recess 11 and the second recess 12 and maintain it at a first preset temperature, which is 2°C-10°C higher than the melting point of the paraffin wax. The cooling component 32 is disposed on the stage 1, below the first recess 11 and the second recess 12. The cooling component 32 does not interfere with the heating component 31 and is configured to cool the paraffin wax in at least one of the first recess 11 and the second recess 12 and maintain it at the second preset temperature. The temperature detection component is disposed on the stage 1 and is configured to detect the temperature of the paraffin wax in the first recess 11 and / or the second recess 12. The temperature detection component, heating component 31, and cooling component 32 are electrically connected to the control component 5. The control component 5 is configured to dynamically adjust the heating temperature of the heating component 31 or the cooling temperature of the cooling component 32 based on the temperature detected by the temperature detection component. Dynamic temperature control ensures the accuracy and rate of temperature adjustment, meeting the requirements of different operating conditions.

[0045] Optionally, the heating assembly 31 may include a heating element 311 disposed within the stage 1. The heating temperature of the heating element 311 is adjustable, and is generally set 2°C-5°C higher than a first preset temperature, so that the liquid paraffin in the corresponding recess reaches the first preset temperature. Specifically, the heating element 311 may include a first heating rod 3111 disposed below the first recess 11 and a second heating rod disposed below the second recess 12. The control assembly 5 can control the first heating rod 3111 and the second heating rod 3112 respectively, so that the heating of the first recess 11 and the second recess 12 is individually controllable.

[0046] It is understandable that the stage 1 is provided with a receiving channel, into which the first heating rod 3111 and the second heating rod 3112 can be inserted for maintenance and replacement.

[0047] Optionally, the first heating rod 3111 and the second heating rod 3112 are made of nickel-chromium alloy, with a total power of 1.5kW, and are arranged in a matrix to ensure the uniformity of heating temperature in each area of ​​the first recess 11 and / or the second recess 12.

[0048] Optionally, the cooling assembly 32 includes a cooling element 321, which may specifically be a water-cooled pipe 3211 arranged within the stage 1. The water-cooled pipe 3211 extends at least below the second recess 12 to solidify the liquid paraffin in the second recess 12, thereby fixing the workpiece to be processed. Further details are not provided. It should be understood that the water-cooled pipe 3211 may also extend below the first recess 11 to solidify the remaining paraffin in the first recess 11.

[0049] Understandably, after the workpiece is fixed on the paraffin wax in the second recess 12 and cooled and cured by the cooling component 32, the cooling component 32 is also configured to continue cooling during the processing of the workpiece so that the cured paraffin wax is maintained at a second preset temperature for cooling the workpiece 311 being processed.

[0050] In some embodiments, the vibration assembly 4 includes a vibrating element and an acceleration sensor (not shown). The vibrating element is connected to the stage 1 and can drive the stage 1 to vibrate. The acceleration sensor is disposed on the stage 1 and is configured to detect the amplitude and frequency of the stage 1. The vibrating element and the acceleration sensor are electrically connected to a control assembly 5, which is configured to dynamically adjust the vibration and frequency of the stage 1 based on the temperature of the paraffin wax in the second recess 12 and the amplitude and frequency detected by the acceleration sensor. The control assembly 5 can dynamically adjust the amplitude and frequency to eliminate residual air bubbles in the liquid paraffin wax in the second recess 12 (residual rate less than or equal to 0.8%) and improve the flatness of the upper surface of the liquid paraffin wax filling the second recess 12, so that the thickness deviation of different areas of the liquid paraffin wax in the second recess 12 is less than or equal to 0.02 mm and the flatness error is less than or equal to 2.5 μm.

[0051] Optionally, the vibration frequency of the stage 1 driven by the vibrating element is between 20 Hz and 50 Hz, and the amplitude is between 0.01 mm and 0.05 mm. The control component 5 can dynamically adjust the frequency and amplitude within the above range.

[0052] Alternatively, the vibrating element can be an electromagnetic vibrator or a piezoelectric ceramic vibrator.

[0053] Optionally, the vibration component 4 may also include a visual inspection element configured to capture the flow state of the liquid paraffin. The control component 5 uses an algorithm to identify and calculate the bubble distribution density based on the captured image. The control component 5 then dynamically adjusts the actual amplitude and frequency of the stage 1 based on the bubble distribution to further improve the vibration rate and reduce the bubble residue rate. This will not be described in detail.

[0054] In some embodiments, the stage 1 further includes a third recess 13 arranged around the outer periphery of the second sidewall 121. The third recess 13 is lower than the second recess 12 in the vertical direction Z. During the process of introducing a preset amount of liquid paraffin into the second recess 12, the third recess 13 is configured to accommodate the liquid paraffin overflowing from the second recess 12 during the vibration of the vibration component 4. The temperature regulating component 3 can also regulate the temperature of the paraffin in the third recess 13. The third recess 13 allows the liquid paraffin to be fully filled into the second recess 12, which helps to improve the flatness of the liquid paraffin.

[0055] Optionally, the cross-section of the third recess 13 has a trapezoidal structure that is wider at the top and narrower at the bottom.

[0056] It is understood that the heating assembly 31 also includes a third heating rod 3113, which is disposed below the third recess 13 to heat the paraffin in the third recess 13 and give it flow characteristics.

[0057] In some alternative embodiments, the stage 1 further includes a recycling tank 14 disposed in the first direction X on the side of the second recess 12 away from the first recess 11, and a portion of the third recess 13 is located between the recycling tank 14 and the second recess 12. The recycling tank 14 is lower than the third recess 13 in the vertical direction Z. A one-way valve 131 is provided between the third recess 13 and the recycling tank 14 to allow the liquid paraffin in the third recess 13 to flow into the recycling tank 14 for recycling and reuse of the paraffin.

[0058] Optionally, the recycling tank 14 is also provided with a cover plate 141 to prevent impurities from entering.

[0059] Optionally, the heating assembly 31 also includes a fourth heating plate and a fourth heating rod disposed below the recovery tank 14 to maintain the temperature of the recovered paraffin wax above its melting point by 5°C. The recovery tank 14 is also equipped with a filter element to filter impurities from the liquid paraffin wax, enabling the recovered paraffin wax to be reused. The filter element can be a single-stage filter or a multi-stage filter; the specific filtration results and methods can be adaptively adjusted according to actual needs and are not specifically limited.

[0060] It is understandable that the descriptions of the third heating rod 3113 and the fourth heating rod can be referenced from the descriptions of the first heating rod 3111 and the second heating rod 3112, and will not be repeated here.

[0061] Figure 5 The diagram shown is a flowchart of a fixing method provided in an embodiment of this application. Figure 6 The diagram shown is a flowchart of a fixing method provided in another embodiment of this application.

[0062] This application also provides a method for fixing a paraffin wax fixing fixture, which is applied to the paraffin wax fixing fixture described in the above embodiments, so as to fix the workpiece to be processed or to release the workpiece after processing.

[0063] like Figure 5 and Figure 6 This application provides a method for fixing with a paraffin fixation fixture, the specific steps of which are as follows:

[0064] S101, when the first recess contains solid paraffin, the control component controls the temperature regulating component to heat the first recess and the second recess, and the paraffin is maintained at a first preset temperature to form liquid paraffin.

[0065] S102, the control component controls the flow regulating component to open the guide channel so that the liquid paraffin in the first recess is introduced into the first recess. After reaching a preset amount, the flow regulating component closes the guide channel, wherein the preset amount is greater than the volume of the second recess.

[0066] S103, The control component controls the vibration component to make the liquid paraffin evenly fill the second depression.

[0067] S104. Place the workpiece to be processed on the upper surface of the liquid paraffin in the second recess.

[0068] S105, The control component controls the temperature regulation component to cool down the liquid paraffin in the second recess and maintain it at the second preset temperature. The cooled solid paraffin fixes the workpiece to be processed.

[0069] The method for fixing the paraffin wax fixture provided in this application embodiment, through the first and second recesses set on the platform and the guide channel connecting the first and second recesses, enables the control component to dynamically adjust the flow regulating component to control the amount of liquid paraffin wax introduced into the second recess each time the workpiece needs to be fixed. It also enables the dynamic adjustment component to control the heating and / or cooling temperatures of the first and / or second recesses, thereby adjusting the temperature of the corresponding paraffin wax and maintaining it at the required preset temperature. Furthermore, it enables the dynamic adjustment component to control the vibration of the platform, allowing the paraffin wax to quickly and evenly fill the second recess, thereby improving the flatness of the paraffin wax surface and avoiding stress concentration on the fixed workpiece, thus improving the processing accuracy and efficiency of the workpiece.

[0070] It is understandable that during the process of liquid paraffin being introduced into the second recess through the flow channel, the fixing method also includes: the height detection component detects the height of the liquid paraffin in the second recess, and when it is detected that the liquid paraffin at any position in the second recess is higher than the upper surface of the second sidewall in the vertical direction Z, a warning signal is generated, and the control component controls the flow regulating component to close the flow channel according to the warning signal.

[0071] In some embodiments, the fixation method of the paraffin fixation fixture specifically includes:

[0072] S1011. When the first recess contains solid paraffin wax, the control component controls the heating component to heat the first and second recesses to a certain temperature, and the temperature detection component detects the temperature of the paraffin wax to melt the paraffin wax and maintain it at a first preset temperature, which is 2°C-10°C higher than the melting point of the paraffin wax.

[0073] S1012, The control component controls the flow regulating valve to open the flow channel, and the flow detection component detects the flow rate of the opened flow channel. After the flow rate reaches the preset amount, the control component controls the flow regulating valve to close.

[0074] S1013, The control component controls the movement of the vibrating component. The acceleration sensor detects the vibration amplitude and frequency of the platform. The control component dynamically adjusts the vibration amplitude and frequency according to the melting point of the paraffin and the opening size of the flow regulating valve.

[0075] S1014. Place the workpiece to be processed on the upper surface of the liquid paraffin in the second recess.

[0076] S1015, The control component controls the cooling component to cool the liquid paraffin in the second recess and maintain it at the second preset temperature. The cooled solid paraffin fixes the workpiece to be processed.

[0077] Understandably, the specific fixation method for paraffin fixation fixtures can be found in the relevant descriptions of paraffin fixation fixtures mentioned above, and will not be repeated here.

[0078] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0079] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0080] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0081] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0082] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

[0083] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

[0084] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A paraffin wax fixation fixture, characterized in that, include: The stage includes a first recess and a second recess arranged adjacent to each other along a first direction. The first recess and the second recess are configured to contain paraffin wax. A first sidewall surrounding the first recess is provided with a flow channel communicating with the second recess. The portion of the first sidewall facing the second recess and the second sidewall together form the second recess. The first recess is higher than the second recess in the vertical direction. A flow regulating component is disposed at the position of the flow guiding channel corresponding to the platform. The flow regulating component can regulate the flow rate of liquid paraffin from the first depression to the second depression so that the liquid paraffin is filled in the second depression. A temperature regulating component is disposed on the stage, and the temperature regulating component is capable of adjusting the temperature in the first recess and the second recess respectively to cause the paraffin to transform between a solid and a liquid state. A vibration assembly, connected to the stage, is capable of causing the stage to vibrate so that the liquid paraffin is uniformly filled into the second depression when liquid paraffin is introduced into the second depression. A control component is electrically connected to the flow regulating component, the temperature regulating component, and the vibration component, respectively. The control component is configured to control the temperature regulating component to heat the paraffin wax in at least one of the first recess and the second recess and maintain it at a first preset temperature or to cool it and maintain it at a second preset temperature, wherein the first preheating temperature is greater than the second preset temperature. The control component is also configured to control the flow regulating component to connect the guide channel and introduce a preset amount of liquid paraffin wax into the second recess, wherein the preset amount is greater than the volume of the second recess. The control component is further configured to control the vibration component to cause the stage to vibrate so that the second recess is filled with paraffin wax and the workpiece is fixed by the paraffin wax in the second recess.

2. The paraffin fixation fixture according to claim 1, characterized in that, In the vertical direction, the bottom wall of the first recess is higher than the bottom wall of the second recess, and the height of the first side wall is higher than the height of the second side wall, the height of the second side wall being 0.1 mm.

3. The paraffin fixation fixture according to claim 1, characterized in that, The bottom wall of the second recess is provided with a plurality of flow channels, at least a portion of which extend to the side wall of the second recess. The plurality of flow channels are arranged in a grid-like structure that is interconnected along the first direction and the second direction. The first direction and the second direction intersect.

4. The paraffin fixation fixture according to claim 1, characterized in that, It also includes a height detection element disposed on the second sidewall, so the height detection element is electrically connected to the control component. During the process of liquid paraffin being introduced into the second depression through the guide channel, the height detection element generates a warning signal when it detects that the liquid paraffin at any position in the second depression is higher than the upper surface of the second sidewall in the vertical direction. The control component controls the flow regulating component to close the guide channel according to the warning signal.

5. The paraffin fixation fixture according to claim 1, characterized in that, The flow regulation component includes: A flow regulating valve is disposed in the flow guiding channel, the flow regulating valve is electrically connected to the control component, and the flow regulating valve is configured to regulate the flow rate of liquid paraffin from the first depression to the second depression; A flow detection element is disposed in the flow channel, the flow detection element is electrically connected to the control component, and the flow detection element is configured to detect the flow rate of liquid paraffin passing through the flow channel; And / or, The temperature regulation component includes: A heating component is disposed on the stage, the heating component is arranged below the first recess and below the second recess, the heating component is configured to heat the paraffin in at least one of the first recess and the second recess and maintain it at a first preset temperature, the first preset temperature being 2°C-10°C higher than the melting point of the paraffin. A cooling component is disposed on the stage, the cooling component is arranged below the first recess and below the second recess, the cooling component does not interfere with the heating component, and the cooling component is configured to cool the paraffin in at least one of the first recess and the second recess and maintain it at a second preset temperature. A temperature detection component is disposed on the stage, and the temperature detection component is configured to detect the temperature of paraffin wax in the first recess and / or the second recess. The temperature detection component, the heating component, and the cooling component are each electrically connected to the control component. The control component is configured to dynamically adjust the heating temperature of the heating component or the cooling temperature of the cooling component based on the temperature detected by the temperature detection component; and / or, The vibration assembly includes: A vibrating element is connected to the platform, and the vibrating element can drive the platform to vibrate. An accelerometer is disposed on the stage, and the accelerometer is configured to detect the amplitude and frequency of the stage; The vibrating element and the acceleration sensor are electrically connected to the control component, which is configured to dynamically adjust the vibration and frequency of the stage based on the temperature of the paraffin in the second recess and the amplitude and frequency detected by the acceleration sensor.

6. The paraffin fixation fixture according to any one of claims 1-5, characterized in that, The platform further includes a third recess arranged around the outer periphery of the second sidewall, the third recess being lower than the second recess in the vertical direction. During the process of introducing a preset amount of liquid paraffin into the second recess, the third recess is configured to contain the liquid paraffin that overflows from the second recess during the vibration of the vibration component, and the temperature regulating component can also regulate the temperature of the paraffin in the third recess.

7. The paraffin fixation fixture according to any one of claims 1-5, characterized in that, The platform further includes a recycling tank disposed in a first direction on the side of the second recess away from the first recess, and a portion of the third recess is located between the recycling tank and the second recess. The recycling tank is lower than the third recess in the vertical direction. A one-way valve is provided between the third recess and the recycling tank to allow the liquid paraffin in the third recess to flow into the recycling tank.

8. A method for fixing a paraffin wax fixation fixture, characterized in that, The paraffin wax fixing fixture, configured to fix a workpiece to be processed, includes a stage, a flow regulating component, a temperature regulating component, a vibration component, and a control component. The stage includes a first recess and a second recess, with a flow guiding channel between the first recess and the second recess. The first recess is vertically higher than the second recess. The fixing method includes: When the first recess contains solid paraffin, the control component controls the temperature regulation component to heat the first recess and the second recess, and the paraffin is maintained at a first preset temperature to form liquid paraffin. The control component controls the flow regulating component to open the guide channel so that the liquid paraffin in the first recess is introduced into the first recess. After a preset amount is reached, the flow regulating component closes the guide channel, wherein the preset amount is greater than the volume of the second recess. The control component controls the vibration component to operate so that the liquid paraffin is evenly filled into the second depression; Place the workpiece to be processed on the upper surface of the liquid paraffin in the second recess; The control component controls the temperature regulation component to cool down the liquid paraffin in the second recess and maintain it at a second preset temperature. The cooled solid paraffin then fixes the workpiece to be processed.

9. The fixing method of the paraffin wax fixation fixture according to claim 8, characterized in that, The paraffin wax fixing fixture also includes a height detection element. During the process of liquid paraffin being introduced into the second depression through the guide channel, the fixing method further includes: The height detection component detects the height of the liquid paraffin in the second recess. When it detects that the liquid paraffin at any position in the second recess is higher than the upper surface of the second sidewall in the vertical direction, a warning signal is generated. The control component controls the flow regulating component to close the flow channel according to the warning signal.

10. The fixation method of the paraffin fixation fixture according to claim 8, characterized in that, The flow regulation assembly includes a flow regulation valve and a flow detection element; the temperature regulation assembly includes a heating assembly, a cooling assembly, and a temperature detection assembly; the vibration assembly includes a vibration element and an acceleration sensor; and the fixing method of the paraffin wax fixing fixture specifically includes: When the first recess contains solid paraffin, the control component controls the heating component to heat the first recess and the second recess to a temperature of 2°C-10°C higher than the melting point of the paraffin. The temperature detection component detects the temperature of the paraffin to melt the paraffin and maintain it at a first preset temperature. The control component controls the flow regulating valve to open the flow channel, and the flow detection device detects the flow rate of the opened flow channel. Once the flow rate reaches a preset amount, the control component controls the flow regulating valve to close. The control component controls the movement of the vibrating component, the acceleration sensor detects the vibration amplitude and frequency of the platform, and the control component dynamically adjusts the vibration amplitude and frequency according to the melting point of the paraffin and the opening size of the flow regulating valve. Place the workpiece to be processed on the upper surface of the liquid paraffin in the second recess; The control component controls the cooling component to cool the liquid paraffin in the second recess and maintain it at a second preset temperature. The cooled solid paraffin then fixes the workpiece to be processed.

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