MEMS detection device and design and use method thereof

Abstract

The invention provides an MEMS detection device and a design and use method thereof, and relates to the technical field of microelectronics. The MEMS detection device comprises a transmitting assembly and a receiving assembly, the transmitting assembly and / or the receiving assembly comprises an adapter plate, an MEMS ultrasonic sensor and an adjusting cover, the MEMS ultrasonic sensor and the adjusting cover are connected with the two opposite surfaces of the adapter plate respectively, a through hole is formed in the adapter plate, and the adjusting cover is provided with a first opening and a second opening which are opposite to each other; a sound source opening and a first opening of the MEMS ultrasonic sensor face the through hole, and the adapter plate and the adjusting cover are used for adjusting the signal detection range of the MEMS ultrasonic sensor. According to the MEMS detection device, the signal detection range can be adjusted to be within the target detection range, and the signal intensity is increased, so that the target detection object is effectively detected, and the problems of false detection and missing detection are effectively reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of microelectronics, in particular, to a MEMS detection device and a design and use method thereof. BACKGROUND

[0002] The ultrasonic detection technology has been widely used in production and life due to its non-contact, strong anti-interference and low cost characteristics, such as the reversing radar and automatic driving in the automobile and transportation field, the material positioning and liquid level monitoring in the industrial automation field, and the height detection of unmanned aerial vehicles and the automatic switch triggering of proximity sensing in intelligent devices and toilets / taps. Among them, the MEMS ultrasonic technology has unique advantages in some specific application scenarios due to its miniaturization, high integration, low power consumption, and large sound field angle (large test range).

[0003] However, the sound field angle of the existing MEMS ultrasonic detection device is large, so that the signal detection range is larger than the target detection range, and then it will be disturbed by non-target detection objects outside the target detection range, causing false detection. In addition, due to the irregular shape, different size, different material and various colors of the target detection object, there may also be a case that the echo signal of the target detection object is very weak, resulting in missed detection. SUMMARY

[0004] The purpose of the present application is to provide a MEMS detection device and a design and use method thereof, which can effectively reduce the probability of false detection and missed detection.

[0005] To achieve the above purpose, the technical solutions adopted by the embodiments of the present application are as follows: In one aspect of the embodiments of the present application, a MEMS detection device is provided, comprising: a transmitting assembly and a receiving assembly, the transmitting assembly and / or the receiving assembly comprising: a conversion plate, a MEMS ultrasonic sensor and an adjusting cover connected to two surfaces of the conversion plate respectively, the conversion plate being provided with a through hole, the adjusting cover having opposite first and second openings, the sound source port of the MEMS ultrasonic sensor and the first opening facing the through hole respectively, and the conversion plate and the adjusting cover being used for adjusting the signal detection range of the MEMS ultrasonic sensor.

[0006] Optionally, the outer edge of the orthographic projection of the sound source port on the second opening is located within the outer edge of the orthographic projection of the through hole on the second opening, or the outer edge of the orthographic projection of the sound source port on the second opening is completely coincident with the outer edge of the orthographic projection of the through hole on the second opening, or part of the outer edge of the orthographic projection of the sound source port on the second opening is coincident with the outer edge of the orthographic projection of the through hole on the second opening, and the remaining area is located within the outer edge of the orthographic projection of the through hole on the second opening. The outer edge of the projection of the through hole on the second opening is within the outer edge of the projection of the first opening on the second opening, or the outer edge of the projection of the through hole on the second opening is completely coincident with the outer edge of the projection of the first opening on the second opening, or part of the outer edge of the projection of the through hole on the second opening is coincident with the outer edge of the projection of the first opening on the second opening and the rest is within the outer edge of the projection of the first opening on the second opening; The outer edge of the projection of the first opening on the second opening is within the outer edge of the second opening, or the outer edge of the projection of the first opening on the second opening is completely coincident with the outer edge of the second opening, or part of the outer edge of the projection of the first opening on the second opening is coincident with the outer edge of the second opening and the rest is within the outer edge of the second opening.

[0007] Optionally, the adjusting cover has a cavity therein, the cavity forms a first opening at a first end face of the adjusting cover and a second opening at a second end face of the adjusting cover, and the size of the cavity gradually increases or part of the cavity gradually increases and part of the cavity remains unchanged from the first end face to the second end face.

[0008] Optionally, the adapter plate comprises a first sub-adapter plate and a second sub-adapter plate electrically connected to the first sub-adapter plate, one surface of the first sub-adapter plate is connected to the MEMS ultrasonic sensor, the opposite surface is connected to the second sub-adapter plate, the surface of the second sub-adapter plate facing away from the first sub-adapter plate is connected to the adjusting cover, and the through hole penetrates through the first sub-adapter plate and the second sub-adapter plate.

[0009] Optionally, the first sub-adapter plate is provided with a first sub-through hole, the second sub-adapter plate is provided with a second sub-through hole, the outer edge of the projection of the first sub-through hole on the second opening is within the outer edge of the projection of the second sub-through hole on the second opening, or the outer edge of the projection of the first sub-through hole on the second opening is completely coincident with the outer edge of the projection of the second sub-through hole on the second opening, or part of the outer edge of the projection of the first sub-through hole on the second opening is coincident with the outer edge of the projection of the second sub-through hole on the second opening and the rest is within the outer edge of the projection of the second sub-through hole on the second opening.

[0010] Optionally, the adapter plate and / or the adjusting cover is provided with a protective layer for preventing external substances from entering the sound source port of the MEMS ultrasonic sensor.

[0011] Optionally, the sound source port, the through hole, the first opening and the second opening have the same cross-sectional shape and coincident geometric centers.

[0012] Optionally, the number of adjusting covers is at least two, the at least two adjusting covers have different degrees of adjustment on the signal, and the at least two adjusting covers are selectively connected to the adapter plate.

[0013] Optionally, the number of MEMS ultrasonic sensors is at least two, and the number of through holes and adjustment covers are equal to the number of MEMS ultrasonic sensors, and they correspond one-to-one.

[0014] Optionally, the number of MEMS ultrasonic sensors is at least two, and the number of through holes and adjustment covers is one each, with at least two MEMS ultrasonic sensors corresponding to the through holes.

[0015] Another aspect of this application provides a design and usage method for a MEMS detection device, including: The structure and quantity of the transmitting and receiving components are determined based on the target object and the target detection range; The structure and number of the MEMS ultrasonic sensor, the adjustment cover, the adapter plate, and the through holes on the adapter plate are determined according to the structure and number of the transmitting and receiving components. The adjustment cover and the adapter plate are used to adjust the signal detection range of the MEMS ultrasonic sensor. The adjustment cover has a first opening and a second opening. The MEMS ultrasonic sensor and the adjustment cover are respectively mounted on two opposite surfaces of the adapter plate to obtain a MEMS detection device, wherein the sound source port of the MEMS ultrasonic sensor faces the through hole, and the first opening of the adjustment cover faces the adjustment cover. The transmitting component is controlled to emit ultrasonic signals toward the target object, and the receiving component is controlled to receive the echo signals reflected back by the target object. The peak signal characteristics corresponding to the reflecting surface of the target object are determined based on the echo signal, and the characteristic parameters of the target object are obtained based on the peak signal characteristics.

[0016] Optionally, the outer edge of the orthographic projection of the sound source port on the second opening is located within the outer edge of the orthographic projection of the through hole on the second opening; or, the outer edge of the orthographic projection of the sound source port on the second opening completely coincides with the outer edge of the orthographic projection of the through hole on the second opening; or, a portion of the outer edge of the orthographic projection of the sound source port on the second opening coincides with the outer edge of the orthographic projection of the through hole on the second opening, while the remaining portion is located within the outer edge of the orthographic projection of the through hole on the second opening. The outer edge of the orthographic projection of the through hole on the second opening is located within the outer edge of the orthographic projection of the first opening on the second opening; or, the outer edge of the orthographic projection of the through hole on the second opening completely coincides with the outer edge of the orthographic projection of the first opening on the second opening; or, a portion of the outer edge of the orthographic projection of the through hole on the second opening coincides with the outer edge of the orthographic projection of the first opening on the second opening, while the remaining portion is located within the outer edge of the orthographic projection of the first opening on the second opening. The outer edge of the orthographic projection of the first opening onto the second opening is located within the outer edge of the second opening; or, the outer edge of the orthographic projection of the first opening onto the second opening completely coincides with the outer edge of the second opening; or, a portion of the outer edge of the orthographic projection of the first opening onto the second opening coincides with the outer edge of the second opening, while the remaining portion is located within the outer edge of the second opening.

[0017] The beneficial effects of this application include: This application provides a MEMS detection device, including a transmitting component and a receiving component. The transmitting component and / or receiving component includes an adapter plate, a MEMS ultrasonic sensor connected to two surfaces opposite to the adapter plate, and an adjustment cover. The adapter plate has a through hole, and the adjustment cover has a first opening and a second opening opposite to each other. The sound source port and the first opening of the MEMS ultrasonic sensor face the through hole, respectively. The adapter plate and the adjustment cover are used to adjust the signal detection range of the MEMS ultrasonic sensor. When the MEMS ultrasonic sensor of this MEMS detection device transmits and / or receives signals, the signals are more concentrated after reflection through the through hole on the adapter plate and the adjustment cover, thereby adjusting the signal detection range to the target detection range and increasing the signal strength. This enables effective detection of the target object and effectively reduces false detections and missed detections. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of ultrasonic testing using existing MEMS testing devices. Figure 2 for Figure 1 Results of echo signal intensity from ultrasonic sensor; Figure 3 One of the schematic diagrams of ultrasonic testing of the MEMS testing device provided in the embodiments of this application; Figure 4 This is a schematic diagram of the structure of the transmitting component in the MEMS detection device provided in the embodiments of this application; Figure 5 This is a schematic diagram of the receiving component in the MEMS detection device provided in the embodiments of this application; Figure 6 This is a second schematic diagram of ultrasonic testing using a MEMS testing device provided in an embodiment of this application. Figure 7 for Figure 3Results of echo signal intensity from MEMS ultrasonic sensor; Figure 8 This is one of the structural schematic diagrams of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 9 This is one of the schematic diagrams showing the relative positional relationship between the sound source port, the through hole, the outer edge of the first opening projected onto the second opening, and the outer edge of the second opening in the MEMS detection device provided in the embodiments of this application; Figure 10 This is a second schematic diagram showing the relative positional relationship between the sound source port, the through hole, the outer edge of the first opening projected onto the second opening, and the outer edge of the second opening in the MEMS detection device provided in the embodiments of this application. Figure 11 The third schematic diagram showing the relative positional relationship between the sound source port, the through hole, the outer edge of the first opening projected onto the second opening, and the outer edge of the second opening in the MEMS detection device provided in the embodiments of this application; Figure 12 A second schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 13 Third schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 14 Fourth schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 15 Fifth schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 16 Sixth schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 17 Seventh schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 18 Eighth schematic diagram of the structure of the transmitting component and / or receiving component in the MEMS detection device provided in the embodiments of this application; Figure 19 A flowchart illustrating the design and usage of the MEMS detection device provided in the embodiments of this application.

[0020] Icons: 11-Ultrasonic sensor; 12-Substrate component; 21-Target object; 211-Reflector surface one; 212-Reflector surface two; 213-Reflector surface five; 22-Non-target object; 221-Reflector surface three; 222-Reflector surface four; 31-Signal detection range; 32-Target detection range; 100-MEMS detection device; 200-Transmitting component; 300-Receiving component; 410-Adapter board; 411-Through hole; 412-First sub-Adapter board; 4121-First sub-Through hole; 413-Second sub-Adapter board; 4131-Second sub-Through hole; 420-MEMS ultrasonic sensor; 421-Sound source port; 430 - Adjustment cover; 431- First opening; 432- Second opening; 433- Cavity; 500- Protective layer; E1- Outer edge of the orthographic projection of the sound source port onto the second opening; E2- Outer edge of the orthographic projection of the through hole onto the second opening; E21- Outer edge of the orthographic projection of the first sub-through hole onto the second opening; E22- Outer edge of the orthographic projection of the second sub-through hole onto the second opening; E3- Outer edge of the orthographic projection of the first opening onto the second opening; E4- Outer edge of the second opening; D1- Diameter of the sound source port; D2- Diameter of the through hole; D3- Diameter of the first opening; D4- Diameter of the second opening; H1- Thickness of the adapter plate; H2- Height of the adjustment cover. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. It should be noted that, unless otherwise specified, the various features in the embodiments of this application can be combined with each other, and the combined embodiments are still within the protection scope of this application.

[0023] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0024] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0026] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] like Figure 1 As shown, the ultrasonic sensor 11 emits ultrasonic signals toward multiple objects distributed on the object-carrying component 12 and receives echo signals from the reflecting surfaces of the objects. These objects include target objects 21 within the target detection range 32 (i.e., objects corresponding to reflecting surfaces 211, 212, and 213) and non-target objects 22 outside the target detection range 32 (i.e., objects corresponding to reflecting surfaces 221 and 222). The ultrasonic sensor 11 emits and receives ultrasonic waves with sound field angles, the size of which determines the signal detection range. Typically, the sound field angle of the ultrasonic sensor 11 is relatively large, making its signal detection range 31 larger than the target detection range 32. Therefore, it may be interfered with by non-target objects 22 outside the target detection range 32, leading to false detections, such as... Figure 2 The echo signal intensity results from the ultrasonic sensor 11 shown include false detection interference signals from non-target reflective surface three 221 and non-target reflective surface four 222. Furthermore, due to the irregular shape, varying size, different materials, and diverse colors of the target object 21, there may be cases where the ultrasonic reflection signal from the target object 21 is very weak, leading to missed detections, such as... Figure 2The echo signal intensity results of the ultrasonic sensor 11 shown show that the target object 21 corresponding to the target reflector 213 was missed.

[0028] To address the aforementioned technical problems, one aspect of the embodiments of this application is described below. Figures 3 to 5 A MEMS inspection device 100 is provided, comprising a transmitting component 200 and a receiving component 300, wherein the transmitting component 200 is used to transmit ultrasonic signals to a target object 21, and the receiving component 300 is used to receive echo signals reflected back by the target object 21. It can be understood that the ultrasonic signal becomes an echo signal after being reflected by the reflective surface of the target object 21.

[0029] The transmitting assembly 200 and / or receiving assembly 300 include: an adapter plate 410, a MEMS ultrasonic sensor 420 connected to two surfaces opposite to the adapter plate 410, and an adjustment cover 430. The adapter plate 410 has a through hole 411, and the adjustment cover 430 has opposing first openings 431 and second openings 432. The sound source port 421 and the first opening 431 of the MEMS ultrasonic sensor 420 face the through hole 411. Both the through hole 411 on the adapter plate 410 and the adjustment cover 430 are used to allow the signal from the MEMS ultrasonic sensor 420 to pass through and to adjust the signal detection range 31. It is understood that the signal can be an ultrasonic signal or an echo signal, and the signal detection range 31 can be the ultrasonic transmission range or the echo reception range, depending on the function of the corresponding MEMS ultrasonic sensor 420.

[0030] Furthermore, it should be noted that in this embodiment, the number of transmitting components 200 and receiving components 300 is not limited. The number of transmitting components 200 can be one, two or more, and the number of receiving components 300 can also be one, two or more. Moreover, the number of transmitting components 200 and receiving components 300 can be equal or unequal.

[0031] The transmitting component 200 can simultaneously transmit ultrasonic signals to two or more target objects 21 (e.g., Figure 6 The MEMS ultrasonic sensor 420 shown on the right side of the image can also emit ultrasonic waves towards only one target object 21 (e.g., Figure 6 (The MEMS ultrasonic sensor 420 is shown on the left). If the transmitting component 200 emits ultrasonic waves to only one target object 21, then when there are two or more target objects 21, the number of transmitting components 200 also needs to be two or more.

[0032] Similarly, the receiving component 300 can simultaneously receive the echo signals of two or more target detection objects 21, or it can receive the echo signal of only one target detection object 21. If the receiving component 300 receives the echo signal of only one target detection object 21, then when the number of target detection objects 21 is two or more, the number of receiving components 300 also needs to be two or more.

[0033] The transmitting component 200 and the receiving component 300 can be the same component. That is to say, the MEMS ultrasonic sensor 420 has both transmitting and receiving functions. In this way, the component including the MEMS ultrasonic sensor 420 serves as both the transmitting component 200 and the receiving component 300, which simplifies the structure of the MEMS detection device 100.

[0034] The transmitting component 200 and the receiving component 300 can also be two different components. In this case, the structures of the transmitting component 200 and the receiving component 300 can be the same or different, but at least one of the transmitting component 200 and the receiving component 300 needs to include the adapter plate 410, the MEMS ultrasonic sensor 420, and the adjustment cover 430. In this case, the MEMS ultrasonic sensor 420 only has a transmitting function or only has a receiving function.

[0035] Each MEMS ultrasonic sensor 420 requires a corresponding through-hole 411 and an adjustment cover 430. However, a through-hole 411 does not necessarily correspond to only one MEMS ultrasonic sensor 420, and similarly, an adjustment cover 430 does not necessarily correspond to only one MEMS ultrasonic sensor 420 or only one through-hole 411. That is to say, the MEMS ultrasonic sensor 420, through-hole 411, and adjustment cover 430 may or may not have a one-to-one correspondence. For example, two MEMS ultrasonic sensors 420 can be set on one side of a through-hole 411, and an adjustment cover 430 can be set on the other side. The sound source ports 421 of the two MEMS ultrasonic sensors 420 both face the through-hole 411. In this way, the signals of the two MEMS ultrasonic sensors 420 are transmitted through the through-hole 411 and the adjustment cover 430. When there are multiple adjustment covers 430, the multiple adjustment covers 430 can be set as one unit for easy installation.

[0036] The adapter board 410 is a connection board, such as a printed circuit board (PCB), that enables electrical interconnection within the MEMS ultrasonic sensor 420 and / or interconnection with control components. The adapter board 410 can be a single layer, two layers, or multiple layers. The MEMS ultrasonic sensor 420, the adapter board 410, and the adjustment cover 430 can be connected via direct connection, bonding, splicing, welding, or other methods.

[0037] The material of the regulating cover 430 can be metal (e.g., aluminum, titanium, aluminum-magnesium alloy, etc.), plastic (e.g., engineering plastic), polymer (e.g., polycarbonate, polypropylene, polystyrene, etc.), synthetic fiber, composite material, etc.

[0038] The aforementioned MEMS detection device 100 combines a MEMS ultrasonic sensor 420, an adapter plate 410, and an adjustment cover 430. When the MEMS ultrasonic sensor 420 transmits or receives signals, the signals are more concentrated after reflection through the through-hole 411 on the adapter plate 410 and the adjustment cover 430, thereby adjusting the signal detection range 31 to within the target detection range 32 and increasing the signal strength. This enables effective detection of the target object 21, effectively reducing false detections and missed detections. Furthermore, since the MEMS ultrasonic sensor 420 itself requires connection to the adapter plate 410, the aforementioned MEMS detection device 100 can be designed and manufactured by directly optimizing the existing adapter plate 410 and combining it with the adjustment cover 430, which effectively reduces false detections and missed detections, is easy to manufacture, and has low cost.

[0039] like Figures 1 to 3 and Figure 7 As shown, the MEMS detection device 100 effectively avoids false detection interference signals from the third 221 and the fourth 222 of the non-target detection object 22. Simultaneously, by enhancing signal strength, it effectively solves the problem of missed detection of the target detection object 21 corresponding to the fifth 213 of the target detection object 21. The above detection device can be used to detect liquids or solids, and does not impose requirements on the number or shape of the reflective surfaces of the target detection object 21.

[0040] Alternatively, please refer to Figure 8 and Figure 9 The outer edge E1 of the orthographic projection of the sound source port onto the second opening is located within the outer edge E2 of the orthographic projection of the through hole onto the second opening. Alternatively, please refer to... Figure 10 The outer edge E1 of the orthographic projection of the sound source port onto the second opening completely coincides with the outer edge E2 of the orthographic projection of the through hole onto the second opening. Alternatively, please refer to... Figure 11 A portion of the outer edge E1 of the orthographic projection of the sound source port on the second opening coincides with the outer edge E2 of the orthographic projection of the through hole on the second opening, while the remaining portion lies within the outer edge E2 of the orthographic projection of the through hole on the second opening.

[0041] Alternatively, please refer to Figure 8 and Figure 9 The outer edge E2 of the orthographic projection of the through hole onto the second opening is located within the outer edge E3 of the orthographic projection of the first opening onto the second opening, or, please refer to... Figure 10The outer edge E2 of the orthographic projection of the through hole onto the second opening completely coincides with the outer edge E3 of the orthographic projection of the first opening onto the second opening. Alternatively, please refer to... Figure 11 A portion of the outer edge E2 of the orthographic projection of the through hole onto the second opening coincides with the outer edge E3 of the orthographic projection of the first opening onto the second opening, while the remaining portion lies within the outer edge E3 of the orthographic projection of the first opening onto the second opening.

[0042] Alternatively, please refer to Figure 8 and Figure 9 The outer edge E3 of the orthographic projection of the first opening onto the second opening lies within the outer edge E4 of the second opening, or, please refer to... Figure 10 The outer edge E3 of the orthographic projection of the first opening onto the second opening completely coincides with the outer edge E4 of the second opening. Alternatively, please refer to... Figure 11 A portion of the outer edge E3 of the first opening projected onto the second opening coincides with the outer edge E4 of the second opening, while the remaining portion lies within the outer edge E4 of the second opening.

[0043] It should be noted that the orthographic projection of a structure onto the second opening 432 refers to the projection obtained by projecting the structure onto the projection plane using projection lines perpendicular to the projection plane, with the plane containing the second opening 432 as the projection plane. For example, the orthographic projection of the sound source port 421 onto the second opening 432 refers to the projection obtained by projecting the sound source port 421 onto the projection plane using projection lines perpendicular to the projection plane, with the plane containing the sound source port 421 as the projection plane.

[0044] Preferably, the outer edge E1 of the orthographic projection of the sound source port onto the second opening is located within the outer edge E2 of the orthographic projection of the through hole onto the second opening, the outer edge E2 of the orthographic projection of the through hole onto the second opening is located within the outer edge E3 of the orthographic projection of the first opening onto the second opening, and the outer edge E3 of the orthographic projection of the first opening onto the second opening is located within the outer edge E4 of the second opening. This arrangement can further reduce the probability of false detection and missed detection.

[0045] In the foregoing embodiments, the cross-sectional shapes of the sound source port 421, through hole 411, first opening 431, and second opening 432 are not limited. That is, the cross-sections of the sound source port 421, through hole 411, first opening 431, and second opening 432 can be of any shape, and the shapes of each cross-section can be the same or different. Here, the cross-section refers to the cross-section perpendicular to the sequential arrangement direction of the MEMS ultrasonic sensor 420, adapter plate 410, and adjustment cover 430.

[0046] Please refer to Figure 12If the cross-sections of the sound source port 421, through hole 411, first opening 431, and second opening 432 are all circular, then the diameter D1 of the sound source port ≤ the diameter D2 of the through hole ≤ the diameter D3 of the first opening ≤ the diameter D4 of the second opening. The thickness H1 of the adapter plate and the height H2 of the adjustment cover need to be designed according to the dimensions of the sound source port 421 of the MEMS ultrasonic sensor 420.

[0047] Optionally, the sound source port 421, through hole 411, first opening 431 and second opening 432 have the same cross-sectional shape and coincide in geometric center, which is more conducive to signal propagation and concentration.

[0048] It's understandable that "all cross-sections have the same shape" means that all cross-sections are the same shape, but their dimensions can be the same or different. For example, all cross-sections may be circular, but their diameters may be different. Or, all cross-sections may be square, but their side lengths may be different.

[0049] Alternatively, please refer to Figure 8 The adjustment cover 430 has a cavity 433. The cavity 433 forms a first opening 431 on the first end face of the adjustment cover 430 and a second opening 432 on the second end face of the adjustment cover 430. From the first end face to the second end face, the size of the cavity 433 gradually increases or some areas gradually increase while some areas remain unchanged.

[0050] It should be noted that, in this embodiment, the shape of the sidewall of cavity 433 is not limited, such as... Figure 8 As shown, the sidewalls of cavity 433 can be sloping and smooth sidewalls, or, as... Figure 13 As shown, the sidewall of cavity 433 is an arc-shaped sidewall. Of course, the sidewall of cavity 433 can also be stepped, corrugated, etc.

[0051] Alternatively, please refer to Figure 14 The adapter plate 410 includes a first sub-adapter plate 412 and a second sub-adapter plate 413 electrically connected to the first sub-adapter plate 412. One surface of the first sub-adapter plate 412 is connected to the MEMS ultrasonic sensor 420, and the opposite surface is connected to the second sub-adapter plate 413. The surface of the second sub-adapter plate 413 facing away from the first sub-adapter plate 412 is connected to the adjustment cover 430. A through hole 411 penetrates the first sub-adapter plate 412 and the second sub-adapter plate 413.

[0052] At this point, the adapter plate 410 consists of two layers, including a first sub-adapter plate 412 and a second sub-adapter plate 413. During installation, the MEMS ultrasonic sensor 420 is mounted on the first sub-adapter plate 412, and then the MEMS ultrasonic sensor 420 and the first sub-adapter plate 412 are mounted together on one side of the second sub-adapter plate 413. The adjustment cover 430 is mounted on the other side of the second sub-adapter plate 413. Generally speaking, the surface area of ​​the first sub-adapter plate 412 is smaller than the surface area of ​​the second sub-adapter plate 413.

[0053] It should be noted that, in this embodiment, the number of the first sub-adapter plate 412 and the second sub-adapter plate 413 is not limited, and the number of the first sub-adapter plate 412 and the second sub-adapter plate 413 can be equal and correspond one-to-one (e.g., Figure 14 (As shown), they can also be unequal, being two to one (e.g.) Figure 15 (As shown) It can be either many-to-one or many-to-many. For example, in an adapter board 410, there are two first sub-adapter boards 412 and one second sub-adapter board 413. Both first sub-adapter boards 412 are connected to the second sub-adapter board 413, and MEMS ultrasonic sensors 420 are respectively installed on the surfaces of the two first sub-adapter boards 412 that are away from the second sub-adapter board 413.

[0054] Optionally, the first sub-adapter plate 412 is provided with a first sub-through hole 4121, and the second sub-adapter plate 413 is provided with a second sub-through hole 4131. The outer edge E21 of the orthographic projection of the first sub-through hole on the second opening is located within the outer edge E22 of the orthographic projection of the second sub-through hole on the second opening. Alternatively, the outer edge E21 of the orthographic projection of the first sub-through hole on the second opening and the outer edge E22 of the orthographic projection of the second sub-through hole on the second opening completely coincide. Or, a portion of the outer edge E21 of the orthographic projection of the first sub-through hole on the second opening coincides with the outer edge E22 of the orthographic projection of the second sub-through hole on the second opening, and the remaining portion is located within the outer edge E22 of the orthographic projection of the second sub-through hole on the second opening.

[0055] Furthermore, the outer edge E1 of the orthographic projection of the sound source port on the second opening is located within the outer edge E21 of the orthographic projection of the first sub-through hole on the second opening; or, the outer edge E1 of the orthographic projection of the sound source port on the second opening completely coincides with the outer edge E21 of the orthographic projection of the first sub-through hole on the second opening; or, a portion of the outer edge E1 of the orthographic projection of the sound source port on the second opening coincides with the outer edge E21 of the orthographic projection of the first sub-through hole on the second opening, while the remaining portion is located within the outer edge E2 of the orthographic projection of the through hole on the second opening.

[0056] The outer edge E22 of the orthographic projection of the second sub-through hole on the second opening is located within the outer edge E3 of the orthographic projection of the first opening on the second opening; or, the outer edge E22 of the orthographic projection of the second sub-through hole on the second opening completely coincides with the outer edge E3 of the orthographic projection of the first opening on the second opening; or, a portion of the outer edge E22 of the orthographic projection of the second sub-through hole on the second opening coincides with the outer edge E3 of the orthographic projection of the first opening on the second opening, while the remaining portion is located within the outer edge E3 of the orthographic projection of the first opening on the second opening.

[0057] The outer edge E3 of the orthographic projection of the first opening onto the second opening is located within the outer edge E4 of the second opening; or, the outer edge E3 of the orthographic projection of the first opening onto the second opening completely coincides with the outer edge E4 of the second opening; or, a portion of the outer edge E3 of the orthographic projection of the first opening onto the second opening coincides with the outer edge E4 of the second opening, while the remaining portion is located within the outer edge E4 of the second opening.

[0058] Preferably, the outer edge E1 of the orthographic projection of the sound source port onto the second opening is located within the outer edge E21 of the orthographic projection of the first sub-through hole onto the second opening; the outer edge E21 of the orthographic projection of the first sub-through hole onto the second opening is located within the outer edge E22 of the orthographic projection of the second sub-through hole onto the second opening; the outer edge E22 of the orthographic projection of the second sub-through hole onto the second opening is located within the outer edge E3 of the orthographic projection of the first opening onto the second opening; and the outer edge E3 of the orthographic projection of the first opening onto the second opening is located within the outer edge E4 of the second opening. This arrangement can further reduce the probability of false detection and missed detection.

[0059] Alternatively, please refer to Figure 16 The adapter plate 410 and / or the adjustment cover 430 are provided with a protective layer 500. The protective layer 500 is used to prevent external substances from entering the sound source port 421 of the MEMS ultrasonic sensor 420, so as not to affect the normal operation of the MEMS ultrasonic sensor 420.

[0060] For example, the surface of the adapter plate 410 facing the MEMS ultrasonic sensor 420 is provided with a protective layer 500, which covers the through hole 411; or, the surface of the adapter plate 410 facing the adjustment cover 430 is provided with a protective layer 500, which covers the through hole 411; or, the end face of the adjustment cover 430 facing away from the adapter plate 410 is provided with a protective layer 500, which covers the second opening 432; or, please refer to... Figure 17A protective layer 500 covers the side wall of the cavity 433 of the adjustment cover 430, and the protective layer 500 also covers the first opening 431 or the second opening 432 of the adjustment cover 430. When there are multiple layers of adapter plates 410, the protective layer 500 can also be disposed between two adjacent sub-adapter plates and cover the sub-through holes on the sub-adapter plates 410. The above are only examples of several protective layer 500 settings. Those skilled in the art can adjust and combine the above examples to obtain more protective layer 500 setting schemes.

[0061] The protective layer 500 can be made of plastic polymers (such as PVC, PET, PC, PP, etc.), nylon (including nylons with relevant properties), metal materials (such as stainless steel), adhesive materials (such as environmentally friendly adhesives, foam adhesives, etc.).

[0062] Optionally, the number of adjustment covers 430 is at least two, the at least two adjustment covers 430 have different degrees of signal adjustment, and one of the at least two adjustment covers 430 is connected to the adapter plate 410.

[0063] By configuring two or more adjustment covers 430 with different signal adjustment degrees for a MEMS detection device 100, the user can select the appropriate adjustment cover 430 to install on the adapter plate 410 according to actual needs, such as different target detection ranges 32. In this way, the adaptability of the MEMS detection device 100 can be improved.

[0064] Alternatively, please refer to Figure 6 The number of MEMS ultrasonic sensors 420 is at least two, and the number of through holes 411 and adjustment covers 430 are equal to the number of MEMS ultrasonic sensors 420, and they correspond one-to-one.

[0065] That is, the MEMS ultrasonic sensor 420, the through hole 411 and the adjustment cover 430 are in a one-to-one correspondence. At this time, different MEMS ultrasonic sensors 420 can be used to detect different target objects 21, or different MEMS ultrasonic sensors 420 can be used to detect the same target object 21.

[0066] Alternatively, please refer to Figure 18 The number of MEMS ultrasonic sensors 420 is at least two, the number of through holes 411 and adjustment covers 430 is one each, and at least two MEMS ultrasonic sensors 420 correspond to through holes 411.

[0067] That is, all MEMS ultrasonic sensors 420 correspond to the same through hole 411, and an adjustment cover 430 is provided on the other side of the through hole 411.

[0068] In other embodiments, some MEMS ultrasonic sensors 420, through holes 411, and adjustment covers 430 may have a one-to-one correspondence, with some MEMS ultrasonic sensors 420 simultaneously corresponding to one through hole 411 and one adjustment cover 430. Figure 17 and Figure 18 The combination of.

[0069] Optionally, the MEMS detection device 100 also includes a control component for controlling the transmitting component 200 and / or the receiving component 300.

[0070] Furthermore, the control component is used to control the MEMS ultrasonic sensor 420 in the transmitting component 200 and / or receiving component 300.

[0071] Another aspect of the embodiments of this application, please refer to Figure 19 A design and usage method for a MEMS detection device is provided, comprising: S11: Determine the structure and quantity of the transmitting and receiving components based on the target detection object and the target detection range.

[0072] S12: Determine the structure and number of the MEMS ultrasonic sensor, adjustment cover, adapter plate, and through holes on the adapter plate according to the structure and number of the transmitting and receiving components. The adjustment cover and adapter plate are used to adjust the signal detection range of the MEMS ultrasonic sensor. The adjustment cover has a first opening and a second opening.

[0073] S13: The MEMS ultrasonic sensor and the adjustment cover are respectively mounted on two opposite surfaces of the adapter plate to obtain a MEMS detection device, wherein the sound source port of the MEMS ultrasonic sensor faces the through hole, and the first opening of the adjustment cover faces the adjustment cover.

[0074] S14: Control the transmitting component to transmit ultrasonic signals to the target object and control the receiving component to receive the echo signals reflected back by the target object.

[0075] S15: Determine the peak signal characteristics corresponding to the reflecting surface of the target object based on the echo signal, and obtain the characteristic parameters of the target object based on the peak signal characteristics.

[0076] Please refer to the reference. Figures 3 to 5Based on the target object 21 and the target detection range 32, the specific structure of the MEMS detection device 100 is designed. After obtaining the MEMS detection device 100, it is used to emit ultrasonic waves towards the target object 21 and receive the echo signals reflected by the target reflector. The peak signal characteristics corresponding to the reflecting surface of the target object 21 are obtained based on the echo signals, and finally, the characteristic parameters of the target object 21 are obtained based on the peak signal characteristics. The characteristic parameters of the target object 21 include, but are not limited to, the height of the target object 21, the number of reflecting surfaces of the target object 21, and the height difference between the reflecting surfaces of the target object 21.

[0077] The MEMS detection device 100 obtained by adopting the above design and usage method can effectively reduce the problems of false detection and missed detection.

[0078] Alternatively, please refer to Figures 8 to 11 The outer edge E1 of the orthographic projection of the sound source port on the second opening is located within the outer edge E2 of the orthographic projection of the through hole on the second opening; or, the outer edge E1 of the orthographic projection of the sound source port on the second opening completely coincides with the outer edge E2 of the orthographic projection of the through hole on the second opening; or, a portion of the outer edge E1 of the orthographic projection of the sound source port on the second opening coincides with the outer edge E2 of the orthographic projection of the through hole on the second opening, and the remaining portion is located within the outer edge E2 of the orthographic projection of the through hole on the second opening.

[0079] The outer edge E2 of the orthographic projection of the through hole on the second opening is located within the outer edge E3 of the orthographic projection of the first opening on the second opening; or, the outer edge E2 of the orthographic projection of the through hole on the second opening completely coincides with the outer edge E3 of the orthographic projection of the first opening on the second opening; or, a portion of the outer edge E2 of the orthographic projection of the through hole on the second opening coincides with the outer edge E3 of the orthographic projection of the first opening on the second opening, while the remaining portion is located within the outer edge E3 of the orthographic projection of the first opening on the second opening.

[0080] The outer edge E3 of the orthographic projection of the first opening onto the second opening is located within the outer edge E4 of the second opening; or, the outer edge E3 of the orthographic projection of the first opening onto the second opening completely coincides with the outer edge E4 of the second opening; or, a portion of the outer edge E3 of the orthographic projection of the first opening onto the second opening coincides with the outer edge E4 of the second opening, while the remaining portion is located within the outer edge E4 of the second opening.

[0081] By limiting the dimensions of the sound source port 421, through hole 411, first opening 431 and second opening 432, the probability of false detection and missed detection can be further reduced.

[0082] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A MEMS detection device, characterized in that, include: A transmitting assembly and a receiving assembly, wherein the transmitting assembly and / or the receiving assembly includes: an adapter plate, a MEMS ultrasonic sensor connected to two surfaces opposite to the adapter plate, and an adjustment cover; the adapter plate has a through hole, and the adjustment cover has a first opening and a second opening opposite to each other; the sound source port of the MEMS ultrasonic sensor and the first opening are respectively oriented toward the through hole; the adapter plate and the adjustment cover are used to adjust the signal detection range of the MEMS ultrasonic sensor.

2. The MEMS detection device as described in claim 1, characterized in that, The outer edge of the orthographic projection of the sound source port onto the second opening is located within the outer edge of the orthographic projection of the through hole onto the second opening; or, the outer edge of the orthographic projection of the sound source port onto the second opening completely coincides with the outer edge of the orthographic projection of the through hole onto the second opening; or, a portion of the outer edge of the orthographic projection of the sound source port onto the second opening coincides with the outer edge of the orthographic projection of the through hole onto the second opening, while the remaining portion is located within the outer edge of the orthographic projection of the through hole onto the second opening. The outer edge of the orthographic projection of the through hole onto the second opening is located within the outer edge of the orthographic projection of the first opening onto the second opening; or, the outer edge of the orthographic projection of the through hole onto the second opening completely coincides with the outer edge of the orthographic projection of the first opening onto the second opening; or, a portion of the outer edge of the orthographic projection of the through hole onto the second opening coincides with the outer edge of the orthographic projection of the first opening onto the second opening, while the remaining portion is located within the outer edge of the orthographic projection of the first opening onto the second opening. The outer edge of the orthographic projection of the first opening onto the second opening is located within the outer edge of the second opening; or, the outer edge of the orthographic projection of the first opening onto the second opening completely coincides with the outer edge of the second opening; or, a portion of the outer edge of the orthographic projection of the first opening onto the second opening coincides with the outer edge of the second opening, while the remaining portion is located within the outer edge of the second opening.

3. The MEMS detection device as described in claim 1, characterized in that, The adjustment cover has a cavity, the cavity forming the first opening on the first end face of the adjustment cover and the second opening on the second end face of the adjustment cover. From the first end face to the second end face, the size of the cavity gradually increases or some areas gradually increase while others remain unchanged.

4. The MEMS detection device as described in claim 1, characterized in that, The adapter plate includes a first sub-adapter plate and a second sub-adapter plate electrically connected to the first sub-adapter plate. One surface of the first sub-adapter plate is connected to the MEMS ultrasonic sensor, and the opposite surface is connected to the second sub-adapter plate. The surface of the second sub-adapter plate facing away from the first sub-adapter plate is connected to the adjustment cover. The through hole penetrates through the first sub-adapter plate and the second sub-adapter plate.

5. The MEMS detection device as described in claim 4, characterized in that, The first sub-adapter plate is provided with a first sub-through hole, and the second sub-adapter plate is provided with a second sub-through hole. The outer edge of the orthographic projection of the first sub-through hole on the second opening is located within the outer edge of the orthographic projection of the second sub-through hole on the second opening. Alternatively, the outer edge of the orthographic projection of the first sub-through hole on the second opening completely coincides with the outer edge of the orthographic projection of the second sub-through hole on the second opening. Or, a portion of the outer edge of the orthographic projection of the first sub-through hole on the second opening coincides with the outer edge of the orthographic projection of the second sub-through hole on the second opening, and the remaining portion is located within the outer edge of the orthographic projection of the second sub-through hole on the second opening.

6. The MEMS detection device as described in claim 1, characterized in that, The adapter plate and / or the adjustment cover are provided with a protective layer, which is used to prevent external substances from entering the sound source port of the MEMS ultrasonic sensor.

7. The MEMS detection device as described in claim 1, characterized in that, The sound source port, the through hole, the first opening, and the second opening have the same cross-sectional shape and their geometric centers coincide.

8. The MEMS detection device as described in claim 1, characterized in that, The number of adjustment covers is at least two, the at least two adjustment covers have different degrees of signal adjustment, and at least one of the at least two adjustment covers is connected to the adapter plate.

9. The MEMS detection device as described in claim 1, characterized in that, The number of MEMS ultrasonic sensors is at least two, and the number of through holes and adjustment covers are equal to the number of MEMS ultrasonic sensors, and they correspond one-to-one.

10. The MEMS detection device as described in claim 1, characterized in that, The number of MEMS ultrasonic sensors is at least two, the number of through holes and the number of adjustment covers are one each, and at least two MEMS ultrasonic sensors correspond to the through holes.

11. A design and method for using a MEMS detection device, characterized in that, include: The structure and quantity of the transmitting and receiving components are determined based on the target object and the target detection range; The structure and number of the MEMS ultrasonic sensor, the adjustment cover, the adapter plate, and the through holes on the adapter plate are determined according to the structure and number of the transmitting component and the receiving component. The adjustment cover and the adapter plate are used to adjust the signal detection range of the MEMS ultrasonic sensor. The adjustment cover has a first opening and a second opening. The MEMS ultrasonic sensor and the adjustment cover are respectively mounted on two opposite surfaces of the adapter plate to obtain a MEMS detection device, wherein the sound source port of the MEMS ultrasonic sensor faces the through hole, and the first opening of the adjustment cover faces the adjustment cover. The transmitting component is controlled to transmit an ultrasonic signal toward the target object, and the receiving component is controlled to receive the echo signal reflected back by the target object. The peak signal characteristics corresponding to the reflecting surface of the target object are determined based on the echo signal, and the characteristic parameters of the target object are obtained based on the peak signal characteristics.

12. The design and method of using the MEMS detection device as described in claim 11, characterized in that, The outer edge of the orthographic projection of the sound source port onto the second opening is located within the outer edge of the orthographic projection of the through hole onto the second opening; or, the outer edge of the orthographic projection of the sound source port onto the second opening completely coincides with the outer edge of the orthographic projection of the through hole onto the second opening; or, a portion of the outer edge of the orthographic projection of the sound source port onto the second opening coincides with the outer edge of the orthographic projection of the through hole onto the second opening, while the remaining portion is located within the outer edge of the orthographic projection of the through hole onto the second opening. The outer edge of the orthographic projection of the through hole onto the second opening is located within the outer edge of the orthographic projection of the first opening onto the second opening; or, the outer edge of the orthographic projection of the through hole onto the second opening completely coincides with the outer edge of the orthographic projection of the first opening onto the second opening; or, a portion of the outer edge of the orthographic projection of the through hole onto the second opening coincides with the outer edge of the orthographic projection of the first opening onto the second opening, while the remaining portion is located within the outer edge of the orthographic projection of the first opening onto the second opening. The outer edge of the orthographic projection of the first opening onto the second opening is located within the outer edge of the second opening; or, the outer edge of the orthographic projection of the first opening onto the second opening completely coincides with the outer edge of the second opening; or, a portion of the outer edge of the orthographic projection of the first opening onto the second opening coincides with the outer edge of the second opening, while the remaining portion is located within the outer edge of the second opening.

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