Dust-free drag chain cable

Abstract

The invention relates to the technical field of dust-free cables, and discloses a dust-free drag chain cable, the dust-free drag chain cable comprises a cable and a drag chain, the cable adopts a dynamic response type shielding layer, a three-layer gradient elastic buffer structure and a self-repairing conductor core wire, and high-frequency vibration absorption, impact resistance and damage self-repairing are realized. The drag chain is formed by hinging modular keel blocks, multidirectional flexible bending and offset resistance are achieved through guide grooves, limiting columns and triangular protruding limiting parts of the clamping connection parts and the clamping base parts, particulate matter is captured and decomposed in combination with an electrostatic adsorption layer in the dust-free sleeve, and the requirement for the high-cleanliness environment is met. The problems that a traditional drag chain cable is prone to abrasion, difficult to repair, sensitive to electromagnetic interference and insufficient in cleanliness are solved, and the drag chain cable is suitable for high-precision scenes such as semiconductors and medical equipment.

Description

Technical Field

[0001] This invention relates to the field of cleanroom cable technology, and more particularly to a cleanroom drag chain cable. Background Technology

[0002] In high-cleanliness industrial settings such as semiconductor wafer manufacturing and precision optical equipment, drag chain cables must withstand linear speeds exceeding 10 m / s in ISO Class 5 (ISO 14644-1 standard) and higher cleanroom environments. 7 The high-frequency reciprocating motion of the cable. This dynamic operating condition places stringent requirements on the mechanical reliability and cleanliness control of the cable: on the one hand, the cable sheath material must suppress the release of ultrafine particles during severe bending and friction; on the other hand, the cable structure must be dynamically adapted to the cable chain system to avoid mechanical resonance or stress concentration failure caused by stiffness mismatch.

[0003] Traditional industrial drag chain cables suffer from the following technical bottlenecks: 1. Dynamic wear particle contamination: During the bending and friction process of cable chains, conventional PVC sheath materials generate a large number of particles with a diameter >0.3μm due to molecular chain breakage. Actual measurements show that the concentration of particulate matter released per kilometer of travel is as high as 2.8 × 10⁻⁶. 5 Units / m³ (far exceeding the ISO Class 5 limit of 3.5×10⁻⁶) 4 (particles / m³). The existing improved solution, using a silicone-modified sheath, reduces particulate matter to 1.2 × 10⁻⁶. 5 The material modulus increased by 1 / m³, but the increased material modulus led to an increase in the cable bending stiffness to 210 N / mm² (IEC61196-1 test), causing a 38% decrease in the resonant frequency of the cable chain system and exacerbating the risk of fatigue fracture of the mechanical structure.

[0004] 2. The bulletproof wire mesh of traditional cables is prone to metal fatigue fracture when frequently bent, resulting in a decrease in shielding performance.

[0005] 3. Cable chain-cable synergistic failure: When the cable chain length exceeds 5m, stress concentration at the hinge joints occurs in the internal keel structure during reciprocating motion, causing the nylon-based keel to fail within 10... 6 After the second cycle, cracks propagated, eventually leading to cable compression and breakage. Because traditional cables are fixed to drag chains with rigid clips, micron-level displacement differences are generated during high-speed reversal due to acceleration impact (peak value up to 3g), resulting in a 4.2-fold increase in the wear rate of the sheath surface.

[0006] 4. Assembly process defects: Most existing drag chain cables adopt a segmented assembly process. The cable and drag chain keel are assembled by manual threading. Due to the centering deviation (>0.5mm), the cable and the edge of the guide groove of the keel will scrape during movement. The measured scraping force fluctuation range reaches ±15N, which accelerates the wear of the sheath material and the release of particulate matter.

[0007] The aforementioned problems severely restrict the operating efficiency and reliability of high-cleanliness environment equipment, and there is an urgent need for a drag chain cable system that integrates innovation in materials, structure and assembly process to overcome the comprehensive technical barriers of dynamic particle control, mechanical stress dissipation and assembly precision. Summary of the Invention

[0008] To address the aforementioned problems in the prior art, this invention provides a dust-free drag chain cable.

[0009] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows: A dust-free drag chain cable includes a cable and a drag chain. The cable includes a conductor core, a shielding layer, and a protective layer. The conductor core is externally wrapped with the shielding layer and the protective layer. The shielding layer comprises shape memory alloy wires and yarns, wherein the shape memory alloy wires account for 30%-45%; The protective layer comprises a three-layer elastic buffer structure, consisting of a silicone rubber layer, a polyurethane composite layer, and a fiber polymer layer from the inside out.

[0010] Preferably, the yarn includes a carbon nanotube conductive yarn, and the carbon nanotube yarn is connected to a voltage regulation module.

[0011] Preferably, the carbon nanotube conductive yarn is a fiber or yarn structure with carbon nanotubes (CNTs) as the core material and possessing conductive properties. Its core feature lies in utilizing the high conductivity, high mechanical strength, and flexibility of carbon nanotubes, combined with textile processes to form a functional yarn.

[0012] Conductive carbon nanotube yarns are woven into ropes as sensing elements, enabling breakage warnings by monitoring changes in yarn resistance. When the rope is stretched, the resistance of the conductive yarns changes significantly due to deformation or breakage (e.g., the resistance becomes infinite), thus triggering the warning.

[0013] Preparation method of carbon nanotube conductive yarn: By overlapping carbon nanotube membranes end to end and twisting them into yarn, they are woven together with ordinary fibers to form a composite rope. Multiple conductive yarns with different breaking elongation rates can be used for graded early warning.

[0014] Preferably, the silicone rubber layer is made of a liquid silicone layer and a rubber layer, wherein the rubber layer has a closed space and the closed space contains liquid silicone, and has high tensile strength, high tear strength and temperature resistance.

[0015] Preferably, the polyurethane composite layer can be prepared by ball milling, 3D printing, and surface texturing processes, and is widely used in electromagnetic shielding, flexible sensing, corrosion-resistant coatings, thermal management, and industrial protection.

[0016] Furthermore, a protective layer and a shielding layer are sequentially sleeved on the outside of the conductor core wire; a silicone rubber layer is also sleeved on the outside of the shielding layer.

[0017] Furthermore, the conductor core includes an electrolytic copper conductor with a tin-plated surface.

[0018] Furthermore, the phase transition temperature of shape memory alloy wire is 40℃-60℃, and its mesh density shrinks as the temperature increases.

[0019] Furthermore, the cable chain includes at least two keel blocks connected end to end in sequence; the keel block includes a locking part at the head and a locking part at the tail; The snap-fit ​​part is provided with a crescent-shaped post and a limiting post, and the snap-fit ​​seat part is provided with a snap-fit ​​hole and a limiting hole. Both the snap-fit ​​hole and the limiting hole are designed with two guide grooves along the bottom. The snap-fit ​​parts of two adjacent keel blocks are movably connected in the snap-fit ​​seat part, and the snap-fit ​​parts of two adjacent keel blocks are hinged to the snap-fit ​​part.

[0020] Furthermore, the card holder also includes a limiting part, which is designed as a triangular protrusion, and one side of the protrusion of the limiting part abuts against the outer edge of the card holder.

[0021] Furthermore, the upper part of the crescent-shaped column and the limiting column is provided with a bevel, which slides in conjunction with the snap-fit ​​hole and the limiting hole through the bevel.

[0022] Furthermore, the cable is disposed within a plurality of flat structures connected sequentially in the width direction by the butt joints of cleanroom sleeves to form a cable layer; the keel blocks and the secondary keels made of shape memory alloy material are connected sequentially to form a composite keel drag chain, and the composite keel drag chain is disposed within a plurality of flat structures connected sequentially in the width direction by the butt joints of cleanroom sleeves to form a drag chain layer; the cable layer and the drag chain layer are superimposed to form a cleanroom drag chain cable, and the drag chain layer is composed of cleanroom sleeves that are sleeved on rows of keel blocks, the keel blocks being a rigid structure, and the secondary keels having the same structure as the keel blocks; The cable layer and the drag chain layer are stacked in single or multiple layers through fixed partitions, and are clamped and fixed between two clamping blocks by abutment plates.

[0023] Preferably, the card holder further includes a limiting part, which is a triangular protrusion design, and one side of the protrusion of the limiting part abuts against the outer edge of the card holder.

[0024] The card holder is also provided with a limiting plate, which is used to limit the upward movement of the card holder.

[0025] Furthermore, both ends of the cleanroom sleeve are equipped with airtight rings for sealing.

[0026] Furthermore, there is a gap between the cleanroom sleeve and the cable or cable chain, and the airtight ring is disposed in the gap.

[0027] A dust-free drag chain cable assembly device includes: a workbench, an assembly conveyor rail, a drag chain assembly mechanism, a cable assembly mechanism, and a final assembly mechanism; the workbench is provided with an assembly conveyor rail, and the assembly conveyor rail is provided with a plurality of assembly stations, and different assembly stations are respectively provided with drag chain assembly mechanism, cable assembly mechanism, and final assembly mechanism. The cable chain assembly mechanism uses a robotic arm equipped with a camera and an electromagnetic adsorption gripper to assemble the cable chain; the cable assembly mechanism includes a laser positioning module, a piezoelectric fine-tuning platform, and a magnetic coupling unit to assemble the cable; the final assembly mechanism includes a cleanroom sleeve assembly module, a self-cleaning final assembly module, and an intelligent pressing and curing unit; these are used to attach cleanroom sleeves to the outside of the cable chain and the cable respectively, and to assemble the cleanroom sleeves of the cable chain and the cable.

[0028] Preferably, the assembly conveyor rail is a conveyor belt, and the cable chain and cable are mounted on the conveyor belt for processing.

[0029] Preferably, the robotic arm moves above the material tray, the camera captures the drag chain keel block, and the pose data is output through a deep learning model; the electromagnetic gripper adjusts the distribution of adsorption points according to the pose data, activates the corresponding electromagnets, and grasps the keel block in a non-contact manner.

[0030] Preferably, the cable assembly mechanism includes a laser positioning module, a piezoelectric fine-tuning platform, and a magnetic coupling unit for assembling cables.

[0031] The laser positioning module includes multiple miniature laser aligners (such as infrared point sources / crosshair projectors); as the cable end advances to the assembly front end, the laser module emits three reference beams; a reflective target or CCD optical receiver is also pre-set at the cable chain entry end; the piezoelectric fine-tuning platform constructs six degrees of freedom control (XYZ + pitch / yaw / roll) through three sets of piezoelectric ceramic actuators, and automatically fine-tunes to the target insertion attitude after receiving laser positioning data; the magnetic coupling unit has neodymium iron boron magnetic strips on both sides of the cable layer, which will generate magnetic traction when approaching the cable chain keel module, thereby synchronously activating the Hall sensor array inside the keel. If the detected change in magnetic flux meets the set "docking window value", the system determines "can be attracted"; thus automatically controlling the platform to advance and flip to complete "attraction + rotation locking".

[0032] Compared with the prior art, the beneficial effects of the technical solution of the present invention are:

[0033] ① Intelligent dynamic shielding and adaptive protection The cable uses shape memory alloy wire (SMA) and yarn braiding to form a dynamic shielding layer (SMA accounts for 30%-45%). Through its non-linear shrinkage characteristics, it achieves dual response regulation for temperature and electromagnetic interference. When the temperature exceeds the phase change threshold (40-60℃) or electromagnetic fluctuations are detected, the shielding mesh density adaptively shrinks to form a gradient protective barrier, thereby improving shielding effectiveness.

[0034] ② Gradient buffering and self-repairing synergistic mechanism The cable is equipped with a three-layer gradient elastic buffer structure (silicone rubber layer / polyurethane composite layer / fiber polymer layer) to achieve stress dissipation in stages: the inner silicone rubber layer absorbs high-frequency micro-vibrations, the middle composite layer disperses medium-frequency impacts, and the outer fiber polymer layer resists low-frequency large deformations.

[0035] ③ Both ends of the cleanroom cover are equipped with airtight rings for sealing, which effectively prevents external particles from entering the cable and cable chain, thus effectively improving the dustproof performance.

[0036] ④ The limiting holes, limiting parts, and limiting plates between the cable chain sections abut against the limiting posts, the outer edges of the card holder, and the card holder, respectively, to limit the movement; this makes the assembled structure more stable, less prone to displacement or loosening during operation, and improves mechanical reliability. Specifically, the keel block (rigid) and the secondary keel (shape memory alloy flexible material) are alternately connected to form a composite structure; it can realize automatic stress relief in local areas, and is especially suitable for complex 3D motion paths, with a lifespan 2-3 times longer than traditional one-piece injection molded cable chains. Attached Figure Description

[0037] To more clearly illustrate the technical solution of the present invention, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the cable structure; Figure 2 This is a schematic diagram of the keel block structure; Figure 3 This is a bottom view of the keel block; Figure 4 This is a flowchart of the insertion and assembly process for the keel blocks; Figure 5 This is the first schematic diagram of the interlocking and fitting of adjacent keel blocks; Figure 6 This is a side view of the interlocking fit between adjacent keel blocks; Figure 7 This is a schematic diagram of the structure of a dust-free drag chain cable; Figure 8This is a structural diagram for assembling equipment; Figure 9 This is a schematic diagram of the shielding layer structure; Figure 10 This is a schematic diagram of the installation of the airtight ring.

[0039] The accompanying figure is labeled as follows: 1. Conductor core wire; 2. Shielding layer; 3. Silicone rubber layer; 4. Polyurethane composite layer; 5. Fiber polymer layer; 6. Keel block; 601. Snap-fit ​​part; 602. Snap-fit ​​seat part; 603. Half-moon column; 604. Limiting post; 605. Snap-fit ​​hole; 606. Limiting hole; 607. Guide groove; 608. Limiting part; 7. Fixed partition; 8. Abutment plate; 9. Fixture block; 10. Workbench; 11. Assembly conveyor rail; 12. Cable chain assembly mechanism; 13. Cable assembly mechanism; 14. Final assembly mechanism; 15. Airtight ring. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this application. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the described embodiments without creative effort are within the scope of protection of this application.

[0041] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0042] Example 1 like Figure 1-10 As shown, this embodiment discloses a dust-free drag chain cable, including a cable comprising a conductor core 1, a shielding layer 2, and a protective layer; the conductor core 1 is externally wrapped with the shielding layer 2 and the protective layer; The shielding layer 2 comprises shape memory alloy wires and yarns, with the shape memory alloy wires accounting for 30%-45%; The protective layer consists of a three-layer elastic buffer structure, from the inside out: a silicone rubber layer 3, a polyurethane composite layer 4, and a fiber polymer layer 5.

[0043] The conductor core 1 is sequentially fitted with a protective layer and a shielding layer 2; the shielding layer 2 is also fitted with a silicone rubber layer 3.

[0044] The conductor core 1 includes an electrolytic copper conductor with a tin-plated surface.

[0045] The phase transition temperature of shape memory alloy wire is 40℃-60℃, and its mesh density shrinks as the temperature increases.

[0046] The yarn includes carbon nanotube conductive yarn.

[0047] Specifically, the cylindrical shape memory alloy wires of the shielding layer 2 are formed by a multi-directional cross-braided structure to form the main load-bearing ribs on the inner wall of the cylinder, and the shape memory alloy wires on the inner wall of the cylinder are spirally wrapped around the protective layer and the cable core wire. The yarns are interwoven to form a mesh structure and are wrapped around the shape memory alloy wire to form the outer wall of the cylinder. The outer wall of the cylinder thus forms a highly stable protective mesh, providing a certain degree of stretchability and tension distribution to the inner wall of the cylinder, preventing local deformation and instability of the internal shape memory alloy wire. The inner wall of the cylinder accounts for 30%-45% of the volume, and the outer wall of the cylinder accounts for 55%-70% of the volume.

[0048] The drag chain cable of this invention achieves core functions such as dynamic response, self-healing, and dust-free operation through the synergistic design of materials and structure. The specific workflow can be divided into the following stages: 1. When the cable is dynamically shielded and transmitting signals, the shielding layer is dynamically adjusted first. The shielding layer 2, which is woven from shape memory alloy wire (SMA) and carbon nanotube conductive yarn, responds to the ambient temperature or electromagnetic interference in real time through the phase change temperature (40-60℃) of the SMA and the voltage regulation module connected to the carbon nanotube yarn.

[0049] When the temperature rises, the SMA undergoes nonlinear contraction ( , The nonlinear exponent (range 1.2-1.5) increases the mesh density, forming a gradient electromagnetic shielding barrier; the voltage regulation module actively optimizes the charge distribution of the carbon nanotube conductive network to suppress high-frequency interference.

[0050] 2. The conductor core adopts a biomimetic stranding design, which can effectively improve flexibility.

[0051] 3. The cable can absorb energy through a three-layer gradient elastic buffer; the inner silicone rubber layer can absorb the high-frequency vibration of the cable (damping coefficient ≥0.35); the middle polyurethane composite layer can disperse the medium-frequency impact of the cable (compressive strength >50MPa); and the outer fiber polymer layer can resist the low-frequency large deformation of the cable (elongation at break >300%).

[0052] 4. When operating in a cleanroom environment, the inner wall of the cleanroom sleeve that connects the cable chain and the cable is equipped with a gradient electrostatic adsorption layer (carbon nanotube polyurethane + nano TiO2 coating). Through electrostatic adsorption (efficiency > 90%) and photocatalytic decomposition (VOCs degradation rate > 85%), particulate matter (PM0.1 level) generated by the cable chain movement is captured or decomposed.

[0053] Under normal operating conditions (temperature ≤40℃, no electromagnetic interference); the mesh density of shielding layer 2 remains at the baseline (SMA without phase change), and the carbon nanotube conductive yarn maintains conventional electromagnetic shielding (>60dB); the protective layer disperses mechanical stress through a gradient elastic structure; the dust-free cover electrostatic adsorption layer continuously adsorbs micro-dust to maintain a clean environment; it can operate stably with low energy consumption and has high shielding effectiveness.

[0054] Under high temperature / high electromagnetic interference conditions (temperature > 40℃ or electromagnetic fluctuations); the shielding layer 2 shrinks when heated, and the density of the shielding mesh increases nonlinearly, forming a gradient protection barrier; the voltage regulation module actively adjusts the charge distribution of the carbon nanotube conductive network to suppress high-frequency interference signals; the fiber polymer layer 5 resists thermal expansion stress; thus improving the dynamic shielding effectiveness.

[0055] When operating dynamically in a clean environment (cable chain bending / extension), the cable chain achieves multi-directional flexible bending through the hinge structure (half-moon column 603 / limiting column 604) of the keel block 6.

[0056] Preferably, the multi-level biomimetic stranded structure includes conductor core wire stranding, with multiple conductor core wires arranged in an interlaced stranding pattern to form a high-strength and tough hierarchical structure.

[0057] Example 2 like Figure 1-10 As shown, this embodiment is a dust-free cable drag chain, the drag chain including at least two keel blocks 6 connected end to end in sequence; the keel block 6 includes a snap-fit ​​part 601 located at the head and a snap-fit ​​part 602 located at the tail. The snap-fit ​​part 601 is provided with a crescent-shaped post 603 and a limiting post 604. The snap-fit ​​part 602 is provided with a snap-fit ​​hole 605 and a limiting hole 606. Both the snap-fit ​​hole 605 and the limiting hole 606 are designed with two guide grooves 607 along the bottom. The snap-fit ​​parts 601 of two adjacent keel blocks 6 are movably connected in the snap-fit ​​part 602. The snap-fit ​​parts 602 of two adjacent keel blocks 6 are hinged to the snap-fit ​​part 601.

[0058] The card holder 602 also includes a limiting part 608, which is a triangular protrusion design, and one side of the protrusion of the limiting part 608 abuts against the outer edge of the card holder 602.

[0059] The upper part of the crescent-shaped column 603 and the limiting column 604 is provided with a bevel, which slides with the snap-fit ​​hole 605 and the limiting hole 606 through the bevel.

[0060] The cable chain of the present invention adopts a modular design to hinge the keel block 6. Through the precise cooperation between the snap-fit ​​part 601 and the snap-fit ​​part 602, it can achieve flexible bending, stable guidance and anti-deviation functions.

[0061] Its workflow is as follows: 1. Hinged assembly between keel blocks 6: The snap-fit ​​parts 601 (including crescent pillars 603 and limiting pillars 604) of adjacent keel blocks 6 are inserted into the snap-fit ​​holes 605 and limiting holes 606 of the snap-fit ​​parts 602 of the adjacent keel blocks 6, so that the chamfers on the upper part of the crescent pillars 603 and limiting pillars 604 slide with the snap-fit ​​holes 605 / limiting holes 606 to achieve hinged locking, ensuring that the keel blocks 6 can rotate around the axis of adjacent keel blocks 6 but cannot be axially dislodged, thus completing the initial positioning.

[0062] 2. Motion guidance and limiting: When the cable chain bends, the adjacent keel blocks 6 rotate around the hinge point. The limiting hole 606 constrains the direction of motion, and the limiting post 604 cooperates with the limiting hole 606 to limit the rotation angle. The limiting hole 606, the limiting part 608, and the limiting plate between the keel blocks 6 respectively abut against the limiting post 604, the outer edge of the card seat part 602, and the card seat part 602 to limit the movement, so as to perform "three-way limiting" and effectively prevent lateral deviation or excessive torsion.

[0063] During the extension, retraction, or bending of the cable chain, the sliding engagement of the crescent-shaped post 603 and the limiting post 604 with the snap-fit ​​hole 605 and the limiting hole 606 provides frictional damping to suppress vibration; the triangular protrusion limiting part 608 corrects the offset in real time to maintain the straightness of the running trajectory.

[0064] During normal bending (low-speed, small-angle bending), adjacent keel blocks 6 rotate around the hinge point (half-moon column 603 and snap-fit ​​hole 605). The limiting hole 606 guides the limiting post 604 to slide within the limiting hole 604. The bending angle is determined by the stroke of the limiting post 604 (bending angle ≤ 45°). The triangular protrusion limiting part 608 makes slight contact with the edge of the snap-fit ​​part 602, providing lateral support but not triggering strong limiting. The limiting hole 606 ensures the consistency of the bending trajectory, which is suitable for wiring of precision equipment.

[0065] The guide groove 607 facilitates the quick engagement of the snap-fit ​​hole 605 and the limiting hole 606 with the limiting post 604 and the locking part 602 of the adjacent keel block 6 through the chamfer.

[0066] When bending / twisting at large angles (high speed, sharp turns), the keel block 6 rotates rapidly, and the limiting post 604 contacts the side wall of the limiting hole 606, limiting the maximum bending angle (bending angle ≤ 60°) and preventing excessive folding. The triangular protrusion limiting part 608 strongly abuts against the edge of the card seat part 602, forming a stable triangular support to resist lateral torsional force; the mechanical limit prevents the internal cable of the cable chain from being deformed by pressure.

[0067] During long-term operation in a cleanroom environment, the hinge surface of the cable chain block 6 uses a low-emission material (the friction pair is a POM / PTFE composite material) to reduce particulate matter generation. The contact surface between the triangular protrusion limiting part 608 and the card seat part 602 is designed with a rounded transition to avoid dust generation from sharp-angle friction, meeting the ISO Class 4 cleanroom standard.

[0068] The cable chain structure of this invention solves the problems of traditional cable chains such as easy jamming, large offset, and excessive dust generation through modular hinge design and innovative limiting mechanism, and has significant technical advantages in precision automation equipment.

[0069] As one embodiment; the cable is set within several flat structures connected sequentially in the width direction by the butt joint of cleanroom sleeves to form a cable layer; the keel block 6 and the secondary keel of shape memory alloy material are connected sequentially to form a composite keel drag chain, and the composite keel drag chain is set within several flat structures connected sequentially in the width direction by the butt joint of cleanroom sleeves to form a drag chain layer; the cable layer and the drag chain layer are superimposed to form a cleanroom drag chain cable, and the drag chain layer is composed of rows of cleanroom sleeves fitted with keel blocks 6, the keel block 6 is a rigid structure, and the secondary keel has the same structure as the keel block 6; The cable layer and the drag chain layer are stacked in single or multiple layers through the fixed partition 7, and are clamped and fixed between two clamp blocks 9 by the abutment plate 8.

[0070] A gradient electrostatic adsorption layer is added to the inside of the dust cover; the electrostatic adsorption layer includes a polyurethane film doped with carbon nanotubes and a photocatalytic nano-TiO2 coating, which is used to electrostatically adsorb and capture or decompose particulate matter during the movement of the cable chain.

[0071] The dust-free drag chain cable of the present invention adopts a modular design with separate cable layer and drag chain layer. Through dust-free sleeve docking, composite keel drag chain and gradient electrostatic adsorption technology, it achieves dynamic transmission with high cleanliness and high reliability.

[0072] The cable layer consists of a flat structure formed by placing the cable inside multiple cleanroom sleeves. The inside of the cleanroom sleeves is provided with a gradient electrostatic adsorption layer (carbon nanotube polyurethane + nano TiO2 coating).

[0073] The cable chain layer is a composite cable chain formed by alternating rigid keel blocks 6 and shape memory alloy secondary keels, which is fitted into another set of cleanroom sleeves. The secondary keels have the same structure as the keel blocks 6 but are made of shape memory alloy (SMA), which gives the cable chain the ability to dynamically adjust its stiffness.

[0074] The cable layer and the drag chain layer are stacked in single or multiple layers through the fixed partition 7 (such as two cable layers sandwiching a drag chain layer), and are clamped and fixed by the abutment plate 8 and the clamp block 9 to form an integral dust-free drag chain cable.

[0075] During the cable chain movement, the electrostatic adsorption layer inside the cleanroom jacket captures particulate matter (adsorption efficiency > 90%), and the nano-TiO2 coating decomposes organic matter under light (VOCs degradation rate > 85%), maintaining internal cleanliness.

[0076] In an extremely clean environment (self-maintaining after long-term operation), the electrostatic adsorption layer of the cleanroom cover periodically releases a reverse voltage (-50V) to peel off the adsorbed particles to the collection tank at the edge of the cleanroom cover; the nano-TiO2 coating switches to ozone catalytic mode (ozone concentration <0.1ppm) in the absence of light to decompose residual pollutants; the shape memory alloy sub-keel restores its initial phase state through periodic temperature shock (40-60℃ cycle) to avoid fatigue hardening.

[0077] The patented invention overcomes the technical bottlenecks of traditional drag chain cables, such as easy contamination, difficult maintenance, and rigid fixation, through a separate design of the cable layer / drag chain layer, dynamic adjustment of the composite keel, and gradient electrostatic purification technology. It has significant advantages in high-cleanliness fields such as semiconductor equipment and medical machinery.

[0078] Example 3 like Figure 1-10 As shown, this embodiment is an assembly equipment for drag chain cables, including: a workbench 10, an assembly conveyor rail 11, a drag chain assembly mechanism 12, a cable assembly mechanism 13, and a final assembly mechanism 14; the workbench 10 is provided with an assembly conveyor rail 11, and the assembly conveyor rail 11 is provided with a plurality of assembly stations, and different assembly stations are respectively provided with drag chain assembly mechanism 12, cable assembly mechanism 13, and final assembly mechanism 14. The cable chain assembly mechanism 12 uses a robotic arm equipped with a camera and an electromagnetic adsorption gripper to assemble the cable chain; the cable assembly mechanism 13 includes a laser positioning module, a piezoelectric fine-tuning platform, and a magnetic coupling unit to assemble the cable; the final assembly mechanism 14 includes a cleanroom sleeve assembly module, a self-cleaning final assembly module, and an intelligent pressing and curing unit; it is used to attach cleanroom sleeves to the outside of the cable chain and the cable respectively, and to assemble the cleanroom sleeves of the cable chain and the cable.

[0079] The assembly equipment of this invention achieves efficient and precise assembly of cable chains, cables, and cleanroom sleeves through modular division of labor and intelligent technology. Its core process is as follows: 1. Cable chain assembly stage: The camera mounted on the robotic arm takes pictures of the cable chain keel block 6, and the pose is identified through a deep learning model. The electromagnetic adsorption gripper activates the corresponding electromagnet to grasp the keel block 6 in a non-contact manner. The robotic arm inserts the keel block 6 and the secondary keel into the snap-fit ​​hole 605 and the limiting hole 606 in sequence. The limiting hole 606 guides the semi-circular column 603 to slide, completing the hinge locking.

[0080] 2. Cable assembly stage: The laser positioning module emits three reference beams to the cable end and the cable chain entrance. The piezoelectric fine-tuning platform adjusts the cable posture to reduce the alignment error between the cable and the cable chain. The magnetic coupling unit generates magnetic traction through neodymium iron boron magnetic strips. The Hall sensor detects the change in magnetic flux and triggers the cable to be attracted and locked to the cable chain.

[0081] 3. Assembly stage: The cleanroom kit assembly module uses a three-stage expansion airbag and electrostatic adsorption ring to attach the cleanroom kit to the outside of the cable chain and cable; the self-cleaning module uses high-pressure nitrogen purging and ultrasonic vibration to remove particulate matter; the intelligent pressing unit uses a flexible touch array to press the interface, and the adhesive is cured by ultraviolet-hot air composite (3-8s).

[0082] This equipment integrates intelligent, dust-free, and flexible technologies to solve the core pain points of traditional drag chain cable assembly, such as low efficiency, poor cleanliness, and difficulty in changing configurations, providing a standardized and highly reliable assembly solution for high-end equipment manufacturing.

[0083] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A dust-free drag chain cable, comprising a cable and a drag chain, characterized in that; The cable includes a conductor core (1), a shielding layer (2), and a protective layer; the conductor core (1) is wrapped with the shielding layer (2) and the protective layer. The shielding layer (2) comprises shape memory alloy wires and yarns, wherein the shape memory alloy wires account for 30%-45%; The protective layer comprises a three-layer elastic buffer structure, consisting of a silicone rubber layer (3), a polyurethane composite layer (4), and a fiber polymer layer (5) from the inside out.

2. The dust-free drag chain cable according to claim 1, characterized in that, The conductor core (1) is sequentially fitted with a protective layer and a shielding layer (2); the shielding layer (2) is also fitted with a silicone rubber layer (3).

3. The dust-free drag chain cable according to claim 1, characterized in that, The conductor core (1) includes an electrolytic copper conductor with a tin-plated surface.

4. The dust-free drag chain cable according to claim 1, characterized in that, The phase transition temperature of the shape memory alloy wire is 40℃-60℃, and its mesh density shrinks as the temperature increases.

5. The dust-free drag chain cable according to claim 1, characterized in that, The cable chain includes at least two keel blocks (6) connected end to end in sequence; the keel block (6) includes a snap-fit ​​part (601) at the head and a snap-fit ​​part (602) at the tail. The snap-fit ​​part (601) is provided with a crescent-shaped post (603) and a limiting post (604). The snap-fit ​​seat part (602) is provided with a snap-fit ​​hole (605) and a limiting hole (606). Both the snap-fit ​​hole (605) and the limiting hole (606) are provided with two guide grooves (607) extending towards the bottom. The snap-fit ​​parts (601) of two adjacent keel blocks (6) are movably connected in the snap-fit ​​seat part (602). The snap-fit ​​seats (602) of two adjacent keel blocks (6) are hinged to the snap-fit ​​parts (601).

6. The dust-free drag chain cable according to claim 5, characterized in that, The card holder (602) also includes a limiting part (608), which is a triangular protrusion design. One side of the protrusion of the limiting part (608) abuts against the outer edge of the card holder (602).

7. The dust-free drag chain cable according to claim 5, characterized in that, The upper part of the crescent-shaped column (603) and the limiting column (604) is provided with a bevel, which slides in conjunction with the snap-fit ​​hole (605) and the limiting hole (606) through the bevel.

8. The dust-free drag chain cable according to claim 5, characterized in that, The cable is set in a cable layer within a plurality of flat structures connected in sequence in the width direction by the docking of cleanroom sleeves; the keel block (6) and the secondary keel of shape memory alloy material are connected in sequence to form a composite keel drag chain, the composite keel drag chain is set in a drag chain layer within a plurality of flat structures connected in sequence in the width direction by the docking of cleanroom sleeves; the cable layer and the drag chain layer are superimposed to form a cleanroom drag chain cable, the drag chain layer is composed of cleanroom sleeves that are nested in rows with keel blocks (6), the keel block (6) is a rigid structure, and the secondary keel has the same structure as the keel block (6); The cable layer and the drag chain layer are stacked in single or multiple layers through a fixed partition (7), and are clamped and fixed between two clamp blocks (9) by an abutment plate (8).

9. The dust-free drag chain cable according to claim 8, characterized in that, Both ends of the cleanroom sleeve are equipped with airtight rings (15) for sealing.

10. The dust-free drag chain cable according to claim 9, characterized in that, There is a gap between the cleanroom sleeve and the cable or cable chain, and the airtight ring (15) is disposed in the gap.

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