Probe card inspection apparatus and method of inspection thereof

Abstract

The application relates to the technical field of probe card detection, in particular to a probe card detection device and a detection method thereof, which comprises a base; a workbench is fixedly connected to the top end of the base through a group of supporting columns; a placing plate is rotationally connected to the top end of the workbench; a group of placing tables are fixedly connected to the top end of the placing plate; a fixing mechanism is arranged on the upper portion of the placing table; the rotating shaft is driven to rotate by motor two, the rotating shaft drives the rotating rod to rotate through the chain wheel one and the chain one, the rotating rod drives the rotating rod one to rotate through the chain wheel two and the chain two, the two groups of vibrating balls one knock the placing table to generate vibration, vibration detection is carried out, after detection, the placing plate is driven to rotate by motor one, the placing table is moved to the impact test mechanism to carry out impact test, the probe card does not need to repeatedly carry out operations such as fixing, detection, releasing fixing and moving to other equipment, the detection steps of the probe card are simplified, and the detection efficiency of the probe card is improved.

Description

Technical Field

[0001] This invention relates to the field of probe card testing technology, and in particular to a probe card testing device and its testing method. Background Technology

[0002] Probe cards are specialized interface tools used in wafer testing to connect the tester to the chip under test. They establish electrical connections by contacting the chip's pads or bumps with probes, transmitting test signals. They are mainly composed of a printed circuit board, probes, and functional components. Because probe cards are prone to defects during mass automated production, probe card testing equipment is needed to inspect or sample probe cards after production. This analysis determines whether the chip's function and performance meet the standards, filters out defective chips, and avoids waste in subsequent packaging.

[0003] In existing technologies, when probe cards are used for testing, the probe card is usually moved to a different position / angle after completing one test, or the probe card is moved to another testing device for another test. The probe card needs to repeatedly perform operations such as fixing, testing, unfixing, and moving to other devices. The entire testing process of the probe card is very cumbersome and time-consuming, resulting in low testing efficiency. Testing a large number of probe cards requires a lot of time, which cannot meet the needs of rapid and efficient testing of probe cards. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a probe card detection device capable of multi-directional, multi-angle, and multi-performance detection. This invention also provides a detection method using the aforementioned probe card detection device.

[0005] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0006] A probe card detection device includes a base; a worktable is fixedly connected to the top of the base via a set of support columns; a placement plate is rotatably connected to the top of the worktable; a set of placement platforms is fixedly connected to the top of the placement plate; a fixing mechanism is provided at the top of the outer wall of the placement platforms; a motor is fixedly connected to the top of the outer wall of the base; a circular shaft is provided at the output end of the motor, and the circular shaft is fixedly connected to the placement plate; a heating shell is fixedly connected to the top of the outer wall of the worktable; a second motor is fixedly connected to the top of the outer wall of the heating shell via connecting columns; a rotating shaft is provided at the output end of the second motor; the... The inner wall of the heating shell is provided with an impact testing mechanism, which is driven by a rotating shaft; a rotating rod is rotatably connected to the top of the outer wall of the heating shell, and the bottom end of the outer wall of the rotating rod extends into the heating shell; a sprocket is fixedly connected to the outer wall of both the rotating rod and the rotating shaft, and a pair of sprockets are connected by a chain; a rotating rod is rotatably connected to the top of the inner wall of the heating shell; a sprocket is fixedly connected to the outer wall of both the rotating rod and the rotating rod, and a pair of sprockets are connected by a chain; a set of vibrating balls is fixedly connected to the outer wall of both the rotating rod and the rotating rod by a set of flexible rods.

[0007] In a preferred embodiment of the present invention, the fixing mechanism includes a limiting plate; the bottom of the outer wall of a set of the limiting plates is rotatably connected to the top of the outer wall of the placement platform; a placement groove is provided at the bottom of the outer wall of the placement platform, and the limiting plate matches the placement groove; a set of threaded grooves is provided at the top of the outer wall of the placement platform; bolts are fixedly connected to the top of the outer wall of a set of the limiting plates, and a set of bolts respectively penetrates a set of the limiting plates; a set of bolts respectively matches a set of threaded grooves.

[0008] In a preferred embodiment of the present invention, the impact testing mechanism includes a gear column; a circular through groove is formed at the top of the outer wall of the heating shell; a circular plate is rotatably connected to the inner side wall of the circular through groove; an annular rack is fixedly connected to the top of the outer wall of the circular plate; the top of the outer wall of the gear column is fixedly connected to the bottom of the outer wall of the rotating shaft, and the gear column and the annular rack mesh with each other; a set of impact shells is fixedly connected to the bottom of the outer wall of the circular plate; an impact rod is slidably connected to the inner side wall of the impact shell; and an impact rod is fixedly connected to the bottom of the outer wall of the impact rod. The outer wall of the impact shell is provided with a first through groove; the top of the outer wall of the first ring rack is rotatably connected to a set of reciprocating rods, and the bottom of the outer wall of the first set of reciprocating rods extends into the heating shell; the outer wall of the first set of reciprocating rods is provided with reciprocating blocks, and the reciprocating blocks are respectively connected to the first through groove of the first set of impact rods; the top of the outer wall of the first set of reciprocating rods is fixedly connected to a gear; the top of the outer wall of the heating shell is fixedly connected to the second ring rack through a connecting block, and the second ring rack meshes with the second set of gears.

[0009] In a preferred embodiment of the present invention, the placement platform includes a circular platform and a circular shell; the bottom of the outer wall of the circular platform is fixedly connected to the top of the outer wall of the placement plate; the inner sidewall of the circular shell is slidably connected to the outer sidewall of the circular platform; a spring is fixedly connected to the top of the outer wall of the circular platform, and the top of the outer wall of the spring is fixedly connected to the top of the inner wall of the circular shell; a damper is provided at the spring.

[0010] In a preferred embodiment of the present invention, a temperature control device is provided at the top of the outer wall of the heating shell; a pair of electric telescopic rods are fixedly connected to the top of the outer wall of the heating shell; a baffle is fixedly connected to the output end of each pair of electric telescopic rods; one side of the outer wall of each pair of baffles is slidably connected to the inner side wall of the heating shell; and the pair of baffles are matched with a pair of openings in the heating shell.

[0011] In a preferred embodiment of the present invention, a ring rack three is rotatably connected to the top of the inner wall of the heating shell; a gear three is fixedly connected to the outer wall of the rotating rod, and the gear three meshes with the ring rack three; a set of auxiliary rods is rotatably connected to the bottom of the outer wall of the ring rack three; a set of vibrating balls two is fixedly connected to the outer wall of the auxiliary rods through a set of flexible rods two; a gear four is fixedly connected to the outer wall of each set of auxiliary rods; and a ring rack four is fixedly connected to the top of the inner wall of the heating shell through a connecting rod one, and the ring rack four meshes with the gear four.

[0012] In a preferred embodiment of the present invention, a square through groove is provided at the top of the outer wall of the heating shell; a placement shell is slidably connected to the top of the outer wall of the heating shell; a pair of sliding plates are slidably connected to the top of the inner wall of the placement shell; a slider is provided at the bottom of the outer wall of each pair of sliding plates; an auxiliary testing mechanism is provided at the bottom of the outer wall of each pair of sliders; a linkage plate is rotatably connected to the bottom of the outer wall of the gear column via a connecting rod two; a linkage block is fixedly connected to one side of the outer wall of the placement shell; the bottom of the outer wall of the linkage block is rotatably connected to the linkage plate via a connecting rod three; a bidirectional threaded rod is rotatably connected to one side of the inner wall of the placement shell, and one end of the bidirectional threaded rod extends outside the placement shell; a gear five is fixedly connected to one end of the outer wall of the bidirectional threaded rod; a rack five is fixedly connected to the top of the outer wall of the heating shell, and the gear five and the rack five mesh with each other; the bidirectional threaded rod is threadedly connected to a pair of sliding plates.

[0013] In a preferred embodiment of the present invention, the auxiliary testing mechanism includes a square shell; the top ends of the outer walls of a pair of square shells are respectively fixed to the top ends of the outer walls of a pair of sliders; square rods are slidably connected to the inner side walls of each pair of square shells; test balls are fixedly connected to the bottom ends of the outer walls of each pair of square rods; a second through groove is provided on one side of the outer wall of each pair of square shells; a reciprocating rod II is rotatably connected to the bottom ends of the outer walls of each pair of sliders; a reciprocating plate is provided on the outer side wall of each pair of reciprocating rods II, and the pair of reciprocating plates are respectively connected to the pair of square rods through a pair of second through grooves; a gear VI is fixedly connected to the outer side wall of each pair of reciprocating rods II; a rack VI is slidably connected to the inner side wall of the placement shell, and one side of the outer wall of the rack VI is slidably connected to the pair of sliders; the rack VI meshes with the pair of gears VI.

[0014] In a preferred embodiment of the present invention, the top ends of the outer walls of the pair of sliders are slidably connected to the bottom ends of the outer walls of the pair of slide plates; the bottom ends of the outer walls of the pair of slide plates are rotatably connected to a reciprocating rod three via a connecting plate five; one end of the outer wall of the pair of reciprocating rods three passes through the pair of sliders, and the pair of reciprocating rods three are reciprocally connected to one end of the slider; one end of the outer wall of the pair of reciprocating rods three is fixedly connected to a gear eight; the inner sidewall of the placement shell is fixedly connected to a rack eight, and the rack eight meshes with the pair of gears eight.

[0015] This invention also provides a probe card detection method, which includes the following steps:

[0016] Step 1: Secure the probe card to the placement platform using the fixing mechanism;

[0017] Step 2: Motor 1 drives the circular shaft, placement plate, and placement platform to rotate, causing the placement platform to move to the vibration test between vibration 1 and vibration ball 2;

[0018] Step 3: Motor 2 drives the rotating rod to rotate via sprocket 1 and chain 1. The rotating rod drives the rotating rod 1 to rotate via sprocket 2 and chain 2, causing the two sets of vibrating balls to strike the placement platform and generate vibration for vibration testing.

[0019] Step 4: The rotating rod drives the ring rack three to rotate through gear three, which in turn drives the auxiliary rod to rotate. The auxiliary rod rotates through gear four and ring rack four, causing the two sets of vibrating balls to rotate around the placement platform while striking the platform to perform multi-angle vibration tests.

[0020] Step 5: The first placement platform is moved to the impact testing mechanism by the motor to conduct the impact test, while the second placement platform is located at the vibration testing point to conduct the vibration test.

[0021] Step Six: The first placement platform is moved to the auxiliary testing mechanism by the motor to conduct the impact test on the probe card body. At this time, the second placement platform is located at the impact test site, the third placement platform is located at the vibration test site, and the fourth placement platform can pick up and put in the probe card after the test and place the new probe card.

[0022] Step 7: Control the temperature inside the heating shell using a temperature control device so that the probe can be tested at different temperatures.

[0023] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0024] 1. The rotating shaft and gear column are driven by motor 2. The gear column drives the ring rack 1, which is meshed with it, to rotate. The ring rack 1 drives the circular plate to rotate. The circular plate drives the impact shell, impact rod and impact ball to rotate. The rotation of the ring rack 1 drives the reciprocating rod 1 to rotate. The reciprocating rod 1 drives the gear 2 to rotate. Since the ring rack 2 is meshed with a set of gears 2 and the ring rack 2 is in a fixed state, when the gear 2 rotates, it drives the reciprocating rod 1 to rotate through the rotation of the ring rack 2. Since the reciprocating rod 1 and the reciprocating block are reciprocatingly connected, the rotation of the reciprocating rod 1 drives the reciprocating block to move up and down. The reciprocating block drives the impact rod and impact ball to move up and down, so that the impact ball impacts the top of the placement platform and generates impact vibration. This tests the impact resistance of the probe card connection structure.

[0025] 2. The gear column drives the linkage plate to move via the connecting rod two. The movement of the linkage plate drives the placement shell to slide on the heating shell via the connecting rod three and the linkage block. This causes the bidirectional threaded rod and the gear five on the bidirectional threaded rod to move. When the gear five moves, it drives the rack five and the bidirectional threaded rod to rotate. The forward and reverse rotation of the bidirectional threaded rod drives the slide plate, the slider and the auxiliary testing mechanism to move back and forth. It also drives the auxiliary testing mechanism to move back and forth via the placement shell. This allows the auxiliary testing mechanism to test the probe card from multiple directions and angles, making it easier to find defects in the probe card and further improving the testing effect of this application. Attached Figure Description

[0026] Figure 1 This is a structural diagram of the main body of the present invention;

[0027] Figure 2 For the present invention Figure 1 A partial structural diagram;

[0028] Figure 3 This is an exploded structural diagram of the placement platform of the present invention;

[0029] Figure 4 This is a structural diagram of the vibrating ball and the placement platform of the present invention;

[0030] Figure 5 For the present invention Figure 4 A partial structural diagram;

[0031] Figure 6 This is a structural diagram of the impact testing mechanism of the present invention;

[0032] Figure 7 For the present invention Figure 6 A partial structural diagram;

[0033] Figure 8 This is a structural diagram of the heating shell of the present invention;

[0034] Figure 9 This is a structural diagram of the linkage rod and the housing of the present invention;

[0035] Figure 10 This is a structural diagram of the auxiliary testing mechanism of the present invention;

[0036] Figure 11 For the present invention Figure 10 A partial structural diagram.

[0037] In the diagram: 1. Base; 2. Workbench; 3. Placement plate; 4. Placement platform; 5. Motor 1; 6. Circular shaft; 7. Heating shell; 8. Motor 2; 9. Rotating shaft; 10. Rotating rod; 11. Sprocket 1; 12. Chain 1; 13. Rotating rod 1; 14. Sprocket 2; 15. Chain 2; 16. Vibrating ball 1; 20. Limiting plate; 21. Placement slot; 22. Threaded slot; 23. Bolt; 30. Gear column; 31. Circular through slot; 32. Circular plate; 33. Ring rack 1; 34. Impact shell; 35. Impact rod; 36. Impact ball; 37. First through slot; 38. Reciprocating rod 1; 39. Reciprocating block; 40. Gear 2; 41. Ring rack 2; 401. Circular platform; 402. Circular shell ; 403, Spring; 17, Temperature control device; 18, Electric telescopic rod; 19, Baffle; 161, Ring rack three; 162, Gear three; 163, Auxiliary rod; 164, Vibrating ball two; 165, Gear four; 166, Ring rack four; 50, Square through slot; 51, Placement shell; 52, Slide plate; 53, Slider; 54, Linkage plate; 55, Linkage block; 56, Bidirectional threaded rod; 57, Gear five; 58, Rack five; 501, Square shell; 502, Square rod; 503, Test ball; 504, Second through slot; 505, Reciprocating rod two; 506, Reciprocating plate; 507, Gear six; 508, Rack six; 511, Reciprocating rod three; 512, Gear eight; 513, Rack eight. Detailed Implementation

[0038] The technical solution of the present invention will now be clearly and completely described in conjunction with the accompanying drawings and specific embodiments.

[0039] Example 1:

[0040] like Figures 1-10 As shown, the probe card testing device includes a base 1; a worktable 2 is fixedly connected to the top of the base 1 via a set of support columns; a placement plate 3 is rotatably connected to the top of the worktable 2; a set of placement platforms 4 is fixedly connected to the top of the placement platform 3; a fixing mechanism is provided at the top of the outer wall of the placement platform 4; a motor 5 is fixedly installed on the upper part of the base 1; the output end of the motor 5 is fixedly connected to the placement plate 3 via a circular shaft 6; a heating shell 7 is fixedly installed on the upper part of the worktable 2; a motor 8 is fixedly connected to the top of the heating shell 7 via a connecting column; a rotating shaft 9 is provided at the output end of the motor 8; an impact testing mechanism is provided on the inner wall of the heating shell 7. The impact testing mechanism is driven by a rotating shaft 9; a rotating rod 10 is rotatably connected to the top of the heating shell 7, and the bottom end of the rotating rod 10 extends into the heating shell 7; a sprocket 11 is fixedly connected to the outer wall of both the rotating rod 10 and the rotating shaft 9, and a pair of sprockets 11 are connected by a chain 12; a rotating rod 13 is rotatably connected to the top of the inner wall of the heating shell 7; a sprocket 14 is fixedly connected to the outer wall of both the rotating rod 13 and the rotating rod 10, and a pair of sprockets 14 are connected by a chain 15; a set of vibrating balls 16 is fixedly connected to the outer wall of both the rotating rod 10 and the rotating rod 13 by a set of flexible rods.

[0041] The fixing mechanism includes a limiting plate 20; the bottom end of a set of limiting plates 20 is rotatably connected to the top end of the placement platform 4; the bottom end of the placement platform 4 is provided with a placement groove 21, and the limiting plate 20 matches the placement groove 21; the top end of the placement platform 4 is provided with a set of threaded grooves 22; the top end of each set of limiting plates 20 is fixed with a bolt 23, and the bolt 23 passes through the set of limiting plates 20 respectively; the bolt 23 matches the set of threaded grooves 22 respectively.

[0042] In use, the probe card is placed in the placement slot 21, and the limiting plate 20 is rotated so that one end is above the placement slot 21, blocking the probe card. The bolt 23 is then rotated to engage with the threaded groove 22, fixing the limiting plate 20. At this point, the probe card is fixed. The motor 5 drives the circular shaft 6 to rotate, which in turn drives the placement plate 3 and the placement platform 4 to rotate, thereby moving the probe card so that the placement platform 4 and the probe card are positioned at the vibrating ball 16. The motor 8 drives the rotating shaft 9 to rotate, which in turn drives the rotating rod 10 to rotate via the sprocket 11 and the chain 12. 10 drives the rotating rod 13 to rotate via sprocket 14 and chain 15. The rotation of the rotating rod 13 and the rotating rod 10 drives two sets of vibrating balls 16 to strike the placement platform 4 through two sets of flexible rods, generating vibration and observing the probe card. This application applies periodic impact force to both sides of the placement platform 4 through the vibrating balls 16 to simulate the lateral mechanical stress that the probe card may bear in actual use, detect the structural stability of the probe card, and detect whether there are small cracks or deformations in the probe card. The impact vibration will accelerate the crack propagation or cause structural deformation, thereby detecting whether there is damage to the structure on the probe card.

[0043] The impact testing mechanism includes a gear column 30; a circular through groove 31 is provided at the top of the heating shell 7; a circular plate 32 is rotatably connected to the inner wall of the circular through groove 31; an annular rack 33 is fixedly connected to the top of the circular plate 32; the top of the gear column 30 is fixedly connected to the bottom of the outer wall of the rotating shaft 9, and the gear column 30 and the annular rack 33 mesh with each other; a set of impact shells 34 are fixedly connected to the bottom of the circular plate 32; an impact rod 35 is slidably connected to the inner wall of the impact shell 34; an impact ball 36 is fixedly connected to the bottom of the impact rod 35; and an impact ball 36 is fixedly connected to the outer wall of the impact shell 34. The wall has a first through groove 37; the top of the annular rack 33 is rotatably connected to a set of reciprocating rods 38, and the bottom of the set of reciprocating rods 38 extends into the heating shell 7; the outer side wall of the set of reciprocating rods 38 is provided with reciprocating blocks 39, and the set of reciprocating blocks 39 are respectively connected to a set of impact rods 35 through a set of first through grooves 37; the top of the set of reciprocating rods 38 is fixedly connected to a gear 40; the top of the heating shell 7 is fixedly connected to an annular rack 41 through a connecting block, and the annular rack 41 meshes with the set of gears 40.

[0044] Motor 28 drives rotating shaft 9 and gear column 30 to rotate. Gear column 30 drives the annular rack 33, which meshes with it, to rotate. Annular rack 33 drives circular plate 32 to rotate. Circular plate 32 drives impact shell 34, impact rod 35, and impact ball 36 to rotate. The rotation of annular rack 33 drives reciprocating rod 38 to rotate. Reciprocating rod 38 drives gear 2 40 to rotate. Since annular rack 2 41 meshes with a set of gears 2 40 and annular rack 2 41 is in a fixed state, when gear 2 40 rotates, it drives reciprocating rod 38 to rotate through the rotation of annular rack 2 41. Since reciprocating rod 38 and reciprocating block 39 are reciprocatingly connected, the rotation of reciprocating rod 38 drives reciprocating block 39 to move up and down. Reciprocating block 39 drives impact rod 35 and impact ball 36 to move up and down, causing impact ball 36 to impact the top of placement platform 4, generating impact vibration, and testing the impact resistance of the probe card connection structure.

[0045] The placement platform 4 includes a circular platform 401 and a circular shell 402; the bottom end of the circular platform 401 is fixed to the top end of the placement plate 3; the inner side wall of the circular shell 402 is slidably connected to the outer side wall of the circular platform 401; a spring 403 is fixed to the top end of the circular platform 401, and the top end of the spring 403 is fixed to the top end of the circular shell 402; a damper is provided at the spring 403.

[0046] The placement platform 4 has a circular platform 401 and a circular shell 402 structure, and the circular platform 401 and the circular shell 402 are connected by a spring 403. When the placement platform 4 is impacted, the impact reaction force can be absorbed by the spring 403 structure and the damper to protect the moving platform.

[0047] A temperature control device 17 is provided at the top of the outer wall of the heating shell 7; a pair of electric telescopic rods 18 are fixedly connected to the top of the heating shell 7; baffles 19 are fixedly connected to the output ends of the pair of electric telescopic rods 18; one side of the pair of baffles 19 is slidably connected to the inner side wall of the heating shell 7; the pair of baffles 19 are matched with a pair of openings of the heating shell 7.

[0048] A temperature control device 17 is provided at the top of the heating shell 7. The temperature control device 17 controls the stability inside the heating shell 7, so that the probe card can be subjected to vibration, impact and probe card body impact tests at different temperatures. This makes the test data more comprehensive and makes it easier to find defects of the probe card under temperature changes. The electric telescopic rod 18 drives the baffle 19 to open or close the opening of the heating shell 7, making it easy for the placement platform 4 to enter and exit the heating shell 7. The baffle 19 can reduce heat loss and reduce energy consumption.

[0049] The top of the inner wall of the heating shell 7 is rotatably connected to a ring rack 161; the outer wall of the rotating rod 10 is fixedly connected to a gear 162, and the gear 162 meshes with the ring rack 161; the bottom of the outer wall of the ring rack 161 is rotatably connected to a set of auxiliary rods 163; the outer wall of the auxiliary rods 163 is fixedly connected to a set of vibrating balls 164 via a set of flexible rods 164; the outer walls of the auxiliary rods 163 are all fixedly connected to gears 165; the top of the inner wall of the heating shell 7 is fixedly connected to a ring rack 166 that meshes with gears 165 via a connecting rod 1.

[0050] The rotation of the rotating rod 13 drives the gear 3 162 to rotate, which in turn drives the ring rack 3 161 to rotate. This, in turn, drives a set of auxiliary rods 163 and the gear 4 165 on the auxiliary rods 163 to rotate. Since the gear 4 165 meshes with the ring rack 4 166 and the ring rack 4 166 is in a fixed state, when the gear 4 165 rotates, it drives the auxiliary rod 163 to rotate through the rotation of the ring rack 4 166. This causes the two sets of vibrating balls 2 164 to rotate around the placement platform 4 while striking the placement platform 4 to generate vibration. This causes the vibrating balls 2 164 to apply multi-directional composite stress to the probe card on the placement platform 4, simulating the complex vibration environment that the probe card may experience in actual use. This improves the detection effect of this application and allows for better detection of problems that may occur when the probe card is used in actual use.

[0051] A square through slot 50 is provided at the top of the outer wall of the heating shell 7; a placement shell 51 is slidably connected to the top of the heating shell 7; a pair of sliding plates 52 are slidably connected to the top of the placement shell 51; a slider 53 is provided at the bottom of each pair of sliding plates 52; an auxiliary testing mechanism is provided at the bottom of each pair of sliders 53; a linkage plate 54 is rotatably connected to the bottom of the gear column 30 through a connecting rod 2; a linkage block 55 is fixedly connected to one side of the placement shell 51; the bottom of the linkage block 55 is rotatably connected to the linkage plate 54 through a connecting rod 3; a bidirectional threaded rod 56 is rotatably connected to one side of the placement shell 51, and one end of the bidirectional threaded rod 56 extends outside the placement shell 51; a gear 57 is fixedly connected to one end of the bidirectional threaded rod 56; a rack 58 that meshes with the gear 57 is fixedly connected to the top of the heating shell 7; the bidirectional threaded rod 56 is threadedly connected to a pair of sliding plates 52.

[0052] When the gear column 30 rotates, it drives the linkage plate 54 to move via the connecting rod 2. The movement of the linkage plate 54 drives the placement shell 51 to slide on the heating shell 7 via the connecting rod 3 and the linkage block 55. The reciprocating movement of the placement shell 51 drives the bidirectional threaded rod 56 and the gear 57 on the bidirectional threaded rod 56 to move. Since the gear 57 meshes with the rack 58 and the rack 58 is in a fixed state, when the gear 57 moves, it drives the bidirectional threaded rod 56 to rotate via the rotation of the rack 58. The forward and reverse rotation of the bidirectional threaded rod 56 drives the slide plate 52, the slider 53 and the auxiliary testing mechanism to move back and forth. The placement shell 51 drives the auxiliary testing mechanism to move back and forth. Thus, when the auxiliary testing mechanism performs testing, it can test the probe card from multiple directions and angles, making it easier to find defects in the probe card through multi-directional testing, and further improving the testing effect of this application.

[0053] The auxiliary testing mechanism includes a square shell 501; the top ends of a pair of square shells 501 are respectively fixed to the top ends of a pair of sliders 53; square rods 502 are slidably connected to the inner side walls of the pair of square shells 501; test balls 503 are fixedly connected to the bottom ends of the pair of square rods 502; a second through groove 504 is opened on one side of the pair of square shells 501; a reciprocating rod 505 is rotatably connected to the bottom ends of the pair of sliders 53; a reciprocating plate 506 is provided on the outer side wall of the pair of reciprocating rods 505, and the pair of reciprocating plates 506 are respectively connected to the pair of square rods 502 through a pair of second through grooves 504; a gear 507 is fixedly connected to the outer side wall of the pair of reciprocating rods 505; a rack 508 is slidably connected to the inner side wall of the housing 51, and one side of the rack 508 is slidably connected to the pair of sliders 53; the rack 508 and the gear 507 mesh with each other.

[0054] The auxiliary testing mechanism includes a square shell 501. When the slide plate 52 moves, it drives the slider 53 and the directional shell to move. The movement of the slider 53 drives the reciprocating rod 505 and the gear 507 on the reciprocating rod 505 to move. Because the gear 507 and the rack 508 mesh with each other, when the gear 507 moves, it drives the reciprocating rod 505 to rotate through the rotation of the rack 508. Since the reciprocating rod 505 and the reciprocating plate 506 are reciprocatingly connected, the reciprocating rod 505 drives the reciprocating plate 506 to move up and down reciprocally. The reciprocating plate 506 carries... The movable square rod 502 slides back and forth on the inner wall of the square shell 501. The square rod 502 drives the test ball 503 to move up and down, performing an impact test on the probe card body to verify the impact resistance of the probe tip of the probe card. Vertical impact will excite tiny vibrations of the solder joints or connection points inside the probe card. By monitoring the transient fluctuations of the contact resistance, the loose point can be located and its impact range can be assessed. The impact vibration may cause delamination or cracks in the ceramic or PCB substrate, thereby revealing whether the probe card has internal defects and avoiding hidden faults.

[0055] Example 2:

[0056] like Figures 10-11 As shown, the top ends of the outer walls of a pair of sliders 53 are slidably connected to the bottom ends of the outer walls of a pair of slide plates 52; the bottom ends of each pair of slide plates 52 are rotatably connected to reciprocating rods 511 via connecting plates 5; one end of the outer wall of each pair of reciprocating rods 511 passes through a pair of sliders 53, and each pair of reciprocating rods 511 is reciprocally connected to one end of a slider 53; one end of each pair of reciprocating rods 511 is fixedly connected to a gear 512; a rack 513 is fixedly connected to the inner wall of the housing 51, and the rack 513 meshes with the gear 512; when the slide plate 52 drives the sliders 53 to move, the slide... Plate 52 simultaneously drives reciprocating rod 3 511 to move, and reciprocating rod 3 511 drives gear 8 512 to move. Since rack 8 513 meshes with a pair of gears 8 512, when gear 8 512 moves, it drives reciprocating rod 3 511 to rotate through rack 8 513. Reciprocating rod 3 511 drives slider 53 to reciprocate, so that test ball 503 can test probe card in more directions and angles, so as to test probe card more comprehensively, making the test effect of this application better. Moreover, multi-dimensional impact test can simultaneously simulate multi-directional stress, reduce the number of tests and time, and improve test efficiency.

[0057] When using this invention, the probe card is placed in the placement groove 21. At this time, the limiting plate 20 is rotated so that one end of the limiting plate 20 is above the placement groove 21, blocking the probe card. The bolt 23 is rotated so that the bolt 23 is engaged in the threaded groove 22, thereby fixing the limiting plate 20 and completing the fixing of the probe card.

[0058] Motor 5 drives the circular shaft 6 to rotate, which in turn drives the placement plate 3 and the placement stage 4 to rotate, thereby moving the probe card so that the placement stage 4 and the probe card are positioned at the vibrating ball 16. At this time, motor 8 drives the rotating shaft 9 to rotate, which in turn drives the rotating rod 10 to rotate via sprocket 11 and chain 12. The rotating rod 10 drives the rotating rod 13 to rotate via sprocket 14 and chain 15. The rotation of the rotating rod 13 and the rotating rod 10 drives the two sets of flexible rods to drive the two sets of vibrating balls 16 to strike the placement stage 4, generating vibration. At this time, the probe card is observed. This application applies periodic impact force to both sides of the placement stage 4 by the vibrating balls 16 to simulate the lateral mechanical stress that the probe card may bear in actual use, detect the structural stability of the probe card, and detect whether there are any small cracks or deformations in the probe card. The impact vibration will accelerate the crack propagation or cause structural deformation, thereby detecting whether there is any damage to the structure on the probe card.

[0059] The rotation of the rotating rod 13 drives the gear 3 162 to rotate, which in turn drives the ring rack 3 161 to rotate. This, in turn, drives a set of auxiliary rods 163 and the gear 4 165 on the auxiliary rods 163 to rotate. Since the gear 4 165 meshes with the ring rack 4 166 and the ring rack 4 166 is in a fixed state, when the gear 4 165 rotates, it drives the auxiliary rod 163 to rotate through the ring rack 4 166. This causes the two sets of vibrating balls 2 164 to rotate around the placement platform 4 while striking the placement platform 4 to generate vibration. This causes the vibrating balls 2 164 to apply multi-directional composite stress to the probe card on the placement platform 4, simulating the complex vibration environment that the probe card may experience in actual use. This improves the detection effect of this application and helps to better detect problems that may occur when the probe card is used in actual use.

[0060] After the probe card on the first placement platform 4 completes the test, the first placement platform 4 is moved to the impact testing mechanism by the motor 5 to perform the impact test. At this time, the second placement platform 4 is located at the vibration testing point to perform the vibration test.

[0061] Motor 28 drives rotating shaft 9 and gear column 30 to rotate, which in turn drives the annular rack 33, which in turn drives the circular plate 32 to rotate. The circular plate 32 drives the impact shell 34, impact rod 35, and impact ball 36 to rotate. The rotation of the annular rack 33 drives the reciprocating rod 38 to rotate, which in turn drives gear 2 40 to rotate. Since the annular rack 2 41 is meshed with a set of gears 2 40 and the annular rack 2 41 is fixed, the rotation of gear 2 40 drives the reciprocating rod 38 to rotate through the rotation of the annular rack 2 41. Since the reciprocating rod 38 and the reciprocating block 39 are reciprocatingly connected, the rotation of the reciprocating rod 38 drives the reciprocating block 39 to move up and down. The reciprocating block 39 drives the impact rod 35 and impact ball 36 to move up and down, causing the impact ball 36 to impact the top of the placement platform 4, generating impact vibration, and testing the impact resistance of the probe card connection structure.

[0062] After the probe card has passed the impact test, the first placement platform 4 is moved to the auxiliary testing mechanism by motor 5 to conduct the probe card body impact test. At this time, the second placement platform 4 is located at the impact test site, the third placement platform 4 is located at the vibration test site, and the fourth placement platform 4 can pick up and put in the tested probe card and place the new probe card.

[0063] When the gear column 30 rotates, it drives the linkage plate 54 to move via the connecting rod 2. The movement of the linkage plate 54 drives the placement shell 51 to slide on the heating shell 7 via the connecting rod 3 and the linkage block 55. The reciprocating movement of the placement shell 51 drives the bidirectional threaded rod 56 and the gear 57 on the bidirectional threaded rod 56 to move. Since the gear 57 meshes with the rack 58 and the rack 58 is in a fixed state, when the gear 57 moves, it drives the bidirectional threaded rod 56 to rotate via the rotation of the rack 58. The forward and reverse rotation of the bidirectional threaded rod 56 drives the slide plate 52, the slider 53 and the auxiliary testing mechanism to move back and forth. The placement shell 51 drives the auxiliary testing mechanism to move back and forth. This allows the auxiliary testing mechanism to test the probe card from multiple directions and angles, making it easier to find defects in the probe card and further improving the testing effect of this application.

[0064] The auxiliary testing mechanism includes a square shell 501. When the slide plate 52 moves, it drives the slider 53 and the directional shell to move. The movement of the slider 53 drives the reciprocating rod 505 and the gear 507 on the reciprocating rod 505 to move. The rack 508, which meshes with the gear 507, drives the reciprocating rod 505 to rotate. Since the reciprocating rod 505 and the reciprocating plate 506 are reciprocatingly connected, the reciprocating rod 505 drives the reciprocating plate 506 to move up and down. The reciprocating plate 506 drives the square rod 502 to move within the square shell 501. The square rod 502 slides up and down on the inner wall, driving the test ball 503 to move up and down, performing an impact test on the probe card body to verify the impact resistance of the probe tip. Vertical impact will excite tiny vibrations at the solder joints or connection points inside the probe card. By monitoring the transient fluctuations in contact resistance, the loose point can be located and its impact range can be assessed. In the case of internal defects, impact vibration may cause delamination or cracks in the ceramic or PCB substrate, thereby determining whether the probe card has internal defects and avoiding hidden faults.

[0065] When the slide plate 52 moves the slider 53, the slide plate 52 simultaneously moves the reciprocating rod 3 511, which in turn moves the gear 8 512. Because the rack 8 513 meshes with the pair of gears 8 512, the movement of the gear 8 512 causes the rack 8 513 to rotate, which in turn drives the reciprocating rod 3 511 to rotate, thus causing the slider 53 to reciprocate. This allows the test ball 503 to test the probe card from more positions and angles, enabling a more comprehensive test of the probe card and improving the testing effect of this application.

[0066] Because a rack 508 is slidably connected to the inner wall of the housing 51, and one side of the rack 508 is slidably connected to a pair of sliders 53, when the sliders 53 move, they drive the rack 508 to slide on the inner wall of the housing 51, so that the gear 507 and the rack 508 move synchronously, and the gear 507 and the rack 508 are always meshed.

[0067] A temperature control device 17 is provided at the top of the heating shell 7. The temperature control device 17 controls the stability inside the heating shell 7, so that the probe card can be subjected to vibration, impact and probe card body impact tests at different temperatures, making the test data more comprehensive and making it easier to find defects of the probe card under temperature changes. The electric telescopic rod 18 drives the baffle 19 to open or close the opening of the heating shell 7, making it easy for the placement platform 4 to enter and exit the heating shell 7.

[0068] Since the placement platform 4 is a circular platform 401 and a circular shell 402 structure, and the circular platform 401 and the circular shell 402 are connected by a spring 403, the placement platform 4 can absorb the impact reaction force through the spring 403 structure and the damper when it is impacted, thus protecting the moving platform.

[0069] After the vibration test, the placement platform 4 is moved by the motor 5. It can be directly moved to the impact test site without the need for fixing, testing, unfixing, or moving to other equipment. After the impact test, the probe card body can be moved to the impact test site by the motor 5. Again, there is no need for fixing, testing, unfixing, or moving to other equipment. This simplifies the probe card testing steps and helps improve the testing efficiency of the probe card.

[0070] The foregoing description illustrates and describes preferred embodiments of the present invention. It should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. Modifications and variations made by those skilled in the art without departing from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A probe card detection device, comprising a base (1); a worktable (2) is fixedly connected to the top of the base (1) via a set of support columns; a placement plate (3) is rotatably connected to the top of the worktable (2); a set of placement platforms (4) is fixedly connected to the top of the placement platform (3); a fixing mechanism is provided on the upper part of the placement platform (4); a motor (5) is provided on the upper part of the base (1); the output end of the motor (5) is fixedly connected to the placement platform (3) via a circular shaft (6); characterized in that: A heating shell (7) is provided on the upper part of the workbench (2); a motor (8) is fixedly connected to the top of the heating shell (7) via a connecting column; a rotating shaft (9) is provided at the output end of the motor (8); an impact testing mechanism driven by the rotating shaft (9) is provided on the inner side wall of the heating shell (7); a rotating rod (10) is rotatably connected to the top of the heating shell (7), and the bottom end of the rotating rod (10) extends into the heating shell (7); the rotating rod (10) and the rotating shaft (9) Each outer wall is fixedly connected to a sprocket (11), and a pair of sprockets (11) are connected by a chain (12); the top of the inner wall of the heating shell (7) is rotatably connected to a rotating rod (13); the outer walls of the rotating rod (13) and the rotating rod (10) are both fixedly connected to a sprocket (14), and a pair of sprockets (14) are connected by a chain (15); the outer walls of the rotating rod (10) and the rotating rod (13) are both fixedly connected to a set of vibrating balls (16) by a set of flexible rods. The impact testing mechanism includes a gear column (30); a circular through groove (31) is provided at the top of the heating shell (7); a circular plate (32) is rotatably connected to the inner wall of the circular through groove (31); an annular rack (33) that meshes with the gear column (30) is fixedly connected to the top of the circular plate (32); the top of the gear column (30) is fixedly connected to the bottom end of the rotating shaft (9); a set of impact shells (34) is fixedly connected to the bottom end of the circular plate (32); an impact rod (35) is slidably connected to the inner wall of the impact shell (34); an impact ball (36) is fixedly connected to the bottom end of the impact rod (35); the outer side of the impact shell (34) A first through groove (37) is provided on the side wall; a set of reciprocating rods (38) is rotatably connected to the top of the first ring rack (33), and the bottom ends of the first set of reciprocating rods (38) all extend into the heating shell (7); a reciprocating block (39) is provided on the outer side wall of the first set of reciprocating rods (38), and the first set of reciprocating blocks (39) are respectively connected to a set of impact rods (35) through a set of first through grooves (37); a gear (40) is fixedly connected to the top of the first set of reciprocating rods (38); a ring rack (41) is fixedly connected to the top of the heating shell (7) through a connecting block, and the ring rack (41) meshes with the first set of gears (40).

2. The probe card detection device according to claim 1, characterized in that, The fixing mechanism includes a limiting plate (20); the bottom end of a set of the limiting plates (20) is rotatably connected to the top end of the placement platform (4); the bottom end of the placement platform (4) is provided with a placement groove (21) that matches the limiting plate (20); the top end of the placement platform (4) is provided with a set of threaded grooves (22); the top end of a set of the limiting plates (20) is fixed with bolts (23), and a set of bolts (23) respectively penetrate a set of the limiting plates (20); a set of bolts (23) respectively match a set of threaded grooves (22).

3. The probe card detection device according to claim 1, characterized in that, The placement platform (4) includes a circular platform (401) and a circular shell (402); the bottom end of the circular platform (401) is fixed to the top end of the placement plate (3); the inner side wall of the circular shell (402) is slidably connected to the outer side wall of the circular platform (401); a spring (403) is fixed to the top end of the circular platform (401), and the top end of the spring (403) is fixed to the top end of the circular shell (402); a damper is provided at the spring (403).

4. The probe card detection device according to claim 1, characterized in that, A temperature control device (17) is provided at the top of the heating shell (7); a pair of electric telescopic rods (18) are fixedly connected to the top of the heating shell (7); baffles (19) are fixedly connected to the output ends of the pair of electric telescopic rods (18); one side of the pair of baffles (19) is slidably connected to the inner sidewall of the heating shell (7); the pair of baffles (19) are matched with a pair of openings of the heating shell (7).

5. The probe card detection device according to claim 4, characterized in that, The top of the inner wall of the heating shell (7) is rotatably connected to a ring rack three (161); the outer wall of the rotating rod (10) is fixedly connected to a gear three (162) that meshes with the ring rack three (161); the bottom end of the ring rack three (161) is rotatably connected to a set of auxiliary rods (163); the outer wall of the auxiliary rods (163) is fixedly connected to a set of vibrating balls two (164) through a set of flexible rods two; the outer walls of the set of auxiliary rods (163) are all fixedly connected to gear four (165); the top of the inner wall of the heating shell (7) is fixedly connected to a ring rack four (166) that meshes with gear four (165) through a connecting rod one.

6. The probe card detection device according to claim 5, characterized in that, The top of the heating shell (7) is provided with a square through groove (50); the top of the heating shell (7) is slidably connected to a placement shell (51); the top of the placement shell (51) is slidably connected to a pair of sliding plates (52); the bottom of each pair of sliding plates (52) is provided with a slider (53); the bottom of each pair of sliders (53) is provided with an auxiliary testing mechanism; the bottom of the gear column (30) is rotatably connected to a linkage plate (54) through a connecting rod; a linkage block (54) is fixedly connected to one side of the placement shell (51). 5); The bottom end of the linkage block (55) is rotatably connected to the linkage plate (54) via the connecting rod three; a bidirectional threaded rod (56) is rotatably connected to one side of the placement shell (51), and one end of the bidirectional threaded rod (56) extends outside the placement shell (51); a gear five (57) is fixedly connected to one end of the bidirectional threaded rod (56); a rack five (58) that meshes with the gear five (57) is fixedly connected to the top of the heating shell (7); the bidirectional threaded rod (56) is threadedly connected to a pair of sliding plates (52).

7. The probe card detection device according to claim 6, characterized in that, The auxiliary testing mechanism includes a square shell (501); the top ends of a pair of square shells (501) are respectively fixed to the top ends of the outer walls of a pair of sliders (53); square rods (502) are slidably connected to the inner side walls of each pair of square shells (501); test balls (503) are fixedly connected to the bottom ends of each pair of square rods (502); a second through groove (504) is opened on one side of each pair of square shells (501); a reciprocating rod (505) is rotatably connected to the bottom ends of each pair of sliders (53); a pair of square shells (501) are respectively fixed to the top ends of the outer walls of a ... The outer walls of the reciprocating rods (505) are provided with reciprocating plates (506), and a pair of reciprocating plates (506) are connected to a pair of square rods (502) through a pair of second through slots (504); a pair of reciprocating rods (505) are fixedly connected with gears (507) on their outer walls; a rack (508) is slidably connected to the inner wall of the housing (51), and one side of the rack (508) is slidably connected to a pair of sliders (53); the rack (508) and the pair of gears (507) mesh with each other.

8. The probe card detection device according to claim 7, characterized in that, The top ends of a pair of sliders (53) are slidably connected to the bottom ends of a pair of slide plates (52); the bottom ends of a pair of slide plates (52) are rotatably connected to a reciprocating rod (511) via a connecting plate; one end of a pair of reciprocating rods (511) passes through a pair of sliders (53), and the pair of reciprocating rods (511) are reciprocally connected to one end of a slider (53); one end of a pair of reciprocating rods (511) is fixedly connected to a gear (512); a rack (513) is fixedly connected to the inner side wall of the housing (51), and the rack (513) meshes with a pair of gears (512).

9. A probe card detection method, characterized in that, The probe card detection device according to any one of claims 1-8 includes the following steps: Step 1: Fix the probe card onto the placement platform (4) using the fixing mechanism; Step 2: Motor 1 (5) drives the circular shaft (6), the placement plate (3), and the placement platform (4) to rotate, so that the placement platform (4) moves to the vibrating ball 1 (16) and the vibrating ball 2 (164) for vibration testing; Step 3: Motor 2 (8) drives the rotating rod (10) to rotate through sprocket 1 (11) and chain 1 (12). The rotating rod (10) drives the rotating rod 1 (13) to rotate through sprocket 2 (14) and chain 2 (15), so that the two sets of vibrating balls 1 (16) strike the placement platform (4) to generate vibration and conduct vibration test. Step 4: The rotating rod (10) drives the ring rack (161) to rotate through the gear three (162), which in turn drives the auxiliary rod (163) to rotate. The auxiliary rod (163) rotates through the gear four (165) and the ring rack four (166), causing the two sets of vibrating balls to rotate around the placement platform (4) while striking the placement platform (4) to perform multi-angle vibration tests. Step 5: The first placement platform (4) is moved to the impact testing mechanism by the motor (5) to conduct the impact test, and the second placement platform (4) is located at the vibration testing location to conduct the vibration test; Step 6: The first placement platform (4) is moved to the auxiliary testing mechanism by the motor (5) to perform the impact test on the probe card body. The second placement platform (4) is located at the impact test site, the third placement platform (4) is located at the vibration test site, and the fourth placement platform (4) is used to pick up and put in the probe card after the test and to place the new probe card. Step 7: Control the temperature inside the heating shell (7) through the temperature control device (17) so that the probe can be tested at different temperatures.

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