Target capsule for isotope production and method of making the same

Abstract

The present application relates to the technical field of isotope production equipment, and particularly relates to a target capsule for isotope production and a manufacturing method thereof. The target capsule comprises a support frame, the middle part of the support frame is provided with a through hole; a target material is installed in the through hole, and is used for receiving bombardment of high-energy particles to generate isotopes; and an encapsulating shell is wrapped outside the support frame; wherein the support frame comprises a first support ring with the through hole as a ring hole, and a second support ring sleeved outside the first support ring. In the present application, the support frame is provided as two parts of the first support ring and the second support ring, so that when the target capsule is disassembled in a punching manner, the encapsulating shell can be easily cut off along the contact surface of the first support ring and the second support ring, the punching force applied on the target capsule can be greatly reduced, and the disassembling position is far away from the target material, so that the target material is prevented from being broken and the generation of radioactive dust is reduced.

Description

Technical Field

[0001] This invention relates to the field of isotope production equipment technology, and in particular to a target capsule for isotope production and a method for manufacturing the same. Background Technology

[0002] Isotopes are widely used in medicine, industry, and scientific research. In the production of isotopes, the target material needs to withstand bombardment by high-energy particles to trigger nuclear reactions that generate isotopes. With the continuous development of technology that uses particle accelerators to irradiate targets for large-scale isotope production, the requirements for the safety and reliability of the targets are becoming increasingly stringent. When particle accelerators irradiate targets, the targets generate heat, thus requiring cooling. Currently, the commonly used cooling method is to place the target in a cooling medium during irradiation.

[0003] However, placing the target material directly in the cooling medium poses a risk of radioactive contamination. The target material itself contains radioactive substances, and under bombardment by high-energy particle beams, new radioactive substances may be generated. These substances may gradually dissolve into the cooling medium, causing contamination. This contamination is not only difficult to control effectively, but may also spread to various parts of the system through the flow of the cooling medium circulation system, seriously threatening equipment operation and the safety of personnel. Therefore, to avoid direct contact between the target material and the cooling medium, the target material is usually encased in a sealed shell. Thus, during the irradiation of the target material by the particle accelerator, the sealed shell separates the target material from the cooling medium, ensuring good heat exchange while preventing the leakage of generated radionuclides.

[0004] In existing technologies, the sealing shell is typically manufactured as follows: a through-hole is made in the middle of a support frame, a metal sheet is welded to one end of the support frame to seal the through-hole, the target material is inserted into the through-hole, and then another metal sheet is welded to the other end of the support frame to seal the through-hole again, thus forming a target capsule with the target material at the center and a sealed structure on the outer periphery. This type of target capsule has a simple structure and is easy to manufacture.

[0005] After irradiation, the target capsule needs to be disassembled to remove the target material. Disassembly is usually performed by cutting or slicing near the edge of the metal sheet. However, because the target material is completely bonded to the sealing structure, radioactive dust or target material breakage can easily occur during disassembly, making disassembly quite difficult. Summary of the Invention

[0006] This invention aims to solve the technical problems existing in related technologies. To this end, this invention proposes a target capsule for isotope production and a method for manufacturing the same, to solve the problem of difficult disassembly of the target capsule due to its unreasonable structure.

[0007] In a first aspect, the present invention provides a target capsule for isotope production, comprising:

[0008] A support frame, wherein the support frame has a through opening in the middle;

[0009] A target material is installed inside the through-hole to receive bombardment from high-energy particles to produce isotopes.

[0010] A packaging shell covers the outside of the support frame;

[0011] The support frame includes a first support ring with the through opening as an annular hole, and a second support ring sleeved on the outside of the first support ring.

[0012] According to the present invention, a target capsule for isotope production is provided in which the outer peripheral wall of the first support ring and the inner peripheral wall of the second support ring are configured as mutually adapted cylindrical surfaces and are fitted with a clearance.

[0013] According to the present invention, a target capsule for isotope production is provided, wherein the encapsulation shell comprises:

[0014] The first housing is disposed on one side of the support frame;

[0015] The second housing covers the other side of the support frame;

[0016] The first housing and the second housing are sealed together on the outer periphery of the support frame.

[0017] According to the present invention, a target capsule for isotope production is provided, wherein both the first shell and the second shell are configured as a cap-like structure with a cavity on one side, consisting of a bottom wall and a side wall;

[0018] One side of the bottom wall is in contact with the support frame, and the side wall is perpendicular to the bottom wall and is in contact with the outer peripheral wall of the support frame.

[0019] According to the present invention, a target capsule for isotope production is provided, wherein the inner peripheral wall of the first support ring is provided with a protrusion, the protrusion extends radially along the first support ring, a plurality of the protrusions are distributed circumferentially at intervals along the first support ring, and the outer peripheral wall of the target material abuts against the protrusion.

[0020] According to the present invention, a target capsule for isotope production is provided, wherein the first support ring may be composed of a plurality of arc segments spliced ​​together along its circumference to facilitate the removal of the target material.

[0021] According to the present invention, a target capsule for isotope production is provided, wherein the encapsulation shell is made of a metal material with good ductility.

[0022] Secondly, the present invention also provides a method for manufacturing a target capsule, applicable to the target capsule for isotope production described in any of the above claims, the method comprising:

[0023] S1. Fabricate the encapsulation shell, support frame, and target material based on the size of the target capsule;

[0024] S2. Assemble the target, support frame and encapsulation shell into one piece, and perform sealing welding on the encapsulation shell;

[0025] S3. Perform a sealing verification test on the target capsule.

[0026] According to a method for manufacturing a target capsule provided by the present invention, the encapsulation shell includes a first shell and a second shell;

[0027] The fabrication of the encapsulation shell, support frame, and target material based on the size of the target capsule includes:

[0028] The target capsule is defined as a cylindrical structure with a diameter of D1 and a thickness of T, and the target material has a diameter of D2.

[0029] A first shell and a second shell, consisting of a bottom wall and a side wall, are fabricated using a metal film of thickness t. The outer diameter of the bottom wall is D1, and the length of the side wall is T / 2. The diameter of the through-hole of the support frame is D2, and the outer diameter is D1-2t. The thickness of the target material is T-2t.

[0030] According to a method for manufacturing a target capsule provided by the present invention, the sealing verification test of the target capsule includes:

[0031] Place the target capsule in the vacuum chamber, start pumping air and maintain it for the first preset time;

[0032] Turn off the vacuum pump, fill the vacuum chamber with helium or hydrogen to maintain pressure and keep it for the second preset time;

[0033] The target capsule is removed from the vacuum chamber, heated, and tested for gas leakage.

[0034] The above-described one or more technical solutions of this invention have at least one of the following technical effects:

[0035] The support frame is configured into two parts: a first support ring and a second support ring. When disassembling the target capsule by stamping, the encapsulation shell can be easily cut along the contact surface of the first and second support rings. This greatly reduces the stamping force applied to the target capsule and keeps the disassembly point away from the target material, thereby avoiding target material breakage and reducing the generation of radioactive dust.

[0036] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted by the present invention, and the advantages brought about by the technical features of these technical solutions as described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings, or will be learned through the practice of the present invention. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the exploded structure of the target capsule provided in an embodiment of the present invention.

[0039] Figure 2 for Figure 1 A cross-sectional view of the target capsule along its radial section.

[0040] Figure 3 This is a schematic diagram of the target capsule being disassembled during stamping, as provided in an embodiment of the present invention.

[0041] Figure 4 This is a schematic diagram of a first support ring provided in an embodiment of the present invention.

[0042] Figure 5 This is a schematic diagram of another first support ring provided in an embodiment of the present invention.

[0043] Figure label:

[0044] 100, Support frame; 110, First support ring; 111, Protrusion; 120, Second support ring; 121, Groove; 200, Target material; 300, Encapsulation shell; 310, First shell; 311, Bottom wall; 312, Side wall; 320, Second shell; 400, Stamping table; 500, Punch. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0046] In an embodiment of the present invention, a target capsule for isotope production is described.

[0047] like Figure 1 and Figure 2 As shown, the target capsule mainly includes a support frame 100, a target material 200, and a packaging shell 300.

[0048] The support frame 100 has a through-hole in the middle. The target material 200 is installed in the through-hole to receive bombardment from high-energy particles to generate isotopes. The encapsulation shell 300 covers the outside of the support frame 100 to isolate the target material 200 from the external environment.

[0049] The support frame 100 includes a first support ring 110 with the through opening as an annular hole, and a second support ring 120 sleeved on the outside of the first support ring 110.

[0050] Furthermore, the outer peripheral wall of the first support ring 110 and the inner peripheral wall of the second support ring 120 are configured as mutually adaptable cylindrical surfaces. For example, the cylindrical surface can be a regular polygonal cylinder, a circular cylinder, etc.

[0051] Furthermore, the outer peripheral wall of the first support ring 110 and the inner peripheral wall of the second support ring 120 are fitted with a clearance fit. Specifically, the diameters of the first support ring 110 and the second support ring 120 are set according to the clearance fit tolerances: the outer peripheral wall diameter of the first support ring 110 has a negative tolerance based on the design dimensions. The inner peripheral wall diameter of the second support ring 120 has a positive tolerance based on the design dimensions.

[0052] Furthermore, the encapsulation shell 300 includes a first shell 310 and a second shell 320. The first shell 310 covers one side of the support frame 100. The second shell 320 covers the other side of the support frame 100.

[0053] The first housing 310 and the second housing 320 are sealed together on the outer periphery of the support frame 100.

[0054] Furthermore, both the first housing 310 and the second housing 320 are configured as a cover-like structure with a cavity on one side, formed by a bottom wall 311 and a side wall 312.

[0055] One side of the bottom wall 311 is in contact with the support frame 100. The side wall 312 is perpendicular to the bottom wall 311. Furthermore, the side wall 312 is in contact with the outer peripheral wall of the support frame 100.

[0056] In particular, such as Figure 2 As shown, a groove 121 extending circumferentially may also be provided on the outer peripheral wall of the support frame 100. The side wall 312 of the first housing 310 and the side wall 312 of the second housing 320 both extend to the opening of the groove 121.

[0057] Furthermore, the sidewall 312 of the first housing 310 and the sidewall 312 of the second housing 320 are welded together at the groove opening of the groove 121. In this way, the groove opening of the groove 121 is exactly inside the welding position, which can not only ensure the welding quality of the weld pool behind it during the welding process, thus ensuring the welding quality of the joint between the first housing 310 and the second housing 320, but also prevent the weld from sticking to the support frame 100, and also keep the welding position away from the target material 200.

[0058] When welding is performed using laser, electron beam, or other welding processes, the heat-affected zone can only affect the outer peripheral wall of the support frame 100, thus avoiding excessive heat input that could lead to welding deformation, damage to the internal target material 200, or damage to the support structure.

[0059] Furthermore, by welding the first housing 310 and the second housing 320 to the outer periphery of the support frame 100, multiple target capsules of the same specification can be continuously encapsulated by simply setting the rotation speed (i.e., welding speed) of the target capsule and the fixed position of the welding torch for target capsules of different diameters. Moreover, the welding torch can be adjusted to the optimal position in one go and maintain its posture throughout the welding process, greatly improving the production efficiency of target capsules.

[0060] Furthermore, the first housing 310 and the second housing 320 can adopt the same structure and materials, thereby transforming the original welding relationship between the metal film and the support ring of different materials and different thicknesses into welding of the same material with equal thickness, so that the weld between the first housing 310 and the second housing 320 is subjected to uniform thermal stress and thermal strain to avoid weld deformation.

[0061] Preferably, the target material 200 can be configured as various types, such as solid foil, solid sheet, powder, or liquid compound.

[0062] The support frame 100 can be made of metal materials, such as aluminum alloy or stainless steel; or of non-metallic materials, such as ceramics or graphite. The advantage of ceramics and graphite is their high-temperature resistance, and most of the target material 200 will not chemically react or adhere to ceramics or graphite at high temperatures. Even if the target material 200 adheres to the internal support ring, the acid and alkali resistance of ceramics and graphite will not affect the subsequent isotope separation process.

[0063] The support frame 100 can also be made of a combination of metal and non-metal materials.

[0064] Furthermore, the encapsulation shell 300 is made of a metal material with good ductility.

[0065] The first shell 310 and the second shell 320 can be made of materials with good heat resistance, such as copper and titanium, to ensure the stability of the target material 200 in a high-temperature environment.

[0066] In this embodiment, the support frame 100 is configured as two parts: a first support ring 110 and a second support ring 120. When the target capsule is disassembled by stamping, the encapsulation shell 300 can be easily cut along the contact surface of the first support ring 110 and the second support ring 120. This greatly reduces the stamping force applied to the target capsule and keeps the breaking point away from the target material 200, thereby preventing the target material 200 from breaking and reducing the generation of radioactive dust.

[0067] Based on the above embodiments, another embodiment of the present invention introduces a target capsule for isotope production.

[0068] like Figure 4 As shown, in order to accommodate the gas released by the target 200 during irradiation and to prevent excessive gas from causing the first housing 310, the second housing 320 to separate from the target 200, thereby reducing the heat exchange efficiency between the target 200 and the encapsulation shell 300, a protrusion 111 is provided on the inner peripheral wall of the first support ring 110. The protrusion 111 extends radially along the first support ring 110.

[0069] When the target material 200 is installed in the annular hole of the first support ring 110, the outer peripheral wall of the target material 200 abuts against the protrusion 111.

[0070] Several protrusions 111 are distributed at intervals along the circumference of the first support ring 110, dividing the gap between the target material 200 and the first support ring 110 into multiple arc-shaped air chambers.

[0071] The protrusion 111 can not only serve as a radial positioning point for the target 200, restricting its movement within the first support ring 110, but also divide the annular gap between the target 200 and the inner wall of the first support ring 110 into several independent air chambers. This can prevent gas from accumulating in a single area, thus avoiding excessive local pressure and delaying the bulging and deformation damage that may be caused by the increase in internal pressure of the encapsulation shell 300.

[0072] The first support ring 110 may also be composed of multiple arc segments joined together along its circumference to facilitate the removal of the target material 200. Specifically, the first support ring 110 is divided into at least two segments in its circumferential direction. When these segments are embedded in the second support ring 120, they are joined end to end to form a ring. When they are removed from the second support ring 120, they disperse on their own, which can greatly reduce the difficulty of removing the target material 200.

[0073] Preferably, such as Figure 5 As shown, the first support ring 110 is divided into six arc segments along its circumference.

[0074] Furthermore, in another embodiment of the present invention, a method for manufacturing a target capsule is described. This method is applied to the target capsules in any of the above embodiments.

[0075] The manufacturing method includes: S1, preparing a packaging shell 300, a support frame 100 and a target material 200 based on the size of the target capsule; S2, assembling the target material 200, the support frame 100 and the packaging shell 300 into one piece, and sealing the packaging shell 300 by welding; S3, performing a sealing verification test on the target capsule.

[0076] The encapsulation shell 300 includes a first shell 310 and a second shell 320. The fabrication of the encapsulation shell 300, support frame 100, and target material 200 based on the target capsule's dimensions includes: setting the target capsule to be a cylindrical structure with a diameter of D1 and a thickness of T, and the target material 200 to have a diameter of D2; using a metal film with a thickness of t to fabricate the first shell 310 and the second shell 320, which are respectively composed of a bottom wall 311 and a side wall 312, with the outer diameter of the bottom wall 311 being D1 and the length of the side wall 312 being T / 2; setting the through-hole diameter of the support frame 100 to be D2 and the outer circumference diameter to be D1-2t; and setting the thickness of the target material 200 to be T-2t.

[0077] When manufacturing the support frame 100, the outer peripheral wall of the first support ring 110 is manufactured with negative tolerance, and the inner peripheral wall of the second support ring 120 is manufactured with positive tolerance, so that the first support ring 110 and the second support ring 120 can be smoothly fitted together.

[0078] Furthermore, the sealing verification test of the target capsule includes: placing the target capsule in a vacuum chamber, starting evacuation and maintaining it for a first preset time; turning off the vacuum pump, filling the vacuum chamber with helium or hydrogen gas to maintain pressure and maintaining it for a second preset time; removing the target capsule from the vacuum chamber, heating the target capsule, and detecting whether there is gas leakage. The first and second preset times can be set as needed, ranging from 30 to 60 minutes.

[0079] The specific steps for making the target capsule are as follows:

[0080] The structural dimensions of the target capsule are set as follows: the diameter of the target capsule is D1 and the thickness is T; the thickness of the encapsulation shell 300 is t; and the diameter of the target material 200 is D2.

[0081] Preparation of the first shell 310 and the second shell 320: A metal film with a thickness of t is used to form a cap-like structure with a bottom wall 311 having a diameter of D1 and a side wall 312 having a length of T / 2 by stamping.

[0082] Fabrication of support frame 100: A sheet metal with an inner diameter of D2 and an outer diameter of D1-2t is cut. The inner diameter is based on a negative tolerance for D2. The sheet metal is then stamped into a first support ring 110 and a second support ring 120, and the outer peripheral wall of the first support ring 110 and the inner peripheral wall of the second support ring 120 are ground. The outer peripheral wall diameter of the first support ring 110 is based on a negative tolerance according to the design dimensions. The inner peripheral wall diameter of the second support ring 120 is based on a positive tolerance according to the design dimensions.

[0083] Target material 200 loading: The target material 200 with a thickness of T-2t is installed in the annular hole of the first support ring 110, and then the second support ring 120 is sleeved on the first support ring 110. Then, the first housing 310 and the second housing 320 are used to cover the first and second support rings from both sides.

[0084] Welding seal: The butt joint between the first housing 310 and the second housing 320 is welded using a laser or electron beam to complete the sealing of the target capsule.

[0085] Sealing verification test: Place the entire target capsule in the vacuum chamber, start evacuation and maintain it for the first preset time; then, turn off the vacuum pump, fill the vacuum chamber with helium or hydrogen and maintain the pressure for the second preset time; then, remove the target capsule from the vacuum chamber and place it in a heating container, heat the target capsule, and test for gas leakage.

[0086] If no helium or hydrogen is detected, the seal is reliable; if helium or hydrogen is detected, it indicates that the weld seal has failed.

[0087] Beam irradiation: Irradiating the target capsule with a target beam.

[0088] Furthermore, such as Figure 3 As shown, the disassembly method of the target capsule is as follows: the lower side of the target capsule is overlapped with the stamping table 400, and the target capsule is concentric with the annular hole on the stamping table 400; then, the punch 500 is used to stamp from the upper side of the target capsule. After breaking through the encapsulation shell 300, the target material 200, the first support ring 110 and the second support ring 120 can be sorted out in the blanking process.

[0089] By adopting the target capsule structure of the present invention, when disassembling the target capsule, stamping is performed along the contact surface between the first support ring 110 and the second support ring 120. Only the thinner encapsulation shell 300 needs to be cut to achieve rapid disassembly of the target capsule, which greatly reduces the required stamping force and can also avoid damage to the support frame 100 and the target material 200.

[0090] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0091] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0092] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0093] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms are not limited to the same embodiments or examples. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0094] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A target capsule for isotope production, characterized in that, include: A support frame (100) having a through opening in the middle; A target (200) is installed inside the through-hole to receive bombardment of high-energy particles to produce isotopes; A housing (300) covers the outside of the support frame (100); The support frame (100) includes a first support ring (110) with the through opening as an annular hole, and a second support ring (120) sleeved on the outside of the first support ring (110). The outer peripheral wall of the first support ring (110) and the inner peripheral wall of the second support ring (120) are configured as mutually adaptable cylindrical surfaces and are fitted with a clearance. The encapsulation shell (300) includes: The first housing (310) is disposed on one side of the support frame (100); The second housing (320) is disposed on the other side of the support frame (100); Both the first housing (310) and the second housing (320) are configured as a cover-like structure with a cavity on one side, consisting of a bottom wall (311) and a side wall (312); One side of the bottom wall (311) is in contact with the support frame (100), and the side wall (312) is perpendicular to the bottom wall (311) and in contact with the outer peripheral wall of the support frame (100); The first housing (310) and the second housing (320) are sealed together on the outer periphery of the support frame (100).

2. The target capsule for isotope production according to claim 1, characterized in that, The inner peripheral wall of the first support ring (110) is provided with a protrusion (111), the protrusion (111) extends radially along the first support ring (110), and a plurality of the protrusions (111) are distributed circumferentially along the first support ring (110), and the outer peripheral wall of the target material (200) abuts against the protrusion (111).

3. The target capsule for isotope production according to claim 1, characterized in that, The first support ring (110) may be composed of multiple arc segments spliced ​​together along its circumference to facilitate the removal of the target material (200).

4. The target capsule for isotope production according to claim 1, characterized in that, The encapsulation shell (300) is made of a metal material with good ductility.

5. A method for manufacturing a target capsule, characterized in that, The method for manufacturing the target capsule for isotope production according to any one of claims 1 to 4 includes: S1. Based on the size of the target capsule, prepare the encapsulation shell (300), support frame (100) and target material (200). S2. Assemble the target material (200), support frame (100) and encapsulation shell (300) into one piece, and perform sealing welding on the encapsulation shell (300); S3. Perform a sealing verification test on the target capsule.

6. The method for manufacturing the target capsule according to claim 5, characterized in that, The encapsulation shell (300) includes a first shell (310) and a second shell (320); The fabrication of the encapsulation shell (300), support frame (100), and target material (200) based on the size of the target capsule includes: The target capsule is defined as a cylindrical structure with a diameter of D1 and a thickness of T, and the target material (200) has a diameter of D2. A first shell (310) and a second shell (320) consisting of a bottom wall (311) and a side wall (312) are respectively made using a metal film with a thickness of t. The outer diameter of the bottom wall (311) is D1, and the length of the side wall (312) is T / 2. The through-hole diameter of the support frame (100) is D2, and the outer circumference diameter is D1-2t. The thickness of the target material (200) is T-2t.

7. The method for manufacturing the target capsule according to claim 6, characterized in that, The sealing verification test of the target capsule includes: Place the target capsule in the vacuum chamber, start pumping air and maintain it for the first preset time; Turn off the vacuum pump, fill the vacuum chamber with helium or hydrogen to maintain pressure and keep it for the second preset time; The target capsule is removed from the vacuum chamber, heated, and tested for gas leakage.

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