A high signal-to-noise ratio ion energy probe based on magnetic deflection effect

Abstract

The application relates to the technical field of plasma detection, in particular to a high-signal-to-noise ratio ion energy probe based on magnetic deflection effect. The application provides a high-signal-to-noise ratio ion energy probe based on magnetic deflection effect, which comprises an upper permanent magnet, a lower permanent magnet, a collimator and an array probe; the collimator penetrates into a shell, the collimator is used for making ions enter the shell along a preset direction, the upper permanent magnet and the lower permanent magnet are fixed at the upper and lower ends of the shell respectively to form a uniform magnetic field, and the array probe is arranged in the shell and comprises multiple sub-probes at different dispersed positions of ion current to collect ion currents of different energies separated under the action of the magnetic field. The embodiment of the application provides a high-signal-to-noise ratio ion energy probe based on magnetic deflection effect, and a high-signal-to-noise ratio ion current probe can be provided.

Description

Technical Field

[0001] This invention relates to the field of plasma detection technology, and in particular to a high signal-to-noise ratio ion energy probe based on magnetic deflection effect. Background Technology

[0002] Plasma probes can be widely used in plume studies and rapid acquisition of ion parameters under high vacuum conditions such as ion thrusters, Hall thrusters, and magnetohydrodynamic thrusters. They are particularly suitable for ion flow measurement and energy spectrum analysis under pulsed discharge, unsteady excitation, or high-frequency disturbance environments.

[0003] These probes are primarily used to obtain key parameters such as the energy distribution function of ions in the thruster plume and the current intensity of ions in different valence states, thereby providing crucial data support for the design optimization, performance evaluation, and on-orbit verification of ion electric thrusters. However, existing ion probes suffer from low signal-to-noise ratios during detection, making it difficult to measure the distribution of ions at different energy levels within the ion stream. Summary of the Invention

[0004] This invention provides a high signal-to-noise ratio ion energy probe based on magnetic deflection effect, which can also provide a high signal-to-noise ratio ion current probe.

[0005] This invention provides a high signal-to-noise ratio ion energy probe based on magnetic deflection effect, comprising an upper permanent magnet, a lower permanent magnet, a collimator, and an array probe; The collimator is inserted into the outer shell and is used to make ions enter the outer shell in a preset direction. The upper permanent magnet and the lower permanent magnet are fixed at the upper and lower ends of the outer shell respectively to form a uniform magnetic field. The array probe is set in the outer shell and includes multiple sub-probes at different dispersion positions of ion currents to collect ion currents of different energies separated under the action of the magnetic field.

[0006] In one possible design, a total current probe is placed at the point where the ion current converges after one complete cycle of movement to measure the total ion current.

[0007] In one possible design, the collimator is positioned perpendicular to the direction of the magnetic field, and two side electrode plates are positioned perpendicular to both the collimator and the direction of the magnetic field to form an electric field between the two side electrode plates. This causes the convergence point of the ion current to deviate from the incident position of the collimator, and the convergence points of ions with different valence states are dispersed along the direction of the electric field. Multiple total current probes are positioned at the convergence points of ions with different valence states.

[0008] In one possible design, an upper electrode plate and a lower electrode plate are arranged in the direction of the magnetic field to form an electric field parallel to the direction of the magnetic field, so that the convergence points of ions with different valence states are dispersed along the direction of the electric field, and multiple total current probes are arranged at the convergence points of ions with different valence states.

[0009] In one possible design, the collimator includes a measurement channel inlet, a measurement channel outlet, a ceramic tube, and a shielding sleeve. The measurement channel inlet and the measurement channel outlet are respectively located at both ends of the ceramic tube, and the shielding sleeve is located outside the ceramic tube.

[0010] In one possible design, the array probe includes a guide rail, a lead screw, a slider, a stepper motor, an arm, and multiple sub-arrays. The lead screw and the guide rail are vertically fixed to the housing. Both the lead screw and the guide rail pass through the slider. The stepper motor controls the rotation of the lead screw through a transmission gear to drive the slider to move up and down. The arm is fixed to the slider, and multiple staggered sub-arrays are arranged along the axial direction of the arm and distributed radially along the arm.

[0011] In one possible design, the total current probe includes a probe base, a support rod, and a probe body. The probe base is mounted on the bottom surface of the housing, and the support rod is a Z-shaped support rod, with one end fixed to the probe base and the other end fixed to the probe body.

[0012] In one possible design, the probe body includes a shielding shell, a shielding barrel, and a collecting probe. The collecting probe is disposed inside the shielding barrel and does not contact the shielding barrel. One end of the shielding barrel is mounted on the shielding shell, and the shielding shell is connected to the support rod.

[0013] In one possible design, the side electrode plate is fixed to the housing by insulating posts.

[0014] In one possible design, the upper electrode plate and the lower electrode plate are fixed to the housing by insulating posts.

[0015] Compared with the prior art, the present invention has at least the following beneficial effects: This invention employs a combination of a fixed magnetic field and a multi-channel array probe design, enabling ions of different energies to be mapped into spatial distribution signals in a single measurement, thereby directly obtaining the ion energy distribution function. The positions of the sub-probes in the array probe are determined based on the energy level of the tested ions; different sub-probe positions correspond to ions at different energy levels. During detection, the current obtained by probes at different positions represents the amount of ions at that energy level. Compared to the step-by-step voltage scanning method of RPA probes, this invention can achieve millisecond-level real-time energy distribution diagnosis under dynamic operating conditions such as thruster transient start-stop and power fluctuations, exhibiting higher timeliness and adaptability. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of a probe structure provided in an embodiment of the present invention; Figure 2 The diagram shows the separation trajectory distribution of Xe ions with different energies due to differences in cyclotron radius under a magnetic field strength of 0.5T. Figure 3 This is a schematic diagram of an ion trajectory under a superimposed electric field provided in an embodiment of the present invention; Figure 4 This is a top-view schematic diagram of an ion trajectory under a superimposed electric field provided in an embodiment of the present invention; Figure 5 This is a schematic diagram of a collimator provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of an array probe provided in an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of a total current probe provided in an embodiment of the present invention.

[0018] In the diagram, 1. Collimator; 11. Measurement channel inlet; 12. Measurement channel outlet; 13. Ceramic tube; 14. Shielding sleeve; 2. Array probe; 21. Guide rail; 22. Lead screw; 23. Slider; 24. Stepper motor; 25. Arm; 26. Subarray; 27. Transmission gear; 3. Total current probe; 31. Probe base; 32. Support rod; 33. Shielding shell; 34. Shielding barrel; 35. Collection probe; 4. Outer shell; 51. Lower permanent magnet plate; 52. Upper permanent magnet plate; 6. Side electrode plate; 71. Lower electrode plate; 72. Upper electrode plate; 8. Insulating column. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0020] In the description of the embodiments of the present invention, unless otherwise expressly specified and limited, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance; unless otherwise specified or stated, the term "multiple" refers to two or more; the terms "connected," "fixed," etc., should be interpreted broadly. For example, "connected" can be a fixed connection, a detachable connection, an integral connection, or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific circumstances.

[0021] In this specification, it should be understood that the directional terms such as "upper" and "lower" used in the description of the embodiments of the present invention are used to describe the angles shown in the accompanying drawings and should not be construed as limiting the embodiments of the present invention. Furthermore, in the context, it should also be understood that when it is mentioned that one element is connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected to the other element "upper" or "lower" through an intermediate element.

[0022] As mentioned above, the prior art has the following drawbacks: In existing technologies, commonly used methods for measuring ion energy and valence state mainly include the following two types of probes: 1. Electrostatic gate energy analyzer (RPA probe) RPA (Retarding Potential Analyzer) probes employ a multi-layered metal grid. As ions pass through the probe, a variable electrostatic voltage is applied, progressively blocking ions below a set voltage and allowing only ions above a certain energy threshold to enter the collector. By scanning the voltage and measuring the collection current, the energy distribution function of the ions can be obtained. However, this technique has significant limitations in measuring the plume of micro-electric thrusters: (1) The ion current emitted by the ion thruster is extremely weak (usually in the range of milliamperes to tens of milliamperes). After the grid loss, the collection current may be less than 0.1 μA, resulting in an extremely low signal-to-noise ratio. (2) The operating voltage of ion thrusters is usually as high as hundreds to thousands of volts. The high voltage creates a strong electric field between the grids, which can easily deflect the ion trajectory, potentially leading to a decrease in energy spectrum resolution or even false signals. In addition, under high voltage, arcs or discharges can easily occur between the grids inside the probe and between the probe and the outer shell, resulting in severe distortion of the measurement signal. (3) Measurement relies on step-by-step scanning voltage, making it difficult to quickly obtain the energy distribution of transient ions.

[0023] 2. E×B ion analysis probe E×B probes separate ions of different valence states spatially by applying orthogonal electric and magnetic fields within the probe channel, causing ions with different charge-to-mass ratios to be deflected to varying degrees. A slit or porous array is typically placed at the exit point, along with a current collector, to acquire information on the current distribution of ions in different valence states.

[0024] This technology has certain advantages in valence state separation, but it also has obvious shortcomings: (1) The energy distributions of ions with different valence states overlap significantly, and the information of high-valence ions is easily overwhelmed by low-valence ions; (2) Ions experience significant losses when passing through slits or porous arrays, resulting in a weakening of the collected current signal and increased noise interference; (3) This method also relies on voltage scanning to obtain energy distribution, which is difficult to meet the real-time measurement requirements.

[0025] In summary, existing RPA and E×B probes face technical bottlenecks in the diagnosis of plumes from micro ion thrusters, including low signal-to-noise ratio, insufficient transient response, and difficulty in accurately distinguishing ions of different valence states. Therefore, there is an urgent need to develop a novel measurement device that can achieve high signal-to-noise ratio, real-time response, and separation of multi-valence ions to overcome the limitations of existing technologies.

[0026] To solve the above problems, please refer to Figures 1 to 2 The present invention provides a high signal-to-noise ratio ion energy probe based on magnetic deflection effect, comprising an upper permanent magnet 52, a lower permanent magnet 51, a collimator 1 and an array probe 2; Collimator 1 is inserted into housing 4. Collimator 1 is used to make ions enter housing 4 in a preset direction. Upper permanent magnet 52 and lower permanent magnet 51 are fixed at the upper and lower ends of housing 4 respectively to form a uniform magnetic field. Array probe 2 is set in housing 4, including multiple sub-probes at different dispersion positions of ion current to collect ion currents of different energies separated under the action of magnetic field.

[0027] When ions of different energy levels are incident on a magnetic field, they undergo circular motion in a plane perpendicular to the magnetic field. The higher the energy, the larger the radius of motion. Therefore, ion streams of different energy levels can be separated, and the separated ion streams can then be received by array probe 2 to obtain the energy level distribution of the ions. The specific technical principle is explained below: Charged particles experience the Lorentz force in an electromagnetic field. The expression for the Lorentz force is: Where q is the particle's charge, E is the electric field, and B is the magnetic field. Let be the velocity of the particle. In this invention, considering the velocity generated by the accelerating voltage experienced by the ion in the thruster, when the ion moves in the magnetic field, the Lorentz force causes the ion to undergo circular motion perpendicular to the magnetic field direction. The curvature of its trajectory is related to the kinetic energy of the particle; that is, the greater the energy of the ion, the larger its radius of rotation.

[0028] Initial kinetic energy and velocity of ions The kinetic energy of ions ejected from the thruster is determined by the accelerating voltage V. acc Decide: Where m is the mass of the ion. Let q be the initial velocity of the ion and q be the charge of the ion. From this, the initial velocity of the ion can be derived. : Motion in a magnetic field Under the influence of magnetic field B, charged ions will undergo circular motion perpendicular to the magnetic field. The radius of gyration, r, depends on the ion's kinetic energy, the magnetic field strength, the ion's mass, and its charge. According to the Lorentz force principle, the radius of gyration r of the ion can be expressed as: in, Let denoted by , where is the velocity component of the ion perpendicular to the magnetic field direction, and B is the magnetic field strength. It can be seen that the cyclotron radius is directly proportional to the ion's kinetic energy; ions with higher kinetic energy have larger cyclotron radii, while ions with lower kinetic energy have smaller cyclotron radii. This means that under the same magnetic field strength, high-energy ions will deviate to a farther position, while low-energy ions will concentrate in a smaller region.

[0029] Furthermore, by setting a collimation slit and a shielding electrode before the ions enter the magnetic field, and by setting a secondary electron suppression layer before the collecting electrode, the present invention can effectively reduce the interference of secondary electron emission and stray ions on the measurement results.

[0030] By combining a fixed magnetic field with a multi-channel collecting electrode array, this invention eliminates the need for stepwise voltage scanning, enabling simultaneous acquisition of the distribution of ions with different energies in a single measurement. In experiments involving rapid thruster power adjustment (on the order of 10 ms), this invention can clearly capture the changes in ion energy distribution over time, while traditional RPA probes cannot obtain effective results due to scanning speed limitations.

[0031] Experimental comparisons under the same plume conditions show that the ion current signal intensity of the probe of this invention is about 2.5 times that of the RPA probe, while the noise level is reduced by about 40%, which significantly improves the signal-to-noise ratio of the measurement.

[0032] In some embodiments of the present invention, a total current probe 3 is set at the position where the ion current converges after one circle of movement in order to measure the total current of the ion current.

[0033] Although ions of different energy levels may separate due to their different radii during circular motion, they will still converge at the origin after one revolution. Therefore, the total current probe 3 can be set at the convergence point to obtain the total current.

[0034] In some embodiments of the present invention, the collimator 1 is arranged perpendicular to the magnetic field direction, and two side electrode plates 6 are arranged perpendicular to the collimator 1 and the magnetic field direction to form an electric field between the two side electrode plates 6, so that the convergence point of the ion current is offset from the incident position of the collimator 1, and the convergence points of ions with different valence states are dispersed along the direction of the electric field. Multiple total current probes 3 are arranged at the convergence points of ions with different valence states.

[0035] In some embodiments of the present invention, an upper electrode plate 72 and a lower electrode plate 71 are provided in the direction of the magnetic field to form an electric field parallel to the direction of the magnetic field, so that the convergence points of ions with different valence states are dispersed along the direction of the electric field, and multiple total current probes 3 are provided at the convergence points of ions with different valence states.

[0036] Please refer to Figure 3 and Figure 4 When an orthogonal electric field is superimposed on a magnetic field, ions of different valence states (such as Xe⁺, Xe²⁺, etc.) exhibit different trajectories due to their different charge-to-mass ratios. After traversing a certain path, ions of different valence states and energies will focus at different spatial locations. By arranging single-point probes at these locations, the current of ions of different valence states can be measured. This enables the separation and measurement of ions of different valence states such as Xe⁺ and Xe²⁺. This invention achieves a separation degree of over 85% between divalent xenon ions (Xe²⁺) and monovalent xenon ions (Xe⁺), significantly better than the approximately 60% separation degree of traditional E×B probes, effectively solving the problem of insufficient valence state resolution.

[0037] In addition to causing ions of different valence states to converge at different points, the superimposed electric field also causes their movement to no longer be in a circular direction. Therefore, the point of convergence again will not be collimator 1, which makes it easier to set up total current probes 3 for receiving ions of different valence states. Two sets of electric fields can be set up in the vertical and horizontal directions, so that the distance between the convergence points of ions of different valence states is larger, which is more conducive to setting up multiple total current probes 3.

[0038] Please refer to Figure 5 In some embodiments of the present invention, the collimator 1 includes a measurement channel inlet 11, a measurement channel outlet 12, a ceramic tube 13, and a shielding sleeve 14. The measurement channel inlet 11 and the measurement channel outlet 12 are respectively disposed at both ends of the ceramic tube 13, and the shielding sleeve 14 is disposed outside the ceramic tube 13.

[0039] In this embodiment, the measurement channel inlet 11 is located at the front end of the channel to guide ions into the measurement channel. The ceramic tube 13, located in the middle section of the measurement channel, has excellent insulation properties, preventing interference between the ion beam and other components of the detection system when passing through the measurement area, thereby improving the electrical stability of the channel and ensuring stable ion flow transmission. The measurement channel outlet 12 is located at the end of the measurement channel, opposite to the inlet, and is used for ion beam discharge and further transmission. The shielding sleeve 14 is used to isolate external electromagnetic interference and ensure measurement accuracy. The shielding device is typically made of conductive material or a specific metal, creating a stable electromagnetic environment within the measurement channel.

[0040] Please refer to Figure 6 In some embodiments of the present invention, the array probe 2 includes a guide rail 21, a lead screw 22, a slider 23, a stepper motor 24, an arm 25, and multiple sub-arrays 26. The lead screw 22 and the guide rail 21 are vertically fixed on the housing 4. Both the lead screw 22 and the guide rail 21 pass through the slider 23. The stepper motor 24 controls the rotation of the lead screw 22 through a transmission gear 27 to drive the slider 23 to move up and down. The arm 25 is fixed on the slider 23. Multiple staggered sub-arrays 26 are arranged along the axial direction of the arm 25 and radially distributed along the arm 25.

[0041] In this embodiment, when testing different energy levels of the ion flow, multiple subarrays 26 are raised to preset positions so that the ion flow is dispersed and incident on multiple probes of the multiple subarrays 26 to obtain the energy level distribution; when testing the total flow rate of ions with different valence states, multiple subarrays 26 are lowered so that the ion flow is dispersed and converged to each convergence point so that it can be detected by the total current probe 3.

[0042] Specifically, stepper motor 24 is the drive component of the device, responsible for precisely controlling the movement of the probe. Connected to transmission gear 27 and slider 23, stepper motor 24 converts rotational motion into linear motion, driving array probe 2 to scan along a specified path. Transmission gear 27, connected to stepper motor 24, is responsible for transmitting motion, enabling array probe 2 to move along a set trajectory. Slider 23 slides smoothly on guide rail 21 according to the movement of transmission gear 27, ensuring precise positioning and stability of array probe 2. Guide rail 21 provides a stable sliding path, and slider 23 moves linearly along guide rail 21. The design of guide rail 21 ensures smooth operation of array probe 2, reducing errors caused by vibration or displacement, and guaranteeing measurement accuracy. Lead screw works in conjunction with stepper motor 24, driving slider 23 to move along guide rail 21 through rotation. The synergistic effect of lead screw and stepper motor 24 ensures that array probe 2 can adjust its position at a stable speed, guaranteeing motion accuracy. Subarray 26, comprising X1, X2, and X3 arrays, is configured within the measurement region for acquiring ion signals of multiple valence states and different energies. These array probes 2 enable multidimensional detection of ion energy distribution. Arm 25 supports the array probes 2 and fixes the arrays within the measurement region, ensuring stable data acquisition by the array probes 2.

[0043] Please refer to Figure 7 In some embodiments of the present invention, the total current probe 3 includes a probe base 31, a support rod 32, and a probe body. The probe base 31 is installed on the bottom surface of the housing 4, and the support rod 32 is a Z-shaped support rod 32, with one end fixed to the probe base 31 and the other end fixed to the probe body.

[0044] In some embodiments of the present invention, the probe body includes a shielding shell 33, a shielding barrel 34, and a collecting probe 35. The collecting probe 35 is disposed inside the shielding barrel 34 and does not contact the shielding barrel 34. One end of the shielding barrel 34 is mounted on the shielding shell 33, and the shielding shell 33 is connected to a support rod 32.

[0045] In this embodiment, the shielding sleeve and shielding shell 33 are mainly used to protect the detection system from external electromagnetic interference, ensuring that the measurement of the current signal is not affected by the external electromagnetic field, thereby improving the accuracy of the measurement. The collecting probe 35 directly receives the current signal in the ion current and transmits it to the data acquisition system for processing. The probe design ensures efficient collection of ion currents of different valence states and can accurately transmit current signals, providing reliable data support for subsequent ion analysis. The support rod 32 stably fixes the various components (such as the shielding sleeve, collecting probe 35, etc.), ensuring that the entire device will not move or shake during operation, thereby ensuring the stability and accuracy of the measurement process. It is used to fix the collecting probe 35 and other key components. It ensures the stability of the device, enabling the probe and detection system to maintain stable operation during long-term work, and preventing measurement errors caused by vibration or external interference.

[0046] In some embodiments of the present invention, the side electrode plate 6 is fixed to the outer casing 4 by an insulating post 8.

[0047] In some embodiments of the present invention, the upper electrode plate 72 and the lower electrode plate 71 are fixed to the outer casing 4 by insulating posts 8.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high signal-to-noise ratio ion energy probe based on magnetic deflection effect, characterized in that, Includes an upper permanent magnet, a lower permanent magnet, a collimator, and an array probe; The collimator is inserted into the outer shell and is used to make ions enter the outer shell in a preset direction. The upper permanent magnet and the lower permanent magnet are respectively fixed at the upper and lower ends of the outer shell to form a uniform magnetic field. The array probe is set in the outer shell and includes multiple sub-probes at different dispersion positions of ion current to collect ion currents of different energies separated under the action of the magnetic field. The position of the sub-probes in the array probe is determined according to the energy level of the ion being tested, and different sub-probe positions correspond to ions at different energy levels.

2. The ion energy probe according to claim 1, characterized in that, A total current probe is placed at the point where the ion current converges after one complete cycle of movement to measure the total ion current.

3. The ion energy probe according to claim 2, characterized in that, The collimator is set perpendicular to the direction of the magnetic field, and two side electrode plates are set perpendicular to the direction of the collimator and the direction of the magnetic field to form an electric field between the two side electrode plates. This causes the convergence point of the ion current to be offset from the incident position of the collimator, and the convergence points of ions with different valence states are dispersed along the direction of the electric field. Multiple total current probes are set at the convergence points of ions with different valence states.

4. The ion energy probe according to claim 2 or 3, characterized in that, An upper electrode plate and a lower electrode plate are set in the direction of the magnetic field to form an electric field parallel to the direction of the magnetic field, so that the convergence points of ions with different valence states are dispersed along the direction of the electric field, and multiple total current probes are set at the convergence points of ions with different valence states.

5. The ion energy probe according to claim 1, characterized in that, The collimator includes a measurement channel inlet, a measurement channel outlet, a ceramic tube, and a shielding sleeve. The measurement channel inlet and the measurement channel outlet are respectively located at both ends of the ceramic tube, and the shielding sleeve is located outside the ceramic tube.

6. The ion energy probe according to claim 4, characterized in that, The array probe includes a guide rail, a lead screw, a slider, a stepper motor, an arm, and multiple sub-arrays. The lead screw and the guide rail are vertically fixed to the housing. Both the lead screw and the guide rail pass through the slider. The stepper motor controls the rotation of the lead screw through a transmission gear to drive the slider to move up and down. The arm is fixed to the slider. Multiple staggered sub-arrays are arranged along the axial direction of the arm and distributed radially along the arm.

7. The ion energy probe according to claim 2, characterized in that, The total current probe includes a probe base, a support rod, and a probe body. The probe base is installed on the bottom surface of the housing. The support rod is a Z-shaped support rod, with one end fixed to the probe base and the other end fixed to the probe body.

8. The ion energy probe according to claim 7, characterized in that, The probe body includes a shielding shell, a shielding barrel, and a collecting probe. The collecting probe is disposed inside the shielding barrel and does not contact the shielding barrel. One end of the shielding barrel is mounted on the shielding shell, and the shielding shell is connected to the support rod.

9. The ion energy probe according to claim 3, characterized in that, The side electrode plate is fixed to the outer casing by insulating posts.

10. The ion energy probe according to claim 4, characterized in that, The upper electrode plate and the lower electrode plate are fixed to the outer casing by insulating posts.

Images