Soft six-dimensional force sensor with built-in three-dimensional topological conductive network and preparation method thereof

Abstract

The invention provides a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network and a preparation method thereof. The sensor comprises a flexible substrate with a polyhedral structure, a three-dimensional topological conductive network arranged in the flexible substrate and electrode pins distributed on the outer surface of the flexible substrate. And the electrode pins are connected with the three-dimensional topological conductive network, so that the resistance value formed by the three-dimensional topological conductive network can be measured conveniently. Any two electrode pins are connected with the internal three-dimensional topology conductive network to form a resistor, so that the sensor can output a large number of resistance values, and a resistance image describing stress deformation of the sensor is formed. According to the invention, the multi-dimensional force sensing limitation of the existing flexible force sensor is broken through, and the full-dimensional sensing of the space force, the torque and the complex force and the torque of any combination is realized. A novel force sensor design and preparation scheme which is simple in structure, flexible, safe and multi-dimensional in sensing is provided for the fields of intelligent robots, intelligent prostheses, man-machine interaction and the like.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of flexible sensor, in particular to a soft six-dimensional force sensor with built-in three-dimensional topological conductive network and a preparation method. BACKGROUND

[0002] Three-dimensional deformation and force sensing technology plays a key role in connecting the digital world and the physical world. In particular, accurate, real-time, and high-fidelity three-dimensional (3D) deformation and force sensing is the cornerstone of the next generation of human-computer interaction, autonomous robots, and advanced medical systems. Bionic robots and fine grasping; medical and rehabilitation; immersive human-computer interaction and virtual reality (VR / AR) all have high demand for three-dimensional deformation and force sensing technology.

[0003] Currently, the most common three-dimensional deformation and force sensing technology is two-dimensional sensors with planar or thin film structures. They can decouple the three-dimensional stress state through force conversion. Such three-dimensional deformation and force sensing technology has the advantages of thinness and minimal disturbance. At the same time, there are also a small number of three-dimensional structure sensors. Existing three-dimensional sensors often use discrete sensing elements combined with three-dimensional structure discrete microchannels, lattice nodes, etc. to achieve signal acquisition. Compared with two-dimensional sensors, these sensors skip the force model conversion step and can directly capture X / Y / Z directional forces and deformations, providing a more complete coverage of three-dimensional space mechanical signals. However, existing three-dimensional sensors cannot fully sense spatial multi-dimensional forces and moments. SUMMARY

[0004] The purpose of the present application is to provide a soft six-dimensional force sensor with built-in three-dimensional topological conductive network and a preparation method. The present application can solve the problems raised in the background art.

[0005] To solve the above technical problems, the technical solution adopted by the present application is as follows: A soft six-dimensional force sensor with built-in three-dimensional topological conductive network, comprising a flexible matrix in the form of a polyhedral structure, a three-dimensional topological conductive network built-in the flexible matrix, and electrode pins distributed on the outer surface of the flexible matrix, the electrode pins being connected with the three-dimensional topological conductive network, facilitating the measurement of the resistance value formed by the three-dimensional topological conductive network, and each pair of electrode pins being connected through the internal three-dimensional topological conductive network to form a resistance.

[0006] Further, the material of the flexible matrix is one of polydimethylsiloxane, silicone rubber, and hydrogel.

[0007] Further, the three-dimensional topological conductive network is a fluid conductive medium or a flexible solid conductive medium.

[0008] Further, a data processing device is also included, which is connected with all the electrode pins, for detecting the resistance value between any two electrode pins and comparing it with the initial resistance value to obtain the resistance value network change matrix.

[0009] Preferably, the fluid conductive medium is one of multi-walled carbon nanotube conductive paste, carbon black conductive paste, graphene conductive paste, ionic liquid, Mxene material conductive paste, conductive ink, and gold, silver, copper micro-nano particle paste.

[0010] Preferably, the flexible solid conductive medium is one of conductive silicone, conductive rubber, and conductive hydrogel.

[0011] A preparation method of a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network, for forming the above-mentioned soft six-dimensional force sensor with a built-in three-dimensional topological conductive network, comprising the following steps: The steps for manufacturing the soft six-dimensional force sensor with a built-in three-dimensional topological conductive network using a fluid conductive medium are as follows: S1. Obtain a three-dimensional topological conductive network model and a mold through 3D printing technology, place the three-dimensional topological conductive network model in the mold, pour the casting material into the mold, and after solidification and demolding, process to obtain a flexible base body with a built-in three-dimensional topological conductive network model; S2. Heat the flexible base body with a built-in three-dimensional topological conductive network model to melt the three-dimensional topological conductive network model, obtain a flexible base body with a built-in network passage, and form a plurality of mounting holes through the surface of the flexible base body; S3. Adhere the electrode pins to the mounting holes of the flexible base body through flexible glue, and reserve part of the mounting holes on the same side as three-dimensional topological conductive network injection holes; S4. Inject the three-dimensional topological conductive network into the network passage, and place it in a vacuum environment for debubbling, mount the electrode pins into the remaining mounting holes, and obtain a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network.

[0012] The steps for manufacturing the soft six-dimensional force sensor with a built-in three-dimensional topological conductive network using a solid flexible conductive medium are as follows: S1. Three-dimensional modeling of the three-dimensional topological conductive network, and obtaining the three-dimensional topological conductive network and the mold through 3D printing; S2. Place the three-dimensional topological conductive network in the mold, and then pour the casting material into the mold, and after solidification and demolding, process to obtain a flexible base body with a built-in three-dimensional topological conductive network; S3. Seal the electrode pins to the outer surface of the flexible base body, and connect the electrode pins with the three-dimensional topological conductive network, to obtain a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network.

[0013] Preferably, the defoaming time of the three-dimensional topological conductive network is 5-10 minutes.

[0014] Preferably, the melting point of the three-dimensional topological conductive network model material is 45-180 DEG C.

[0015] The present application has at least the following advantages or benefits: The soft six-dimensional force sensor with built-in three-dimensional topological conductive network provided by the present application adopts a flexible material as a flexible matrix, and internally constructs an integrated and three-dimensionally interconnected integrated network path accommodating a three-dimensional topological conductive network; a plurality of electrode pins are arranged externally to connect the three-dimensional topological conductive network internally. The flexible resistance sensor can be formed between any two electrode pins. A plurality of flexible resistance sensors generate a resistance value matrix as a whole, which contains a large number of resistance value elements to depict the complex deformation of the sensor as a whole and the complex external force corresponding to the deformation. In addition, the three-dimensional topological conductive network can be selected as a fluid conductive medium or a solid conductive medium, and the selection range is wide, especially the fluid conductive medium, which greatly widens the measurement range of the external force.

[0016] The soft six-dimensional force sensor provided by the present application reflects the electrical distribution state of the conductive network as a whole after being stressed through the numerical change of the resistance matrix, and the complex nonlinear relationship between the resistance matrix containing a large number of elements and the complex external force received by the sensor. The data processing device can establish the nonlinear mapping relationship between the electrical signal and the six-dimensional force component through the deep learning algorithm, realize the decoupling and measurement of the complex external force.

[0017] The present application breaks through the multi-dimensional force sensing limitation of the existing flexible force sensor, realizes the full-dimensional sensing of the space force, torque and complex force and torque in any combination. It provides a new type of force sensor design and preparation scheme with simple structure, soft and safe, multi-dimensional sensing for intelligent robots, intelligent prostheses, human-computer interaction and other fields. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 The structure diagram of the soft six-dimensional force sensor with built-in three-dimensional topological conductive network provided by the present application; Figure 2 The internal structure diagram of the soft six-dimensional force sensor with built-in three-dimensional topological conductive network provided by the present application; Figure 3A schematic diagram of common stress deformation of the soft six-dimensional force sensor with built-in three-dimensional topological conductive network provided by the present application; Figure 4 A structural schematic diagram of a preparation scheme of a sensor provided by prior art one; Figure 5 A structural schematic diagram of a sensor provided by prior art two; Figure 6 A structural schematic diagram of a sensor provided by prior art three.

[0020] Icon: 110, flexible substrate; 113, three-dimensional topological conductive network; 117, electrode pin. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0022] Please refer to Figures 1 to 3 The soft six-dimensional force sensor with built-in three-dimensional topological conductive network includes a flexible substrate 110 in the form of a polyhedral structure, a three-dimensional topological conductive network 113 built into the flexible substrate 110, and electrode pins 117 distributed on the outer surface of the flexible substrate 110. The electrode pins 117 are connected with the three-dimensional topological conductive network 113, which facilitates the measurement of the resistance value formed by the three-dimensional topological conductive network 113. Each of the two electrode pins 117 forms a resistance through the connection of the internal three-dimensional topological conductive network 113. This embodiment takes a cuboid flexible substrate and a three-dimensional orthogonal three-dimensional topological conductive network as an example.

[0023] The soft six-dimensional force sensor further includes a data processing device connected with all the electrode pins 117, which is used to detect the resistance value between any two electrode pins 117 and compare it with the initial resistance value to obtain a resistance value network change matrix.

[0024] Each of the two electrode pins 117 of the sensor can form a measurement path. By sequentially scanning each electrode pin pair through the data processing device, the resistance matrix R(t) of the sensor at a certain time can be obtained. The resistance matrix R0 of the unforced state is taken as the reference for comparison to obtain the resistance change ΔR = R(t)-R0, which is used for subsequent signal analysis.

[0025] Specifically, when a certain area of the sensor is stretched, the meshed channel and the three-dimensional topological conductive network inside the area are elongated, the cross-sectional area of the three-dimensional topological conductive network is reduced, and the distance between the conductive particles is increased, thereby causing the resistance of the measurement channel passing through the area to rise; when the area is compressed, the contact between the conductive particles is more close, and the channel resistance will decrease; in the complex situation where multiple forces act simultaneously (such as the superposition of stretching, shearing and twisting), the sensor collects a time-synchronized resistance change matrix ΔR, and after baseline correction, filtering and normalization processing, inputs it into a deep learning model (such as a convolutional neural network CNN or a hybrid neural network CNN+MLP) trained by calibration data. The deep learning model can automatically learn the mapping relationship between the resistance change and the six-dimensional force (Fx, Fy, Fz, Tx, Ty, Tz), generate a load distribution map, and realize decoupling identification of complex stress states. Specifically, the convolutional neural network (CNN) can be used to extract spatial features from the resistance matrix for identifying local resistance mode changes caused by stretching, shearing and twisting; and then the multi-layer perceptron (MLP) can be used to globally regress the features output by the CNN to preliminarily estimate the six-dimensional force (Fx, Fy, Fz, Tx, Ty, Tz). In order to enhance the expression ability of the model to the complex stress relationship, a graph convolution network (GCN) can also be introduced to model the three-dimensional topological structure of the conductive network, so that the model can identify the topological disturbance caused by torque and composite shearing by using the real connection relationship between nodes; and an attention mechanism can be used to further improve the selection ability of the key channel, so that the model can automatically focus on the feature area sensitive to different force components. Through the synergistic effect of the above various deep learning algorithms, a stable mapping between the resistance matrix and the six-dimensional force is finally realized, thereby improving the decoupling accuracy and reliability of the sensor in the complex stress field.

[0026] In the embodiment, the material of the flexible substrate 110 is one of polydimethylsiloxane, silicone rubber, and hydrogel.

[0027] In the embodiment, the three-dimensional topological conductive network 113 is a fluid conductive medium or a flexible solid conductive medium. The fluid conductive medium is one of a multi-walled carbon nanotube conductive paste, a carbon black conductive paste, a graphene conductive paste, an ionic liquid, a Mxene material conductive paste, a conductive ink, and a gold, silver, or copper micro-nano particle paste. The flexible solid conductive medium is one of a conductive silicone, a conductive rubber, and a conductive hydrogel.

[0028] The application further provides a preparation method of a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network. The steps for manufacturing the soft six-dimensional force sensor with a built-in three-dimensional topological conductive network using a fluid conductive medium are as follows: S1. Obtain a three-dimensional topological conductive network model and a mold by 3D printing technology, place the three-dimensional topological conductive network model in the mold, pour the casting material into the mold, and obtain the flexible matrix with the three-dimensional topological conductive network model embedded after solidification, demolding and post-processing.

[0029] It should be noted that the melting point of the material of the three-dimensional topological conductive network model is 45-180℃, and paraffin is used as the material for making the three-dimensional topological conductive network model in this embodiment. The material of the flexible matrix is one of polydimethylsiloxane, silicone rubber, and hydrogel. This embodiment takes Ecoflex silicone rubber as an example. Mix the two-component silicone rubber of Ecoflex (such as Ecoflex 00-30), stir thoroughly for about 1 minute, then place it in a vacuum tank for 3-5 minutes to remove mixed gas. Pour the degassed mixture into the mold as the casting material, and solidify at 60℃ for 30 minutes or at room temperature for 4 hours. After solidification, demold to obtain the flexible matrix with the three-dimensional topological conductive network model embedded.

[0030] S2. Place the flexible matrix with the three-dimensional topological conductive network model embedded in a suitable temperature environment to heat the flexible matrix with the three-dimensional topological conductive network model embedded, melt the three-dimensional topological conductive network model, and flow out through the mounting hole to obtain a flexible matrix with a three-dimensional topological conductive network cavity installed.

[0031] S3. Adhere the electrode pins to the mounting holes of the flexible matrix by flexible glue to seal the mounting holes, and reserve part of the mounting holes on the same side as three-dimensional topological conductive network injection holes.

[0032] S4. Inject the three-dimensional topological conductive network into the meshed passage, and place it in a vacuum environment to degas, install the electrode pins into the remaining mounting holes, and obtain a soft six-dimensional force sensor with a three-dimensional topological conductive network embedded.

[0033] During the injection of the three-dimensional topological conductive network, if the three-dimensional topological conductive network is a high-flow liquid, such as a high-concentration sodium chloride solution, the prepared soft material matrix can be directly placed in the sodium chloride solution, and after a period of static state, the electrode pin packaging can be directly performed in the liquid environment to ensure the continuous penetration of the liquid conductive network.

[0034] If the flexible conductive material is a low-flow liquid slurry, such as multi-walled carbon nanotube conductive slurry, carbon black conductive slurry, graphene conductive slurry, Mxene material conductive slurry, and gold, silver, copper micro-nanoparticle slurry. A small amount of volatile solvent (auxiliary, optional toluene, xylene, ethanol) can be added to the slurry to improve flowability by reducing slurry viscosity; inject from the mounting hole, and when multiple mounting holes have continuous, uniform, and bubble-free slurry flow, the injection is complete. Then, by degassing in a vacuum environment for 5-10 min, the solvent is volatilized, the slurry viscosity is restored, and cross-linking and curing are completed, thereby obtaining a continuous and integrated conductive network in the complex channel.

[0035] Regarding the selection of conductive media: If graphene, carbon black, or carbon nanotube conductive liquid slurry is selected, the conductive filler mass fraction is 1%-5%, the solvent is 85%-95%, and the solvent is a non-polar oil (such as white oil, paraffin oil, or toluene, xylene). Non-ionic dispersants (such as polyethylene glycol PEG-400, polyvinylpyrrolidone PVP-K30) can be added at 2%-5%; when configuring, first dissolve the dispersant in the solvent, then add the conductive filler, ultrasonically disperse for 20-30 min at 300-500 W, stir at 800-1000 rpm for 15-20 min, and finally vacuum degassing for 10 min to ensure uniform dispersion of the filler.

[0036] If gold, silver, or copper micro-nanoparticle slurry is selected, the micro-nanoparticle mass fraction is 10%-20%, the solvent (polyvinyl alcohol solution) is 70%-85%, and a leveling agent (such as polydimethylsiloxane PDMS) can be added at 0.5%-1%; when configuring, mix the micro-nanoparticles with the solvent, high-speed shear disperse for 15 min at 10000-12000 rpm, then add the leveling agent and stir at low speed for 10 min, and use after vacuum degassing.

[0037] If Mxene material conductive slurry is selected, the Mxene sheet mass fraction is 2%-8%, the solvent (deionized water) is 85%-93%, and a high-molecular dispersant (such as polyimide oligomer) can be added at 3%-5%; when configuring, mix the Mxene sheet with the dispersant and solvent, ultrasonically disperse (power 400 W) for 25 min, stir (speed 900 rpm) for 20 min, and form the slurry after vacuum degassing.

[0038] If a high-concentration salt solution is selected, the sodium chloride mass fraction is 20%-30%, and the solvent (deionized water) is 70%-80%; when configuring, dissolve the sodium chloride in deionized water and stir until completely dissolved.

[0039] The manufacturing steps of the soft six-dimensional force sensor using solid flexible conductive media as the three-dimensional topological conductive network are as follows: S1. Three-dimensional modeling of the three-dimensional topological conductive network, and three-dimensional topological conductive network and mold are obtained by 3D printing; the printing material of the three-dimensional topological conductive network is one of conductive silica gel, conductive rubber and conductive hydrogel.

[0040] S2. The three-dimensional topological conductive network is placed in the mold, and then the pouring material is poured into the mold, and the flexible matrix with the three-dimensional topological conductive network is obtained after solidification and demolding; S3. The electrode pin is sealed and installed on the outer surface of the flexible matrix, and the electrode pin is connected with the three-dimensional topological conductive network, so as to obtain the soft six-dimensional force sensor with the three-dimensional topological conductive network.

[0041] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the prior art and defects will be described below with reference to the drawings.

[0042] Please refer to Figure 4 , Figure 4 The technical scheme is a preparation scheme and structure of the sensor array, Figure 4 (g) is the state after the soft pneumatic actuator and the sensor array are bonded. The three-dimensional deformation of the soft pneumatic actuator drives the CNT (carbon nanotube) array to deform synchronously, and the strain gauge placed at different positions can detect the change of the CNT conductive path.

[0043] The defects of the prior art one are: The defects of the prior art one are: Defect 1: The sensing mechanism of this scheme is based on the contact-separation of piezoresistive sensitive yarns, which can only convert the vertical pressure into resistance change, and respond to the compression force perpendicular to the fabric surface and the in-plane local pressure. It has no signal output for non-compression external forces such as tension, and cannot completely cover the stretching, shearing and torsional deformation in x / y / z three-dimensional space.

[0044] Defect 2: The design of piezoresistive sensitive yarns crossing the cross row in this scheme will cause serious signal coupling, and cannot distinguish the specific type and component of deformation / external force, so it cannot accurately realize the complex combination of force and deformation.

[0045] It belongs to a multi-layer sandwich structure, and the two-dimensional planar sensing element is sandwiched between the soft silicone rubber layers. The "differentiated deformation-resistance change" of the sensing element caused by external force in different directions is used to distinguish the three-dimensional force components. The sensing of deformation is realized by converting the strain of the sensing element into resistance change, and the dynamic change of the resistance signal is used to quantify the amplitude and direction of the three-dimensional deformation.

[0046] The defects of the prior art two are: The sensing structure of the scheme is cross-beam distribution + thin film sensing element. Only respond to translation type force (z direction pressure, x / y direction shear force), unable to detect torsional deformation and torque. Four thin film elements can only sense the stretching or compression along the beam direction, and cannot capture the change of conductive path caused by circumferential torsion. Therefore, this scheme cannot sense torsional deformation, and only covers pressure or shear force.

[0047] Please refer to Figure 6 As shown in the prior art three technical scheme is made of optoelectronic sensing foam sensor after deformation under load, the size of the pore in the foam, the relative position of the fiber and the foam will change, these changes will directly affect the diffuse reflection effect of light in the foam. Realize the preliminary conversion of deformation to light signal difference. Then use machine learning to interpret the light signal and accurately match the deformation type and size.

[0048] The shortcomings of the prior art three are: Shortcoming 1: the scheme uses optical fiber as the core material. The flexibility of optical fiber is limited and cannot withstand axial tensile displacement, so the scheme only covers four basic deformations: forward bending, reverse bending, clockwise twisting and counterclockwise twisting. It completely lacks x / y / z direction tensile, compression, shear deformation sensing, and can only decouple the combined deformation of bending and twisting, and cannot handle complex combined deformations such as tensile and shear, compression and torsion.

[0049] Shortcoming 2: the core goal of the scheme is to detect the deformation angle of the sensor itself. There is no mention of any force sensing design or data. The whole scheme takes bending angle and torsion angle as the measurement object and does not involve the detection of tensile force, pressure, shear force and torque. It cannot establish the correlation between deformation and external force.

[0050] The above is only the preferred embodiment of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A soft six-dimensional force sensor with a built-in three-dimensional topological conductive network, characterized in that, It includes a flexible substrate with a polyhedral structure, a three-dimensional topological conductive network built into the flexible substrate, and electrode pins distributed on the outer surface of the flexible substrate. The electrode pins are connected to the three-dimensional topological conductive network, and any two electrode pins are connected to form a resistor through the internal three-dimensional topological conductive network.

2. The soft six-dimensional force sensor with a built-in three-dimensional topological conductive network according to claim 1, characterized in that, The flexible substrate is made of one of the following materials: polydimethylsiloxane, silicone rubber, or hydrogel.

3. The soft six-dimensional force sensor with a built-in three-dimensional topological conductive network according to claim 1, characterized in that, The three-dimensional topological conductive network is a fluid conductive medium or a flexible solid conductive medium.

4. The soft six-dimensional force sensor with a built-in three-dimensional topological conductive network according to claim 1, characterized in that, It also includes a data processing device connected to all the electrode pins, used to detect the resistance value between any two of the electrode pins and compare it with an initial resistance value to obtain a resistance value network change matrix.

5. The soft six-dimensional force sensor with a built-in three-dimensional topological conductive network according to claim 3, characterized in that, The fluid conductive medium is one of the following: multi-walled carbon nanotube conductive paste, carbon black conductive paste, graphene conductive paste, ionic liquid, Mxene material conductive paste, conductive ink, and gold, silver, or copper micro / nano particle paste.

6. The soft six-dimensional force sensor with a built-in three-dimensional topological conductive network according to claim 3, characterized in that, The flexible solid conductive medium is one of conductive silicone, conductive rubber, and conductive hydrogel.

7. A method for fabricating a soft six-dimensional force sensor with an embedded three-dimensional topological conductive network, used to form the soft six-dimensional force sensor with an embedded three-dimensional topological conductive network as described in any one of claims 1-6, characterized in that, Includes the following steps: The fabrication steps of a soft six-dimensional force sensor using a fluid conductive medium as a three-dimensional topological conductive network are as follows: S1. A three-dimensional topological conductive network model and mold are obtained through 3D printing technology. The three-dimensional topological conductive network model is placed in the mold, and casting material is poured into the mold. After curing and demolding, a flexible substrate with an embedded three-dimensional topological conductive network model is obtained. S2. Heat the flexible substrate with the built-in three-dimensional topological conductive network model to melt the three-dimensional topological conductive network model, and obtain a flexible substrate with built-in mesh channels. The mesh channels penetrate the surface of the flexible substrate to form multiple mounting holes. S3. Attach the electrode pins to the mounting holes of the flexible substrate with flexible adhesive, and retain part of the mounting holes on the same side as injection holes for the three-dimensional topological conductive network. S4. Inject the fluid conductive medium into the mesh channel and place it in a vacuum environment to degas. Install the electrode pins into the remaining mounting holes to obtain a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network. The fabrication steps of a soft six-dimensional force sensor using a solid flexible conductive medium as a three-dimensional topological conductive network are as follows: S1. Perform 3D modeling of the 3D topological conductive network, and obtain the 3D topological conductive network and mold through 3D printing; S2. Place the three-dimensional topological conductive network in the mold, pour the casting material into the mold, and after curing and demolding, obtain a flexible matrix with an embedded three-dimensional topological conductive network. S3. The electrode pins are sealed and mounted on the outer surface of the flexible substrate, and the electrode pins are connected to the three-dimensional topological conductive network to obtain a soft six-dimensional force sensor with a built-in three-dimensional topological conductive network.

8. The soft six-dimensional force sensor with built-in three-dimensional topological conductive network and its fabrication method according to claim 5, characterized in that, The debubbling time for the three-dimensional topological conductive network is 5-10 minutes.

9. The soft six-dimensional force sensor with built-in three-dimensional topological conductive network and its fabrication method according to claim 5, characterized in that, The melting point of the material in the three-dimensional topological conductive network model is 45-180℃.

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