Uniform air filtering device and semiconductor gluing and developing equipment

Abstract

The invention provides an air uniformizing and filtering device and semiconductor gluing and developing equipment, and relates to the technical field of semiconductor manufacturing. Comprising an air box, one side face of the air box is provided with an air inlet, the bottom face of the air box is an air outlet panel, and the air outlet panel is provided with a plurality of air outlet holes; the supporting frame comprises a connecting part, a supporting part and an air blocking part, the supporting part is connected to the inner side wall of the air box in an attached mode through the connecting part, the supporting part horizontally extends into the air box from the inner side wall of the air box and is used for bearing other components, and the air blocking part is located at the end, facing the air inlet, of the supporting part and extends to the air outlet panel towards the bottom face of the air box; and the particle filtering piece comprises a frame and a filtering net connected into the frame, and the frame is connected to the face, facing the air outlet panel, of the supporting part through sealant. Leakage between the edge of the particle filtering piece and the side wall of the air box can be prevented, and the yield of products is further improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a uniform air filtering device and a semiconductor coating and developing equipment. BACKGROUND

[0002] In the field of semiconductor manufacturing, the process stability of the coating and developing unit highly depends on the consistency of the environmental airflow. A wind box and a filter screen are usually arranged at the top of the coating and developing unit to continuously provide downward laminar air flow, so as to quickly take away solvent volatiles, maintain the positive pressure of the cavity, and ensure the uniformity of the photoresist film thickness.

[0003] The existing coating and developing equipment generally adopts a wind box and a filter screen in a split assembly structure, which are installed by a pressing plate that presses a sealing strip to realize four-side fixation and end-face sealing. Since the contact surface of the filter screen and the wind box has a sealing strip, a large pressing force is required for the sealing strip to ensure the compression amount and the sealing. However, in actual situations, the wind box often leaks due to insufficient compression amount of the sealing strip, which further reduces the yield of the product. SUMMARY

[0004] The technical problem to be solved by the present application is to provide a uniform air filtering device and a semiconductor coating and developing equipment that can avoid wind box leakage caused by insufficient compression amount of the sealing strip.

[0005] The technical solution adopted by the present application to solve the above technical problem is as follows: The present application provides a uniform air filtering device for installation on a coating and developing unit, comprising: a wind box having an air inlet on one side face, a bottom face of the wind box being an air outlet panel, a plurality of air outlet holes being formed on the air outlet panel; a support frame comprising a connecting portion, a support portion and a wind blocking portion, the support portion being connected to the inner side wall of the wind box by the connecting portion, the support portion extending horizontally from the inner side wall of the wind box to the wind box for carrying other components, the wind blocking portion being located at one end of the support portion facing the air inlet and extending towards the bottom face of the wind box to the air outlet panel; and a particle filter element comprising a frame and a filter screen connected in the frame, the frame being connected to one face of the support portion facing the air outlet panel by sealing glue.

[0006] Optionally, an end of the support portion away from the inner side wall of the wind box is provided with a baffle, and the baffle is protruded towards the air outlet panel.

[0007] Optionally, the uniform air filtering device further comprises an air inlet guide located at the air inlet and connected with the wind blocking portion and the side wall of the wind box, an air inlet opening is formed on the air inlet guide, an air guide plate is arranged at one end of the air inlet opening close to the air outlet panel, and the air guide plate is inclinedly extended towards one end of the wind blocking portion away from the air outlet panel.

[0008] Optionally, a circumferential edge of the air guide opening is provided with a receiving groove recessed into the air box, and the receiving groove is used to connect external devices by pouring sealant.

[0009] Optionally, the air uniformizing filter device further comprises an air uniformizing plate, which is obliquely installed in the air box, one end of the air uniformizing plate is connected to one end of the support part close to the air inlet, and the other end of the air uniformizing plate is connected to the inner side wall of the top of the air box, and a plurality of air uniformizing through holes are formed in the air uniformizing plate.

[0010] Optionally, an oblique angle of 3°-15° is formed between the air uniformizing plate and the inner side wall of the top of the air box.

[0011] Optionally, a distance between adjacent air uniformizing through holes is greater than 2mm, and the distribution density of the air uniformizing through holes increases from one end close to the air inlet to the other end away from the air inlet.

[0012] Optionally, a diameter of the air uniformizing through hole is 1mm-5mm.

[0013] Optionally, the air uniformizing filter device further comprises an air uniformizing part, which is located between the support part and the particle filter part, and the air uniformizing part covers the frame and the filter screen.

[0014] The application also provides a semiconductor coating and developing device comprising at least one air uniformizing filter device as described above.

[0015] The application provides an air uniformizing filter device and a semiconductor coating and developing device, which sets a support part on the inner side wall of the air box, and connects the particle filter part to the support part by sealant to seal the edge of the particle filter part and the side wall of the air box, thereby preventing leakage between the edge of the particle filter part and the side wall of the air box, and further improving the yield of products. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the application, the following will briefly introduce the drawings needed in the embodiments. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0017] Figure 1 Fig. 1 is a structural schematic diagram of the air uniformizing filter device of the application; Figure 2 Fig. 2 is an exploded view of the air uniformizing filter device of the application; Figure 3 Fig. 3 is a schematic diagram of the cooperation between the air box and the support frame of the application; Figure 4 Fig. 4 is a structural schematic diagram of the support frame of the application. Figure 5 Structure diagram of the particle filter of the present application; Figure 6 Structure diagram of the air inlet guide of the present application.

[0018] Icon: 100-air uniform filter device; 10-air box; 11-air inlet; 12-air outlet panel; 13-air outlet hole; 14-air uniform plate; 15-air uniform through hole; 20-support frame; 21-connection part; 22-support part; 23-wind blocking part; 30-particle filter; 31-frame; 32-filter screen; 33-air uniform part; 40-air inlet guide; 41-air guide inlet; 42-air guide plate; 43-receiving groove.

[0019] The implementation, functional features and advantages of the present application will be further described with reference to the accompanying drawings in conjunction with the embodiments. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications will also change accordingly.

[0022] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixation" and the like should be understood broadly, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be direct connection, or indirect connection through intermediate medium; can be internal connection of two elements or interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0023] In addition, if the description of "first", "second" and the like is involved in the embodiments of the present application, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. For example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art. When the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the present application.

[0024] The existing glue coating and developing equipment generally adopts the structure that the air box and the filter screen are assembled separately and are installed by pressing plate. The pressing plate presses the sealing strip to realize the four-side fixation and end face sealing. Because the contact surface of the filter screen and the air box has a sealing strip, a large pressing force is required for the sealing strip to ensure the compression amount and ensure the sealing. However, in the actual situation, the air box often leaks because the compression amount of the sealing strip is insufficient, which further reduces the yield of the product. In view of the above problems, the embodiments of the present application refer to Figures 1 to 6 , provide the following technical solutions to overcome the above problems.

[0025] Please refer to Figures 1 to 6 , the embodiments of the present application provide a uniform air filtering device 100 for installing on a glue coating and developing unit, comprising: an air box 10, one side of which is provided with an air inlet 11, the bottom surface of the air box 10 is an air outlet panel 12, and a plurality of air outlet holes 13 are formed on the air outlet panel 12; a support frame 20, comprising a connecting part 21, a supporting part 22 and a wind blocking part 23, the supporting part 22 is connected to the inner side wall of the air box 10 through the connecting part 21, the supporting part 22 extends horizontally from the inner side wall of the air box 10 into the air box 10, for carrying other components, the wind blocking part 23 is located at one end of the supporting part 22 towards the air inlet 11, and extends towards the bottom surface of the air box 10 to the air outlet panel 12; a particle filter 30, the particle filter 30 comprises a frame 31 and a filter screen 32 connected in the frame 31, and the frame 31 is connected to one side of the supporting part 22 towards the air outlet panel 12 by sealing glue.

[0026] Specifically, the uniform air filtering device 100 is installed on the top of the gluing and developing unit. The air box 10 has an air inlet 11 on one side and a bottom plate as an air outlet panel 12 with air outlet holes 13. The support frame 20 is tightly attached to the inner side wall of the air box 10 through the connecting part 21, and the horizontally inwardly extending support part 22 becomes a bearing platform. The air baffle 23 is folded downward from the front end of the support part 22 to the air outlet panel 12, blocking the lower part of the air inlet 11 and preventing the air flow from directly impacting the frame 31 of the particle filter 30. The frame 31 of the particle filter 30 is adhered to the lower part of the support part 22 with sealant, and the filter screen 32 is opposite to the air outlet hole 13. The sealant simultaneously completes the fixing, sealing and damping, cancels the traditional pressing plate and sealing strip, and completely eliminates the leakage channel caused by insufficient pressing force.

[0027] As can be understood, after the air flow enters from the air inlet 11, part of it is intercepted by the air baffle 23 to diffuse to the top of the air box 10, first pass through the particle filter 30 fixed by the sealant to complete the cleaning filtration, and finally vertically downward from the air outlet hole 13 to form a uniform laminar flow.

[0028] It should be noted that the air baffle 23 prevents air leakage from the side of the particle filter 30, and the soft layer of sealant forms a continuous elastic sealing surface between the frame 31 and the support frame 20, which can absorb the micro-displacement caused by thermal expansion and contraction and equipment vibration, and maintain zero leakage. The filter screen 32 is located above the air outlet panel 12, forming two levels of uniform flow of surface resistance and hole resistance, so that the outlet side obtains spatial consistency laminar flow. At the same time, the adhesive joint avoids the local stress concentration caused by rigid pressing and the uneven compression problem of the sealing strip. In addition, the support part 22 and the frame 31 occupy a small air outlet area, further increasing the air outlet area.

[0029] In this embodiment, the air box 10 is preferably made of aluminum plate by bending and welding, the single side wall is provided with the air inlet 11, and the bottom plate is the air outlet panel 12. The air outlet panel 12 is distributed with a plurality of air outlet holes 13. The support frame 20 is preferably made of aluminum plate by cutting and bending, including the connecting part 21, the support part 22 and the air baffle 23. The connecting part 21 is attached to the inner side wall of the air box 10, the support part 22 extends horizontally inwardly, and the air baffle 23 is folded downward from the front end of the support part 22 to the air outlet panel 12. The filter screen 32 is preferably a U17 grade PTFE membrane (polytetrafluoroethylene membrane), and the frame 31 can be made of aluminum profile or sheet metal. In this embodiment, the frame 31 is preferably made of aluminum sheet metal to reduce the width of the frame 31 and reduce the area of the frame 31 occupying the air outlet. The frame 31 is adhered to the lower part of the support part 22 by sealant. The air flow enters from the air inlet 11, passes through the U17 grade filter screen 32 to remove particulate pollutants, and then the clean air flows out downward through the bottom plate air outlet hole 13 to form a clean laminar flow.

[0030] The application provides a uniform air filtering device 100, which prevents leakage between the edge of a particle filter 30 and the side wall of an air box 10 by arranging a support on the inner side wall of the air box 10 and connecting the particle filter 30 to the support by means of sealing glue, so as to seal the edge of the particle filter 30 from the side wall of the air box 10, and further improves the yield of the product.

[0031] In one embodiment, the support part 22 is provided with a baffle (not shown in the figure) at the end away from the inner side wall of the air box 10, and the baffle is convex towards the air outlet panel 12.

[0032] Specifically, the support part 22 extends horizontally and inwardly, and the end of the support part 22 is bent to form a baffle convex towards the air outlet panel 12, and the baffle is at a right angle with the support part 22; the frame 31 of the particle filter 30 is located below the support part 22, the surface of the frame 31 is attached to the baffle, the top surface of the frame 31 is coated with sealing glue from the lower surface of the support part 22, and a groove is formed between the frame 31, the baffle and the support part 22, and the sealing glue is contained in the groove and adheres the frame 31 to the support part 22.

[0033] It can be understood that when the glue is applied, the sealing glue is continuously coated on the top surface of the frame 31 or the lower surface of the support part 22, the frame 31 is pushed towards the support part 22, the glue is filled in the groove after being squeezed, and a full-circle seal is formed after solidification.

[0034] It should be noted that the groove provides a glue storage space, so that the sealing glue is uniformly spread after being squeezed, and glue shortage is avoided; the inner side wall of the baffle laterally restricts the glue, and the glue layer is adhered to the baffle, the support part 22 and the frame 31 after solidification, so as to improve the adhesion reliability and prolong the sealing life.

[0035] In one embodiment, please refer to Figure 1 , Figure 2 and Figure 6 , the uniform air filtering device 100 further comprises an air inlet guide 40 located at the air inlet 11 and connected with the air baffle part 23 and the side wall of the air box 10, the air inlet guide 40 is provided with an air guide hole 41, the end of the air guide hole 41 close to the air outlet panel 12 is provided with an air guide plate 42, and the air guide plate 42 extends obliquely away from the end of the air baffle part 23 away from the air outlet panel 12.

[0036] Specifically, the air inlet guide 40 is installed at the single-sided air inlet 11 of the air box 10, the edge thereof is connected with the air baffle 23 and the side wall of the air box 10, and an air inlet sealing ring is formed. A guide air inlet 41 is arranged in the center of the guide, the inner profile of the guide air inlet 41 is a smooth expansion channel, which can convert the air flow from a section with a low length-width ratio to a section with a high length-width ratio, and the lower edge of the guide air inlet 41 extends to the side of the air outlet panel 12 and extends outwards to form a guide plate 42, which is inclined upwards towards the upper end of the air baffle 23, so as to guide the incoming air flow to the top of the air box 10 and prevent the air flow from directly impacting the air baffle 23.

[0037] It can be understood that the air flow first passes through the smooth expansion section in the guide to complete the conversion of the section shape, and then diffuses along the guide plate 42 and descends along the top wall; the inner wall of the whole process is not suddenly contracted or expanded, the air flow will not directly impact the air baffle 23, and only the top space is used to complete the speed reduction and pressure equalization.

[0038] It should be noted that the expansion channel of the guide air inlet 41 gradually transitions the inlet section to an elongated slit section, and the gradual expansion of the area reduces the dynamic pressure and increases the static pressure; the air box 10 maintains the stability of the boundary layer, avoids separation vortex, realizes the conversion from external low length-width ratio air inlet to internal high length-width ratio air outlet of the air box 10, and does not have additional wind resistance conversion, and then the air flow freely diffuses at the top and uniformly descends through the particle filter 30, thereby ensuring the laminar flow quality.

[0039] In one embodiment, a containing groove 43 recessed into the air box 10 is arranged at the periphery of the guide air inlet 41, and the containing groove 43 is used to fill the sealing glue connected with the external equipment.

[0040] Specifically, the outer periphery of the guide air inlet 41 is recessed inward to form a containing groove 43 with an open mouth, the groove body is located on the inner side of the air box 10, and the open mouth is outwardly coaxial with the air inlet 11. The recessed containing groove 43 is used to fill the semi-solid sealing glue, and after the interface end surface of the external equipment is inserted, a sealing interface is formed together with the wall of the containing groove 43 and the glue, without the need for additional pressing plates or threaded locking.

[0041] Before assembly, the semiconductor-grade semi-solid sealing glue is filled into the groove, the glue is in a jelly-like state, and the glue can stably stay without flowing due to its own viscosity and shape retention; then the end surface of the external air pipe or transition flange or the connection end of the glue coating and developing unit is pushed axially along the guide air inlet 41, the end surface extrudes the glue and makes it uniformly climb, and the micro gaps between the end surface and the groove wall are filled; after the glue solidifies, an elastic bonding is formed with the metal surface, and the vacuum-level sealing is completed.

[0042] It should be noted that the containing groove 43 acts as a glue amount limiter to prevent the glue from overflowing and contaminating the inner wall of the air box 10; the recessed containing groove 43 makes the glue layer bear shear and compression at the same time, can absorb the vibration and thermal expansion and contraction displacement during equipment operation, long-term maintains zero leakage, and allows multiple repeated plugging and unplugging, thereby meeting the high-frequency maintenance requirements of the production line.

[0043] In one embodiment, the uniform air filtering device 100 further comprises a uniform air plate 14, which is obliquely installed in the air box 10, one end of the uniform air plate 14 is connected with the support part 22 near one end of the air inlet 11, the other end of the uniform air plate 14 is connected with the inner side wall of the top of the air box 10, and a plurality of uniform air through holes 15 are arranged on the uniform air plate 14.

[0044] Specifically, the uniform air plate 14 is obliquely arranged in the inner cavity of the air box 10, the front end overlaps the support part 22 adjacent to the edge of the air inlet 11, and the rear end is obliquely connected with the inner side of the top wall, the uniform air plate 14 is covered with the uniform air through holes 15, so that the airflow must pass through the uniform air plate 14 before passing through the filter element, and the airflow is uniformly distributed and rectified.

[0045] After the airflow enters from the air inlet 11, it is guided to the top space by the air guide plate 42, and then is folded back downward along the top wall and is opposite to the oblique uniform air plate 14. The high-speed airflow is blocked in front of the plate and is forced to pass through the through hole, and the local dynamic pressure is converted into static pressure; the low-speed airflow is sucked by the hole area, and the momentum exchange is completed in the hole with the high-speed airflow. The array of through holes breaks the concentrated large vortex into uniform small vortexes, and forms laminar flow with uniform speed on the outlet side, thereby reducing the local impact on the particle filter element 30.

[0046] The oblique uniform air plate 14 prolongs the airflow path and increases the mixing time; the resistance of the hole area is adjustable, and different air volumes can be adapted by changing the hole diameter and density without additional components. After rectification, the airflow uniformly sinks, the filter element uniformly loads on the full surface, the pressure drop is uniformly distributed, the filter screen life is prolonged, the uniformity of the air speed of the air outlet surface is ensured, and the strict requirements of the gluing and developing process on clean laminar flow are met.

[0047] In one embodiment, an inclination angle of 3°-15° is formed between the uniform air plate 14 and the inner side wall of the top of the air box 10.

[0048] Specifically, one end of the uniform air plate 14 is fixed on the front edge of the support part 22, and the other end is obliquely overlapped on the top wall of the air box 10, and the included angle between the uniform air plate 14 and the inner side of the top wall can be fixed and installed between three degrees and fifteen degrees according to actual needs.

[0049] It can be understood that the uniform air plate 14 is inclinedly arranged in the air box, which increases the resistance at the air inlet 11 of the air box 10, avoids the air directly passing through the front half of the air box 10 due to the small resistance at the air inlet 11, and avoids the air being accumulated at the end of the air box 11, which causes the pressure at the end of the air box 11 to be too large and the air speed of the air outlet surface to be too large. While increasing the resistance, the uniform air plate 14 also has a flow regulating effect, which makes the originally disordered or uneven air flow stable and uniform. The uniform air holes 15 distributed on the uniform air plate 14 will divide the concentrated large air flow into countless small air flow beams. Each uniform air hole 15 corresponds to an independent air flow, so as to avoid local air flow being too strong or too weak. The angle of the uniform air plate 14 also has the effect of forcibly turning the air flow in the air box 10 perpendicular to the direction of the air inlet 11. The air flow direction from the air inlet 11 is changed so that the air flow passes through the lower filter screen 32 below the uniform air hole plate 14, increases the air speed of the air outlet surface of the air box 10 close to the air inlet 11, improves the uniformity, and at the same time consumes part of the kinetic energy and weakens the impact force of the high-speed air flow, thereby reducing the flow rate difference between different regions.

[0050] It should be noted that the angle of the uniform air plate 14 is usually 3°-15°, and the angle is related to the length of the air box 10 parallel to the air flow direction and the uniformity of the air outlet speed of the air outlet panel 12. When the length of the air box 10 is longer, the pressure difference between the front end and the end inside the air box 10 is required to be higher, and the internal pressure needs to be more uniform and stable to maintain balance. Therefore, the angle of the uniform air plate 14 needs to be smaller to ensure that the uniform air hole plate can cover a longer air outlet surface and improve the uniformity of the air outlet surface.

[0051] In one embodiment, the distance between adjacent uniform air holes 15 is greater than 2 mm, and the distribution density of the uniform air holes 15 increases from one end close to the air inlet 11 to one end away from the air inlet 11.

[0052] Specifically, the uniform air holes 15 on the uniform air plate 14 are arranged in a variable density manner: the distance between adjacent uniform air holes 15 is greater than 2 mm, and the number of holes and the density gradually decrease from the end close to the air inlet 11 to the end away from the air inlet 11, forming a gradient array of sparse in front and dense in back. The purpose is to obtain uniform outflow in the full length of the plate surface.

[0053] After the air flow enters from the air inlet 11, the air flow first encounters the sparse hole area at the front end, the number of holes per unit area is small, the flow area is small, the local resistance is large, and the flow is suppressed. Continue to flow to the far end, the hole distance is reduced and the density is increased, the total flow area is increased, the resistance is reduced, and the air flow preferentially passes through the dense area. The front end limits the flow, and the rear end releases the flow, so as to realize the flow redistribution of the whole plate surface, make the wind speed received by the downstream filter consistent, and finally form a spatially uniform laminar flow, which meets the strict requirements of the air speed consistency of the glue coating and developing.

[0054] It should be noted that in the embodiments of the present application, the uniform air holes 15 on the uniform air plate 14 can also be uniformly distributed on the uniform air plate 14, and the distribution density of the uniform air holes 15 is not specifically limited herein, as long as the uniform air effect is met.

[0055] In one embodiment, the diameter of the uniform air hole 15 is 1mm-5mm.

[0056] Specifically, the diameter of the uniform air hole 15 on the uniform air plate 14 can be selected between 1mm and 5mm.

[0057] It can be understood that the uniform air plate 14 needs to adjust the air speed of the air outlet surface of the filter screen 32 below the uniform air plate 14 through the uniform air holes 15 distributed thereon while increasing the resistance at the air inlet 11 end and changing the air flow direction. The hole diameter of the uniform air hole 15 on the uniform air plate 14 and the opening rate of the uniform air plate 14 will affect the air speed of the air outlet surface of the filter screen below the uniform air plate 14. When a small hole diameter is matched with a high opening rate, a high-speed jet flow is formed after the air flow passes through the uniform air hole 15. When a low opening rate is matched with a large hole diameter uniform air hole 15, the air speed is relatively low after the air flow passes through the uniform air hole 15. When it is necessary to increase the air speed below the uniform air plate 14, a small hole diameter is matched with a high opening rate, and vice versa.

[0058] In one embodiment, the uniform air filtering device 100 further comprises a uniform air piece 33, the uniform air piece 33 is located between the support part 22 and the particle filtering piece 30, and the uniform air piece 33 covers the frame 31 and the filter screen 32.

[0059] Specifically, in the present embodiment, the uniform air piece 33 is preferably a non-woven fabric, the uniform air piece 33 is clamped between the support part 22 and the particle filtering piece 30, and fully covers the frame 31 and the filter screen 32 inside the frame 31, forming a continuous and breathable buffer layer, and the air flow is uniformly adjusted again by means of the loose microporous structure.

[0060] After the air flow passes through the uniform air plate 14, it first falls on the upper surface of the uniform air piece 33, is cut, dispersed and recombined by the countless micropores, and the speed peak is weakened; then it uniformly passes through the non-woven fabric into the filter screen, avoiding the direct impact of the local high-speed jet flow on the filtering fibers, and realizing the staged processing of uniform speed first and then cleaning. It can be understood that the high porosity of the non-woven fabric provides a low-resistance channel, and at the same time, the three-dimensional fiber network of the non-woven fabric randomly refracts the air flow, which macroscopically flattens the velocity gradient and microscopically suppresses the turbulent vortex, so that the air flow velocity distribution reaching the filter screen surface tends to be uniform, prolonging the service life of the filter screen and maintaining the laminar flow quality.

[0061] The embodiments of the present application also provide a semiconductor gluing and developing device, which comprises at least one uniform air filtering device 100 as described above.

[0062] Specifically, the semiconductor glue coating and developing equipment is provided with at least one set of the aforementioned air uniformization filter device 100 on the top of the equipment or above the process cavity, the air inlet 11 of the air box 10 is connected with a new air pipeline of a factory, the air outlet panel 12 is opposite to a wafer carrier, and a vertical laminar flow field is formed from top to bottom; the original transmission, spin coating and developing modules are reserved in the equipment, and only the air supply unit is replaced by the integrated structure of the present application, without changing the size of the cavity.

[0063] The new air of the factory is sent into the air box 10 after primary efficiency filtration, is first expanded in cross section and is uniformly speeded under the action of the air guide plate 42 and the air uniformization plate 14, then passes through the optional non-woven fabric and the U17 grade filter screen 32, and finally vertically downward enters the cavity at a uniform speed; the laminar flow rapidly carries away solvent volatiles and keeps a slight positive pressure, prevents external particles from backflowing, the wafer surface wind speed distribution is uniform, and the glue film thickness uniformity is improved.

[0064] The above is only a specific implementation manner of the present application, but the protection scope of the present application is not limited to this, any change or replacement within the technical scope disclosed by the present application should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An air uniformizing filter device for installation on a gumming and developing unit, characterized in that, The air box has an air inlet on one side, and the bottom of the air box is an air outlet panel with a plurality of air outlet holes. The support frame includes a connecting portion, a support portion, and a wind blocking portion. The support portion is connected to the inner side wall of the air box through the connecting portion. The support portion extends horizontally from the inner side wall of the air box towards the air box, and is used to carry other components. The wind blocking portion is located at one end of the support portion facing the air inlet and extends towards the bottom of the air box to the air outlet panel. The particle filter includes a frame and a filter screen connected in the frame. The frame is connected to one side of the support portion facing the air outlet panel through sealant. The end of the support portion away from the inner side wall of the air box is provided with a baffle, which protrudes towards the air outlet panel.

2. The uniforming and filtering device according to claim 1, wherein, The air inlet guide is located at the air inlet and is connected with the wind blocking portion and the side wall of the air box. The air inlet guide has an air guide opening. The end of the air guide opening close to the air outlet panel is provided with an air guide plate, which extends obliquely away from the end of the wind blocking portion away from the air outlet panel.

3. The uniforming and filtering device according to claim 2, wherein, The periphery of the air guide opening is provided with a recessed accommodating groove in the air box. The accommodating groove is used to fill sealant to connect external devices.

4. The uniforming and filtering device according to claim 3, wherein, The air uniformization plate is obliquely installed in the air box. One end of the air uniformization plate is connected to the end of the support portion close to the air inlet, and the other end of the air uniformization plate is connected to the inner side wall of the top of the air box. The air uniformization plate has a plurality of air uniformization through holes.

5. The uniforming filter device according to claim 1, wherein, The air uniformization plate and the inner side wall of the top of the air box form an inclination angle of 3°-15°.

6. The uniforming and filtering device according to claim 5, wherein, The distance between adjacent air uniformization through holes is more than 2mm. The distribution density of the air uniformization through holes increases from the end close to the air inlet to the end away from the air inlet.

7. The uniforming and filtering device according to claim 6, wherein, The diameter of the air uniformization through holes is 1mm-5mm.

8. The uniforming and filtering device according to claim 1, wherein, The air uniformization member is located between the support portion and the particle filter. The air uniformization member covers the frame and the filter screen.

9. The uniforming and filtering device according to claim 1, wherein, The air uniformization filter device includes at least one air uniformization filter device as claimed in any one of claims 1-9.

10. A semiconductor coating and developing apparatus, characterized by comprising: ​

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