An intelligent production line and method for the production of vapor-deposited carbon products

Abstract

This invention discloses an intelligent production line and process for preparing carbon products by chemical vapor deposition (CVD), relating to the field of advanced materials manufacturing technology. It includes a ground-rail robot, an AGV transport vehicle, a central control system, and a preparation system. A warehouse system is installed at one end of the ground-rail robot. The AGV transport vehicle is used to transfer materials from the raw material warehouse to the corresponding preparation system, and the ground-rail robot is used for transferring finished products between preparation systems. The central control system is used to control the operation of a single preparation system or the coordinated operation between at least two preparation systems. The finished product warehouse is used to receive the finished products output by the ground-rail robot. A first preparation system is installed on one side of the ground-rail robot, and a second and third preparation systems are sequentially installed on the other side. The first preparation system is used for substrate preparation, the second preparation system is used for coating preparation, and the third preparation system is used for single crystal preparation. This invention integrates CVD coating and carbon product preparation, as well as SiC single crystal preparation, achieving efficient and flexible continuous production from raw materials to finished products.

Description

Technical Field

[0001] This invention relates to the field of advanced materials manufacturing technology, and in particular to an intelligent production line and method for preparing carbon products by vapor deposition. Background Technology

[0002] High-purity graphite, carbon-ceramic composites, tantalum / tantalum carbide coatings, and SiC single crystals are indispensable key materials in semiconductors, aerospace, and nuclear industries. The performance of these materials is highly dependent on their purity, density, microstructure, and interfacial properties, thus placing high demands on the precise control and stability of their preparation processes. With the continuous advancement of industrial automation technology, the high-end materials manufacturing field is gradually transitioning to automated and integrated production lines. Currently, the commonly used model is automated units combined with manual intervention or single-function production lines. While this has improved production efficiency to some extent, several problems remain:

[0003] Existing production lines are mostly rigidly laid out with fixed paths, and suffer from insufficient real-time quality control. For example, existing technology discloses a SiC crystal growth apparatus, including an external coating structure, multiple heating devices, a growth crucible, a temperature acquisition device, and a driving device. It uses independently controlled axial and radial heating devices to control the SiC crystal growth process. Its production path is relatively simple and cannot flexibly switch to produce different products such as carbon matrix, TaC coating, or SiC single crystal according to order requirements. Existing technology also discloses a chemical vapor deposition device, which precisely controls the heat obtained by each area of ​​the heated object through power adjustment. It can accurately control the temperature inside the chamber, but product quality judgment still requires offline sampling inspection after the workpiece cools down, resulting in poor real-time performance and making it difficult to guarantee the consistency of mass production. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide an intelligent production line and method for the preparation of carbon products by vapor deposition, which integrates CVD coating and carbon product preparation, as well as SiC single crystal preparation, to achieve efficient and flexible continuous production from raw materials to finished products.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solution:

[0006] In a first aspect, embodiments of the present invention provide an intelligent production line for the preparation of vapor-deposited carbon products, including a ground-rail robot, an AGV transport vehicle, a central control system, and a preparation system;

[0007] The ground-rail robot is equipped with a warehouse system at one end, which includes a raw material warehouse and a finished product warehouse; the AGV transport vehicle is used to transfer materials from the raw material warehouse to the corresponding preparation system, and the ground-rail robot is used to transfer finished products between preparation systems; the central control system is used to control the operation of a single preparation system or the coordinated operation between at least two preparation systems, and the finished product warehouse is used to receive the finished products output by the ground-rail robot;

[0008] The ground-rail robot is equipped with a first preparation system on one side and a second and a third preparation system on the other side. The first preparation system is used for substrate preparation, the second preparation system is used for coating preparation, and the third preparation system is used for single crystal preparation.

[0009] As a further implementation, the ground-rail robot includes a track and a ground-rail robot body that cooperates with the track;

[0010] The ground-rail robot is equipped with an insulated box platform for transporting high-temperature workpieces.

[0011] As a further implementation, the insulated box platform includes an insulated box body, and a loading platform is connected to the insulated box body through a lifting mechanism.

[0012] As a further implementation, the ground-rail robot body is equipped with a gripper, which is connected to the main propulsion component;

[0013] The main drive assembly has a locking mechanism.

[0014] As a further implementation, the main push assembly includes a main cylinder, which is connected to the gripper via a main push rod;

[0015] The locking mechanism includes a rack, a pawl, and a pawl cylinder. One end of the rack is fixed to the cylinder body of the main cylinder, and the pawl cylinder is vertically installed inside the main push rod. One end of the pawl is hinged to the main push rod, and the other end is used to engage with the rack. The pawl cylinder and the pawl are in sliding engagement.

[0016] As a further implementation, the raw material warehouse includes multiple raw material shelves and a first loading and unloading robot installed on one side of the raw material shelves;

[0017] The finished product warehouse includes a roller conveyor line, with multiple finished product shelves installed at the output end of the roller conveyor line, and finished product loading and unloading robots installed between the finished product shelves and the roller conveyor line.

[0018] As a further implementation, the first preparation system includes a laser marking platform, a fiber weaving machine, a machining platform, a pretreatment platform, and a matrix carbonization reaction chamber for sequentially processing the composite material; a second loading and unloading robot is provided on one side of the laser marking platform.

[0019] It also includes a graphite powder purification reaction chamber, which is used for matrix purification during the coating preparation process.

[0020] As a further implementation, the second preparation system includes a first pretreatment platform, a gas preparation platform, and a coating reaction chamber arranged sequentially. The first pretreatment platform is used to perform ultrasonic cleaning and plasma treatment on the substrate, the gas preparation platform is used for TaCl5 preparation and gas mixing, and the coating reaction chamber is used to generate high-purity TaCl5 vapor.

[0021] As a further implementation, the third preparation system includes a second pretreatment platform, a high-purity SiC powder preparation platform, and a single-crystal SiC manufacturing reaction chamber arranged sequentially, wherein the high-purity SiC powder preparation platform includes a silicon carbide high-temperature reaction chamber and a SiC purification reaction chamber.

[0022] As a further implementation method, RFID scanning modules are also installed at each workstation to collect workpiece raw material information, process parameters, and quality inspection data.

[0023] Secondly, embodiments of the present invention also provide a process for preparing carbon products by vapor deposition, using the aforementioned production line, comprising:

[0024] According to the production order requirements, the production path is dynamically planned; the production path includes starting only the first preparation system, the first preparation system and the second preparation system working together, or the first preparation system, the second preparation system and the third preparation system working together; according to the production path, AGV transport vehicles and ground rail robots are dispatched to perform transportation and loading / unloading tasks.

[0025] As a further implementation, the preparation process of only the first preparation system is initiated as follows:

[0026] The first loading and unloading robot picks up carbon-carbon composite material and carrier plate from the raw material shelf, and the AGV transport vehicle transfers them to the starting station of the first preparation system.

[0027] The ground-rail robot transfers the carrier plate to the laser marking platform for laser marking; then the carbon-carbon composite material is formed into a fiber preform by a fiber weaving machine, and the fiber preform is transferred to the machining platform by the ground-rail robot;

[0028] After machining, the workpieces undergo pretreatment, plasma cleaning, and CVD densification in sequence; qualified workpieces after densification are transferred to the finished product shelf or used as the substrate for the second preparation system.

[0029] As a further implementation, the preparation process involving the linkage of the first and second preparation systems is as follows:

[0030] The substrate formed by the first preparation system is placed in the substrate carbonization reaction chamber, and after carbonization, it is sent to the graphite powder purification reaction chamber for purification treatment to obtain porous carbon or high-purity graphite, and then surface treatment is performed.

[0031] The surface-treated substrate is fed into the gas preparation platform of the second preparation system, and after generating high-purity TaCl5 gas, it is sent into the coating reaction chamber.

[0032] After deposition, the workpiece is transferred to the finished product warehouse by a ground-rail robot, or used as a mold in the third manufacturing system.

[0033] As a further implementation, the preparation process involving the coordinated operation of the first preparation system, the second preparation system, and the third preparation system is as follows:

[0034] The mold produced by the second preparation system is sent into the second pretreatment platform by a ground-rail robot, and after cleaning, it is sent into the PVD reaction chamber.

[0035] Silicon and carbon source materials are fed into the SiC powder preparation platform, and high-purity SiC powder is obtained after high-temperature reaction and purification.

[0036] The ground-rail robot transfers the mold to the single-crystal SiC manufacturing reaction chamber to generate SiC single crystals.

[0037] As a further implementation, the composite gripper of the ground-rail robot adaptively adjusts the clamping force based on the workpiece information identified by the vision assistance module.

[0038] The beneficial effects of this invention are as follows:

[0039] (1) The preparation production line of the present invention includes a ground rail robot, an AGV transport vehicle, a central control system, a first preparation system, a second preparation system and a third preparation system. The AGV transport vehicle is used to transfer materials from the raw material warehouse to the corresponding preparation system. The ground rail robot is used to transfer finished products between preparation systems. The central control system is used to control the operation of a single preparation system or the linkage operation between at least two preparation systems. The above systems are combined to form a flexible layout, which improves the utilization rate of the production line and the adaptability to the production of various products. Furthermore, the unified scheduling of the control system improves the efficiency and accuracy of operation.

[0040] (2) The workpiece transfer of the present invention is completed by the coordinated cooperation of AGV transport vehicle, loading and unloading robot and ground rail robot to ensure a continuous and fast production rhythm; wherein, the ground rail robot is used for the transfer of finished products between workstations, and is equipped with grippers with self-locking mechanism, which can maintain clamping force under pressure loss to ensure the safety of transfer; the grippers combined with visual inspection realize adaptive and precise control of clamping force; at the same time, the ground rail robot includes an insulated box platform to realize full-process closed thermal management of high-temperature workpieces, effectively suppressing product defects caused by sudden temperature changes, and is particularly suitable for heat-sensitive processes such as SiC single crystal growth and TaC coating deposition.

[0041] (3) Each workstation of the production line of the present invention is equipped with an RFID transmission module, which can transmit data to the central control system in real time, thus constructing a quality control and traceability system covering the entire process and ensuring product consistency.

[0042] (4) According to the production order requirements, the present invention dynamically plans the production path, wherein the production path includes only starting the first preparation system, the first preparation system and the second preparation system working together, or the first preparation system, the second preparation system and the third preparation system working together; according to the production path, AGV transport vehicles and ground rail robots are scheduled to perform transportation and loading / unloading tasks; the finished products prepared by the first preparation system can be directly transferred to the finished product warehouse, or they can be transferred as semi-finished products to the second preparation system for use as a base; the finished products prepared by the second preparation system can also be transferred to the finished product warehouse, or they can be used as molds in the third manufacturing system, thereby forming the linkage of multiple preparation systems and improving the utilization rate of the production line. Attached Figure Description

[0043] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0044] Figure 1 This is an overall layout diagram of the intelligent production line according to one or more embodiments of the present invention;

[0045] Figure 2 This is a schematic diagram of the warehouse system structure according to one or more embodiments of the present invention;

[0046] Figure 3 This is a schematic diagram of a roller conveyor line structure according to one or more embodiments of the present invention;

[0047] Figure 4 This is a schematic diagram of the first preparation system structure according to one or more embodiments of the present invention;

[0048] Figure 5 This is a schematic diagram of the structure of the ground-rail robot according to one or more embodiments of the present invention;

[0049] Figure 6 This is a schematic diagram of the body structure of the ground-rail robot according to one or more embodiments of the present invention;

[0050] Figure 7 This is a schematic diagram of the composite gripper structure according to one or more embodiments of the present invention;

[0051] Figure 8 This is a simplified diagram of the motion of the composite gripper according to one or more embodiments of the present invention, wherein (a) is the released state and (b) is the clamping state;

[0052] Figure 9 This is a schematic diagram of laser marking on a carrier plate according to one or more embodiments of the present invention;

[0053] Figure 10 This is a schematic diagram of the self-locking mechanism structure according to one or more embodiments of the present invention;

[0054] Figure 11 This is a simplified kinematic diagram of the self-locking mechanism according to one or more embodiments of the present invention;

[0055] Figure 12 This is a schematic diagram of the gripper contact surface according to one or more embodiments of the present invention;

[0056] Figure 13 This is a perspective view of the insulated box platform according to one or more embodiments of the present invention;

[0057] Figure 14 This is a cross-sectional view of the insulation box structure according to one or more embodiments of the present invention;

[0058] Figure 15 This is a schematic diagram of the second preparation system structure according to one or more embodiments of the present invention;

[0059] Figure 16 This is a schematic diagram of the gas preparation system according to one or more embodiments of the present invention;

[0060] Figure 17 This is a schematic diagram of the third preparation system structure according to one or more embodiments of the present invention;

[0061] Figure 18 This is a schematic diagram of the SiC powder preparation system according to one or more embodiments of the present invention;

[0062] Figure 19 This is a production line operation flowchart according to one or more embodiments of the present invention;

[0063] Figure 20This is a flowchart of the first preparation system according to one or more embodiments of the present invention;

[0064] Figure 21 This is a flowchart of the second preparation system according to one or more embodiments of the present invention;

[0065] Figure 22 This is a flowchart of the third preparation system operation according to one or more embodiments of the present invention;

[0066] Figure 23 This is a flowchart of the warehouse system operation according to one or more embodiments of the present invention;

[0067] Figure 24 This is a flowchart illustrating the NG product disposal logic according to one or more embodiments of the present invention.

[0068] Among them, I, warehouse system; II, first preparation system; III, ground-rail robot; IV, AGV transport vehicle; V, second preparation system; VI, third preparation system; VII, central control system;

[0069] I-01 Raw material shelf; I-02 First loading / unloading robot; I-03 Warehouse handling robot; I-04 Quality inspection robot; I-05 Roller conveyor line; I-06 Label printing equipment; I-07 Label attaching robot; I-08 Packaging equipment; I-09 Finished product loading / unloading robot; I-10 Finished product shelf; II-01 Second loading / unloading robot; II-02 Laser marking platform; II-03 Post-processing platform; II-04 Fiber weaving machine; II-05 Graphite powder purification reaction chamber; II-06 Machining platform; II-07 Pre-processing platform; II-08 Matrix carbonization reaction chamber; III-01 Track; III-02 Ground-rail robot body;

[0070] V-01, First pretreatment platform; V-02, Gas preparation platform; V-03, Coating reaction chamber; VI-01, Second pretreatment platform; VI-02, High-purity SiC powder preparation platform; VI-03, Single-crystal SiC manufacturing reaction chamber;

[0071] I-05-01, RFID transmission module; I-05-02, lifting mechanism; I-05-03, carrier plate; III-02-01, composite gripper; III-02-02, vision assistance module; III-02-03, robotic arm; III-02-04, positioning system; III-02-05, rotating base; III-02-06, insulated box platform; V-02-01, third loading / unloading robot; V-02-02, TaCl5 preparation reaction chamber; V-02-03, gas mixing tank; VI-02-01, silicon carbide high-temperature reaction chamber; VI-02-02, fourth loading / unloading robot; VI-02-03, SiC purification reaction chamber;

[0072] III-02-01-01, Main push assembly; III-02-01-02, Clamping arm; III-02-01-03, Gripper; III-02-06-01, Platform; III-02-06-03, Insulated box; III-02-06-04, Lifting mechanism; III-02-01-01-01, Main push rod; III-02-01-01-02, Main cylinder; III-02 -01-01-03, Pawl cylinder; III-02-01-01-04, Pawl push rod; III-02-01-01-05, Pawl; III-02-01-01-06, Rack; III-02-01-03-01, Nickel-based high-temperature alloy outer layer; III-02-01-03-02, SiC fiber insulation intermediate layer; III-02-01-03-03, Graphite soft felt contact layer. Detailed Implementation

[0073] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the invention. Unless otherwise specified, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0074] Example 1:

[0075] This embodiment provides a smart production line for the preparation of carbon products by vapor deposition, such as... Figures 1-18 As shown, it includes a warehouse system I, a first preparation system II, a ground-rail robot III, an AGV transport vehicle IV, a second preparation system V, a third preparation system VI, and a central control system VII. The central control system VII is equipped with a central control display screen. The warehouse system I includes a raw material warehouse and a finished product warehouse. The first preparation system II is located on one side of the ground-rail robot III, and the second preparation system V and the third preparation system VI are located on the other side of the ground-rail robot III. The warehouse system I is located at one end of the ground-rail robot III, and the end of the ground-rail robot III corresponds to the finished product warehouse.

[0076] In this embodiment, the raw material warehouse is located at the beginning of the production line, and the raw materials are transferred to the corresponding preparation system via AGV transport vehicle IV; the first preparation system II, the second preparation system V, and the third preparation system VI are arranged according to the process logic sequence; the running track of the ground-rail robot III covers the key workstations of all preparation systems and the entrance to the finished product warehouse. Figure 19 As shown, AGV transport vehicle IV, according to the instructions of the central control system VII, transports raw materials from the raw material warehouse to the first preparation system II, the second preparation system V, and the third preparation system VI. Under the scheduling of the central control system VII, the ground rail robot III shuttles between the preparation systems to load, unload, and transfer workpieces between different workstations, and transports the final products to the finished product warehouse. The central control system VII communicates with the raw material warehouse, the workstation equipment of each preparation system, the ground rail robot III, and the AGV transport vehicle IV to realize centralized monitoring and intelligent scheduling of each system.

[0077] Among them, the first preparation system II can prepare carbon-carbon composite materials, porous carbon materials, high-purity graphite and other products; the second preparation system V and the first preparation system II work together to prepare porous tantalum / TaC coatings; the second preparation system V, the third preparation system VI and the first preparation system II work together to prepare SiC single crystals.

[0078] like Figure 2 As shown, the raw material warehouse includes multiple raw material shelves I-01, and each raw material shelf I-01 is equipped with a first loading / unloading robot I-02. In this embodiment, the multiple raw material shelves I-01 are arranged at horizontal intervals, and the first loading / unloading robot I-02 is arranged between adjacent raw material shelves I-01.

[0079] The finished goods warehouse and raw material warehouse are set up side by side. The finished goods warehouse includes multiple finished goods racks I-10, which are arranged longitudinally at intervals. A roller conveyor line I-05 is installed on the input side of the finished goods racks I-10. Along one side of the roller conveyor line I-05, an inbound handling robot I-03, a quality inspection robot I-04, a label printing device I-06, and a label attaching robot I-07 are sequentially installed. At the end of the roller conveyor line I-05 closest to the finished goods racks I-10, a packaging device I-08 and a finished goods loading / unloading robot I-09 are sequentially installed. The finished goods loading / unloading robot I-09 is located between the output end of the roller conveyor line I-05 and the finished goods racks I-10 for finished goods transfer. Figure 3 As shown, the roller conveyor line I-05 is equipped with a lifting mechanism I-05-02 and an RFID transmission module I-05-01 at one end near the manufacturing area.

[0080] like Figure 4As shown, the first preparation system II includes a laser marking platform II-02, a fiber weaving machine II-04, a graphite powder purification reaction chamber II-05, a machining platform II-06, a pretreatment platform II-07, a matrix carbonization reaction chamber II-08, and a post-treatment platform II-03, arranged laterally at intervals. Raw materials are transported from the raw material warehouse to the input end of the first preparation system II via an AGV transport vehicle IV. Then, a second loading / unloading robot II-01 transfers the raw materials to the laser marking platform II-02. The laser marking platform II-02 is used to laser-mark the carrier plate I-05-03, such as... Figure 9 As shown, RFID information is bound to it.

[0081] In this embodiment, the carrier plate I-05-03 is a ZrO2 ceramic carrier plate.

[0082] Fiber braiding machine II-04 is used to braid carbon fibers into preforms; these are then transferred by ground-rail robot III to machining platform II-06 for extrusion molding. Graphite powder purification reaction chamber II-05 is used in the preparation of the substrate for porous tantalum / TaC coated workpieces to purify the carbonized graphite matrix to obtain high-purity porous carbon or graphite skeletons.

[0083] Pretreatment platform II-07 enables vacuum pressure impregnation of pyrolytic resin, ensuring the resin fully fills the voids between fiber bundles. Matrix carbonization reaction chamber II-08 is used for CVD densification during the preparation of carbon-carbon composites (C / C), or for carbonizing porous carbon matrices during the preparation of porous tantalum / TaC coatings. Post-treatment platform II-03 is used for purification and reprocessing.

[0084] like Figure 15 and Figure 16 As shown, the second preparation system V includes a first pretreatment platform V-01, a gas preparation platform V-02, a coating reaction chamber V-03, and a third loading / unloading robot V-02-01. The first pretreatment platform V-01 is used for ultrasonic cleaning, oxygen plasma treatment, and online quality detection of the substrate. The gas preparation platform V-02 includes a TaCl5 preparation reaction chamber V-02-02 and a gas mixing tank V-02-03. The third loading / unloading robot V-02-01 is installed on one side of the TaCl5 preparation reaction chamber V-02-02.

[0085] In the TaCl5 preparation reaction chamber V-02-02, high-purity TaCl5 vapor is generated by the reaction of tantalum with chlorine gas. The substrate cleaning station cleans and activates the substrate from the first preparation system II. In the coating reaction chamber V-03, a dense TaC coating is deposited on the substrate surface using a pulsed CVD process. The second preparation system V transports the carbon substrate and reactant gas (such as TaCl5) provided by the first preparation system II to the coating reaction chamber V-03 for the preparation of molds or porous tantalum products with a tantalum carbide (TaC) coating.

[0086] The third preparation system VI is used to transport the TaC coating mold and high-purity SiC source powder provided by the second preparation system V to the PVD reaction chamber and single crystal growth furnace to prepare 4H-SiC single crystals. Figure 17 and Figure 18 As shown, the third preparation system VI includes a second pretreatment platform VI-01 (including quality inspection and pretreatment of the precursor products and quality inspection of the finished products), a high-purity SiC powder preparation platform VI-02, a single-crystal SiC manufacturing reaction chamber VI-03, and a fourth loading / unloading robot VI-02-02. The high-purity SiC powder preparation platform VI-02 includes a silicon carbide high-temperature reaction chamber VI-02-01 and a SiC purification reaction chamber VI-02-03. Each of the silicon carbide high-temperature reaction chamber VI-02-01 and the SiC purification reaction chamber VI-02-03 corresponds to one fourth loading / unloading robot VI-02-02. The second pretreatment platform VI-01 is used for high-temperature baking and acid washing cleaning, and quality inspection of the mold workpiece. The silicon carbide high-temperature reaction chamber VI-02-01 is the reaction vessel for silicon and carbon source materials. The SiC purification reaction chamber VI-02-03 is used to purify and obtain high-purity SiC powder.

[0087] like Figure 5 and Figure 6 As shown, the ground-rail robot III includes a track III-01 and a ground-rail robot body III-02 mounted on the track III-01. The ground-rail robot body III-02 includes a robotic arm III-02-03 with a rotating base III-02-05 mounted at its bottom, a composite gripper III-02-01 and a vision assistance module III-02-02 mounted at its top; an insulated box platform III-02-06 is located on one side of the rotating base III-02-05. The ground-rail robot body III-02 is also equipped with a positioning system III-02-04, providing navigation and positioning capabilities. In this embodiment, the robotic arm III-02-03 of the ground-rail robot III is a six-axis robotic arm, providing multi-degree-of-freedom motion capabilities.

[0088] like Figure 7As shown, the composite gripper III-02-01 includes two symmetrically arranged grippers III-02-01-03, each gripper III-02-01-03 being connected to a corresponding gripping arm III-02-01-02. The two gripping arms III-02-01-02 are jointly connected to the main push assembly III-02-01-01. The gripping arm III-02-01-02 provides the main clamping force, while the gripper III-02-01-03 is a flexible gripper, such as... Figure 12 As shown, the contact surface between the gripper III-02-01-03 and the workpiece is sequentially composed of a nickel-based high-temperature alloy outer layer III-02-01-03-01, a SiC fiber thermal insulation intermediate layer III-02-01-03-02, and a graphite soft felt contact layer III-02-01-03-03. The release state of the gripper III-02-01-03 is as follows. Figure 8 As shown in (a), the clamping state is as follows Figure 8 As shown in (b), n =7, P l =9, P h =0, so the degrees of freedom F =3 7-2 9-1 0=3, the drive mechanism consists of two sets of buffer grippers and main push rod III-02-01-01-01.

[0089] The main push assembly III-02-01-01 includes a main cylinder III-02-01-01-02, which is rotatably connected to the clamping arm III-02-01-02 via a main push rod III-02-01-01-01. To ensure stable clamping force, the main cylinder III-02-01-01-02 is equipped with a self-locking mechanism. Figure 10 As shown, the self-locking mechanism includes a pawl III-02-01-01-05, a rack III-02-01-01-06, and a pawl cylinder III-02-01-01-03. The rack III-02-01-01-06 is parallel to the main push rod III-02-01-01-01, and one end of the rack III-02-01-01-06 is fixed to the cylinder body of the main cylinder III-02-01-01-02. A slot is cut at a certain length of the main push rod III-02-01-01-01, and the pawl cylinder III-02-01-01-03 is fixed in the slot. The installation direction of the pawl cylinder III-02-01-01-03 is perpendicular to the main push rod III-02-01-01-01.

[0090] The pawl push rod III-02-01-01-04 has a protrusion on one side. One end of the pawl III-02-01-01-05 is hinged to the main push rod III-02-01-01-01, and the other end engages with the rack III-02-01-01-06. A slotted hole is formed at the end of the pawl III-02-01-01-05 near the rack III-02-01-01-06. The protrusion at the end of the pawl push rod III-02-01-01-04 is inserted into this slotted hole. Figure 11 As shown, the protrusion can move along the strip hole; Figure 11 Calculation of intermediate degrees of freedom: F =3 2-2 2-1=1, and its driving mechanism is a pawl pusher III-02-01-01-04. When the pawl pusher III-02-01-01-04 extends, it engages the pawl III-02-01-01-05 with the rack III-02-01-01-06 to achieve locking. When the pawl pusher III-02-01-01-04 retracts, it disengages the pawl III-02-01-01-05 from the rack III-02-01-01-06. Clamping force control is achieved by using a vision-assisted module III-02-02 (camera) to identify workpiece information, and the central control system VII calculates the required minimum clamping force and feeds back the control cylinder pressure.

[0091] The insulated box platform III-02-06 adopts a lifting insulated box structure, such as... Figure 13 and Figure 14 As shown, the insulated box platform III-02-06 includes an insulated box body III-02-06-03, a platform III-02-06-01, and a lifting mechanism III-02-06-04. The lifting mechanism III-02-06-04 is installed inside the insulated box body III-02-06-03, and the platform III-02-06-01 is connected to the top of the lifting mechanism III-02-06-04. The insulated box body III-02-06-03 is also equipped with an openable lid (not shown in the figure). The lid is connected to the insulated box body III-02-06-03 by a hinge, forming a side-opening type. When the platform I-05-03 descends with the platform III-02-06-01 to the insulated box body III-02-08-03, the lid must be closed to form a closed insulated cavity.

[0092] In this embodiment, the lifting mechanism III-02-06-04 adopts a scissor-type lifting structure driven by a screw and nut mechanism; the heat preservation box III-02-06-03 is made of high-efficiency heat insulation material, which can support the long-term heat preservation of workpieces at 1200℃, effectively reducing thermal shock and temperature fluctuations.

[0093] The working principle of the composite gripper III-02-01 in this embodiment is as follows:

[0094] Upon receiving the instruction from the central control system VII, the pawl cylinder III-02-01-01-03 is first activated, and the pawl push rod III-02-01-01-04 pushes the pawl III-02-01-01-05 outward, so that it engages with the rack III-02-02-01-06.

[0095] Subsequently, the main cylinder III-02-01-01-02 begins operation, pushing the main push rod III-02-01-01-01 to extend, causing the gripper arm III-02-01-02 to retract inward, bringing the gripper III-02-01-03 closer to the workpiece. During this process, the vision assistance module III-02-02 identifies the position and orientation of the workpiece in real time and provides data feedback through the positioning system III-02-04 to ensure precise alignment of the gripper III-02-01-03.

[0096] Once gripper III-02-01-03 contacts the workpiece surface, the cylinder piping system controlling gripper III-02-01-03 begins operation, driving gripper III-02-01-03 to apply clamping force synchronously. The magnitude of the clamping force is a theoretical value calculated by the central control system VII based on parameters such as workpiece mass, acceleration, and coefficient of friction. P Closed-loop control is implemented. When the system pressure sensor detects that the cylinder pressure has reached the target value... P At that time, the main cylinder III-02-01-01-02 stops pressurizing.

[0097] At this point, since the pawl III-02-01-01-05 is engaged with the rack III-02-01-01-06, and the main push rod III-02-01-01-01 is in a one-way locked state, even if the main cylinder III-02-01-01-02 is depressurized, the clamping force remains, preventing the workpiece from slipping due to external force or vibration during transport. The three-layer composite material on the surface of the gripper III-02-01-03 provides flexible contact and thermal insulation during this stage, protecting the workpiece surface.

[0098] When the clamping task is completed and the workpiece needs to be placed, the pawl cylinder III-02-01-01-03 first reverses its movement, pulling the pawl III-02-01-01-05 out of the rack III-02-01-01-06, thus releasing the mechanical self-locking mechanism. Subsequently, the main cylinder III-02-01-01-02 retracts the main push rod III-02-01-01-01, causing the clamping arm III-02-01-02 to open, completing the reset and preparing for the next operation.

[0099] In addition, for workpieces that have just completed coating preparation or have just been taken out of a high-temperature reactor (such as coating reaction chamber V-03 of the second preparation system V or single crystal growth furnace VI-03 of the third preparation system VI), the temperature is usually as high as several hundred degrees Celsius, and heat preservation and transportation are necessary to avoid thermal stress damage; the specific process is as follows:

[0100] The vision assistance module III-02-02 of the ground rail robot III first identifies the workpiece status and temperature. The vision assistance module III-02-02 uses a camera with thermal imaging function. Then, the robotic arm III-02-03 smoothly places the clamped workpiece onto the carrier plate I-05-03 on the platform III-02-06-01.

[0101] Then, the lifting mechanism III-02-06-04 lowers the platform III-02-06-01, completely housing the workpiece inside the insulated box III-02-06-03. The ground-rail robot body III-02 moves along the track III-01, transferring the entire insulated box platform III-02-06 to the next target workstation (such as the finished product warehouse area or the next level of the preparation system). Upon reaching the target workstation, the lifting mechanism III-02-06-04 raises the platform III-02-06-01, exposing the workpiece; the gripper III-02-01-03 can then perform the gripping action again, sending the workpiece to the next process (such as quality inspection, packaging, or further processing).

[0102] In this embodiment, the central control system VII integrates a MES scheduling module. It binds workpiece identification information and process parameters via RFID data links, monitors quality indicators such as density and defects in real time (using synchrotron radiation CT scans and laser-induced breakdown spectra), and automatically sorts out defective products. The finished product warehouse is equipped with a quality inspection robot I-04, a label attaching robot I-07, and packaging equipment I-08 to complete traceability information attachment and palletizing for warehousing.

[0103] The central control system VII primarily functions as a Manufacturing Execution System (MES) scheduler, end-to-end traceability, and real-time monitoring and closed-loop control. The MES receives production orders, dynamically plans production paths (e.g., activating only the first preparation system II to produce carbon-carbon composite materials, or coordinating three preparation systems to produce SiC single crystals), and schedules AGVs and ground-rail robots III to perform transportation and loading / unloading tasks. End-to-end traceability is achieved by using RFID transmission modules at each workstation to collect and bind raw material information, process parameters, and quality inspection data to the workpiece in real time. Real-time monitoring and closed-loop control display the status of each piece of equipment and the trends of process parameters, integrates quality inspection feedback, and provides real-time alarms and sorting for non-conforming products, thus achieving closed-loop quality control.

[0104] Example 2:

[0105] This embodiment provides a process for preparing carbon products by vapor deposition, using the intelligent production line described in Example 1, for preparing carbon products such as carbon-carbon composite materials (C / C); this embodiment is implemented through a first preparation system II and controlled by a central control system VII.

[0106] like Figure 20 As shown, the specific process is as follows:

[0107] S1. Order Receipt and Raw Material Preparation:

[0108] After the central control system VII receives the production order, the first loading and unloading robot I-02 picks up PAN-based carbon fiber (12K, target fiber volume content 55%) and carrier plate I-05-03 from the raw material shelf I-01 and places them on the AGV transport vehicle IV. The AGV transport vehicle IV takes the carrier plate I-05-03 with PAN-based carbon fiber to the starting station of the first preparation system II, and then the second loading and unloading robot II-01 picks up the material (PAN-based carbon fiber).

[0109] S2. Carrier board identification and information binding:

[0110] The ground-rail robot III uses its robotic arm III-02-03 and composite gripper III-02-01 to transfer the carrier plate I-05-03 to the laser marking platform II-03. The information of the carrier plate I-05-03 is scanned by the RFID transmission module, and laser marking (including a unique QR code and micro dot matrix) is performed. This identification information is then bound to the process formula of this production order in the central control system VII. After binding, the data is uploaded to the central control system VII through the RFID transmission module.

[0111] After laser marking is completed, the composite gripper III-02-01 of the ground rail robot III picks up the carrier plate I-05-03 and places it on the loading platform III-02-06-01 of the insulated box platform III-02-06 for subsequent workpiece-carrier plate information binding and workpiece transfer.

[0112] S3. Preparation of fiber preforms:

[0113] Carbon fiber raw materials are transferred to fiber weaving machine II-04 by the second loading and unloading robot II-01. They are then woven in three dimensions to form a fiber preform with a specific topological structure (such as internal flow channels). The weaving parameters are preset by the central control system VII according to the formula.

[0114] S4. Machining and Pretreatment:

[0115] The woven fiber preform is placed on carrier plate I-05-03 on ground-rail robot III and transferred to machining platform II-06 for precision machining to form the precise shape and mating surfaces required for the final product. After machining, the workpiece is sent by ground-rail robot III to pretreatment platform II-07, where it is impregnated with a hydrolytic resin through a vacuum pressure impregnation process, allowing the resin to fully fill the gaps between the fiber bundles.

[0116] S5. Plasma surface cleaning:

[0117] The pretreated workpiece is sent to the plasma cleaning station (integrated into the pretreatment platform II-07 or an independent station), where it is bombarded with plasma at 200W power for 90 seconds in an Ar / H2 mixed atmosphere to thoroughly remove surface contaminants and activate the fiber surface.

[0118] S6.CVD densification treatment:

[0119] After cleaning and activation, the workpiece is fed into the substrate carbonization reaction chamber II-08 by the ground-rail robot III for CVD carbon deposition densification treatment. The key process parameters for CVD densification treatment include: precursor atmosphere of C3H8 (propylene) / H2 with a flow ratio of 1:4; reaction chamber pressure of 15 kPa; and temperature control in stages (1000°C initially and 1150°C later).

[0120] The composite gripper III-02-01 of the ground-rail robot III adaptively adjusts its clamping force based on the workpiece information identified by the vision assistance module III-02-02. After the reaction is complete, the composite gripper III-02-01 places the workpiece in the insulated platform III-02-06 to reduce thermal shock. During the gripping process, after the vision assistance module III-02-02 identifies the workpiece, it switches between different clamping forces for gripping. The identified and gripped workpiece corresponds to the minimum clamping force provided by the central control system VII.

[0121] The minimum clamping force must overcome all forces that cause the workpiece to slip, satisfying the following:

[0122]

[0123] In the formula, F 滑移 This represents the sum of all external forces parallel to the clamping surface (such as the component of gravity, inertial force, cutting force, etc.). μ This indicates the coefficient of friction between the material of the gripper III-02-01-03 and the workpiece material. n Indicates the number of effective friction surfaces (when clamped on one side). n =1, when clamped symmetrically on both sides n =2).

[0124] The formula for static or uniform vertical clamping is:

[0125]

[0126] In the formula, G This indicates the weight of the workpiece (N). S f This indicates the material safety factor for identifying the workpiece, with a value ranging from 1.5 to 3.

[0127] For horizontal transport (considering gravity and acceleration), the final threshold formula is:

[0128]

[0129] In the formula, m Indicates the mass of the workpiece (kg). a This represents the maximum acceleration during transport (m / s²).

[0130] Based on the above calculations of the theoretical minimum clamping force and the corresponding workpiece contact coefficient, the actual working air pressure of the main cylinder III-02-01-01-02 is calculated. P 1:

[0131] F 实际 = ( P 1× A） × η

[0132] In the formula, η represents mechanical efficiency, and A is the effective area of ​​the cylinder piston.

[0133] S7. For example Figure 23 As shown, the central control system VII determines the workpiece's destination based on the detection results and order requirements:

[0134] S7.1 Path 1 (as finished product entering the warehouse):

[0135] If the workpiece is qualified and the order requires carbon-carbon composite material, the ground-rail robot III transports it to the finished product warehouse. From there, it is connected by the inbound handling robot I-03 to the roller conveyor line I-05.

[0136] Online quality inspection and central scheduling decision-making: After densification, the workpieces exit the furnace and undergo online inspection by the quality inspection robot I-04 or integrated inspection equipment (such as synchrotron radiation CT scan, ultrasonic C-scan). The inspection data is transmitted to the central control system VII via RFID. Traceability information is affixed by the label printing device I-06 and the label affixing robot I-07, and then packaged by the packaging device I-08. Finally, the finished product loading and unloading robot I-09 places the finished product on the finished product shelf I-10.

[0137] S7.2 Path 2 (as a semi-finished product): If the workpiece is qualified and needs to be used as the base of the second preparation system V, the central control system VII controls the ground rail robot III to directly transfer it to the designated workstation of the second preparation system V.

[0138] Example 3:

[0139] This embodiment provides a process for preparing vapor-deposited carbon products, using the intelligent production line described in Example 1, for preparing coated carbon products with porous tantalum / TaC coating. This embodiment achieves this through the linkage of the first preparation system II and the second preparation system V.

[0140] Specifically, such as Figure 21 As shown, it includes the following steps:

[0141] S1. The porous carbon matrix is ​​prepared by the first preparation system II:

[0142] S1.1 Matrix Forming: In the pretreatment platform II-07, a specific ratio of organic matter, foaming agent, additives and magnetic nanoparticles are mixed and cured under magnetic field induction to form a three-dimensional network open-cell matrix (open-cell rate 85%).

[0143] S1.2 Carbonization and Purification: The matrix is ​​placed in matrix carbonization reaction chamber II-08 for carbonization and purification, and chlorine-containing gas is introduced into graphite powder purification reaction chamber II-05 or the same reaction chamber for purification to obtain a high-purity porous carbon skeleton (impurities ≤0.3wt%).

[0144] It should be noted that if a TaC-coated product is being prepared, this step will output a high-purity graphite skeleton.

[0145] S1.3 Surface treatment: Plasma cleaning and roughening treatment of the substrate (Ra≤3μm).

[0146] S2. Matrix Transfer, Cleaning and Quality Inspection: The porous carbon matrix prepared by the first preparation system II is transferred by the ground-rail robot III to the first pretreatment platform V-01 of the second preparation system V, where the matrix is ​​subjected to ultrasonic cleaning, oxygen plasma treatment and online quality inspection to ensure its cleanliness and integrity; the data is transmitted to the central control system VII via RFID.

[0147] S3. Preparation of TaCl5 reaction gas: Place the tantalum metal material in the TaCl5 preparation reaction chamber V-02-02, heat it to about 400°C, and then introduce high-purity chlorine gas to react and generate high-purity TaCl5 gas. Mix it with hydrogen and argon in proportion in the gas mixing tank V-02-03 for later use.

[0148] S4. CVD deposition of TaC coating: The cleaned and activated substrate is sent into the coating reaction chamber V-03 and pulsed CVD process is adopted: the system is preheated to 1500°C; a TaCl5 / H2 / Ar mixed gas is pulsed for 2 seconds, followed by H2 purging for 1 second; a CH4 / H2 / Ar mixed gas is pulsed for 1.5 seconds, followed by H2 purging for 1 second; the cycle is repeated for 120 minutes.

[0149] S5. Coating quality inspection and central dispatch decision-making:

[0150] S5.1 Path 1 (Warehoused as Finished Product): After deposition, the workpiece undergoes quality inspection (such as SEM, scratch testing) in the first pre-processing platform V-01 warehouse. The data is uploaded to the central control system VII. If the workpiece is qualified (such as TaC coated products), the process is the same as step S7.1 in Example 2, and it is transported to the finished product warehouse area by the ground-rail robot III to complete the warehousing.

[0151] For porous tantalum products, they are not used as subsequent molds and are directly put into storage.

[0152] S5.2 Path 2 (transfer as a semi-finished product): If the product under manufacturing is a TaC coated workpiece that is qualified and serves as a mold for the third preparation system VI, the ground-rail robot III will transfer it to the third preparation system VI.

[0153] Example 4:

[0154] This embodiment provides a process for preparing carbon products by vapor deposition, using the intelligent production line described in Example 1, for the preparation of 4H-SiC single crystal carbon products, which is achieved through the linkage of the first preparation system II, the second preparation system V, and the third preparation system VI.

[0155] Specifically, such as Figure 22 As shown, it includes the following steps:

[0156] S1. TaC Coating Mold Preparation and Quality Inspection: Using the high-quality TaC coated graphite mold produced in Example 3, the mold is transported by ground-rail robot III to the second pretreatment platform VI-01 of the third preparation system VI for cleaning and quality confirmation.

[0157] S2. Mold cleaning and PVD seed layer deposition: The mold is subjected to high-temperature baking and acid cleaning at the cleaning station (integrated in the second pretreatment platform VI-01). After cleaning, it is sent to the PVD reaction chamber (integrated in the single crystal SiC manufacturing reaction chamber VI-03), where an ultra-thin tantalum film is deposited on its inner surface by sputtering as a seed layer.

[0158] S3. SiC Source Powder Preparation and Loading: High-purity (≥5N) silicon and carbon source materials react in the silicon carbide high-temperature reaction chamber VI-02-01 of the SiC powder preparation platform VI-02 to generate SiC powder, which is then purified in the SiC purification reaction chamber VI-02-03 to obtain high-purity SiC powder. The high-purity SiC powder raw material is placed into the single-crystal SiC manufacturing reaction chamber VI-03 by the fourth loading and unloading robot VI-02-02, and the mold is placed into the designated position in the reaction chamber by the ground-rail robot III.

[0159] S4. SiC Single Crystal PVT Growth: The mold is sent into the manufacturing reaction chamber VI-03 for single crystal SiC growth using the PVT method.

[0160] The process parameters are controlled by the central control system VII: growth temperature 2250°C, axial temperature gradient 55°C / cm, Ar atmosphere 40 mbar, growth rate 0.3 mm / h.

[0161] S5. Crystal Cooling and Insulation Transfer: After growth, the crystal is slowly cooled to approximately 200°C in the furnace. The central control system VII controls the ground-rail robot III to execute the "insulation transfer path," transferring the crystal mold assembly to the subsequent workstation via the insulation box platform III-02-06.

[0162] S6. Crystal quality assessment and post-processing: After the grown SiC ingot is cut, ground and polished, a quality assessment is performed (e.g., KOH etching to measure EPD, XRD to measure FWHM).

[0163] S7. Packaging and Warehousing: Qualified monocrystalline products are finally packaged, labeled and warehoused in the finished product warehouse area according to the process described in step S7.1 of Example 2.

[0164] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A smart production line for the preparation of carbon products by vapor deposition, characterized in that, This includes a ground-rail robot, an AGV transport vehicle, a central control system, and a manufacturing system; The ground-rail robot is equipped with a warehouse system at one end, which includes a raw material warehouse and a finished product warehouse; the AGV transport vehicle is used to transfer materials from the raw material warehouse to the corresponding preparation system, and the ground-rail robot is used to transfer finished products between preparation systems; the central control system is used to control the operation of a single preparation system or the coordinated operation between at least two preparation systems, and the finished product warehouse is used to receive the finished products output by the ground-rail robot; The ground-rail robot is equipped with a first preparation system on one side and a second and a third preparation system on the other side in sequence. The first preparation system is used for substrate preparation, the second preparation system is used for coating preparation, and the third preparation system is used for single crystal preparation. The ground-rail robot includes a track and a ground-rail robot body that cooperates with the track; The ground-rail robot body is equipped with an insulated box platform for transporting high-temperature workpieces; The insulated box platform includes an insulated box body, and a loading platform is connected to the insulated box body through a lifting mechanism. The ground-rail robot body is equipped with grippers, which are connected to the main propulsion assembly. The main drive assembly has a locking mechanism.

2. The intelligent production line for preparing carbon products by vapor deposition according to claim 1, characterized in that, The main push assembly includes a main cylinder, which is connected to the gripper via a main push rod; The locking mechanism includes a rack, a pawl, and a pawl cylinder. One end of the rack is fixed to the cylinder body of the main cylinder, and the pawl cylinder is vertically installed inside the main push rod. One end of the pawl is hinged to the main push rod, and the other end is used to engage with the rack. The pawl cylinder and the pawl are in sliding engagement.

3. The intelligent production line for preparing carbon products by vapor deposition according to claim 1, characterized in that, The raw material warehouse includes multiple raw material shelves and a first loading and unloading robot installed on one side of the raw material shelves; The finished product warehouse includes a roller conveyor line, with multiple finished product shelves installed at the output end of the roller conveyor line, and finished product loading and unloading robots installed between the finished product shelves and the roller conveyor line.

4. The intelligent production line for preparing carbon products by vapor deposition according to claim 1, characterized in that, The first preparation system includes a laser marking platform, a fiber weaving machine, a machining platform, a pretreatment platform, and a matrix carbonization reaction chamber for sequentially processing composite materials. A second loading and unloading robot is provided on one side of the laser marking platform. It also includes a graphite powder purification reaction chamber, which is used for matrix purification during the coating preparation process.

5. The intelligent production line for preparing carbon products by vapor deposition according to claim 1, characterized in that, The second preparation system includes a first pretreatment platform, a gas preparation platform, and a coating reaction chamber arranged in sequence. The first pretreatment platform is used to perform ultrasonic cleaning and plasma treatment on the substrate. The gas preparation platform is used for TaCl5 preparation and gas mixing. The coating reaction chamber is used to generate high-purity TaCl5 vapor.

6. The intelligent production line for preparing carbon products by vapor deposition according to claim 1, characterized in that, The third preparation system includes a second pretreatment platform, a high-purity SiC powder preparation platform, and a single-crystal SiC manufacturing reaction chamber arranged sequentially. The high-purity SiC powder preparation platform includes a silicon carbide high-temperature reaction chamber and a SiC purification reaction chamber.

7. The intelligent production line for preparing carbon products by vapor deposition according to claim 1, characterized in that, It also includes RFID scanning modules installed at each workstation, used to collect workpiece raw material information, process parameters, and quality inspection data.

8. A process for preparing carbon products by vapor deposition, characterized in that, The intelligent production line described in any one of claims 1-7 includes: According to the production order requirements, the production path is dynamically planned; the production path includes starting only the first preparation system, the first preparation system and the second preparation system working together, or the first preparation system, the second preparation system and the third preparation system working together; according to the production path, AGV transport vehicles and ground rail robots are dispatched to perform transportation and loading / unloading tasks.

9. The process for preparing carbon products by vapor deposition according to claim 8, characterized in that, The preparation process for starting only the first preparation system is as follows: The first loading and unloading robot picks up carbon-carbon composite material and carrier plate from the raw material shelf, and the AGV transport vehicle transfers them to the starting station of the first preparation system. The ground-rail robot transfers the carrier plate to the laser marking platform for laser marking; then the carbon-carbon composite material is formed into a fiber preform by a fiber weaving machine, and the fiber preform is transferred to the machining platform by the ground-rail robot; After machining, the workpieces undergo pretreatment, plasma cleaning, and CVD densification in sequence; qualified workpieces after densification are transferred to the finished product shelf or used as the substrate for the second preparation system.

10. A process for preparing carbon products by vapor deposition according to claim 8, characterized in that, The preparation process involving the linkage of the first and second preparation systems is as follows: The substrate formed by the first preparation system is placed in the substrate carbonization reaction chamber, and after carbonization, it is sent to the graphite powder purification reaction chamber for purification treatment to obtain porous carbon or high-purity graphite, and then surface treatment is performed. The surface-treated substrate is fed into the gas preparation platform of the second preparation system, and after generating high-purity TaCl5 gas, it is sent into the coating reaction chamber. After deposition, the workpiece is transferred to the finished product warehouse by a ground-rail robot, or used as a mold in the third manufacturing system.

11. The process for preparing carbon products by vapor deposition according to claim 8, characterized in that, The preparation process involving the coordinated operation of the first, second, and third preparation systems is as follows: The mold produced by the second preparation system is sent into the second pretreatment platform by a ground-rail robot, and after cleaning, it is sent into the PVD reaction chamber. Silicon and carbon source materials are fed into the SiC powder preparation platform, and high-purity SiC powder is obtained after high-temperature reaction and purification. The ground-rail robot transfers the mold to the single-crystal SiC manufacturing reaction chamber to generate SiC single crystals.

12. The process for preparing carbon products by vapor deposition according to claim 8, characterized in that, The composite gripper of the ground-rail robot adaptively adjusts the clamping force based on the workpiece information identified by the vision assistance module.

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