Vibration decoupling type multi-dimensional micro-vibration isolation support and design method thereof

Abstract

The invention discloses a vibration decoupling type multi-dimensional micro-vibration isolation support and a design method thereof. The support comprises an upper connecting plate, a vertical vibration isolation module, a middle connecting plate, a horizontal vibration isolation module and a lower connecting plate which are sequentially and vertically connected in series from top to bottom. The vertical vibration isolation module comprises a plurality of guide rail type elastic vector vibration isolation mechanisms which are connected in parallel; the guide rail type elastic vector vibration isolation mechanism comprises an upper block arranged on the upper connecting plate, a guide rail arranged on the middle connecting plate, a lower block arranged on the guide rail, a guide piece connected between the upper block and the lower block, a sliding block arranged on the guide rail in a sliding fit mode, an elastic piece connected between the lower block and the sliding block, and an inclined strut hinged between the upper block and the sliding block. The upper block, the guide piece and the lower block are located on the same vertical shaft, the inclined strut, the sliding block and the elastic piece are symmetrically distributed relative to the vertical shaft, and the elastic piece is used for providing linear damping force in the horizontal direction. And the horizontal shock insulation module adopts a lead core rubber support. The support can realize physical integration and mechanical decoupling of vertical vibration isolation and horizontal vibration isolation.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of vibration isolation and damping, and particularly relates to a vibration-decoupling multi-dimensional micro-vibration isolation support and a design method thereof. BACKGROUND

[0002] High-end precision equipment is one of the core indicators to measure the scientific and technological strength and manufacturing level. For example, a lithography machine, as the "crown" of integrated circuit manufacturing, has a line width close to the physical limit, and has developed from deep ultraviolet to extreme ultraviolet, and the requirement for overlay accuracy has reached the atomic scale. Precision detection equipment such as a scanning electron microscope and an atomic force microscope are the eyes of nanotechnology and life science research. High-precision inertial navigation systems and spacecraft attitude control components are strategic cornerstones in the field of national defense and aerospace. The common feature of these high-end precision equipment is that their working mechanism and process precision have entered the nanometer or even sub-nanometer level. At this scale, any slight environmental vibration, even the micro-vibration that cannot be perceived by humans, will become a "fatal killer" that restricts the performance of the equipment. For example, for a lithography machine, vibration will cause relative displacement between an objective lens and a silicon wafer, resulting in imaging blur and overlay error, and directly reducing the chip yield. For an electron microscope, vibration will cause the electron beam spot to drift, resulting in image distortion. For a precision machining center, vibration will destroy the stability of the tool path, and affect the surface accuracy and surface finish of the machined workpiece. Therefore, providing a super-stable and super-quiet basic environment for high-end precision equipment is a prerequisite for ensuring the normal operation and performance of the equipment.

[0003] Currently, the following technologies are mainly used for vibration control of high-end precision equipment: 1. Vibration isolation technology for environmental micro-vibration - Environmental micro-vibration is mainly derived from surrounding road traffic, construction activities, internal fan, water pump and other equipment operation, and its frequency components are mainly concentrated in the frequency band of 4Hz to 100Hz. There are generally three kinds: 1) air spring isolator, which is the most widely used passive isolation scheme at present; its advantages are low natural frequency (as low as 1-3Hz), which can effectively isolate medium and high frequency vibration; but its shortcomings are also prominent, one is that the horizontal stiffness is usually much lower than the vertical stiffness, resulting in a very low horizontal natural frequency of the system, which will produce a large swing when subjected to instantaneous impact or earthquake and other low-frequency large displacement excitations, and the stability is insufficient, which may cause the risk of overturning of precision equipment, the second is that it needs to be matched with a complex air source, pipeline and control system, with high maintenance cost and leakage risk. 2) Active and semi-active isolation platform, which forms a closed-loop system through sensors, controllers and actuators to real-time cancel vibration, which can theoretically provide the best isolation performance; however, the system is extremely complex, the cost is extremely high, the energy consumption is large, and the reliability (especially the long-term maintenance-free reliability) is the pain point of engineering application; in addition, the output force and stroke of the actuator are limited, which is completely ineffective in extreme conditions such as earthquakes, and even may be damaged itself. 3) Rubber vibration isolation pad / metal spring isolator, which has low cost and simple structure; but the rubber has aging problem and unstable performance, the metal spring has small damping and is easy to transmit high-frequency vibration and generate standing wave; and it is easy to sway itself, with limited isolation effect.

[0004] 2. Seismic isolation technology for seismic motion - Seismic motion is characterized by low frequency (0.1-10Hz) and large displacement, and its destructive power is huge. Building isolation bearings (such as lead rubber bearing, friction pendulum bearing) are generally used, which is a mature technology. By setting a flexible isolation layer at the building foundation or interlayer, the structure period is prolonged, and the seismic predominant period is far away, so as to greatly reduce the seismic response of the upper structure; however, the design intention of such bearings is to protect the safety of building structures, and their mechanical properties (such as stiffness, damping) are designed for large deformation of seismic excitation, which cannot effectively filter out high-frequency environmental micro-vibration harmful to precision equipment. Directly installing precision equipment on the isolated building, the micro-vibration problem still exists.

[0005] In summary, the prior art is in a state of "micro-vibration isolation" and "seismic isolation" being separated, the traditional vibration isolator is good at dealing with high-frequency micro-vibration, but not resistant to earthquakes, and the traditional seismic isolation bearing is good at dealing with low-frequency earthquakes, but not suppressing micro-vibration. This separation forces engineering design into a dilemma: either equip precision equipment with an expensive active vibration isolation platform and pray for no earthquakes, or build a precision laboratory in a seismic building and spend a lot of money to additionally build a micro-vibration isolation system, which not only causes cost stacking and space waste, but also introduces new uncertainties and complexities at the interface of the two technologies. Therefore, there is an urgent need for a solution that can simultaneously, simultaneously and integrally solve the dual challenges of high-frequency micro-vibration and low-frequency seismic vibration. SUMMARY

[0006] The purpose of the present application is to provide a vibration and earthquake decoupling type multi-dimensional micro-vibration isolation bearing and a design method of the above vibration and earthquake decoupling type multi-dimensional micro-vibration isolation bearing, which can realize physical integration and mechanical decoupling of vertical vibration isolation and horizontal seismic isolation, has high integration, saves space, can effectively cope with high-frequency micro-vibration and low-frequency seismic vibration, has inherent decoupling and stability, and has engineering applicability.

[0007] The technical solution adopted by the present application is: A vibration and earthquake decoupling type multi-dimensional micro-vibration isolation bearing, comprising an upper connecting plate, a vertical vibration isolation module, a middle connecting plate, a horizontal seismic isolation module and a lower connecting plate vertically connected in series from top to bottom; the upper connecting plate is used for installing equipment or a platform; the vertical vibration isolation module comprises a plurality of parallel guide rail type elastic vector vibration isolation mechanisms, each guide rail type elastic vector vibration isolation mechanism comprising an upper block provided on the upper connecting plate, a guide rail provided on the middle connecting plate, a lower block provided on the guide rail, a guide provided between the upper block and the lower block, a sliding block slidingly fitted on the guide rail, an elastic member provided between the lower block and the sliding block, and an inclined strut hingedly connected between the upper block and the sliding block, the upper block, the guide and the lower block being on the same vertical axis, the guide being used to constrain the vertical movement of the upper block, the inclined strut, the sliding block and the elastic member being symmetrically distributed about the vertical axis, and the elastic member being used to provide a horizontal linear damping force; the horizontal seismic isolation module adopts a lead rubber bearing and is installed between the middle connecting plate and the lower connecting plate; and the lower connecting plate is used for installation on a foundation.

[0008] Preferably, the initial inclination angle of the inclined strut in the guide rail type elastic vector vibration isolation mechanism is adjusted φ 0and the elastic stiffness of the elastic member k s to adjust the equivalent vertical stiffness of the bearing near the equilibrium position K v so that the vertical static stiffness of the bearing is greater than the dynamic stiffness or presents a non-linear characteristic of stiffness softening, to realize the unification of stable support and efficient vibration isolation.

[0009] Preferably, the horizontal equivalent stiffness of the lead-rubber bearing is designed to make the horizontal first natural period of the whole system greater than 1.0s.

[0010] Preferably, three guide rail type elastic vector vibration isolation mechanisms are arranged in an equilateral triangle, and the center of the equilateral triangle is at the center of the upper connecting plate; or four guide rail type elastic vector vibration isolation mechanisms are arranged in a square, and the center of the square is at the center of the upper connecting plate.

[0011] Preferably, the elastic member is one of a single disc spring, parallel disc springs, disc springs with viscous dampers in parallel, a single coil spring, parallel coil springs, and coil springs with viscous dampers in parallel.

[0012] Preferably, the guide member includes a sleeve and a sliding rod that are fitted together, and the sleeve and the sliding rod are fixed to the lower block and the upper block, respectively, or vice versa.

[0013] Preferably, the diagonal brace is hinged with a self-lubricating joint bearing or a self-lubricating pin shaft between the upper block and the sliding block.

[0014] The design method of the above-mentioned vibration decoupling type multi-dimensional micro-vibration isolation support: first, according to the equipment parameters, vibration criteria and site environment, the vertical target isolation frequency f v , the horizontal target isolation frequency f h and the required number of supports n of the equipment are determined; then, the required target vertical stiffness K v and the target horizontal stiffness K h of a single support are calculated; then, the initial inclination angle K v of the diagonal brace in the guide rail type elastic vector vibration isolation mechanism and the elastic stiffness φ s of the elastic member are determined according to the target vertical stiffness k h ; a lead-rubber bearing model with corresponding post-yield stiffness is selected according to the target horizontal stiffness K ; finally, the vertical vibration isolation module and the horizontal isolation module are integrated, and the nonlinear mechanical performance is checked.

[0015] Preferably, the equipment parameters include total mass, center of gravity, footing arrangement, the vibration criteria are the vibration standards required by the equipment manufacturer, and the site environment is the dominant frequency and amplitude determined according to the site environment vibration measurement report and the seismic fortification intensity of the building location; according to the vibration isolation theory, in order to achieve good vibration isolation effect, the vertical target frequency f v is lower than the dominant frequency of the environmental vibration ; for effective isolation, the horizontal target frequency f h far below the dominant frequency of earthquake; according to the base of equipment and load distribution, ensure each support bearing in a reasonable range.

[0016] Preferably, according to the target vertical stiffness K v Determine the initial inclination of the inclined strut in the guide rail type elastic vector isolation mechanism φ 0 and the elastic stiffness of the elastic member k s The method is: set the equivalent vertical stiffness of the support near the equilibrium position K v Approximately K v =2· N · k s ·(tan φ ) 2 , wherein, N The number of guide rail type elastic vector isolation mechanisms in a single support, φ The inclination of the inclined strut; first, select a suitable initial inclination φ 0, assuming that the vertical displacement of the support under static load after installation of the equipment has negligible effect on the inclination, i.e. the initial inclination φ 0 is used to calculate the equivalent vertical stiffness K v , and the elastic stiffness of the elastic member is obtained by inverse calculation k s ; then, the derived exact force-displacement relationship is used to check the stiffness variation of the support within the expected static load and dynamic load range, and the initial inclination φ 0 and the elastic stiffness k s are adjusted and iteratively optimized to find the optimal parameter combination, ensuring that the vertical static stiffness of the support is greater than the dynamic stiffness or exhibits nonlinear characteristics of stiffness softening, to achieve the unity of stable support and efficient isolation.

[0017] The beneficial effects of the present application are: The support can realize physical integration and mechanical decoupling of vertical vibration isolation and horizontal seismic isolation, and has the following advantages: 1) high integration, space saving: the vertical vibration isolation module and the horizontal seismic isolation module are vertically integrated on one support, avoiding the cost, space and interface complexity caused by using two independent systems, greatly simplifying the engineering design, saving the installation space and the total cost. 2) can effectively deal with high-frequency micro-vibration and low-frequency ground motion: integrating horizontal seismic isolation and vertical vibration isolation together, like a “multi-functional filter”, filtering out high-frequency “noise” and low-frequency “surge” from the ground for precision equipment, providing a truly full-spectrum, all-weather ultra-stable foundation; the guide rail type elastic vector vibration isolation mechanism converts the vertical linear displacement into the horizontal expansion of the elastic element, realizes the ideal characteristics of “large static stiffness and small dynamic stiffness” through geometric nonlinearity, thereby efficiently isolating high-frequency micro-vibration, and the measured vertical acceleration transmissibility can be as low as 0.2 (i.e. the shock absorption rate is >80%); the laminated rubber inside the lead rubber bearing provides horizontal flexibility, and the lead core provides energy dissipation damping, which can dissipate seismic energy and realize horizontal long-period seismic isolation, and the horizontal seismic acceleration response can be reduced by more than 85%; the support can effectively deal with extremely wide-band excitation from 0.1Hz (seismic frequency band) to 100Hz (environmental micro-vibration frequency band), ensuring that the equipment can operate safely and accurately in normal and disaster conditions. 3) has inherent decoupling and stability: the vertical vibration isolation module and the horizontal seismic isolation module are independent and do not interfere with each other (i.e. “decoupling”), allowing engineers to design and optimize the two directions separately; the guide rail type elastic vector vibration isolation mechanism forms a vector triangle force transmission mechanism that converts vertical displacement into horizontal deformation of the elastic element, which has extremely high geometric stability. 4) engineering applicability: no external energy source is needed, it works passively, has high reliability, and has very low maintenance requirements; by replacing elastic elements of different stiffness or adjusting the angle of the inclined support, it can adapt to different equipment and sites, and has strong versatility; it can be directly applied to new projects, and is also easy to upgrade and modify the existing precision equipment platform for seismic reinforcement and micro-vibration. 5) significant economic and social benefits: it can provide basic micro-vibration and seismic isolation protection for high-end industrial and scientific equipment sensitive to environmental vibration, such as photolithography machines, electron beam exposure machines, scanning electron microscopes, precision measuring instruments, and high-precision inertial navigation systems, protecting high-end precision equipment worth tens of millions or even hundreds of millions of yuan from vibration damage. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 is a cross-sectional view of a vibration-decoupling multi-dimensional micro-vibration isolation support according to the present application.

[0020] Figure 2 is a three-dimensional view of a guide rail type elastic vector vibration isolation mechanism according to the present application.

[0021] Figure 3 is a force analysis schematic diagram of the guide rail type elastic vector vibration isolation mechanism according to the present application.

[0022] Figure 4 is an ideal nonlinear force-displacement (F-S) curve of the support according to the present application. F δ

[0023] Figure 5 is a planar layout of the support according to the present application on the basis of a precision device.

[0024] In the figure: 10 - upper connecting plate; 20 - guide rail type elastic vector vibration isolation mechanism; 21 - upper block; 22 - guide; 23 - lower block; 24 - elastic member; 25 - sliding block; 26 - inclined strut; 27 - guide rail; 28 - baffle; 30 - middle connecting plate; 40 - lead rubber support; 50 - lower connecting plate; 100 - vibration-decoupling multi-dimensional micro-vibration isolation support; 200 - foundation. DETAILED DESCRIPTION

[0025] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of the present application.

[0027] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0028] The features and performances of the present application are further described in detail below in combination with the embodiments.

[0029] Embodiment 1 This embodiment discloses a vibration-decoupling multi-dimensional micro-vibration isolation support 100, as shown in​​Figure 1 As shown, it includes, from top to bottom, an upper connecting plate 10, a vertical vibration isolation module, a middle connecting plate 30, a horizontal vibration isolation module, and a lower connecting plate 50, connected in series vertically; wherein: The upper connecting plate 10 is used for mounting equipment or platforms; The vertical vibration isolation module includes multiple parallel guide rail type elastic vector vibration isolation mechanisms 20. Each guide rail type elastic vector vibration isolation mechanism 20 includes an upper block 21 on the upper connecting plate, a guide rail 27 on the middle connecting plate 30, a lower block 23 on the guide rail 27, a guide member 22 connecting the upper block 21 and the lower block 23, a slider 25 slidingly fitted on the guide rail 27, an elastic member 24 connecting the lower block 23 and the slider 25, and a diagonal brace 26 hinged between the upper block 21 and the slider 25. The upper block 21, guide member 22, and lower block 23 are on the same vertical axis. The guide member 22 constrains the vertical movement of the upper block 21. The diagonal brace 26, slider 25, and elastic member 24 are symmetrically distributed about the vertical axis. The elastic member 24 provides a linear damping force in the horizontal direction. (See...) Figure 1 and Figure 2 ; The horizontal seismic isolation module uses lead-core rubber bearings 40 and is installed between the middle connecting plate 30 and the lower connecting plate 50, see... Figure 1 ; The lower connecting plate 50 is used for installation on the foundation 200, see Figure 1 .

[0030] The following is the vertical micro-vibration isolation mechanism of this application: When vertical high-frequency micro-vibrations are transmitted upwards from the foundation, the vibration energy first reaches the vertical vibration isolation module through the lead-core rubber support 40 (which has minimal impact on the transmission of high-frequency vibrations) and the intermediate connecting plate 30. Figure 3 As shown, assume that the upper connecting plate 10 is subjected to a small downward displacement. δ Based on the force transmission geometry and static equilibrium analysis of the guide rail type elastic vector vibration isolation mechanism 20, this displacement δ This will force the two diagonal braces to tilt at an angle of 26. φ At the initial tilt angle φ 0 of A slight change occurs on the basis, causing the two sliders 25 to move away from each other along the guide rail 27. The distance that sliders 25 move is Δ. x This process achieves the conversion from vertical linear displacement to horizontal linear displacement. Based on the geometric relationships under the assumption of small deformation, it can be derived that: Δ x ≈tan φ · δ The movement of the two sliders 25 will exert a force on the elastic element 24, and the elastic element 24 will generate a restoring force. F ST = k s·Δx, where k s For the elastic stiffness of elastic element 24, this restoring force F ST Through the axial force of the diagonal brace 26 T The axial force transmitted to the upper connecting plate 10 and the single diagonal brace 26 T The vertical component of the force (i.e., the restoring force) is: F Y = F ST ·tan φ ≈ k s ·(tan φ ) 2 · δ The restoring force provided by a single guide rail type elastic vector vibration isolation mechanism 20 is F 单 =2· k s ·(tan φ ) 2 · δ The restoring force provided by the entire vertical vibration isolation module is F v =2· N · k s ·(tan φ ) 2 · δ ,in N The number of guide rail type elastic vector vibration isolation mechanisms 20 is given, and the equivalent vertical stiffness of support 100 near the equilibrium position is then derived. K v Approximately: K v =2· N · k s ·(tan φ ) 2 Therefore, we can conclude that: 1) The vertical stiffness of the support 100 is adjustable—by selecting different elastic stiffnesses of the elastic element 24. k s Choose 26 different initial inclination angles for the diagonal bracing. φ 0. By selecting the number of guide rail type elastic vector vibration isolation mechanisms 20, the required vertical stiffness can be designed flexibly and accurately. K v .

[0031] 2) This support can achieve the ideal characteristics of "large static stiffness and small dynamic stiffness"—the tan... φThe item is a key item, when the support 100 bears the static load of the equipment, a certain static displacement will occur δ s At this time, the inclination angle becomes φ s Because δ s is relatively large, tan φ s is a constant value, so the static stiffness K v,static =2· N · k s ·(tan φ s ) 2 is also large, and can stably support the equipment, when the high-frequency micro-vibration (dynamic displacement δ d is very small) is superimposed on the static displacement, its dynamic stiffness K v,dynamic =2· N · k s ·(tan φ s ) 2 Because the dynamic displacement δ d is extremely small, the change in inclination angle caused by it can be ignored, and the dynamic stiffness is approximately equal to the tangent stiffness near the static stiffness, therefore, by carefully designing the initial inclination angle φ 0 and the static displacement of the equipment after installation δ s , the system can work near the static equilibrium position, and its equivalent dynamic stiffness is lower than the static stiffness, or through geometric nonlinearity, the "softening" and "saturation" of stiffness is realized, Figure 4 The ideal nonlinear force-displacement (F-S) F - δ curve of the support 100.

[0032] 3) The support 100 can high-frequency vibration isolation - because the vertical vibration is converted to the horizontal expansion and contraction of the elastic element 24, the low natural frequency and internal damping of the elastic element 24 itself can be effectively utilized, and at the same time, the bending and swinging modes that may exist in traditional vertical elastic elements 24 are avoided, thereby realizing efficient isolation of high-frequency micro-vibration.

[0033] The horizontal seismic isolation mechanism of the present application is as follows: When horizontal seismic motion occurs, the low-frequency and large-displacement energy thereof mainly acts on the horizontal isolation module, and the lead rubber bearing 40 fully plays its advantages: 1) period extension - the flexible rubber layer of the lead rubber bearing 40 extends the whole horizontal natural vibration period from the traditional 0.1-0.3 s to more than 1.0 s, effectively avoiding the predominant period (0.2-0.5 s) of common earthquakes, thereby greatly reducing the seismic acceleration transmitted to the upper equipment; 2) energy dissipation - the lead core of the lead rubber bearing 40 enters plastic yield under horizontal shear deformation, and a large amount of seismic input energy is dissipated through the hysteresis cycle, thereby playing the role of a damper and further limiting the amplification of the response; 3) reset capability - the rubber elasticity of the lead rubber bearing 40 provides a restoring force, so that the bearing 100 can automatically reset after an earthquake; 4) functional independence - when horizontal seismic motion occurs, the vertical isolation module in the upper part moves horizontally as a whole mass together with the upper connecting plate 10, and since the guide rail-sliding block is free in the horizontal plane, it will not adversely affect the horizontal isolation performance, thereby achieving decoupling of functions, and the horizontal stiffness of the bearing 100 is determined by the mechanical parameters of the selected lead rubber bearing 40.

[0034] Therefore, the bearing 100 can realize physical integration and mechanical decoupling of vertical isolation and horizontal isolation, and has the following advantages: 1) high integration and space saving: the vertical isolation module and the horizontal isolation module are vertically integrated on one bearing 100, avoiding the cost, space and interface complexity caused by using two independent systems, greatly simplifying the engineering design, saving installation space and total cost.

[0035] 2) can effectively cope with high-frequency micro-vibration and low-frequency seismic motion: the integration of horizontal isolation and vertical isolation together is like a "multi-functional filter" that filters out high-frequency "clutter" and low-frequency "surge" from the ground for precision equipment, providing a truly full-spectrum, all-weather ultra-stable foundation; the guide rail type elastic vector isolation mechanism 20 converts the vertical linear displacement into the horizontal expansion of the elastic member 24, and realizes the ideal characteristics of "large static stiffness and small dynamic stiffness" through geometric nonlinearity, thereby efficiently isolating high-frequency micro-vibration, and the measured vertical acceleration transmission rate can be as low as 0.2 or less (i.e. the shock absorption rate is >80%); the laminated rubber inside the lead rubber bearing 40 provides horizontal flexibility, and the lead core provides energy dissipation damping, and the hysteresis damping characteristics thereof can dissipate seismic energy, realize horizontal long-period isolation, and the horizontal seismic acceleration response can be reduced by more than 85%; the bearing 100 can effectively cope with excitation in an extremely wide frequency band from 0.1 Hz (seismic frequency band) to more than 100 Hz (environmental micro-vibration frequency band), and ensure that the equipment can operate safely and accurately under normal and disaster conditions.

[0036] 3) Intrinsic decoupling and stability: The vertical vibration isolation module and the horizontal vibration isolation module are independent of each other and do not interfere with each other (i.e., "decoupling"), allowing engineers to precisely design and optimize the two directions separately; the guide rail type elastic vector vibration isolation mechanism 20 forms a vector triangle force transmission mechanism that converts vertical displacement into horizontal deformation of the elastic element 24, which has very high geometric stability.

[0037] 4) Engineering applicability: No external energy source is required, it works passively, has high reliability, and has very low maintenance requirements; by replacing elastic elements 24 of different stiffness or adjusting the angle of the inclined strut 26, it can adapt to different equipment and sites, and has strong versatility; it can be directly applied to new projects, and is also easy to upgrade and retrofit existing precision equipment platforms for seismic reinforcement and micro-vibration.

[0038] 5) Significant economic and social benefits: It can provide basic micro-vibration and seismic isolation protection for high-end industrial and scientific equipment that is sensitive to environmental vibration, such as photolithography machines, electron beam exposure machines, scanning electron microscopes, precision measuring instruments, and high-precision inertial navigation systems, protecting high-end precision equipment worth tens of millions or even hundreds of millions of yuan from vibration damage.

[0039] In this embodiment, preferably, the initial inclination angle of the inclined strut 26 in the guide rail type elastic vector vibration isolation mechanism 20 and the elastic stiffness of the elastic element 24 are adjusted to adjust the equivalent vertical stiffness of the support 100 near the equilibrium position φ 0 and the elastic stiffness of the elastic element 24 k s K v so that the vertical static stiffness of the support 100 is greater than the dynamic stiffness or exhibits a non-linear characteristic of stiffness softening, to achieve the unity of stable support and efficient vibration isolation.

[0040] In this embodiment, preferably, the horizontal equivalent stiffness of the lead rubber bearing 40 is designed to make the horizontal first-order natural period of the entire system greater than 1.0s.

[0041] In this embodiment, the number and distribution of the guide rail type elastic vector vibration isolation mechanisms 20 can be set as needed and are not limited, and three guide rail type elastic vector vibration isolation mechanisms 20 can be used in an equilateral triangle distribution, with the center of the equilateral triangle at the center of the upper connecting plate 10; or four guide rail type elastic vector vibration isolation mechanisms 20 can be used in a square distribution, with the center of the square at the center of the upper connecting plate 10.

[0042] In this embodiment, the elastic element 24 is one of a single disc spring, parallel disc springs, disc springs with parallel viscous dampers, a single coil spring, parallel coil springs, and coil springs with parallel viscous dampers, which can be selected according to specific elastic needs, and the parallel viscous damper scheme can control the resonance peak. ​

[0043] In the embodiment, preferably, as shown in Figure 1 and Figure 2 , the guide 22 comprises sleeves and slide bars that are fitted together, and the sleeves and slide bars are fixed on the lower block 21 and the upper block 23 respectively or vice versa.

[0044] In the embodiment, preferably, the diagonal brace 26 is connected between the upper block 21 and the slide block 25 by using self-lubricating joint bearings or self-lubricating pin shaft hinges, so as to ensure smooth force transmission and avoid introducing additional bending moments.

[0045] In the embodiment, preferably, the lead rubber bearing 40 is in a cylindrical shape, and the upper connecting plate 10, the middle connecting plate 30 and the lower connecting plate 50 are in a circular shape, so as to facilitate installation.

[0046] In the embodiment, preferably, as shown in Figure 1 and Figure 2 , the guide rail 27 is provided with a baffle plate 28 at both ends to prevent the slide block 25 from falling out, and the baffle plate 28 is made of rubber.

[0047] In the embodiment, the upper connecting plate 10 is provided with bolt holes for mounting equipment or platforms.

[0048] Embodiment 2 The embodiment discloses a design method of the vibration-decoupling type multi-dimensional micro-vibration isolation bearing 100 in the above embodiment 1, and adopts the following steps: S1) determining the vertical target isolation frequency of the equipment according to the equipment parameters, vibration criteria and site environment f v , the horizontal target isolation frequency f h and the required number of bearings 100 n ; The equipment parameters include the total mass, the center of gravity and the footing arrangement, the vibration criteria are the vibration standards required by the equipment manufacturer (such as VC-A, VC-B, etc.), and the site environment is the dominant frequency and amplitude determined according to the site environment vibration measurement report and the seismic fortification intensity of the building site; according to the vibration isolation theory, in order to achieve good vibration isolation effect, the vertical target frequency f v is lower than the dominant frequency of the environmental vibration (typically designed in the range of 12-20Hz for micro-vibration above 16Hz) f v ; in order to effectively isolate the vibration, the horizontal target frequency f h is much lower than the dominant frequency of the earthquake (typically designed in the range of 0.5-1.5Hz, i.e. the period is 0.67s-2.0s); for example Figure 5As shown, the support 100 ensures that the load on each support 100 is within a reasonable range according to the equipment base and load distribution.

[0049] S2) Calculate the target vertical stiffness required for a single support 100. K v and target horizontal stiffness K h ; Target vertical stiffness required for a single support 100 K v and target horizontal stiffness K h The formula for calculation is: K v = K v,total / n , K h = K h,total / n Among them, the total vertical stiffness required by the entire system K v,total =(2π f v ) 2 M, the total horizontal stiffness required for the entire system. K h,total =(2π f h ) 2 ·M.

[0050] S3) Based on the target vertical stiffness K v Determine the initial tilt angle of the diagonal brace 26 in the guide rail type elastic vector vibration isolation mechanism 20. φ Elastic stiffness of 0 and elastic element 24 k s According to the target horizontal stiffness K h Select lead-core rubber bearing model 40 with appropriate post-yield stiffness; Set the equivalent vertical stiffness of support 100 near the equilibrium position. K v Approximately K v =2· N · k s ·(tan φ ) 2 ,in, N The number of guide rail type elastic vector vibration isolation mechanisms 20 in a single support 100, φ The inclination angle of the diagonal brace is 26; first, select a suitable initial inclination angle. φ0, assuming the effect of vertical displacement of the pedestal 100 under static load on the inclination angle can be ignored, i.e., using the initial inclination angle φ 0 to calculate the equivalent vertical stiffness K v , the elastic stiffness of the elastic member 24 is obtained by back calculation k s ; then, the derived accurate force-displacement relationship is used to check the stiffness variation of the pedestal 100 within the expected static load and dynamic load range, and the initial inclination angle φ 0 and the elastic stiffness k s are adjusted to perform iterative optimization to find the optimal parameter combination, so as to ensure that the vertical static stiffness of the pedestal 100 is greater than the dynamic stiffness or presents a nonlinear characteristic of stiffness softening, so as to realize the unification of stable support and efficient vibration isolation.

[0051] S4) Integrate the vertical vibration isolation module and the horizontal vibration isolation module, and perform nonlinear mechanical performance checking.

[0052] Application example: ArF photolithography machine vibration isolation platform project in a thousand-level clean room of an IC manufacturing plant 1. Background Equipment: one ArF immersion photolithography machine, total equipment mass M = 15000 kg.

[0053] Vibration requirement: The equipment manufacturer requires that the vibration level of the support system must meet the VC-A level standard.

[0054] Seismic requirement: The seismic fortification intensity of the building site is 8 degrees (0.2 g), and the support system is required to effectively isolate the seismic action.

[0055] Site environment: According to the on-site measurement, the environmental vibration has obvious peaks at 20 Hz and 50 Hz, with an amplitude of about 1 μm.

[0056] 2. System target determination Vertical target frequency f v : To effectively isolate vibrations above 20 Hz, the vertical first-order frequency of the system is determined to be f v ≤ 15 Hz. In this example, it is set to f v = 12 Hz.

[0057] Horizontal target frequency f h : To effectively isolate earthquakes, the horizontal first-order frequency of the system is determined to be f h ≤ 1.0 Hz. In this example, it is set to f h=0.8Hz (period) T =1.25 s).

[0058] Support 100 quantity n Based on the equipment's base and load distribution, 16 supports of 100mm each are used for support.

[0059] 3. Support parameter design calculation 1) Calculation of total stiffness requirement: Vertical total stiffness K v,total =85.3MN / m, total horizontal stiffness K h,total =379kN / m.

[0060] 2) Target stiffness of 100 for a single support: Vertical stiffness of a single support with a target of 100 K v =5.33MN / m; Target horizontal stiffness of a single support (100mm) K h =23.7kN / m.

[0061] 3) Detailed design of vertical vibration isolation module: Select initial geometric parameters: Set the initial clear height of support 100 under no-load conditions. H 0=300mm, diagonal brace length 26 L =250mm, according to the initial design, initial inclination angle φ 0 = arcsin( H 0 / (2 L Here, we first assume that the calculation yields... φ 0 = 50°.

[0062] Calculate elastic stiffness k s Using formulas K v =2· N · k s ·(tan φ ) 2 .here φ The inclination angle under working conditions should be taken first, and the displacement under static load should be estimated. For a single support, the static load is 100 mm. F static =9187N, static displacement δ static = F static / K v =1.72mm, this displacement is very small, for φ The impact is negligible, therefore useφ 0 calculation, while, N Select 4 ， Then k s = 0.47 MN / m.

[0063] Elastic member 24 selection: select the rated stiffness of 0.47 MN / m precision coil spring, while, to increase the damping, can be filled with high damping silica gel or parallel small viscous damper inside the spring.

[0064] Part processing: guide rail 27 selected high precision guide rail, slider 25 for matching high rigidity slider, inclined strut 26 after forging 45 steel finishing, articulated point using self-lubricating joint bearing.

[0065] 4, horizontal isolation module selection According to the required horizontal yield stiffness 23.7 kN / m, consult the product manual of lead rubber bearing 40, select a LRB400 type bearing, the design pressure stress is 15 MPa, the yield stiffness is about 24 kN / m, the yield force is about 60 kN, which meets the requirements.

[0066] 5, integration, installation and debugging 1) bearing 100 assembly: in the factory, fix the LRB400 bearing on the lower connecting plate 50, fix the middle connecting plate 30 on the upper cover plate of the LRB bearing, then install the guide rail type elastic vector isolation mechanism 20, finally install the upper connecting plate 10, complete the assembly and preliminary performance test of all bearings 100.

[0067] 2) field installation: accurate line laying on the basis of lithography machine, determine the installation position of 16 bearings 100, use high-strength chemical anchor bolt to fix the lower connecting plate 50 of the bearing 100 on the reinforced building floor, use precision level to level the top surface of the upper connecting plate 10 of all bearings 100, the elevation error is controlled within ±0.5 mm.

[0068] 3) equipment in place: use professional handling equipment to hoist and install the lithography machine on the leveled bearing 100 group, and fix it.

[0069] 4) later support replacement (if applicable): when the basement structure in this area is completed, effective "fat groove back top" between the bottom plate and the lithography machine foundation is needed to realize smooth force transfer.

[0070] 6, effect verification After installation, micro-vibration test and finite element analysis are used to verify the vibration (seismic) effect of the bearing, the performance is simulated by SAP2000 and other finite element software and prototype test verification, the effect is remarkable.

[0071] The embodiments described above are only part of the embodiments of the present application, rather than all the embodiments. The detailed description of the embodiments of the present application is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the present application.

Claims

1. A vibration decoupling type multidimensional micro-vibration isolation support, characterized in that: The system comprises, from top to bottom, a vertically connected upper connecting plate, a vertical vibration isolation module, a middle connecting plate, a horizontal vibration isolation module, and a lower connecting plate, arranged in series. The upper connecting plate is used to mount equipment or a platform. The vertical vibration isolation module includes multiple parallel guide rail-type elastic vector vibration isolation mechanisms. Each guide rail-type elastic vector vibration isolation mechanism includes an upper block on the upper connecting plate, a guide rail on the middle connecting plate, a lower block on the guide rail, a guide member connecting the upper and lower blocks, a slider slidingly fitted on the guide rail, an elastic member connecting the lower block and the slider, and a diagonal brace hinged between the upper block and the slider. The upper block, guide member, and lower block are on the same vertical axis. The guide member is used to constrain the vertical movement of the upper block. The diagonal brace, slider, and elastic member are symmetrically distributed about the vertical axis. The elastic member is used to provide linear damping force in the horizontal direction. The horizontal vibration isolation module uses lead-core rubber supports and is installed between the middle connecting plate and the lower connecting plate. The lower connecting plate is used to mount the system on a foundation.

2. The vibration decoupling type multidimensional micro-vibration isolation support as described in claim 1, characterized in that: By adjusting the initial inclination angle of the diagonal brace in the guide rail type elastic vector vibration isolation mechanism φ 0 and the elastic stiffness of the elastic element k s To adjust the equivalent vertical stiffness of the support near the equilibrium position K v This allows the vertical static stiffness of the support to be greater than its dynamic stiffness or to exhibit nonlinear characteristics of stiffness softening, thereby achieving a balance between stable support and efficient vibration isolation.

3. The vibration decoupling type multidimensional micro-vibration isolation support as described in claim 1, characterized in that: The horizontal equivalent stiffness of the lead-core rubber bearing is designed to make the horizontal first-order natural period of the entire system greater than 1.0s.

4. The vibration decoupling type multidimensional micro-vibration isolation support as described in claim 1, characterized in that: Three guide rail type elastic vector vibration isolation mechanisms are arranged in an equilateral triangle, with the center of the equilateral triangle located at the center of the upper connecting plate; or, four guide rail type elastic vector vibration isolation mechanisms are arranged in a square, with the center of the square located at the center of the upper connecting plate.

5. The vibration decoupling type multidimensional micro-vibration isolation support as described in claim 1, characterized in that: The elastic element is one of the following: a single disc spring, parallel disc springs, a disc spring with a viscous damper in parallel, a single helical spring, parallel helical springs, or a helical spring with a viscous damper in parallel.

6. The vibration decoupling type multidimensional vibration isolation support as described in claim 1, characterized in that: The guide includes a sleeve and a slide rod that fit together, with the sleeve and slide rod fixed to the lower block and the upper block respectively, or vice versa.

7. The vibration decoupling type multidimensional micro-vibration isolation support as described in claim 1, characterized in that: The diagonal brace is hinged to the upper block and the slider using a self-lubricating spherical bearing or a self-lubricating pin.

8. A design method for a vibration decoupling type multidimensional micro-vibration isolation support, characterized in that: The structure of the vibration decoupling type multidimensional vibration isolation support is as described in any one of claims 1 to 7; firstly, the vertical target vibration isolation frequency of the equipment is determined according to the equipment parameters, vibration criteria, and site environment. f v Horizontal target isolation frequency f h and the required number of supports n Then, calculate the target vertical stiffness required for a single support. K v and target horizontal stiffness K h Then, based on the target vertical stiffness... K v Determine the initial inclination angle of the diagonal brace in the guide rail type elastic vector vibration isolation mechanism. φ 0 and the elastic stiffness of the elastic element k s According to the target horizontal stiffness K h Select the lead-core rubber bearing model with the appropriate post-yield stiffness; finally, integrate the vertical vibration isolation module and the horizontal vibration isolation module, and perform nonlinear mechanical performance verification.

9. The design method of the vibration decoupling type multidimensional micro-vibration isolation support as described in claim 8, characterized in that: Equipment parameters include total mass, center of gravity, and foot arrangement; vibration criteria are the vibration standards required by the equipment manufacturer; site environment parameters include the dominant frequency and amplitude determined based on the site environment vibration measurement report, and the seismic fortification intensity of the building location; according to vibration isolation theory, to achieve good vibration isolation effect, the vertical target frequency is... f v Below the dominant frequency of environmental vibration For effective seismic isolation, the horizontal target frequency... f h Far below the dominant earthquake frequency; The supports are designed according to the equipment base and load distribution to ensure that the load on each support is within a reasonable range.

10. The design method of the vibration decoupling type multidimensional micro-vibration isolation support as described in claim 8, characterized in that, Based on the target vertical stiffness K v Determine the initial inclination angle of the diagonal brace in the guide rail type elastic vector vibration isolation mechanism. φ 0 and the elastic stiffness of the elastic element k s The method is to set the equivalent vertical stiffness of the support near the equilibrium position. K v Approximately K v =2· N · k s ·(tan φ ) 2 ,in, N The number of guide rail type elastic vector vibration isolation mechanisms in a single support, φ The initial inclination angle of the brace; first, select a suitable initial inclination angle. φ 0. Assuming the vertical displacement of the support under static load after equipment installation has negligible effect on the tilt angle, i.e., using the initial tilt angle. φ 0. Calculate the equivalent vertical stiffness K v The elastic stiffness of the elastic element can be calculated by reverse calculation. k s Then, the stiffness variation of the support within the expected static and dynamic load range is checked using the derived precise force-displacement relationship, by adjusting the initial inclination angle. φ 0 and elastic stiffness k s Iterative optimization is performed to find the optimal parameter combination, ensuring that the vertical static stiffness of the support is greater than the dynamic stiffness or exhibits nonlinear characteristics of stiffness softening, so as to achieve the unity of stable support and efficient vibration isolation.

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