Cabin door locking device and reaction cavity comprising same

Abstract

The invention discloses a cabin door locking device and a reaction cavity comprising the same. According to the cabin door locking device, a lifting rod is connected with a cabin cover so as to drive the cabin cover to move; the connecting rod force application end main body is connected with the lifting rod and is driven by the lifting rod to move; a first spherical joint and a second spherical joint are respectively arranged at the first end and the second end of the force application connecting rod; the first spherical joint is connected with the connecting rod force application end main body to form a spherical pair; the locking ring is connected with the second spherical joint to form a spherical pair, the lifting rod moves to drive the force application connecting rod to move, and then the locking ring is driven to move to lock the cabin door; the lifting rod moves to drive the force application connecting rod to move, and then the relative position relation between a spherical pair formed by the first spherical joint and a spherical pair formed by the second spherical joint is changed, so that the locking ring is self-locked. According to the cabin door locking device and the reaction cavity comprising the cabin door locking device, locking and self-locking of the cabin door can be achieved through a single driving mode.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a hatch locking device and a reaction chamber comprising the same. BACKGROUND

[0002] At present, in the semiconductor manufacturing, the wafer needs to pass through the process flow composed of several hundred processes to be made into the final product. In the specific manufacturing process, the required processes are completed under the cooperation of different chambers (such as reaction chambers, cleaning chambers, etc.).

[0003] In the prior art, different production environment requirements exist for different chambers, but there is usually a requirement for sealing. In the case of positive pressure inside the reaction chamber, a locking mechanism is needed after the hatch is closed to ensure that the reaction chamber does not release pressure during the working process. At present, various hatch mechanisms adopt independent locking mechanisms, that is, one power source (motor or hydraulic mechanism) drives the hatch to close to the reaction chamber and to open away from the reaction chamber; another or multiple power sources complete the locking of the hatch; to prevent the hatch from being abnormally opened during the working process, a mechanism is also needed to realize the locking of the hatch. The existing hatch locking device has a complex structure and needs the cooperation of multiple power sources, and the driving mode is complex.

[0004] Therefore, it is hoped that there is a new hatch locking device and a reaction chamber comprising the same, which can overcome at least one of the above problems. SUMMARY

[0005] In view of the above problems, the purpose of the present application is to provide a hatch locking device and a reaction chamber comprising the same, in particular a single-drive hatch lifting and locking and self-locking mechanism (D-LOK), so as to simplify the structure and realize the locking and self-locking of the hatch through a single driving mode.

[0006] According to an aspect of the present application, a hatch locking device is provided, comprising:

[0007] a lifting rod connected with a hatch cover to drive the movement of the hatch cover;

[0008] a connecting rod force applying end body connected with the lifting rod and moving under the driving of the lifting rod;

[0009] a force applying connecting rod, a first spherical joint and a second spherical joint being connected to the first end and the second end of the force applying connecting rod respectively, the first spherical joint being connected with the connecting rod force applying end body and forming a spherical pair; and

[0010] a locking ring connected with the second spherical joint and forming a spherical pair,

[0011] The lifting rod moves to drive the force applying link to move, and then drive the locking ring to move to realize the locking of the hatch door.

[0012] The lifting rod moves to drive the force applying link to move, and then change the relative position relationship of the spherical pair formed by the first spherical joint and the spherical pair formed by the second spherical joint to make the locking ring self-lock.

[0013] Optionally, the lifting rod moves along a first straight line; the locking ring rotates in a first plane during the locking; the first straight line intersects with the first plane;

[0014] When the line connecting the spherical pair formed by the first spherical joint and the spherical pair formed by the second spherical joint is parallel to the first plane, the locking ring locks the hatch door.

[0015] When the distance between the spherical pair formed by the first spherical joint and the first plane is less than the distance between the spherical pair formed by the second spherical joint and the first plane, the locking ring self-locks.

[0016] Optionally, the locking ring is connected with the hatch cover;

[0017] The lifting rod moves in a first direction to drive the force applying end body of the link to drive the force applying link to move, so as to rotate the locking ring to a first limit position, and the hatch door is in an unlocked state; the lifting rod drives the hatch door to move in the first direction to open the hatch door;

[0018] The lifting rod moves in the opposite direction of the first direction to drive the hatch cover to move, so as to close the hatch door; during the closing of the hatch door, the locking ring is in an unlocked state;

[0019] After the closing of the hatch door, the lifting rod continues to move in the opposite direction of the first direction to make the line connecting the spherical pair formed by the first spherical joint and the spherical pair formed by the second spherical joint parallel to the first plane, so as to lock the hatch door through the locking ring.

[0020] Optionally, the locking ring is connected with the hatch cover through a cam follower, and cooperates with the cam follower to lock the hatch cover;

[0021] There is only a rotation degree of freedom around the axis of the hatch cover between the locking ring and the hatch cover.

[0022] Optionally, the cam follower comprises a locking part, and the locking ring is locked through the locking part;

[0023] The locking part comprises a sine curve profile.

[0024] Optionally, the force applying link is located on the outer surface of the hatch cover; and the cam follower is located on the inner surface of the hatch cover.

[0025] Optionally, the force applying end of the link is provided with a mounting hole and two limiting through holes;

[0026] The lifting rod is mounted in the mounting hole;

[0027] The two limiting through holes are respectively arranged on the two sides of the mounting hole; the hatch cover is provided with two limiting posts, and the two limiting through holes respectively pass through the two limiting posts;

[0028] The lifting rod drives the force applying end of the link to move along the limiting post.

[0029] Optionally, the hatch locking device further comprises:

[0030] A limiting top plate is fixedly connected with the first end of the limiting post, and the second end of the limiting post is connected with the hatch cover; the limiting top plate and the hatch cover limit the movement range of the force applying end of the link.

[0031] Optionally, the hatch locking device further comprises:

[0032] A driving device is connected with the lifting rod to drive the lifting rod to move,

[0033] The driving device comprises at least one selected from an electric motor, a hydraulic driving device and a pneumatic driving device.

[0034] According to another aspect of the present application, a reaction chamber is provided, comprising:

[0035] The hatch locking device as described above.

[0036] The hatch locking device and the reaction chamber comprising the same provided by the present application realize the locking and self-locking of the hatch through a single driving mode while simplifying the structure through the cooperation of the lifting rod, the force applying end of the link, the force applying link, the locking ring and the spherical joint.

[0037] Further, the cam follower (cam mechanism) is used to lock the hatch, the locking force is large, and the locking effect of the hatch is ensured.

[0038] Further, the cam follower adopts a sinusoidal cam profile curve, the locking impact force is small, the impact damage and deformation are reduced, the service life of the equipment is prolonged, and high precision and stability are ensured.

[0039] Furthermore, through mechanical linkage design, the linear motion of the lifting rod is converted into the rotational motion of the locking ring, and the switching between locking and self-locking states is achieved by utilizing the relative position change of the spherical pairs at both ends of the force-applying link. This is suitable for the sealing requirements of reaction chambers with internal positive pressure conditions.

[0040] Furthermore, through the linkage design of the cam follower and the locking ring, combined with the multi-position motion characteristics of the force-applying linkage, the linear motion of the lifting rod can synchronously trigger the rotational displacement of the locking ring, thereby achieving hierarchical control of the hatch status at different positions; suitable for reaction chamber systems with internal positive pressure conditions, and can effectively prevent sealing failure caused by abnormal opening of the hatch during operation.

[0041] Furthermore, the opening and closing of the hatch, the locking of the hatch, and the self-locking function of the hatch can all be completed with a single power source; the device has a compact structure, requires no additional power components, and significantly reduces system complexity and maintenance costs. Attached Figure Description

[0042] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0043] Figures 1 to 8 A schematic diagram of the structure of the hatch locking device according to an embodiment of the present invention is shown;

[0044] Figure 9 A schematic diagram showing the state of the hatch door opening of the hatch door locking device according to an embodiment of the present invention is shown;

[0045] Figure 10 and Figure 11 A schematic diagram showing the unlocked state of the hatch door locking device according to an embodiment of the present invention is shown;

[0046] Figure 12 and Figure 13 A schematic diagram showing the locking state of the hatch locking device according to an embodiment of the present invention is provided.

[0047] Figure 14 and Figure 15 A schematic diagram of the hatch door unlocking state of the hatch door locking device according to an embodiment of the present invention is shown. Attached image description:

[0049] The hatch cover 1, the reaction cavity 2, the lifting rod 3, the locking ring 4, the cam follower 5, the locking ring bearing 6, the sealing rubber ring 7, the hatch cover rotation-stopping pin 8, the connecting rod force applying end main body 9, the main body compression ring 10, the force applying connecting rod 11, the rotation-stopping flat key 12, the lifting support ring 13, the lifting and limiting lifting rod 14, the lifting and limiting bridge plate 15, the upper spherical joint gland 16, the lower spherical joint gland 17, the lifting driving unit 18, the first specification inner hexagonal bolt 19, the second specification inner hexagonal bolt 20, the third specification inner hexagonal bolt 21, the fourth specification inner hexagonal bolt 22, and the fifth specification inner hexagonal bolt 23. DETAILED DESCRIPTION

[0050] Various embodiments of the present application will be described in greater detail below, with reference to the accompanying drawings. In the various drawings, like elements are designated with like reference numerals. Each part in the drawings is not drawn to scale for the sake of clarity. Also, some parts that are well known can not be shown in the drawings.

[0051] The specific embodiments of the present application will now be described in further detail below with reference to the accompanying drawings and embodiments. Many specific details of the application are described below in order to provide a thorough understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented without using these specific details.

[0052] It is to be understood that when a layer, one region is referred to as being "on" or "above" another layer, another region, it can be directly on or above the other layer, the other region or one or more intervening layers or regions can also be present. Also, if the layer, the region is flipped, it will be "under" or "below" the other layer, the other region.

[0053] To solve the above problems, the inventors propose a new hatch locking device. The hatch locking device according to an embodiment of the present application comprises a lifting rod, a connecting rod force applying end main body, a force applying connecting rod, and a locking ring.

[0054] Specifically, the lifting rod is connected with the hatch cover to drive the movement of the hatch cover. Optionally, the hatch locking device further comprises a driving device. The driving device is connected with the lifting rod to drive the movement of the lifting rod, and the driving device comprises at least one selected from an electric motor, a hydraulic driving device, and a pneumatic driving device.

[0055] The connecting rod force applying end main body is connected with the lifting rod and moves under the driving of the lifting rod.

[0056] The first end and the second end of the force applying link are respectively connected with a first spherical joint and a second spherical joint, and the first spherical joint is connected with the force applying end body and forms a spherical pair. Optionally, the spherical pair (also referred to as a spherical hinge or a spherical pair) in the present application allows three independent rotational degrees of freedom (a pair without any translational degree of freedom) between two components.

[0057] The locking ring is connected with the second spherical joint and forms a spherical pair. Optionally, the locking ring is circular, the locking ring is arranged on the hatch cover, and the outer diameter of the locking ring is smaller than the inner diameter of the hatch cover.

[0058] The lifting rod moves to drive the force applying link to move, and then drives the locking ring to move to lock the hatch door; the lifting rod moves to drive the force applying link to move, and then changes the relative position relationship of the spherical pair formed by the first spherical joint and the spherical pair formed by the second spherical joint to enable the locking ring to be self-locked. Optionally, the self-locking in the present application refers to the phenomenon that the locking ring cannot move reversely or move by itself when the locking ring is subjected to force or torque (i.e. load) from the output end, even if the driving force is removed.

[0059] In the optional embodiment of the present application, the lifting rod moves along a first straight line. The locking ring rotates in a first plane during the locking process. The first straight line intersects the first plane.

[0060] When the connecting line of the spherical pair formed by the first spherical joint and the spherical pair formed by the second spherical joint is parallel to the first plane, the locking ring locks the hatch door.

[0061] When the distance between the spherical pair formed by the first spherical joint and the first plane is smaller than the distance between the spherical pair formed by the second spherical joint and the first plane, the locking ring is self-locked.

[0062] Optionally, the locking ring is connected with the hatch cover. The lifting rod moves in a first direction to drive the force applying link to move, so as to rotate the locking ring to a first limit position, at which time the hatch door is in an unlocked state, and the lifting rod drives the hatch door to move in the first direction to open the hatch door.

[0063] The lifting rod moves in the opposite direction of the first direction to drive the hatch cover to move, so as to close the hatch door. During the process of closing the hatch door, the locking ring is in an unlocked state.

[0064] After the hatch door is closed, the lifting rod continues to move in the opposite direction of the first direction, so that the connecting line of the spherical pair formed by the first spherical joint and the spherical pair formed by the second spherical joint is parallel to the first plane, thereby locking the hatch door through the locking ring.

[0065] In an optional embodiment of the present application, the locking ring is connected to the hatch cover through a cam follower, and cooperates with the cam follower to lock the hatch cover. There is only a rotational freedom between the locking ring and the hatch cover about the hatch cover axis. Optionally, there are a plurality of cam followers, which are arranged in an array (with reference to the hatch cover / locking ring).

[0066] Optionally, the cam follower comprises a locking portion through which the locking ring is locked. The locking portion comprises a sinusoidal curve profile.

[0067] Optionally, the force applying link is located on the outer surface of the hatch cover. The cam follower is located on the inner surface of the hatch cover.

[0068] In an optional embodiment of the present application, the force applying end body of the link is provided with a mounting hole and two limiting through holes. The lifting rod is mounted in the mounting hole. The two limiting through holes are respectively arranged on the two sides of the mounting hole, and the hatch cover is provided with two limiting columns, and the two limiting through holes respectively pass through the two limiting columns. The lifting rod drives the force applying end body of the link to move along the limiting columns.

[0069] Optionally, the hatch door locking device further comprises a limiting top plate. The limiting top plate is fixedly connected with the first end of the limiting column, and the second end of the limiting column is connected with the hatch cover. The limiting top plate and the hatch cover limit the movement range of the force applying end body of the link.

[0070] Figures 1 to 8 The structure schematic diagram of the hatch door locking device according to the embodiment of the present application is shown. Specifically, Figures 1 to 8 The hatch door locking device at different angles, cross-sectional view, parts drawing, etc. are respectively shown.

[0071] The hatch door locking device comprises a hatch cover (hatch door) 1, a lifting rod 3, a locking ring 4, a cam follower 5 and a locking ring bearing 6. The hatch cover 1 is used for sealing the reaction chamber (cavity) 2. The locking ring 4 is constrained by the cam follower 5 and the locking ring bearing 6, so that there is only one rotational freedom between the locking ring 4 and the hatch cover 1 about the hatch cover axis.

[0072] The central part of the force applying end body 9 of the link is connected with the lifting rod 3, and the freedom between the force applying end body 9 of the link and the lifting rod 3 is 0 through the part body compression ring 10, the rotation stopping flat key 12 and the lifting support ring 13. The two ends of the force applying end body 9 of the link can move up and down on the lifting and limiting lifting rod (limiting column) 14, and are upwardly limited to the lifting and limiting bridge plate (limiting top plate) 15 and downwardly limited to the locking ring 4.

[0073] The two ends of the force applying link 11 are spherical, and respectively form a spherical pair with the force applying end body 9 of the link and the locking ring 4.

[0074] The cabin door locking device described in the present application, the core structure includes a lifting rod 3, a connecting rod force end body 9, a force connecting rod 11 and a locking ring 4. The lifting rod 3 is fixedly connected with the cabin cover 1, and is used to drive the cabin cover 1 to reciprocate along a first straight line direction. The connecting rod force end body 9 is rigidly connected with the lifting rod 3 through a mounting hole, and a limiting through hole on both sides thereof cooperates with a limiting column on the cabin cover 1 to form a guide constraint. The force connecting rod 11 is provided with a first spherical joint and a second spherical joint at two ends respectively, the first spherical joint forms a spherical pair with the connecting rod force end body 9, and the second spherical joint is connected with the locking ring 4 and forms another spherical pair. The locking ring 4 is linked with the cabin cover 1 through a cam follower 5, and the movement thereof is limited to only being able to rotate around an axis of the cabin cover 1. When the lifting rod 3 drives the connecting rod force end body 9 to move up and down, a change in the position and posture of the force connecting rod 11 will trigger the locking ring 4 to switch between a non-locking state, a locking state and a self-locking state.

[0075] In the locking function implementation, the cooperation of the locking ring 4 and the cam follower 5 is particularly crucial. The cam follower 5 includes a locking part, and a sine curve is designed for the contour of the locking part, so that the locking ring 4 is uniformly stressed in the contact process, and impact is avoided. When the lifting rod 3 moves downward to a cabin door closing position, the connecting rod force end body 9 continues to move downward, forcing the force connecting rod 11 to change from an inclined state to a horizontal state, at this time, the spherical pair connecting lines of the first spherical joint and the second spherical joint are parallel to the rotation plane of the locking ring 4, and the locking ring 4 completes mechanical locking of the cabin door through the locking part of the cam follower 5. When further moving downward, the force connecting rod 11 enters the inclined state, and the spherical pair of the first spherical joint is lower than the spherical pair of the second spherical joint (see Figure 14 ), and the locking ring 4 enters a self-locking position under the gravity and mechanical constraint, forming irreversible mechanical self-locking.

[0076] The self-locking characteristic of the cabin door locking device according to the embodiment of the present application is realized through the cooperation of the inclined position and posture of the force connecting rod 11 and the movement constraint of the locking ring bearing 6. When the locking ring 4 is in the self-locking state, the rotation freedom degree between the locking ring 4 and the cabin cover 1 is mechanically locked, and even if the external power source fails, the cabin door can still maintain the closed state. The limiting structure formed by the limiting top plate and the limiting column further limits the movement range of the connecting rod force end body, and ensures that the mechanism can work reliably within a preset stroke. The driving device can be selected from an electric motor, a hydraulic driving device or a pneumatic driving device, and provides power for the lifting rod, so as to adapt to different working condition requirements.

[0077] Figure 9 A state diagram of a cabin door opening state of the cabin door locking device according to the embodiment of the present application is shown. The labels of various parts in the diagram can refer to the labels in Figures 1 to 8 .

[0078] As Figure 9As shown, in the cabin door opening state, the force end body 9 of the connecting rod is in the upper position, at this time the lifting rod 3 moves upward and drives the force end body 9 of the connecting rod to move upward along the limiting column. The connecting line of the spherical pair formed by the first spherical joint and the second spherical joint of the force connecting rod 11 is in an inclined state, the locking ring 4 is rotated around the axis of the hatch cover 1 to the clockwise limit position under the traction of the force connecting rod 11, at this time the locking ring 4 and the hatch cover 1 are in a non-locking state through the locking part of the cam follower 5. The sine curve profile of the cam follower 5 is separated from the locking ring 4, so that the cabin door can be freely opened; at the same time, the inclined position of the force connecting rod 11 and the constraint cooperation of the locking ring bearing 6 form the release condition of mechanical self-locking, which ensures that there is no locking resistance in the opening process of the cabin door (the hatch cover 1). The cooperation of the limiting top plate and the limiting column limits the upward range of the force end body 9 of the connecting rod, preventing damage to the mechanism caused by overtravel.

[0079] Figure 10 and Figure 11 A state diagram of a cabin door unlocking state of the cabin door locking device according to an embodiment of the application is shown. The annotations of the parts in the diagram can refer to the annotations of the parts in Figures 1 to 8 .

[0080] In combination with Figure 10 and Figure 11 , in the cabin door unlocking state, the lifting rod 3 moves downward to drive the hatch cover 1 to close the cabin door, at this time the force end body 9 of the connecting rod is still in the upper position, its limiting through hole moves along the limiting column in a guided manner, but the locking function has not been triggered (i.e. the unlocking state). The connecting line of the spherical pair formed by the first spherical joint and the second spherical joint of the force connecting rod 11 is in an inclined state, and the height of the first spherical joint from the first plane where the hatch cover 1 is located is greater than the height of the second spherical joint from the first plane where the hatch cover 1 is located, the locking ring 4 keeps separated from the locking part of the cam follower 5 under the traction of the force connecting rod 11, the sine curve profile of the cam follower 5 is not in close contact with the locking ring 4, the locking ring 4 and the hatch cover 1 only keep the degree of freedom of rotation around the axis, and the cabin door is in a non-locking state that can be freely opened. In this state, the distance between the limiting top plate and the force end body 9 of the connecting rod does not reach the limiting constraint condition, the mechanism does not form mechanical self-locking, and it is ensured that the cabin door can still be quickly opened through the reverse movement of the lifting rod 3 after being closed.

[0081] Figure 12 and Figure 13 A state diagram of a locking state of the cabin door locking device according to an embodiment of the application is shown. The annotations of the parts in the diagram can refer to the annotations of the parts in Figures 1 to 8 .

[0082] In combination with Figure 12 and Figure 13As shown, in the cabin door locking state, the lifting rod 3 moves downward to close the cabin door, and when the force applying end body 9 of the connecting rod makes the force applying connecting rod 11 in a horizontal state, the locking ring 4 is in a locking state, i.e., a locked state. Specifically, the lifting rod 3 moves in the opposite direction (i.e., downward) to a predetermined position, at which time the force applying end body 9 of the connecting rod has descended from the upper position to the locking position, and the limiting through hole slides along the limiting column and is out of the constraint range of the limiting top plate. The force applying connecting rod 11 is driven by the force applying end body 9 of the connecting rod to change from an inclined state to a horizontal state, and the spherical surface pair formed by the first spherical joint and the second spherical joint is parallel to the rotation plane (i.e., the first plane) of the locking ring 4, and the locking ring 4 rotates around the cabin cover 1 axis to the locking position by the traction of the second spherical joint, and forms mechanical engagement with the locking part of the cam follower 5 on the inner surface of the cabin cover. The sine curve profile of the cam follower 5 completely fits the meshing surface of the locking ring 4 in this process, and the smooth transmission of the locking force is realized by the zero impact characteristics of the profile curve. At this time, the rotational freedom between the locking ring 4 and the cabin cover 1 is limited by the locking part of the cam follower 5, and the cabin door is mechanically locked, and the sealing performance reaches the maximum value required by the design.

[0083] Figure 14 and Figure 15 A state diagram showing the cabin door unlocking state of the cabin door locking device according to an embodiment of the application is shown. The annotations of the parts in the figure can be referred to the annotations of the parts in the Figures 1 to 8 .

[0084] In combination with Figure 14 and Figure 15As shown, in the self-locking state, the lifting rod 3 moves downward to close the hatch, the linkage force applying end body 9 is in the lower position, the force applying linkage 11 is in the inclined state, and the force applying end ball joint is lower than the locking ring end ball joint. The locking ring 4 is in the self-locking state, i.e., the self-locking state. Specifically, the lifting rod 3 continues to move in the opposite direction of the first direction (downward) to the lower limit position, and the linkage force applying end body 9 moves downward to the lower position, and the limit through hole cooperates with the limit column to reach the stroke end point. At this time, the spherical pair formed by the first spherical joint and the second spherical joint of the force applying linkage 11 is in an inclined state, and the height of the first spherical joint from the first plane where the hatch 1 is located is less than the height of the second spherical joint from the first plane where the hatch 1 is located, and the force applying linkage 11 is further converted from the horizontal state to the stable self-locking position with an inclination angle greater than zero. The locking ring 4 rotates around the hatch 1 axis to the self-locking position under the traction of the force applying linkage 11, and fully engages with the locking part of the cam follower 5. The curvature characteristics of the sine curve profile and the movement trajectory of the locking ring 4 form a reverse constraint, so that the locking ring 4 cannot rotate reversely under external disturbance. At the same time, the inclined state of the force applying linkage 11 and the movement constraint of the locking ring bearing 6 constitute a mechanical self-locking condition. Even if the driving device is powered off or power fails, the locking ring 4 still maintains the locking state through gravity and geometric constraint, ensuring that the hatch will not be accidentally opened under internal positive pressure working condition. The limit top plate contacts the lower surface of the linkage force applying end body 9, limiting its downward range and preventing overstroke.

[0085] According to another aspect of the present application, a reaction chamber is provided. The reaction chamber is applied to the manufacture of semiconductors. The reaction chamber comprises the hatch locking device as described above. In the open state of the hatch locking device, materials enter or exit the chamber through the hatch seat. In the locked state of the hatch locking device, the reaction chamber is sealed.

[0086] It should be noted that, in the present document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without limitation, an element preceded by "comprises... a" does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus.

[0087] In accordance with the practices of the present invention, these embodiments have been described in relation to the above-described embodiments, which are intended to be illustrative only and not restrictive of the invention. Obviously, many modifications and variations of this invention can be effected without departing from the scope of the novel concept of the disclosure. No limitation with respect to the specific implementation techniques and applications presented thereby should be inferred into the scope of the invention, as understood by those skilled in the art. The specification and drawings should be regarded as illustrative only and in no way limiting of the scope of the invention as defined by the appended claims and equivalents thereof.

Claims

1. A hatch locking device, comprising: A lifting boom, which is connected to the hatch to drive the movement of the hatch; The connecting rod force-applying end body is connected to the lifting rod and moves under the drive of the lifting rod; A force-applying link, wherein a first ball joint and a second ball joint are respectively connected to the first end and the second end of the force-applying link, and the first ball joint is connected to the main body of the force-applying end of the link to form a spherical pair; as well as A locking ring, which is connected to the second ball joint to form a spherical joint. The lifting rod moves to drive the force-applying connecting rod to move, which in turn drives the locking ring to move to lock the hatch. The lifting rod moves to drive the force-applying connecting rod to move, thereby changing the relative positional relationship between the spherical joint formed by the first ball joint and the spherical joint formed by the second ball joint so that the locking ring self-locks.

2. The hatch locking device according to claim 1, wherein, The lifting rod moves along a first straight line; the locking ring rotates within a first plane during the locking process; the first straight line intersects with the first plane; When the line connecting the spherical joint formed by the first ball joint and the spherical joint formed by the second ball joint is parallel to the first plane, the locking ring locks the hatch. When the distance between the spherical joint formed by the first ball joint and the first plane is less than the distance between the spherical joint formed by the second ball joint and the first plane, the locking ring self-locks.

3. The hatch locking device according to claim 2, wherein, The locking ring is connected to the hatch cover; The lifting rod moves along the first direction to drive the main body of the connecting rod force application end to move the force application connecting rod, thereby rotating the locking ring to the first limit position, and the hatch is in an unlocked state; the lifting rod drives the hatch to move along the first direction to open the hatch; The lifting rod moves in the opposite direction to the first direction to move the hatch cover and close the hatch door; during the closing of the hatch door, the locking ring is in an unlocked state. After the hatch is closed, the lifting rod continues to move in the opposite direction of the first direction so that the line connecting the spherical joint formed by the first ball joint and the spherical joint formed by the second ball joint is parallel to the first plane, thereby locking the hatch by the locking ring.

4. The hatch locking device according to claim 1, wherein, The locking ring is connected to the hatch via a cam follower and cooperates with the cam follower to lock the hatch. The locking ring and the hatch have only one degree of freedom of rotation about the hatch axis.

5. The hatch locking device according to claim 4, wherein, The cam follower includes a locking part, and the locking ring is locked through the locking part; The locking part includes a sinusoidal curve profile.

6. The hatch locking device according to claim 4, wherein, The force-applying connecting rod is located on the outer surface of the hatch; the cam follower is located on the inner surface of the hatch.

7. The hatch locking device according to claim 1, wherein, The main body of the connecting rod force-applying end is provided with a mounting hole and two limiting through holes; The lifting rod is installed in the mounting hole; The two limiting through holes are respectively provided on both sides of the mounting hole; the hatch is provided with two limiting posts, and the two limiting through holes pass through the two limiting posts respectively; The lifting rod drives the main body of the connecting rod force application end to move along the limiting post.

8. The hatch locking device according to claim 7, wherein, The hatch locking device also includes: A limiting top plate is fixedly connected to the first end of the limiting post, and the second end of the limiting post is connected to the hatch cover; the limiting top plate and the hatch cover restrict the movement range of the main body of the connecting rod force application end.

9. The hatch locking device according to claim 1, wherein, The hatch locking device also includes: A drive unit, connected to the lifting rod to drive the lifting rod to move. The driving device includes at least one selected from electric motors, hydraulic drive devices, and pneumatic drive devices.

10. A reaction chamber, comprising: The hatch locking device as described in any one of claims 1-9.

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