Miniature servo valve with magnetorheological fluid as intelligent fluid

Abstract

The invention discloses a micro servo valve with magnetorheological fluid as intelligent fluid, and belongs to the technical field of magnetorheological fluid control. The micro servo valve comprises a valve body and a magnet exciting coil. A damping flow channel allowing magnetorheological fluid to flow through is formed in the valve body. The magnet exciting coil is arranged on the outer side of the valve body and generates a magnetic field acting on the damping flow channel through electrification. The magnetic field enables the viscosity of the magnetorheological fluid flowing through the damping flow channel to be controllably changed, so that the output impedance pressure of the servo valve is directly and steplessly regulated and controlled, and the functions of dynamic pressure regulation and rapid switching are achieved. By adopting a pure electromagnetic-fluid action principle without a mechanical moving part and cooperating with the design of the multi-layer annularly stacked damping flow channels in the valve body and the micro texture on the inner wall of the valve body, the valve has the advantages of being compact in structure, high in response speed, high in control precision, good in reliability and high in energy efficiency; and the system is particularly suitable for a micro hydraulic servo system with high requirements on dynamic performance, integration level and reliability.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of magnetorheological fluid control, and particularly relates to a micro servo valve taking magnetorheological fluid as intelligent fluid. BACKGROUND

[0002] As an advanced intelligent driving and control strategy, the theoretical basis of magnetorheological technology lies in the field-induced rheological effect of magnetorheological fluid. The physical nature of this effect is that under the excitation of an external magnetic field, the magnetic particles suspended in the base fluid will polarize and recombine in a chain within milliseconds, thereby causing a controllable and reversible change in the overall macroscopic constitutive relationship of the fluid. Specifically, its shear yield stress is significantly functionally related to the magnetic field strength, which makes it possible to dynamically modulate the flow impedance of the system with high precision. In view of the above mechanism, the magnetorheological valve as the core executive element of this technology can realize the linear and precise setting of the fluid passage resistance by regulating the excitation parameters. Therefore, in the engineering scenarios such as intelligent damping systems and high-precision servo hydraulic devices that require high-frequency dynamic response and precise flow control, the magnetorheological valve exhibits outstanding performance and great application potential that traditional valves do not have.

[0003] The fundamental limitation of traditional magnetorheological valves relying on mechanical movement is that advanced intelligent materials are confined within the traditional mechanical structure framework. Although it utilizes the magnetorheological effect, it still ultimately needs a set of heavy, slow, and easily damaged mechanical systems to perform control functions, which makes it impossible to fully exploit the inherent potential of magnetorheological technology for speed, accuracy, and reliability. Specifically, the following technical problems exist:

[0004] 1. Dynamic performance limitation: The magnetic field establishment speed and the inertia of the mechanical movement of the valve core are coupled with each other. The mass, friction, and inertia of the mechanical components delay the response speed, making it difficult for the system to achieve millisecond-level or even faster ultra-high-precision dynamic control, which limits its application in scenarios requiring fast response (such as active suspension and precision actuators).

[0005] 2. Structure and cost limitation: To achieve the movement and reset of the valve core, numerous mechanical parts such as the valve core, valve sleeve, reset spring, and sealing elements need to be precisely designed and processed, resulting in an exceptionally complex overall structure, high processing precision requirements, and great assembly difficulty, which makes the manufacturing and maintenance costs high.

[0006] 3. Energy efficiency and control limitation: The increased magnetic gap to accommodate the moving parts significantly increases the magnetic resistance of the magnetic circuit, resulting in a decrease in magnetic energy utilization. In order to achieve the required control force, a larger excitation current is often needed, which not only increases energy consumption but also makes the linear relationship between the magnetic field and the control current worse, making it difficult to optimize control accuracy and energy efficiency.

[0007] Therefore, it is urgent to develop a new type of magneto-rheological servo valve which can break through the dependence on mechanical moving parts and directly control the fluid state by using magnetic field, so as to achieve a fundamental breakthrough in structure, response speed, energy efficiency and control accuracy. SUMMARY

[0008] The present application aims to provide a micro servo valve using magneto-rheological fluid as intelligent fluid to solve the problems existing in the prior art.

[0009] To achieve the above-mentioned purpose, the present application provides a micro servo valve using magneto-rheological fluid as intelligent fluid, comprising a valve body and a magnetic coil; the valve body is internally provided with a damping flow channel for the magneto-rheological fluid to flow through; the magnetic coil is arranged on the outside of the valve body.

[0010] By energizing the magnetic coil to generate a magnetic field acting on the damping flow channel, the viscosity of the magneto-rheological fluid flowing through the damping flow channel is changed, so as to directly control the impedance pressure generated by the micro servo valve, and realize the dynamic pressure regulation and rapid switching function without mechanical moving parts.

[0011] Preferably, the valve body comprises:

[0012] a liquid inlet end arranged at the top of the valve body for introducing the magneto-rheological fluid;

[0013] a damping flow channel housing axially fixed with the liquid inlet end, the inside of the damping flow channel housing being provided with the damping flow channel;

[0014] a coil holder arranged on the outside of the valve body and fixed with the bottom end of the damping flow channel housing, the coil holder being used for supporting and positioning the magnetic coil;

[0015] a liquid outlet end arranged at the bottom of the valve body and fixed with the damping flow channel housing in the radial direction, the liquid outlet end being used for guiding the magneto-rheological fluid out;

[0016] wherein the two ends of the damping flow channel are communicated with the liquid inlet end and the liquid outlet end respectively, and the strong magnetic field region generated after the magnetic coil is energized coincides with the damping flow channel in the damping flow channel housing.

[0017] Preferably, the damping flow channel constitutes a damping flow channel fluid domain inside the damping flow channel housing;

[0018] the damping flow channel fluid domain is formed by a plurality of single-layer damping flow channel fluid domains which are sequentially connected in a ring shape and stacked;

[0019] the single-layer damping flow channel fluid domain comprises a ring-shaped flow channel, a single-layer damping flow channel inlet communicated with the inlet end of the ring-shaped flow channel, and a single-layer damping flow channel outlet communicated with the outlet end of the ring-shaped flow channel;

[0020] The single-layer damping flow channel outlet of the single-layer damping flow channel fluid area of the upper layer is connected with the single-layer damping flow channel inlet of the single-layer damping flow channel fluid area of the next layer.

[0021] Preferably, the inner wall of the annular flow channel is provided with a plurality of micro-textures with uniform height in the circumferential direction at equal intervals.

[0022] Preferably, the micro-texture is a semispherical, prismatic or wavy protruding structure.

[0023] Preferably, the magnetorheological fluid is a micro-nano composite magnetorheological fluid, which is prepared by mixing micron-sized magnetic particles and nano-sized magnetic particles and then dispersing them in a silicon oil-based carrier liquid.

[0024] Preferably, the micron-sized magnetic particles are carbonyl iron powder, and the nano-sized magnetic particles are ferroferric oxide nanoparticles, and the mass ratio of the micron-sized magnetic particles to the nano-sized magnetic particles is 5-20:1.

[0025] Preferably, the valve body is integrally formed by using rigid photosensitive resin material and through light curing 3D printing process.

[0026] Preferably, the rigid photosensitive resin is epoxy acrylate or polyurethane acrylate photosensitive resin.

[0027] Preferably, the excitation coil is wound by high-conductivity copper wire.

[0028] Compared with the prior art, the present application has the following advantages and technical effects:

[0029] The micro servo valve with the magneto-rheological fluid as the intelligent fluid provided by the application completely abandons the execution mode of the traditional magneto-rheological valve relying on mechanical moving components (such as a valve core), and creatively produces and accurately controls the resistance pressure by directly and non-contact regulating the rheological state (viscosity) of the magneto-rheological fluid flowing through a specific structure damping flow channel through a magnetic field. This fundamental change brings multiple significant advantages: first, since the moving components such as the valve core and the spring are completely cancelled, the failure risks such as mechanical wear, fatigue, jamming and sealing leakage are fundamentally eliminated, the reliability and service life of the valve are greatly improved, and the structure is simplified, and the processing and assembly complexity and cost are reduced. Second, the response speed only depends on the electromagnetic time constant (millisecond level) of the magnetic field establishment and the rheological response speed (also millisecond level) of the magneto-rheological fluid, and the delay caused by mechanical inertia is eliminated, and an unprecedented fast dynamic response is realized, and the super-high-precision and high-frequency-response hydraulic control is provided. Third, the optimized valve body structure and the compact magnetic circuit design (the excitation coil is close to the damping flow channel shell) maximally reduce the magnetic circuit air gap, reduce the magnetic resistance, improve the magnetic field utilization rate and control energy efficiency, and enhance the linear relationship between the control current and the output resistance pressure. Finally, the valve body integrated by the 3D printing technology can easily realize the internal complex multi-layer annular damping flow channel and the micro-texture structure, and the magnetic field regulation effect and the resistance pressure output capacity of the magneto-rheological fluid are further enhanced while the high structural strength and precision are ensured. Therefore, the application successfully integrates the dynamic pressure regulation and the fast switching function in a single compact structure, and provides a revolutionary core control element for the miniaturized and high-performance intelligent hydraulic servo system. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed in the embodiments. Obviously, the drawings in the following description only constitute some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort.

[0031] Figure 1 The structure schematic diagram of the micro servo valve with the magneto-rheological fluid as the intelligent fluid of the present application.

[0032] Figure 2 The structure schematic diagram of the valve body of the micro servo valve of the present application.

[0033] Figure 3 The structure schematic diagram of the damping flow channel fluid domain of the valve body of the micro servo valve of the present application.

[0034] Figure 4 The structure schematic diagram of the single-layer damping flow channel fluid domain of the valve body of the micro servo valve of the present application.

[0035] Figure 5 Fig. 1 is a schematic diagram of a hydraulic system for testing the impedance characteristics of the micro servo valve of the present application.

[0036] Figure 6 Fig. 2 is a curve of the impedance characteristics of the micro servo valve of the present application under different input currents.

[0037] In the figure: 1, valve body; 2, excitation coil; 3, magnetorheological fluid; 101, liquid inlet end; 102, damping flow passage shell; 103, coil holder; 104, liquid outlet end; 105, damping flow passage; 10501, damping flow passage fluid domain; 10502, single-layer damping flow passage fluid domain; 1050201, single-layer damping flow passage inlet; 1050202, single-layer damping flow passage outlet; 1050203, micro texture; 1050204, annular flow passage. DETAILED DESCRIPTION

[0038] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The described embodiments are only a part of the embodiments of the present application, but not all the embodiments. All other embodiments obtained by a person of ordinary skill in the art without creative labor fall within the protection scope of the present application. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0039] As shown in Figures 1 to 6 the present application provides a micro servo valve with magnetorheological fluid as intelligent fluid, which comprises a valve body 1 and an excitation coil 2; the valve body 1 is internally provided with a damping flow passage 105 for the magnetorheological fluid 3 to flow through; the excitation coil 2 is arranged on the outside of the valve body 1; the viscosity of the magnetorheological fluid 3 flowing through the damping flow passage 105 is changed by energizing the excitation coil 2 to generate a magnetic field acting on the damping flow passage 105, so as to directly regulate the impedance pressure generated by the micro servo valve, and realize the dynamic pressure regulation and rapid switching function without mechanical moving parts.

[0040] The present application can play a core regulating role through the arrangement of the valve body 1 and the excitation coil 2. The valve body 1 provides a physical space for the magnetorheological fluid 3 to flow and generate rheological effect, and the excitation coil 2 is an actuator for generating a control magnetic field. The combination of the two constitutes a pure electromagnetic-fluid coupling control unit, which can realize accurate and rapid regulation of fluid impedance without any mechanical movement. This fundamentally solves a series of technical problems such as slow response, complex structure, easy wear and low energy efficiency caused by mechanical moving parts in the background art.

[0041] Further optimization scheme, the valve body 1 comprises:

[0042] a liquid inlet end 101 arranged at the top of the valve body 1 for introducing the magnetorheological fluid 3;

[0043] The damping flow channel shell 102 is axially fixed with the liquid inlet end 101, and the inside of the damping flow channel shell 102 is provided with a damping flow channel 105;

[0044] The coil holder 103 is arranged outside the valve body 1 and is fixed with the bottom end of the damping flow channel shell 102, and the coil holder 103 is used to support and position the excitation coil 2;

[0045] The liquid outlet end 104 is arranged at the bottom of the valve body 1 and is radially fixed with the damping flow channel shell 102, and the liquid outlet end 104 is used to guide out the magnetorheological fluid 3;

[0046] The two ends of the damping flow channel 105 are respectively communicated with the liquid inlet end 101 and the liquid outlet end 104, and the strong magnetic field region generated after the excitation coil 2 is energized coincides with the damping flow channel 105 in the damping flow channel shell 102.

[0047] Through the integrated arrangement of the liquid inlet end 101, the damping flow channel shell 102, the coil holder 103 and the liquid outlet end 104, the functions of optimizing the flow channel, the magnetic circuit and the structure can be achieved. The liquid inlet end 101 and the liquid outlet end 104 ensure the smooth inflow and outflow of the magnetorheological fluid 3. The damping flow channel shell 102 is a core functional component, and the damping flow channel 105 inside the damping flow channel shell 102 is the main place where the magnetorheological effect occurs. The coil holder 103 accurately positions the excitation coil 2 at the periphery of the damping flow channel shell 102, ensuring that the magnetic field generated by the excitation coil 2 after energization can efficiently and centrally penetrate and act on the entire damping flow channel 105 region, maximizing the utilization rate of the magnetic field and reducing the waste of magnetic energy, thereby improving energy efficiency and control sensitivity.

[0048] Further optimization scheme, the damping flow channel 105 constitutes a damping flow channel fluid domain 10501 in the damping flow channel shell 102;

[0049] The damping flow channel fluid domain 10501 is formed by a plurality of single-layer damping flow channel fluid domains 10502 connected in sequence and annularly stacked;

[0050] The single-layer damping flow channel fluid domain 10502 includes an annular flow channel 1050204, a single-layer damping flow channel inlet 1050201 communicated with the inlet end of the annular flow channel 1050204, and a single-layer damping flow channel outlet 1050202 communicated with the outlet end of the annular flow channel 1050204;

[0051] The single-layer damping flow channel outlet 1050202 of the single-layer damping flow channel fluid domain 10502 of the upper layer is connected with the single-layer damping flow channel inlet 1050201 of the single-layer damping flow channel fluid domain 10502 of the lower layer.

[0052] The multi-layer annular stacked damping flow channel fluid domain 10501 can significantly extend the effective flow channel length and enhance the control effect. Compared with a simple straight-through or single-ring flow channel, this multi-layer cascaded annular flow channel structure greatly increases the effective path length of the magnetorheological fluid 3 under the action of the magnetic field in the limited valve body space. The magnetic particles inside the magnetorheological fluid 3 will chain under the action of the magnetic field and increase the flow resistance when flowing through each layer of annular flow channel 1050204. The cumulative effect of the multi-layer effect makes the total impedance pressure output multiplied. At the same time, the annular stacked structure is compact, which is conducive to the miniaturization of the valve body.

[0053] Further optimization scheme, the inner wall of the annular flow channel 1050204 is distributed with multiple micro textures 1050203 with consistent protrusion height in the circumferential direction.

[0054] Through the setting of the micro texture 1050203, the anchoring of the magnetic chain, the disturbance of the flow field and the multiplication of the impedance can be realized. When the magnetorheological fluid 3 forms a chain structure under the action of the magnetic field in the flow channel, the micro texture 1050203 on the wall of the flow channel provides additional mechanical anchoring points for these chain structures, enhances the ability of the chain structure to resist fluid shear damage, and thus produces a higher yield stress under the same magnetic field. At the same time, the existence of the micro texture 1050203 will disturb the flow field near the wall, increase the local shear rate, and further dissipate fluid kinetic energy. The synergistic effect of the magnetic field and the texture can significantly improve the ultimate impedance pressure output capability and control efficiency of the micro servo valve.

[0055] Further optimization scheme, the micro texture 1050203 is a hemispherical, prismatic or wavy protruding structure.

[0056] By adopting the micro texture 1050203 with specific shapes such as hemispherical, prismatic or wavy, the anchoring effect and the magnetic field distribution can be optimized. Different texture shapes will produce different local magnetic field distortion and flow field disturbance characteristics. For example, the corners of the prismatic shape will concentrate the magnetic field, which is conducive to stronger local magnetization; the hemispherical shape can provide more uniform support. According to the specific magnetorheological fluid formula and performance requirements, the most suitable texture shape can be selected to maximize the synergistic effect of the magnetic field and the texture, and to realize the fine design and optimization of the impedance pressure characteristics.

[0057] Further optimization scheme, the magnetorheological fluid 3 is a micro-nano composite magnetorheological fluid, which is prepared by mixing micron-sized magnetic particles and nano-sized magnetic particles in a silicone oil-based carrier fluid.

[0058] By using the micro-nano composite magneto-rheological liquid, the stability, response speed and anti-settling property of the magneto-rheological effect can be improved. Although the single micron-sized particle can provide a high yield stress, the chain structure is fragile and easy to be damaged by shearing, and the particle is easy to settle. After adding the nano-sized particle, the nano-sized particle can be filled between the micron-sized particle chains, and can play a role of "bridging" and strengthening the chain structure, so that the formed chain is more stable and the anti-shearing capacity is enhanced, thereby improving the reversibility and repeatability of the magneto-rheological effect. At the same time, the Brownian motion of the nano-sized particle helps to improve the suspension stability and delay the settlement. This composite formula makes the control of the micro servo valve more stable and reliable.

[0059] In a further optimization scheme, the micron-sized magnetic particles are carbonyl iron powder, and the nano-sized magnetic particles are ferroferric oxide nanoparticles, and the mass ratio of the micron-sized magnetic particles to the nano-sized magnetic particles is 5-20:1.

[0060] By limiting to carbonyl iron powder and ferroferric oxide nanoparticles and mixing at a mass ratio of 5-20:1, the magnetic properties and suspension stability can be optimized. Carbonyl iron powder has high saturation magnetization and good sphericity, and is the preferred micron-sized particle for obtaining high magneto-rheological effect. Ferroferric oxide nanoparticles have good magnetism and certain surface activity. Within this ratio range, the micron-sized particle chains can be fully filled and strengthened while obtaining high yield stress, without excessively affecting the magnetization and chainization of the micron-sized particles. This ratio has been verified by experiments to achieve excellent impedance pressure output characteristics (test results show that when the input current reaches 3A, the impedance pressure generated by the micro servo valve on the magneto-rheological liquid 3 is 1.2MPa) and fast response recovery characteristics in the servo valve structure of the present application.

[0061] In a further optimization scheme, the valve body 1 is made of rigid photosensitive resin material and is integrally formed by light curing 3D printing process.

[0062] By using the rigid photosensitive resin and the light curing 3D printing process for integral forming, the complex inner cavity structure, high precision forming and lightweight design can be achieved. The structure of the multi-layer annular flow channel and the inner wall micro-texture in the present application is very complex, and it is almost impossible to achieve or the cost is extremely high by traditional machining method. The 3D printing technology can freely form the complex structure without mold, ensuring the accurate implementation of the design. The rigid photosensitive resin material can provide sufficient structural strength and rigidity to withstand hydraulic pressure. Integral forming avoids errors and potential leakage points caused by assembly, and improves the integrity and reliability of the valve body. This process provides a feasible technical path for the manufacture of micro-sized and high-performance servo valves.

[0063] In a further optimization scheme, the rigid photosensitive resin is epoxy acrylate or polyurethane acrylate photosensitive resin.

[0064] By choosing epoxy acrylate or polyurethane acrylate photosensitive resin, the mechanical properties and environmental adaptability of the valve body can be ensured. These two types of photosensitive resin have high hardness, rigidity, heat resistance and chemical corrosion resistance after curing, which can meet the requirements of the hydraulic system for the valve body material in terms of pressure bearing, temperature change and long-term contact with magnetorheological fluid. They are compatible with the light-cured 3D printing process, have high forming precision and good surface quality, which is beneficial to ensure the dimensional accuracy and surface finish of the inner wall of the damping flow channel and the micro texture, thereby ensuring the consistency of the performance of the servo valve.

[0065] Further optimization scheme, the excitation coil 2 is wound with high conductivity copper wire.

[0066] By winding the excitation coil 2 with high-conductivity copper wire, the coil resistance can be reduced, the heat generation can be reduced, the energy efficiency and response speed can be improved. High-conductivity copper wire (such as oxygen-free copper) has low resistivity, and when the same control current is passed, the coil itself has less Joule heat loss, more electrical energy is converted into magnetic field energy, and the energy utilization efficiency is improved. Lower resistance also means that under the same driving voltage, a larger steady-state current can be obtained, thereby generating a stronger magnetic field. At the same time, low resistance is conducive to the rapid establishment and withdrawal of current, thereby indirectly improving the response speed of the magnetic field, making the overall dynamic performance of the micro servo valve more optimal.

[0067] The micro servo valve with the magneto-rheological fluid as the intelligent fluid provided by the application has the following implementation process: in application, the micro servo valve is connected in series in a magneto-rheological fluid hydraulic circuit. The magneto-rheological fluid 3 flows from the liquid inlet end 101 at the top of the valve body 1 into the damping flow channel fluid domain 10501 formed by the multi-layer annular stacking structure inside the damping flow channel shell 102 under the driving of an external pump source. When pressure regulation or shutdown of the system is needed, a control current is applied to the excitation coil 2 wound on the coil holder 103 outside the valve body. The current flows through the coil wound by the high-conductivity copper wire, rapidly generates a strong magnetic field, and the magnetic field penetrates the valve wall and completely covers the internal damping flow channel 105 area. The carbonyl iron powder and ferroferric oxide particles in the micro-nano composite magneto-rheological fluid flowing through the area are magnetized, polarized, arranged and agglomerated along the magnetic force line direction under the action of the magnetic field, and form stable chain or column structures. On the one hand, these structures greatly increase the apparent viscosity of the fluid, and on the other hand, the end parts thereof are tightly adsorbed on the inner wall of the flow channel (especially the micro texture 1050203), thereby generating a large flow resistance. By precisely adjusting the size of the excitation current, the magnetic field strength can be linearly and continuously changed, so as to control the strength and density of the internal structure of the magneto-rheological fluid, and finally realize stepless, dynamic and high-precision regulation of the output impedance pressure. When the current reaches a certain value, the impedance pressure can be increased to the maximum value, thereby playing a role similar to that of "closing" the valve. Once the current is removed, the magnetic field disappears, the particle chain structure in the magneto-rheological fluid rapidly collapses under the action of fluid shear force and Brownian motion, the viscosity is restored to the initial state within milliseconds, the flow resistance suddenly drops, the valve is "opened", and the fluid resumes unobstructed. In the whole process, no mechanical parts are displaced or rubbed. Through the above principle of pure electromagnetic-fluid interaction, the application successfully integrates the dual functions of dynamic proportional pressure regulation and rapid binary switching in a single miniaturized structure. Compared with the traditional magneto-rheological valve, the technical effects are comprehensive and significant: true "zero mechanical movement" is realized, the reliability, service life and anti-pollution capability are greatly improved; the millisecond-level ultrafast response speed is obtained, which lays a foundation for high-frequency precise control; the compact magnetic circuit and optimized flow channel design bring higher energy efficiency and control linearity; the use of advanced 3D printing technology makes it possible to manufacture an integrated valve body containing complex internal features, simplifies the structure, and controls the cost. Therefore, the application provides a key core component for the development of a new generation of miniaturized, intelligent and high-dynamic fluid transmission and control system.

[0068] The above merely describes preferred specific embodiments of the application, but the protection scope of the application is not limited thereto, and any changes or replacements within the technical scope disclosed by the application can be easily thought of by those skilled in the art, and should be covered within the protection scope of the application.

Claims

1. A micro-servo valve using a magneto-rheological fluid as an intelligent fluid, characterized in that, The valve body (1) and the excitation coil (2) are included; the valve body (1) is internally provided with a damping flow channel (105) for the magnetorheological fluid (3) to flow through; the excitation coil (2) is arranged on the outside of the valve body (1); By energizing the excitation coil (2) to generate a magnetic field acting on the damping flow channel (105), the viscosity of the magnetorheological fluid (3) flowing through the damping flow channel (105) is changed, thereby directly regulating the impedance pressure generated by the micro servo valve, realizing the dynamic pressure regulation and rapid switching function without mechanical moving parts.

2. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 1, characterized in that, The valve body (1) includes: The liquid inlet end (101) is arranged at the top of the valve body (1) and is used for introducing the magnetorheological fluid (3); The damping flow channel shell (102) is axially fixed with the liquid inlet end (101), and the damping flow channel (105) is arranged in the damping flow channel shell (102); The coil holder (103) is arranged on the outside of the valve body (1) and is fixed with the bottom end of the damping flow channel shell (102), and the coil holder (103) is used for supporting and positioning the excitation coil (2); The liquid outlet end (104) is arranged at the bottom of the valve body (1) and is radially fixed with the damping flow channel shell (102), and the liquid outlet end (104) is used for leading out the magnetorheological fluid (3); Wherein, the two ends of the damping flow channel (105) are communicated with the liquid inlet end (101) and the liquid outlet end (104) respectively, and the strong magnetic field region generated after the excitation coil (2) is energized coincides with the damping flow channel (105) in the damping flow channel shell (102).

3. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 2, characterized in that, The damping flow channel (105) constitutes a damping flow channel fluid domain (10501) in the damping flow channel shell (102); The damping flow channel fluid domain (10501) is composed of a plurality of single-layer damping flow channel fluid domains (10502) which are sequentially connected in head-tail mode and stacked in a ring shape; The single-layer damping flow channel fluid domain (10502) includes a ring-shaped flow channel (1050204), a single-layer damping flow channel inlet (1050201) communicated with the inlet end of the ring-shaped flow channel (1050204), and a single-layer damping flow channel outlet (1050202) communicated with the outlet end of the ring-shaped flow channel (1050204); The single-layer damping flow channel outlet (1050202) of the single-layer damping flow channel fluid domain (10502) of the upper layer is connected with the single-layer damping flow channel inlet (1050201) of the single-layer damping flow channel fluid domain (10502) of the lower layer.

4. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 3, characterized in that, A plurality of micro textures (1050203) with consistent protrusion height are distributed on the inner wall of the ring-shaped flow channel (1050204) in the circumferential direction at equal intervals.

5. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 4, characterized in that, The micro texture (1050203) is a hemispherical, prismatic or wavy protruding structure.

6. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 2, characterized in that, The magnetorheological fluid (3) is a micro-nano composite magnetorheological liquid, which is prepared by mixing micron-sized magnetic particles and nano-sized magnetic particles and then dispersing them in a silicone oil-based carrier liquid.

7. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 6, characterized in that, The micrometer-sized magnetic particles are carbonyl iron powder, the nanometer-sized magnetic particles are ferroferric oxide nanoparticles, and the mass ratio of the micrometer-sized magnetic particles to the nanometer-sized magnetic particles is 5-20:

1.

8. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 2, characterized in that, The valve body (1) is integrally formed by using rigid photosensitive resin material and through light curing 3D printing process.

9. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 8, characterized in that, The rigid photosensitive resin is epoxy acrylate or polyurethane acrylate photosensitive resin.

10. The micro-servo valve with magnetorheological fluid as smart fluid according to claim 1, characterized in that, The excitation coil (2) is wound by high-conductivity copper wire.

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