Small-sized quartz flexible accelerometer torquer and small-sized quartz flexible accelerometer

Abstract

The invention discloses a small quartz flexible accelerometer torquer and a small quartz flexible accelerometer. The small quartz flexible accelerometer torquer comprises two groups of permanent magnet arrays and four torque coils. Wherein the two groups of permanent magnet arrays are Halbach permanent magnet arrays which are arranged in parallel, the strong magnetic sides of the two groups of Halbach permanent magnet arrays are close to each other, and a main working magnetic field area is formed between the strong magnetic sides of the two groups of Halbach permanent magnet arrays; the four torque coils sleeve the two permanent magnet arrays in a pairwise corresponding mode, and the four torque coils are all located in the main working air gap. According to the small quartz flexible accelerometer torquer, the size is remarkably reduced, the magnetic induction intensity is improved, and the precision and stability are remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of magnetic material device technology, and in particular to a small quartz flexible accelerometer torque device and a small quartz flexible accelerometer. Background Technology

[0002] High precision and small size are the core goals that the field of inertial instruments continues to pursue. With the rise of emerging applications such as drones and small satellites, smaller accelerometers are needed to accommodate the space constraints of these small devices and facilitate integration into various systems. Existing accelerometers use AlNiCo alloys, which are permanent magnet materials with high remanence and low coercivity. Therefore, the permanent magnets must be made into long cylinders to minimize the demagnetizing effect. Meanwhile, the development of various applications for accelerometers has led to increasingly higher requirements for their accuracy and stability. However, accelerometer performance is easily affected by factors such as temperature changes, material stress release, creep, aging, and natural demagnetization, causing nonlinear drift in accelerometer parameters (bias and scaling factor, etc.) and reduced accuracy. Therefore, miniaturizing quartz flexible accelerometers while ensuring high precision has significant scientific research value and engineering implications. Summary of the Invention

[0003] The present invention aims to solve the technical problems of existing quartz flexible accelerometers, such as large size and the need to improve accuracy, and proposes a small quartz flexible accelerometer torque device and a small quartz flexible accelerometer.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A small quartz flexible accelerometer torque converter includes two permanent magnet arrays and four torque coils;

[0006] The two sets of permanent magnet arrays are two sets of Halbach permanent magnet arrays arranged in parallel, with the strong magnetic sides of the two sets of Halbach permanent magnet arrays close to each other and the weak magnetic sides of the two sets of Halbach permanent magnet arrays far apart; the main working magnetic field region is formed between the strong magnetic sides of the two sets of Halbach permanent magnet arrays.

[0007] The four torque coils are mounted in pairs on the outside of the two sets of permanent magnet arrays, and all four torque coils are located in the main working air gap.

[0008] The two sets of permanent magnet arrays have identical magnet compositions; each set of permanent magnet arrays consists of an odd number of closely arranged magnets.

[0009] Each of the two permanent magnet arrays consists of seven closely arranged magnets, all of which have the same width and height; the three longer magnets are spaced apart between the four shorter magnets.

[0010] In one set of permanent magnet arrays, the seven magnets are designated as the first upper magnet, the second upper magnet, the third upper magnet, the fourth upper magnet, the fifth upper magnet, the sixth upper magnet, and the seventh upper magnet. In the other set of permanent magnet arrays, the seven magnets are designated as the first lower magnet, the second lower magnet, the third lower magnet, the fourth lower magnet, the fifth lower magnet, the sixth lower magnet, and the seventh lower magnet. The first upper magnet, the third upper magnet, the fifth upper magnet, the seventh upper magnet, the first lower magnet, the third lower magnet, the fifth lower magnet, and the seventh lower magnet have the same length. The second upper magnet, the fourth upper magnet, the sixth upper magnet, the second lower magnet, the fourth lower magnet, and the sixth lower magnet have the same length.

[0011] One rectangular yoke is attached to the lower surface of the fourth upper magnet, and the other rectangular yoke is attached to the upper surface of the fourth lower magnet.

[0012] The magnetic circuit of the miniature quartz flexible accelerometer torque device is symmetrical in the vertical, horizontal, and front-back directions.

[0013] The magnetization directions of each magnet are as follows: the first upper magnet and the third lower magnet are magnetized in the upper right direction; the second upper magnet and the second lower magnet are magnetized in the right direction; the third upper magnet and the first lower magnet are magnetized in the lower right direction; the seventh upper magnet and the fifth lower magnet are magnetized in the upper left direction; the sixth upper magnet and the sixth lower magnet are magnetized in the left direction; the fifth upper magnet and the seventh lower magnet are magnetized in the lower left direction; the fourth upper magnet is magnetized in the lower direction; and the fourth lower magnet is magnetized in the upper direction.

[0014] The small quartz flexible accelerometer torque device also includes two rectangular yokes and four "L"-shaped yokes.

[0015] The two rectangular yokes are respectively attached and fixed to the strong magnetic side of the two sets of permanent magnet arrays; and the two rectangular yokes are located in the main working magnetic field region, and the two rectangular yokes are used to converge magnetic flux to form the main working air gap;

[0016] The four "L"-shaped yokes are divided into two groups and are respectively set on both sides of each group of permanent magnet arrays. The long side of the "L"-shaped yoke is in contact with the side surface of the permanent magnet array, while the short side of the "L"-shaped yoke is parallel to the surface of the permanent magnet array and separated by a preset distance. The preset distance between the short side of the "L"-shaped yoke and the surface of the permanent magnet array is a conductive air gap.

[0017] The four "L"-shaped yokes are respectively the first "L"-shaped yoke, the second "L"-shaped yoke, the third "L"-shaped yoke, and the fourth "L"-shaped yoke; the first "L"-shaped yoke and the second "L"-shaped yoke are respectively attached to the left and right sides of one set of permanent magnet arrays; the third "L"-shaped yoke and the fourth "L"-shaped yoke are respectively attached to the left and right sides of another set of permanent magnet arrays.

[0018] The miniature quartz flexible accelerometer torque device has an overall rectangular parallelepiped structure.

[0019] A small quartz flexural accelerometer, comprising the aforementioned small quartz flexural accelerometer.

[0020] The beneficial effects of this invention are as follows:

[0021] (1) The volume of the quartz flexible accelerometer torque of the present invention is significantly reduced: Based on the samarium cobalt magnet with low temperature coefficient and high coercivity and the novel magnetic circuit design, the present invention reduces the volume of the torque by more than half compared with the traditional accelerometer using alnico magnet (high remanence and low coercivity), which greatly promotes the miniaturization of the product.

[0022] (2) Improved magnetic induction intensity of the quartz flexible accelerometer torque of the present invention: The average magnetic induction intensity generated at the working air gap of the present invention is greater than that of the accelerometer using AlNiCo.

[0023] (3) The accuracy and stability of the quartz flexible accelerometer torque device of the present invention are significantly improved: the range of magnetic induction intensity at the working air gap is reduced and the standard deviation is reduced by more than one-third, which effectively improves the magnetic field uniformity and thus significantly improves the measurement accuracy and stability of the accelerometer. Attached Figure Description

[0024] Figure 1 This is an overall schematic diagram of a small quartz flexible accelerometer torque generator according to the present invention;

[0025] Figure 2 for Figure 1 Front view of the small quartz flexible accelerometer torque generator shown;

[0026] Figure 3 for Figure 2 A schematic diagram of the magnetization direction of the magnet in the image;

[0027] Figure 4 for Figure 1 Left view of the small quartz flexible accelerometer torque generator shown;

[0028] Figure 5 for Figure 1 A top view of the small quartz flexible accelerometer torque generator shown;

[0029] Figure 6 for Figure 1 The magnetic flux density contour plot of the torque generator of the small quartz flexible accelerometer shown;

[0030] Figure 7 This is a magnetic flux density contour map of a quartz flexible accelerometer torque converter with a conventional magnetic circuit.

[0031] The attached figures are labeled as follows: 1-First "L"-shaped yoke; 2-First permanent magnet array; 3-First torque coil; 4-First rectangular yoke; 5-Second torque coil; 6-Second "L"-shaped yoke; 7-Third "L"-shaped yoke; 8-Second permanent magnet array; 9-Third torque coil; 10-Second rectangular yoke; 11-Fourth torque coil; 12-Fourth "L"-shaped yoke; 2-1-First upper magnet; 2-2-Second upper magnet; 2-3-Third upper magnet; 2-4-Fourth upper magnet; 2-5-Fifth upper magnet; 2-6-Sixth upper magnet; 2-7-Seventh upper magnet; 8-1-First lower magnet; 8-2-Second lower magnet; 8-3-Third lower magnet; 8-4-Fourth lower magnet; 8-5-Fifth lower magnet; 8-6-Sixth lower magnet; 8-7-Seventh lower magnet. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0033] Generally, a quartz flexural accelerometer mainly consists of a meter head and a servo circuit. The meter head includes a pendulum assembly and a torque converter. The meter head and servo circuit are used to input sensitive signals and detection signals, respectively. The pendulum structure generates an electrical signal by detecting the inertial force deflection of the mass block, and the servo circuit generates a reverse torque to maintain dynamic balance. Acceleration input causes displacement of the quartz pendulum, and the capacitive detector converts this mechanical deflection into an electrical signal. Closed-loop control makes the torque coil current linearly related to the acceleration. Specifically, when the input axis direction is sensitive to the acceleration excitation 'a', the pendulum assembly deflects under the action of the inertial torque M1 = maL, where L is the length of the inertial rotation force arm. The differential capacitive sensor senses this deflection displacement and outputs a corresponding current to the torque converter coil through the servo circuit. The energized coil experiences an Ampere force in the magnetic field, generating an electromagnetic torque M2 that is equal in magnitude and opposite in direction to the inertial torque, canceling the deflection of the pendulum assembly caused by the inertial torque (M2 = M1), so that the pendulum is always controlled at zero position.

[0034] This invention provides a torque device for a small quartz flexible accelerometer.

[0035] See Figures 1 to 5 The small quartz flexible accelerometer torque generator includes two permanent magnet arrays, four torque coils, two rectangular yokes and four "L"-shaped yokes.

[0036] In this embodiment, the two sets of permanent magnet arrays are two parallel Halbach permanent magnet arrays, with their strong magnetic sides close to each other and their weak magnetic sides far apart. The main working magnetic field region is formed between the strong magnetic sides of the two Halbach permanent magnet arrays. This invention employs two optimized Halbach permanent magnet arrays arranged symmetrically with their strong magnetic sides facing each other. This configuration fully utilizes the characteristic of Halbach arrays where one side has a strong magnetic field and the other side has a weak magnetic field. In the region formed by the two strong magnetic sides facing each other, the magnetic field is effectively constrained and enhanced, forming the main working magnetic field region; while the structure with the two weak magnetic sides facing outward naturally achieves low external magnetic leakage, thus meeting the low magnetic leakage requirement without the need for additional magnetic conductor wrapping or an independent magnetic shielding layer. The torque generator of this invention has low magnetic leakage characteristics; based on the directional magnetic field characteristics of the Halbach array and the facing structure, the magnetic field is highly concentrated in the internal working region, and external magnetic field leakage is significantly suppressed, achieving a self-shielding effect of the magnetic circuit.

[0037] Specifically, the two permanent magnet arrays are a first permanent magnet array 2 and a second permanent magnet array 8; the first permanent magnet array 2 and the second permanent magnet array 8 are arranged in parallel. The strong magnetic sides of both the first permanent magnet array 2 and the second permanent magnet array 8 are arranged inwards, and the weak magnetic sides are arranged outwards. The distance between the first permanent magnet array 2 and the second permanent magnet array 8 is determined according to the size of the pendulum plate. Generally, the pendulum plate is located in the middle of the first permanent magnet array 2 and the second permanent magnet array 8, and is closely attached to the torque coil.

[0038] Preferably, both the first permanent magnet array 2 and the second permanent magnet array 8 are samarium cobalt permanent magnet arrays with low temperature coefficients and high coercivity. Using samarium cobalt magnets with low temperature coefficients and high coercivity can significantly optimize the magnetic circuit structure, making it possible to achieve high efficiency and miniaturization of quartz flexible accelerometer torque converters. The typical volume of a conventional accelerometer torque converter is 6023 mm². 3 The volume of the miniature quartz flexible accelerometer torque generator of the present invention is only 1476 mm². 3 This invention reduces the size of the torque meter by more than half compared to traditional accelerometers that use AlNiCo magnets (high remanence, low coercivity), greatly promoting product miniaturization.

[0039] More preferably, the first permanent magnet array 2 and the second permanent magnet array 8 have identical magnet compositions; the number of magnets covers any number of Halbach arrays required to achieve this purpose. Preferably, both permanent magnet arrays consist of an odd number of closely packed magnets. Studies have shown that using an odd number of magnets is more effective than using an even number.

[0040] Meanwhile, the lengths of the magnets in the two permanent magnet arrays are determined based on the predetermined magnetic field strength.

[0041] For an even better option, see [link to previous section]. Figure 2 In this embodiment, both the first permanent magnet array 2 and the second permanent magnet array 8 consist of seven magnets arranged side by side and closely packed together (that is, the two permanent magnet arrays are rectangular in shape as a whole), and all magnets have the same width and height; the three longer magnets are spaced apart between the four shorter magnets. This embodiment further reduces the volume of the torque generator by arranging magnets with varying lengths.

[0042] For details, see Figure 1 The seven magnets of the first permanent magnet array 2 are the first upper magnet 2-1, the second upper magnet 2-2, the third upper magnet 2-3, the fourth upper magnet 2-4, the fifth upper magnet 2-5, the sixth upper magnet 2-6, and the seventh upper magnet 2-7. The seven magnets of the second permanent magnet array 8 are the first lower magnet 8-1, the second lower magnet 8-2, the third lower magnet 8-3, the fourth lower magnet 8-4, the fifth lower magnet 8-5, and the sixth lower magnet 8-6. The first upper magnet 2-1, the third upper magnet 2-3, the fifth upper magnet 2-5, the seventh upper magnet 2-7, the first lower magnet 8-1, the third lower magnet 8-3, the fifth lower magnet 8-5, and the seventh lower magnet 8-7 have the same length; the second upper magnet 2-2, the fourth upper magnet 2-4, the sixth upper magnet 2-6, the second lower magnet 8-2, the fourth lower magnet 8-4, and the sixth lower magnet 8-6 have the same length. In this embodiment, the length L1 of the long magnets (second upper magnet 2-2, fourth upper magnet 2-4, sixth upper magnet 2-6, second lower magnet 8-2, fourth lower magnet 8-4 and sixth lower magnet 8-6) is 2.8 mm, and the length L2 of the short magnets (first upper magnet 2-1, third upper magnet 2-3, fifth upper magnet 2-5, seventh upper magnet 2-7, first lower magnet 8-1, third lower magnet 8-3, fifth lower magnet 8-5 and seventh lower magnet 8-7) is 0.4 mm.

[0043] For details, see Figure 3In the first permanent magnet array 2, the fourth upper magnet 2-4 is located in the center, flanked by the third upper magnet 2-3 and the fifth upper magnet 2-5. The second upper magnet 2-2 is located on the other side of the third upper magnet 2-3, and the first upper magnet 2-1 is located on the other side of the second upper magnet 2-2. The sixth upper magnet 2-6 is located on the other side of the fifth upper magnet 2-5, and the seventh upper magnet 2-7 is located on the other side of the sixth upper magnet 2-6. In the second permanent magnet array 8, the fourth lower magnet 8-4 is located in the center, flanked by the third lower magnet 8-3 and the fifth lower magnet 8-5. The second lower magnet 8-2 is located on the other side of the third lower magnet 8-3, and the first lower magnet 8-1 is located on the other side of the second lower magnet 8-2. The sixth lower magnet 8-6 is located on the other side of the fifth lower magnet 8-5, and the seventh lower magnet 8-7 is located on the other side of the sixth lower magnet 8-6.

[0044] The first permanent magnet array 2 and the second permanent magnet array 8 are arranged in parallel. Specifically, the fourth upper magnet 2-4 and the fourth lower magnet 8-4 are arranged opposite each other, and the other magnets are also arranged in a corresponding manner.

[0045] like Figure 2 As shown, the four torque coils are fitted in pairs around the two sets of permanent magnet arrays, and all four torque coils are located in the main working air gap. Specifically, the four torque coils are a first torque coil 3, a second torque coil 5, a third torque coil 9, and a fourth torque coil 11; the four torque coils are fitted in pairs around the two sets of permanent magnet arrays. Specifically, the first torque coil 3 surrounds the outer sides of the second upper magnet 2-2 and the third upper magnet 2-3; the second torque coil 5 surrounds the outer sides of the fifth upper magnet 2-5 and the sixth upper magnet 2-6; the third torque coil 9 surrounds the outer sides of the second lower magnet 8-2 and the third lower magnet 8-3; and the fourth torque coil 11 surrounds the outer sides of the fifth lower magnet 8-5 and the sixth lower magnet 8-6.

[0046] See Figure 2 The two rectangular yokes are a first rectangular yoke 4 and a second rectangular yoke 10, which are respectively attached and fixed to the outer surfaces of the first permanent magnet array 2 and the second permanent magnet array 8. (See also...) Figure 3 The first rectangular yoke 4 is attached to the lower surface of the fourth upper magnet 2-4, and the second rectangular yoke 10 is attached to the upper surface of the fourth lower magnet 8-4. In this invention, a pair of high-permeability magnetic pole pieces, namely the first rectangular yoke 4 and the second rectangular yoke 10, are set in the strong magnetic field region between two sets of opposing Halbach arrays. This pair of magnetic pole pieces is used to converge magnetic flux, forming a main working air gap with high magnetic flux density and a preliminarily regulated magnetic field direction. The distance between the first rectangular yoke 4 and the second rectangular yoke 10 can be determined according to the design objectives.

[0047] Furthermore, the miniature quartz flexible accelerometer torque generator of the present invention also includes four "L"-shaped yokes. The four "L"-shaped yokes are L-shaped magnetic conductive blocks. In this invention, high-permeability L-shaped magnetic conductive blocks ("L"-shaped yokes) are symmetrically arranged on both sides of the two sets of permanent magnet arrays. See also... Figure 2 and Figure 3 The four L-shaped yokes are identical in shape, and are designated as first L-shaped yoke 1, second L-shaped yoke 6, third L-shaped yoke 7, and fourth L-shaped yoke 12. These four L-shaped yokes are divided into two groups, each positioned on either side of the permanent magnet array. Specifically, first L-shaped yoke 1 and second L-shaped yoke 6 are positioned on either side of the first permanent magnet array 2, while third L-shaped yoke 7 and fourth L-shaped yoke 12 are positioned on either side of the second permanent magnet array 8.

[0048] Furthermore, the long sides of all the "L"-shaped yokes are in contact with the side surface of the permanent magnet array, while the short sides of the "L"-shaped yokes are parallel to the surface of the permanent magnet array and separated by a predetermined distance. The predetermined distance between the short sides of the "L"-shaped yokes and the surface of the permanent magnet array is a conductive air gap. This conductive air gap is a non-contact conductive air gap. Setting a conductive air gap can optimize the orientation of magnetic field lines; the conductive air gap between the "L"-shaped yokes and the array plays a key role in adjusting the magnetic flux distribution in this magnetic circuit design. Without this air gap, the magnetic field lines would form a significant arc-shaped path when flowing through the magnetically conductive block due to the abrupt change in magnetic reluctance, causing them to obliquely pass through the main working air gap, generating a non-negligible radial magnetic field component. This radial magnetic field component interacts with the coil current, and the resulting Lorentz force deviates from the ideal pure axial direction, resulting in a reduction in the effective axial signal output component. More importantly, the radial magnetic field component will exert a deflection torque on the entire coil / swing assembly. This torque will force the precision quartz swing assembly to twist, which can easily lead to fatigue damage or even breakage under long-term action, seriously affecting the reliability and lifespan of the sensor. By setting the conduction air gap, the local magnetic resistance is precisely controlled, so that the magnetic lines of force can be "straightened" before entering the main working air gap, thereby ensuring that they pass through the working air gap in a direction that is highly perpendicular to the coil plane. The effects that can be achieved are: (1) Maximizing the axial Lorentz force: The perpendicularity between the magnetic field direction and the current direction is improved, so that the Lorentz force acts completely in the direction of the sensitive axis, which improves the sensitivity of the sensor. (2) Eliminating parasitic torque: The deflection torque acting on the swing assembly caused by the oblique magnetic lines of force is eliminated, which fundamentally avoids the component torsion and mechanical stress concentration caused by it, and greatly improves the mechanical stability and long-term reliability of the sensor.

[0049] See Figure 2The long side of the first "L"-shaped yoke 1 is in contact with the side surface of the first upper magnet 2-1, and the short side of the first "L"-shaped yoke 1 is parallel to the surface of the first upper magnet 2-1 and has a predetermined distance. The long side of the second "L"-shaped yoke 6 is in contact with the side surface of the seventh upper magnet 2-7, and the short side of the second "L"-shaped yoke 6 is parallel to the lower surface of the seventh upper magnet 2-7 and has a predetermined distance. Similarly, the long side of the third "L"-shaped yoke 7 is in contact with the side surface of the first lower magnet 8-1, and the short side of the third "L"-shaped yoke 7 is parallel to the upper surface of the first lower magnet 8-1 and has a predetermined distance. That is to say, the distance between the short sides of the first "L"-shaped yoke 1 and the third "L"-shaped yoke 7 is less than the distance between the first upper magnet 2-1 and the first lower magnet 8-1. The long side of the fourth "L"-shaped yoke 12 is in contact with the side surface of the seventh lower magnet 8-7, and the short side of the fourth "L"-shaped yoke 12 is parallel to the upper surface of the seventh lower magnet 8-7 and has a preset distance.

[0050] More preferably, the magnetic circuit of the miniature quartz flexible accelerometer torque device has a symmetrical structure in the up-down, left-right, and front-back directions.

[0051] Specifically, the magnetization directions of each magnet are as follows: the first upper magnet 2-1 and the third lower magnet 8-3 are magnetized in the upper right direction; the second upper magnet 2-2 and the second lower magnet 8-2 are magnetized in the right direction; the third upper magnet 2-3 and the first lower magnet 8-1 are magnetized in the lower right direction; the seventh upper magnet 2-7 and the fifth lower magnet 8-5 are magnetized in the upper left direction; the sixth upper magnet 2-6 and the sixth lower magnet 8-6 are magnetized in the left direction; the fifth upper magnet 2-5 and the seventh lower magnet 8-7 are magnetized in the lower left direction; the fourth upper magnet 2-4 is magnetized in the lower direction; and the fourth lower magnet 8-4 is magnetized in the upper direction. That is to say, the magnetization direction of the odd-numbered magnets in this invention is 45°.

[0052] See Figure 6 and Figure 7 The average magnetic flux density at the working air gap of the miniature quartz flexible accelerometer torque generator of this invention is 530.3037 mT, while the typical average magnetic flux density at the working air gap of a conventional accelerometer torque generator using an AlNiCo magnetic circuit is 460.2692 mT. Therefore, the quartz flexible accelerometer torque generator of this invention improves the magnetic flux density.

[0053] Furthermore, the magnetic induction intensity range at the working air gap of this invention is 215.5276 mT, and the standard deviation is 33.61194 mT. In contrast, the typical range of magnetic induction intensity range at the working air gap of conventional accelerometer torque converters using AlNiCo magnetic circuits is 464.8927 mT, and the typical standard deviation is 118.0586 mT (more than half lower). Therefore, the accuracy and stability of the quartz flexible accelerometer torque converter of this invention are significantly improved.

[0054] In the description of this invention, it should be understood that, unless otherwise stated, the terms "length", "upper", "lower", "left", "right", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0055] All the terms and their indicated orientations, positions, or dimensions described above are based on the perspective of the accompanying drawings and are intended solely to clearly and concisely describe the technical solutions of the present invention. They are not intended to limit or imply any specific orientation, position, construction method, or actual dimensions that the devices or elements involved in the present invention must have. Therefore, these descriptive terms should not and cannot be construed as any limitation on the present invention.

[0056] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0057] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0058] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0059] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A small quartz flexible accelerometer torque converter, characterized in that, The miniature quartz flexible accelerometer torque generator includes two permanent magnet arrays and four torque coils; The two sets of permanent magnet arrays are two sets of Halbach permanent magnet arrays arranged in parallel, with the strong magnetic sides of the two sets of Halbach permanent magnet arrays close to each other and the weak magnetic sides of the two sets of Halbach permanent magnet arrays far apart; the main working magnetic field region is formed between the strong magnetic sides of the two sets of Halbach permanent magnet arrays. The four torque coils are mounted in pairs on the outside of the two sets of permanent magnet arrays, and all four torque coils are located in the main working air gap.

2. The miniature quartz flexible accelerometer torque generator according to claim 1, characterized in that, The two sets of permanent magnet arrays have identical magnet compositions; both sets of permanent magnet arrays consist of an odd number of closely packed magnets.

3. The miniature quartz flexible accelerometer torque generator according to claim 2, characterized in that, Both sets of permanent magnet arrays consist of seven closely arranged magnets, all of which have the same width and height; the three longer magnets are spaced apart between the four shorter magnets.

4. The miniature quartz flexible accelerometer torque generator according to claim 3, characterized in that, One set of permanent magnet arrays has seven magnets, designated as the first upper magnet, the second upper magnet, the third upper magnet, the fourth upper magnet, the fifth upper magnet, the sixth upper magnet, and the seventh upper magnet. The other set of permanent magnet arrays has seven magnets, designated as the first lower magnet, the second lower magnet, the third lower magnet, the fourth lower magnet, the fifth lower magnet, the sixth lower magnet, and the seventh lower magnet. The first upper magnet, the third upper magnet, the fifth upper magnet, the seventh upper magnet, the first lower magnet, the third lower magnet, the fifth lower magnet, and the seventh lower magnet have the same length. The second upper magnet, the fourth upper magnet, the sixth upper magnet, the second lower magnet, the fourth lower magnet, and the sixth lower magnet have the same length. One rectangular yoke is attached to the lower surface of the fourth upper magnet, and the other rectangular yoke is attached to the upper surface of the fourth lower magnet.

5. The miniature quartz flexible accelerometer torque generator according to claim 4, characterized in that, The magnetic circuit of the miniature quartz flexible accelerometer torque device has a symmetrical structure in the up-down, left-right, and front-back directions.

6. The miniature quartz flexible accelerometer torque generator according to claim 5, characterized in that, The magnetization directions of each magnet are as follows: the first upper magnet and the third lower magnet are magnetized in the upper right direction; the second upper magnet and the second lower magnet are magnetized in the right direction; the third upper magnet and the first lower magnet are magnetized in the lower right direction; the seventh upper magnet and the fifth lower magnet are magnetized in the upper left direction; the sixth upper magnet and the sixth lower magnet are magnetized in the left direction; the fifth upper magnet and the seventh lower magnet are magnetized in the lower left direction; the fourth upper magnet is magnetized in the lower direction; and the fourth lower magnet is magnetized in the upper direction.

7. The miniature quartz flexible accelerometer torque generator according to any one of claims 1 to 6, characterized in that, The miniature quartz flexible accelerometer torque generator also includes two rectangular yokes and four "L"-shaped yokes; The two rectangular yokes are respectively attached and fixed to the strong magnetic side of the two sets of permanent magnet arrays; and the two rectangular yokes are located in the main working magnetic field region, and the two rectangular yokes are used to converge magnetic flux to form the main working air gap; The four "L"-shaped yokes are divided into two groups and are respectively set on both sides of each group of permanent magnet arrays. The long side of the "L"-shaped yoke is in contact with the side surface of the permanent magnet array, while the short side of the "L"-shaped yoke is parallel to the surface of the permanent magnet array and separated by a preset distance. The preset distance between the short side of the "L"-shaped yoke and the surface of the permanent magnet array is a conductive air gap.

8. The miniature quartz flexible accelerometer torque generator according to claim 7, characterized in that, The four "L"-shaped yokes are the first "L"-shaped yoke, the second "L"-shaped yoke, the third "L"-shaped yoke, and the fourth "L"-shaped yoke; the first "L"-shaped yoke and the second "L"-shaped yoke are respectively attached to the left and right sides of one set of permanent magnet arrays; the third "L"-shaped yoke and the fourth "L"-shaped yoke are respectively attached to the left and right sides of another set of permanent magnet arrays.

9. The miniature quartz flexible accelerometer torque generator according to any one of claims 1 to 6, characterized in that, The miniature quartz flexible accelerometer torque generator has an overall rectangular structure.

10. A small quartz flexible accelerometer, characterized in that, Includes the miniature quartz flexible accelerometer as described in any one of claims 1 to 9.

Images