Infrared microsphere optical nano-imaging system and imaging method thereof

Abstract

This invention discloses an infrared microsphere optical nanoimaging system and its imaging method. The infrared microsphere optical nanoimaging system includes an infrared illumination source with an emission wavelength of 780-2500 nm; an infrared microscopy system that controls the infrared illumination source to reach the sample to be tested and converts the reflected or transmitted light from the sample to obtain an imaging beam; a microsphere lens made of infrared-transparent material, positioned between the infrared microscopy system and the sample to collect the reflected or transmitted light from the sample; and an infrared camera mounted on the infrared microscopy system to acquire high-contrast images based on the imaging beam, thereby improving imaging quality.

Description

Technical Field

[0001] This invention relates to the field of optical imaging technology, and in particular to an infrared microsphere optical nanoimaging system and an imaging method for the infrared microsphere optical nanoimaging system. Background Technology

[0002] Microscopy is a crucial technique for characterizing objects at the micro- and nano-scale, with wide applications in biotechnology, electronic information, research, and education. Optical microscopy, compared to electrical microscopy, offers advantages such as requiring no vacuum environment and being able to observe living samples, thus gaining wider use. However, due to the diffraction effect of light waves, ordinary optical microscopes struggle to resolve features smaller than half the wavelength of the incident light. Infrared microscopy, with its superior penetrating power and low scattering, is often used to observe samples that visible light cannot penetrate, such as in semiconductor circuit failure analysis and biological tissue imaging. However, infrared light has a longer wavelength than visible light, resulting in lower resolution for infrared microscopes compared to visible light microscopes. Therefore, a method is needed to improve the resolution of infrared microscopes and enhance their detection accuracy in semiconductors and biotechnology.

[0003] In recent years, many super-resolution imaging techniques have been developed to overcome the optical diffraction limit, thereby improving the resolution of optical microscopy. Among them, optical microsphere nanomicroscopy has received widespread attention from scientific research and industry, mainly because compared with other super-resolution imaging techniques, it offers advantages such as high resolution, no need for fluorescent labeling, low cost, and compatibility with traditional optical microscopes. When incident light passes through a microsphere lens with a diameter ranging from 2 to 100 μm, it can magnify sub-diffraction-limited features, forming a magnified virtual image. To achieve higher resolution, shorter wavelengths are often used as illumination sources, resulting in low image contrast. Therefore, a method is needed to improve the contrast of microsphere microscopy imaging to enhance image quality. Summary of the Invention

[0004] The present invention aims to at least partially solve one of the technical problems in the aforementioned technologies. Therefore, one objective of the present invention is to propose an infrared microsphere optical nanoimaging system that utilizes the optical properties of transparent microspheres in the infrared band to improve the resolution of infrared microscopes; simultaneously, the infrared microsphere optical nanoimaging system has higher contrast, and can resolve 220nm feature structures using only a 20x objective lens.

[0005] The second objective of this invention is to propose an imaging method for an infrared microsphere optical nanoimaging system.

[0006] To achieve the above objectives, the first aspect of this invention provides an infrared microsphere optical nanoimaging system, comprising: an infrared illumination source having an emission wavelength of 780-2500 nm; an infrared microscopy system that modulates the infrared illumination source to reach the sample to be tested and converts the reflected or transmitted light from the sample to obtain an imaging beam; a microsphere lens made of infrared transparent material, which is positioned between the infrared microscopy system and the sample to be tested via a microsphere clamping device to collect the reflected or transmitted light from the sample; and an infrared camera mounted on the infrared microscopy system to acquire high-contrast images based on the imaging beam.

[0007] The infrared microsphere optical nanoimaging system proposed in this invention has the following advantages: it improves the resolution of infrared microscopes by utilizing the optical properties of transparent microspheres in the infrared band; at the same time, the infrared microsphere optical nanoimaging system has higher contrast, and can resolve 220nm feature structures with only a 20x objective lens.

[0008] In addition, the infrared microsphere optical nanoimaging system proposed according to the present invention may also have the following additional technical features:

[0009] Optionally, it further includes: a three-dimensional displacement platform, on which the sample to be tested is placed; and a signal detection and control module, which processes the high-contrast image acquired by the infrared camera, controls the emission of the infrared illumination source, and controls the relative distance between the sample to be tested and the microsphere lens through the three-dimensional displacement platform.

[0010] Optionally, the infrared microscopy system includes: a beam splitter prism that divides the optical path into an illumination path and a reflection path; wherein, the infrared illumination source in the illumination path passes sequentially through a condenser lens, an aperture stop, a field stop, a condenser lens, a polarizer, a third surface of the beam splitter prism, a first surface of the beam splitter prism, and an infrared objective lens to reach the microsphere lens; wherein, the reflected or transmitted light in the reflection path passes sequentially through the infrared objective lens, a first surface of the beam splitter prism, a second surface of the beam splitter prism, an analyzer, and a sleeve lens to reach the infrared camera.

[0011] Optionally, the XY-axis stepping accuracy of the three-dimensional displacement platform is less than or equal to 50 nm, and the Z-axis stepping accuracy is less than or equal to 10 nm.

[0012] Optionally, the infrared illumination source is a broadband infrared source or a monochromatic infrared source.

[0013] Optionally, the infrared camera is an infrared detector sensitive to light with wavelengths from 780 nm to 2500 nm.

[0014] Optionally, the diameter of the microsphere lens is 2-100 μm.

[0015] Optionally, the microsphere lens comprises a microsphere lens group consisting of two or more microspheres.

[0016] To achieve the above objectives, a second aspect of the present invention provides an imaging method for an infrared microsphere optical nanoimaging system, applied to the aforementioned infrared microsphere optical nanoimaging system. The imaging method includes the following steps: acquiring a clean, impurity-free microsphere lens and fixing it on a microsphere clamping device; placing the sample to be tested on a three-dimensional displacement platform and moving it to the focal plane of the infrared microscopy system; controlling the contact between the microsphere lens and the surface of the sample to be tested, and calculating the distance between the imaging plane position of the microsphere lens and the lower vertex of the microsphere lens according to the imaging formula; adjusting the relative position of the sample to be tested and the microsphere lens to obtain a clear magnified image; and adjusting the infrared microscopy system to acquire a clear, high-contrast image using an infrared camera. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the infrared microsphere nanoimaging system according to an embodiment of the present invention;

[0018] Figure 2 This is an image of a sample image obtained by an infrared microsphere nanoimaging system according to an embodiment of the present invention, wherein... Figure 2 (a) The imaging results are obtained using an infrared microsphere microscope. Figure 2 (b) The imaging results were obtained using a white light microsphere microscope;

[0019] Figure 3 This is an image of a chip sample image obtained by an infrared microsphere nanoimaging system according to an embodiment of the present invention, wherein... Figure 3 (a) shows the imaging results from a scanning electron microscope. Figure 3 (b) The imaging results are obtained using a microsphere-free infrared microscope. Figure 3 (c) The imaging results are obtained using an infrared microsphere microscope;

[0020] Figure 4 This is a schematic flowchart of an imaging method for an infrared microsphere optical nanoimaging system according to an embodiment of the present invention.

[0021] Explanation of reference numerals in the attached diagram: 1. Infrared illumination source; 2. Condenser lens; 3. Aperture stop; 4. Field stop; 5. Condenser lens; 6. Polarizer; 7. Infrared camera; 8. Sleeve lens; 9. Analyzer; 10. Beam splitter; 11. Infrared objective lens; 12. Microsphere lens; 13. Three-dimensional displacement platform; 14. Microsphere clamping device; 101. First facet of beam splitter; 102. Second facet of beam splitter; 103. Third facet of beam splitter. Detailed Implementation

[0022] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0023] To better understand the above technical solutions, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present invention and to fully convey the scope of the invention to those skilled in the art.

[0024] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0025] refer to Figure 1 As shown, the infrared microsphere optical nanoimaging system proposed in this embodiment of the invention includes an infrared illumination source 1, an infrared microscopy system, a microsphere lens 12, and an infrared camera 7. The infrared illumination source 1 emits light with a wavelength of 780-2500 nm. The infrared microscopy system adjusts the infrared illumination source 1 to reach the sample to be tested and converts the reflected or transmitted light from the sample to obtain an imaging beam. The microsphere lens 12 is made of infrared transparent material and is positioned between the infrared microscopy system and the sample to be tested via a microsphere clamping device 14 to collect the reflected or transmitted light from the sample. The infrared camera 7 is mounted on the infrared microscopy system and can acquire high-contrast images based on the imaging beam.

[0026] In other words, the material of the microsphere lens 12 is a light-transparent medium material in the wavelength range of 780 nm to 2500 nm. The particle size of the microsphere lens 12 should match that of the microsphere clamping device 14, so that the microsphere lens 12 is fixed on the microsphere clamping device 14, and the microsphere lens 12 can be controlled to approach or contact the surface of the sample to be tested through the microsphere clamping device 14. The microsphere clamping device 14 can be configured as an independent device separate from the infrared objective lens 11 or an integrated device with the infrared objective lens 11.

[0027] As an example, the infrared microsphere optical nanoimaging system also includes a three-dimensional displacement platform 13 and a signal detection and control module; wherein, the sample to be tested is placed on the three-dimensional displacement platform 13; the signal detection and control module is used to process the high-contrast image acquired by the infrared camera 7, and to control the emission of the infrared illumination source 1, and to control the relative distance between the sample to be tested and the microsphere lens 12 through the three-dimensional displacement platform 13.

[0028] As one embodiment, the infrared microscopy system divides the optical path into an illumination path and a reflection path using a beam splitter 10. The infrared illumination source in the illumination path passes sequentially through a condenser 2, an aperture stop 3, a field stop 4, a condenser lens 5, a polarizer 6, a third surface 103 of the beam splitter 101, and an infrared objective lens 11 to reach the microsphere lens 12. The reflected or transmitted light in the reflection path passes sequentially through the infrared objective lens 11, a first surface 101 of the beam splitter 102, a polarizer 9, and a sleeve lens 8 to reach the infrared camera 7.

[0029] It should be noted that the light emitted by the infrared illumination source 1 (such as an LED or laser) is usually divergent. The beam-collecting lens 2 focuses this divergent light into parallel or quasi-parallel light, reducing light diffusion loss and ensuring more light energy enters the subsequent optical path. The aperture stop 3 limits the diameter of the beam entering the system, controlling the aperture angle. The size of the aperture angle directly determines the numerical aperture of the system, which is a key parameter affecting imaging resolution. By adjusting the size of the aperture stop, a balance can be achieved between resolution and depth of field; for example, decreasing the aperture stop increases the depth of field, while increasing it improves resolution. The field stop 4 limits the size of the area of ​​the sample surface that is illuminated, ensuring that only a specific range of light illuminates the area of ​​the sample to be observed, avoiding edge interference. Stray light interference in the edge region; the condenser lens 5 focuses the parallel light after passing through the condenser lens, aperture and other elements onto the sample surface, ensuring that the light energy is concentrated in a small area of ​​the sample, improving the intensity and uniformity of the illumination; the polarizer 6 converts the unpolarized light emitted by the infrared illumination source 1 into linearly polarized light, filtering out light from other directions and allowing only light with a specific vibration direction to pass through. After the polarized light interacts with the sample, its polarization state will change, and the subsequent analyzer 9 can enhance the image contrast by detecting this change; the infrared objective lens 11 initially focuses the sample reflected light magnified by the microsphere lens 12 to form an intermediate image; the sleeve lens 8 further magnifies and focuses the intermediate image onto the photosensitive surface of the infrared camera 7, ensuring that the image is clear and fills the effective imaging area of ​​the camera.

[0030] In other words, the infrared microscopy system achieves precise five-step control of the infrared illumination source 1 through the optical path design of the condenser lens → aperture stop → field stop → condenser lens → polarizer: "convergence → diameter control → confinement → focusing → polarization". Ultimately, it converts the incoherent and divergent infrared light into a high-utilization, high-uniformity, and high-contrast illumination beam, providing a key light source foundation for the super-resolution imaging of the infrared microsphere lens. Through the processing flow of "spectral isolation → polarization screening → imaging focusing", the sample reflected light is converted into a high-contrast and high-resolution imaging beam, ultimately enabling the infrared camera to acquire clear and detailed images.

[0031] As an example, the XY axis stepping accuracy of the three-dimensional displacement platform 13 is less than or equal to 50 nm, and the Z axis stepping accuracy is less than or equal to 10 nm.

[0032] As an example, the infrared illumination source 1 is a broadband infrared source or a monochromatic infrared source.

[0033] As an example, the infrared camera 7 is an infrared detector sensitive to light with wavelengths from 780 nm to 2500 nm, using indium gallium arsenide as the photosensitive material.

[0034] As an example, the diameter of the microsphere lens 12 is 2-100 μm.

[0035] Specifically, the microsphere lens 12 is used to collect and amplify reflected or transmitted light carrying the sample to be tested. The microsphere has a diameter between 2 and 100 μm and is a transparent medium microsphere in the near-infrared band; preferably, the microsphere has a diameter of 25 μm and is made of calcium-sodium glass.

[0036] As one embodiment, the microsphere lens 12 includes a microsphere lens group composed of two or more microspheres.

[0037] refer to Figure 2 As shown, this embodiment compares the imaging performance of an infrared microsphere optical nanoimaging system. A 45 μm diameter sodium calcium glass microsphere was selected, with a refractive index of approximately 1.52 in the 450 nm to 900 nm range and low dispersion. The observed sample was a DVD disc, characterized by alternating 400 nm raised stripes and 340 nm recessed stripes. Figure 2 (a) shows an image of DVD stripes formed by 45 μm calcium sodium glass microspheres under 850 nm infrared illumination. Figure 2 (b) shows an image of DVD stripes formed by 45 μm calcium sodium glass microspheres under visible light illumination. All images were captured using a 20× objective lens (NA ~ 0.4). Gray values ​​were extracted from the same location within the imaging field of view using image analysis software for contrast analysis. The contrast analysis was performed using the Michelson formula, defined as: contrast ratio = (Imax - Imin) / (Imax + Imin), where Imax is the maximum gray value and Imin is the minimum gray value. The calculated values ​​show... Figure 2 In (a), the contrast of the stripes is 19.7%, while Figure 2 (b) shows a contrast of only 8.0%. This experimental result demonstrates that the infrared microsphere optical nanoimaging system proposed in this application has a higher imaging contrast than the microsphere microscope under visible light illumination.

[0038] refer to Figure 3 As shown, to further verify the resolution of the infrared microsphere optical nanoimaging system proposed in this application, this embodiment compares the resolution of the infrared microsphere optical nanoimaging system with that of an infrared microscope. The sample to be tested is a semiconductor chip. First, the sample to be tested is calibrated using a scanning electron microscope, as shown... Figure 3 As shown in (a), the minimum linewidth in this region is 220 nm. First, the sample was observed using an infrared microscope with an 850 nm illumination source and a 100× objective lens (NA ~ 0.8). The resulting image was blurry, and the 220 nm structure could not be clearly distinguished, as shown in [example image]. Figure 3As shown in (b). The sample was then observed using an infrared microscope with 63 μm calcium sodium glass microspheres under a 20× objective lens (NA ~ 0.4). The 220 nm structure and its surrounding features within the observation range were clearly distinguishable, as shown in [example image]. Figure 3 As shown in (c). The results of this embodiment demonstrate that the infrared microsphere optical nanoimaging system has higher resolution compared to the infrared optical microscopy system.

[0039] In summary, the infrared microsphere optical nanoimaging system proposed in this invention employs infrared illumination, which reduces light scattering and improves image contrast; it uses an infrared transparent microsphere lens to assist imaging, thereby improving imaging resolution; it enables non-contact real-time imaging in atmospheric environments, avoiding sample contamination; the microsphere lens is easily coupled with the objective lens, has a simple structure, and is inexpensive; and by using different infrared lights for illumination, it can penetrate semiconductor packaging materials such as silicon, achieving penetrating imaging.

[0040] Furthermore, this invention also proposes an imaging method for an infrared microsphere optical nanoimaging system, applied to the aforementioned infrared microsphere optical nanoimaging system, wherein the imaging method includes the following steps:

[0041] S101, Obtain a microsphere lens with a clean surface and no impurities, and fix it on the microsphere clamping device;

[0042] S102, Place the sample to be tested on the three-dimensional displacement platform and move it to the focal plane of the infrared microscopy system;

[0043] S103 controls the contact between the microsphere lens and the surface of the sample to be tested, and calculates the distance between the imaging surface position of the microsphere lens and the lower vertex of the microsphere lens according to the imaging formula, and adjusts the relative position of the sample to be tested and the microsphere lens to obtain a clear magnified image.

[0044] S104, Adjust the infrared microscopy system to acquire clear, high-contrast images using an infrared camera.

[0045] As an example, the imaging formula is as follows:

[0046]

[0047] in, This indicates the distance between the imaging plane of the microsphere lens and the lower vertex of the microsphere lens; Indicates the refractive index of the environment. This indicates the refractive index of the microsphere lens; Indicates the radius of the microsphere lens; This represents the distance between the sample to be tested and the lower vertex of the microsphere lens; it is taken as a negative value in the calculation.

[0048] As a specific embodiment, firstly, the selection and control of the microspheres are performed: infrared transparent microspheres are evenly sprinkled on a clean flat plate (glass slide or silicon wafer), and one clear, impurity-free microsphere is selected as the target microsphere under an optical microscope. The three-dimensional displacement platform is coarsely adjusted so that the probe tip, coated with adhesive (optical adhesive or other transparent adhesive that does not affect image quality), gradually approaches the target microsphere. When the probe tip is very close to the target microsphere, the three-dimensional displacement platform is finely adjusted to bring the microsphere into contact with the probe tip, and the probe is used to transfer the microsphere to the microsphere holding device. Next, the sample is moved and focused: the distance between the image plane position of the sample formed by the microsphere and the microsphere lens satisfies the following formula:

[0049]

[0050] in, This indicates the distance between the imaging plane of the microsphere lens and the lower vertex of the microsphere lens; Indicates the refractive index of the environment. This indicates the refractive index of the microsphere lens; Indicates the radius of the microsphere lens; This represents the distance between the sample to be tested and the lower vertex of the microsphere lens, and it is taken as a negative value in the calculation. The sample is moved to the focal plane of the microscope system; at this point, the infrared camera acquires a clear image of the sample surface. The microsphere is moved to the center of the field of view and slowly moved downwards until it contacts the sample surface. The position of the image plane is calculated according to the above formula. When the value is positive, it indicates that the image is above the sample. In this case, move both the sample and the microsphere downwards simultaneously. ;when A negative value indicates that the image is below the sample; in this case, both the sample and the microsphere should be moved upwards simultaneously. At this point, a magnified image of the sample formed by the microspheres can be observed. The clearest image can then be obtained by adjusting the aperture and polarizer in sequence.

[0051] It should be noted that the foregoing explanation of the infrared microsphere optical nanoimaging system also applies to the imaging method of the infrared microsphere optical nanoimaging system in this embodiment, and will not be repeated here.

[0052] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0053] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0054] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0055] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0056] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0057] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. An infrared microsphere optical nanoimaging system, characterized in that, include: An infrared illumination source, wherein the emission wavelength of the infrared illumination source is 780-2500nm; An infrared microscopy system, wherein the infrared illumination source is adjusted to reach the sample to be tested, and the reflected or transmitted light of the sample to be tested is converted to obtain an imaging beam. A microsphere lens, made of infrared transparent material, is positioned between the infrared microscope system and the sample to be tested via a microsphere clamping device to collect reflected or transmitted light from the sample. An infrared camera, which is mounted on the infrared microscopy system, can acquire high-contrast images based on the imaging beam; This also includes: A three-dimensional displacement platform, on which the sample to be tested is placed; The signal detection and control module is used to process the high-contrast images acquired by the infrared camera, control the emission of the infrared illumination source, and control the relative distance between the sample to be detected and the microsphere lens through the three-dimensional displacement platform. The imaging method includes the following steps: Obtain a microsphere lens with a clean surface and no impurities, and fix it on a microsphere clamping device; The sample to be tested is placed on a three-dimensional displacement platform and moved to the focal plane of the infrared microscope system; The microsphere lens is controlled to contact the surface of the sample to be tested, and the distance between the imaging surface position of the microsphere lens and the lower vertex of the microsphere lens is calculated according to the imaging formula. The relative position of the sample to be tested and the microsphere lens is adjusted to obtain a clear magnified image. Adjust the infrared microscope system to acquire clear, high-contrast images using an infrared camera; The imaging formula is as follows: in, This indicates the distance between the imaging plane of the microsphere lens and the lower vertex of the microsphere lens; Indicates the refractive index of the environment. This indicates the refractive index of the microsphere lens; Indicates the radius of the microsphere lens; This represents the distance between the sample to be tested and the lower vertex of the microsphere lens; it is taken as a negative value in the calculation.

2. The infrared microsphere optical nanoimaging system as described in claim 1, characterized in that, The infrared microscopy system includes: A beam splitter, wherein the beam splitter divides the optical path into an illumination light path and a reflection light path; The infrared illumination source in the illumination path passes sequentially through a light-collecting lens, an aperture stop, a field stop, a condenser lens, a polarizer, the third surface of a beam splitter, the first surface of a beam splitter, and an infrared objective lens to reach the microsphere lens. The reflected or transmitted light in the reflected light path passes sequentially through the infrared objective lens, the first surface of the beam splitter, the second surface of the beam splitter, the analyzer, and the sleeve lens to reach the infrared camera.

3. The infrared microsphere optical nanoimaging system as described in claim 2, characterized in that, The XY axis stepping accuracy of the three-dimensional displacement platform is less than or equal to 50 nm, and the Z axis stepping accuracy is less than or equal to 10 nm.

4. The infrared microsphere optical nanoimaging system as described in claim 1, characterized in that, The infrared illumination source is a broadband infrared source or a monochromatic infrared source.

5. The infrared microsphere optical nanoimaging system as described in claim 1, characterized in that, The infrared camera is an infrared detector sensitive to light with wavelengths from 780 nm to 2500 nm.

6. The infrared microsphere optical nanoimaging system as described in claim 1, characterized in that, The diameter of the microsphere lens is 2-100 μm.

7. The infrared microsphere optical nanoimaging system as described in claim 1, characterized in that, The microsphere lens comprises a microsphere lens group consisting of two or more microspheres.

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