A method for removing surface fluorescence from a welded corrugated pipe

Abstract

The present application relates to the field of bellows cleaning, and provides a method for removing fluorescent substances on the surface of welded bellows to solve the problem that fluorescent substances on the surface of bellows are difficult to remove effectively, comprising: S100, completely immersing the bellows in a degreasing agent solution, and then performing an ultrasonic cleaning process; S200, rinsing the inside and outside of the bellows with pure water; S300, obtaining fluorescent substance residual parameters through a fluorescent substance detection process, and obtaining cleaning parameters of a second ultrasonic cleaning process according to the fluorescent substance residual parameters; and S400, after cleaning the bellows according to the cleaning parameters, performing a blowing process to obtain the cleaned bellows. The present application removes grease through the degreasing agent in S100, and removes the residual degreasing agent solution and grease on the surface of the bellows through the pure water in S200. Due to the removal of the grease, the difficulty of removing the fluorescent substances is greatly reduced, and the cleaning parameters of the second ultrasonic cleaning process can be set according to the fluorescent substance residual situation, so that the removal effect is ensured while the removal efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of bellows cleaning, and more specifically, to a method for removing fluorescent substances from the surface of welded bellows. Background Technology

[0002] Semiconductor bellows are high-performance, high-purity flexible sealing connectors primarily used to solve connection challenges in semiconductor equipment caused by thermal expansion and contraction, vibration, or precision displacement. They must also ensure extremely high vacuum levels, ultra-cleanliness, and corrosion resistance. They are crucial "joints" connecting the "arteries" and "vein" of semiconductor equipment; though small, they are of paramount importance. The cleanliness of the bellows surface has a significant impact on its lifespan and the equipment environment; therefore, bellows cleaning is a vital step in their use.

[0003] Existing cleaning processes for stainless steel welded corrugated pipes mainly use ultrasonic cleaning followed by high-pressure water jet rinsing, which cannot effectively remove fluorescent substances from the corrugated pipe's surface. Fluorescent substances easily accumulate on the corrugated pipe's surface, affecting its performance in high vacuum or acid / alkali environments. Therefore, a new process is needed to solve the problem of fluorescent substances on the corrugated pipe surface. Summary of the Invention

[0004] The purpose of this invention is to provide a method for removing fluorescent substances from the surface of welded corrugated pipes, thereby solving the problem that fluorescent substances on the surface of corrugated pipes are difficult to remove effectively.

[0005] The embodiments of the present invention are achieved through the following technical solutions:

[0006] A method for removing fluorescent substances from the surface of a welded bellows includes:

[0007] S100. After completely immersing the corrugated pipe in the degreasing agent solution, heat the degreasing agent solution to 55-65℃, and then perform an ultrasonic cleaning process for 12-18 minutes. The ultrasonic frequency is 22-44kHz.

[0008] S200. After removing the bellows, rinse the inside and outside of the bellows with pure water.

[0009] S300. Obtain residual fluorescent parameters through fluorescent detection process, and obtain cleaning parameters for ultrasonic secondary cleaning process based on the residual fluorescent parameters.

[0010] S400. After cleaning the bellows according to the cleaning parameters, it undergoes a purging process to obtain a cleaned bellows.

[0011] Preferably, before the bellows is completely immersed in the degreasing agent solution, it is first purged with oil-free compressed air at 0.2-0.3 MPa; the oil-free compressed air flows in a horizontal direction.

[0012] When the outer wall of the bellows is purged, the oil-free compressed air flows radially along the bellows.

[0013] When the inner wall of the bellows is purged, the oil-free compressed air flows along the axial direction of the bellows.

[0014] Preferably, in the degreasing agent solution, the ratio of degreasing agent to water is 1:3 to 1:5, and the degreasing agent is an alkaline degreasing agent.

[0015] Preferably, the purging process uses nitrogen gas at 0.25-0.35 MPa with a nitrogen concentration ≥99.999%.

[0016] Preferably, the fluorescent detection process includes:

[0017] A100. Acquire a group of fluorescence images, wherein the fluorescence images in the group of fluorescence images include images of the outer wall of the corrugated pipe and the inner wall of the corrugated pipe;

[0018] A200, fluorescence residual rate and fluorescence aggregation degree are obtained through fluorescence image group;

[0019] A300. Based on the fluorescence residual rate and fluorescence aggregation degree, obtain the cleaning parameters for the ultrasonic secondary cleaning process.

[0020] The cleaning parameters include: ultrasonic frequency or ultrasonic time.

[0021] Preferably, the transport speed of the corrugated pipe remains constant between each process, and the cleaning parameter is the ultrasonic frequency.

[0022] Preferably, the A200 includes:

[0023] B100. After dividing the fluorescence image into several patches and converting them to grayscale, the position information and grayscale value of each patch are obtained.

[0024] B200. Obtain the number of fluorescent patches based on the grayscale value, and then obtain the fluorescence residual rate; obtain the largest fluorescent patch based on the grayscale value and location information; the fluorescence aggregation degree is the number of patches corresponding to the largest fluorescent patch.

[0025] Preferably, the removal method includes: obtaining a relationship curve between fluorescence residual rate, fluorescence aggregation degree, and ultrasonic frequency; the fluorescence residual condition corresponding to the point on the relationship curve can be effectively removed at its corresponding ultrasonic frequency;

[0026] Based on the relationship curve and the actual fluorescence residue, the ultrasonic frequency of the ultrasonic secondary cleaning process is obtained.

[0027] Preferably, the removal method includes: obtaining the first influence of fluorescence residual rate on ultrasonic frequency and the second influence of fluorescence aggregation degree on ultrasonic frequency through a finite relationship curve;

[0028] The ultrasonic frequency for the secondary ultrasonic cleaning process is determined based on the actual fluorescence residue, the first degree of influence, and the second degree of influence.

[0029] Preferably, the removal method includes: obtaining the proportional segment in the relationship curve to obtain the control curve; and obtaining the fluorescence residue status that the bellows needs to achieve before ultrasonic secondary cleaning based on the fluorescence residue rate and fluorescence aggregation degree corresponding to the control curve.

[0030] The present invention has at least the following beneficial effects:

[0031] This invention first removes grease using a degreasing agent in step S100, and then removes the residual degreasing agent solution and grease from the corrugated pipe surface using pure water in step S200. Although some fluorescent substances can also be removed in steps S100 and S200, the fluorescent substances are difficult to remove completely. However, due to the removal of grease, the difficulty of removing fluorescent substances is greatly reduced. Therefore, the cleaning parameters of the ultrasonic secondary cleaning process can be set according to the residual fluorescent substances, which can improve the removal efficiency while ensuring the removal effect. The corrugated pipe after ultrasonic degreasing and cleaning is imaged, and the acquired fluorescent image group is analyzed to obtain the fluorescence residue rate and fluorescence aggregation degree. Then, the ultrasonic frequency required for the ultrasonic secondary cleaning process is determined. The reason for choosing the fluorescence residue rate and fluorescence aggregation degree as analytical data to obtain the cleaning parameters of the ultrasonic secondary cleaning process is that, within a certain range, they are proportional to a certain extent to the minimum ultrasonic frequency that ensures cleanliness. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a view of the bellows before cleaning;

[0034] Figure 2 This is a display image of the bellows after cleaning. Detailed Implementation

[0035] To make the objectives, methods, and advantages of the embodiments of the present invention clearer, the methods in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments.

[0036] Example 1: A method for removing fluorescent substances from the surface of a welded corrugated pipe, characterized by comprising:

[0037] S100. After the pretreated corrugated pipe is completely immersed in the degreasing agent solution, the degreasing agent solution is heated to 55-65℃, and then ultrasonic cleaning is performed. The cleaning time is 12-18 minutes and the ultrasonic frequency is 22-44kHz.

[0038] S200. After removing the bellows, rinse the inside and outside of the bellows with pure water.

[0039] S300. Obtain residual fluorescent parameters through fluorescent detection process, and obtain cleaning parameters for ultrasonic secondary cleaning process based on the residual fluorescent parameters.

[0040] S400. After cleaning the bellows according to the cleaning parameters, it undergoes a purging process to obtain a cleaned bellows.

[0041] In practice, due to the unique structural characteristics of the corrugated pipe, stains easily remain on its concave belly area, and these stains are difficult to clean. Grease is a common type of stain on the surface of the corrugated pipe. When fibrous fluorescent substances remain on the surface of the corrugated pipe, the fluorescent substances are also difficult to remove effectively due to the stickiness of the grease. Therefore, in this embodiment, the grease is first removed by the degreasing agent in S100, and the remaining degreasing agent solution and grease on the surface of the corrugated pipe are removed by pure water in S200. Although some fluorescent substances can also be removed incidentally in steps S100 and S200, the fluorescent substances are difficult to remove completely. However, due to the removal of grease, the difficulty of removing fluorescent substances is greatly reduced. Therefore, the cleaning parameters of the ultrasonic secondary cleaning process can be set according to the residual fluorescent substances, so as to improve the removal efficiency while ensuring the removal effect.

[0042] As an example, before performing step S200, the bellows can be removed after the water temperature drops below 40°C, and then rinsed with pure water. The rinsing pressure can be selected as 0.3 MPa.

[0043] The liquid used during the cleaning process may remain in the grooves or inner walls of the bellows. By purging, airflow can remove moisture and some residual solids, such as welding slag, which not only further improves the cleanliness of the bellows but also reduces the energy consumption of the subsequent drying process.

[0044] Example 2: In order to enable the degreasing agent solution to effectively contact the grease on the surface of the bellows, accelerate the grease removal speed, and improve the removal effect, an improvement was made based on Example 1. In this example, the removal method includes: before the bellows is completely immersed in the degreasing agent solution, it is first purged with oil-free compressed air at 0.2-0.3 MPa; the oil-free compressed air flows in a horizontal direction.

[0045] When the outer wall of the bellows is purged, the oil-free compressed air flows radially along the bellows.

[0046] When the inner wall of the bellows is purged, the oil-free compressed air flows along the axial direction of the bellows.

[0047] In practice, when other contaminants, such as welding slag and metal filings, are present on or around the grease surface, the degreaser may not be able to effectively contact the grease, resulting in increased grease removal time or difficulty in completely removing the grease. Therefore, in this embodiment, before removing the grease through the corrugated pipe, some contaminants are removed to a certain extent by using oil-free compressed air to fully expose the grease and allow it to fully contact the degreaser solution.

[0048] When purging the outer wall of a corrugated pipe, purging along the pipe diameter makes it easier for contaminants to detach from the corrugated pipe.

[0049] After purging, the inner and outer walls of the bellows can be rinsed with pure water at 0.1-0.3 MPa before degreasing.

[0050] Example 3: To avoid or reduce corrosion of the stainless steel corrugated pipe during the cleaning process, an improvement was made based on Example 1. In this example, the ratio of degreasing agent to water in the degreasing agent solution is 1:3 to 1:5, and the degreasing agent is an alkaline degreasing agent.

[0051] In practice, since stainless steel is generally more alkali-resistant than acid-resistant, an alkaline degreasing agent is selected in this embodiment. KF330 or RBS-25 can be used as the alkaline degreasing agent. The ratio of degreasing agent to water can be selected as 1:4. Using the degreasing agent solution concentration provided in this embodiment, combined with heating and ultrasound, the degreasing agent solution can more easily penetrate into the fine gaps and complex structures of the bellows, improving the uniformity and comprehensiveness of the cleaning coverage. For example, heating can accelerate the diffusion of the degreasing agent and reduce the viscosity of the system, thus accelerating the penetration process.

[0052] Example 4: In this example, the purging process uses nitrogen gas at 0.25-0.35 MPa with a nitrogen concentration ≥99.999%.

[0053] In practice, nitrogen has a low dew point, which can effectively remove moisture from the system, and its inertness can also improve system safety.

[0054] Example 5: To effectively control the cleaning parameters of the ultrasonic secondary cleaning process, improvements were made based on Examples 1-4. In this example, the fluorescent detection process includes:

[0055] A100. Acquire a group of fluorescence images, wherein the fluorescence images in the group of fluorescence images include images of the outer wall of the corrugated pipe and the inner wall of the corrugated pipe;

[0056] A200, fluorescence residual rate and fluorescence aggregation degree are obtained through fluorescence image group;

[0057] A300. Based on the fluorescence residual rate and fluorescence aggregation degree, obtain the cleaning parameters for the ultrasonic secondary cleaning process.

[0058] The cleaning parameters include: ultrasonic frequency or ultrasonic time.

[0059] In practice, fluorescence images can be acquired through scanning, and these images can be categorized as inner wall or outer wall images. Due to the color difference between the fluorescent material and the corrugated pipe surface, the residual amount and aggregation degree of the fluorescent material can be easily obtained by analyzing the color proportion and the size of the color patches. The fluorescence residual rate can be obtained as a percentage of the total image area of ​​the fluorescent color patch. The fluorescence aggregation degree can be characterized by the size of the color patch representing the fluorescent material; since there may be many color patches representing the fluorescent material, the area of ​​the largest color patch can be used as the fluorescence aggregation degree.

[0060] When the fluorescence residual rate is high and / or the fluorescence aggregation is too high, the ultrasound time and / or ultrasound frequency can be increased.

[0061] As an example, a detection zone can be set up between the degreasing and cleaning zone and the ultrasonic secondary cleaning zone. Fluorescent detection is carried out during the transport from the degreasing and cleaning zone to the ultrasonic secondary cleaning zone using a corrugated pipe, and the fluorescence images are analyzed and judged in a timely manner to adjust the cleaning parameters of the ultrasonic secondary cleaning process.

[0062] The reason for choosing fluorescence residual rate and fluorescence aggregation degree as analytical data to obtain the cleaning parameters of the ultrasonic secondary cleaning process is that, within a certain range, both are proportional to the minimum ultrasonic frequency that ensures cleanliness.

[0063] Example 6: To ensure the stability of other processes, an improvement was made based on Example 5. In this example, the transport speed of the corrugated pipe between processes remains unchanged, and the cleaning parameter is the ultrasonic frequency.

[0064] In this specific implementation, the processes in this embodiment include: a sequentially connected primary purging process, a primary rinsing process with pure water, an ultrasonic degreasing process, a secondary rinsing process with pure water, an inspection process, a secondary ultrasonic cleaning process, a tertiary rinsing process with pure water, a secondary purging process, and a baking process. The movement of the corrugated tube between these processes also relies on existing transport devices. After the inspection process, to ensure complete removal of fluorescent substances from the corrugated tube, the parameters of the secondary ultrasonic cleaning process need to be adjusted according to the degree of fluorescence residue. However, if the time for secondary ultrasonic cleaning is different for different corrugated tubes, it will cause other processes and transport devices to make adaptive adjustments. Therefore, this embodiment only changes the ultrasonic frequency to ensure the cleaning effect of the corrugated tube, while keeping the cleaning time constant, thereby avoiding the impact of changes in cleaning time on other processes and facilitating production automation.

[0065] Example 7: To simplify the acquisition of fluorescence residual rate and fluorescence aggregation degree, an improvement was made based on Example 6. In this example, the A200 includes:

[0066] B100. After dividing the fluorescence image into several patches and converting them to grayscale, the position information and grayscale value of each patch are obtained.

[0067] B200. Obtain the number of fluorescent patches based on the grayscale value, and then obtain the fluorescence residual rate; obtain the largest fluorescent patch based on the grayscale value and location information; the fluorescence aggregation degree is the number of patches corresponding to the largest fluorescent patch.

[0068] In practice, blocks with the same grayscale value or a deviation less than a set threshold either belong to the same corrugated pipe or the same fluorescent material. Therefore, whether a block is a fluorescent block can be easily determined by its grayscale value, i.e., a block representing a fluorescent material. The residual amount of fluorescent material can be easily obtained by counting the number of blocks. Furthermore, a fluorescent block is a combination of multiple fluorescent blocks, and each fluorescent block is adjacent to at least one other fluorescent block.

[0069] Fluorescence residual rate = number of fluorescent patches / total number of patches.

[0070] Example 8: Obtain the relationship curve between fluorescence residual rate, fluorescence aggregation degree and ultrasonic frequency; the fluorescence residual conditions corresponding to the points on the relationship curve can be effectively removed at their corresponding ultrasonic frequencies;

[0071] Based on the relationship curve and the actual fluorescence residue, the ultrasonic frequency of the ultrasonic secondary cleaning process is obtained.

[0072] In practice, given a fixed cleaning time for the ultrasonic secondary cleaning process, the ultrasonic frequency is varied to ensure that bellows with varying levels of fluorescence residue can be effectively cleaned. Fluorescence residue is characterized by both fluorescence residue rate and fluorescence aggregation degree. Effective removal is defined as a fluorescence residue rate below a set threshold or the fluorescent substance becoming undetectable by the instrument.

[0073] The ultrasonic frequency on the relationship curve is the minimum ultrasonic frequency required for the corresponding fluorescence residue at a given cleaning time.

[0074] Once the actual fluorescence residual rate and fluorescence aggregation degree are obtained through the fluorescence detection process, the minimum ultrasonic frequency required to effectively clean the fluorescent substance can be obtained by substituting the two into the relationship curve.

[0075] Example 9: A large amount of experimental data is needed to construct a complete relationship curve. In order to solve the aforementioned problem, an improvement was made based on Example 8. In this example, the first influence of fluorescence residual rate on ultrasonic frequency and the second influence of fluorescence aggregation degree on ultrasonic frequency are obtained through a limited relationship curve.

[0076] The ultrasonic frequency for the secondary ultrasonic cleaning process is determined based on the actual fluorescence residue, the first degree of influence, and the second degree of influence.

[0077] In practice, the ultrasonic frequency and ultrasonic cleaning effect are not always directly proportional. For example, at low frequencies, the large volume and strong impact of cavitation bubbles make them more suitable for removing large particles or firmly attached contaminants. At medium to high frequencies, the number of cavitation bubbles increases, but the energy of each bubble decreases, resulting in more uniform impact and the ability to penetrate tiny gaps and blind holes, making them suitable for precision or complex workpieces. Since the bellows has already undergone cleaning during the secondary ultrasonic cleaning process, there is generally no excessive dirt buildup. Furthermore, the concave underside of the bellows used in semiconductors is narrower; see [reference needed]. Figure 1-2 Therefore, medium to high frequencies are more suitable for secondary ultrasonic cleaning. When fluorescent residue is within a specific range, the ultrasonic frequency is basically proportional to the ultrasonic cleaning effect; thus, the first and second influence degrees can be obtained through a finite-length relationship curve.

[0078] As an example, the minimum increase in ultrasonic frequency required to ensure the cleanliness of the bellows when the fluorescence residual rate increases by one unit, as determined by the relationship curve, is defined as the first increase value. The ratio of the first increase value to the initial ultrasonic frequency is the first influence factor x. The minimum increase in ultrasonic frequency required to ensure the cleanliness of the bellows when the fluorescence aggregation degree increases by one unit, as determined by the relationship curve, is defined as the second increase value. The ratio of the second increase value to the initial ultrasonic frequency is the second influence factor y. As an example, when the fluorescence residual rate is a and the fluorescence aggregation degree is b, the minimum ultrasonic frequency required to ensure the cleanliness of the bellows is H0. When the detected actual fluorescence residual rate is a+m and the fluorescence aggregation degree is b+n, the ultrasonic frequency used is H = (1+mx)(1+ny)H0.

[0079] Example 10: In order to make the ultrasonic frequency and fluorescence residue as proportional as possible to ensure the effectiveness of the ultrasonic secondary cleaning process, an improvement was made based on Example 9. In this example, the proportional segment in the relationship curve was obtained to obtain the control curve; the fluorescence residue level that the bellows needs to achieve before the ultrasonic secondary cleaning process was obtained based on the fluorescence residue rate and fluorescence aggregation degree corresponding to the control curve.

[0080] In practice, without limiting the amount of fluorescent residue, it is difficult to ensure that the ultrasonic frequency and the amount of fluorescent residue are directly proportional. Therefore, it is necessary to ensure a certain stain removal rate during the ultrasonic degreasing process so that the amount of fluorescent residue on the bellows is kept within a preset range. This allows the adjustment of the ultrasonic frequency in the ultrasonic secondary cleaning process to simply follow a direct proportional relationship.

[0081] As an example, when the deviation of the slope of the sequentially arranged points is less than a threshold, a straight line can be fitted using the aforementioned points as scatter points to obtain a complete proportional segment. The deviation can be calculated using the variance calculation formula. The actual proportional segment selected can be a segment from the aforementioned complete proportional segment, such as a segment with lower fluorescence residual rate and fluorescence aggregation degree.

[0082] As an example, the fluorescence detection process can be used to determine whether the fluorescence residue of the bellows meets the requirements of ultrasonic secondary cleaning. If it does not meet the requirements, the bellows is returned to the ultrasonic degreasing process for further cleaning. In other words, the fluorescence detection process can not only provide a basis for the ultrasonic frequency adjustment in the ultrasonic secondary cleaning process, but also detect whether the cleaning of the bellows during ultrasonic degreasing is qualified.

[0083] The above are merely preferred embodiments of the present invention and are not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for removing fluorescent substances from the surface of a welded corrugated pipe, characterized in that, include: S100. After completely immersing the corrugated pipe in the degreasing agent solution, heat the degreasing agent solution to 55-65℃, and then perform an ultrasonic cleaning process for 12-18 minutes. The ultrasonic frequency is 22-44kHz. S200. After removing the bellows, rinse the inside and outside of the bellows with pure water. S300. Obtain residual fluorescent parameters through fluorescent detection process, and obtain cleaning parameters for ultrasonic secondary cleaning process based on the residual fluorescent parameters. S400. After cleaning the bellows according to the cleaning parameters, it is then purged to obtain a cleaned bellows. The fluorescent detection process includes: A100. Acquire a group of fluorescence images, wherein the fluorescence images in the group of fluorescence images include images of the outer wall of the corrugated pipe and the inner wall of the corrugated pipe; A200, fluorescence residual rate and fluorescence aggregation degree are obtained through fluorescence image group; A300. Based on the fluorescence residual rate and fluorescence aggregation degree, obtain the cleaning parameters for the ultrasonic secondary cleaning process. The cleaning parameters include: ultrasonic frequency or ultrasonic time; Obtain the relationship curve between fluorescence residual rate, fluorescence aggregation degree and ultrasonic frequency; the fluorescence residual conditions corresponding to the points on the relationship curve can be effectively removed at their corresponding ultrasonic frequencies. Based on the relationship curve and the actual fluorescence residue, the ultrasonic frequency of the ultrasonic secondary cleaning process is obtained. The first influence of fluorescence residual rate on ultrasonic frequency and the second influence of fluorescence aggregation degree on ultrasonic frequency were obtained by using finite relationship curves. The ultrasonic frequency for the secondary ultrasonic cleaning process is determined based on the actual fluorescence residue, the first degree of influence, and the second degree of influence. Obtain the proportional segment from the relationship curve to get the control curve; based on the fluorescence residual rate and fluorescence aggregation degree corresponding to the control curve, obtain the fluorescence residual condition that the bellows needs to achieve before the ultrasonic secondary cleaning process.

2. The removal method according to claim 1, characterized in that, Before the bellows is completely immersed in the degreasing agent solution, it is first purged with oil-free compressed air at 0.2-0.3 MPa; the oil-free compressed air flows in a horizontal direction. When the outer wall of the bellows is purged, the oil-free compressed air flows radially along the bellows. When the inner wall of the bellows is purged, the oil-free compressed air flows along the axial direction of the bellows.

3. The removal method according to claim 1, characterized in that, In the degreasing agent solution, the ratio of degreasing agent to water is 1:3 to 1:5, and the degreasing agent is an alkaline degreasing agent.

4. The removal method according to claim 1, characterized in that, The purging process uses nitrogen gas at 0.25-0.35 MPa with a nitrogen concentration ≥99.999%.

5. The removal method according to any one of claims 1-4, characterized in that, The transport speed of the corrugated pipe remains constant between each process, and the cleaning parameter is the ultrasonic frequency.

6. The removal method according to claim 5, characterized in that, The A200 includes: B100. After dividing the fluorescence image into several patches and converting them to grayscale, the position information and grayscale value of each patch are obtained. B200. Obtain the number of fluorescent patches based on the grayscale value, and then obtain the fluorescence residual rate; obtain the largest fluorescent patch based on the grayscale value and location information; the fluorescence aggregation degree is the number of patches corresponding to the largest fluorescent patch.

Images