Dismounting device for tuner and semiconductor equipment

Abstract

The invention relates to a dismounting device for a tuner and semiconductor equipment. The dismounting device comprises a fixed clamping ring, a rotary clamping ring and a dismounting supporting rod, the fixed clamping rings can be opened and closed and are used for sleeving two sides of the tuner; a clamping groove is formed in the fixing clamping ring and used for limiting the position, acting on the stress face of the tuner, of the detachable supporting rod. The rotary clamping ring is arranged on the fixed clamping ring and synchronously moves along with opening and closing of the fixed clamping ring; and the detachable supporting rod can move up and down and is matched with the rotary clamping ring to push the tuner to be separated from the mounting reference. The problem that the operation space for dismounting the tuner is insufficient is solved, and the tuner can be simply and efficiently dismounted.

Description

Technical Field

[0001] This application relates primarily to the field of semiconductor equipment, and more particularly to a disassembly device for a tuner and a semiconductor device. Background Technology

[0002] The stable operation of semiconductor coating equipment directly determines the quality of the coated layer and production efficiency. The heating plate, as a key component of the coating equipment, has a significant impact on the uniformity and adhesion of the film deposition. The radio frequency tuner, as an important component that works with the heating plate to control process parameters, is crucial; a reliable connection between the two is the fundamental guarantee for the normal operation of the equipment.

[0003] The heating plate of the semiconductor coating equipment is connected to the tuner. In the existing design, the tuner and the heating plate are connected by a nickel rod protruding from the heating plate. In order to ensure the reliability of the connection between the two, a watchband structure is used to reinforce the connection between the two.

[0004] However, due to the tight connection between the two and the high temperature of the heating plate, after long-term operation, the connection between the heating plate and the tuner is not easy to separate, and they may even stick together, making it very difficult to disassemble the tuner. In extreme cases, the nickel rod protruding from the heating plate may loosen during disassembly, affecting the function of the heating plate. Summary of the Invention

[0005] One objective of this application is to provide a disassembly device and semiconductor equipment for a tuner, which solves the problems of insufficient operating space for disassembling the tuner and the impact on the function of the heating plate in the prior art.

[0006] According to one aspect of this application, a disassembly device for a tuner is provided, the disassembly device comprising: a retaining ring, a rotating ring, and a disassembly support rod;

[0007] The retaining ring is openable and closable for fitting onto both sides of the tuner; the retaining ring is provided with a groove for limiting the position of the disassembly support rod acting on the force-bearing surface of the tuner;

[0008] The rotating retaining ring is mounted on the fixed retaining ring and moves synchronously with the opening and closing of the fixed retaining ring;

[0009] The disassembly support rod can move up and down and cooperates with the rotating retainer to push the tuner away from the mounting reference.

[0010] Optionally, the top of the fixed retaining ring is provided with a concave track, and the bottom of the rotating retaining ring is provided with a guide protrusion. The guide protrusion is adapted to the concave track to realize that the rotating retaining ring moves synchronously with the opening and closing of the fixed retaining ring.

[0011] Optionally, the rotating clasp is provided with a handle for driving the rotating clasp to rotate in a specified direction.

[0012] Optionally, the handle and the rotating retaining ring are an integrated structure or detachably connected, and the surface of the handle is provided with anti-slip texture or coated with anti-slip material.

[0013] Optionally, the disassembly strut is provided with a first part limiting block and a second part limiting block;

[0014] The first limiting block is located at the lower part of the disassembly support rod and is used to cooperate with the fixing ring to realize the up and down movement of the disassembly support rod;

[0015] The second limiting block is located on the upper part of the disassembly support rod and is used to cooperate with the rotating retainer to convert the rotation of the rotating retainer into downward pressure on the disassembly support rod.

[0016] Optionally, the first part limiting block includes two symmetrically distributed limiting blocks that fit against the side wall of the card slot.

[0017] Optionally, the rotating retaining ring is provided with a buckle to prevent the rotating retaining ring from moving upward.

[0018] Optionally, the retaining ring includes a first retaining ring and a second retaining ring, the first retaining ring and the second retaining ring being symmetrically distributed and openable / closable;

[0019] The rotating clasp includes a first rotating clasp and a second rotating clasp that are symmetrically distributed.

[0020] Optionally, the disassembly struts include symmetrically distributed first disassembly struts and second disassembly struts, each of which acts on the force-bearing surface of the tuner.

[0021] Optionally, the disassembly device includes studs for connecting two fixed retaining rings and two rotating retaining rings.

[0022] Optionally, the first retaining ring and the second retaining ring form a limiting port at the opening and closing part, and the limiting port is used to fix the main body of the radio frequency device where the tuner is located.

[0023] According to another aspect of this application, a semiconductor device is also provided, the semiconductor device comprising:

[0024] The aforementioned disassembly device, radio frequency tuner, and heating plate;

[0025] The radio frequency tuner is connected to the heating plate. The fixing rings of the disassembly device are inserted into both sides of the radio frequency tuner, and the radio frequency tuner is pushed apart from the heating plate by the disassembly device.

[0026] Compared with existing technologies, this application provides a disassembly device for a tuner, comprising: a fixed retaining ring, a rotating retaining ring, and a disassembly support rod; the fixed retaining ring is openable and closable for fitting onto both sides of the tuner; the fixed retaining ring has a groove for defining the position of the disassembly support rod acting on the force-bearing surface of the tuner; the rotating retaining ring is disposed on the fixed retaining ring and moves synchronously with the opening and closing of the fixed retaining ring; the disassembly support rod is movable up and down and cooperates with the rotating retaining ring to push the tuner apart from the mounting reference. This solves the problem of insufficient operating space for disassembling the tuner, enabling simple and efficient disassembly of the tuner. Attached Figure Description

[0027] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings, wherein:

[0028] Figure 1 This application illustrates a disassembly device for a tuner, as provided in one aspect.

[0029] Figure 2 This diagram illustrates the disassembly of the support rod and the slot in one embodiment of this application;

[0030] Figure 3 This diagram illustrates the connection between a fixed retaining ring and a rotating retaining ring in one embodiment of this application.

[0031] Figure 4 This diagram illustrates the structure for disassembling the support rod and the limiting block in one embodiment of this application.

[0032] Figure 5 This diagram illustrates the structure of a tuner disassembly device according to one embodiment of the present application.

[0033] The numbers on the map are:

[0034] 10-Fixing retaining ring;

[0035] 101 - First retaining ring;

[0036] 102 - Second retaining ring;

[0037] 20-Rotating snap ring;

[0038] 201-First rotating retaining ring;

[0039] 202 - Second rotating clasp;

[0040] 30 - Disassemble the strut;

[0041] 301 - First disassembly support rod;

[0042] 302 - Second disassembly strut;

[0043] 40 - Card slot;

[0044] 50-handle;

[0045] 1011 - Concave track;

[0046] 2011 - Guide protrusion;

[0047] 60 - First part limiting block;

[0048] 70 - Second part limiting block;

[0049] 80-Snap-on;

[0050] 90-Stud;

[0051] 100-Limit Port;

[0052] The same or similar reference numerals in the accompanying drawings represent the same or similar parts. Detailed Implementation

[0053] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0054] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein, and therefore this application is not limited to the specific embodiments disclosed below.

[0055] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0056] Furthermore, the terms “up,” “down,” “left,” “right,” “top,” “bottom,” “horizontal,” and “vertical” used in the following description should be understood as the orientations shown in the paragraph and related figures. This relative terminology is for illustrative purposes only and does not imply that the described device must be manufactured or operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0057] It is understood that although terms such as “first,” “second,” “third,” etc., may be used here to describe various pipes, channels, components, areas, layers, and / or parts, these components, areas, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different pipes, channels, components, areas, layers, and / or parts.

[0058] In the existing technology, the nickel rod is inserted into the tuning copper plug using an interference fit.

[0059] To ensure the continuity of current between the heating plate and the tuner, the nickel rod and the tuner's copper plug are in very tight contact. After the heating plate has been operating at high temperature for a certain period of time, a copper-nickel alloy will form between the nickel rod and the copper plug at high temperatures, causing them to stick together and making it impossible to separate the tuner from the heating plate. Furthermore, because the space under the machine is narrow and there is no reliable support point, manually shaking or disassembling the tuner can cause the nickel rod to bend or loosen.

[0060] To address the aforementioned issues, this application proposes a disassembly device for radio frequency tuners, thereby solving the problem of insufficient operating space for disassembling tuners.

[0061] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this application. Therefore, the drawings only show the components relevant to this application and are not drawn according to the actual number, shape, and size of the components in the actual implementation. In the actual implementation, the form, quantity, and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex. To keep the illustrations as concise as possible, not all structures are shown in the drawings.

[0062] Figure 1 This application illustrates a disassembly device for a tuner, comprising: a retaining ring 10, a rotating ring 20, and a disassembly strut 30.

[0063] The retaining ring 10 is openable and closable for fitting onto both sides of the tuner; such as Figure 2 As shown, the retaining ring 10 has a groove 40 for limiting the position of the disassembly support rod 30 acting on the force-bearing surface of the tuner. (Continue to refer to...) Figure 1 The rotating retaining ring 20 is disposed on the fixed retaining ring 10 and moves synchronously with the opening and closing of the fixed retaining ring 10; the disassembly support rod 30 can move up and down and cooperates with the rotating retaining ring 20 to push the tuner to separate from the mounting reference.

[0064] By utilizing a ring-shaped double-layer structure, the lower layer ensures the overall structure is confined, while the upper rotating structure transmits force from an easily operable position to the force-bearing surface for disassembling the tuner, thus solving the problem of insufficient operating space for disassembling the tuner.

[0065] The retaining ring 10 has a hinged or telescopic structure, allowing it to be actively opened or closed, for example, opened to 90° and closed back to 0°, thus fitting into or removing from the tuner. In the open state, the retaining ring 10 is inserted around the tuner from both sides (left and right or front and back). When closed, the inner side of the ring fits against the edge of the tuner, forming a stable clamping position. After insertion, the retaining groove 40 is precisely aligned with the tuner's force-bearing surface. The disassembly support rod 30 is fixed and moved up and down via the retaining grooves 40 on both sides. The tuner's force-bearing surface is a rigid area capable of withstanding axial pressure without damaging internal components, serving as the direct point of application for the disassembly support rod 30.

[0066] The position change of the rotating retaining ring 20 is synchronized with the opening and closing of the fixed retaining ring 10, and it always maintains relative alignment with the fixed retaining ring 10.

[0067] The mounting reference is a device used to provide mounting support for the tuner and / or to achieve tuner temperature control. In thin film processing, the mounting reference may be a heating plate, and the tuner can be separated from the heating plate by the disassembly device described in this application.

[0068] The tuner is located in the central area of ​​the inner ring of the disassembly device. It is the object directly affected by the disassembly strut. The force-bearing surface of the tuner will be in contact with the end of the disassembly strut inside the device, and is located in the central operating space enclosed by the fixed retaining ring and the rotating retaining ring.

[0069] The heating plate is connected to the tuner and is also located within the space inside the annular part of the device. The heating plate is the supporting component of the tuner, which is stacked on the heating plate. When the support rod 30 is removed and the tuner is pushed, the tuner will separate from the surface of the heating plate. The retaining ring 10 is fitted into both sides of the tuner to lock and position it. The force is transmitted by rotating the retaining ring 20, and the force is transmitted by pressing down the support rod 30, which causes the tuner to separate from the mounting reference.

[0070] The disassembly device described in this application achieves precise force conversion and uniform transmission through a mechanical structure, avoiding damage to the tuner caused by uneven force during manual disassembly, and is adapted to the high-precision disassembly requirements of tuners in radio frequency equipment.

[0071] refer to Figure 3 The top of the fixed retaining ring 10 is provided with a concave track 1011, and the bottom of the rotating retaining ring 20 is provided with a guide protrusion 2011. The guide protrusion 2011 is adapted to the concave track 1011 to realize that the rotating retaining ring 20 moves synchronously with the opening and closing of the fixed retaining ring 10.

[0072] The top of the fixed retaining ring 10 is a concave track, and the extension direction of the track is consistent with the opening and closing direction of the fixed retaining ring. For example, if the fixed retaining ring opens and closes left and right, the track extends in the left and right direction. The track is a motion guide groove for the rotating retaining ring 20, used to limit the movement direction of the rotating retaining ring 20, and to prevent the rotating retaining ring 20 from shaking through the side wall of the groove. The bottom of the rotating retaining ring 20 has an integrally formed convex protrusion 2011. The cross-sectional shape and size of the protrusion are adapted to the concave track 1011 of the fixed retaining ring 10. For example, if the track is an arc-shaped groove, the protrusion is an arc-shaped protrusion. After the protrusion is embedded in the concave track, the rotating retaining ring 20 is hung on the fixed retaining ring 10, so that the rotating retaining ring 20 can move on the track.

[0073] Simply operating the retaining ring 10 to open and close automatically drives the rotating retaining ring into position, reducing manual alignment and improving disassembly efficiency. The interlocking structure of the track and protrusion prevents the rotating retaining ring from wobbling, ensuring smoother rotation and more precise force transmission during disassembly.

[0074] In one embodiment of this application, reference continues to be made to... Figure 1 The rotating retaining ring 20 is provided with a handle 50 for driving the rotating retaining ring 20 to rotate in a specified direction.

[0075] The handle 50 is fixed to the outer edge of the rotating retainer 20 and is radially distributed with respect to the rotation center of the rotating retainer 20, thereby ensuring maximum force efficiency. In a specified direction, such as clockwise, when the rotating retainer 20 rotates clockwise, it presses against the disassembly support rod 30 (specifically, against the limiting block), causing the disassembly support rod 30 to generate downward pressure in the vertical direction. This pushes the disassembly support rod 30 downward along the groove of the fixed retainer 10. The disassembly support rod 30 acts on the tuner's force-bearing surface, pushing the tuner apart from the mounting reference.

[0076] Specifically, the handle 50 and the rotating retaining ring 20 are either an integrated structure or detachably connected. The surface of the handle 50 is provided with anti-slip textures or coated with anti-slip material. The handle can be integrally formed with the rotating retaining ring, or it can be a detachable threaded connection. The surface is provided with knurling, anti-slip textures, or other structures, or it can be coated with anti-slip material, thereby facilitating gripping and rotation.

[0077] In one embodiment of this application, as Figure 4 As shown, the disassembly support rod 30 is provided with a first part limiting block 60 and a second part limiting block 70; the first part limiting block 60 is disposed at the lower part of the disassembly support rod 30 and is used to cooperate with the fixing ring 10 to realize the up and down movement of the disassembly support rod 30; the second part limiting block 70 is disposed at the upper part of the disassembly support rod 30 and is used to cooperate with the rotating ring 20, so that the rotation of the rotating ring 20 is converted into downward pressure on the disassembly support rod 30.

[0078] A first limiting block 60 is installed in the lower area of ​​the disassembly support rod. The side of the first limiting block 60 is in contact with the side wall of the slot, for example, the contact gap is ≤0.02mm. This ensures that the disassembly support rod slides up and down along the vertical direction of the slot, restricts the left and right, front and back swaying or rotation of the support rod, and ensures that the bottom of the support rod is always aligned with the force surface of the tuner, so as to avoid the tuner tilting or being damaged.

[0079] The first part limiting block 60 includes two symmetrically distributed limiting blocks that fit against the side wall of the slot.

[0080] The second limiting block is Figure 4 The cylindrical limiting block engages with a rotating retaining ring; the rotating retaining ring pushes the cylindrical limiting block downwards. The first limiting block is... Figure 4 The central cubic locating block, in conjunction with the retaining ring, ensures that the disassembly support rod can move vertically downwards. It should be noted that the shapes of the locating blocks in the two locations are merely illustrative examples for differentiation; the locating blocks in both locations can use the same or different shapes.

[0081] Specifically, the disassembly strut 30, through the engagement of the first limiting block 60 with the slot, can only move vertically and cannot deviate radially. Specifically, when the disassembly strut 30 descends, it bears the axial downward pressure transmitted by the rotating retaining ring 20. The two symmetrically distributed limiting blocks can simultaneously bear the reaction force of the slot from both sides, ensuring that the force line of the strut body is completely aligned with the axis, eliminating lateral load and preventing excessive force on one side of the slot from causing deformation. This improves subsequent positioning accuracy and avoids affecting the stability of tuner disassembly.

[0082] The second limiting block 70 is located in the upper area of ​​the disassembly strut 30. It is preferably a single limiting block set in the center. When the rotating retainer 20 rotates clockwise, its inner driving inclined surface gradually fits and squeezes the inclined surface of the second limiting block 70, thereby generating a downward pressure that pushes the disassembly strut 30 downward.

[0083] The first limiting block 60 constrains the movement direction of the disassembly support rod 30, and the second limiting block 70 converts the force, so as to achieve precise up and down movement and stable downward pressure output of the disassembly support rod 30, thus ensuring the safe and efficient separation of the tuner.

[0084] The position change of the rotating retaining ring 20 is synchronized with the opening and closing of the fixed retaining ring 10, and always maintains the relative position alignment with the fixed retaining ring 10, thereby ensuring that the rotating retaining ring can accurately align with the limit block of the disassembly strut when transmitting rotational force later.

[0085] In one embodiment of this application, reference continues to be made to... Figure 1 The rotating retaining ring 20 is provided with a buckle 80 to prevent the rotating retaining ring 20 from moving upward.

[0086] like Figure 3 As shown, after the guide protrusion of the rotating retaining ring 20 is embedded in the concave track of the fixed retaining ring 10, the buckle 80 is fixed on the rotating retaining ring 20. The buckle has a claw, which clamps the upper ring of the rotating retaining ring to form a locking structure. Together with the guide protrusion and the concave track, it constrains the up and down movement of the rotating retaining ring and prevents the rotating retaining ring 20 from moving upward.

[0087] In one embodiment of this application, reference is made to Figure 5 The fixing ring 10 includes a first fixing ring 101 and a second fixing ring 102, which are symmetrically distributed and can be opened and closed; the rotating ring 20 includes a first rotating ring 201 and a second rotating ring 202 that are symmetrically distributed.

[0088] Figure 1 The two retaining rings in the middle are in the closed state. Figure 5 The two retaining rings are in the open position, at which point the tuner can be inserted.

[0089] Continue to refer to Figure 5 The disassembly strut 30 includes a first disassembly strut 301 and a second disassembly strut 302 that are symmetrically distributed, and each disassembly strut acts on the force-bearing surface of the tuner.

[0090] The tuner disassembly device is fixed and limited by the first fixing ring 101 and the second fixing ring 102. Then, the upper rotating ring is rotated to push the disassembly support rod and press against the lower tuner to separate the tuner from the heating plate.

[0091] The symmetrical distribution allows it to fit into the narrow spaces on both sides of the tuner, avoiding interference with surrounding components. The two retaining rings are symmetrically distributed; when closed and locked, the force is evenly distributed to both sides of the mounting base, preventing excessive localized deformation. Opening the two retaining rings allows them to unfold to both sides of the tuner without needing to be inserted directly above it, thus avoiding obstruction of the tuner or collision with surrounding components.

[0092] Each retaining ring has a slot corresponding to a disassembly strut. The slot engages with the limiting block at the first part of the disassembly strut to restrict the strut to move only in the vertical direction, ensuring that the movement trajectory of each strut is independent and parallel, and that the two struts move down synchronously to prevent the tuner from tilting and separating.

[0093] The upper rotating structure ensures that the disassembly support rods on both sides are linked, so that both sides of the tuner are subjected to force at the same time, which greatly reduces the impact on the verticality of the nickel rod of the heating plate when disassembling the tuner.

[0094] The first and second rotating retaining rings correspond one-to-one with the first and second fixed retaining rings, respectively. They are guided by bottom protrusions that engage with the concave tracks of the fixed retaining rings, moving synchronously with the opening and closing of the fixed retaining rings to maintain alignment accuracy with the disassembly support rod. Each rotating retaining ring has a latch on its upper part, which cooperates with the corresponding fixed retaining ring to prevent the rotating retaining ring from moving upwards, ensuring stable force transmission.

[0095] During the force transmission stage, the handle of the rotating shackle is manually driven to make the rotating shackle rotate clockwise on the concave track of the fixed shackle. The driving inclined surface on the inner side of the rotating shackle is in contact with the inclined surface of the limiting block on the upper part of the disassembly strut. As the rotation angle increases, the inclined surface generates an axial component force, which pushes the disassembly strut downward.

[0096] During the separation phase, the disassembly strut moves vertically downward along the slot, with the soft end at the bottom contacting the tuner's bearing surface to avoid scratching the tuner. Continuous pressure is applied to overcome the assembly friction between the tuner and the mounting reference (such as a heating plate), allowing the tuner to gradually detach from the mounting reference and achieve safe separation. After separation, the rotating retaining ring is released, and the disassembly strut can be reset, for example, by using a return spring for automatic upward reset, or by manual reset. The retaining ring is then opened to remove the tuner.

[0097] In one embodiment of this application, the disassembly device includes a stud 90 for connecting two fixed retaining rings and two rotating retaining rings.

[0098] The stud 90 is installed on the opposite side of the hinge of the two fixed retaining rings and the two rotating retaining rings, as shown below. Figure 5 As shown, the first fixed retaining ring 101 mounting hole, the first rotating retaining ring 201 mounting hole, the second fixed retaining ring 102 mounting hole, and the second rotating retaining ring 202 mounting hole can all pass through. Both ends are locked with nuts. The mounting holes can be threaded holes that engage with the stud threads to achieve locking and fixing. Using the same stud enables the synchronous opening and closing and relative positioning of the two types of retaining rings, ensuring the overall motion accuracy and force transmission stability of the device.

[0099] The two retaining rings are closed and locked by a stud. The closing distance between the two retaining rings can be adjusted by the stud, thus adapting to tuners of different widths and eliminating the need to design separate tooling for different tuner models.

[0100] In one embodiment of this application, reference is made to Figure 1 The first retaining ring 101 and the second retaining ring 102 form a limiting port 100 at the opening and closing part, and the limiting port 100 is used to fix the main body of the radio frequency device where the tuner is located.

[0101] When the two retaining rings are closed, they form a limiting port, which can be rectangular, for example, a rectangular port with dimensions of 18mm × 58mm after merging. The main body of the RF device is the rigid foundation structure of the device, such as the device frame, the positioning bosses reserved in the outer shell, the mounting panel, etc.; when the retaining rings are closed, they are fixed to the main body of the RF device where the tuner is located through the rectangular limiting port 100, ensuring that the entire device does not move.

[0102] According to another aspect of this application, a semiconductor device is also provided, the semiconductor device comprising:

[0103] The aforementioned disassembly device, radio frequency tuner, and heating plate;

[0104] The radio frequency tuner is connected to the heating plate. The fixing rings of the disassembly device are inserted into both sides of the radio frequency tuner, and the radio frequency tuner is pushed apart from the heating plate by the disassembly device.

[0105] The radio frequency tuner is responsible for adjusting the frequency and impedance of the radio frequency signal. It is directly connected to the heating plate and transfers energy through an electromagnetic or mechanical port. The heating plate is used for temperature control. The disassembly device is used to safely and efficiently separate the radio frequency tuner and the heating plate. Specifically, it achieves mechanical separation by using a fixed retaining ring, a rotating retaining ring, and a disassembly support rod.

[0106] During the installation phase, the first and second retaining rings are placed on both sides of the tuner, and the slots are used for limiting the movement to ensure that the disassembly device is stably fixed on the tuner. At the same time, the rotating rings move synchronously with the retaining rings through the track.

[0107] During operation, by rotating the handle clockwise to the rotating retainer, the rotational motion is converted into a linear downward pressure to disassemble the support rod. The limiting block of the disassembly support rod pushes the tuner's force-bearing surface, causing the tuner to move downward and separate from the heating plate.

[0108] The simple operation of the rotary drive allows for efficient disassembly of the tuner, reducing equipment downtime and improving work efficiency. The design of the retaining ring and slot can also accommodate different models of tuners, handling diverse equipment sizes without additional tools, thus reducing maintenance costs and complexity.

[0109] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0110] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0111] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed depending on the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm their breadth of scope in some embodiments of this application are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

Claims

1. A disassembly device for a tuner, characterized in that, The disassembly device includes: a fixing ring, a rotating ring, and a disassembly support rod. The retaining ring is openable and closable for fitting onto both sides of the tuner; the retaining ring is provided with a groove for limiting the position of the disassembly support rod acting on the force-bearing surface of the tuner; The rotating retaining ring is mounted on the fixed retaining ring and moves synchronously with the opening and closing of the fixed retaining ring; The disassembly support rod can move up and down and cooperates with the rotating retainer to push the tuner away from the mounting reference.

2. The disassembly device according to claim 1, characterized in that, The top of the fixed retaining ring is provided with a concave track, and the bottom of the rotating retaining ring is provided with a guide protrusion. The guide protrusion is adapted to the concave track to realize that the rotating retaining ring moves synchronously with the opening and closing of the fixed retaining ring.

3. The disassembly device according to claim 1, characterized in that, The rotating clasp is provided with a handle for driving the rotating clasp to rotate in a specified direction.

4. The disassembly device according to claim 3, characterized in that, The handle and the rotating retaining ring are either an integrated structure or detachably connected, and the surface of the handle is provided with anti-slip texture or coated with anti-slip material.

5. The disassembly device according to claim 1, characterized in that, The disassembly support rod is provided with a first limiting block and a second limiting block; The first limiting block is located at the lower part of the disassembly support rod and is used to cooperate with the fixing ring to realize the up and down movement of the disassembly support rod; The second limiting block is located on the upper part of the disassembly support rod and is used to cooperate with the rotating retainer to convert the rotation of the rotating retainer into downward pressure on the disassembly support rod.

6. The disassembly device according to claim 5, characterized in that, The first part of the limiting block includes two symmetrically distributed limiting blocks that fit against the side wall of the card slot.

7. The disassembly device according to claim 1, characterized in that, The rotating retaining ring is provided with a buckle to prevent it from moving upward.

8. The disassembly device according to claim 1, characterized in that, The retaining ring includes a first retaining ring and a second retaining ring, which are symmetrically distributed and can be opened and closed; The rotating clasp includes a first rotating clasp and a second rotating clasp that are symmetrically distributed.

9. The disassembly device according to claim 1 or 8, characterized in that, The disassembly struts include symmetrically distributed first disassembly struts and second disassembly struts, each of which acts on the force-bearing surface of the tuner.

10. The disassembly device according to claim 8, characterized in that, The disassembly device includes studs for connecting two fixed retaining rings and two rotating retaining rings.

11. The disassembly device according to claim 8, characterized in that, The first retaining ring and the second retaining ring form a limiting opening at the opening and closing part, and the limiting opening is used to fix the main body of the radio frequency device where the tuner is located.

12. A semiconductor device, characterized in that, The semiconductor device includes: The disassembly device, radio frequency tuner, and heating plate as described in any one of claims 1 to 11; The radio frequency tuner is connected to the heating plate. The fixing rings of the disassembly device are inserted into both sides of the radio frequency tuner, and the radio frequency tuner is pushed apart from the heating plate by the disassembly device.

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