An ebsd sample stage for geological thin sections and an ebsd testing method

Abstract

The application relates to an EBSD test sample table and an EBSD test method for a geological slice, wherein the EBSD test sample table comprises a plug-in base, a rotating arm, a driving mechanism, a base plate table and a gravity center maintaining mechanism; the rotating arm is hinged to the plug-in base; the driving mechanism is drivingly connected with the rotating arm and used for driving the rotating arm to rotate; the base plate table is connected with the rotating arm, and the rotating arm is connected in the center of the base plate table; the gravity center maintaining mechanism is movably connected with the rotating arm, so that the overall gravity center of the rotating arm and the base plate table is always maintained in the vertical direction of the plug-in base. The application can prevent the gravity center of a large-size geological slice from deviating and ensure data collection accuracy.

Description

Technical Field

[0001] This application belongs to the field of geological sample testing technology, and specifically relates to an EBSD test sample stage and EBSD test method for geological thin sections. Background Technology

[0002] In the field of materials microstructure analysis, backscattered electron diffraction (EBSD) is an important technique for studying mineral crystal orientation, texture, and microstructure, and it is usually used in conjunction with scanning electron microscopy (SEM). The sample area supported by the substrate stage is typically ≤1 cm², such as a square sample with a side length ≤1 cm or a circular sample with a diameter ≤1 cm. However, in geological studies, geological thin sections, such as rock and mineral thin sections, generally contain larger mineral crystals, and the thin sections themselves often exist in larger sizes (sample area is usually greater than 1 cm²).

[0003] Currently, for EBSD analysis of geological samples, the test requires the sample to be tilted at a predetermined angle (70°) in SEM to optimize the interaction between the electron beam and the detector. There is currently no substrate stage that can control the autonomous tilting of the sample. In addition, for large geological sections that exceed the size of existing substrate stages, the center of gravity of the sample shifts significantly when tilted, which can easily cause image drift during SEM imaging, affecting the accuracy of data acquisition. There is also a risk that the sample will slip off the substrate stage. Summary of the Invention

[0004] In view of the above analysis, the present invention aims to provide an EBSD test sample stage and an EBSD test method for geological thin sections, so as to solve at least one of the above-mentioned problems existing in the prior art.

[0005] The objective of this invention is achieved as follows:

[0006] On the one hand, an EBSD test sample stage for geological thin sections is provided, comprising:

[0007] The plug-in base has its lower part mounted on the mounting base;

[0008] A rotating support arm, the bottom of which is hinged to the upper part of the plug-in base;

[0009] The drive mechanism is connected to the rotary arm drive and is used to drive the rotary arm to rotate.

[0010] The substrate stage is connected to the top of the rotating support arm at its bottom center.

[0011] The center of gravity holding mechanism is connected to the bottom of the substrate stage. When the rotating arm is tilted relative to the insertion base, the center of gravity holding mechanism moves in conjunction with the rotating arm so that the center of gravity of the rotating arm and the substrate stage is kept in the vertical direction where the insertion base is located.

[0012] Furthermore, the plug-in base includes a plug-in platform and a plug-in component. The plug-in platform is hollow inside. The drive mechanism includes a linear drive motor and a drive gear plate. The plug-in platform is installed at one end of the linear drive motor. The drive shaft of the linear drive motor passes through the plug-in platform. The plug-in component is installed at the other end of the linear drive motor. The drive gear plate is connected to the drive shaft of the linear drive motor. A hinge shaft is horizontally inserted on the side of the plug-in platform. The hinge shaft is rotatable. The side wall of the hinge shaft inside the plug-in platform has a toothed groove. The drive gear plate meshes with the hinge shaft. The rotating support arm is connected to the part of the hinge shaft outside the plug-in platform.

[0013] Furthermore, the connector is used to insert into the mounting base. After the connector is inserted into the mounting base, the end face of the linear drive motor abuts against the end face of the mounting base.

[0014] Furthermore, the center-of-gravity maintenance mechanisms include:

[0015] The slide rail is connected to the bottom of the substrate stage and is symmetrically arranged about the axis of rotation with a rotating support arm;

[0016] Counterweight component, slidably connected to the slide rail;

[0017] The counterweight drive mechanism is located at the bottom of the base plate and is used to drive the counterweight to a predetermined position when the rotating arm rotates in a first direction or a second direction opposite to the first direction, so that the center of the base plate and the counterweight as a whole is kept in the vertical direction where the insertion base is located.

[0018] Furthermore, the slide rail includes a hanger and a loop track. One end of the hanger is connected to the loop track, and the other end of the hanger is connected to the bottom of the base plate. The counterweight is provided with a sliding hole and passes through the lower horizontal frame of the loop track, and can slide relative to the horizontal frame.

[0019] Furthermore, the counterweight drive mechanism includes a timing belt, pulleys, wheel frame, and a speed-changing gear set. Pulleys are provided on the outer sides of both ends of the slide rail. The pulleys are rotatably connected to the wheel frame. The wheel frame is connected to the base plate. The timing belt is meshed with the pulleys. The speed-changing gear set is driven by the timing belt. The hinge shaft is meshed with the speed-changing gear set. The timing belt is connected to the counterweight.

[0020] Furthermore, the gear set includes a first gear, a second gear, a shift shaft, a bushing, and a third gear. The first gear is sleeved on the outer end of the hinge shaft. The rotating support arm has a mounting hole. The third gear is disposed in the mounting hole. The shift shaft is rotatably connected to the rotating support arm. One end of the shift shaft passes through the mounting hole and connects with the third gear. The other end passes through the outside of the rotating support arm and extends to a position above the first gear. The second gear meshes with the first gear. The bushing is sleeved on the shift shaft and connected to the rotating support arm. The timing belt passes through the mounting hole and meshes with the third gear.

[0021] Furthermore, the third gear shift pulley, synchronous belt, pulley, slide rail, and counterweight are all located within the rotation plane of the rotating arm.

[0022] Furthermore, two pushers are connected to the outer surface of the timing belt, and a through hole is provided on the counterweight. The timing belt passes through the through hole, and the two pushers are respectively located on opposite sides of the through hole and are in close contact with the counterweight. There is a gap between the through hole and the belt surface of the timing belt.

[0023] Furthermore, the substrate stage is also provided with a slide groove, and a clamping rail is provided in the slide groove. Two slide blocks are provided on the clamping rail, and the slide blocks can slide relative to the clamping rail. A positioning member is provided in the middle of the clamping rail. An elastic pull rope is provided between the positioning member and the slide block. One end of the elastic pull rope is connected to the positioning member, and the other end is connected to the slide block. A V-shaped latch is hinged on the slide block. The latch includes a latching side wing and a connecting side wing. A spring is connected to the connecting side wing, and the spring is also connected to the slide block. The latching side wing is located on the substrate stage surface, and the latching side wing can rotate about the connecting side wing as a rotation axis.

[0024] On the other hand, an EBSD testing method is also provided, which uses the aforementioned EBSD test sample stage to test geological thin sections, including the following steps:

[0025] The large geological section to be tested is fixed on the substrate stage;

[0026] The drive mechanism tilts the substrate stage to 70°. At this time, the center of gravity holding mechanism moves in conjunction with the rotating arm, so that the overall center of gravity of the rotating arm and the substrate stage is always kept in the vertical direction where the insertion base is located, thus completing the installation of large-size geological thin sheets.

[0027] Then, the test was started, and the test results were obtained.

[0028] Compared with the prior art, the EBSD test sample stage and EBSD test method for geological thin sections provided by the present invention can achieve at least one of the following beneficial effects:

[0029] 1. A plug-in base serves as a support component, hinged to a rotating arm. A drive mechanism is connected to the rotating arm to provide rotational power. When the drive mechanism operates, the rotating arm rotates around the hinge point, tilting the centrally connected substrate stage to a predetermined angle. At this time, a center-of-gravity (CCG) balancing mechanism moves in conjunction with the rotating arm, ensuring that the overall CCG of the rotating arm and substrate stage remains aligned with the vertical direction of the plug-in base, preventing CCG shift when large geological sections are tilted. By actively balancing the CCG, the system avoids CCG shift caused by tilting large samples, ensuring stable SEM imaging and improving data acquisition accuracy. Integrated drive and CCG adjustment functions allow for stable tilting without manual intervention, simplifying the operation process.

[0030] 2. By increasing the area of ​​the substrate stage supporting the sample, the testing of larger-sized geological thin section samples was achieved. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this specification or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings.

[0032] Figure 1 A schematic diagram of the overall structure of the EBSD test sample stage for geological thin sections provided by the present invention;

[0033] Figure 2 for Figure 1 A schematic diagram of the EBSD test sample stage viewed from below;

[0034] Figure 3 This is a schematic diagram of the center-of-gravity holding mechanism of the EBSD test sample stage provided by the present invention;

[0035] Figure 4 for Figure 1 Enlarged structural diagram of region A in the middle;

[0036] Figure 5 for Figure 3 A magnified structural diagram of region B in the middle;

[0037] Figure 6 for Figure 3 A magnified structural diagram of region C in the middle;

[0038] Figure 7 A schematic diagram of the substrate stage of the EBSD test sample stage provided by the present invention;

[0039] Figure 8 for Figure 7 A magnified structural diagram of region D in the middle.

[0040] Figure label:

[0041] 10. Plug-in base; 101. Plug-in platform; 102. Plug-in component; 11. Mounting base;

[0042] 20. Rotary support arm; 201. Mounting hole;

[0043] 30. Base plate stage; 31. Slide groove; 32. Clamping rail; 33. Slide block; 34. Positioning component; 35. Elastic pull rope; 36. Claw; 361. Snap-on side wing; 362. Connecting side wing;

[0044] 40. Center of gravity holding mechanism; 401. Slide rail; 4011. Hanger; 4012. Corrugated track; 402. Counterweight; 403. Synchronous belt; 4031. Pushing component; 4032. Through hole; 404. Pulley; 405. First speed change pulley; 406. Second speed change pulley; 407. Converter shaft; 408. Bushing; 409. Third speed change pulley;

[0045] 50. Linear drive motor; 51. Drive gear plate; 52. Hinge shaft. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. It should be noted that, unless otherwise specified, the implementation methods and features in the implementation methods in this disclosure can be combined, separated, interchanged, and / or rearranged. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0047] In the accompanying drawings, the dimensions and relative dimensions of components may be exaggerated for clarity and / or descriptive purposes. When exemplary embodiments can be implemented differently, a specific process sequence may be performed in a different order than that described. For example, two consecutively described processes may be performed substantially simultaneously or in the reverse order of their description. Furthermore, the same reference numerals denote the same components.

[0048] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, the singular forms “a” and “(the)” are also intended to include the plural forms. Furthermore, when the terms “comprising” and / or “including” and variations thereof are used in this specification, it indicates the presence of the stated features, integrals, steps, operations, parts, components, and / or groups thereof, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, parts, components, and / or groups thereof. It should also be noted that, as used herein, the terms “substantially,” “about,” and other similar terms are used as approximate terms rather than as terms of degree, thus explaining the inherent biases in measurements, calculated values, and / or provided values ​​that would be recognized by one of ordinary skill in the art.

[0049] One specific embodiment of the present invention discloses an EBSD test sample stage for geological thin sections, hereinafter referred to as an EBSD test sample stage. Figures 1 to 8As shown, the EBSD test sample stage includes a mounting base 11, a plug-in base 10, a rotating support arm 20, a drive mechanism, a substrate stage 30, and a center of gravity holding mechanism 40.

[0050] The mounting base 11 serves as a support component for the test sample stage, and its top surface is provided with an insertion hole. The lower part of the insertion base 10 is inserted into the mounting base 11. The bottom of the rotating support arm 20 is hinged to the upper part of the insertion base 10. The drive mechanism is connected to the rotating support arm 20 to drive the rotating support arm 20 to rotate. The substrate stage 30 is connected to the rotating support arm 20, and the rotating support arm 20 is connected to the center of the substrate stage 30. The geological sheet to be tested is fixedly mounted on the substrate stage 30. The center of gravity holding mechanism 40 is located at the bottom of the substrate stage 30. When the rotating support arm 20 is tilted relative to the insertion base 10, the center of gravity holding mechanism 40 moves in association with the rotating support arm 20, so that the center of gravity of the rotating support arm 20 and the substrate stage 30 is kept in the vertical direction where the insertion base 10 is located, that is, the center of gravity of the rotating support arm 20 and the substrate stage 30 is located or substantially located on the axis of the cylindrical insertion base 10.

[0051] It should be noted that the center of gravity of the rotating support arm 20 and the base plate 30 as a whole can be located on the axis of the cylindrical plug-in base 10, or it can deviate slightly from the axis of the plug-in base 10. For example, after adjusting the center of gravity, the vertical distance between the center of gravity of the two as a whole and the axis of the plug-in base 10 does not exceed 3mm.

[0052] Compared with existing technologies, the EBSD test sample stage of this application uses a plug-in base 10 as a supporting component, which is hinged to a rotating support arm 20. A drive mechanism is connected to the rotating support arm 20 to provide rotational power. The plug-in base 10 can be plugged into a mounting base 11, which has a disc structure and at least one insertion hole on its top surface. The plug-in base 10 can be plugged into this hole. When the drive mechanism operates, the rotating support arm 20 rotates around the hinge point, causing the centrally connected substrate stage 30 to tilt to a predetermined angle, 70°. At this time, the center of gravity stabilizing mechanism 40 moves in conjunction with the rotating support arm 20, ensuring that the overall center of gravity of the rotating support arm 20 and the substrate stage 30 remains in the vertical direction where the plug-in base 10 is located, preventing center of gravity shift when large geological sections are tilted. By actively balancing the center of gravity, center of gravity shift caused by tilting large samples is avoided, ensuring stable SEM imaging and improving data acquisition accuracy. The integrated drive and center of gravity adjustment functions allow for stable tilting without manual intervention, simplifying the operation process.

[0053] In this embodiment, the area of ​​the sample supported by the substrate stage 30 is greater than 1 cm²; preferably, the area supporting the sample on the substrate stage 30 is a rectangular area, with a length and width of 4 cm, so that two larger geological sections can be mounted. By increasing the area of ​​the sample supported by the substrate stage 30, the testing of larger geological sections (i.e., large-size samples) can be accommodated.

[0054] In some optional embodiments, the plug-in base 10 includes a plug-in platform 101 and a plug-in member 102. The plug-in platform 101 is hollow inside, and the plug-in member 102 is a solid round rod. The driving mechanism includes a linear drive motor 50 and a drive gear plate 51. The plug-in platform 101 is installed at one end of the linear drive motor 50, and the drive shaft of the linear drive motor 50 passes through the plug-in platform 101. The plug-in member 102 is installed at the other end of the linear drive motor 50. The drive gear plate 51 is connected to the drive shaft of the linear drive motor 50. A hinge shaft 52 is horizontally inserted on the side of the plug-in platform 101. The hinge shaft 52 is rotatable. The side wall of the hinge shaft 52 located inside the plug-in platform 101 has a toothed groove. The drive gear plate 51 meshes with the hinge shaft 52. The rotating support arm 20 is connected to the part of the hinge shaft 52 located outside the plug-in platform 101.

[0055] The insertion platform 101 of the insertion base 10 is a hollow cylindrical structure, while the insertion component 102 is a solid cylindrical structure. The drive mechanism consists of a linear drive motor 50 and a drive gear plate 51. The insertion platform 101 is installed at one end of the linear drive motor 50, and the drive shaft passes through the insertion platform 101 and connects to the drive gear plate 51. The insertion component 102 is installed at the other end of the linear drive motor 50 and is fixedly connected to the motor housing of the linear drive motor 50. The insertion component 102 is used to connect to the mounting base 11 of the SEM, and the insertion component 102 is coaxially arranged with the insertion platform 101 and the drive shaft of the linear drive motor 50. This arrangement allows the linear drive motor 50 body to be used as a support structure, integrating multiple parts into one, which is beneficial for center of gravity control. When the drive shaft of the linear drive motor 50 reciprocates, the drive gear plate 51 pushes the hinge shaft 52 to rotate, thereby driving the rotating support arm 20 connected to the exposed part of the hinge shaft 52 to rotate, realizing the tilting action of the substrate stage 30. The hollow insertion stage 101 provides installation space for the drive tooth plate 51 and hinge shaft 52, adapting to the limited installation environment inside the scanning electron microscope and avoiding structural interference.

[0056] The connector 102 is used to connect to the mounting base 11. After the connector 102 is connected to the mounting base 11, the end face of the linear drive motor 50 abuts against the end face of the mounting base 11. When the connector 102 is inserted into the mounting base 11, the end face of the linear drive motor 50 and the end face of the mounting base 11 are tightly abutted, forming a rigid support through mechanical engagement, limiting the minute displacement of the substrate stage 30 caused by electron beam bombardment or mechanical vibration during SEM imaging. The abutment eliminates any gaps during installation, ensuring the positioning accuracy of the substrate stage 30 during tilting movements and further suppressing image drift. It also provides better support and stability for the substrate stage 30.

[0057] In some optional embodiments, the center of gravity holding mechanism 40 includes a slide rail 401, a counterweight 402, and a counterweight driving mechanism; the slide rail 401 is connected to the bottom of the base plate 30 and is symmetrically arranged about the axis of rotation of the support arm 20; the counterweight 402 is slidably connected to the slide rail 401; the counterweight driving mechanism is disposed at the bottom of the base plate 30 and is used to drive the counterweight 402 to a predetermined position when the support arm 20 rotates in a first direction or in a second direction opposite to the first direction, so that the center of the base plate 30 and the counterweight 402 as a whole is maintained in the vertical direction where the insertion base 10 is located.

[0058] When the rotating arm 20 rotates in the first direction (e.g., to the left), the counterweight drive mechanism drives the counterweight 402 to move to a predetermined position in the opposite second direction (e.g., to the right); and vice versa. By adjusting the position of the counterweight 402, the overall center of mass of the substrate stage 30 and the counterweight 402 is always kept on the vertical axis of the insertion base 10, balancing the center of gravity shift when a large sample is tilted. According to the tilt angle and direction of the rotating arm 20, the counterweight drive mechanism synchronously adjusts the position of the counterweight 402, forming a dynamic balance torque to ensure SEM imaging stability.

[0059] In one alternative embodiment, the length of the rotating support arm 20 is set to 4 cm, the weight of the substrate stage 30 and the sample is set to 50 g, and after the rotating support arm 20 rotates 20 degrees to the left from a vertical position, the counterweight 402 moves 3 cm to the right, and the weight of the counterweight 402 is set to 22.8 g. The weight of the rotating support arm 20 is negligible in the calculation, or its center of gravity is located at the hinge point. In actual use, the weight of various additional structures and other conditions should be considered.

[0060] In one alternative embodiment, the slide rail 401 includes a hanger 4011 and a loop track 4012. One end of the hanger 4011 is connected to the loop track 4012, and the other end of the hanger 4011 is connected to the bottom of the substrate platform 30. The counterweight 402 is provided with a sliding hole and passes through the lower horizontal frame of the loop track 4012, and can slide relative to the horizontal frame. The loop track 4012 is suspended from the bottom of the substrate platform 30 by the hanger 4011, and its horizontal frame provides a straight sliding path for the counterweight 402. The movement direction of the counterweight 402 is consistent with the surface of the substrate platform 30.

[0061] In one alternative embodiment, the counterweight drive mechanism includes a timing belt 403, pulleys 404, a wheel frame, and a speed-changing gear set. Pulleys 404 are provided on the outer sides of both ends of the slide rail 401. The pulleys 404 are rotatably connected to the wheel frame. The wheel frame is connected to the base plate 30. The timing belt 403 is meshed with the pulleys 404. The speed-changing gear set is driven by the timing belt 403. The hinge shaft 52 is meshed with the speed-changing gear set. The timing belt 403 is connected to the counterweight 402.

[0062] The pulleys 404 on the outer sides of both ends of the slide rail 401 are fixed to the base plate 30 via wheel frames. The synchronous belt 403 meshes with the pulleys 404 and is connected to the counterweight 402. When the hinge shaft 52 rotates, it drives the speed-changing gear set to rotate. After speed change, the speed-changing gear set drives the synchronous belt 403 to move, thereby driving the counterweight 402 to slide along the slide rail 401. The speed-changing gear set, through the gear meshing transmission ratio conversion, makes the moving speed of the counterweight 402 match the tilt angle of the rotating support arm 20. For example, when the hinge shaft 52 rotates 20 degrees to the left, the speed-changing gear set controls the synchronous belt 403 to drive the counterweight 402 to move 3cm to the right. When the counterweight 402 moves to this position, the center of gravity of the tilted base plate 30 and the counterweight 402 as a whole remains in the same vertical direction as the center of the vertical base plate 30.

[0063] Through the coupling transmission of the gear set and the synchronous belt 403, the angle change of the rotating support arm 20 is converted into the position adjustment of the counterweight 402 in real time, realizing dynamic synchronization of center of gravity compensation. During the test, the base plate stage 30 rotates at an angle that is usually 20 degrees relative to the vertical direction. When the base plate stage 30 may need to rotate to different angles, the moving distance and weight of the counterweight 402 need to be preset in advance to avoid the proportional relationship between the base plate stage 30 and the torque when rotating at different angles.

[0064] In one alternative embodiment, the gear set includes a first gear 405, a second gear 406, a shift shaft 407, a bushing 408, and a third gear 409. The first gear 405 is sleeved on one end of the hinge shaft 52 extending outward. The rotating support arm 20 is provided with a mounting hole 201. The third gear 409 is disposed in the mounting hole 201. The shift shaft 407 is rotatably connected to the rotating support arm 20. One end of the shift shaft 407 passes through the mounting hole 201 and connects with the third gear 409. The other end passes through the outside of the rotating support arm 20 and extends to a position above the first gear 405. The second gear 406 is meshed with the first gear 405. The bushing 408 is sleeved on the shift shaft 407 and connected to the rotating support arm 20. The timing belt 403 passes through the mounting hole 201 and meshes with the third gear 409.

[0065] When the hinge shaft 52 rotates, the first gear-changing wheel 405 drives the second gear-changing wheel 406 to rotate, which in turn drives the third gear-changing wheel 409 to rotate via the conversion shaft 407. This causes the synchronous belt 403, which meshes with the third gear-changing wheel 409, to move, pulling the counterweight 402 to slide. The bushing 408 strengthens the connection of the conversion shaft 407, ensuring stable rotation of the conversion shaft 407.

[0066] In one alternative embodiment, the first gear shift wheel 405, the second gear shift wheel 406, the conversion shaft 407, the bushing 408, and the third gear shift wheel 409 can all be made of nylon or engineering plastic to further reduce their weight. A balancing component can also be provided on the rotating support arm 20 to balance the lateral force exerted by the second gear shift wheel 406 on the rotating support arm 20.

[0067] In one alternative embodiment, when the hinge shaft 52 rotates to the left, the first gear shifter 405, being sleeved on the hinge shaft 52 and coaxial with it in the same direction, rotates to the left. When the gears mesh, adjacent gears rotate in opposite directions. The leftward rotation of the first gear shifter 405 drives the second gear shifter 406 to rotate to the right. The second gear shifter 406 and the third gear shifter 409 are coaxial and rotate in the same direction; therefore, the third gear shifter 409 rotates in the same direction as the second gear shifter 406. When the synchronous belt 403 meshes with the third gear shifter 409, the direction of gear rotation determines the direction of synchronous belt 403's movement. When the third gear shifter 409 rotates to the right, the upper synchronous belt 403 is driven to move to the right, and the lower synchronous belt 403 moves to the left. Therefore, the counterweight 402 connected to the upper synchronous belt 403 moves to the right.

[0068] In one optional embodiment, a tooth configuration is provided for the first gear shifter 405, the second gear shifter 406, and the third gear shifter 409. The first gear shifter 405 has 6 teeth, the second gear shifter 406 has 33 teeth, and the third gear shifter 409 has 33 teeth. The diameter of the first gear shifter 405 is 0.54 cm, the diameter of the second gear shifter 406 is 2.97 cm, and the diameter of the third gear shifter 409 is 2.97 cm. With this configuration, the gear pairing of the first gear shifter 405, the second gear shifter 406, and the third gear shifter 409 ensures that when the hinge shaft 52 rotates to the left, the combination of the timing belt 403 and the gears moves the counterweight 402 to the right, completing the center-of-gravity balancing action of the base plate 30. It is understood that the above parameters can be adjusted according to actual conditions.

[0069] The third gear shift wheel 409, synchronous belt 403, pulley 404, slide rail 401, and counterweight 402 are all located within the rotation plane of the rotating arm 20. This plane (i.e., the plane perpendicular to the axis of hinge shaft 52) ​​is also located within the rotation plane of the rotating arm 20. When the rotating arm 20 rotates around hinge shaft 52, all moving parts work together in the same plane. The synchronous belt 403 moves along the slide rail 401, and the counterweight 402 slides with the synchronous belt 403 within the rotation plane, ensuring that the change in the lever arm of the center of gravity adjustment is coupled with the change in the tilt angle within the same plane. This configuration eliminates motion coupling errors in three-dimensional space, allowing the position adjustment of the counterweight 402 to directly correspond to the offset of the center of gravity within the rotation plane, thus improving the response speed of balance control.

[0070] In one alternative embodiment, the top of the rotating arm 20 is connected to the base plate 30 in a Y-shaped structure, and the slide rail 401, counterweight 402 and timing belt 403 are all spaced through the Y-shaped structure at the top of the rotating arm 20.

[0071] In one alternative embodiment, two pushers 4031 are connected to the outer surface of the synchronous belt 403. A through hole 4032 is provided on the counterweight 402, through which the synchronous belt 403 passes. The two pushers 4031 are respectively located on opposite sides of the through hole 4032 and are in close contact with the counterweight 402. A gap exists between the through hole 4032 and the belt surface of the synchronous belt 403. The pushers 4031 are located on opposite sides of the through hole 4032 and are in close contact with the counterweight 402. When the synchronous belt 403 moves, the pushers 4031 push the counterweight 402 to slide along the slide rail 401. The gap design allows the synchronous belt 403 to freely pass through the through hole 4032, avoiding friction between the belt surface and the hole wall. Simultaneously, direct connection between the synchronous belt 403 and the counterweight 402 is avoided, thus sharing the weight of the counterweight 402 and preventing imbalance.

[0072] In one alternative embodiment, the substrate stage 30 is further provided with a clamping and fixing assembly for clamping and fixing the geological sheet to be tested onto the substrate stage 30.

[0073] The number of clamping and fixing components is two, and the two clamping and fixing components can clamp and fix two geological thin sections. Preferably, each clamping and fixing component has four clamping and fixing points at the edge of the geological thin section, and the four clamping and fixing points are located at the four corners of a rectangle.

[0074] In one alternative embodiment, the clamping and fixing assembly includes a clamping rail 32, a slide block 33, a positioning member 34, an elastic pull rope 35, and a claw 36. The table surface of the substrate platform 30 is also provided with a slide groove 31, and the clamping rail 32 is provided in the slide groove 31. Two slide blocks 33 are provided on the clamping rail 32, and the slide blocks 33 can slide relative to the clamping rail 32. A positioning member 34 is provided at the middle position of the clamping rail 32. An elastic pull rope 35 is provided between the positioning member 34 and the slide block 33. One end of the elastic pull rope 35 is connected to the positioning member 34, and the other end is connected to the slide block 33. A V-shaped claw 36 is hinged on the slide block 33. The claw 36 includes a snap-fit ​​side wing 361 and a connecting side wing 362. A spring is connected to the connecting side wing 362, and the spring is also connected to the slide block 33. The snap-fit ​​side wing 361 is located on the table surface of the substrate platform 30, and the snap-fit ​​side wing 361 can rotate about the connecting side wing 362 as a rotation axis.

[0075] When the geological sheet is mounted onto the substrate stage 30, the sliding slide 33 adjusts the position of the clamping claws 36, and the elastic pull rope 35 provides pre-tension. After the geological sheet is placed in position, the clamping claws 36 on both sides of the geological sheet press against each other, thus fixing the geological sheet. The clamping claws 36 press the sample firmly, and the clamping side wings 361 can rotate through the connecting side wings 362 to adapt to geological sheets of different thicknesses. At the same time, they press and fix the surface of the geological sheet, making the geological sheet fit the substrate stage 30. The cooperation of the elastic pull rope 35 and the spring allows the sliding slide 33 to automatically adjust its position according to the size of the geological sheet, and the clamping claws 36 apply a uniform clamping force, firmly fixing large-sized geological sheets and avoiding sample drift caused by traditional adhesive methods.

[0076] For example, the number of clamping and fixing components is two, and the number of slides 31 is four. Each geological sheet corresponds to two slides 31 and four latches 36. The slides 31 correspond to the side edges of the geological sheet, and the latches 36 correspond to the opposite ends of the geological sheet, with two latches 36 provided at each end. The latches 36, clamping rails 32, and slide blocks 33 are made of conductive metal, such as copper.

[0077] This embodiment also provides an EBSD testing method, using the aforementioned EBSD test sample stage to test geological thin sections. During testing, the large-sized geological thin section to be tested is fixed on the substrate stage 30. The drive mechanism is activated, and the rotating support arm 20 rotates around the hinge point, causing the centrally connected substrate stage 30 to tilt to 70°. At this time, the center of gravity holding mechanism 40 moves in conjunction with the rotating support arm 20, ensuring that the overall center of gravity of the rotating support arm 20 and the substrate stage 30 is always maintained in the vertical direction where the insertion base 10 is located, thus completing the installation of the large-sized geological thin section. Subsequently, the test begins, and the test results are obtained.

[0078] The EBSD testing method provided in this embodiment can test large-sized geological thin sections. By using a center-of-gravity maintenance mechanism, it prevents the center of gravity from shifting when the large-sized geological thin section is tilted, ensuring stable SEM imaging, improving data acquisition accuracy, and achieving stable tilting without manual intervention, thus simplifying the operation process.

[0079] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this application. It should be understood that the above description is only a specific embodiment of this application and is not intended to limit the scope of protection of this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. An EBSD test sample stage for geological thin sections, characterized in that, include: A plug-in base, the lower part of which is disposed on a mounting base; A rotating support arm, the bottom of which is hinged to the upper part of the plug-in base; A drive mechanism, connected to the rotating arm, is used to drive the rotating arm to rotate. A substrate stage, the center of the bottom surface of which is connected to the top of the rotating support arm; A center of gravity holding mechanism is connected to the bottom of the substrate platform. After the rotating arm is tilted relative to the insertion base, the center of gravity holding mechanism moves in association with the rotating arm so that the center of gravity of the rotating arm and the substrate platform is kept in the vertical direction where the insertion base is located. The center-of-gravity maintaining mechanism includes: A slide rail is connected to the bottom of the substrate stage and is arranged symmetrically about the axis of the rotating support arm; The counterweight is slidably connected to the slide rail. A counterweight drive mechanism is disposed at the bottom of the base plate, and is used to drive the counterweight to a predetermined position when the rotating support arm rotates in a first direction or a second direction opposite to the first direction, so that the center of gravity of the base plate and the counterweight as a whole is kept in the vertical direction where the plug-in base is located.

2. The EBSD test sample stage for geological thin sections according to claim 1, characterized in that, The plug-in base includes a plug-in platform and a plug-in component. The plug-in platform is hollow inside. The drive mechanism includes a linear drive motor and a drive gear plate. The plug-in platform is installed at one end of the linear drive motor. The drive shaft of the linear drive motor passes through the plug-in platform. The plug-in component is installed at the other end of the linear drive motor. The drive gear plate is connected to the drive shaft of the linear drive motor. A hinge shaft is horizontally inserted on the side of the plug-in platform. The hinge shaft is rotatable. The side wall of the hinge shaft located inside the plug-in platform has a toothed groove. The drive gear plate meshes with the hinge shaft. The rotating support arm is connected to the part of the hinge shaft located outside the plug-in platform.

3. The EBSD test sample stage for geological thin sections according to claim 2, characterized in that, The connector is used to be inserted into the mounting base. When the connector is inserted into the mounting base, the end face of the linear drive motor is in contact with the end face of the mounting base.

4. The EBSD test sample stage for geological thin sections according to claim 2, characterized in that, The slide rail includes a hanger and a loop track. One end of the hanger is connected to the loop track, and the other end of the hanger is connected to the bottom of the base plate. The counterweight is provided with a sliding hole and passes through the lower horizontal frame of the loop track, and can slide relative to the horizontal frame.

5. The EBSD test sample stage for geological thin sections according to claim 4, characterized in that, The counterweight drive mechanism includes a timing belt, pulleys, a wheel frame, and a speed-changing gear set. The pulleys are provided on the outer sides of both ends of the slide rail. The pulleys are rotatably connected to the wheel frame. The wheel frame is connected to the base plate. The timing belt is meshed with the pulleys. The speed-changing gear set is driven by the timing belt. The hinge shaft is meshed with the speed-changing gear set. The timing belt is connected to the counterweight.

6. The EBSD test sample stage for geological thin sections according to claim 5, characterized in that, The gear set includes a first gear, a second gear, a shift shaft, a bushing, and a third gear. The first gear is sleeved on the outer end of the hinge shaft. The rotating support arm has a mounting hole. The third gear is disposed in the mounting hole. The shift shaft is rotatably connected to the rotating support arm. One end of the shift shaft passes through the mounting hole and connects to the third gear, while the other end passes through the outside of the rotating support arm and extends above the first gear. The second gear meshes with the first gear. The bushing is sleeved on the shift shaft and connects to the rotating support arm. The timing belt passes through the mounting hole and meshes with the third gear.

7. The EBSD test sample stage for geological thin sections according to claim 6, characterized in that, The third gear shift wheel, the synchronous belt, the pulley, the slide rail, and the counterweight are all located within the rotation plane of the rotating arm.

8. The EBSD test sample stage for geological thin sections according to claim 5, characterized in that, Two pushers are connected to the outer surface of the synchronous belt. The counterweight is also provided with a through hole. The synchronous belt passes through the through hole. The two pushers are respectively located on opposite sides of the through hole and are in close contact with the counterweight. There is a gap between the through hole and the belt surface of the synchronous belt.

9. An EBSD testing method, characterized in that, Testing geological thin sections using the EBSD test stage according to any one of claims 1 to 8 includes the following steps: The large geological section to be tested is fixed on the substrate stage; The drive mechanism tilts the substrate stage to 70°. At this time, the center of gravity holding mechanism moves in conjunction with the rotating arm, so that the overall center of gravity of the rotating arm and the substrate stage is always kept in the vertical direction where the insertion base is located, thus completing the installation of large-size geological thin sheets. Then, the test was started, and the test results were obtained.

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