Film thickness data processing method and system

Abstract

The invention provides a film thickness data processing method and system, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of process parameter adjustment direction deviation caused by misjudgment of film thickness data of an edge region of a surface film layer of a to-be-detected product. The film thickness data processing method comprises the steps of obtaining a target film color map of a surface film layer of a to-be-detected product, and determining an internal region film thickness value and an edge region film thickness value of the surface film layer based on the target film color map; and based on the internal area film thickness value, the edge area film thickness value, a preset standard film thickness value and a preset judgment value, determining a detection result of the edge area film thickness value. Through the method, the inaccurate edge area film thickness value caused by color periodicity can be detected, and then the inaccurate edge area film thickness value is screened out, so that parameter adjustment can be performed based on the accurate edge area film thickness value during process parameter adjustment; and the probability that the film is thicker or thinner due to deviation of the process parameter adjusting direction is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a film thickness data processing method and system. BACKGROUND

[0002] In the production of photovoltaic cells, the deposition of thin films such as polycrystalline silicon (Poly-Si), silicon nitride (SiNx) and the like is usually involved, such as deposition by low-pressure chemical vapor deposition (LPCVD) or plasma-enhanced chemical vapor deposition (PECVD) process. When adjusting the process parameters, it is usually necessary to adjust the parameters according to the film thickness data of the thin film.

[0003] In related technologies, when determining the film thickness data of the thin film, the film color chart of the thin film is first obtained by an online automated optical inspection (AOI) film thickness instrument, and then a field process engineer compares the film color chart with a standard color chart to confirm the film thickness range.

[0004] Since the color of the thin film of the silicon wafer obtained by the AOI film thickness instrument is mainly determined by the optical interference effect, the relationship between the interference color and the film thickness is periodic, that is, very thick films and very thin films will exhibit similar colors (this phenomenon is called color periodicity or interference color cycle). In actual processes, since the edge region of the film color chart is prone to have similar colors when the film thickness is very thick and the film thickness is very thin, the field process engineer is prone to make a false judgment on the film thickness data of the edge region of the silicon wafer, thereby causing the process parameter adjustment direction to deviate, resulting in the occurrence of thicker or thinner film thickness. SUMMARY

[0005] To solve the above technical problems, the present application is proposed. The embodiments of the present application provide a film thickness data processing method and system.

[0006] In a first aspect, an embodiment of the present application provides a film thickness data processing method, comprising: obtaining a target film color chart of a surface film layer of a product to be detected, determining an internal region film thickness value and an edge region film thickness value of the surface film layer based on the target film color chart, wherein the color value of the target film color chart is used to indicate the thickness of the surface film layer; determining a detection result of the edge region film thickness value based on the internal region film thickness value, the edge region film thickness value, a preset standard film thickness value and a preset judgment value, wherein the detection result is used to indicate whether the edge region film thickness value is accurate.

[0007] ​In some embodiments, the preset judgment value includes a first preset value and a second preset value; and based on the internal area film thickness value, the edge area film thickness value, the standard film thickness value and the preset judgment value, determining the detection result of the edge area film thickness value includes: determining a first difference between the edge area film thickness value and the standard film thickness value; in a case where the first difference is greater than the first preset value, determining that the detection result of the edge area film thickness value is inaccurate; and in a case where the first difference is less than or equal to the first preset value, determining the detection result of the edge area film thickness value based on the internal area film thickness value, the standard film thickness value and the second preset value.

[0008] In some embodiments, the preset judgment value further includes a third preset value; and in a case where the first difference is less than or equal to the first preset value, determining the detection result of the edge area film thickness value based on the internal area film thickness value, the standard film thickness value and the second preset value includes: in a case where the first difference is less than or equal to the first preset value, determining a second difference between the standard film thickness value and the internal area film thickness value; in a case where the second difference is less than or equal to the second preset value, determining that the detection result of the edge area film thickness value is accurate; and in a case where the second difference is greater than the second preset value, determining the detection result of the edge area film thickness value based on the standard film thickness value and the third preset value.

[0009] In some embodiments, in a case where the second difference is greater than the second preset value, determining the detection result of the edge area film thickness value based on the standard film thickness value and the third preset value includes: in a case where the second difference is greater than the second preset value, determining a third difference between the standard film thickness value and the edge area film thickness value; in a case where the third difference is greater than the third preset value, determining that the detection result of the edge area film thickness value is inaccurate; and in a case where the third difference is less than or equal to the third preset value, determining that the detection result of the edge area film thickness value is accurate.

[0010] In some embodiments, obtaining a target film color map of a surface film layer of a product to be detected includes: obtaining an initial film color map of the product to be detected, wherein the initial film color map includes a film color map of a region of the product to be detected and a film color map of other regions except the region of the product to be detected; and based on the initial film color map, determining the target film color map, wherein the target film color map is the film color map of the region of the product to be detected.

[0011] In some embodiments, the number of products to be detected has at least one, the surface film layer of the product to be detected includes an inner region and an edge region surrounding the inner region; wherein the determination of the inner region film thickness value and the edge region film thickness value of the surface film layer based on the target film color map includes: determining a plurality of inner position points in the inner region; determining a color value of each of the plurality of inner position points based on the plurality of inner position points and the target film color map, wherein the color value is an RGB color value; determining a preset film thickness value corresponding to a preset color value with the highest similarity to the color value of the inner position point based on the color value of each of the plurality of inner position points and the preset correspondence between the preset color value and the preset film thickness value, and taking the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the inner position point as the inner position point film thickness value of the inner position point; determining the inner region film thickness value based on the inner position point film thickness value of each of the plurality of inner position points; and determining a plurality of edge position points in the edge region; determining a color value of each of the plurality of edge position points based on the plurality of edge position points and the target film color map; determining a preset film thickness value corresponding to a preset color value with the highest similarity to the color value of the edge position point based on the color value of each of the plurality of edge position points and the correspondence, and taking the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the edge position point as the edge position point film thickness value of the edge position point; determining the edge region film thickness value based on the edge position point film thickness value of each of the plurality of edge position points.

[0012] In some embodiments, the determination of the inner region film thickness value based on the inner position point film thickness value of each of the plurality of inner position points includes: determining an average value of the inner position point film thickness value of each of the plurality of inner position points, and taking the average value as the inner region film thickness value.

[0013] In some embodiments, the product is placed in a boat structure when coated, the number of boat structures has at least three, all the boat structures are placed in the furnace tube, and all the boat structures are arranged in sequence along the first direction; wherein the determination of the plurality of edge position points in the edge region includes: in the case that the product to be detected is carried by the first boat structure in the first direction, selecting the plurality of edge position points from the two ends in the second direction in the edge region and the end away from the second boat structure in the edge region, the second direction intersecting the first direction; in the case that the product to be detected is carried by the boat structure between the first boat structure and the last boat structure in the first direction, selecting the plurality of edge position points from the two ends in the second direction in the edge region; in the case that the product to be detected is carried by the last boat structure in the first direction, selecting the plurality of edge position points from the two ends in the second direction in the edge region and the end away from the second last boat structure in the edge region.

[0014] In some embodiments, the determining the edge region film thickness value based on the edge position point film thickness values of the plurality of edge position points comprises: for the edge position point film thickness values of the plurality of edge position points at each end in the edge region, taking the second largest edge position point film thickness value in the edge position point film thickness values as a target edge position point film thickness value; and for the target edge position point film thickness values of all the ends in the edge region, taking the largest target edge position point film thickness value in the target edge position point film thickness values as the edge region film thickness value.

[0015] In a second aspect, an embodiment of the present application provides a film thickness data processing system for implementing the film thickness data processing method in any of the first aspect, comprising: an obtaining device configured to obtain a target film color chart of a surface film layer of a product to be detected; and a processing device configured to determine an inner region film thickness value and an edge region film thickness value of the surface film layer based on the target film color chart, and determine a detection result of the edge region film thickness value based on the inner region film thickness value, the edge region film thickness value, a preset standard film thickness value and a preset judgment value, wherein the color value of the target film color chart is used to indicate the thickness of the surface film layer, and the detection result is used to indicate whether the edge region film thickness value is accurate.

[0016] The film thickness data processing method and system provided by the embodiments of the present application can detect the inaccurate edge region film thickness value caused by the color periodicity, and then filter out the inaccurate edge region film thickness value, so that the parameter adjustment can be performed based on the accurate edge region film thickness value when the process parameter is adjusted, and the probability of the occurrence of the situation that the process parameter adjustment direction deviates to cause the film thickness to be thicker or thinner can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0018] Figure 1 Fig. 1 shows a flowchart of a film thickness data processing method provided by an exemplary embodiment of the present application.

[0019] Figure 2 Fig. 2 shows a flowchart of a first method for determining a detection result of an edge region film thickness value provided by an exemplary embodiment of the present application.

[0020] Figure 3 Fig. 3 shows a flowchart of a second method for determining a detection result of an edge region film thickness value provided by an exemplary embodiment of the present application.

[0021] Figure 4 Fig. 6 shows a flowchart of a third method for determining the film thickness value of the edge region according to an example embodiment of the present application.

[0022] Figure 5 Fig. 7 shows a flowchart of a method for determining a target film color map according to an example embodiment of the present application.

[0023] Figure 6 Fig. 8 shows a flowchart of a method for determining the film thickness value of the internal region according to an example embodiment of the present application.

[0024] Figure 7 Fig. 9 shows a flowchart of a method for determining the film thickness value of the edge region according to an example embodiment of the present application.

[0025] Figure 8 Fig. 10 shows a schematic diagram of an internal position point and an edge position point in a target film color map according to an example embodiment of the present application.

[0026] Figure 9 Fig. 11 shows a flowchart of a specific method for determining the film thickness value of the edge region according to an example embodiment of the present application.

[0027] Figure 10 Fig. 12 shows a structural diagram of a film thickness data processing system according to an example embodiment of the present application.

[0028] Reference signs: 800, target film color map; 810, internal region; 820, edge region; 1000, film thickness data processing system; 1001, processing device; 1002, acquisition device. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0030] Figure 1 Fig. 1 shows a flowchart of a film thickness data processing method according to an example embodiment of the present application.

[0031] The film thickness data processing method provided by the embodiments of the present application can be executed by an electronic device. The electronic device can be a terminal such as a smart phone, a tablet computer, a desktop computer, a controller, etc., or the electronic device can also be a server.

[0032] As Figure 1 shown, the film thickness data processing method provided by the embodiments of the present application includes the following steps 101~step 102.

[0033] Step 101, obtaining a target film color chart of the surface film layer of the product to be detected, and determining the internal area film thickness value and the edge area film thickness value of the surface film layer based on the target film color chart.

[0034] Wherein, the product to be detected can exemplarily be a silicon wafer, a wafer, a battery piece or a glass substrate. The surface film layer of the product to be detected can be a thin film deposited by LPCVD technology or PECVD technology, such as polysilicon, silicon nitride, etc. The target film color chart of the surface film layer of the product to be detected can be obtained based on the AOI film thickness instrument. The color value of the target film color chart is used to indicate the thickness of the surface film layer.

[0035] The internal area film thickness value refers to the film thickness value of the internal area (center area) of the surface film layer of the product to be detected. Generally, at least three boat structures are arranged in a first direction in each furnace tube, and a plurality of products are carried in each boat structure. Since the two ends of the edge area of the surface film layer of the products in each boat structure in the second direction (the second direction intersects the first direction), the end of the edge area of the surface film layer of the products in the first boat structure away from the second boat structure, and the end of the edge area of the surface film layer of the products in the last boat structure away from the second last boat structure are not uniformly heated, the thickness is more likely to deviate from the standard film thickness value, so the edge area film thickness value refers to the film thickness value of the above-mentioned ends.

[0036] Step 102, determining the detection result of the edge area film thickness value based on the internal area film thickness value, the edge area film thickness value, the preset standard film thickness value and the preset judgment value.

[0037] Wherein, the standard film thickness value refers to the ideal film thickness value, i.e. the thickness that the surface film layer of the product is expected to reach, and the preset judgment value includes at least one fixed parameter set, which is obtained through experimental test. The detection result is used to indicate whether the edge area film thickness value is accurate.

[0038] In the above embodiments, by the internal area film thickness value, the edge area film thickness value, the standard film thickness value and the preset judgment value, the inaccurate edge area film thickness value caused by color periodicity can be detected, and the inaccurate edge area film thickness value can be screened out. Thus, when performing (automatic) process parameter adjustment, the parameter adjustment can be performed based on the accurate edge area film thickness value, and the probability of the process parameter adjustment direction deviating to cause the film thickness to be thicker or thinner can be reduced.

[0039] Figure 2 As shown in the flowchart of the first method for determining the detection result of the edge area film thickness value provided by an exemplary embodiment of the present application.

[0040] In some embodiments, the preset judgment value includes a first preset value and a second preset value, wherein, when determining the detection result of the edge region film thickness value based on the internal region film thickness value, the edge region film thickness value, the standard film thickness value and the preset judgment value, the following steps 201-204 can be performed. Figure 2

[0041] Step 201, determining a first difference value between the edge region film thickness value and the standard film thickness value.

[0042] Step 202, judging whether the first difference value is greater than the first preset value.

[0043] If yes (i.e. the first difference value is greater than the first preset value), step 203 is performed; if no (i.e. the first difference value is less than or equal to the first preset value), step 204 is performed.

[0044] Step 203, determining that the detection result of the edge region film thickness value is inaccurate.

[0045] Step 204, determining the detection result of the edge region film thickness value based on the internal region film thickness value, the standard film thickness value and the second preset value.

[0046] Exemplarily, the first preset value ranges from 20 nm to 40 nm, such as 25 nm, 30 nm, 35 nm or 40 nm.

[0047] Exemplarily, if the first preset value is 30 nm, the edge region film thickness value is 190 nm, and the standard film thickness value is 150 nm, the first difference value between the edge region film thickness value and the standard film thickness value is 40 nm, which is greater than the first preset value, and it is judged that the detection result of the edge region film thickness value is inaccurate.

[0048] Exemplarily, if the first preset value is 30 nm, the edge region film thickness value is 170 nm, and the standard film thickness value is 150 nm, the first difference value between the edge region film thickness value and the standard film thickness value is 20 nm, which is less than the first preset value, and it is needed to further determine the detection result of the edge region film thickness value based on the internal region film thickness value, the standard film thickness value and the second preset value.

[0049] In the above embodiments, if the edge region film thickness value is too thick, i.e. too much greater than the standard film thickness value, it indicates that the edge region film thickness value is likely to be misjudged due to color periodicity, and if the edge region film thickness value is not too much greater than the standard film thickness value, it is still needed to further judge whether the value is accurate. Therefore, by this way, some inaccurate edge region film thickness values can be accurately detected.

[0050] Figure 3 ​Fig. 2 shows a flowchart of a second method for determining the detection result of the film thickness value of the edge region according to an example embodiment of the present application.

[0051] In some embodiments, the preset judging values further include a third preset value, wherein, in the case that the first difference value is less than or equal to the first preset value, the detection result of the film thickness value of the edge region is determined based on the film thickness value of the inner region, the standard film thickness value and the second preset value, such as Figure 3 As shown, the following steps 301-304 can be performed.

[0052] Step 301: In the case that the first difference value is less than or equal to the first preset value, a second difference value between the standard film thickness value and the film thickness value of the inner region is determined.

[0053] Step 302: It is judged whether the second difference value is less than or equal to the second preset value.

[0054] If yes (i.e. the second difference value is less than or equal to the second preset value), step 303 is performed; if no (i.e. the second difference value is greater than the second preset value), step 304 is performed.

[0055] Step 303: The detection result of the film thickness value of the edge region is determined to be accurate.

[0056] Step 304: The detection result of the film thickness value of the edge region is determined based on the standard film thickness value and a third preset value.

[0057] For example, the second preset value ranges from 5 nm to 10 nm, such as 5 nm, 6 nm, 7 nm, 8 nm, 9 nm or 10 nm.

[0058] For example, if the second preset value is 7 nm, the film thickness value of the inner region is 147 nm, and the standard film thickness value is 150 nm, the second difference value between the standard film thickness value and the film thickness value of the inner region is 3 nm, which is less than the second preset value, and it is judged that the detection result of the film thickness value of the edge region is accurate.

[0059] For example, if the second preset value is 7 nm, the film thickness value of the inner region is 140 nm, and the standard film thickness value is 150 nm, the second difference value between the standard film thickness value and the film thickness value of the inner region is 10 nm, which is greater than the second preset value, and it is needed to further determine the detection result of the film thickness value of the edge region based on the standard film thickness value and a third preset value.

[0060] It is found through experiments that when the film thickness value in the inner region and the film thickness value in the edge region are both thinner or thicker, the film thickness value in the edge region is more likely to be misjudged due to color periodicity. In the above embodiment, when the first difference is less than or equal to the first preset value (i.e., the film thickness value in the edge region is not too thick, which excludes the case that the film thickness value in the inner region and the film thickness value in the edge region are both thicker), if the second difference is less than or equal to the second preset value (i.e., the film thickness value in the inner region is not too thin, which excludes the case that the film thickness value in the inner region and the film thickness value in the edge region are both thinner), the detection result of the film thickness value in the edge region is accurate. If the second difference is greater than the second preset value, i.e., the film thickness value in the inner region is too thin, which may result in the case that the film thickness value in the inner region and the film thickness value in the edge region are both thinner, the detection result of the film thickness value in the edge region needs to be further determined based on the standard film thickness value and a third preset value.

[0061] Figure 4 Fig. 3 shows a flowchart of a third method for determining the detection result of the film thickness value in the edge region according to an example embodiment of the present application.

[0062] In some embodiments, when the second difference is greater than the second preset value, in determining the detection result of the film thickness value in the edge region based on the standard film thickness value and a third preset value, the following steps 401-404 can be performed. Figure 4

[0063] Step 401: determining a third difference between the standard film thickness value and the film thickness value in the edge region when the second difference is greater than the second preset value.

[0064] Step 402: determining whether the third difference is greater than a third preset value.

[0065] If yes (i.e., the third difference is greater than the third preset value), step 403 is performed; if no (i.e., the third difference is less than or equal to the third preset value), step 404 is performed.

[0066] Step 403: determining that the detection result of the film thickness value in the edge region is inaccurate.

[0067] Step 404: determining that the detection result of the film thickness value in the edge region is accurate.

[0068] For example, the third preset value ranges from 10 nm to 15 nm, such as 10 nm, 11 nm, 12 nm, 13 nm, 14 nm or 15 nm.

[0069] For example, when the third preset value is 12 nm, the film thickness value in the edge region is 135 nm, and the standard film thickness value is 150 nm, the third difference between the standard film thickness value and the film thickness value in the edge region is 15 nm, which is greater than the third preset value. Therefore, it is determined that the detection result of the film thickness value in the edge region is inaccurate.​

[0070] Exemplarily, if the third preset value is 12 nm, the edge region film thickness value is 140 nm, and the standard film thickness value is 150 nm, the third difference between the standard film thickness value and the edge region film thickness value is 10 nm, and the third difference is less than or equal to the third preset value, it is determined that the detection result of the edge region film thickness value is accurate.

[0071] In the above embodiment, in the case where the second difference is greater than the second preset value, that is, the internal region film thickness value is thin, if the third difference is greater than the third preset value, that is, the edge region film thickness value is also thin, it belongs to the case where the internal region film thickness value and the edge region film thickness value are both thin, at this time, the edge region film thickness value can be determined as inaccurate; if the third difference is less than or equal to the third preset value, that is, the edge region film thickness value is not thin, it does not belong to the case where the internal region film thickness value and the edge region film thickness value are both thin, at this time, the edge region film thickness value can be determined as accurate.

[0072] Figure 5 Fig. 4 shows a flowchart of a method for determining a target film color map according to an example embodiment of the present application.

[0073] In some embodiments, as shown in Fig. 5, when obtaining a target film color map of a surface film layer of a product to be detected, the target film color map can be determined according to the following steps 501-502. Figure 5

[0074] Step 501, obtaining an initial film color map of the product to be detected.

[0075] The initial film color map includes a film color map of a region of the product to be detected and a film color map of other regions except the region of the product to be detected.

[0076] Exemplarily, the initial film color map can be obtained based on an AOI film thickness instrument.

[0077] Step 502, determining a target film color map based on the initial film color map.

[0078] The target film color map is a film color map of the region of the product to be detected, and step 502 can also be performed by an AOI film thickness instrument.

[0079] Specifically, the part of the image of the region of the product to be detected can be first confirmed from the initial film color map by a product detection algorithm, and then the part of the image of other regions is removed by image cropping, and only the part of the image of the region of the product to be detected is reserved, that is, the target film color map is obtained.

[0080] ​Exemplarily, the product detection algorithm can be a YOLOX model such as a YOLOv8-s model, a YOLOv5 model, a YOLOv6 model, a YOLOv7 model, or can be a Faster R-CNN model, etc., and the embodiments of the present application do not limit this.

[0081] Since the AOI film thickness instrument photographs the initial film color chart, in addition to the product area to be detected, other areas around the product area to be detected are also photographed, and therefore the film color chart of the product area to be detected needs to be extracted from the initial film color chart to ensure accurate measurement of the film thickness data of the surface film layer of the product to be detected. Therefore, in the above embodiments, the target film color chart is determined based on the initial film color chart, which can improve the accuracy of the internal area film thickness value and the edge area film thickness value.

[0082] Figure 6 Fig. 8 shows a flowchart of a method for determining an internal area film thickness value according to an example embodiment of the present application, Figure 7 Fig. 9 shows a flowchart of a method for determining an edge area film thickness value according to an example embodiment of the present application, Figure 8 Fig. 10 shows a schematic diagram of internal position points and edge position points in a target film color chart according to an example embodiment of the present application.

[0083] In some embodiments, the number of products to be detected is at least one, and the surface film layer of the product to be detected includes an internal area and an edge area surrounding the internal area; wherein when the internal area film thickness value and the edge area film thickness value of the surface film layer are determined based on the target film color chart, as shown in Figure 6 and Figure 7 As shown in the above two figures, the following steps 601-604 can be performed to determine the internal area film thickness value, and the steps 701-704 can be performed to determine the edge area film thickness value.

[0084] Step 601, determine a plurality of internal position points in the internal area.

[0085] Exemplarily, the internal position points are pixel points, and the number of internal position points is 3, 4, 5, or 6.

[0086] Exemplarily, as shown in the target film color chart 800, if 5 internal position points are taken in the internal area 810, the width of the target film color chart 800 is w, the height is h, w and h are positive numbers, the upper left corner of the target film color chart is the origin O, the x-axis direction is from left to right, and the y-axis direction is from top to bottom, then the coordinates of the 5 internal position points are I1(x1, y1), I2(x2, y2), I3(x3, y3), I4(x4, y4), and I5(x5, y5). Figure 8 , , , , , ​), I4 ( , ), I5 ( , ).

[0087] Step 602, determining the color value of each of the plurality of internal position points based on the plurality of internal position points and the target film color map.

[0088] The color value can be an RGB color value, such as (40, 112, 67).

[0089] Step 603, determining the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the internal position point based on the color value of each of the plurality of internal position points and the preset correspondence between the preset color value and the preset film thickness value, and taking the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the internal position point as the internal position point film thickness value of the internal position point.

[0090] For example, the correspondence between the preset color value and the preset film thickness value is shown in Table 1.

[0091] Table 1: Correspondence between preset color value and preset film thickness value For example, when determining the preset color value with the highest similarity to the color value of the internal position point, the color value of the internal position point and each preset color value in the correspondence can be first regarded as a vector, the cosine similarity between the color value of the internal position point and each preset color value in the correspondence is calculated respectively, and finally the preset color value with the highest cosine similarity to the color value of the internal position point is determined. The cosine similarity formula is shown in formula 1 below, where A represents the color value vector of the internal position point, and B represents the preset color value vector.

[0092] Formula 1: wherein, represents the inner product of A and B, that is, , ||A|| and ||B|| represent the Euclidean norm of vector A and vector B respectively, that is, , .

[0093] For example, when determining the similarity between the color value of the internal position point and each preset color value in the correspondence, the Euclidean distance or Manhattan distance between the color value of the internal position point and each preset color value in the correspondence can also be calculated.

[0094] Step 604, determining the internal area film thickness value based on the internal position point film thickness value of each of the plurality of internal position points.

[0095] Step 701, determining a plurality of edge position points in the edge region.

[0096] Exemplarily, the edge position points are pixel points, and the number of the edge position points is 12, 16 or 20.

[0097] Exemplarily, as shown in a target film color chart 800, if 16 edge position points are taken in an edge region 820, if the width of the target film color chart 800 is w and the height is h, w and h are positive numbers, the upper left corner of the target film color chart is the origin O, the left-to-right direction is the x-axis direction, and the top-to-bottom direction is the y-axis direction, the coordinates of the 16 edge position points are respectively E1(x, y), E2(x, y), E3(x, y), E4(x, y), E5(x, y), E6(x, y), E7(x, y), E8(x, y), E9(x, y), E10(x, y), E11(x, y), E12(x, y), E13(x, y), E14(x, y), E15(x, y) and E16(x, y), wherein x is a set value. Figure 8

[0098] Step 702, determining a color value of each of the plurality of edge position points based on the plurality of edge position points and the target film color chart.

[0099] Exemplarily, the color value is an RGB value, such as (128, 85, 60).

[0100] ​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​In step 703, based on the color value of each edge position point and the correspondence relationship, a preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the edge position point is determined, and the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the edge position point is taken as the edge position point film thickness value of the edge position point.

[0101] For example, when determining the preset color value with the highest similarity to the color value of the edge position point, the color value of the edge position point and each preset color value in the correspondence relationship can be regarded as a vector first, the cosine similarity of the color value of the edge position point and each preset color value in the correspondence relationship is calculated respectively, and finally the preset color value with the highest cosine similarity to the color value of the edge position point is determined.

[0102] For example, when determining the similarity of the color value of the edge position point and each preset color value in the correspondence relationship, the Euclidean distance or Manhattan distance of the color value of the edge position point and each preset color value in the correspondence relationship can also be calculated.

[0103] In step 704, based on the edge position point film thickness value of each of the plurality of edge position points, the edge region film thickness value is determined.

[0104] In related technologies, when determining the film thickness data of the surface film layer of the product to be detected, it is usually obtained by comparing the film color chart and the color in the standard color chart by the on-site process engineer manually. This human eye observation method is easily affected by the environment light, leading to judgment error, and depends on the experience and subjective judgment of the on-site process engineer, and the accuracy is low. In the above embodiment, based on the color value of each of the plurality of internal position points and the correspondence relationship, the preset color value with the highest similarity to the color value of the internal position point can be accurately calculated, and then the internal position point film thickness value is determined, which improves the accuracy of the internal position point film thickness value measurement; similarly, based on the color value of each of the plurality of edge position points and the correspondence relationship, the preset color value with the highest similarity to the color value of the edge position point can be accurately calculated, and then the edge position point film thickness value is determined, which improves the accuracy of the edge position point film thickness value measurement. In addition, the target film color chart is divided into an internal region and an edge region, and the internal region film thickness value and the edge region film thickness value are obtained respectively, which can better present the actual film thickness of the surface film layer through the two film thickness values.

[0105] In some embodiments, when the internal region film thickness value is determined based on the internal position point film thickness value of each of the plurality of internal position points, the average value of the internal position point film thickness value of each of the plurality of internal position points can be determined first, and the average value is taken as the internal region film thickness value.

[0106] Exemplarily, if the internal position point film thickness values of the 5 internal position points are 100 nm, 110 nm, 120 nm, 130 nm, and 140 nm respectively, the internal region film thickness value is 120 nm.

[0107] In the above embodiment, the internal region film thickness value can be accurately calculated by taking multiple internal position points from the internal region and obtaining the internal region film thickness value by averaging the internal position point film thickness values of the multiple internal position points.

[0108] In some embodiments, the products are placed in boat structures when being coated, the number of the boat structures is at least three, all the boat structures are placed in the furnace tube, and all the boat structures are arranged in sequence along the first direction; wherein, when the multiple edge position points in the edge region are determined, the edge position points can be taken from different ends in the edge region according to the products to be detected carried by the boat structures at different positions in the first direction, and the specific method is as follows.

[0109] In the case that the product to be detected is carried by the first boat structure in the first direction, the multiple edge position points are selected from the two ends in the second direction in the edge region and the end away from the second boat structure in the edge region, and the second direction intersects the first direction.

[0110] Exemplarily, the first direction is perpendicular to the second direction, if the first direction is a horizontal direction, and the second direction is a vertical direction.

[0111] Exemplarily, as shown in Figure 8 if the first direction is the m direction (from left to right direction), and the second direction is the n direction (from bottom to top direction), the multiple edge position points are selected from the upper end, the lower end, and the left end in the edge region.

[0112] In the case that the product to be detected is carried by the boat structure between the first boat structure and the last boat structure in the first direction, the multiple edge position points are selected from the two ends in the second direction in the edge region.

[0113] Exemplarily, as shown in Figure 8 the multiple edge position points are selected from the upper end and the lower end in the edge region.

[0114] In the case that the product to be detected is carried by the last boat structure in the first direction, the multiple edge position points are selected from the two ends in the second direction in the edge region and the end away from the second last boat structure in the edge region.

[0115] Exemplarily, as shown in Figure 8 if the first direction is the m direction (left-right direction), and the second direction is the n direction (up-down direction), the multiple edge position points are selected from the upper end, the lower end, and the right end in the edge region.

[0116] In the above embodiments, for the products carried by the boat structures at different positions in the first direction, only the edge position points from the edge area prone to uneven heating are taken into account, so that the edge area film thickness value calculated based on the edge position point film thickness values of the edge position points can better reflect the actual film thickness of the position in the edge area of the surface film layer of the product in different boat structures, so that process parameter adjustment based on the edge area film thickness value can better improve the uniformity of the surface film layer.

[0117] Figure 9 Fig. 1 shows a flowchart of a specific method for determining an edge area film thickness value provided by an exemplary embodiment of the present application.

[0118] In some embodiments, when determining the edge area film thickness value based on the edge position point film thickness values of the plurality of edge position points, the following steps 901-902 can be performed. Figure 9

[0119] Step 901: For the edge position point film thickness values of the plurality of edge position points of each end in the edge area, the second largest edge position point film thickness value among the edge position point film thickness values is taken as a target edge position point film thickness value.

[0120] Here, the second largest edge position point film thickness value among the edge position point film thickness values is taken as the target edge position point film thickness value, instead of taking the largest edge position point film thickness value as the target edge position point film thickness value, because the largest edge position point film thickness value has contingency. If the thickness of a certain point in an end in the edge area is much larger than the thicknesses of other points in the end, and the point is accidentally selected as an edge position point, the edge position point film thickness value of the point cannot accurately reflect the actual process thickness of the end, and therefore the second largest edge position point film thickness value can exclude abnormal values.

[0121] Exemplarily, if the edge position points are taken from the upper end, the lower end, and the left end in the edge area, the second largest edge position point film thickness value is determined from the edge position point film thickness values of the plurality of edge position points of the upper end in the edge area, the second largest edge position point film thickness value is determined from the edge position point film thickness values of the plurality of edge position points of the lower end in the edge area, and the second largest edge position point film thickness value is determined from the edge position point film thickness values of the plurality of edge position points of the left end in the edge area, i.e., three target edge position point film thickness values are obtained.

[0122] Step 902: For the target edge position point film thickness values of all the ends in the edge area, the largest target edge position point film thickness value among the target edge position point film thickness values is taken as the edge area film thickness value.

[0123] ​Here, the maximum target edge position point film thickness value is taken as the edge region film thickness value, that is, the thickness value of the thickest part region in the edge region is taken as the edge region film thickness value, so that the local over-thick region in the edge region can be focused on in the subsequent process parameter adjustment process, and the local over-thickness of the edge region is prevented.

[0124] For example, continuing the above example, the maximum target edge position point film thickness value is determined from the three target edge position point film thickness values as the edge region film thickness value.

[0125] In the above embodiment, the edge region film thickness value representing the over-thick region of the edge region can be accurately determined through steps 901 and 902.

[0126] Figure 10 The structure schematic diagram of the film thickness data processing system provided by an example embodiment of the present application is shown.

[0127] Based on the same concept, as Figure 10 As shown, the embodiment of the present application further provides a film thickness data processing system 1000 for implementing the film thickness data processing method as described in the above embodiment. The film thickness data processing system 1000 comprises an acquisition device 1002 and a processing device 1001. The acquisition device 1002 is configured to acquire a target film color map of a surface film layer of a product to be detected. The processing device 1001 is configured to determine an internal region film thickness value and an edge region film thickness value of the surface film layer based on the target film color map, and determine a detection result of the edge region film thickness value based on the internal region film thickness value, the edge region film thickness value, a preset standard film thickness value and a preset judgment value, wherein the color value of the target film color map is used to indicate the thickness of the surface film layer, and the detection result is used to indicate whether the edge region film thickness value is accurate.

[0128] For example, the acquisition device 1002 comprises a film thickness instrument, such as an AOI film thickness instrument.

[0129] For example, the acquisition device 1002 is configured to acquire an initial film color map of the product to be detected, wherein the initial film color map comprises a film color map of a product to be detected region and a film color map of other regions except the product to be detected region; and determine the target film color map based on the initial film color map, wherein the target film color map is the film color map of the product to be detected region.

[0130] It should be understood that the description of the embodiment of the film thickness data processing system 1000 corresponds to the description of the embodiment of the film thickness data processing method, and therefore, the parts not described in detail can be referred to the previous method embodiment.

[0131] The above describes the basic principles of the present application in combination with specific embodiments, but it needs to be pointed out that the advantages, benefits, effects and the like mentioned in the present application are only examples and are not limiting, and these advantages, benefits, effects and the like cannot be considered as necessary for each embodiment of the present application. In addition, the above specific details disclosed are only for the purpose of example and understanding, and are not limiting, and the above details do not limit the present application to be necessarily implemented with the above specific details.

[0132] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0133] It also needs to be pointed out that in the devices, equipment and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present application.

[0134] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present application. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but is intended to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0135] The above description has been given for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A film thickness data processing method characterized by, The method comprises the following steps: obtaining a target film color chart of a surface film layer of a product to be detected, determining an internal area film thickness value and an edge area film thickness value of the surface film layer based on the target film color chart, wherein the color value of the target film color chart is used to indicate the thickness of the surface film layer; determining a detection result of the edge area film thickness value based on the internal area film thickness value, the edge area film thickness value, a preset standard film thickness value and a preset judgment value, wherein the detection result is used to indicate whether the edge area film thickness value is accurate.

2. The film thickness data processing method according to claim 1, characterized by, The preset judgment value comprises a first preset value and a second preset value. The method comprises the following steps: determining a first difference value between the edge area film thickness value and the standard film thickness value; in a case where the first difference value is greater than the first preset value, determining that the detection result of the edge area film thickness value is inaccurate; in a case where the first difference value is less than or equal to the first preset value, determining the detection result of the edge area film thickness value based on the internal area film thickness value, the standard film thickness value and the second preset value.

3. The film thickness data processing method according to claim 2, characterized by, The preset judgment value further comprises a third preset value. The method comprises the following steps: in a case where the first difference value is less than or equal to the first preset value, determining a second difference value between the standard film thickness value and the internal area film thickness value; in a case where the second difference value is less than or equal to the second preset value, determining that the detection result of the edge area film thickness value is accurate; in a case where the second difference value is greater than the second preset value, determining the detection result of the edge area film thickness value based on the standard film thickness value and the third preset value.

4. The film thickness data processing method according to claim 3, characterized by, The method comprises the following steps: in a case where the second difference value is greater than the second preset value, determining a third difference value between the standard film thickness value and the edge area film thickness value; in a case where the third difference value is greater than the third preset value, determining that the detection result of the edge area film thickness value is inaccurate; in a case where the third difference value is less than or equal to the third preset value, determining that the detection result of the edge area film thickness value is accurate.

5. The film thickness data processing method according to any one of claims 1 to 4, characterized by, The method comprises the following steps: obtaining an initial film color chart of the product to be detected, wherein the initial film color chart comprises a film color chart of a product to be detected area and a film color chart of other areas except the product to be detected area; determining a target film color chart based on the initial film color chart, wherein the target film color chart is the film color chart of the product to be detected area.

6. The film thickness data processing method according to any one of claims 1 to 4, characterized by, The number of the products to be detected is at least one, and the surface film layer of the product to be detected comprises an internal area and an edge area surrounding the internal area. The method comprises the following steps: determining a plurality of internal position points in the internal region; determining a color value of each of the plurality of internal position points based on the plurality of internal position points and the target film color chart, wherein the color value is an RGB color value; determining a preset film thickness value corresponding to a preset color value with the highest similarity to the color value of the internal position point based on the color value of each of the plurality of internal position points and a preset correspondence between preset color values and preset film thickness values, and taking the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the internal position point as an internal position point film thickness value of the internal position point; determining the internal region film thickness value based on the internal position point film thickness value of each of the plurality of internal position points; and determining a plurality of edge position points in the edge region; determining a color value of each of the plurality of edge position points based on the plurality of edge position points and the target film color chart; determining a preset film thickness value corresponding to a preset color value with the highest similarity to the color value of the edge position point based on the color value of each of the plurality of edge position points and the correspondence, and taking the preset film thickness value corresponding to the preset color value with the highest similarity to the color value of the edge position point as an edge position point film thickness value of the edge position point; determining the edge region film thickness value based on the edge position point film thickness value of each of the plurality of edge position points. The method comprises the following steps:

7. The film thickness data processing method according to claim 6, characterized by, determining an average value of the internal position point film thickness value of each of the plurality of internal position points, and taking the average value as the internal region film thickness value. The products are placed in boat structures during coating, the number of the boat structures is at least three, all the boat structures are placed in a furnace tube, and all the boat structures are arranged in sequence along a first direction; 8. The film thickness data processing method according to claim 6, characterized by, The method comprises the following steps: under the condition that the product to be detected is carried by a first boat structure in the first direction, selecting a plurality of edge position points from two ends in a second direction in the edge region and an end in the edge region away from a second boat structure, the second direction intersecting the first direction; under the condition that the product to be detected is carried by the boat structure between the first boat structure in the first direction and the last boat structure, selecting a plurality of edge position points from two ends in the second direction in the edge region; under the condition that the product to be detected is carried by the last boat structure in the first direction, selecting a plurality of edge position points from two ends in the second direction in the edge region and an end in the edge region away from a second-to-last boat structure. The method comprises the following steps:

9. The film thickness data processing method according to claim 8, characterized by, ​ For the edge position point film thickness values of the plurality of edge position points of each end in the edge region, the second largest of the edge position point film thickness values is taken as a target edge position point film thickness value; For the target edge position point film thickness values of all ends in the edge region, the largest of the target edge position point film thickness values is taken as the edge region film thickness value.

10. A film thickness data processing system characterized by comprising: A film thickness data processing method is provided, which comprises the following steps: acquiring a target film color chart of a surface film layer of a product to be detected; processing the target film color chart to determine an inner region film thickness value and an edge region film thickness value of the surface film layer, and determining a detection result of the edge region film thickness value based on the inner region film thickness value, the edge region film thickness value, a preset standard film thickness value and a preset judgment value, wherein the color value of the target film color chart is used to indicate the thickness of the surface film layer, and the detection result is used to indicate whether the edge region film thickness value is accurate.

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