Adjustment jig and method for adjusting scanner

Abstract

In a scanner, it is desirable to more accurately adjust the deviation between the coordinate position of a workpiece and the position of a processing focus of a laser beam. The adjustment jig includes: a cylindrical jig body into which a first laser beam and a second laser beam are introduced; a first adjustment tool which is detachably disposed on the other end side of the jig main body and has a light-transmitting surface for confirming and adjusting the optical axis of the first laser beam; and a second adjustment tool which is disposed coaxially with the first adjustment tool and detachably on the other end side of the jig main body, and which has a movable member having a tip portion configured in a needle shape so as to indicate a processing focus of a second laser beam, the distance from the laser emission port to the light-transmitting surface in a state in which the first adjustment tool is disposed on the jig main body is equal to the distance from the laser emission port to the light-transmitting surface. And the distance from the laser light emission port to the tip of the movable member in a state in which the second adjustment tool is disposed on the jig body is set to be the focal length of the processing focus of the second laser light irradiated from the scanner.

Description

Technical Field

[0001] This invention relates to an adjustment fixture and an adjustment method for a scanner. Background Technology

[0002] Previously, laser processing systems were known to perform welding and other processes by irradiating workpieces with lasers. In these laser processing systems, the scanner used for scanning processing is mostly a laser head equipped with an electrical detector (for example, see Patent Documents 1 and 2).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2019-98360

[0006] Patent Document 2: Japanese Patent Application Publication No. 2004-361862 Summary of the Invention

[0007] The problem the invention aims to solve

[0008] In laser processing systems, when a scanner is mounted on a machine tool axis, robotic arm, or similar device, if the scanner is installed off-center from its intended position, the laser will irradiate the workpiece at a point where the workpiece's processing point (hereinafter referred to as the "origin") is misaligned with the laser's focal point (hereinafter referred to as the "focus"). Since the scanner has the capability to scan a wide area of ​​the laser, if its installation position deviates, it will be unable to depict the intended shape, resulting in defects such as distorted processing shapes.

[0009] The laser used for processing is invisible light, making it impossible to visually assess deviations in the processing focus. Therefore, traditional methods such as guide lasers, laser rangefinders, and cross-line lasers have been used to adjust for these deviations. However, the guide laser and the processing laser have different wavelengths and chromatic aberrations, resulting in point deviations even when aligned to the same focal length. Furthermore, laser rangefinders require high precision, and their accuracy in measuring the processing focus varies depending on the installation location. Additionally, with cross-line lasers, if the cross-line lasers deviate by no more than ±2mm, visual confirmation of the processing focus deviation is difficult. Thus, in any of these methods, it is challenging to visually determine the deviation between the workpiece's coordinates and the laser's processing focus, making it difficult to accurately adjust for this deviation.

[0010] Therefore, in the scanner, it is desirable to be able to more accurately adjust the deviation between the workpiece's coordinate position and the laser's processing focus.

[0011] Solution for solving the problem

[0012] The adjustment fixture disclosed herein is an adjustment fixture for a scanner capable of scanning a workpiece with a laser. The adjustment fixture comprises: a cylindrical fixture body, to which a first laser and a second laser irradiated from the laser emission outlet of the scanner are introduced at one end; a first adjustment tool detachably disposed at the other end of the fixture body, having a light-transmitting surface for confirming and adjusting the optical axis of the first laser irradiated from the scanner; and a second adjustment tool coaxial with the first adjustment tool and detachably disposed at the other end of the fixture body, having a needle-shaped movable member with a top end portion configured to indicate the processing focus of the second laser irradiated from the scanner. The distance from the laser emission outlet to the light-transmitting surface when the first adjustment tool is disposed on the fixture body, and the distance from the laser emission outlet to the top end portion of the movable member when the second adjustment tool is disposed on the fixture body, are set as the focal length of the processing focus of the second laser irradiated from the scanner.

[0013] The scanner adjustment method disclosed herein uses the scanner adjustment method with the adjustment fixture disclosed above. This adjustment method includes: a step of configuring the first adjustment tool on the fixture body mounted on the scanner, and confirming and adjusting the optical axis of the first laser; a step of removing the first adjustment tool from the fixture body and adjusting the focusing point of the first laser; and a step of configuring the second adjustment tool on the fixture body mounted on the scanner, causing the top end of the movable member to abut against the workpiece, thereby adjusting the mounting position of the scanner and the processing focus of the second laser. Attached Figure Description

[0014] Figure 1 This is a diagram illustrating the structure of laser processing system 1.

[0015] Figure 2 This is a diagram illustrating the optical system of scanner 30.

[0016] Figure 3 This is a diagram illustrating the structure of the adjustment fixture 100.

[0017] Figure 4 This is a diagram illustrating the structure of the main body 110 of the fixture.

[0018] Figure 5A It is a sectional view of the first adjustment tool 130 cut along the central axis CA1.

[0019] Figure 5B This is a diagram of the first adjustment tool 130 viewed from the optical axis direction.

[0020] Figure 6It is a sectional view of the second adjustment tool 150 cut along the central axis CA2.

[0021] Figure 7A This is a side view showing the most prominent state of the movable pin of the second adjustment tool 150.

[0022] Figure 7B This is a side view showing the state in which a portion of the movable pin of the second adjustment tool 150 is retracted.

[0023] Figure 8A This diagram illustrates the method for adjusting the optical axis that guides the laser.

[0024] Figure 8B This diagram illustrates how to adjust the focusing point of the guiding laser.

[0025] Figure 9A This diagram illustrates the adjustment of the optical axis guiding the laser.

[0026] Figure 9B This diagram illustrates the adjustment of the optical axis guiding the laser.

[0027] Figure 10A This diagram illustrates the adjustment method performed by the adjustment fixture 100 equipped with the second adjustment tool 150.

[0028] Figure 10B This diagram illustrates the adjustment method performed by the adjustment fixture 100 equipped with the second adjustment tool 150.

[0029] Figure 11 This diagram illustrates the adjustment method performed by the adjustment fixture 100 equipped with the second adjustment tool 150.

[0030] Figure 12 This is a diagram illustrating the fixture body 120 of the second embodiment.

[0031] Figure 13 yes Figure 12 Section II.

[0032] Figure 14 This diagram illustrates the laser processing system 1A using robot 2 and the fixed support 4.

[0033] Figure 15A This diagram illustrates the function of teaching the processing focus of the laser using the laser processing system 1A and the fixed bracket 4.

[0034] Figure 15B This diagram illustrates the function of teaching the processing focus of the laser using the laser processing system 1A and the fixed bracket 4.

[0035] Figure 15CThis diagram illustrates the function of teaching the processing focus of the laser using the laser processing system 1A and the fixed bracket 4. Detailed Implementation

[0036] The following describes the implementation of the adjustment fixture and the adjustment method of the scanner disclosed herein. The accompanying drawings are schematic diagrams, and for ease of understanding, the shapes, scales, and aspect ratios of the various parts have been altered or exaggerated compared to the actual object.

[0037] (First Implementation)

[0038] Figure 1 This is a diagram illustrating the structure of laser processing system 1. Figure 2 This is a diagram illustrating the optical system of scanner 30.

[0039] Figure 1 The laser processing system 1 shown is a system for performing processes such as welding by irradiating a workpiece W, which is positioned on a moving stage (not shown), with a laser. However, the example is not limited to a workpiece W positioned on a moving stage.

[0040] like Figure 1 As shown, the laser processing system 1 includes a laser source 10, a laser control unit 20, a scanner 30, a scanner control unit 40, a processing machine 50, and a processing machine control unit 60. Furthermore, in Figure 1 The image shows the state where the adjustment fixture 100 (described later) is installed on the scanner 30, but after adjusting the installation position of the scanner 30 and the focus point of the laser, the adjustment fixture 100 is removed from the scanner 30.

[0041] The laser source 10 is a device that generates laser light by oscillating a laser using a laser oscillator (not shown) inside the laser source 10 according to instructions from the laser control unit 20 (described later). For example, a fiber laser oscillator, a pulsed laser oscillator, a direct diode laser (DDL), a CO2 laser oscillator, or a solid-state laser (YAG laser) oscillator can be used as the laser source 10. The laser source 10 outputs the generated laser light to the scanner 30.

[0042] The laser control unit 20 is a controller that controls the operation of the laser source 10. The laser control unit 20 switches the laser oscillator of the laser source 10 to emit either a focus confirmation laser (hereinafter also referred to as a "guide laser") or a processing laser (hereinafter also referred to as a "processing laser"). The guide laser is a laser in the visible light region that the operator can see (first laser). The processing laser is a laser in the invisible light region of a wavelength region that the operator cannot see (second laser). Furthermore, in the following description, both the guide laser and the processing laser will be collectively referred to as "laser".

[0043] In the laser control unit 20, the laser irradiation mode is set to either a first mode or a second mode. If the first mode is set as the laser irradiation mode, the laser oscillator in the laser source 10 is switched to emit a processing laser. Alternatively, if the second mode is set as the laser irradiation mode, the laser oscillator in the laser source 10 is switched to emit a guiding laser.

[0044] Scanner 30 is used to extract laser light from laser source 10 from laser outlet 37 (see reference). Figure 3 A device for irradiating the workpiece W. The scanner 30 includes an electrical detector scanner as a reflector mechanism. (Example) Figure 2 As shown, the electro-optic scanner includes: a first reflecting mirror 31 and a second reflecting mirror 32 that sequentially reflect laser light output from the laser source 10; and rotary motors 33 and 34 that rotate these reflecting mirrors about rotation axes X1 and X2, respectively. By controlling the rotation direction and amount of the first reflecting mirror 31 and the second reflecting mirror 32, the positions of the X-axis and Y-axis of the guiding laser can be adjusted. This allows the optical axis of the guiding laser to be aligned with the center point P of the first adjustment tool 130 (described later).

[0045] Furthermore, the detector scanner includes a lens 35 and a lens driving mechanism 36. The lens 35 is an optical component that focuses the laser R output from the laser source 10. The lens driving mechanism 36 is a device that moves the lens 35 along the optical axis. The operation of the lens driving mechanism 36 is controlled by the scanner control unit 40 (described later). By moving the lens 35 along the optical axis, the focusing point of the laser R focused by the lens 35 can be adjusted. In this embodiment, "optical axis direction" refers to the direction along the optical axis of the laser.

[0046] return Figure 1 The scanner control unit 40 is a controller that controls the operation of the scanner 30. The scanner control unit 40, in cooperation with the hardware, scans the laser based on instructions by reading and executing the application program for controlling the scanner 30 (rotary motors 33, 34, lens drive mechanism 36) from the storage unit (not shown).

[0047] The machining machine 50 has the function of linearly moving the scanner 30. The machining machine 50 includes a machining axis 51, a drive motor 52, etc. The machining axis 51 is a ball screw connected to the drive motor 52. The scanner 30 is mounted on the machining axis 51. By rotating the machining axis 51 (forward or reverse) using the drive motor 52, the scanner 30 moves along the axial direction of the machining axis 51. The machining machine control unit 60 is a controller that controls the operation of the machining machine 50. When machining is performed outside the illumination range of the scanner 30, the machining machine control unit 60 rotates the machining axis 51, moving the scanner 30 to the desired position.

[0048] Next, the structure of the adjustment fixture 100 installed on the scanner 30 will be described.

[0049] Figure 3 This is a diagram illustrating the structure of the adjustment fixture 100. Figure 4 This is a diagram illustrating the structure of the main body 110 of the fixture. Figure 5A It is a sectional view of the first adjustment tool 130 cut along the central axis CA1. Figure 5B This is a diagram of the first adjustment tool 130 viewed from the optical axis direction. Figure 6 This is a sectional view of the second adjustment tool 150 cut along the central axis CA2. Figure 7A This is a side view showing the most prominent state of the movable pin of the second adjustment tool 150. Figure 7B This is a side view showing the state in which a portion of the movable pin of the second adjustment tool 150 is retracted.

[0050] The adjustment fixture 100 is a detachable fixture relative to the scanner 30, used to adjust the mounting position of the scanner 30 and the laser focusing point. For example... Figure 3 As shown, the adjustment jig 100 includes a jig body 110, a first adjustment tool 130, and a second adjustment tool 150. Either the first adjustment tool 130 or the second adjustment tool 150 is disposed on the jig body 110, depending on the work being performed. Hereinafter, the first adjustment tool 130 and the second adjustment tool 150 will also be appropriately referred to as "tools".

[0051] The fixture body 110 is introduced from the laser emission outlet 37 of the scanner 30 (see reference). Figure 3 A cylindrical shell irradiated by a laser. (e.g.) Figure 4 As shown, the fixture body 110 includes a cylindrical portion 111 and a flange 112. As will be described later, by mounting the adjustment fixture 100 at a predetermined position on the scanner 30, the central axis CA of the fixture body 110 is aligned with the center of the laser emission outlet 37 of the scanner 30. Hereinafter, the direction along the central axis CA will also be referred to as "axial CA".

[0052] The cylindrical portion 111 is a hollow cylindrical component. A flange 112 is joined to one end side (upper side in the figure) of the cylindrical portion 111. The flange 112 is a component used to mount the fixture body 110 near the laser emission outlet 37 of the scanner 30. The cylindrical portion 111 and the flange 112 are made of metal materials such as aluminum, steel, or SUS. Alternatively, the cylindrical portion 111 and the flange 112 can be integrally formed. A plurality of threaded holes 113 are provided in the base portion of the flange 112.

[0053] A tool holding part 114 is provided at the other end (lower side in the figure) of the cylindrical part 111. The tool holding part 114 is a part in which the first adjusting tool 130 and the second adjusting tool 150 can be detachably mounted. By inserting the first adjusting tool 130 or the second adjusting tool 150 into the tool holding part 114, the first adjusting tool 130 or the second adjusting tool 150 can be mounted on the fixture body 110.

[0054] A pin confirmation window (opening) 115 is provided near the tool holding portion 114. The pin confirmation window 115 is an opening for visually observing the movement of the movable pin 153 (described later) of the second adjusting tool 150 inserted into the tool holding portion 114. The pin confirmation window 115 opens radially in the cylindrical portion 111 and extends along the axial direction CA. Furthermore, while one pin confirmation window 115 may be provided near the tool holding portion 114, multiple pin confirmation windows may also be provided along the outer peripheral surface of the cylindrical portion 111. The function of the pin confirmation window 115 will be described later.

[0055] like Figure 3 As shown, an internally threaded portion 38 is provided around the laser emission outlet 37 of the scanner 30, which can engage with the fixing screw 116 (described later). The fixing screw 116 is a component used to fix the fixture body 110 to the scanner 30. By aligning the threaded hole 113 of the flange 112 of the fixture body 110 with the internally threaded portion 38 of the scanner 30, the fixing screw 116 inserted into the threaded hole 113 engages with the internally threaded portion 38 and is tightened, thereby fixing the fixture body 110 to the scanner 30. As a result, the central axis CA of the fixture body 110 can be aligned with the center of the laser emission outlet 37 of the scanner 30.

[0056] Furthermore, the fixture body 110 is not limited to a structure installed near the laser emission outlet 37 of the scanner 30, as long as the central axis CA is aligned with the center of the laser emission outlet 37 of the scanner 30. For example, it may also be configured to be installed on the periphery of the laser emission outlet 37.

[0057] The first adjustment tool 130 is used to confirm and adjust the optical axis of the processing laser irradiated from the scanner 30. For example... Figure 5A As shown, the first adjustment tool 130 includes an insertion portion 131, a panel holding portion 132, and a target panel 133. The insertion portion 131 is a cylindrical member that is inserted into the tool holding portion 114 of the fixture body 110. The outer diameter D1 of the insertion portion 131 is set to be larger than the inner diameter d of the tool holding portion 114 of the fixture body 110 (see reference). Figure 4The size is slightly smaller. Therefore, if the insertion part 131 is inserted into the tool holding part 114 of the insertion fixture body 110, the first adjustment tool 130 can be held in the fixture body 110 by utilizing the friction generated between the inner peripheral surface of the tool holding part 114 and the outer peripheral surface of the insertion part 131.

[0058] The panel holding portion 132 is a cylindrical member that holds the target panel 133 (described later). The panel holding portion 132 engages with the insertion portion 131 at one end in the direction of the central axis CA1 (hereinafter also referred to as "axial CA1"), with a partial overlap. The outer diameter D2 of the panel holding portion 132 is larger than the outer diameter D1 of the insertion portion 131, thus forming a stepped portion 130a at the joint between the insertion portion 131 and the panel holding portion 132. When the first adjusting tool 130 is inserted into the fixture body 110 (tool holding portion 114), the end 114a of the tool holding portion 114 of the fixture body 110 abuts against the stepped portion 130a. Therefore, the first adjusting tool 130 is held in a positioned state at the top end of the fixture body 110 (tool holding portion 114).

[0059] By positioning the first adjustment tool 130 at the top of the fixture body 110, the central axis CA1 of the first adjustment tool 130 can be aligned with the central axis CA of the fixture body 110. Thus, the first adjustment tool 130 and the fixture body 110 are coaxial. Figure 3 As shown, the length L of the axial CA of the adjustment fixture 100, on which the first adjustment tool 130 is disposed at the top of the fixture body 110, is set to be consistent with the working distance (operation distance) of the processing laser. The working distance is the focal length of the processing focus (focus point) of the processing laser. In addition, the insertion part 131 and the panel holding part 132 can also be integrally formed in the first adjustment tool 130.

[0060] The panel holding portion 132 has a holding frame 132a at the other end of the axial direction CA1. The target panel 133 is held in the holding frame 132a. The target panel 133 is a component used to align the optical axis of the guide laser emitted from the scanner 30 with the central axis CA of the fixture body 110. The target panel 133 is made of materials with visible light transmittance, such as acrylic, polycarbonate, polyethylene terephthalate (PET), or glass. The target panel 133 is mounted on the top end of the panel holding portion 132. The target panel 133 can be mounted, for example, by attaching it to the top end of the panel holding portion 132 using an adhesive material. Figure 5A As shown, in the first adjustment tool 130, the position of the top surface 132b of the panel holding part 132 and the position of the light-transmitting surface 133a of the target panel 133 are aligned in the axial direction CA1.

[0061] like Figure 5BAs shown, a target mark composed of a cross shape and a circle is formed on the light-transmitting surface 133a of the target panel 133. The center point P of the target panel 133 is a mark (target center position) for aligning the optical axes of the guiding laser and the processing laser. By placing the first adjustment tool 130 on the fixture body 110, the center point P of the target panel 133 is aligned with the central axis CA of the fixture body 110. The target mark on the light-transmitting surface 133a of the target panel 133 can be formed by printing or by laser engraving. Alternatively, a sticker printed with the target mark can be affixed.

[0062] The operator controls the first reflector 31 and the second reflector 32 of the scanner 30 (see reference). Figure 2 The rotation of the laser beam aligns the optical axis of the guide laser with the center point P of the target panel 133. This allows the optical axis of the processing laser (invisible light) that passes through the same optical system path as the guide laser to align with the center point P of the target panel 133.

[0063] like Figure 5B As shown, the target mark has two mutually orthogonal straight lines S1 and S2 passing through the center point P, and a straight line S3 parallel to line S2. Additionally, the target mark consists of concentric circles C1 and C2 with different diameters centered at the center point P. When the first adjustment tool 130 is mounted on the fixture body 110, the machining axis 51 (refer to...) is... Figure 1 The extension direction of the laser is consistent with the extension direction of the straight line S1 or S2, making it easy to grasp the direction in which the laser deviates from the center point P.

[0064] The operator can determine the deviation of the optical axis of the guide laser projected onto the target panel 133 from the center point P by visually observing the guide laser from below the first adjustment tool 130 or by projecting the guide laser onto a screen (not shown) located below. In the target panel 133, the guide laser is projected as a diffused beam circle. The expansion of this beam circle varies depending on the position of the optical axis direction of the focusing point. By aligning the center of the guide laser beam circle with the center point P of the target panel 133, the operator can align the optical axis of the guide laser with the center of the scanner 30's beam exit (laser exit 37).

[0065] By controlling the operation of the scanner 30 (electro-detection scanner), the operator can align the optical axis of the guide laser projected onto the target panel 133 with the center point P. Furthermore, by using a camera positioned obliquely below to capture the beam circle of the guide laser projected onto the target panel 133, the operator can observe the captured image while simultaneously adjusting the optical axis of the guide laser to align with the center point P. At this time, by confirming the position of the straight line S3 relative to the center point P of the target panel 133, the operator can easily determine the direction of deviation of the focal point of the guide laser projected onto the target panel 133 from the center point P. Thus, by using the first adjustment tool 130, the optical axis of the guide laser can be confirmed and adjusted.

[0066] The second adjustment tool 150 is used to adjust the position of the processing focus (focus point) of the laser. For example... Figure 6 As shown, the second adjustment tool 150 includes an insertion portion 151, a base portion 152, a movable pin (movable member) 153, and a fixing screw 154. The insertion portion 151 is a cylindrical member inserted into the tool holding portion 114 of the fixture body 110. The insertion portion 151 has a first through hole 155 extending along the central axis CA2. The first through hole 155 is a cylindrical opening that supports the movable pin 153 so that it can move freely in the optical axis direction. In addition, the insertion portion 151 has an internal thread portion 156 that can engage with the fixing screw 154. The internal thread portion 156 extends in a direction orthogonal to the central axis CA2.

[0067] The outer diameter D3 of the insertion part 151 is set to be greater than the inner diameter d of the tool holding part 114 of the fixture body 110 (refer to...). Figure 4 The size is slightly smaller. Therefore, if the insertion part 151 is inserted into the tool holding part 114 of the fixture body 110, the second adjustment tool 150 can be held in the fixture body 110 by utilizing the friction generated between the inner peripheral surface of the tool holding part 114 and the outer peripheral surface of the insertion part 151.

[0068] By holding the second adjustment tool 150 at the top of the tool holding portion 114 adjusted by the first adjustment tool 130, the central axis CA2 of the second adjustment tool 150 can be aligned with the central axis CA of the fixture body 110. Thus, the second adjustment tool 150 and the fixture body 110 are coaxial. Figure 3 As shown, the axial length L (length of the most protruding position of the movable pin 153) of the adjustment fixture 100 with the second adjustment tool 150 disposed at the top is the same as the axial length L of the adjustment fixture 100 with the first adjustment tool 130 disposed at the top. Furthermore, in the second adjustment tool 150, the insertion part 151 and the base part 152 (described later) can also be integrally formed.

[0069] return Figure 6The base portion 152 is a cylindrical member that holds the insertion portion 151. The base portion 152 has a second through hole 157 that supports the movable pin 153 so that it can move freely along the optical axis. The second through hole 157 is formed to be coaxial with the first through hole 155 in the axial direction CA2. The inner diameters of the first through hole 155 and the second through hole 157 are each set to the same diameter.

[0070] The movable pin 153 is a needle-shaped member with its tip 153p configured to indicate the focal point (processing focus) of the processing laser. When the movable pin 153 is positioned at its lowest point in the direction of gravity due to its own weight, its tip 153p protrudes most from the base 152. At this position, the tip 153p of the movable pin 153 indicates the location of the processing focus of the processing laser irradiated from the scanner 30 (see reference). Figure 3 That is, with the movable pin 153 located at the lowest point in the direction of gravity due to its own weight, the length L from the laser emission outlet 37 to the top end 153p of the movable pin 153 is set as the focal length of the processing laser.

[0071] The movable pin 153 consists of a pin body 153a and a head 153b. The pin body 153a is a portion having a needle-shaped tip 153p. The outer diameter of the pin body 153a is set to be slightly smaller than the inner diameter of the first through hole 155 and the second through hole 157. Thus, when the pin body 153a is inserted into the first through hole 155 and the second through hole 157, the movable pin 153 can move freely in the axial direction CA2.

[0072] The head 153b of the movable pin 153 is a generally disc-shaped component, integrally formed at the rear end of the pin body 153a. For example... Figure 7A As shown, when the head 153b is in contact with the end face 151a of the insertion part 151, that is, when there is no gap between the head 153b of the movable pin 153 and the end face 151a of the insertion part 151, the movable pin 153 is in the state of protruding downward from the second adjustment tool 150 (base part 152).

[0073] On the other hand, such as Figure 7B As shown, when a gap s is generated between the head 153b of the movable pin 153 and the end face 151a of the insertion portion 151, the amount by which the movable pin 153 protrudes from the second adjusting tool 150 is greater than the amount by which the most protruding part... Figure 7A The quantity of the short gap s in the state. For example... Figure 7A and Figure 7B As shown, the operator can visually inspect the head 153b of the movable pin 153 and the end face 151a of the insertion portion 151 via the pin confirmation window 115 to determine whether the movable pin 153 protrudes most from the base portion 152.

[0074] return Figure 6 The fixing screw 154 is a component used to enable or restrict the movement of the movable pin 153 in the axial direction CA2. The fixing screw 154 and the internal thread 156 of the insertion portion 151 constitute the fixing mechanism of the movable pin 153. The fixing screw 154 is, for example, a fixing screw with a hexagonal hole. By engaging the fixing screw 154 with the internal thread 156 of the insertion portion 151 and tightening it until its top end abuts against the movable pin 153 (pin body 153a), the movement of the movable pin 153 in the axial direction CA2 can be restricted.

[0075] When the second adjustment tool 150 is installed on the fixture body 110, the movement of the movable pin 153 is restricted by tightening the fixing screw 154, thus preventing the movable pin 153 from falling off. Furthermore, the head of the fixing screw 154 is positioned to be exposed from the pin confirmation window 115 of the fixture body 110 when the second adjustment tool 150 is installed on the fixture body 110. Therefore, with the second adjustment tool 150 installed on the fixture body 110, the operator can tighten or loosen the fixing screw 154 by inserting a tool (e.g., a hex wrench) into the pin confirmation window 115. Additionally, in Figure 6 In order to make it easier to understand the structure of the fixing screw 154 and the internal thread 156, the diagram is shown at a position rotated 90° along the axial direction CA2.

[0076] Furthermore, with the movable pin 153 restricted from movement by the fixing screw 154, loosening the fixing screw 154 allows it to move to a position where its top does not abut against the movable pin 153, thereby enabling the movable pin 153 to move axially along CA2. By loosening the fixing screw 154 and allowing the movable pin 153 to move, operations such as adjusting the mounting position of the scanner 30 or adjusting the processing focus of the processing laser using the second adjustment tool 150 can be easily performed.

[0077] By positioning the second adjustment tool 150 at the top of the fixture body 110, the central axis CA2 of the second adjustment tool 150 can be aligned with the central axis CA of the fixture body 110. Thus, the second adjustment tool 150 and the fixture body 110 are coaxial. Figure 3 As shown, when the second adjustment tool 150 is arranged at the top of the fixture body 110 and the movable pin 153 is most prominent, the axial CA length L of the adjustment fixture 100 is consistent with the working distance (acting distance) of the processing laser. That is, it is the same as the axial CA length L of the adjustment fixture 100 where the first adjustment tool 130 is arranged at the top of the fixture body 110.

[0078] Next, the mounting position of the scanner 30 using the adjustment fixture 100 and the method for adjusting the processing focus of the processing laser will be explained. Figure 8AThis diagram illustrates the method for adjusting the optical axis that guides the laser. Figure 8B This diagram illustrates how to adjust the focusing point of the guiding laser. Figure 9A as well as Figure 9B This diagram illustrates the adjustment of the optical axis guiding the laser. Figure 10A , Figure 10B as well as Figure 11 This diagram illustrates an adjustment method performed by an adjustment fixture 100 equipped with a second adjustment tool 150. In this diagram... Figure 10A as well as Figure 10B The diagram of machining machine 50 is omitted in the text.

[0079] First, such as Figure 8A As shown, a first adjustment tool 130 is configured on the fixture body 110 mounted on the scanner 30, so that the optical axis OA of the guide laser is aligned with the center of the first adjustment tool 130. The operator, for example, visually inspects the guide laser (beam circle) from below the first adjustment tool 130 while controlling the first reflector 31 and the second reflector 32 of the scanner 30 (see reference). Figure 2 The rotation of the laser beam OA aligns it with the center point of the target panel 133. For example, as... Figure 9A As shown, when the optical axis OA of the guiding laser is deviated from the center point P of the target panel 133, the operator can control each reflector of the scanner 30 (see reference). Figure 2 ),like Figure 9B As shown, the optical axis OA of the guiding laser is aligned with the center point P of the target panel 133.

[0080] After adjusting the optical axis of the guiding laser, as Figure 8B As shown, the first adjustment tool 130 is detached from the fixture body 110, and the focusing monitoring system 70 is used to adjust the position of the focusing point of the guide laser. The focusing monitoring system 70 includes a focusing monitor 71 and a power meter 72. The focusing monitor 71 is a device for measuring the diameter of the light beam. The focusing monitor 71 is positioned at a location where the working distance WD (e.g., 500 mm) of the processing laser coincides with the center of the monitor. The power meter 72 is a device for measuring the output of the light beam. The power meter 72 is positioned at a predetermined location in the direction of the irradiation of the guide laser.

[0081] Operator controls the lens 35 of scanner 30 (see reference) Figure 2 By adjusting the position of the optical axis of the laser beam and the position of the focal beam, the diameter of the guiding laser beam is minimized, and the output of the guiding laser is maximized. This ensures that the focusing point of the processing laser (invisible light) coincides with the origin of the coordinate system (the processing point on the workpiece).

[0082] After adjusting the optical axis and focus point of the guiding laser, the first adjustment tool 130 is removed from the fixture body 110 mounted on the scanner 30 and replaced with the second adjustment tool 150. Then, as... Figure 10A and Figure 10B As shown, position the workpiece W in the working position. After positioning the workpiece W in the working position, loosen the fixing screw 154 of the second adjusting tool 150 (refer to...). Figure 6 This creates a state in which the movable pin 153 can move freely in the optical axis direction.

[0083] like Figure 10A As shown, when the distance Lx between the scanner 30 and the workpiece W is the same as the working distance WD (Lx = WD), the gap s of the head 153b of the movable pin 153 is zero (s = 0). On the other hand, as Figure 10B As shown, when the distance Lx between the scanner 30 and the workpiece W is shorter than the working distance WD (Lx < WD), a gap s of the same length as the shorter portion (s ≠ 0) is generated between the head 153b of the movable pin 153 and the end face 151a of the insertion portion 151. Furthermore, although not shown, when the distance Lx between the scanner 30 and the workpiece W is longer than the working distance WD, the gap s of the head 153b of the movable pin 153 is zero, but the gap s between the workpiece W and the top portion 153p of the movable pin 153 (see reference...) is... Figure 6 A gap of the same length as the longer portion is generated between the two parts. Therefore, the operator confirms the gap between the head 153b of the movable pin 153 and the gap between the workpiece W and the top end 153p of the movable pin 153 (hereinafter also referred to as "the gap between the workpiece W and the movable pin 153"). If a gap is generated, the mounting position of the scanner 30 relative to the workpiece W can be adjusted by correcting the tilt, position, etc. of the scanner 30 relative to the workpiece W.

[0084] Next, as Figure 11 As shown, the scanner 30, equipped with the adjustment fixture 100 (second adjustment tool 150), is moved along the machining axis 51 of the machining machine 50 to confirm whether the installation position of the machining axis 51 has deviated. For example, as Figure 11 As shown, when the machining axis 51 is tilted to the upper left, if the scanner 30 is moved from right to left along the machining axis 51, a deviation g of a length equivalent to the tilt of the machining axis 51 will be generated between the workpiece W and the movable pin 153.

[0085] Furthermore, although not shown in the figure, when the machining axis 51 is tilted to the lower left, if the scanner 30 is moved from right to left along the machining axis 51, the head 153b of the movable pin 153 and the end face 151a of the insertion part 151 (see reference) will be at the intersection of the head 153b of the movable pin 153 and the end face 151a of the insertion part 151. Figure 7BA gap of a length equivalent to the tilt of the machining machine axis 51 is generated between the movable pin 153 and the workpiece W. Therefore, the operator can check the gap of the head 153b of the movable pin 153 and the gap between the workpiece W and the movable pin 153. In the case of a gap, the mounting position of the scanner 30 relative to the workpiece W can be properly adjusted by correcting the tilt of the machining machine axis 51.

[0086] As explained above, according to the adjustment fixture 100 of the first embodiment, by arranging the first adjustment tool 130 on the fixture body 110 that guides the laser and processes the laser, the deviation of the optical axis of the guide laser can be visually confirmed. Furthermore, by arranging the second adjustment tool 150 on the fixture body 110, the deviation between the mounting position of the scanner 30 and the processing focus of the processing laser can be visually confirmed. Therefore, by using the adjustment fixture 100 as an auxiliary tool for adjustment work to perform the adjustment of the scanner 30, the deviation between the coordinate position of the workpiece W and the position of the processing focus of the processing laser can be adjusted more accurately.

[0087] In the adjustment fixture 100 of the first embodiment, the first adjustment tool 130 and the second adjustment tool 150 are detachably disposed on a common fixture body 110 mounted on the scanner 30. Therefore, compared with preparing an adjustment fixture that integrates the first adjustment tool 130 and the fixture body 110 into one unit, and an adjustment fixture that integrates the second adjustment tool 150 and the fixture body 110 into one unit, and replacing each adjustment fixture with the scanner 30, the error of the optical axis of the guiding laser can be minimized.

[0088] In the adjustment fixture 100 of the first embodiment, the light-transmitting surface 133a (target panel 133) of the first adjustment tool 130 has a target mark indicating the target center position (center point P) of the guide laser and the processing laser. Therefore, the operator can accurately align the optical axes of the guide laser and the processing laser with the center of the beam exit (laser exit 37) of the scanner 30.

[0089] In the adjustment fixture 100 of the first embodiment, the second adjustment tool 150 includes a movable pin 153. With the movable pin 153 positioned at the lowest point in the direction of gravity due to its own weight, the length L from the laser exit 37 to the top end 153p of the movable pin 153 is set as the focal length of the processing laser. Therefore, by checking the gap between the head 153b of the movable pin 153 and the gap between the workpiece W and the movable pin 153, the operator can more appropriately adjust the position of the scanner 30 relative to the workpiece W.

[0090] In the adjustment fixture 100 of the first embodiment, the second adjustment tool 150 includes a fixing screw 154 and an internal thread portion 156 as a fixing mechanism that can restrict the movement of the movable pin 153 in the optical axis direction. According to this structure, by tightening the fixing screw 154 clockwise to abut against the movable pin 153, the movement of the movable pin 153 in the axial direction CA2 can be restricted. Therefore, when the second adjustment tool 150 is mounted on the fixture body 110, etc., the detachment of the movable pin 153 can be prevented. Furthermore, by loosening the fixing screw 154 tightened to abut against the movable pin 153, the movable pin 153 can be made freely movable in the optical axis direction. In addition, by making the movable pin 153 freely movable in the optical axis direction, the movable pin 153 can be replaced.

[0091] In the adjustment fixture 100 of the first embodiment, the fixture body 110 has a pin confirmation window (opening) 115 that allows visual observation of the movement of the movable pin 153 of the second adjustment tool 150. Therefore, with the second adjustment tool 150 positioned on the fixture body 110, the operator can easily confirm whether the movable pin 153 has moved and the amount of movement. Furthermore, with the second adjustment tool 150 installed on the fixture body 110, the operator can tighten or loosen the fixing screw 154 by inserting the tool into the pin confirmation window 115.

[0092] (Second Implementation)

[0093] The structure of the fixture body 120 of the adjustment fixture 100A in the second embodiment differs from that in the first embodiment. In the adjustment fixture 100A of the second embodiment, the other structures are the same as in the first embodiment. Therefore, in the second embodiment, only the fixture body 120 is shown, and an overall illustration of the adjustment fixture 100A is omitted. Furthermore, in the description and drawings of the second embodiment, the same reference numerals are used for components identical to those in the first embodiment, and repeated descriptions are omitted.

[0094] Figure 12 This is a diagram illustrating the fixture body 120 of the second embodiment. Figure 13 yes Figure 12 Section II.

[0095] like Figure 12 As shown, the fixture body 120 of the second embodiment includes a first cylindrical portion 121, a second cylindrical portion 122, and a flange 112. The first cylindrical portion 121 is a hollow cylindrical member disposed in the fixture body 120 on the laser induction side. The flange 112 is joined to one end side (left side in the figure) of the first cylindrical portion 121. The structure of the flange 112 is the same as that of the first embodiment. Figure 13As shown, the first cylindrical portion 121 is provided with an internal thread portion 123 that can engage with the fixing screw 125 (described later).

[0096] The second cylindrical portion 122 is a hollow cylindrical component disposed within the fixture body 120 on the laser emission side. In the second embodiment, the fixture body 120 is used with a portion of the second cylindrical portion 122 fitted over the first cylindrical portion 121. The inner diameter and outer diameter of the second cylindrical portion 122 are set to dimensions that allow the first cylindrical portion 121 to move smoothly within the second cylindrical portion 122.

[0097] The second cylindrical portion 122 has an adjustment threaded hole 124 and a pin confirmation window 115. The adjustment threaded hole 124 is an elongated hole for inserting a fixing screw 125, opening radially and extending axially CA. The fixing screw 125 is a component used to allow or restrict the movement of the second cylindrical portion 122, which is fitted onto the first cylindrical portion 121, in the axial direction CA. Furthermore, the mechanism consisting of the internal thread portion 123, the adjustment threaded hole 124, and the fixing screw 125 can be provided at least at one location on the fixture body 120. The structure of the pin confirmation window 115 is the same as in the first embodiment.

[0098] like Figure 13 As shown, by inserting the fixing screw 125 into the adjusting threaded hole 124 of the second cylindrical portion 122 and engaging it with the internal threaded portion 123 of the first cylindrical portion 121 to secure it, the axial movement CA of the second cylindrical portion 122 relative to the first cylindrical portion 121 can be restricted. Furthermore, while the movement of the second cylindrical portion 122 is restricted by the fixing screw 125, releasing the fixing screw 125 allows the second cylindrical portion 122 to move axially CA relative to the first cylindrical portion 121.

[0099] The operator loosens the fixing screw 125, allowing the second cylindrical portion 122 to move axially towards CA, thereby adjusting the length L of the axial CA of the adjusting fixture 100A. After adjusting the length L of the axial CA of the adjusting fixture 100A to the desired size, the operator can fix the position of the axial CA of the second cylindrical portion 122 by tightening the fixing screw 125.

[0100] According to the adjustment fixture 100A of the second embodiment, the length of the fixture body 120 in the optical axis direction can be adjusted, so that even when performing processing operations with different working distances, the adjustment operation can be performed without changing the fixture body. In addition, compared with the method of changing the fixture body according to the working distance, the error of the optical axis of the guiding laser can be minimized.

[0101] (Third implementation method)

[0102] The adjustment fixture 100 of the first embodiment can also be applied to a laser processing system in which the scanner 30 is mounted on a robotic arm for operation. Figure 14 This diagram illustrates the laser processing system 1A using robot 2 and the fixed support 4. Figures 15A-15C This diagram illustrates the function of teaching the laser processing focus using the laser processing system 1A and the fixed support 4. Furthermore, in Figures 15A-15C The illustration of robot control device 3 is omitted in the text.

[0103] like Figure 14 As shown, the laser processing system 1A includes a robot 2 and a robot control unit 3. The robot 2 is a robot that processes workpieces by laser irradiation, and may be, for example, a multi-joint robot. A scanner 30 is mounted at the tip of the robot 2's arm. The robot 2, by driving servo motors (not shown) mounted on each joint axis, can move the scanner 30 in any orientation toward any position in the workspace. An adjustment fixture 100 is mounted on the scanner 30. The robot control unit 3 is a controller that controls the movements of the robot 2. The robot control unit 3 is connected to a numerical control unit (not shown) and controls the movements of the robot 2 according to robot command signals sent from the numerical control unit.

[0104] The fixed support 4 is a tool used to teach the robot 2 the machining point (coordinate origin) of the workpiece. In this embodiment, "teaching" means that regardless of the robot 2's posture, the top end 153p of the second adjustment tool 150 is adjusted to coincide with the same point (here, the pin top end 4a of the fixed support 4). Furthermore, although not shown, the first adjustment tool 130 is configured before the second adjustment tool 150 is configured on the adjustment fixture 100 to adjust the laser's optical axis and focusing point, which is the same as in the first embodiment.

[0105] When teaching the robot 2 the machining point of the workpiece, the robot 2 is controlled from three or six directions by the robot control device 3 to record the position where the top end 153p of the second adjustment tool 150 aligns with the top end of the pin of the fixed bracket 4. In the three-direction control, movement along the X, Y, and Z axes (orthogonal coordinate system) allows the focus point (machining focal point) of the scanner 30 to align with the top end of the second adjustment tool 150. Furthermore, in the six-direction control, in addition to movement along the X, Y, and Z axes, movement along the w, p, and r axes (rotational coordinate system) is also included, thereby allowing the focus point of the scanner 30 to align with the top end of the second adjustment tool 150.

[0106] Figures 15A-15CThis illustrates examples of aligning the tip of the second adjustment tool 150 with the tip of the pin on the fixed bracket 4 under different postures. In this embodiment, the operator confirms the head 153b of the movable pin 153 (see reference) under each posture. Figure 6 The gap between the pin tip of the fixed bracket 4 and the top tip 153p of the movable pin 153 (see reference). Figure 6 The gap between the two can be adjusted more appropriately to adjust the position of the scanner 30 relative to the pin tip of the fixed bracket 4, which becomes the processing point of the workpiece.

[0107] Furthermore, in a laser processing system where the scanner 30 is mounted on a robotic arm for operation, the robot 2 can be taught the workpiece's processing point (coordinate origin) by using an adjustment fixture 100 equipped with a first adjustment tool 130. Specifically, in various robot postures, the center of the target mark projected onto the target panel 133 (target mark) of the first adjustment tool 130 is captured by a camera, and the optical axis guiding the laser and the position where the focal point coincides with the processing focus of the processing laser are recorded, thereby enabling the robot 2 to be taught the workpiece's processing point.

[0108] (Deformation method)

[0109] The embodiments of this disclosure have been described above, but this disclosure is not limited to the foregoing embodiments. Various additions, substitutions, modifications, and partial deletions can be made to these embodiments without departing from the spirit of this disclosure or from the spirit of the disclosure derived from the claims and their equivalents. Furthermore, these embodiments can also be implemented in combination. For example, in the above embodiments, the order of each action and the order of each process are shown as an example and are not limited thereto.

[0110] In this embodiment, an example of holding the tools in the fixture body 110 by utilizing the friction generated between the inner peripheral surface of the tool holding portion 114 of the fixture body 110 and the outer peripheral surface of the insertion portion of each tool has been described. However, the construction that allows the tools to be freely attached and detached from the fixture body 110 is not limited to this example. For example, external and internal threads that can fit together may be formed on the inner peripheral surface of the tool holding portion 114 of the fixture body 110 and the outer peripheral surface of the insertion portion of each tool, and the tools may be freely attached and detached from the fixture body 110 by screwing in the threads. Alternatively, the tool holding portion 114 of the fixture body 110 may be freely connected to the insertion portion of each tool using fixing screws and nuts.

[0111] In this embodiment, to facilitate visual confirmation of the movement of the movable pin 153 in the optical axis direction, a portion or the entire movable pin 153 may be colored. Additionally, the pin body 152a of the movable pin 153 (see reference...) may also be colored. Figure 6The second adjustment tool 150 can be marked with graduations to measure the amount of movement of the movable pin 153. Furthermore, a contact sensor can be installed in the second adjustment tool 150 to electrically detect whether there is any gap in the movable pin 153. Similarly, a displacement sensor or similar device can be installed in the second adjustment tool 150 to electrically measure the amount of movement of the movable pin 153.

[0112] Regarding the above-described embodiments, the following notes are further disclosed.

[0113] (Note 1)

[0114] An adjustment fixture (100) for a scanner (30) capable of scanning a workpiece with a laser, comprising: a cylindrical fixture body (110) receiving a first laser and a second laser emitted from the laser emission port (37) of the scanner at one end; a first adjustment tool (130) detachably mounted on the other end of the fixture body, having a light-transmitting surface (133a) for confirming and adjusting the optical axis of the first laser emitted from the scanner; and a second adjustment tool (150) capable of being used with the workpiece. The first adjustment tool is coaxially and detachably disposed on the other end of the fixture body. It has a top end (153p) configured as a needle-shaped movable member (153) to indicate the processing focus of the second laser irradiated from the scanner. The distance from the laser outlet to the light-transmitting surface when the first adjustment tool is disposed on the fixture body and the distance from the laser outlet to the top end of the movable member when the second adjustment tool is disposed on the fixture body are set as the focal length of the processing focus of the second laser irradiated from the scanner.

[0115] (Note 2)

[0116] The light-transmitting surface (133a) of the first adjustment tool (130) has a target mark indicating the target center position of the first laser and the second laser.

[0117] (Note 3)

[0118] With the movable member (153) of the second adjustment tool (150) located at the lowest point in the direction of gravity due to its own weight, the distance from the laser outlet (37) to the top end (153p) of the movable member is set to the focal length of the processing focus of the second laser irradiated from the scanner (30).

[0119] (Note 4)

[0120] The second adjustment tool (150) has a fixing mechanism (154, 156) capable of restricting the movement of the movable member (153) in the optical axis direction.

[0121] (Note 5)

[0122] The fixture body (110) has an opening (115) that allows the movable member (8153) to move in the direction of the optical axis when the second adjustment tool (150) is configured.

[0123] (Note 6)

[0124] The fixture body (110) is configured to have an adjustable length in the direction of the optical axis.

[0125] (Note 7)

[0126] A method for adjusting a scanner, which uses an adjustment fixture (100) as described in any one of Appendices 1 to 6, wherein the method includes: a step of arranging a first adjustment tool on the fixture body mounted on the scanner and confirming and adjusting the optical axis of a first laser; a step of removing the first adjustment tool from the fixture body and adjusting the focusing point of the first laser; and a step of arranging a second adjustment tool on the fixture body mounted on the scanner, causing the top end of the movable member to abut against the workpiece, thereby adjusting the mounting position of the scanner and the processing focus of the second laser.

[0127] Explanation of reference numerals in the attached figures

[0128] 1. 1A, Laser processing system; 10, Laser source; 20, Laser control unit; 30, Scanner; 37, Laser exit point; 100, 100A, Adjustment fixture; 110, Fixture body; 115, Pin confirmation window; 130, First adjustment tool; 133a, Light-transmitting surface; 150, Second adjustment tool; 153, Movable pin; 154, Fixing screw; 154, 156, Internal thread part.

Claims

1. An adjustment fixture, which is an adjustment fixture for a scanner capable of scanning a workpiece with a laser, wherein, The fixture used for this adjustment includes: The cylindrical fixture body has a first laser and a second laser irradiated from the laser emission port of the scanner introduced into one end; The first adjustment tool, which can be detachably mounted on the other end of the fixture body, has a light-transmitting surface for confirming and adjusting the optical axis of the first laser irradiated from the scanner; The second adjustment tool, which is coaxial with the first adjustment tool and detachably mounted on the other end of the fixture body, has a needle-shaped movable member with a top portion configured to indicate the processing focus of the second laser irradiated from the scanner. The distance from the laser outlet to the light-transmitting surface when the fixture body is equipped with the first adjustment tool, and the distance from the laser outlet to the top of the movable member when the fixture body is equipped with the second adjustment tool, are set to the focal length of the processing focus of the second laser irradiated from the scanner.

2. The adjustment fixture according to claim 1, wherein, The light-transmitting surface of the first adjustment tool has a target mark indicating the target center position of the first laser and the second laser.

3. The adjustment fixture according to claim 1 or 2, wherein, With the movable component of the second adjustment tool located at the lowest point in the direction of gravity due to its own weight, the distance from the laser outlet to the top of the movable component is set to the focal length of the processing focus of the second laser irradiated from the scanner.

4. The adjustment fixture according to any one of claims 1 to 3, wherein, The second adjustment tool has a fixing mechanism capable of restricting the movement of the movable member in the direction of the optical axis.

5. The adjustment fixture according to any one of claims 1 to 4, wherein, The fixture body has an opening that allows the movable member to move in the optical axis direction when the second adjustment tool is installed.

6. The adjustment fixture according to any one of claims 1 to 5, wherein, The main body of the fixture is configured to have an adjustable length along the optical axis.

7. A method for adjusting a scanner, wherein the method uses the adjustment fixture according to any one of claims 1 to 6, wherein, The adjustment method includes: The process of configuring the first adjustment tool on the fixture body installed on the scanner, and confirming and adjusting the optical axis of the first laser; The steps of disassembling the first adjustment tool from the main body of the fixture and adjusting the focusing point of the first laser; and The second adjustment tool is configured on the fixture body mounted on the scanner so that the top end of the movable member abuts against the workpiece, thereby adjusting the mounting position of the scanner and the processing focus of the second laser.

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